Jigs and guides

Abstract

To better position the grinding wheel without increasing physical strain or damaging the grinding wheel segments. [Solution] The jig 7 used for attaching and detaching the grinding wheel 6 to the spindle 53 comprises a first jig portion 8 that supports the grinding wheel 6 from below, a second jig portion 9 located below the first jig portion 8 and supported by an index table 3 as a base portion, and a rotation mechanism 10 interposed between the first jig portion 8 and the second jig portion 9, which allows the first jig portion 8 to rotate relative to the second jig portion 9 around a central axis Ac extending in the vertical direction.

Description

Technical Field

[0001] The present disclosure relates to a jig and a guide tool used for the jig.

Background Art

[0002] Patent Document 1 discloses a jig that can be used for mounting an annular grinding wheel (processing tool) in a grinding device (processing device). This processing device includes a pedestal portion, a spindle, and a mount that is fixed to the lower end portion (tip portion) of the spindle and to which the grinding wheel is mounted.

[0003] The jig according to Patent Document 1 includes a first support portion capable of supporting the grinding wheel, a second support portion supported by the pedestal portion, and a balloon portion disposed between the first support portion and the second support portion.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Generally, attaching and detaching a grinding wheel in a grinding device places a physical burden on the operator performing the attachment and detachment. To reduce such a burden, it is conceivable to use a jig as disclosed in Patent Document 1.

[0006] However, in general, a grinding wheel may need to be positionally adjusted not only in the horizontal and vertical directions but also in the rotational direction in order to align it with fastening holes provided in a spindle, a mount, etc.

[0007] In that case, if a jig like the one described in Patent Document 1 is used, it is necessary to lift the grinding wheel from the jig, rotate the grinding wheel on the jig, or rotate the spindle to align the fastening holes when adjusting the position in the rotational direction. However, such measures are inconvenient because they can lead to increased physical strain or damage to the grinding wheel segments.

[0008] This disclosure has been made in view of the above, and its purpose is to allow for more appropriate positioning of the grinding wheel without increasing physical load or damaging the grinding wheel segments. [Means for solving the problem]

[0009] A first aspect of the present disclosure relates to a jig used for attaching and detaching the grinding wheel to the spindle in a vertical surface grinding machine comprising: a base portion having a chuck on which a workpiece is mounted; a spindle that moves vertically toward and away from the base portion and rotates around a rotation axis extending in the vertical direction; and an annular grinding wheel that is detachably attached from below to the lower end of the spindle.

[0010] Furthermore, according to the first embodiment, the jig comprises a first jig portion that supports the grinding wheel from below, a second jig portion located below the first jig portion and supported by the base portion, and a rotation mechanism interposed between the first jig portion and the second jig portion that allows the first jig portion to rotate relative to the second jig portion around a central axis extending in the vertical direction.

[0011] According to the first embodiment, the first jig is permitted to rotate relative to the second jig. By rotating the first jig, the grinding wheel can be positioned via the first jig. As a result, the grinding wheel can be positioned more appropriately without increasing physical load or damaging the grinding wheel segments.

[0012] Furthermore, according to a second aspect of the present disclosure, the rotating mechanism may be arranged on the upper surface of the second jig portion or on the lower surface of the first jig portion, and the rotating mechanism may be arranged in a line along the circumferential direction about the central axis and each may be composed of a plurality of rotating members that allow the first jig portion to rotate relative to the second jig portion, and the first jig portion may be supported by the second jig portion via the plurality of rotating members.

[0013] According to the second embodiment, the first jig is supported by the second jig via a plurality of rotating members arranged in the circumferential direction. By suppressing the contact area between the first jig and the second jig, friction between the first and second jig can be suppressed. This allows the first jig to rotate smoothly.

[0014] Furthermore, according to a third aspect of this disclosure, the second jig portion may include an upper member located below the first jig portion, a lower member located below the upper member and supported by the base portion, and an elastic mechanism interposed between the upper member and the lower member, which expands and contracts in the vertical direction, thereby exerting an elastic force in a direction that separates the lower member and the upper member.

[0015] According to the third embodiment, by interposing an elastic mechanism between the upper member and the lower member, the load received from the spindle and the grinding wheel can be mitigated.

[0016] Furthermore, according to a fourth aspect of the present disclosure, the second jig portion may be arranged along the circumferential direction about the central axis and have a plurality of horizontal adjustment members, each for adjusting the distance between the lower member and the upper member.

[0017] As mentioned above, by interposing an elastic mechanism between the upper and lower members, the load from the spindle and grinding wheel can be mitigated. On the other hand, simply interposing an elastic mechanism may cause the upper member to tilt relative to the lower member. This tilt of the upper member may lead to tilting of the first jig located above it, and consequently, misalignment of the grinding wheel.

[0018] Therefore, by providing the horizontal adjustment member as in the fourth aspect, the height of each part in the circumferential direction can be individually adjusted. Thereby, the inclination of the upper member and the first jig part, and thus the deviation of the center of the grinding wheel can be suppressed.

[0019] Further, according to the fifth aspect of the present disclosure, an alignment portion may be provided on the upper surface of the first jig part that fits into the lower surface of the grinding wheel to align the center position of the grinding wheel with respect to the first jig part.

[0020] According to the fifth aspect, by providing the alignment portion in the first jig part, the center position of the grinding wheel can be aligned.

[0021] Further, according to the sixth aspect of the present disclosure, the first jig part may have a notch part that cuts out a part in the circumferential direction around the central axis from the outside to the inside in the radial direction orthogonal to the central axis together with the alignment portion.

[0022] According to the sixth aspect, by providing the notch part in the first jig part, when placing the grinding wheel on the alignment portion or lifting the grinding wheel from the alignment portion, the operator's hand can be easily inserted and removed. Thereby, the burden on the operator can be reduced without impairing the alignment of the grinding wheel.

[0023] Further, according to the seventh aspect of the present disclosure, the first jig part may be configured to be detachable from the second jig part.

[0024] According to the seventh aspect, by making the first jig part detachable from the second jig part, depending on the type of the grinding wheel, a first jig part having an alignment portion corresponding to that type can be used. Thereby, regardless of the type of the grinding wheel, the same second jig part can be used, and the manufacturing cost can be reduced.

[0025] Further, according to the eighth aspect of the present disclosure, at least the alignment portion among the first jig portions may be made of resin.

[0026] According to the eighth aspect, by making the alignment portion made of resin, damage to the grinding wheel when the alignment portion comes into contact with the grinding wheel can be suppressed. Further, by making at least a part of the first jig portion made of resin, the weight of the first jig portion can be reduced. Thereby, attachment and detachment of the first jig portion to and from the second jig portion becomes easy.

[0027] Further, the ninth aspect of the present disclosure relates to a guide tool used for the jig. In this sixth aspect, the pedestal portion is constituted by an index table that rotates around a second rotation axis extending in the vertical direction to rotate the chuck around the second rotation axis.

[0028] And according to the ninth aspect, the guide tool includes a long portion fixed to the index table and extending parallel to the radial direction orthogonal to the second rotation axis, a guide portion that contacts the outer surface of the second jig portion and guides the slide of the jig along the long portion, and a positioning portion that positions the jig that slides along the guide portion. The positioning portion may position the jig at a first position where the rotation axis of the spindle and the central axis of the jig are aligned.

[0029] According to the ninth aspect, without lifting the jig each time, the jig can be positioned at the first position simply by sliding the jig by the guide tool. Thereby, it is possible to achieve both reduction of physical load and adjustment of the position of the grinding wheel.

Advantages of the Invention

[0030] As described above, according to the present disclosure, the position of the grinding wheel can be adjusted more appropriately without increasing the physical load and causing damage to the grinding wheel segments.

Brief Description of the Drawings

[0031] [Figure 1] Figure 1 is an example of a vertical surface grinding machine. [Figure 2] Figure 2 is a magnified view of a portion of Figure 1. [Figure 3] Figure 3 is a longitudinal cross-sectional view of the spindle and grinding wheel. [Figure 4] Figure 4 is a perspective view of the jig. [Figure 5] Figure 5 is an exploded perspective view of the jig. [Figure 6] Figure 6 is a plan view of the jig. [Figure 7] Figure 7 is a cross-sectional view along the line VII-VII in Figure 6. [Figure 8] Figure 8 illustrates the procedure for mounting the grinding wheel. [Figure 9] Figure 9 illustrates the procedure for removing the grinding wheel. [Figure 10] Figure 10 is a plan view illustrating a guide device. [Figure 11] Figure 11 is a longitudinal cross-sectional view illustrating a jig related to a modified example. [Modes for carrying out the invention]

[0032] The embodiments of this disclosure will be described below with reference to the drawings. Note that the following description is illustrative.

[0033] <Vertical surface grinding machine> First, we will explain the overall configuration of the vertical surface grinding machine 1 and the configuration of each part.

[0034] (Overall structure) Figure 1 is an example of a vertical surface grinding machine 1. Figure 2 is a partially enlarged view of Figure 1. Figure 3 is a longitudinal cross-sectional view of the spindle 53 and grinding wheel 6.

[0035] The vertical surface grinding machine 1 is a grinding device that performs single-sided surface grinding on a plate-shaped workpiece W. Specifically, as shown in Figures 1, 2, and 3, the vertical surface grinding machine 1 comprises a bed 2, an index table 3, a column 4, a grinding mechanism 5, and a grinding wheel 6. Hereinafter, the vertical surface grinding machine 1 may simply be referred to as the grinding machine 1.

[0036] Here, the plate-shaped workpiece W may be a semiconductor material or a metal plate. As an example, the workpiece W in this embodiment is a semiconductor wafer.

[0037] (bed) Bed 2 is installed on the factory floor or other foundation (installation surface) where the grinding machine 1 is installed. Bed 2 has a three-dimensional shape in which the upper surface on the back side (the back side in Figure 1) is raised compared to the upper surface on the front side (the front side in Figure 1). Bed 2 supports the index table 3 from below with the upper surface on the front side and supports the column 4 from below with the upper surface on the back side.

[0038] In this context, the vertical direction refers to the direction extending perpendicular or approximately perpendicular to the mounting surface. The first rotation axis (rotation axis) A1, the second rotation axis A2, and the third rotation axis A3, described later, all refer to rotation axes that extend along the vertical direction. Similarly, the fourth rotation axis A4 and the central axis Ac, described later, also correspond to rotation axes that extend along the vertical direction when mounted or placed on the grinding machine 1.

[0039] Hereinafter, the directions along the first rotation axis A1, the second rotation axis A2, the third rotation axis A3, the fourth rotation axis A4, and the central axis Ac may be referred to as the "axial direction" or the "up and down direction" respectively (see the double arrow D1 in Figure 1). Also, one side of the up and down direction corresponding to the upper side of the paper in the same figure will be referred to as "up," and the other side of the up and down direction corresponding to the lower side of the paper in Figure 1 will be referred to as "down."

[0040] Furthermore, in the following description, the direction that circles the first rotation axis A1, second rotation axis A2, third rotation axis A3, fourth rotation axis A4, or central axis Ac will be referred to as the "circumferential direction," and the direction that extends radially from the first rotation axis A1, second rotation axis A2, third rotation axis A3, fourth rotation axis A4, or central axis Ac will be referred to as the "radial direction." Also, in the following description, "plan view" refers to a view from above along the axial direction.

[0041] (Index Table) The index table 3 has a chuck 32 on which the workpiece W is mounted. The index table 3 rotates around a second rotation axis A2 that extends in the vertical direction, thereby rotating the chuck 32 around the second rotation axis A2. The index table 3 is an example of the "base portion" in this embodiment.

[0042] Specifically, the index table 3, which serves as the base, includes a rotary table 31 that rotates around a second rotation axis A2, and at least two chucks 32 positioned on the rotary table 31, as illustrated in Figures 1 and 2. The number of chucks 32 is not limited to two.

[0043] The rotary table 31 has a flat upper surface 31a. The chuck 32 is positioned on this upper surface 31a. The jig 7 and guide 12, which will be described later, are also positioned on the upper surface 31a of the rotary table 31.

[0044] Furthermore, the rotary table 31 rotates around the second rotation axis A2 by a motor (not shown). This "rotation" refers to rotation relative to the bed 2, as illustrated by the pair of arrows in Figure 1. Due to the rotation of the rotary table 31, each chuck 32, which is supported from below by the rotary table 31, rotates between an exchange position P1 for attaching and detaching the workpiece W and a grinding position P2 for grinding the workpiece W. Depending on the number of chucks 32, additional positions such as a rough grinding position for rough grinding the workpiece W may be added.

[0045] The chuck 32 is composed of a disc-shaped chuck table. The chuck table is made of, for example, porous ceramic and is connected to a vacuum source (not shown). Each chuck 32 holds a workpiece W placed on its upper surface by suction using the negative pressure generated by the vacuum source.

[0046] Furthermore, the chuck 32 rotates around the third rotation axis A3 by a motor (not shown). This "rotation" refers to rotation relative to the index table 3, as illustrated by the arrows along the surface of the workpiece W in Figure 2. As the chuck 32 rotates, the workpiece W mounted on the chuck 32 rotates integrally with the chuck 32 around the third rotation axis A3.

[0047] (column) Column 4 is positioned above the index table 3 and supports the spindle 53. More specifically, at least a portion of column 4 overlaps with the index table 3 in a plan view. Column 4 supports the upper end of the grinding mechanism 5 so that the grinding mechanism 5 hangs downward.

[0048] (Grinding mechanism) The grinding mechanism 5 is supported by the column 4. The grinding mechanism 5 processes the workpiece W held in the chuck 32 at the grinding position P2 by rotating the grinding wheel 6 attached to its lower end.

[0049] Specifically, the grinding mechanism 5 according to this embodiment, as shown in Figures 1 to 3, includes a housing 51, a feed mechanism (not shown), a spindle 53, and a fastener 54. The housing 51 is supported by a column 4 so as to be able to move up and down. The feed mechanism (not shown) is connected to the housing 51. At least a portion of the spindle 53 is housed in the housing 51.

[0050] The feed mechanism includes a ball screw feed and a motor. The feed mechanism moves the housing 51 up and down by operating the feed motor. As the housing 51 moves up and down, the spindle 53 housed in the housing 51 also moves up and down.

[0051] The spindle 53 moves vertically toward and away from the index table 3, which serves as the base, and rotates around the first rotation axis A1, which extends in the vertical direction. Figure 2 shows an example of one spindle 53, but is not limited to this example. As mentioned above, when rough grinding of the workpiece W, the grinding machine 1 may be equipped with a second spindle to which a second grinding wheel is mounted.

[0052] More specifically, the spindle 53 is composed of a shaft member that extends in the vertical direction. The spindle 53 moves closer to or further away from the upper surface 31a of the rotary table 31 when the feed mechanism is activated.

[0053] Furthermore, a wheel mount 531 is provided at the lower end of the spindle 53, to which the grinding wheel 6 is detachably attached. As illustrated in Figure 3, the wheel mount 531 according to this embodiment has a flange portion 531a and a spigot portion 531b.

[0054] The flange portion 531a is formed by a flange that protrudes radially outward from the lower end of the spindle 53. The flange portion 531a has an annular shape with an outer diameter similar to that of the grinding wheel 6.

[0055] Multiple through holes 55 are arranged in the flange portion 531a at intervals (equally spaced in this embodiment) in the circumferential direction around the first rotation axis A1 (only two are shown as examples in Figure 3). Fasteners 54 such as bolts can be inserted through each through hole 55 from above.

[0056] The spigot portion 531b protrudes downward from the lower end of the spindle 53. The spigot portion 531b has an annular cross-section. Together with the through hole 61a provided in the grinding wheel 6, the spigot portion 531b constitutes a spigot structure. In other words, by fitting the spigot portion 531b into the through hole 61a of the grinding wheel 6, the center position of the grinding wheel 6 can be aligned with the spindle 53.

[0057] In this context, "alignment" refers to aligning the first rotation axis A1 with the fourth rotation axis A4, as shown in the lower part of Figure 3. Hereafter, the fourth rotation axis A4 of the grinding wheel 6 will also be referred to as the "center position A4" of the grinding wheel 6.

[0058] Furthermore, the spindle 53 rotates around the first rotation axis A1 when the drive motor housed in the housing 51 is activated. As the spindle 53 rotates, the grinding wheel 6 mounted on its lower end (wheel mount 531) also rotates.

[0059] (Grinding wheel) The grinding wheel 6 is detachably mounted from below to the wheel mount 531 of the spindle 53. The grinding wheel 6 has a wheel body 61, a plurality of grinding segments 62, and a plurality of insertion holes 63, and is configured in an annular shape.

[0060] The wheel body 61 has an annular, thin plate shape centered on the fourth rotation axis A4. The wheel body 61 can also be called the "base material" of the grinding wheel 6. A through hole 61a is formed in the center of the wheel body 61, penetrating the wheel body 61 in the thickness direction. This through hole 61a has a circular cross-section.

[0061] Each of the multiple grinding wheel segments 62 is fixed to the lower surface of the wheel body 61. Each of the multiple grinding wheel segments 62 has a substantially block shape and is arranged at intervals in the circumferential direction of the wheel body 61. Each grinding wheel segment 62 has abrasive grains and a binder that fixes the abrasive grains.

[0062] Furthermore, in the wheel body 61, the lower surface located radially inward from the multiple grinding wheel segments 62 forms a tapered portion 61b that widens radially outward as it moves downward in the vertical direction.

[0063] Each of the multiple insertion holes 63 is located on the upper surface of the wheel body 61. Each of the multiple insertion holes 63 extends downward and is spaced apart in the circumferential direction of the wheel body 61. One insertion hole 63 in the grinding wheel 6 is positioned to correspond to one through hole 55 in the wheel mount 531.

[0064] <Jig> Next, the jig 7 according to this embodiment will be described in detail.

[0065] Figure 4 is a perspective view of the jig 7. Figure 5 is an exploded perspective view of the jig 7. Figure 6 is a plan view of the jig 7. Figure 7 is a cross-sectional view taken along line VII-VII in Figure 6. Figure 8 illustrates the procedure for mounting the grinding wheel 6, and Figure 9 illustrates the procedure for removing the grinding wheel 6.

[0066] The jig 7 is used to attach and detach the grinding wheel 6 to the spindle 53 of the grinding machine 1 illustrated in Figures 1 to 3. More specifically, the jig 7 according to this embodiment is used as a temporary stand for the grinding wheel 6 when attaching or detaching it in the grinding machine 1.

[0067] Specifically, the jig 7 according to this embodiment comprises a first jig section 8, a second jig section 9, and a rotation mechanism 10, as illustrated in Figures 4 and 5. The first jig section 8 and the second jig section 9 share a common central axis Ac. Furthermore, as will be described later, the rotation mechanism 10 allows rotation around its central axis Ac.

[0068] (First Jig Section) The first jig portion 8 supports the grinding wheel 6 from below. For example, as shown in Figures 5, 7, and 8, the first jig portion 8 in this embodiment supports the grinding wheel 6 from below via its upper surface 8a. Specifically, the first jig portion 8 supports the grinding wheel 6 from below via a first alignment portion 81 provided on its upper surface 8a.

[0069] More specifically, the first jig section 8 is configured to support the grinding wheel 6 and to align the center position A4 of the mounted grinding wheel 6. As shown in Figure 5, this first jig section 8 is composed of an annular plate-shaped member centered on a central axis Ac.

[0070] Specifically, the first jig portion 8 according to this embodiment includes a first alignment portion (alignment portion) 81, a notch portion 82, a through hole 83, and a second alignment portion 84.

[0071] At least a portion of the upper surface 8a of the first jig portion 8 (for example, the tapered portion 81a described later) is made of resin. More specifically, in this embodiment, the upper surface 8a including the first alignment portion 81 is made of resin. More specifically, in this embodiment, the entire first jig portion 8 is made of resin. By making the entire first jig portion 8 of resin, the weight of the jig 7 can be reduced.

[0072] The first alignment portion 81 is used to align the first jig portion 8 with the grinding wheel 6. This first alignment portion 81 is provided on the upper surface 8a of the first jig portion 8 and fits into the lower surface of the grinding wheel 6, thereby aligning the center position A4 of the grinding wheel 6 with the first jig portion 8. The first alignment portion 81 is an example of an "alignment portion" in this embodiment.

[0073] More specifically, the first alignment portion 81 includes a spigot portion 81a and a tapered portion 81b. The tapered portion 81b is positioned radially outward from the spigot portion 81a.

[0074] As shown in Figure 7, the spigot portion 81a protrudes upward from the upper surface 8a of the first jig portion 8. As shown in Figure 6, the spigot portion 81a has an annular shape with a central axis Ac.

[0075] The spigot portion 81a of the first jig portion 8, together with the through hole 61a of the grinding wheel 6, constitutes a spigot structure. In other words, the spigot portion 81a fits into the through hole 61a from the lower side of the grinding wheel 6, thereby aligning the center position A4 of the grinding wheel 6.

[0076] In this context, "alignment" refers to aligning the central axis Ac of the jig 7 with the central position A4 of the grinding wheel 6, as shown in Figure 8(b).

[0077] As shown in Figure 7, the tapered portion 81b expands in diameter radially outward as it moves downward in the vertical direction. As shown in Figure 6, the tapered portion 81b has an annular shape with a central axis Ac in a plan view.

[0078] Furthermore, the tapered portion 81b of the first jig portion 8 has approximately the same opening angle as the tapered portion 61b of the grinding wheel 6. Therefore, when the grinding wheel 6 is placed on it, the tapered portion 81b of the first jig portion 8 comes into contact with the tapered portion 61b of the grinding wheel 6. This contact allows the center position A4 of the grinding wheel 6 to be aligned.

[0079] The notch 82 cuts out a portion of the first jig portion 8 in the circumferential direction, extending from the outside to the inside in the radial direction perpendicular to the central axis Ac, along with the first alignment portion 81.

[0080] More specifically, as shown in Figure 6, two notches 82 are provided at equal intervals in the circumferential direction. Note that the number of notches 82 is not limited to the illustrated example. Each notch 82 cuts out the first jig portion 8 from the radial outer surface toward the central axis Ac. As shown in Figure 6, the notches 82 in this embodiment are configured to cut out at least the spigot portion 81a and the tapered portion 81b.

[0081] The through-hole 83 penetrates the first jig portion 8 in the thickness direction. As shown in Figure 6, the through-hole 83 has a circular cross-section centered on the central axis Ac. As shown in Figures 6 and 7, the through-hole 83 has a smaller diameter than the outer diameter of the second jig portion 9 and a larger diameter than the inner diameter of the second jig portion 9.

[0082] The second alignment portion 84 is used to align the first jig portion 8 and the second jig portion 9. This second alignment portion 84 is provided on the lower surface 8b of the first jig portion 8, and the upper member 91 of the second jig portion 9, which will be described later, fits into it, thereby aligning the center position of the first jig portion 8 with the second jig portion 9.

[0083] More specifically, the second alignment portion 84 is composed of a recess that is coaxial with the through hole 83 and connected to the through hole 83. This recess is provided on the lower surface 8b of the first jig portion 8 and has a circular cross-section, as shown by the dashed line in Figure 6. The inner diameter of the recess is larger than the inner diameter of the through hole 83 and is slightly larger than or approximately the same as the outer diameter of the second jig portion 9.

[0084] The second alignment portion 84, together with the upper member 91 of the second jig portion 9, forms a spigot structure. In other words, the second alignment portion 84 fits into the upper member 91, thereby aligning the center position of the first jig portion 8 with respect to the second jig portion 9. In this embodiment, the outer surface 9b of the upper member 91 fits into the inner surface of the recess related to the second alignment portion 84.

[0085] Furthermore, the rotating mechanism 10, described later, comes into contact with the inner bottom surface of the recess related to the second alignment portion 84. Through this contact, the first jig portion 8 is supported by the second jig portion 9 via the rotating mechanism 10. The first jig portion 8 can be removed from the second jig portion 9 simply by lifting it. In other words, the first jig portion 8 in this embodiment is configured to be detachable from the second jig portion 9.

[0086] (Second Jig Section) The second jig section 9 is located below the first jig section 8. The second jig section 9 is supported by the index table 3, which serves as a base. For example, in this embodiment, the second jig section 9 is supported by the upper surface 31a of the rotary table 31, as shown in Figure 7.

[0087] More specifically, the second jig section 9 supports the first jig section 8 from below via a rotating mechanism 10 and is configured to align the center position of the first jig section 8. As shown in Figure 5, the second jig section 9 is composed of an annular and columnar member centered on a central axis Ac. Note that parts of the second jig section 9 that are not involved in the spigot structure may have shapes other than cylindrical.

[0088] Specifically, the second jig section 9 according to this embodiment includes an upper member 91, a lower member 92, an elastic mechanism 93, and a horizontal adjustment mechanism 94. To reduce weight, at least a portion of this second jig section 9 is made of aluminum alloy. Combined with the fact that both the upper member 91 and the lower member 92 are formed in annular shape (with the central part hollowed out), as described later, the overall weight of the second jig section 9 can be reduced.

[0089] The upper member 91 is located below the first jig portion 8. As shown in Figure 5, the upper member 91 is composed of an annular and columnar member centered on a central axis Ac. The outer surface of the upper member 91 has a larger diameter than the inner diameter of the through hole 83, and is slightly smaller in diameter or approximately the same diameter as the inner diameter of the second alignment portion 84. The outer surface 9b of the upper member 91, together with the inner surface of the recess related to the second alignment portion 84, constitutes the aforementioned spigot structure. In this embodiment, the second jig portion 9 is the convex side of the spigot structure and the first jig portion 8 is the concave side of the spigot structure, but the structure is not limited to this. The first jig portion 8 may be the convex side of the spigot structure and the second jig portion 9 may be the concave side of the spigot structure.

[0090] The lower member 92 is located below the upper member 91. The lower member 92 is supported by the index table 3, which serves as a base. For example, the second jig 9 in this embodiment is supported by the upper surface 31a of the rotary table 31, as shown in Figure 7. The lower member 92 is composed of an annular, plate-shaped member centered on a central axis Ac, as shown in Figure 5, etc.

[0091] The elastic mechanism 93 is interposed between the upper member 91 and the lower member 92. By expanding and contracting in the vertical direction, the elastic mechanism 93 exerts an elastic force that separates the upper member 91 and the lower member 92. The upper member 91 and the lower member 92 are connected vertically via the elastic mechanism 93.

[0092] The elastic mechanism 93 includes a plurality of elastic members 93a. The plurality of elastic members 93a are arranged along the circumferential direction around the central axis Ac and are configured to bias the upper member 91 upward relative to the lower member 92. As each elastic member 93a expands and contracts vertically, the upper member 91 and the lower member 92 move apart from each other or move closer to each other.

[0093] More specifically, multiple elastic members 93a are arranged along the circumferential direction. In this embodiment, six elastic members 93a are arranged at equal intervals of 60°, but this is not the only example. It is not necessary to arrange six elastic members 93a, nor is it necessary to arrange them at equal intervals.

[0094] More specifically, as shown in Figure 7, the elastic member 93a is composed of a compression spring that expands and contracts in the vertical direction. The elastic member 93a has an upper end that is inserted into a bottomed cylindrical insertion hole provided on the lower surface of the upper member 91, and a lower end that is fixed to the upper surface of the lower member 92. Note that the use of a compression spring for the elastic member 93a is not essential. Any material that compresses in the vertical direction, such as a sponge, can be used for the elastic member 93a.

[0095] The horizontal adjustment mechanism 94 includes a plurality of horizontal adjustment members 94a. The plurality of horizontal adjustment members 94a are arranged along the circumferential direction around the central axis Ac and are configured to adjust the distance between the lower member 92 and the upper member 91 in the vertical direction.

[0096] More specifically, the horizontal adjustment members 94a are arranged in multiples along the circumferential direction, as illustrated by the solid lines in Figure 6. In the example shown, six horizontal adjustment members 94a are arranged at equal intervals of 60°, but this is not the only example. It is not necessary to arrange six horizontal adjustment members 94a, nor is it necessary to arrange them at equal intervals.

[0097] Furthermore, one elastic member 93a is positioned adjacent to one horizontal adjustment member 94a (see Figure 7). Each horizontal adjustment member 94a is positioned radially inward of the corresponding elastic member 93a. Each horizontal adjustment member 94a is positioned inward of the inner diameter of the through hole 83. As shown in the figure, each horizontal adjustment member 94a is exposed radially inward of the through hole 83.

[0098] By exposing each horizontal adjustment member 94a to the inside of the through hole 83 in this way, the amount of fastening of bolts, etc., can be adjusted without removing the first jig part 8 from the second jig part 9.

[0099] More specifically, the horizontal adjustment member 94a is composed of a bolt that is inserted through the upper surface 9a of the upper member 91 and fastened to the lower member 92. The horizontal adjustment member 94a, as a bolt, allows the upper member 91 to slide along its bolt shaft while its bolt head acts as a retaining mechanism. This allows the upper member 91 and the lower member 92 to move toward and away from each other in the vertical direction. The horizontal adjustment member 94a restricts the amount of expansion and contraction of the elastic member 93a to a predetermined range (the range within which it is retained by the bolt head). For example, the tighter the bolt is tightened, the more the expansion and contraction of the elastic member 93a is restricted, and the looser the bolt is loosened, the more the expansion and contraction of the elastic member 93a is allowed.

[0100] (Rotation mechanism) The rotation mechanism 10 is interposed between the first jig portion 8 and the second jig portion 9. The rotation mechanism 10 allows the first jig portion 8 to rotate relative to the second jig portion 9 around a central axis Ac that extends in the vertical direction.

[0101] The rotating mechanism 10 is positioned on the upper surface 9a of the second jig portion 9 or on the lower surface 8b of the first jig portion 8. In this embodiment, the rotating mechanism 10 is positioned on the upper surface 9a of the second jig portion 9, as illustrated in Figure 5.

[0102] The rotating mechanism 10 includes a plurality of rotating members 10a. The plurality of rotating members 10a are arranged in a line along the circumferential direction about the central axis Ac, and each is configured to allow rotation of the first jig portion 8 relative to the second jig portion 9.

[0103] More specifically, as shown in Figure 5, multiple rotating members 10a are arranged along the circumferential direction. In the example shown, six rotating members 10a are arranged at equal intervals of 60°, but this is not the only example. It is not necessary to arrange six rotating members 10a, nor is it necessary to arrange them at equal intervals.

[0104] More specifically, as shown in Figure 7, the rotating member 10a is composed of rollers that allow the first jig portion 8 to rotate relative to the second jig portion 9. However, the use of rollers in the rotating member 10a is not mandatory. A sliding material or bearings may also be used for the rotating member 10a.

[0105] (Procedure for attaching and detaching the grinding wheel) Next, the procedure for attaching and detaching the grinding wheel 6 to the spindle 53 of the grinding machine 1 will be explained with reference to Figures 8 and 9.

[0106] First, to mount the grinding wheel 6 onto the spindle 53, a jig 7 is placed on the index table 3, and the index table 3 is rotated. This rotation moves the jig 7 to directly below the spindle 53 so that the first rotation axis A1 of the spindle 53 aligns with the central axis Ac of the jig 7.

[0107] Simultaneously with the rotational movement of the jig 7, the grinding wheel 6 is placed on the first jig section 8, as illustrated in Figure 8(a). At this time, the spigot section 81a is fitted into the through hole 61a of the grinding wheel 6, and the tapered section 61b of the grinding wheel 6 is pressed against the tapered section 81b of the first jig section 8. As a result, the central axis Ac of the jig 7 and the central position A4 of the grinding wheel 6 coincide (central axis Ac = central position A4).

[0108] When placing the grinding wheel 6 onto the first jig section 8, the worker's hand H is withdrawn through the notch 82 as illustrated in Figures 8 and 9. This allows the worker to place the grinding wheel 6 onto the first jig section 8 without touching the grinding wheel segment 62, while easily freeing their hand H.

[0109] Next, as illustrated in Figure 8(b), the spindle 53 is lowered, bringing the lower surface of its wheel mount 531 close to the upper surface of the grinding wheel 6. At this time, the grinding wheel 6 is rotated around its central axis Ac to align it circumferentially with respect to the wheel mount 531. This alignment aligns the insertion hole 63 of the grinding wheel 6 and the insertion hole 55 of the wheel mount 531 on approximately the same straight line in the vertical direction. The rotation of the grinding wheel 6 is performed by rotating the first jig part 8 relative to the second jig part 9.

[0110] Subsequently, as illustrated in Figure 8(c), the spindle 53 is lowered, and the lower surface of its wheel mount 531 is pressed against the upper surface of the grinding wheel 6. At this time, the spigot portion 531b of the wheel mount 531 is fitted into the through hole 61a of the grinding wheel 6. This causes the center position A4 of the grinding wheel 6 and the first rotation axis A1 of the spindle 53 to coincide (center position A4 = first rotation axis A1).

[0111] As clearly shown in Figure 8(c), when the spindle 53 is pressed against the grinding wheel 6, the elastic member 93a contracts in the vertical direction. This contraction helps to alleviate the load received from the spindle 53.

[0112] Subsequently, as illustrated in Figure 8(c), fasteners 54 are inserted into the flange portion 531a from above and each fastener 54 is tightened. This completes the mounting of the grinding wheel 6 to the spindle 53.

[0113] On the other hand, to detach the grinding wheel 6 from the spindle 53, a jig 7 is mounted on the index table 3, and the index table 3 is rotated. This rotation moves the jig 7 to directly below the spindle 53 so that the first rotation axis A1 of the spindle 53 aligns with the central axis Ac of the spindle 53.

[0114] Next, as illustrated in Figure 9(d), the spindle 53 is lowered, and the lower surface of the grinding wheel 6 mounted on the spindle 53 is brought close to or in contact with the upper surface of the first jig portion 8. After that, the fastener 54 is removed from the flange portion 531a.

[0115] Next, the spindle 53 is raised, as illustrated in Figure 9(e). Then, by rotating the index table 3, the jig 7 is moved to a position where the grinding wheel 6 can be easily lifted from the jig 7.

[0116] Next, as illustrated in Figures 9(e) and 9(f), the operator lifts the grinding wheel 6 from the first jig 8. This completes the detachment of the grinding wheel 6 from the spindle 53.

[0117] When lifting the grinding wheel 6 from the first jig section 8, the operator's hand H is inserted through the notch 82 as illustrated in Figures 8 and 9. This allows the operator to lift the grinding wheel 6 from the first jig section 8 without touching the grinding wheel segment 62.

[0118] <Information tools> Next, the guide device 12 according to this embodiment will be described in detail. Figure 10 is a plan view illustrating the guide device 12.

[0119] The guide tool 12 is used with the jig 7 illustrated in Figures 4 to 9. More specifically, the guide tool 12 according to this embodiment can be used to position the jig 7 on the index table 3.

[0120] Specifically, the guide 12 according to this embodiment comprises a long portion 12a, a guide portion 12b, and first and second positioning portions 12c and 12d. The guide 12 is made of, for example, metal.

[0121] The elongated portion 12a is fixed to the index table 3. The elongated portion extends parallel to the radial direction perpendicular to the second rotation axis A2. In this embodiment, the elongated portion 12a is fixed to the upper surface 31a of the rotary table 31 by fasteners such as bolts.

[0122] As shown in Figure 7, the guide portion 12b is in contact with the outer surface 9c of the second jig portion 9. The guide portion 12b guides the sliding of the jig 7 along the elongated portion 12a. In this embodiment, the guide portion 12b is formed by the side surface of the elongated portion 12a. This guide portion 12b slides against the outer surface of the jig 7.

[0123] The first and second positioning sections 12c and 12d each position the jig 7 which slides along the guide section 12b. Of these, the first positioning section 12c positions the jig 7 at a first position Po1 where the rotation axis of the spindle 53 (first rotation axis A1) and the central axis Ac of the jig 7 are aligned. In this embodiment, the first and second positioning sections 12c and 12d are each formed by bending the longitudinal end of the elongated section 12a.

[0124] Here, the first positioning unit 12c positions the jig 7 at the first position Po1 shown by the solid line in Figure 10. This first position Po1 corresponds to the position where the central axis Ac of the jig 7 and the first rotation axis A1 of the spindle 53 coincide when attaching or detaching the grinding wheel 6. The first positioning unit 12c and the first position Po1 are located radially outward with respect to the second rotation axis A2 compared to the second positioning unit 12d and the second position Po2 described later.

[0125] Meanwhile, the second positioning unit 12d positions the jig 7 at the second position Po2 shown by the dashed line in Figure 10. This second position Po2 corresponds to a position where interference between the jig 7 and the internal components of the grinding machine 1 is suppressed when the index table 3 rotates. The "internal components" referred to here include a nozzle for supplying liquid to the inside of the grinding machine 1, a sizing device for processing the workpiece W to a fixed size, and piping for supplying various liquids.

[0126] Positioning the jig 7 at the first position Po1 makes it easier to attach and detach the grinding wheel 6. Positioning the jig at the second position Po2 suppresses interference between the jig 7 and the internal machine components when the index table 3 rotates.

[0127] <Significance of jigs and guides> Conventionally, attaching or detaching the grinding wheel 6 sometimes required two people: a first worker to attach or detach the fastener 54, and a second worker to support the grinding wheel 6 from below to prevent it from falling.

[0128] However, the second worker could potentially sustain injuries such as cuts by touching the grinding wheel segment 62. Furthermore, touching the grinding wheel segment 62 could also potentially damage it.

[0129] Furthermore, depending on the layout of the grinding machine 1, it could force both the first and second workers into awkward postures, potentially leading to the grinding wheel 6 falling or causing physical harm to each worker, such as back pain.

[0130] In response to these problems, a jig has been proposed to be used as a temporary stand for the grinding wheel 6, but there remains an unresolved issue regarding position adjustment in the rotational direction.

[0131] In response to this, the inventors of the present invention have newly created the jig 7 and the guide tool 12 used in the jig 7, thereby solving both the conventional problems and previously unresolved problems.

[0132] In other words, the first jig section 8 on which the grinding wheel 6 is mounted is allowed to rotate relative to the second jig section 9 by the rotation mechanism 10 illustrated in Figure 5. By rotating the first jig section 8, the position of the grinding wheel 6 can be adjusted via the first jig section 8. As a result, the grinding wheel 6 can be positioned more appropriately without increasing physical load or damaging the grinding wheel segment 62.

[0133] Furthermore, as illustrated in Figure 5, the first jig portion 8 according to the embodiment is supported by the second jig portion 9 via a plurality of rotating members 10a arranged in the circumferential direction. By suppressing the contact area between the first jig portion 8 and the second jig portion 9, friction between the first jig portion 8 and the second jig portion 9 can be suppressed. This allows the first jig portion 8 to rotate smoothly.

[0134] Furthermore, by making the first jig portion 8 of the first and second jig portions 8 and 9 the target of rotation, it is possible to rotate only the first jig portion 8 while maintaining the support of the second jig portion 9 by the index table 3. Maintaining the support of the second jig portion 9 suppresses misalignment of the second jig portion 9 with respect to the spindle 53.

[0135] Furthermore, by supporting the first jig part 8 from below with the second jig part 9, a worker to support the first jig part 8 from below is eliminated. As a result, even with just one worker, the grinding wheel 6 can be easily replaced without forcing the worker into an awkward position.

[0136] Furthermore, as illustrated in Figure 7, by interposing an elastic mechanism 93 between the upper member 91 and the lower member 92 in the second jig section 9, the load received from the spindle 53 and the grinding wheel 6 can be mitigated. On the other hand, simply interposing the elastic mechanism 93 may cause the upper member 91 to tilt relative to the lower member 92. This tilt of the upper member 91 may lead to a tilt of the first jig section 8 located above it, and consequently, misalignment of the grinding wheel 6.

[0137] Therefore, by providing a horizontal adjustment member 94a as illustrated in Figure 7, the height of each part in the circumferential direction can be adjusted individually. This suppresses the tilt of the upper member 91 and the first jig part 8, and consequently, the misalignment of the grinding wheel 6.

[0138] Furthermore, as illustrated in Figure 5, the center position A4 of the grinding wheel 6 can be aligned by providing a first alignment section 81 on the first jig section 8. In addition, by providing a notch 82 that is a cutout of the first alignment section 81, the operator's hand H can be easily inserted and removed when placing the grinding wheel 6 on the first alignment section 81 or lifting the grinding wheel 6 from the first alignment section 81. This reduces the burden on the operator without compromising the alignment of the grinding wheel 6.

[0139] Furthermore, by making the first jig portion 8 detachable from the second jig portion 9, the first jig portion 8 having a first alignment portion 81 corresponding to the type of grinding wheel 6 can be used. This allows the same second jig portion 9 to be used regardless of the type of grinding wheel 6, thereby reducing manufacturing costs.

[0140] Furthermore, by making the first alignment portion 81, as illustrated in Figure 5, etc., out of resin, it is possible to suppress injuries to the worker and damage to the grinding wheel 6 when the first alignment portion 81 comes into contact with the grinding wheel 6.

[0141] Furthermore, as illustrated in Figure 10, the jig 7 can be positioned at the first position Po1 simply by sliding it along the guide 12, without having to lift the jig 7 each time. This makes it possible to reduce physical strain while simultaneously adjusting the position of the grinding wheel 6.

[0142] <Other Embodiments> In the above embodiment, a grinding machine 1 equipped with an index table 3 as a base was exemplified, but the present disclosure is not limited to such a configuration. The jig 7 according to the present disclosure is applicable to a grinding machine 1 configured to move the chuck in a straight line.

[0143] Furthermore, in the above embodiment, the rotating mechanism 10 was located on the upper surface 9a of the second jig portion 9, but this disclosure is not limited to such an arrangement. The rotating mechanism 10 may also be located on the lower surface 8b of the first jig portion 8.

[0144] Furthermore, although an elastic mechanism 93 was interposed between the upper member 91 and the lower member 92 in the above embodiment, the present disclosure is not limited to such a configuration. Instead of interposing the elastic mechanism 93, or in addition to interposing the elastic mechanism 93, part or all of the first jig portion 8 may be made of an elastic material, or part or all of the upper member 91 or the lower member 92 may be made of an elastic material.

[0145] Figure 11 is a longitudinal cross-sectional view illustrating a modified jig 7'. This jig 7' is substantially the same as the jig 7 according to the above embodiment, except for the configuration of the first jig section 8. The modified first jig section 8' is substantially the same as the first jig section 8 according to the above embodiment, except for the presence or absence of the cover 86. By providing the cover 86 on the first jig section 8', contact between the worker's hand and the grinding wheel segment 62 can be prevented more reliably. [Explanation of Symbols]

[0146] 1. Vertical surface grinding machine 3. Index table (base) 31 Rotating Table 31a Top surface (top surface of the base) 32 Chuck 53 Spindles 531 Wheel mount (lower end of spindle) 6. Grinding Wheel 7. Jig 8. First Jig Section 8b Lower surface (lower surface of the first jig part) 81 First alignment section (alignment section) 82 Notch 84 Second alignment section 9. Second Jig Section 9a Top surface (top surface of the second jig) 91 Upper member 92 Lower part 93 Elastic Mechanism 93a Elastic member 94 Horizontal adjustment mechanism 94a Horizontal adjustment member 10 Rotation mechanism 10a Rotating member 12 Guide Tools 12a Long section 12b Information section 12c First positioning section (positioning section) 12d Second positioning section A1 First rotation axis A2 2nd rotation axis A3 Third rotation axis A4 Fourth rotation axis (center position of the grinding wheel) Ac central axis Double job Pо1 1st position Pо2 2nd position

Claims

1. A vertical surface grinding machine comprising a base portion having a chuck on which a workpiece is mounted, a spindle that moves vertically toward and away from the base portion and rotates around a rotation axis extending in the vertical direction, and an annular grinding wheel that is detachably attached from below to the lower end of the spindle, wherein a jig is used for attaching and detaching the grinding wheel to the spindle, A first jig portion that supports the grinding wheel from below, A second jig portion is located below the first jig portion and is supported by the base portion, The device comprises a rotation mechanism interposed between the first jig portion and the second jig portion, which allows the first jig portion to rotate relative to the second jig portion around a central axis extending in the vertical direction, A jig characterized by the following features.

2. In the jig described in claim 1, The rotation mechanism is positioned on the upper surface of the second jig portion or on the lower surface of the first jig portion. The rotation mechanism is composed of a plurality of rotating members arranged in a line along the circumferential direction about the central axis, each of which allows the first jig portion to rotate relative to the second jig portion. The first jig portion is supported by the second jig portion via the plurality of rotating members. A jig characterized by the following features.

3. In the jig described in claim 1, The second jig section is, The upper member located below the first jig portion, A lower member located below the upper member and supported by the base portion, An elastic mechanism interposed between the upper member and the lower member, which expands and contracts in the vertical direction, thereby exerting an elastic force in a direction that separates the lower member and the upper member, A jig characterized by the following features.

4. In the jig described in claim 3, The second jig portion is arranged along the circumferential direction around the central axis and has a plurality of horizontal adjustment members, each for adjusting the distance between the lower member and the upper member. A jig characterized by the following features.

5. In the jig described in claim 1, The upper surface of the first jig portion is provided with an alignment portion that fits onto the lower surface of the grinding wheel, thereby aligning the center position of the grinding wheel with respect to the first jig portion. A jig characterized by the following features.

6. In the jig described in claim 5, The first jig portion has a notch portion in which a part of the circumferential direction around the central axis is cut out, including the alignment portion, from the outside to the inside in the radial direction perpendicular to the central axis. A jig characterized by the following features.

7. In the jig described in claim 5, The first jig portion is configured to be detachably attached to the second jig portion. A jig characterized by the following features.

8. In the jig described in claim 5, Of the first jig portion, at least the alignment portion is made of resin. A jig characterized by the following features.

9. A guide used in a jig according to any one of claims 1 to 8, The base portion is composed of an index table that rotates around a second rotation axis extending in the vertical direction, thereby rotating the chuck around the second rotation axis. A long portion fixed to the index table and extending parallel to the radial direction perpendicular to the second rotation axis, A guide portion that contacts the outer surface of the second jig portion and guides the sliding of the jig along the elongated portion, A positioning unit for positioning the jig which slides along the guide portion, Equipped with, The positioning unit positions the jig at a first position where the rotation axis of the spindle and the central axis of the jig coincide. A guide device characterized by the following features.

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