Circulating cleaning device and its control method

Abstract

To provide a circulating cleaning system that solves the problem of uneven space allocation. [Solution] By providing a tray loading / unloading mechanism, a transport mechanism parallel to the tray loading / unloading mechanism along a first horizontal direction D2, a washing mechanism parallel to the transport mechanism along the first horizontal direction D2, a direction changing mechanism parallel to the washing mechanism along the first horizontal direction D2, and a drying mechanism parallel to the washing mechanism along a second horizontal direction D3, each holding tray 92 passes through the transport mechanism 2, the washing mechanism, the direction changing mechanism, and the drying mechanism before returning to the storage case 91 in the tray loading / unloading mechanism. Assuming that automated cleaning is achieved, the problem of uneven space allocation is resolved, and the convenience of each holding tray 92 being collected by the tray loading / unloading mechanism is improved.

Description

Technical Field

[0004]

[0001] The present invention relates to a cleaning device, and more particularly to a circulation type cleaning device and a control method thereof.

Background Art

[0002] In recent years, in the semiconductor wafer processing industry, due to the refinement of semiconductor wafers and a significant increase in the usage amount, it has become an important issue to increase the production volume while maintaining the quality.

[0003] For example, an existing wafer processing device described in Patent Document 1 is composed of a conveying means having a conveying conveyor, a loading means, an inspection means, and a processing means. However, such a conventional wafer processing device has a narrow width and is long, so the occupied space tends to be uneven.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In view of the above problems, an object of the present invention is to provide a circulation type cleaning device and a control method thereof that can improve the above drawbacks.

Means for Solving the Problems

[0006] To achieve the above object, the present invention includes a tray taking-in / out means, a conveying means, a cleaning means, a direction changing means, and a drying means, and is a circulation type cleaning device that sequentially passes at least one holding tray in a housing case through the conveying means, the cleaning means, the direction changing means, and the drying means for cleaning, The transport means is provided in parallel with the tray loading / unloading means along a predetermined first horizontal direction, and is configured to include a holding rail and a front support base and a rear support base that are movable on the holding rail along a second horizontal direction perpendicular to the first horizontal direction. The cleaning means is provided parallel to the transport means along the first horizontal direction, and is configured to drive the movement of the holding tray away from the transport means along the first horizontal direction, and to be used for cleaning the holding tray. The direction changing means is provided parallel to the transport means along the first horizontal direction and comprises a direction changing rail and at least one direction changing base positioned on the direction changing rail so as to be movable along the second horizontal direction, wherein the direction changing base is configured to be used to drive the movement of the holding tray in the second horizontal direction. The present invention provides a circulating cleaning apparatus in which the drying means is arranged between the conveying means and the direction changing means along the first horizontal direction and is provided in parallel with the cleaning means along the second horizontal direction, and the drying means is used to drive the movement of the holding tray toward the conveying means along the first horizontal direction and to dry the holding tray.

[0007] Furthermore, the present invention relates to a control method for a circulating cleaning device that cleans a plurality of holding trays located inside a storage case using a circulating cleaning device, The circulating washing apparatus comprises a tray loading / unloading means, a transport means provided parallel to the tray loading / unloading means along a predetermined first horizontal direction, a washing means provided parallel to the transport means along the first horizontal direction, a direction changing means provided parallel to the transport means along the first horizontal direction, and a drying means provided between the transport means and the direction changing means along the first horizontal direction and parallel to the washing means along a second horizontal direction perpendicular to the first horizontal direction. Each of the holding trays is used to pass through the conveying means, the washing means, the direction changing means, and the drying means in that order. The tray loading / unloading mechanism comprises a lifting rail, a lifting platform positioned on the lifting rail so as to be movable along a vertical direction perpendicular to both the first horizontal direction and the second horizontal direction, and used for housing the storage case, and a drive module adjacent to the lifting platform on the side opposite to the transport mechanism side. The transport means is configured to include a holding rail and a front support and a rear support that are provided on the holding rail so as to be movable along the second horizontal direction. The control method for the circulating washing apparatus includes the step of causing the tray loading / unloading means to sequentially load some of the multiple holding trays located in the storage case into the transport means until the drying means receives one of the multiple holding trays, When the drying means receives one of the holding trays, the rear support base of the transport means is moved along the second horizontal direction toward the drying means, thereby allowing the drying means to receive the holding tray being discharged from the drying means. The steps include moving the front support of the transport means along the second horizontal direction to the washing means, and transporting the holding tray that is on the front support to the washing means, The steps include moving the rear support base of the transport means along the second horizontal direction to the tray loading / unloading means, and loading the holding tray that is on the rear support base into the storage case located inside the tray loading / unloading means, The steps include: driving the lifting platform of the tray loading / unloading means to move the storage case along the vertical direction, thereby bringing another of the holding trays located inside the storage case closer to the transport means along the vertical direction; The present invention also provides a method for controlling a circulating cleaning apparatus, which includes the step of moving the front support of the conveying means along the second horizontal direction to the tray loading / unloading means to receive the other holding tray that has been unloaded by the tray loading / unloading means and is located in the storage case.

[0008] Furthermore, the present invention is a control method for a circulating cleaning device that cleans a plurality of holding trays located inside a storage case using a circulating cleaning device, The circulating washing apparatus comprises a tray loading / unloading means, a transport means provided parallel to the tray loading / unloading means along a predetermined first horizontal direction, a washing means provided parallel to the transport means along the first horizontal direction, a direction changing means provided parallel to the transport means along the first horizontal direction, and a drying means provided between the transport means and the direction changing means along the first horizontal direction and parallel to the washing means along a second horizontal direction perpendicular to the first horizontal direction. Each of the holding trays comprises the transport means, the cleaning means, and the direction changing means. Used to pass through the aforementioned drying means in sequence, The tray loading / unloading mechanism comprises a lifting rail, a lifting platform positioned on the lifting rail so as to be movable along a vertical direction perpendicular to both the first horizontal direction and the second horizontal direction, and used for housing the storage case, and a drive module adjacent to the lifting platform on the side opposite to the transport mechanism side. The transport means is configured to include a holding rail and a front support and a rear support that are provided on the holding rail so as to be movable along the second horizontal direction. The control method for the circulating washing apparatus includes the step of causing the tray loading / unloading means to sequentially load some of the multiple holding trays located in the storage case into the transport means until the drying means receives one of the multiple holding trays, When the drying means receives one of the holding trays, the rear support base of the transport means is moved along the second horizontal direction toward the drying means, thereby allowing the drying means to receive the holding tray being discharged from the drying means. The steps include moving the front support of the transport means along the second horizontal direction to the washing means, and transporting the holding tray that is on the front support to the washing means, The steps include moving the front support base of the transport means along the second horizontal direction to the tray loading / unloading means to receive another holding tray that has been unloaded by the tray loading / unloading means and is located inside the storage case, The steps include: driving the lifting platform of the tray loading / unloading mechanism to move the storage case along the vertical direction; The present invention also provides a method for controlling a circulating cleaning apparatus, which includes the step of moving the rear support of the transport means along a second horizontal direction to the tray loading / unloading means, and loading the holding tray, which is resting on the rear support, into the storage case located within the tray loading / unloading means. [Effects of the Invention]

[0009] This invention provides a tray loading / unloading mechanism, a transport mechanism parallel to the tray loading / unloading mechanism along a first horizontal direction, a washing mechanism parallel to the transport mechanism along a first horizontal direction, a direction-changing mechanism parallel to the washing mechanism along a first horizontal direction, and a drying mechanism parallel to the washing mechanism along a second horizontal direction. As a result, each holding tray passes through the transport mechanism, washing mechanism, direction-changing mechanism, and drying mechanism before returning to the storage case within the tray loading / unloading mechanism. This solves the problem of uneven space allocation, assuming automated cleaning is achieved. [Brief explanation of the drawing]

[0010] [Figure 1] This is a block diagram showing the configuration of an embodiment of the circulating cleaning device of the present invention. [Figure 2] This is a perspective view showing the storage case and holding tray in the same embodiment. [Figure 3] It is a top view showing the storage case and the holding tray in the same embodiment. [Figure 4] It is a perspective view showing the tray inserting / removing means, the conveying means, the storage case, and the holding tray in the same embodiment. [Figure 5] It is a top view showing the tray inserting / removing means, the conveying means, the storage case, and the holding tray in the same embodiment. [Figure 6] It is a partial perspective view showing the cleaning means, the direction changing means, the drying means, the storage case, and the holding tray in the same embodiment. [Figure 7] It is a top view showing the cleaning means, the direction changing means, the drying means, the storage case, and the holding tray in the same embodiment. [Figure 8] It is an explanatory view showing a state of cleaning a plurality of holding trays located in the storage case using the same embodiment. [Figure 9] It is a flowchart showing the first control method of the same embodiment. [Figure 10] It is a flowchart showing the second control method of the same embodiment.

Mode for Carrying Out the Invention

[0011] In order to more clearly explain the object, technical means, and advantages of the embodiments of the present invention, hereinafter, in combination with the accompanying drawings of the embodiments of the present invention, the technical means in the embodiments of the present invention will be clearly and detailedly explained. It will be clear that the embodiments to be described are some of the embodiments of the present invention, not all of the embodiments. Usually, the components of the embodiments of the present invention depicted and shown in the accompanying drawings can be arranged and designed in various different arrangements. Therefore, hereinafter, the detailed description of the embodiments of the present invention provided in the accompanying drawings does not constitute any limitation to the protection scope of the present invention, but only shows the selected embodiments of the present invention.

[0012] Figures 1 to 3 show an embodiment of the circulating cleaning apparatus of the present invention. As shown in the figures, the circulating cleaning apparatus of the present invention comprises a tray loading / unloading means 1, a transport means 2, a cleaning means 3, a direction changing means 4, and a drying means 5. It is suitable for cleaning at least one holding tray 92 (boat) housed in a storage case 91 (magazine) by passing it sequentially through the transport means 2, the cleaning means 3, the direction changing means 4, and the drying means 5.

[0013] For the sake of brevity, in the following explanation, only one holding tray 92 housed within the storage case 91 will be used as an example, unless it is necessary to explain them separately.

[0014] As shown in the figure, the circulating washing apparatus of the present invention comprises a tray loading / unloading means 1, a conveying means 2, a washing means 3, a direction changing means 4, and a drying means 5, and also comprises a control means 6 that is signal-connected to all of the tray loading / unloading means 1, the conveying means 2, the washing means 3, the direction changing means 4, and the drying means 5.

[0015] As shown in Figures 4 and 5, the tray loading / unloading mechanism 1 includes a lifting rail 11, a lifting platform 12 positioned on the lifting rail 11 so as to be movable along a vertical direction D1 perpendicular to both the first horizontal direction D2 and the second horizontal direction D3, and a drive module 13 adjacent to the lifting platform 12 on the side opposite to the transport mechanism 2. The drive module 13 is used to move the holding tray 92 to the transport mechanism 2. In this embodiment, the lifting platform 12 has four storage spaces 121, each of which is used to accommodate a storage case 91. In other words, the lifting platform 12 can accommodate multiple storage cases 91.

[0016] The transport means 2 is provided parallel to the tray loading / unloading means 1 along a first horizontal direction D2 perpendicular to the vertical direction D1. The transport means 2 includes a holding rail 21 and a front support base 22 and a rear support base 23 that are movable on the holding rail 21 along a second horizontal direction D3 perpendicular to both the vertical direction D1 and the first horizontal direction D2.

[0017] The front support base 22 comprises a front base body 221 and two front conveyors 222 rotatably mounted on both sides of the front base body 221, and each front conveyor 222 is used to drive the holding tray 92 closer to the washing means 3 along the first horizontal direction D2.

[0018] The rear support base 23 comprises a rear base body 231 and two rear conveyors 232 rotatably mounted on both sides of the rear base body 231, and each rear conveyor 232 is used to drive the holding tray 92 away from the drying means 5 along the first horizontal direction D2.

[0019] In this embodiment, both the front base body 221 and the rear base body 231 are slidably positioned on the holding rail 21.

[0020] As shown in Figures 6 and 7, the cleaning means 3 is provided parallel to the conveying means 2 along the first horizontal direction D2. The cleaning means 3 is used to move the holding tray 92 away from the conveying means 2 along the first horizontal direction D2, and is also used to clean the holding tray 92.

[0021] The cleaning means 3 includes a detergent cleaning module 31 provided in parallel with the transport means 2 along the first horizontal direction D2, and a deionized water cleaning module 32 provided in parallel with the detergent cleaning module 31 along the first horizontal direction D2.

[0022] The detergent washing module 31 includes a first washing housing 311 that defines a first washing space 312, a first conveyor 313 located in the first washing space 312 and used to drive the movement of the holding tray 92 along a first horizontal direction D2, at least one first washing nozzle 314 located in the first washing space 312 and used to spray detergent toward the holding tray 92, and a first sensor 315 adjacent to the first conveyor 313 and signal-connected to the control means 6. In this embodiment, the first sensor 315 is an infrared sensor.

[0023] In other variations of this embodiment, the number of first cleaning nozzles 314 is greater than one, and is not limited to this embodiment.

[0024] The deionized water washing module 32 includes a second washing housing 321 defining a second washing space 322; a second conveyor 323 located in the second washing space 322 and used to drive the movement of the holding tray 92 along a first horizontal direction D2; at least one second washing nozzle 324 located in the second washing space 322 and used to spray deionized water toward the holding tray 92; and a second sensor 325 adjacent to the second conveyor 323 and signal-connected to the control means 6. In this embodiment, the second sensor 325 is an infrared sensor.

[0025] In other variations of this embodiment, the number of second cleaning nozzles 324 is greater than one, and is not limited to this embodiment.

[0026] In this embodiment, both the first conveyor 313 and the second conveyor 323 are chained conveyor belts, but in other variations of this embodiment, the first conveyor 313 and the second conveyor 323 may be implemented by a single chained conveyor belt or by other types of conveyors, and are not limited to this embodiment.

[0027] The direction changing means 4 is provided parallel to the transport means 2 along the first horizontal direction D2 and has a direction changing rail 41 and two direction changing bases 42 that are positioned on the direction changing rail 41 so as to be movable along the second horizontal direction D3. The direction changing bases 42 are configured to be used to drive the movement of the holding tray 92 in the second horizontal direction D3. Incidentally, the direction changing means 4 achieves the objective of driving the movement of the holding tray 92 in the second horizontal direction D3 using only one direction changing base 42. The reason why the direction changing means 4 in this embodiment has two direction changing bases 42 is that the direction changing means 4 in this embodiment adopts the same design as the transport means 2, thereby saving the cost of redesigning the direction changing means 4.

[0028] Each direction-changing base 42 comprises a direction-changing base body 421 and two direction-changing conveyors 422 that are rotatably mounted on both sides of the direction-changing base body 421.

[0029] The drying means 5 is positioned between the conveying means 2 and the direction changing means 4 along the first horizontal direction D2, and is provided parallel to the washing means 3 along the second horizontal direction D3. The drying means 5 is used to drive the holding tray 92 to move towards the conveying means 2 along the first horizontal direction D2 and to dry the holding tray 92.

[0030] The drying means 5 has two air-drying modules 51 that are spaced apart from each other along a first horizontal direction D2, and each air-drying module 51 has an air-drying housing 511 that defines an air-drying space 512, an air-drying conveyor 513 located in the air-drying space 512 and used to drive the movement of the holding tray 92 along the first horizontal direction D2, an air-drying nozzle 514 located in the air-drying space 512 and used to blow air toward the holding tray 92, and a third sensor 515 adjacent to each air-drying conveyor 513 and signal-connected to the control means 6. In this embodiment, the third sensor 515 is an infrared sensor.

[0031] In this embodiment, there is one air-drying nozzle 514, but in other variations of this embodiment, the number of air-drying nozzles 514 can be more than one, and is not limited to this embodiment.

[0032] In this embodiment, each direction-changing conveyor 422 is a chain-attached conveyor belt; however, in other variations of this embodiment, each direction-changing conveyor 422 may be implemented by a single chain-attached conveyor belt or by other types of conveyors, and is not limited to this embodiment.

[0033] In this embodiment, the control means 6 is implemented together by a processor and a computer-readable medium on which a plurality of program commands are recorded and which is electrically connected to the processor. On the other hand, in other variations of this embodiment, the control means 6 can be implemented based on hardware or firmware such as a field-programmable gate array (FPGA), a microprocessor, or a system on a chip.

[0034] In conventional technology, since there is no means for changing direction, the cleaning device is configured with a means for supplying the object to be cleaned at one end and a means for discharging the object at the other end, which inevitably results in an overall elongated shape.

[0035] On the other hand, the present invention comprises a tray loading / unloading means 1, a transport means 2 provided parallel to the tray loading / unloading means 1 along a first horizontal direction D2, a washing means 3 provided parallel to the transport means 2 along the first horizontal direction D2, a direction changing means 4 provided parallel to the washing means 3 along the first horizontal direction D2, and a drying means 5 provided parallel to the washing means 3 along a second horizontal direction D3. This eliminates the necessity of the overall arrangement being elongated, and since the supply and discharge of items to be washed are unified using the tray loading / unloading means 1, the problem of uneven space allocation is solved, and the management of items to be washed (holding trays 92) becomes more convenient.

[0036] In other words, as shown in Figures 1, 8, and 9, each holding tray 92 can be automatically cleaned by passing it in sequence through the front support base 22, the first washing housing 311, the second washing housing 321, one direction-changing base 42, and two air-drying housings 511.

[0037] When actually operating, the first control method of this embodiment performs the following steps.

[0038] In step S11, the control means 6 moves the storage case 91 along the vertical direction D1 onto the lifting platform 12 of the tray loading / unloading means 1, so that one of the holding trays 92 in the storage case 91 faces the drive module 13, thereby causing the drive module 13 to load that holding tray 92 onto the front support platform 22 of the transport means 2. In practice, the time required for the lifting platform 12 of the tray loading / unloading means 1 to move the storage case 91 is about 5 to 10 seconds.

[0039] In step S12, the control means 6, assuming that there is no other holding tray 92 in the detergent washing module 31 of the washing means 3, moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the washing means 3 and transports the holding tray 92 that is on the front support base 22 into the washing means 3. Specifically, when the control means 6 receives a signal from the first sensor 315 of the detergent washing module 31 indicating that there is no holding tray 92 in the detergent washing module 31, it controls the transport to move the holding tray 92 that is on the front support base 22 into the washing means 3.

[0040] In step S13, the control means 6 moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the tray loading / unloading means 1, thereby enabling step S11 to be executed. Therefore, by repeatedly executing steps S11 to S13, several of the multiple holding trays 92 located in the storage case 91 can be sequentially loaded into the washing means 3 until the drying means 5 receives one of the multiple holding trays 92.

[0041] Then, when the drying means 5 receives the holding tray 92 that has passed through the washing means 3 and the direction changing means 4 in order, it executes step S14 to unload the holding tray 92 that the drying means 5 has received. In practice, the time required for the front support base 22 of the transport means 2 to move in the second horizontal direction D3 in steps S12 and S13 is about 5 to 10 seconds.

[0042] Incidentally, the time the retaining tray 92 stays on the front support base 22 is about 5 to 10 seconds, the time the retaining tray 92 stays on the first washing housing 311 is about 45 to 120 seconds, the time the retaining tray 92 stays on the second washing housing 321 is about 45 to 120 seconds, the time the retaining tray 92 stays on one of the direction-changing bases 42 is about 5 to 10 seconds, and the time the retaining tray 92 stays on each air-drying housing 511 is about 40 to 115 seconds.

[0043] In the following explanation, for the sake of simplicity, we will describe as an example a configuration in which the six holding trays 92 are sequentially loaded into the transport means 2 and move the front support base 22, the first washing housing 311, the second washing housing 321, one direction-changing base 42, and two air-drying housings 511 (see Figure 8).

[0044] As can be seen from the above explanation, the time the holding tray 92 remains in the first washing housing 311, the second washing housing 321, and each air-drying housing 511 is relatively long, and the time the holding tray 92 remains in each air-drying housing 511 is about 5 seconds shorter than the time it remains in the first washing housing 311 and the second washing housing 321. Therefore, once the drying of the holding tray 92 in the air-drying module 51 adjacent to the holding rail 21 is complete, the rear support base 23 of the transport means 2 can receive the holding tray 92 from the air-drying module 51 within this time difference of about 5 seconds.

[0045] In step S14, the control means 6, assuming that the air-drying module 51 adjacent to the holding rail 21 in the drying means 5 has received the holding tray 92, moves the rear support base 23 of the transport means 2 closer to the drying means 5 along the second horizontal direction D3 to receive the holding tray 92 being discharged from the drying means 5. Specifically, when the control means 6 receives a reception signal from the third sensor 515 of the air-drying module 51 adjacent to the holding rail 21, the control means 6 can be certain that the air-drying module 51 adjacent to the holding rail 21 has received the holding tray 92. After receiving the reception signal, the control means 6 controls the support base 23 to move closer to the drying means 5 along the second horizontal direction D3 after a predetermined waiting time has elapsed. Since this predetermined waiting time corresponds to the time that the holding tray 92 remains in each air-drying housing 511, the support base 23 can immediately receive the holding tray 92 being discharged from the drying means 5.

[0046] In step S15, the control means 6 moves the front support base 22 of the transport means 2 closer to the cleaning means 3 along the second horizontal direction D3, and then transports the holding tray 92 that is on the front support base 22 into the cleaning means 3.

[0047] In step S16, the control means 6 moves the rear support base 23 of the transport means 2 closer to the tray loading / unloading means 1 along the second horizontal direction D3, and then loads the holding tray 92, which is resting on the rear support base 23, into the storage case 91 inside the tray loading / unloading means 1.

[0048] In step S17, the control means 6 moves the storage case 91 along the vertical direction D1 onto the lifting platform 12 of the tray loading / unloading means 1, thereby moving the holding tray 92 inside the storage case 91 to the transport means 2 along the vertical direction D1.

[0049] In step S18, the control means 6 moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the tray loading / unloading means 1 to receive the holding tray 92 that has been unloaded from the tray loading / unloading means 1.

[0050] In conventional technology, there is only one configuration corresponding to either the rear support base 23 or the front support base 22 in the present invention. Therefore, the next holding tray cannot be loaded into the washing means 3 until the holding tray is unloaded from the drying means, and this process takes approximately 60 seconds.

[0051] On the other hand, in the present invention, the transport means 2 has a rear support base 23 and a front support base 22, so that when steps S14 to S15 are performed, the waiting time required for the rear support base 23 to carry the holding tray 92 into the storage case 91 and the waiting time required for the front support base 22 to receive the holding tray 92 from the storage case 91 are saved. As a result, the front support base 22 can carry the holding tray 92 to the washing means 3 at the same time that the rear support base 23 receives the holding tray 92 from the drying means 5, so the time required from when the rear support base 23 receives the holding tray 92 from the drying means 5 until the holding tray 92 on which the front support base 22 is placed is carried to the washing means 3 is approximately 15 seconds.

[0052] Thus, the transport means 2 of the present invention has a rear support base 23 and a front support base 22 that can operate simultaneously. As a result, the rear support base 23 can receive the holding tray 92 from the drying means 5 while the front support base 22 can transport the holding tray 92 to the washing means 3, thereby improving the overall operational efficiency.

[0053] As shown in Figures 1, 8, and 10, the second control method of this embodiment performs the following steps when actually operating.

[0054] In step S21, the control means 6 moves the storage case 91 along the vertical direction D1 onto the lifting platform 12 of the tray loading / unloading means 1, so that one of the multiple holding trays 92 in the storage case 91 faces the drive module 13, and then the drive module 13 loads that holding tray 92 onto the front support base 22 of the transport means 2.

[0055] In step S22, the control means 6, assuming that there is no other holding tray 92 in the detergent washing module 31 of the washing means 3, moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the washing means 3 and carries the holding tray 92 that is on the front support base 22 into the washing means 3.

[0056] In step S23, the control means 6 moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the tray loading / unloading means 1, thereby enabling step S21 to be executed. Therefore, by repeatedly executing steps S21 to S23, the holding tray 92 can be continuously loaded into the washing means 3.

[0057] In step S24, the control means 6, assuming that the air-drying module 51 adjacent to the holding rail 21 in the drying means 5 has received the holding tray 92, moves the rear support base 23 of the transport means 2 closer to the drying means 5 along the second horizontal direction D3 to receive the holding tray 92 being discharged from the drying means 5.

[0058] In step S25, the control means 6 moves the front support base 22 of the transport means 2 closer to the cleaning means 3 along the second horizontal direction D3, and then transports the holding tray 92 that is on the front support base 22 into the cleaning means 3.

[0059] In step S26, the control means 6 moves the front support base 22 of the transport means 2 along the second horizontal direction D3 to the tray loading / unloading means 1, thereby receiving the holding tray 92 that is being unloaded from the tray loading / unloading means 1.

[0060] In step S27, the control means 6 moves the storage case 91 along the vertical direction D1 onto the lifting platform 12 of the tray loading / unloading means 1.

[0061] In step S28, the control means 6 moves the rear support base 23 of the transport means 2 along the second horizontal direction D3 to the tray loading / unloading means 1, and then the control means 6 loads the holding tray 92, which is on the rear support base 23, into the storage case 91 in the tray loading / unloading means 1.

[0062] In short, step S28 in the second control method corresponds to step S16 in the first control method, and step S26 corresponds to step S18. Therefore, the second control method is obtained by swapping the order of steps S16 and S18 in the first control method. In other words, since steps S26 (step S18) and step S28 (step S16) are independent operations, swapping their order does not affect the implementation of the second control method in this embodiment.

[0063] Furthermore, since the transport means 2 has both a rear support base 23 and a front support base 22, as described in steps S24 to S25, the waiting time required for the rear support base 23 to load the holding tray 92 into the storage case 91 and the waiting time required for the front support base 22 to receive the holding tray 92 from the storage case 91 can be reduced.

[0064] As a result, the time required from when the rear support base 23 receives the holding tray 92 being unloaded from the drying means 5 until the front support base 22 loads the holding tray 92 into the washing means 3 is also significantly reduced, thereby improving overall operational efficiency.

[0065] In summary, this embodiment of the present invention, along with the first and second control methods, has the following advantages.

[0066] (1) By providing a tray loading / unloading means 1, a transport means 2 parallel to the tray loading / unloading means 1 along a first horizontal direction D2, a washing means 3 parallel to the transport means 2 along the first horizontal direction D2, a direction changing means 4 parallel to the washing means 3 along the first horizontal direction D2, and a drying means 5 parallel to the washing means 3 along a second horizontal direction D3, each holding tray 92 passes through the transport means 2, the washing means 3, the direction changing means 4, and the drying means 5 before returning to the storage case 91 in the tray loading / unloading means 1. Assuming that automated cleaning is achieved, the problem of uneven space allocation is resolved, and the convenience of each holding tray 92 being collected in the tray loading / unloading means 1 is improved.

[0067] (2) The configuration of a rear support base 23 and a front support base 22 shortens the time from when the rear support base 23 receives the holding tray 92 being unloaded from the drying means 5 until the holding tray 92 on which the front support base 22 is placed is loaded into the washing means 3, thereby improving the overall operational efficiency.

[0068] Therefore, the circulating cleaning apparatus and its control method of the present invention can improve the overall cleaning efficiency, and the objective of the present invention is reliably achieved.

[0069] Although embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications are possible without departing from its essence. [Explanation of Symbols]

[0070] 1. Tray loading / unloading mechanism 11 Lifting rails 12 Elevating platform 121 storage spaces 13 Drive Module 2. Conveying means 21 Retaining rail 22 Front support stand 221 Front base body 222 Front conveyor 23 Rear support stand 231 Rear pedestal body 232 Rear conveyor 3. Cleaning means 31 Detergent Washing Module 311 First cleaning enclosure 312 First washing space 313 First conveyor 314 First cleaning nozzle 315 First sensor 32 Deionized water washing module 321 Second cleaning enclosure 322 Second washing space 323 Second conveyor 324 Second cleaning nozzle 325 Second sensor 4. Means of changing direction 41 Direction change rail 42 Directional changing base 421 Directional change base unit 422 Directional Conveyor 5 Drying means 51 Air Drying Module 511 Air dry housing 512 Air-drying space 513 Air-drying conveyor 514 Air Drying Nozzle 515 Third Sensor 6. Control means 91 storage cases 92 Retaining trays D1 vertical direction D2 First horizontal direction D3 Second horizontal direction S11-S18, S21-S28 Step

Claims

1. A circulating cleaning device comprising a tray loading / unloading mechanism, a transport mechanism, a cleaning mechanism, a direction changing mechanism, and a drying mechanism, wherein at least one holding tray in a storage case is cleaned by passing it sequentially through the transport mechanism, the cleaning mechanism, the direction changing mechanism, and the drying mechanism, The transport means is provided in parallel with the tray loading / unloading means along a predetermined first horizontal direction, and is configured to include a holding rail and a front support base and a rear support base that are movable on the holding rail along a second horizontal direction perpendicular to the first horizontal direction. The cleaning means is provided parallel to the transport means along the first horizontal direction, and is configured to drive the movement of the holding tray away from the transport means along the first horizontal direction, and to be used for cleaning the holding tray. The direction changing means is provided parallel to the transport means along the first horizontal direction and comprises a direction changing rail and at least one direction changing base positioned on the direction changing rail so as to be movable along the second horizontal direction, wherein the direction changing base is configured to be used to drive the movement of the holding tray in the second horizontal direction. A circulating washing apparatus wherein the drying means is arranged between the conveying means and the direction changing means along the first horizontal direction and is provided in parallel with the washing means along the second horizontal direction, and the drying means is used to drive the movement of the holding tray toward the conveying means along the first horizontal direction and to dry the holding tray.

2. The tray loading / unloading mechanism comprises a lifting rail, a lifting platform mounted on the lifting rail so as to be movable along a vertical direction perpendicular to both the first horizontal direction and the second horizontal direction, and a drive module adjacent to the lifting platform on the side opposite to the transport mechanism side. The aforementioned lifting platform is used to house the aforementioned storage case. The circulating cleaning apparatus according to claim 1, wherein the drive module is used to drive the holding tray to approach the transport means.

3. The front support base comprises a front base body and two front conveyors rotatably mounted on both sides of the front base body, and each of the front conveyors drives the holding tray to approach the washing means along the first horizontal direction. The circulating washing apparatus according to claim 1, wherein the rear support base comprises a rear base body and two rear conveyors rotatably provided on both sides of the rear base body, and each of the rear conveyors drives the holding tray away from the drying means along the first horizontal direction.

4. The cleaning means comprises a detergent cleaning module provided in parallel with the transport means along the first horizontal direction, and a deionized water cleaning module provided in parallel with the detergent cleaning module along the first horizontal direction. The detergent washing module comprises a first washing housing that defines a first washing space, a first conveyor located in the first washing space and used to drive the first horizontal movement of the holding tray, and at least one first washing nozzle located in the first washing space and used to spray detergent toward the holding tray. The circulating cleaning apparatus according to claim 1, wherein the deionized water washing module comprises a second washing housing that defines a second washing space, a second conveyor located in the second washing space and used to drive the holding tray to move along the first horizontal direction, and at least one second washing nozzle located in the second washing space and used to spray deionized water toward the holding tray.

5. The drying means comprises two air-drying modules arranged apart from each other along the first horizontal direction, The circulating cleaning apparatus according to claim 1, wherein each of the aforementioned air drying modules comprises an air drying housing that defines an air drying space, an air drying conveyor located in the air drying space and used to drive the first horizontal movement of the holding tray, and an air drying nozzle located in the air drying space and used to blow air toward the holding tray.

6. The circulating cleaning device according to claim 1, wherein the direction-changing base comprises a direction-changing base body and two direction-changing conveyors rotatably provided on both sides of the direction-changing base body.

7. A control method for a circulating cleaning device that cleans multiple holding trays located inside a storage case using a circulating cleaning device, The circulating washing apparatus comprises a tray loading / unloading means, a transport means provided parallel to the tray loading / unloading means along a predetermined first horizontal direction, a washing means provided parallel to the transport means along the first horizontal direction, a direction changing means provided parallel to the transport means along the first horizontal direction, and a drying means provided between the transport means and the direction changing means along the first horizontal direction and parallel to the washing means along a second horizontal direction perpendicular to the first horizontal direction. Each of the holding trays is used to pass through the conveying means, the washing means, the direction changing means, and the drying means in that order. The tray loading / unloading mechanism comprises a lifting rail, a lifting platform positioned on the lifting rail so as to be movable along a vertical direction perpendicular to both the first horizontal direction and the second horizontal direction, and used for housing the storage case, and a drive module adjacent to the lifting platform on the side opposite to the transport mechanism side. The transport means is configured to include a holding rail and a front support and a rear support that are provided on the holding rail so as to be movable along the second horizontal direction. The control method for the circulating washing apparatus includes the step of causing the tray loading / unloading means to sequentially load some of the multiple holding trays located in the storage case into the transport means until the drying means receives one of the multiple holding trays, When the drying means receives one of the holding trays, the rear support base of the transport means is moved along the second horizontal direction toward the drying means, thereby allowing the drying means to receive the holding tray being discharged from the drying means. The steps include moving the front support of the transport means along the second horizontal direction to the washing means, and transporting the holding tray that is on the front support to the washing means, The steps include moving the rear support base of the transport means along the second horizontal direction to the tray loading / unloading means, and loading the holding tray that is on the rear support base into the storage case located within the tray loading / unloading means, The steps include: driving the lifting platform of the tray loading / unloading means to move the storage case along the vertical direction, thereby bringing another holding tray located inside the storage case closer to the transport means along the vertical direction; A method for controlling a circulating cleaning apparatus, comprising the step of moving the front support of the conveying means along the second horizontal direction to the tray loading / unloading means to receive the other holding tray that has been unloaded by the tray loading / unloading means and is located in the storage case.

8. The aforementioned step includes, A substep involves moving the storage case along the vertical direction on the lifting platform of the tray loading / unloading means, so that one of the multiple holding trays in the storage case faces the drive module, and then having the drive module load the one holding tray onto the front support base of the transport means. A substep of moving the front support stand along the second horizontal direction to the cleaning means and transporting the holding tray on the front support stand into the cleaning means, A method for controlling a circulating cleaning apparatus according to claim 7, comprising the substep of moving the front support base along the second horizontal direction to the tray loading / unloading means.

9. A control method for a circulating cleaning device that cleans multiple holding trays located inside a storage case using a circulating cleaning device, The circulating washing apparatus comprises a tray loading / unloading means, a transport means provided parallel to the tray loading / unloading means along a predetermined first horizontal direction, a washing means provided parallel to the transport means along the first horizontal direction, a direction changing means provided parallel to the transport means along the first horizontal direction, and a drying means provided between the transport means and the direction changing means along the first horizontal direction and parallel to the washing means along a second horizontal direction perpendicular to the first horizontal direction. Each of the holding trays is used to pass through the conveying means, the washing means, the direction changing means, and the drying means in that order. The tray loading / unloading mechanism comprises a lifting rail, a lifting platform positioned on the lifting rail so as to be movable along a vertical direction perpendicular to both the first horizontal direction and the second horizontal direction, and used for housing the storage case, and a drive module adjacent to the lifting platform on the side opposite to the transport mechanism side. The transport means is configured to include a holding rail and a front support and a rear support that are provided on the holding rail so as to be movable along the second horizontal direction. The control method for the circulating washing apparatus includes the step of causing the tray loading / unloading means to sequentially load some of the multiple holding trays located in the storage case into the transport means until the drying means receives one of the multiple holding trays, When the drying means receives one of the holding trays, the rear support base of the transport means is moved along the second horizontal direction toward the drying means, thereby allowing the drying means to receive the holding tray being discharged from the drying means. The steps include moving the front support of the transport means along the second horizontal direction to the washing means, and transporting the holding tray that is on the front support to the washing means, The steps include moving the front support base of the transport means along the second horizontal direction to the tray loading / unloading means to receive another holding tray that has been unloaded by the tray loading / unloading means and is located inside the storage case, The steps include: driving the lifting platform of the tray loading / unloading mechanism to move the storage case along the vertical direction; A method for controlling a circulating cleaning apparatus, comprising the step of moving the rear support of the transport means along a second horizontal direction to the tray loading / unloading means, and loading the holding tray on the rear support into the storage case located within the tray loading / unloading means.

10. The aforementioned step includes, A substep involves moving the storage case along the vertical direction on the lifting platform of the tray loading / unloading means, so that one of the multiple holding trays in the storage case faces the drive module, and then having the drive module load the one holding tray onto the front support base of the transport means. A substep of moving the front support stand along the second horizontal direction to the cleaning means and transporting the holding tray on the front support stand into the cleaning means, A method for controlling a circulating cleaning apparatus according to claim 9, comprising the substep of moving the front support base along the second horizontal direction to the tray loading / unloading means.

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