Multi-gas exhaust integrated module usable for wafer drying system and wafer drying system

Abstract

The purpose of this study is to address the issue of exhaust treatment in wafer drying processes using Marangoni drying technology, particularly the need for efficient exhaust and treatment of a wide variety of gases. [Solution] A multi-gas exhaust integrated module is provided, comprising: a tank body exhaust port connected to a drying tank body via a pipeline and having an exhaust air shut-off damper therein; a main body exhaust port arranged openly within the body and having a main body pressure regulating damper therein; a foamer exhaust port connected to the isopropyl alcohol foamer via a pipeline; an outer shell having the tank body exhaust port, main body exhaust port, and foamer exhaust port respectively, and having an internal cylinder connected to the exhaust air shut-off damper; an upstream connecting pipe having one end connected to the exhaust port of the outer shell and the other end connected to an intermediate air adjusting pipe and having an internal main circuit pressure regulating damper; an intermediate air adjusting pipe having an intake end connected to the intermediate connecting pipe and an exhaust end connected to an exhaust pipe, and having a rotary cylinder module at its upper part, the rotary cylinder module being connected to a total circuit shut-off damper in the intermediate air adjusting pipe; and an exhaust pipe having an exhaust end extending outside the wafer drying system and connected to an exhaust transport pipe on the factory side.

Description

[Technical Field]

[0001] The present invention relates to the field of semiconductor equipment, and more particularly to an integrated multi-gas exhaust module that can be used in a wafer drying system and the wafer drying system. [Background technology]

[0002] Isopropyl alcohol (IPA) is used in the drying process of wafers using semiconductor processing equipment. Specifically, the IPA replacement drying technique and the Marangoni drying technique are the main methods used. These drying processes use large or moderate amounts of IPA vapor and nitrogen gas, and these gases are discharged through an exhaust system after use.

[0003] However, other gases emitted may not only affect environmental safety but also adversely affect drying efficiency and quality.

[0004] Therefore, there is a need for an exhaust control method and system that can apply multiple drying processes in an integrated manner, and that can improve the IPA replacement process in conjunction with the operation of the actual drying module and solve the exhaust issues in wafer drying processes based on Marangoni drying technology. Summary of the Invention [Problem to be solved by the invention]

[0005] SUMMARY OF THE INVENTION An object of the present invention is to overcome the above-mentioned problems in the prior art and to provide an integrated multi-gas exhaust module that can be used in a wafer drying system.

[0006] The integrated module of the present invention effectively solves the exhaust problem during the wafer drying process by adopting an integrated exhaust control method. [Means for solving the problem]

[0007] To solve the above-mentioned problems, the present invention provides the following technical configuration: A multi-gas discharge integrated module usable in a wafer drying system according to the present invention includes a main body, a drying tank body, and an isopropyl alcohol (IPA) foamer provided in the wafer drying system, and the multi-gas discharge integrated module is installed in the wafer drying system and has the following structure:

[0008] That is, this module is provided with a tank body exhaust port connected to the drying tank body, and this exhaust port is provided with a damper (blocking plate) for blocking the passage of exhaust air. The wafer drying system also includes a main body exhaust port that is provided in an open state inside the main body, and a pressure adjustment damper for the main body is provided at this exhaust port. Furthermore, it is provided with a foamer exhaust port connected to the IPA foamer via a pipe.

[0009] All of these exhaust ports are provided on the outer shell (housing), and a cylinder is provided inside the outer shell, and the cylinder is connected to the exhaust air passage cut-off damper.

[0010] The integrated module of the present invention further includes a front-end connecting pipe, one end of which is connected to the exhaust port of the outer shell and the other end of which is connected to the intermediate air conditioning pipe, and a main circuit pressure regulating damper is provided in the front-end connecting pipe.

[0011] The inlet side of the central air conditioning pipe is connected to the upstream connecting pipe, and the outlet side is connected to the discharge pipe. A rotary cylinder module is provided on the central air conditioning pipe, and the module is connected to a main circuit disconnecting damper provided in the central air conditioning pipe.

[0012] The exhaust end of the exhaust pipe protrudes outside the wafer drying system and is connected to an exhaust transport pipe on the factory equipment side.

[0013] In a preferred embodiment of the present invention, at least one ring-shaped gasket made of fluororubber (fluorocarbon rubber) is provided between the exhaust pipe and the intermediate air adjustment pipe.

[0014] The rotary cylinder module further includes a rotary cylinder, a damper connecting rod, and a rotary cylinder shell, the output end of the rotary cylinder is connected to the damper connecting rod, which extends into the intermediate air conditioning pipe and is connected to the main circuit disconnecting damper. The rotary cylinder shell covers the entire rotary cylinder.

[0015] A rotary damper connecting rod is connected to the main circuit pressure adjusting damper in the upstream connecting pipe line, and one end of the rod projects outside the upstream connecting pipe line and is connected to the rotary damper opening / closing valve.

[0016] At least one ring-shaped gasket made of fluorocarbon rubber is also provided between the front connecting pipe and the exhaust port of the outer shell.

[0017] Furthermore, a blocking micro-cylinder module is provided inside the shell. This module includes a main shell, a cylinder, a blocking plate, a mounting plate, a module shell, and a circular support plate. The main shell is fixed to the inner wall of the shell via the mounting plate, and a thin cylinder is provided inside. The thin cylinder is surrounded by the main body shell and the module shell, and its output end protrudes outside the module shell and is connected to a circular support plate. The circular support plate is tightly connected to a blocking plate, and these two form an exhaust air blocking damper that can open and close the exhaust port of the drying tank body.

[0018] In the integrated multi-gas exhaust module for a wafer drying system according to the present invention, a further configuration is that a main body pressure regulating damper is provided at the main body exhaust port, and a rotary damper connecting rod is connected to the main body pressure regulating damper, one end of which protrudes outside the upstream connecting pipe and is connected to the rotary damper opening / closing valve.

[0019] The shell is provided with an openable top lid, which is provided with a foamer exhaust port and a main body exhaust port. The shell is also provided with a tank body exhaust port on its side wall.

[0020] A support plate member is provided at the bottom of the outer shell, and the outer shell can be fixed to the main body via the support plate member.

[0021] Furthermore, an interface for installing an exhaust ventilation interruption sensor is provided at the tank body exhaust port, and an interface for installing a factory exhaust pressure sensor is provided at the exhaust pipe.

[0022] The operating states of the integrated module of the present invention include a standby state, a tank operating state, a body positive pressure state, and a stop state.

[0023] In standby mode, the main body exhaust port is always open, the foamer exhaust port is half-open to allow the IPA foamer to exhaust air, and the tank body exhaust port is closed to ensure continuous exhaust of air from the IPA foamer and main body.

[0024] When the tank is operating, the main body exhaust port is always open, the foamer exhaust port is half open, the tank body exhaust port is open, the main circuit pressure adjustment damper is half open, the total circuit disconnection damper is open, and the exhausts of the tank body, IPA foamer, and main body are all operating.

[0025] When the main body is under positive pressure, the main body exhaust port is always open, the foamer exhaust port is closed, the tank body exhaust port is open, the main circuit pressure adjustment damper is half open, the total circuit disconnection damper is open, and the exhaust from the tank body and main body is activated.

[0026] When the unit is stopped, the main body exhaust port, foamer exhaust port, and tank body exhaust port are all closed, and the main circuit pressure regulating damper and total circuit disconnection damper are also closed, completely stopping the exhaust air and preventing the inflow of gas from the outside.

[0027] The present invention also relates to a wafer drying system having an integrated multi-gas exhaust module with the above-mentioned structure. [Effects of the Invention]

[0028] The integrated module of the present invention connects three gas emission sources in a wafer drying system (a mixed gas of IPA and N2 from the drying chamber, high-temperature fine particle gas from the IPA atomization system, and externally supplied N2) and can comprehensively control the exhaust at each drying stage.

[0029] By switching between each gas source within the module, complex exhaust processes can be handled with a single module, allowing for flexible exhaust control required for each process.

[0030] It also comes equipped with a shut-off device to prevent pressure drops, backflows, and particle contamination caused by the simultaneous inflow of different gas sources, ensuring high safety while enabling the control of multiple gases with a single module.

[0031] Furthermore, negative pressure can be controlled by a manual valve installed on the top without using external piping, allowing for efficient intake of the FFU (fan filter unit) and flow field formation. The rotating cylinder also allows for precise control of exhaust flow rate and speed, enabling optimal exhaust for each process stage.

[0032] This effectively suppresses and improves common defects such as water marks and particle residues that occur during the wafer drying process. [Brief explanation of the drawings]

[0033] [Figure 1] 1 is a schematic diagram showing the installation position of a multi-gas exhaust integrated module for a wafer drying system according to the present invention. [Figure 2] 1 is a partial cross-sectional view of an integrated module of the present invention. [Figure 3] 1 is an exploded view showing the configuration of the integrated module of the present invention. [Figure 4] 1 is a diagram illustrating the system configuration principle of the integrated module of the present invention. [Figure 5]FIG. 10 is a diagram showing an exhaust state in a standby state. [Figure 6] FIG. 10 is a diagram showing an exhaust state when the tank body is in operation. [Figure 7] 10 is a diagram showing an exhaust state in a state where the main body is under positive pressure. FIG. [Figure 8] FIG. 10 is a diagram showing the exhaust state in a stopped state. DETAILED DESCRIPTION OF THE INVENTION

[0034] Hereinafter, the integrated multi-gas exhaust module for a wafer drying system according to the present invention will be described in detail with reference to the accompanying drawings and specific examples, although the scope of protection of the present invention is not limited to these embodiments.

[0035] The integrated module of the present invention is designed to provide integrated exhaust of gases from multiple exhaust sources in a wafer drying system, efficiently providing the gas exhaust control required at each stage of the drying process.

[0036] This configuration centrally controls complex exhaust processing within a single module, and by linking with various drying processes, it contributes to solving exhaust issues in wafer drying.

[0037] As shown in Figure 1, a conventional wafer drying system includes a main body A that functions as a frame, an IPA foamer B, and a drying tank C. The integrated multi-gas exhaust module according to the present invention is installed in a wafer drying system having this configuration.

[0038] As shown in FIGS. 2 and 3, the configuration of the integrated module of the present invention includes the following elements:

[0039] The tank body exhaust port E is connected to the drying tank body C via a hose D, and an exhaust air blocking damper made of a circular support plate 18 is provided inside.

[0040] The main body exhaust port G is provided in an open state inside the main body A, and a main body pressure adjustment damper 22 is provided inside.

[0041] The foamer outlet F is connected to the IPA foamer B via a hose D.

[0042] The outer shell 19 is provided with a tank body exhaust port E, a main body exhaust port G, and a foamer exhaust port F, and is equipped with a thin cylinder 14 inside. The cylinder 14 is connected to a circular support plate 18, and the opening and closing of the tank body exhaust port E is controlled by operating this support plate.

[0043] The front-mounted connecting pipe 7 has one end connected to the exhaust port of the outer shell 19 and the other end connected to the intermediate air adjusting pipe 3, and a main circuit pressure adjusting damper 10 is provided inside the front-mounted connecting pipe 7.

[0044] The intermediate air conditioning pipeline 3 connects the outlet end of the upstream connecting pipeline 7 to the inlet end of the exhaust pipeline 1, and a rotary cylinder module for driving the total circuit disconnecting damper 6 is attached to the pipeline 3.

[0045] The outlet end of the exhaust pipe line 1 extends to the outside of the wafer drying system and is connected to an exhaust transport pipe on the factory equipment side.

[0046] Furthermore, an openable top lid 20 is provided on the top of the outer shell 19, and a foamer exhaust port F and a main body exhaust port G are arranged on the top lid 20. A tank body exhaust port E is provided on the side wall of the outer shell 19.

[0047] A support plate member 23 is attached to the bottom of the outer shell 19, thereby fixing the outer shell 19 to the main body A. The support plate member 23 functions as a structural support for the integrated module and is required to have a rigid structure, so it is preferably made of stainless steel (SS304). In this embodiment, two support plate members 23 are attached to the mounting holes at the bottom of the outer shell 19.

[0048] A micro-cylinder module that blocks gas is provided inside the outer shell 19. The module includes a main body outer shell 13, a thin cylinder 14, a blocking plate 15, a mounting plate 16, a module outer shell 17, and a circular support plate 18. The main body outer shell 13 is fixed to the inner wall of the outer shell 19 via the mounting plate 16.

[0049] The thin cylinder 14 is protected by the main body shell 13 and the module shell 17, and the output end of the cylinder 14 protrudes outside the main body shell 13 and is connected to a circular support plate 18. This support plate 18 is tightly connected to the blocking plate 15, and together they form an exhaust air passage / blocking damper for closing and sealing the tank body exhaust port E.

[0050] Furthermore, the micro-cylinder module, which is composed of the main body shell 13, thin cylinder 14, blocking plate 15, mounting plate 16, module shell 17, and circular support plate 18, blocks gas and realizes the switching and particle retention functions of the entire system. The main body shell 13 is attached to the mounting plate 16 and is responsible for accommodating and fixing the blocking module.

[0051] In selecting the material, aluminum alloy (AL6061) was selected as the most suitable material, taking into consideration its rigidity, strength, durability, and light weight. The thin cylinder 14 in the micro-cylinder module provides a movable path, and the circular blocking unit consisting of the blocking plate 15 and the circular support plate 18 temporarily blocks the inflow of gas from the tank body exhaust port E.

[0052] The shutoff plate 15 is made of a circular member made of polyurethane rubber, which has excellent airtightness and resistance to organic gases. To maintain good sealing and chemical resistance during shutoff, a gasket is provided at the joint, and the plate is fixed to the circular support plate 18 with bolts.

[0053] The thin cylinder 14 is fixed to one side of a mounting plate 16, which is provided inside an outer shell 19, and the cylinder 14 is disposed inside the outer shell 19. The outer shell 19 is provided with a square hole that allows the cylinder 14 to be attached and detached, and a sealed connection is required between the outer shell 19 and the mounting plate 16. Stainless steel (SS304) is preferably selected as the material for these components.

[0054] A seal gasket is attached to the joint between the mounting plate 16 and the outer shell 19 to ensure the barrier performance. The outer shell 19 and the main body outer shell 13 are integrated to form an outer shell unit, and the micro-cylinder 14 is housed inside.

[0055] The circular support plate 18 is connected to the thin cylinder 14 to form a circular plate-shaped support structure. Stainless steel (SS304) is preferably selected as the material for the support plate 18, taking into consideration its strength, rigidity, and chemical resistance.

[0056] Furthermore, at the front end of the outer shell 19, a curved pipe is arranged as the tank exhaust port E for introducing the process gas (IPA and N2 mixed gas) from the drying tank body C. The hollow space of the outer shell 19 can accommodate the micro-cylinder module described above.

[0057] A top cover 20 is provided on top of the outer shell 19, and this top cover is equipped with two gas inlet pipes. One is an atmospheric gas inlet pipe for the drying module connected to the main body exhaust port G, and the other is an inlet pipe connected to the IPA atomization system that introduces a high-temperature atomized IPA and N2 mixed gas.

[0058] Furthermore, a main body pressure adjustment damper 22 is provided at the main body exhaust port G, and this damper is controlled to open and close via a rotary connecting rod 21. One end of the rod 21 protrudes to the outside and is connected to the opening and closing valve 9, allowing manual adjustment of the opening degree.

[0059] To switch the drying module to atmospheric gas, the rotary damper 22 must be opened and closed, which is controlled via the rotary connecting rod 21 and the manual valve 9. The opening and closing valve 9 is set to an appropriate degree to create a stable negative pressure environment without external piping.

[0060] Stainless steel (SS304) is considered the most suitable material to meet the rigidity, chemical resistance, and durability required for these components.

[0061] Furthermore, an interface for attaching an exhaust airflow interruption sensor is provided at the tank body exhaust port E, and an interface for attaching a factory exhaust air pressure sensor is provided at the exhaust pipe 1. This allows the pressure inside the tank body exhaust port E to be detected by the exhaust airflow interruption sensor, and the wind pressure in the exhaust pipe 1 to be detected by the factory exhaust air pressure sensor, enabling precise control of exhaust.

[0062] A main circuit pressure regulating damper 10 is provided in the upstream connecting pipe 7, and is connected to a rotary damper connecting rod 8. One end of the connecting rod 8 protrudes outside the upstream connecting pipe 7 and is connected to a rotary damper opening / closing valve 9 for manual opening and closing operation.

[0063] When the operator rotates the on-off valve 9, the main circuit pressure regulating damper 10 rotates, controlling the opening and closing of the upstream connecting pipe 7. The main circuit pressure regulating damper 10 is incorporated into a tubular structure, and must maintain airtightness and low dust generation during rotation. For this reason, the damper 10 is provided with special ventilation holes, and is designed to prevent gas leakage to the outside even during rotation.

[0064] In selecting materials, rigidity, strength, and durability are required, so stainless steel (SS304) is selected as the optimal constituent material for the damper 10 and the opening / closing valve 9.

[0065] Furthermore, at least one ring-shaped gasket 2 is arranged between the front connecting pipe 7 and the exhaust port of the outer shell 19, and the gasket 2 is made of fluorine-based rubber (FKM) to ensure complete airtightness and prevent air leakage.

[0066] The mid-mounted adjustment duct 3 is also configured as a ring-shaped exhaust pipe that can be connected to the exhaust duct 1, and a ring-shaped gasket 2 made of fluorine-based rubber is similarly provided between it and the front-mounted connection duct 7. The gasket 2 is bolted at the connection point to maintain structural airtightness. Stainless steel (SS304) is suitable for these components from the viewpoints of rigidity, heat resistance, and corrosion resistance.

[0067] The exhaust pipe 1 is configured as a circular cylindrical exhaust pipe and is connected to the exhaust transport pipe on the factory side. A ring-shaped gasket 2 made of fluororubber is also placed between the exhaust pipe 1 and the intermediate ventilation pipe 3, and an airtight connection is achieved by tightening bolts.

[0068] Gasket 2 is important for preventing gas evaporation and leakage. The fluoroelastomer (FKM) used is a polymer elastomer with carbon-fluorine bonds, and compared to other rubber materials, it has superior physical properties, particularly tensile strength, structural strength, and heat resistance. In static sealing applications, it can be used for long periods in environments of 230°C, and can withstand temporary high temperatures of 250°C.

[0069] Furthermore, it has excellent chemical resistance and is highly corrosion-resistant against organic solvents, inorganic acids, strong oxidizing agents, and oils and fats, making it extremely useful in the exhaust path of wafer drying systems.

[0070] Furthermore, the rotary cylinder module includes a rotary cylinder 12, a damper connecting rod 5, and a rotary cylinder shell 11, and the output end of the rotary cylinder 12 is connected to the damper connecting rod 5. The damper connecting rod 5 is inserted into the intermediate air conditioning pipe 3 and connected to the total circuit disconnecting damper 6, which realizes the opening and closing control of the total circuit.

[0071] The rotary cylinder outer shell 11 is disposed on the outside of the rotary cylinder 12 and serves to protect it. Furthermore, the central air conditioning pipe 3 is provided with four rotary cylinder support columns 4, which are used to install and fix the rotary cylinder 12. The rotary cylinder 12 has four mounting holes on its bottom, which ensures secure fixation.

[0072] The damper connecting rod 5 transmits the driving force from the rotary cylinder 12 to the total circuit disconnection damper 6, rotating the damper and controlling the disconnection of the total circuit. The design requires that airtightness and low dust generation be maintained even during the rotation process, and the total circuit disconnection damper 6 is provided with special ventilation holes to prevent gas leakage to the outside.

[0073] In terms of material selection, stainless steel SS304 is used for the damper 6 and damper connecting rod 5 to ensure durability and rigidity, while aluminum alloy AL6061 is selected for the rotating cylinder outer shell 11 to achieve both light weight and durability.

[0074] The rotating cylinder 12 is attached to the centrally located air adjustment duct 3, and adjusts the flow rate and speed of the exhaust gas by controlling the opening and closing angle in conjunction with the damper connecting rod 5 and the total circuit disconnecting damper 6. The change in the ventilation cross section according to the opening and closing angle makes it possible to precisely control the flow rate and speed of the exhaust gas.

[0075] When the integrated module is in operation, the IPA and N2 mixed gas from the drying chamber is discharged synchronously with the gas injection. When the module is stopped, the gas flow is shut off to prevent particles from being sucked in by negative pressure and achieve isolation. This shutoff is achieved by driving the circular support plate 18.

[0076] The high-temperature, fine-particle IPA and N2 mixed gas supplied from the IPA atomization system is always open, and leakage is normally prevented by the negative pressure inside the IPA container. When switching from the IPA & N2 mixed gas to N2, this is connected to this module to release residual pressure.

[0077] The integrated multi-gas exhaust module of the present invention operates in conjunction with the operating state of the wafer drying system, and is switched according to each operating mode: standby state, tank body operating state, main body positive pressure state, and stop state.

[0078] The system configuration diagram of this integrated module shows the connections to each exhaust port and valve, as shown in Figure 4. The foamer exhaust port F is a regular opening used to exhaust the IPA foamer, and the tank body exhaust port E functions as DUMP4, which is controlled by the microcylinder module.

[0079] The main body exhaust port G is provided with a rotary damper 22, a rotary connecting rod 21, and an on-off valve 9, which act as DUMP 3 to regulate the pressure in the main body. The main circuit pressure regulating damper 10 and on-off valve 9 in the upstream connecting pipe 7 act as DUMP 2 to regulate the pressure in the main circuit.

[0080] In the mid-positioned air conditioning pipeline 3, a DUMP1 composed of a rotary cylinder module and a total circuit disconnection damper 6 is arranged to control the disconnection of the total circuit.

[0081] In this way, the foamer exhaust port F, tank body exhaust port E, and main body exhaust port G are each arranged on the outer shell 19, and the exhaust paths are integrated as needed, and exhaust is collectively discharged via the main circuit. The main body is provided with individually controllable valves, which ensures pressure and open / close state control.

[0082] As shown in Figure 5, in standby mode, valve DUMP3 on main body exhaust port G is half-open to allow ventilation, and foamer exhaust port F is always open to allow exhaust from the IPA foamer. Tank body exhaust port E is closed by valve DUMP4, and the drying tank is in standby mode. Main circuit pressure regulating damper 10 on the upstream connecting line 7 keeps valve DUMP2 half-open to control ventilation, and total circuit disconnecting damper 6 opens valve DUMP1, allowing continuous exhaust from the IPA foamer and main body.

[0083] As shown in Figure 6, when the drying chamber is in operation, valve DUMP3 at main chamber exhaust port G remains half-open, and foamer exhaust port F is always open to exhaust the IPA foamer. Valve DUMP4 at chamber exhaust port E is opened to exhaust the drying chamber. Valve DUMP2 is half-opened by main circuit pressure regulating damper 10 in the upstream connecting pipe 7, and valve DUMP1 is opened by total circuit disconnecting damper 6, so that the drying chamber, IPA foamer, and main chamber all enter an operating state for exhausting air.

[0084] As shown in Figure 7, when the main body is under positive pressure, valve DUMP3 at main body exhaust port G is closed, and IPA foamer exhaust port F is normally open. Valve DUMP4 at tank body exhaust port E is opened, allowing exhaust from the drying tank body. Valve DUMP2 is half-opened by main circuit pressure adjustment damper 10 in the upstream connecting pipe 7, and valve DUMP1 is opened by total circuit disconnection damper 6, allowing exhaust from the IPA foamer and drying tank body.

[0085] As shown in Figure 8, in the stopped state, valve DUMP3 at main body exhaust port G is closed, and IPA foamer exhaust port F is also closed. Valve DUMP4 at tank body exhaust port E is closed, main circuit pressure adjustment damper 10 at front connecting pipe 7 is closed, and valve DUMP1 is also closed by total circuit disconnection damper 6. This stops all exhaust air from the drying tank body, IPA foamer, and main body, and prevents gas from entering from outside.

[0086] As described above, the integrated multi-gas exhaust module of the present invention can achieve highly accurate exhaust control in accordance with various operation modes in a wafer drying system.

[0087] The description of the configuration and operation of the integrated multi-gas exhaust module of the present invention is merely an example, and other modifications and substitutions that can be easily conceived by those skilled in the art are possible without departing from the spirit of the present invention. Therefore, the technical scope of the present invention is defined by the matters described in the claims. [Explanation of symbols]

[0088] A-body B-IPA frother C-Drying tank body D-Hose E-tank body exhaust port F-Frother outlet G-Body exhaust port 1-Discharge pipe 2-ring gasket 3-Intermediate airway 4-rotating cylinder support column 5-damper connecting rod 6-Total circuit disconnecting damper 7-Front connecting pipe 8-rotation damper connecting rod 9-Open / Close Valve 10-Main circuit pressure adjusting damper 11-Rotating cylinder outer shell 12-rotating cylinder 13-Main body shell 14-Thin cylinder 15-Blocking plate 16-Mounting plate 17-module outer shell 18-Circular support plate 19-Outer shell 20-Top lid 21-Rotating connecting rod 22-Rotational Damper 23-Support plate member

Claims

1. 1. An integrated multi-gas exhaust module usable in a wafer drying system, comprising: the wafer drying system comprises a main body, a drying tank body, and an isopropyl alcohol foamer; the integrated multi-gas exhaust module is provided within the wafer drying system; The multi-gas exhaust integrated module comprises: a tank body exhaust port connected to the drying tank body via a pipe and having an exhaust air passage damper therein; a main body exhaust port provided in the main body in an open manner and having a main body pressure adjustment damper therein; a foamer outlet connected to the isopropyl alcohol foamer via a pipe; an outer shell provided with the tank body exhaust port, the main body exhaust port, and the foamer exhaust port, and having a cylinder therein, the cylinder being connected to the exhaust air passage cut-off damper; a front-mounted connecting pipe having one end connected to the exhaust port of the outer shell and the other end connected to the intermediate air adjusting pipe, the front-mounted connecting pipe having a main circuit pressure adjusting damper therein; an intermediate air conditioning pipe having an intake end connected to the upstream connecting pipe and an exhaust end connected to the discharge pipe, the intermediate air conditioning pipe having a rotary cylinder module at its upper portion, the rotary cylinder module being connected to a total circuit disconnecting damper in the intermediate air conditioning pipe; an exhaust pipe having an exhaust end extending out of the wafer drying system and connected to an exhaust transport pipe on the factory side;

2. 2. The multi-gas exhaust integrated module according to claim 1, wherein at least one annular gasket is provided between the exhaust pipe and the in-place air intake pipe, and the annular gasket is made of fluororubber.

3. 2. The multi-gas exhaust integrated module according to claim 1, wherein the rotary cylinder module comprises a rotary cylinder, a damper connecting rod and a rotary cylinder outer shell, the output end of the rotary cylinder is connected to the damper connecting rod, the damper connecting rod extends into the intermediate adjustment air pipeline and is connected to a total circuit breaker damper, and the rotary cylinder outer shell covers the outside of the rotary cylinder.

4. 2. The multi-gas exhaust integrated module according to claim 1, wherein the main circuit pressure regulating damper in the upstream connecting pipe is connected to a rotary damper connecting rod, and one end of the rotary damper connecting rod protrudes outside the upstream connecting pipe and is connected to a rotary damper opening / closing valve.

5. 2. The multi-gas exhaust integrated module according to claim 1, wherein at least one annular gasket is provided between the pre-connecting pipe and the exhaust port of the outer shell, and the annular gasket is made of fluororubber.

6. 2. The integrated multi-gas exhaust module of claim 1, wherein the outer shell is provided with a micro-cylinder module for blocking gas, the module comprising: a main body outer shell, a cylinder, a blocking plate, a mounting plate, a module outer shell, and a circular support plate; the main body outer shell is fixed to the inner wall of the outer shell via the mounting plate; the main body outer shell is provided with a cylinder, the cylinder being a thin cylinder surrounded by the main body outer shell and the module outer shell; the output end of the thin cylinder extends outside the module outer shell and is connected to the circular support plate; the circular support plate is tightly connected to the blocking plate; and the circular support plate and the blocking plate form an exhaust cut-off damper that can be opened and closed to block the tank body exhaust port.

7. 2. The multi-gas exhaust integrated module according to claim 1, wherein a main body pressure regulating damper is provided at the main body exhaust port, the main body pressure regulating damper is connected to a rotary damper connecting rod, and one end of the rotary damper connecting rod protrudes outside the upstream connecting pipe and is connected to a rotary damper opening / closing valve.

8. The multi-gas exhaust integrated module of claim 1, characterized in that an openable upper shell is provided on the top of the outer shell, the foamer exhaust port and the main body exhaust port are provided in the upper shell, and a tank body exhaust port is provided on the side wall of the outer shell.

9. 2. The multi-gas exhaust integrated module according to claim 1, wherein a support plate is provided at the bottom of the outer shell, and the outer shell is fixed to the main body via the support plate.

10. 2. The multi-gas exhaust integrated module of claim 1, wherein an interface for attaching an exhaust airflow interruption sensor is provided at the tank body exhaust port, and an interface for attaching a factory exhaust air pressure sensor is provided at the exhaust pipe.

11. The operation state of the multi-gas exhaust integrated module includes a standby state, a tank body operation state, a body positive pressure state, and a stop state; In the standby state, the main body exhaust port functions as a constantly open vent, the foamer exhaust port is half-open to exhaust the isopropyl alcohol foamer, and the tank body exhaust port is closed to realize continuous exhaust of the isopropyl alcohol foamer and the main body. When the tank body is in operation, the main body exhaust port functions as a constantly open vent, the foamer exhaust port is half-open to exhaust the isopropyl alcohol foamer, the tank body exhaust port is opened, the main circuit pressure adjustment damper is half-open, the total circuit disconnection damper is opened, and the tank body, the isopropyl alcohol foamer and the main body are all exhausted. When the main body is in a positive pressure state, the main body exhaust port functions as a constantly open vent, the foamer exhaust port is closed, the tank body exhaust port is open, the main circuit pressure adjustment damper is half open, the total circuit disconnection damper is open, and the exhaust of the tank body and main body is activated. The integrated multi-gas exhaust module of claim 1, characterized in that in the stopped state, the main body exhaust port is sealed, the foamer exhaust port is blocked, the tank body exhaust port is blocked, the main circuit pressure regulating damper is closed, and the total circuit disconnecting damper is closed, exhaust from the tank body, the isopropyl alcohol foamer and the main body is all stopped, preventing the intrusion of gas from the outside.

12. A wafer drying system comprising the integrated multi-gas exhaust module according to any one of claims 1 to 11.

Images