Ultraviolet irradiation device

Abstract

An object of the present invention is to provide an ultraviolet irradiation device that can appropriately detect the illuminance of ultraviolet light even when a plurality of irradiation modules are provided. [Solution] An ultraviolet irradiation device according to an embodiment is an ultraviolet irradiation device that irradiates an object with ultraviolet rays. The ultraviolet irradiation device includes a first light source that irradiates a first ultraviolet ray; a second light source that is arranged adjacent to one side of the first light source in a first direction and irradiates a second ultraviolet ray; a third light source that is arranged adjacent to the other side of the first light source in the first direction and irradiates a third ultraviolet ray; and a detection unit that detects the first ultraviolet ray. A light receiving unit of the detection unit is arranged in an area within the irradiation range of the first ultraviolet ray but outside the irradiation range of the second ultraviolet ray and the irradiation range of the third ultraviolet ray.

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to an ultraviolet irradiation device. [Background technology]

[0002] For example, there is an ultraviolet irradiation device that irradiates an object with ultraviolet rays for purposes such as optical alignment treatment of liquid crystals, curing of ultraviolet curable resins, surface modification, sterilization, etc. Discharge lamps such as mercury arc lamps and xenon lamps have been used as light sources for generating ultraviolet rays. In recent years, from the viewpoints of energy saving and longer life, light-emitting elements capable of irradiating ultraviolet rays (e.g., ultraviolet light-emitting diodes) have begun to be used instead of discharge lamps.

[0003] In this case, the size of the object may be large, such as a liquid crystal panel. When the size of the object is large, a plurality of irradiation modules each having a plurality of light-emitting elements are arranged side by side. If a plurality of irradiation modules are arranged side by side, ultraviolet light can be irradiated onto a wide processing area of ​​the object at one time.

[0004] However, the illuminance of the ultraviolet light emitted from the light-emitting element decreases over time, which may result in insufficient or uneven treatment of the object, resulting in a decrease in the quality of the treatment.

[0005] In this case, for example, by providing a detection unit that detects the illuminance of ultraviolet light for each of the multiple irradiation modules and controlling the illuminance of ultraviolet light emitted from the irradiation module based on the illuminance detected by the detection unit, it is possible to prevent a decrease in the quality of processing.

[0006] However, when multiple irradiation modules are arranged side by side, simply providing a detection unit that detects the illuminance of ultraviolet light may cause ultraviolet light emitted from other irradiation modules to be incident on the detection unit provided in the irradiation module, which may prevent proper detection of the illuminance of ultraviolet light and make it impossible to prevent a deterioration in processing quality.

[0007] Therefore, there has been a demand for the development of an ultraviolet irradiation device that can appropriately detect the illuminance of ultraviolet light even when a plurality of irradiation modules are provided. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-106986 Summary of the Invention [Problem to be solved by the invention]

[0009] The problem to be solved by the present invention is to provide an ultraviolet irradiation device that can appropriately detect the illuminance of ultraviolet light even when a plurality of irradiation modules are provided. [Means for solving the problem]

[0010] An ultraviolet irradiation device according to an embodiment is an ultraviolet irradiation device that irradiates an object with ultraviolet rays. The ultraviolet irradiation device includes a first light source that irradiates a first ultraviolet ray; a second light source that is arranged adjacent to one side of the first light source in a first direction and irradiates a second ultraviolet ray; a third light source that is arranged adjacent to the other side of the first light source in the first direction and irradiates a third ultraviolet ray; and a detection unit that detects the first ultraviolet ray. A light receiving unit of the detection unit is arranged in an area within the irradiation range of the first ultraviolet ray but outside the irradiation range of the second ultraviolet ray and the irradiation range of the third ultraviolet ray. [Effects of the Invention]

[0011] According to the embodiment of the present invention, it is possible to provide an ultraviolet irradiation device that can appropriately detect the illuminance of ultraviolet light even when a plurality of irradiation modules are provided. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a schematic diagram illustrating an ultraviolet irradiation device according to an embodiment of the present invention; [Figure 2] FIG. 2 is a schematic cross-sectional view illustrating an irradiation module. [Figure 3] 3 is a schematic cross-sectional view of the irradiation module in the direction of line AA in FIG. 2. FIG. [Figure 4] 10A and 10B are schematic diagrams illustrating control of the illuminance of ultraviolet light irradiated onto a liquid crystal panel. [Figure 5] 10A and 10B are schematic diagrams illustrating the arrangement of a detection unit according to a comparative example. [Figure 6] 3A and 3B are schematic diagrams illustrating the arrangement of a detection unit according to the present embodiment. [Figure 7] 4A and 4B are schematic diagrams illustrating the relationship between the position of a light receiving portion of a detection unit and the value of a signal from the detection unit. [Figure 8] 10A and 10B are schematic views illustrating the arrangement of detection units according to another embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments will be illustrated with reference to the drawings. In the drawings, like components are designated by like reference numerals and detailed descriptions thereof will be omitted where appropriate. In addition, arrows X, Y, and Z in each figure represent three mutually orthogonal directions. For example, the X direction may be the direction in which the irradiation modules 30 extend. For example, the Y direction (corresponding to an example of a first direction) may be the direction in which the plurality of irradiation modules 30 are arranged. For example, the Z direction may be the optical axis direction of the light-emitting element 31b.

[0014] The ultraviolet irradiation device 1 according to the present embodiment can be used, for example, for optical alignment treatment of liquid crystals, curing treatment of ink containing ultraviolet curable resin, adhesive, paint, etc. However, the uses of the ultraviolet irradiation device 1 are not limited to those exemplified. Here, as an example, a case will be described in which the ultraviolet irradiation device 1 performs a photo-alignment treatment on the liquid crystal panel 200. The photo-alignment treatment can be a treatment in which, for example, ultraviolet light of a predetermined wavelength is irradiated onto the liquid crystal panel 200 containing a photoreactive polymer, causing the polymer to undergo a chemical reaction and exhibit an alignment function. In this case, the object to be treated is the liquid crystal panel 200, but in this specification, the panel before the photo-alignment treatment and the panel after the photo-alignment treatment are both referred to as the liquid crystal panel 200.

[0015] FIG. 1 is a schematic diagram illustrating an ultraviolet irradiation device 1 according to the present embodiment. As shown in FIG. 1, the ultraviolet irradiation device 1 includes, for example, a chamber 10, a mounting unit 20, an irradiation module 30, a detection unit 40, and a controller 50.

[0016] The chamber 10 is box-shaped and has a space therein for accommodating the mounting unit 20, the irradiation module 30, and the detection unit 40. The external shape of the chamber 10 is not particularly limited. For example, the external shape of the chamber 10 may be a rectangular parallelepiped. The chamber 10 may also have an airtight structure that is capable of preventing particles from entering.

[0017] Furthermore, a hole 11 for carrying in and out the liquid crystal panel 200 can be provided in a side wall or the like of the chamber 10. At least one hole 11 can be provided. The hole 11 provided in the chamber 10 can be closed airtightly with an opening / closing door 12. In the case of the chamber 10 illustrated in FIG. 1, the hole 11 and the opening / closing door 12 are provided in each of the opposing side walls. In this way, the liquid crystal panel 200 to be processed can be carried in from one side of the chamber 10, and the processed liquid crystal panel 200 can be carried out from the other side of the chamber 10. Therefore, the transport path for the liquid crystal panel 200 is linear, which makes it easy to transport the liquid crystal panel 200 using a transport robot or the like.

[0018] Furthermore, a reflector 13 that reflects the ultraviolet light irradiated from the irradiation module 30 can be provided inside the chamber 10. If the reflector 13 is provided, a portion of the ultraviolet light that has not entered the liquid crystal panel 200 can be reflected and made to enter the liquid crystal panel 200. Therefore, the utilization efficiency of the ultraviolet light irradiated from the irradiation module 30 can be improved.

[0019] The reflector 13 has a plate shape and can be provided, for example, on the inner wall of the chamber 10. The reflector 13 can be provided, for example, so as to surround the space inside the chamber 10 that is irradiated with ultraviolet light. The reflector 13 is made of a material that has a high reflectivity for the ultraviolet light irradiated from the irradiation module 30. The reflector 13 can be made, for example, of an aluminum alloy.

[0020] The mounting portion 20 can be provided, for example, at the bottom of the chamber 10. For example, the upper surface 20a of the mounting portion 20 serves as the mounting surface on which the liquid crystal panel 200 is placed. The mounting portion 20 is made of, for example, a material with high thermal conductivity. The mounting portion 20 can be made of, for example, an aluminum alloy.

[0021] Here, when irradiating the liquid crystal panel 200 with ultraviolet light, if the temperature of the liquid crystal panel 200 is maintained within a predetermined range, a polymer-stabilized blue phase, which is an optically isotropic liquid crystal layer, can be generated, and the generation of a nematic phase can be suppressed. The polymer-stabilized blue phase has a faster response than the nematic phase when a voltage is applied. Therefore, it is preferable to efficiently generate the polymer-stabilized blue phase.

[0022] Therefore, the mounting section 20 may be provided with a temperature regulator 21. The provision of the temperature regulator 21 allows the temperature of the liquid crystal panel 200 to be controlled via the mounting section 20. For example, the temperature regulator 21 may be connected to a flow path provided inside the mounting section 20. For example, the temperature regulator 21 circulates a heat medium between the mounting section 20 and the flow path provided inside the mounting section 20 and controls the temperature of the heat medium. The heat medium may be a gas or a liquid such as water. However, if the heat medium is a liquid, it becomes easier to control the temperature of the mounting section 20 and, in turn, the liquid crystal panel 200. The temperature regulator 21 may include, for example, a pump, a heating device such as a heater, a cooling device, and the like. By providing the temperature regulator 21 to control the temperature of the liquid crystal panel 200, a polymer-stabilized blue phase can be efficiently generated.

[0023] Furthermore, a temperature regulator 14 for controlling the temperature of the atmosphere inside the chamber 10 can also be provided. For example, the temperature regulator 14 can be connected to the side wall of the chamber 10. The temperature regulator 14 circulates a gas (e.g., air) between the inside of the chamber 10 and controls the temperature of the gas. The temperature regulator 14 can include, for example, an air blower, a heating device such as a heater, and a cooling device. Controlling the temperature of the atmosphere inside the chamber 10 with the temperature regulator 14 allows for more efficient production of the polymer-stabilized blue phase.

[0024] Note that the temperature conditions and the irradiation conditions (e.g., illuminance, irradiation time, etc.) of the ultraviolet light emitted from the irradiation module 30 when generating the polymer-stabilized blue phase can be determined by applying known techniques, and therefore detailed explanations are omitted.

[0025] As shown in FIG. 1 , a plurality of irradiation modules 30 may be provided. The irradiation modules 30 may be provided, for example, near the ceiling of the chamber 10. The ultraviolet ray emission sides of the irradiation modules 30 face the upper surface 20a of the mounting unit 20. The irradiation modules 30 may be arranged, for example, at predetermined intervals in the Y direction. The number and intervals of the irradiation modules 30 may be appropriately changed depending on the size of the liquid crystal panel 200, the light distribution angle of the light-emitting element 31b (described later), and the like. The distance in the Z direction between the irradiation modules 30 and the upper surface 20a of the mounting unit 20 may be appropriately changed depending on the light emission output of the light-emitting element 31b. The number and intervals of the irradiation modules 30, and the distance between the irradiation modules 30 and the upper surface 20a of the mounting unit 20 may be adjusted so that ultraviolet rays are incident on the entire processing area of ​​the liquid crystal panel 200 and a predetermined irradiation intensity is ensured.

[0026] Furthermore, when the size of the liquid crystal panel 200 is large, it is possible to provide a plurality of irradiation modules 30 aligned in the Y direction and a plurality of irradiation modules 30 aligned in the X direction. In this way, it is possible to prevent the dimension of the irradiation module 30 in the X direction from becoming too long, and in turn to prevent the number of light-emitting elements 31b connected in series from becoming too large.

[0027] FIG. 2 is a schematic cross-sectional view illustrating the irradiation module 30. As shown in FIG. FIG. 3 is a schematic cross-sectional view of the irradiation module 30 in FIG. 2 taken along the line AA. As shown in FIGS. 2 and 3, the irradiation module 30 extends, for example, in the X direction. The illumination module 30 includes, for example, a light source 31 (which corresponds to an example of a first light source, a second light source, and a third light source) and a base 32.

[0028] The light source 31 emits ultraviolet light of a predetermined wavelength (corresponding to an example of the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light). The light source 31 includes, for example, a substrate 31a and a plurality of light-emitting elements 31b. The substrate 31a has a plate shape and extends in the X direction. The planar shape of the substrate 31a may be, for example, rectangular. The substrate 31a may be attached to the surface 32a of the base 32 using a fastening member such as a screw.

[0029] A wiring pattern can be provided on the surface of the substrate 31a opposite to the base 32 side. A plurality of light-emitting elements 31b can be mounted on the wiring pattern. The plurality of light-emitting elements 31b can be connected in series by the wiring pattern. A pair of connection terminals can be provided on the wiring pattern. The pair of connection terminals can be electrically connected to the controller 50 via wiring.

[0030] A protective film can also be provided to cover the wiring pattern. In this case, a white protective film (e.g., white resist) or a protective film containing light-scattering particles such as titanium oxide can be used. In this way, the protective film can function as a reflective film.

[0031] The material of the substrate 31a is preferably one that is resistant to ultraviolet rays and has high thermal conductivity. The material of the substrate 31a can be, for example, ceramics such as aluminum oxide. The substrate 31a can also be a metal core substrate in which the surface of a metal plate is covered with an insulating material. If the material of the substrate 31a is ceramics or a metal core substrate, it can achieve resistance to ultraviolet rays and high heat dissipation.

[0032] The plurality of light-emitting elements 31b can be provided on the surface of the substrate 31a opposite to the base 32 side. The plurality of light-emitting elements 31b can be arranged side by side in the X direction. In this case, the pitch dimension of the plurality of light-emitting elements 31b can be made approximately constant. If the pitch dimension of the light-emitting elements 31b is approximately constant, it is possible to prevent uneven illumination in the processing region of the liquid crystal panel 200.

[0033] The light emitting element 31b is not particularly limited as long as it is an element capable of emitting ultraviolet light having a predetermined wavelength, and may be, for example, a light emitting diode or a laser diode capable of emitting ultraviolet light.

[0034] For example, the light emitting element 31b can be capable of irradiating ultraviolet light of about 300 nm to 400 nm. For example, the light emitting element 31b can be an ultraviolet light having a peak wavelength of about 365 nm and an illuminance of 15 mW / cm. 2 The light-emitting element 31b can be configured to emit ultraviolet light of about 1000 nm. The light-emitting element 31b can also be configured to emit ultraviolet light and light with a longer wavelength than ultraviolet light. However, since ultraviolet light is used in the photo-alignment treatment, it is preferable to use light-emitting element 31b that can emit only ultraviolet light having a predetermined wavelength.

[0035] The light emitting element 31b may be, for example, a surface-mounted light emitting element such as a PLCC (Plastic Leaded Chip Carrier) type, a light emitting element having leads such as a bullet type, or a chip-shaped light emitting element. The light emitting element 31b illustrated in Figures 2 and 3 is a surface-mounted light emitting element.

[0036] The base 32 has, for example, a function of holding the light source 31 and a function of cooling the light source 31. The base 32 is block-shaped and made of metal with high thermal conductivity. The base 32 is made of, for example, an aluminum alloy.

[0037] When a current flows through the light-emitting elements 31b, the light-emitting elements 31b emit ultraviolet light and generate heat. If the generated heat causes the temperature of the light-emitting elements 31b to exceed the maximum junction temperature, the light-emitting elements 31b may break down, their lifespan may be shortened, or the illuminance of the ultraviolet light may decrease.

[0038] 2 and 3, a flow path 32b for flowing the heat medium is provided inside the base 32. The flow path 32b extends, for example, in the X direction. In this case, the central axis of the flow path 32b can be set on an extension of the optical axis of the light-emitting element 31b. In this way, the distance between the light-emitting element 31b and the flow path 32b can be shortened, making it easier to cool the light-emitting element 31b. In addition, uneven cooling of the multiple light-emitting elements 31b can be suppressed.

[0039] A pair of pipe joints 32c may be provided on the base 32. In this case, one pipe joint 32c may be connected to the vicinity of one end of the flow path 32b in the X direction, and the other pipe joint 32c may be connected to the vicinity of the other end of the flow path 32b in the X direction.

[0040] 1, the pair of pipe joints 32c are connected to a cooling device 33 via pipes. The cooling device 33 circulates a heat medium between the base 32 and a flow path 32b provided in the base 32 and cools the heat medium. The heat medium may be a gas or a liquid such as water. However, if the heat medium is a liquid, it becomes easier to cool the base 32 and, therefore, to prevent the temperature of the light-emitting element 31b from exceeding the maximum junction temperature. The base 32 may also be provided with heat dissipation fins or the like.

[0041] Here, the illuminance of the ultraviolet light emitted from the light-emitting element 31b decreases over time. This decrease in the illuminance of the ultraviolet light may result in insufficient or uneven photo-alignment. For example, if the illuminance of the ultraviolet light emitted by each of the multiple irradiation modules 30 decreases over time, the generation of the polymer-stabilized blue phase described above may be insufficient or the in-plane distribution of the polymer-stabilized blue phase may vary significantly.

[0042] Therefore, the ultraviolet irradiation device 1 is provided with a detection unit 40 that detects the illuminance of ultraviolet light irradiated from the irradiation module 30. The detection unit 40 can be electrically connected to the controller 50, for example, via wiring. The detection unit 40 outputs a voltage or current corresponding to the illuminance of the detected ultraviolet light as an analog signal.

[0043] As described above, a plurality of light-emitting elements 31b are connected in series in one light source 31. When a plurality of light-emitting elements 31b are connected in series, the same value of current flows through each of the plurality of light-emitting elements 31b, and therefore the illuminance of ultraviolet light emitted from each of the plurality of light-emitting elements 31b becomes approximately the same. Therefore, at least one detection unit 40 can be provided for one light source 31.

[0044] The controller 50 may have, for example, a processing element such as a CPU (Central Processing Unit) and a storage element such as a semiconductor memory. The controller 50 may be, for example, a computer. The storage element may store a control program that controls the operation of each element provided in the ultraviolet irradiation device 1 and data such as an illuminance threshold value, which will be described later. The processing element controls the operation of each element provided in the ultraviolet irradiation device 1 using the control program stored in the storage element, data such as an illuminance threshold value, data input by an operator, and the like.

[0045] For example, the controller 50 controls the temperature control device 14 based on a signal from a temperature sensor installed in the internal space of the chamber 10 so that the temperature of the atmosphere inside the chamber 10, and ultimately the temperature of the liquid crystal panel 200 installed inside the chamber 10, is within a predetermined range.

[0046] For example, the controller 50 controls the temperature control device 21 based on a signal from a temperature sensor provided on the mounting portion 20 so that the temperature of the mounting portion 20, and ultimately the temperature of the liquid crystal panel 200 placed on the mounting portion 20, is within a predetermined range.

[0047] For example, the controller 50 controls the power applied to the light source 31 based on a signal from the detection unit 40 so that the illuminance of the ultraviolet light irradiated onto the liquid crystal panel 200 falls within a predetermined range.

[0048] FIG. 4 is a schematic diagram illustrating the control of the illuminance of ultraviolet light irradiated onto the liquid crystal panel 200. In FIG. As described above, the illuminance of the ultraviolet light emitted from the light-emitting element 31b decreases over time. For example, as shown in the upper diagram of Figure 4, the illuminance of the ultraviolet light emitted from the light-emitting element 31b decreases over time.

[0049] When the controller 50 determines, based on the signal from the detection unit 40, that the illuminance of the detected ultraviolet light is equal to or less than a predetermined lower threshold, it increases the power applied to the light-emitting element 31b, as shown in the lower diagram of Figure 4. As the power applied to the light-emitting element 31b increases, the illuminance of the ultraviolet light emitted from the light-emitting element 31b increases. At this time, the controller 50 controls the illuminance of the ultraviolet light emitted from the light-emitting element 31b so that it is equal to or greater than a predetermined lower threshold and equal to or less than an upper threshold.

[0050] When the controller 50 determines that the illuminance of the detected ultraviolet light has again fallen below the lower threshold over time, as shown in the upper diagram of Figure 4, it further increases the power applied to the light-emitting element 31b, as shown in the lower diagram of Figure 4.

[0051] In addition, if the controller 50 determines that the illuminance of the detected ultraviolet light is below a predetermined lower limit value or above a predetermined upper limit value, it can, for example, issue an abnormality alarm or stop the operation of the ultraviolet light irradiation device 1.

[0052] As described above, if the controller 50 controls the power applied to the light-emitting element 31b based on a signal from the detection unit 40, the illuminance of the ultraviolet light irradiated on the liquid crystal panel 200 can be kept within a predetermined range (above a lower limit and below an upper limit). Note that the specific lower limit, lower threshold, upper threshold, and upper limit of the illuminance can be set appropriately depending on, for example, the components and composition of the polymer contained in the liquid crystal panel 200, the specifications of the light-emitting element 31b, etc. The specific lower limit, lower threshold, upper threshold, and upper limit of the illuminance can be determined appropriately by, for example, conducting experiments or simulations.

[0053] As described above, if the detection unit 40 is provided, the illuminance of the ultraviolet light irradiated onto the liquid crystal panel 200 can be controlled to be within a predetermined range, thereby facilitating the production of the polymer-stabilized blue phase described above and reducing the variation in the in-plane distribution of the polymer-stabilized blue phase.

[0054] However, simply providing the detection unit 40 may result in inability to properly detect the illuminance of ultraviolet light.

[0055] FIG. 5 is a schematic diagram illustrating the arrangement of the detection unit 40 according to the comparative example. As shown in FIG. 5, when multiple irradiation modules 30 (light sources 31) are arranged side by side, simply providing a detection unit 40 may result in ultraviolet light emitted from the irradiation module 30 (light source 31) to be detected and ultraviolet light emitted from other irradiation modules 30 (light sources 31) entering the light-receiving unit 40a of the detection unit 40. If unintended ultraviolet light enters the light-receiving unit 40a of the detection unit 40, it becomes impossible to properly detect the illuminance of ultraviolet light emitted from the irradiation module 30 (light source 31) to be detected. If the illuminance of ultraviolet light cannot be properly detected, problems such as increased variation in the in-plane distribution of the polymer-stabilized blue phase may occur.

[0056] FIG. 6 is a schematic diagram illustrating the arrangement of the detection unit 40 according to this embodiment. 6, if the light-receiving unit 40a of the detection unit 40 is provided in a region within the ultraviolet irradiation range of the irradiation module 30 (light source 31) to be detected but outside the ultraviolet irradiation range of the other irradiation modules 30 (light sources 31), it is possible to prevent ultraviolet light from unintentionally entering the light-receiving unit 40a of the detection unit 40. Therefore, the illuminance of the ultraviolet light to be detected can be detected with high accuracy, which makes it possible to prevent problems such as an increase in the variation in the in-plane distribution of the polymer-stabilized blue phase from occurring, and ultimately improves the quality of the liquid crystal panel 200.

[0057] In this case, as shown in Fig. 6, the shape of a region 30a that is within the ultraviolet irradiation range of the irradiation module 30 (light source 31) to be detected but outside the ultraviolet irradiation range of the other irradiation modules 30 (light sources 31) is rhombic. In this case, a corner (corresponding to an example of a first corner) of the rhombic region 30a on the side of the light-emitting element 31b is located at the center of the light-emitting surface of the light-emitting element 31b, and the interior angle θ of the corner is equal to the light distribution angle of the light-emitting element 31b. The length of a side of the rhombic region 30a can be calculated from the light distribution angle (interior angle θ) of the light-emitting element 31b and the center-to-center distance in the Y direction of the light-emitting surface of the light-emitting element 31b.

[0058] FIG. 7 is a schematic diagram illustrating the relationship between the position of the light receiving portion 40a of the detecting portion 40 and the value of the signal from the detecting portion 40. In FIG. Note that B in FIG. 7 is a case where ultraviolet light is emitted only from the irradiation module 30 (light source 31) that is the object of detection. Moreover, C in FIG. 7 is a case where ultraviolet light is emitted from the irradiation module 30 (light source 31) to be detected and two irradiation modules 30 (light sources 31) provided on both sides of it.

[0059] 7, when the light receiving unit 40a of the detection unit 40 is located at the position shown in FIG. 5, C and B are separated. This means that the illuminance of the ultraviolet light emitted from the irradiation module 30 (light source 31) to be detected cannot be properly detected.

[0060] 6, C and B coincide with each other. This means that the illuminance of the ultraviolet light emitted from the irradiation module 30 (light source 31) to be detected can be appropriately detected.

[0061] Therefore, in the ultraviolet irradiation device 1 according to this embodiment, the light receiving unit 40a of the detection unit 40 is provided at a position that is within the ultraviolet irradiation range of the irradiation module 30 (light source 31) to be detected, but outside the ultraviolet irradiation range of the other irradiation modules 30 (light source 31).

[0062] In this case, if the detection unit 40 is provided in the diamond-shaped region 30a, the ultraviolet light is blocked by the detection unit 40. Therefore, the amount of ultraviolet light irradiated onto the liquid crystal panel 200 is reduced accordingly.

[0063] 6, it is preferable that the light receiving section 40a of the detection section 40 is provided in an area closer to the light emitting element 31b than a line segment 30a1 (diagonal line) connecting a corner (corresponding to an example of a second corner) adjacent to one side of the corner of the diamond-shaped area 30a on the light emitting element 31b side and a corner (corresponding to an example of a third corner) adjacent to the other side of the corner on the light emitting element 31b side. In this way, it is possible to reduce the amount of ultraviolet light blocked by the detection section 40, and therefore it is possible to prevent a decrease in the amount of ultraviolet light irradiated onto the liquid crystal panel 200.

[0064] 1, a reflector 13 may be provided inside the chamber 10. A portion of the ultraviolet light reflected by the reflector 13 may be incident on the liquid crystal panel 200 and may also be incident on the light receiving unit 40a of the detection unit 40. Furthermore, a portion of the ultraviolet light incident on the liquid crystal panel 200 may be reflected by the liquid crystal panel 200 and incident on the light receiving unit 40a of the detection unit 40. If such reflected ultraviolet light is incident on the light receiving unit 40a of the detection unit 40, there is a risk that an error in the illuminance of the ultraviolet light detected by the detection unit 40 will increase.

[0065] FIG. 8 is a schematic view illustrating the arrangement of the detection unit 40 according to another embodiment. 8, the detection unit 40 can be tilted with respect to the optical axis of the light-emitting element 31b. For example, the angle α between the detection unit 40 and the Z direction can be set to approximately 30° to 45°. In this way, reflected ultraviolet light is less likely to be incident on the light-receiving unit 40a of the detection unit 40, and errors in the illuminance of ultraviolet light detected by the detection unit 40 can be almost eliminated.

[0066] In the above, the detection unit 40 is exemplified as including a sensor head, a circuit unit, and an optical fiber provided between the sensor head and the circuit unit, but the detection unit may be one in which ultraviolet light directly enters the circuit unit. However, if the detection unit 40 is provided with a sensor head, a circuit unit, and an optical fiber, a small sensor head can be provided in the diamond-shaped region 30a, and therefore the amount of ultraviolet light that is blocked can be reduced.

[0067] Although the example has been given in which the light receiving unit 40a is provided on the side surface of the sensor head, the light receiving unit 40a may be provided on the end of the sensor head facing the optical fiber. However, if the light receiving unit 40a is provided on the side surface of the sensor head, it becomes difficult for reflected ultraviolet light to enter the light receiving unit 40a.

[0068] Furthermore, the detection unit 40 can be configured to directly detect the illuminance of ultraviolet light, or to convert ultraviolet light into visible light using a phosphor and indirectly detect the illuminance of ultraviolet light from the illuminance of visible light.

[0069] Although several embodiments of the present invention have been described above, these embodiments are presented by way of example only and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims. Furthermore, the above-described embodiments can be implemented in combination with each other. [Explanation of symbols]

[0070] 1 ultraviolet irradiation device, 10 chamber, 20 placement portion, 30 irradiation module, 30a area, 30a1 line segment, 31 light source, 31b light emitting element, 40 detection portion, 40a light receiving portion, 50 controller, 200 liquid crystal panel

Claims

1. An ultraviolet irradiation device that irradiates an object with ultraviolet rays, a first light source that irradiates a first ultraviolet ray; a second light source that is arranged next to one side of the first light source in the first direction and that irradiates second ultraviolet light; a third light source that is arranged next to the first light source on the other side in the first direction and that irradiates third ultraviolet light; a detection unit that detects the first ultraviolet light; Equipped with An ultraviolet irradiation device in which the light receiving section of the detection section is provided in an area within the irradiation range of the first ultraviolet light, but outside the irradiation range of the second ultraviolet light, and outside the irradiation range of the third ultraviolet light.

2. the first light source includes a light-emitting element that irradiates the first ultraviolet light, The shape of the region is a rhombus, 2. The ultraviolet irradiation device according to claim 1, wherein a first corner of the diamond-shaped region is located at the center of the light-emitting surface of the light-emitting element, and an interior angle of the first corner is equal to a light distribution angle of the light-emitting element.

3. 3. The ultraviolet irradiation device according to claim 2, wherein the detection unit is tilted with respect to the optical axis of the light emitting element.

4. 4. The ultraviolet irradiation device according to claim 2 or 3, wherein the light receiving portion of the detection unit is provided in a region closer to the light emitting element than a line segment connecting a second corner of the diamond-shaped region adjacent to one side of the first corner and a third corner of the diamond-shaped region adjacent to the other side of the first corner.

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