Crimping method and apparatus

Abstract

The present invention provides a crimping method and apparatus that amplifies the driving force of a single piston into the driving force of multiple plungers, thereby ensuring a downward pressure when the pressure block mechanism contacts the object to be crimped. [Solution] The crimping device has an object to be crimped, a downward pressure type and an upward pressure type. The upward pressure type is provided with a drive mechanism C and a pressure block mechanism D that can be driven by the drive mechanism. The drive mechanism has a chamber C111 that can contain a fluid S, a piston C2 that changes the pressure of the fluid in the chamber by displacement, and a plunger C3 that can be displaced up and down. When crimping, the pressure block mechanism comes into contact with the upper surface of the object to be crimped, so the pressure block mechanism applies upward pressure to the plunger, and the drive mechanism acts on the fluid in the chamber by the piston, applying reverse pressure to the plunger through the fluid, and the plunger applies pressure to the object to be crimped.

Description

Technical Field

[0001] The present invention relates to a crimping method and apparatus, and more particularly to a crimping method and apparatus for crimping an integrated circuit element covered with an upper lid.

Background Art

[0002] In a general chip packaging process, it is often necessary to cover an integrated circuit (IC) element with an upper lid. The integrated circuit element usually has at least one die or chip installed on a substrate. Since the upper lid is usually made of a metal material and has a heat dissipation function, it is also sometimes called a heat dissipation lid or a heat dissipation sheet. In the chip packaging process, a liquid thermosetting adhesive is applied to the periphery of the substrate, and a thermal interface material (TIM), such as a thermal interface film (Film TIM), a metal thermal interface material (Metal TIM), or a liquid metal thermal interface material (Liquid Metal TIM), is formed on the die or the chip. Then, the upper lid is covered on the integrated circuit, and thereby, the central portion of the upper surface of the upper lid is applied to the thermal interface material, and the peripheral portion of the lower surface of the upper lid is applied to the liquid thermosetting adhesive. After the upper lid covers the integrated circuit, pressure is further applied to the upper lid and the integrated circuit element through the upper die and the lower die of a crimping device to bond them. The lower die is provided with a horizontal support surface capable of supporting the substrate, and the upper die is provided with a horizontal contact surface capable of contacting the upper lid. The upper die can be driven to descend to contact the upper lid to perform a crimping operation.

[0003] As science and technology advance rapidly, the structure of integrated circuit elements is becoming increasingly complex. This necessitates stacking and arranging various electronic elements of different shapes and sizes, such as dies, chips, optical communication elements, and passive elements, on a substrate in different combinations. Therefore, the shape of the top cover also has varying heights and steps to accommodate these different electronic elements. In Patent Document 1, while pressure can be applied only to the highest region of the top cover by contacting it with a single horizontal contact surface, it is not possible to apply pressure to other lower regions of the top cover simultaneously. Furthermore, because the top cover itself is flexible, when the highest region receives pressure, different height and step areas receive different pressures, potentially affecting the packaged object on the underside of the top cover in different ways. On the other hand, since different height and step areas receive different pressures, the conventional technology offers no solution for determining the magnitude of the applied load. Additionally, the conventional technology relies solely on upward and downward pressure bonding. The single downward pressing force of the upward pressure type is practically insufficient to meet the varying pressure needs of the objects being bonded, indicating that there is still room for improvement. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Taiwan Patent No. I804790. [Overview of the Initiative]

[0005] Therefore, an object of the present invention is to provide a crimping method that can improve upon at least one drawback of the prior art.

[0006] Another object of the present invention is to provide a crimping device that can improve upon at least one drawback of the prior art.

[0007] Another object of the present invention is to provide a crimping device that can be used to carry out the crimping method described above.

[0008] A method for crimping according to the object of the present invention includes providing an object to be crimped, providing a downward pressure type on which a support base for placing the object to be crimped is provided, providing an upward pressure type that can be displaced vertically relative to the downward pressure type by a drive, providing the upward pressure type with a drive mechanism and a pressure block mechanism that can be driven by the drive mechanism, the drive mechanism having a chamber capable of containing fluid in its main body, a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and can be displaced vertically at the same time, and when crimping the object to be crimped, the pressure block mechanism of the upward pressure type contacts the upper surface of the object to be crimped, so that the pressure block mechanism applies upward pressure to the plunger, and the drive mechanism acts on the fluid in the chamber by the piston, indirectly applying a downward pressure in the opposite direction to the plunger through the fluid, thereby applying pressure to the object to be crimped by the plunger.

[0009] A crimping device according to another object of the present invention comprises a lower pressure type having a support base for placing an object to be crimped, an upper pressure type that can be displaced vertically relative to the lower pressure type by drive, and is provided with a drive mechanism and a pressure block mechanism that can be driven by the drive mechanism, wherein the drive mechanism has a chamber capable of containing fluid within its main body, and further has a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and is capable of being displaced vertically, and a lifting mechanism that drives the upper pressure type to be displaced vertically relative to the lower pressure type, thereby causing the pressure block mechanism to come into contact with or separate from the object to be crimped.

[0010] A crimping device according to yet another object of the present invention can perform the crimping method described above. [Effects of the Invention]

[0011] In the crimping method and apparatus according to an embodiment of the present invention, the drive mechanism has a chamber capable of containing fluid within its main body, a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and is capable of vertical displacement. Therefore, when crimping the object to be crimped, the upward-pressure type pressure block mechanism contacts the upper surface of the object to be crimped, thereby applying upward pressure to the plunger. Furthermore, the drive mechanism acts on the fluid in the chamber by the piston, indirectly applying a downward pressure in the opposite direction to the plunger through the fluid, thereby applying pressure to the object to be crimped by the plunger. This amplifies the driving force of a single piston into the driving force of multiple plungers, ensuring a downward pressure when the pressure block mechanism contacts the object to be crimped. [Brief explanation of the drawing]

[0012] [Figure 1] This is a perspective view illustrating the object to be compressed in an embodiment of the present invention. [Figure 2] This is an exploded perspective view illustrating that the object to be pressed is an integrated circuit element covered by a top cover. [Figure 3] This is a cross-sectional view illustrating section AA in Figure 1. [Figure 4] This is a cross-sectional view illustrating the BB cross section in Figure 1. [Figure 5] This is a perspective view illustrating a crimping device in an embodiment of the present invention. [Figure 6] This is a schematic diagram illustrating the correspondence between the upper pressure type of the crimping device and the object to be crimped. [Figure 7] This is an exploded perspective view illustrating the first, second, and third pressure-type pressure-blocking modules described above. [Figure 8] This is a partial cross-sectional view corresponding to the third pressure block module, illustrating the upper pressure type of the crimping device. [Figure 9]This is an exploded perspective view illustrating the structure of the upper surface of each pressure block assembly in the aforementioned upward pressure type. [Figure 10] This is a side view illustrating how the object to be crimped is positioned in the crimping device. [Figure 11] This is a side view illustrating the upward pressure mechanism being driven and descending. [Figure 12] This is a partial cross-sectional view along the AA cross-sectional line in Figure 1, illustrating how the upper pressure type performs the crimping operation on the object to be crimped. [Modes for carrying out the invention]

[0013] As shown in Figures 1, 2, 3, and 4, the crimping method and apparatus of the embodiment of the present invention are applied to crimping an object W to be crimped as shown in the drawings, wherein the object W to be crimped is covered by an upper cover W2 on the upper side of an integrated circuit element W1. The aforementioned integrated circuit element W1 has a first electronic element W11 and a plurality of second electronic elements W12 provided on the upper side of the substrate W13. On the upper surface W21 of the top cover W2, a plurality of crimp segments of different heights are provided, including a first crimp segment W211, a second crimp segment W212, and a third crimp segment W213, respectively, to match the heights of the first electronic element W11, the second electronic element W12, and the substrate W13. On the lower surface W22 of the upper cover W2 corresponding to the integrated circuit element W1, a first contact surface W221, a second contact surface W222, and a third contact surface W223 are provided, each having a different height to match the heights of the first electronic element W11, the second electronic element W12, and the substrate W13. In an embodiment of the present invention, the first crimping segment W211, the second crimping segment W212, and the third crimping segment W213 are classified by height, so that areas of the same height on the upper surface W21 are classified as the same type of crimping segment. As seen in Figure 2, the first crimping segment W211 is a single substantially rectangular area located in the center of the upper surface W21, the second crimping segment W212 is four substantially L-shaped areas located at the four corners of the upper surface W21, and the third crimping segment W213 is four substantially rectangular areas located in the center of the outer peripheral edge side of the first crimping segment W211 on the upper surface W21. Since the first contact surface W221, the second contact surface W222, and the third contact surface W223 are also classified by height, areas of the same height on the lower surface W22 are classified as the same type of contact surface, the first contact surface W221 is one area located in the center of the lower surface W22, the second contact surface W222 is four areas located at the four corners of the lower surface W22, and the third contact surface W223 is four areas located in the center of the periphery of the lower surface W22. In other words, the first contact surface W221, the second contact surface W222, and the third contact surface W223 are provided correspondingly below the first crimping segment W211, the second crimping segment W212, and the third crimping segment W213, respectively. The first electronic element W11 may be, for example, an electronic element mainly responsible for data operation such as a chip or a die, and the second electronic element W12 may be, for example, an electronic element mainly responsible for data transmission such as silicon photonics or other optical communication elements. The first electronic element W11 and the second electronic element W12 can be fixed to the substrate W13 with an adhesive. A portion corresponding to the first contact surface W221 of the first electronic element W11 can be coated with a thermal interface material (not shown). A portion corresponding to the second contact surface W222 of the second electronic element W12 can be coated with a thermal interface material (not shown). A liquid adhesive material (not shown) can be applied to the periphery of the substrate W13, whereby the upper lid W2 is attached and fixed at the third contact surface W223, and the integrated circuit element W1, the first electronic element W11, and the second electronic element W12 are sealed between the substrate W13 and the upper lid W2 and fixed by the liquid adhesive provided at the periphery of the substrate W13. In this case, the first contact surface W221 of the upper lid W2 is attached to the first electronic element W11, and the second contact surface W222 of the upper lid W2 is attached to the second electronic element W12.

[0014] As shown in FIGS. 5 and 6, the crimping method according to an embodiment of the present invention will be described by taking the process on a crimping device as shown in the drawings as an example. The crimping device includes a lower pressing mold A provided with a support base A1 for placing the object to be crimped W, an upper pressing mold B provided with a drive mechanism C and a pressing block mechanism D located below the drive mechanism C and drivable by the drive mechanism C. The pressing block mechanism D includes a first pressing block module D1 corresponding to the first crimping segment W211, a second pressing block module D2 corresponding to the second crimping segment W212, and a third pressing block module D3 corresponding to the third crimping segment W213, and the upper pressing mold B is provided with a plurality of independent and separated pressing block modules. a lifting mechanism E that drives the upper pressing mold B to move up and down with respect to the lower pressing mold A so that the pressing block mechanism D contacts or separates from the upper lid W2. comprises.

[0015] As shown in FIGS. 6 to 8, in the embodiment of the present invention, since the first pressing block module D1, the second pressing block module D2, and the third pressing block module D3 are classified by corresponding crimping segments, when viewed from FIG. 7, the first pressing block module D1 is a substantially rectangular first pressing block assembly D11 located at the central part of the pressing block mechanism D, the second pressing block module D2 is composed of four L-shaped square bar-shaped second pressing block assemblies D'21 located at the four corners of the pressing block mechanism D, and the third pressing block module D3 is composed of four substantially rectangular third pressing block assemblies D31 located at the central part on the outer edge side of the periphery of the first pressing block assembly D11 in the pressing block mechanism D. The first pressing block module D), the second pressing block module D2, and the third pressing block module D3 are members that maintain intervals, are separated from each other, and are independent of each other. Each pressing block assembly in each pressing block module is also independently separated. The first pressing block assembly D11 has a three-layer structure in the vertical direction. The uppermost layer is a fixing member D111 made of a metal material such as an aluminum alloy, the middle layer is a fine adjustment member D112 made of a metal material such as iron, the lowermost layer is made of a non-metal material such as engineering plastic, and is fixed under the fine adjustment member D112 and is a contact member D113 whose lower surface abuts against the object to be crimped. The second pressing block assembly D21 has a three-layer structure in the vertical direction. The uppermost layer is a fixing member D211 made of a metal material such as an aluminum alloy, the middle layer is a fine adjustment member D212 made of a metal material such as iron, the lowermost layer is made of a non-metal material such as engineering plastic, and is fixed under the fine adjustment member D212 and is a contact member D213 whose lower surface abuts against the object to be crimped. The third pressure block assembly D31 has a two-layer structure, with the upper layer being a fixing member D311 made of a metal material such as an aluminum alloy, and the lower layer being a contact member D312 made of a non-metallic material such as an engineering plastic, fixed below the fixing member D311, and having an inverted "convex" shape on its lower surface that contacts the object to be pressed. Furthermore, the fine adjustment member D112 in the middle layer of the first pressure block assembly D11 is screwed under the fixing member D111 by a plurality of screw fixing members D4 (see Figure 8), and the horizontality of its lower surface is adjusted by screwing in the screw fixing members D4. The fine adjustment member D212 in the middle layer of the second pressure block assembly D21 is screwed under the fixing member D211 by a plurality of screw fixing members D5 (not shown, but can be inferred in the same way as screw fixing member D4), and the horizontality of its lower surface is adjusted by screwing in the screw fixing members D5.

[0016] As shown in Figure 8, the drive mechanism C has a chamber C111 within the main body C1 that can contain a fluid S, a piston C2 that changes the pressure of the fluid S in the chamber C111 by displacement, and a plurality of plungers C3 that are driven by the pressure of the fluid S in the chamber C111 and can be displaced up and down. The fluid S is, for example, a liquid or hydraulic oil. The main body C1 is provided with a base C11 and a cover C12, and the chamber C111 is a space formed by being surrounded by the base C11 and the cover C12. The main body C1 has a piston passage C121 within a bearing base C122 that rises at the center of the cover C12, in which the piston C2 can be displaced. The piston passage C121 is arranged in the vertical axial direction, and the piston C2 is not connected to any member vertically, and can be freely displaced vertically within the piston passage C121 when subjected to an external force. The piston passage C121 communicates with the chamber C111, and the displacement of the piston C2 can change the pressure of the fluid S in the chamber C111. The height of the piston C2 is lower than the length of the piston passage C121, and the piston C2 is provided with an upper end C21 and a lower end C22, and the upper end C21 is provided with a groove-shaped pressing portion C211. The lower end of the drive rod C41 is pressed against the piston C2 and moves in conjunction with it. The upper end of the piston passage C121 has an open port C123, and the lower end is blocked by a stopper member C125 having a through hole C124, and the fluid S in the chamber C111 communicates with the piston passage C121 through the through hole C124. The main body C1 is provided with a plurality of vertically erected plunger passages C112, spaced apart from each other and parallel to one another, at the bottom of the chamber C111 of the base C11, for displacing a plurality of plungers C3. The upper part of each plunger passage C112 is blocked by a stopper member C114 having a through hole C113, and the fluid S in the chamber C111 communicates with the plunger passage C112 through the through hole C113. The stopper member C114 is provided with a plurality of through holes C113, each through hole C113 corresponding to one of the plunger passages C112. The vertical displacement of the plungers C3 can be linked by the pressure change of the fluid S in the chamber C111. Each plunger C3 is provided with a force receiving part C31 that can receive the pressure of the fluid S, and a pressurizing rod C32 that extends integrally downward from the force receiving part C31 and protrudes from the base C11. The pressure block mechanism D can be directly pressed by the pressure rod C32 by the plunger C3. The force receiving portion C31 has a large cross-sectional diameter and is located above, while the pressure rod C32 has a small rod diameter and is located below the force receiving portion C31. The base C11 is provided with a contact base C115 that protrudes outward. The contact base C115 has a circular outer diameter in the upper base C116 portion which forms the chamber C111 inside, and a rectangular outer diameter in the lower base C117 portion which forms a plurality of plunger passages C112 inside, with the outer diameters of the corresponding parallel sides narrowing. The main body C1 is placed together with the lower base C117 in the hollow section F341 of the lower slide base F34 and is fixed and placed on the upper edge of the lower slide base F34 on the circumferential side of the hollow section F341 by the contact base C115. The main body C1 comprises a plurality of bushes C13, each corresponding to one of the plungers C3, and a plurality of bush fixing members C14 that fix the bushes C13 below the base C11. The lower end opening of the plunger passage C112 is sealed by the bush fixing member C14. The bush fixing member C14 is provided with a shaft hole C141, and the bushes C13 are provided in the shaft hole C141, and the pressure rod C32 passes through the bushes C13 and is guided by the bushes C13. The upper end edge of the bushes C13 limits the bottom dead center of the descent of the plunger C3.

[0017] As shown in Figures 7, 8, and 9, each bush fixing member C14 is substantially rectangular (with slight arcs on both sides) and is arranged at a 45-degree angle to the rectangular lower base C117. The multiple pressure rods C32 and bush fixing members C14 protruding outward from below the bush fixing member C14 are arranged in three groups with the same center, including a first group C32A, a second group C32B, and a third group C32C located in the center of the rectangular lower surface of C117 on the lower base C117, which are spaced apart in a rectangular frame-like "revolving" shape. In the first group C32A, which has a small rectangular frame shape, the pressure rod C32 is used to connect and fix the first pressure block assembly D11; in the second group C32B, which has a large rectangular frame shape, the pressure rod C32 is used to connect and fix the second pressure block assembly D21 and the third pressure block assembly D31; and the third group C32C has only one independent pressure rod C32. Each pressure rod C32 is a round bar, and at the lower end of each, two positioning portions C321 are provided, which are parallel to each other by cutting off both sides of the cross-section of the round bar. The first pressure block assembly D11, the second pressure block assembly D21, and the third pressure block assembly D31 of the pressure block mechanism D are provided with positioning grooves D114, D214, and D313, which are long grooves recessed in the direction perpendicular to each other, in the fixing member D111, D211, and D311, respectively. This allows the positioning portion C321 at the lower end of each pressure rod C32 to be fitted. In addition, connecting members C322 such as screws screw the fixing members D111, D211, and D311 of the pressure block mechanism D from bottom to top onto the respective positioning portions C321 of each pressure rod C32, and prevent slippage of the first pressure block assembly D11, the second pressure block assembly D21, or the third pressure block assembly D31.The load measuring unit D115 is provided between one plunger C3 and a corresponding pressure block assembly in one pressure block mechanism D, and the pressure block mechanism D can be indirectly pressed by the plunger C3 via the load measuring unit D115 through the pressure rod C32. The installation configuration is, for example, a mounting section D116 for housing the load measuring unit D115 is recessed in the center of the fixing member D111 of the first pressure block assembly D11. The pressure rod C32 of the plunger C3 of the third group C32C, which is independently provided in the central part of the "revolving" shape, abuts the load measuring unit D115 downward, thereby the fluid S changes the volume of the chamber C111 by the piston C2, thereby applying force to the plunger C3, and the plunger C3 is driven by the force of the fluid S to press against the load measuring unit D115. The positioning portion C321 at the lower end of the pressure rod C32, which corresponds to the load measuring unit D115, may omit the screw hole structure corresponding to the screw fixing member and the structure in which both sides of the round bar cross section are machined to be parallel to each other, and instead contact the load measuring unit D115 with only the bottom of the pressure rod C32.

[0018] In this embodiment of the present invention, the fluid S is hydraulic oil. Since the horizontal cross-section of each plunger passage C112 is circular and their horizontal cross-sectional areas are all the same, and the horizontal cross-section of the force-receiving portion C31 of each plunger C3 is circular and their horizontal cross-sectional areas are all the same, the pressure of the fluid S received by each plunger C3 is also the same. In other viable embodiments, the horizontal cross-sectional areas of the force-receiving portion C31 of multiple plungers C3 may be changed as needed, so that different plungers C3 can withstand different pressures. In this embodiment, since the horizontal cross-sectional areas of the force-receiving portion C31 of each plunger C3 are all the same, the load measuring unit D115 can be installed on the plunger C3 corresponding to the third group C32C, which is independently provided in the central part of the "rotary" shape, to measure the force acting on each force-receiving portion C31 with the same horizontal cross-sectional area and the force acting on the pressurizing block mechanism D by the pressurizing rod C32. In another embodiment, when changing the horizontal cross-sectional area of ​​the force-receiving portion C31 of multiple plungers C3, the number of load measuring units D115 can be increased and provided at corresponding locations on the plungers C3 of the force-receiving portion C31 with different horizontal cross-sectional areas.

[0019] As shown in Figures 6-9, the pressure block mechanism D is provided at one end of the plunger C3, and the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 are each connected to the corresponding pressure rod C32 of the plunger C3. In addition, the positioning portions C321 of the lower ends of multiple pressure rods C32 are fitted into each of the positioning grooves D114, D214, and D313, respectively, and it is preferable that at least two of the positioning portions C321 of the lower ends of the pressure rods C32 are fitted. Since the horizontal cross-sections of each plunger passage C112 and the force receiving portion C31 of the plunger C3 are all circular, the plunger C3 may be pivotally supported in the plunger passage C112 by the force receiving portion C31. To avoid angular offset of the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 due to the pivoting of the plunger C3, each of the first pressure block assemblies D11, D21, and D31 is connected to the positioning portion C321 of the pressure rod C32 of at least two plungers C3. In this way, not only is the first pressure block assembly D11, D21, and D31 provided with favorable support, but the pivoting of the plunger C3 can also be restricted.

[0020] As shown in Figures 8 and 10, the crimping device is provided with a frame F on which a lower base F1 and an upper base F2 are provided, which are parallel to each other and maintain a constant distance apart. A plurality of support rods F4 are provided between the lower base F1 and the upper base F2 to maintain the distance between the lower base F1 and the upper base F2. The frame F is provided with a lifting frame F3 pivotally supported by the support rods F4, and the lifting frame F3 is provided with a plurality of guide rods F5, one end of which is fixed to the lifting frame F3 and the other end of which is pivotally supported by the upper base F2. The lifting mechanism E is provided with a lifting drive device E1, such as an air cylinder, on the upper base F2, and the lifting drive device E1 can drive the lifting frame F3 to move up and down. The lifting frame F3 is provided with a mounting base F31 fixed to one end of the guide rod F5, and vertically erected side bases F32 are provided on both sides below the mounting base F31. Between the two side bases F32, there is an upper sliding base F33 installed horizontally above and a lower sliding base F34 installed horizontally below. The upper sliding base F33 and the lower sliding base F34 can slide horizontally in and out between the two side bases F32. The upper pressure type B is provided on the lifting frame F3 so as to be linked with the lifting frame F3, and is specifically provided on the lower sliding base F34. The lower pressure type A is provided on the lower base F1 and is located below the upper pressure type B. The lower pressure type A is provided on the support base A1 with a heater A2 that can be heated and a temperature sensor A3 that can be detected. The drive mechanism C is provided with a piston drive device C4, such as an air cylinder, located outside the main body C1. One end of the piston drive device C4 is fixed below the upper slide base F33, and the other end extends downward, with a drive rod C41 extending from it. The drive rod C41 and the piston C2 are separated and maintain a distance from each other, but when driven and extended downward, it presses against and displaces the piston C2, thereby changing the pressure of the fluid S in the chamber C111. The upper end of the bearing base C122 at the upper end of the piston passage C121 and the lower end of the drive rod C41 are separated while maintaining a distance from each other under normal conditions.

[0021] As shown in Figures 6, 7, 11, and 12, in an embodiment of the present invention, when the object to be crimped W is crimped, the object to be crimped W is placed on the support base A1 of the lower pressure type A. Then, the lifting drive device E1 of the lifting mechanism E drives the lifting frame F3 to move the upper pressure type B in conjunction with the lower pressure type A, displacing it downwards toward the lower pressure type A. First, the upper pressure type B is lowered until the pressure block mechanism D contacts the upper surface W21 of the upper cover W2 of the object to be crimped W. Since the object to be compressed W is provided with multiple compression segments of different heights, the upward-pressure type B descends so that the lowest contact member D113 of the first compression block assembly D11 of the first compression block module D1 comes into contact with the first compression segment W211 of the top cover W2, the lowest contact members D213 of the four second compression block assemblies D21 of the second compression block module D2 come into contact with the second compression segment W212 of the top cover W2, and the four third compression block assemblies D31 of the third compression block module D3 come into contact with the third compression segment W213 of the top cover W2. In this case, the first compression block module D1, the second compression block module D2, and the third compression block module D3 are located at different heights, and the compression block mechanism D applies upward pressure to the plunger C3, causing the corresponding plunger C3 to move upward. If the volume of fluid S does not change, fluid S pushes the piston C2 upward. The pressure block mechanism D lowers the upper pressure type B until it contacts the upper lid W2 of the object to be compressed W, and then the drive rod C41 of the piston drive device C4 of the drive mechanism C pushes down the piston C2 to move downward (as shown in Figure 11) and acts on the fluid S in the chamber C111. If the volume of the fluid S does not change, the fluid S indirectly applies a downward pressure in the opposite direction to the plunger C3, and the plunger C3 applies pressure to the object to be compressed W, and each plunger C3 is pushed down and moves downward simultaneously by the pressure of the fluid S, and the drive mechanism C drives the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 of the pressure block mechanism D to apply the same pressure to the first compression segment W211, the second compression segment W212, and the third compression segment W213 of the upper lid W2, respectively. This pressure is sensed when the pressure rod C32 of the third group C32C, which is independently provided in the central part of the "rotary" shape, contacts the load measuring unit D115 in a downward direction. Referring also to Figure 2, in this case, the first contact surface W221 corresponding to the bottom of the first crimping segment W211 is attached to the first electronic element W11, causing the first electronic element W11 to contact the substrate W13; the second contact surface W222 corresponding to the bottom of the second crimping segment W212 is attached to the second electronic element W12, causing the second electronic element W12 to contact the substrate W13; and the third contact surface W223 corresponding to the bottom of the third crimping segment W213 contacts the substrate W13, thereby pressurizing the top cover W2 and bonding it to the integrated circuit element W1.

[0022] In the crimping method and apparatus according to an embodiment of the present invention, the drive mechanism C is provided with a chamber C111 capable of containing fluid in the main body C1, and further has a piston C2 that changes the pressure of the fluid in the chamber C111 by displacement, and a plunger C3 that is driven by the pressure of the fluid in the chamber C111 and is capable of vertical displacement. Therefore, when crimping the object to be crimped W, the pressure block mechanism D of the upward pressure type B contacts the upper surface of the object to be crimped W, so that the pressure block mechanism D applies upward pressure to the plunger C3, and further the drive mechanism C acts on the fluid in the chamber C111 by the piston C2, indirectly applying a downward pressure in the opposite direction to the plunger C3 through the fluid, thereby applying pressure to the object to be crimped by the plunger C3. As a result, the driving force of a single piston C2 is amplified into the driving force of multiple plungers C3, and a downward pressure can be secured when the pressure block mechanism D contacts the object to be crimped W.

[0023] The above description is merely an embodiment of the present invention and does not limit the scope of implementation of the present invention. Simple equivalent changes and modifications made based on the claims and specification of the present invention all remain within the scope of the patent of the present invention. [Explanation of Symbols]

[0024] A: Lower pressure type A1: Support stand A2: Heater A3: Temperature sensor B: Top pressure type C: Drive mechanism C1: Main unit C11: Base C111: Chamber C112: Plunger passage C113:Through hole C114: Stopper component C115: Contact stand C116: Upper base C117: Lower base C12: Cover C121: Piston passage C122: Bearing base C123: Port C124:Through hole C125: Stopper component C13: Bush C14: Bush fixing member C141: Shaft hole C2: Piston C21: Upper end C211: Pushing part C22: Bottom end C3: Plunger C31: Force receiving part C32: Pressure Rod C321: Positioning section C322: Connecting component C32A: Group 1 C32B: Group 2 C32C: Group 3 C4: Piston drive mechanism C41: Drive Rod D: Pressure blocking mechanism D1: First pressurization block module D11: First pressure block assembly D111: Fixing member D112: Fine adjustment component D113: Contact member D114: Positioning groove D115: Load measurement unit D116: Support section D2: Second pressurized block module D21: Second Pressurized Block Assembly D211: Fixing member D212: Fine adjustment component D213: Contact member D214: Positioning groove D3: Third pressurization block module D31: Third pressure block assembly D311: Fixing member D312: Contact member D313: Positioning groove D4: Screw fixing component D5: Screw fixing component (not shown) E: Lifting mechanism E1: Lifting drive device F: Stand F1: Lower stand F2: Upper stand F3: Lifting frame F31: Mounting platform F32: Side stand F33: Upper sliding base F34: Lower sliding platform F341: Hollow section F4: Support rod F5: Guide Rod S:Fluid W: Compressed material W1: Integrated circuit element W11: First electron links W12: Second electron elements W13: Circuit board W2: Top lid W21:Top surface W211: First crimp segment W212: Second crimp segment W213: Third crimp segment W22:Bottom side W221: 1st contact surface W222: Second contact surface W223: 3rd contact surface

Claims

1. To provide an object to be compressed, To provide a downward pressure type that is provided with a support base for placing the object to be compressed, To provide an upward pressure type that can be vertically displaced relative to the downward pressure type by driving, The aforementioned upper pressure type is provided with a drive mechanism and a pressurizing block mechanism that can be driven by the drive mechanism, The aforementioned drive mechanism has a chamber within its main body capable of containing fluid, a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and is capable of vertical displacement. When the object to be pressed is pressed, the upward-pressure type pressure block mechanism contacts the upper surface of the object to be pressed, thereby applying upward pressure to the plunger. Furthermore, the drive mechanism acts on the fluid in the chamber via the piston, indirectly applying downward pressure in the opposite direction to the plunger through the fluid, thereby applying pressure to the object to be pressed by the plunger. A crimping method including a crimping method.

2. A downward pressure type is provided, which has a support base for placing the object to be compressed, An upward-pressure type that is vertically displaceable relative to the downward-pressure type by drive, comprising a drive mechanism and a pressurizing block mechanism driveable by the drive mechanism, wherein the drive mechanism has a chamber capable of containing fluid within its main body, and further comprises a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and is vertically displaceable, A lifting mechanism that drives the upper pressure type to displace it vertically relative to the lower pressure type, thereby causing the pressure block mechanism to come into contact with or separate from the object to be pressed, A crimping device equipped with the following features.

3. The crimping device according to claim 2, wherein the main body is provided with a base and a cover, and the chamber is a space formed by being surrounded by the base and the cover.

4. The crimping device according to claim 3, wherein a contact base protruding outward is provided on the periphery of the base, and the upper part of the contact base, which is located above and forms the chamber inside, is circular and has a wide outer diameter, and the lower part of the base, which is located below and forms a plurality of plunger passages inside, is rectangular and has a narrower outer diameter on the corresponding parallel sides.

5. The crimping device according to claim 4, wherein the main body is arranged together with the lower base in the hollow section of the lower slide, and is fixed and placed on the upper edge of the lower slide on the circumferential side of the hollow section by the contact base.

6. The crimping device according to claim 3, wherein the main body is provided with a piston passage in a bearing base at the central position of the cover, the piston passage being displaceable within it, the piston passage being arranged in the vertical axis direction, the piston not being connected to any member vertically, and being freely displaceable vertically within the piston passage when subjected to an external force, and the piston passage being in communication with the chamber.

7. The crimping device according to claim 6, wherein the upper end of the piston passage is an open port, the lower end is blocked by a stopper member having a through hole, and the fluid in the chamber communicates with the piston passage through the through hole.

8. The crimping device according to claim 6, wherein the drive mechanism is provided with a piston drive device located outside the main body, and a drive rod is extended from one end of the piston drive device, and the upper end of the bearing base at the upper end of the piston passage and the lower end of the drive rod are separated while maintaining a distance from each other in normal conditions.

9. The crimping device according to claim 2, wherein the drive mechanism is provided with a piston drive device located outside the main body, and one end of the piston drive device extends downward to form a drive rod, and the drive rod and the piston are separated and maintain a distance from each other, but when driven and extended downward, the drive rod can press against and displace the piston.

10. The crimping device according to claim 2, wherein the height of the piston is lower than the length of the piston passage, the piston is provided with an upper end and a lower end, the upper end is provided with a groove-shaped pressing portion, and the lower end of the drive rod of the piston drive device is pressed into the pressing portion and comes into contact with the piston and moves in conjunction with it.

11. The crimping device according to claim 2, wherein the main body is provided with a plurality of plunger passages that are vertically erected at the bottom of the chamber, each of which a plurality of plungers is displaceable, and which are spaced apart from each other and parallel to each other, and the area above each plunger passage is blocked by a stopper member having a through hole, and the fluid in the chamber communicates with the plunger passages through the through hole.

12. Each plunger is provided with a force-receiving portion capable of receiving fluid pressure and a pressure rod integrally extending downward from the force-receiving portion, the pressure block mechanism can be directly pressed by the pressure rod by the plunger, the force-receiving portion has a large cross-sectional diameter and is located above, and the pressure rod has a small rod diameter and is located below the force-receiving portion, the crimping device according to claim 2.

13. The crimping device according to claim 12, wherein the pressure block mechanism is provided with a positioning groove into which the positioning portion of the lower end of the pressure rod is fitted, and the pressure block mechanism is screwed onto the pressure rod from bottom to top by a connecting member.

14. The crimping device according to claim 12, wherein the main body comprises a plurality of bushes corresponding to each of the plungers, and a plurality of bush fixing members for fixing the bushes, the bush fixing members are provided with shaft holes, the bushes are provided in the shaft holes, the pressure rod passes through the bushes and is guided by the bushes, and the upper edge of the bushes limits the bottom dead center of the descent of the plunger.

15. The crimping device according to claim 14, wherein each of the bush fixing members is substantially rectangular and arranged at an angle of 45 degrees to the rectangular lower base.

16. The crimping device according to claim 14, wherein the plurality of bush fixing members are arranged in three groups having the same center, including a first group, a second group, and a third group located in the central part of the rectangular frame-shaped "rotary" shape, which are spaced apart.

17. The crimping device according to claim 2, wherein the crimping device is provided with a frame on which a lifting frame is provided, the lifting mechanism is provided with a lifting drive device capable of driving the lifting frame to displace it up and down, and the upper pressure type is provided on the lifting frame so as to be linked with the lifting frame.

18. The lifting frame is provided with an upper slide platform installed above and a lower slide platform installed below, spaced apart from each other, the upper slide platform and the lower slide platform can be moved in and out by sliding horizontally between the two side platforms, the upper pressure type is provided on the lower slide platform, the drive mechanism is provided with a piston drive device located outside the main body, one end of the piston drive device is fixed below the upper slide platform and the other end extends downward as a drive rod, the drive rod and the piston are separated and spaced apart, but when driven and extended downward, the piston is pressed against and displaced, thereby changing the pressure of the fluid in the chamber, as described in claim 17.

19. A crimping device capable of performing the crimping method described in claim 1, comprising an upper pressure type and a lower pressure type, wherein the upper pressure type is provided with a drive mechanism and a pressure block mechanism driveable by the drive mechanism, the drive mechanism having a chamber capable of containing fluid within its main body, a piston that changes the pressure of the fluid in the chamber by displacement, and a plunger that is driven by the pressure of the fluid in the chamber and is capable of vertical displacement.

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