Electrical characteristic parameter testing device, electrical characteristic parameter testing method, and program

Abstract

This method allows for quick and highly accurate inspection of a wide range of objects without the need for mechanical scanning of electrodes. [Solution] The electrical characteristic parameter inspection device 1 comprises a plurality of sensors placed on an object, a selection unit 111 that selects a plurality of predetermined selection patterns consisting of sensor pairs of two or more sensors from the plurality of sensors, a measurement unit 113 that measures the electrical characteristic parameters output from the sensors included in each selection pattern, and an analysis unit 114 that analyzes the electrical characteristic parameters measured for each selection pattern.

Description

Technical Field

[0003]

[0001] The present invention relates to an electrical characteristic parameter inspection device, an electrical characteristic parameter inspection method, and a program.

Background Art

[0002] Reinforced concrete, which is often used in infrastructure such as bridges and roads and large-scale buildings, has high toughness at the time of manufacture and laying. However, due to changes in the properties of concrete over time and the intrusion of moisture, corrosion of the internal steel bars occurs, and its strength deteriorates significantly. In recent years, due to environmental and energy issues, etc., composite fiber reinforced resin materials such as CFRP (Carbon Fiber Reinforced Plastic) are increasingly being used as structural materials for relatively large facilities and buildings in addition to the bodies of moving objects such as airplanes and automobiles. Such composite materials have excellent characteristics such as being lightweight and having high strength compared to metals, etc., but it has been pointed out that if there are fine voids or internal delaminations during manufacture, etc., it may lead to large-scale destruction and fracture due to deterioration over time. Therefore, non-destructive inspection is carried out in order to efficiently evaluate and ensure the safety and reliability of these infrastructures, large-scale buildings, moving objects, etc. Moreover, recently, due to the improvement of consumers' awareness regarding product safety and the accompanying strengthening of regulations, etc., there has been an increasing social trend to demand high safety for all consumer goods including food products, and there is a need for non-destructive inspection methods to easily evaluate these qualities.

[0003] <​​​​Therefore, electromagnetic methods have been proposed and put into practical use as efficient and quantitative non-destructive testing techniques for large and wide-area objects. Representative methods include impedance testing and eddy current testing. These methods involve placing relatively small sensors on the surface of an object, applying an electric field or electric current to the sensors, and measuring their electrical and magnetic properties to understand the structure and properties inside the object. For example, in impedance testing, as shown in Figure 14, two electrodes E are brought into contact with an object C such as reinforced concrete, and one or both electrodes E are scanned (arrows) on the object C to measure the impedance between the electrodes E. The changes in the measured impedance are used to detect the structure and properties inside the object C, such as corrosion of the reinforcing bars inside the reinforced concrete. Furthermore, Patent Document 1 describes a method for detecting the presence and location of buried objects inside an object by using the "difference" between multiple impedances measured by multiple electrode pairs selected from an electrode group. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2010-210588 [Overview of the Initiative] [Problems that the invention aims to solve]

[0006] However, the method shown in Figure 14 employs a configuration in which a small electrode E is brought close to and in contact with the surface of the object C and moved, which limits the range that can be inspected at one time. Therefore, when inspecting large objects such as infrastructure, a mechanism for scanning the electrode is required, and the time required for electrode scanning prolongs the time it takes to inspect the entire object, resulting in many challenges in terms of efficiency. This is because the method described in Patent Document 1 also has a similar problem, as it involves scanning the position of the electrode group to measure the impedance at each position of the electrode group and detecting buried objects, etc., from the impedance value corresponding to the position of the electrode group. Furthermore, while the above-mentioned issues are common to devices and methods for inspecting the internal state of objects, they are particularly pronounced when inspecting relatively large and extensive objects.

[0007] Furthermore, impedance measurements exhibit significant variations in measured values ​​depending on the object, with an extremely wide dynamic range ranging from materials close to insulators like concrete to materials close to conductors like CFRP. Therefore, it is difficult to create a circuit configuration that accurately measures impedance while mitigating the effects of differences between objects and the measurement environment, resulting in the high cost of the measurement equipment.

[0008] Therefore, the object of the present invention is to provide an electrical characteristic parameter inspection device, an electrical characteristic parameter inspection method, and a program that can inspect an object with high efficiency, low cost, and high accuracy without performing mechanical scanning. [Means for solving the problem]

[0009] To solve the above problems, the electrical characteristic parameter inspection apparatus of the present invention is Multiple sensors placed on the object, A selection unit that selects multiple selection patterns that form a predetermined two-dimensional pattern consisting of sensor pairs of two or more sensors from the plurality of sensors, For each of the aforementioned selection patterns, a measurement unit measures the electrical characteristic parameters output from the sensors included in the selection pattern, An analysis unit reconstructs the two-dimensional information of the object by performing matrix calculations using the position information of the sensor pair for each selected pattern and the electrical characteristic parameters measured for each selected pattern. It is characterized by being equipped with [the following features].

[0010] Furthermore, the electrical characteristic parameter inspection device of the present invention is Multiple unit electrodes arranged on the surface and / or back surface of the object, A selection unit that forms a selection pattern by forming an electrode composed of at least two element electrodes, each consisting of two or more unit electrodes from the plurality of unit electrodes, A signal generation unit that outputs a predetermined electrical signal, For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit that analyzes the electrical characteristic parameters measured for each of the selected patterns, Equipped with, The present invention is characterized by providing a shielding region that reduces or prevents electrical interference between electrodes, which is composed of a second element electrode surrounding a first element electrode to which the predetermined electrical signal is applied, which constitutes the electrode. Furthermore, the electrical characteristic parameter inspection device of the present invention is Multiple unit electrodes arranged on the surface and / or back surface of the object, A selection unit that forms an electrode composed of at least two element electrodes, each consisting of two or more unit electrodes from the plurality of unit electrodes, and forms a selection pattern that forms a predetermined two-dimensional pattern using the plurality of electrodes, A signal generation unit that outputs a predetermined electrical signal, For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit reconstructs the two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each selected pattern and the electrical characteristic parameters measured for each selected pattern. It is characterized by being equipped with [the following features].

[0011] Furthermore, the electrical characteristic parameter inspection method of the present invention is A placement step involves arranging two or more sensors in a selected pattern that forms a predetermined two-dimensional pattern on the object, A measurement step of measuring electrical characteristic parameters output from sensors arranged in the predetermined selection pattern, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Each time the selected pattern is changed by the arrangement step, the electrical characteristic parameters are measured by the measurement step. The analysis step is characterized by reconstructing the two-dimensional information of the object by performing matrix calculations using the position information of the sensor pair for each selected pattern and the electrical characteristic parameters measured for multiple selected patterns.

[0012] Furthermore, the electrical characteristic parameter inspection method of the present invention is A placement step involves arranging electrodes in a selected pattern that forms a predetermined two-dimensional pattern on the surface and / or back surface of an object, A measurement step of measuring electrical characteristic parameters by applying a predetermined electrical signal to the object while the electrode forming the predetermined selection pattern is in contact with or in close proximity to the object, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Each time the selected pattern is changed by the arrangement step, the electrical characteristic parameters are measured by the measurement step. The analysis step is characterized by reconstructing the two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each selected pattern and the electrical characteristic parameters measured for multiple selected patterns. Furthermore, the electrical characteristic parameter inspection method of the present invention is A placement step of arranging electrodes on the surface and / or back surface of an object in a predetermined selected pattern, A measurement step of measuring electrical characteristic parameters by applying a predetermined electrical signal to the object while the electrode forming the predetermined selection pattern is in contact with or in close proximity to the object, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Whenever the selection pattern is changed by the placement step, measure the electrical characteristic parameters by the measurement step, The analysis step analyzes based on the electrical characteristic parameters measured with a plurality of selection patterns, Provided is a shielding region that is composed of second element electrodes surrounding a first element electrode to which a predetermined electrical signal is applied and that constitutes the electrode, and that reduces or prevents electrical interference between the electrodes.

[0013] Also, the program of the present invention causes a computer of an electrical characteristic parameter inspection device including a plurality of sensors arranged on an object to function as a selection unit that selects a plurality of selection patterns that form a predetermined two-dimensional pattern composed of two or more sensor pairs among the plurality of sensors, a measurement unit that measures electrical characteristic parameters output from the sensors included in the selection pattern for each selection pattern, and an analysis unit that reconstructs two-dimensional information of the object by performing matrix calculation using the position information of the sensor pairs for each selection pattern and the electrical characteristic parameters measured for each selection pattern. function as

[0014] Also, the program of the present invention causes a computer of an electrical characteristic parameter inspection device including a plurality of unit electrodes arranged on the front surface and / or the back surface of an object to function as a selection unit that forms a selection pattern that forms at least one electrode composed of two or more unit electrodes among the plurality of unit electrodes and forms a predetermined two-dimensional pattern with a plurality of electrodes, a signal generation unit that outputs a predetermined electrical signal, and a measurement unit that measures electrical characteristic parameters by applying the predetermined electrical signal output from the signal generation unit in a state where the electrodes forming the selection pattern are in contact with or close to the object for each selection pattern. An analysis unit reconstructs the two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each selected pattern and the electrical characteristic parameters measured for each selected pattern. To make it function as such. Furthermore, the program of the present invention, A computer for an electrical characteristic parameter inspection device that has multiple unit electrodes arranged on the surface and / or back surface of an object, A selection unit that forms a selection pattern by forming an electrode composed of at least one element electrode consisting of two or more unit electrodes from the plurality of unit electrodes, A signal generation unit that outputs a predetermined electrical signal. For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit that analyzes the electrical characteristic parameters measured for each of the selected patterns, To make it function as, A shielding region is provided that reduces or prevents electrical interference between electrodes, comprising a second element electrode surrounding a first element electrode to which the predetermined electrical signal is applied, which constitutes the electrode. [Effects of the Invention]

[0015] According to the present invention, the structure, condition, presence or absence of defects, etc., over a wide area of ​​an object can be efficiently inspected without performing mechanical scanning. [Brief explanation of the drawing]

[0016] [Figure 1] This diagram illustrates a non-destructive testing method using an electrical characteristic parameter inspection device. [Figure 2] This diagram illustrates the overall configuration of a measurement system including an electrical characteristic parameter inspection device according to the first embodiment of the present invention. [Figure 3] This is a block diagram showing the functional configuration of an electrical characteristic parameter testing device according to the first embodiment of the present invention. [Figure 4] This is an example of an electric field pattern formed by the electrical characteristic parameter testing device of the present invention. [Figure 5] This is a flowchart illustrating a processing method for an electrical characteristic parameter inspection device according to the first embodiment of the present invention. [Figure 6] This is a flowchart illustrating another processing method for the electrical characteristic parameter inspection apparatus according to the first embodiment of the present invention. [Figure 7] This figure illustrates the overall configuration of an electrical characteristic parameter inspection device according to a second embodiment of the present invention. [Figure 8] This diagram illustrates the overall configuration of an electrical characteristic parameter inspection device according to a third embodiment of the present invention. [Figure 9] This figure illustrates the relationship between electrode size and element area in the electrical characteristic parameter testing device of the present invention. [Figure 10] This diagram illustrates the relationship between electrode size and the conductivity of an object in the electrical characteristic parameter testing device of the present invention. [Figure 11] This is an example of an electric field guard band in the electrical characteristic parameter testing device of the present invention. [Figure 12] This figure illustrates the relationship between electrode size and the frequency band of electrical signals in the electrical characteristic parameter testing device of the present invention. [Figure 13] This figure shows the electrodes and electric field distribution in the electrical characteristic parameter testing device of the present invention. [Figure 14] This diagram illustrates the overall configuration of a conventional electrical characteristic parameter testing device. [Modes for carrying out the invention]

[0017] Embodiments of the present invention will now be described. However, the scope of the invention is not limited to the illustrated examples, but includes equivalent forms and configurations.

[0018] Figure 1 shows a non-destructive testing method using an electrical characteristic parameter inspection device 1. For example, the operator holds the handle H and brings the first electrode E1 and the second electrode E2 into contact with the object C, and measures the electrical characteristic parameter between the first electrode E1 and the second electrode E2. In the method shown in Figure 1, the measurer holds the handle H and moves the first electrode E1 and the second electrode E2. However, in the embodiment described below, the selection unit 111 selects the electrode E to be brought into contact with the object C. Furthermore, the configuration of the electrical characteristic parameter inspection device 1 and the processing flow of the electrical characteristic parameter inspection device are the same as those of the first embodiment described later. Furthermore, there may be two or more electrodes, including the first electrode E1 and the second electrode E2.

[0019] (First embodiment) Figure 2 is a schematic diagram of the electrical characteristic parameter inspection device 1 and object C according to the first embodiment. The electrical characteristic parameter inspection device 1 measures the electrical characteristic parameter values ​​of the object C between the first electrode E1 and the second electrode E2, which are in contact with (or close to) the object C (this electrode arrangement is called an out-plane type). In Figure 2, the second electrode E2 is arranged as a single unit on the bottom surface of the object, but it may also be arranged individually, corresponding to the first electrode E1, just like the first electrode E1. Assuming this configuration, a pair of first and second electrodes will be called an electrode pair. Furthermore, the second electrode E2 is not limited to the bottom surface of the object C, but may also be installed inside.

[0020] Object C is typically a relatively large structural material such as reinforced concrete (Figure 1; rebar F), but is not limited to this. Other examples include semiconductors, insulators, conductors, materials whose electrical properties change depending on the environment, metal structural materials, composite materials made of fillers and resins (CFRP, etc.), and composite materials made of metal or resin. The electrical property parameter inspection device 1 performs structural inspection, property and condition investigation, and defect detection (inspection of foreign matter, cracks, delamination, voids, etc.) of the object by acquiring electrical property parameters.

[0021] For the purposes of this explanation, a unit electrode refers to a single electrode terminal. An element electrode is a combination of two or more unit electrodes, regardless of the polarity of the applied voltage. Multiple element electrodes are required to form an element region. An electrode refers to all element electrodes / unit electrodes necessary to create one element region (measurement range). An element region refers to the electric field distribution between multiple element electrodes (electrodes), and is the effective measurement range. An electrode pair refers to the configuration of electrodes that generate a voltage difference.

[0022] Figure 3 is a block diagram showing the functional configuration of the electrical characteristic parameter testing device 1. The electrical characteristic parameter testing device 1 comprises a data acquisition unit 11, an operation unit 12, a display unit 13, a communication unit 14, a storage unit 15, and electrodes E.

[0023] The data acquisition unit 11 includes a CPU (Central Processing Unit), RAM (Random Access Memory), etc., and executes and controls a series of data acquisition operations in the electrical characteristic parameter inspection device 1. Specifically, the CPU reads various processing programs stored in the memory unit 15, loads them into the RAM, and performs various processing in cooperation with the programs. The data acquisition unit 11 also functions as a selection unit 111, a signal generation unit 112, a measurement unit 113, an analysis unit 114, and a control unit 115.

[0024] The selection unit 111 selects a predetermined pair of electrodes from among a plurality of electrode pairs prepared in relation to the object C, and brings the selected electrode pair into contact with or close to the object C. Although not shown, the selection unit 10 includes a mechanism for bringing the electrode pair into contact with / close to / away from the object C. Each electrode may be configured as an assembly of multiple unit electrodes.

[0025] In the case of the electrical characteristic parameter inspection device 1 shown in Figure 2, the first electrode E1 is selected and brought into contact with the object C. That is, the selection unit 10 selects the nine electrodes or electrode pairs E in a 3x3 arrangement on the far left side of Figure 2 and the nine electrodes or electrode pairs E in a 3x3 arrangement on the near left side as the first electrode E1, and brings them into contact with the object C. This pattern of selecting electrodes or electrode pairs E is called a selection pattern. In other words, the selection unit 111 switches and controls the position and size of the electrodes or electrode pairs. As mentioned above, in Figure 2, the second electrode E2 is provided across one surface (bottom surface) of the object C opposite to the contact surface of the first electrode E1, but this is not necessarily the case, and the electrodes may be individually arranged in a position and size relative to the first electrode E1.

[0026] The pattern of electric fields spatially formed by applying electrical signals to the first electrode E1 and the second electrode E2 is called the electric field pattern. This electric field pattern is a predetermined two-dimensional pattern that is represented on a two-dimensional plane when viewed from above the object in a bird's-eye view. For example, one example is the two-dimensional pattern shown in Figure 4, which is orthogonal to each other in two-dimensional space. For example, the electric field pattern formed by the electrode arrangement in Figure 2 corresponds to the electric field pattern enclosed by the dashed line in Figure 4. In other words, the white region of the two-dimensional pattern shown in Figure 4 indicates the region where an electric field is formed and electrical parameters are obtained when the electrode or electrode pair E (first electrode E1) is in contact with the object C and a signal is applied. On the other hand, the black region indicates the region where no electric field is formed. Here, the region corresponding to each electrode or electrode pair E in the electric field pattern is called element region A. A predetermined two-dimensional pattern may be an Hadamard matrix type cyclic pattern as an orthogonal two-dimensional pattern, or it may be a random pattern.

[0027] The signal generation unit 112 outputs an electrical signal (AC signal) swept within a predetermined frequency range to an electrode pair consisting of a first electrode E1 and a second electrode E2. When using an AC signal, the signal generation unit 112 controls the frequency, frequency range, and amplitude (AC voltage amplitude, AC current amplitude) of the AC signal applied to the electrode pair.

[0028] The measurement unit 113 measures the values ​​of electrical characteristic parameters when the electrical signal output from the signal generation unit 112 is applied through the electrode pair. Examples of electrical characteristic parameters include current value, voltage value, impedance, admittance, or dielectric constant and conductivity derived from these.

[0029] The control unit 115 controls the selection unit 111, the signal generation unit 112, and the measurement unit 113 to change the selection pattern, measure electrical characteristic parameters for each selection pattern, and acquire and store the multiple electrical characteristic parameters obtained as a result. For example, electrical characteristic parameters are acquired multiple times for each of the selection patterns shown in Figure 4.

[0030] The analysis unit 114 analyzes the values ​​of the electrical characteristic parameters measured for each selected pattern. For example, the multiple electrodes or electrode pairs shown in Figure 2 are arranged regularly with respect to the object C, allowing for comprehensive acquisition of two-dimensional information of the object C. The selection pattern is a configuration for acquiring a portion of the two-dimensional information of the object C, and by measuring the electrical characteristic parameters for each selection pattern, information on different regions of the object C is acquired each time. Here, the electrical characteristic parameters measured for each selected pattern are an aggregate of information obtained from multiple electrode pairs included in the selected pattern, and it is not possible to obtain two-dimensional information of the object C from these values ​​alone. However, the positions of the electrode pairs included in each selected pattern are known, and as described above, the measured values ​​corresponding to each selected pattern contain information about the object C in different regions each time, and also contain signal information (amplitude, phase, etc.) in each frequency band used for measurement.

[0031] Next, the analysis unit 114 reconstructs two-dimensional information of the object C by performing matrix calculations using the positional information of electrode pairs included in each known selection pattern and the electrical characteristic parameters measured for each selection pattern. Here, matrix calculations can be performed efficiently by using the aforementioned Hadamard matrix-type cyclic patterns or random patterns as the selection patterns. The reconstructed two-dimensional information of the object C includes, for example, the distribution of resistance, dielectric constant, capacitance, etc., within the object C. It also includes the probability and location information of defects, foreign matter, and corrosion within the object C, which are estimated based on these electrical characteristics.

[0032] Furthermore, reconstructing the 2D information of object C requires measurement using multiple selection patterns. Generally, increasing the number of selection patterns used improves the accuracy of the reconstruction, but it also increases the measurement time. Therefore, the analysis unit 114 analyzes the information obtained by changing the selection pattern during the reconstruction calculation process using statistical methods or machine learning each time. Depending on the purpose, such as regression or classification, it continues or terminates the measurement until the desired accuracy is obtained, thereby performing highly accurate measurements in an appropriate time.

[0033] In Figure 2, the arrangement of electrodes or electrode pairs is shown as a rectangular pattern with electrodes adjacent to each other. However, this is not limited to this arrangement, as long as the combinations of electrodes or electrode pairs included in each selected pattern are known. For example, they may be arranged in a circular pattern, scattered at different locations, or not even on the same plane. Furthermore, the information analyzed by the analysis unit 114 is not limited to the two-dimensionally reconstructed information; it may also be the measured values ​​themselves for each selected pattern. Since the positions of electrodes or electrode pairs included in each selected pattern are known, if the analysis result of the measured values ​​in a certain selected pattern shows an abnormal value, the approximate location of the abnormal part within the object C can be estimated. By adaptively changing the measurement procedure (algorithm) to select the selected pattern that is most likely to contain the abnormal part based on the obtained information, more accurate measurements can be performed in a shorter time. Furthermore, using this method, the analysis unit 114 can identify the location of defects in object C in a short time by gradually narrowing down the region where the electrical characteristic parameter values ​​are high (or low), without using statistical methods or machine learning.

[0034] The operation unit 12 is configured with a keyboard equipped with cursor keys, character input keys, and various function keys, and a pointing device such as a mouse, and outputs operation signals input by key operations on the keyboard or mouse operations to the data acquisition unit 11. Alternatively, the operation unit 12 may be configured with a touch panel or the like, and output operation signals to the data acquisition unit 11 according to the position of the operator's fingers or the like.

[0035] The display unit 13 is equipped with a monitor such as an LCD (Liquid Crystal Display) and displays various screens according to the instructions of the display signals input from the data acquisition unit 11.

[0036] The communication unit 14 is composed of network interfaces and the like, and transmits and receives data with external devices connected via a communication network N such as a LAN (Local Area Network), WAN (Wide Area Network), or the Internet.

[0037] The storage unit 15 is composed of an HDD (Hard Disk Drive) or non-volatile semiconductor memory, and stores various types of data.

[0038] An electrode or electrode pair E is an element that transmits an electrical signal output from the signal generation unit 112 to an object C, and can take the form of, for example, a flat plate or a film. As described above, in the case of Figure 2, a first electrode E1, which is selected by the selection unit 111 and contacts the surface of the object C, and a second electrode E2, which is contacted to the bottom surface of the object, constitute a plurality of electrode pairs.

[0039] Here, the connection method for the multiple electrode pairs selected for each selection pattern is appropriately chosen depending on the object. Specifically, for objects with high impedance, such as concrete, the electrode pairs constituting the first electrode E1 and the second electrode E2 are connected in parallel, while for objects with low impedance, such as CFRP, the electrode pairs are connected in series. More precisely, as a modified example of Figure 2, the second electrode E2 is the selected electrode E facing the first electrode E1 across the object C, and multiple electrode pairs consisting of the first electrode E1 and the second electrode E2 are connected in series as follows: first electrode E1 - second electrode E2 - first electrode E1 - ... This suppresses the dynamic range of the electrical characteristic parameters input to the measurement unit 113 and relaxes the electrical specifications required of the measurement unit 113.

[0040] Figure 5 shows a flowchart illustrating the processing method of the electrical characteristic parameter inspection device. The processing method shown in this figure involves selecting an electrode or electrode pair E based on a predetermined selection pattern, analyzing the electrical characteristic parameters measured for each selection pattern, and acquiring the distribution state of the electrical characteristic parameters within the object C as two-dimensional information. Multiple selection patterns are pre-stored in the storage unit 15. Furthermore, by switching between selection patterns, the desired measurement area of ​​the object C is spatially covered.

[0041] The order in which the selected patterns are switched can be random or arbitrarily set according to the application and purpose. For example, when performing measurements using the Hadamard matrix type cyclic pattern shown in Figure 4 on a two-dimensional planar electrode or electrode pair array as shown in Figure 2, starting with measurements using a low spatial frequency pattern and gradually moving to measurements using a high spatial frequency pattern allows for an early grasp of the two-dimensional information of the object C during the reconstruction process, enabling efficient measurements.

[0042] First, the selection unit 111 selects one or more electrodes to contact the object C based on a predetermined selection pattern and brings them into contact (step S1). In the configuration shown in Figure 2, the second element electrode E2 is already in contact with the entire bottom surface of the object C as a whole, so the only electrode selected and contacted by the selection unit 111 is the first element electrode.

[0043] Next, the signal generation unit 112 inputs an electrical signal to the electrode pair consisting of the first electrode E1 and the second electrode E2 (step S2).

[0044] Next, the measurement unit 113 measures the electrical characteristic parameters (e.g., impedance value) of the object C in the region using the first electrode E1 and the second electrode E2 (step S3).

[0045] The control unit 115 instructs the selection unit 111 to change the selection pattern and then integrates control of the selection unit 111, the signal generation unit 112, and the measurement unit 113 to repeatedly perform the processes from step S1 to step S3. Note that the operation and functions of the control unit 115 do not necessarily have to be autonomously controlled by a computer or the like; they may be performed by an operator manually selecting and changing the selection pattern while repeatedly acquiring electrical parameters.

[0046] Next, the data acquisition unit 11 determines whether the data was acquired using one of the predetermined selection patterns stored in the storage unit 15 (step S4). If the predetermined measurement is completed, the unit proceeds to the analysis of the measured electrical characteristic parameters (step S4; YES). If the measurement is not completed, the unit proceeds to step S1 and performs the measurement corresponding to the next selection pattern (step S4; NO).

[0047] Next, the analysis unit 114 analyzes the electrical characteristic parameters acquired for each selected pattern (step S5). For example, by calculating a matrix using the positional information of the electrode pairs included in each known selected pattern and the electrical characteristic parameters measured for each selected pattern, the two-dimensional information of the object C can be reconstructed, the distribution state of the electrical characteristic parameters within the object C can be understood, and corrosion of internal reinforcing bars can be confirmed.

[0048] Figure 6 shows a flowchart illustrating another processing method for the electrical characteristic parameter testing device. Note that the steps up to step S3 in this figure are the same as those in the flowchart shown in Figure 5, and therefore the explanation is omitted. The analysis unit 114 reconstructs the two-dimensional information using the electrical characteristic parameters obtained in the process of S3. The results are shown to the operator on the display unit 13, prompting them to decide whether to continue or end the measurement in S6. Alternatively, the analysis unit 114 may use statistical methods or machine learning to determine whether sufficient accuracy for the objective has been obtained, and then decide whether to continue or end the measurement. By using this flow, measurements with the required accuracy can be performed with the minimum measurement time.

[0049] Furthermore, in the flows of Figures 5 and 6, the input of the first signal (S2), measurement of the second signal (S3), and analysis of the second signal (S5) are performed sequentially. However, while the analysis corresponding to the selected pattern (S5) is being performed, the input (S2) and measurement (S3) using the next selected pattern may be performed in parallel.

[0050] (Second embodiment) Figure 7 is a schematic diagram of the electrical characteristic parameter inspection device 1 and object C according to the second embodiment. The electrical characteristic parameter inspection device 1 is a device that measures the electrical characteristic parameters of an object C between two electrode pairs (a first element electrode E1 and a second element electrode E2) that are in contact with (or in close proximity to) the same side of the object C (the surface side in Figure 7) (this type of electrode arrangement is called an in-plane type). The electrode arrangement shown in Figure 7 forms an electric field pattern corresponding to the selected pattern enclosed by the dashed line in Figure 4, and the electrical characteristic parameters of the white area are obtained. Furthermore, the selection unit 111 selects an electrode to be brought into contact with the object C and brings it into contact (step S1). Furthermore, the configuration of the electrical characteristic parameter inspection device 1 and the flow of the processing method are the same as in the first embodiment.

[0051] (Third embodiment) Figure 8 is a schematic diagram of the electrical characteristic parameter inspection device 1 and object C according to the third embodiment. In the first and second embodiments, all electrodes or electrode pairs E are aligned, but this is not necessarily required. They can be appropriately arranged as shown in Figure 8, according to the shape of the object and the area where you want to acquire electrical characteristic parameters. Furthermore, the configuration of the electrical characteristic parameter inspection device 1 and the flow of the processing method are the same as in the first embodiment.

[0052] Furthermore, by having electrode pairs E of different sizes available, the operator can more flexibly arrange the electrodes by selecting the appropriate size electrode or electrode pair E from the various sizes to match the white areas of the two-dimensional pattern shown in Figure 4. Specifically, for the selection pattern corresponding to the electric field pattern in the upper left of Figure 4, a larger size electrode or electrode pair E is used, and for the selection pattern corresponding to the electric field pattern in the lower right of Figure 4, a smaller size electrode or electrode pair E is used. This reduces the number of electrodes or electrode pairs E used for each selection pattern, allowing the operator to arrange the electrodes more flexibly and efficiently.

[0053] (others) Figure 9 shows the relationship between the size of the electrode or electrode pair E and the element region A. In Figure 9, the size of the electrode or electrode pair E is set smaller relative to the element region A, taking into account that the electric field extends to the periphery of the electrode or electrode pair E. This suppresses the spread of the electric field within the element region A, allowing for the appropriate setting of the region where electrical characteristic parameters are to be acquired in the object C, and improving the resolution in the analysis of the distribution state of the electrical characteristic parameters. In other words, in order to reconstruct the distribution state of electrical characteristic parameters within object C as two-dimensional information using the selection patterns shown in Figure 4 and the corresponding electrical characteristic parameters for each selection pattern, it is preferable that the electric field is formed according to the selection pattern. However, if the size of the electrode or electrode pair E is the same as the size of element region A, the electric field extends beyond element region A, making it impossible to correctly obtain the electrical characteristic parameters corresponding to the selection patterns shown in Figure 4.

[0054] Furthermore, it is desirable to set the size of the electrode or electrode pair E to, for example, approximately 1 / 4 or more the size of element region A (half the length of one side of element region A).

[0055] Figure 10 shows the relationship between the size of the electrode pair (first electrode E1 and second electrode E2) installed on object C, the electric field pattern formed by each electrode, and the conductivity of object C. In Figure 10, the area enclosed by the dotted line represents the electric field formed by each electrode. To obtain an electric field pattern like the one shown in Figure 10, if the conductivity of object C is high (Figure 10 left), a 3x3 electrode E is selected as an electrode of approximately the same size as the electric field pattern. If the conductivity of object C is low (Figure 10 right), only one electrode E is selected as an electrode of a small size relative to the electric field pattern.

[0056] The electric field formed by the electrode does not spread much relative to the electrode size if the conductivity of the object C is high, while it tends to spread relative to the electrode size if the conductivity of the object C is low. In other words, the electrical characteristic parameters obtained in this embodiment change depending on the conductivity of the object C, as the influence of the electric field that spreads beyond the electrode size changes. Therefore, by forming the first electrode E1 and / or the second electrode E2 as aggregates of multiple element electrodes, and adjusting the number of element electrodes constituting the first electrode E1 and / or the second electrode E2 according to the conductivity of the object C, the size of the first electrode E1 and / or the second electrode E2 can be controlled, an electric field pattern can be appropriately formed in the desired region, and the resolution in the analysis of the distribution state of the electrical characteristic parameters can be improved.

[0057] Figure 11 shows an example where a guard band (shielding region) is provided for the electric field. As shown in Figure 11, in the in-plane type, by surrounding the first electrode E1 with the second electrode E2, the spread of the electric field beyond the second electrode E2 can be suppressed. In other words, mutual interference between electric fields of different electrode pairs can be prevented. This allows the electric field to be formed according to the selected pattern, improving the resolution in the analysis of the distribution state of electrical characteristic parameters. Even in the case of an out-plane type, a guard band can be provided by placing an electrode connected to ground (ground electrode) around the first electrode E1. Here, the ground electrode is selected by the selection unit 111.

[0058] Figures 12 and 13 illustrate the relationship between the profile (frequency band, etc.) of the electrical signal output from the signal generation unit 112, the electrode arrangement, or the desired inspection area on object C. Figure 12 shows the differences in how the electric field spreads depending on the frequency band of the electrical signal output by the signal generation unit 112 in an in-plane type, and the corresponding differences in the distance between electrodes. As shown on the left of Figure 12, in the low-frequency band, the electric field exhibits small distance-dependent attenuation, making it possible to increase the distance between the first electrode E1 and the second electrode E2. On the other hand, as shown on the right of Figure 12, in the high-frequency band, the electric field exhibits large distance-dependent attenuation, making it possible to reduce the distance between the first electrode E1 and the second electrode E2 compared to the low-frequency band. In other words, the signal generation unit 112 controls the frequency range according to the distance between the first electrode E1 and the second electrode E2. More specifically, the signal generation unit 112 sets the frequency range to the high frequency band when the distance between the first electrode E1 and the second electrode E2 is short, and sets the frequency range to the low frequency band when the distance between the first electrode E1 and the second electrode E2 is long. Alternatively, the selection unit 111 controls the distance between the first electrode E1 and the second electrode E2 according to the frequency range of the electrical signal output from the signal generation unit 112. More specifically, if the frequency range of the electrical signal output from the signal generation unit 112 is in the high frequency band, the distance between the first electrode E1 and the second electrode E2 is reduced, and if the frequency range of the electrical signal is in the low frequency band, the distance between the first electrode E1 and the second electrode E2 is increased.

[0059] Figure 13 shows the difference in how the electric field spreads in the depth direction depending on the frequency band of the electrical signal output by the signal generation unit 112 in the in-plane type. In the low frequency band, the distance-dependent attenuation of the electric field is small, and the electric field reaches deep into the object C, so the electrical characteristic parameters at the depth of the object C can be measured. On the other hand, in the high frequency band, the distance-dependent attenuation of the electric field is small, and the electric field does not spread easily and is formed in the shallow part of the object C, so the electrical characteristic parameters at the shallow part of the object C can be measured. In other words, the signal generation unit 112 controls the frequency range of the electrical signal according to the inspection depth of the object C. More specifically, when the area to be measured in the object C is shallow, the frequency range of the electrical signal is set to the high frequency band, and when the area to be measured is deep, the frequency range of the electrical signal is set to the low frequency band.

[0060] Furthermore, the unit electrode is not limited to a film shape, but can take various forms such as bulk or needle shapes, and is not limited to a square shape, but may be circular, triangular, or irregular in shape. In other words, the shape of the unit electrode is selected so that an electric field can be appropriately applied according to the shape and characteristics of the object C. For example, by using a soft or uneven material, even if the surface shape of the object C is uneven, the electrode or electrode pair can be brought into contact with or close to the object, and the electrical characteristic parameters can be appropriately measured.

[0061] Furthermore, it is possible to combine in-plane and out-plane electrode placement methods. In other words, the in-plane and out-plane configurations can be used differently for each region depending on the shape and structure of the object C. This allows for more flexible acquisition of electrical characteristic parameters regardless of the shape or structure of the object.

[0062] Furthermore, the signal generation unit 112 may apply different frequency bands to the electrical signals for each electrode or pair of electrodes. Specifically, the electrical signals are frequency-converted (up-converted / down-converted) before being applied to each electrode or pair of electrodes. This allows for setting different frequency bands for the electrical signals applied to adjacent electrode pairs, preventing interference between the electric fields formed by each electrode or pair of electrodes, and enabling the acquisition of more accurate electrical characteristic parameters.

[0063] Furthermore, the signal generation unit 112 may use different frequency sweep sequences or directions for the applied electrical signals depending on the electrode or electrode pair. For example, between adjacent electrodes or electrode pairs, an electrical signal swept from low frequency to high frequency may be applied to one electrode or electrode pair, while an electrical signal swept from high frequency to low frequency may be applied to the other electrode or electrode pair. This prevents interference between the electric fields formed by adjacent electrodes or electrode pairs, making it possible to obtain more accurate electrical characteristic parameters.

[0064] Furthermore, the signal generation unit 112 may apply an electrical signal with multiple frequency components to the electrode or electrode pair, rather than applying an electrical signal with a single frequency component, and the measurement unit 113 may simultaneously measure the electrical characteristic parameters for multiple frequency components. This allows for the acquisition of electrical characteristic parameters in a shorter time. The measurement unit 113 extracts the electrical characteristic parameters for each frequency component using filtering, fast Fourier transform, etc.

[0065] Furthermore, the electrode or electrode pair E may have a resonant structure for a predetermined frequency band. This can improve the sensitivity of acquiring electrical characteristic parameters in the predetermined frequency band.

[0066] Furthermore, the signal applied to the electrode or electrode pair may be a signal obtained by superimposing a DC signal as a bias onto an AC signal. When a DC signal is superimposed, the signal generation unit 112 controls the DC voltage and DC current. This makes it possible to measure the DC bias dependence of the electrical characteristic parameters of the object C. When measuring impedance as an electrical characteristic parameter, the impedance is calculated excluding the DC signal component at the input and output.

[0067] Furthermore, although the above embodiment describes a configuration in which an electrical signal is applied to the object C through an electrode pair, the sensor may also detect a signal (for example, radiation, magnetic force, temperature, etc.) generated from the object C. In that case, it is not necessarily required to apply a signal to the sensor. The sensor may include radiation detectors, magnetic force sensors, temperature sensors, etc.

[0068] (effect) As described above, the electrical characteristic parameter inspection device 1 includes a plurality of sensors placed on the object, a selection unit 111 that selects a plurality of predetermined selection patterns consisting of sensor pairs of two or more sensors from the plurality of sensors, a measurement unit 113 that measures the electrical characteristic parameters output from the sensors included in each selection pattern, and an analysis unit 114 that analyzes the electrical characteristic parameters measured for each selection pattern. As a result, it can efficiently inspect a wide range of objects without performing mechanical scanning.

[0069] Furthermore, the electrical characteristic parameter inspection device 1 includes a selection unit 111 which forms an electrode composed of a plurality of unit electrodes arranged on the surface and / or back surface of an object, and at least two or more element electrodes consisting of one or more unit electrodes from the plurality of unit electrodes, and forms a selection pattern with the plurality of electrodes; a signal generation unit 112 which outputs a predetermined electrical signal; a measurement unit 113 which, for each selection pattern, brings the electrodes included in the selection pattern into contact with or close to the object, applies a predetermined electrical signal output from the signal generation unit 112, and measures the electrical characteristic parameters; and an analysis unit 114 which analyzes the electrical characteristic parameters measured for each selection pattern. As a result, a wide range of objects can be inspected in a short time without performing mechanical scanning.

[0070] Furthermore, the measurement unit 113 can perform inspections with high accuracy by setting a measurement range within the object corresponding to an electrode as an element region based on the electrical characteristics of the object, and measuring the electrical characteristic parameters of that element region.

[0071] Furthermore, the sizes of one and the other electrodes constituting the electrode are equal to or smaller than the element region, taking into account the spread of the electric field in the object formed by multiple element electrodes. By switching and controlling the size of the electrodes according to the object, high-precision inspection can be achieved.

[0072] Furthermore, one and the other element electrodes constituting the electrode are composed of one or more unit electrodes, and by selecting these unit electrodes, the size and shape of the electrodes can be switched and controlled, enabling efficient inspection of a wide range of objects without mechanical scanning.

[0073] Furthermore, the unit electrodes that make up the electrode are composed of one of the following: a flat electrode, a block electrode, a film electrode, a needle electrode, or a flexible electrode that corresponds to the shape of the object, allowing inspection to be performed according to the shape of the object.

[0074] Furthermore, by connecting multiple electrodes included in the selection pattern in parallel to the measurement unit 113, the measured electrical characteristic parameters can be adjusted. Specifically, if the object has high impedance and measurement is difficult, connecting the electrode pairs in parallel can lower the measured impedance, making measurement easier.

[0075] Furthermore, by connecting multiple electrodes included in the selection pattern in series to the measurement unit 113, the measured electrical characteristic parameters can be adjusted. Specifically, if the object has low impedance and measurement is difficult, connecting the electrode pair in series can increase the measured impedance, making measurement easier.

[0076] Furthermore, by providing shielding regions between multiple electrodes in the selected pattern to reduce or prevent electrical interference between those electrodes, high-precision inspection can be achieved.

[0077] Furthermore, since the shielding region is composed of a second element electrode surrounding the first element electrode that constitutes the electrode, the shielding region can be realized with a simple configuration.

[0078] Furthermore, the second element electrode is a ground-connected electrode, which enables the creation of a shielded region.

[0079] Furthermore, by having multiple selection patterns each form a predetermined two-dimensional pattern, the distribution state of electrical characteristic parameters within object C can be analyzed as two-dimensional information.

[0080] Furthermore, since the multiple selection patterns are orthogonal to each other in a two-dimensional space, the distribution state of electrical characteristic parameters within object C can be analyzed as two-dimensional information.

[0081] Furthermore, the selection unit 111 changes the selection pattern, the measurement unit 113 measures the electrical characteristic parameters for each selection pattern selected by the selection unit 111, and the analysis unit 114 analyzes the electrical characteristic parameters measured multiple times by the selection unit 111 and the measurement unit 113, thereby enabling efficient inspection of a wide range of objects without mechanical scanning.

[0082] Furthermore, the electrical signal is an AC signal, and the signal generation unit 112 controls the frequency and / or amplitude of the output AC signal, while the measurement unit 113 measures impedance or admittance as an electrical characteristic parameter, thereby enabling efficient inspection of a wide range of objects without mechanical scanning.

[0083] Furthermore, the electrical signal is a DC signal, and the signal generation unit 112 controls the voltage and / or current of the output DC signal, while the measurement unit 113 measures the electrical resistance value as an electrical characteristic parameter. This allows for efficient inspection of a wide range of objects without mechanical scanning.

[0084] Furthermore, the electrical characteristic parameter inspection method comprises a placement step of arranging two or more sensors on an object in a predetermined selection pattern, a measurement step of measuring the electrical characteristic parameters output from the sensors arranged in the predetermined selection pattern, and an analysis step of analyzing the measured electrical characteristic parameters. Each time the selection pattern is changed by the placement step, the electrical characteristic parameters are measured by the measurement step, and the analysis step analyzes based on the electrical characteristic parameters measured by multiple selection patterns, thereby enabling efficient inspection of a wide range of objects without mechanical scanning.

[0085] Furthermore, the system includes a placement step of arranging electrode pairs in a predetermined selection pattern on the surface and / or back surface of an object, a measurement step of bringing electrodes included in the predetermined selection pattern into contact with or close to the object and applying a predetermined electrical signal to the object to measure electrical characteristic parameters, and an analysis step of analyzing the measured electrical characteristic parameters. Each time the selection pattern is changed by the placement step, the measurement step measures the electrical characteristic parameters, and the analysis step analyzes based on the electrical characteristic parameters measured with multiple selection patterns, thereby enabling efficient inspection of a wide range of objects without mechanical scanning.

[0086] Furthermore, the program enables efficient inspection of a wide range of objects without mechanical scanning by making the computer of an electrical characteristic parameter inspection device equipped with multiple sensors placed on an object function as a selection unit 111 that selects multiple predetermined selection patterns consisting of two or more pairs of sensors from the multiple sensors, a measurement unit 113 that measures the electrical characteristic parameters output from the sensors included in each selection pattern, and an analysis unit 114 that analyzes the electrical characteristic parameters measured for each selection pattern.

[0087] Furthermore, the program enables efficient inspection of a wide range of objects without mechanical scanning by having the computer of an electrical characteristic parameter inspection device equipped with multiple unit electrodes arranged on the surface and / or back surface of an object function as follows: a selection unit 111 that forms electrodes composed of at least one element electrode consisting of two or more unit electrodes from the multiple unit electrodes and forms a selection pattern with the multiple electrodes; a signal generation unit 112 that outputs a predetermined electrical signal; a measurement unit 113 that, for each selection pattern, brings the electrodes included in the selection pattern into contact with or close to the object and applies a predetermined electrical signal output from the signal generation unit 112 to measure the electrical characteristic parameters; and an analysis unit 114 that analyzes the electrical characteristic parameters measured for each selection pattern.

[0088] Although embodiments of the present invention have been described above, the description in these embodiments is merely a preferred example of the present invention and is not limited thereto.

[0089] For example, in the above embodiment, the data acquisition unit 11 analyzes the electric field pattern and the values ​​of the electrical characteristic parameters using machine learning, but the use of machine learning is not essential. Changes in the values ​​of the electrical characteristic parameters measured for each electric field pattern can also be used to check for corrosion of internal reinforcing bars.

[0090] Furthermore, in the above embodiment, in the case of the out-plane type, the second electrode E2 is the bottom surface of the object C, but it may also be inside the object C.

[0091] Furthermore, while the above description discloses examples in which a hard disk or semiconductor non-volatile memory is used as a computer-readable medium for the program according to the present invention, the invention is not limited to these examples. Portable recording media such as CD-ROMs can also be used as other computer-readable media.

[0092] Furthermore, the detailed configuration and operation of each device constituting the electrical characteristic parameter inspection device can also be modified as appropriate without departing from the spirit of the invention. [Explanation of Symbols]

[0093] 1. Electrical characteristic parameter testing device 11 Data Acquisition Unit 111 Selection Section 112 Signal Generation Unit 113 Measurement Unit 114 Analysis Department 115 Control Unit 12 Control section 13 Display section 14 Communications Department 15 Storage section E-electrode

Claims

1. Multiple sensors placed on the object, A selection unit that selects multiple selection patterns that form a predetermined two-dimensional pattern consisting of sensor pairs of two or more sensors from the plurality of sensors, For each of the aforementioned selection patterns, a measurement unit measures the electrical characteristic parameters output from the sensors included in the selection pattern, An analysis unit reconstructs two-dimensional information of the object by performing matrix calculations using the position information of the sensor pair for each selected pattern and the electrical characteristic parameters measured for each selected pattern. An electrical characteristic parameter testing device characterized by comprising the following:

2. Multiple unit electrodes arranged on the surface and / or back surface of the object, A selection unit that forms a selection pattern using multiple electrodes, comprising at least two element electrodes consisting of two or more unit electrodes from the aforementioned plurality of unit electrodes, A signal generation unit that outputs a predetermined electrical signal, For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit that analyzes the electrical characteristic parameters measured for each of the selected patterns, Equipped with, An electrical characteristic parameter testing apparatus characterized by having a shielding region that reduces or prevents electrical interference between electrodes, comprising a second element electrode surrounding a first element electrode to which the predetermined electrical signal is applied, which constitutes the electrode.

3. Multiple unit electrodes arranged on the surface and / or back surface of the object, A selection unit that forms an electrode composed of at least two element electrodes, each consisting of two or more unit electrodes from the plurality of unit electrodes, and forms a selection pattern that forms a predetermined two-dimensional pattern using the plurality of electrodes, A signal generation unit that outputs a predetermined electrical signal, For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit reconstructs two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each selected pattern and the electrical characteristic parameters measured for each selected pattern. An electrical characteristic parameter testing device characterized by comprising the following:

4. The electrical characteristic parameter inspection apparatus according to claim 2 or 3, characterized in that the selection unit determines the selection pattern based on the conductivity of the object.

5. The electrical characteristic parameter inspection device according to claim 4, characterized in that the size of at least one element electrode constituting the electrode is equal to or less than the element region which is the measurement range within the object corresponding to the electrode, taking into consideration the spread of the electric field in the object formed by the plurality of element electrodes, and the size of the electrode is switched and controlled according to the object.

6. The electrical characteristic parameter inspection apparatus according to any one of claims 2 to 5, characterized in that at least one element electrode constituting the electrode is composed of one or more unit electrodes, and the size and shape of the electrode are switched and controlled by selecting the unit electrode.

7. The electrical characteristic parameter inspection apparatus according to any one of claims 2 to 6, characterized in that the unit electrodes constituting the electrode are composed of one of the following: a flat plate-shaped electrode, a block-shaped electrode, a film-shaped electrode, a needle-shaped electrode, or a flexible-shaped electrode corresponding to the shape of the object.

8. The electrical characteristic parameter inspection apparatus according to claim 2, characterized in that the second element electrode is a ground-connected electrode.

9. The electrical characteristic parameter inspection apparatus according to claim 3, characterized in that the plurality of selection patterns are Hadamard matrix type cyclic patterns.

10. The selection unit changes the selection pattern, The measurement unit measures electrical characteristic parameters for each selection pattern selected by the selection unit, The electrical characteristic parameter inspection apparatus according to any one of claims 2 to 7, characterized in that the analysis unit analyzes the electrical characteristic parameters measured multiple times by the selection unit and the measurement unit.

11. The aforementioned electrical signal is an AC signal. The signal generation unit controls the frequency and / or amplitude of the AC signal to be output. The electrical characteristic parameter inspection apparatus according to any one of claims 2 to 10, characterized in that the measurement unit measures impedance or admittance as the electrical characteristic parameter.

12. The aforementioned electrical signal is a DC signal. The signal generation unit controls the voltage and / or current of the DC signal to be output. The electrical characteristic parameter inspection apparatus according to any one of claims 2 to 10, characterized in that the measurement unit measures the electrical resistance value as the electrical characteristic parameter.

13. A placement step involves arranging two or more sensors in a selected pattern that forms a predetermined two-dimensional pattern on the object, A measurement step of measuring electrical characteristic parameters output from sensors arranged in the predetermined selection pattern, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Each time the selected pattern is changed by the arrangement step, the electrical characteristic parameters are measured by the measurement step. The method for inspecting electrical characteristic parameters is characterized in that the analysis step reconstructs two-dimensional information of the object by performing matrix calculations using the position information of the sensor pair for each selected pattern and the electrical characteristic parameters measured for multiple selected patterns.

14. A placement step involves arranging electrodes in a selected pattern that forms a predetermined two-dimensional pattern on the surface and / or back surface of an object, A measurement step of measuring electrical characteristic parameters by applying a predetermined electrical signal to the object while the electrode forming the predetermined selection pattern is in contact with or in close proximity to the object, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Each time the selected pattern is changed by the arrangement step, the electrical characteristic parameters are measured by the measurement step. The method for inspecting electrical characteristic parameters is characterized in that the analysis step reconstructs two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each of the selected patterns and the electrical characteristic parameters measured for multiple selected patterns.

15. A placement step of arranging electrodes on the surface and / or back surface of an object in a predetermined selected pattern, A measurement step of measuring electrical characteristic parameters by applying a predetermined electrical signal to the object while the electrode forming the predetermined selection pattern is in contact with or in close proximity to the object, The process includes an analysis step of analyzing the measured electrical characteristic parameters, Each time the selected pattern is changed by the arrangement step, the electrical characteristic parameters are measured by the measurement step. The analysis step involves analyzing the electrical characteristic parameters measured using multiple selected patterns. An electrical characteristic parameter inspection method characterized by providing a shielding region that reduces or prevents electrical interference between electrodes, comprising a second element electrode surrounding a first element electrode to which the predetermined electrical signal is applied, which constitutes the electrode.

16. The computer of an electrical characteristic parameter inspection device equipped with multiple sensors placed on the object, A selection unit that selects multiple selection patterns that form a predetermined two-dimensional pattern consisting of two or more pairs of sensors from the plurality of sensors, For each of the aforementioned selection patterns, a measurement unit measures the electrical characteristic parameters output from the sensors included in the selection pattern, An analysis unit reconstructs the two-dimensional information of the object by performing matrix calculations using the position information of the sensor pair for each selected pattern and the electrical characteristic parameters measured for each selected pattern. A program that makes it function as such.

17. A computer for an electrical characteristic parameter inspection device equipped with multiple unit electrodes arranged on the surface and / or back surface of an object, A selection unit that forms an electrode composed of at least one element electrode consisting of two or more unit electrodes from the plurality of unit electrodes, and forms a selection pattern that forms a predetermined two-dimensional pattern with the plurality of electrodes, A signal generation unit that outputs a predetermined electrical signal. For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit reconstructs the two-dimensional information of the object by performing matrix calculations using the position information of the electrodes for each selected pattern and the electrical characteristic parameters measured for each selected pattern. A program that makes it function as such.

18. A computer for an electrical characteristic parameter inspection device equipped with multiple unit electrodes arranged on the surface and / or back surface of an object, A selection unit that forms a selection pattern by forming an electrode composed of at least one element electrode consisting of two or more unit electrodes from the plurality of unit electrodes, A signal generation unit that outputs a predetermined electrical signal. For each of the selection patterns, a measurement unit measures electrical characteristic parameters by applying a predetermined electrical signal output from the signal generation unit while the electrode forming the selection pattern is in contact with or in close proximity to the object. An analysis unit that analyzes the electrical characteristic parameters measured for each of the selected patterns, To make it function as, A program that provides a shielding region for reducing or preventing electrical interference between electrodes, which is composed of a second element electrode surrounding a first element electrode to which the predetermined electrical signal is applied, which constitutes the electrode.

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