Delivery device

Abstract

The present application provides a transfer device, which includes a base, a lifting member, and a rotating member. The lifting member includes a support member and a vertical drive member used to drive the support member to perform lifting and lowering movements. The rotating member includes a rotary drive member and a loading device located above the lifting member. The rotary drive member can drive the support member and the loading device to perform synchronous movements. A rotary decoupling member is provided between the vertical drive member and the support member, thereby ensuring that the vertical drive member remains stationary while the support member rotates. In the transfer device of the present application, the rotational movement of the support member is decoupled from the vertical movement of the mover, solving problems with air passages and cable winding and twisting, improving system reliability, and extending the service life of the device. Furthermore, the support claws rotate with the loading device, which shortens the vertical movement stroke by the thickness of one loading device compared to devices that do not rotate with the loading device, solving the problem of excessively long transfer strokes and improving transfer efficiency.

Description

[Technical Field]

[0001] This application is in the field of integrated circuit manufacturing and relates to transfer devices. [Background technology]

[0002] With the increasing integration density of large-scale integrated circuit assembly devices, for example, in the fields of photolithography equipment, measurement equipment, etc., the assembly workpiece stage generally needs to be equipped with a wafer transfer function. To achieve the wafer transfer function, the equipment workpiece stage needs to be equipped with a wafer transfer device.

[0003] In conventional wafer transfer devices, the transfer jaws are generally driven vertically by a motor or air cylinder, and when the assembly workpiece stage has a degree of freedom of rotation, the entire transfer device usually rotates synchronously with the chuck, which inevitably leads to problems with the transfer device's cables and air tubes getting wrapped around them and reliability issues due to fatigue, which affect the maintenance cycle, reliability, and service life of the entire workpiece stage.

[0004] Patent CN205176483U provides a wafer transfer device, in which lifting claws are attached below a chuck and driven by the chuck to rotate synchronously and driven by multiple air cylinders to perform vertical movement, the bottom of the lifting claws is spherical, the top of the air cylinder is connected to a flat plate, which drives the lifting claws to perform vertical movement, the decoupling contact between the spherical surface and the flat surface provides motion decoupling, and the lifting claws are pulled back to their initial position by springs when descending. Due to the problem of decoupling of the air passage, the lifting claws are difficult to pass vacuum through, do not have suction function, and it is difficult to control the synchronization of the multiple air cylinders, which affects the safety of wafer support and transfer accuracy.

[0005] Patent CN103309176B provides a wafer transfer device, in which the support member and the movable member structure are fixedly connected, and the movable member structure and the stator structure of the voice coil motor are connected via a micro-ball guide rail, which realizes vertical guidance, but also limits the degree of freedom of rotation of each. Therefore, when the support member rotates synchronously with the chuck, the entire support transfer device also rotates synchronously, and the air passages and cables connected to the device also rotate accordingly, causing winding and twisting, which affects the reliability and service life of the device.

[0006] Patent CN110032044A provides a wafer transfer device, in which a lifting drive unit drives the lifting and lowering of a support, and a rotation drive unit drives the rotation of the support and simultaneously drives the rotation of the lifting drive unit, so that the entire device rotates synchronously, and the air passages and cables connected to the device also rotate accordingly, causing winding and twisting.

[0007] Therefore, a problem that those skilled in the art must solve as soon as possible is how to provide a transfer device that achieves decoupling of the vertical and rotational movements of the transfer device, prevents winding and twisting of the air tubes and cables due to rotation, and improves the reliability and service life of the entire device. Summary of the Invention [Problem to be solved by the invention]

[0008] In view of the above-mentioned drawbacks of the conventional technology, an object of the present application is to provide a transfer device that rotates synchronously with the chuck and solves the problems of the cables and air tubes of the transfer device in the conventional technology, such as winding and twisting. [Means for solving the problem]

[0009] To achieve the above and other related objects, the present application provides a transfer device, comprising: a base including a base bottom and a base sidewall, the base bottom and the base sidewall surrounding a storage space; a lifting member including a vertical driving member located at the bottom of the base and a support member located above the vertical driving member, the vertical driving member including a stator and a mover, the stator being attached to the bottom of the base, the mover being attached to the stator and capable of vertical movement relative to the stator, the support member being capable of lifting and lowering movement together with the mover, and the support member having a plurality of support claws at its upper end; a rotating member including a rotation drive member located outside the support member and a loading device located above the lifting member, the rotating member being rotatable relative to the base, the rotation drive member driving the support member and the loading device to perform synchronous rotational motion, and the support member being capable of performing lifting motion relative to the loading device; The lifting member further includes a rotary decoupling member, which is located between the vertical driving member and the support member, and the vertical driving member and the support member are rotatably connected via the rotary decoupling member, so that when the support member rotates, the vertical driving member does not rotate along with the support member.

[0010] Optionally, the rotary decoupling member comprises a double ring bearing, the double ring bearing comprising an inner bearing ring and an outer bearing ring, the inner bearing ring and the outer bearing ring being capable of relative rotational movement, the inner bearing ring being fixedly connected to the mover and the outer bearing ring being fixedly connected to the support member, or the outer bearing ring being fixedly connected to the mover and the inner bearing ring being fixedly connected to the support member.

[0011] Optionally, the rotary decoupling member includes a connecting block, a first ball, and a second ball, an upper end of the connecting block is fixedly connected to the support member, and a lower end of the connecting block and the movable member are rotatably connected via the first ball, the connecting block and the movable member have grooves on opposing surfaces parallel to the rotation axis that are fitted with the first ball, at least one of which is a ring-shaped groove, and the plurality of second balls are located between the lower surface of the support member and the upper surface of the movable member to rotatably connect the support member and the movable member, and the lower surface of the support member and the upper surface of the movable member have grooves on their respective surfaces that are fitted with the second balls, at least one of which is a ring-shaped groove.

[0012] Optionally, the transfer device further includes a rotation constraint member, one end of the rotation constraint member connected to the stator and the other end of the rotation constraint member connected to the mover, wherein the rotation constraint member limits rotation of the mover when the support member performs a rotational movement.

[0013] Optionally, the rotation constraining member includes a guide rail, the guide rail located external to the vertical drive member so as to constrain rotation of the mover, the guide rail including a guide rail fixed portion and a guide rail vertical moving portion matching the guide rail fixed portion, the guide rail fixed portion fixedly connected to the stator, and the guide rail vertical moving portion fixedly connected to the mover.

[0014] Optionally, the rotation constraining member includes a ball spline, the ball spline located within the vertical drive member to constrain rotation of the armature, the ball spline including a sleeve and a stem mating with the sleeve, the sleeve fixedly connected to the stator, and the stem fixedly connected to the armature.

[0015] Optionally, the rotating member further includes a rotating base and a top cover plate, wherein the rotating base is annularly disposed around the vertical drive member, the support member and the rotary decoupling member and connected to the mover of the rotating member, and the stator of the rotating member is connected to the base, the top cover plate is located above the rotating base and connected to the rotating base, the top cover plate has a first through-hole vertically penetrating the top cover plate, the loading device is located above the top cover plate and fixedly connected to the top cover plate, the loading device has a second through-hole vertically penetrating the loading device, the first through-hole and the second through-hole are positioned vertically corresponding to each other, and the support claws perform vertical movement within the first through-hole and the second through-hole, wherein the rotating member drives the rotation of the rotating base, thereby also driving the rotation of the top cover plate, the loading device and the support member.

[0016] Optionally, the transfer device further includes a transmission member, which is located between the support member and the rotating member, and the transmission member can drive the support member to rotate synchronously with the loading device and provide a guide for the lifting and lowering movement of the support member.

[0017] Optionally, the transmission member is located in the first through hole or the second through hole, the inner side of the transmission member is connected to the support claw, and the outer side of the transmission member is connected to the top cover plate or the loading device.

[0018] Optionally, the transfer device further includes a flexible connecting member, the flexible connecting member being disposed in the second through-hole, the outer side of the flexible connecting member being connected to the loading device, and the inner side of the flexible connecting member being connected to the transmission member, wherein the inner side of the flexible connecting member has an arch-like structure with a central portion protruding from the upper and lower portions; or the flexible connecting member being disposed in the first through-hole, the outer side of the flexible connecting member being connected to the top cover plate, and the inner side of the flexible connecting member being connected to the transmission member, wherein the inner side of the flexible connecting member has an arch-like structure with a central portion protruding from the upper and lower portions.

[0019] Optionally, the transmission member is located between the outside of the support member and the inside of the rotating base, the outside of the transmission member being connected to the inside of the rotating base and the inside of the transmission member being connected to the outside of the support member.

[0020] Optionally, the transfer device further includes a flexible connecting member, the flexible connecting member being provided between the transmission member and the rotating base, the flexible connecting member including a first part, a second part, and flexible deformation parts respectively connected to the first part and the second part, the first part being connected to the transmission member, and the second part being connected to the rotating base.

[0021] Optionally, a suction head is provided at the top end of the support claw, a first air passage is provided within the support member, one end of the first air passage extends to the suction head and the other end of the first air passage extends to the region of the rotary decoupling member, and a second air passage is provided inside the mover, one end of the second air passage extends to the region of the rotary decoupling member and communicates with the first air passage, and the other end of the second air passage is drawn out from the top of the side edge of the mover and connected to the air bleeding device.

[0022] Optionally, the rotary decoupling member is provided with a relief area, the first air passage and the second air passage communicate at the relief area and are sealed with a sealing ring, and the connection point between the first air passage and the second air passage is at the rotation axis of the support member; or The support member further includes a ring-shaped air groove provided in the relief region, the ring-shaped air groove being coaxial with the rotation axis of the support member, the first air passage and the second air passage each communicating with the ring-shaped air groove, wherein the second air passage communicates with the ring-shaped air groove and is sealed by a seal ring.

[0023] Optionally, a third air passage is provided in the region of the rotary decoupling member, the third air passage vertically penetrating the rotary decoupling member, one end of the third air passage communicating with the first air passage and sealed by a seal ring, the other end of the third air passage communicating with the second air passage and sealed by a seal ring, the third air passage overlapping the rotation axis of the support member, or the third air passage being a ring-shaped air groove coaxial with the rotation axis of the support member.

[0024] Optionally, the vertical drive member includes a voice coil motor, the voice coil motor including magnetic steel and a coil, the coil surrounding the magnetic steel, the coil constituting a stator, and the magnetic steel constituting a mover, or the magnetic steel fixes the stator and the coil constituting the mover, wherein a magnetic block is provided within the coil. [Effects of the Invention]

[0025] As described above, in the transfer device of the present application, the rotational movement of the support member and the vertical movement of the mover are decoupled, so that the air tubes and lines located in the mover section do not rotate with the support member, solving the problems of winding and twisting of the air passages and cables, improving system reliability, and extending the service life of the device. Furthermore, the support claws rotate with the loading device, and compared to devices that do not rotate with the loading device, the stroke of the vertical movement can be shortened by the thickness of one loading device, solving the problem of excessively long transfer strokes and improving transfer efficiency. [Brief explanation of the drawings]

[0026] The accompanying drawings, which form a part of this application, are used to provide a further understanding of the application, and the exemplary embodiments and their descriptions are used to explain the application and do not constitute undue limitations on the application. [Figure 1] 1 shows a schematic diagram of the structure of a transfer device provided by Example 1 of the present application. [Figure 2] 1 shows a schematic diagram of the structure of a vertical driving member in Example 1 of the present application. [Figure 3] 1 shows a schematic diagram of the structure of a first type of rotary decoupling member and its peripheral members in Example 1 of the present application. [Figure 4] 1 shows a schematic diagram of the structure of a second type of rotary decoupling member and its peripheral members in Example 1 of the present application. [Figure 5] 1 shows a schematic diagram of the structure of a first type of rotation restriction member in Example 1 of the present application. [Figure 6] 1 shows a schematic diagram of the structure of a second type of rotation restriction member and its surrounding members in Example 1 of the present application. [Figure 7] 1 is a schematic diagram showing the structure of a transmission member according to a first embodiment of the present invention; [Figure 8] FIG. 1 shows a schematic diagram of a structure in which a first air passage and a second air passage communicate with each other in a relief region in Example 1 of the present application. [Figure 9] FIG. 1 shows a schematic diagram of a structure in which a first air passage and a second air passage communicate with each other via a third air passage in a first embodiment of the present invention. [Figure 10] 1 shows a schematic diagram of the structure of a transfer device provided by Example 2 of the present application. [Figure 11] 10 is a schematic diagram of a three-dimensional structure in which a transmission member is attached to a support member in Example 2 of the present application. [Figure 12] 10 is a schematic diagram of a three-dimensional structure in which a flexible connecting member is attached to a transmission member in Example 2 of the present application. [Figure 13] 10 shows a schematic diagram of the structure of a flexible connecting member in Example 2 of the present application. DETAILED DESCRIPTION OF THE INVENTION

[0027] Hereinafter, embodiments of the present application will be described with reference to specific examples, and those skilled in the art will be able to easily understand other advantages and effects of the present application based on the contents disclosed herein. The present application may be implemented or applied through different specific embodiments, and each detail in the present specification may be modified or changed in various ways based on different perspectives and applications without departing from the spirit of the present application.

[0028] Please refer to Figures 1 to 13. The drawings provided in this embodiment only schematically illustrate the basic concept of the present application, and therefore the drawings only show components related to the present application, and are not drawn according to the number, shape, and dimensions of the components when actually implemented. The form, number, and proportion of each component when actually implemented may be changed arbitrarily, and the layout form of the components may be more complicated.

[0029] Example 1 This embodiment provides a transfer device. Referring to FIG. 1, the transfer device includes a base 1, a lifting member, and a rotating member. The base 1 includes a base bottom 100 and a base side wall 101, which enclose an accommodating space. The lifting member includes a vertical driving member 2 located on the base bottom 100 and a support member 3 located above the vertical driving member 2. The vertical driving member 2 includes a stator 201 and a moving member 202. The stator 201 is attached to the base bottom 100, and the moving member 202 is attached to the stator 201 and can move up and down relative to the stator 201. A plurality of support claws 301 are provided on the upper end of the support member 3. The rotating member includes a rotary drive member 4 located outside the support member 3 and a loading device 5 located above the lifting member, the rotary member can rotate relative to the base 1, the rotary drive member 4 drives the support member 3 and the loading device 5 to perform synchronous rotational motion, the support member 3 can perform lifting motion relative to the loading device 5, the lifting member further includes a rotary decoupling member 6, the rotary decoupling member 6 is located between the vertical drive member 2 and the support member 3, and the vertical drive member 2 and the support member 3 are rotatably connected via the rotary decoupling member 6, so that when the support member 3 performs rotational motion, the vertical drive member 2 does not perform rotational motion along with the support member 3.

[0030] For example, the base 1 is used to mount each component and serves as a protective case, and the vertical drive component 2 further includes a mounting seat 203, which is disposed between the stator 201 and the base bottom 100 and is removable from the base 1, facilitating maintenance and removal.

[0031] For example, as shown in FIG. 2 , the vertical driving member 2 includes a voice coil motor 21, which includes a magnetic steel 211 and a coil 212 surrounding the magnetic steel 211, where the magnetic steel 211 constitutes the mover 202 and the coil 212 constitutes the stator 201. By passing current through the coil 212, the same type of magnetism as the magnetic steel 211 or a different type of magnetism is generated to drive the magnetic steel 211 to move up and down, and further drive the rotary decoupling member 6 and the support member 3 to move up and down. Preferably, the voice coil motor 21 is a gravity-compensated, magnetically levitated voice coil motor. A magnetic block 213 is added between the coil 212 to achieve magnetic levitation, thereby achieving the effect of gravity compensation, making the output of the voice coil motor 21 more uniform and stabilizing the movement of the support member 3. This also reduces the output of the voice coil motor 21, reducing the operating current of the voice coil motor 21 and thereby reducing the amount of heat generated. A backing iron 214 is provided on the outside of the coil 212. In other examples, the magnetic steel 211 may constitute the stator 201, and the coil 212 may constitute the mover 202; this is not a limitation of this embodiment. In this embodiment, the voice coil motor 21 is selected as the vertical drive member 2 to balance output power and movement accuracy. However, in other cases, a different motor, such as a planar motor or a stepping motor, may be selected as the vertical drive member; this is not a limitation of this embodiment.

[0032] For example, the rotary drive member 4 includes a torque motor, which includes a motor stator and a motor armature, the motor stator is connected to the base 1, and the motor armature is used to drive the rotation of the loading device 5 and the support member 3. In other examples, the rotary drive member 4 may be other rotary motors and is not limited to this embodiment.

[0033] For example, the loading device 5 includes a chuck for attracting a wafer.

[0034] For example, as shown in FIG. 3 , the rotary decoupling member 6 includes a double-ring bearing 601, which includes an inner bearing ring and an outer bearing ring, and the inner bearing ring and the outer bearing ring can rotate relative to each other. The inner bearing ring is fixedly connected to the mover 202, and the outer bearing ring is fixedly connected to the support member 3. The rotary decoupling member 6 includes an inner bearing mounting seat 602, an outer bearing mounting seat 603, an inner bearing retaining ring 604, and an outer bearing retaining ring 605. The inner bearing mounting seat 602 is located inside the double-ring bearing 601, and the inner bearing retaining ring 604 is used to crimp the inner bearing ring and the inner bearing mounting seat 602. The outer bearing mounting seat 603 is located outside the double-ring bearing 601, and the outer bearing retaining ring 605 is used to crimp the outer bearing ring and the outer bearing mounting seat 603. The inner bearing mounting seat 602 is connected to the mover 202, and the outer bearing mounting seat 603 is connected to the support member 3. In another example, the inner bearing ring may be fixedly connected to the support member 3, and the outer bearing ring may be fixedly connected to the mover 202, but this is not limited to this embodiment. The rotation decoupling member 6 is used to decouple the support member 3 from the vertical drive member 2 when it rotates, i.e., to ensure that the vertical drive member 2 does not rotate together with the support member 3.

[0035] For example, by not rotating the vertical drive member 2 along with the support member 3, winding and twisting of the air passage and cables can be avoided, while the driving mass of the rotary drive member 4 can be reduced and rotation accuracy can be improved.

[0036] For example, in order to simplify and compact the structure, the mover 202 of the vertical driving member 2 may be the bearing inner mounting seat 602, and similarly, the support member 3 may be the bearing outer mounting seat 603 at the same time.

[0037] For example, as shown in FIG. 4, a schematic diagram of another structure of the rotary decoupling member 6 is shown, which includes a connecting block 611, a first ball 612, and a second ball 613. The upper end of the connecting block 611 is fixedly connected to the support member 3, and the lower end of the connecting block 611 is rotatably connected to the movable member 202 via the first ball 612. The connecting block 611 and the movable member 202 each have a groove on their opposing surfaces parallel to the rotation axis that matches the first ball 612, at least one of which is a ring-shaped groove. A plurality of second balls 613 are located between the lower surface of the support member 3 and the upper surface of the movable member 202, so as to rotatably connect the support member 3 and the movable member 202. The lower surface of the support member 3 and the upper surface of the movable member 202 each have a groove that matches the second ball 613, at least one of which is a ring-shaped groove. Preferably, the inner surface of the connecting block 611 and the outer surface of the movable element 202 are arranged opposite to each other, i.e., the connecting block 611 is arranged on the outside of the movable element 202, and the grooves corresponding to the first ball 612 and the second ball 613 on the movable element 202 are both ring-shaped grooves.

[0038] As an example, the transfer device further includes a rotation restriction member 7, one end of which is connected to the stator 201 and the other end of which is connected to the mover 202, and when the support member 3 performs rotational movement, the rotation restriction member 7 restricts the rotation of the mover 202.

[0039] 5 , the rotation constraining member 7 includes a guide rail 70 located outside the vertical driving member 2 to restrict the rotation of the mover 202. The guide rail 70 includes a guide rail fixing portion 701 and a guide rail vertical movement portion 702 that is compatible with the guide rail fixing portion 701. The guide rail fixing portion 701 is fixedly connected to the stator 201, and the guide rail vertical movement portion 702 is fixedly connected to the mover 202. The rotation constraining member 7 not only restricts the rotation of the mover 202, but also provides a vertical movement guide for the mover 202. Preferably, the guide rail 70 is a cross-ball guide rail, and a cross ball is provided between the guide rail fixing portion 701 and the guide rail vertical movement portion 702 to reduce the kinetic friction force between the guide rail fixing portion 701 and the guide rail vertical movement portion 702 and improve the vertical movement accuracy.

[0040] 6 shows a schematic diagram of another structure of the rotation restriction member 7, which includes a ball spline 71 located inside the vertical drive member 2 to restrict the rotation of the mover 202. The ball spline 71 includes a sleeve 711 and a stem 712, the sleeve 711 is fixedly connected to the stator 201, and the stem 712 is fixedly connected to the mover 202. In one example, a square chute is provided within the sleeve 711, and the stem 712 is a square stem that fits within the square chute. In another example, a circular chute is provided within the sleeve 711, and the stem 712 is a circular stem that fits within the circular chute, where a stop groove is provided within the circular chute, so that the stem 712 can only move up and down vertically and cannot rotate horizontally.

[0041] For example, the rotary member further includes a rotary base 8 and a top cover plate 9, of which the rotary base 8 is annularly disposed around the vertical drive member 2, the support member 3, and the rotary decoupling member 6, and is connected to the mover of the rotary drive member 4, the stator of the rotary drive member 4 being connected to the base 1, the top cover plate 9 being located above the rotary base 8 and connected to the rotary base 8, the top cover plate 9 having a first through-hole extending vertically therethrough, the loading device 5 being located on the top cover plate 9 and fixedly connected to the top cover plate 9, the loading device 5 having a second through-hole extending vertically therethrough, the positions of the first through-hole and the second through-hole corresponding to the vertical direction, and the support claws 301 performing vertical movement within the first through-hole and the second through-hole, wherein the rotary drive member 4 drives the rotation of the rotary base 8, and also drives the rotation of the top cover plate 9, the loading device 5, and the support member 3.

[0042] As an example, the illustrated transfer device further includes a transmission member 10, which is located in the second through hole, includes a linear bearing, the inner side of which is connected to the support claw 301, and the outer side of which is connected to the loading device 5. The transmission member 10 can fix the opposing positions of the support member 3 and the loading device 5 and can well drive the support member 3 to rotate synchronously with the loading device 5, while providing a guide for the lifting and lowering movement of the support member 3. In another example, the transmission member 10 is located in the first through hole, the inner side of which is connected to the support claw 301, and the outer side of the transmission member 10 is connected to the top cover plate 9.

[0043] For example, both the rotation restriction member 7 and the transmission member 10 have a vertical guiding function, which can lead to excessive constraints, affecting the stability of movement and the service life of the structural members. The transfer device further includes a flexible connecting member 11, which, as shown in FIG. 7 , is installed in the second through-hole. The outer side of the flexible connecting member 11 is connected to the loading device 5, and the inner side of the flexible connecting member 11 is connected to the transmission member 10. Here, the inner side of the flexible connecting member 11 has an arch-shaped structure with the central portion protruding more than the upper and lower portions. If the rotation restriction member 7 and the transmission member 10 excessively constrain, the transmission member 10 can be tilted to resolve the excessive constraint. In another example, when the transmission member 10 is located in the first through-hole, the flexible connecting member 11 is installed in the first through-hole. The outer side of the flexible connecting member 11 is connected to the top cover plate 9, and the inner side of the flexible connecting member 11 is connected to the transmission member 10.

[0044] For example, as shown in FIG. 8, a suction head 302 is provided at the top end of the support claw 301, a first air passage 303 is provided within the support member 3, one end of the first air passage 303 extends to the suction head 302 and is connected to the suction head 302, and the other end of the first air passage 303 extends to the area of ​​the rotary decoupling member 6, and a second air passage 304 is provided inside the movable member 202, one end of the second air passage 304 extends to the area of ​​the rotary decoupling member 6 and is connected to the first air passage 303. Here, the rotary decoupling member 6 is provided with a relief region, the first air passage 303 and the second air passage 304 are connected to each other in the relief region and sealed by a seal ring 305, the connection point of the two air passages is on the rotation axis of the support member 3, i.e., the connection point does not change position with the rotation of the support member 3, and the other end of the second air passage 304 is drawn out from the top of the side edge of the follower 202 and connected to the air bleeding device. Of course, referring to Figure 6, the relief region may be provided with a ring-shaped air groove coaxial with the rotation axis of the support member 3, and the first air passage 303 and the second air passage 304 are connected to the ring-shaped air groove respectively, and the second air passage 304 is connected to the ring-shaped air groove and sealed by a seal ring 305. In one example, as shown in FIG. 9 , the rotary decoupling member 6 does not have a relief area, and a third air passage 306 is provided in the region of the rotary decoupling member 6, the third air passage 306 vertically penetrates the region of the rotary decoupling member 6, one end of the third air passage 306 communicates with the first air passage 303 and is sealed by a seal ring 305, the other end of the third air passage 306 communicates with the second air passage 304 and is sealed by a seal ring 305, the third air passage 306 overlaps with the rotation axis of the support member 3, or the third air passage 306 is a ring-shaped air groove coaxial with the rotation axis of the support member 3.

[0045] For example, the transfer device further includes a rotation detection member 12 located at the bottom of the rotation base 8 for detecting rotation position information.

[0046] For example, the transfer device further includes a vertical detection member 13, which includes a scale tape portion and a read head portion, the scale tape portion being fixedly connected to the mover 202, and the read head portion being fixedly connected to the same base plate as the stator 201, and is used to detect elevation position information.

[0047] For example, the transfer device further includes an elastic member 14, which is arranged vertically and has one end fixedly connected to the stator 201 and the other end fixedly connected to the mover 202. When the vertical driving member 2 loses power, the support member 3 can return to its initial position by the elastic action of the elastic member 14, and is used for returning vertical movement. The elastic member 14 includes a tension spring.

[0048] For example, the transfer device further includes an external bearing 15, which is located inside the rotating base 8, with the inner ring of the external bearing 15 fixedly connected to the base 1, and the outer ring of the external bearing 15 rotatably connected to the inside of the rotating base 8 to guide the rotation of the rotating base 8.

[0049] For example, the transfer device may further be provided with an electrical stopper member and a mechanical stopper member, which are used to provide upper and lower electrical safety limits and upper and lower mechanical safety limits, respectively, when the support member 3 performs vertical movement.

[0050] In the transfer device of this embodiment, when the rotation drive member 4 drives the rotating member to rotate around the central axis, the rotation decoupling member 6 portion (bearing outer ring) connected to the support member 3 also rotates synchronously, and the rotation restricting member 7 restricts the rotation of the mover 202 relative to the stator 201, so that the mover 202 and the rotation decoupling member 6 portion (bearing inner ring) fixedly connected to the mover 202 remain stationary, thereby realizing a decoupling between the rotational movement of the support member 3 and the vertical movement of the mover 202. This prevents the air tube and lines located around the mover 202 from rotating with the support member 3, solving the problems of winding and twisting of the air passages and cables, improving system reliability, and extending the service life of the device. Furthermore, since the support claws 301 rotate with the mounting device 5, the vertical movement stroke can be shortened by the thickness of one mounting device 5 compared to devices that do not rotate with the mounting device 5, solving the problem of excessively long transfer strokes and improving transfer efficiency.

[0051] Example 2 This embodiment provides a transfer device. Refer to FIG. 10 . The main difference between the transfer device of this embodiment and that of the first embodiment is that the transmission member 10 is located between the outside of the support member 3 and the inside of the rotating base 8, and the outside of the transmission member 10 is connected to the inside of the rotating base 8, and the inside of the transmission member 10 is connected to the outside of the support member 3.

[0052] For example, the transmission member 10 may include a linear bearing or a guide rail slider, and as shown in FIG. 11 , in this embodiment, the transmission member 10 uses a guide rail slider, with the chute fixed part fixedly connected to the rotary base 8 and the slider moving part fixedly connected to the support member 3. The transmission member 10 provides a guide for the vertical movement of the support member 3, and also fixes the relative position of the support member 3 and the loading device 5. When the rotating member is rotated by the rotary driving member 4, the transmission member 10 can better drive the synchronous rotation of the support member 3 and the loading device 5.

[0053] For example, the flexible connecting member 11 of this embodiment is provided between the transmission member 10 and the rotating base 8. As shown in FIG. 12, a schematic diagram of the structure of the flexible connecting member 11 attached to the transmission member 10 is shown. As shown in FIG. 13, a schematic diagram of the structure of the flexible connecting member 11 is shown. The flexible connecting member 11 includes a first part 1101, a second part 1102, and a flexible deformation part 1103 connected to the first part 1101 and the second part 1102, respectively. The first part 1101 includes a vertical support plate and a horizontal support plate located at the top end of the vertical support plate and protruding from the vertical support plate along one side away from the transmission member 10. The vertical support plate has a mounting hole for connecting to the transmission member 10. The second part 110 2 includes a "T"-shaped horizontal plate, the "T"-shaped horizontal plate having an attachment hole for connection to the rotating base 8, the horizontal support plate of the first part 1101 is parallel to the "T"-shaped horizontal plate of the second part 1102, the flexible deformation portion 1103 has an "hourglass" shape with cross sections at the upper and lower ends larger than that of the middle part, the flexible deformation portion 1103 is located between the horizontal support plate of the first part 1101 and the "T"-shaped horizontal plate of the second part 1102, and both ends are connected to the horizontal support plate of the first part 1101 and the "T"-shaped horizontal plate of the second part 1102, respectively, so that when the rotation restriction member 7 and the transmission member 10 are excessively restricted, the flexible deformation portion 1103 of the flexible connecting member 11 can deform to resolve the excessive restriction.

[0054] For example, the external bearing 15 is located outside the rotating base 8, the outer ring of the external bearing 15 is fixedly connected to the base 1, and the inner ring of the external bearing 15 is rotatably connected to the outside of the rotating base 8 to guide the rotation of the rotating base 8.

[0055] In short, in the transfer device of the present application, the rotational movement of the support member and the vertical movement of the mover are decoupled, so that the air tubes and lines located in the mover part do not rotate with the support member, solving the problems of winding and twisting of the air passages and cables, improving system reliability, and extending the service life of the device.Furthermore, compared to devices in which the support claws rotate with the loading device and do not rotate with the loading device, the vertical movement stroke can be shortened by the thickness of one loading device, solving the problem of excessively long transfer strokes and improving transfer efficiency.Therefore, the present application effectively overcomes various shortcomings in the prior art and has great industrial value.

[0056] The above examples are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Those skilled in the art may modify or change the above examples without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and scope of the present application should still be covered by the claims of the present application.

[0057] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims priority to a Chinese patent application filed with the State Intellectual Property Office of the People's Republic of China on December 27, 2022, bearing application number 202211679474.4 and entitled "Delivery Device." [Explanation of symbols]

[0058] 1...base, 100...base bottom, 101...base side wall, 2...vertical driving member, 201...stator, 202...mover, 203...mounting seat, 21...voice coil motor, 211...magnetic steel, 212...coil, 213...magnetic block, 214...backing iron, 3...support member, 301...support claw, 302...suction head, 303...first air passage, 304...second air passage, 305...seal ring, 306...third air passage, 4...rotation drive member, 5...loading device, 6...rotary decoupling member, 601...double ring bearing, 602...bearing inner mounting seat, 603...bearing outer mounting seat, 604...bearing inner retaining ring, 605...bearing outer retaining ring, 611...connection block, 612...first ball, 613...second ball, 7...Rotation restriction member, 70...Guide rail, 701...Guide rail fixing portion, 702...Guide rail vertical movement portion, 71...Ball spline, 711...Sleeve, 712...Stem, 8...rotating base, 9...top cover plate, 10...transmission member, 11...flexible connecting member, 1101...first part, 1102...second part, 1103...flexible deformation part, 12... rotation detection member, 13... vertical detection member, 14... elastic member, 15... external bearing

Claims

1. A delivery device, A base (1) including a base bottom (100) and a base side wall (101), the base bottom (100) and the base side wall (101) surrounding a storage space; a lifting member including a vertical driving member (2) located on the base bottom (100) and a support member (3) located above the vertical driving member (2), wherein the vertical driving member (2) includes a stator (201) and a mover (202), the stator (201) is attached to the base bottom (100), the mover (202) is attached to the stator (201) and can move vertically relative to the stator (201), the support member (3) can move up and down together with the mover (202), and a plurality of support claws (301) are provided on the upper end of the support member (3); a rotating member including a rotation drive member (4) located outside the support member (3) and a loading device (5) located above the lifting member, wherein the rotating member can rotate relative to the base (1), the rotation drive member (4) drives the support member (3) and the loading device (5) to perform synchronous rotational motion, and the support member (3) can perform lifting motion relative to the loading device (5); The lifting member further includes a rotary decoupling member (6), which is located between the vertical driving member (2) and the support member (3), and the vertical driving member (2) and the support member (3) are rotatably connected via the rotary decoupling member (6), so that when the support member (3) rotates, the vertical driving member (2) does not rotate along with the support member (3). A transfer device characterized by:

2. The rotary decoupling member (6) includes a double ring bearing (601), The double ring bearing (601) includes an inner ring and an outer ring, and the inner ring and the outer ring can rotate relative to each other; the inner bearing ring is fixedly connected to the armature (202) and the outer bearing ring is fixedly connected to the support member (3), or 2. The transfer device according to claim 1, wherein the outer bearing ring is fixedly connected to the armature (202) and the inner bearing ring is fixedly connected to the support member (3).

3. The rotary decoupling member (6) includes a connection block (611), a first ball (612), and a second ball (613), the upper end of the connection block (611) is fixedly connected to the support member (3), the lower end of the connection block (611) is rotatably connected to the movable element (202) via the first ball (612), and the connection block (611) and the movable element (202) have grooves on their opposing surfaces parallel to the rotation axis that fit the first ball (612), 2. The transferring device according to claim 1, wherein at least one of the grooves is a ring-shaped groove, and the plurality of second balls (613) are located between the lower surface of the support member (3) and the upper surface of the mover (202) so as to rotatably connect the support member (3) and the mover (202), and the lower surface of the support member (3) and the upper surface of the mover (202) are each provided with grooves that fit the second balls (613), and at least one of the grooves is a ring-shaped groove.

4. 2. The transfer device according to claim 1, further comprising a rotation restriction member (7), one end of which is connected to the stator (201) and the other end of which is connected to the mover (202), wherein the rotation restriction member (7) restricts the rotation of the mover (202) when the support member (3) performs a rotational movement.

5. 5. The transfer device according to claim 4, wherein the rotation restriction member (7) includes a guide rail (70), the guide rail (70) is located outside the vertical drive member (2) so as to restrict the rotation of the mover (202), the guide rail (70) includes a guide rail fixed portion (701) and a guide rail vertical movement portion (702) that fits with the guide rail fixed portion (701), the guide rail fixed portion (701) is fixedly connected to the stator (201), and the guide rail vertical movement portion (702) is fixedly connected to the mover (202).

6. 5. The transfer device according to claim 4, wherein the rotation restriction member (7) includes a ball spline (71), the ball spline (71) is located inside the vertical drive member (2) so as to restrict the rotation of the mover (202), the ball spline (71) includes a sleeve (711) and a stem (712) that fits with the sleeve (711), the sleeve (711) is fixedly connected to the stator (201), and the stem (712) is fixedly connected to the mover (202).

7. The rotating member further includes a rotating base (8) and a top cover plate (9), wherein the rotating base (8) is annularly disposed around the vertical driving member (2), the support member (3) and the rotary decoupling member (6) and is connected to the moving element of the rotating driving member (4), the stator of the rotating driving member (4) is connected to the base (1), the top cover plate (9) is located above the rotating base (8) and is connected to the rotating base (8), the top cover plate (9) is provided with a first through-hole that passes through the top cover plate (9) in the vertical direction, and the loading device (5) is connected to the top cover plate (9).

2. The transfer device according to claim 1, wherein the loading device is located above a cover plate and fixedly connected to the top cover plate, the loading device is provided with a second through-hole that passes through the loading device in a vertical direction, the positions of the first through-hole and the second through-hole correspond to each other in the vertical direction, the support claws perform vertical movement within the first through-hole and the second through-hole, and the rotation drive member further drives the rotation of the top cover plate, the loading device, and the support member when driving the rotation of the rotation base.

8. 8. The transfer device according to claim 7, further comprising a transmission member (10) located between the support member (3) and the rotating member, the transmission member (10) driving the support member (3) to rotate synchronously with the loading device (5) and providing a guide for the lifting and lowering movement of the support member (3).

9. 9. The transfer device according to claim 8, wherein the transmission member (10) is located in the first through hole or the second through hole, the inner side of the transmission member (10) is connected to the support claw (301), and the outer side of the transmission member (10) is connected to the top cover plate (9) or the loading device (5).

10. The transfer device further includes a flexible connecting member (11); The flexible connecting member (11) is provided in the second through-hole, and the outer side of the flexible connecting member (11) is connected to the loading device (5), and the inner side of the flexible connecting member (11) is connected to the transmission member (10), where the inner side of the flexible connecting member (11) has an arch-shaped structure with a central portion protruding from the upper and lower portions; or 10. The transfer device according to claim 9, wherein the flexible connecting member (11) is provided in the first through hole, the outer side of the flexible connecting member (11) is connected to the top cover plate (9), and the inner side of the flexible connecting member (11) is connected to the transmission member (10), and wherein the inner side of the flexible connecting member (11) has an arch-shaped structure with a central portion protruding more than the upper and lower portions.

11. 9. The transfer device according to claim 8, wherein the transmission member (10) is located between the outside of the support member (3) and the inside of the rotating base (8), the outside of the transmission member (10) is connected to the inside of the rotating base (8), and the inside of the transmission member (10) is connected to the outside of the support member (3).

12. The transfer device of claim 11, further comprising a flexible connecting member (11), the flexible connecting member (11) being located between the transmission member (10) and the rotating base (8), the flexible connecting member (11) comprising a first part (1101), a second part (1102), and a flexible deformation part (1103) connected to the first part (1101) and the second part (1102), respectively, the first part (1101) being connected to the transmission member (10), and the second part (1102) being connected to the rotating base (8).

13. 2. The transfer device according to claim 1, wherein a suction head (302) is provided at the top end of the support claw (301), a first air passage (303) is provided within the support member (3), one end of the first air passage (303) extends to the suction head (302) and the other end of the first air passage (303) extends to the rotary decoupling member (6) area, a second air passage (304) is provided inside the movable member (202), one end of the second air passage (304) extends to the rotary decoupling member (6) area and communicates with the first air passage (303), and the other end of the second air passage (304) is drawn out from the top of the side edge of the movable member (202) and connected to an air extraction device.

14. The rotary decoupling member (6) is provided with a relief area, the first air passage (303) and the second air passage (304) communicate with each other in the relief area and are sealed with a seal ring (305), and the connection point between the first air passage (303) and the second air passage (304) is on the rotation axis of the support member (3), or 14. The transfer device according to claim 13, wherein the support member (3) further includes a ring-shaped air groove provided in the relief area, the ring-shaped air groove being coaxial with a rotation axis of the support member (3), the first air passage (303) and the second air passage (304) each communicating with the ring-shaped air groove, and the second air passage (304) communicating with the ring-shaped air groove and sealed by a seal ring (305).

15. a third air passage (306) is provided in the rotary decoupling member (6) region, the third air passage (306) vertically penetrating the rotary decoupling member (6), one end of the third air passage (306) communicating with the first air passage (303) and sealed by a seal ring (305), and the other end of the third air passage (306) communicating with the second air passage (304) and sealed by a seal ring (305); 14. The transfer device according to claim 13, wherein the third air passage (306) overlaps with the rotation axis of the support member (3), or the third air passage (306) is a ring-shaped air groove coaxial with the rotation axis of the support member (3).

16. The vertical driving member (2) includes a voice coil motor (21), the voice coil motor (21) includes a magnetic steel (211) and a coil (212), the coil (212) surrounds the magnetic steel (211), and a magnetic block (213) is provided within the coil (212); The coil (212) constitutes the stator (201), and the magnetic steel (211) constitutes the mover (202), or 2. The transfer device according to claim 1, wherein the magnetic steel (211) constitutes the stator (201), and the coil (212) constitutes the mover (202).

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