Heat treatment apparatus and heat treatment method

Abstract

To cool a workpiece without providing a complicated configuration during the period when the workpiece is moving in a heat treatment device in which the workpiece is moved by a rotary table. [Solution] The heat treatment device includes a rotary table for transporting a workpiece, a heating unit for heating the workpiece, a first cooling jacket for spraying a cooling liquid onto the workpiece at the first position on the rotary table, a second cooling jacket arranged along a transport path of the workpiece transported by the rotary table between the first position and a second position different from the first position and for spraying a cooling liquid onto the workpiece, and a third cooling jacket for spraying a cooling liquid onto the workpiece at the second position.

Description

[Technical Field]

[0001] The present invention relates to a heat treatment apparatus and a heat treatment method. [Background technology]

[0002] Heat treatment apparatuses are known that perform heat treatment on a workpiece placed on a rotary table while moving it in a circumferential direction. To shorten the overall heat treatment time, there is a growing demand for a system that sprays a coolant onto the workpiece while the workpiece is being moved. In response to this demand, Patent Document 1 describes a heat treatment apparatus in which a cooling jacket that cools the workpiece moves in a circumferential direction, thereby continuously cooling the workpiece even while the rotary table is rotating and the workpiece is moving. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-31486 Summary of the Invention [Problem to be solved by the invention]

[0004] In the case of the device described in Patent Document 1, the cooling jacket needs to move in the circumferential direction to continue cooling as the workpiece placed on the rotary table moves. For this reason, the device is equipped with a complex mechanism including a rotary joint and multiple water supply pipes to supply coolant to the cooling jacket, which moves in the circumferential direction. The rotary joint is a connecting member that connects the fixed piping and the rotating water supply member.

[0005] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a heat treatment apparatus in which a workpiece is moved by a rotary table, and which is capable of cooling the workpiece while the workpiece is moving without providing a complex mechanism. [Means for solving the problem]

[0006] A heat treatment apparatus according to one embodiment of the present disclosure includes a rotary table for transporting a workpiece, a heating unit for heating the workpiece, a first cooling jacket for spraying a cooling liquid onto the workpiece at a first position on the rotary table, a second cooling jacket arranged along a transport path of the workpiece transported by the rotary table between the first position and a second position different from the first position and for spraying a cooling liquid onto the workpiece, and a third cooling jacket for spraying a cooling liquid onto the workpiece at the second position.

[0007] Furthermore, a heat treatment method according to one embodiment of the present disclosure is a method of heat treating a workpiece while transporting it using a rotary table, and includes the steps of heating the workpiece at a first position, spraying a coolant onto the workpiece at the first position, spraying the coolant onto the workpiece while transporting it from the first position to a second position different from the first position, and spraying the coolant onto the workpiece while it is at the second position. [Effects of the Invention]

[0008] According to the present disclosure, in a heat treatment apparatus in which a workpiece is transported by a rotary table, the workpiece can be cooled even during the period in which the workpiece is transported without providing a complex mechanism. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic view showing an overview of the entire heat treatment apparatus according to this embodiment. [Figure 2] FIG. 2 is a schematic view showing an overview of each component of the heat treatment apparatus according to this embodiment. [Figure 3A] FIG. 3A is a side view showing an overview of the first cooling jacket. [Figure 3B] FIG. 3B is a front view showing an overview of the first cooling jacket. [Figure 4] FIG. 4 is an enlarged top view of the first cooling jacket and its vicinity taken along the line AA in FIG. [Figure 5] FIG. 5 is a flow diagram showing the operation flow of the heat treatment apparatus of this embodiment. [Figure 6] FIG. 6 is an explanatory diagram illustrating the operation of the heat treatment device for heat treating workpieces in a pipeline manner. [Figure 7] FIG. 7 is a partially enlarged view of the rotation mechanism of the second embodiment. [Figure 8] FIG. 8 is a partial enlarged view of the rotation mechanism of the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] [Details of the embodiments of the present disclosure] Hereinafter, the first embodiment of the present disclosure will be described in detail with reference to the drawings.

[0011] 1. Embodiment 1 1-1. Configuration of Heat Treatment Device FIG. 1 is a schematic diagram showing the overall appearance of a heat treatment apparatus according to this embodiment. FIG. 2 is a schematic diagram showing the respective components of the heat treatment apparatus according to this embodiment. The configuration of the heat treatment apparatus 1 will be described with reference to FIGS. 1 and 2. The heat treatment apparatus 1 is a heat treatment apparatus that performs heat treatment such as quenching on a workpiece W. The workpiece W is, for example, the outer or inner ring of a rolling bearing. The heat treatment apparatus 1 includes a turntable 3, a heating unit 4, a first cooling jacket 5, a second cooling jacket 6, and a third cooling jacket 7. The heat treatment apparatus 1 further includes a housing 2 that covers the turntable 3, the heating unit 4, the first cooling jacket 5, the second cooling jacket 6, and the third cooling jacket 7. The heat treatment apparatus 1 may also be equipped with, for example, a transport device 8. The transport device 8 is a device that transports the workpiece W from the previous process to the heat treatment apparatus 1 and from the heat treatment apparatus 1 to the next process. The heat treatment apparatus 1 may also include a position confirmation device 9 that confirms the position of the workpiece W on the turntable 3. Each component will now be described.

[0012] <Rotary table> The turntable 3 is a device that transfers the workpiece W in a circumferential direction. The turntable 3 includes, for example, a top plate 3a and a drive unit 3b. The top plate 3a is a circular plate on which the workpiece W is placed. The material of the top plate 3a is selected to be a material that can withstand the high temperatures of the heat treatment in the heat treatment device 1 and has corrosion resistance that is not affected by the coolant used to cool the workpiece W, such as stainless steel.

[0013] The top plate 3a is driven and rotated by a drive device 3b. The drive device 3b includes, for example, a motor that drives the top plate 3a and a control device that controls the motor. A reduction gear may be interposed between the top plate 3a and the motor. The control device can stop the workpiece W placed on the top plate 3a at a first position P1, transfer it from the first position P1 to a second position P2, and stop it at the second position P2 by intermittently rotating and stopping the motor. The first position P1 is a position where the workpiece W is heated and cooled. The second position P2 is a position where the workpiece W is further cooled. The workpiece W also stops at a confirmation position P0 and a load / unload position P3. The confirmation position P0 is a position where the position of the workpiece W on the top plate 3a is confirmed. The load / unload position P3 is a position where the workpiece W to be heat-treated is loaded and where the heat-treated workpiece W is unloaded. The check position P0, the first position P1, the second position P2, and the loading / unloading position P3 are located at equal intervals along the circumferential direction of the top board 3a.

[0014] <Heating unit> The heating unit 4 heats the workpiece W located in the first position. The workpiece W is heated, for example, by high-frequency heating. In high-frequency heating, a high-frequency current is passed through a coil to heat the workpiece W. When a magnetic flux generated by the high-frequency current passes through the coil, eddy currents are induced in the workpiece W, and the induced eddy currents heat the workpiece W. If the workpiece W is, for example, a rolling bearing and the inner ring raceway surface is to be hardened, the heating unit 4 positions the coil so that it surrounds the inner ring raceway surface. Furthermore, if the outer ring raceway surface is to be hardened, the heating unit 4 positions the coil inside the outer ring. The heating unit 4 may be configured to be able to move the coil vertically relative to the top plate to position it. Heating is not limited to high-frequency heating and may be, for example, heater heating. If the heating unit 4 is configured to be able to move away from the top plate 3a, the coil can be retracted so as not to interfere with the transfer of the workpiece W along the transfer path 10 by the turntable 3.

[0015] The heating unit 4 may also be provided at the second position P2. In this case, the heating unit 4 can further perform heat treatment such as quenching on the workpiece W at the second position P2. For example, depending on the shape of the workpiece W, quenching may be performed as a confirmation.

[0016] <First cooling jacket> The first cooling jacket 5 sprays a coolant onto the workpiece W at the first position P1. The coolant is, for example, water. The coolant rapidly reduces the temperature of the workpiece W. The rapid reduction in the temperature of the workpiece W causes the workpiece W to be hardened. The hardness of the workpiece W is increased by being hardened.

[0017] Fig. 3A is a side view showing an overview of the first cooling jacket 5. Fig. 3B is a front view showing an overview of the first cooling jacket 5. The first cooling jacket 5 has a main body 21 that stores the cooling liquid. The main body 21 has a connection port 22 that receives the cooling liquid and an ejection hole 23 that ejects the cooling liquid toward the workpiece W. A first end of a pipe 24 that sends the cooling liquid is connected to the connection port, and a second end is connected to a cooling liquid supply device 25 that supplies the cooling liquid.

[0018] The first cooling jacket 5 may be provided on at least one of the inner and outer circumferential sides of the transfer path 10. This avoids the risk of the workpiece W coming into contact with the first cooling jacket 5. In other words, when the first cooling jacket 5 is provided on the inner or outer circumferential side of the transfer path 10, the transfer path 10 does not overlap with the first cooling jacket 5, so the workpiece W transferred along the transfer path 10 can pass through a position away from the first cooling jacket 5. Therefore, without providing a complex mechanism, the risk of the workpiece W coming into contact with the first cooling jacket 5 is avoided. In the example shown in FIG. 2, one first cooling jacket 5 is provided on the inner circumferential side of the transfer path 10 and two first cooling jackets 5 are provided on the outer circumferential side.

[0019] On the other hand, if the first cooling jacket 5 is provided at a position other than the inner or outer periphery of the transfer path 10, the transfer path 10 may overlap with the first cooling jacket 5, hindering the transfer of the workpiece W to the first position P1. In such a case, a configuration is added to the first cooling jacket that allows it to move in the vertical direction of the top plate 3a. With this configuration, when the workpiece W is transferred to the first position P1, the first cooling jacket 5 moves in a direction away from the top plate 3a. This prevents contact between the workpiece W and the first cooling jacket 5.

[0020] The first cooling jacket 5 is provided on at least one of the inner and outer periphery sides of the transfer path 10, but may be provided on both the inner and outer periphery sides. This allows a larger amount of cooling liquid to be sprayed onto the workpiece W, thereby reducing the temperature in a shorter time than if the cooling liquid were provided on only one side. This also reduces unevenness in the temperature distribution of the workpiece W.

[0021] 4 is an enlarged top view of the first cooling jacket 5 and its vicinity in region AA of FIG. 2. The first cooling jacket 5 may also be provided at positions along the circumferential direction of a circle 31 whose center is the position where the workpiece W is located when the coolant is sprayed. In the case of FIG. 4, the first cooling jacket 5 is provided at positions equally spaced every 120 degrees in the circumferential direction on the circle 31 whose center is the position where the workpiece W is located. As a result, the coolant is sprayed onto the workpiece W from positions along the circumferential direction of the circle, thereby reducing unevenness in the temperature distribution of the workpiece W.

[0022] <Second cooling jacket> Returning to FIG. 2, the second cooling jacket 6 will be described. The second cooling jacket 6 is provided along the transfer path 10 of the workpiece W transferred by the rotary table 3, between a first position P1 and a second position P2 different from the first position P1, and sprays a cooling liquid onto the workpiece W. The second cooling jacket 6 allows the workpiece W to be continuously cooled by the cooling liquid while being transferred from the first position to the second position. The shape and configuration of the second cooling jacket 6 are the same as those of the first cooling jacket 5, for example, but may also be different in shape and configuration.

[0023] The second cooling jacket 6 may be provided on the inner or outer periphery of the transfer path 10, or on both the inner and outer periphery. When the second cooling jacket 6 is provided on both the inner and outer periphery of the transfer path 10, the coolant is sprayed from both sides of the workpiece W being transferred along the transfer path 10 during the transfer period. As a result, more coolant is sprayed onto the workpiece W, so the heat treatment device 1 of the present disclosure can cool the workpiece W more quickly. Furthermore, because the coolant is sprayed from both sides of the workpiece W, unevenness in the temperature distribution of the workpiece W is reduced. In the example shown in FIG. 2, one second cooling jacket 6 is provided on the inner periphery of the transfer path 10, and two are provided on the outer periphery.

[0024] <Third cooling jacket> The third cooling jacket 7 sprays coolant onto the workpiece W at the second position P2 (auxiliary cooling) to further cool the workpiece W in order to prevent uneven hardening. The third cooling jacket 7 is provided on at least one of the inner and outer periphery sides of the transfer path 10. In the example shown in FIG. 2, one third cooling jacket 7 is provided on the inner periphery side and one third cooling jacket 7 is provided on the outer periphery side of the transfer path 10. The shape and configuration of the third cooling jacket 7 are the same as, for example, the first cooling jacket 5, but may have a different shape and configuration. Furthermore, the third cooling jackets 7 may be provided at equally spaced positions along the circumferential direction of a circle whose center is the position where the workpiece W is located when the coolant is sprayed.

[0025] <Conveyor equipment> A transport device 8 may be provided near the heat treatment device 1. The transport device 8 transports the workpiece W from the previous process to the heat treatment device 1, carries it in and out of the heat treatment device 1, and transports it from the heat treatment device 1 to the next process. The transport device 8 includes, for example, a first conveyor 11, a second conveyor 12, and a carry-in / carry-out device 13. The first conveyor 11 transports the workpiece W from the previous process to the heat treatment device 1. The second conveyor 12 transports the workpiece W from the heat treatment device 1 to the next process. The carry-in / carry-out device 13 grasps the workpiece W transported by the first conveyor 11, carries it into the heat treatment device 1, and places it at the carry-in / carry-out position P3 on the top plate 3a. The carry-in / carry-out device 13 also grasps the workpiece W on the top plate 3a that has returned to the carry-in / carry-out position P3, carries it out of the heat treatment device 1, and places it on the second conveyor 12.

[0026] <Location confirmation device> The heat treatment apparatus 1 may include a position confirmation device 9. The position confirmation device 9 confirms the position of the workpiece W on the top plate 3a and the posture of the workpiece W at the confirmation position P0. This is to avoid contact with the heating unit 4, the first cooling jacket 5, the second cooling jacket 6, and the third cooling jacket 7 if the workpiece W stops at a position away from the predetermined position. The position confirmation device 9 may further include a correction device (not shown) that corrects the position of the workpiece W. The position confirmation device acquires an image of the surroundings of the workpiece W at the confirmation position P0 using, for example, a camera including a CMOS image sensor, and confirms the position of the workpiece W from the acquired image.

[0027] 1-2. Operation of the Heat Treatment Device 5 is a flow chart showing the operation flow of the heat treatment apparatus 1 of this embodiment. The operation of the heat treatment apparatus 1 will be described with reference to FIG.

[0028] <Step S01> First, the workpiece W is carried into the heat treatment apparatus 1 by the transport device 8 (step S01). Specifically, the first conveyor 11 transports the workpiece W from the previous process to the vicinity of the heat treatment apparatus 1. The transported workpiece W is grasped by the carry-in / carry-out device 13, transported to the carry-in / carry-out position P3 within the heat treatment apparatus 1, and placed on the top plate 3a. Then, the turntable 3 transports the workpiece W from the carry-in / carry-out position P3 to the confirmation position P0 and stops. After transporting the workpiece W to the confirmation position P0, the heat treatment apparatus 1 proceeds to step S02.

[0029] <Step S02> Next, the heat treatment apparatus 1 uses the position confirmation device 9 to confirm the position of the workpiece W on the top plate 3a that has been transferred to the confirmation position P0 (step S02). After the position confirmation device 9 confirms the position of the workpiece W, the turntable 3 transfers the workpiece W from the confirmation position P0 to the first position P1 and stops. After transferring the workpiece W to the first position, the heat treatment apparatus 1 proceeds to step S03.

[0030] <Step S03> Next, the heat treatment apparatus 1 heats the workpiece W, which has been transferred by the turntable 3 and is in the first position, using the heating unit 4 (step S03). The heating unit 4 heats the workpiece W in advance in order to rapidly cool and harden the workpiece W in the next step S04. The workpiece W is heated, for example, by high-frequency heating. After the area to be heated has risen to a predetermined temperature, the heating unit 4 stops the high-frequency current, and the heat treatment apparatus 1 proceeds to step S04.

[0031] <Step S04> Next, the heat treatment device 1 sprays cooling liquid onto the workpiece W at the first position P1 using the first cooling jacket 5 (step S04). The sprayed cooling liquid falls onto the workpiece W and rapidly cools it. The workpiece W is quenched by the rapid drop in temperature. Thereafter, the heat treatment device 1 proceeds to step S05.

[0032] <Step S05> Next, the heat treatment device 1 sprays coolant onto the workpiece W using the second cooling jacket 6, which is provided between a first position P1 and a second position P2 different from the first position P1 along the transfer path 10 of the workpiece W transferred by the turntable 3 (step S05). In step S04, after a predetermined time has elapsed since the coolant was sprayed onto the workpiece W, the turntable 3 begins transferring the workpiece W from the first position P1 to the second position P2. Once the workpiece W begins to be transferred to the second position P2, the second cooling jacket 6 begins spraying coolant onto the workpiece W. Spraying coolant onto the workpiece W may continue until the workpiece W arrives at the second position P2. Therefore, the workpiece W is continuously cooled and quenched by the coolant during the period in which it is transferred from the first position P1 to the second position P2. Once the workpiece W arrives at the second position P2, the heat treatment device 1 proceeds to step S06.

[0033] <Step S06> Next, in order to prevent uneven hardening, the heat treatment apparatus 1 performs auxiliary cooling by spraying coolant onto the workpiece W at the second position P2 using the third cooling jacket 7 (step S06), and the coolant further lowers the temperature of the workpiece W. After the coolant has been sprayed for a predetermined time, the third cooling jacket stops spraying the coolant. The turntable 3 then transports the workpiece W from the second position P2 to the loading / unloading position P3 and stops. After transporting the workpiece W to the loading / unloading position P3, the heat treatment apparatus 1 proceeds to step S07.

[0034] Before or after step S06, the workpiece W may be subjected to heat treatment such as quenching. In this case, the heating unit 4 is also provided at the second position P2.

[0035] <Step S07> Next, the heat treatment apparatus 1 removes the workpiece W from the carry-in / carry-out position P3 (step S07). After the workpiece W is subjected to auxiliary cooling in step S06, it returns to the carry-in / carry-out position P3, and the carry-in / carry-out device 13 returns to the carry-in / carry-out position P3, grasps the workpiece W on the top plate 3a, carries it out of the heat treatment apparatus 1, and places it on the second conveyor 12. The second conveyor 12 transports the workpiece W from the heat treatment apparatus 1 to the next process. After the workpiece W is removed from the heat treatment apparatus 1, the heat treatment apparatus 1 completes the series of processes.

[0036] It is not necessary to perform all of the steps described above. For example, if the heat treatment apparatus 1 allows for positional deviation of the workpiece W, the position confirmation in step S02 can be omitted.

[0037] [1-3. Effects of the heat treatment device] (1) FIG. 6 is an explanatory diagram illustrating the operation of the heat treatment apparatus 1 to heat-treat workpieces W in a pipelined manner. While the above description has focused on one workpiece W with reference to FIG. 5, the heat treatment apparatus 1 can simultaneously heat-treat four workpieces W in a pipelined manner. That is, while the position of the first workpiece W is being confirmed, the second workpiece W is carried in. Next, while the first workpiece W is being heated and cooled, the third workpiece W is carried in. Furthermore, while the first workpiece W is being subjected to auxiliary cooling, the fourth workpiece W is carried in. In short, the heat treatment apparatus 1 simultaneously performs four processes, namely, carrying in, position confirmation, heating / cooling, and auxiliary cooling, on different workpieces W. This allows the productivity of the heat treatment apparatus 1 to be improved by shortening the processes that determine the overall processing time.

[0038] In the process performed by the heat treatment device 1, heating can be performed by high-frequency heating, which allows pinpoint heating of the required areas in a short time, but cooling requires a certain amount of time because the heat is removed by the poured coolant coming into contact with the workpiece W. In particular, as the workpiece W becomes larger, its heat capacity increases and even more time is required. If the required cooling time cannot be ensured, the workpiece W may be heated again due to residual heat, which may have a negative impact on the quality of the workpiece W. Therefore, the heat treatment device 1 needs to ensure a certain cooling time during the process from loading to unloading.

[0039] The heat treatment apparatus 1 of the present disclosure sprays a coolant onto the workpiece W while the workpiece W is being transferred from a first position P1 to a second position P2 different from the first position P1. This allows the heat treatment apparatus 1 to cool the workpiece W even during the period when the workpiece W is being transferred, i.e., during the period when no heat treatment has been performed previously. As a result, the heat treatment apparatus 1 can improve the productivity of the heat treatment of the workpiece W.

[0040] The heat treatment apparatus 1 achieves this heat treatment by providing a second cooling jacket 6 that sprays a cooling liquid onto the workpiece W between a first position P1 and a second position P2 different from the first position P1 along a transfer path 10 of the workpiece W transferred by the turntable 3. This configuration does not move in accordance with the rotation of the turntable 3, so the workpiece W can be cooled even while it is being transferred by the turntable 3, without providing a complex mechanism such as a rotary joint in the pipe that sends the cooling liquid.

[0041] (2) Furthermore, in the heat treatment device 1, the second cooling jackets 6 are provided on the inner and outer circumferential sides of the transfer path 10, so that the workpiece W being transferred on the transfer path 10 has the coolant sprayed from both sides of the workpiece W during the transfer period, and more coolant is sprayed onto the workpiece W, so the heat treatment device 1 of the present disclosure can cool the workpiece W more quickly. Also, because the coolant pours down on both sides of the workpiece W, the workpiece can be cooled with less uneven temperature distribution.

[0042] (3) In the heat treatment apparatus 1, at least one of the first cooling jacket 5 and the third cooling jacket 7 may be provided on at least one of the inner and outer circumferential sides of the transfer path 10.

[0043] As a result, the first cooling jacket 5 and the third cooling jacket 7 are located on the inner or outer periphery of the transfer path 10, so the workpiece W being transferred along the transfer path 10 can pass through a position away from the first cooling jacket 5 and the third cooling jacket 7. As a result, the workpiece W can be transferred directly below the first cooling jacket 5 and the second cooling jacket 7 without having to move the first cooling jacket 5 and the third cooling jacket 7 up and down. Therefore, the heat treatment device 1 can cool the workpiece without providing a complex mechanism.

[0044] (4) In the heat treatment apparatus 1, at least one of the first cooling jacket 5 and the third cooling jacket 7 may be provided at a position along the circumferential direction of a circle whose center is the position where the workpiece W is located when the cooling liquid is ejected.

[0045] As a result, the coolant is sprayed onto the workpiece W from positions along the circumferential direction of the circle, thereby reducing unevenness in the temperature distribution of the workpiece W.

[0046] (5) The heat treatment method of this embodiment is a method of heat treating the workpiece W while transporting it on a rotary table 3, and includes the steps of heating the workpiece W at a first position P1, spraying a cooling liquid onto the workpiece W at the first position P1, spraying a cooling liquid onto the workpiece W while transporting the workpiece W from the first position P1 to a second position P2 different from the first position P1, and spraying a cooling liquid onto the workpiece W while the workpiece W is at the second position P2.

[0047] As a result, the heat treatment method of this embodiment can cool the workpiece W even while the workpiece W is being transported by the turntable 3.

[0048] 2. Embodiment 2 [2-1. Configuration of the rotation mechanism] Hereinafter, a heat treatment apparatus 1 according to a second embodiment of the present disclosure will be described with reference to the drawings. The difference between the first embodiment and the second embodiment is that the second embodiment further includes a rotation mechanism that rotates the workpiece W during transport in the transport path 10 provided with the second cooling jacket 6. The same components as those in the first embodiment are designated by the same reference numerals, and descriptions of the same components, functions, and operations will be omitted.

[0049] FIG. 7 is a partially enlarged view of the rotation mechanism 61 of the second embodiment. FIG. 7 is a view of the top plate 3a of the turntable 3 as viewed from the opposite side of the surface on which the workpiece W is placed. The rotation mechanism 61 includes, for example, a swivel table 62, a first gear 63, and a second gear 64. The swivel table 62 is a table on which the workpiece W is placed and rotates the placed workpiece W. The swivel table 62 is provided at a position on the top plate 3a where the workpiece W is placed. The swivel table 62 is provided on the side of the top plate 3a on which the workpiece W is placed. When applied to the example of FIG. 2, four swivel tables 62 are provided.

[0050] The swivel table 62 has a shaft 65 at its center of rotation, which passes through the top plate 3a and is rotatably fixed to the top plate 3a via a rolling bearing. A first gear 63 is provided at the end of the shaft 65 on the side where the swivel table 62 is not provided. The first gear 63 is an external gear. A second gear 64 is provided at a position that meshes with the first gear 63 when the turntable 3 rotates and the workpiece W is transferred from the first position P1 to the second position P2. The second gear 64 is an internal gear, and is fixed to the side of a main body (not shown) that supports the turntable 3.

[0051] [2-2. Effects of the rotation mechanism] As described above, after the first cooling jacket 5 sprays the coolant onto the workpiece W for a predetermined time in step S04, the process proceeds to step S05, where the turntable 3 starts rotating to transfer the workpiece W from the first position P1 to the second position P2. Accordingly, the first gear 63, which was at the first position P1, starts moving in the circumferential direction toward the second position. When the first gear 63 moves to a position where the second gear 64 is located, it meshes with the second gear 64. The first gear 63, meshed with the second gear 64, is rotated by the rotating turntable 3, rolling on the surface on which the teeth of the second gear 63 are located. The rotation of the first gear is transmitted to the shaft 65, and the swivel table 62 moves in the circumferential direction toward the second position P2 while rotating.

[0052] In step S05, the turntable 3 transfers the workpiece W from the first position P1 to the second position P2, and at the same time, the second cooling jacket 6 sprays the cooling liquid toward the workpiece W. At this time, the turntable 62 moves circumferentially toward the second position P2 while rotating, so that the workpiece W placed on the turntable 62 also rotates.

[0053] As a result, the workpiece W rotates while being sprayed with cooling liquid while being transferred from the first position P1 to the second position P2. As a result, the heat treatment device 1 of the present disclosure can cool the workpiece W while reducing the unevenness of the temperature distribution of the workpiece W.

[0054] The configuration of the rotation mechanism 61 is not limited to the configuration including the swivel table 62, the first gear 63, and the third gear 64. For example, a water wheel may be provided on the shaft instead of the first gear 63. The water wheel may receive the falling coolant and convert it into rotational force to rotate the swivel table 62.

[0055] 3. Embodiment 3 [3-1. Rotation mechanism configuration] Hereinafter, a heat treatment apparatus 1 according to a third embodiment of the present disclosure will be described with reference to the drawings. The difference between the first embodiment and the third embodiment is that the third embodiment further includes a rotation mechanism for rotating the workpiece W at at least one of the first position P1 and the second position P2. The same components as those in the first embodiment are denoted by the same reference numerals, and descriptions of the same components, functions, and operations will be omitted.

[0056] FIG. 8 is a partially enlarged view of the rotation mechanism 71 of the third embodiment. FIG. 8 is a view of the top plate 3a of the turntable 3 as viewed from the opposite side of the surface on which the workpiece W is placed. The rotation mechanism 71 includes, for example, a swivel table 62, a first gear 63, and a third gear 72. The configurations of the swivel table 62 and the first gear 63 are the same as those in the second embodiment. For example, the third gear 72 is provided at the end of the output shaft of an electric motor (not shown). The third gear 72 and the electric motor are provided on the side of the main body supporting the turntable 3, at a position corresponding to the first position P1 or the second position P2 where the workpiece W stops. More specifically, the third gear 72 is provided at a position where it meshes with the first gear 63. The electric motor drives the first gear 63, which meshes with the third gear 72, to rotate the swivel table 62.

[0057] [3-2. Effects of the rotation mechanism] When step S02 is completed, the heat treatment device 1 rotates the turntable 3 to transfer the workpiece W from the confirmation position P0 to the first position P1. Accordingly, the turntable 62 and the first gear 63 on which the workpiece W is placed also move from the confirmation position P0 toward the first position P1 and stop at the first position P1. The first gear 63, which has stopped at the first position P1, then meshes with the third gear 72 located at the first position. When the electric motor starts to rotate, the electric motor drives the first gear 63, which meshes with the third gear 72, causing the turntable 62 to rotate. The workpiece W at the first position P1 is heated in step S03 and cooled in step S04. As a result, the turntable rotates while being heated and cooled, and the workpiece W is heated and cooled while rotating. This reduces unevenness in the temperature distribution of the workpiece W.

[0058] Furthermore, when the cooling in step S04 is completed, the heat treatment apparatus 1 rotates the turntable 3 to start transferring the workpiece W from the first position P1 toward the second position P2. When the transfer starts, the third gear 72 moves away from the first gear 63, and the meshing is released. Then, when the first gear 63 arrives at the second position P2, the first gear 63 meshes with the third gear at the second position P2. Then, when the electric motor at the second position P2 rotates, the swivel table 62 rotates, causing the workpiece W to rotate. Since the workpiece W is cooled at the second position, the workpiece W is cooled while the temperature distribution is reduced.

[0059] The embodiments disclosed herein are illustrative in all respects and are not restrictive. The scope of the present invention is not limited to the above-described embodiments, but includes all modifications within the scope of equivalents to the configurations described in the claims. [Explanation of symbols]

[0060] 1. Heat treatment equipment 2. Case 3 Rotating table 3a Top plate 3b Drive unit 4 Heating Unit 5. First cooling jacket 6. Second cooling jacket 7. Third cooling jacket 8. Conveyor equipment 9 Location confirmation device 10 Transport Route 11 First conveyor 12 Second conveyor 13 Loading and unloading equipment 21 Main body 22 Connection port 23 Spout hole 24 Pipe 25 Coolant supply device 31 yen 61 Rotation mechanism 62 Swivel table 63 First Gear 64 2nd Gear 65 Shaft 71 Rotation mechanism 72 Third Gear P0 Check position P1 1st position P2 2nd position P3 Loading / unloading position double work

Claims

1. A rotary table for transferring the workpiece; a heating unit that heats the workpiece; a first cooling jacket that sprays a cooling liquid onto the workpiece at a first position on the rotary table; a second cooling jacket that is provided between the first position and a second position different from the first position along a transfer path of the workpiece transferred by the rotary table and that sprays a cooling liquid onto the workpiece; a third cooling jacket that sprays a cooling liquid onto the workpiece at the second position; 12. A heat treatment device comprising:

2. The second cooling jacket is provided on an inner circumferential side and an outer circumferential side of the transfer path. The heat treatment apparatus according to claim 1 .

3. At least one of the first cooling jacket and the third cooling jacket is provided on at least one of the inner and outer circumferential sides of the transfer path, The heat treatment apparatus according to claim 1 or 2.

4. At least one of the first cooling jacket and the third cooling jacket is The cooling liquid is ejected from the nozzle at a position along the circumferential direction of a circle having a center at the position where the workpiece is located. The heat treatment apparatus according to claim 1 or 2.

5. The transfer path on which the second cooling jacket is provided further includes a rotation mechanism that rotates the workpiece during transfer. The heat treatment apparatus according to claim 1 or 2.

6. A method for heat treating a workpiece while transferring it on a rotary table, comprising: heating the workpiece in a first position; spraying a cooling liquid onto the workpiece at the first position; a step of spraying a cooling liquid onto the workpiece while transferring the workpiece from the first position to a second position different from the first position; a step of spraying a coolant onto the workpiece while the workpiece is in the second position; A heat treatment method comprising:

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