Slot die, coating apparatus, and coating film forming method

Abstract

To provide a slot die, a coating apparatus, and a coating film forming method that highly control the uniformity of the thickness of the coating film in the width direction. [Solution] A slot die in which the outlet for the coating liquid is a slot, comprising a base block including a sliding surface, a tip block including a first slot surface and a first outer surface that form a slot, and positioned in contact with the base block and the sliding surface, and an adjustment device positioned opposite the first outer surface, wherein the tip block slides along the sliding surface due to the action of the adjustment device from the first outer surface side, and the first slot surface moves due to the sliding of the tip block.

Description

Technical Field

[0001] The present disclosure relates to a slot die, a coating apparatus, and a coating film forming method.

Background Art

[0002] Slot dies are widely used for applying various fluid materials. As a method for adjusting the discharge amount of the fluid material discharged from the slot die, for example, the following techniques are known.

[0003] Patent Document 1 discloses a slot die that adjusts the width of the slot by changing the width of a first groove extending in the width direction (hereinafter also referred to as the width direction) of the slot die with an adjusting tool. This slot die improves the uniformity of the thickness of the coating film in the width direction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In order to obtain a target coating film, it may be required to more highly control the uniformity of the thickness of the coating film in the width direction of the slot die.

[0006] The present disclosure has been made in view of the above circumstances. The problem to be solved by one embodiment of the present disclosure is to provide a slot die, a coating apparatus, and a coating film forming method that highly control the uniformity of the thickness of the coating film in the width direction of the slot die.

Means for Solving the Problems

[0007] Specific means for solving the above problems include the following aspects.

[0008] <1> A slot die in which the outlet for dispensing a coating liquid is a slot, comprising: a base block including a sliding surface; a tip block including a first slot surface and a first outer surface that form a slot, and positioned in contact with the base block and the sliding surface; and an adjustment tool positioned opposite the first outer surface, wherein the tip block slides along the sliding surface due to an action from the first outer surface side by the adjustment tool, and the first slot surface moves due to the sliding of the tip block. <2> It is equipped with a pressing mechanism for pressing the tip block against the sliding surface. <1> The slot die described above. <3> The tip block includes a plurality of grooves arranged in the width direction of the slot die on its first outer surface, a section formed on the first outer surface by adjacent grooves, and a tip portion that supports the plurality of sections. <1> or <2> The slot die described above. <4> The system is equipped with multiple adjustment devices, which are arranged side by side in the width direction of the slot die. <3> The slot die described above. <5> Each adjustment device is positioned so that one corresponds to one of the sections. <4> The slot die described above. <6> The tip block has a second outer surface that contacts the sliding surface, and at least one of the sliding surface and the second outer surface is treated to reduce friction. <1> ~ <5> A slot die as described in one of the following. <7> It is equipped with a manifold for containing the coating liquid. <1> ~ <6> A slot die as described in one of the following: <8> <1> ~ <7> A coating apparatus comprising a slot die as described in any one of the above, a supply means for supplying a coating liquid to the slot die, and a transport means for transporting a substrate on which the coating liquid is discharged. <9> <1> ~ <7> A method for forming a coating film, comprising the step of forming a coating film on a substrate using a slot die described in any one of the following. <10> The coating liquid is a slurry, and it forms a coating film containing the slurry. <9> The method for forming a coating film as described above. [Effects of the Invention]

[0009] According to one embodiment of the present disclosure, it is possible to provide a slot die, a coating apparatus, and a coating film forming method that highly control the uniformity of the thickness of the coating film in the width direction of the slot die. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a schematic perspective view of a slot die. [Figure 2] Figure 2 is a schematic side view of the area near the tip of the slot die. [Figure 3] Figure 3 is a schematic side view of the area near the tip of the slot die. [Figure 4] Figure 4 is a schematic perspective view of the tip block. [Figure 5] Figure 5 is a schematic cross-sectional view in the YZ plane illustrating the adjustment device and pressing means. [Figure 6] Figure 6 is an explanatory diagram illustrating a coating apparatus and a coating film formation method. [Modes for carrying out the invention]

[0011] The embodiments of this disclosure are described in detail below. This disclosure is not limited to the embodiments described below. The embodiments described below may be modified as appropriate within the scope of the purposes of this disclosure.

[0012] When describing embodiments of this disclosure with reference to the drawings, explanations of redundant components and reference numerals in the drawings may be omitted. Components indicated by the same reference numeral in the drawings are considered to be the same component. Dimensional ratios in the drawings do not necessarily represent actual dimensional ratios.

[0013] In the present disclosure, a numerical range indicated using "~" indicates a range including the numerical values described before and after "~" as the lower limit value and the upper limit value, respectively. In the numerical ranges described stepwise in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the upper limit value or the lower limit value of the numerical range described in other stepwise descriptions. Further, in the numerical ranges described in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the value shown in the examples.

[0014] In the present disclosure, the amount of each component in the composition means the total amount of the plurality of substances present in the composition when there are a plurality of substances corresponding to each component in the composition, unless otherwise specified.

[0015] In the present disclosure, the term "step" includes not only an independent step but also cases where it cannot be clearly distinguished from other steps, as long as the intended purpose of the step is achieved.

[0016] In the present disclosure, "mass%" and "weight%" are synonymous, and "parts by mass" and "parts by weight" are synonymous.

[0017] In the present disclosure, a combination of two or more preferred embodiments is a more preferred embodiment.

[0018] In the present disclosure, ordinal numbers (e.g., "first" and "second") are terms used to distinguish components and do not limit the number of components or the superiority or inferiority of the components.

[0019] In the present disclosure, "solid content" means components other than the solvent. In each drawing, for the sake of avoiding complexity, only one of a plurality of equivalent components and parts may be labeled with a reference numeral.

[0020] <Slot die> A slot die according to an embodiment of the present disclosure will be described with reference to Figures 1, 2, 3, 4, and 5. Directions X and Y are orthogonal to each other, directions X and Z are orthogonal to each other, and directions Y and Z are orthogonal to each other. Direction X is parallel to the width direction of the slot die.

[0021] As shown in Figure 1, the slot die 10 in one embodiment of the present disclosure is a slot die in which the coating liquid discharge port is a slot 11, and is a device for discharging the coating liquid onto a substrate. The slot die 10 comprises a base block 12, a tip block 13, and an adjustment tool 14. The slot 11 discharges the coating liquid toward the substrate. The direction of the slot die 10 is perpendicular to the direction in which the coating liquid is discharged. In the slot die 10, the width direction is parallel to direction X.

[0022] (Base block) As shown in Figures 1 and 2, the base block 12 is a columnar body extending in direction X, and has an L-shape when viewed from the side from direction X. The base block 12 includes a sliding surface 15, a first inner surface 16, a second inner surface 17, and an outer surface 18. The first inner surface 16 and the outer surface 18 are each on one face of the columnar body. The sliding surface 15 is in contact with the second outer surface 23 of the tip block 13. The tip block 13 is positioned in contact with the base block 12 at the sliding surface 15. The first inner surface 16 faces the opposing block 19.

[0023] An adjustment tool 14 is attached to the base block 12. The adjustment tool 14 can be attached to the outer surface 18 of the base block 12. The base block 12 is made of stainless steel. However, the base block 12 may be made of a material other than stainless steel. Examples of materials other than stainless steel include ceramics and cemented carbide.

[0024] The width of the base block 12 is determined, for example, according to the width of the coating. Preferably, the width of the base block 12 is within the range of 100 mm to 1500 mm. The width of the base block 12 may also be within the range of 500 mm to 1300 mm. The width of the base block 12 refers to the distance from end to end of the base block 12 along direction X.

[0025] The slot die 10 may include a pressing means 20 for pressing the tip block 13 against the sliding surface 15. The pressing means 20 allows the tip block 13 to move along the sliding surface 15 by pressing it against the sliding surface 15. It also allows the tip block 13 to be fixed so that the position of the first slot surface 21 does not change due to the discharge pressure of the coating liquid, etc. The pressing means 20 can be attached to the base block 12.

[0026] The pressing means 20 is preferably one that presses the tip block 13 in direction Z. The pressing means 20 can be used without limitation as long as it can adequately fix the tip block 13. For example, a ball plunger can be preferably used as the pressing means 20. The pressing means 20 may be provided on the base block 12 via a mounting member 20a for attachment to the base block 12.

[0027] (Tip block) The tip block 13 is a columnar body extending in direction X, and has an L-shape when viewed from the side from direction X. The tip block 13 includes a first slot surface 21 that forms the slot 11 of the slot die 10, a first outer surface 22, and a second outer surface 23 that contacts the sliding surface 15 of the base block 12. The first slot surface 21 includes a tip portion 24 that faces the substrate when the coating liquid is discharged from the slot 11. The first outer surface 22 faces the second inner surface 17 of the base block 12. The tip block 13 and the base block 12 are arranged such that the second outer surface 23 contacts the sliding surface 15 of the base block 12. The first slot surface 21, together with the second slot surface 25 included in the opposing block 19, forms the slot 11.

[0028] As shown in Figures 2 and 3, the tip block 13 is positioned in contact with the base block 12 at its sliding surface 15. The sliding surface 15 of the base block 12 and the second outer surface 23 of the tip block 13 slide in direction Y while remaining in contact. In this disclosure, "sliding" means the movement of two contacting surfaces sliding against each other. The base block 12 is fixed to the opposing block 19 by bolts or the like (not shown). As the tip block 13 slides along the sliding surface 15 at its second outer surface 23, the first slot surface 21 moves, changing the gap of the slot 11 defined by the first slot surface 21 and the second slot surface 25, and deforming the slot space 26, which is the three-dimensional shape of the slot 11.

[0029] The tip block 13 is made of stainless steel. However, the tip block 13 may be made of a material other than stainless steel. Examples of materials other than stainless steel include ceramics and cemented carbide.

[0030] The width of the tip block 13 can be the same as that of the base block 12. The width of the tip block 13 refers to the distance from end to end of the base block 12 along direction X. The width of the tip block 13 is determined, for example, according to the width of the coating. The width of the tip block 13 is preferably in the range of 100 mm to 1500 mm. The width of the tip block 13 may also be in the range of 500 mm to 1300 mm.

[0031] (adjustment device) The adjustment device 14 is positioned opposite the first outer surface 22. The action of the adjustment device 14 from the first outer surface 22 side causes the tip block 13 to slide along the sliding surface 15. The adjustment device 14 is a device that functions to cause the tip block 13 to slide bidirectionally in direction Y (left and right direction in Figure 2) along the sliding surface 15. As a result, the first slot surface 21 moves, and the three-dimensional shape of the slot 11 is deformed. The adjustment device 14 only needs to be a device that functions as described above, and may consist of one part or multiple parts. Furthermore, the adjustment device 14 may perform the above function on its own, or it may perform the above function in cooperation with other members such as the base block 12 and the tip block 13.

[0032] The adjustment device 14 is not limited in its specific configuration. Preferably, the adjustment device 14 is a device that acts on the tip block 13 on the first outer surface 22 by pushing and pulling the tip block 13. An example of an adjustment device 14 having such a function is a differential screw. Preferably, the adjustment device 14 is a differential screw that is fixed to the base block 12 by an adjustment device fixing member 14a and has a screw incorporated into a screw hole 14b (see Figure 4) provided in the tip block 13. This is because the gap of the slot 11 can be precisely controlled by appropriately selecting the pitch of the differential screw. As shown in Figure 4, when a differential screw is used, a screw hole 14b is provided on the first outer surface 22 of the tip block 13.

[0033] As shown in Figure 5, the differential screw, which is the adjustment device 14, includes a bolt 41 and an adjustment part 42. The differential screw moves the tip block 13 by pushing and pulling it in accordance with the rotation of the bolt 41, according to the pitch of the adjustment part 42 and the screw holes 14b provided in the tip block 13. The differential screw only needs to move the tip block 13 by pushing and pulling it as the bolt 41 rotates, and the bolt 41 itself may move or it may not move.

[0034] The bolt 41 includes a first male threaded portion that engages with the female threaded portion of the adjustment portion 42, and a second male threaded portion that engages with the screw hole 14b. In the bolt 41, the pitch of the first male threaded portion is different from the pitch of the second male threaded portion. "Pitch of the male threaded portion" means the distance between two adjacent threads of the male threaded portion. The absolute value of the difference between the pitch of the first male threaded portion and the pitch of the second male threaded portion may be 0.1 mm or more, 0.15 mm or more, or 0.2 mm or more. The absolute value of the difference between the pitch of the first male threaded portion and the pitch of the second male threaded portion is preferably in the range of 0.1 mm to 0.6 mm, more preferably in the range of 0.15 mm to 0.5 mm, and particularly preferably in the range of 0.2 mm to 0.4 mm. In the bolt 41, the outer diameter of the first male threaded portion is preferably larger than the outer diameter of the second male threaded portion. The bolt 41 extends in direction Y and can rotate around a virtual straight line along direction Y as its axis of rotation. The bolt 41 can move in direction Y or in the opposite direction to direction Y while rotating. The direction and amount of movement of the bolt 41 are adjusted according to the direction and amount of rotation of the bolt 41. The sliding distance of the tip block 13 is adjusted according to the direction and amount of rotation of the bolt 41. The bolt 41 is made of stainless steel. However, the bolt 41 may be made of a material other than stainless steel. Examples of materials other than stainless steel include the materials other than stainless steel exemplified in the description of the components of the tip block 13.

[0035] The adjustment device 14 comprises at least one. Due to the movement of the tip block 13, the gap of the slot 11 may be the same distance across the width direction of the slot die 10, or it may be a different distance depending on the position of the slot die 10 in the width direction. For example, if one adjustment device 14 is positioned, the distance the tip block 13 moves may differ in the width direction depending on the position of the positioned adjustment device 14. When attempting to narrow the gap of the slot 11, the gap of the slot 11 will be such that, for example, in the width direction of the tip block 13, it is narrowest at the location where one adjustment device 14 is incorporated, and the gap of the slot 11 will gradually widen as it moves away from that position in the width direction. Conversely, when attempting to widen the gap of the slot 11, the gap of the slot 11 will be such that, for example, in the width direction of the tip block 13, it is widest at the location where one adjustment device 14 is incorporated, and the gap of the slot 11 will gradually narrow as it moves away from that position in the width direction. If multiple adjustment devices 14 are provided, the gap of the slots 11 can be adjusted more precisely in the width direction of the slot die 10 as described above.

[0036] (Opponent block) The slot die 10 includes an opposing block 19 positioned opposite the base block 12. The opposing block preferably includes a manifold, which is a space for storing the coating liquid. The manifold 27 is in communication with the slot 11. The fluid stored in the manifold 27 moves in direction Z and is discharged through the slot 11.

[0037] In a yz-plane view of the slot die 10, the cross-sectional shape of the manifold 27 is approximately trapezoidal. The manifold 27 extends in the direction X, i.e., the width direction. The shape of the manifold 27 corresponds to the shape of the approximately trapezoidal recess formed in the opposing block 19. However, the shape of the manifold 27 may be other than approximately trapezoidal. The shape of the manifold 27 may be semicircular. The shape of the manifold 27 may be circular. A circular manifold is defined, for example, by a combination of a semicircular recess formed in the base block 12 and a semicircular recess formed in the opposing block 19.

[0038] By providing the manifold 27, the coating liquid can be distributed uniformly throughout the entire width. Furthermore, the flow of the coating liquid can be controlled, allowing for more even distribution across the entire width. Additionally, the pressure can be distributed to ensure uniform dispersion of the coating liquid from the slots 11. Thus, by providing the manifold 27, the physical properties of the coating liquid can be homogenized, resulting in uniform properties of the discharged coating liquid. The shape of the manifold 27 can be determined based on the type of coating liquid, etc.

[0039] (slot) Slot 11 is the discharge port of the slot die 10. Slot 11 is defined by the first slot surface 21 of the tip block 13 and the second slot surface 25 of the opposing block 19. Slot 11 means the gap defined by the first slot surface 21 and the second slot surface 25, and represents a three-dimensional space. The three-dimensional space of slot 11 is also called slot space 26 (see Figure 3). Slot space 26 can be defined by the width of the slot die 10 in direction X, the distance between the first slot surface 21 and the second slot surface 25 in direction Y, and the length of the first slot surface 21 and the second slot surface 25 in direction Z.

[0040] Preferably, the gap of the slot 11 is changed while the first slot surface 21 and the second slot surface 25 maintain a substantially parallel relationship in a YZ planar view. This avoids complicating the shape of the slot space 26 defined by the first slot surface 21 and the second slot surface 25, and allows for accurate determination of the distribution of liquid discharged from the slot 11 in the width direction by calculation or other means. Therefore, the uniformity of the coating film thickness in the width direction can be controlled to a high degree.

[0041] The slot 11 extends in directions X and Z, and the gap in the slot 11 is formed in direction Y. The shape of the slot space 26 is defined in direction Y by the first slot surface 21 and the second slot surface 25, and it can be a three-dimensional shape in which the widthwise end of the slot die 10 is the end in direction X and the tip portion 24 is the end in direction Z.

[0042] The coating liquid is dispensed, filling the slot space 26. From the viewpoint of understanding the amount dispensed, it is preferable that the length of the first slot surface 21, i.e., the dimension in direction Z, and the length of the second slot surface 25, i.e., the dimension in direction Z, are substantially the same. "Substantially the same" means that there may be errors, etc., and it also includes cases where they are not strictly the same.

[0043] The gap of the slot 11 is determined, for example, according to the flow rate and viscosity of the coating liquid. Preferably, the gap of the slot 11 at the tip portion 24 of the slot die 10 is in the range of 0.3 mm to 0.8 mm.

[0044] Here, we will explain the background leading to one embodiment of this disclosure. In the formation of a coating film using a slot die, for example, depending on the type of coating liquid, even if the gap at the tip of the slot is made uniform with high precision in the width direction, the thickness of the coating film may not be uniform. The inventors of the present invention have diligently studied how to highly control the uniformity of the thickness of the coating film in the width direction when forming a coating film using a slot die. As a result, they focused on the three-dimensional shape near the discharge port of the slot, that is, the shape of the slot space, which includes not only the slot gap at the tip of the slot, but also the slot gap at the back of the slot tip, i.e., upstream of the coating liquid. Furthermore, we found that precisely controlling the discharge rate distribution in the width direction is effective in forming a coating film with uniform thickness in the width direction. In order to precisely control the discharge rate distribution in the width direction, it is necessary to understand not only the slot gap at the tip of the slot, but also the slot gap at the back of the discharge port, and by more accurately understanding the shape of the slot space, it is possible to highly control the discharge rate in the width direction and thus highly control the uniformity of the coating film thickness in the width direction.

[0045] Furthermore, in order to more accurately grasp the shape of the slot space, including the slot gap at the tip of the slot, we arrived at a slot die configuration, which is one embodiment of this disclosure, that allows for both adjustment of the slot gap at the tip of the slot and adjustment of the slot gap at the back of the slot discharge port, i.e., upstream of the coating liquid.

[0046] Although the mechanism by which the above effects are achieved is not clear, according to the slot die 10, which is one embodiment of the present disclosure, the shape of the slot space near the discharge port can be grasped more precisely. Therefore, it is presumed that the amount of coating liquid discharged from the slot 11 can be grasped and adjusted in the width direction of the slot die 10, allowing for highly precise control of the discharge amount in the width direction and highly precise control of the uniformity of the coating film thickness in the width direction.

[0047] Furthermore, when moving the two slot surfaces that form the slot space, a configuration was found to move the slot surfaces so that the slot space becomes smoother and free of steps, leading to the configuration of the slot die, which is one embodiment of the present disclosure described above. This makes it easier to grasp the slot space.

[0048] Furthermore, if the coating liquid is thixotropic and pseudoplastic, for example, depending on the manifold's widthwise position, at least one of the distance and time the coating liquid flows through the channel may differ, resulting in the discharge of coating liquids with different viscosities in the widthwise direction. In this case, the more complex shape of the lot space can make it difficult to adjust the amount of coating liquid discharged from the slot. In contrast, by separating the tip block defining the slot from the base block and making it movable, the shape of the slot space becomes easier to understand, and the discharge amount can be easily calculated while considering the physical properties of the coating liquid, such as thixotropy, making it possible to easily form a film with highly uniform thickness in the widthwise direction.

[0049] As described above, since the slot die is configured as described above, the slot die 10, which is one embodiment of the present disclosure, can highly control the uniformity of the coating thickness in the width direction of the slot die 10.

[0050] As shown in Figure 3, the first outer surface 22 of the tip block 13 preferably includes a plurality of grooves 28 arranged in the width direction of the slot die, and also includes a plurality of compartments 29 formed by adjacent grooves 28. The tip portion 24 is the part of the tip block 13 in which no grooves 28 are formed. All of the compartments 29 are connected by the tip portion 24 included in the tip block 13. The tip portion 24 supports the plurality of compartments. The tip block 13 including the compartments 29 is a single component as a whole.

[0051] By dividing the first outer surface 22 of the tip block 13 into multiple sections 29, the adjustment tool 14 can be positioned for each of the multiple sections 29. Therefore, the adjustment tool 14 can slide the tip block 13 for each section 29, and the shape of the slot space 26 can be adjusted with high precision for each position in the width direction. Furthermore, since the tip block 13 is a single member with a continuous first slot surface 21 despite having grooves 28, even if the tip block 13 is slid for each section 29 by the adjustment tool 14, the shape of the slot space 26 is continuously changed by the first slot surface 21, making it possible to create a slot space 26 shape that facilitates the calculation of the discharge amount.

[0052] There may be one groove 28 or multiple grooves 28. If multiple grooves 28 are provided, the shape of each groove 28 may be the same or different from each other. If multiple grooves 28 are provided, it is preferable that each groove 28 is substantially parallel to the others. "Substantially parallel" means including grooves that are not parallel due to errors, etc.

[0053] It is preferable to provide multiple grooves 28 in the width direction. This creates at least three or more compartments 29, and in the width direction X, the shape of the slot space 26 can be adjusted for each compartment 29 formed by the grooves 28.

[0054] The multiple compartments 29 formed by the grooves 28 in the tip block 13 are provided to adjust the slot space 26 for each compartment 29. The shape of the grooves 28 is not limited as long as they can form such compartments 29. As shown in Figure 3, the grooves 28 can be provided in the tip block 13 so that the compartments 29 formed by the grooves 28 are fin-shaped.

[0055] To further explain the grooves 28 and compartments 29, the grooves 28 compartmentalize the tip block 13 in directions Y and Z, reducing the influence of the sliding movement of the tip block 13 in one compartment 29 on another compartment 29. As a result, the influence of the movement of the first slot surface 21 accompanying the sliding of the tip block 13 on another compartment 29 is reduced, the slot space 26 is adjusted in a curved manner, the shape of the slot space 26 is easier to grasp, and the uniformity of the coating thickness in the width direction is improved.

[0056] The groove 28 intersects the second outer surface 23 at a right angle and extends from the second outer surface 23 toward the tip 24. That is, in the xz plane of the slot die 10, the angle between the second outer surface 23 and the groove 28 is 90°. However, the angle between the second outer surface 23 and the groove 28 is not limited to 90°. The angle between the second outer surface 23 and the groove 28 may be in the range of 85° to 95°. The angle between the second outer surface 23 and the groove 28 may be in the range of 87° to 93°. The angle between the second outer surface 23 and the groove 28 may be in the range of 89° to 91°. The closer the angle between the second outer surface 23 and the groove 28 is to 90°, the better the controllability of the gap in the slot 11 or the slot space 26, and the better the uniformity of the coating thickness in the width direction.

[0057] The width of the groove 28 is more preferably in the range of 0.5 mm to 10 mm, and particularly preferably in the range of 1 mm to 5 mm. The width of the groove 28 refers to the shortest distance from end to end of the groove 28 along the direction X in an xz-plane view of the slot die 10. The larger the width of the groove 28, the greater the distance between two adjacent sections 29, and the less influence the sliding movement of one section 29 has on another section 29. As a result, the uniformity of the coating thickness in the width direction is improved. The smaller the width of the groove 28, the greater the number of grooves 28 that can be formed in the tip block 13. The larger the number of grooves 28, the more points the width of the slot 11 can be adjusted by the sliding of the sections 29, and the finer the adjustment of the coating thickness in the width direction is made. As a result, the uniformity of the coating thickness in the width direction is improved.

[0058] In the tip block 13 in which the groove 28 is formed, the width 24a of the tip portion in which the groove 28 is not formed preferably has a thickness in direction Y of 3 mm to 10 mm, and more preferably 5 mm to 7 mm.

[0059] The depth of the groove 28 is determined according to the thickness of the tip block 13 in direction Y, the mobility of the section 29 of the tip block 13, etc. When the groove 28 is formed perpendicular to the second outer surface 23, the depth of the groove 28 refers to the distance in direction Y of the groove 28 in a yz plan view of the slot die 10, i.e., a side view of the slot die 10. The depth of the groove 28 is preferably in the range of 10 mm to 180 mm, and more preferably in the range of 20 mm to 80 mm. The greater the depth of the groove 28, the less the effect of deformation of one section 29 on another section 29, and the more the uniformity of the coating thickness in the width direction improves. The smaller the depth of the groove 28, the more the rigidity of the tip block 13 improves.

[0060] From the viewpoint of adjusting the width 24a of the tip portion, ensuring uniformity of the coating thickness in the width direction, and the rigidity of the tip block 13, the ratio of the depth of the groove 28 to the width of the groove 28 (i.e., [groove depth] / [groove width]) is preferably in the range of 2 to 20, and more preferably in the range of 5 to 15. The ratio of the maximum depth of the groove 28 to the width of the groove 28 (i.e., [maximum groove depth] / [groove width]) is the same as the preferred range of [groove depth] / [groove width] described above.

[0061] From the viewpoint of uniformity of the coating thickness in the width direction, the spacing of the grooves 28 is preferably in the range of 10 mm to 100 mm, more preferably in the range of 15 mm to 50 mm, and particularly preferably in the range of 25 mm to 35 mm. Furthermore, it is preferable that the spacing of the grooves 28 be uniform. The spacing of the grooves 28 refers to the distance between two adjacent grooves 28 in the xz-plane view of the slot die 10.

[0062] As an example, the number of grooves 28 is 11. However, the number of grooves 28 is not limited to 11. The number of grooves 28 may be changed depending on the width of the tip block 13, the number of installable adjustment devices 14, and the required uniformity of the coating thickness. The larger the number of grooves 28, the larger the number of compartments 29, and the larger the number of adjustment points for the width of the slots 11 at the tip of the slot die 10. As a result, the thickness of the coating in the width direction can be finely adjusted, and the uniformity of the coating thickness in the width direction is improved.

[0063] Examples of manufacturing methods for the tip block 13 include forging, casting, and machining. The groove 28 may be formed during the forging or casting process. The groove 28 may also be formed by machining.

[0064] Furthermore, it is preferable that the slot die 10 is equipped with multiple adjustment devices 14, and that the multiple adjustment devices 14 are arranged side by side in the width direction of the slot die 10. It is also preferable that each of the multiple adjustment devices 14 acts on each section 29. This makes it possible to adjust the slot space 26 at the position corresponding to each section 29, and to adjust the slot space 26 in more detail at the position in direction X.

[0065] It is preferable that one adjustment device 14 is positioned corresponding to one of the compartments. This makes it possible to adjust the slot space 26 at the position corresponding to each compartment 29, allowing for more detailed adjustment of the slot space 26 in the direction X.

[0066] Furthermore, it is preferable that the adjustment tool 14 acts on the center of the first outer surface 22 of the tip block 13. Even if the first outer surface 22 of the tip block 13 is divided into multiple sections 29, it is preferable that each adjustment tool 14 acts on the center of the corresponding section 29, that is, the section 29 on which each adjustment tool 14 acts. This allows each section 29 to slide efficiently.

[0067] The adjustment tools 14 are arranged along the first outer surface 22 of the tip block 13. A groove 28 is located between two adjacent adjustment tools 14. In other words, the adjustment tools 14 and grooves 28 are arranged alternately along direction X, i.e., the width direction of the slot die 10.

[0068] The number of adjustment devices 14 is, for example, 10. However, the number of adjustment devices 14 is not limited to 10. The number of adjustment devices 14 may be changed according to the number of sections 29 sub-blocked by the grooves 28. The larger the number of adjustment devices 14, the finer the thickness of the coating in the width direction can be adjusted. As a result, the uniformity of the thickness of the coating in the width direction is improved.

[0069] Next, a specific example of how to adjust the slot space 26 using the adjustment tool 14 will be described. Referring to Figure 5, the method for adjusting the gap of the slot 11 at the tip of the slot die 10 and the slot space 26 will be described. The adjustment tool 14 slides the tip block 13, which includes the corresponding section 29. The amount of sliding of the tip block 13 corresponds to the rotation of the bolt 41. As a result, the width of the slot 11 at the tip of the slot die 10 becomes smaller or larger. Through the above operation, the width of the slot 11 at the tip of the slot die 10 is adjusted. Furthermore, with respect to two adjacent sections 29 separated by a groove 28, the groove 28 can suppress the transmission of the force applied to section 29 by the adjustment tool 14 to the other section 29. In other words, even if one section 29 slides due to the adjustment tool 14, another section 29 located next to that section 29 is less likely to deform. As a result, the multiple adjustment devices 14 arranged along direction X can each independently adjust the width of the slot 11 at a desired point, improving the uniformity of the coating thickness in the width direction.

[0070] Furthermore, it is preferable that at least one of the sliding surface 15 and the second outer surface 18 is treated with a low-friction coating. This allows for smooth sliding and precise control of the slot gap.

[0071] Low-friction treatment can be selected based on the material and surface properties of the base block 12 or tip block 13. Specifically, this can include surface coating, surface treatment technology, and the use of lubricants. Examples of surface coatings include DLC (diamond-like coating) and Teflon coating ("Teflon" is a registered trademark). Examples of surface treatment technologies include shot beaning and electrolytic polishing. Examples of lubricants include molybdenum disulfide and graphite.

[0072] <Coating apparatus and coating film formation method> Referring to Figure 5, a coating apparatus including a slot die 10 and a coating method using the slot die 10 will be described. The coating apparatus comprises a slot die 10, a supply device (not shown) for supplying a coating liquid to the slot die 10, and a transport means for transporting a substrate on which the coating liquid is discharged. According to one embodiment of the coating apparatus and one embodiment of the coating film forming method of the present disclosure, a multilayer film can be obtained.

[0073] The substrate F, which is to be coated, is transported using a roll-to-roll method. A slot die 10 and a drying device 200 are provided along the transport path of the substrate F.

[0074] Examples of components of the base material F include polymers and metals. If the component of the base material F is a polymer, it is a resin film; if it is a metal, it is a metal foil. Examples of polymers include polyethylene terephthalate, polyethylene naphthalate, and triacetylcellulose. The base material F may contain one or more polymers. Examples of metals include iron, chromium, nickel, titanium, copper, aluminum, silver, and gold. The metal may be an alloy. Examples of alloys include stainless steel and Invar. The base material F may contain one or more metals. In one embodiment, the base material F preferably contains a polymer, and more preferably contains at least one selected from the group consisting of polyethylene terephthalate, polyethylene naphthalate, and triacetylcellulose. Specific examples of base material F containing a polymer include polyethylene terephthalate film, polyethylene naphthalate film, and triacetylcellulose film. In one embodiment, the base material F preferably contains a metal, more preferably at least one selected from the group consisting of nickel, titanium, copper, aluminum, silver, and gold, even more preferably at least one selected from the group consisting of copper and aluminum, and particularly preferably aluminum. Specific examples of base material F containing a metal include copper foil and aluminum foil.

[0075] The substrate F may have high thermal conductivity. Examples of substrate F with high thermal conductivity include a substrate F having a thermal conductivity of 200 W / (m·K) or higher. There is no upper limit to the thermal conductivity of the substrate F. The thermal conductivity of the substrate F may be 500 W / (mK) or less. The thermal conductivity of the substrate F is measured using the laser flash method. First, the substrate F is cut out in three places along the width direction (specifically, 5 mm from both ends in the width direction and in the center in the width direction) with a diameter of φ5 mm to 10 mm to obtain three measurement samples. The thermal conductivity of each measurement sample is measured using a thermophysical property measuring device that applies the laser flash method (e.g., LFA-502, Kyoto Electronics Manufacturing Co., Ltd.). The arithmetic mean of the three measured values ​​is taken as the thermal conductivity of the substrate F.

[0076] The layer structure of the substrate F is not limited. The substrate F may have a single-layer structure or a multi-layer structure.

[0077] From the viewpoint of improving productivity, the base material F is preferably a long film. The length of the base material F is preferably 10 m or more, more preferably 100 m or more, and particularly preferably 200 m or more. There is no upper limit to the length of the base material F. The upper limit of the length of the base material F may be 1,000 m or 500 m. The length of the base material F is usually in the range of 10 m to 1,000 m. "Length of base material F" means the distance from end to end of the base material F in the direction of transport of the base material F.

[0078] The width of the base material F is not limited. From the viewpoint of improving productivity, it is preferable that the width of the base material F is in the range of 100 mm to 2,000 mm.

[0079] The thickness of the base material F is not limited. From the viewpoint of material cost, the thickness of the base material F is preferably in the range of 3 μm to 50 μm, and more preferably in the range of 10 μm to 30 μm.

[0080] The transport speed of the substrate F is preferably within the range of 1 m / min to 100 m / min.

[0081] The tension of the base material F is preferably in the range of 10 N / m to 500 N / m, and more preferably in the range of 50 N / m to 200 N / m. Tension control is performed, for example, using a known tension control device. Tension control may also be performed using a known conveying device that includes a tension control mechanism. An example of a conveying device that includes a tension control mechanism is a conveying device that includes a tension drive roller. The tension drive roller rotates, for example, by friction or magnetic force acting between a rotating shaft supporting the tension drive roller and the tension drive roller. The rotating shaft is rotated, for example, by a motor. In other words, the force that rotates the rotating shaft is transmitted to the tension drive roller, and the tension drive roller rotates. A conveying device that includes a tension drive roller can control the tension of the film according to the rotation speed of the rotating shaft, for example. Technology relating to a tension drive roller is described, for example, in Japanese Patent Publication No. 4066904. The contents of the above-mentioned documents are incorporated herein by reference.

[0082] In Figure 5, the slot die 10 discharges the coating liquid toward the substrate F being transported. The coating liquid is supplied to the slot die 10 from a container (not shown) that stores the coating liquid.

[0083] The type of coating solution is not limited. The coating solution is preferably an aqueous coating solution. "Aqueous coating solution" means a coating solution in which the solvent contained in the coating solution is substantially water. "The solvent contained in the coating solution is substantially water" means that water accounts for the majority of the solvent contained in the coating solution. The proportion of water in the solvent contained in the aqueous coating solution is preferably 90% by mass or more, more preferably 95% by mass or more, and particularly preferably 100% by mass.

[0084] Examples of water contained in aqueous coating solutions include natural water, purified water, distilled water, ion-exchanged water, pure water, and ultrapure water.

[0085] The water content in the aqueous coating solution is preferably 40% by mass or more, and more preferably 50% by mass or more, relative to the total mass of the aqueous coating solution. The water content in the aqueous coating solution is preferably less than 100% by mass, and more preferably 80% by mass or less, relative to the total mass of the aqueous coating solution.

[0086] The aqueous coating solution may contain particles. Examples of particles include inorganic particles, organic particles, and composite particles of inorganic and organic substances.

[0087] Examples of inorganic particles include metal particles, metalloid particles, metal compound particles, metalloid compound particles, inorganic pigment particles, mineral particles, and polycrystalline diamond particles. Examples of metals include alkali metals, alkaline earth metals, transition metals, and their alloys. Examples of metalloids include silicon. Examples of metal compounds and metalloid compounds include oxides, hydroxides, and nitrides. Examples of inorganic pigments include carbon black. Examples of minerals include mica.

[0088] Examples of organic particles include resin particles and organic pigment particles.

[0089] Examples of composite particles of inorganic and organic materials include composite particles in which inorganic particles are dispersed in a matrix of organic material, composite particles in which organic particles are coated with inorganic material, and composite particles in which inorganic particles are coated with organic material.

[0090] To impart dispersibility, the particles may be surface-treated. Composite particles may be formed by the surface treatment.

[0091] The particle size, specific gravity, and usage are not limited. The particle size, specific gravity, and usage are determined, for example, according to the coating film formed by the coating solution and the manufacturing conditions of the coating film.

[0092] The aqueous coating solution may contain one or more types of particles.

[0093] The particle content in the aqueous coating solution is not limited. The particle content in the aqueous coating solution is determined, for example, according to the purpose of particle addition, the coating film formed by the coating solution, and the manufacturing conditions of the coating film.

[0094] Components of an aqueous coating solution include, for example, binder components, components that contribute to particle dispersibility, polymerizable compounds, polymerization initiators, and components that enhance coating performance (e.g., surfactants).

[0095] The solid content concentration of the coating solution is preferably less than 70% by mass, and more preferably between 30% and 60% by mass. The coating solution is preferably a slurry, which is a suspension in which particles are dispersed in a liquid, as described above.

[0096] The thickness of the coating solution applied to the substrate F (hereinafter sometimes referred to as "thickness of the liquid film") is not limited. The thickness of the liquid film may be in the range of 10 μm to 200 μm. The thickness of the liquid film may be in the range of 20 μm to 100 μm.

[0097] In Figure 5, the drying apparatus 200 dries the coating liquid applied to the substrate F. A multilayer film is obtained by drying the coating liquid. The drying apparatus 200 dries the coating liquid by blowing air. The temperature of the gas blown is preferably in the range of 25°C to 200°C, and more preferably in the range of 30°C to 150°C. The wind speed blown is preferably 1.5 m / sec to 50 m / sec. An example of a drying apparatus used to dry the coating liquid is... Examples include ovens, hot air heaters, and infrared heaters.

[0098] The applications of multilayer films obtained by the methods described above are not limited. [Explanation of symbols]

[0099] 10-slot die 11 slots 12 base blocks 13. Tip block 13 Base Blocks 14 Adjustment equipment 14a Adjustment device fixing member 14b Screw hole 15 sliding surface 16. First Inner Self 17. Second Inner Self 18 Exterior 19 Opposite Block 20 Pressing means 20a Mounting component 21 First slot side 22 1st outer surface 23 Second outer surface 24 Tip 24a Width of the tip 25 Second slot side 26 slot space 27 Manifold 28 Groove 29 plots 41 volts 42 Adjustment section 200 Drying equipment F Base material X, Y, Z directions

Claims

1. A slot die in which the outlet for dispensing the coating liquid is a slot, A base block including a sliding surface, The tip block includes a first slot surface and a first outer surface that form the slot, and is positioned in contact with the base block and the sliding surface, The device comprises an adjustment mechanism positioned opposite the first outer surface, The adjustment device acts from the first outer surface, causing the tip block to slide on the sliding surface. The sliding of the tip block causes the first slot surface to move. Slot die.

2. The slot die according to claim 1, further comprising a pressing means for pressing the tip block against the sliding surface.

3. The tip block has a plurality of grooves arranged in the width direction of the slot die on its first outer surface, The adjacent grooves form a section on the first outer surface, A slot die according to claim 1, comprising a tip portion supporting a plurality of the aforementioned compartments.

4. The adjustment device is equipped with multiple such devices. The slot die according to claim 3, wherein the plurality of adjustment devices are arranged side by side in the width direction of the slot die.

5. The slot die according to claim 4, wherein one of the adjustment devices is arranged corresponding to one of the compartments.

6. The tip block has a second outer surface that contacts the sliding surface, The slot die according to claim 1, wherein at least one of the sliding surface and the second outer surface is subjected to a low-friction treatment.

7. The slot die according to claim 1, further comprising a manifold for containing a coating liquid.

8. A slot die according to any one of claims 1 to 7, A supply means for supplying the coating liquid to the slot die, A conveying means for conveying the substrate from which the coating liquid is discharged, A coating apparatus equipped with the following features.

9. A method for forming a coating film, comprising the step of forming a coating film on a substrate using a slot die according to any one of claims 1 to 7.

10. The coating liquid is a slurry, A method for forming a coating film according to claim 9, wherein a coating film containing the slurry is formed.

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