Polynuclear tin compounds and related methods

Abstract

Polynuclear tin compounds and related methods are provided. These methods include obtaining monosubstituted tin(IV) amide compounds; obtaining silanol compounds; and contacting monosubstituted tin(IV) amide compounds with silanol compounds to form polynuclear tin compounds. The compositions comprise the polynuclear tin compounds.

Description

[Technical Field]

[0001] This disclosure relates to compositions containing polynuclear tin compounds and related methods.

[0002] Cross-reference of related applications This application claims the benefit of U.S. Provisional Application No. 63 / 460,663 under 35 U.S.C. 119 (filed on April 20, 2023), thereby incorporating all of the said disclosure by reference. [Background technology]

[0003] Some precursors are useful for the fabrication of microelectronic devices. Fabricating such devices may involve forming thin films using extreme ultraviolet (EUV) lithography.

[0004] overview Some embodiments include a method for forming a mixed ligand polynuclear tin compound by contacting a monosubstituted tin(IV) amide compound with a silanol compound, wherein the monosubstituted tin(IV) amide compound is of the formula: RSn(NR 1 2)3[wherein R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, cyclopentadienyl, or any combination thereof; R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 These are bonded to each other, C3~C 20 It is a compound that forms an N-heterocycle; a silanol compound, formula: HOSIR 2 3 [wherein, R 2relates to a method that is a compound which is at least one of hydrogen, halide, alkyl, alkenyl, alkynyl, cycloalkyl, aryl, aralkyl, alkaryl, or haloalkyl independently.

[0005]

[0005] Some embodiments are of the formula: [R2Sn2(NR 1 2) n (OSiR 2 3) 6-n x [wherein, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, cyclopentadienyl, or any combination thereof; R 1 is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 2 is bonded to each other to form a C3-C 20 N-heterocycle; R 2 is independently at least one of hydrogen, halide, alkyl, alkenyl, alkynyl, cycloalkyl, aryl, aralkyl, alkaryl, or haloalkyl; x is 1, 1.5, or 2; and n is 1 to 5] and relates to a composition containing a mixed ligand polynuclear tin compound.

[0006] Some embodiments of the present disclosure are described merely illustratively with reference to the accompanying drawings. In particular relation to the details of the drawings, it is emphasized that the embodiments shown are illustrative and for the purpose of discussing the embodiments of the present disclosure explanatorily. In this regard, this specification, together with the drawings, clearly shows those skilled in the art how the embodiments of the present disclosure can be implemented.

Brief Description of the Drawings

[0007] [Figure 1] ​This is a flowchart of a method for producing a polynuclear tin compound according to several embodiments. [Figure 2] A schematic cross-sectional view is shown of a non-limiting embodiment of the ampoule according to several embodiments. [Figure 3] Thermogravimetric analysis of iPr2Sn2(μ-N(CH3)2)(OSi(CH3)3)5 according to several embodiments. [Figure 4] This is a solid-state three-dimensional structural analysis of iPr2Sn2(μ-N(CH3)2)(OSi(CH3)3)5 according to several embodiments. [Modes for carrying out the invention]

[0008]

[0011] Among the disclosed benefits and improvements are other purposes and advantages that will become apparent from the following description in relation to the accompanying drawings. Detailed embodiments of the Disclosure are disclosed herein. However, the disclosed embodiments should be understood as merely descriptive of the various forms in which the Disclosure may be embodied. Furthermore, all examples relating to the various embodiments of the Disclosure are intended to be illustrative and not limiting.

[0009] Prior patents and publications referenced herein are incorporated in their entirety by reference.

[0010] Throughout the specification and claims, unless the context clearly indicates otherwise, the following terms have the meanings expressly related to this specification. As used herein, the phrases “in one embodiment,” “in one embodiment,” and “in several embodiments” do not necessarily refer to the same one or more embodiments, but may refer to the same one or more embodiments. Furthermore, as used herein, the phrases “in another embodiment” and “in several other embodiments” do not necessarily refer to different embodiments, but may refer to different embodiments. All embodiments of this disclosure are intended to be combinable without departing from the scope and spirit of the disclosure.

[0011] As used herein, the term "based on" is not exclusive and may be based on additional elements not explicitly stated unless the context clearly indicates otherwise. Furthermore, throughout the specification, the meanings of "a," "an," and "the" include references to the plural. The meaning of "in" includes "in" and "on."

[0012]

[0015] As used herein, the term "alkyl" refers to a hydrocarbyl having 1 to 30 carbon atoms. Alkyls can be bonded via a single bond. Alkyls with n carbon atoms are called "C n They are called "alkyl." For example, "C3 alkyl" may include n-propyl and isopropyl. Alkyls having a range of carbon atoms (e.g., 1 to 30 carbon atoms) are C1-C 30 It may be called an alkyl group. In some embodiments, the alkyl group is linear. In some embodiments, the alkyl group is branched. In some embodiments, the alkyl group is substituted. In some embodiments, the alkyl group is unsubstituted. In some embodiments, the alkyl group includes at least one of the following, or is selected from the group consisting of at least one of the following: C1~C 30 Alkyl, C1-C 29Alkyl, C1-C 28 Alkyl, C1-C 27 Alkyl, C1-C 27 Alkyl, C1-C 26 Alkyl, C1-C 25 Alkyl, C1-C 24 Alkyl, C1-C 23 Alkyl, C1-C 22 Alkyl, C1-C 21 Alkyl, C1-C 20 Alkyl, C1-C 19 Alkyl, C1-C 18 Alkyl, C1-C 17 Alkyl, C1-C 16 Alkyl, C1-C 15 Alkyl, C1-C 14 Alkyl, C1-C 13 Alkyl, C1-C 12 Alkyl, C1-C 11 Alkyl, C1-C 10 Alkyl, C1-C9 alkyl, C1-C8 alkyl, C1-C7 alkyl, C1-C6 alkyl, C1-C5 alkyl, C1-C4 alkyl, C1-C3 alkyl, C1-C2 alkyl, C2-C 30 Alkyl, C3~C 30 Alkyl, C4~C 30 Alkyl, C5~C 30 Alkyl, C6~C 30 Alkyl, C7~C 30 Alkyl, C8~C 30 Alkyl, C9~C 30 Alkyl, C 10 ~C 30 Alkyl, C 11 ~C 30 Alkyl, C 12 ~C 30 Alkyl, C 13 ~C 30 Alkyl, C 14 ~C 30 Alkyl, C 15 ~C 30 Alkyl, C 16 ~C 30 Alkyl, C 17 ~C 30 Alkyl, C 18 ~C 30Alkyl, C 19 ~C 30 Alkyl, C 20 ~C 30 Alkyl, C 21 ~C 30 Alkyl, C 22 ~C 30 Alkyl, C 23 ~C 30 Alkyl, C 24 ~C 30 Alkyl, C 25 ~C 30 Alkyl, C 26 ~C 30 Alkyl, C 27 ~C 30 Alkyl, C 28 ~C 30 Alkyl, C 29 ~C 30 Alkyl, C2~C 10 Alkyl, C3~C 10 Alkyl, C4~C 10 Alkyl, C5~C 10 Alkyl, C6~C 10 Alkyl, C7~C 10 Alkyl, C8~C 10 Alkyl, C2~C9 alkyl, C2~C8 alkyl, C2~C7 alkyl, C2~C6 alkyl, C2~C5 alkyl, C3~C5 alkyl, or any combination thereof. In some embodiments, the alkyl comprises at least one of the following or is selected from the group consisting of at least one of the following: methyl, ethyl, n-propyl, 1-methyl (isopropyl), n-butyl, isobutyl, sec-butyl, n-pentyl, 1,1-dimethyl (t-butyl), n-pentyl, isopentyl, n-hexyl, isohexyl, 3-methylhexyl, 2-methylhexyl, heptyl, octyl, nonyl, decyl, dodecyl, octadecyl, or any combination thereof. In some embodiments, the term "alkyl" generally refers to alkyl, alkenyl, alkynyl, and / or cycloalkyl.

[0013] As used herein, the term "alkenyl" refers to a hydrocarbyl having from 1 to 30 carbon atoms and at least one carbon-carbon double bond. In some embodiments, the alkenyl comprises at least one of, or is selected from the group consisting of at least one of: C1-C 30 alkenyl, C1-C 29 alkenyl, C1-C 28 alkenyl, C1-C 27 alkenyl, C1-C 27 alkenyl, C1-C 26 alkenyl, C1-C 25 alkenyl, C1-C 24 alkenyl, C1-C 23 alkenyl, C1-C 22 alkenyl, C1-C 21 alkenyl, C1-C 20 alkenyl, C1-C 19 alkenyl, C1-C 18 alkenyl, C1-C 17 alkenyl, C1-C 16 alkenyl, C1-C 15 [[ID=3�]]alkenyl, C1-C 14 alkenyl, C1-C 13 alkenyl, C1-C 12 alkenyl, C1-C 11 alkenyl, C1-C 10 alkenyl, C1-C9 alkenyl, C1-C8 alkenyl, C1-C7 alkenyl, C1-C6 alkenyl, C1-C5 alkenyl, C1-C4 alkenyl, C1-C3 alkenyl, C1-C2 alkenyl, C2-C 30 alkenyl, C3-C 30 alkenyl, C4-C 30 alkenyl, C5-C 30 alkenyl, C6-C 30 alkenyl, C7-C 30 alkenyl, C8-C 30 alkenyl, C9-C 30 alkenyl, C 10 -C 30 alkenyl, C 11 -C 30 alkenyl, C12 ~C 30 Alkenil, C 13 ~C 30 Alkenil, C 14 ~C 30 Alkenil, C 15 ~C 30 Alkenil, C 16 ~C 30 Alkenil, C 17 ~C 30 Alkenil, C 18 ~C 30 Alkenil, C 19 ~C 30 Alkenil, C 20 ~C 30 Alkenil, C 21 ~C 30 Alkenil, C 22 ~C 30 Alkenil, C 23 ~C 30 Alkenil, C 24 ~C 30 Alkenil, C 25 ~C 30 Alkenil, C 26 ~C 30 Alkenil, C 27 ~C 30 Alkenil, C 28 ~C 30 Alkenil, C 29 ~C 30 Alkenyl, C2~C 10 Alkenil, C3~C 10 Alkenyl, C4~C 10 Alkenil, C5~C 10 Alkenil, C6~C 10 Alkenil, C7~C 10 Alkenil, C8~C 10Alkenyls, C2-C9 alkenyls, C2-C8 alkenyls, C2-C7 alkenyls, C2-C6 alkenyls, C2-C5 alkenyls, C3-C5 alkenyls, or any combination thereof. Examples of alkenyl groups include vinyl, allyl, 1-methylvinyl, 1-propenyl, 1-butenyl, 2-butenyl, 3-butenyl, 1,3-butadienyl, 2-methyl-1-propenyl, 2-methyl-2-propenyl, 1-pentenyl, 2-pentenyl, 3-pentenyl, 4-pentenyl, 1,3-pentadienyl, 2,4-pentadienyl, 1,4-pentadienyl, 3-methyl-2-butenyl, 1-hexenyl This includes, but is not limited to, nyl, 2-hexenyl, 3-hexenyl, 1,3-hexadienyl, 1,4-hexadienyl, 2-methylpentenyl, 1-heptenyl, 3-heptenyl, 1-octenyl, 1,3-octadienyl, 1-nonenyl, 2-nonenyl, 3-nonenyl, 1-decenyl, 3-decenyl, 1-undecenyl, oleyl, linoleyl, linolenyl, or any combination thereof.

[0014] As used herein, the term "alkynyl" refers to a hydrocarbyl having 1 to 30 carbon atoms and at least one carbon triple bond. In some embodiments, the alkynyl includes at least one of the following, or is selected from the group consisting of at least one of the following: C1 to C 30 Alkinyl, C1~C 29 Alkinyl, C1~C 28 Alkinyl, C1~C 27 Alkinyl, C1~C 27 Alkinyl, C1~C 26 Alkinyl, C1~C 25 Alkinyl, C1~C 24 Alkinyl, C1~C 23 Alkinyl, C1~C 22 Alkinyl, C1~C 21 Alkinyl, C1~C 20 Alkinyl, C1~C 19 Alkinyl, C1~C 18 Alkinyl, C1~C 17 Alkinyl, C1~C 16Alkinyl, C1~C 15 Alkinyl, C1~C 14 Alkinyl, C1~C 13 Alkinyl, C1~C 12 Alkinyl, C1~C 11 Alkinyl, C1~C 10 Alkinyl, C1-C9 alkinyl, C1-C8 alkinyl, C1-C7 alkinyl, C1-C6 alkinyl, C1-C5 alkinyl, C1-C4 alkinyl, C1-C3 alkinyl, C1-C2 alkinyl, C2-C 30 Alkinyl, C3~C 30 Alkinyl, C4~C 30 Alkinyl, C5~C 30 Alkinyl, C6~C 30 Alkinyl, C7~C 30 Alkinyl, C8~C 30 Alkinyl, C9~C 30 Alkinyl, C 10 ~C 30 Alkinyl, C 11 ~C 30 Alkinyl, C 12 ~C 30 Alkinyl, C 13 ~C 30 Alkinyl, C 14 ~C 30 Alkinyl, C 15 ~C 30 Alkinyl, C 16 ~C 30 Alkinyl, C 17 ~C 30 Alkinyl, C 18 ~C 30 Alkinyl, C 19 ~C 30 Alkinyl, C 20 ~C 30 Alkinyl, C 21 ~C 30 Alkinyl, C 22 ~C 30 Alkinyl, C 23 ~C 30 Alkinyl, C 24 ~C 30 Alkinyl, C 25 ~C 30 Alkinyl, C 26 ~C30 Alkinyl, C 27 ~C 30 Alkinyl, C 28 ~C 30 Alkinyl, C 29 ~C 30 Alkinyl, C2~C 10 Alkinyl, C3~C 10 Alkinyl, C4~C 10 Alkinyl, C5~C 10 Alkinyl, C6~C 10 Alkinyl, C7~C 10 Alkinyl, C8~C 10 Alkynyl groups, C2-C9 alkynyl groups, C2-C8 alkynyl groups, C2-C7 alkynyl groups, C2-C6 alkynyl groups, C2-C5 alkynyl groups, C3-C5 alkynyl groups, or combinations thereof. Examples of alkynyl groups include, but are not limited to, ethynyl, propynyl, n-butynyl, n-pentynyl, 3-methyl-1-butynyl, n-hexynyl, methyl-pentynyl, or any combination thereof.

[0015] As used herein, the term “cycloalkyl” refers to a non-aromatic cyclic carbon ring having 3 to 8 carbon atoms in the ring. This term includes monocyclic and polycyclic non-aromatic carbon rings. When used as a modifier, the term “monocyclic” refers to a cycloalkyl having one ring structure. When used as a modifier, the term “polycyclic” refers to a cycloalkyl having more than one ring structure, such cycloalkyl may be fused, crosslinked, or spiro-ring structures, or otherwise linked ring structures. For example, two or more cycloalkyls can be fused, crosslinked, or fused and crosslinked to obtain a polycyclic non-aromatic cyclic carbon ring. In some embodiments, the cycloalkyl may include, consist of, or substantially consist of, at least one of, cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, or a combination thereof, or may be selected from the group consisting of at least one of these.

[0016] As used herein, the term “aryl” refers to monocyclic or polycyclic aromatic hydrocarbons. The number of carbon atoms in an aryl can range from 5 to 100. In some embodiments, the aryl has 5 to 20 carbon atoms. For example, in some embodiments, the aryl has 6 to 8 carbon atoms, 6 to 10 carbon atoms, 6 to 12 carbon atoms, 6 to 15 carbon atoms, or 6 to 20 carbon atoms. When used as a modifier, the term “monocyclic” refers to an aryl having one aromatic ring structure. When used as a modifier, the term “polycyclic” refers to an aryl having more than one aromatic ring structure, which may be fused, bridged, or spiro-ring structures, or other otherwise linked ring structures. In some embodiments, the aryl is -C6H5.

[0017]

[0020] As used herein, the terms "amino" and / or "amine" refer to the chemical formula -N(R) a R b ) refers to the functional group, and in the formula, R a and R b independently of R, is hydrogen, alkyl (as defined herein), or silyl (as defined herein), or R a and R b They are bonded to each other, C3~C 20It forms an N-heterocycle. In some embodiments, the amino may include an alkylamino or a dialkylamino. In some embodiments, the amino may include at least one of methylamino, dimethylamino, ethylamino, diethylamino, isopropylamino, di-isopropylamino, butylamino, sec-butylamino, tert-butylamino, di-sec-butylamino, isobutylamino, di-isobutylamino, di-tert-pentylamino, ethylmethylamino, isopropyl-n-propylamino, or any combination thereof. Examples of alkylaminos may include, but are not limited to, one or more of the following: primary alkylaminos, e.g. (exemplary, but not limited to), methylamino, ethylamino, n-propylamino, isopropylamino, n-butylamino, sec-butylamino, isobutylamino, t-butylamino, pentylamino, 2-aminopentane, 3-aminopentane, 1-amino-2-methylbutane, 2-amino-2-methylbutane, 3-amino-2-methylbutane, 4-amino-2-methylbutane, hexylamino, 5-amino-2-methylpentane, heptylamino, octylamino, nonylamino, decylamino, undecylamino, dodecylamino, tridecylamino, tetradecylamino, pentadecylamino, hexadecylamino, heptadecylamino, and octadecylamino; and, Secondary alkylaminos, for example (exemplary, but not limited to), dimethylamino, diethylamino, dipropylamino, diisopropylamino, dibutylamino, diisobutylamino, di-sec-butylamino, di-t-butylamino, dipentylamino, dihexylamino, diheptylamino, dioctylamino, dinonylamino, didecylamino, methylethylamino, methylpropylamino, methylisopropylamino, methylbutylamino, methylisobutylamino, methyl-sec-butylamino, methyl-t-butylamino, methylamylamino, methylisoamylamino, ethylpropylamino, ethylisopropylamino, ethylbutylamino, ethylisobutylamino, ethyl-sec-butylamino, ethylamino, ethylisoamylamino, propylbutylamino, and propylisobutylamino.

[0018] As used here, the term "alkoxy" is derived from the formula -OR c It refers to the functional group, and in the formula, R c The alkoxy is alkyl (as defined herein), silylalkyl, cycloalkyl, or aryl. In some embodiments, the alkoxy may comprise at least one of the following, consist of, substantially consist of, or be selected from the group consisting of: methoxy, ethoxy, methoxy, ethoxy, n-propoxy, 1-methylethoxy (isopropoxy), n-butoxy, iso-butoxy, sec-butoxy, tert-butoxy, or any combination thereof.

[0019] As used here, the term "silyl" is derived from the formula -Si(R e R f R g ) refers to the functional group, and in the formula, R e , R f , R g Each is independently hydrogen or alkyl (as defined herein). In some embodiments, silyl is the functional group of formula -SiH3. In some embodiments, silyl is the functional group of formula -SiR e H2 is a functional group, and in the formula, R e It is not hydrogen. In some embodiments, silyl is represented by the formula -SiR e R f H is a functional group, and in the formula, R e and R f It is not hydrogen. In some embodiments, silyl is represented by the formula -SiR e R f R g It is a functional group, and in the formula, R e , R f and R g It is not hydrogen. In some embodiments, silyl is the functional group of the formula -Si(CH3)3.

[0020] As used herein, the term “alkoxyalkyl” refers to a structure in which at least one hydrogen atom of an alkyl (as defined herein) is replaced by an alkoxy (as defined herein). In some embodiments, the term “alkoxyalkyl” is defined as a structure of the formula -(alkyl)OR a This refers to the functional group, where alkyl is defined as previously defined, R a This is as previously defined. In some embodiments, the alkoxyalkyl is of formula -(CH2) n Ure a It refers to the functional group, where n is 1 to 10, and R a This is as previously defined. In some embodiments, the alkoxyalkyl group is the functional group of the formula -CH2CH2OCH3.

[0021] As used herein, the term “aralkyl” refers to a group in which at least one hydrogen atom of an alkyl group (as defined herein) is replaced by an aryl group (as defined herein). In some embodiments, the term “aralkyl” refers to the functional group of the formula -(alkyl)(aryl), where alkyl is as defined herein and aryl is as defined herein. In some embodiments, the aralkyl group is -CH2(C6H5).

[0022]

[0025] As used herein, the term "aminoalkyl" refers to an alkyl group in which at least one hydrogen atom of the alkyl group as defined herein is replaced by an amino as defined herein. In some embodiments, the term "aminoalkyl" is defined as an alkyl group of the formula -(alkyl)N(R b R c R d ) refers to the functional group, and alkyl is as previously defined, R b , R c , and R dThis is as previously defined. In some embodiments, the aminoalkyl is -CH2N(CH3)2. In some embodiments, the aminoalkyl is (CH2)3N(CH3)2. In some embodiments, the aminoalkyl is aminomethyl (-CH2NH2). In some embodiments, the aminoalkyl is N,N-dimethylaminoethyl (-CH2CH2N(CH3)2). In some embodiments, the aminoalkyl is 3-(N-cyclopropylamino)propyl (-CH2CH2CH2NH-Pr).

[0023] As used herein, the term “silylalkyl” refers to an alkyl group in which at least one hydrogen atom of the alkyl group as defined herein is replaced by a silyl atom as defined herein. In some embodiments, the term “silylalkyl” is defined as an alkyl group of the formula -(alkyl)Si(R e R f R g ) refers to the functional group, and alkyl is as previously defined, R e , R f , and R g This is as previously defined. In some embodiments, the silylalkyl is of formula -(CH2) m Si(R e R f R g ) is a functional group, where m is 1 to 10, and R e , R f , and R g This is as previously defined. In some embodiments, the silylalkyl group is the functional group of the formula -CH2Si(CH3)3.

[0024] As used herein, the term “haloalkyl” refers to an alkyl group in which at least one of its hydrogen atoms is replaced by a halide as defined herein. In some embodiments, the haloalkyl group includes a fluoroalkyl group. In some embodiments, the fluoroalkyl group includes at least one of -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, or any combination thereof.

[0025] As used herein, the term "halide" refers to -Cl, -Br, -I, or -F.

[0026] As used herein, the term “metal cation” refers to at least one of alkali metal cations, alkaline earth metal cations, transition metal cations, post-transition metal cations, or any combination thereof. In some embodiments, the metal cations include lithium cations, sodium cations, potassium cations, rubidium cations, cesium cations, francium cations, beryllium cations, magnesium cations, calcium cations, strontium cations, barium cations, radium cations, scandium cations, titanium cations, vanadium cations, chromium cations, manganese cations, iron cations, cobalt cations, nickel cations, copper cations, zinc cations, yttrium cations, zirconium cations, niobium cations, molybdenum cations, technetium cations, ruthenium cations, rhodium cations, palladium cations, silver cations, cadmium cations, hafnium cations, tantalum cations, tungsten cations, rhenium cations, osmium cations, iridium cations, platinum cations, gold cations, mercury cations, aluminum cations, gallium cations, indium cations, tin cations, thallium cations, lead cations, bismuth cations, or polonium cations. The charge numbers of the metal cations are known and will not be repeated here for brevity. However, it will be appreciated that the metal cations may have known charges. For example, in some embodiments, the metal cation is Li + kaNa + , K + , Rb + , Cs + Mg 2+ Ca 2+ Sr 2+ Ba 2+ Zn 2+ Sn 2+ , or Sn 4+ Includes. In some embodiments, the metal cation is Sn 2+ In some embodiments, the metal cation is Sn 4+ That is the case.

[0027]

[0030] Some embodiments relate to precursors and related methods. At least some of these embodiments relate to precursors useful in the manufacture of microelectronic devices, including semiconductor devices. For example, precursors may be used to form silicon-containing thin films by one or more deposition processes. Examples of deposition processes include, but are not limited to, at least one of the following, or any combination thereof: chemical vapor deposition (CVD), digital or pulsed chemical vapor deposition, plasma cycle chemical vapor deposition (PECCVD), fluidized chemical vapor deposition (FCVD), atomic layer deposition (ALD), thermal atomic layer deposition, plasma atomic layer deposition (PEALD), metal-organic chemical vapor deposition (MOCVD), and plasma chemical vapor deposition (PECVD).

[0028] Figure 1 is a flowchart of Method 100 for producing a polynuclear tin compound according to several embodiments. As shown in Figure 1, Method 100 for producing a polynuclear tin compound comprises one or more of the following steps: step 102 for obtaining a monosubstituted tin(IV) amide compound; step 104 for obtaining a silanol compound; and step 106 for contacting the monosubstituted tin(IV) amide compound with the silanol compound to form a polynuclear tin compound, such as (exemplary and not limited to) a mixed ligand polynuclear tin compound.

[0029] Step 102 of Method 100 includes obtaining a monosubstituted tin(IV)amide compound. In some embodiments, the monosubstituted tin(IV)amide compound is of formula: RSn(NR 1 2)3 It is a compound of, During the ceremony, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof. R 1 Each R is independently hydrogen, alkyl, cycloalkyl, or allyl, or each R 2 They bond to each other, C3-C 20 It forms an N-heterocyclic ring.

[0030]

[0036] In some embodiments, R is -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, -CH3, -CH2CH3, -CH2CH2CH3, -CH(CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=C At least one of the following, or any combination thereof: H2, -C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3.

[0031]

[0036] In some embodiments, R is at least one of -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, or any combination thereof. In some embodiments, R is at least one of -CH3, -CH2CH3, -CH2CH2CH3, -CH(CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, -C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, or any combination thereof.

[0032] In some embodiments, R 1 Each is independently at least one of hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl, or any combination thereof.

[0033] In some embodiments, the monosubstituted tin(IV) amide compound includes iPrSn(N(CH3)2)3.

[0034]

[0040] Step 104 of Method 100 includes obtaining a silanol compound. In some embodiments, the silanol compound is of formula: HOSiR 2 3 It is a compound of which, in the formula, R 2 Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl, or any combination thereof.

[0035] In some embodiments, the silanol compound includes trimethylsilanol.

[0036] In some embodiments, R is isopropyl, 1 is methyl, and R 2 It is methyl.

[0037]

[0045] Step 106 of Method 100 includes contacting a monosubstituted tin(IV) amide compound with a silanol compound to form a polynuclear tin compound.

[0038] In some embodiments, contact includes reacting a monosubstituted tin(IV) amide compound with a silanol compound. In some embodiments, contact includes mixing a monosubstituted tin(IV) amide compound with a silanol compound. In some embodiments, contact includes stirring a monosubstituted tin(IV) amide compound and a silanol compound. In some embodiments, contact includes adding a monosubstituted tin(IV) amide compound and a silanol compound to a reaction vessel. In some embodiments, contact includes dissolving a monosubstituted tin(IV) amide compound and a silanol compound. In some embodiments, contact includes combining a monosubstituted tin(IV) amide compound and a silanol compound. In some embodiments, contact is carried out in solution.

[0039] In some embodiments, the polynuclear tin compound comprises a mixed ligand polynuclear tin compound. In some embodiments, the mixed ligand polynuclear tin compound is of formula: [R2Sn2(NR 1 2) n (OSiR 2 3) 6-n ] x Contains the compound, During the ceremony, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof. R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 They bond to each other, C3-C 20 Forms an N-heterocycle, R 2 These are independently hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl, X is 1, 1.5, or 2. n is between 1 and 5.

[0040] In some embodiments, each R is the same. In some embodiments, at least two Rs are the same. In some embodiments, each R is different. In some embodiments, at least two Rs are different.

[0041]

[0055] Several embodiments, each R 1 However, they are the same. In some embodiments, at least two R 1 However, they are the same. In some embodiments, each R 1 The differences are in some embodiments. 1 However, they are different.

[0042] Several embodiments, each R 2 However, they are the same. In some embodiments, at least two R 2 However, they are the same. In some embodiments, each R 2 The differences are in some embodiments. 2 However, they are different.

[0043] In some embodiments, the polynuclear tin compound of the mixed ligand is given by formula: It is a compound of TIFF2026512743000002.tif56170, During the ceremony, R is independently -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, -CH3, -CH2CH3, -CH2CH2CH3, -CH (CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, - C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, at least one of these, or any combination thereof. R 2 These are independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl.

[0044]

[0061] In some embodiments, the polynuclear tin compound of the mixed ligand is given by formula: This is the compound TIFF2026512743000003.tif52170.

[0045] Some embodiments relate to compositions comprising a polynuclear tin compound. In some embodiments, the polynuclear tin compound comprises a mixed ligand polynuclear tin compound. In some embodiments, the mixed ligand polynuclear tin compound is of formula: [R2Sn2(NR 1 2) n (OSiR 2 3) 6-n ] x Contains the compound, During the ceremony, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 They bond to each other in a C3-C 20 Forms an N-heterocycle, R 2 Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl; x is 1, 1.5, or 2. n is between 1 and 5.

[0046]

[0070] In some embodiments, each R is the same. In some embodiments, at least two Rs are the same. In some embodiments, each R is different. In some embodiments, at least two Rs are different.

[0047]

[0055] In some embodiments, each R 1 However, they are the same. In some embodiments, at least two R 1 However, they are the same. In some embodiments, each R 1 The differences are in some embodiments. 1 However, they are different.

[0048] Several embodiments, each R 2 However, they are the same. In some embodiments, at least two R 2 However, they are the same. In some embodiments, each R 2 The differences are in some embodiments. 2 However, they are different.

[0049] In some embodiments, a mixed ligand polynuclear tin compound is given by formula: It is a compound of TIFF2026512743000004.tif61170, During the ceremony, R is independently -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, -CH3, -CH2CH3, -CH2CH2CH3, -CH (CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, - C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, at least one of these, or any combination thereof; R 2 These are independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl.

[0050] In some embodiments, a mixed ligand polynuclear tin compound is given by formula: Contains the compound TIFF2026512743000005.tif52170.

[0051] In some embodiments, the purity of the mixed ligand polynuclear tin compound is at least 99.9%. In some embodiments, the purity of the mixed ligand polynuclear tin compound is at least 70%, at least 75%, at least 80%, at least 85%, at least 90%, at least 91%, at least 92%, at least 93%, at least 94%, at least 95%, at least 96%, at least 97%, at least 98%, at least 99%, at least 99.9%, at least 99.99%, at least 99.999%, at least 99.9999%, or greater. In some embodiments, the purity of the mixed ligand polynuclear tin compound is 70% to 95%, 75% to 95%, 80% to 95%, 85% to 95%, 90% to 95%, 70% to 90%, 70% to 85%, 70% to 80%, 70% to 75%, or any range between 70% and 95% or a subdivision thereof. In some embodiments, the purity of the mixed ligand polynuclear tin compound is 95%~99.9999%, 95%~99.999%, 95%~99.99%, 95%~99.9%, 95%~99%, 95%~98%, 95%~97%, 95%~96%, 96%~99.9999%, 97%~99.9999%, 98%~99.9999%, 99%~99.9999%, 99.9%~99.9999%, 99.99%~99.9999%, 99.999%~99.9999%, or any effect between 95% and 99.9999% or a sub-sub

[0052] Figure 2 shows a schematic cross-sectional view of a non-limiting embodiment of the ampoule 200 according to several embodiments. The ampoule 200 includes a tray assembly 202 in an internal chamber 204 of the ampoule 200. The internal chamber 204 has an inner wall surface 206. The tray assembly 202 comprises trays 208 (each tray configured to contain a vaporizable precursor). In some embodiments, the vaporizable precursor includes one or more of the compositions disclosed herein (compositions containing polynuclear tin compounds). Each tray 208 of the tray assembly 202 comprises a portion 210, which is configured to be in contact (e.g., thermal contact, physical contact, etc.) with the inner wall surface 206 of the ampoule 200. Surface-to-surface contact between the portion 210 and the inner wall surface 206 facilitates heat transfer from the ampoule 200 to each tray 208, and consequently, heat transfer from each tray 208 to the vaporizable precursor in each tray 208. Various fluid flow paths are defined within the inner chamber 204 of the ampoule 200, allowing the fluid to flow upward, downward, or both through the ampoule 200. The ampoule 200 is generally shown to have a cylindrical inner chamber. However, it will be appreciated that the inner chamber 204 of the ampoule may have other shapes, as long as they do not deviate from the scope of this disclosure.

[0053]

[0080] Example 1 Synthesis of iPr2Sn2(μ-N(CH3)2)(OSi(CH3)3)5 iPrSn(N(CH3)2)3 (5.0 g, 17.0 mmol) (CAS#1913978-89-8) was placed in an amber vial (40 mL) equipped with a magnetic stirrer and diluted with 20 mL of hexane. When a hexane solution of trimethylsilanol (CAS#1066-40-6) (4.64 g, 51.5 mmol, in 10 mL of hexane) was added to the tinamide solution, which had been stirred for 5 minutes, exothermic reaction occurred. After the addition was complete, the colorless solution was stirred for 12 hours, thereby removing volatile substances under reduced pressure, and the product was obtained as a bright white microcrystalline solid (mass: 6.68 g, yield: 91.6%; purity: 199.96% clarity by 1H-NMR, melting point: (63.5°C by DSC). Crystals suitable for X-ray crystallography were grown by slowly evaporating a concentrated hexane solution. 1H{13C}-NMR (400 MHz, C6D6, 298K): 0.28 (s, 45H); 1.22 (d, 12H); 1.74 (sept, 2H); 2.63 (s, 6H) ppm; 13C{1H}-NMR (100 MHz, C6D6, 298K): 3.68; 20.10; 28.11; 42.63 ppm; 119Sn{1H}-NMR (149 MHz, C6D6, 298K): -310.37 ppm. 29Si{1H}-NMR (79 MHz, C6D6, 298K): 8.58 ppm. Figure 3 shows the thermogravimetric analysis of iPr2Sn2(μ-N(CH3)2)(OSi(CH3)3)5 according to several embodiments. Figure 4 shows the solid three-dimensional structural analysis of iPr2Sn2(μ-N(CH3)2)(OSi(CH3)3)5 according to several embodiments.

[0054] TIFF2026512743000006.tif238170

[0055] manner Various embodiments are described below. Any one or more features mentioned in the following embodiments should be understood to be combinable with one or more other embodiments. ·Aspect 1 A method comprising contacting a monosubstituted tin(IV) amide compound with a silanol compound to form a mixed ligand polynuclear tin compound, Monosubstituted tin(IV) amide compounds, formula: RSn(NR 1 2)3 [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 These are bonded to each other, C3~C 20 [Forms an N-heterocycle] It is a compound of, Silanol compounds, formula: HOSiR 2 3 [In the formula, R 2 [It is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl] A compound, method. • Feature 2 The method according to embodiment 1, wherein R includes at least one of -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, or any combination thereof. ·Aspect 3 The method according to embodiment 1 or 2, wherein R includes at least one of -CH3, -CH2CH3, -CH2CH2CH3, -CH(CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, -C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, or any combination thereof. • Phenomenon 4 R 1 The method according to any one of embodiments 1 to 3, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl. • Phenomenon 5 R is isopropyl, R 1 It is methyl, R 2 is methyl, The method according to any one of embodiments 1 to 4. • Phenomenon 6 The method according to any one of embodiments 1 to 5, wherein the monosubstituted tin(IV) amide compound comprises iPrSn(N(CH3)2)3. • Phenomenon 7 The method according to embodiment 6, wherein the silanol compound includes trimethylsilanol. • Aspect 8 A mixed ligand polynuclear tin compound, formula: [R2Sn2(NR 1 2) n (OSiR 2 3) 6-n ] x [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 These are bonded to each other, C3~C 20 Forms an N-heterocyclic ring; R 2 Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl; x is 1, 1.5, or 2; n is between 1 and 5. The method according to any one of embodiments 1 to 7, wherein the compound is [the compound]. • 9th aspect A mixed ligand polynuclear tin compound, formula: The method according to any one of embodiments 1 to 8, wherein the compound is TIFF2026512743000007.tif56170. ·Aspect 10 The method according to any one of embodiments 1 to 9, wherein R includes at least one of -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, or any combination thereof. ·Aspect 11 The method according to any one of embodiments 1 to 10, wherein R includes at least one of -CH3, -CH2CH3, -CH2CH2CH3, -CH(CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, -C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, or any combination thereof. ·Aspect 12 R 2 The method according to any one of embodiments 1 to 11, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl. ·Aspect 13 A mixed ligand polynuclear tin compound, formula: The method according to any one of embodiments 1 to 12, wherein the compound is TIFF2026512743000008.tif52170. ·Aspect 14 formula: [R2Sn2(NR 1 2) n (OSiR 2 3) 6-n ] x [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R 1 R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R 1 These are bonded to each other, C3~C 20 Forms an N-heterocyclic ring; R 2 Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl; x is 1, 1.5, or 2; n is between 1 and 5. A composition comprising a mixed ligand polynuclear tin compound. ·Aspect 15 A mixed ligand polynuclear tin compound, formula: The composition according to embodiment 14, wherein the compound is TIFF2026512743000009.tif58170. ·Aspect 16 The composition according to embodiment 14 or 15, wherein R comprises at least one of -CH2CF3, -CH(CF3)2, -CH2F, -CH2CH2F, -CF3, -CF2CF3, or any combination thereof. ·Aspect 17 The composition according to any one of embodiments 14 to 16, wherein R comprises at least one of -CH3, -CH2CH3, -CH2CH2CH3, -CH(CH3)2, -CH(CH3)CH2CH3, -CH2CH(CH3)2, -C(CH3)3, -(CH2)3CH3, -C6H5, -CH2(C6H5), -CH=CH2, -C≡CCH3, -CH2C≡CH, -CH2C≡CCH3, -C(CH3)=CH2, -HC=CHCH3, -CH2CH=CH2, -CH2N(CH3)2, -(CH2)3N(CH3)2, -CH2CH2OCH3, -CH(CH2)2O, -CH2Si(CH3)3, -Si(CH3)3, or any combination thereof. • Aspect 18 R 2 The composition according to any one of embodiments 14 to 17, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl. ·Aspect 19 A mixed ligand polynuclear tin compound, formula: A composition according to any one of embodiments 14 to 18, comprising the compound TIFF2026512743000010.tif52170. · Feature 20 The composition according to any one of embodiments 14 to 19, wherein the purity of the mixed ligand polynuclear tin compound is at least 99.9%.

[0056] It should be understood that details, particularly the constituent materials used, as well as the shape, size, and arrangement of the components, are subject to change without departing from the scope of this disclosure. This specification and the embodiments described are illustrative, and the true scope and idea of ​​this disclosure are shown by the following claims.

Claims

1. A method comprising contacting a monosubstituted tin(IV) amide compound with a silanol compound to form a mixed ligand polynuclear tin compound, Monosubstituted tin(IV) amide compounds, formula: RSn(NR １ ２ ) ３ [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R １ R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R １ They are connected to each other, C ３ ~C ２０ [Forms an N-heterocycle] It is a compound of, Silanol compounds, formula: HOSiR ２ ３ [In the formula, R ２ [It is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl] A compound, method.

2. R is independent, -CH ２ CF ３ ,-CH(CF ３ ) ２ ien-CH ２ F, -CH ２ CH ２ F, -CF ３ , -CF ２ CF ３ The method according to claim 1, wherein at least one of these, or any combination thereof.

3. R is independent, -CH ３ ien-CH ２ CH ３ ien-CH ２ CH ２ CH ３ , -CH(CH ３ ) ２ , -CH(CH ３ )CH ２ CH ３ ien-CH ２ CH (CH ３ ) ２ , -C(CH ３ ) ３ ,-(CH ２ ) ３ CH ３ , -C ６ H ５ ien-CH ２ (C ６ H ５ ), -CH=CH ２ -C≡CCH ３ ien-CH ２ C≡CH, -CH ２ C≡CCH ３ , -C(CH ３ ) = CH ２ -HC=CHCH ３ ien-CH ２ CH=CH ２ ien-CH ２ N(CH ３ ) ２ ,-(CH ２ ) ３ N(CH ３ ) ２ ien-CH ２ CH ２ OCH ３ , -CH(CH ２ ) ２ O, -CH ２ Si(CH) ３ ) ３ ,-Si(CH ３ ) ３ The method according to claim 1, wherein at least one of these, or any combination thereof.

4. R １ The method according to claim 1, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl.

5. R is isopropyl, R １ It is methyl, R ２ is methyl, The method according to claim 1.

6. Monosubstituted tin(IV) amide compounds include iPrSn(N(CH) ３ ) ２ ) ３ The method according to claim 1, including the method described in claim 1.

7. The method according to claim 6, wherein the silanol compound includes trimethylsilanol.

8. A mixed ligand polynuclear tin compound, formula: [R ２ Sn ２ (NR １ ２ ) ｎ (OSiR ２ ３ ) ６－ｎ ] ｘ [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R １ is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R １ is bonded to each other to form a C ３ -C ２０ -N heterocycle; R ２ Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl; x is 1, 1.5, or 2; n is between 1 and 5. The method according to claim 1, wherein the compound is [the compound].

9. A mixed ligand polynuclear tin compound, formula: The method according to claim 1, wherein the compound is [the compound].

10. R is independently, -CH ２ CF ３ , -CH(CF ３ ), ２ , -CH ２ F, -CH ２ CH ２ F, -CF ３ , -CF ２ CF ３ The method according to claim 1, which is at least one of these, or any combination thereof.

11. R is independent, -CH ３ ien-CH ２ CH ３ ien-CH ２ CH ２ CH ３ , -CH(CH ３ ) ２ , -CH(CH ３ )CH ２ CH ３ ien-CH ２ CH (CH ３ ) ２ , -C(CH ３ ) ３ ,-(CH ２ ) ３ CH ３ , -C ６ H ５ ien-CH ２ (C ６ H ５ ), -CH=CH ２ -C≡CCH ３ ien-CH ２ C≡CH, -CH ２ C≡CCH ３ , -C(CH ３ ) = CH ２ -HC=CHCH ３ ien-CH ２ CH=CH ２ ien-CH ２ N(CH ３ ) ２ ,-(CH ２ ) ３ N(CH ３ ) ２ ien-CH ２ CH ２ OCH ３ , -CH(CH ２ ) ２ O, -CH ２ Si(CH) ３ ) ３ ,-Si(CH ３ ) ３ The method according to claim 1, wherein at least one of these, or any combination thereof.

12. R １ The method according to claim 1, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl.

13. A mixed ligand polynuclear tin compound, formula: The method according to claim 1, wherein the compound is [the compound].

14. formula: [R ２ Sn ２ (NR １ ２ ) ｎ (OSiR ２ ３ ) ６－ｎ ] ｘ [In the formula, R is at least one of alkyl, alkenyl, alkynyl, cycloalkyl, aryl, silyl, silylalkyl, aminoalkyl, alkoxyalkyl, aralkyl, fluoroalkyl, haloalkyl, silylated alkoxide, ether, amine, halide, imide, cyanate, nitrile, alkoxide, carboxylate, enolate, ester, or cyclopentadienyl, or any combination thereof; R １ R is independently hydrogen, alkyl, cycloalkyl, or aryl, or each R １ They are connected to each other, C ３ ~C ２０ Forming an N-heterocycle; R ２ Each is independently at least one of hydrogen, a halide, an alkyl, an alkenyl, an alkynyl, a cycloalkyl, an aryl, an aralkyl, an alkaryl, or a haloalkyl; x is 1, 1.5, or 2; n is between 1 and 5. A composition comprising a mixed ligand polynuclear tin compound.

15. A mixed ligand polynuclear tin compound, formula: The composition according to claim 14, which is a compound of the above.

16. R is independent, -CH ２ CF ３ ,-CH(CF ３ ) ２ ien-CH ２ F, -CH ２ CH ２ F, -CF ３ , -CF ２ CF ３ The composition according to claim 14, wherein at least one of these, or any combination thereof.

17. R is independent, -CH ３ ien-CH ２ CH ３ ien-CH ２ CH ２ CH ３ , -CH(CH ３ ) ２ , -CH(CH ３ )CH ２ CH ３ ien-CH ２ CH (CH ３ ) ２ , -C(CH ３ ) ３ ,-(CH ２ ) ３ CH ３ , -C ６ H ５ ien-CH ２ (C ６ H ５ ), -CH=CH ２ -C≡CCH ３ ien-CH ２ C≡CH, -CH ２ C≡CCH ３ , -C(CH ３ ) = CH ２ -HC=CHCH ３ ien-CH ２ CH=CH ２ ien-CH ２ N(CH ３ ) ２ ,-(CH ２ ) ３ N(CH ３ ) ２ ien-CH ２ CH ２ OCH ３ , -CH(CH ２ ) ２ O, -CH ２ Si(CH) ３ ) ３ ,-Si(CH ３ ) ３ The composition according to claim 14, wherein at least one of these, or any combination thereof.

18. R １ The composition according to claim 14, wherein is independently hydrogen, methyl, ethyl, isopropyl, tert-butyl, n-butyl, or phenyl.

19. A mixed ligand polynuclear tin compound, formula: The composition according to claim 14, comprising the compound.

20. The composition according to claim 14, wherein the purity of the mixed ligand polynuclear tin compound is at least 99.9%.

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