Double-sided polishing device

The double-sided polishing apparatus addresses the tilting issue of guide rods by using a self-aligning mechanism in the support system, ensuring the upper platen remains horizontal, thus stabilizing the processing and improving wafer flatness.

JP2026110174APending Publication Date: 2026-07-02SPEEDFAM CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
SPEEDFAM CO LTD
Filing Date
2024-12-20
Publication Date
2026-07-02

AI Technical Summary

Technical Problem

Conventional double-sided polishing apparatuses face issues with guide rods tilting due to manufacturing distortions, leading to upper platens tilting during processing, which affects the processed shape of wafers, and require laborious and time-consuming adjustments to maintain horizontal positioning.

Method used

A double-sided polishing apparatus with a support mechanism that includes a lifting actuator, joint plate, guide rods, and a linear bush with a self-aligning mechanism, allowing vertical movement of the upper platen without tilting, by absorbing guide rod tilts through a self-aligning mechanism.

Benefits of technology

Enables easy and precise vertical lowering of the upper platen, maintaining its horizontal position during processing, thereby stabilizing the wafer shape and reducing variations in load, improving the flatness of the processed workpieces.

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Abstract

The present invention provides a double-sided polishing apparatus that allows for easy vertical lowering of the upper platen connected to the guide rod, enabling the upper platen to be kept in a horizontal position during processing. [Solution] This is a double-sided polishing device 1 that polishes both sides of a workpiece using a lower platen 11 and an upper platen 12. The support mechanism 2 includes a base portion 3 positioned above the upper platen, a lifting actuator 4 mounted on the base portion and having a lifting rod 41, a joint plate 5 fixed to the tip of the lifting rod, a housing 6 connected to the upper platen, a plurality of guide rods 7 arranged around the lifting rod with their tips fixed to the joint plate and passing through the base portion, and a linear bush 8 with a self-aligning mechanism through which one of the guide rods passes.
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