Dilution device and particle size measurement system using the same

Abstract

The present invention provides a dilution device that can easily dilute a measurement sample to an extremely high ratio. [Solution] The dilution apparatus (100) of the present invention is A first container (11) is configured to receive liquid from a stock source (20) and a first source (31) of a diluent to obtain a first diluent, and to transport the first diluent, and A second container (12) can receive the first diluent from the first container (11) and the liquid from the second supply source (32) of the diluent medium to obtain a second diluent. It is equipped with, The stock solution supply source (20) is configured to supply raw materials in a fixed quantity within the range of 1 ml to 100 ml.

Description

Technical Field

[0001] The present invention relates to a dilution device and a particle size measurement system using the same, particularly a dilution device for diluting to a measurable state for measuring particle size in a liquid and a particle size measurement system using the same.

Background Art

[0002] Generally, when confirming the properties, quality, etc. during the development or production of powder products, particularly slurry products in which powder is dispersed in a liquid, physical quantities related to sample particles such as the particle size distribution of the powder, particularly the slurry, are measured. For example, in the measurement of particle size distribution, a laser scattering / diffraction method or the like is used.

[0003] In the laser scattering / diffraction method, parallel light rays such as laser light are irradiated onto sample particles, and the particle size distribution is calculated by measuring and analyzing the pattern of the light diffracted and scattered by the sample particles.

[0004] In such a particle size measurement device of this type, it is common to dilute the dispersion containing sample particles for measurement.

[0005] Patent Document 1 discloses a particle size measurement system including such a dilution device.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] In recent years, semiconductor miniaturization has progressed to an extreme level, and the quality of semiconductor polishing slurries containing abrasive particles also needs to be controlled with extremely high precision. Specifically, even the number of nanoscale abrasive particles contained in the polishing slurry needs to be controlled. This is especially crucial for quality control of the slurry during manufacturing.

[0008] Therefore, an extremely high level of accuracy is required for particle size measurement, and the dilution of the polishing slurry must be performed with a very high dilution ratio and high reproducibility.

[0009] Furthermore, when the liquid containing particles has a very high viscosity, or when performing particle size measurement using the Single Particle Optical Sensing (SPOS) method or the laser scattering / diffraction method, it is necessary to dilute the liquid to an extremely high dilution ratio before performing the particle size measurement.

[0010] Therefore, the present invention aims to provide a dilution device that can easily and reproducibly dilute a measurement sample at an extremely high dilution ratio, and a particle size measurement system using the same. [Means for solving the problem]

[0011] The inventors have found that the above problems can be solved by the present invention, which includes the following embodiments.

[0012] In one embodiment, the dilution apparatus of the present invention is A first container is configured to receive liquid from a stock source and a first source of diluent to obtain a first diluent, and to transport the first diluent, and A second container that can receive the first diluent from the first container and the liquid from the second source of the diluent medium to obtain the second diluent. It is equipped with, The aforementioned stock solution supply source is configured to supply raw materials in a fixed quantity within the range of 1 ml to 100 ml.

[0013] According to the dilution apparatus of the present invention, since it is configured to supply raw materials in a quantitative manner, the dilution of the measurement sample can be easily performed at an extremely high dilution ratio with good reproducibility.

[0014] In one embodiment, the dilution apparatus of the present invention is configured such that the stock solution supply source transports the stock solution by a syringe pump.

[0015] In the dilution apparatus of the present invention, transporting the stock solution using a syringe pump makes it possible to accurately measure and use minute amounts of the stock solution, which is extremely advantageous because it allows for quantitative transport of the stock solution with high reproducibility.

[0016] In one embodiment, the dilution apparatus of the present invention has a first supply source and a second supply source of the dilution medium connected to the same supply source.

[0017] In the dilution apparatus of the present invention, supplying the dilution medium from the same source is advantageous because it allows for a simpler configuration of the apparatus.

[0018] In one embodiment, the dilution apparatus of the present invention is configured to allow in-line mixing of the first diluent and the dilution medium from the second supply source.

[0019] When the dilution apparatus of the present invention is configured in this manner, it is preferable because dilution with the dilution medium becomes very easy.

[0020] In one embodiment, the dilution apparatus of the present invention is equipped with an ultrasonic flow meter or a thermal flow meter between the first container and the second container.

[0021] This configuration of the dilution apparatus of the present invention is preferable because it allows for the measurement of extremely small amounts without the need for a syringe pump.

[0022] In one embodiment, the dilution apparatus of the present invention is configured such that the first container and the second container can be washed with the dilution medium.

[0023] When the dilution device of the present invention is configured in this way, it becomes possible to automatically clean the dilution device, which is preferable because it greatly reduces the labor for the user.

[0024] In one embodiment, the dilution device of the present invention the second container is configured to be able to transport the second diluent, and a third container configured to be able to receive the second diluent from the second container and the liquid from the third source of the dilution medium is further provided.

[0025] According to the dilution device of this embodiment, the stock solution can be diluted in at least three steps, so that, for example, the stock solution can be reproducibly diluted at an extremely high magnification of one million times or the like. Also, when diluting a polishing slurry for semiconductors or the like, it is necessary to use ultrapure water costing several hundred yen per liter as the diluent, and even if only 1 ml of the polishing slurry is diluted 100,000 to one million times, it will cost a high amount. However, according to such a multi-stage dilution device, even if 1 ml of the polishing slurry is diluted one million times, only about 1 liter of the diluent is required, which is very advantageous.

[0026] In one embodiment, in the dilution device of the present invention, the first source, the second source, and the third source of the dilution medium are connected to the same source.

[0027] In the dilution device of the present invention, supplying the dilution medium from the same source is advantageous because the device can be simply configured.

[0028] In one embodiment, in the dilution device of the present invention, the third container is configured to be able to receive the first diluent from the first container

[0029] When the dilution device of the present invention is configured in this way, when diluting at a dilution ratio of about 10,000 times, it becomes possible to dilute without using the second container, which is advantageous.

[0030] In one embodiment, the dilution apparatus of the present invention is configured to allow in-line mixing of the second diluent and the dilution medium from the third supply source.

[0031] When the dilution apparatus of the present invention is configured in this manner, it is preferable because dilution with the dilution medium becomes very easy.

[0032] In one embodiment, the dilution apparatus of the present invention is equipped with an ultrasonic flow meter or a thermal flow meter between the second container and the third container.

[0033] This configuration of the dilution apparatus of the present invention is preferable because it allows for the measurement of extremely small amounts without the need for a syringe pump.

[0034] In one embodiment, the dilution apparatus of the present invention is configured such that the third container can be washed with the dilution medium.

[0035] When the dilution apparatus of the present invention is configured in this way, it becomes possible to clean the dilution apparatus fully automatically, which is preferable because it significantly reduces the effort required for the user.

[0036] In one embodiment, the particle size measurement system of the present invention comprises the above-described dilution device and particle size measurement device, and is configured to be able to transport a second dilution from the second container to the particle size measurement device, or to be able to transport a third dilution from the third container to the particle size measurement device.

[0037] In one embodiment, the particle size measurement system of the present invention is a particle size measurement device that uses the SPOS method or the laser scattering / diffraction method.

[0038] Particle size measurement systems are highly advantageous when used in combination with dilution devices as described above. In particular, SPOS-type or laser scattering / diffraction-type particle size measurement devices are especially advantageous when used in combination with such dilution devices, as it is important to measure at the same concentration for comparison with other measurement results.

[0039] In one embodiment, the method for producing a slurry of the present invention includes diluting the slurry using the dilution device and measuring the particle size using the particle size measuring device.

[0040] In one embodiment, the method for polishing a substrate according to the present invention includes sampling a polishing slurry used in a polishing apparatus, diluting the polishing slurry using the dilution apparatus, and measuring the particle size using the particle size measuring apparatus. [Effects of the Invention]

[0041] According to the present invention, it is possible to provide a dilution device that can easily dilute a measurement sample at an extremely high dilution ratio, and a particle size measurement system using the same. [Brief explanation of the drawing]

[0042] [Figure 1] Figure 1 schematically shows a particle size measurement system apparatus according to the first embodiment of the present invention. [Figure 2] Figure 2 schematically shows a particle size measurement system apparatus according to a second embodiment of the present invention. [Figure 3] Figure 3 schematically shows a particle size measurement system apparatus according to a third embodiment of the present invention. [Modes for carrying out the invention]

[0043] The present invention will be specifically described using the following embodiments as examples, but the present invention is not limited thereto. Unless otherwise specified, any devices, mechanisms, means, etc., described herein may be those mechanical devices, mechanisms, means, etc., that are well known to those skilled in the art. Each embodiment can be combined by those skilled in the art based on their ordinary knowledge, and any configuration not specifically mentioned for each embodiment may have the same configuration as other embodiments or a configuration suitable for that embodiment. Furthermore, any configuration not specifically mentioned in the drawings will be understood by those skilled in the art based on their ordinary knowledge.

[0044] Figure 1 schematically shows a particle size measurement system according to the first embodiment of the present invention.

[0045] The particle size measurement system of the present invention consists of a dilution device 100 and a particle size measurement device 200. Various devices, valves, pumps, regulators, flow meters, etc., are connected to a control device (PLC), allowing the dilution device 100 to be controlled automatically.

[0046] This dilution device 100 has a chemical stock supply source 20 and a deionized water (DIW) supply source 30 upstream, and also has a gas supply source 60, which is air or nitrogen. Furthermore, this dilution device 100 has a waste liquid line 70 downstream.

[0047] The dilution device 100 includes a first container 11 that can receive liquid from a stock source 20 (first supply line 41a) and a first supply line 31 of the diluting medium to obtain a first dilution, and to which a first transport line 41b for the first dilution is connected; a second container 12 that can receive liquid from a transport line 41b for the first dilution (second supply line 42a) and a second supply line 32 of the diluting medium to obtain a second dilution, and to which a second transport line 42b for the second dilution is connected; and a third container 13 that is configured to receive liquid from a second transport line 42b for the second dilution (third supply line 43a) and a third supply line 33 of the diluting medium.

[0048] This dilution device 100 can, for example, dilute the stock solution by a volume ratio of 10 times, 50 times, 100 times, 1,000 times, 10,000 times, 100,000 times, or 500,000 times or more, and may also be diluted by 5 million times or less, 3 million times or less, 1 million times or less, 500,000 times or less, or 100,000 times or less.

[0049] The capacities of the first container 11 to the third container 13 may be, for example, 10 liters or less, 5 liters or less, 3 liters or less, or 2 liters or less. Each of these containers may be equipped with a stirrer, measuring device, etc.

[0050] The stock solution supply source 20 can supply the stock solution to the first container 11 through the first supply line 41a by using a syringe pump as the first supply means 51. By using a syringe pump, the stock solution can be supplied to the first container 11 in the range of 1 ml to 50 ml, and especially in the range of 1 ml to 10 ml. Since the stock solution is delivered in such a small amount, the first supply line 41a can be made into a small-diameter tube, and by connecting a gas supply source 60, the stock solution can be pumped by gas.

[0051] In this embodiment, the first supply line 31 for the diluent is connected to the first supply line 41a for the stock solution, and the diluent is also sent to the first container 11 through the first supply line 41a. However, the first supply line 31 for the diluent may be directly connected to the first container 11.

[0052] The stock solution and diluent mixed in the first container 11 are sent to the second container 12 as the first diluent via the first transport line 41b for the first diluent. The first diluent is also preferably in the range of 1 ml to 50 ml, particularly 1 ml to 10 ml, to be diluted at a high ratio with the diluent in the second container 12. To transport such a small amount of diluent, this embodiment may include a flow meter as a second supply means 52 for supplying the first diluent to the second container 12. An ultrasonic flow meter or a thermal flow meter can be used for this purpose. These types of flow meters allow for accurate measurement of minute amounts of liquid.

[0053] Furthermore, the first diluent can be pumped from the first container 11 to the first transport line 41b by supplying gas from the gas supply source 60 to the first container 11, thereby increasing the internal pressure of the first container 11.

[0054] In the embodiment shown in Figure 1, the first diluent from the first transport line 41b can be mixed with the diluent medium in the second supply line 32 and the first in-line mixer 52a. The first diluent and the diluent medium are then transported from the first transport line 41b from the first container 11 to the second container 12 via the second supply line 42a. Naturally, the first diluent and the diluent medium can be transported to the second container 11 by separate lines. In this embodiment, the first supply line 31 and the second supply line 32 for the diluent medium are connected to the same supply source 30 and supplied from the same supply source 30, but the diluent medium may be supplied from separate supply sources, and the diluent medium may be a different type of liquid.

[0055] Furthermore, in this embodiment, the first transport line 41b from the first container 11 is connected not only to the second supply line 42a to the second container 12, but also to a bridge supply line 45 for direct supply to the third container 13. This allows the third container 13 to directly receive the first diluent prepared in the first container 11. In addition, in this embodiment, since the bridge supply line 45 is also connected to the second supply line 32 for the diluent medium, the third container 13 is also configured to directly receive the diluent medium from the second supply line 32 for the diluent medium. Moreover, the third container 13 can receive the mixture from the bridge supply line 45 after the first diluent and the second supply line 32 for the diluent medium have been mixed in the first in-line mixer 52a.

[0056] Each component of the second container 12 is the same as each component 11 of the first container 11. That is, the first diluent and diluent medium received from the second supply line 42a can be transported to the third container 13 via the second transport line 42b. Here, in the second transport line 42b, it is preferable to precisely control the flow rate using a flow meter of the third supply means 53 in order to transport a small amount of the second diluent, and an ultrasonic flow meter or a thermal flow meter can be used as the flow meter for this purpose.

[0057] The second diluent can be pumped from the second container 12 to the second transport line 42b by supplying gas from the gas supply source 60 to the second container 12, thereby increasing the internal pressure of the second container 12.

[0058] The second diluent from the second transport line 42b can be mixed with the diluent medium in the second in-line mixer 53a and the third supply line 33 for the diluent medium. The second diluent and the diluent medium are then transported from the second transport line 42b from the second container 12 to the third container 13 via the third supply line 43a. Naturally, the second diluent and the diluent medium can be transported to the third container 13 by separate lines. In this embodiment, the first supply line 31 and the second supply line 32 for the diluent medium and the third supply line 33 are connected to the same supply source 30 and supplied from the same supply source 30, but the diluent medium may be supplied from separate supply sources, and the diluent medium may be a different type of liquid.

[0059] In the third container 13, the third diluent is prepared and ready for transport to the particle size analyzer 200. Here as well, by supplying gas from the gas supply source 60 to the third transport line 43b from the third container 13, the internal pressure of the third container 13 is increased, thereby allowing the third diluent to be pumped to the third transport line 43b. The particle size analyzer 200 may also have a configuration that draws the third diluent from the third container 13.

[0060] The particle size analyzer 200 can be a commercially available liquid particle counter type particle size analyzer, such as an SPOS type, light shielding type, or laser scattering / diffraction type particle size analyzer. This commercially available particle size analyzer may also have a dilution device, and the third container 13 may be the container of the commercially available particle size analyzer. An example of a commercially available SPOS type particle size analyzer is AccuSizer (trademark, Nippon Integris LLC). Since such particle size analyzers may require dilution at extremely high ratios, it is useful to combine them with the dilution device described above.

[0061] Each line is ultimately connected to the waste liquid line 70 as appropriate, as shown in the diagram, and can be cleaned using a diluent. The liquid measured by the particle size analyzer 200 can be entirely disposed of in the waste liquid line 70.

[0062] Although not shown in the diagram, the dilution device 100 may also be equipped with containers and supply lines for supplying additives such as an antifoaming agent to remove foam generated in the container, or a contrast agent to facilitate particle size measurement with a particle size analyzer. Since such additives are used in very small quantities, they can be supplied by a syringe pump or by pressurized gas with highly controlled flow rates using an ultrasonic flow meter or thermal flow meter.

[0063] Such particle size measurement systems can be used in the production of slurries containing particles and are particularly useful for controlling the quality of slurries with extremely high precision. Examples of such slurries include polishing slurries for semiconductors, inks for inkjet printing, slurries for fuel cells, drinking water, and pharmaceuticals.

[0064] In other words, the present invention may be a method for manufacturing a slurry, and this method includes the steps of preparing a slurry and diluting the slurry using such a dilution device and measuring the particle size using a particle size measuring device such as an SPOS type. The present invention may also be a particle size measuring system for use in the manufacture of a slurry (particularly a polishing slurry for semiconductors), and this particle size measuring system may comprise such a dilution device and a particle size measuring device (particularly an SPOS type particle size measuring device). In this embodiment, the particle size measuring system is not incorporated into a polishing device.

[0065] On the other hand, in other embodiments, such a particle size measuring system may be incorporated into a polishing apparatus. In this case, the particle size measuring system samples the polishing slurry used in the polishing apparatus and dilutes the polishing slurry using such a dilution device. In this case, the polishing slurry diluted in such a dilution device can be of the same concentration as the polishing slurry used in the polishing apparatus. That is, the present invention may also be a method for polishing a substrate, and may include the steps of sampling the polishing slurry used in the polishing apparatus, diluting the sampled polishing slurry using such a dilution device, and measuring the particle size using such a particle size measuring device.

[0066] For example, the present invention may be a polishing system, which may comprise a source of polishing slurry, a polishing apparatus that performs polishing using the slurry supplied from the source, a dilution apparatus as described above for diluting the slurry supplied from the source, and a particle size measuring apparatus (particularly an SPOS type particle size measuring apparatus) for measuring the particle size of the slurry diluted by the dilution apparatus. Here, the polishing slurry used in the polishing apparatus and the polishing slurry diluted in the dilution apparatus are substantially the same concentration.

[0067] Figure 2 schematically shows a particle size measurement system according to a second embodiment of the present invention. Configurations shown in Figure 2, unless specifically mentioned, can be understood in the same way as in Figure 1, as in the first embodiment.

[0068] In this embodiment, the gas supply source 60 shown in the first embodiment is not shown, but the internal pressure can be adjusted as needed to pump the liquid.

[0069] In this embodiment as well, the particle size measurement system consists of a dilution device 100 and a particle size measurement device 200. Here too, various devices, valves, pumps, regulators, flow meters, etc., are connected to a control device not shown in the drawings, allowing the particle size measurement system to be controlled automatically.

[0070] This dilution device 100 has a stock solution supply source 20 and a dilution medium supply source 30 upstream. Furthermore, this dilution device 100 has a waste liquid line 70 downstream, and the waste liquid line 70 is directly connected from the bottom of each of the first containers 11 to the third containers 13, so that each container can be easily cleaned with the dilution medium.

[0071] This dilution device 100 also has a first container 11 which is configured to receive liquid from the stock solution supply source 20 (first supply line 41a) and the first supply line 31 of the dilution medium and is connected to the first transport line 41b for the first dilution; a second container 12 which is configured to receive liquid from the transport line 41b (second supply line 42a) for the first dilution and the second supply line 32 of the dilution medium and is connected to the second transport line 42b for the second dilution; and a third container 13 which is configured to receive liquid from the second transport line 42b (third supply line 43a) for the second dilution and the third supply line 33 of the dilution medium.

[0072] In this embodiment as well, the stock solution supply source 20 can supply the stock solution to the first container 11 through the first supply line 41a by using a syringe pump, which is the first supply means 51. The diluent supply source 30 is also connected to the syringe pump that transports the stock solution through the first washing line 30a, thereby allowing the syringe pump to be washed. In addition, in this embodiment, the diluent can be supplied directly to the first container 11 from the first supply line 31 for the diluent.

[0073] The stock solution and diluent mixed in the first container 11 are sent as the first diluent to the second container 12 via the first transport line 41b for the first diluent. The first transport line 41b is connected to the bottom of the first container 11 and can be discharged into the waste liquid line 70. The first transport line 41b for the first diluent can supply a small amount of the diluent to the second supply line 42a to the second container 12 via the second supply means 52, which is a syringe pump. Here again, the supply source 30 for the diluent is also connected to the second supply means 52 (syringe pump) that transports the first diluent via the second washing line 30b, thereby allowing the second supply means 52 (syringe pump) to be washed.

[0074] In this embodiment as well, the first transport line 41b from the first container 11 is connected not only to the second supply line 42a to the second container 12, but also to a bridge supply line 45 for direct supply to the third container 13. This configures the third container 13 to directly receive the first diluent prepared in the first container 11. In this embodiment, a liquid transfer pump, which is a bridge supply means 55, is connected to the bridge supply line 45, thereby enabling the first diluent to be pumped into the third container 13.

[0075] In the second container 12, the first diluent received from the second supply line 42a and the diluent medium from the second supply line 32 are mixed to prepare the second diluent, which can then be transported to the third container 13 via the second transport line 42b. Here again, the second transport line 42b is connected to the bottom of the second container 12, allowing the waste liquid after washing the second container 12 with the diluent medium to be discharged into the waste liquid line 70.

[0076] In this embodiment, a liquid transfer pump, which is a third supply means 53, is connected to the second transport line 42b of the diluent, so that the second diluent can be pumped into the third container 13. However, the diluent may also be sent from the second transport line 42b to the third container using a syringe pump, or the diluent may be pumped using pressurized gas, a pump, etc., with an ultrasonic flow meter or a thermal flow meter.

[0077] Figure 3 schematically shows a particle size measurement system according to a third embodiment of the present invention. Configurations shown in Figure 3, which are not specifically mentioned, can be understood in the same way as in Figures 1 and 2.

[0078] In this embodiment as well, the gas supply source 60 shown in the first embodiment is not shown, but the internal pressure can be adjusted as needed to pump the liquid. Here too, various devices, valves, pumps, regulators, flow meters, etc. are connected to a control device not shown in the drawings, so that the particle size measurement system can be controlled automatically.

[0079] This dilution device 100 has first containers 11 to fourth containers 14, and is capable of four-stage dilution. This dilution device 100 has a first container 11 which is configured to receive liquid from the stock source 20 (and first supply line 41a) and the first supply line 31 of the dilution medium, and to which the first transport line 41b for the first dilution is connected; a second container 12 which is configured to receive liquid from the transport line 41b (and second supply line 42a) for the first dilution and the second supply line 32 of the dilution medium, and to which the second transport line 42b for the second dilution is connected; a third container 13 which is configured to receive liquid from the second transport line 42b (and third supply line 43a) for the second dilution and the third supply line 33 of the dilution medium; and a fourth container 14 which is configured to receive liquid from the third transport line 43b for the third dilution and the fourth supply line 34 of the dilution medium.

[0080] In this embodiment, a syringe pump is used not only as the first supply means 51 for transporting the stock solution, but also as the second supply means 52 for transporting the first diluent from the first container 11 to the second container 12. Furthermore, a syringe pump is also used as the third supply means 53 for transporting the second diluent from the second container 12 to the third container 13.

[0081] Furthermore, this dilution device 100 has a waste liquid line 70 downstream, and each of the first to fourth containers 11 to 4 is directly connected to the waste liquid line 70 from the bottom, so that each container can be easily cleaned with the dilution medium.

[0082] In this embodiment as well, the stock solution and diluent mixed in the first container 11 are sent to the second container 12 as the first diluent via the first transport line 41b for the first diluent. The first transport line 41b for the first diluent can supply a small amount of the diluent to the second supply line 42a to the second container 12 via a syringe pump, which is the second supply means 52. Here again, the supply source 30 for the diluent is also connected to the second supply means 52 that transports the first diluent via the second wash line 30b, thereby allowing the second supply means 52 to be washed.

[0083] Furthermore, the second diluent mixed in the second container 12 is sent to the third container 13 via the second transport line 42b for the second diluent. The second transport line 42b for the second diluent can supply a small amount of the diluent to the third supply line 43a to the third container 13 via the third supply means 53, which is a syringe pump. Here again, the diluent medium supply source 30 is also connected to the third supply means 53 that transports the second diluent via the third washing line 30c, thereby allowing the third supply means 53 to be washed.

[0084] The first container 11 is connected not only to the second supply line 42a to the second container 12, but also to a bridge supply line 45 for direct supply to the final fourth container 14. This allows the fourth container 14 to directly receive the first diluent prepared in the first container 11. In this embodiment, a liquid transfer pump, which is a bridge supply means 55, is connected to the bridge supply line 45, enabling the first diluent to be pumped into the fourth container 14.

[0085] Furthermore, the second container 12 is connected not only to the third supply line 43a to the third container 13, but also to the second bridge supply line 46 for direct supply to the final fourth container 14. This configures the fourth container 14 to directly receive the second diluent prepared in the second container 12. In this embodiment, a liquid transfer pump, which is the second bridge supply means 56, is connected to the second bridge supply line 46, thereby enabling the second diluent to be pumped into the fourth container 14.

[0086] Transport from the third container 13 to the fourth container 14 can be controlled using a flow meter from the bottom of the third container 13 and carried out via the third transport line 43b. Transport from the fourth container 14 to the particle size measuring device 200 can be carried out via the fourth transport line 44b. [Explanation of Symbols]

[0087] 11...First container 12…Second container 13…Third container 14...Fourth container 20…Standard supply source 30…Dilution medium supply source 31...First source of diluent 32...Second source of diluent 33...Third source of diluent 41a...First supply line 41b…First transport line 42a...Second supply line 42b... Second transport line 43a... Third supply line 43b...Third transport line 45...Bridgeline 51...first supply means 52…Second supply means 52a...First inline mixer 53…Third supply means 53a... Second inline mixer 60... Gas supply source 70...Waste liquid line 100... Dilution device 200…Particle size measuring device

Claims

1. A first container is configured to receive liquid from a stock source and a first source of diluent to obtain a first diluent, and to transport the first diluent, and A second container that can receive the first diluent from the first container and the liquid from the second source of the diluent medium to obtain the second diluent. It is equipped with, The aforementioned stock solution supply source is a dilution device configured to supply raw materials in a fixed quantity within the range of 1 ml to 100 ml.

2. The dilution apparatus according to claim 1, wherein the stock solution supply source is configured to transport the stock solution by a syringe pump.

3. The dilution apparatus according to claim 2, wherein the first and second sources of the dilution medium are connected to the same source.

4. The dilution apparatus according to claim 1, wherein the first diluent and the dilution medium from the second supply source are configured to be mixable in line.

5. The dilution apparatus according to claim 1, further comprising an ultrasonic flow meter or a thermal flow meter between the first container and the second container.

6. The dilution apparatus according to claim 1, wherein the first container and the second container are configured to be washable with the dilution medium.

7. The second container is configured to transport the second diluent, and A third container configured to receive the second diluent from the second container and the liquid from the third supply source of the diluent medium. The dilution apparatus according to claim 1, further comprising:

8. The dilution apparatus according to claim 7, wherein the third container is configured to receive the first dilution from the first container.

9. The dilution apparatus according to claim 7, wherein the first supply source, second supply source, and third supply source of the dilution medium are connected to the same supply source.

10. A particle size measuring system comprising a dilution device and a particle size measuring device according to any one of claims 1 to 6, wherein the second dilution can be transported from the second container to the particle size measuring device.

11. The particle size measurement system according to claim 8, wherein the particle size measurement device is a laser scattering / diffraction type particle size measurement device.

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