System and method for thermally stable operation of an acousto-optic deflector with reduced acoustic transients

JP2026517607APending Publication Date: 2026-06-02ELECTRO SCI IND INC

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
ELECTRO SCI IND INC
Filing Date
2024-03-22
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

The thermal lensing effect caused by unstable thermal gradients in acousto-optic deflectors (AODs) leads to wavefront distortion and instability in laser beam deflection, affecting precise processing of workpieces, especially when laser power is not static or predictable.

Method used

A controller is used to control the operation of AOD drivers to stabilize thermal gradients by reducing transmittance during transient events and maintaining constant optical power, employing amplitude and phase modulation controls to ensure stable beam deflection.

Benefits of technology

Stabilizes thermal gradients in AODs, ensuring precise and consistent laser beam deflection for accurate workpiece processing by minimizing transient acoustic waveforms and maintaining optical power stability.

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Abstract

The system includes an acousto-optic deflector (AOD) scanning system for deflecting a beam path and a controller for controlling the AOD scanning system. The controller can control the operation of one driver of the AOD scanning system to deflect the beam path from a first position to a second position, and can control the operation of another driver of the AOD scanning system to reduce the transmittance of laser energy in the deflected beam path for a certain period of time. The period ends when the operation of either the first or second driver is controlled to deflect the beam path from the first position to the second position.
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