Electrostatic dissipative PFA blends and their use
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-03-01
- Publication Date
- 2026-03-13
AI Technical Summary
Existing fluid handling systems for semiconductor manufacturing require electrostatically dissipative materials that are transparent and clean, as carbon black, traditionally used for dissipation, is undesirable due to cleanliness issues and the need for optical transparency.
Polymer blends of perfluoroalkoxyalkanes (PFAs) and sulfonated fluoropolymers are developed, which are electrostatically dissipative, transparent, and do not contain carbon black, achieving electrostatic dissipation through the use of sulfonated fluoropolymers like Nafion®, with compositions ranging from 15% to 99% by weight.
The blends provide clean, transparent conduits and coatings with effective electrostatic dissipation, suitable for semiconductor manufacturing, while avoiding the drawbacks of carbon black, and maintaining material integrity and optical transparency.
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Abstract
Citation Information
Patent Citations
US63/449,458