Cell architecture structure for enhanced thermal management in epitaxial growth processing chambers

Abstract

The epitaxial growth processing chamber has a component having a macrocell support structure. The macrocell support structure has interconnected physical supports that define fluid communication holes. The component configured for use in the epitaxial growth processing chamber has a macrocell support structure having interconnected physical supports that define fluid communication holes. The component can be one or more of a lower liner, an upper liner, a base plate, an exhaust cap, an injection ring, and an injection cap. The interconnected physical supports can include materials such as metal, ceramic or glass materials, polymer materials, and combinations thereof. The component can have a freestanding configuration, a plate-supported configuration, a sandwich configuration, a surface-sealed configuration, and a solid polymer-filled configuration.

Description

[Technical Field]

[0001]

[0002] FIELD OF THE INVENTION The embodiments described herein relate generally to equipment used in semiconductor manufacturing, and more particularly to substrate processing systems with enhanced thermal management. [Background technology]

[0002]

[0003] Semiconductor substrates are processed for a wide range of applications, including the fabrication of devices for integrated circuits and microdevices. During fabrication, various parameters can affect the functionality of small-sized features formed on the substrate. For example, the temperature uniformity of the substrate and the temperature of processing chamber components can affect chamber production yield.

[0003]

[0004] In epitaxial growth processing chambers that may be used to form integrated circuits on substrates, a set of quartz liners positioned between the substrate edge and the chamber wall provides some thermal shielding from other processing chamber components. However, advances in semiconductor processing have required improved temperature control. Summary of the Invention

[0004]

[0005] The epitaxial growth processing chamber includes a component having a macrocell support structure. The macrocell support structure has interconnected physical supports that define fluid communication holes. The one or more components can be a lower liner, an upper liner, a base plate, an exhaust cap, a jet ring, a jet cap, or a combination thereof. The interconnected supports can be composed of a material selected from a metal, a ceramic or glass material, a polymer material, and combinations thereof. The macrocell support structure can have a porosity ranging from about 60% to about 99% of the volume of the macrocell support structure. The pores of the macrocell support structure can have an average pore size ranging from about 1 micron to about 5000 microns. The macrocell support structure has a permeability ranging from about 20% to about 100% of the pores of the macrocell support structure. The component having the macrocell support structure can be a freestanding configuration, a plate-supported configuration, a sandwich configuration, a surface-sealed configuration, and a solid polymer-filled configuration. The component of any configuration can be a single component. A component in a plate-supported configuration may include a support plate that includes a material similar to the interconnected physical supports. A component in a sandwich configuration may include a first plate and a second plate, each including a material similar to the material of the interconnected physical supports. A component in a sandwich configuration may include a first plate and a second plate that include a material different from the other plate. A component in a surface-sealed configuration may include an enclosure that includes a material different from the interconnected physical supports. A component in a surface-sealed configuration may further include a fluid within the macrocell support structure.

[0005]

[0006] A component configured for use in an epitaxial growth processing chamber has a macrocell support structure with interconnected physical supports defining fluid communication holes. The component can be one or more of a lower liner, an upper liner, a base plate, an exhaust cap, a jet ring, and a jet cap. The interconnected physical supports can include materials such as metal, ceramic or glass materials, polymeric materials, and combinations thereof. The macrocell support structure of the component can have a porosity ranging from about 60% to about 99% of the volume of the macrocell support structure. The pores of the macrocell support structure of the component can have an average pore size ranging from about 1 micron to about 5000 microns. The macrocell support structure of the component has a permeability ranging from about 20% to about 100% of the pores. The component can have a freestanding macrocell support structure configuration, a plate-supported configuration, a sandwich configuration, a surface-sealed configuration, and a solid polymer-filled configuration.

[0006]

[0007] To allow the above-mentioned features of the present disclosure to be understood in detail, a more detailed description of the present disclosure briefly summarized above will be obtained by referring to embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings show only one or more of the embodiments. Therefore, the one or more embodiments illustrated in the drawings should not be considered as limiting the broadest interpretation of the detailed scope. Other effective embodiments that may be described in the detailed description may be considered as part of the envisaged detailed scope. [Brief explanation of the drawings]

[0007] [Figure 1]

[0008] 1 is a schematic cross-sectional side view of an epitaxial growth processing chamber according to one or more embodiments. [Figures 2A-2F]

[0009] 1 illustrates a cross-sectional view of a portion of a macrocell support structure for one or more components for use with an epitaxial growth processing chamber, according to one or more embodiments. [Figure 3A-3B]

[0010] 1A-1D provide top and side views, respectively, of components comprising a macrocell support structure configured for use with an epitaxial growth processing chamber, according to one or more embodiments. [Figure 3C]

[0011] 3B provides a freestanding macrocell support structure configuration for the components of FIG. 3A, according to one or more embodiments. [Figure 3D]

[0012] 3B provides a surface-sealed macrocell support structure configuration for the components of FIG. 3A, according to one or more embodiments. [Figure 4A-4B]

[0013] 1A-1D provide side and perspective views, respectively, of components comprising a macrocell support structure configured for use with an epitaxial growth processing chamber, according to one or more embodiments. [Figure 4C]

[0014] FIG. 4C provides a freestanding macrocell support structure configuration for the components of FIG. 4A, according to one or more embodiments. [Figure 4D]

[0015] 5 provides a surface-sealed macrocell support structure configuration for the components of FIG. 4, according to one or more embodiments. [Figure 5A]

[0016] A-1 provides, for general discussion purposes, a top view of a non-embodiment component for use with a processing chamber. A-2 provides, for general discussion purposes, a perspective view along line CC of a non-embodiment component for use with a processing chamber provided in FIG. 5A-1. [Figure 5B-5D]

[0017] 5B-1, 5C-1, and 5D-1 provide top views of components comprising a macrocell support structure for use with an epitaxial growth processing chamber, according to one or more embodiments. B-2, C-2, and D-2 provide exposed views along diagram lines CC', CC'', and CC''' of components comprising a macrocell support structure for use with an epitaxial growth processing chamber, according to one or more embodiments, as provided in FIGS. 5B-1, 5C-1, and 5D-1, respectively. [Figure 6A]

[0018] A-1 provides, for general discussion purposes, a top view of a non-embodiment component for use with a processing chamber. A-2 provides, for general discussion purposes, a perspective view along view line EE of a non-embodiment component for use with a processing chamber provided in FIG. 6A-1. [Figures 6B-6D]

[0019] B-2, C-2, and D-2 each provide an exposed view along view line EE of components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 6A-1, according to one or more embodiments. [Figure 7A]

[0020] 1 provides a perspective view of several components comprising a macrocell support structure configured for use with an epitaxial growth processing chamber, according to one or more embodiments. [Figures 7B-7D]

[0021] 7A-7D each provide an exposed view along view line FF of components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 7A, according to one or more embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0008]

[0022] In this disclosure, terms such as "top," "bottom," "side," "top," "bottom," "up," "down," "upper," "lower," "horizontal," "vertical," etc., do not refer to absolute directions. Instead, these terms refer to directions relative to a non-specific reference plane. This non-specific reference plane may be vertical, horizontal, or at some other angular orientation.

[0009]

[0023] To facilitate understanding and interpretation of the described scope, in some instances, the same or related reference numerals have been used (where possible) to designate identical or similar elements that are common among the figures. Those skilled in the art will appreciate that elements and features of one embodiment may be beneficially incorporated in one or more other embodiments without further description.

[0010]

[0024] In the following disclosure, reference may be made to one or more embodiments. However, those skilled in the art will understand that the disclosure is not limited to the specifically described embodiments. Rather, any combination of features and elements, whether related to various embodiments or not, is contemplated for realizing and practicing one or more embodiments provided by the present disclosure. Furthermore, one or more embodiments described in the present disclosure may realize advantages over other possible solutions, prior art (if any), and combinations thereof, but whether or not a particular advantage is realized by a given embodiment does not limit the present disclosure. The provided aspects, features, embodiments, and advantages are merely exemplary. They are not considered elements or limitations of the appended claims unless explicitly recited in one or more of the claims. Similarly, those skilled in the art should not interpret a reference to "the present disclosure" as a generalization of the disclosed subject matter.

[0011]

[0025] The present disclosure relates to alternative compositions for various components of epitaxial growth processing chambers that may provide improved thermal insulation and shielding over previously known materials and configurations. Substrate temperature non-uniformity is a well-known problem in the microprocessor manufacturing industry when using epitaxial growth processing chambers. Uneven and out-of-specification temperatures at the substrate edges can result in reduced product yield due to defective parts. Inadequate thermal shielding in portions of the processing vessel, especially those in contact with the relatively cooler external environment, can result in excessive electrical consumption to heat and maintain the temperature inside the processing chamber. Uncontrolled heat dissipation (too fast heat loss / gain or too slow heat loss / gain) can stress components through thermal shock or thermal degradation, shortening their operational lifespan. Increased maintenance of the processing chamber also reduces overall product yield due to downtime.

[0012]

[0026] The use of components containing macrocellular support structures, which are networks of interconnected physical supports forming pores, is an approach not yet appreciated in the art for controlled shielding of thermal energy. Metal, ceramic, glass, or polymer interconnected physical supports, along with potentially supporting plates or enclosures containing gases, liquids, or different solids, may provide the ability to not only absorb electromagnetic (EM) energy in the form of light and heat, but also retain such energy and slowly re-emit it in the form of heated gas so that thermal shock does not occur. The interconnected physical supports and protective layers can also be configured to reflect EM energy, storing and redistributing energy not absorbed to the substrate being processed, thus saving energy.

[0013]

[0027] Metal, ceramic, glass, or polymer macrocellular structures are permeable and have a significant overall pore volume fraction, and it is believed that integrating or replacing certain components of a process chamber with such an architecture will impact not only the energy management of the process chamber, but also the effectiveness of the process itself through a combination of energy reflection and shielding and heat dissipation.

[0014]

[0028] 1 is a schematic cross-sectional side view of an epitaxial growth processing chamber 100. The processing chamber 100 is an epitaxial deposition chamber. Such a processing chamber 100 may be utilized to grow an epitaxial film on a substrate 102. The processing chamber 100 may provide a cross-flow of precursors across a top surface 150 of the substrate 102.

[0015]

[0029] The processing chamber 100 may include an upper body 156, a lower body 148 disposed below the upper body 156, and a base plate 112 disposed between the upper body 156 and the lower body 148. The upper body 156, the base plate 112, and the lower body 148 may form a chamber body. A substrate support 106, an upper window 108 such as an upper dome, a lower window 110 such as a lower dome, a plurality of upper lamps 141, and a plurality of lower lamps 143 may be positioned within the chamber body. The lower window 110 also extends downward, and a shaft 118 extends therethrough. The base plate 112 couples the upper body 156 and the lower body 148 via the upper window 108 and the lower window 110, respectively, to form an airtight, enclosed volume, as shown in FIG. 1 . A controller 120 may be in communication with the processing chamber 100. The controller may be used to control a process or method, such as the operation of an epitaxial growth processing chamber.

[0016]

[0030] The substrate support 106 may be positioned between an upper window 108 and a lower window 110. The substrate support 106 may include a support surface 123 that supports the substrate 102.

[0017]

[0031] The upper lamps 141 may be disposed between the upper window and the lid 154. The upper lamps 141 may form part of an upper lamp module 155. The lid 154 may include sensors (not shown) for measuring the temperature within the process chamber 110. The upper window 108 may be an upper dome and may be formed of an energy-transmitting material such as quartz.

[0018]

[0032] The multiple upper lamps 141 may form a series of concentric rings, such as two, three, or more sets of rings of upper lamps 141, as part of an upper lamp module 155. The upper lamp module 155 of FIG. 1 may also include multiple ring-shaped reflectors having concave reflective surfaces 181 positioned between two adjacent pairs of concentric rings of upper lamps 141 or between a concentric ring of upper lamps 141 and the upper body 156. The upper lamp module 155 may also include a reflector having a flat reflective surface 182 positioned between two adjacent pairs of concentric rings or within a ring of upper lamps 141. Each reflective surface 181, 182 may have a surface configured to reflect EM radiation downward onto a specific area of ​​the substrate 102.

[0019]

[0033] In the processing chamber 100, the upper lamp module 155 may also have a heat shield 190 positioned along the periphery of the outermost concentric ring of upper lamps 141. The heat shield 190 may have a coating to reflect EM radiation back into the upper lamp module 155. The heat shield 190 may also aid in insulating the processing chamber 100 and protect the upper lamp module 155 from sudden temperature changes. Thermal insulation, such as that provided by the heat shield 190, should provide gradual temperature increases and decreases to prevent thermal shock to the components of the upper lamp module 155, which may extend the operating life of the components of the upper lamp module 155. The upper lamp module 155 may have multiple heat shields 190, including heat shields positioned between each concentric ring of lamp modules. In such cases, each heat shield 190 may be configured to similarly protect the lower portion of the lamp module.

[0020]

[0034] A plurality of lower lamps 143 may be disposed between the lower window 110 and the floor 152 of the processing chamber 100. The plurality of lower lamps 143 form part of a lower lamp module 145. The lower window 110 may be formed of an energy transparent material, such as quartz.

[0021]

[0035] The multiple lower lamps 143, as part of a lower lamp module 145, may form a series of concentric rings, such as two, three, or more sets of rings of lower lamps 143. The lower lamp module 145 of FIG. 1 may also include multiple reflectors having concave reflective surfaces 185 positioned between two adjacent pairs of concentric rings of the upper lamps 141 or between a concentric ring of the lower lamps 143 and the lower body 148. The lower lamp module 145 may also include a reflector having a flat reflective surface 186 positioned between two adjacent pairs of concentric rings or within a ring of the lower lamps 143. Each reflective surface 185, 186 may have a surface configured to reflect EM radiation upward and back into the processing chamber 100.

[0022]

[0036] In the processing chamber 100, the lower lamp module 145 may also have a heat shield 192 disposed along the periphery of the outermost concentric ring of lower lamps 143. In some examples, the heat shield 192 may have an exterior coating to reflect EM radiation back into the interior of the lower lamp module 145. The heat shield 192 may also help insulate the processing chamber 100 and protect the lower lamp module 145 from sudden temperature changes. The lower lamp module, like the upper lamp module, may have multiple heat shields.

[0023]

[0037] The lower lamp module 145 in the processing chamber 100 also shows a conical reflector 194. The conical reflector 194 is positioned along the circumference of the shaft 118 proximate the innermost ring of lower lamps 143. The conical reflector 194 is configured with an outwardly facing reflective surface that reflects EM radiation from the innermost lower lamps 143 outward and upward. The conical reflector 194 may also be configured to provide insulation to prevent rapid thermal transitions in that portion of the lower window 110 when the lower lamps 143 are activated, which may prevent the formation of severe thermal gradients across the bottommost portion of the shaft 118 and lower window 110 when the lower lamps 143 are activated / deactivated. The conical reflector 194 may also slow the heating and cooling process, thereby preventing the formation of cyclical thermal stresses in the material of the lower window 110, which is often made of quartz.

[0024]

[0038] The processing space 136 and the purge space 138 may be defined between the upper window 108 and the lower window 110. The processing space 136 and the purge space 138 may be part of a larger interior space defined at least in part by the upper window 108, the lower window 110, and one or more liners. The processing chamber 100 includes a lower liner 111 aligned at least in part below the substrate support 106 and an upper liner 113 aligned at least in part above the substrate support 106. The upper liner 113 and the lower liner 111 are positioned along the inner surface of the base plate 112, as shown in FIG. 1 , to protect the base plate 112 from reactive gases introduced and used during deposition processes, cleaning processes, or both.

[0025]

[0039] The interior space may further include a substrate support 106. The substrate support 106 may include an upper surface on which the substrate 102 is positioned. The substrate support 106 may be coupled or connected to a shaft 118. The shaft 118 may be coupled or connected to a motion assembly 121. The motion assembly 121 may include one or more actuators, adjustment devices, or both, that provide movement, adjustment, or both, of the shaft 118, the substrate support 106, or both within the processing space 136.

[0026]

[0040] The substrate support 106 may be configured to define one or more lift pin holes 107. The lift pin holes 107 may be configured to accommodate lift pins 132 for lifting the substrate 102 from the substrate support 106 either before or after a deposition process is performed. The stop 104 includes multiple arms 105 a, 105 b, each of which includes a lift pin stop upon which the lift pins 132 may rest upon when lowered.

[0027]

[0041] The base plate 112 may include one or more gas inlets 114, one or more purge gas inlets 164, and one or more gas exhaust outlets 116. The one or more gas inlets 114 and the one or more purge gas inlets 164 may be positioned on an opposite side of the base plate 112 from the one or more gas exhaust outlets 116. The one or more gas inlets 114 and the one or more purge gas inlets 164 may each be positioned to allow gas to flow parallel to a top surface 150 of a substrate 102 positioned in the processing space 136. The one or more gas inlets 114 may be fluidly connected to one or more process gas sources 151 and one or more cleaning gas sources 153. The one or more purge gas inlets 164 may be fluidly connected to one or more purge gas sources 162. The one or more gas exhaust outlets 116 may be fluidly connected to an exhaust pump 157.

[0028]

[0042] The one or more process gases supplied using the one or more process gas sources 151 may include one or more reactive gases such as silicon (Si), phosphorus (P), and germanium (Ge), and nitrogen (N 2 ) and hydrogen (H 2 ), and combinations thereof. The one or more purge gases supplied using one or more purge gas sources 162 may include argon (Ar), helium (He), nitrogen (N 2 The one or more cleaning gases provided using the one or more cleaning gas sources 153 may include one or more of hydrogen (H) and chlorine (Cl). The one or more process gases may include silicon phosphide (SiP), phosphine (PH), and combinations thereof. The one or more cleaning gases may include hydrochloric acid (HCl). The epitaxial growth process chamber is configured to process such materials therein without significant degradation under normal operation observation by a human operator.

[0029]

[0043] The one or more gas exhaust outlets 116 may be further coupled or connected to an exhaust cap 178. The exhaust cap 178 may fluidly connect the one or more gas exhaust outlets 116 to an exhaust pump 157. The exhaust cap 178 may help control the deposition of layers on the substrate 102 by regulating the pressure differential within the epitaxial growth processing chamber, which may affect the flow of gas across the surface of the substrate and therefore the deposition rate. The exhaust cap 178 may be positioned on an opposite side of the processing chamber 100 relative to the base plate 112.

[0030]

[0044] In one or more embodiments, an epitaxial growth processing chamber is configured with one or more components that include a macrocell support structure. In one or more embodiments, the components configured for use in an epitaxial growth processing chamber include a macrocell support structure. Non-limiting examples of such macrocell support structures are shown in Figures 2A-F. Figures 2A-F show several cross-sectional views of a portion of a macrocell support structure useful for one or more components for use with an epitaxial growth processing chamber.

[0031]

[0045] 2A shows a cross-sectional view of a portion of a macrocellular support structure. A macrocellular support structure, such as the structure represented by rectangle 200, has interconnected physical supports 202 that form a three-dimensional (3D) interconnected network, i.e., a lattice or matrix. The spaces or voids between the interconnected physical supports 202 define a plurality of voids or pores 204. In many embodiments of the macrocellular support structure, the pores 204 are in fluid communication with one another, i.e., the pores are "openings" (described further) that allow fluids, such as gases or liquids, to flow in any axial direction through the macrocellular support structure represented by rectangle 200.

[0032]

[0046] In one or more embodiments, the configuration of interconnected physical supports of a macrocellular support structure may be reticulated, i.e., random, or varied, as represented by the configuration of interconnected physical supports 202 in rectangle 200 in FIG. 2A. FIG. 2B shows a second cross-sectional view of a portion of a second macrocellular support structure. In one or more embodiments, the configuration of interconnected physical supports 212 may be a regular or repeating structure, as represented by rectangle 210 in FIG. 2B. As seen in 210, both the interconnected physical supports 212 and the pores 214 are uniform, repeating, and regularly spaced structures. Such a configuration, given a uniform arrangement, may provide predictability for not only fluid flow but also heat transfer through the macrocellular support.

[0033]

[0047] The interconnected physical supports provide greater internal strength and resistance to deformation. Macrocellular support structures are load-bearing and maintain their shape under high thermal conditions and stresses due to weight and pressure. In one or more embodiments, useful macrocellular support structures do not thermally degrade or decompose in a temperature range of about 0°C to about 1000°C, e.g., from about 0°C to about 100, 200, 300, 400, 500, 600, 700, 800, 900, and 1000°C (including all combinations and endpoints of the ranges). By "thermally degrade or decompose," it is meant that a material undergoes a chemical reaction that breaks chemical bonds between bonded pairs of atoms, or that the heated material is transformed into a different material through a chemical reaction, such as oxidation, resulting in a loss of macroscale physical integrity throughout the material as a result of either occurrence. In one or more embodiments, useful macrocellular support structures have a thermal decomposition rate of 1×10 -5 It is configured to be exposed to pressures ranging from atmospheric to about 1.5 atmospheres, for example, from 0.00001, 0.0001, 0.001, 0.01, and 0.1 atmospheres to about 0.2, 0.3, 0.5, 0.7, 0.8, 0.9, 1.0, 1.1, 1.2, 1.3, 1.4, and 1.5 atmospheres (including all combinations and endpoints of the ranges). Pressure values ​​below atmospheric pressure are considered "partial vacuum."

[0034]

[0048] In one or more embodiments, the interconnected physical supports of the macrocell support structure comprise a metal such as aluminum, an aluminum alloy, iron, an iron alloy, nickel, a nickel alloy, copper, a copper alloy, or a combination thereof. An example of a useful aluminum alloy is 6061 aluminum. An example of a useful iron alloy is stainless steel, such as 316L stainless steel. An example of a useful nickel alloy is Hastelloy. An example of a useful copper alloy is brass.

[0035]

[0049] In one or more embodiments, the interconnected physical supports of the macrocell support structure comprise a ceramic or glass material such as reticulated vitreous / vitreous carbon (RVC), silicon carbide coated RVC, silicon carbide, silicon nitride, quartz such as black quartz, carbon fiber products such as woven carbon fiber fabric, or combinations thereof.

[0036]

[0050] In one or more embodiments, the interconnected physical supports of the macrocellular support structure comprise a polymeric material. In one or more embodiments, the polymeric material is a thermosetting polymer. In one or more embodiments, the polymer is a thermoplastic polymeric material. Polymers useful for this type of process have a glass transition temperature (T) above about 350°C. g In one or more embodiments, the polymer can be a thermoset polymer, poly(ethyl ether ketone) (PEEK), polyamide, or a combination thereof.

[0037]

[0051] The macrocellular support structure is characterized by the size of the pores relative to the overall volume of the material. In one or more embodiments, the macrocellular support structure has a void volume or percentage porosity in the range of about 60% to about 99% by volume, e.g., 60, 70, 75, 80, 85, and 90 to about 91, 92, 93, 94, 95, 96, 97, 98, and 99% by volume (including all combinations and endpoints of the ranges).

[0038]

[0052] In one or more embodiments, the average voids or pores within the macrocellular support structure have a width in the range of about 1 micron to about 5000 microns, for example, from 1, 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 150, 200, 250, 300, 400, 500, 600, 700, 800, 900, 1000, 1250, 1500, 1750, and 2000 to 2250, 2500, 2750, 3000, 3250, 3500, 3750, 4000, 4250, 4500, 4750, and 5000 microns (including all combinations and endpoints of the ranges). "Width" refers to the measurable distance between two interconnected physical supports on opposite sides of a defined void or pore volume, analogous to the diagonal of a cube or the diameter of a sphere.

[0039]

[0053] The combination of the macrocellular support structure configuration and the number of pores not only reduces the weight of the component compared to conventional processing chamber components, but also provides significant thermal flexibility and stress distribution throughout the component. The ability to distribute stress throughout the structure and transfer thermal energy throughout the component (including to fluids contained within the pores and traversing the porosity) makes components including macrocellular support structures less likely to fail due to thermal stresses caused by thermal gradients that form during heating and cooling processes, unlike more rigid parts that can repeatedly generate internal stresses due to differential expansion gradients across a solid structure and ultimately form stress-based faults or cracks.

[0040]

[0054] Another feature of the macrocell support structure is its permeability. Permeability of the macrocell support structure can be understood as the ability of fluid to flow between interconnected physical supports, enabling the transfer of energy. The permeability of the macrocell support structure reflects the amount of pores that are not fluidly isolated from other pores, i.e., the fluid connectivity between the pores. Permeability through the interconnected physical supports that define the pore structure allows gases, such as nitrogen, argon, helium, other noble gases, and other gases that are generally inert to the material, to flow either naturally or be forced through the macrocell support structure, such as by using a pressurized fluid flow or a mass driver. While one or more of the pores within the macrocell support structure may be interconnected, some of the pores within the entire macrocell support structure may not contribute to fluid communication through the entire macrocell support structure. Such pores, whether fluidly isolated or multiple, function as insulating cavities and do not contribute to the permeability of the macrocell support structure.

[0041]

[0055] In one or more embodiments, the macrocellular support structure has a transmittance of about 20% or more to 100%, for example, about 20, 30, 40, 50, 55, 60, 65, 70, 75, 80, 85, and 90 or more to about 91, 92, 93, 94, 95, 96, 97, 98, 99, 99.9, 99.99, 99.999, about 100, and 100% transmittance (including all combinations and endpoints of the ranges).

[0042]

[0056] In some cases, not all pores or voids are in fluid communication with other pores, i.e., some pores may be closed, fluidly isolated, or “dead,” but this is not necessarily a defect or deficiency in the construction of the microcellular structure. A lack of permeability in a minority portion of a macrocellular support structure can result in the aforementioned vaporous fluid remaining trapped within the support structure. These dead pores can act as a limited “heat sink” that absorbs energy transmitted through the interconnected physical supports, allows for further absorption of heat, retains such heat until the local interconnected physical support has sufficiently cooled, and then transfers such heat back to the cooling interconnected physical support. This can somewhat slow the heating and cooling of a component having several “closed” macrocells relative to an “open” macrocellular support structure that does not have such isolated voids or pores. It is believed that slowing the heating and cooling of a component not only extends the life of the component, such as the macrocellular support structure, but also extends the life of other components surrounding the structure due to slower temperature changes. Another potential advantage is that in one or more embodiment configurations, a closed void may be positioned adjacent to or in contact with an interior portion of a surface, such as the interior surface of a portion of a support panel, sandwich panel, or enclosure. Such sealed pores may not only function as a temperature buffer as described above, but may also provide additional mechanical bonding or connectivity at the point of bonding or connection between the surface and an interconnected physical support by increasing the amount of material bonded to or in contact with the surface at the point of interface.

[0043]

[0057] A component configured to be useful with an epitaxial growth processing chamber that constitutes at least a portion of a macrocell support structure can have one or more physical configurations. Figures 2A and 2B, discussed above, show a cross-sectional view of a freestanding macrocell support structure. In one or more embodiments, the component is configured such that the component is comprised solely of the macrocell support structure, i.e., is a freestanding macrocell support structure. In such an example, the component includes only the macrocell support structure. The component consists of or consists essentially of the macrocell support structure defined by the interconnected physical supports. Both rectangles 200 and 210 represent portions of the component without any external cladding, mounting, shielding, surfaces, or protection. All exterior surfaces of the component are exposed, and both the pores and the interconnected physical supports are fluidly accessible through the exterior surfaces of the component. Unless the surface is sealed with a film or layer, fluid can traverse the macrocell support structure largely unimpeded (except for the interconnected physical supports or potentially occluding pores) in either axial direction.

[0044]

[0058] FIG. 2C shows a cross-sectional view of a polymer-filled, freestanding macrocellular support structure. In one or more embodiments, a component is configured with a macrocellular support structure having pores filled with a second solid material. In such a configuration, the second solid material, such as second solid material 223 within pores 224 of rectangle 220, is different from the material of the interconnected physical supports 222 of the macrocellular support structure. In FIG. 2C, rectangle 220 is similar in structure to rectangles 200 and 210 in FIGS. 2A and 2B, but the internal pore structure 224 is completely filled with the second solid material. In one or more embodiments, the second solid material can be a polymer, such as a thermoset polymer, PEEK, polyimide, or a combination thereof.

[0045]

[0059] The second solid material in a "solid polymer filled" configuration should not expand or contract with temperature changes at a rate significantly different from the interconnected physical supports to prevent physical stress on the macrocell support structure and degradation of the overall composite structure. Similarly, the second solid material desirably does not melt, liquefy, degrade, or decompose under normal or foreseeable extreme operating conditions of the component or epitaxial growth processing chamber. While the second solid material may soften at elevated temperatures, such as a thermosetting polymer that absorbs energy and stretches bonds within the polymer matrix, the second solid material will not lose the physical integrity of its shape or expand beyond the expected expansion and contraction due to temperature cycling and exposure to processing vapors (if any).

[0046]

[0060] FIG. 2D shows a cross-sectional view of a plate-supported macrocell support structure. In one or more embodiments, the component is in a plate-supported configuration. Rectangle 230 represents a portion of the component that is "plate-supported." In one or more embodiments, support plate 235 is coupled to interconnected physical supports 232. In one or more embodiments, the support plate is connected to interconnected physical supports 232. The coupling may be via an intermediate bonding layer (not shown), such as an adhesive layer, that bonds the interior surface of support plate 235 to the exterior surface contact points along the exterior surface of the macrocell support structure. The coupling may be direct by known bonding techniques, such as, but not limited to, welding, brazing, diffusion bonding, and mechanical fastening by bolting or clamping.

[0047]

[0061] In one or more embodiments, each portion of a component in a plate-supported configuration comprises a different material. For example, the interconnected physical supports of the macrocell support structure may be made of a ceramic material or a first metal, and the support plate may be made of a second metal. In one or more embodiments in which the plate-supported component comprises different materials, the coefficients of expansion of the different portions of the plate-supported component are within ±10% of each other. Such composite materials may have reflectivity from the support surface, insulating properties from the macrocell support structure, and cost advantages for replacing more expensive materials and joining techniques. However, care must be taken to ensure that the materials of the different portions have similar coefficients of expansion / contraction within the operating temperature range of the component so as not to compromise the bonding or connection of the portions of the plate-supported component. In one or more embodiments, each portion of the component in a plate-supported configuration comprises the same material.

[0048]

[0062] While each portion of a component of a plate-supported configuration may comprise the same material, in one or more embodiments, the component of a plate-supported configuration is a unitary component. That is, there are no seams, separations, gaps, or discontinuities requiring a bond or connection between the support plate and the interconnected physical supports along the exterior surface of the macrocellular support structure to which the support plate is coupled. Such components may be manufactured using known manufacturing processes, including, but not limited to, additive manufacturing such as three-dimensional (3D) printing, subtractive manufacturing, compression molding, injection molding, and casting.

[0049]

[0063] In one or more embodiments, the outward-facing surface of the support plate may be a modified surface. In some examples, the outward-facing surface may be mechanically or chemically modified to directly alter its properties, such as by scouring (grooving), matting, etching, polishing, oxidizing, and acid or alkali treatment. Such direct treatment may enhance the properties of materials, including the support plate itself, to perform specific functions, such as bonding with other materials or reflecting electromagnetic (EM) radiation. In other examples, the outward-facing surface may be modified by bonding or connecting an external layer onto the outward-facing surface. For example, a reflective film or mirror may be adhered or clad to the exterior surface to reflect EM radiation. Other such modifications to the outward-facing surface of the support plate are understood and contemplated.

[0050]

[0064] FIG. 2E illustrates a cross-sectional view of a sandwich-type macrocellular support structure. In one or more embodiments, the component is in a sandwich configuration. Rectangle 240 indicates a portion of a sandwich-type component having a first plate 246 and a second plate 247 positioned on different surfaces of interconnected physical supports 242. As shown in FIG. 2E, plates 246, 247 may be positioned opposite one another; however, in alternative configurations, such as those having triangular exterior surfaces, it is contemplated that two surfaces, such as plates 246, 247, may not be directly opposite one another (e.g., may be adjacent). Such configurations are similar to plate-supported configurations, except that rather than a single support plate, there are two or more plates on opposing or different surfaces. In one or more embodiments, the first and second plates are bonded or connected to the interconnected physical supports of the macrocellular support structure.

[0051]

[0065] In one or more embodiments, each portion of the sandwich-type component comprises a different material; for example, the first plate 246 comprises a first material and the second plate 247 comprises a second material. In one or more embodiments in which each portion of the sandwich-type component comprises a different material, for example, the first material and the second material are different, the coefficients of expansion of the different portions of the sandwich-type component are within ±10% of each other. In one or more embodiments, each portion of the sandwich-type component comprises the same material; for example, the first material and the second material are the same. Each portion of the sandwich-type component can also comprise the same material; for example, if the first plate, the second plate, and the interconnected physical support comprise the same material, in one or more embodiments, the sandwich-type component is a single component. In one or more embodiments, one or both of the outward-facing surfaces of either or both of the first plate or the second plate may be surface-modified. Examples provided so far have included polishing, etching, and applying a reflective layer to the outward-facing surfaces. In such a sandwich-type component, a first plate may have an outward-facing surface that is scouring to promote adhesion, and a second plate may have an outward-facing surface that is finely polished to reflect EM radiation.

[0052]

[0066] FIG. 2F shows a cross-sectional view of a surface-sealed macrocellular support structure. In one or more embodiments, the component is a surface-sealed configuration. Rectangle 250 represents a portion of the component that is a surface-sealed configuration. Enclosing surface 258 surrounds all exterior sides of the interconnected physical supports of the macrocellular support structure. Enclosing surface 258 may comprise a material different from that of the interconnected physical supports. Alternatively, enclosing surface 258 may comprise the same material as that of the interconnected physical supports. This sealed surface does not allow fluids, such as gases, liquids, or supercritical fluids, to enter or exit the macrocellular support structure; rather, the structure and any fluid contained within the pores are fluidically sealed within the structure. Based on permeability, fluids may move within the structure throughout the component and redistribute heat by mass convection. In one or more embodiments, the surface seal is bonded or connected to the interconnected physical supports of the macrocellular support structure.

[0053]

[0067] In one or more embodiments, each portion of the surface-sealed component comprises a different material. In one or more embodiments in which each portion of the surface-sealed component comprises a different material, the coefficients of expansion of different portions of the surface-sealed component are within ±10% of each other. In one or more embodiments, each portion of the surface-sealed component comprises the same material. While each portion of the surface-sealed component may comprise the same material, in one or more embodiments, the component of the surface-sealed configuration is a single component. In one or more embodiments, one, some, or all of the exterior-facing surfaces of the enclosing surface may be surface-modified.

[0054]

[0068] When surface-sealed components are present, the pores of the macrocell support structure are filled with a gas, such as nitrogen, argon, helium, other noble gases, and other gases that are generally non-reactive with the components, and combinations thereof. The gas within the surface-sealed configuration is either at or below atmospheric pressure at room temperature. This allows the pressure of the gas trapped within the surface-sealed components to increase upon exposure to processing heat. In one or more embodiments, the pressure within the surface-sealed components at room temperature is about 1×10 -5atmosphere to about 1.0 atmosphere, for example, 0.00001, 0.0001, 0.001, 0.01, and 0.1 atmosphere to about 0.2, 0.3, 0.5, 0.7, 0.8, 0.9, and 1.0 atmosphere (including all combinations and endpoints of the ranges).

[0055]

[0069] 3A and 3B provide top and side views, respectively, of a component comprising a macrocell support structure configured for use with an epitaxial growth processing chamber. As shown in FIGS. 3A and 3B, in one or more embodiments, the component comprising a macrocell support structure configured for use with an epitaxial growth processing chamber includes an upper liner 313. The upper liner 313 is similar to the upper liner 113 described for processing chamber 100 in FIG. 1. While an embodiment of upper liner 313 is shown in FIGS. 3A and 3B, one skilled in the art will appreciate that embodiment upper liners may have different overall physical dimensions, such as, but not limited to, thickness, width, circumference, and diameter, suitable for proper operation in what is understood to be an epitaxial growth processing chamber.

[0056]

[0070] Looking along diagrammatic line AA in FIG. 3A , there may be one or more useful macrocell support structure configurations for use with epitaxial growth processing chambers. In one or more embodiments, the upper liner is configured such that the upper liner is comprised of a freestanding macrocell support structure. In one or more embodiments, the upper liner is configured such that the upper liner consists essentially of or consists of a freestanding macrocell support structure. FIG. 3C illustrates a freestanding macrocell support structure configuration for the upper liner. The upper liner may be a freestanding macrocell support structure configuration, such as depicted as rectangle 300 in FIG. 3C, which is similar to rectangle 200 in FIG. 2A, although other macrocell support structures may also be used. In one or more embodiments, the interconnected physical supports of the upper liner macrocell support structure are comprised of a ceramic or glass material. Such materials are completely inert to the epitaxy processing environment.

[0057]

[0071] In one or more embodiments, the upper liner is configured with a surface-sealed configuration. Figure 3D illustrates the configuration of the surface-sealed macrocell support structure of the upper liner. Rectangle 350 is similar to rectangle 250, but the example illustrated in Figure 3D illustrates non-reticulated interconnected physical supports within the surface-sealed macrocell support structure of the upper liner. As previously discussed, the interconnected physical supports of the components of the embodiment can be either reticulated or ordered. In one or more embodiments, the surface-sealed macrocell support structure of the upper liner is configured with a ceramic or glass material. Gas is contained within the pores and voids of the surface-sealed macrocell support structure of the upper liner.

[0058]

[0072] The surface of a surface-sealed macrocellular support structure has a determinable amount of material, which may vary depending on the embodiment. For example, the thickness of a sealed surface, such as Tss shown in FIG. 3D , i.e., the thickness of a sealing surface, such as 358, may be characterized as a relative percentage of the cross-sectional area of ​​the component. This may be useful when the thicknesses of various surfaces of a component are not equal or comparable on all sides, but there is an overall consistency of surface protection throughout the component. In one or more embodiments, the sealing surface has a cross-sectional area within a range of about 0.001 volume percent to about 25 volume percent of the cross-sectional area of ​​the upper liner, e.g., about 0.001, 0.01, 0.1, 1, 2, 3, 5, 10, 15, 20, and 25 volume percent (including all combinations and endpoints of the ranges). Those skilled in the art will understand that this cross-sectional area value will vary with viewing position and, therefore, may vary from one value to another within a given range. In other instances, such as when the sealing surface thickness is more uniform across the component, the thickness of the sealing surface may simply be measured directly to determine an absolute thickness. In one or more embodiments, the surface sealing thickness of the upper liner is in the range of about 0.01 mm (millimeter) to about 3 mm, e.g., about 0.01, 0.02, 0.03, 0.04, 0.05, 0.1, 0.2, 0.3, 0.5, 0.7, and 0.9 to about 1.0, 1.5, 2.0, 2.5, and 3.0 mm, inclusive of all combinations and endpoints of the ranges.

[0059]

[0073] 4A and 4B provide side and perspective views, respectively, of components comprising a microcell support structure configured for use with an epitaxial growth processing chamber. As shown in FIGS. 4A and 4B, in one or more embodiments, components comprising a microcell support structure for use with an epitaxial growth processing chamber can include a lower liner 411. The lower liner 111 is similar to the lower liner 111 described for processing chamber 100, as shown in FIG. 1. While an embodiment of lower liner 411 is shown in FIGS. 4A and 4B, one skilled in the art will appreciate that embodiment lower liners may include those having similar or different overall physical dimensions, such as, but not limited to, thickness, width, circumference, and diameter, suitable for proper operation in what is understood to be an epitaxial growth processing chamber.

[0060]

[0074] Looking along diagram line BB in FIG. 4B , there may be one or more useful macrocell support structure configurations for use with epitaxial growth processing chambers. In one or more embodiments, the lower liner is configured such that the lower liner is comprised of a freestanding macrocell support structure, and in one or more embodiments, the lower liner is configured such that the lower liner consists essentially of or consists of a freestanding macrocell support structure. FIG. 4C illustrates a freestanding macrocell support structure configuration for the lower liner. The lower liner may be a freestanding macrocell support structure configuration, such as that shown as rectangle 400 in FIG. 4C, which is similar to rectangle 200 in FIG. 2A, although other macrocell support structures may also be used. In one or more embodiments, the interconnected physical supports of the lower liner's macrocell support structure are comprised of a ceramic or glass material.

[0061]

[0075] In one or more embodiments, the lower liner is configured with a surface-sealed configuration. Figure 4D illustrates the configuration of a surface-sealed macrocell support structure for the lower liner. Rectangle 450 is similar to rectangle 250, but the example shown in Figure 4D illustrates non-reticulated interconnected physical supports within the surface-sealed macrocell support structure of the lower liner. In one or more embodiments, the surface-sealed macrocell support structure of the lower liner is constructed of a ceramic or glass material. Gas is contained within the pores and voids of the surface-sealed macrocell support structure of the lower liner. In one or more embodiments, the surface seal has a cross-sectional area within a range of about 0.001 volume percent to about 25 volume percent of the cross-sectional area of ​​the lower liner, for example, about 0.001, 0.01, 0.1, 1, 2, 3, 5, 10, 15, 20, and 25 volume percent (including all combinations and endpoints of the ranges). Those skilled in the art will understand that this cross-sectional area value will vary with viewing position and therefore may vary from one value to another within a given range. In one or more embodiments, the sealing surface thickness of the lower liner is within a range of about 0.01 mm (millimeter) to about 3 mm, for example, about 0.01, 0.02, 0.03, 0.04, 0.05, 0.1, 0.2, 0.3, 0.5, 0.7, and 0.9 to about 1.0, 1.5, 2.0, 2.5, and 3.0 mm, inclusive of all combinations and endpoints of that range.

[0062]

[0076] In one or more embodiments, the surface-sealed macrocell support structure of the lower liner has a surface-sealed structure comprising a ceramic or glass material. In one or more embodiments, the surface-sealed macrocell support structure for the lower liner has an interconnected physical support for the macrocell support structure comprising a ceramic or glass material. In one or more embodiments, the composition of the ceramic or glass surface-sealed structure and the interconnected physical support comprise the same material.

[0063]

[0077] FIG. 5A-1 provides, for general discussion purposes, a top view of a non-embodiment component for use with a processing chamber. The epitaxial base plate 512A may be configured similarly to the base plate 112 of the processing chamber 100 of FIG. 1. FIG. 5A-2 provides, for general discussion purposes, a perspective view along line CC of a non-embodiment component for use with the processing chamber shown in FIG. 5A-1. The exposed view in FIG. 5A-2 is directed toward the side of the base plate 512A, which defines the substrate slot 501, and away from one or more gas exhaust outlets 516. In FIGS. 5A-1 and 5A-2, the base plate 512A is shown with several features, including the substrate slot 501, an exterior surface 503, and an interior surface 505, which define the physical boundaries of the base plate 512A itself. The interior surface 505 also defines a cylindrical space 507 within the base plate 512A, which is at least a portion of the processing space previously described as processing space 136 in FIG. 1 of the processing chamber 100. Both the cylindrical space 507 and the interior surface 505 have a diameter "D" between opposing points. In the case of the base plate 512A, there is also a generally uniform height "H." Using FIG. 5A-2, both the end of the interior surface (arrow 509) at the diagram can be observed, as well as the interior surface of the interior structure 509 around the remaining semicircular surface, including the view through the substrate slot 501. At the point where exposure view CC occurs, the interior structure 509 of the base plate 512A is revealed, which in this example is made entirely of solid material and has a thickness "Tb," which represents the thickness of the base plate at that diagram. While Figures 5A-1 and 5A-2 show a non-embodiment base plate 512A for purposes of discussion, those skilled in the art will understand that both the non-embodiment base plate and the embodiment base plate may have similar or different overall physical dimensions suitable for proper operation within what is known as an epitaxial growth processing chamber, including but not limited to the circumference and diameter of the internal processing space; the thickness, width, and length of the base plate; the dimensions and configuration of the substrate slot; and the number, location, and type of gas exhaust outlets.

[0064]

[0078] FIG. 5B-1 provides a top-down view of components comprising a macrocell support structure for use with an epitaxial growth processing chamber. FIG. 5B-1 provides an exposed view of components comprising a macrocell support structure for use with an epitaxial growth processing chamber, taken along view line CC'. In one or more embodiments that can be combined with other embodiments, a freestanding macrocell support structure is bonded or connected to the interior surface of a base plate, such as the ring-shaped or annular configuration of freestanding macrocell support 500, seen from above and below in FIG. 5A-1. The ring-shaped or annular configuration of the freestanding macrocell support is shown integrated onto an existing structure, such as epitaxial base plate 512B, without removing or replacing the internal structure 509B; i.e., the internal structure 509A of epitaxial base plate 512A and the internal structure 509B of epitaxial base plate 512B are similar or identical in configuration. Base plates 512A and 512B have the same base plate thickness (Tb) at the same perspective (along view lines CC and CC', respectively). Ring- or annular-configured macrocellular support structure 500 is coupled or connected to interior surface 505 of base plate 512B using coupling or connection techniques including friction, adhesive, or physical (such as bolts, retaining screws, or key slots on or through interior surface 505). In one or more embodiments, the ring- or annular-configured freestanding macrocellular support is configured to frictionally couple with the interior surface of the base plate. The outer surface of ring- or annular-configured macrocellular support structure 500 optionally has approximately the same diameter (D) as interior surface 505 of base plate 512A.

[0065]

[0079] Although not shown in detail, the ring-shaped or annular configuration of the freestanding macrocell support structure is configured to operate within the base plate. For example, the ring-shaped or annular configuration would define an extension of the gap that the base plate 512B defines as the substrate slot 501 so that a substrate may enter or exit the processing chamber. As can be seen in FIG. 5A-2, the substrate slot 501 is visible through the ring-shaped or annular configuration of the freestanding macrocell support 500. Similarly, the ring-shaped or annular configuration would also define an extension of one or more flow conduits that the base plate 512B defines as one or more gas exhaust outlets 516, as can be seen in the top view provided in FIG. 5A-1.

[0066]

[0080] The ring-shaped or annular configuration 500 has an annular thickness (Tr) within a range of about 0.1% to about 25% of the diameter (D) of the inner surface of the base plate, for example, about 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0, 7.0, and 9.0% to about 10.0, 11.0, 12.0, 13.0, 14.0, 15.0, 20.0, and 25.0% of the diameter (D) of the inner surface of the base plate. Thus, the annular thickness (Tr) of the ring-shaped or annular configuration of the freestanding macrocell support for the base plate relatively influences the "working" cylindrical space 507'. While the cylindrical space 507', if present, is smaller than the cylindrical space 507, because the void space of the ring-shaped or annular configuration of the freestanding macrocell support can also function as part of the processing space, in relative terms, the gas volume is not reduced, but the physical volume that a substrate may occupy may be reduced by a larger amount. The reduction in volume of the cylindrical space 507' is relatively on the order of D minus Tr, which is defined as "Dr" in FIG. 5B-2. Dr is defined as the diameter formed by opposing points along the inner surface 511 of the ring-like or annular configuration of the macrocellular support structure 500, as seen in FIG. 5B-2.

[0067]

[0081] The freestanding macrocell support structure of the epitaxial base plate in one or more embodiments has interconnected physical supports constructed from ceramic or glass materials.

[0068]

[0082] FIG. 5C-1 provides a top view of components comprising a macrocell support structure for use with an epitaxial growth processing chamber according to one or more embodiments. An exposed view of components comprising a surface-sealed macrocell support structure for use with an epitaxial growth processing chamber provided in FIG. 5C-1 is provided along line CC″. In another embodiment, the base plate is a surface-sealed configuration. As shown along line CC″ in FIG. 5C-2, the surface-sealed macrocell support structure 550 shows the presence of an internal structure 509C having a thickness Tb, which is comprised of a macrocell support structure similar to the surface-sealed macrocell support structure shown in rectangle 250 in FIG. 2F. Those skilled in the art will appreciate that other macrocell support structures can be used for the base plate.

[0069]

[0083] As seen in FIG. 5C-2, the entire macrocellular support structure 500 is surface sealed, in this example, by sealing surface 558. The surface sealed structure has a thickness (Tss). In one or more embodiments, the surface sealed structure comprises a cross-sectional area in the range of about 0.001 volume % to about 25 volume % of the cross-sectional area of ​​the base plate, for example, about 0.001, 0.01, 0.1, 1, 2, 3, 5, 10, 15, 20, and 25 volume %, including all combinations and endpoints of the ranges. One skilled in the art will appreciate that this cross-sectional area value will vary with viewing position and, therefore, may vary from one value to another within a range based on the position measured.

[0070]

[0084] In one or more embodiments, the surface-sealed macrocell support structure for the epitaxial base plate has a surface-sealed structure comprising a ceramic or glass material. In one or more embodiments, the surface-sealed macrocell support structure for the epitaxial base plate has interconnected physical supports for the macrocell support structure comprising a ceramic or glass material.

[0071]

[0085] FIG. 5D-1 provides a top view of components comprising a macrocell support structure for use with an epitaxial growth processing chamber, according to one or more embodiments. FIG. 5D-2 provides an exposed view of components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 5D-1, taken along line CC'''. In one or more embodiments, the base plate is a sandwich-type configuration. As depicted in FIG. 5D-2 along line CC''', the sandwich-type macrocell support structure 540 shows the presence of an internal structure 509D having a thickness Tb, which is comprised of a macrocell support structure similar to the sandwich-type macrocell support structure shown in rectangle 240 in FIG. 2E. When viewed from above, the sandwich-type macrocell support structure 540, particularly the region of the macrocell support structure 500 between the first plate 546 and the second plate 547, is visible. While this example does not have a literal "plate" shape, which may conjure up the image of a flat surface, those skilled in the art will understand that this term is consistent with the example sandwich-type macrocell support structure configuration previously described and associated with rectangle 240 in FIG. 2E and is applicable here and in other embodiments.

[0072]

[0086] 5D-2, the entire macrocell support structure 500 is contained between a first plate 546, which serves as the exterior-facing plate of the base plate 512D, and a second plate 547, which serves as the interior-facing plate of the base plate 512D. The first plate has a thickness (Te), and the second plate has a thickness (Ti). In one or more embodiments, the thickness (Te) of the first plate is within a range from about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), inclusive of all combinations and endpoints of those ranges. In one or more embodiments, the thickness of the second plate (Ti) is in the range of about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations and endpoints of the ranges. In one or more embodiments, the first plate and the second plate have the same or similar thickness. In another embodiment, the first plate has a greater thickness than the second plate. In another embodiment, the first plate has a lesser thickness than the second plate. There may be a difference in thickness between the two plates for various reasons, including, but not limited to, the overall mechanical strength of the base plate and the safety and containment of process fluids during operation. Therefore, the thickness of the macrocell support structure is determined as the thickness of the base plate (Tb) minus the sum of the thicknesses of the two plates (Ti + Te). Those skilled in the art will appreciate that the thickness of the first plate and the thickness of the second plate will vary with viewing position and therefore may vary from one value to another within a range based on the position at which they are measured.

[0073]

[0087] In such a sandwich configuration, the interconnected physical supports of the macrocell support structure may be constructed of metal. In one or more embodiments, the first plate and the second plate are made of metal. In one or more embodiments that may be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnected physical supports. However, it is also contemplated that either or both of the first plate and the second plate may be made of a different metal material than the interconnected physical supports.

[0074]

[0088] FIG. 6A-1 provides, for general discussion purposes, a top view of a non-embodiment component for use with a processing chamber. The epitaxial exhaust cap 678A may be configured similarly to the exhaust cap 178 of the processing chamber 100 of FIG. 1. FIG. 6A-2 provides, for general discussion purposes, a perspective view along view line E-E of a non-embodiment component for use with the processing chamber provided in FIG. 6A-1. The exposed view in FIG. 6A-2 is oriented toward what would be the vertical side of the exhaust cap 678A when positioned as part of a processing chamber. In the exposed view, an inlet port 601 is defined by a mating flange 613 and typically fluidly communicates with a processing chamber, such as the processing chamber 100, when mated or connected. The inlet port 601 is fluidly accessible to an interior 607, which is largely defined by an interior surface 605. An exterior surface 603 is visible as the top of the exhaust cap 678A in both FIGS. 6A-1 and 6A-2. 609A is the internal structure of exhaust cap 678A. Exit port 615 provides fluid access to interior 607, allowing gas traveling through 678A to exit exhaust cap 678A. Several dimensions are useful for describing aspects of the exhaust cap of potential embodiments. "Hi" is defined as the height between opposing points along the lower and upper inner surfaces 605 of exhaust cap 678A. "Li" is defined as the length or depth between inlet port 601 and the opposing surface of exhaust cap 678A, for example, along line EE. "Tc" is the surface thickness of exhaust cap 678A, e.g., the thickness of internal structure 609A. While a non-embodiment exhaust cap 678A is shown in Figures 6A-1 and 6A-2, those skilled in the art will appreciate that embodiment exhaust caps may have different overall physical dimensions, including but not limited to thickness, width, height, volume, location and diameter of outlet ports, and means of coupling or connection to the base plate, suitable for proper operation in what is understood to be an epitaxial growth processing chamber.

[0075]

[0089] In some embodiments of the exhaust cap, Figure 6A-1 depicts an external, overhead view of all of the described embodiment macrocell support structures. Figure 6-2 provides a second exposed view of the components comprising the macrocell support structure for use with the epitaxial growth processing chamber provided along view line E-E. Figures 6B-2, 6C-2, and 6D-2 use hatching to indicate the presence and location of the macrocell support structure for clarity. In one or more embodiments that can be combined with other embodiments, the freestanding macrocell support structure is bonded or connected to the interior surface of the exhaust cap, such as a sheet of freestanding macrocell support 600. The freestanding macrocell support is shown integrated onto an existing structure, such as structure epitaxial exhaust cap 678B, without removing or replacing the interior structure 609B; i.e., the interior structure 609A of epitaxial exhaust cap 678A and the interior structure 609B of epitaxial exhaust cap 678B are of similar or identical construction. Vent caps 678A and 678B have the same vent cap (Tc) at the same perspective (respectively along view line EE). Freestanding macrocell support structure 600 is bonded or connected to interior surface 605 of vent cap 678B using any known or known bonding or connection technique, as previously described. In one or more embodiments, freestanding macrocell support structure 600 is configured to frictionally bond with the interior surface of the vent cap. The exterior surface of freestanding macrocell support structure 600, in some embodiments, has approximately the same shape and dimensions (including interior height (Hi) and interior length (Li)) as interior surface 605 of vent cap 678B.

[0076]

[0090] Although not shown in detail, the freestanding macrocell support structure is configured to operate within the exhaust cap. For example, the freestanding macrocell support structure defines an extension of the void that exhaust cap 678B defines as exhaust port 615, allowing gas to be exhausted from the exhaust cap. Other features may be provided as needed to support operation.

[0077]

[0091] The freestanding macrocellular support structure 600 has a thickness (Tr) ranging from about 0.1% to about 25% of the height (Hs) of the interior surface of the exhaust cap, e.g., from about 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0, 7.0, and 9.0% to about 10.0, 11.0, 12.0, 13.0, 14.0, 15.0, 20.0, and 25.0% of the height of the interior surface of the exhaust cap. The thickness (Tr) of the freestanding macrocellular support structure relatively impacts the "working" interior 607' in a similar manner as described above for the cylindrical space 507' of Figures 5B-1 and 5B-2. The gas volume is reduced by the volume occupied by the interconnected physical supports, but the physical volume is limited by the height Hs, which is the two thicknesses Tr plus the original height H of the exhaust cap 678A. The same can be characterized for the physical length reduction between the original length Li and the modified length Ls for the interior 607', the difference of which should be Tr. Given that only steam passes through the exhaust cap 678B, the loss of useful volume is minimal.

[0078]

[0092] The free-standing macrocell support structure of the exhaust cap in one or more embodiments has interconnected physical supports constructed from ceramic or glass materials.

[0079]

[0093] FIG. 6C-2 provides an exposed view along line E-E of components comprising a surface-sealed macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 6A-1. In another embodiment, an exhaust cap 678C is configured with a surface-sealed configuration. As shown along line E-E in FIG. 6C-2, the surface-sealed macrocell support structure 650 shows the presence of an internal structure 609C having a thickness Tc, which is configured with a macrocell support structure similar to the surface-sealed macrocell support structure shown in rectangle 250 in FIG. 2F. One skilled in the art will appreciate that other macrocell support structures can be used for the exhaust cap.

[0080]

[0094] As seen in FIG. 6C-2, the entire macrocell support structure 600 is surface sealed, in this example, by sealing surface 658. The surface sealed structure has a thickness (Tss). In one or more embodiments, the surface sealed structure comprises a cross-sectional area in the range of about 0.01 volume percent to about 25 volume percent of the cross-sectional area of ​​the exhaust cap, for example, about 0.001, 0.1, 1, 2, 3, 5, 10, 15, 20, and 25 volume percent (including all combinations and endpoints of the ranges). One skilled in the art will appreciate that this cross-sectional area value will vary with viewing position and, therefore, may vary from one value to another within a range based on the position measured.

[0081]

[0095] In one or more embodiments, the surface-sealed macrocell support structure for the epitaxial exhaust cap has a surface-sealed structure comprising a ceramic or glass material. In one or more embodiments, the surface-sealed macrocell support structure for the epitaxial exhaust cap has interconnected physical supports for the macrocell support structure comprising a ceramic or glass material.

[0082]

[0096] FIG. 6D-2 provides an exposed view along line E-E of components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 6A-1. In one or more embodiments, the exhaust cap is a sandwich-type configuration. In other embodiments, the exhaust cap is configured to be a sandwich-type configuration. As depicted along line E-E in FIG. 6D-2, the sandwich-type macrocell support structure 640 shows the presence of an internal structure 609D space having a thickness Tc, which is comprised of a macrocell support structure similar to the sandwich-type macrocell support structure shown in rectangle 240 in FIG. 2E. The region of the macrocell support structure 600 between the first plate 646 and the second plate 647.

[0083]

[0097] 6D-2, the entire macrocell support structure 600 is contained between a first plate 646, which serves as the exterior-facing plate of the exhaust cap 678D, and a second plate 547, which serves as the interior-facing plate of the exhaust cap 678D. The first plate has a thickness (Te), and the second plate has a thickness (Ti). In one or more embodiments, the thickness (Te) of the first plate is within a range of about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), inclusive of all combinations and endpoints of those ranges. In one or more embodiments, the thickness of the second plate (Ti) is in the range of about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations and endpoints of the ranges. In one or more embodiments, the first plate and the second plate have the same or similar thickness. In another embodiment, the first plate has a greater thickness than the second plate. In another embodiment, the first plate has a smaller thickness than the second plate. As mentioned above, the difference in thickness between the two plates can occur for various reasons. Therefore, the thickness of the macrocell support structure is determined as the thickness of the exhaust cap (Tc) minus the sum of the thicknesses of the two plates (Ti + Te). Those skilled in the art will appreciate that the thickness of the first plate and the thickness of the second plate will vary with viewing position and therefore may vary from one value to another within a range based on the position at which they are measured.

[0084]

[0098] In such a sandwich configuration, the interconnected physical supports of the macrocell support structure may be constructed of metal. In one or more embodiments, the first plate and the second plate are made of metal. In one or more embodiments that may be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnected physical supports. However, it is also contemplated that either or both of the first plate and the second plate may be made of a different metal material than the interconnected physical supports.

[0085]

[0099] FIG. 7A provides a perspective view of several components comprising a microcell support structure configured for use with an epitaxial growth processing chamber. As shown in FIG. 7A, in one or more embodiments, components comprising a microcell support structure for use with an epitaxial growth processing chamber can include a jet ring, e.g., jet ring 780. Also shown in FIG. 7A and coupled to jet ring 780, in one or more embodiments, components comprising a microcell support structure for use with an epitaxial growth processing chamber can include a jet cap, e.g., jet cap 790. While embodiment jet ring 780 and embodiment jet cap 790 are shown in FIG. 7A, one skilled in the art will understand that either embodiment of the jet cap or jet ring may have similar or different overall physical dimensions, such as thickness, width, circumference, number of jet orifices, the manner and means by which the jet cap and jet ring are coupled to one another, or diameter, if they are unitary, suitable for proper operation in what is understood to be an epitaxial growth processing chamber.

[0086]

[0100] Viewed along view plane FF in FIG. 7A , there may be one or more macrocell support structures useful for constructing an injection ring for use in an epitaxial growth processing chamber. FIG. 7B provides an exposed view, along view plane FF, of the components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 7A . In one or more embodiments, which may be combined with other embodiments, the freestanding macrocell support structure is bonded or connected to the interior surface of the injection ring 780, as is the ring-shaped or annular configuration of the freestanding macrocell support 700. As can be seen in FIG. 7B , none of the internal structure 709B of the injection ring 780 is modified. The ring-shaped or annular configuration of the macrocell support structure 700 is similar to the ring-shaped or annular configuration of the macrocell support structure 500 provided on the base plate 512B, although certain configurational differences, such as different ports or holes for supporting the introduction of gases, are contemplated. The ring-shaped or annular configuration of freestanding macrocell supports is shown integrated onto an existing structure, such as a structure epitaxial injection ring 780, without removing or replacing the internal structure 709B. The ring-shaped or annular configuration of macrocell support structure 500 is coupled or connected to the inner surface 505 of the injection ring 780 using bonding or connection techniques including friction, adhesive, or physical (such as bolts, retaining screws, or key slots on or through the inner surface 785). In one or more embodiments, the ring-shaped or annular configuration of freestanding macrocell supports is configured to frictionally couple with the inner surface of the injection ring. The outer surface of the ring-shaped or annular configuration of macrocell support structure 700, in some cases, has approximately the same diameter as the inner surface 785 of the injection ring 780.

[0087]

[0101] Although not shown in detail, the freestanding macrocell support structure in a ring-like or annular configuration is configured to operate within the injection ring, for example, the ring-like or annular configuration defines an extension of one or more flow conduits that the injection cap defines to allow gas flow to the operation region.

[0088]

[0102] The ring-shaped or annular configuration 500 has an annular thickness (Tr) in the range of about 0.1% to about 25% of the diameter of the inner surface of the injection ring, for example, about 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0, 7.0, and 9.0 to about 10.0, 11.0, 12.0, 13.0, 14.0, 15.0, 20.0, and 25.0% of the diameter of the inner surface of the injection ring.

[0089]

[0103] The free-standing macrocell support structure of the epitaxial injection ring in one or more embodiments has interconnected physical supports constructed from ceramic or glass materials.

[0090]

[0104] Figure 7C provides an exposed view along line E-E of components comprising a surface-sealed macrocell support structure for use with the epitaxial growth processing chamber provided in Figure 7A. In another embodiment, the injection ring is a surface-sealed configuration. As shown along line E-E in Figure 7C, the surface-sealed macrocell support structure 750 illustrates the presence of an internal structure 709C having a thickness that is comprised of a macrocell support structure similar to the surface-sealed macrocell support structure shown in rectangle 250 in Figure 2F. One skilled in the art will appreciate that other macrocell support structures can be used for the injection ring.

[0091]

[0105] As seen in Figure 7C, the entire macrocell support structure 700 is surface sealed, in this example, by sealing surface 758. The surface sealed structure has a thickness. In one or more embodiments, the surface sealed structure comprises a cross-sectional area in the range of about 0.001 volume percent to about 25 volume percent of the cross-sectional area of ​​the injection ring, e.g., about 0.01, 0.1, 1, 2, 3, 5, 10, 15, 20, and 25 volume percent (including all combinations and endpoints of the ranges). One skilled in the art will appreciate that this cross-sectional area value will vary with viewing position and, therefore, may vary from one value to another within a range based on the position measured.

[0092]

[0106] In one or more embodiments, the surface-sealed macrocell support structure of the epitaxial injection ring has a surface-sealed structure comprising a ceramic or glass material. In one or more embodiments, the surface-sealed macrocell support structure for the epitaxial injection ring has interconnected physical supports for the macrocell support structure comprising a ceramic or glass material.

[0093]

[0107] FIG. 7D provides an exposed view along line E-E of components comprising a macrocell support structure for use with the epitaxial growth processing chamber provided in FIG. 7A. In one or more embodiments, the injection ring is a sandwich-type configuration. As depicted along line E-E in FIG. 7D, the sandwich-type macrocell support structure 740 shows the presence of an inner structure 709D having a thickness, which is comprised of a macrocell support structure similar to the sandwich-type macrocell support structure shown in rectangle 240 in FIG. 2E. The sandwich-type macrocell support structure 740 is visible, particularly the region of the macrocell support structure 700 between the first plate 746 and the second plate 747.

[0094]

[0108] 7D , the entire macrocell support structure 700 is contained between a first plate 746, which functions as the exterior-facing plate, and a second plate 747, which functions as the interior-facing plate. The first plate has a thickness, and the second plate has a thickness. In one or more embodiments, the thickness of the first plate is in the range of about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), inclusive of all combinations and endpoints of those ranges. In one or more embodiments, the thickness of the second plate is in the range of about 0.05 mm to about 5 mm, e.g., 0.05, 0.07, 0.1, 0.2, 0.3, 0.5, 0.7, 0.9, and 1.0 to about 1.5, 2.0, 2.5, 3.0, 3.5, 4.0, 4.5, and 5.0 millimeters (mm), including all combinations and endpoints of the ranges. In one or more embodiments, the first plate and the second plate have the same or similar thickness. In another embodiment, the first plate has a greater thickness than the second plate. In another embodiment, the first plate has a lesser thickness than the second plate. There may be a difference in thickness between the two plates for various reasons, including, but not limited to, the overall mechanical strength of the base plate and the safety and containment of process fluids during operation. Therefore, the thickness of the macrocell support structure is determined as the thickness of the injection ring minus the sum of the thicknesses of the two plates. Those skilled in the art will appreciate that the thickness of the first plate and the thickness of the second plate will vary with viewing position and therefore may vary from one value to another within a range based on the position at which they are measured.

[0095]

[0109] In such a sandwich configuration, the interconnected physical supports of the macrocell support structure may be constructed of metal. In one or more embodiments, the first plate and the second plate are made of metal. In one or more embodiments that may be combined with other embodiments, both the first plate and the second plate are made of the same material as the interconnected physical supports. However, it is also contemplated that either or both of the first plate and the second plate may be made of a different metal material than the interconnected physical supports.

[0096]

[0110] Injection caps, such as injection cap 790 in Figure 7A, have similar features and aspects to previously described injection rings, such as injection ring 780, including the configuration, composition, and placement of embodiment macrocell support structures, in order to minimize operational differences when both the injection ring and the injection cap are operated in conjunction.

[0097]

[0111] While the specification contains details of several specific embodiments, these should not be construed as limitations on the scope of what may be claimed, but rather as descriptions of features that may be inherent in particular embodiments. Certain features described in this specification in the context of separate embodiments may also be implemented in combination in a single embodiment. Conversely, various features described in the context of a single embodiment may also be implemented in multiple embodiments separately or as part of any suitable subcombination. Furthermore, while the features described above may be described as functioning in a particular combination and may initially be claimed as such, one or more features from a claimed combination may, in some cases, be deleted from that combination, and the claimed combination may be directed to a subcombination or variations of the subcombination.

[0098]

[0112] Specific embodiments of the subject matter have been described. Other embodiments, modifications, and permutations of the described embodiments, as will be apparent to those skilled in the art, are within the scope of the following claims. Although the figures or claims may depict operations in a particular order, it should not be understood that performing the operations in the particular order depicted, or in any sequential order, or that performing all of the described operations (some operations may be considered optional) is necessary to achieve desired results. Under certain circumstances, multitasking or parallel processing (or a combination of multitasking and parallel processing) may be advantageous and will be performed where deemed appropriate.

[0099]

[0113] Furthermore, the separation or integration of various system modules and components in the above-described embodiments should not be understood as requiring such separation or integration in all embodiments, and it should be understood that the described program components and systems may generally be integrated into a single software product or packaged into multiple software products.

[0100]

[0114] Therefore, the exemplary embodiments set forth above do not define or limit the present disclosure, and other changes, substitutions, and alterations are also possible without departing from the spirit and scope of the present disclosure.

[0101]

[0115] Furthermore, the claimed embodiments are believed to be applicable to a computer system including at least a computer-implemented method, a non-transitory computer-readable medium storing computer-readable instructions for performing the computer-implemented method, and computer memory interoperability coupled to a hardware processor configured to execute the computer-implemented method or the instructions stored on the non-transitory computer-readable medium.

[0102]

[0116] While various steps in the method or process of the embodiments are shown and described sequentially, those skilled in the art will understand that some or all of the steps may be performed in a different order, combined, or omitted, or that some or all of the steps may be performed in parallel. The steps may be performed actively or passively. The method or process may be repeated or expanded to support multiple components or multiple users in a field environment. Therefore, the specific arrangement of steps shown in the flowcharts or figures should not be considered limited in scope.

[0103]

[0017] Unless otherwise defined, all technical and scientific terms used have the same meaning as commonly understood by one of ordinary skill in the art to which these systems, devices, methods, processes and compositions belong.

[0104]

[0118] The singular forms "a," "an," and "the" include plural references unless the context clearly dictates otherwise. Within the claims, reference to an element in the singular is intended to mean "one or more," and not "one and only one," unless expressly stated otherwise. The term "some" refers to one or more, unless expressly stated otherwise.

[0105]

[0119] Embodiments of the present disclosure may suitably "comprise," "consist," or "consist essentially of" the limited features disclosed, or may be practiced in the absence of any undisclosed limited features. As used in this specification and the appended claims, the words "comprise," "has," and "include," and all grammatical variations thereof, are each intended to have an open, non-limiting meaning that does not exclude additional elements or steps.

[0106]

[0120] "Optional" and "optionally" mean that the subsequently described material, event, or circumstance may or may not be present. The description includes cases where the material, event, or circumstance occurs and cases where it does not occur.

[0107]

[0121] The phrase "determining" includes a wide variety of actions. For example, "determining" can include calculating, computing, processing, deriving, investigating, looking up (e.g., looking up in a table, database, or another data structure), and ascertaining. Additionally, "determining" can include receiving (e.g., receiving information) and accessing (e.g., accessing data in a memory). Additionally, "determining" can include resolving, selecting, choosing, and establishing.

[0108]

[0122] When the words "approximately" or "about" are used, this may mean that the value may vary by ±10%, 5%, 2%, 1%, 0.5%, 0.1%, or 0.01%.

[0109]

[0123] Ranges may be expressed as from one particular value to another particular value, inclusive. When such a range is expressed, it will be understood that another embodiment is from the one particular value to the other particular value, and also includes all particular values ​​and combinations thereof within the range.

[0110]

[0124] Terms such as "first" and "second," when used, are assigned arbitrarily and are intended merely to distinguish between two or more components of a system, device, or composition. It is understood that the terms "first" and "second" serve no other purpose, are not part of the name or description of the components, and do not necessarily define the relative location or position of the components. Furthermore, it is understood that the mere use of the terms "first" and "second" does not require the presence of a "third" component, although that possibility is contemplated within the scope of the various embodiments described.

[0111]

[0125] While only a few exemplary embodiments have been described in detail, those skilled in the art will readily appreciate that many modifications can be made in the exemplary embodiments without substantially departing from the scope of the disclosure as described. Accordingly, all such modifications are intended to be within the scope of the present disclosure, as defined by the following claims. In the claims, means-plus-function phrases are intended to cover not only the structure described as performing the recited function and structural equivalents, but also equivalent structures. For example, a nail and a screw may not be structurally equivalent in that a nail uses a cylindrical surface to fasten wooden parts, while a screw uses a helical surface, but in the context of fastening wooden parts, the nail and the screw may be equivalent structures. It is Applicant's express intention not to invoke 35 U.S.C. Section 112(f) for any limitation of any of the claims, except where the claim expressly uses the words "means for" with the relevant function.

[0112]

[0126] The following claims are not intended to be limited to the embodiments provided, but are to be accorded the full scope consistent with the language of the claims.

Claims

1. An epitaxial growth processing chamber including components having a macrocell support structure having interconnected physical supports that define pores in fluid communication with each other.

2. 10. The epitaxial growth processing chamber of claim 1, wherein the component is a lower liner, an upper liner, a base plate, an exhaust cap, a jet ring, a jet cap, or a combination thereof.

3. 10. The epitaxial growth processing chamber of claim 1, wherein the interconnected physical supports comprise a metal, a ceramic or glass material, a polymeric material, or a combination thereof.

4. 10. The epitaxial growth processing chamber of claim 1, wherein the macrocell support structure has a porosity of about 60% to about 99% of the volume of the macrocell support structure.

5. 10. The epitaxial growth processing chamber of claim 1, wherein the pores of the macrocell support structure have an average pore size of about 1 to about 5000 microns.

6. 10. The epitaxial growth processing chamber of claim 1, wherein the macrocell support structure has a transmittance of between about 20% and about 100% of the pores of the macrocell support structure.

7. 10. The epitaxial growth processing chamber of claim 1, wherein the macrocell support structure is a freestanding configuration, a plate-supported configuration, a sandwich configuration, a surface-sealed configuration, or a solid polymer-filled configuration.

8. The epitaxial growth processing chamber of claim 7 , wherein the component is a single component.

9. 8. The epitaxial growth processing chamber of claim 7, wherein the macrocell support structure of the sandwich type configuration includes a first plate comprising a first material and a second plate comprising a second material, each of the first material and the second material being a material similar to a material of the interconnected physical supports.

10. 10. The epitaxial growth processing chamber of claim 9, wherein the first material and the second material are different.

11. 8. The epitaxial growth processing chamber of claim 7, wherein the macrocell support structure of the surface-sealed configuration includes an enclosure surface comprising a different material than the interconnected physical supports.

12. 12. The epitaxial growth processing chamber of claim 11, wherein the macrocell support structure of the surface-sealed configuration contains a fluid within the macrocell support structure.

13. A component configured for use in an epitaxial growth processing chamber, the component including a macrocell support structure having interconnected physical supports defining pores in fluid communication.

14. The component of claim 13 , wherein the component is a lower liner, an upper liner, a base plate, an exhaust cap, an injection ring, an injection cap, or a combination thereof.

15. The component of claim 13 , wherein the interconnected physical supports comprise a metal, a ceramic or glass material, a polymeric material, or a combination thereof.

16. The component of claim 13 , wherein the macrocellular support structure has a porosity of about 60% to about 99% by volume of the macrocellular support structure.

17. The component of claim 13, wherein the pores of the macrocellular support structure have an average pore size of from about 1 to about 5000 microns.

18. The component of claim 13 , wherein the macrocellular support structure has a permeability of from about 20% to about 100% of the pores of the macrocellular support structure.

19. 1. A component configured for use in an epitaxial growth processing chamber, comprising: a macrocellular support structure having interconnected physical supports defining fluidly communicating pores, the macrocellular support structure being in a freestanding, plate-supported, sandwich, surface-sealed, or solid polymer-filled configuration; , including, components.

20. 20. The component of claim 19, wherein the component is a single component.

Images