Space transformer configured for use in a probe system, probe system including a space transformer, and related methods

Abstract

Disclosed herein are a space transformer configured for use in a probe system to facilitate electrical communication with a device under test (DUT), a probe system including the space transformer, and an associated method. The space transformer includes a dielectric, a plurality of first electrical contacts supported by the dielectric, and a plurality of second electrical contacts supported by the dielectric. The space transformer also includes a conductive radio frequency (RF) signal-modifying trace. The space transformer further includes an RF electrical signal-modifying structure in electrical communication with the conductive RF signal-modifying trace. The RF electrical signal-modifying structure is configured to receive the RF electrical signal from an input region of the conductive RF signal-modifying trace and emit the modified RF electrical signal to an output region of the conductive RF signal-modifying trace. The RF electrical signal-modifying structure includes a coupler.

Description

[Technical Field]

[0001] [Related Applications] This application claims priority to U.S. Patent Application No. 18 / 737,250, filed June 7, 2024, and U.S. Provisional Patent Application No. 63 / 472,444, filed June 12, 2023, the complete disclosures of which are incorporated herein by reference.

[0002] The present disclosure relates to space transformers configured for use in probe systems, probe systems including space transformers, and related methods. [Background technology]

[0003] In the electronics industry, space transformers are often used to adapt or transform multiple conductive traces from a first relative spacing or pitch spacing to a second relative spacing or pitch spacing. The first relative spacing may be associated with first hardware and / or a first manufacturing technique, and the second relative spacing may be associated with second hardware and / or a second manufacturing technique. As an example, a space transformer may be used to adapt electrical traces that may be present on a printed circuit board (i.e., first hardware and / or first manufacturing technique) to electrical traces that may be present on an integrated circuit device (i.e., second hardware and / or second manufacturing technique). Summary of the Invention [Problem to be solved by the invention]

[0004] In the context of probe systems, space transformers can be used to at least partially transition signals from relatively macroscale structures that may be at the interface with a signal generating and analyzing assembly used to generate the electrical signal to relatively microscale structures, such as contact pads, on a device under test (DUT). In some situations, it may be desirable to provide and / or receive high-frequency electrical signals, such as radio frequency (RF) and / or millimeter wave (mm-wave) electrical signals, to and / or from a DUT. However, such high-frequency electrical signals may degrade as the transmission distance increases and / or based on the electromagnetic environment in which a given high-frequency electrical signal is transmitted. This can make it difficult or even impossible to convey certain high-frequency signals from a signal generating and analyzing assembly to a DUT using conventional probe systems that include conventional space transformers. Therefore, there is a need for improved space transformers and related methods adapted for use in probe systems. [Means for solving the problem]

[0005] Disclosed herein are a space transformer configured for use in a probe system to facilitate electrical communication with a device under test (DUT), a probe system including the space transformer, and an associated method. The space transformer includes a dielectric, a plurality of first electrical contacts supported by the dielectric and arranged at at least one first pitch interval, and a plurality of second electrical contacts supported by the dielectric and arranged at at least one second pitch interval that is smaller than the at least one first pitch interval. The space transformer also includes a plurality of conductive signal-carrying traces supported by the dielectric. Each conductive signal-carrying trace extends between and electrically interconnects a corresponding first electrical contact of the plurality of first electrical contacts and a corresponding second electrical contact of the plurality of second electrical contacts. The space transformer also includes a conductive radio frequency (RF) signal-modifying trace in electrical communication with an RF signal-modifying second electrical contact of the plurality of second electrical contacts and configured to carry an RF electrical signal in electrical communication with the DUT. The space transformer further includes an RF electrical signal-modifying structure in electrical communication with the conductive RF signal-modifying traces. The RF electrical signal-modifying structure is configured to receive an RF electrical signal from an input region of the conductive RF signal-modifying traces and to emit a modified RF electrical signal at an output region of the conductive RF signal-modifying traces. The RF electrical signal-modifying structure includes a combiner configured to receive an RF electrical signal in the form of a first RF electrical signal from the DUT, to receive a second RF electrical signal from the DUT, and to combine the first RF electrical signal and the second RF electrical signal together to generate a modified RF electrical signal in the form of the first modified RF electrical signal and to generate the second modified RF electrical signal. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic diagram of an example of a space transformer that may be included in a probe head assembly of a probe system according to the present disclosure. [Figure 2] 2 is a more detailed view of an example of a portion of a probe system including a probe head assembly including a space transformer according to the present disclosure. [Figure 3] 2 is a more detailed view of an example of a portion of a probe system including a probe head assembly including a space transformer according to the present disclosure. [Figure 4] 1 is an example of a relatively low frequency directional coupler that may be utilized in a space transformer according to the present disclosure. [Figure 5] 1 is an example of a relatively high frequency directional coupler that may be utilized in a space transformer according to the present disclosure. [Figure 6] 1 is an example of a branch-line coupler that may be used in a space transformer according to the present disclosure. [Figure 7] 1 is an example of a quadrature hybrid coupler that may be utilized in a space transformer according to the present disclosure. [Figure 8] 1 is a flowchart illustrating an example method for testing a device under test (DUT) utilizing a probe system including a space transformer according to the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0007] FIGS. 1-8 illustrate examples of a probe system 10, a probe head assembly 100, a space transformer 110, and / or a method 300 according to the present disclosure. Elements that serve similar, or at least substantially similar, purposes are labeled with the same reference numerals in each of FIGS. 1-8, and these elements may not be described in greater detail herein with reference to each of FIGS. 1-8. Similarly, not all elements may be labeled in each of FIGS. 1-8, but their associated reference numerals may be used herein for consistency. Elements, components, and / or features described herein with reference to one or more of FIGS. 1-8 may be included in and / or utilized with any of FIGS. 1-8 without departing from the scope of the present disclosure. Generally, elements that are likely to be included in a particular embodiment are indicated with solid lines, and optional elements are indicated with dashed lines. However, elements indicated with solid lines may not be required for all embodiments and may be omitted in some embodiments without departing from the scope of the present disclosure.

[0008] FIG. 1 is a schematic diagram of an example of a space transformer 110 that may be included in a probe head assembly 100 of a probe system 10 according to the present disclosure, while FIGS. 2 and 3 are more detailed diagrams of an example of a portion of a probe system 10 including a probe head assembly 100 that includes a space transformer 110 according to the present disclosure.

[0009] 1 to 3, with particular reference to Fig. 1, a space transformer 110 includes a dielectric 120, a plurality of first electrical contacts 130, and a plurality of second electrical contacts 140. The first electrical contacts 130 are supported by the dielectric 120 and are arranged at at least one first pitch interval 132, and the second electrical contacts 140 are supported by the dielectric 120 and are arranged at at least one second pitch interval 142 that is different from or smaller than the at least one first pitch interval.

[0010] The space transformer 110 also includes a plurality of electrically conductive signal transmission traces 160. Each electrically conductive signal transmission trace 160, which may also be referred to herein as a transmission trace 160, extends between and electrically interconnects a corresponding first electrical contact 130 and a corresponding second electrical contact 140. In other words, the transmission traces 160 are configured to carry electrical signals through the space transformer 110 and / or between the first electrical contact 130 and the second electrical contact 140.

[0011] The space transformer 110 also includes at least one electrically conductive radio frequency (RF) signal-modifying trace 180, sometimes referred to herein as a signal-modifying trace 180, in electrical communication with the RF signal-modifying second electrical contact 144 of the second electrical contact 140 and / or in electrical communication with the device under test (DUT) 32 and configured to carry an RF or millimeter-wave (mm-wave) electrical signal.

[0012] The space transformer 110 further includes an RF electrical signal-modifying structure 190, sometimes referred to herein as a signal-modifying structure 190, configured to receive an RF electrical signal from an input region 182 of the signal-modifying trace 180 and / or to emit a modified RF electrical signal to an output region 184 of the signal-modifying trace.

[0013] 1-3 in general, and with particular reference to FIG. 1, a space transformer 110 may be utilized within the probe system 10 to facilitate electrical communication with a DUT 32, which may be formed on a substrate 30. Examples of DUTs 32 include semiconductor devices, electronic devices, and / or optoelectronic devices. Examples of substrates 30 include wafers, silicon wafers, and semiconductor wafers.

[0014] The probe system 10 includes a chuck 12 that defines a support surface 14. The support surface 14 may be configured to support a DUT 32 and / or a substrate 30. Examples of the chuck 12 include a vacuum chuck, a temperature-controlled chuck, and / or an electrically shielded chuck.

[0015] The probe system 10 also includes a probe head assembly 100 that includes a space transformer 110. The probe system 10 further includes a signal generation and analysis assembly 20, which may be configured to provide a test signal 22 to the DUT 32 via the space transformer 110 and / or receive a resulting electrical signal from the DUT via the space transformer. Examples of the signal generation and analysis assembly 20 include a power supply, a DC power supply, an AC power supply, a function generator, an RF signal generator, a signal analyzer, and / or an RF signal analyzer.

[0016] During operation of the probe system 10 and / or during testing of a DUT 32 using the probe system 10 including the space transformer 110, such as via method 300, a power signal may be provided to the DUT via the space transformer, etc. As an example, the signal generation and analysis assembly 20 may generate a test signal 22 in the form of a power signal that may be provided to the DUT 32 via the probe head assembly 100, the space transformer 110, and / or the probe 102.

[0017] The RF electrical signal may also be received by the space transformer. As an example, in response to receiving the power signal, the DUT 32 may generate an RF electrical signal 36, which may be received by the space transformer 110, such as via the RF signal modifying second signal contact 144. The RF electrical signal may then be modified within the space transformer 110 using an RF electrical signal modifying structure 190 to generate a modified RF electrical signal 194.

[0018] As an example, the input region 182 of the signal-modifying trace 180 may receive the RF electrical signal 36 from the RF signal-modifying second electrical contact 144 and provide the RF electrical signal to the signal-modifying structure 190. The signal-modifying structure 190 may receive the RF electrical signal, modify the RF electrical signal to produce a modified RF electrical signal 194, and subsequently provide the modified RF electrical signal to the output region 184 of the signal-modifying trace 180.

[0019] 1, the output region 184 can be in electrical communication with a corresponding RF signal-modifying first electrical contact 134 and / or can provide a modified RF electrical signal to the signal generating and analyzing assembly 20 via the RF signal-modifying first electrical contact. Additionally or alternatively, as shown in FIGS. 1-3, the second electrical contact 140 can include at least two RF signal-modifying second electrical contacts 144 in the form of an RF signal-receiving second electrical contact 146 and an RF signal-emitting second electrical contact 148. In such examples, the input region 182 can receive the RF electrical signal 36 from the RF signal-receiving second electrical contact 146 and can return the modified RF electrical signal to the DUT via the output region 184 and the RF signal-emitting second electrical contact 148.

[0020] Modifying the RF electrical signal 36 in the space transformer 110 to generate the modified RF electrical signal 194 and / or returning the modified RF electrical signal 194 to the DUT 32 may provide several distinct advantages over conventional probe systems that do not modify the RF electrical signal in the space transformer and / or return the modified RF electrical signal to the DUT. As one example, the distance traveled by the RF electrical signal and / or the distance traveled by the modified RF electrical signal may be shorter than in such conventional probe systems. This may enable and / or facilitate reduced performance degradation due to distance, resistance, inductance, and / or capacitance in the RF electrical signal and / or the modified RF electrical signal compared to such conventional probe systems. As another example, the probe system 10 including the space transformer 110 may enable and / or facilitate electrical testing of the DUT 32 under conditions that more closely resemble the real-world use case of the DUT 32 compared to electrical testing that can be performed by such conventional probe systems. As yet another example, selection and / or adjustment of structures included within the signal-modifying structure 190 as disclosed herein may enable and / or facilitate performance tuning of the probe system 10 to a level that may not be possible with such conventional probe systems. As another example, returning the modified RF electrical signal 194 to the DUT 32 may reduce the need for external tester resources within the probe system 10 and / or its signal generation and analysis assembly 20, thereby reducing the cost and / or complexity of the probe system.

[0021] 1-3 more generally, dielectric 120 can include and / or be any suitable body supporting first electrical contact 130, any suitable body supporting second electrical contact 140, any suitable body supporting transmission trace 160, any suitable body supporting signal-modifying trace 180, any suitable body supporting signal-modifying structure 190, any suitable body that spatially separates one or more of these structures from one or more others of these structures, and / or any suitable body that electrically insulates one or more of these structures from one or more others of these structures. By way of example, dielectric 120 can include and / or be defined by a dielectric material and / or an electrically insulating material.

[0022] It is within the scope of the present disclosure that dielectric 120 can include and / or be a rigid or at least partially rigid dielectric. Additionally or alternatively, it is also within the scope of the present disclosure that dielectric 120 can include and / or be a flexible dielectric, an at least partially flexible dielectric, an elastic dielectric, and / or an at least partially elastic dielectric. Examples of dielectric 120 include a dielectric film, a polyimide dielectric, a polyimide dielectric film, an organic dielectric, a multilayer organic (MLO) dielectric, an inorganic dielectric, a ceramic dielectric, a multilayer ceramic (MLC) dielectric, a single layer dielectric, and / or a multilayer dielectric, such as may include multiple layers 122 as shown in FIG. 1.

[0023] The first electrical contacts 130 may include any suitable structure that can be supported by the dielectric 120, any suitable structure that can define at least one first pitch interval 132, any suitable structure that can define a plurality of different first pitch intervals 132, and / or any suitable structure that can serve as an electrical interface between the space transformer 110 and one or more other components of the probe system 10. Examples of the first electrical contacts 130 include a plurality of first electrical contact pads, a plurality of first electrical contact tips, a plurality of first conductors, a plurality of first conductive regions, a plurality of first metal bodies, and / or a plurality of first metal regions.

[0024] As discussed, the first pitch interval 132 or the average of the different first pitch intervals 132 may differ from the second pitch interval 142 or the average of the different second pitch intervals 132. In particular, the first pitch interval 132 may be larger than the second pitch interval 142 and / or the second pitch interval 142 may be smaller than the first pitch interval 132. By way of example, the first pitch interval may be at least a threshold pitch interval multiple of the second pitch interval. Examples of threshold pitch interval multiples include 2, 3, 4, 5, 10, 15, 20, 30, 40, 50, 75, or 100.

[0025] Similarly, second electrical contacts 140 may include any suitable structure capable of being supported by dielectric 120, any suitable structure capable of defining at least one second pitch interval 142, any suitable structure capable of defining a plurality of different second pitch intervals 142, and / or any suitable structure capable of serving as an electrical interface between space transformer 110 and DUT 32 and / or between the space transformer and one or more other components of probe system 10. Examples of second electrical contacts 140 include a plurality of second electrical contact pads, a plurality of second electrical contact tips, a plurality of second electrical probe tips, a plurality of second conductors, a plurality of second conductive regions, a plurality of second metal bodies, and / or a plurality of second metal regions.

[0026] In some examples, the second electrical contacts 140 may be configured to contact or directly contact the DUT 32, such as by contacting the DUT contact pads 34 of the DUT 32. In such examples, the second electrical contacts 140 may be referred to herein as and / or may be the probes 102 of the probe head assembly 100. In some examples, the second electrical contacts 140 may be configured to indirectly contact the DUT 32, such as via the probes 102 in electrical communication with the second electrical contacts 140. Such a configuration may enable and / or facilitate electrical communication between the probe system 10 and the DUT 32.

[0027] Transmission traces 160 may include any suitable structure that may be supported by dielectric 120, that may extend between corresponding first and second electrical contacts, and / or that may electrically interconnect corresponding first and second electrical contacts. Examples of transmission traces 160 include metal signaling traces, aluminum signaling traces, and / or copper signaling traces.

[0028] The one or more signal carrying traces 160 may be configured to provide a power signal 166 to the DUT, such as to electrically power the DUT 32. Examples of power signals include direct current (DC) power and / or alternating current (AC) power. Additionally or alternatively, the one or more signal carrying traces 160 may be configured to provide a corresponding RF input electrical signal 162 to the DUT 32 and / or provide a corresponding RF output electrical signal 164 from the DUT to one or more other components of the probe system 10.

[0029] The signal-modifying trace 180 may include any suitable structure that can be supported by the dielectric 120, any suitable structure that can define the input region 182, any suitable structure that can define the output region 184, any suitable structure that can be in electrical communication with the RF signal-modifying first electrical contact 134, any suitable structure that can be in electrical communication with the RF signal-modifying second electrical contact 144, any suitable structure that can be in electrical communication with the RF signal-receiving second electrical contact 146, any suitable structure that can be in electrical communication with the RF signal-emitting second electrical contact 148, and / or any suitable structure that can be in electrical communication with the signal-modifying structure 190. Examples of the signal-modifying trace 180 include metal signal-modifying traces, aluminum signal-modifying traces, and / or copper signal-modifying traces. In some examples, the space transformer 110 includes one or a single signal-modifying trace 180 and a corresponding signal-modifying structure 190. However, this is not necessary in all instances, and the space transformer 110 may include multiple signal-modifying traces 180 and corresponding multiple signal-modifying structures 190 in some instances.

[0030] Signal-modifying structure 190 may include any suitable structure that may be supported by dielectric 120, any suitable structure that may be in communication with signal-modifying trace 180, any suitable structure that may be configured to receive an RF electrical signal from input region 182, any suitable structure that may be configured to generate a modified RF electrical signal, and / or any suitable structure that may be configured to output a modified RF electrical signal to output region 184. Signal-modifying structure 190 may modify the RF electrical signal and / or generate the modified RF electrical signal in any suitable manner. By way of example, the signal-modifying structure 190 may be configured to direct the RF electrical signal to the output region 184 as a modified RF electrical signal 194, to reflect the RF electrical signal to the output region as a modified RF electrical signal, to modify the frequency of the RF electrical signal to produce a modified RF electrical signal, to modify the bandwidth of the RF electrical signal to produce a modified RF electrical signal, to split the RF electrical signal to produce a modified RF electrical signal, to amplify the RF electrical signal to produce a modified RF electrical signal, to combine the RF electrical signal with another signal to produce a modified RF electrical signal, and / or to combine the RF electrical signal with another signal to produce a modified RF electrical signal.

[0031] Examples of signal-modifying structure 190 include passive RF structures, composite passive RF structures, RF attenuators, RF couplers, resistors, capacitors, inductors, and / or splitters. In some examples, signal-modifying structure 190 may be surface-mounted to dielectric 120 and / or to at least one other structure of space transformer 110, as shown in FIGS. 1 and 2. Additionally or alternatively, signal-modifying structure 190 may include and / or be embedded components that may be embedded and / or encapsulated within dielectric 120 and / or space transformer 110, such as formed within and / or by metallization layers 124 that may be formed between adjacent layers 122 of the space transformer, as shown in FIGS. 1 and 3.

[0032] 3-7 illustrate more detailed examples of signal-modifying structures 190 that may be included in and / or utilized with space transformer 110 in accordance with the present disclosure. More particularly, FIGS. 3-7 illustrate examples of signal-modifying structures 190 in the form of couplers 192 or passive combiners that may be utilized to couple two signals to one another via a coupling interaction between the two signals and / or without the use or need for other and / or external signals and / or energy sources.

[0033] 3 , the signal-modifying structure 190 may be configured to receive a first RF electrical signal 38, which is the RF electrical signal 36, from a corresponding DUT contact pad 34 of the DUT 32 via a corresponding RF signal receiving second electrical contact 146, etc., and may also be configured to receive a second RF electrical signal 40, which is the RF electrical signal 36, from a different corresponding contact pad of the DUT via another corresponding RF signal receiving second electrical contact 146, etc. The first RF electrical signal and the second RF electrical signal may be combined together within the signal-modifying structure 190 to produce a first modified RF electrical signal 196, which is the modified RF electrical signal 194 that may be returned to another corresponding contact pad 34 of the DUT via a corresponding RF signal emitting second electrical contact 148, etc., and a second modified RF electrical signal 194, which is the modified RF electrical signal 194 that may also be returned to yet another corresponding contact pad 34 of the DUT via another corresponding RF signal emitting second electrical contact 148, etc.

[0034] The coupling of the first and second RF electrical signals may be achieved in any suitable manner. By way of example, the coupling may be achieved through capacitive, inductive, and / or electric field interaction between the first and second RF electrical signals. As a more detailed example, the coupler 192 may include a first transmission line 200 configured to carry the first RF electrical signal and a second transmission line 202 configured to carry the second RF electrical signal. The first and second transmission lines may be positioned relatively close to each other and / or sufficiently close to facilitate coupling of the first and second RF electrical signals.

[0035] Figures 4 and 5 are examples of signal-modifying structures 190 in the form of directional couplers, with Figure 4 showing a relatively low-frequency directional coupler that may be used in the configuration shown in Figure 3 and Figure 5 showing a relatively high-frequency directional coupler that may be used in the configuration shown in Figure 3. The relatively high-frequency directional coupler and / or the relatively low-frequency directional coupler may be selected and / or used to provide a desired coupling frequency and / or a desired coupling efficiency. Figure 6 is an example of a signal-modifying structure 190 in the form of a branch-line coupler that may be used in the configuration shown in Figure 3. Figure 8 is an example of a signal-modifying structure 190 in the form of a quadrature hybrid coupler that may be used in the configuration shown in Figure 3.

[0036] 8 is a flowchart illustrating an example method 300 for testing a device under test (DUT) using a probe system including a space transformer according to the present disclosure. Method 300 includes providing a power signal at 310 and receiving a radio frequency (RF) electrical signal at 320. Method 300 also includes modifying the RF electrical signal at 330 and may include returning the modified RF electrical signal at 340. Examples of DUTs, probe systems, and space transformers are disclosed herein with reference to DUT 32, probe system 10, and space transformer 110, respectively.

[0037] The step of providing 310 may include providing the power signal to the DUT. This may include providing the power signal with, through, and / or utilizing a space transformer. The providing step of 310 may be performed in any suitable manner. By way of example, as described in more detail herein, the probe system may include a signal generating and analyzing assembly, and the providing step of 310 may include providing the power signal with, through, and / or utilizing a signal generating and analyzing assembly. An example signal generating and analyzing assembly is disclosed herein with reference to signal generating and analyzing assembly 20. An example power signal is disclosed herein with reference to test signal 22. By way of another example, as also described in more detail herein, the probe system may include a probe head assembly including multiple probes and a space transformer, and the providing step of 310 may include providing with, through, and / or utilizing at least one probe of the probe head assembly and / or multiple probes. An example probe head assembly and multiple probes are disclosed herein with reference to probe head assembly 100 and probe 102, respectively.

[0038] The receiving step of 320 may include receiving an RF electrical signal from the DUT. The receiving step of 320 may occur in response to the providing step of 310 and / or may occur with, through, and / or utilizing a space transformer. The receiving step of 320 may occur in any suitable manner. As an example, the receiving step of 320 may include receiving an RF electrical signal from the DUT with, through, and / or utilizing a probe head assembly and / or at least one probe of a plurality of probes. Examples of RF electrical signals are disclosed herein with reference to RF electrical signal 36.

[0039] The step of modifying the RF electrical signal of 330 may include modifying an RF electrical signal to generate and / or produce a modified RF electrical signal. This may include modifying the RF electrical signal within a space transformer and / or modifying the RF electrical signal with, through, and / or utilizing an RF electrical signal-modifying structure of the space transformer. Examples of RF electrical signal-modifying structures and modified RF electrical signals are disclosed herein with reference to RF electrical signal-modifying structure 190 and modified RF electrical signal 194, respectively.

[0040] Returning the modified RF electrical signal at 340 may include returning the modified RF electrical signal to the DUT, which may include returning the modified RF electrical signal to the DUT using, via, and / or utilizing a space transformer, a probe head assembly, and / or at least one probe of the plurality of probes.

[0041] In some examples, the RF electrical signal can include and / or be the first RF electrical signal, examples of which are disclosed herein with reference to first RF electrical signal 38, and the modified RF electrical signal can include and / or be the first modified RF electrical signal, examples of which are disclosed herein with reference to first modified RF electrical signal 196. In some such examples, the receiving step of 320 can further include receiving a second RF electrical signal from the DUT, and the modifying step of 330 can further include modifying the second RF electrical signal utilizing an RF electrical signal-modifying structure in the space transformer to generate the second modified RF electrical signal. Examples of the second RF electrical signal and the second modified RF electrical signal are disclosed herein with reference to second RF electrical signal 40 and second modified RF electrical signal 198, respectively. In some such examples, the modifying step of 330 can include mutually coupling the first RF electrical signal and the second RF electrical signal to generate and / or produce the first modified RF electrical signal and the second modified RF electrical signal. Also in some such examples, the returning step of 340 may include returning the second modified RF electrical signal to the DUT via a space transformer.

[0042] Method 300 may provide distinct advantages over conventional methods that do not modify RF electrical signals within a space transformer, do not return modified RF electrical signals to a DUT, and / or do not mutually couple first and second RF electrical signals to generate and / or produce first and second modified RF electrical signals. As one example, method 300 may enable and / or facilitate shorter transmission distances of corresponding RF electrical signals compared to conventional methods, thereby improving signal-to-noise ratios and / or enabling testing of DUTs that could not be tested or reliably tested using conventional methods. As another example, modifying RF electrical signals within a space transformer, such as by mutually coupling first and second RF electrical signals, may reduce the need for external tester resources and / or reduce the cost and / or complexity of method 300 compared to conventional methods.

[0043] As used herein, the term "and / or" between a first tangible entity and a second tangible entity means one of: (1) the first tangible entity, (2) the second tangible entity, and (3) the first tangible entity and the second tangible entity. Multiple entities listed together with "and / or" should be construed similarly, i.e., "one or more" of the entities so connected. Other entities besides those specifically identified in the "and / or" clause may optionally be present, with or without a relationship to those specifically identified entities. Thus, as a non-limiting example, a reference to "A and / or B," when used with open-ended language such as "comprising," may refer, in one embodiment, to A only (optionally including tangible entities other than B), in another embodiment to B only (optionally including tangible entities other than A), or in yet another embodiment to both A and B (optionally including other tangible entities). These entities may refer to elements, acts, structures, steps, operations, values, etc.

[0044] As used herein, the phrase "at least one" in reference to a list of one or more tangible entities should be understood to mean at least one entity selected from any one or more of the entities in the list of entities, but does not necessarily include at least one of every entity specifically listed in the list of entities, and does not exclude any combination of entities in the list of entities. This definition also allows for entities other than those specifically identified in the list of entities to which the phrase "at least one" refers, optionally present, whether or not related to the specifically identified entities. Thus, as a non-limiting example, "at least one of A and B" (or, equivalently, "at least one of A or B" or, equivalently, "at least one of A and / or B") can refer in one embodiment to at least one, e.g., optionally two or more, A (optionally including tangible entities other than B), without B; in another embodiment to at least one, e.g., optionally two or more, B (optionally including tangible entities other than A), without A; and in yet another embodiment to at least one, e.g., optionally two or more, A and at least one, e.g., optionally two or more, B (optionally including other tangible entities). In other words, the terms "at least one," "one or more," and "and / or" are open-ended expressions operating conjunctively and disjunctively. For example, the phrases "at least one of A, B, and C," "at least one of A, B, or C," "one or more of A, B, and C," "one or more of A, B, or C," and "A, B, and / or C" can each mean A alone, B alone, C alone, a combination of A and B, a combination of A and C, a combination of B and C, a combination of A, B, and C, and optionally a combination of any of the above with at least one other tangible entity.

[0045] If any patent, patent application, or other reference is incorporated by reference herein and (1) defines a term in a manner that is inconsistent with and / or (2) is otherwise inconsistent with either the non-incorporated portion of this disclosure or the other incorporated reference, then the non-incorporated portion of this disclosure will control and the term in that document or the incorporated disclosure from that document will be in effect only with respect to the reference in which the term is defined and / or the document in which the incorporated disclosure originally resided.

[0046] As used herein, the terms "adapted" and "configured" mean that an element, component, or other subject matter is designed and / or intended to perform a given function. Thus, use of the terms "adapted" and "configured" should be interpreted to mean that a given element, component, or other subject matter is specifically selected, created, implemented, utilized, programmed, and / or designed to perform that function, rather than that the given element, component, and / or other subject matter is merely "capable" of performing a given function. It is within the scope of this disclosure that elements, components, and / or other subject matter described as being adapted to perform a particular function may additionally or alternatively be described as being configured to perform that function, and vice versa.

[0047] As used herein, the phrases "for example," "as an example," and / or simply the term "example," when used with reference to one or more components, features, details, structures, embodiments, and / or methods according to the present disclosure, are intended to convey that the described components, features, details, structures, embodiments, and / or methods are exemplary, non-exclusive examples of the components, features, details, structures, embodiments, and / or methods according to the present disclosure. Thus, the described components, features, details, structures, embodiments, and / or methods are not intended to be limiting, necessary, or exclusive / exhaustive, and other components, features, details, structures, embodiments, and / or methods, including structurally and / or functionally similar and / or equivalent components, features, details, structures, embodiments, and / or methods, are also within the scope of the present disclosure.

[0048] As used herein, "at least substantially," when modifying a degree or relationship, can include not only the "substantial" degree or relationship described, but also the full range of the described degree or relationship. A substantial amount of a described degree or relationship can include at least 75% of the described degree or relationship. For example, an object at least substantially formed from a material includes an object in which at least 75% of the object is formed from that material, and also includes an object formed entirely from that material. As another example, a first length at least substantially the same length as a second length includes a first length within 75% of the second length, and also includes a first length that is the same length as the second length.

[0049] Illustrative, non-exclusive examples of space transformers, probe systems, and methods according to the present disclosure are presented in the following enumerated sections: It is within the scope of the present invention that individual steps of the methods described herein, including those listed below, may additionally or alternatively be referred to as "steps" of performing the described actions.

[0050] A1. A space transformer configured for use in a probe system to facilitate electrical communication with a device under test (DUT), a dielectric; a plurality of first electrical contacts supported by a dielectric and spaced at at least one first pitch; a plurality of second electrical contacts supported by the dielectric and arranged at at least one second pitch interval less than the at least one first pitch interval; a plurality of conductive signaling traces supported by a dielectric, each conductive signaling trace of the plurality of conductive signaling traces extending between and electrically interconnecting a corresponding one of the plurality of first electrical contacts and a corresponding second electrical contact of the plurality of second electrical contacts; a conductive radio frequency (RF) signal-modifying trace in electrical communication with the RF signal-modifying second electrical contacts of the plurality of second electrical contacts and configured to carry an RF electrical signal in electrical communication with the DUT; an RF electrical signal modifying structure in electrical communication with the conductive RF signal modifying trace and configured to receive an RF electrical signal from an input region of the conductive RF signal modifying trace and emit a modified RF electrical signal to an output region of the conductive RF signal modifying trace; A space transformer equipped with

[0051] A2. The space transformer of paragraph A1, wherein the dielectric includes or is a rigid dielectric.

[0052] A3. The space transformer according to paragraph A1 or A2, wherein the dielectric includes or is a flexible dielectric.

[0053] A4. The space transformer according to any one of A1 to A3, wherein the dielectric includes a dielectric film or is a dielectric film.

[0054] A5. The space transformer according to any one of A1 to A4, wherein the dielectric includes a polyimide dielectric or is a polyimide dielectric.

[0055] A6. The space transformer according to any one of A1 to A5, wherein the dielectric includes or is a multilayer organic (MLO) dielectric.

[0056] A7. The space transformer according to any one of A1 to A6, wherein the dielectric includes an organic dielectric or is an organic dielectric.

[0057] A8. The space transformer according to any one of A1 to A7, wherein the dielectric includes a ceramic dielectric or is a ceramic dielectric.

[0058] A9. The space transformer according to any one of A1 to A8, wherein the dielectric includes or is a multilayer ceramic (MLC) dielectric.

[0059] A10. The space transformer according to any one of paragraphs A1 to A9, wherein the dielectric includes or is a laminated dielectric.

[0060] A11. The space transformer according to any one of A1 to A10, wherein the plurality of first electrical contacts includes or is a plurality of first electrical contact pads.

[0061] A12. The space transformer according to any one of paragraphs A1 to A11, wherein the plurality of first electrical contacts includes a plurality of first electrical contact tips or is a plurality of first electrical contact tips.

[0062] A13. The space transformer according to any one of paragraphs A1 to A12, wherein the at least one first pitch interval or an average value of the plurality of different first pitch intervals is at least a threshold pitch interval multiple of the at least one second pitch interval or an average value of the plurality of different second pitch intervals, and the threshold pitch interval multiple is 2, 3, 4, 5, 10, 15, 20, 30, 40, 50, 75, or 100.

[0063] A14. The space transformer according to any one of paragraphs A1 to A13, wherein the plurality of second electrical contacts includes or is a plurality of second electrical contact pads.

[0064] A15. A space transformer according to any one of paragraphs A1 to A14, wherein the plurality of second electrical contacts includes or is a plurality of second electrical contact tips or probe tips.

[0065] A16. A space transformer according to any one of clauses A1 to A15, wherein the plurality of second electrical contacts are configured to directly contact the DUT to facilitate electrical conduction between the probe system and the DUT.

[0066] A17. The space transformer according to any one of paragraphs A1 to A16, wherein the plurality of conductive signal carrying traces includes or is a plurality of metallic signal carrying traces.

[0067] A18. The space transformer of any one of paragraphs A1-A17, wherein at least one signal carrying trace of the plurality of conductive signal carrying traces is configured to carry a power signal from the probe system to the DUT.

[0068] A19. The space transformer according to paragraph A18, wherein the power signal includes at least one of DC power and AC power.

[0069] A20. A space transformer according to any one of paragraphs A1 to A19, wherein at least one signal carrying trace of the plurality of conductive signal carrying traces is configured to provide a corresponding RF input electrical signal from the probe system to the DUT.

[0070] A21. A space transformer according to any one of paragraphs A1 to A20, wherein at least one signal carrying trace of the plurality of conductive signal carrying traces is configured to provide a corresponding RF output electrical signal from the DUT to a probe system.

[0071] A22. The space transformer according to any one of paragraphs A1 to A21, wherein the conductive RF signal-modifying trace includes or is a metal signal-modifying trace.

[0072] A23. The space transformer according to any one of paragraphs A1 to A22, wherein the space transformer includes a plurality of electrically conductive RF signal-modifying traces and a corresponding plurality of RF electrical signal-modifying structures.

[0073] A24. A space transformer according to any one of paragraphs A1 to A23, wherein the output region is in electrical communication with an RF signal-modifying first electrical contact of the plurality of first electrical contacts and is configured to convey the modified RF electrical signal to a signal generating and analyzing assembly of a probe system.

[0074] A25. A space transformer described in any one of paragraphs A1 to A23, wherein the RF signal modifying second electrical contact is an RF signal receiving second electrical contact in electrical communication with the input region, the plurality of second electrical contacts includes an RF signal emitting second electrical contact in electrical communication with the output region, and the conductive RF signal modifying trace is configured to receive an RF electrical signal from the DUT via the RF signal receiving second electrical contact and to supply the modified RF electrical signal to the DUT via the RF signal emitting second electrical contact.

[0075] A26. A space transformer according to any one of paragraphs A1 to A25, wherein the RF electrical signal modifying structure includes or is a combiner configured to receive an RF electrical signal in the form of a first RF electrical signal from the DUT, to receive a second RF electrical signal from the DUT, and to combine the first RF electrical signal and the second RF electrical signal with each other to generate a modified RF electrical signal in the form of the first modified RF electrical signal and to generate the second modified RF electrical signal.

[0076] A27. A space transformer as described in paragraph A26, wherein the RF electrical signal modifying structure is configured to receive a first RF electrical signal from the DUT via a corresponding RF signal receiving second electrical contact among the plurality of second electrical contacts, and to receive a second RF electrical signal from the DUT via another corresponding RF signal receiving second electrical contact among the plurality of second electrical contacts.

[0077] A28. The space transformer of paragraph A26 or A27, wherein the space transformer is configured to return the first modified RF electrical signal and the second modified RF electrical signal to the DUT or to corresponding DUT contact pads of the DUT.

[0078] A29. A space transformer according to any one of clauses A26 to A28, wherein the RF electrical signal modifying structure is configured to return a first modified RF electrical signal to the DUT via a corresponding RF signal emitting second electrical contact among the plurality of second electrical contacts, and to return a second modified RF electrical signal to the DUT via another corresponding RF signal emitting second electrical contact among the plurality of second electrical contacts.

[0079] A30. In the space transformer according to any one of A26 to A29, the coupler (i) a capacitive interaction between the first RF electrical signal and the second RF electrical signal; (ii) an inductive interaction between the first RF electrical signal and the second RF electrical signal; and (iii) electric field interaction between the first RF electrical signal and the second RF electrical signal; a space transformer configured to mutually couple the first RF electrical signal and the second RF electrical signal by at least one of:

[0080] A31. A space transformer according to any one of paragraphs A26 to A30, wherein the coupler includes a first transmission line configured to carry a first RF electrical signal and a second transmission line configured to carry a second RF electrical signal, the first and second transmission lines being positioned relatively close to each other to facilitate coupling of the first and second RF electrical signals.

[0081] A32. The space transformer according to any one of paragraphs A26 to A31, wherein the coupler includes a directional coupler or is a directional coupler.

[0082] A33. The space transformer according to any one of paragraphs A26 to A32, wherein the coupler includes a branch-line coupler or is a branch-line coupler.

[0083] A34. The space transformer according to any one of paragraphs A26 to A33, wherein the coupler includes a quadrature hybrid coupler or is a quadrature hybrid coupler.

[0084] A35. The space transformer according to any one of paragraphs A26 to A34, wherein the coupler includes a passive coupler or is a passive coupler.

[0085] A36. The space transformer according to any one of paragraphs A1 to A35, wherein the RF electrical signal converting structure includes or is a passive RF structure.

[0086] A37. The space transformer according to any one of paragraphs A1 to A36, wherein the RF electrical signal converting structure includes or is a composite passive RF structure.

[0087] A38. The space transformer according to any one of paragraphs A1 to A37, wherein the RF electrical signal converting structure includes or is an RF attenuator.

[0088] A39. The space transformer according to any one of paragraphs A1 to A38, wherein the RF electrical signal converting structure includes or is an RF coupler.

[0089] A40. The space transformer according to any one of paragraphs A1 to A39, wherein the RF electrical signal converting structure includes or is a resistor.

[0090] A41. The space transformer according to any one of paragraphs A1 to A40, wherein the RF electrical signal converting structure includes or is a capacitor.

[0091] A42. The space transformer according to any one of paragraphs A1 to A41, wherein the RF electrical signal converting structure includes an inductor or is an inductor.

[0092] A43. The space transformer according to any one of paragraphs A1 to A42, wherein the RF electrical signal converting structure includes or is a splitter.

[0093] A44. A space transformer according to any one of A1 to A43, wherein the RF electrical signal converting structure includes a surface-mounted component surface-mounted on a dielectric or is a surface-mounted component.

[0094] A45. A space transformer according to any one of paragraphs A1 to A44, wherein the RF electrical signal modifying structure includes or is an embedded component embedded in a dielectric, and optionally the RF electrical signal modifying structure is formed within a metallization layer of the space transformer.

[0095] A46. A space transformer as described in any one of paragraphs A1-A45, wherein the space transformer includes any suitable structure, function, and / or feature of any of the space transformers shown and / or described herein.

[0096] B1. A probe system configured to test a device under test (DUT), comprising: a chuck defining a support surface configured to support a substrate including a DUT; A probe head assembly including the space transformer according to any one of items A1 to A46; Signal generation and analysis assembly, (i) feeding the test signal to the DUT via a space transformer; and (ii) receiving the resulting signal from the DUT via a space transformer; a signal generation and analysis assembly configured to perform at least one of A probe system comprising:

[0097] B2. The probe system of paragraph B1, (i) the probe system includes a DUT; and (ii) the probe system includes a substrate including a DUT; a probe system, which is at least one of:

[0098] B3. The probe system of paragraph B2, wherein the substrate is positioned on a support surface of a chuck.

[0099] B4. The probe system according to any one of paragraphs B1 to B3, wherein the chuck includes at least one of a vacuum chuck, a temperature-controlled chuck, and an electrically shielded chuck.

[0100] B5. The probe system according to any one of paragraphs B1 to B4, wherein the probe head assembly includes a plurality of probes configured to electrically contact corresponding DUT contact pads of the DUT.

[0101] B6. In the probe system described in B5, the plurality of probes are: (i) defined by a plurality of second electrical contacts; and (ii) configured to electrically connect corresponding second electrical contacts of the plurality of second electrical contacts to corresponding DUT contact pads; a probe system, which is at least one of:

[0102] C1. A method for testing a device under test (DUT) utilizing a probe system including a space transformer, comprising: providing a power signal to the DUT via a space transformer; receiving a radio frequency (RF) electrical signal from the DUT with the space transformer in response to the providing step; modifying the RF electrical signal within the space transformer utilizing the RF electrical signal modifying structure of the space transformer, thereby producing a modified RF electrical signal; A method comprising:

[0103] C2. The method of clause C1, further comprising returning the modified RF electrical signal to the DUT via a space transformer.

[0104] C3. The method of clause C2, wherein the RF electrical signal is a first RF electrical signal, the modified RF electrical signal is a first modified RF electrical signal, the receiving step includes receiving a second RF electrical signal from the DUT, and the modifying step further includes modifying the second RF electrical signal utilizing an RF electrical signal modifying structure within the space transformer to produce a second modified RF electrical signal.

[0105] C4. The method of paragraph C3, wherein the returning step includes returning the second modified RF electrical signal to the DUT via a space transformer.

[0106] C5. The method of any one of paragraphs C3 and C4, wherein the modifying step includes mutually combining the first RF electrical signal and the second RF electrical signal to generate a first modified RF electrical signal and a second modified RF electrical signal.

[0107] C6. The method of any one of paragraphs C1 to C5, wherein the space transformer comprises any suitable structure, function, and / or feature of either the space transformer of any one of paragraphs A1 to A46 or the probe system of paragraph B6. [Industrial Applicability]

[0108] The space transformers, probe systems, and methods disclosed herein are applicable to the integrated circuit device manufacturing and testing industry.

[0109] The above disclosure is believed to encompass multiple separate inventions having independent utility. While each of these inventions has been disclosed in a preferred form, numerous variations are possible, and the specific embodiments disclosed and illustrated herein should not be considered limiting. The subject matter of the inventions includes all novel and non-obvious combinations and subcombinations of the various elements, features, functions, and / or properties disclosed herein. Similarly, when a claim recites "a" or "first" element, or the equivalent, such claim should be understood to include the incorporation of one or more of such elements, and neither requires nor excludes two or more of such elements.

[0110] The following claims are believed to particularly set forth novel and unobvious specific combinations and subcombinations directed to one of the disclosed inventions. Inventions embodied in other combinations and subcombinations of features, functions, elements, and / or properties may be claimed by amending the present claims or by presenting new claims in this or a related application. Such amended or new claims, whether directed to a different invention or the same invention, and whether different, broader, narrower, or equal in scope to the original claims, are also deemed to fall within the inventive subject matter of the present disclosure.

Claims

1. 1. A space transformer configured for use in a probe system to facilitate electrical communication with a device under test (DUT), comprising: a dielectric; a plurality of first electrical contacts supported by the dielectric and arranged at at least one first pitch interval; a plurality of second electrical contacts supported by the dielectric and arranged at at least one second pitch interval less than the at least one first pitch interval; a plurality of conductive signaling traces supported by the dielectric, each conductive signaling trace extending between and electrically interconnecting a corresponding one of the plurality of first electrical contacts and a corresponding second electrical contact of the plurality of second electrical contacts; a conductive radio frequency (RF) signal-modifying trace in electrical communication with an RF signal-modifying second electrical contact of the plurality of second electrical contacts and configured to carry an RF electrical signal in electrical communication with the DUT; an RF electrical signal modifying structure in electrical communication with the conductive RF signal-modifying trace and configured to receive the RF electrical signal from an input region of the conductive RF signal-modifying trace and emit a modified RF electrical signal to an output region of the conductive RF signal-modifying trace, the RF electrical signal modifying structure including a combiner configured to receive the RF electrical signal in the form of a first RF electrical signal from the DUT, receive a second RF electrical signal from the DUT, and combine the first RF electrical signal and the second RF electrical signal together to generate the modified RF electrical signal in the form of a first modified RF electrical signal and to generate a second modified RF electrical signal; A space transformer equipped with

2. 2. The space transformer of claim 1, wherein the RF electrical signal modifying structure is configured to receive the first RF electrical signal from the DUT via a corresponding RF signal receiving second electrical contact among the plurality of second electrical contacts, and to receive the second RF electrical signal from the DUT via another corresponding RF signal receiving second electrical contact among the plurality of second electrical contacts.

3. 2. The space transformer of claim 1, wherein the space transformer is configured to return the first modified RF electrical signal and the second modified RF electrical signal to corresponding DUT contact pads of the DUT.

4. 2. The space transformer of claim 1, wherein the RF electrical signal modifying structure is configured to return the first modified RF electrical signal to the DUT via a corresponding RF signal emitting second electrical contact of the plurality of second electrical contacts, and to return the second modified RF electrical signal to the DUT via another corresponding RF signal emitting second electrical contact of the plurality of second electrical contacts.

5. 2. The space transformer according to claim 1, wherein the coupler comprises: (i) a capacitive interaction between the first RF electrical signal and the second RF electrical signal; (ii) an inductive interaction between the first RF electrical signal and the second RF electrical signal; and (iii) electric field interaction between the first RF electrical signal and the second RF electrical signal; a space transformer configured to mutually couple the first RF electrical signal and the second RF electrical signal by at least one of:

6. 2. The space transformer of claim 1, wherein the coupler includes a first transmission line configured to carry the first RF electrical signal and a second transmission line configured to carry the second RF electrical signal, the first and second transmission lines positioned relatively close to each other to facilitate coupling of the first and second RF electrical signals.

7. 10. The space transformer of claim 1, wherein the coupler comprises a directional coupler.

8. 2. The space transformer of claim 1, wherein the combiner comprises a branch-line combiner.

9. 10. The space transformer of claim 1, wherein the combiner comprises a quadrature hybrid combiner.

10. 10. The space transformer of claim 1, wherein the coupler comprises a passive coupler.

11. 2. The space transformer of claim 1, wherein the dielectric is a rigid dielectric.

12. 2. The space transformer of claim 1, wherein the dielectric is a flexible dielectric.

13. 2. The space transformer according to claim 1, wherein the dielectric is a dielectric film.

14. 2. The space transformer of claim 1, wherein the plurality of first electrical contacts comprises a plurality of first electrical contact pads.

15. 2. The space transformer of claim 1, wherein the plurality of first electrical contacts comprises a plurality of first electrical contact tips.

16. 2. The space transformer of claim 1, wherein the plurality of second electrical contacts comprises a plurality of second electrical contact pads.

17. 2. The space transformer of claim 1, wherein the plurality of second electrical contacts comprises a plurality of probe tips.

18. 2. The space transformer of claim 1, wherein the plurality of second electrical contacts are configured to directly contact the DUT to facilitate electrical communication between the probe system and the DUT.

19. 10. The space transformer of claim 1, wherein the space transformer includes a plurality of electrically conductive RF signal-modifying traces and a corresponding plurality of RF electrical signal-modifying structures.

20. 2. The space transformer of claim 1, wherein the at least one first pitch interval is at least a threshold pitch interval multiple of the at least one second pitch interval, the threshold pitch interval multiple being two.

21. 2. The space transformer of claim 1, wherein the RF electrical signal modifying structure comprises: (i) passive RF structures; (ii) composite passive RF structures; (iii) an RF attenuator; (iv) RF coupler; (v) resistor; (vi) a capacitor; (vii) an inductor; and (viii) Splitter A space transformer including at least one of the following:

22. 2. The space transformer of claim 1, wherein the RF electrical signal modifying structure comprises: (i) a surface-mounted component surface-mounted to the dielectric; (ii) an embedded component embedded in the dielectric; and (iii) the metallization layer of the space transformer A space transformer including at least one of the following:

23. 1. A probe system configured to test a device under test (DUT), comprising: a chuck defining a support surface configured to support a substrate including the DUT; a probe head assembly including the space transformer according to any one of claims 1 to 22; A signal generation and analysis assembly, (i) providing a test signal to the DUT via a space transformer; and (ii) receiving a result signal from the DUT via the space transformer; a signal generation and analysis assembly configured to perform at least one of A probe system comprising:

24. 24. The probe system of claim 23, wherein the probe head assembly includes a plurality of probes configured to electrically contact corresponding DUT contact pads of the DUT, the plurality of probes comprising: (i) defined by a plurality of second electrical contacts; and (ii) configured to electrically connect a corresponding second electrical contact of the plurality of second electrical contacts to the corresponding DUT contact pad; a probe system, which is at least one of:

25. 1. A method for testing a device under test (DUT) utilizing a probe system including a space transformer, comprising: providing a power signal to the DUT through the space transformer; receiving, in response to the providing step, a radio frequency (RF) electrical signal from the DUT using the space transformer; modifying the RF electrical signal within the space transformer utilizing an RF electrical signal modifying structure of the space transformer, thereby producing a modified RF electrical signal; the method further comprising returning the modified RF electrical signal to the DUT through the space transformer; the RF electrical signal is a first RF electrical signal, the modified RF electrical signal is a first modified RF electrical signal, the receiving step includes receiving a second RF electrical signal from the DUT, and the modifying step includes modifying the second RF electrical signal utilizing the RF electrical signal modifying structure in the space transformer to generate a second modified RF electrical signal; The method, wherein the modifying step includes mutually combining the first RF electrical signal and the second RF electrical signal to generate the first modified RF electrical signal and the second modified RF electrical signal.

26. 26. The method of claim 25, wherein the returning step includes returning the second modified RF electrical signal to the DUT through the space transformer.

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