Vacuum pumps and vacuum pump systems

Abstract

To provide a vacuum pump capable of continuously obtaining the temperature of the rotor. [Solution] The vacuum pump 100 comprises a rotor 21, a shaft 20, a radial housing 15, and a thermopile sensor 41. The rotor 21 includes a plurality of rotor blades 261. The shaft 20 is fixed to the rotor 21 and is not plated. The radial housing 15 is arranged to surround the shaft 20. The thermopile sensor 41 is located in the radial housing 15 and measures the temperature of the shaft 20.

Description

Technical Field

[0001] The present invention relates to a vacuum pump and a vacuum pump system.

Background Art

[0002] A turbo molecular pump is used as a vacuum pump for ultra-high vacuum, etc. In a turbo molecular pump, since the rotor rotates at high speed, the rotor heats up and becomes high in temperature. Such high temperature may cause distortion in the rotor and lead to a decrease in the pump function. Therefore, in a turbo molecular pump, the temperature of the rotor is measured and monitored (see, for example, Patent Document 1).

[0003] In the turbo molecular pump shown in Patent Document 1, the change in inductance due to the Curie temperature of a ferromagnetic material is measured by a magnetic circuit, and the temperature of the rotor is detected based on whether or not the rotating body exceeds a predetermined temperature threshold.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] On the other hand, some users have a desire to increase the process gas flow rate only for a short time. However, if the rotational speed of the rotor is increased to increase the process gas flow rate, the rotor may heat up and exceed the above-mentioned temperature threshold.

[0006] The aforementioned temperature threshold is set with a margin, so rotor distortion does not occur during short-term increases in process gas flow rate, allowing operation. However, the configuration in Patent Document 1 only detects whether or not the temperature threshold has been exceeded. Therefore, even when operating in a way that does not cause rotor distortion by briefly exceeding the temperature threshold, the turbomolecular pump had to be stopped as soon as the temperature threshold was exceeded. Thus, in order to increase the process gas flow rate, it is necessary to continuously acquire the rotor temperature.

[0007] The present invention aims to provide a vacuum pump and a vacuum pump system capable of continuously acquiring the temperature of a rotor. [Means for solving the problem]

[0008] A vacuum pump according to one aspect of the present invention comprises a rotor, a shaft, a radial housing, and a radiation temperature sensor. The rotor includes a plurality of rotor blades. The shaft is fixed to the rotor and is not plated. The radial housing is arranged to surround the shaft. The radiation temperature sensor is located in the radial housing and measures the temperature of the shaft. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a vacuum pump and a vacuum pump system capable of continuously obtaining the temperature of the rotor. [Brief explanation of the drawing]

[0010] [Figure 1] This is a diagram showing the configuration of a vacuum pump system according to an embodiment. [Figure 2] This is a magnified view of the vicinity of the end of the shaft in Figure 1. [Figure 3] This is an enlarged view of section S in Figure 2. [Figure 4] Figure 2 is an exploded view. [Modes for carrying out the invention]

[0011] Hereinafter, the vacuum pump and vacuum pump system according to the embodiments of this disclosure will be described with reference to the drawings.

[0012] Figure 1 shows the configuration of a vacuum pump system 1 according to an embodiment. The vacuum pump system 1 of this embodiment includes a vacuum pump 100, a controller 110, and a display device 120. The vacuum pump 100 exhausts gas from the space to be exhausted. The controller 110 receives the output from a thermopile sensor 41 (described later) and determines the temperature of the rotor 21 based on the value detected by the thermopile sensor 41. The display device 120 is connected to the controller 110 and displays the temperature of the rotor 21.

[0013] The vacuum pump 100 includes a turbine section P1 and a drag pump section P2. The turbine section P1 constitutes a turbomolecular pump. The drag pump section P2 constitutes a screw-groove pump. The vacuum pump 100 is connected to an exhaust device that includes an exhaust space. Gas from the exhaust space is exhausted by the turbine section P1, then exhausted by the drag pump section P2, and then exhausted outside the vacuum pump 100.

[0014] As shown in Figure 1, the vacuum pump 100 includes a housing 2, a rotating body unit 3, a motor 4, a plurality of stator blade assemblies 5, and a stator cylindrical section 6. The housing 2 houses the rotating body unit 3, the motor 4, the plurality of stator blade assemblies 5, and the stator cylindrical section 6.

[0015] The housing 2 comprises a casing 7, a base 8, and a fixing flange 9. The housing 2 is formed of, for example, an aluminum alloy, but is not limited to this and may be formed of other metals such as iron. The casing 7 is a cylindrical member having a fixing flange 9 at one end.

[0016] The casing 7 houses a plurality of stator blade assemblies 5 and a rotating body unit 3. The casing 7 has a first end 11, a second end 12, and a side surface 13.

[0017] The first end 11 is attached to the exhaust device. The first end 11 is provided with an intake port 11a. The second end 12 is located on the axis A of the center of the rotating unit 3, opposite to the fixed flange 9. The second end 12 is connected to the base 8. The side surface 13 is provided between the first end 11 and the second end 12. A first internal space S1 is formed inside the casing 7.

[0018] The base 8 is connected to the casing 7. The base 8 has a base body 14 and a radial housing 15. The base body 14 is positioned to close the opening on the second end 12 side of the casing 7. The base body 14 houses the stator cylindrical portion 6 and the rotor cylindrical portion 23 provided on the rotating body unit 3. The base body 14 has a base end 16, a bottom surface 17, and side surfaces 18.

[0019] The base end 16 is the end of the base body 14 on the casing 7 side. The base body 14 is connected to the second end 12 of the casing 7 at the base end 16. The connection between the casing 7 and the base 8 includes the joining of separate components, as well as the connection of separate parts within a single component. The bottom surface 17 is the surface of the base body 14 opposite to the intake port 11a. The side surface 18 is provided from the outer peripheral edge of the bottom surface 17 toward the base end 16 toward the casing 7. An exhaust port 18a is formed on the side surface 18. A connector 19 for connecting to an exhaust pipe is arranged in the exhaust port 18a. A second internal space S2 is formed inside the base body 14. The second internal space S2 is in communication with the first internal space S1.

[0020] The radial housing 15 protrudes from the base body 14 along axis A to the inside of the casing 7. The radial housing 15 is roughly cylindrical. The radial housing 15 is positioned around the shaft 20 of the rotating body unit 3, which will be described later. The radial housing 15 covers the shaft 20 in the direction perpendicular to axis A. An end face 15a is positioned at the tip of the radial housing 15 (on the intake port 11a side). The end face 15a is formed perpendicular to axis A.

[0021] The fixed flange 9 is connected to the casing 7. The fixed flange 9 protrudes from the casing 7. The fixed flange 9 is fixed to the device to be exhausted by bolts. Note that "connection" shall include the joining of members that are separate from each other. Also, "connection" shall include the continuous arrangement of separate parts in an integral member.

[0022] The rotating unit 3 includes a shaft 20 and a rotor 21. The shaft 20 extends along an axis A which is the center of rotation of the rotating unit 3. In the following description, in the direction along the axis A, the direction from the casing 7 towards the base 8 is defined as downward, and the opposite direction is defined as upward.

[0023] FIG. 2 is an enlarged view near the upper end of the shaft 20. The shaft 20 is formed of, for example, chrome molybdenum steel. The shaft 20 is not subjected to plating treatment. As shown in FIGS. 1 and 2, the shaft 20 has a shaft body 31, a protruding portion 32, and a convex portion 33. The shaft body 31 is cylindrical. The shaft body 31 is inserted inside the radial housing 15. The upper part of the shaft body 31 protrudes from the radial housing 15. The protruding portion 32 is disposed at the upper end of the shaft body 31. The protruding portion 32 protrudes in a direction perpendicular to the axis A from the shaft body 31 at the upper end of the shaft body 31. The protruding portion 32 is formed over the entire circumference of the shaft body 31. The protruding portion 32 is disposed outside the radial housing 15.

[0024] The protruding portion 32 is disposed above the radial housing 15. The protruding portion 32 faces the end face 15a on the upstream side (upper side) of the exhaust of the radial housing 15. The surface 32a on the base 8 side of the protruding portion 32 faces the end face 15a. The convex portion 33 protrudes upward at the center of the upper end face of the shaft body 31.

[0025] As shown in Figure 1, the vacuum pump 100 includes a protective bearing 34 and a plurality of bearings 35A-35C. The protective bearing 34 functions as a touchdown bearing that limits radial runout on the upper side of the shaft 20. The protective bearing 34 is mounted on the radial housing 15 of the base 8. When the shaft 20 is rotating steadily, the shaft 20 and the protective bearing 34 are not in contact. When a large disturbance is applied, or when the runout of the shaft 20 increases due to acceleration or deceleration of rotation, the shaft 20 comes into contact with the inner surface of the inner ring of the protective bearing 34. The protective bearing 34 can be, for example, a ball bearing.

[0026] Multiple bearings 35A-35C rotatably support the rotating body unit 3. The multiple bearings 35A-35C are mounted on the radial housing 15 of the base 8. The multiple bearings 35A-35C include, for example, magnetic bearings. However, the multiple bearings 35A-35C may also include other types of bearings, such as ball bearings.

[0027] The rotor 21 is formed of, for example, an aluminum alloy. The surface of the rotor 21 is plated to obtain resistance to corrosive gases. The rotor 21 has rotor blades 22 and rotor cylindrical parts 23. The rotor blades 22 are connected to a shaft 20. The shaft 20 is positioned at the rotation center of the rotor blades 22. The rotor blades 22 have a fixed part 24, a rotor blade mounting part 25, and a multi-stage rotor blade assembly 26.

[0028] The fixing part 24 is disc-shaped. The fixing part 24 is fixed to the shaft body 31 of the shaft 20 by bolts 27. The fixing part 24 is positioned above the protruding part 32. As shown in Figure 2, the fixing part 24 has a through hole formed in the center along axis A, and the protruding part 33 of the shaft 20 is inserted into the through hole from below. The fixing part 24 is connected to the protruding part 32 on the exhaust upstream side.

[0029] The rotor blade mounting section 25 is positioned around the fixed section 24. The rotor blade mounting section 25 is cylindrical with axis A as its center. The end 28 of the rotor blade mounting section 25 on the base 8 side is connected to the rotor cylindrical section 23. The end 29 of the rotor blade mounting section 25 opposite to the end 28 is located above the fixed section 24.

[0030] The multi-stage rotor blade assemblies 26 are mounted on the outside of the rotor blade mounting section 25. The multi-stage rotor blade assemblies 26 are spaced apart from each other along the axis A direction. Each rotor blade assembly 26 contains multiple rotor blades 261. Although not shown in the illustration, each of the multiple rotor blades 261 extends radially from the shaft 20. In the drawing, only one of the multiple rotor blade assemblies 26 and one of the multiple rotor blades 261 are labeled with reference numerals, while the reference numerals for the other rotor blade assemblies 26 and other rotor blades 261 are omitted.

[0031] The rotor cylindrical portion 23 is connected to the end portion 28 of the rotor blade mounting portion 25. The rotor cylindrical portion 23 is located below the rotor blade portion 22. The rotor cylindrical portion 23 is cylindrical and extends in the direction along axis A. The rotor cylindrical portion 23 is located on the outer circumference of the radial housing 15, surrounding the radial housing 15.

[0032] Motor 4 rotates the rotating body unit 3. For example, a DC brushless motor is used as motor 4. Motor 4 has a motor rotor and a motor stator. For example, the motor rotor is attached to the shaft 20. The motor stator is attached to the radial housing 15 of the base 8. The motor stator is positioned opposite the motor rotor.

[0033] The multi-stage stator blade assemblies 5 are connected to the inner surface of the casing 7. The multi-stage stator blade assemblies 5 are spaced apart from each other in the direction along axis A. Each of the multi-stage stator blade assemblies 5 is positioned between the multi-stage rotor blade assemblies 26. Each stator blade assemblies 5 includes multiple stator blades 51. Although not shown in the illustration, each of the multiple stator blades 51 extends radially from the shaft 20.

[0034] The multi-stage rotor blade assembly 26 and the multi-stage stator blade assembly 5 constitute the turbine section P1 (turbomolecular pump). In the drawing, only one of the multiple stator blade assembly 5 and one of the multiple stator blades 51 are labeled with a reference numeral, while the reference numerals for the other stator blade assembly 5 and the other stator blades 51 are omitted.

[0035] The stator cylindrical portion 6 is positioned radially outward from the rotor cylindrical portion 23. The stator cylindrical portion 6 is connected to the base 8. The stator cylindrical portion 6 is positioned facing the rotor cylindrical portion 23 in the radial direction of the rotor cylindrical portion 23.

[0036] The inner circumferential surface of the stator cylindrical portion 6 is provided with helical screw grooves. The rotor cylindrical portion 23 and the stator cylindrical portion 6 constitute the drag pump portion P2 (screw groove pump). Note that the helical screw grooves may be provided on the outer circumferential surface of the rotor cylindrical portion 23 instead of the inner circumferential surface of the stator cylindrical portion 6.

[0037] Figure 3 is an enlarged view of section S in Figure 2. The vacuum pump 100 includes a thermopile sensor 41, a sensor casing 42, and a sensor cover 43. Figure 4 is a perspective view of the thermopile sensor 41, sensor casing 42, sensor cover 43, and shaft 20 disassembled from the radial housing 15.

[0038] The thermopile sensor 41 measures the temperature of the shaft 20. The thermopile sensor 41 detects infrared radiation emitted from the shaft 20 and transmits the detected value to the controller 110. The thermopile sensor 41 is located in the radial housing 15. As shown in Figures 3 and 4, a hole 15b is formed in the end face 15a of the radial housing 15, parallel to axis A. The thermopile sensor 41 is inserted into the hole 15b. The thermopile sensor 41 faces the protrusion 32 of the shaft 20 in the direction along axis A. The infrared detection surface 41a of the thermopile sensor 41 faces upward. The detection surface 41a is the surface that receives infrared radiation. The detection surface 41a faces the surface 32a of the protrusion 32 in the direction of axis A. The detection surface 41a and the end face 15a of the thermopile sensor 41 are located on approximately the same plane.

[0039] The sensor casing 42 is formed of, for example, an aluminum alloy. The sensor casing 42 is positioned to cover the thermopile sensor 41. The sensor casing 42 is positioned in the space between the surface 32a and the end face 15a of the projection 32. The sensor casing 42 is fixed to the end face 15a of the radial housing 15, for example, by bolts (not shown). A gap is provided between the sensor casing 42 and the surface 32a, and the sensor casing 42 does not contact the surface 32a. As shown in Figure 3, a through hole 44 is formed in the sensor casing 42 parallel to axis A. The through hole 44 is positioned to face the detection surface 41a of the thermopile sensor 41. The detection surface 41a and the surface 32a of the projection 32 face each other through the through hole 44. Infrared rays from the projection 32 of the shaft 20 enter the detection surface 41a through the through hole 44. As shown in Figure 3, the through-hole 44 includes a large-diameter portion 44a and a small-diameter portion 44b. The large-diameter portion 44a is the part of the through-hole 44 that faces the radial housing 15. The small-diameter portion 44b is the part of the through-hole 44 that faces the protruding portion 32 of the shaft 20. A stepped surface 44c is formed between the large-diameter portion 44a and the small-diameter portion 44b. The stepped surface 44c is arranged parallel to the end face 15a. The entire projection figure obtained by projecting the space of the small-diameter portion 44b onto the surface 32a of the protruding portion 32 along the axial direction A is included in the surface 32a. In other words, in the direction of axis A, the entire small-diameter portion 44b faces the surface 32a of the protruding portion 32. By arranging the through-hole 44 of the sensor casing 42 between the detection surface 41a and the surface 32a of the protruding portion 32 in this way, infrared rays from components other than the shaft 20 (e.g., the rotor 21) can be prevented from entering the detection surface 41a.

[0040] The sensor cover 43 is positioned within the large-diameter portion 44a of the through-hole 44. The sensor cover 43 is positioned on the stepped surface 44c. The sensor cover 43 is formed of, for example, quartz glass. The sensor cover 43 is bonded to the stepped surface 44c, for example, by adhesive. The sensor cover 43 is provided to protect the thermopile sensor 41 when using corrosive gases.

[0041] The controller 110 includes a processor and a memory device. The processor is, for example, a CPU (Central Processing Unit). Alternatively, the processor may be a different processor from the CPU. The processor performs processing for controlling the vacuum pump 100 according to the program. The memory device includes non-volatile memory such as ROM (Read Only Memory) and volatile memory such as RAM (Random Access Memory). The memory device may also include a hard disk or an auxiliary storage device such as an SSD (Solid State Drive). The memory device is an example of a non-transitory computer-readable recording medium. The memory device stores programs and data for controlling the vacuum pump 100. The memory device stores, for example, data for predetermined thresholds and conversion tables, which will be described later.

[0042] The controller 110 determines the temperature of the rotor 21 based on the value detected by the thermopile sensor 41. The controller 110 stores a conversion table for determining the temperature of the rotor 21 from the value detected by the thermopile sensor 41. Although the shaft 20 and the rotor 21 are in contact with each other, the value detected by the thermopile sensor 41 is the temperature of the shaft 20, which is made of chromium-molybdenum steel, and therefore differs from the temperature of the rotor 21, which is made of aluminum alloy. The relationship between the value detected by the thermopile sensor 41 and the temperature of the rotor 21 is determined by prior measurement and stored in the controller 110 as a conversion table. The conversion table is a table showing the rotor temperature for each detected temperature.

[0043] The controller 110 uses a stored conversion table to determine the temperature of the rotor 21 from the values ​​detected by the thermopile sensor 41. The controller 110 displays the determined temperature of the rotor 21 on the display device 120. The controller 110 continuously receives detected values ​​from the thermopile sensor 41 and continuously displays the temperature of the rotor 21 on the display device 120.

[0044] The controller 110 determines whether the average value of the rotor 21 temperature over a predetermined period, calculated based on the temperature of the shaft 20 obtained from the thermopile sensor 41, is above a predetermined threshold. For example, the controller 110 determines whether the average value over a predetermined period, such as one day or one week, is above a predetermined threshold (e.g., 120°C). If the controller 110 determines that the average value is above the predetermined threshold, it displays a warning on the display device 120 (an example of a notification device). If the controller 110 determines that the average value is above the predetermined threshold, and the vacuum pump system 1 is equipped with an audio output such as a speaker, the controller 110 may also provide an audio warning. Furthermore, if the controller 110 determines that the average value is above the predetermined threshold, it may control the current supplied to the motor 4 to stop the vacuum pump 100.

[0045] In this embodiment, by using the thermopile sensor 41, the temperature of the shaft 20 can be measured continuously, and therefore the temperature of the rotor 21, which is fixed to the shaft 20, can be measured continuously. Furthermore, when measuring the temperature of a plated rotor 21 with a thermopile sensor, the radiant heat changes due to the deterioration of the plating over time, which may prevent accurate temperature measurement. However, in this embodiment, the temperature of the rotor blades 261 is measured by measuring the temperature of the unplated shaft 20, thus enabling more accurate temperature measurement.

[0046] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the invention.

[0047] In the above embodiment, the thermopile sensor 41 detects the temperature of the protruding portion 32 of the shaft 20, but it is not limited to the protruding portion 32; it may also be the temperature of the shaft body 31, or any temperature of the shaft 20.

[0048] In the above embodiment, the infrared detection surface 41a of the thermopile sensor 41 is positioned on approximately the same plane as the end face 15a in the direction of axis A, but it may protrude into the through hole 44 of the sensor casing 42, or it may be positioned further inside the hole 15b than the end face 15a.

[0049] In the above embodiment, the controller 110 determines whether the average value of the rotor temperature over a predetermined period, which is determined based on the temperature of the shaft 20 obtained from the thermopile sensor 41, is equal to or greater than a predetermined threshold. However, it is not limited to this, and the controller may also determine whether the cumulative value of the rotor temperature over a predetermined period is equal to or greater than a predetermined threshold. If the cumulative value is equal to or greater than the predetermined threshold, the controller 110 may display a warning on the display device 120.

[0050] In the above embodiment, the controller 110 determines whether the average or cumulative value of the rotor 21 temperature is above a predetermined threshold. However, instead of converting it to the rotor 21 temperature, the controller may determine whether the average or cumulative value of the shaft 20 temperature obtained from the thermopile sensor 41 is above a predetermined threshold, and issue a warning if the average or cumulative value is above the predetermined threshold.

[0051] In the above embodiment, the rotor temperature 21 is determined from the detected temperature using a conversion table, but this is not the only method. If a relationship between the thermopile sensor 41's detected temperature and the rotor temperature 21 can be determined, the rotor temperature 21 may be determined from the detected temperature using this relationship.

[0052] In the above embodiment, the temperature of the rotor 21 is determined, but the temperature may be limited to that of the rotor blade portion 22 or the rotor blade 261 of the rotor 21. In this case, the display device 120 may display the temperature of the rotor blade portion 22 or the rotor blade 261.

[0053] In the above embodiment, the rotor 21 includes a rotor blade portion 22 and a rotor cylindrical portion 23, but the rotor 21 does not necessarily have to be provided with a rotor cylindrical portion 23.

[0054] (Appearance) Those skilled in the art will understand that the above-described exemplary embodiments are specific examples of the following embodiments.

[0055] (First Embodiment) The vacuum pump comprises a rotor, a shaft, a radial housing, and a radiation temperature sensor. The rotor includes a plurality of rotor blades. The shaft is fixed to the rotor and is not plated. The radial housing is arranged to surround the shaft. The radiation temperature sensor is located in the radial housing and measures the temperature of the shaft.

[0056] In the vacuum pump according to the first embodiment, the temperature of the shaft can be continuously measured by using a radiation temperature sensor. Therefore, the temperature of the rotor blades fixed to the shaft can be continuously measured. Furthermore, when measuring the temperature of rotor blades that have been plated for corrosion resistance with a radiation temperature sensor, the radiant heat changes due to the deterioration of the plating over time, which may prevent accurate temperature measurement. However, in this embodiment, the temperature of the rotor blades can be measured by measuring the temperature of the shaft, which has not been plated, thus enabling accurate temperature measurement without the effects of deterioration over time.

[0057] (Second Embodiment) In the vacuum pump according to the first embodiment, the shaft includes a shaft body aligned with the axis of rotation and a projection connected to the rotor on the exhaust upstream side and projecting from the shaft body in a direction perpendicular to the axis of rotation. The projection faces the exhaust upstream end face of the radial housing. A radiation temperature sensor is positioned on the end face and measures the temperature of the projection.

[0058] In the vacuum pump according to the second embodiment, the radiation temperature sensor is positioned to face a protrusion connected to the rotor on the upstream side of the exhaust. Since the protrusion is relatively close to the connection point with the rotor within the entire shaft, the temperature of the protrusion is relatively close to the temperature of the rotor. Therefore, when measuring the temperature of the protrusion and determining the temperature of the rotor based on that measurement, the temperature of the rotor can be determined more accurately.

[0059] (Third Embodiment) The vacuum pump according to the first embodiment further comprises a sensor casing fixed to the radial housing and positioned to cover the radiation temperature sensor. The sensor casing has a through hole formed therein that extends from the radiation temperature sensor toward the shaft.

[0060] In the vacuum pump according to the third embodiment, infrared rays from the shaft are absorbed by the radiation temperature sensor after passing through the through hole, while the radiation temperature sensor suppresses detection of infrared rays from components other than the shaft, such as a plated rotor, thus enabling more accurate measurement of the shaft temperature.

[0061] (Fourth embodiment) The vacuum pump according to the first embodiment further comprises a sensor cover that is placed in a through hole and covers a radiation temperature sensor.

[0062] In the vacuum pump according to the fourth embodiment, even when a corrosive gas is used as the gas for vacuuming, the provision of a sensor cover can prevent the corrosive gas from coming into contact with the radiation temperature sensor and causing damage or malfunction to the radiation temperature sensor.

[0063] (Fifth Embodiment) The vacuum pump system comprises a vacuum pump according to any of the first to fourth embodiments, a controller, and a display device. The controller determines the rotor temperature based on the shaft temperature measured by a radiation temperature sensor. The display device displays the rotor temperature.

[0064] In the vacuum pump according to the fifth embodiment, the user can continuously monitor the rotor temperature. This allows the user to increase the process gas flow rate while monitoring the rotor temperature.

[0065] (Sixth Embodiment) The vacuum pump system comprises a vacuum pump according to any of the first to fourth embodiments, a controller, and a notification device. The controller determines whether the average or cumulative value of the shaft temperature measured by a radiation thermometer or the rotor temperature determined based on the shaft temperature over a predetermined period is equal to or greater than a predetermined threshold. If the notification device determines that the average or cumulative value is equal to or greater than the predetermined threshold, it issues a warning.

[0066] In the vacuum pump according to the sixth embodiment, a warning can be issued to the user, allowing the user to temporarily increase the process gas flow rate. [Explanation of Symbols]

[0067] 1: Vacuum pump system, 2: Housing, 3: Rotating unit, 4: Motor, 5: Stator blade assembly, 6: Stator cylindrical section, 7: Casing, 8: Base, 9: Fixing flange, 11: First end, 11a: Intake port, 12: Second end, 13: Side view, 14: Base body, 15: Radial housing, 15a: End face, 15b: Hole, 16: Base end, 17: Bottom, 18: Side view, 18a: Exhaust port, 19: Connector, 20: Shaft, 21: Rotor, 22: Rotor blade section, 23: Rotor cylindrical section, 24: Fixing section, 25: Rotor blade mounting section, 26: Rotor blade Assembly, 27: Bolt, 28: End, 29: End, 31: Shaft body, 32: Protrusion, 32a: Surface, 33: Convex part, 34: Protective bearing, 35A-35C: Bearing, 41: Thermopile sensor, 41a: Detection surface, 42: Sensor casing, 43: Sensor cover, 44: Through hole, 44a: Large diameter part, 44b: Small diameter part, 44c: Stepped surface, 51: Stator blade, 100: Vacuum pump, 110: Controller, 120: Display device, 261: Rotor blade, A: Shaft, P1: Turbine section, P2: Drag pump section, S1: First internal space, S2: Second internal space

Claims

1. A rotor including multiple rotor blades, A non-plated shaft fixed to the rotor, A radial housing is arranged to surround the shaft, The radial housing is provided with a radiation temperature sensor for measuring the temperature of the shaft, Vacuum pump.

2. The aforementioned shaft is The shaft body along the axis of rotation, It includes a projection connected to the rotor on the exhaust upstream side, which protrudes from the shaft body in a direction perpendicular to the rotation axis, The aforementioned protrusion faces the exhaust upstream end face of the radial housing, The aforementioned radiation temperature sensor is positioned on the end face and measures the temperature of the protruding portion. The vacuum pump according to claim 1.

3. The radial housing is further equipped with a sensor casing fixed to it and positioned to cover the radiation temperature sensor, The sensor casing has a through hole formed therein, extending from the radiation temperature sensor to the shaft. The vacuum pump according to claim 1.

4. The sensor further comprises a sensor cover positioned in the through-hole and covering the radiation temperature sensor, The vacuum pump according to claim 3.

5. A vacuum pump according to any one of claims 1 to 4, A controller that determines the temperature of the rotor based on the temperature of the shaft measured by the radiation temperature sensor, A device comprising a display device that displays the temperature of the rotor, Vacuum pump system.

6. A vacuum pump according to any one of claims 1 to 4, A controller that determines whether the temperature of the shaft measured by the radiation temperature sensor or the average or cumulative value of the temperature of the rotor determined based on the temperature of the shaft over a predetermined period is equal to or greater than a predetermined threshold, The system includes a notification device that issues a warning when it is determined that the average value or the cumulative value is equal to or greater than the predetermined threshold, Vacuum pump system.

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