3D scanner

Abstract

When measuring a workpiece held by a holding member, the three-dimensional data of the holding member can be automatically removed to reduce the burden on the user. [Solution] The three-dimensional scanner 1 includes a data acquisition unit 291 that acquires a light-receiving signal based on measurement light reflected by the holding member and the workpiece, and acquires a two-dimensional image including an identification member provided on the holding member; a three-dimensional data generation unit 292 that generates first three-dimensional data including three-dimensional data of the holding member and the workpiece based on the light-receiving signal; an estimation unit 293 that identifies the position and orientation of the identification member based on the two-dimensional image acquired by the data acquisition unit 291 and estimates the position and orientation of the holding member based on the position and orientation of the identification member; and a three-dimensional data editing unit 294 that generates second three-dimensional data by removing the three-dimensional data of the holding member from the first three-dimensional data based on the position and orientation of the holding member.

Description

Technical Field

[0001] The present disclosure relates to a three-dimensional scanner that generates three-dimensional data of a workpiece.

Background Art

[0002] For example, Patent Document 1 discloses a three-dimensional scanner that scans a workpiece placed on a stage to generate three-dimensional data. This type of three-dimensional scanner is mainly configured to irradiate structured illumination light onto the workpiece on the stage, image the distortion of the illumination light with a camera, and analyze it, thereby enabling measurement of the three-dimensional shape of the workpiece.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in a three-dimensional scanner such as Patent Document 1, it is necessary to hold the posture of the workpiece on the stage so that the portion of the workpiece whose shape is to be measured falls within the visual field range of the camera. For example, when measuring the workpiece in a standing posture, it may be considered to hold it with a holding member so that it does not fall on the stage. However, since such a holding member is also measured together with the workpiece, it is necessary to remove the three-dimensional data of the holding member after measurement, which is cumbersome. Especially when the workpiece is imaged multiple times, it is particularly cumbersome because it is necessary to remove the three-dimensional data of the holding member each time.

[0005] Therefore, one might consider applying a method that pre-loads CAD data of the workpiece and automatically deletes measurement data where the difference between the CAD data and the measurement data exceeds a certain level. However, this method requires preparing the CAD data and aligning the CAD data with the measurement data for each image, so even if this method is adopted, it will still be a cumbersome process. It is also conceivable to automate the alignment of the CAD data and the measurement data as described above, but since the measurement data includes 3D data of unnecessary holding members, the success rate of alignment will be low, and ultimately, a cumbersome process will still be required.

[0006] This disclosure is made in view of the above points, and its purpose is to reduce the burden on the user by enabling the automatic removal of three-dimensional data of the holding member when measuring a workpiece held by the holding member. [Means for solving the problem]

[0007] To achieve the above objective, one aspect of this disclosure may be based on a three-dimensional scanner in which measurement light is irradiated onto a workpiece from a light-emitting unit, and three-dimensional data of the workpiece is generated based on the measurement light reflected by the workpiece. The three-dimensional scanner includes a holding member for holding a workpiece, an identification member provided on the holding member for identifying the position and orientation of the holding member, a data acquisition unit that acquires a light-receiving signal based on the measurement light reflected by the holding member and the workpiece, and acquires a two-dimensional image including the identification member provided on the holding member, a three-dimensional data generation unit that generates first three-dimensional data including three-dimensional data of the holding member and the workpiece based on the light-receiving signal acquired by the data acquisition unit, an estimation unit that identifies the position and orientation of the identification member based on the two-dimensional image acquired by the data acquisition unit, and estimates the position and orientation of the holding member based on the identified position and orientation of the identification member, and a three-dimensional data editing unit that generates second three-dimensional data by removing the three-dimensional data of the holding member from the first three-dimensional data generated by the three-dimensional data generation unit based on the position and orientation of the holding member estimated by the estimation unit.

[0008] In this configuration, the workpiece is positioned and held by a holding member within the measurable range. When measurement is performed in this state, the 3D data generation unit generates first 3D data including the 3D data of the holding member and the workpiece. In addition, the data acquisition unit acquires a 2D image including an identification member provided on the holding member. When the position and orientation of the identification member included in the 2D image are identified by the estimation unit, it becomes possible to estimate the position and orientation of the holding member based on the position and orientation of the identification member, since the identification member is provided on the holding member. Once the position and orientation of the holding member are estimated, it becomes possible to identify the 3D data of the holding member from the first 3D data. The 3D data editing unit removes this 3D data of the holding member from the first 3D data, so the user can remove the 3D data of the holding member without having to perform complicated work. [Effects of the Invention]

[0009] As explained above, when measuring a workpiece held by a holding member, the three-dimensional data of the holding member can be automatically removed, thus reducing the burden on the user. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 shows the overall configuration of a three-dimensional scanner according to an embodiment of the present invention. [Figure 2] Figure 2 is a perspective view of the retaining member from above. [Figure 3] Figure 3 is a perspective view of the retaining member from below. [Figure 4] Figure 4 is a plan view of the retaining member. [Figure 5] Figure 5 is a bottom view of the retaining member. [Figure 6] Figure 6 is a front view of the retaining member. [Figure 7] Figure 7 is a rear view of the retaining member. [Figure 8] Figure 8 is a right side view of the retaining member. [Figure 9] Figure 9 is a left side view of the retaining member. [Figure 10] Figure 10 is a plan view showing a state where both arms of the holding member are open. [Figure 11] Figure 11 is a cross-sectional view taken along line XI-XI in FIG. 4. [Figure 12] Figure 12 is a cross-sectional view taken along line XII-XII in FIG. 7. [Figure 13] Figure 13 is a plan view showing a state where the release lever of the holding member is in the release position. [Figure 14] Figure 14 is a view corresponding to FIG. 12 showing a state where the release lever of the holding member is in the release position. [Figure 15] Figure 15 is a block diagram of the three-dimensional scanner. [Figure 16] Figure 16 is a side view of the measurement unit and the pedestal unit. [Figure 17] Figure 17 is a block diagram of the measurement unit. [Figure 18] Figure 18 is a view showing a configuration example of the module. [Figure 19] Figure 19 is a flowchart of a process for removing three-dimensional data of the holding member. [Figure 20] Figure 20 is a view corresponding to FIG. 15 according to a modification of the embodiment.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described in detail based on the drawings. Note that the following description of the preferred embodiments is merely illustrative in nature and is not intended to limit the present invention, its applications, or its uses.

[0012] <舍 Figure 1 shows the overall configuration of a three-dimensional scanner 1 according to an embodiment of the present invention. The three-dimensional scanner 1 is a device that irradiates a workpiece (object to be measured) W with measurement light and generates three-dimensional data of the workpiece W based on the measurement light reflected by the workpiece W. The three-dimensional scanner 1 can also convert the three-dimensional data of the workpiece W into mesh data and output it, convert the mesh data of the workpiece W into CAD data and output it, or convert the mesh data into surface data and output it.

[0013] The three-dimensional scanner 1 is equipped with a holding member 900 for holding the workpiece W. As will be described in detail later, it is possible to measure the workpiece W held by the holding member 900. The holding member 900 can be used as needed, and it is also possible to measure the workpiece W without using the holding member 900.

[0014] In the following description, when measuring the shape of a workpiece W, coordinate information of the workpiece W surface is obtained by irradiating the workpiece W with a predetermined pattern of measurement light and using the signal obtained from the reflected light reflected from the surface of the workpiece W. For example, as the predetermined pattern of measurement light, a measurement method using triangulation with a fringe projection image obtained from the reflected light, which is projected onto the workpiece W, can be used. However, in this invention, the principle and configuration for obtaining the coordinate information of the workpiece W are not limited to this, and other methods can also be applied.

[0015] The three-dimensional scanner 1 comprises a measuring unit 100 for measuring the shape of a workpiece W, a base unit 600 on which the workpiece W can be placed while being held by a holding member 900, a controller 200, a light source unit 300, and a display unit 400. The workpiece W can also be placed on the base unit 600 without being held by the holding member 900. The controller 200 may be incorporated into the measuring unit 100, the light source unit 300 may be incorporated into the measuring unit 100, or the display unit 400 may be incorporated into the measuring unit 100. Furthermore, the controller 200 and the light source unit 300 may be integrated, or the controller 200 and the display unit 400 may be integrated.

[0016] The three-dimensional scanner 1 uses a light source unit 300 to provide structured illumination to the workpiece W, captures a fringe projection image, generates a depth image containing coordinate information, and can measure the three-dimensional dimensions and shape of the workpiece W based on this image. Measurement using such fringe projection has the advantage of shortening measurement time because it allows for three-dimensional measurement without moving the workpiece W or optical systems such as lenses in the Z direction (height direction).

[0017] The base portion 600 includes a mounting portion 140. The mounting portion 140 has a rotating stage 143 with a mounting surface 142 formed on its upper surface on which the workpiece W is placed. The rotating stage 143 is made of a magnetic material and is magnetized. Examples of magnetic materials include iron-based metal materials, or materials that possess magnetic properties. The present invention is not limited to the rotating stage 143 and can also be applied to non-rotating stages.

[0018] Here, the structure of the holding member 900 will be described. As shown in Figure 1, the holding member 900 is a device or apparatus for holding the workpiece W on the rotating stage 143, and can also be called a workpiece holder, workpiece holding device, etc. If the workpiece W is a thin plate, it may be difficult to place it upright on the rotating stage 143. In such cases, the plate-shaped workpiece W can be stabilized by placing it on the rotating stage 143 in a lying position. When placed in this position, the workpiece W will be scanned in two positions: one with the front side of the workpiece W facing upwards, and another with the front side of the workpiece W facing downwards, in order to scan the entire workpiece W.

[0019] However, when a plate-shaped workpiece W is laid flat on the stage, the vertical dimension of the side surface of the workpiece W corresponds to the thickness dimension of the workpiece W, and thus becomes shorter. A shorter vertical dimension of the side surface of the workpiece W means that the overlapping area between the two orientations becomes smaller, which may reduce the accuracy when combining the three-dimensional data measured in the two orientations.

[0020] Furthermore, in addition to accuracy considerations, selecting an appropriate scanning orientation is important in order to scan the workpiece W from all directions with fewer passes. However, when it is desirable to select a placement orientation that minimizes the contact area with the rotating stage 143, it may be difficult to perform measurements of the workpiece W in that orientation.

[0021] In this embodiment, the holding member 900 can be used to stably hold the workpiece W on the rotating stage 143, even when the workpiece W is a plate-shaped workpiece that is unstable when placed in an upright position, or when the area of ​​contact between the workpiece W and the rotating stage 143 is small. "Stably holding" means that the workpiece W is not only less likely to fall over during scanning, but also less prone to vibration and less likely to experience minute displacements.

[0022] As shown in Figures 2 and 3, the holding member 900 has a first arm (first member) 910 and a second arm (second member) 920 that grip the workpiece W, and an opening / closing hinge 930 that connects the first arm 910 and the second arm 920 so that they can be opened and closed. Figures 2 to 9, 11 and 12 show the first arm 910 and the second arm 920 in a completely closed state. Figure 10 shows the first arm 910 and the second arm 920 in a wide open state. Figures 13 and 14 show the first arm 910 and the second arm 920 in a slightly open state. In this way, the first arm 910 and the second arm 920 can be switched from a closed state to an open state and from an open state to a closed state, and the degree of opening can be set according to the shape and size of the workpiece W.

[0023] In this embodiment, the orientation of the retaining member 900 is defined as shown in each figure. Specifically, the rear side of the retaining member 900 is the side connected by the opening / closing hinge 930, and the front side of the retaining member 900 is the side from which the first arm 910 and the second arm 920 open. The front side may also be defined as the front side, and the rear side as the rear side. Furthermore, the right side of the retaining member 900 is the side located to the right when the retaining member 900 is viewed from the front, and the left side of the retaining member 900 is the side located to the left when the retaining member 900 is viewed from the front. The left-right direction may also be defined as the width direction. In addition, the side that is positioned above when the retaining member 900 is used on the rotating stage 143 is defined as the upper side, and the side that is positioned below when the retaining member 900 is used on the rotating stage 143 is defined as the lower side. The up-down direction may also be defined as the thickness direction. This definition of directions is for the convenience of describing the embodiment and does not limit the orientation during use.

[0024] The first arm 910 and the second arm 920 are located on the right and left sides of the holding member 900, respectively, and can therefore be called the right arm and the left arm. In the plan view shown in Figure 4, the depth direction when fully closed is defined as the longitudinal direction of the first arm 910. The first arm 910 has an external shape that is long in the depth direction. When fully closed, the longitudinal direction of the second arm 920 is approximately parallel to the longitudinal direction of the first arm 910. Therefore, the second arm 920 also has an external shape that is long in the depth direction. In this embodiment, the first direction, which is the longitudinal direction of the first arm 910, and the second direction, which is the longitudinal direction of the second arm 920, are approximately parallel, but the first direction and the second direction may intersect in a plan view.

[0025] As shown in Figures 2 and 3, the first arm 910 has multiple sides, including a top surface, a bottom surface, and both left and right sides. The bottom surface of the first arm 910 is a first mounting surface 911 that is long in the depth direction. The first mounting surface 911 is provided with a first magnetic member 911a, although this is not an essential component of the present invention. The left side of the first arm 910 includes a first workpiece holding surface 912.

[0026] The first magnetic member 911a is composed of a permanent magnet that generates a magnetic force capable of being attracted to the rotating stage 143, which is made of a magnetic material. If the rotating stage 143 is made of a permanent magnet, the first magnetic member 911a may be made of a magnetic material such as iron, or it may be made of a permanent magnet. The first magnetic member 911a may be composed of a combination of a magnetic material such as iron and a permanent magnet.

[0027] The first magnetic member 911a is positioned in the middle of the longitudinal direction of the first arm 910. The fixing structure for the first magnetic member 911a to the first arm 910 is not particularly limited, but for example, a fixing structure using screws can be cited. In this embodiment, only one first magnetic member 911a is provided, but this is not limited to this, and multiple first magnetic members 911a may be provided. When multiple first magnetic members 911a are provided, they can be provided at intervals from each other in the longitudinal direction of the first arm 910.

[0028] The lower end surface of the first magnetic member 911a is flat. Since the mounting surface 142 of the rotating stage 143 also has a flat portion, when the first magnetic member 911a is attracted to the rotating stage 143, it becomes less likely to wobble relative to the rotating stage 143 and becomes stable. The first magnetic member 911a may be embedded in the first arm 910. The attractive force of the first magnetic member 911a to the rotating stage 143 can be arbitrarily set depending on the type and size of the permanent magnet used. If the rotating stage 143 is made of permanent magnets, the attractive force can be set depending on the type of permanent magnet that makes up the rotating stage 143. In this embodiment, the attractive force of the first magnetic member 911a and the attractive force of the rotating stage 143 are set so that when a typical workpiece W is held by the holding member 900, the workpiece W can be firmly attracted to the rotating stage 143 so that the workpiece W does not fall over or wobble.

[0029] Furthermore, the first magnetic member 911a may constitute the first suction portion. In this case, the first arm 910 will have the first suction portion. The first suction portion is the part that applies an attractive force to hold the first mounting surface 911 in contact with the mounting surface (a predetermined surface) 142 of the rotating stage 143. The first suction portion may be composed of a part of the first arm 910. That is, if a part of the first arm 910 is made of a permanent magnet, the first arm 910 will be the member having the first suction portion.

[0030] The second arm 920 has multiple sides, including a top surface, a bottom surface, and both left and right sides. The bottom surface of the second arm 920 is a second mounting surface 921 that is long in the depth direction. The second mounting surface 921 is provided with a second magnetic member 921a, which is not an essential component of the present invention, but is made of, for example, a permanent magnet. The right side of the second arm 920 includes a second workpiece holding surface 922.

[0031] The second magnetic member 921a, like the first magnetic member 911a, is composed of a permanent magnet that generates a magnetic force capable of attracting the rotating stage 143. If the rotating stage 143 is composed of a permanent magnet, the second magnetic member 921a may be composed of a magnetic material such as iron, or it may be composed of a permanent magnet. The second magnetic member 921a may be composed of a combination of a magnetic material such as iron and a permanent magnet.

[0032] The second magnetic member 921a is positioned in the middle of the second arm 920 in the longitudinal direction. The fixing structure for the second magnetic member 921a to the second arm 920 is not particularly limited, but for example, a fixing structure using screws can be used. In this embodiment, only one second magnetic member 921a is provided, but this is not limited to this, and multiple second magnetic members 921a may be provided. When multiple second magnetic members 921a are provided, they can be provided at intervals from each other in the longitudinal direction of the second arm 920.

[0033] The lower end surface of the second magnetic member 921a is flat. Since the mounting surface 142 of the rotating stage 143 also has a flat portion, when the second magnetic member 921a is attracted to the rotating stage 143, it becomes less likely to wobble relative to the rotating stage 143 and becomes more stable. In particular, since the first magnetic member 911a is provided on the first arm 910 and the second magnetic member 921a is provided on the second arm 920, when the holding member 900 is placed on the rotating stage 143, at least two points that are far apart from each other are attracted to the rotating stage 143. As a result, the holding member 900 holding the workpiece W becomes even more stable.

[0034] The second magnetic member 921a may be embedded in the second arm 920. The attractive force of the second magnetic member 921a on the rotating stage 143 can be arbitrarily set depending on the type and size of the permanent magnet used. In this embodiment, the attractive force of the second magnetic member 921a is set so that the second arm 920 can be firmly attached to the rotating stage 143 so that the workpiece W, when held by the holding member 900, does not fall over or shake.

[0035] Furthermore, a second magnetic member 921a may constitute a second suction portion. In this case, the second arm 920 will have a second suction portion. The second suction portion is the part that applies an attractive force to hold the second mounting surface 921 in contact with the mounting surface (a predetermined surface) 142 of the rotating stage 143. The second suction portion may be composed of a part of the second arm 920. That is, if a part of the second arm 920 is made of a permanent magnet, the second arm 920 will be the member having the second suction portion.

[0036] Since the holding member 900 is equipped with a first magnetic member 911a and a second magnetic member 921a, as shown in Figure 1, the workpiece W can be held in a predetermined position on the rotating stage 143 while the holding member 900 is attached to the rotating stage 143. Although not shown, only one of the first magnetic member 911a and the second magnetic member 921a may be provided. Also, only one of the first suction part and the second suction part may be provided.

[0037] As shown in Figure 12, the opening / closing hinge 930 is composed of a pivot axis extending in the vertical direction. The opening / closing hinge 930 is provided at the rear end (one end in the first direction) of the holding member 900, and the rear end of the first arm 910 and the rear end of the second arm 920 are connected by the opening / closing hinge 930. The opening / closing hinge 930 serves as the axis of rotation when adjusting the relative positional relationship between the first arm 910 and the second arm 920 by the adjustment mechanism 940, which will be described later.

[0038] A first holding portion 915 is provided at the front end of the first arm 910. Specifically, a first recess 910a is formed at the front end of the first arm 910, opening towards the second arm 920. The base of the first holding portion 915 is housed within the first recess 910a. A first support shaft 916 is provided in the first recess 910a of the first arm 910, which rotatably supports the base of the first holding portion 915. The first support shaft 916 extends in the vertical direction, and the first holding portion 915 rotates around the first support shaft 916. A first workpiece holding surface 912 is formed on the end face of the first holding portion 915. The first workpiece holding surface 912 is oriented to the left, but its orientation can be changed by the rotation of the first holding portion 915 around the first support shaft 916. For example, as shown in Figure 10, even when the first arm 910 and the second arm 920 are opened, the first workpiece holding surface 912 can remain facing left by rotating the first holding part 915 around the first pivot shaft 916. Furthermore, depending on the shape and size of the workpiece W, the first holding part 915 can be rotated around the first pivot shaft 916 to allow the first workpiece holding surface 912 to make stable contact with the surface of the workpiece W over as wide an area as possible.

[0039] A second holding portion 925 is also provided at the front end of the second arm 920, similar to the first arm 910. Specifically, a second recess 920a is formed at the front end of the second arm 920, opening towards the first arm 910. The base of the second holding portion 925 is housed within the second recess 920a. The second arm 920 has a second support shaft 926 provided within the second recess 920a that rotatably supports the base of the second holding portion 925. The second support shaft 926 extends in the vertical direction, and the second holding portion 925 rotates around the second support shaft 926. A second workpiece holding surface 922 is formed on the end face of the second holding portion 925. The second workpiece holding surface 922 is oriented to the right, but its orientation can be changed in the same way as the first workpiece holding surface 912 by rotating the second holding portion 925 around the second support shaft 926.

[0040] As shown in Figure 12, a first through-hole 913 is formed in the longitudinal middle portion of the first arm 910, penetrating in the direction of moving toward and away from the second arm 920 (left-right direction). The first through-hole 913 opens on both the left and right sides of the first arm 910.

[0041] A second through-hole 923 is formed in the longitudinal middle portion of the second arm 920, penetrating in the direction of moving toward and away from the first arm 910 (left-right direction). The second through-hole 923 opens on both the left and right sides of the second arm 920.

[0042] The holding member 900 includes an adjustment mechanism 940 for adjusting the relative positional relationship between the first arm 910 and the second arm 920. The adjustment mechanism 940 defines the positional relationship between the first arm 910 and the second arm 920 so that the first workpiece holding surface 912 and the second workpiece holding surface 922 face each other while the first mounting surface 911 of the first arm 910 and the second mounting surface 921 of the second arm 920 are both facing downwards, and is a mechanism for relatively moving the first arm 910 and the second arm 920 in a direction in which the first workpiece holding surface 912 and the second workpiece holding surface 922 move toward and away from each other.

[0043] Specifically, the adjustment mechanism 940 includes a rotating bolt 941, a bearing nut 942 provided on the first arm 910, and a tip retaining portion 943 provided on the second arm 920. The bearing nut 942 is housed inside the first through hole 913 of the first arm 910 and is rotatably supported around an axis extending vertically relative to the first arm 910. In other words, the bearing nut 942 is rotatably supported around an axis perpendicular to the axial direction of the rotating bolt 941 relative to the first arm 910.

[0044] The bearing nut 942 has a threaded hole 942a that penetrates in the left-right direction (a direction perpendicular to the axial direction during rotation). The threaded shaft portion 941a of the rotating bolt 941 is screwed into the threaded hole 942a of the bearing nut 942 and penetrates the bearing nut 942 when it is positioned to extend in the left-right direction.

[0045] The tip holder portion 943 is housed inside the second through hole 923 of the second arm 920. A fitting hole 943a is formed on the right side of the tip holder portion 943, which is open to the right. The tip of the screw shaft portion 941a fits into the fitting hole 943a, and by fitting the tip of the screw shaft portion 941a into the fitting hole 943a, the tip holder portion 943 holds the tip of the rotating bolt 941. The fitting hole 943a is formed to prevent the screw shaft portion 941a from coming out by preventing relative movement of the screw shaft portion 941a in the left-right direction with respect to the tip holder portion 943 when the tip of the screw shaft portion 941a is fitted into it, while allowing rotation of the screw shaft portion 941a relative to the tip holder portion 943. As will be described later, the tip holder portion 943 is supported by the second arm 920 via a release lever 960.

[0046] An operating knob 941b is provided at the base end of the rotating bolt 941. The user can rotate the rotating bolt 941 by holding the knob 941b, and by rotating the rotating bolt 941, the relative positional relationship between the rotating bolt 941 and the bearing nut 942 can be changed, thereby adjusting the relative positional relationship between the first retaining part 915 and the second retaining part 925.

[0047] When the rotating bolt 941 is rotated in a direction that moves it to the left relative to the bearing nut 942, the first arm 910 and the second arm 920 can be opened, as shown in Figure 10. Conversely, when the rotating bolt 941 is rotated in a direction that moves it to the right relative to the bearing nut 942, the first arm 910 and the second arm 920 can be closed until the first workpiece holding surface 912 and the second workpiece holding surface 922 come into contact, as shown in Figure 4, etc. In this way, by rotating the rotating bolt 941, the opening angle between the first arm 910 and the second arm 920 can be changed almost steplessly.

[0048] After opening the first arm 910 and the second arm 920, the workpiece W is placed between the first workpiece holding surface 912 and the second workpiece holding surface 922. Then, by rotating the rotary bolt 941 in the direction that closes the first arm 910 and the second arm 920, the first workpiece holding surface 912 and the second workpiece holding surface 922 can be brought into contact with the surface of the workpiece W. By tightening the rotary bolt 941, the workpiece W can be clamped between the first workpiece holding surface 912 and the second workpiece holding surface 922.

[0049] In this embodiment, the release lever 960 makes it possible to easily switch to a clamped state in which the workpiece W is clamped with stronger force, and to easily switch from the clamped state to the non-clamped state. Specifically, as shown in Figure 4, the holding member 900 is pivotably supported on the second arm 920 and includes a release lever 960 for changing the relative position between the first workpiece holding surface 912 and the second workpiece holding surface 922 by the pivoting motion. As shown in Figure 12, the release lever 960 has a base end portion 961 housed inside the second through hole 923 of the second arm 920 and an operating portion 962 extending to the left from the base end portion 961. The operating portion 962 is provided so as to protrude from the left side of the second arm 920 (one side opposite to the second workpiece holding surface 922).

[0050] The base end 961 is supported inside the second through hole 923 so as to be rotatable about an axis that extends vertically relative to the second arm 920. The base end 961 is provided with a vertically extending pin portion 961a. This pin portion 961a is inserted into a retaining hole 943b formed in the left portion of the tip retaining portion 943. Thus, the left portion of the tip retaining portion 943 is connected to the base end 961 of the release lever 960 via the pin portion 961a.

[0051] The retaining hole 943b is an elongated hole in the depth direction of the retaining member 900. As shown in Figure 12, when the release lever 960 is swung inward to the locked position, the tip retaining portion 943, which is connected to the release lever 960 by the pin portion 961a, is displaced to the left. This pulls the rotating bolt 941 to the left, allowing a force to be applied in the closing direction to the first arm 910 and the second arm 920. At this time, if the workpiece W is positioned so as to be in contact with the first workpiece retaining surface 912 and the second workpiece retaining surface 922, the retaining member 900 will grip the workpiece W with strong force.

[0052] On the other hand, as shown in Figure 14, when the release lever 960 is swung forward to the unlocked position, the tip holding portion 943 is displaced to the right. This pushes the rotating bolt 941 to the right, causing the first arm 910 and the second arm 920 to act in an opening direction. As a result, the holding member 900 switches from a clamped state to a non-clamped state. In other words, the holding member 900 can be switched from a clamped state to a non-clamped state, and from a non-clamped state to a clamped state, simply by swinging the release lever 960. Note that the release lever 960 only needs to be operated when necessary, and if the workpiece W can be held without swinging the release lever 960, the operation of the release lever 960 can be omitted.

[0053] A protrusion 920b is provided on the left side of the second arm 920. The protrusion 920b is located away from the operating part 962 of the release lever 960 towards the front of the holding member 900, and the protrusion 920b and the operating part 962 are spaced apart in the depth direction. The protrusion 920b can be used as a place for the user to grip when swinging the release lever 960 towards the user. For example, by placing the index finger or the like on the protrusion 920b and the thumb on the operating part 962 of the release lever 960, it becomes easier to apply force when swinging the release lever 960 towards the user.

[0054] The adsorption portion in this embodiment is made of a permanent magnet, but is not limited to this; for example, the adsorption portion may be made of an adhesive, bonding agent, or the like. Furthermore, height adjustment members may be detachably attached to the first magnetic member 911a and the second magnetic member 921a. The height adjustment member is a member having a predetermined dimension in the vertical direction. The upper surface of the height adjustment member is attracted to, for example, the first magnetic member 911a, while the lower surface of the height adjustment member is attracted to, for example, the rotating stage 143. Furthermore, as described above, the holding member 900 can be attached to the rotating stage 143 in a position where the opening and closing directions of the first arm 910 and the second arm 920 are horizontal, as well as in a position where the opening and closing directions of the first arm 910 and the second arm 920 are vertical, or in a position where the opening and closing directions of the first arm 910 and the second arm 920 are inclined with respect to the horizontal plane. In short, the position in which the holding member 900 is used is not particularly limited.

[0055] When using the holding member 900, the workpiece W is held on the rotating stage 143 by being sandwiched between the first holding portion 915 provided on the first arm 910 and the second holding portion 925 provided on the second arm 920. At this time, before holding the workpiece W with the holding member 900, the holding member 900 is placed on the rotating stage 143. Then, the first magnetic member 911a and the second magnetic member 921a are attracted to the rotating stage 143. When adjusting the relative positional relationship between the first arm 910 and the second arm 920 by the adjustment mechanism 940 while they are attracted to the rotating stage 143, the first magnetic member 911a and the second magnetic member 921a maintain their attracted state to the rotating stage 143, and by rotating the rotating bolt 941, the first arm 910 and the second arm 920 slide relative to the rotating stage 143 with the opening / closing hinge 930 as the axis of rotation. In other words, the attractive forces of the first magnetic member 911a and the second magnetic member 921a are set such that when the opening angle between the first arm 910 and the second arm 920 is changed by the adjustment mechanism 940, the first magnetic member 911a and the second magnetic member 921a are allowed to slide relative to the rotating stage 143. When adjusting the position with the adjustment mechanism 940, the release lever 960 is set to the unlocked position.

[0056] The adjustment mechanism 940 adjusts the positional relationship between the first arm 910 and the second arm 920 to clamp the workpiece W between the first holding part 915 and the second holding part 925, and then the release lever 960 is set to the locked position. This makes it possible to keep even thin or elongated workpieces W stable in an upright position on the rotating stage 143.

[0057] The first arm 910 and the second arm 920 may be connected to a guide rail. In this case, the first arm 910 and the second member 920 can be moved relative to each other along the guide rail by rotating the rotating bolt 941.

[0058] The holding member 900 is provided with identification members 900A, 900B, 900C, and 900D for identifying the position and orientation of the holding member 900. The identification members 900A, 900B, 900C, and 900D are, for example, AR (augmented reality) markers, but they may be replaced with codes such as two-dimensional codes. Alternatively, in addition to AR markers, codes such as two-dimensional codes may be provided as identification members 900A, 900B, 900C, and 900D. All identification members 900A, 900B, 900C, and 900D may be the same, but in this embodiment, all identification members 900A, 900B, 900C, and 900D are different. This makes it possible to determine which part of the holding member 900 an identification member is located on, and by identifying the identification member, the part of the holding member 900 can be identified.

[0059] The identification members 900A, 900B, 900C, and 900D include the first identification members 900A and 900B provided on the first arm 910, and the second identification members 900C and 900D provided on the second arm 920. The identification members 900A, 900B, 900C, and 900D may be provided by attaching them to the first arm 910 and the second arm 920, or by printing or engraving them. Alternatively, the identification members may be provided only on the first arm 910, or only on the second arm 920. The following description will explain an example in which the identification members 900A, 900B, 900C, and 900D are provided on the first arm 910 and the second arm 920.

[0060] The first identification members 900A and 900B include a rear-side first identification member 900A provided on the rear portion of the upper surface of the first arm 910, and a front-side first identification member 900B provided on the front end face of the first arm 910. Thus, the first arm 910 has two first identification members 900A and 900B provided on it at intervals from each other. Furthermore, since the two first identification members 900A and 900B are provided on different surfaces of the first arm 910, the directions in which the two first identification members 900A and 900B face are different. The surfaces on which the first identification members 900A and 900B are provided can be any surface of the first arm 910 other than the first mounting surface 911, and are not particularly limited. Furthermore, the number of the first identification members 900A and 900B is not limited to two; there may be one or three or more. Also, multiple first identification members 900A and 900B may be provided on the same surface of the first arm 910.

[0061] The second identification members 900C, 900D include a rear second identification member 900C provided on the rear portion of the upper surface of the second arm 920, and a front second identification member 900D provided on the front end face of the second arm 920. Similar to the first arm 910, the second arm 920 has two second identification members 900C, 900D provided at intervals from each other and on different faces of the second arm 920. The faces on which the second identification members 900C, 900D are provided are not particularly limited and may be any face of the second arm 920 other than the second mounting surface 921. Furthermore, the number of second identification members 900C, 900D is not limited to two; there may be one or three or more. In addition, multiple second identification members 900C, 900D may be provided on the same face of the second arm 920.

[0062] Identification members 900A, 900B, 900C, and 900D each contain an ID that identifies them as such. In other words, identification member 900A contains unique identification information (ID), and it is possible to identify it as identification member 900A based on this identification information. Similarly, the other identification members 900B, 900C, and 900D each contain unique identification information, and it is possible to identify them as identification members 900B, 900C, and 900D based on this identification information.

[0063] The controller 200 shown in Figure 1 is equipped with a storage device (storage unit) 240. The storage device 240 consists of, for example, a solid-state drive or a hard disk drive. The storage device 240 is the part that stores data associating the IDs of the identification members 900A, 900B, 900C, and 900D with the positions of the identification members 900A, 900B, 900C, and 900D on the holding member 900 and the shape of the holding member 900. The storage device 240 stores the shape of the holding member 900 in a predetermined state where the distance between the first workpiece holding surface 912 and the second workpiece holding surface 922 is predetermined. The predetermined state may be any of the following: the state in which the arms 910 and 920 are completely closed as shown in Figure 4; the state in which the arms 910 and 920 are fully open as shown in Figure 10; or the state in which the arms 910 and 920 are at any degree of opening as shown in Figure 13.

[0064] For example, the ID of identification member 900A, the position of identification member 900A on the holding member 900, and the three-dimensional shape data of the holding member 900 on which the identification member 900A is installed can be associated and stored in the storage device 240. Similarly, for the other identification members 900B, 900C, and 900D, the IDs, the positions of identification members 900B, 900C, and 900D on the holding member 900, and the shape of the holding member 900 can be associated and stored in the storage device 240. As a result, for example, if the ID of identification member 900A is identified, the position of identification member 900A on the holding member 900 and the three-dimensional shape data of the holding member 900 on which the identification member 900A is installed can be read from the storage device 240. The format of the three-dimensional shape data can be any format.

[0065] Figure 15 shows a block diagram of the three-dimensional scanner 1. As shown in Figure 15, the measurement unit 100 includes a pattern light projection unit (first projection unit) 110 that projects a pattern light for measurement onto the workpiece W, a light receiving unit 120, a measurement control unit 150, and an illumination light output unit 130. The projection unit 110 is the part that irradiates the workpiece W, which is placed on the mounting unit 140 (described later), with measurement light having a predetermined pattern. If a holding member 900 is used, the projection unit 110 also irradiates the holding member 900 with measurement light. Placing the workpiece W on the mounting unit 140 is the same as arranging the workpiece W on the mounting unit 140.

[0066] The light-receiving unit 120 is fixed in an inclined position with respect to the mounting surface 142 of the rotating stage 143. The light-receiving unit 120 receives the measurement light that is irradiated by the light-emitting unit 110 and reflected by the workpiece W. In addition, if a holding member 900 is used, the light-receiving unit 120 receives the measurement light that is irradiated by the light-emitting unit 110 and reflected by the holding member 900.

[0067] When the light receiving unit 120 receives measurement light as reflected light from the workpiece W and the holding member 900, it generates and outputs a measurement light receiving signal representing the amount of measurement light received. The light receiving unit 120 can generate an observation image for observing the overall shape of the workpiece W by imaging the workpiece W placed on the mounting unit 140. In this example, there is an illumination light output unit 130, but uniform light may be irradiated onto the workpiece W and the holding member 900 from the light emitting unit 110. In this case, the light emitting unit 110 is a component that irradiates the workpiece W and the holding member 900 with measurement light and uniform light at different timings. The light receiving unit 120 can also receive the uniform light irradiated from the light emitting unit 110 and output a light receiving signal for texture acquisition. For example, uniform light of the same wavelength as the measurement light can be irradiated from the measurement light source and a light receiving signal including uniaxial color information can be output.

[0068] The light-receiving unit 120 according to this embodiment includes a high-magnification light-receiving unit and a low-magnification light-receiving unit. The high-magnification light-receiving unit is the part of the workpiece W that can be imaged at a magnified view compared to the low-magnification light-receiving unit. On the other hand, the low-magnification light-receiving unit is a light-receiving unit with a wider field of view compared to the high-magnification light-receiving unit.

[0069] The base section 600 comprises a base plate 602 and a movement control unit (stage control unit) 144. The mounting section 140 is supported on the base plate 602 of the base section 600. The movement control unit 144 controls the movement and rotation of the rotating stage 143 on which the workpiece W is placed. The movement control unit 144 may be provided on the base section 600 side or on the controller 200 side.

[0070] The light source unit 300 is connected to the measurement unit 100. The light source unit 300 is the part that generates measurement light and supplies it to the measurement unit 100. The controller 200 is the part that controls the measurement unit 100 and the like. The display unit 400 is connected to the controller 200 and is configured to display the image generated by the measurement unit 100, and to allow necessary settings, inputs, selections, etc.

[0071] As shown in Figure 17, two mutually orthogonal directions within the mounting surface 142 of the rotating stage 143 are defined as the X direction and the Y direction, and are indicated by arrows X and Y, respectively. The direction perpendicular to the mounting surface 142 of the mounting section 140 is defined as the Z direction, and is indicated by arrow Z. The direction of rotation around an axis parallel to the Z direction is defined as the θ direction, and is indicated by arrow θ.

[0072] The mounting section 140 includes a rotating stage 143 that rotates the mounting surface 142 around an axis extending in the Z direction, and a translational stage 141 that moves the mounting surface 142 horizontally (in the X and Y directions). The translational stage 141 has an X-direction movement mechanism and a Y-direction movement mechanism. The rotating stage 143 has a θ-direction rotation mechanism. The mounting section 140 may also include a tilt stage having a mechanism that can rotate around an axis parallel to the mounting surface 142.

[0073] The movement control unit 144 controls the rotational movement of the rotating stage 143 and the parallel movement of the translational stage 141 according to the measurement conditions set by the measurement condition setting unit 261, which will be described later. The movement control unit 144 also controls the movement of the mounting unit 140 by the mounting movement unit based on the measurement area set by the measurement condition setting unit 261, which will be described later.

[0074] In addition to the storage device 240, the controller 200 also includes a CPU (Central Processing Unit) 210, ROM (Read-Only Memory) 220, working memory 230, and an operation unit 250. For example, a PC (Personal Computer) can be used as the controller 200.

[0075] The configuration of the measurement unit 100 is shown in the block diagram of Figure 17. The measurement unit 100 comprises a light-emitting unit 110, a light-receiving unit 120, an illumination light output unit 130, a measurement control unit 150, and a main body case 101 housing these components. The light-emitting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, and 115. The light-receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. When performing measurements at different magnifications by providing multiple light-receiving units, a light-receiving unit 120a including a low-magnification camera 121 and low-magnification lenses, and a light-receiving unit 120b including a high-magnification camera 121 and high-magnification lenses may be installed. Note that the configuration is not limited to this one; the magnification may be varied by switching between multiple lenses for a single camera 121, or by providing a zoom lens for a single camera 121.

[0076] The light-emitting unit 110 is positioned diagonally above the mounting unit 140. In the example shown in Figure 17, the measurement unit 100 includes two light-emitting units 110, but the measurement unit 100 may include multiple light-emitting units 110. Here, a first measurement light-emitting unit 110A (on the right in Figure 17) capable of irradiating the workpiece W with a first measurement light ML1 from a first direction, and a second measurement light-emitting unit 110B (on the left in Figure 17) capable of irradiating the workpiece W with a second measurement light ML2 from a second direction different from the first direction are provided. The first measurement light-emitting unit 110A and the second measurement light-emitting unit 110B are arranged symmetrically with the optical axis of the light-receiving unit 120 as the center of symmetry. Although not shown, it is also possible to have three or more light-emitting units 110, or to move the light-emitting unit 110 and the mounting unit 140 relative to each other to project light onto the workpiece W in different directions, even while using a common light-emitting unit 110. In the above example, multiple light-emitting units 110 are provided and the light is received by a common light-receiving unit 120. However, conversely, multiple light-receiving units 120 may be provided to receive light from a common light-emitting unit 110. Furthermore, in this example, the irradiation angle of the illumination light emitted by the light-emitting unit 110 with respect to the Z direction is fixed, but this can also be made variable.

[0077] Each first measurement light projection unit 110A and second measurement light projection unit 110B is equipped with a first measurement light source and a second measurement light source, respectively, as measurement light sources 111. These measurement light sources 111 are, for example, halogen lamps that emit white light. The measurement light source 111 may also be a light source that emits monochromatic light, such as a blue LED (light-emitting diode) or organic EL that emits blue light. The light emitted from the measurement light source 111 (hereinafter referred to as "measurement light") is appropriately focused by the lens 113 and then incident on the pattern generation unit 112.

[0078] The relative positions of the light-receiving unit 120, light-emitting units 110A and 110B, and the light-receiving unit 120 are determined such that the central axes of the light-emitting units 110A and 110B intersect at a position where the arrangement of the workpiece W on the mounting unit 140 and the depth of field of the light-emitting and light-receiving units 110 and 120 are appropriate. Furthermore, since the center of the rotation axis in the θ direction coincides with the central axis of the light-receiving unit 120, when the mounting unit 140 rotates in the θ direction, the workpiece W rotates within the field of view around the rotation axis without moving out of the field of view.

[0079] The pattern generation unit 112 reflects the light emitted from the measurement light source 111 so that it projects measurement light onto the workpiece W. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted by the pattern generation unit 112 is converted by a plurality of lenses 114 and 115 into light with a diameter larger than the observation and measurement field of view of the light receiving unit 120, and then irradiated onto the workpiece W on the mounting unit 140.

[0080] The pattern generation unit 112 is a component that can switch between a projection state in which measurement light is projected onto the workpiece W and a non-projection state in which measurement light is not projected onto the workpiece W. For example, a DMD (Digital Micromirror Device) can be used for such a pattern generation unit 112. A pattern generation unit 112 using a DMD can be controlled by the measurement control unit 150 to switch between a reflection state in which the measurement light is reflected onto the optical path as the projection state and a light-shielding state in which the measurement light is blocked as the non-projection state.

[0081] A DMD is an element in which numerous micromirrors (tiny mirror surfaces) are arranged on a plane. Each micromirror can be individually switched ON or OFF by the measurement control unit 150, so a desired projection pattern can be constructed by combining the ON and OFF states of numerous micromirrors. This makes it possible to generate the pattern necessary for triangulation and measure the shape of the workpiece W. In this way, the DMD functions as a projection pattern optical system that projects a periodic projection pattern for measurement onto the workpiece W during measurement. Furthermore, the DMD has excellent response speed and offers the advantage of being able to operate at high speeds compared to shutters and the like.

[0082] In the above example, an example using a DMD for the pattern generation unit 112 was described, but the present invention is not limited to a DMD for the pattern generation unit 112, and other materials can be used. For example, an LCOS (Liquid Crystal on Silicon: reflective liquid crystal element) may be used as the pattern generation unit 112. Alternatively, a transmissive material may be used instead of a reflective material to adjust the amount of light transmitted for measurement. In this case, the pattern generation unit 112 is placed on the optical path of the measurement light, and a light projection state that transmits the measurement light and a light shielding state that blocks the measurement light are switched. For example, an LCD (liquid crystal display) can be used for such a pattern generation unit 112. Alternatively, the pattern generation unit 112 may be configured using a projection method using multiple line LEDs, a projection method using multiple optical paths, an optical scanner method composed of a laser and a galvanometer mirror, an AFI (Accordion fringe interferometry) method that uses interference fringes generated by superimposing beams divided by a beam splitter, or a projection method using a physical grid composed of a piezo stage and a high-resolution encoder and a moving mechanism.

[0083] The method for three-dimensional measurement does not have to be one that uses patterned light; other methods can also be used. For example, camera 121 may be a compound eye camera, and three-dimensional measurement may be performed by stereo measurement.

[0084] The light-receiving unit 120 is positioned above the mounting unit 140. The measurement light reflected upward from the workpiece W towards the mounting unit 140 is collected and imaged by the multiple lenses 122 and 123 of the light-receiving unit 120, and then received by the camera 121.

[0085] Camera 121 is a CCD (charge-coupled device) camera, for example, including an image sensor 121a. Image sensor 121a is, for example, a monochrome CCD (charge-coupled device). Image sensor 121a may be other image sensors such as a CMOS (complementary metal-oxide-semiconductor) image sensor. Color image sensors require each pixel to correspond to the reception of red, green, and blue light, resulting in lower measurement resolution compared to monochrome image sensors, and sensitivity is reduced because each pixel requires a color filter. Therefore, in this embodiment, a monochrome CCD is used as the image sensor, and a color image is acquired by illuminating the workpiece W with illumination corresponding to RGB in a time-division manner using the illumination light output unit 130, which will be described later. With this configuration, a color image of the object to be measured can be acquired without reducing the measurement accuracy. Illumination light output unit 130 is an example of a second light projection unit that irradiates the workpiece W with illumination light. The illumination light can be uniform light.

[0086] A color image sensor may also be used as the image sensor 121a. In this case, although the measurement accuracy and sensitivity will be lower compared to a monochrome image sensor, it will no longer be necessary to irradiate the image sensor with illumination corresponding to RGB in a time-division manner from the illumination light output unit 130. A color image can be acquired simply by irradiating with white light, thus simplifying the illumination optical system. Each pixel of the image sensor 121a outputs an analog electrical signal corresponding to the amount of light received (hereinafter referred to as the "received light signal") to the measurement control unit 150.

[0087] The measurement control unit 150 is equipped with an A / D converter (analog-to-digital converter) and a FIFO (First In First Out) memory (not shown). The light received signal output from the camera 121 is sampled at a constant sampling period and converted into a digital signal by the A / D converter of the measurement control unit 150, based on control by the light source unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the controller 200 as pixel data.

[0088] The control unit 250 of the controller 200 may include, for example, a keyboard or a pointing device. Examples of pointing devices include a mouse or a joystick.

[0089] The ROM 220 of the controller 200 stores system programs and the like. The working memory 230 of the controller 200 consists of, for example, RAM (Random Access Memory) and is used for processing various data. The storage device 240 stores a program for three-dimensional measurement. The storage device 240 is also used to store various data such as pixel data (image data), setting information, and measurement conditions provided by the measurement control unit 150. Measurement conditions include, for example, the settings of the light-emitting unit 110 (pattern frequency, pattern type) and the type of light-receiving unit 120 (low-magnification light-receiving unit, high-magnification light-receiving unit), which are set by the scanner module 260 described later when measuring the shape of the workpiece W. Furthermore, the storage device 240 can also store brightness information, coordinate information, and attribute information for each pixel that makes up the measurement image.

[0090] The CPU210 is a control circuit or control element that processes given signals and data, performs various calculations, and outputs the calculation results. In this specification, CPU refers to an element or circuit that performs calculations, and is used to mean not limited to processors such as CPUs, MPUs, GPUs, and TPUs for general-purpose PCs, regardless of their name, but also including processors such as FPGAs, ASICs, LSIs, microcontrollers, and chipsets such as SoCs.

[0091] The CPU 210 generates image data based on pixel data provided by the measurement control unit 150. The CPU 210 also performs various processing on the generated image data using the working memory 230. For example, based on the light-receiving signal output from the light-receiving unit 120, the CPU 210 generates measurement data representing the three-dimensional shape of the workpiece W contained within the field of view of the light-receiving unit 120 at a specific position on the mounting unit 140. The measurement data is the image itself acquired by the light-receiving unit 120. For example, when measuring the shape of the workpiece W using a phase-shift method, multiple images constitute one set of measurement data. The measurement data may also be point cloud data, which is a collection of points having three-dimensional position information. Measurement data of the workpiece W can be obtained using this point cloud data. Point cloud data is data represented by a collection of multiple points having three-dimensional coordinates.

[0092] The movement control unit 144 determines, based on measurement data of at least a portion of the workpiece W, whether to perform only the rotation of the rotating stage 143 or both the rotation of the rotating stage 143 and the translation of the translation stage 141. This facilitates three-dimensional measurement by automatically determining the imaging range according to the external shape of the workpiece W without the user having to be aware of it. The movement control unit 144 can also control the rotation of the rotating stage 143 after moving the translation stage 141 in the XY direction and then stopping the movement in the XY direction, thereby acquiring the shape around the workpiece W. Furthermore, scanning can also be performed by moving and rotating the workpiece W relative to the measuring unit 100 while the measuring unit 100 is fixed.

[0093] The display unit 400 is a component for displaying stripe projection images acquired by the measurement unit 100, depth images generated based on the stripe projection images, texture images captured by the measurement unit 100, various user interface screens, etc. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescent) panel. Furthermore, by using a touch panel in the display unit 400, it can also be used in conjunction with the operation unit 250. The display unit 400 can also display images generated by the light receiving unit 120.

[0094] The light source unit 300 includes a control board 310 and an observation illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light-emitting unit 110, the light-receiving unit 120, and the measurement control unit 150 based on commands from the CPU 210 of the controller 200. Note that this configuration is just one example, and other configurations are possible. For example, the light-emitting unit 110 and the light-receiving unit 120 could be controlled by the measurement control unit 150, or the light-emitting unit 110 and the light-receiving unit 120 could be controlled by the controller 200, thus omitting the control board. Alternatively, a power supply circuit for driving the measurement unit 100 can be provided in this light source unit 300.

[0095] The observation illumination light source 320 includes, for example, three LEDs that emit red, green, and blue light. By controlling the brightness of the light emitted from each LED, any color of light can be generated from the observation illumination light source 320. The illumination light IL generated from the observation illumination light source 320 is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). In addition to LEDs, other light sources such as semiconductor lasers (LDs), halogen lights, and HIDs can also be used as appropriate for the observation illumination light source. In particular, if a color imaging sensor is used as the image sensor, a white light source can be used for the observation illumination light source.

[0096] The illumination light IL output from the illumination light output unit 130 illuminates the workpiece W by switching between red, green, and blue light in a time-division manner. This allows the texture images captured by these RGB lights to be combined to obtain a color texture image, which can then be displayed on the display unit 400.

[0097] A three-dimensional measurement program and applications for realizing the functions of the three-dimensional scanner 1 are installed on the controller 200. This allows the three-dimensional measurement method according to the present invention to be executed using the three-dimensional scanner 1. The three-dimensional measurement method is a method for measuring the three-dimensional shape of a workpiece W and is executed by a computer in the controller 200. The three-dimensional measurement program that causes the computer to execute the three-dimensional measurement method can be recorded on the storage medium 1000. The storage medium 1000 may be an optical disc such as a CD-ROM or DVD-ROM, or a semiconductor memory such as a memory card.

[0098] In the controller 200, on which the three-dimensional measurement program and application are installed, the CPU 210, ROM 220, working memory 230, storage device 240, etc., constitute the scanner module 260, conversion module 270, integration module 280, and analysis module 290 shown in Figure 18. In this embodiment, the system is divided into four modules: scanner module 260, conversion module 270, integration module 280, and analysis module 290. However, any two or more of these modules 260, 270, 280, and 290 may be integrated to form a single module. Furthermore, parts of each module 260, 270, 280, and 290 may be incorporated into other modules. In other words, the configuration example shown in Figure 18 is just one example and is not limited to the configuration example shown in Figure 18.

[0099] The scanner module 260 acquires image data of the workpiece W by measuring its shape and creates mesh data of the workpiece W based on that image data. The conversion module 270 converts the mesh data created by the scanner module 260 into CAD data. CAD data is three-dimensional shape information composed of analytical surfaces and freeform surfaces, and includes surface data, solid data, and data used for design. Surface data is data of shape surfaces composed of freeform surfaces and analytical surfaces, such as side data and planar data of a cylinder.

[0100] The integration module 280 is responsible for transmitting signals and data from the scanner module 260 to the conversion module 270 and the analysis module 290, and transmitting signals and data from the conversion module 270 to the scanner module 260. In this example, a module is a unit capable of executing multiple arithmetic processes, and can also be called a functional unit, functional block, etc.

[0101] The scanner module 260 includes, for example, a measurement condition setting unit 261, a scanner control unit 262, a point cloud acquisition unit 263a, a mesh data generation unit 263b, a scanner output unit 264, etc. The measurement condition setting unit 261 is the part that sets the measurement conditions for the shape of the workpiece. The scanner control unit 262 is the part that controls the measurement unit 100 according to the measurement conditions set in the measurement condition setting unit 261 to generate image data and acquires measurement data for the workpiece W based on the generated image data.

[0102] The point cloud acquisition unit 263a is responsible for acquiring point cloud data of the workpiece W based on the image data of the workpiece W acquired by the scanner control unit 262. The mesh data generation unit 263b is responsible for acquiring the point cloud data acquired by the point cloud acquisition unit 263a, processing the acquired point cloud data, and converting it into mesh data.

[0103] The scanner output unit 264 is the part that outputs the mesh data created by the mesh data generation unit 263b and additional data to the conversion module 270. The additional data is, for example, data that includes at least one of the measurement conditions and data calculated from the measurement data of the workpiece W.

[0104] The scanner module 260 controls the measurement unit 100 and generates three-dimensional data along with the various conditions under which the shape of the workpiece W was measured (measurement model, measurement magnification, resolution, etc.) and the raw data (e.g., image data) at the time of measurement. The three-dimensional data is mesh data containing multiple polygons and can also be called polygon data. A polygon is data composed of information that identifies multiple points and information that shows the polygonal surface formed by connecting those points. For example, it can consist of information that identifies three points and information that shows the triangular surface formed by connecting those three points. Mesh data and polygon data can also be defined as data represented by a collection of multiple polygons.

[0105] The conversion module 270 converts mesh data into CAD data and determines the conversion process based on measurement conditions and raw data. Specifically, the conversion module 270 includes, for example, a data input unit 271, a processing parameter determination unit 272, a CAD conversion unit 273, and a CAD output unit 274. The data input unit 271 is the part that receives mesh data output from the scanner output unit 264 and additional data. The processing parameter determination unit 272 is the part that determines the processing parameters for converting mesh data into CAD data according to the additional data received by the data input unit 271. The CAD conversion unit 273 is the part that converts mesh data into CAD data according to the processing parameters determined by the processing parameter determination unit 272. The CAD output unit 274 is the part that outputs the CAD data converted by the CAD conversion unit 273.

[0106] The analysis module 290 of the three-dimensional scanner 1 is a module for generating three-dimensional data of workpieces W arranged in different orientations and synthesizing the respective three-dimensional data to generate composite three-dimensional data of workpiece W. The analysis module 290 has a data acquisition unit 291 that receives a light received signal output from the light receiving unit 120. That is, the data acquisition unit 291 acquires a light received signal based on the measurement light reflected by the holding member 900 and the workpiece W. Furthermore, the data acquisition unit 291 acquires a two-dimensional image including the identification members 900A, 900B, 900C, and 900D provided on the holding member 900, based on the light received signal output from the light receiving unit 120. In other words, the camera 121 is a component that outputs a light received signal based on the measurement light reflected by the holding member 900 and the workpiece W, and also outputs a two-dimensional image including the identification members 900A, 900B, 900C, and 900D provided on the holding member 900. The two-dimensional image is not an image acquired with structured illumination, but rather an image acquired when the surface of the holding member 900 (including the identification members 900A, 900B, 900C, and 900D) is illuminated with, for example, uniform light. Alternatively, a pseudo-uniform light image obtained by processing an image acquired with structured illumination may be used.

[0107] Depending on the positional relationship between the optical axis of the light-receiving unit 120 and the holding member 900, the data acquisition unit 291 may not be able to acquire a two-dimensional image that includes all of the identification members 900A, 900B, 900C, and 900D. In this case, the data acquisition unit 291 acquires a two-dimensional image that includes some of the identification members 900A, 900B, 900C, and 900D.

[0108] In this embodiment, since the identification members 900A, 900B, 900C, and 900D are provided on different surfaces of the holding member 900, the positions of the identification members 900A, 900B, 900C, and 900D are all different. Also, since the first identification member 900A on the far side and the first identification member 900B on the near side are facing in different directions, at least one of the identification members is more likely to enter the imaging range of the light receiving unit 120. The same applies to the second identification members 900C and 900D.

[0109] The rotating stage 143 allows the user to place the workpiece W in any orientation. For example, to acquire the three-dimensional shapes of the front and back sides of the workpiece W, the workpiece W can be placed on the rotating stage 143 with the front side facing upwards to acquire three-dimensional data, and then placed on the rotating stage 143 with the back side facing upwards to acquire three-dimensional data. In addition, to acquire the three-dimensional shapes of the side surfaces of the workpiece W, the workpiece W can be placed on the rotating stage 143 with the side surfaces facing upwards to acquire three-dimensional data. For example, the orientation with the front side facing upwards can be designated as the first orientation, and the orientation with the back side facing upwards can be designated as the second orientation. Furthermore, the orientation with the side surfaces facing upwards can be designated as the third orientation. By using the holding member 900, the workpiece W can be held on the rotating stage 143 in various orientations.

[0110] The definition of the placement orientation of the workpiece W is merely an example, and the placement orientations can be different from each other. For example, a first, second, and third placement orientation can be defined depending on the shape of the workpiece W and the range from which three-dimensional data is to be acquired. Furthermore, a fourth and fifth placement orientation may also be defined, and there is no particular limit to the number of placement orientations.

[0111] When a holding member 900 is used, as described above, the holding member 900 is also measured together with the workpiece W, so it is necessary to remove the three-dimensional data of the holding member 900 after measurement. Figure 19 is a flowchart showing the process flow for removing the three-dimensional data of the holding member 900 after measurement. In step SA1, a two-dimensional image and three-dimensional data are input. That is, the analysis module 290 has a three-dimensional data generation unit 292, which acquires the received light signal acquired by the data acquisition unit 291. Based on the received light signal acquired by the data acquisition unit 291, the three-dimensional data generation unit 292 generates first three-dimensional data including the three-dimensional data of the holding member 900 and the three-dimensional data of the workpiece W. The data acquisition unit 291 may acquire a two-dimensional image including identification members 900A, 900B, 900C, and 900D, and the first three-dimensional data may be associated with the two-dimensional image. Furthermore, if the workpiece W is photographed from multiple different viewpoints, the two-dimensional images corresponding to each viewpoint may be associated with the first three-dimensional data.

[0112] In step SA2, the estimation unit 293 of the analysis module 290 detects the identification members 900A, 900B, 900C, and 900D provided on the holding member 900. Specifically, first, the estimation unit 293 acquires a two-dimensional image obtained by the data acquisition unit 291. The estimation unit 293 then performs a detection process for the identification members 900A, 900B, 900C, and 900D to determine if they are included in the two-dimensional image obtained by the data acquisition unit 291. If at least one of the identification members 900A, 900B, 900C, and 900D is detected as a result of the detection process, the estimation unit 293 determines that the detection was successful in step SA3. If none of the identification members 900A, 900B, 900C, and 900D are detected as a result of the detection process, the estimation unit 293 determines that the detection has failed in step SA3. Any of the identification members 900A, 900B, 900C, and 900D may be detected, and one or more identification members may be detected, but for convenience, in the following explanation, they will be referred to as "identification members 900A, 900B, 900C, and 900D".

[0113] If detection is determined to have failed in step SA3, the process proceeds to step SA9, where the first three-dimensional data generated in step SA1 is output as is. On the other hand, if detection is determined to have succeeded in step SA3, the process proceeds to step SA4. In step SA4, the estimation unit 293 calculates and identifies the coordinates (two-dimensional coordinates) indicating the region where the identification members 900A, 900B, 900C, and 900D exist, based on the two-dimensional images of the identification members 900A, 900B, 900C, and 900D detected in step SA3. When the AR markers are the identification members 900A, 900B, 900C, and 900D, the AR markers are designed to accurately determine the coordinates of their four corners, thus improving the accuracy of the coordinates calculated in step SA4. The estimation unit 293 also obtains the IDs contained in the identification members 900A, 900B, 900C, and 900D based on the two-dimensional images obtained by the data acquisition unit 291. Alternatively, brightness or color information may be extracted from a two-dimensional image, and the extracted brightness or color information may be assigned to each point in the three-dimensional point cloud corresponding to each pixel in the two-dimensional image. Then, the coordinates (three-dimensional coordinates) indicating the region where the identification element exists may be calculated using the brightness or color information assigned to each point in the three-dimensional point cloud. Furthermore, a two-dimensional image may be regenerated from the brightness or color information assigned to each point in the three-dimensional point cloud, and the coordinates (two-dimensional coordinates) indicating the region where the identification element exists may be calculated using this regenerated image.

[0114] In step SA5, the estimation unit 293 calculates and identifies the three-dimensional coordinates corresponding to the two-dimensional coordinates of the identification members 900A, 900B, 900C, and 900D detected in step SA3. Specifically, using the three-dimensional data input in step SA1, the estimation unit 293 can determine the three-dimensional coordinates of the image coordinates where the identification members 900A, 900B, 900C, and 900D exist. For example, the estimation unit 293 can identify the three-dimensional coordinates indicating the region where the identification members exist by obtaining three-dimensional information at the coordinates corresponding to the two-dimensional coordinates where the identification members exist from the first three-dimensional data generated by the three-dimensional data generation unit 292 based on the light-receiving signal acquired by the data acquisition unit 291. The three-dimensional information at the coordinates corresponding to the two-dimensional coordinates where the identification members exist may be identified using calibration information including the internal and external parameters of the camera and projector, in addition to the light-receiving signal acquired by the data acquisition unit 291. Here, calibration information refers to information including the internal parameters of the camera acquiring the image, the internal parameters of the projector, and the external parameters between the camera and the projector, when the acquisition of images for three-dimensional data and images containing identifiers are performed with the same camera. When the acquisition of images for three-dimensional data and images containing identifiers are performed with different cameras, the calibration information refers to information including the internal parameters of each camera, the internal parameters of the projector, the external parameters between the cameras, and the external parameters between each camera and the projector. In addition, the relative positional relationship between camera 121 and identification members 900A, 900B, 900C, and 900D can be calculated using a method called PnP (Perspective-n-Point) based on the image coordinates of the four corners. This makes it possible to determine the position and orientation of identification members 900A, 900B, 900C, and 900D. Furthermore, in step SA5, when determining the position and orientation of identification members 900A, 900B, 900C, and 900D, three-dimensional data of the holding member 900 may be used.

[0115] In step SA6, the estimation unit 293 calculates the position and orientation of the holding member 900. For example, it can determine the three-dimensional coordinates where the centers of the identification members 900A, 900B, 900C, and 900D are located, the reference coordinates of the identification members 900A, 900B, 900C, and 900D, and the rotation relationship with the camera coordinate axes. This is called the "orientation" of the identification members 900A, 900B, 900C, and 900D. If multiple identification members 900A, 900B, 900C, and 900D are detected, this process is performed multiple times to calculate the orientation of each identification member 900A, 900B, 900C, and 900D. In other words, the estimation unit 293 can determine the position and orientation of the identification members 900A, 900B, 900C, and 900D based on the two-dimensional images acquired by the data acquisition unit 291.

[0116] In step SA6, the estimation unit 293 estimates the position and orientation of the holding member 900 based on the position and orientation of the identified identification members 900A, 900B, 900C, and 900D. First, the three-dimensional position of each identification member 900A, 900B, 900C, and 900D in the coordinate system of the holding member 900, specifically the three-dimensional orientation (position and direction) of each identification member 900A, 900B, 900C, and 900D in the reference coordinates (reference axis and origin) of the holding member 900, can be pre-stored in the memory device 240 or the like and considered known.

[0117] The holding member 900 has an adjustment mechanism 940. In this case, the coordinates of the identification member provided on the reference fixed part (for example, the first arm 910) are fixed, while only the degree of freedom of movement (the portion of the translation associated with the opening and closing operation) of the movable part (for example, the second arm 920) is undefined.

[0118] The position and orientation of the holding member 900 can be estimated based on the position and orientation of at least one identification member, but by identifying multiple identification members with different IDs, the position and orientation of the holding member 900 with the adjustment mechanism 940 can be estimated with high accuracy. That is, in this embodiment, since the first identification members 900A and 900B and the second identification members 900C and 900D are provided on one holding member 900, the estimation unit 293 can identify the first identification members 900A and 900B and the second identification members 900C and 900D, depending on the position and orientation of the holding member 900 on the rotating stage 143. When the estimation unit 293 has determined the positional orientation of the first identification members 900A and 900B and the positional orientation of the second identification members 900C and 900D, it estimates the positional relationship between the first arm 910 and the second arm 920, which have been adjusted by the adjustment mechanism 940, based on the positional orientation of the first identification members 900A and 900B and the positional orientation of the second identification members 900C and 900D.

[0119] In step SA7, the region to be removed from the first three-dimensional data generated in step SA1, i.e., the region where the holding member 900 exists, is determined. The determination of the region to be removed is performed by the three-dimensional data editing unit 294 of the analysis module 290. The region to be removed may be a simple three-dimensional rotation rectangle, a region consisting of a combination of simple shapes made up of multiple rectangles or cylinders, or a region consisting of a complex mesh based on the CAD data of the holding member 900.

[0120] In this embodiment, identification members 900A, 900B, 900C, and 900D are provided on both the first arm 910 and the second arm 920 of the holding member 900. When the identification members 900A, 900B, 900C, and 900D of both the first arm 910 and the second arm 920 are identified, the shape of the entire holding member 900 can be determined by the orientation of the corresponding multiple parts. The three-dimensional data editing unit 294 defines the shape of the entire holding member 900 as the area to be removed from the first three-dimensional data. In this case, the shape corresponding to the first arm 910 and the shape corresponding to the second arm 920 may overlap, and the removal areas corresponding to each identification member may overlap. In this case, it is possible to suppress the retention of three-dimensional data of the connection part between the first arm 910 and the second arm 920.

[0121] In this case, if identification members 900A, 900B, 900C, and 900D corresponding to all parts are not identified, the position and orientation of the holding member 900 can be estimated from only the identified identification members, and a large area considering the movable range of the holding member 900 by the adjustment mechanism 940 can be removed. If many identification members 900A, 900B, 900C, and 900D are identified, the area to be removed can be determined with high accuracy. On the other hand, if only a small number of identification members 900A, 900B, 900C, and 900D are identified, the area to be removed will be large, but the three-dimensional data of the holding member 900 can be reliably removed in the later step SA8.

[0122] In step SA8, the three-dimensional data editing unit 294 removes the three-dimensional data in the region to be removed, as determined in step SA7, from the first three-dimensional data generated in step SA1, thereby generating second three-dimensional data. In step SA8, the three-dimensional data of the holding member 900 may be used to remove the three-dimensional data in the region to be removed.

[0123] Furthermore, if the estimation unit 293 obtains the ID of the identification member, the three-dimensional data editing unit 294 obtains the position of the identification member and the shape of the holding member 900, which are associated with the ID obtained by the estimation unit 293, from the storage device 240. Then, in step SA8, the three-dimensional data editing unit 294 generates second three-dimensional data by removing the three-dimensional data of the holding member 900 from the first three-dimensional data generated in step SA1, based on the position of the identification member and the shape of the holding member 900 obtained from the storage device 240.

[0124] It is possible that, for reasons such as one of the first identification members 900A, 900B and the second identification members 900C, 900D being located outside the imaging range, the position and orientation of one of the identification members may not be determined, while the position and orientation of the other identification member may be successfully determined. In this case, if the three-dimensional data editing unit 294 fails to determine the position and orientation of one of the first identification members 900A, 900B and the second identification members 900C, 900D, but the position and orientation of the other identification member is determined, the unit removes the three-dimensional data of the holding member 900 from the first three-dimensional data and generates the second three-dimensional data, based on the shape of the holding member 900 in a predetermined state where the distance between the first workpiece holding surface 912 and the second workpiece holding surface 922 of the holding member 900 is such that the three-dimensional data of the holding member 900 is determined. For example, three-dimensional data of the arms 910 and 920 in a completely closed state may be removed from the first three-dimensional data, three-dimensional data of the arms 910 and 920 in a fully open state may be removed from the first three-dimensional data, or three-dimensional data of the arms 910 and 920 in an arbitrary degree of opening may be removed from the first three-dimensional data.

[0125] In step SA9, the 3D data editing unit 294 outputs the second 3D data generated by the 3D data editing unit 294. The second 3D data can be displayed on the display unit 400, for example, or output to the conversion module 270. Note that there may be multiple holding members 900. In this case, each holding member may be distinguishable by attaching an identification member different from the holding member 900. Furthermore, if multiple holding members using the same identification member are arranged, that is, if there is a first holding member 900 and a second holding member 900' which is attached with the same identification member as the first holding member, the estimation unit 293 identifies the position and orientation from each identification member based on the 2D image acquired by the data acquisition unit 291. Then, based on the identified position and orientation of each identification member, the estimation unit 293 estimates the position and orientation of the first holding member 900 and the second holding member 900'. In this case, since the first holding member 900 and the second holding member 900' are provided with multiple identification members, multiple position and orientation candidates may be estimated for each holding member. In this case, among the multiple estimated position and orientation candidates, position and orientation candidates estimated to be located within a predetermined angular range or distance range, such as within an angular range of 5 degrees or within a distance range of 10 mm, may be considered as corresponding to the same holding member, while position and orientation candidates estimated to be located outside the predetermined angular range or distance range may be considered as corresponding to different holding members. That is, the estimation unit 293 estimates position and orientation candidates corresponding to the same holding member based on angle or distance from among the multiple position and orientation candidates, and the three-dimensional data editing unit 294 may remove the three-dimensional data corresponding to the first holding member 900 and the three-dimensional data corresponding to the second holding member 900' from the first three-dimensional data based on the position and orientation candidates corresponding to the same holding member estimated by the estimation unit 293. That is, the three-dimensional data corresponding to the first holding member 900 and the three-dimensional data corresponding to the second holding member 900', which is considered to be located at a different position from the first member 900, may be removed from the first three-dimensional data.

[0126] (Measurement of the first and second placement positions) In this embodiment, measurement of the workpiece W can be performed both when the workpiece W is positioned in a first position and when the workpiece W is positioned in a second position. In this case, the data acquisition unit 291 acquires a received light signal based on the measurement light reflected by the workpiece W and the holding member 900 when the workpiece W is positioned in the first position, and also acquires a received light signal based on the measurement light reflected by the workpiece W and the holding member 900 when the workpiece W is positioned in the second position. Furthermore, the data acquisition unit 291 acquires a two-dimensional image including the identification members 900A, 900B, 900C, and 900D when the workpiece W is in the first position, and acquires a two-dimensional image including the identification members 900A, 900B, 900C, and 900D when the workpiece W is in the second position.

[0127] The three-dimensional data generation unit 292 generates first three-dimensional data, including three-dimensional data of the holding member 900 and the workpiece W, based on the received light signal based on the measurement light reflected by the workpiece W and the holding member 900 positioned in a first arrangement. Furthermore, the three-dimensional data generation unit 292 generates third three-dimensional data, including three-dimensional data of the holding member 900 and the workpiece W, based on the received light signal based on the measurement light reflected by the workpiece W and the holding member 900 positioned in a second arrangement. Note that the first and third three-dimensional data may be generated based on a plurality of received light signals acquired while changing the rotational position of the workpiece W and the holding member 900 positioned in the first or second arrangement.

[0128] The estimation unit 293 identifies the first positional orientation of the identification members 900A, 900B, 900C, and 900D based on a two-dimensional image acquired when the identification members 900A, 900B, 900C, and 900D are in a first positional orientation, and estimates the first positional orientation of the holding member 900 based on the identified first positional orientation of the identification members 900A, 900B, 900C, and 900D. Furthermore, the estimation unit 293 identifies the second positional orientation of the identification members 900A, 900B, 900C, and 900D based on a two-dimensional image acquired when the identification members 900A, 900B, 900C, and 900D are in a second positional orientation, and estimates the second positional orientation of the holding member 900 based on the identified second positional orientation of the identification members 900A, 900B, 900C, and 900D. If the first three-dimensional data and the third three-dimensional data are generated based on multiple light-receiving signals acquired while changing the rotational position of the workpiece W and the holding member 900, the position and orientation of the identification members 900A, 900B, 900C, and 900D may be determined based on at least one two-dimensional image acquired at each rotation angle.

[0129] The three-dimensional data editing unit 294 generates second three-dimensional data by removing the three-dimensional data of the holding member 900 from the first three-dimensional data generated by the three-dimensional data generation unit 292 based on the first position and orientation of the holding member 900 estimated by the estimation unit 293. Furthermore, the three-dimensional data editing unit 294 generates fourth three-dimensional data by removing the three-dimensional data of the holding member 900 from the third three-dimensional data generated by the three-dimensional data generation unit 292 based on the second position and orientation of the holding member 900 estimated by the estimation unit 293.

[0130] The alignment unit 290A of the analysis module 290 acquires the second and fourth three-dimensional data generated by the three-dimensional data editing unit 294. The alignment unit 290A then aligns the acquired second and fourth three-dimensional data. During this alignment, the alignment unit 290A estimates the overlapping region between the second and fourth three-dimensional data and uses the estimated overlapping region between the two poses. The alignment unit 290A can estimate the overlapping region between the second and fourth three-dimensional data by using, for example, the normal vector of the three-dimensional data or the color information of the workpiece W. In other words, the alignment unit 290A can perform alignment based on the three-dimensional data included in the estimated overlapping region.

[0131] The synthesis unit 290C of the analysis module 290 is the part that synthesizes the second three-dimensional data and the fourth three-dimensional data that have been aligned by the alignment unit 290A. If the second three-dimensional data and the fourth three-dimensional data are mesh data, the synthesis unit 290C synthesizes both mesh data and generates composite mesh data as composite three-dimensional data.

[0132] (Embodiment equipped with a first camera and a second camera) In the above embodiment, the three-dimensional scanner 1 is equipped with a single camera 121. However, it is not limited to this, and as shown in the modified example in Figure 20, the three-dimensional scanner 1 may be equipped with a first camera 121A that outputs a light-receiving signal based on measurement light reflected by the holding member 900 and the workpiece W, and a second camera 121B that has coordinates corresponding to the coordinates of the first camera 121A and outputs a two-dimensional image including identification members 900A, 900B, 900C, and 900D provided on the holding member 900. The coordinates of the first camera 121A and the coordinates of the second camera 121B are associated based on the intrinsic parameters of the first camera 121A and the intrinsic parameters of the second camera 121B and the extrinsic parameters of the second camera 121B relative to the first camera 121A. The intrinsic parameters include the lens and pixel modeling (such as focal length). The extrinsic parameters include the relative relationship between the reference points (principal points of the lenses) of the first camera 121A and the second camera 121B.

[0133] In this modified version, the data acquisition unit 291 acquires the light signal output by the first camera 121A and the two-dimensional image output by the second camera 121B. The estimation unit 293 identifies the two-dimensional coordinates indicating the region where the identification members 900A, 900B, 900C, and 900D are located, based on the two-dimensional image output by the second camera 121B and acquired by the data acquisition unit 291. The estimation unit 293 also identifies the three-dimensional coordinates corresponding to the two-dimensional coordinates indicating the region where the identification members 900A, 900B, 900C, and 900D are located, based on the light signal output by the first camera 121A and acquired by the data acquisition unit 291. Then, the estimation unit 293 estimates the position and orientation of the identification members 900A, 900B, 900C, and 900D are located, based on the identified three-dimensional coordinates.

[0134] When determining three-dimensional coordinates, the estimation unit 293 acquires first three-dimensional data generated by the three-dimensional data generation unit 292 based on the light received signal output by the first camera 121A and acquired by the data acquisition unit 291. From the first three-dimensional data, the estimation unit 293 acquires three-dimensional information at coordinates corresponding to the two-dimensional coordinates indicating the region where the identification members 900A, 900B, 900C, and 900D exist, thereby determining the three-dimensional coordinates indicating the region where the identification members 900A, 900B, 900C, and 900D exist. Alternatively, the first camera 121A may be a compound camera, and three-dimensional measurement may be performed by stereo measurement.

[0135] (Other embodiments) The embodiments described above are merely illustrative in all respects and should not be interpreted restrictively. Furthermore, any modifications or changes that fall within the equivalent scope of the claims are all within the scope of the present invention. For example, the shape, size, position, etc., of each component can be changed as needed.

[0136] For example, by integrating data whose geometric relationships are known, such as multiple three-dimensional data acquired using the rotating stage 143, it is possible to erase the three-dimensional data of the holding member 900 measured during other imaging sessions based on the information of the identification member at one imaging session. This can be achieved by using a transformation matrix representing the geometric relationship between imaging sessions to transform the three-dimensional data acquired during other imaging sessions into the coordinate system of the imaging session in which the identification member to be used was measured, and then removing the three-dimensional data of the holding member 900 based on the coordinates of the identification member. These methods differ only in whether there are multiple cameras or multiple imaging sessions; they are the same in that they involve integrating multiple three-dimensional data with known relative positional relationships to remove the holding member 900.

[0137] Furthermore, if the height adjustment member described above is detachably attached to the holding member 900, the height adjustment member can be attached to the holding member 900 and the holding member 900 can be fixed at an arbitrary height for use. In this case, the maximum height and orientation of the holding member 900 are detected from the three-dimensional coordinates of the holding member 900 in the device coordinate system, and it is determined that the height adjustment member is being used if the height is above a certain value and the mounting surface of the height adjustment member is facing downwards. The area to be removed includes the area of ​​the holding member 900 and the area extended from the area of ​​the holding member 900 until it contacts the upper surface of the rotating stage 143, so that the height adjustment member can also be removed. [Industrial applicability]

[0138] As described above, the present invention can be used when generating three-dimensional data of various workpieces. [Explanation of Symbols]

[0139] 1. Three-dimensional scanner 290A Alignment section 290B Synthesis Department 291 Data Acquisition Unit 292 Three-dimensional data generation unit 293 Estimation Department 294 Three-Dimensional Data Editorial Department 900 Retaining member 910 First arm (first component) 920 Second arm (second component) 940 Adjustment mechanism 900A, 900B, 900C, 900D Identification Members

Claims

1. A three-dimensional scanner that emits measurement light from a light-emitting unit onto a workpiece and generates three-dimensional data of the workpiece based on the measurement light reflected by the workpiece, A holding member for holding the workpiece, An identification member provided on the holding member for determining the position and orientation of the holding member, A data acquisition unit acquires a light receiving signal based on the measurement light reflected by the holding member and the workpiece, and acquires a two-dimensional image including the identification member provided on the holding member. A three-dimensional data generation unit generates first three-dimensional data, including three-dimensional data of the holding member and the workpiece, based on the light receiving signal acquired by the data acquisition unit. An estimation unit that determines the position and orientation of the identification member based on the two-dimensional image acquired by the data acquisition unit, and estimates the position and orientation of the holding member based on the determined position and orientation of the identification member, A three-dimensional data editing unit generates a second three-dimensional data by removing the three-dimensional data of the holding member from the first three-dimensional data generated by the three-dimensional data generation unit based on the position and orientation of the holding member estimated by the estimation unit. A three-dimensional scanner equipped with [specific features / equipment].

2. In the three-dimensional scanner according to claim 1, The aforementioned identification member is a 3D scanner, which is an AR marker.

3. In the three-dimensional scanner according to claim 1, The holding member comprises a first member having a first workpiece holding surface for holding a workpiece, a second member having a second workpiece holding surface for holding a workpiece, and an adjustment mechanism for relatively moving the first member and the second member in a direction in which the first workpiece holding surface and the second workpiece holding surface move toward and away from each other. The identification member includes a first identification member provided on the first member and a second identification member provided on the second member. The estimation unit identifies the position and orientation of the first identification member and the position and orientation of the second identification member, and estimates the positional relationship between the first member and the second member, which has been adjusted by the adjustment mechanism, based on the position and orientation of the first member and the position and orientation of the second identification member, as a three-dimensional scanner.

4. In the three-dimensional scanner according to claim 3, The first member is provided with a plurality of first identification members spaced apart from each other. A three-dimensional scanner wherein a plurality of the second identification members are provided on the second member at intervals from each other.

5. In the three-dimensional scanner according to claim 3, The identification member includes an ID that identifies the identification member, The system further includes a storage unit that stores data relating the ID, the position of the identification member on the holding member, and the shape of the holding member. The estimation unit obtains the ID based on the two-dimensional image obtained by the data acquisition unit, The three-dimensional data editing unit obtains the position of the identification member and the shape of the holding member, which are associated with the ID obtained by the estimation unit, from the storage unit, and generates the second three-dimensional data by removing the three-dimensional data of the holding member from the first three-dimensional data based on the obtained position of the identification member and the shape of the holding member, as a three-dimensional scanner.

6. In the three-dimensional scanner according to claim 5, The storage unit stores the shape of the holding member in a predetermined state, where the distance between the first workpiece holding surface and the second workpiece holding surface is such that The three-dimensional data editing unit, when it fails to determine the position and orientation of one of the first and second identification members, but can determine the position and orientation of the other identification member, generates the second three-dimensional data from the first three-dimensional data based on the shape of the holding member in a predetermined state where the distance between the first workpiece holding surface and the second workpiece holding surface is zero, is a three-dimensional scanner.

7. In the three-dimensional scanner according to claim 1, The data acquisition unit acquires a light-receiving signal based on the measurement light reflected by the workpiece and the holding member arranged in the first arrangement position, and also acquires a light-receiving signal based on the measurement light reflected by the workpiece and the holding member arranged in the second arrangement position. The three-dimensional data generation unit generates first three-dimensional data including three-dimensional data of the holding member and the workpiece based on a received light signal based on the measurement light reflected by the workpiece positioned in the first position and the holding member, and generates third three-dimensional data including three-dimensional data of the holding member and the workpiece based on a received light signal based on the measurement light reflected by the workpiece positioned in the second position and the holding member. The estimation unit identifies a first position and orientation of the identification member based on the two-dimensional image acquired when the identification member is in the first position and orientation, estimates a first position and orientation of the holding member based on the identified first position and orientation of the identification member, identifies a second position and orientation of the identification member based on the two-dimensional image acquired when the identification member is in the second position and orientation, estimates a second position and orientation of the holding member based on the identified second position and orientation of the identification member, The three-dimensional data editing unit generates second three-dimensional data by removing the three-dimensional data of the holding member from the first three-dimensional data generated by the three-dimensional data generation unit based on the first position and orientation of the holding member estimated by the estimation unit, and generates fourth three-dimensional data by removing the three-dimensional data of the holding member from the third three-dimensional data generated by the three-dimensional data generation unit based on the second position and orientation of the holding member estimated by the estimation unit. A positioning unit that aligns the second three-dimensional data and the fourth three-dimensional data generated by the three-dimensional data editing unit, A three-dimensional scanner further comprising a synthesis unit that synthesizes the second three-dimensional data and the fourth three-dimensional data, which have been aligned by the alignment unit.

8. In the three-dimensional scanner according to claim 7, The alignment unit is a three-dimensional scanner that estimates the overlapping region between the second three-dimensional data and the fourth three-dimensional data, and aligns the second three-dimensional data and the fourth three-dimensional data based on the three-dimensional data included in the estimated overlapping region.

9. In the three-dimensional scanner according to claim 1, The system further includes a camera that outputs a light-receiving signal based on the measurement light reflected by the holding member and the workpiece, and also outputs a two-dimensional image including the identification member provided on the holding member. The data acquisition unit acquires the light signal output by the camera and the two-dimensional image. The estimation unit, Based on the two-dimensional image acquired by the data acquisition unit, the two-dimensional coordinates indicating the region where the identification member exists are identified. Based on the light signal acquired by the data acquisition unit, the three-dimensional coordinates corresponding to the two-dimensional coordinates are identified. A three-dimensional scanner that estimates the position and orientation of the identification member based on the identified three-dimensional coordinates.

10. In the three-dimensional scanner according to claim 9, The estimation unit is a three-dimensional scanner that identifies the three-dimensional coordinates indicating the region where the identification member exists by obtaining three-dimensional information at coordinates corresponding to the two-dimensional coordinates from the first three-dimensional data generated by the three-dimensional data generation unit based on the light receiving signal acquired by the data acquisition unit.

11. In the three-dimensional scanner according to claim 1, A first camera that outputs a light receiving signal based on the measurement light reflected by the holding member and the workpiece, The system further comprises a second camera having coordinates associated with the coordinates of the first camera and outputting a two-dimensional image including the identification member provided on the holding member, The data acquisition unit acquires the light-receiving signal output by the first camera and the two-dimensional image output by the second camera. The estimation unit, Based on the two-dimensional image output by the second camera and acquired by the data acquisition unit, the two-dimensional coordinates indicating the region where the identification member exists are identified. Based on the light signal output by the first camera and acquired by the data acquisition unit, the three-dimensional coordinates corresponding to the two-dimensional coordinates are identified. A three-dimensional scanner that estimates the position and orientation of an identification member based on the identified three-dimensional coordinates.

12. In the three-dimensional scanner according to claim 11, The estimation unit is a three-dimensional scanner that identifies the three-dimensional coordinates indicating the region where the identification member exists by obtaining three-dimensional information at coordinates corresponding to the two-dimensional coordinates from the first three-dimensional data generated by the three-dimensional data generation unit based on the light received signal output by the first camera and acquired by the data acquisition unit.

13. In the three-dimensional scanner according to claim 11, A three-dimensional scanner in which the coordinates of the first camera and the coordinates of the second camera are associated based on the intrinsic parameters of the first camera, the intrinsic parameters of the second camera, and the extrinsic parameters of the second camera relative to the first camera.

Images