Transport robot

Abstract

The present invention provides a transfer robot that avoids interference between the workpiece and the chuck mechanism when the workpiece is removed from the cassette by being gripped by its end using a chuck mechanism, and then moved up and down using suction. [Solution] The transport robot has a first hand equipped with a chuck mechanism 37 that holds the outer peripheral end of a workpiece, and a first moving mechanism that moves the first hand to an advanced position capable of holding a workpiece housed in a cassette case, and to a retracted position further from the cassette case than the advanced position. The chuck mechanism 37 has a chuck section 70 consisting of chuck members 71 and 72 having claws 77 and 78 that can open and close vertically, when the direction connecting the retracted position and the advanced position is the X direction, the direction from the retracted position to the advanced position is the X1 direction, and the direction from the advanced position to the retracted position is the X2 direction, and a moving mechanism 64 consisting of a rod 66, a cylinder 67, and a slider 68 that moves the chuck section 70 in the X direction.

Description

Technical Field

[0001] The present invention relates to a transfer robot.

Background Art

[0002] Patent Document 1 describes a work inversion device that transfers a work between a plurality of holding devices. In the work inversion device of Patent Document 1, each of the plurality of holding devices includes a suction portion, and while sucking one surface of the work, the other surface of the work is sucked by the suction portion of another holding device, thereby transferring and conveying the work between the plurality of holding devices.

[0003] Thin plate-shaped workpieces such as semiconductor wafers are generally placed and stored on the shelf plates of cassette cases. Patent Document 2 describes a transfer robot that removes and transfers a wafer housed in a cassette while being held by a wafer ring from the cassette. The transfer hand includes a chuck mechanism that grips the end of the wafer ring.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] When taking out a workpiece such as a wafer housed in a cassette case and transferring it to the stage of a processing device, there may be a case where the workpiece is desired to be placed on the stage from above. However, when taking out the workpiece from the cassette case, if the end of the workpiece is clamped by a chuck mechanism as in Patent Document 2, it cannot be placed on the stage from above as it is.

[0006] Therefore, it is conceivable to remove the workpiece from the cassette using a hand equipped with a chuck mechanism, and then use a hand equipped with a suction part to pick up and transport the workpiece from above. However, if the chuck mechanism is simply opened after the workpiece has been gripped by the chuck mechanism, the workpiece will interfere with the chuck mechanism when the hand holding the workpiece is raised or lowered.

[0007] In view of the above, the object of the present invention is to avoid the workpiece interfering with the chuck mechanism when the workpiece is removed from the cassette by being gripped by its end with the chuck mechanism, and then moved up and down by suction. [Means for solving the problem]

[0008] To solve the above problems, one embodiment of the transfer robot according to the present invention comprises a first hand equipped with a chuck mechanism for gripping and holding the outer peripheral end of a workpiece, and a first movement mechanism for moving the first hand to a forward position capable of holding the workpiece housed in a workpiece housing, and to a retracted position further away from the workpiece housing than the forward position, wherein the direction connecting the retracted position and the forward position is defined as the first direction, the direction from the retracted position toward the forward position is defined as one side of the first direction, and the direction from the forward position toward the retracted position is defined as the other side of the first direction, the chuck mechanism is characterized by comprising a chuck portion that can be opened and closed vertically, and a movement mechanism for moving the chuck portion in the first direction. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a perspective view of the transport robot. [Figure 2] Figure 2 is a front view of the transport robot. [Figure 3] Figure 3 is an explanatory diagram illustrating the operation of a transport robot in which a workpiece is removed from a cassette case. [Figure 4] Figure 4 is an exploded perspective view of the first hand unit and the second hand unit. [Figure 5]Figure 5 is an exploded perspective view showing the workpiece being held by the first and second hand units. [Figure 6] Figure 6 is an explanatory diagram of the operation when a workpiece is transferred from the first hand unit to the second hand unit. [Figure 7] Figure 7 is a plan view showing the chuck mechanism in its open state. [Figure 8] Figure 8 is a plan view showing the chuck mechanism in the closed position. [Figure 9] Figure 9 is a perspective view of the chuck mechanism and support member. [Figure 10] Figure 10 is an exploded perspective view of the chuck mechanism and support member. [Figure 11] Figure 11 is a side view of the chuck and cam mechanism. [Figure 12] Figure 12 is an explanatory diagram of the operation of the chuck and cam mechanism. [Modes for carrying out the invention]

[0010] An embodiment of a transport robot to which the present invention is applied will be described below with reference to the drawings.

[0011] (Overall structure) Figure 1 is a perspective view of the transport robot 1. Figure 2 is a front view of the transport robot 1. Figure 3 is an explanatory diagram of the operation in which the transport robot 1 removes the workpiece W from the cassette case 2. Figure 4 is an exploded perspective view of the first hand unit 3 and the second hand unit 4. Figure 5 is an exploded perspective view showing the workpiece W being held by the first hand unit 3 and the second hand unit 4.

[0012] In this specification, the three directions of the X direction, Y direction, and Z direction are mutually orthogonal directions. One side of the X direction is the X1 direction, and the other side of the X direction is the X2 direction. One side of the Y direction is the Y1 direction, and the other side of the Y direction is the Y2 direction. One side of the Z direction is the Z1 direction, and the other side of the Z direction is the Z2 direction. The XY plane is a horizontal plane. The Z direction is the vertical direction (perpendicular direction). The Z1 direction is the upward direction. The Z2 direction is the downward direction.

[0013] In the following description, the Z direction in the drawings is described as the "vertical direction", the Z1 direction is described as the "upward direction", and the Z2 direction is described as the "downward direction". The X direction is the first direction. The X1 direction is one side of the first direction. The X2 direction is the other side of the first direction. The Y direction is the second direction.

[0014] As shown in FIG. 3, the transfer robot 1 performs an operation of taking out the workpiece W housed in the cassette case 2. As shown in FIG. 5, the workpiece W is a semiconductor wafer 10 (hereinafter referred to as "wafer 10") held by a flat wafer ring 11. The wafer 10 is attached to the center of an adhesive sheet 13 that seals a circular opening 12 provided at the center of the wafer ring 11. As shown in FIG. 5, the wafer ring 11 has four linear portions 14 linearly cut out on its outer peripheral edge.

[0015] One of the linear portions 14 of the wafer ring 11 is a first linear portion 14A provided with notch portions 15 on both sides in the circumferential direction. One of the other three linear portions 14 is provided at a position radially opposite to the first linear portion 14A and extends parallel to the first linear portion 14A. The remaining two linear portions 14 extend in a direction orthogonal to the first linear portion 14A and are provided at positions radially opposite to each other.

[0016] As shown in FIG. 3, the cassette case 2 has the above-mentioned workpieces W arranged vertically at a constant pitch. It includes a work storage part 2a to store the work. Inside the cassette case 2, placement parts (not shown) such as shelf boards for placing the wafer ring 11 of the work W are arranged vertically at a constant pitch. The work W is stored in the cassette case 2 with the first straight part 14A of the wafer ring 11 facing the opening side of the cassette case 2.

[0017] The transfer robot 1 is used in a semiconductor manufacturing system. The semiconductor manufacturing system includes, for example, a processing device (not shown) for processing the wafer 10, the transfer robot 1, and a control device (not shown) for controlling the transfer robot 1. The transfer robot 1 transfers the work W based on commands from the control device. For example, the transfer robot 1 performs an operation of placing the work W taken out from the cassette case 2 on the stage of the processing device. Also, the transfer robot 1 performs operations such as transferring the work W from the stage on which the work W is placed to another stage, and carrying out the work W from the stage on which the work W is placed.

[0018] As shown in FIGS. 1, 2, and 3, the transfer robot 1 includes a first hand unit 3, a second hand unit 4, and a support base 5 that supports the first hand unit 3 and the second hand unit 4. As shown in FIG. 2, the first hand unit 3 and the second hand unit 4 are arranged side by side in the Y direction. The first hand unit 3 is arranged on the Y1 side, and the second hand unit 4 is arranged on the Y2 side.

[0019] As shown in FIG. 3, the first hand unit 3 performs an operation of carrying out the work W stored in the cassette case 2. The transfer robot 1 performs an operation of delivering the work W held by the first hand unit 3 to the second hand unit 4. The second hand unit 4 sucks and holds the work W from above and transports it, and performs an operation of placing the work W on the stage of the processing device from above.

[0020] The support base 5 is equipped with a swivel mechanism (not shown) that rotates the entirety of the first hand unit 3 and the second hand unit 4 around a rotation axis extending in the vertical direction. The support base 5 may also be equipped with a lifting mechanism that raises and lowers the entirety of the first hand unit 3 and the second hand unit 4 vertically. Furthermore, the support base 5 may be fixed to a base that supports the support base 5, or it may be equipped with a mechanism that moves the support base 5 horizontally along a rail provided on the base.

[0021] (First hand unit) As shown in Figures 1 and 2, the first hand unit 3 comprises a first hand 30 and a first movement mechanism 31 for moving the first hand 30. The first movement mechanism 31 comprises a first articulated arm 32 for moving the first hand 30 in a horizontal plane and a first drive mechanism 33 for driving the first articulated arm 32. As shown in Figure 2, the first drive mechanism 33 is located inside the support base 5. The first drive mechanism 33 comprises, for example, a motor which is the drive source and a drive force transmission mechanism which reduces the rotation of the motor and transmits it to the first articulated arm 32.

[0022] As shown in Figures 2 and 4, the first articulated arm 32 comprises a first arm 34 connected to the output shaft of the first drive mechanism 33 and a second arm 35 connected to the first arm 34. When the first arm 34 rotates about a rotation axis L1 that extends vertically, the second arm 35 rotates in conjunction with the first arm 34, forming a linkage mechanism that extends and retracts in the X direction. When the first articulated arm 32 extends and retracts in the X direction, the first hand 30 moves linearly in the X direction while maintaining a posture with its tip facing the X1 direction.

[0023] The first hand unit 3 extends the first articulated arm 32 in the X1 direction toward the cassette case 2 and unloads the workpiece W. As shown in Figure 3, the first moving mechanism 31 is positioned in a forward position 30A where the tip of the first hand 30 is inserted into the cassette case 2, and above the support base 5. The first hand 30 is moved to the retracted position 30B, which is further away from the cassette case 2 than the forward position 30A.

[0024] As shown in Figures 4 and 5, the first hand 30 comprises a first hand body 36 connected to the tip of the first articulated arm 32, a chuck mechanism 37 positioned at the X1 end of the first hand body 36, and a pair of first plates 38 extending in the X1 direction from both sides of the chuck mechanism 37 in the Y direction. The pair of first plates 38 are workpiece support parts that support the workpiece W from below. The first plates 38 are made of, for example, ceramic plates. Circular pads 39 are attached to the tips of each of the pair of first plates 38. The pads 39 are made of, for example, an insulating resin such as PEEK (polyetheretherketone). Details of the chuck mechanism 37 will be described later.

[0025] As shown in Figure 3, the first hand unit 3 extends the first articulated arm 32 with the tip of the chuck mechanism 37 open, moving the first hand 30 to the forward position 30A. This inserts the first plate 38 under the workpiece W housed in the cassette case 2. The outer edge of the workpiece W is also inserted between the tips of the chuck mechanism 37. When the tips of the chuck mechanism 37 are closed in this state, the outer edge of the workpiece W is held in place by the chuck mechanism 37. Subsequently, the first articulated arm 32 is bent, moving the first hand 30 to the retracted position 30B. This removes the workpiece W from the cassette case 2.

[0026] As shown in Figure 5, the workpiece W, which has been unloaded from the cassette case 2, is held in the first hand 30 by the first plate 38, with both ends of the wafer ring 11 in the Y direction supported by the first plate 38, and the first straight portion 14A of the wafer ring 11 being held by the chuck mechanism 37. The wafer ring 11 is supported by the first plate 38 via a pad 39 attached to the tip of the first plate 38.

[0027] (Second hand unit) As shown in Figures 1 and 2, the second hand unit 4 comprises a second hand 40 and a second movement mechanism 41 for moving the second hand 40. The second movement mechanism 41 comprises a second articulated arm 42 for moving the second hand 40 in a horizontal plane and a second drive mechanism 43 for driving the second articulated arm 42. As shown in Figure 2, the second drive mechanism 43 is located inside the support base 5. The second drive mechanism 43 comprises, for example, a motor which is the drive source and a drive force transmission mechanism which reduces the rotation of the motor and transmits it to the second articulated arm 42.

[0028] As shown in Figures 2 and 4, the second articulated arm 42 comprises a first arm 44 connected to the output shaft of the second drive mechanism 43, a second arm 45 connected to the first arm 44, a third arm 46 connected to the second arm 45, and a second hand support 47 connected to the tip of the third arm 46. When the first arm 44 rotates about a rotation axis L2 extending in the Z direction, the second arm 45 and the third arm 46 rotate in conjunction with the first arm 44, forming a linkage mechanism that extends and retracts in the X direction. When the second articulated arm 42 extends and retracts in the X direction, the second hand 40 moves linearly in the X direction while maintaining a posture with its tip pointed in the X1 direction. Furthermore, when moving the second hand 40 toward the stage of the processing device, the second articulated arm 42 can also extend its tip in a direction different from the X direction within the XY plane.

[0029] As shown in Figures 1, 2, and 3, the second hand 40 is positioned above the first hand 30. As shown in Figure 1, the second movement mechanism 41 can move the second hand 40 to a handover position 40B that overlaps the first hand 30, which has moved to the retracted position 30B, from above by bending the second articulated arm 42.

[0030] The second hand support section 47 includes a lifting mechanism 48 and a hand adjustment mechanism 49. The second hand 40 is connected to the tip of the second articulated arm 42 via the lifting mechanism 48 and the hand adjustment mechanism 49. The lifting mechanism 48 moves the second hand 40 in the vertical direction. The lifting mechanism 48 is a linear motion mechanism such as a cylinder. As described above, since the second hand 40 is located above the first hand 30, when the second hand 40 descends it approaches the first hand 30, and when the second hand 40 rises it moves away from the first hand 30.

[0031] As shown in Figures 1 and 4, the second hand 40 comprises a second hand body 50 located in the X1 direction of the second hand support 47, a second frame 51 extending from the second hand body 50 in the X1 direction, and a plurality of suction parts 56 arranged on the second frame 51. Each of the plurality of suction parts 56 is connected to a suction device (not shown) via an air tube 58 routed above the second frame 51.

[0032] As shown in Figure 4, the suction unit 56 is equipped with a suction pad 57 that protrudes downward from the second frame 51. The suction pad 57 is made of a resin such as fluororubber. When the workpiece W held by the first hand 30 is picked up by the second hand 40, the tip surface of the suction pad 57 is brought into close contact with the surface of the wafer ring 11 before the suction device is driven. As a result, the workpiece W is picked up by the suction pad 57, as shown in Figure 5. The hand adjustment mechanism 49 is a mechanism for adjusting the position and inclination of the second hand 40, taking into account the deflection of the workpiece W held by the first hand 30, so that the workpiece W can be picked up by multiple suction units 56.

[0033] As shown in Figure 4, the second frame 51 includes a hand base 52 that protrudes from the second hand body 50 in the X1 direction and extends to both sides in the Y direction, a first frame portion 53 that extends in the X1 direction from the Y1 end of the hand base 52, a second frame portion 54 that extends in the X1 direction from the Y2 end of the hand base 52, and a third frame portion 55 that extends in the Y direction and connects the first frame portion 53 and the second frame portion 54. The third frame portion 55 is connected to the center of the first frame portion 53 and the second frame portion 54 in the X direction. The second frame 51 is made of, for example, a ceramic plate.

[0034] The second hand 40 is equipped with four suction parts 56. Two of the four suction parts 56 are located at both ends of the first frame 53 in the X direction, and the other two are located at both ends of the second frame 54 in the X direction. Therefore, two of the four suction parts 56 are located at the tips of the first frame 53 and the second frame 54. The other two suction parts 56 are located at the positions where the first frame 53 and the second frame 54 are connected to the hand base 52. Two of the four suction parts 56 are positioned to overlap the tip of the first plate 38 from above when the first hand 30 moves to the retracted position 30B and the second hand 40 moves to the transfer position 40B, as shown in Figure 1. A pad 39 on which the workpiece W rests is located at the tip of the first plate 38, as described above. Therefore, two of the four suction parts 56 are positioned to overlap the pad 39 from above.

[0035] (The action of passing on workpiece W) Figure 6 is an explanatory diagram of the operation when transferring workpiece W from the first hand unit 3 to the second hand unit 4. The transport robot 1 takes the workpiece W out of the cassette case 2 with the first hand unit 3 and then transfers the workpiece W from the first hand unit 3 to the second hand unit 4. Specifically, the first hand unit 3 and the second hand unit 4 are operated in the order of steps S1, S2, S3, and S4 in Figure 6.

[0036] First, in step S1, the first hand 30 holding the workpiece W is moved to the retracted position 30B, and the second hand 40 is moved to the transfer position 40B. At this time, the lifting mechanism 48 raises the second hand 40 to the raised position 40H shown in Figure 6. Position 40H is the position where the suction pad 57 of the second hand 40 is separated from the workpiece W.

[0037] Next, in step S2, the second hand 40 is lowered to the lowered position 40L shown in Figure 6, and the suction pads 57 of the four suction parts 56 are brought into close contact with the surface of the workpiece W. In this embodiment, the four suction pads 57 are brought into close contact with the surface of the wafer ring 11. Then, the suction device is driven to adsorb the wafer ring 11. As a result, the workpiece W is held by the first hand 30 and also held by the second hand 40.

[0038] Next, in step S3, the tip of the chuck mechanism 37 of the first hand 30 is opened vertically, and the tip of the chuck mechanism 37 is moved in the X2 direction and pulled into the first hand body 36. As a result, the chuck mechanism 37 does not overlap the outer edge of the workpiece W vertically. The workpiece W is not held by the chuck mechanism 37, but rests on the first plate 38 and is held in place by the second hand 40.

[0039] Finally, in step S4, the lifting mechanism 48 is driven to raise the second hand 40, which is holding the workpiece W, to the raised position 40H. At this time, the tip of the chuck mechanism 37 is retracted in the X2 direction, so the workpiece W can be lifted without interfering with the chuck mechanism 37. With this, the transfer of the workpiece W from the first hand 30 to the second hand 40 is completed.

[0040] After the workpiece W is handed over to the second hand unit 4, the transport robot 1 places the workpiece W onto the processing unit's stage from above. For example, this may be done by combining some or all of the following actions: rotating the entire second hand unit 4 relative to the support base 5, extending and retracting the second articulated arm 42, and raising and lowering the second hand 40 relative to the second articulated arm 42 using the lifting mechanism 48. Alternatively, the action of raising and lowering the entire second hand unit 4 relative to the support base 5 may also be combined.

[0041] (Chuck mechanism) Figure 7 is a plan view showing the chuck mechanism 37 in the open position. Figure 8 is a plan view showing the chuck mechanism 37 in the closed position. Figure 9 is a perspective view of the chuck mechanism 37 and the support member 63. Figure 10 is an exploded perspective view of the chuck mechanism 37 and the support member 63. Figure 11 is a side view of the chuck section 70 and the cam mechanism 73. Figure 12 is an explanatory diagram of the operation of the chuck section 70 and the cam mechanism 73.

[0042] As shown in Figures 4 and 5, the first hand body 36 of the first hand 30 comprises a hand housing 61 that houses the chuck mechanism 37, a cover 62 fixed to the upper end of the hand housing 61, and a support member 63 fixed to the end of the hand housing 61 in the X1 direction. Figures 7 and 8 are plan views of the first hand 30 as seen from above, with the cover 62 removed from the hand housing 61. The chuck mechanism 37 comprises a chuck portion 70 whose tip in the X1 direction can be opened and closed vertically, a movement mechanism 64 that moves the chuck portion 70 in the X direction relative to the hand housing 61, and an opening and closing mechanism 65 that opens and closes the chuck portion 70.

[0043] As shown in Figures 7, 8, 9, and 10, the moving mechanism 64 includes a cylinder 67 with a rod 66 protruding in the X1 direction and a slider 68 connected to the tip of the rod 66. As shown in Figure 10, the chuck portion 70 includes a support shaft 69 extending in the Y direction and a first chuck member 71 and a second chuck member 72 rotatably connected to the support shaft 69.

[0044] The support shaft 69 of the chuck portion 70 is fixed to the slider 68 and protrudes from the slider 68 on both sides in the Y direction. One set of chuck portions 70 is arranged at each end of the support shaft 69 in the Y direction. Therefore, at each end of the support shaft 69 in the Y direction, there is a first chuck member 71 and a second chuck member The sets of chuck members 72 are connected one by one. The first chuck member 71 and the second chuck member 72 rotate about a rotation axis L0 that passes through the center of the support shaft 69 and extends in the Y direction.

[0045] The moving mechanism 64 drives the cylinder 67 to extend the rod 66 in the X1 direction, thereby advancing the slider 68 in the X1 direction. This causes the two sets of chuck portions 70 to advance simultaneously in the X1 direction. As shown in Figure 8, the moving mechanism 64 advances the two sets of chuck portions 70 to a gripping position 70A where the tips of the chuck portions 70 overlap the outer peripheral end of the workpiece W vertically. On the other hand, when the cylinder 67 is driven to pull the rod 66 in the X2 direction, the two sets of chuck portions 70 retract in the X2 direction via the slider 68. As shown in Figure 7, the moving mechanism 64 retracts the two sets of chuck portions 70 to an open position 70B where the tips of the chuck portions 70 are located X2 direction from the outer peripheral end of the workpiece W.

[0046] The opening / closing mechanism 65 opens and closes two sets of chuck sections 70 simultaneously. As shown in Figure 9, the opening / closing mechanism 65 includes a cam mechanism 73 and a spring 79 attached to the outer circumference of the rod 66 of the moving mechanism 64. The function of the spring 79 will be described later. The cam mechanism 73 causes the chuck section 70 to open and close as the chuck section 70 moves in the X direction. Specifically, when the chuck section 70 moves in the X1 direction, it causes the chuck section 70 to close its tip, and when the chuck section 70 moves in the X2 direction, it causes the chuck section 70 to open its tip. Therefore, when the chuck section 70 moves to the gripping position 70A, the tip of the chuck section 70 is in its most closed state. Also, when the chuck section 70 moves to the open position 70B, the tip of the chuck section 70 is in its most open state. Figure 9 shows the tip of the chuck section 70 in its most open state.

[0047] As shown in Figures 10 and 11, the cam mechanism 73 includes a first cam groove 74 formed in the first chuck member 71, a second cam groove 75 formed in the second chuck member 72, and a cam pin 76 that moves inside the first cam groove 74 and the second cam groove 75. As shown in Figures 9 and 10, the cam pin 76 is mounted so as to pass through a support member 63 fixed to the tip of the hand housing 61. The support member 63 is positioned between two sets of chuck portions 70. Both ends of the cam pin 76, which protrude from the support member 63 on both sides in the Y direction, are passed through the first cam groove 74 and the second cam groove 75, respectively.

[0048] As shown in Figures 10 and 11, both the first cam groove 74 and the second cam groove 75 extend along the X direction and are inclined in the opposite direction to the X direction. The first cam groove 74 is inclined downward (towards the Z2 direction) as it moves toward the X1 direction. On the other hand, the second cam groove 75 is inclined upward (towards the Z1 direction) as it moves toward the X1 direction.

[0049] When the cylinder 67 is driven and the rod 66 is extended, the chuck portion 70 is advanced in the X1 direction, causing the cam pin 76 to move in the X2 direction inside the first cam groove 74 and the second cam groove 75. As a result, the first chuck member 71 rotates in the first rotational direction R1 shown in Figure 11, and the first jaw portion 77 provided at the X1-direction end of the first chuck member 71 descends. Meanwhile, the second chuck member 72 rotates in the second rotational direction R2, which is opposite to the first rotational direction R1, and the second jaw portion 78 provided at the X1-direction end of the second chuck member 72 rises in the Z1 direction. Consequently, as the chuck portion 70 advances in the X1 direction, the end of the chuck portion 70 closes, and the first jaw portion 77 and the second jaw portion 78 move closer together. When the cylinder 67 pulls in the rod 66 and moves the chuck portion 70 backward in the X2 direction, the reverse operation occurs, the tip of the chuck portion 70 opens, and the first jaw portion 77 and the second jaw portion 78 separate.

[0050] (Shape of the cam groove) As shown in Figure 11, the first cam groove 74 comprises a first region 74A located at the end of the first cam groove 74 in the X2 direction, and a second region 74B which is a region in the X1 direction relative to the first region 74A. Similarly, the second cam groove 75 comprises a first region 75A located at the X2 end of the second cam groove 75, and a second region 75B which is a region in the X1 direction relative to the first region 75A.

[0051] As can be seen from Figure 11, the second regions 74B and 75B have a constant inclination angle with respect to the X direction and extend in a straight line. On the other hand, the first region 74A has a larger inclination angle with respect to the X direction than the second region 74B. More specifically, the first region 74A is curved in a direction in which the inclination angle with respect to the X direction increases as it approaches the end of the first cam groove 74 in the X2 direction. Similarly, the first region 75A has a larger inclination angle with respect to the X direction than the second region 75B. More specifically, the first region 75A is curved in a direction in which the inclination angle with respect to the X direction increases as it approaches the end of the second cam groove 75 in the X2 direction.

[0052] The inclination angles of the first cam groove 74 and the second cam groove 75 correspond to the speed at which the chuck portion 70 opens and closes, or in other words, the speed at which the first jaw portion 77 and the second jaw portion 78 approach or move away from each other. A larger inclination angle of the first cam groove 74 and the second cam groove 75 with respect to the X direction results in a faster speed at which the first jaw portion 77 and the second jaw portion 78 approach or move away from each other. In this embodiment, as described above, both the first cam groove 74 and the second cam groove 75 have a shape in which the inclination angle with respect to the X direction increases as they approach the end in the X2 direction. Therefore, when the chuck portion 70 closes, it initially closes slowly, but the closing speed is fastest in the final stage of gripping the workpiece W.

[0053] Figure 12 is an explanatory diagram of the operation of the chuck portion 70 and the cam mechanism 73. In Figure 12, W indicates the workpiece gripped by the chuck portion 70. W1 and W2 indicate the workpieces above and below it. P0 to P8 in Figure 12 show the process of the cam pin 76 moving through the entire length of the first cam groove 74 and the second cam groove 75. P0 shows the state when the chuck portion 70 is in the open position 70B. The section from P0 to P3 is the section in which the cam pin 76 moves through the second region 74B and the second region 75B. The section from P3 to P8 is the section in which the cam pin 76 moves through the first region 74A and the first region 75A.

[0054] As described above, since the inclination angle of the second region 74B and the second region 75B with respect to the X direction is small, the closing speed of the first claw portion 77 and the second claw portion 78 is slow compared to the amount of movement in the X direction. Therefore, as can be seen from the state of P3, the outer peripheral end of the workpiece W is inserted between the first claw portion 77 and the second claw portion 78 while the gap between the first claw portion 77 and the second claw portion 78 is still wide. At this time, the positions of the first claw portion 77 and the second claw portion 78 are such that a predetermined gap can be secured between them and the upper and lower workpieces W1 and W2.

[0055] On the other hand, since the first region 74A and the first region 75A are curved in a direction in which the inclination angle with respect to the X direction increases, the first jaw portion 77 and the second jaw portion 78 close rapidly in the section from P3 to P8 even if the amount of movement in the X direction is small. P7 shows the state in which the workpiece W is held between the first jaw portion 77 and the second jaw portion 78. P8 shows the state in which the chuck portion 70 is closed until the first jaw portion 77 and the second jaw portion 78 come into contact when there is no workpiece W between the first jaw portion 77 and the second jaw portion 78.

[0056] The chuck portion 70 does not actually close to state P8 because the workpiece W is held between the first jaw portion 77 and the second jaw portion 78. As described above, the opening and closing mechanism 65 is equipped with a spring 79 attached to the outer circumference of the rod 66 of the moving mechanism 64, and when the workpiece W is held in place, the elastic force of the spring 79 biases the first jaw portion 77 and the second jaw portion 78 toward each other. Therefore, the workpiece W is gripped by the first jaw portion 77 and the second jaw portion 78 by the elastic force of the spring 79.

[0057] (Effects and Benefits) As described above, the transport robot 1 in this embodiment includes a first hand 30 equipped with a chuck mechanism 37 that holds the outer peripheral end of the workpiece W, and the workpiece W housed in a cassette case 2. The chuck mechanism 37 includes a forward position 30A in which it can hold the first hand 30, and a first moving mechanism 31 that moves the first hand 30 to a retracted position 30B which is further from the cassette case 2 than the forward position 30A. When the direction connecting the retracted position 30B and the forward position 30A is the X direction, the direction from the retracted position 30B to the forward position 30A is the X1 direction, and the direction from the forward position 30A to the retracted position 30B is the X2 direction, the chuck mechanism 37 includes a chuck portion 70 that can be opened and closed vertically, and a moving mechanism 64 that moves the chuck portion 70 in the X direction.

[0058] Thus, the transport robot 1 in this embodiment can not only open and close the chuck mechanism 37 that grips the outer edge of the workpiece W, but can also move it in the X direction. Therefore, when transferring the workpiece W to a hand other than the first hand 30, the chuck mechanism 37 can be retracted to a position where it does not overlap the workpiece W vertically. This makes it possible to avoid the workpiece W interfering with the chuck portion 70 of the first hand 30 when, for example, another hand is raised or lowered to move the workpiece W.

[0059] In this embodiment, the chuck mechanism 37 includes an opening / closing mechanism 65 for opening and closing the chuck portion 70. The opening / closing mechanism 65 causes the chuck portion 70 to close as it moves in the X1 direction, and to open as it moves in the X2 direction. By coordinating the forward and backward movement of the chuck portion 70 with the opening and closing movement of the chuck portion 70 in this way, it is possible to close the chuck portion 70 to clamp the outer edge of the workpiece W while inserting the chuck portion 70 into the cassette case 2, and to open the chuck portion 70 and retract it when handing the workpiece W to another hand.

[0060] In this embodiment, the first hand 30 includes a first hand body 36 that supports the chuck mechanism 37. The opening and closing mechanism 65 is a cam mechanism 73 that includes a cam pin 76 positioned on the first hand body 36 and a cam groove provided on the chuck portion 70. By appropriately setting the shape of the cam groove, the chuck portion 70 can be opened and closed at the appropriate timing.

[0061] Furthermore, when a cam mechanism is used as the opening / closing mechanism 65, the arrangement of the cam groove and the cam pin can be reversed. That is, the cam mechanism can be any mechanism that includes a cam pin located on one of the first hand body 36 and the chuck portion 70, and a cam groove provided on the other of the first hand body 36 and the chuck portion 70.

[0062] In this embodiment, the first hand 30 comprises a first hand body 36 that supports the chuck mechanism 37, and the chuck portion 70 comprises a support shaft 69 that is moved in the X direction by a moving mechanism 64, and a first chuck member 71 and a second chuck member 72 that are rotatably connected to the support shaft 69. The opening and closing mechanism 65 comprises a cam mechanism 73 that includes a first cam groove 74 provided in the first chuck member 71 and a second cam groove 75 provided in the second chuck member 72 as cam grooves, and a cam pin 76 that moves inside the first cam groove 74 and the second cam groove 75. The cam pin 76 is positioned in the first hand body 36, and the first cam groove 74 and the second cam groove 75 extend in a direction inclined in the opposite direction to the X direction. As a result, as the chuck portion 70 moves in the X1 direction, the first chuck member 71 and the second chuck member 72 are rotated in opposite directions, allowing the tip of the chuck portion 70 to be closed. Furthermore, as the chuck moves in the X2 direction, the first chuck member 71 and the second chuck member 72 are rotated in the opposite direction to when they are closed, allowing the tip of the chuck portion 70 to be opened.

[0063] In this embodiment, the first cam groove 74 and the second cam groove 75 each have a first region 74A, 75A at the end in the X2 direction, and a second region 74B, 75B in the X1 direction that is greater than the first region 74A, 75A, and the first region 74A, 75A has a larger inclination angle with respect to the X direction than the second region 74B, 75B. The speed at which the chuck portion 70 closes is increased by the inclination angle of the cam groove. This increases. Therefore, with the cam groove shape described above, when the chuck portion 70 closes, it closes slowly at first, but in the final stage of gripping the workpiece W, it can be made to close at a faster speed. This operation reduces the risk that when removing the workpiece W from the cassette case 2, the outer peripheral end of the workpiece W may not be able to be inserted between the first chuck member 71 and the second chuck member 72 due to a decrease in the vertical positional accuracy of the workpiece W relative to the chuck portion 70.

[0064] In this embodiment, it is preferable that the inclination angle of the first region 74A increases with respect to the X direction as it moves toward the X2 direction. This allows the closing speed to gradually increase as it approaches the final stage of clamping the workpiece W. Therefore, the risk of being unable to insert the outer peripheral end of the workpiece W between the first chuck member 71 and the second chuck member 72 due to a decrease in the vertical positional accuracy of the workpiece W relative to the chuck portion 70 can be reduced.

[0065] In this embodiment, the first hand 30 is equipped with a pair of first plates 38 extending in the X1 direction from both sides in the Y direction of the chuck mechanism 37, and the workpiece W is supported from below by the pair of first plates 38. By combining the first plates 38 and the chuck mechanism 37 in this way, the workpiece W can be supported even if the length of the first plates 38 is shortened. Therefore, even if the stacking spacing of the workpieces W when they are housed in the cassette case 2 is narrow, it is possible to avoid the first plates 38 bending and interfering with other workpieces W when removing the workpieces W.

[0066] In this embodiment, the apparatus includes a second hand 40 equipped with a suction portion 56 for adsorbing the surface of the workpiece W, a second moving mechanism 41 for moving the second hand 40 to a transfer position 40B that is vertically overlapping with the retracted position 30B, and a lifting mechanism 48 for raising and lowering the second hand 40 that has moved to the transfer position 40B. By combining the second hand 40 for adsorbing the surface of the workpiece W and the lifting mechanism in this way, after the workpiece W is removed from the cassette case 2 by gripping its outer peripheral end with the first hand 30, the workpiece W can be held from above by the suction portion 56 of the second hand 40. Therefore, the workpiece W removed from the cassette case 2 can be placed on the stage of the processing apparatus from above without being inverted.

[0067] In this embodiment, the second moving mechanism 41 is a second articulated arm 42 that moves the second hand 40 in a horizontal plane, and the lifting mechanism 48 is provided at the tip of the second articulated arm 42 and raises and lowers the second hand 40 relative to the second articulated arm 42. By combining the articulated arm and the lifting mechanism in this way, it is possible to pick up and hold the workpiece W from above, then transport it to the stage of the processing device and place it on the stage from above.

[0068] (Other embodiments) (1) The above-described transport robot 1 is equipped with a second hand 40 that grips the surface of the workpiece W, in addition to a first hand 30 that holds the outer peripheral end of the workpiece W, but the second hand 40 is not required. In this case, when the transport robot 1 hands over the workpiece W to the hand of another robot, it can retract the chuck portion 70 after the hand of the other robot has gripped the surface of the workpiece W. Also, the second hand 40 or the hand of the other robot may be equipped with an edge grip chuck mechanism that grips the workpiece W from the outer peripheral side, rather than a suction portion 56 that grips the workpiece W from above.

[0069] (2) The above-described transport robot 1 uses a cam mechanism 73 to synchronize the movement of the chuck portion 70 in the X direction with the opening and closing operation of the chuck portion 70. However, the opening and closing mechanism and the movement mechanism may be configured to operate in conjunction with each other through control.

[0070] (summary) The present invention can take the following forms. (1) A first hand equipped with a chuck mechanism that grips and holds the outer edge of the workpiece, The first hand has a forward position capable of holding the workpiece housed in the workpiece housing, and a first moving mechanism that moves the first hand to a retracted position further away from the workpiece housing than the forward position. When the direction connecting the retracted position and the forward position is defined as the first direction, the direction from the retracted position to the forward position is defined as one side of the first direction, and the direction from the forward position to the retracted position is defined as the other side of the first direction, The transport robot is characterized by comprising a chuck mechanism that can be opened and closed vertically, and a moving mechanism that moves the chuck in the first direction.

[0071] (2) The chuck mechanism includes an opening and closing mechanism for opening and closing the chuck portion. The transfer robot according to (1) above, characterized in that the opening and closing mechanism causes the chuck portion to close when it moves to one side in the first direction, and causes the chuck portion to open when it moves to the other side in the first direction.

[0072] (3) The aforementioned first hand comprises a first hand body that supports the chuck mechanism, The transfer robot according to (2) above, characterized in that the opening and closing mechanism has a cam mechanism comprising a cam pin disposed on one of the first hand body and the chuck portion, and a cam groove provided on the other of the first hand body and the chuck portion.

[0073] (4) The aforementioned first hand comprises a first hand body that supports the chuck mechanism, The chuck portion comprises a support shaft that is moved in the first direction by the moving mechanism, and a first chuck member and a second chuck member that are rotatably connected to the support shaft. The opening and closing mechanism includes a cam mechanism comprising a first cam groove provided in the first chuck member, a second cam groove provided in the second chuck member, and a cam pin that moves inside the first cam groove and the second cam groove, wherein the cam pin is positioned on the first hand body. The transport robot according to (2) above, characterized in that the first cam groove and the second cam groove extend in a direction inclined in the opposite direction to the first direction.

[0074] (5) The first cam groove and the second cam groove each comprise a first region at the other end in the first direction and a second region on one side of the first region in the first direction, The transport robot according to any one of the above (4), characterized in that the first region has a larger inclination angle with respect to the first direction than the second region.

[0075] (6) The transport robot according to (5) above, characterized in that the first region has an increasing inclination angle with respect to the first direction as it moves toward the other side of the first direction.

[0076] (7) The transfer robot according to any one of (1) to (6) above, wherein the first hand comprises a pair of first plates extending from both sides of the chuck mechanism to one side in the first direction, and the workpiece is supported from below by the pair of first plates.

[0077] (8) A second hand equipped with a suction part that adsorbs onto the surface of the workpiece, A second movement mechanism moves the second hand to a transfer position that overlaps vertically with the aforementioned retracted position, A transport robot according to any one of (1) to (7) above, characterized by having a lifting mechanism for raising and lowering the second hand which has moved to the transfer position.

[0078] (9) The second movement mechanism is a second articulated arm that moves the second hand in a horizontal plane, The transport robot according to (8) above, wherein the lifting mechanism is provided at the tip of the second articulated arm, and the second hand is raised and lowered relative to the second articulated arm. [Explanation of Symbols]

[0079] 1...Transport robot, 2...Cassette case, 2a...Workpiece housing section, 3...First hand unit, 4...Second hand unit, 5...Support base, 10...Semiconductor wafer (wafer), 11...Wafer ring, 12...Opening, 13...Adhesive sheet, 14...Straight section, 14A...First straight section, 15...Notch section, 30...First hand, 30A...Forward position, 30B...Reverse position, 31...First moving mechanism, 32...First articulated arm, 33... 34...First drive mechanism, 35...First arm, 36...First hand body, 37...Chuck mechanism, 38...First plate, 39...Pad, 40...Second hand, 40B...Transfer position, 40H...Raising position, 40L...Lowering position, 41...Second movement mechanism, 42...Second articulated arm, 43...Second drive mechanism, 44...First arm, 45...Second arm, 46...Third arm, 47...Second hand support, 48...Raising and lowering Mechanism, 49...Hand adjustment mechanism, 50...Second hand body, 51...Second frame, 52...Hand base, 53...First frame section, 54...Second frame section, 55...Third frame section, 56...Suction section, 57...Suction pad, 58...Air tube, 61...Hand housing, 62...Cover, 63...Support member, 64...Movement mechanism, 65...Opening / closing mechanism, 66...Rod, 67...Cylinder, 68...Slider, 69...Support shaft, 70...Chuck section, 70A...Grip Holding position, 70B…Open position, 71…First chuck member, 72…Second chuck member, 73…Cam mechanism, 74…First cam groove, 74A…First area, 74B…Second area, 75…Second cam groove, 75A…First area, 75B…Second area, 76…Cam pin, 77…First jaw part, 78…Second jaw part, 79…Spring, L0, L1, L2…Rotation axis, R1…First rotation direction, R2…Second rotation direction, W, W1, W2…Workpiece

Claims

1. A first hand equipped with a chuck mechanism that grips and holds the outer edge of the workpiece, The first hand has a forward position capable of holding the workpiece housed in the workpiece housing, and a first moving mechanism that moves the first hand to a retracted position further away from the workpiece housing than the forward position. When the direction connecting the retracted position and the forward position is defined as the first direction, the direction from the retracted position to the forward position is defined as one side of the first direction, and the direction from the forward position to the retracted position is defined as the other side of the first direction, The transport robot is characterized in that the chuck mechanism comprises a chuck portion that can be opened and closed vertically, and a moving mechanism that moves the chuck portion in the first direction.

2. The chuck mechanism includes an opening and closing mechanism for opening and closing the chuck portion. The transfer robot according to claim 1, characterized in that the opening and closing mechanism causes the chuck portion to close when it moves to one side in the first direction, and causes the chuck portion to open when it moves to the other side in the first direction.

3. The first hand comprises a first hand body that supports the chuck mechanism, The transfer robot according to claim 2, characterized in that the opening and closing mechanism has a cam mechanism comprising a cam pin disposed on one of the first hand body and the chuck portion, and a cam groove provided on the other of the first hand body and the chuck portion.

4. The first hand comprises a first hand body that supports the chuck mechanism, The chuck portion comprises a support shaft that is moved in the first direction by the moving mechanism, and a first chuck member and a second chuck member that are rotatably connected to the support shaft. The opening and closing mechanism includes a cam mechanism comprising a first cam groove provided in the first chuck member, a second cam groove provided in the second chuck member, and a cam pin that moves inside the first cam groove and the second cam groove, wherein the cam pin is positioned on the first hand body. The transport robot according to claim 2, characterized in that the first cam groove and the second cam groove extend in a direction inclined in the opposite direction to the first direction.

5. The first cam groove and the second cam groove each comprise a first region at the other end in the first direction and a second region on one side of the first region in the first direction, The transport robot according to claim 4, characterized in that the first region has a larger inclination angle with respect to the first direction than the second region.

6. The transport robot according to claim 5, characterized in that the first region has an increasing inclination angle with respect to the first direction as it moves toward the other side of the first direction.

7. The transfer robot according to claim 1, characterized in that the first hand comprises a pair of first plates extending from both sides of the chuck mechanism toward one side in the first direction, and the workpiece is supported from below by the pair of first plates.

8. A second hand equipped with an adsorption part that adsorbs onto the surface of the workpiece, A second movement mechanism moves the second hand to a transfer position that overlaps vertically with the aforementioned retracted position, The transport robot according to claim 1, further comprising a lifting mechanism for raising and lowering the second hand which has moved to the aforementioned transfer position.

9. The second movement mechanism is a second articulated arm that moves the second hand in a horizontal plane, The transport robot according to claim 8, characterized in that the lifting mechanism is provided at the tip of the second articulated arm and raises and lowers the second hand relative to the second articulated arm.

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