Mask assembly, deposition apparatus, and deposition method

Abstract

This disclosure relates to a mask assembly, a vapor deposition apparatus, and a vapor deposition method. The mask assembly includes at least one mask frame and a mask sheet disposed on the support surface of the mask frame. The mask frame includes a mask frame and at least one support beam located within the enclosed area of ​​the mask frame. The support surface of the support beam is flush with the support surface of the mask frame. This disclosure reduces the problem of deformation of the mask sheet due to gravity, is applicable to mask sheets of various sizes, and improves the vapor deposition effect by increasing the alignment accuracy of the target substrate.

Description

Technical Field

[0001] This disclosure claims priority based on a Chinese patent application filed with the China National Intellectual Property Administration on March 30, 2023, with application number 202310335049.1 and invention title "Mask Assembly, Evaporation Device, and Evaporation Method", and incorporates all the content of the above Chinese patent application by reference into this disclosure. This disclosure relates to the field of display technology, and particularly to a mask assembly, an evaporation device, and an evaporation method.

Background Art

[0002] OLED (Organic Light-Emitting Diode) displays are gradually replacing LCD (Liquid Crystal Display) due to their excellent performance. The evaporation machines used in the manufacture of OLED devices require a fine metal mask (FMM), and displays manufactured using FMM have excellent performance.

[0003] However, to manufacture large-sized OLED devices, large-sized substrates are required. The larger the substrate size, the higher the production efficiency. For large-sized substrates, corresponding large-sized masks are required. The larger the size of the mask sheet, the greater the deformation due to environmental influences such as gravity and temperature. Therefore, the problem that the mask sheet, especially the mask sheet corresponding to a large-sized substrate, is deformed by its own weight has become an urgent problem to be solved currently.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technical problem to be solved by this disclosure is the problem that a conventional mask sheet, especially a mask sheet corresponding to a large-sized substrate, is deformed by its own weight.

Means for Solving the Problems

[0005] To solve, or at least partially solve, the technical problems described above, this disclosure provides a mask assembly, a deposition apparatus, and a deposition method. This reduces the problem of deformation of the mask sheet due to gravity, is applicable to mask sheets of various sizes, and can improve the deposition effect by increasing the alignment accuracy of the target substrate.

[0006] In a first aspect, the disclosure provides a mask assembly comprising at least one mask frame and a mask sheet disposed on the support surface of the mask frame. The mask frame comprises a mask frame and at least one support beam located within the enclosed area of ​​the mask frame. The support surface of the support beam is flush with the support surface of the mask frame.

[0007] In some embodiments, the mask frame is arranged in multiple rows of the mask sheets, which are arranged sequentially. The direction of extension of the mask sheets is parallel to the direction of extension of the support beam. The gap between two adjacent rows of the mask sheets within the same mask frame overlaps with the support beam.

[0008] In some embodiments, the edges of the mask sheet are fixed to the support beam and / or the mask frame.

[0009] In some embodiments, spacers are provided in the gaps between two adjacent rows of the mask sheets within the same mask frame. The spacers are located on the support beams.

[0010] In some embodiments, the spacer is fixed to the support beam.

[0011] In some embodiments, the mask assembly includes a target substrate placement area. The target substrate is placed within the target substrate placement area.

[0012] The spacer structure is fixed to the mask frame outside the target substrate placement area.

[0013] In some embodiments, the gap between two adjacent rows of the mask sheets within the same mask frame is smaller than a preset value.

[0014] In some embodiments, grooves are provided on the support surface of the support beam. The mask sheet is fixed within the grooves.

[0015] In some embodiments, a groove is provided in the support surface of the support beam. The edge of the spacer is firmly fixed within the groove.

[0016] In some embodiments, constant-temperature liquid piping is provided within the support beam.

[0017] In some embodiments, grooves are provided on the support surface of the support beam. A support stage is provided within the groove.

[0018] The edge of the mask sheet is fixed within the groove. The support surface of the support stage is flush with the side of the mask sheet away from the mask frame.

[0019] In some embodiments, the mask sheet placed on the support surface of the mask frame is a single-piece structure.

[0020] In some embodiments, the spacer, positioned in the gap between two adjacent rows of mask sheets within the same mask frame, overlaps the edges of the two adjacent rows of mask sheets. The mask sheets are located on the side of the spacer away from the support beam.

[0021] In some embodiments, the length of the spacer is shorter than the length of the mask sheet, along a direction parallel to the extending direction of the support beam.

[0022] In some embodiments, the mask frame is integrally molded with the support beam.

[0023] In some embodiments, it includes x mask frames. The plurality of mask sheets on the x mask frames correspond to the deposition pattern. The plurality of mask sheets on the x mask frames are divided into x groups. The mask sheets whose column numbers satisfy i + nx are arranged in order of the column numbers on the i-th mask frame in sequence to form the i-th mask. The distance between the edges of the mask sheets in adjacent columns on the same mask frame is smaller than the sum of the widths of the mask sheets in other columns existing between the column numbers of the mask sheets in the adjacent columns. Here, both i and x are positive integers, i is less than or equal to x, x is greater than 1, and n is a non-negative integer.

[0024] In a second aspect, the embodiments of the present disclosure further provide a deposition apparatus. This deposition apparatus includes an evaporation source and any mask assembly provided in the first aspect. The mask assembly is disposed between the evaporation source and the target substrate.

[0025] In a third aspect, the embodiments of the present disclosure further provide a deposition method using a mask assembly, which is applicable to any mask assembly according to the first aspect. The method includes performing deposition on a target substrate using the mask assembly.

Effects of the Invention

[0026] The above technical solutions according to the embodiments of the present disclosure have the following advantages compared with the prior art. The present disclosure provides a mask assembly, which includes at least one mask frame and a mask sheet disposed on the support surface of the mask frame. The mask frame includes a mask frame body and at least one support beam located within the enclosed area of the mask frame body. The support surface of the support beam is flush with the support surface of the mask frame body. In the present disclosure, when a support beam is provided within the mask frame body and the mask sheet is disposed above the support beam, the support beam will support the mask sheet. Also, the size of the mask sheet can be selected as needed. Since even a large-sized mask sheet can be supported by the support beam, when the mask sheet is placed on the mask frame, it will not be completely suspended in the air, droop due to gravity, and cause deformation of the mask sheet, thereby preventing the deposition effect from being affected. The present disclosure reduces the problem of deformation of the mask sheet due to gravity, is applicable to mask sheets of various sizes, improves the alignment accuracy of the target substrate, and enhances the deposition effect.

Brief Description of the Drawings

[0027] The drawings attached to this specification are incorporated into the specification and form a part of this specification, showing embodiments consistent with the present disclosure and used to interpret the principles of the present disclosure together with the specification. To more clearly explain the technical solutions in the embodiments of the present disclosure or the prior art, the drawings necessary for the description of the embodiments or the prior art will be briefly described below. However, it is obvious that those skilled in the art can obtain other drawings based on these drawings without creative efforts. [Figure 1] It is a diagram showing the structure of a mask in the prior art. [Figure 2] It is a diagram showing the structure of a mask assembly according to an embodiment of the present disclosure. [Figure 3] It is a diagram showing the structure of another mask assembly according to an embodiment of the present disclosure. [Figure 4] It is a diagram showing the structure of another mask assembly according to an embodiment of the present disclosure. [Figure 5]This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 6] This is a schematic cross-sectional view of a mask assembly according to an embodiment of the present disclosure, along the AA' direction. [Figure 7] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 8] This is a schematic cross-sectional view of a support beam according to an embodiment of the present disclosure. [Figure 9] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 10] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 11] This is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. [Figure 12] This is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. [Figure 13] This is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. [Figure 14] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 15] This is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. [Figure 16] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 17] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 18] This is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. [Figure 19] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 20] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 21] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 22] This is a deposition pattern deposited on the target substrate using the mask assembly shown in Figure 21. [Figure 23]This figure shows the deposition pattern deposited in the left mask of the mask assembly shown in Figure 21, according to an embodiment of the present disclosure. [Figure 24] This figure shows the deposition pattern deposited for the second time on the right mask in the mask assembly shown in Figure 21, according to an embodiment of the present disclosure. [Figure 25] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 26] This figure shows the configuration of another mask assembly according to an embodiment of the present disclosure. [Figure 27] This is the deposition pattern obtained using the first mask of the mask assembly shown in Figure 26. [Figure 28] This is the deposition pattern deposited using the second mask of the mask assembly shown in Figure 26. [Figure 29] This figure shows the configuration of the vapor deposition apparatus according to the embodiment of the present disclosure. [Figure 30] This figure shows the configuration of another deposition apparatus according to the embodiments of this disclosure. [Modes for carrying out the invention]

[0028] The following describes the technical solutions of the embodiments of this disclosure clearly and completely in order to further clarify the purpose, technical solutions, and advantages of the embodiments of this disclosure. It goes without saying that the embodiments described are some of the embodiments of this disclosure, not all of them. All other embodiments that can be obtained by a person skilled in the art without any creative work based on the embodiments of this disclosure are also within the scope of protection of this disclosure.

[0029] In the OLED manufacturing process, a deposition machine is required to complete the pattern deposition. For this, a fine metal mask is necessary, and a mask sheet is placed on the fine metal mask. The mask sheet is prone to sagging and deformation due to its own weight, making it difficult to align the mask with the target substrate. Furthermore, the larger the mask, the larger the mask sheet becomes, and the greater the effect of gravity. Figure 1 shows the configuration of a mask in the conventional technology. As shown in Figure 1, the mask in the conventional technology includes a mask frame and a mask sheet. The mask sheet is used in common for deposition and forms the deposition pattern (the deposition pattern includes the multiple rectangular patterns on the right side of Figure 1). However, since the mask frame only has a frame on all four sides, the edges of the mask sheet can only contact the frame on all four sides of the mask frame, and the parts without a frame on all four sides are suspended in mid-air, resulting in insufficient support from below for the mask sheet, causing it to sag and deform due to its own weight, affecting the deposition effect.

[0030] To address the technical challenges described above, this disclosure provides a mask assembly. Figure 2 shows the configuration of a mask assembly according to an embodiment of this disclosure. As shown in Figure 2, the mask assembly includes at least one mask frame 11 and a mask sheet 12 placed on the support surface of the mask frame.

[0031] The mask frame 11 includes a mask frame 111 and at least one support beam 112 located within the enclosed area of ​​the mask frame. The support surface of the support beam 112 is flush with the support surface of the mask frame 11.

[0032] Specifically, the mask assembly includes one mask frame 11. The mask frame 11 includes a mask frame 111 and at least one support beam 112 located within the enclosed area of ​​the mask frame. The mask frame 111 only has a frame on all four sides. A support beam 112 is provided in the hollow central region of the mask frame 111. There is at least one support beam 112. The mask sheet 12 is placed on the mask frame 111. First, the mask frame 111 supports the edges of the mask sheet 12 that are in contact with it, but the edges of the mask sheet 12 that are not in contact with the mask frame 111 require support beams 112. By supporting the suspended edges of the mask sheet 12 with support beams, the mask sheet 12 is supported around it, reducing sagging due to its own weight and preventing misalignment between the mask and the target substrate during deposition. Furthermore, the support surface of the support beam 112 is flush with the support surface of the mask frame 111 and lies in the same plane. When the mask sheet 12 is placed on the mask frame 111, it is always held horizontally without becoming convex, and a good alignment effect can be obtained when aligning it with a subsequent target substrate.

[0033] For example, Figure 1 shows one mask frame 111, three support beams 112, and four mask sheets 12. The leftmost mask sheet 12 has its left edge along its longitudinal direction positioned on the mask frame 111 and its right edge on the support beam 112. The two intermediate mask sheets 12 have both their longitudinal edges positioned on the support beams 112. The rightmost mask sheet 12 has its left edge along its longitudinal direction positioned on the support beam 112 and its right edge on the mask frame 111. This ensures that each mask sheet 12 is surrounded by a support force that reduces the effects of gravity and prevents deformation of the mask sheet 12.

[0034] Selectively, Figure 3 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 3, the two mask frames provided exemplary are the first mask frame and the second mask frame, respectively. The left figure shows the first mask frame, which includes a first mask frame 111a, a first support beam 112a, and a plurality of first mask sheets 12a. The four edges of the first mask sheet 12a are all positioned on the first mask frame 111a or the first support beam 112a to provide support to the first mask sheet 12a. The right figure shows the second mask frame, which includes a second mask frame 111b, a second support beam 112b, and a plurality of second mask sheets 12b. The four edges of the second mask sheet 12b are all positioned on the second mask frame 111b or the second support beam 112b to provide support to the second mask sheet 12b. In the figure on the right, if the edges of the second mask sheets 12b on both sides are positioned directly on the second mask frame 111b, the support beams between the second mask frame 111b and the second mask sheets 12b may be eliminated. When performing deposition with the two masks shown in Figure 3, deposition can be performed on one of the masks first, then on the second mask, and the deposition patterns on the two masks can be combined to form a complete deposition pattern, thereby improving the utilization rate of the target substrate.

[0035] In this disclosure, a support beam is provided within the mask frame, and when the mask sheet is positioned above the support beam, the support beam supports the mask sheet. The size of the mask sheet can also be selected as needed. Since even large mask sheets can be supported by the support beam, the mask sheet is not completely suspended above the mask frame, preventing it from sagging due to gravity and causing deformation of the mask sheet, which would affect the vapor deposition effect. This disclosure mitigates the problem of deformation of the mask sheet due to gravity, is applicable to mask sheets of various sizes, and improves the alignment accuracy of the target substrate, thereby improving the vapor deposition effect.

[0036] In the mask assembly according to the embodiments of this disclosure, the number of mask frames is not limited; one mask frame may be provided, or two or more mask frames may be provided, and this can be selected as needed. Also, in the embodiments described above, both the mask sheet and the mask support beam may be arranged in the column direction or the row direction, but this disclosure does not limit these arrangements, nor does it specifically illustrate them. These are well-known technical means in the art and do not affect the technical effect.

[0037] In some embodiments, Figure 4 shows a configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 4, multiple rows of mask sheets 12 arranged in sequence are placed on a mask frame, the extending direction of the mask sheets 12 is parallel to the extending direction of the support beam 112, and the edges and gaps of two adjacent rows of mask sheets 12 on the same mask frame overlap with the support beam 112.

[0038] For example, multiple rows of mask sheets 12 arranged sequentially are placed on a mask frame, the extending direction of the mask sheets 12 is parallel to the extending direction of the support beam 112, a portion of the edges in the extending direction of two adjacent rows of mask sheets 12 on the same mask frame overlaps with the support beam 112, and there is a gap D between two adjacent rows of mask sheets 12 on the same mask frame, with the portion exposed in the gap D being part of the support beam 112. Therefore, a portion of the edges of two adjacent rows of mask sheets 12 on the same mask frame and the gap overlap with the support beam 112. With this configuration, the size of the mask sheet is small, and the absolute amount of expansion of a single mask sheet due to environmental influences such as temperature is small. This makes it easier to align the mask with the target substrate and improves the success rate of alignment.

[0039] Selectively, multiple rows of mask sheets are arranged sequentially on the mask frame, with the extension direction of the mask sheets parallel to the extension direction of the support beams, and the edges and gaps of two adjacent rows of mask sheets on the same mask frame overlap with the support beams. Since a mask frame with mask sheets and support beams arranged in the column direction has the same effect during deposition as a mask frame with mask sheets and support beams arranged in the row direction, a detailed explanation is omitted here. In each of the following embodiments, the mask sheets can be arranged in either the row or column direction.

[0040] In some embodiments, as shown in Figure 4, the edges of the mask sheet 12 are fixed to the support beam 112 and / or the mask frame 111.

[0041] Specifically, depending on the position of the mask sheet 12, the edges of the mask sheet 12 may be fixed to the support beam 112 or the mask frame 111. Fixing reduces the effect of the mask sheet 12's own weight, prevents the edges from expanding due to heat, and reduces the amount of expansion of the mask sheet due to environmental influences.

[0042] For example, the dotted line portion in Figure 4 represents the edge of the mask sheet 12. The edge of the mask sheet 12 in the extending direction contacts the support beam 112 and is fixed to the support beam 112. The edge of the mask sheet 12 in the width direction contacts the mask frame 111 and is fixed to the mask frame 111. The fixed mask sheet 12 will not shift position. Furthermore, a certain force may be applied to the mask sheet 12 during fixing. For example, the mask sheet may be pulled outward to apply tension, and then the edge may be fixed to the support beam 112 or the mask frame 111. This ensures that the mask sheet 12 has tension and reduces the amount of expansion due to temperature.

[0043] Fixing can be done using various processes. For example, the mask sheet can be fixed to the support beam and / or mask frame by welding, heating, pressurizing, or high-speed ultrasonic welding, or by spot welding or adhesive bonding. The specific fixing method can be selected according to the actual requirements.

[0044] In some embodiments, Figure 5 shows the configuration of another mask assembly according to an embodiment of the present disclosure. Figure 6 is a schematic cross-sectional view of a mask assembly according to an embodiment of the present disclosure along the AA' direction. As shown in Figures 5 and 6, spacers 13 are provided in the gaps between two adjacent rows of mask sheets 12 of the same mask frame, and these spacers are located on the support beams 112.

[0045] For example, if the size of the mask sheet is small, there is a gap between two adjacent rows of mask sheets 12 on the same mask frame, and the target substrate is placed on the mask assembly. For example, if the thickness of the target substrate is 0.7 mm, if the gap is too large, the target substrate will sag due to gravity and affect the deposition effect. For this reason, in the embodiments of this disclosure, a spacer 13 is provided at the gap to block the gap. As shown in Figure 5, the spacer 13 is provided above the gap between two adjacent rows of mask sheets 12, the spacer 13 is located above the support beam 112, and the support beam 112 supports the spacer 13. Figure 6 is a schematic cross-sectional view of AA' in Figure 5. From Figure 6, the specific structural relationship between the support beam 112, the mask sheet 12, and the spacer 13 can be obtained. The spacer 13 flattens the surface of the mask sheet 12 that contacts the target substrate, preventing the target substrate from sagging, and also prevents damage to the target substrate from the uneven edges of the mask assembly. In the embodiments of this disclosure, the material of the spacer is not limited.

[0046] Selectively, the thickness of a spacer in the same mask frame is the same as the thickness of two adjacent rows of mask sheets 12 in the same mask frame. Only when a spacer is placed in the gap between the mask sheets and the thickness of the spacer is the same as the thickness of the mask sheet can the planes that contact the target substrate of both be maintained on the same horizontal plane.

[0047] In some embodiments, the spacers are fixed to the support beams.

[0048] Specifically, the spacers are similarly fixed to the support beams for greater stability, improving the overall stability and practicality of the mask assembly, making it suitable for various environmental requirements and preventing loosening due to changes in angle. The spacers can be fixed using various processes. For example, the mask sheet can be fixed to the support beams and / or mask frame by welding, heating, pressurizing, or high-speed ultrasonic welding, or by spot welding or adhesive bonding. The specific fixing method can be selected according to actual needs and is not limited thereto.

[0049] In some embodiments, Figure 7 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 7, the mask assembly includes a target substrate placement area S1 on which the target substrate is placed.

[0050] The spacer 13 is fixed to the mask frame 111 outside the target substrate placement area S1.

[0051] Specifically, the mask assembly includes a target substrate placement area S1. When performing vapor deposition with the mask assembly, the target substrate is placed on its surface, and the vapor deposition pattern of the mask assembly is deposited onto the target substrate. Therefore, by providing a target substrate placement area S1 in the mask assembly and placing the target substrate within the target substrate placement area S1, the alignment between the target substrate and the mask assembly becomes more accurate, and the position of the vapor deposition pattern also becomes more precise. Furthermore, when the spacer 12 is placed on the mask frame and the spacer 13 is fixed to the mask frame 111, the spacer 13 can be fixed to the mask frame 111 outside the target substrate placement area S1, for example, within the dotted circle in Figure 7. When fixed outside the target substrate placement area S1, even if traces of fixing, such as welding marks or adhesive marks, occur, they do not affect the area within the target substrate placement area S1. Therefore, when placing the target substrate on the mask assembly during vapor deposition, there is no risk of the target substrate being damaged or the target substrate and the vapor deposition effect being affected by traces of fixing.

[0052] Selectively, the area of ​​the target substrate placement region is greater than or equal to the area of ​​the target substrate. To ensure that the target substrate is completely covered by the target substrate placement region, the area of ​​the target substrate placement region should be large, greater than or equal to the area of ​​the target substrate. Areas outside the target substrate placement region do not overlap with the target substrate.

[0053] In some embodiments, the gap between two adjacent rows of mask sheets in the same mask frame is smaller than a preset value.

[0054] Specifically, in the embodiments of this disclosure, the gap between two adjacent rows of mask sheets on the same mask frame must be smaller than a preset value. The mask sheets are placed on the mask frame and must be in contact with the mask frame and / or support beams. If the gap is too large, the extending edge of the mask sheet may not be able to contact the extending edge of the support beam. Therefore, the gap between two adjacent rows of mask sheets on the same mask frame must be smaller than a preset value. The preset value is the size of the gap between adjacent mask sheets that ensures that the extending edge of the mask sheet overlaps with the extending edge of the support beam. Also, since the mask assembly needs to be aligned with the target substrate, the target substrate is placed on the mask sheet, and if the gap is too large, the target substrate will sag due to gravity, affecting the flatness and thus the pattern effect of the deposition. In order to avoid the above situation, the gap needs to be small, so the gap between two adjacent rows of mask sheets on the same mask frame is preferably small and may be almost equal to zero. If there is no gap between the two, the target substrate will be in complete contact with the mask sheet.

[0055] In some embodiments, Figure 8 is a schematic cross-sectional view of a support beam according to an embodiment of the present disclosure. As shown in Figure 8, a groove 113 is provided on the support surface of the support beam 112, and the mask sheet 12 is fixed within the groove 113.

[0056] Specifically, a groove 113 is provided on the support surface of the support beam 112, and the mask sheet 12 is placed on the support beam 112. The edges of the mask sheet 12 are folded downward into the groove 113 and fixed within the groove 113. Because the groove is lower than the support surface of the support beam 112 and the mask sheet 12 is thin (e.g., 0.02 mm), the mask sheet 12 is completely positioned and fixed within the groove 113 without any protrusions after being folded into the groove 113, and any welding or adhesive marks created during fixing are also retained within the groove and do not rise above the support surface of the support beam 112. As a result, there are no protrusions on the support surface of the support beam 112, and when the target substrate is placed in the mask assembly and comes into contact with the mask sheet 12, there are no protrusions that come into contact with the target substrate, preventing damage to the target substrate by protrusions. Note that the dotted lines in Figure 8 represent the openings in the mask sheet and are used to indicate the deposition pattern during the deposition process. The dotted lines in the following drawings have the same function as those described here, so no redundant explanation will be given. Furthermore, for ease of understanding, the mask sheet in the following examples is represented by lines instead of a filled pattern.

[0057] For example, embodiments of the present disclosure further provide a mask assembly. Figures 9 and 10 show the configuration of another mask assembly according to embodiments of the present disclosure. As shown in Figures 9 and 10, two mask frames are provided. Figure 9 shows a first mask frame, and the specific structure of the first groove 113a can be seen from a cross-sectional view along the BB' direction of the first mask frame. The portion of the edge of the first mask sheet 12a that overlaps with the first support beam 113a is bent downward into the first groove 113a and fixed within the first groove 113a. The edges of the first mask sheet 12a located at the leftmost and rightmost ends are fixed to the first mask frame 111a. Figure 10 shows a second mask frame, and the specific structure of the second groove 113b can be seen from a cross-sectional view along the CC' direction of the second mask frame. The portion of the edge of the second mask sheet 12b that overlaps with the second support beam 113b is folded downward into the second groove 113b and fixed within the second groove 113b. The edges of the second mask sheet 12b located at the leftmost and rightmost ends are fixed within the second groove 113b. Fixing can be done by welding, bonding, or other fixing processes.

[0058] Selectively, the groove shapes may include a variety of types. Embodiments of this disclosure further provide grooves with different structures. For example, Figure 11 is a schematic cross-sectional view of another support beam according to an embodiment of this disclosure. Each support beam 112 has two grooves 113 on its support surface, each supporting a mask sheet 12 on either side. Each groove secures only the mask sheet 12 located on that side, thus providing a larger support space. Figures 12 and 13 are schematic cross-sectional views of another support beam according to an embodiment of this disclosure. As shown in Figures 12 and 13, the large space of the grooves 113 on the support surface of the support beam 112 reduces the volume space of the support beam 112 itself, thereby reducing the weight of the support beam 112 and making it suitable for lightweight mask assemblies. The rounded bottom of the support beam 112 in Figure 13 facilitates the passage of gas to the target substrate during deposition, reducing obstruction and improving the deposition effect. Therefore, the grooves may include different shapes, sizes, and quantities, and can be set according to actual needs. This disclosure is not limited to these, nor does it enumerate individual examples.

[0059] In some embodiments, Figure 14 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 14, a groove 113 is provided in the support surface of the support beam 112. The edge of the spacer 13 is firmly fixed within the groove 113.

[0060] For example, Figure 14 shows one mask frame. As shown in the lower part of Figure 14, a spacer 13 is provided on the mask frame, and the extending edge of the spacer 13 is provided on the support beam 112. As shown in the upper part of Figure 14, a cross-sectional structure along the AA' direction is obtained. It can be confirmed that the edge of the mask sheet 12 that contacts the support beam 112 is completely contained within the groove 113 and fixed. Another spacer 13 is provided between two adjacent rows of mask sheets 12, and the edge of the spacer 13 is also bent into the groove 113 and fixed. The dotted line in the upper part of the figure indicates the opening of the mask sheet. The above structure reduces the suspended area of ​​the surface in contact with the target substrate by filling the gap with the spacer 13 when there is a large gap between two adjacent rows of mask sheets 12. Furthermore, the effect of fixing the spacer 13 in the groove is the same as the effect of fixing the mask sheet 12 in the groove, preventing fastening marks from occurring on the support surface of the support beam 112 and damaging the target substrate.

[0061] If the mask assembly selectively includes spacers, the grooves in the support beam may also include multiple types. Furthermore, since the groove shape is the same as that in embodiments without spacers, a detailed explanation is omitted here. Please refer to the embodiments and drawings described above.

[0062] In some embodiments, Figure 15 is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. As shown in Figure 15, a constant temperature liquid pipe 114 is provided inside the support beam 113.

[0063] In the embodiments of this disclosure, a constant-temperature liquid piping 114 is further provided within the support beam 112. The constant-temperature liquid may flow through the constant-temperature liquid piping 114. The flow of the constant-temperature liquid can provide the mask assembly with a constant temperature environment, for example, a low-temperature environment. In a high-temperature environment, the expansion amount of the mask sheet 12 is large, and in a low-temperature environment, the expansion amount of the mask sheet 12 can be effectively suppressed, thereby improving the deposition effect. In the embodiments of this disclosure, the shape, size, and number of constant-temperature liquid piping are not limited. The cross-section of the constant-temperature liquid piping in the figure is circular as an example, but it may be of other shapes. Optionally, a spacer may be provided between two adjacent rows of mask sheets 12 based on this.

[0064] In some embodiments, Figure 16 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 16, a groove 113 is provided on the support surface of the support beam 112, and a support stage 115 is provided within the groove 113.

[0065] The edges of the mask sheet 12 are fixed within the groove 113. Furthermore, the support surface of the support stage 115 is flush with the side of the mask sheet 12 that is away from the mask frame.

[0066] Specifically, a groove 113 is provided on the support surface of the support beam 112, a support stage 115 is provided within the groove 113, the edge groove of the mask sheet 12 is folded and fixed within the 113, and the target substrate is placed on the mask sheet 12. However, if the gap between two adjacent rows of mask sheets 12 is too large, it will cause the target substrate to sag due to gravity. Therefore, a support stage 115 is provided within the groove 113, and the support surface of the support stage 115 is flush with the side of the mask sheet 12 that is away from the mask frame. In other words, the support surface of the support stage 115 supports the target substrate together with the mask sheet 112, preventing the target substrate from sagging. The support stage 115 and the support beam 112 are connected via a contact portion, which improves stability.

[0067] Selectively, the support stage 115 and support beam 112 are formed by 3D printing.

[0068] In some embodiments, the mask sheet placed on the support surface of the mask frame is a single-piece structure.

[0069] Figure 17 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 17, the mask sheet placed on the mask frame is a single-piece structure. Two mask frames are shown in the figure, the first mask frame on the left and the second mask frame on the right. The first mask sheet 12a is placed on the support surface of the first mask frame, and the second mask sheet 12b is placed on the support surface of the second mask frame. Both the first mask sheet 12a and the second mask sheet 12b are single-piece structures without being divided. The mask frame supports the mask sheet together with the support beams.

[0070] Selectively, if a groove is provided in the support beam based on this, the mask sheet may be pressed downward and welded and fixed in place. Figure 18 is a schematic cross-sectional view of another support beam according to an embodiment of the present disclosure. As shown in Figure 18, when the mask sheet 12 covers the mask frame and the groove 113 of the support beam 112 is also covered by the mask sheet 12 and the mask sheet 12 is fixed, the mask sheet 12 above the groove 113 is pressed downward and folded into the groove 113 to be fixed in place. In this way, the mask sheet 12 may be folded and fixed to each edge of the groove 113, or it may be fixed at a location in the groove 113, for example, at the lowest point, but the present disclosure does not impose any limitations thereon.

[0071] In some embodiments, a spacer in the gap between two adjacent rows of mask sheets on the same mask frame overlaps with the edges of these two adjacent rows of mask sheets, and the mask sheet is located on the side away from the support beam of the spacer.

[0072] For example, Figures 19 and 20 show the configuration of another mask assembly according to an embodiment of the present disclosure. Figures 19 and 20 show two mask frames. Figure 19 shows a first mask frame. Figure 20 shows a second mask frame. The upper part of Figure 19 is a schematic cross-sectional view of the first mask frame along BB'. The upper part of Figure 20 is a schematic cross-sectional view of the second mask frame along CC'. As can be seen from Figure 19, a first spacer 13a is provided in the gap between two adjacent rows of mask sheets 12a of the same mask frame, the first spacer 13a overlaps with the edges of these two adjacent rows of first mask sheets 12a, and the first mask sheets 12a are located on the side of the first spacer 13a away from the first support beam 112a. The arrangement order from the mask frame upwards is, in order: first support beam 112a, first spacer 13a, and first mask sheet 12a. The edges of the first mask sheet 12a located at the leftmost and rightmost ends are fixed to the first mask frame 111a. The second mask frame in Figure 20 has the same arrangement as the first mask frame. A second spacer 13b is provided in the gap between two adjacent rows of second mask sheets 12b of the same mask frame. The second spacer 13b overlaps with the edges of these two adjacent rows of second mask sheets 12b, and the second mask sheet 12b is located on the side of the second spacer 13b that is away from the second support beam 112b. The arrangement order from the mask frame upwards is as follows: second support beam 112b, second spacer 13b, and second mask sheet 12b. The edges of the second mask sheet 12b, located at the leftmost and rightmost ends, are positioned on the second spacer 13b, and the second spacer 13b is provided on the second support beam 112b.

[0073] The spacer used here may be a support piece with strong bearing capacity. The spacer increases the contact area between the support piece and the mask sheet, thereby increasing the bearing capacity. The conventional technology also includes a technical feature of supporting the mask sheet using only support pieces, without the provision of support beams.

[0074] In some embodiments, the length of the spacer is shorter than the length of the mask sheet, along a direction parallel to the extension direction of the support beam.

[0075] Continuing to refer to Figure 19, for example, the length of the first spacer 13a is shorter than the length of the first mask sheet 12a. This is due to processing considerations during fixing; when the spacer is shorter than the mask sheet, the spacer can be completely fixed to the mask frame by welding or other fixing operations alone, without leaving any gaps at the edges. On the other hand, if the spacer is longer than the mask sheet, fixing the mask sheet becomes more difficult, increasing the complexity of the process. Therefore, along the direction parallel to the extension direction of the support beam, the spacer is shorter than the length of the mask sheet.

[0076] In some embodiments, the mask frame is integrally molded with the support beam.

[0077] Specifically, since the mask frame and support beams are integrally molded during manufacturing, there is no need to manufacture the parts individually and then assemble and fix them through post-processing, allowing for a faster manufacturing process. The integrally molded mask frame and support beams leave no fastening marks, resulting in a stronger connection and improved rigidity of the mask frame.

[0078] In some embodiments, the system includes x mask frames. Multiple mask sheets arranged on the x mask frames each correspond to a deposition pattern. The multiple mask sheets on the x mask frames are divided into x groups. Mask sheets satisfying column number i+nx are arranged on the i-th mask frame in order of column number to form the i-th mask. The distance between the edges of mask sheets in adjacent columns on the same mask frame is less than the sum of the widths of mask sheets in other columns that exist between the column numbers of these adjacent columns. Note that i and x are both positive integers, i is less than or equal to x, x is greater than 1, and n is a non-negative integer.

[0079] Specifically, a mask assembly may include x mask frames. Multiple mask sheets on the x mask frames correspond to deposition patterns. After deposition on the target substrate using masks formed by sequentially using the first to x mask assemblies, the gaps between the effective deposition areas of adjacent mask sheets can be reduced, thereby improving the utilization rate of the target substrate.

[0080] After arranging the mask sheets in order, the effective deposition regions of the sequentially arranged mask sheets correspond to the deposition pattern. In the embodiments of this disclosure, the multiple mask sheets of x mask assemblies are divided into x groups. Furthermore, the mask sheets satisfying column number i+nx are arranged in the order of column numbers in the i-th mask frame to form the i-th mask.

[0081] For example, the mask sheet for column 1, the mask sheet for column 1+x, the mask sheet for column 1+2x, ..., the mask sheet for column 1+nx are arranged sequentially on the first mask frame according to their column numbers to form the first mask. The mask sheet for column 2, the mask sheet for column 2+x, the mask sheet for column 2+2x, ..., the mask sheet for column 2+nx are arranged sequentially on the second mask frame according to their column numbers to form the second mask. The mask sheet for column x, the mask sheet for column x+x, the mask sheet for column x+2x, ..., the mask sheet for column x+nx are arranged sequentially on the x-th mask frame according to their column numbers to form the x-th mask.

[0082] Note that both i and x are positive integers, i is less than or equal to x, x is greater than 1, and n is a non-negative integer.

[0083] The distance between the edges of mask sheets in adjacent rows on the same mask frame is smaller than the sum of the widths of the mask sheets in other rows that exist between the row numbers of these adjacent rows. An embodiment of the present disclosure includes x masks, and when deposition is performed on a target substrate, the first to xth masks are used sequentially to perform deposition on the target substrate. Because the distance between the edges of mask sheets in adjacent rows on the same mask frame is smaller than the sum of the widths of the mask sheets in other rows that exist between the row numbers of these adjacent rows, the masks used for the two depositions, one before the other, and the mask sheets of adjacent row numbers may have overlapping regions. For example, the mask sheets of the 1st + 2x rows of the first mask and the mask sheets of the 2nd + 2x rows of the second mask have overlapping arrangement regions. Therefore, deposition using the mask assembly of the present disclosure can reduce the gap in the effective deposition region of the mask sheets of adjacent row numbers and improve the utilization rate of the target substrate.

[0084] The following explanation will use the case where x is 2 as an example. Figure 21 shows the configuration of another mask assembly according to an embodiment of the present disclosure.

[0085] As shown in Figure 21, the mask assembly according to an embodiment of the present disclosure includes multiple rows of mask sheets 12 (seven rows are shown exemplary in Figure 21) and two mask frames. The multiple rows of mask sheets 12 correspond to the deposition patterns formed on the target substrate. That is, the first to seventh rows of mask sheets correspond to the deposition patterns formed on the target substrate. In the left side of Figure 21, the first row of mask sheets 121, the third row of mask sheets 123, the fifth row of mask sheets 125, and the seventh row of mask sheets 127 are shown from left to right. In the right side of Figure 21, the second row of mask sheets 122, the fourth row of mask sheets 124, and the sixth row of mask sheets 126 are shown from left to right.

[0086] In the embodiments of this disclosure, the multi-column mask sheet 12 is divided into two groups. The first, third, fifth, and seventh column mask sheets are arranged sequentially on the first mask frame 11a to form the first mask (the mask on the left in Figure 21). The second, fourth, and sixth column mask sheets are arranged sequentially on the second mask frame 11b to form the second mask (the mask on the right in Figure 21). That is, the odd-numbered column mask sheets are arranged on the first mask frame 11a (not shown) and the first support beam 112a, and the even-numbered column mask sheets are arranged on the second mask frame 11b (not shown) and the second support beam 112b.

[0087] The distance between the edges of adjacent column mask sheets on the same mask frame is less than the sum of the widths of other column masks that exist between the column numbers of those adjacent column mask sheets.

[0088] For example, as shown in Figure 21, we will explain using the mask sheets in the first to third columns as an example. The distance between the right edge of the first column mask sheet and the left edge of the third column mask sheet on the first mask frame is A1. The mask sheet between the column numbers of the first column mask sheet and the third column mask sheet on the first mask frame is the second column mask sheet, and this second column mask sheet is located in the second mask frame, with a width of A2.

[0089] The distance between the edges of adjacent mask sheets on the same mask frame is smaller than the sum of the widths of the masks in other columns that exist between the column numbers of these adjacent mask sheets. When vapor deposition is performed with a mask assembly, the first mask and the second mask are used in sequence. For this reason, the placement positions of the first and third column mask sheets when vapor deposition is performed with the first mask may partially overlap with the placement position of the second column mask sheet when vapor deposition is performed with the second mask.

[0090] As shown in Figure 21, when deposition is performed with the first mask, the right edge of the first row of mask sheets and when deposition is performed with the second mask, the left edge of the second row of mask sheets may have an overlapping region X1, and when deposition is performed with the first mask, the left edge of the third row of mask sheets and when deposition is performed with the second mask, the left edge of the second row of mask sheets may have an overlapping region X2. That is, the sum of the lengths of A1, X1, and X2 is the same as the length of A2. Therefore, the right edge of the figure deposited in the effective deposition area of ​​the first row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets can be seamlessly connected. The right edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the third row of mask sheets can be seamlessly connected and are not limited by the edge distance outside the effective deposition area of ​​each mask sheet. Figure 22 shows the deposition pattern deposited on the target substrate using the mask assembly shown in Figure 21. In Figure 21, B1 represents the position corresponding to the first row of mask sheets when deposition is performed with the first mask, B3 represents the position corresponding to the third row of mask sheets when deposition is performed with the first mask, B2 represents the position corresponding to the second row of mask sheets when deposition is performed with the second mask, C1 represents the position of the figure deposited in the effective deposition area of ​​the first row of mask sheets when deposition is performed with the first mask, C3 represents the position of the figure deposited in the effective deposition area of ​​the third row of mask sheets when deposition is performed with the first mask, and C2 represents the position of the figure deposited in the effective deposition area of ​​the second row of mask sheets when deposition is performed with the second mask. As shown in Figure 22, the distance between the right edge of the figure deposited in the effective deposition area of ​​the first row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets is reduced to 0. The distance between the right edge of the figure deposited in the effective deposition area of ​​the second column mask sheet and the left edge of the figure deposited in the effective deposition area of ​​the third column mask sheet is reduced to zero. As a result, the utilization rate of the target substrate is improved. Comparing Figure 22 and Figure 1 (the figure to the right of Figure 1), it can be seen that even with the same area of ​​target substrate, a 4x5 deposition figure is obtained from Figure 1, and a 4x6 deposition figure is obtained from Figure 22. According to the solution of the embodiment of this disclosure, the utilization rate of the target substrate is improved.

[0091] Although the effective deposition areas of the mask sheets in each row shown in Figure 22 have precise deposition patterns, the specific form of these precise deposition patterns is not limited here.

[0092] Furthermore, in the embodiments of this disclosure, by grouping the mask sheets, the size of each individual mask sheet can be reduced compared to the conventional method in which each mask sheet is arranged sequentially on a single mask frame. This reduces the absolute amount of expansion of each mask sheet due to environmental influences such as temperature, making it easier to align the mask with the target substrate and improving the success rate of alignment. For example, when manufacturing an OLED display panel by performing deposition with the mask assembly described above, multiple deposition unit figures arranged in an array similar to that in Figure 22 (Figure 22 shows 24 deposition unit figures in a total of 4 rows and 6 columns as an example) are formed. Each deposition unit figure corresponds to one OLED display panel area. Individual OLED display panels are formed by cutting the large pattern shown in Figure 22. Because the size of each individual mask sheet is reduced and the absolute amount of expansion of each mask sheet due to environmental influences such as temperature is reduced, the size of the OLED display panel unit pixel deposition pattern in the effective deposition area of ​​the mask sheet can be reduced, further improving the resolution of the manufactured OLED display panel.

[0093] Note that a multi-column mask sheet can also be divided into three, four, or more groups, but this is not limited here. The principle for improving the utilization rate of the target substrate by dividing it into three, four, or more groups is the same as the principle for dividing it into two groups as described above, so a detailed explanation is omitted here. It can also be divided in the row direction, but a detailed explanation of that is also omitted.

[0094] Selectively, the above-mentioned mask assembly is further associated with a deposition method, in which deposition is performed on the target substrate using the first to xth masks in sequence.

[0095] Specifically, the following explanation will use the case where x is 2 as an example. As shown in Figure 21, the mask on the left side of Figure 21 (referred to as the first mask) and the mask on the right side of Figure 21 (referred to as the second mask) are used to sequentially deposit material onto the target substrate. Since the patterns of the first mask and the second mask are complementary, the deposition of the target deposition pattern can be completed by depositing the material one after the other.

[0096] Selectively, Figure 23 shows a schematic diagram of the deposition pattern obtained after the first deposition using the left mask of the mask assembly shown in Figure 21, according to an embodiment of the present disclosure. Figure 24 shows a schematic diagram of the deposition pattern obtained after the second deposition using the right mask of the mask assembly shown in Figure 21, according to an embodiment of the present disclosure. The mask sheets in the first to third columns will be described as an example.

[0097] When vapor deposition is performed with the first mask, the positions of the first row of mask sheets and the third row of mask sheets may partially overlap with the positions of the second row of mask sheets when vapor deposition is performed with the second mask. As shown in Figure 21, the positions of the right edge of the first row of mask sheets when vapor deposition is performed with the first mask and the left edge of the second row of mask sheets when vapor deposition is performed with the second mask may have an overlapping region X1, and the positions of the left edge of the third row of mask sheets when vapor deposition is performed with the first mask and the right edge of the second row of mask sheets when vapor deposition is performed with the second mask may have an overlapping region X2. As a result, the distance between the right edge of the figure deposited in the effective vapor deposition area of ​​the first row of mask sheets and the upper edge of the figure deposited in the effective vapor deposition area of ​​the second row of mask sheets is significantly reduced, and for example, a seamless connection can be achieved. The distance between the right edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the third row of mask sheets is significantly reduced, allowing for seamless connection, for example, and is not limited by the edge distance outside the effective deposition area of ​​each mask sheet. As shown in Figure 24, the distance between the right edge of the figure deposited in the effective deposition area of ​​the first row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets is reduced to zero. The distance between the right edge of the figure deposited in the effective deposition area of ​​the second row of mask sheets and the left edge of the figure deposited in the effective deposition area of ​​the third row of mask sheets is also reduced to zero. As a result, the utilization rate of the target substrate is improved.

[0098] Based on this, and continuing to refer to Figures 1 and 24, as shown in Figure 1, the right side shows a conventional deposition pattern. In addition to the required deposition pattern, there is also film layer material deposited in the gaps. Therefore, when cutting the deposition pattern, it is necessary to cut it twice in the lateral direction. This allows for the separation of different deposition unit shapes in the rows. As shown in Figure 24, in this embodiment, in the deposition pattern after two depositions, there are no or small gaps in the mask sheet between each deposition unit shape in the lateral direction, so cutting is only required once. The above arrangement reduces the number of cuts in the splitting process and improves production efficiency.

[0099] Selectively, the deposition pattern includes multiple deposition unit shapes arranged in an array. Each row of mask sheets corresponds to one row of deposition unit shapes in the deposition pattern.

[0100] Figure 25 shows the configuration of another mask assembly according to an embodiment of the present disclosure. As shown in Figure 25, each row of mask sheets corresponds to one row of deposition unit figures 21 of the deposition pattern. That is, the effective deposition area of ​​each row of mask sheet corresponds to one row of deposition unit figures of the deposition pattern.

[0101] When performing deposition on a target substrate, the first to xth masks are used sequentially to deposit the material onto the substrate. Because the distance between the edges of adjacent rows of mask sheets on the same mask frame is smaller than the sum of the widths of other rows of mask sheets located between the row numbers of these adjacent rows, the masks used for the two deposition processes before and after may have overlapping regions with the mask sheets of adjacent row numbers. This arrangement reduces the gap in the effective deposition area of ​​the mask sheets of adjacent row numbers, thereby improving the utilization rate of the target substrate.

[0102] Selectively, the deposition pattern includes multiple deposition unit figures arranged in an array. With the exception of the mask sheets for the first and last columns, the mask sheets for each column correspond to the partial deposition unit figures of the preceding column and the subsequent column of the deposition pattern.

[0103] For example, as shown in Figure 21, the first row of mask sheets in the left mask of Figure 21 is the first row of mask sheets, and the seventh row of mask sheets is the last row of mask sheets. The first row of masks corresponds only to the portion of the deposition unit shape in one row of the deposition pattern, and the seventh row of mask sheets corresponds only to the portion of the deposition unit shape in one row of the deposition pattern. The third row of mask sheets and the fifth row of mask sheets in the left mask of Figure 21, and the second row of mask sheets and the fourth row of mask sheets and the sixth row of mask sheets in the right mask of Figure 21, all correspond to the partial deposition unit shapes in the preceding row and the partial deposition unit shapes in the following row of the deposition pattern. Therefore, with the exception of the first and last row of mask sheets, the mask sheets in each row correspond to the partial deposition unit shapes in the preceding row and the partial deposition unit shapes in the following row of the deposition pattern. With this arrangement, the distance between the edges of the shapes deposited on adjacent row number mask sheets becomes zero, further improving the utilization rate of the target substrate.

[0104] Selectively, the deposition pattern is a single deposition unit shape.

[0105] For example, Figure 26 shows the configuration of another mask assembly according to an embodiment of the present disclosure. Figure 27 is a deposition pattern deposited with the first mask of the mask assembly shown in Figure 26. Figure 28 is a deposition pattern deposited with the second mask of the mask assembly shown in Figure 26. The upper part of Figure 26 shows the configuration of the first mask. The lower part of Figure 26 shows the configuration of the second mask. After deposition is performed using the upper and lower mask sheets of Figure 26, the distance between the edge of the figure obtained by deposition on the upper mask sheet and the edge of the figure obtained by deposition on the lower mask sheet is 0, and the figure of Figure 28 is obtained. The mask assembly shown in Figure 26 can form a completed deposition unit figure after sequential deposition using the first mask and the second mask. Therefore, by using the mask assembly according to an embodiment of the present disclosure for deposition, it is possible to manufacture large devices such as large OLED display panels.

[0106] Embodiments of the present disclosure further provide a deposition apparatus comprising an evaporation source and a mask assembly as described in any of the above embodiments. The mask assembly is positioned between the evaporation source and the substrate to be deposited.

[0107] In some embodiments, the deposition apparatus includes at least one evaporation chamber. The evaporation chamber includes multiple evaporation zones. Multiple masks of a mask assembly are matched one-to-one in each of the multiple evaporation zones, and deposition is performed on the target substrate.

[0108] In some embodiments, the evaporation zones of the same evaporation chamber may be connected to each other and the same evaporation source may be shared, and deposition is performed by sequentially scanning each evaporation zone using the evaporation source. Figure 29 is a diagram showing the configuration of a deposition apparatus according to an embodiment of the present disclosure. Figure 29 shows one evaporation chamber. The evaporation chamber contains a plurality of evaporation zones, which are a first R evaporation zone 102a, a second R evaporation zone 102b, a first G evaporation zone 103a, a second G evaporation zone 103b, a first B evaporation zone 104a, and a second B evaporation zone 104b, as well as a first buffer area 101a and a second buffer area 101b. In the plurality of evaporation zones, a plurality of masks of a mask assembly are each matched one-to-one, and deposition is performed on the target substrate. With such an arrangement, the number of evaporation chambers can be reduced, and the cost of the apparatus can be reduced.

[0109] Selectively, deposition may be performed by scanning the evaporation zone once with the same evaporation source. Figure 30 shows the configuration of another deposition apparatus according to an embodiment of the present disclosure. As shown in Figure 30, one evaporation source 31 is provided, and deposition is performed sequentially on the first mask 1a and the second mask 1b using the same evaporation source 31, thereby reducing the number of evaporation sources and reducing the cost of the apparatus.

[0110] The above embodiments merely illustrate a specific structure of a vapor deposition apparatus as an example. The vapor deposition apparatus may include multiple evaporation chambers. The number of evaporation zones in different evaporation chambers may be the same or different, but the number of evaporation zones in an evaporation chamber is not limited in this disclosure. The number of evaporation sources can also be selected according to the actual situation.

[0111] The embodiments of this disclosure further provide a deposition method using a mask assembly. This method may use a mask assembly according to any of the embodiments described above and includes the following steps.

[0112] The mask assembly is used to deposit vapor deposition onto the target substrate.

[0113] Specifically, by placing the target substrate in the mask assembly, the entire assembly can be placed inside the deposition apparatus, and deposition is carried out sequentially on the target substrate according to the arrangement requirements of the deposition area.

[0114] When selectively performing deposition on a target substrate using a mask assembly, the relative movement between the evaporation source and the mask assembly is controlled, and the direction of movement is made parallel to the plane on which the mask assembly is located and perpendicular to the longitudinal direction of the mask sheet.

[0115] Specifically, controlling the relative motion between the evaporation source and the first mask may include fixing the first mask and moving the evaporation source in a direction parallel to the plane on which the first mask resides and perpendicular to the longitudinal direction of the mask sheet. Alternatively, controlling the relative motion between the evaporation source and the first mask may also include fixing the evaporation source and moving the first mask in a direction parallel to the plane on which the first mask resides and perpendicular to the longitudinal direction of the mask sheet.

[0116] When selectively depositing a target substrate with a mask, the method further includes making the relative movement speed between the evaporation source and the mask assembly at a first position less than the relative movement speed between the evaporation source and the mask assembly at a second position. The first position refers to a position where the evaporation source is below the mask sheet, and the second position refers to a position where the evaporation source is not below the mask sheet.

[0117] Specifically, during deposition, deposition should be performed on the deposition unit shape of the mask sheet, without performing deposition on locations in the mask assembly where the mask sheet is not placed (for example, on spacers or support beams where the mask sheet is not placed). However, it is impossible to avoid deposition occurring when the evaporation source passes through the first blocking section. Therefore, it is necessary to accelerate the movement speed of the evaporation source when passing through areas where deposition is not required, and return to the normal movement speed when passing through the mask sheet where deposition is required.

[0118] Based on this, the position where the evaporation source is below the mask sheet is referred to as the first position, and the position where the evaporation source is not below the mask sheet is referred to as the second position. The relative movement speed between the evaporation source and the mask assembly at the first position must be smaller than the relative movement speed between the evaporation source and the mask assembly at the second position. This arrangement avoids wasting deposition material due to deposition at the second position, and because the relative movement speed at the second position is faster, the overall movement time is shortened, saving deposition time and avoiding wasted deposition material.

[0119] In this specification, relational terms such as "first" and "second" are used solely to distinguish one component or operation from another, and do not necessarily require or imply the existence of an actual relationship or order between these components or operations. The words "have," "include," or other variations thereof are intended to cover non-exclusive inclusion, meaning that a process, method, article, or device containing a set of elements includes not only those elements but also other elements not expressly listed or specific to such process, method, article, or device. Without further limitation, an element limited by the phrase "includes one..." does not preclude the existence of additional identical elements in a process, method, article, or device containing that element.

[0120] The above description is merely a specific embodiment of the Disclosure, intended to enable those skilled in the art to understand or implement the Disclosure. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the Disclosure. Accordingly, the Disclosure is not limited to these embodiments shown herein, and should be given the broadest scope consistent with the principles and novel features disclosed herein. <Industrial applicability>

[0121] The mask assembly according to this disclosure includes at least one mask frame and a mask sheet placed on the support surface of the mask frame. The mask frame includes a mask frame and at least one support beam located within the enclosed area of ​​the mask frame. The support surface of the support beam is flush with the support surface of the mask frame. In this disclosure, the support beam is provided within the mask frame, the mask sheet is placed above the support beam, and the support beam supports the mask sheet. The size of the mask sheet can be selected as needed, and even large mask sheets are supported by the support beam, so that when the mask sheet is placed on the mask frame, it is completely suspended in mid-air, preventing it from sagging due to gravity and causing deformation of the mask sheet, which would affect the deposition effect. This disclosure mitigates the problem of deformation of the mask sheet due to gravity, is applicable to mask sheets of various sizes, and improves the alignment accuracy of the target substrate and enhances the deposition effect.

Claims

1. A mask assembly, It includes at least one mask frame and a mask sheet placed on the support surface of the mask frame, The mask frame includes a mask frame and at least one support beam located within the enclosed area of ​​the mask frame. A mask assembly characterized in that the support surface of the support beam is flush with the support surface of the mask frame.

2. Multiple rows of the mask sheets are arranged sequentially in the mask frame. The extending direction of the mask sheet is parallel to the extending direction of the support beam. The mask assembly according to claim 1, characterized in that a portion of the edges and gaps of two adjacent rows of the mask sheets of the same mask frame overlap with the support beam.

3. The mask assembly according to claim 2, characterized in that the edges of the mask sheet are fixed to the support beam and / or the mask frame.

4. Spacers are provided in the gaps between two adjacent rows of the mask sheets within the same mask frame. The mask assembly according to claim 2, characterized in that the spacer is located on the support beam.

5. The mask assembly according to claim 4, characterized in that the spacer is fixed to the support beam.

6. Including the target substrate placement area, The target substrate is placed within the aforementioned target substrate placement area. The mask assembly according to claim 4, characterized in that the spacer structure is fixed to the mask frame outside the target substrate placement area.

7. The mask assembly according to claim 2, characterized in that the gap between two adjacent rows of mask sheets within the same mask frame is smaller than a preset value.

8. A groove is provided on the support surface of the aforementioned support beam. The mask assembly according to claim 1, characterized in that the mask sheet is fixed in the groove.

9. A groove is provided on the support surface of the aforementioned support beam. The mask assembly according to claim 5, characterized in that the edge of the spacer is firmly fixed within the groove.

10. The mask assembly according to claim 1, characterized in that constant temperature liquid piping is provided within the support beam.

11. A groove is provided on the support surface of the aforementioned support beam. A support stage is provided within the groove. The edge of the mask sheet is fixed within the groove. The mask assembly according to claim 2, characterized in that the support surface of the support stage is flush with the side of the mask sheet that is away from the mask frame.

12. The mask assembly according to claim 1, characterized in that the mask sheet placed on the support surface of the mask frame is a single-piece structure.

13. The spacers provided in the gaps between two adjacent rows of mask sheets within the same mask frame overlap with the edges of the two adjacent rows of mask sheets. The mask assembly according to claim 4, characterized in that the mask sheet is located on the side of the spacer away from the support beam.

14. The mask assembly according to claim 13, characterized in that the length of the spacer along a direction parallel to the extending direction of the support beam is shorter than the length of the mask sheet.

15. The mask assembly according to claim 1, characterized in that the mask frame is integrally molded with the support beam.

16. Includes x mask frames, Multiple mask sheets on x mask frames correspond to the deposition pattern. Multiple mask sheets on x mask frames are divided into x groups. Mask sheets satisfying column number i + nx are arranged sequentially in the i-th mask frame by column number to form the i-th mask. The distance between the edges of adjacent column mask sheets on the same mask frame is less than the sum of the widths of other column mask sheets that exist between the column numbers of the adjacent column mask sheets. The mask assembly according to any one of claims 1 to 15, characterized in that i and x are both positive integers, i is less than or equal to x, x is greater than 1, and n is a non-negative integer.

17. A vapor deposition apparatus, The set includes an evaporation source and a mask assembly according to any one of claims 1 to 16, The deposition apparatus is characterized in that the mask assembly is placed between the evaporation source and the target substrate.

18. A deposition method using a mask assembly, Using the mask assembly described in any one of claims 1 to 16, A deposition method characterized by including deposition on a target substrate using the mask assembly.

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