Vacuum suction device

Abstract

To provide a vacuum suction device having excellent workpiece suction and holding performance. [Solution] The work pad 10 of the vacuum suction device 101 has a first pad portion 11 having an adsorption surface 11a that is pressed against the adsorbed surface 2 of the workpiece 1, and a second pad portion 15 that is joined to the back surface 11b of the first pad portion 11 in the thickness direction Z, and the first pad portion 11 is made of a breathable elastic material that is breathable and that, when pressed against the adsorbed surface 2 of the workpiece 1, allows the adsorption surface 11a to elastically deform in the thickness direction Z in accordance with the adsorbed surface 2, and the second pad portion 15 is made of a breathable elastic material that is non-breathable and has higher rigidity against vacuum suction than the first pad portion 11 and is elastically deformable in the thickness direction Z together with the first pad portion 11 when the first pad portion 11 is pressed against the adsorbed surface 2 of the workpiece 1, and the second pad portion 15 has a suction hole 16 for vacuum suction that penetrates in the thickness direction Z.

Description

[Technical Field]

[0001] The present invention relates to a vacuum suction device. [Background technology]

[0002] Patent Document 1 below discloses a conventional vacuum chuck device. This vacuum chuck device includes a pad unit that uses the vacuum suction action of a vacuum pump to hold a workpiece, and a through-hole plate with multiple through holes connected to the vacuum pump. The pad unit includes a breathable porous pad fixed to the through-hole plate and a breathable sponge portion attached to the porous pad, with the sponge portion having an adsorption surface that adsorbs the workpiece. With this vacuum chuck device, the workpiece is adsorbed and held by the vacuum suction action generated on the adsorption surface of the sponge portion when the vacuum pump is operated. In this case, the pad unit is configured so that the sponge portion is softer than the porous pad, thereby preventing the workpiece from being damaged when the sponge portion comes into contact with the workpiece. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-115677 Summary of the Invention [Problem to be solved by the invention]

[0004] In the vacuum chuck device configured as described above, the porous pad of the pad unit is as breathable as the sponge portion, so that air is sucked through the porous pad when the vacuum pump is operating, thereby reducing the suction force of the sponge portion on the suction surface of the workpiece. Furthermore, if the workpiece has an uneven surface, when the sponge portion comes into contact with the uneven surface, the sponge portion forms shallow, low-compression portions corresponding to the concave portions of the workpiece and deep, high-compression portions corresponding to the convex portions of the workpiece. In this case, the low-compression portions of the sponge portion are pulled toward the vacuum suction side and are prone to elastic deformation. Air is sucked in between the low-compression portions of the sponge portion after elastic deformation and the workpiece, weakening the suction force of the suction surface of the sponge portion on the workpiece. This can result in poor suction of the workpiece.

[0005] The present invention has been made in view of the above-mentioned problems, and aims to provide a vacuum suction device that has excellent performance in suctioning and holding a workpiece. [Means for solving the problem]

[0006] One aspect of the present invention is A vacuum suction device having a work pad that uses vacuum suction to suction a workpiece, The work pad has a first pad portion having an adsorption surface that is pressed against the adsorbed surface of the workpiece, and a second pad portion that is overlapped and joined in a thickness direction to a back surface of the first pad portion opposite the adsorption surface, the first pad portion is made of a breathable elastic member that is breathable and that, when pressed against the adsorbed surface of the workpiece, allows the adsorbing surface to elastically deform in the thickness direction in accordance with the adsorbed surface, the second pad portion is made of an air-impermeable elastic member that is air-impermeable, has higher rigidity against vacuum suction than the first pad portion, and is elastically deformable in the thickness direction together with the first pad portion when the first pad portion is pressed against the attracted surface of the workpiece, a vacuum suction device, wherein the second pad portion is provided with a suction hole for vacuum suction penetrating in the thickness direction; is located. [Effects of the Invention]

[0007] The vacuum suction device of the above aspect includes a work pad that uses vacuum suction to suction a workpiece. This work pad has a first pad portion having a suction surface and a second pad portion having suction holes for vacuum suction attached to the back surface of the first pad portion. Here, the first pad portion is made of a breathable elastic material, and the second pad portion is made of a non-breathable elastic material that has higher rigidity against vacuum suction than the first pad portion.

[0008] When the first pad is pressed against the workpiece surface while the suction holes of the second pad are vacuum-suctioned, the workpiece surface is suctioned and held by the suction surface of the first pad. By configuring the second pad from a non-breathable elastic material, the suction of air from the outside can be suppressed. Furthermore, by pressing the first pad from its backside, the second pad can suppress the amount of elastic deformation of the first pad due to vacuum suction. This prevents the increase in the elastic deformation of the first pad from sucking air between the workpiece surface and the first pad, thereby weakening the suction-holding force of the workpiece on the suction surface of the first pad. As a result, the suction-holding performance of the workpiece on the suction surface of the first pad is improved, allowing the workpiece to be held in a stable state.

[0009] As described above, according to the above-described embodiment, it is possible to provide a vacuum suction device that has excellent workpiece suction and holding performance. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 2 is a side view of the vacuum suction device of the first embodiment. [Figure 2] 2 is a perspective view of the work pad and the holding plate in FIG. 1 as seen obliquely from above. [Figure 3] 1 is a side view showing the vacuum suction device of the first embodiment in a state where a workpiece is suction-held. [Figure 4] FIG. 10 is a side view showing a vacuum suction device according to a comparative example in a state where a workpiece is suction-held. [Figure 5]5 is a cross-sectional view taken along line VV in FIG. 4. [Figure 6] 6 is a cross-sectional view taken along line VI-VI in FIG. 3. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 3. [Figure 8] FIG. 10 is a side view of a vacuum suction device according to a second embodiment. [Figure 9] 9 is a perspective view of the work pad and the holding plate in FIG. 8 as viewed obliquely from above. DETAILED DESCRIPTION OF THE INVENTION

[0011] A preferred embodiment of the above aspects will now be described.

[0012] In the vacuum suction device of the above aspect, the first pad portion is preferably provided with a communication hole that penetrates the first pad portion in the thickness direction and communicates with the suction hole of the second pad portion.

[0013] According to this vacuum suction device, a through hole is formed in the work pad, where the communication hole of the first pad portion communicates with the suction hole of the second pad portion. This makes it possible to strengthen the vacuum suction effect when the suction hole of the second pad portion is vacuum-sucked, compared to a structure in which the first pad portion does not have a communication hole, and to increase the suction and holding force of the workpiece on the suction surface of the first pad portion.

[0014] In the vacuum suction device of the above aspect, it is preferable that the communication hole of the first pad portion and the suction hole of the second pad portion are circular and have the same hole diameter, and are arranged so as to overlap each other in the thickness direction.

[0015] According to this vacuum suction device, a through hole with a uniform cross-sectional area in the thickness direction is formed in the work pad by the communication hole in the first pad portion and the suction hole in the second pad portion, which reduces the resistance of the air flow through the through hole when the suction hole is vacuum-suctioned, thereby strengthening the vacuum suction effect.

[0016] In the vacuum suction device of the above-mentioned aspect, it is preferable that the first pad portion is made of an open-cell sponge having an open-cell structure as the breathable elastic member, and the second pad portion is made of a closed-cell sponge having a closed-cell structure as the non-breathable elastic member.

[0017] This vacuum suction device can use a work pad in which the first pad portion on the work side is made of open-cell sponge and the second pad portion joined to the back surface of the first pad portion is made of closed-cell sponge.

[0018] In the vacuum suction device of the above aspect, the suction target surface of the workpiece is preferably an uneven surface having recesses and protrusions.

[0019] According to this vacuum suction device, when the first pad portion of the work pad comes into contact with the uneven surface of the workpiece, the first pad portion forms a low-compression portion that is shallowly crushed corresponding to the concave portion of the workpiece and a high-compression portion that is deeply crushed corresponding to the convex portion of the workpiece. At this time, the second pad portion can prevent the low-compression portion of the first pad portion from being pulled toward the vacuum suction side and undergoing significant elastic deformation. Therefore, it is possible to prevent air from being sucked in between the low-compression portion of the first pad portion after elastic deformation and the suction surface of the workpiece, which would weaken the suction force of the suction surface of the first pad portion on the workpiece.

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A specific embodiment of a vacuum suction device according to the present invention will be described below with reference to the drawings.

[0021] In the drawings for explaining this embodiment, the first direction, which is the horizontal direction of the work pad constituting the vacuum suction device, is indicated by arrow X, the second direction, which is the vertical direction of the work pad, is indicated by arrow Y, and the thickness direction (height direction) of the work pad is indicated by arrow Z.

[0022] (Embodiment 1) 1. Structure of Work 1 As shown in Fig. 1, the workpiece 1 used in this embodiment has an adsorbed surface 2 that is an uneven surface having recesses 2a and protrusions 2b. The adsorbed surface 2 has the recesses 2a and protrusions 2b spaced apart in the first direction X and extending parallel to each other in the second direction Y. Therefore, the vacuum adsorption device 101 is configured to adsorb the workpiece 1 whose adsorbed surface 2 is an uneven surface. However, it goes without saying that the vacuum adsorption device 101 can also adsorb a workpiece 1 whose adsorbed surface 2 is a flat surface.

[0023] 2. Structure of the vacuum suction device 101 As shown in FIG. 1, the vacuum suction device 101 of embodiment 1 is a device for suctioning a workpiece 1, and includes as its components a work pad 10, a holding plate 20, a connecting member 30, and a vacuum pump 40.

[0024] 2-1. Structure of Workpad 10 The work pad 10 has the function of adsorbing the workpiece 1 by utilizing the vacuum suction action of a vacuum pump 40. As shown in Figures 1 and 2, the work pad 10 has a first pad portion 11 and a second pad portion 15. The first pad portion 11 and the second pad portion 15 are both rectangular parallelepiped-shaped and have the same shape when viewed from the thickness direction Z. The thickness h1 of the first pad portion 11 is greater than the thickness h2 of the second pad portion 15 and is sized to be greater than the height h3 of the convex portion 2b of the adsorbed surface 2 of the workpiece 1.

[0025] The first pad portion 11 has an adsorption surface 11a that is pressed against the adsorbed surface 2 of the workpiece 1. The second pad portion 15 is joined to the back surface 11b of the first pad portion 11 opposite the adsorption surface 11a, overlapping in the thickness direction Z. At this time, the back surface 11b of the first pad portion 11 and the lower surface 15a of the second pad portion 15 are joined using, for example, an adhesive or double-sided adhesive tape. As a result, the first pad portion 11 and the second pad portion 15 are stacked in the thickness direction Z to form an integrated work pad 10.

[0026] The first pad portion 11 is made of a breathable elastic material that is breathable and, when pressed against the adsorbed surface 2 of the workpiece 1, allows the adsorbing surface 11a to elastically deform in the thickness direction Z in accordance with the adsorbed surface 2. In this embodiment, an example is shown in which an open-cell sponge is used as the breathable elastic material. Although not specifically shown, the "open-cell sponge" referred to here is a sponge with an open-cell structure in which the individual cells are not independent but are continuously connected to other cells, allowing air to easily enter and exit. The open-cell sponge is advantageous in that it is soft and can be significantly crushed under external load. This type of open-cell sponge is also called a "urethane sponge."

[0027] The second pad portion 15 is made of an air-impermeable elastic material that is air-impermeable, has higher rigidity against vacuum suction than the first pad portion 11, and is elastically deformable in the thickness direction Z together with the first pad portion 11 when the first pad portion 11 is pressed against the adsorbed surface 2 of the workpiece 1. In this embodiment, a closed-cell sponge is used as the air-impermeable elastic material. Although not specifically shown, the term "closed-cell sponge" refers to a sponge with a closed-cell structure in which each cell is independent and not connected to other cells, preventing air from passing through. Closed-cell sponges are superior to open-cell sponges in that they have a stronger reaction force against external loads, are more rigid, and therefore deform less. Such closed-cell sponges are also called "rubber sponges."

[0028] The second pad portion 15 is provided with a suction hole 16 that penetrates between the lower surface 15a and the upper surface 15b in the thickness direction Z. In contrast, the first pad portion 11 is provided with a communication hole 12 that penetrates in the thickness direction Z and communicates with the suction hole 16 of the second pad portion 15. The communication hole 12 of the first pad portion 11 and the suction hole 16 of the second pad portion 15 both have a circular cross-sectional shape, and the dimensions are set so that the hole diameter d1 of the communication hole 12 and the hole diameter d2 of the suction hole 16 are the same. Furthermore, the communication hole 12 and the suction hole 16 are provided so as to overlap each other when viewed in the thickness direction Z. As a result, a through hole consisting of the communication hole 12 and the suction hole 16 and having a uniform cross-sectional area in the thickness direction Z is formed in the work pad 10.

[0029] 2-2. Structure of the holding plate 20 The holding plate 20 is bonded to the upper surface 15b of the second pad portion 15 so as to cover the entire upper surface 15b. At this time, the holding plate 20 and the upper surface 15b of the second pad portion 15 are bonded using, for example, an adhesive or double-sided adhesive tape. The holding plate 20 has a function of holding the work pad 10. The holding plate 20 is provided with a through hole 21 that communicates with the suction hole 16 of the second pad portion 15, and a plurality of screw holes 22 into which the shanks of a plurality of bolts 23 can be screwed.

[0030] 2-3. Structure of the connecting member 30 The connecting member 30 has a plate portion 31 fixed to the holding plate 20 with a plurality of bolts 23, and a nozzle portion 33 extending from the upper surface of the plate portion 31. The plate portion 31 has a through hole 32 that communicates with the through hole 21 of the holding plate 20. The nozzle portion 33 is connected to a vacuum pump 40 via a connecting pipe 41. When the vacuum pump 40 is operating, air in the communication hole 12 of the first pad portion 11 is sucked toward the connecting member 30 through the suction hole 16 of the second pad portion 15. The plate portion 31 of the connecting member 30 is preferably connected to a transport means (not shown) such as a robot arm. This allows the workpiece 1 adsorbed on the work pad 10 to be transported to a desired position by the transport means.

[0031] 3. Method of suction of workpiece 1 Next, a method for suctioning the workpiece 1 using the vacuum suction device 101 having the above configuration will be described.

[0032] 3, when the vacuum pump 40 is operated, the suction surface 11a of the first pad portion 11 of the work pad 10 is pressed against the attracted surface 2 of the workpiece 1. At this time, the first pad portion 11 elastically deforms in the thickness direction Z so as to conform to the shape of the attracted surface 2. The workpiece 1 is then sucked and held onto the suction surface 11a of the first pad portion 11 by the vacuum suction action of the vacuum pump 40. The same applies when the vacuum pump 40 is operated with the suction surface 11a of the first pad portion 11 pressed against the attracted surface 2 of the workpiece 1.

[0033] The first pad portion 11 of the work pad 10 has a low-compression portion 13 that is compressed by the recessed portion 2a of the attracted surface 2 and a high-compression portion 14 that is compressed by the protruding portion 2b of the attracted surface 2. The high-compression portion 14 is a portion that is crushed more in the thickness direction Z than the low-compression portion 13. On the other hand, the second pad portion 15 has higher rigidity against vacuum suction than the first pad portion 11 and elastically deforms less than the first pad portion 11. At this time, the second pad portion 15 exerts a function of suppressing the amount of elastic deformation of the first pad portion 11 in response to vacuum suction by pressing the first pad portion 11 from the back surface 11b side. This function allows the second pad portion 15 to suppress elastic deformation of the low-compression portion 13 of the first pad portion 11, for example, in the bottom region A, from floating above the attracted surface 2 of the workpiece 1 in response to vacuum suction. Therefore, the vacuum suction device 101 of this embodiment has the advantageous effect of being able to suppress poor suction of the workpiece 1 caused by the low compression portion 13 of the first pad portion 11 rising up.

[0034] Here, in order to clarify the above-mentioned operational effects when using the vacuum suction device 101, a vacuum suction device 101A according to a comparative example will be described with reference to FIGS.

[0035] As shown in FIG. 4, vacuum suction device 101A differs from vacuum suction device 101 in that work pad 10 is composed only of first pad portion 11 and does not have second pad portion 15. The dimension of work pad 10 in thickness direction Z is the same as that of vacuum suction device 101. In other words, the dimension of work pad 10 (first pad portion 11) in thickness direction Z corresponds to the sum of thickness h1 and thickness h2 (see FIG. 1). The rest of the configuration is the same as that of vacuum suction device 101.

[0036] When the suction surface 11a of the first pad portion 11 of the work pad 10 is pressed against the chucked surface 2 of the workpiece 1, the low-compression portion 13 of the first pad portion 11 becomes soft, so that the degree of collapse of the air bubbles is less than that in the case of the vacuum suction device 101. Therefore, if the low-compression portion 13 of the first pad portion 11 remains soft, for example, the bottom region C may be pulled toward the vacuum suction side and elastically deformed by the vacuum suction. As shown in FIG. 5, focusing on the bottom region C of the low-compression portion 13, the elastic deformation of this bottom region C toward the vacuum suction side causes the surface contact with the chucked surface 2 of the workpiece 1 to be broken, forming a gap S between the chucked surface 2 and the chucked surface 2. This causes air leakage due to the intake of atmospheric air from the outside, weakening the suction strength of the workpiece 1 and resulting in poor suction.

[0037] Therefore, the vacuum suction device 101 of this embodiment uses a work pad 10 in which a second pad portion 15 made of closed-cell sponge is bonded to the back surface 11b of the first pad portion 11. With this work pad 10, as described above, the second pad portion 15 can suppress elastic deformation of the low-compression portion 13 of the first pad portion 11, causing it to lift off the attracted surface 2 of the workpiece 1 due to vacuum suction. That is, as shown in FIG. 6, because the first pad portion 11 is pressed down from above by the second pad portion 15, the amount of elastic deformation of the bottom region A of the low-compression portion 13 of the first pad portion 11 during vacuum suction is significantly less than the amount of elastic deformation of the bottom region C of the low-compression portion 13 of the comparative example (see FIG. 5) during vacuum suction. Therefore, it is possible to prevent air leakage due to atmospheric air suction caused by the surface contact of the workpiece 1 with the attracted surface 2 being broken and a gap S (see FIG. 5) being formed between the first pad portion 11 and the attracted surface 2. As shown in Figure 7, the highly compressed portion 14 of the first pad portion 11 is in a highly compressed state with a greater amount of crushing in the thickness direction Z than the low compression portion 13 (see Figure 6), so the amount of elastic deformation of the bottom region B of the highly compressed portion 14 during vacuum suction is small, preventing air leakage in the same way as the low compression portion 13. In this way, the work pad 10 is effective in preventing air leakage between the adsorbed surface 2 of the workpiece 1 at both the low compression portion 13 and the high compression portion 14 of the first pad portion 11.

[0038] 4. Effects According to the above-described first embodiment, the following effects can be obtained.

[0039] The vacuum suction device 101 of the first embodiment includes a work pad 10 that suctions a workpiece 1 by vacuum suction. In this work pad 10, a second pad portion 15 having suction holes 16 for vacuum suction is joined to the back surface 11b of a first pad portion 11 having an adsorption surface 11a. Here, the first pad portion 11 is made of a breathable elastic material, and the second pad portion 15 is made of a non-breathable elastic material that has higher rigidity against vacuum suction than the first pad portion 11.

[0040] When the first pad portion 11 is pressed against the workpiece surface 2 of the workpiece 1 while the suction holes 16 of the second pad portion 15 are vacuum-suctioned, the workpiece surface 2 of the workpiece 1 is suction-held by the suction surface 11a of the first pad portion 11. By configuring the second pad portion 15 from a closed-cell sponge, which is an air-impermeable elastic material, the suction of air from the outside can be suppressed. Furthermore, by pressing the first pad portion 11 from the back surface 11b side, the second pad portion 15 can suppress the amount of elastic deformation of the first pad portion 11 due to vacuum suction. This prevents the increase in the amount of elastic deformation of the first pad portion 11 from sucking air between the workpiece surface 2 of the workpiece 1 and the suction surface 11a of the first pad portion 11, thereby weakening the suction force of the workpiece 1 on the suction surface 11a of the first pad portion 11. As a result, the suction-holding performance of the workpiece 1 on the suction surface 11a of the first pad portion 11 is improved, allowing the workpiece 1 to be held in a stable state.

[0041] Therefore, according to the first embodiment, it is possible to provide a vacuum suction device 101 that has excellent suction and holding performance for the workpiece 1.

[0042] Furthermore, according to the vacuum suction device 101, a through hole is formed in the work pad 10, which is formed by connecting the communication hole 12 of the first pad portion 11 and the suction hole 16 of the second pad portion 15. This makes it possible to strengthen the vacuum suction effect when the suction hole 16 of the second pad portion 15 is vacuum-suctioned, compared to a structure in which the first pad portion 11 does not have the communication hole 12, and to increase the suction holding force of the workpiece 1 on the suction surface 11a of the first pad portion 11. In particular, by forming a through hole in the work pad 10 in which the hole diameter d1 of the communication hole 12 and the hole diameter d2 of the suction hole 16 are the same and the cross-sectional area is uniform in the thickness direction Z, it is possible to keep low the resistance to the air flow in the through hole when the suction hole 16 is vacuum-suctioned, and thereby strengthen the vacuum suction effect.

[0043] Furthermore, with the vacuum suction device 101, when the first pad portion 11 of the work pad 10 comes into contact with the uneven surface of the workpiece 1, the first pad portion 11 forms a low-compression portion 13 that is shallowly compressed corresponding to the concave portion 2a of the workpiece 1 and a high-compression portion 14 that is deeply compressed corresponding to the convex portion 2b of the workpiece 1. At this time, the second pad portion 15 can prevent the low-compression portion 13 of the first pad portion 11 from being pulled toward the vacuum suction side and undergoing significant elastic deformation. Therefore, it is possible to prevent air from being sucked in between the low-compression portion 13 of the first pad portion 11 after elastic deformation and the attracted surface 2 of the workpiece 1, thereby preventing a weakening of the suction force of the suction surface 11a of the first pad portion 11 on the workpiece 1.

[0044] Hereinafter, other embodiments related to the above-described embodiment 1 will be described with reference to the drawings. In the other embodiments, the same elements as those in embodiment 1 are denoted by the same reference numerals, and the description of the same elements will be omitted.

[0045] (Embodiment 2) 8 and 9, the vacuum suction device 102 of the second embodiment differs from the vacuum suction device 101 of the first embodiment in the structure of the first pad portion 11 of the work pad 10. In the work pad 10 of the vacuum suction device 102, the first pad portion 11 does not have a communication hole 12 (see FIG. 1). Therefore, the lower opening of the suction hole 16 of the second pad portion 15 is covered by the back surface 11b of the first pad portion 11. However, because the first pad portion 11 itself is breathable, it is configured so that a vacuum suction effect can be applied to the suction surface 11a of the first pad portion 11, as in the first embodiment.

[0046] The other configurations and adsorption methods are the same as those in the first embodiment.

[0047] According to the second embodiment, the structure of the first pad portion 11 can be simplified, and the cost required for molding the first pad portion 11 can be kept low.

[0048] In addition, the same effects as those of the first embodiment are achieved.

[0049] The present invention is not limited to the above-described embodiment, and various applications and modifications are possible without departing from the scope of the present invention. For example, the following embodiments can be implemented by applying the above-described embodiment.

[0050] In the above embodiment, the first pad portion 11 is made of an open-cell sponge (e.g., urethane sponge), which is a breathable elastic material, and the second pad portion 15 is made of a closed-cell sponge (e.g., rubber sponge), which is a non-breathable elastic material. However, if necessary, a breathable elastic material other than an open-cell sponge or a non-breathable elastic material other than a closed-cell sponge may be used.

[0051] In the above-described embodiment, the communicating hole 12 of the first pad portion 11 and the suction hole 16 of the second pad portion 15 are illustrated as having the same circular hole diameter and are arranged so as to overlap each other. However, instead of this, a structure in which the communicating hole 12 and the suction hole 16 have different diameters, a structure in which the communicating hole 12 and the suction hole 16 have shapes other than circular, or a structure in which the communicating hole 12 and the suction hole 16 are partially connected may be appropriately adopted. [Explanation of symbols]

[0052] REFERENCE SIGNS LIST 1...workpiece, 2...attached surface, 2a...concave portion, 2b...convex portion, 10...work pad, 11...first pad portion, 11a...attached surface, 11b...back surface, 12...communicating hole, 15...second pad portion, 16...suction hole, 101, 102...vacuum suction device, d1, d2...hole diameter, Z...thickness direction

Claims

1. A vacuum suction device having a work pad that uses vacuum suction to suction a workpiece, The work pad has a first pad portion having an adsorption surface that is pressed against an adsorbed surface of the workpiece, and a second pad portion that is overlapped and joined in a thickness direction to a back surface of the first pad portion opposite the adsorption surface, the first pad portion is made of a breathable elastic member that is breathable and that, when pressed against the attracted surface of the workpiece, allows the attracting surface to elastically deform in the thickness direction in accordance with the attracted surface, the second pad portion is made of an air-impermeable elastic material that is air-impermeable, has higher rigidity against vacuum suction than the first pad portion, and is elastically deformable in the thickness direction together with the first pad portion when the first pad portion is pressed against the attracting surface of the workpiece, The second pad portion is provided with a suction hole for vacuum suction that penetrates the second pad portion in the thickness direction.

2. The vacuum suction device according to claim 1 , wherein the first pad portion is provided with a communication hole that penetrates the first pad portion in the thickness direction and communicates with the suction hole of the second pad portion.

3. 3. The vacuum suction device according to claim 2, wherein the communication holes of the first pad portion and the suction holes of the second pad portion are circular and have the same hole diameter, and are provided so as to overlap each other in the thickness direction.

4. The vacuum suction device according to any one of claims 1 to 3, wherein the first pad portion is made of an open-cell sponge having an open-cell structure as the breathable elastic member, and the second pad portion is made of a closed-cell sponge having a closed-cell structure as the non-breathable elastic member.

5. 4. The vacuum suction device according to claim 1, wherein the surface to be suctioned of the workpiece is an uneven surface having recesses and protrusions.

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