Fluid supply system

Abstract

Fluid supply systems are critical component assemblies used in semiconductor manufacturing. These fluid supply systems rely on component assemblies and require seals that must be installed and replaced during assembly and maintenance of the fluid supply system. Seals can be arranged as seal rings that engage with substrate blocks and active components. A seal ring may incorporate an inner sleeve and an outer ring, with the inner sleeve having a sleeve fluid passage. In some embodiments, the sleeve fluid passage may have a constant or variable diameter, and the outer ring may incorporate features to improve seal retention within the seal cavities of the substrate block and active components.

Description

Technical Field

[0001] Cross - Reference to Related Applications This application claims the benefit of U.S. Provisional Application No. 63 / 524,461, filed Jun. 30, 2023, and U.S. Provisional Application No. 63 / 524,981, filed Jul. 5, 2023, which are hereby incorporated by reference in their entirety.

Background Art

[0002] Fluid supply is an important component in semiconductor chip manufacturing equipment. A fluid supply system is important for supplying process fluids at known flow rates for semiconductor manufacturing and other industrial processes. Such devices are used to measure and accurately control the flow rates of a wide range of fluids in various applications. This control depends on an assembly of active and passive components sealed by seals to provide fluid - tight connections.

[0003] As chip manufacturing technology has improved, the requirements for fluid supply systems have increased. Higher - performance fluid supply systems are more densely packaged, require higher - performance seals, and these seals must be maintained more efficiently. The time required for the assembly and maintenance of fluid supply systems must be reduced. The maintainability and ease of assembly of fluid supply systems are extremely important. Furthermore, the reliability of the seals is essential to maximize the operating time of the system. An improved fluid supply system is required to provide excellent process performance.

Summary of the Invention

[0004] This technology relates to a fluid supply system incorporating one or more devices that control the flow rate for supplying gas or liquid to a process chamber, the devices having ports sealed with sealing rings to ensure leak-free transfer of fluid from one device to another. This fluid supply system can be used in a wide range of processes, such as semiconductor chip manufacturing and solar panel manufacturing.

[0005] In one embodiment, the present invention relates to a fluid supply system having a substrate block, an active component, and a seal ring. The substrate block has a top surface, a substrate port formed on the top surface, a substrate fluid passage extending from the substrate port, a substrate ring defining the substrate port, a substrate seal channel formed on the top surface so as to surround the substrate ring, a configuration in which the outer surface of the substrate ring forms the inner surface of the substrate seal channel, and a conical portion extending from the substrate ring to the substrate fluid passage. The active component has a bottom surface, a component port formed on the bottom surface, a component fluid passage extending from the component port, a component ring defining the component port, a component seal channel formed on the bottom surface so as to surround the component ring, a configuration in which the outer surface of the component ring forms the inner surface of the component seal channel, and a conical portion extending from the component ring to the component fluid passage. The seal ring has an internal sleeve having an upper conical portion, a lower conical portion, and a central portion, the internal sleeve defining a sleeve fluid passage, the sleeve fluid passage having a substantially constant diameter along its longitudinal axis. Furthermore, the seal ring has an outer ring connected to the center of the inner sleeve and surrounding the inner sleeve, thereby forming an annular upper sleeve groove between the top of the outer ring and the top of the inner sleeve, and an annular lower sleeve groove between the bottom of the outer ring and the bottom of the inner sleeve. The active component is mounted to the substrate block such that (1) the substrate port and the component port are aligned, and (2) the seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluidly seals the substrate fluid passage and the component fluid passage.

[0006] In another aspect, the present invention is a seal ring having an internal sleeve and an external ring. The internal sleeve has an upper conical portion, a lower conical portion, and a central portion, and the internal sleeve defines a sleeve fluid passage, which has a substantially constant diameter along its longitudinal axis. The external ring is connected to the central portion of the internal sleeve and is configured to surround the internal sleeve, thereby forming (1) an annular upper sleeve groove between the upper part of the external ring and the upper part of the internal sleeve, and (2) an annular lower sleeve groove between the lower part of the external ring and the lower part of the internal sleeve.

[0007] In one embodiment, the present invention is a fluid supply system having a substrate block, an active component, and a seal ring. The substrate block has an upper surface, a substrate port formed on the upper surface, a substrate fluid passage extending from the substrate port, a substrate ring defining the substrate port, a substrate seal channel formed on the upper surface so as to surround the substrate ring, a configuration in which the outer surface of the substrate ring forms the inner surface of the substrate seal channel, and a conical portion extending from the substrate ring to the substrate fluid passage. The active component has a lower surface, a component port formed on the lower surface, a component fluid passage extending from the component port, a component ring defining the component port, a component seal channel formed on the lower surface so as to surround the component ring, a configuration in which the outer surface of the component ring forms the inner surface of the component seal channel, and a conical portion extending from the component ring to the component fluid passage. The seal ring has an internal sleeve having an upper conical portion, a lower conical portion, and a central portion, the internal sleeve defining a sleeve fluid passage. Furthermore, the seal ring has an outer ring connected to the center of the inner sleeve and surrounding the inner sleeve, thereby forming (1) an annular upper sleeve groove between the upper part of the outer ring and the upper part of the inner sleeve, and (2) an annular lower sleeve groove between the lower part of the outer ring and the lower part of the inner sleeve. The active component is mounted to the substrate block such that (1) the substrate port and the component port are aligned, and (2) the seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluidly seals the substrate fluid passage and the component fluid passage. The outer ring has castellations.

[0008] Further application areas of this technology will become apparent from the detailed description provided below. While the detailed description and specific examples illustrate preferred embodiments, it should be understood that they are for illustrative purposes only and not intended to limit the scope of this technology. [Brief explanation of the drawing]

[0009] The invention described herein will be better understood from the detailed description and accompanying drawings provided below.

[0010] [Figure 1] This is a schematic diagram of a system for manufacturing semiconductor devices using one or more devices that control flow rates.

[0011] [Figure 2] Figure 1 is a perspective view of a fluid supply system that may be used in the process shown in Figure 1, including multiple devices for controlling the flow rate.

[0012] [Figure 3] Figure 2 is a perspective view of the fluid supply system showing one of the fluid flow channel components removed.

[0013] [Figure 4A] Figure 2 is a perspective view of an active component mounted on a pair of substrate blocks, which may be used in the fluid supply system shown.

[0014] [Figure 4B] This is a cross-sectional view of one of the components and the circuit board block in Figure 4A, taken along line 4B-4B.

[0015] [Figure 4C] It is a detailed view of FIG. 4A showing an interface between a component and one of the substrate blocks.

[0016] [Figure 4D] It is a top view of the substrate block of FIG. 4A.

[0017] [Figure 4E] It is a bottom view of the component of FIG. 4A.

[0018] [Figure 5A] It is a perspective view of a second embodiment of a seal ring attached between a substrate block and a part of an active component that can be used in the fluid supply system of the present invention.

[0019] [Figure 5B] It is a cross-sectional view taken along line 5B - 5B of the seal ring, the substrate block, and a part of the active component of FIG. 5A.

[0020] [Figure 5C] [[ID=三十五]]It is a perspective view of the seal ring of FIG. 5A.

[0021] [[ID=四十]] [Figure 5D] [[ID=四十一]]It is a cross-sectional view of the seal ring.

[0022] <00001**00**>It is a cross-sectional view of another embodiment of the seal ring.

[0023] [[ID=5**2**]] [Figure 6A] [[ID=五十三]]It is a perspective view of a third embodiment of a seal ring attached between a substrate block and a part of an active component that can be used in the fluid supply system of the present invention.

[0024] [Figure 6B]This is a cross-sectional view of the seal ring shown in Figure 6A, taken along line 6B-6B.

[0025] [Figure 6C] Figure 6A is a perspective view of the seal ring.

[0026] [Figure 6D] This is a cross-sectional view of the seal ring.

[0027] [Figure 6E] This is a cross-sectional view of another embodiment of the seal ring.

[0028] [Figure 7A] This is a detailed view of a fourth embodiment of a seal ring installed between a component and a substrate block, which may be used in the fluid supply system of the present invention, and is cut along line 4B-4B.

[0029] [Figure 7B] Figure 7A is a perspective view of the seal ring.

[0030] [Figure 7C] Figure 7B is a cross-sectional view of the seal ring, taken along line 7C-7C.

[0031] All drawings are schematic and not necessarily to scale. If a component is numbered in one drawing but not in another, those components are the same unless otherwise stated herein. [Modes for carrying out the invention]

[0032] The description of exemplary embodiments relating to the principles of the present invention is intended to be read in conjunction with the accompanying drawings, which are considered to constitute part of the whole description. Any reference to direction or orientation in the description of embodiments of the invention disclosed herein is for illustrative purposes only and is not intended to limit the scope of the invention in any way. Relative terms such as “downward,” “upward,” “horizontal,” “vertical,” “up,” “down,” “upper side,” “lower side,” “left,” “right,” “upper,” and “lower,” as well as their derivatives (e.g., “horizontally,” “downward,” “upward,” etc.), should be interpreted as referring to the orientation described at the time of the description or the orientation shown in the drawings being described. These relative terms are for illustrative purposes only and do not require that the apparatus be configured or operated in a particular orientation unless expressly indicated so. The terms “attached,” “fixed,” “connected,” “joined,” “interconnected,” and similar terms refer to a relationship in which structures are fixed or connected to one another, either directly or indirectly through intervening structures, and further include both movable and rigid attachments or relationships, and shall be interpreted as such unless expressly stated otherwise. Furthermore, the features and advantages of the present invention are illustrated with reference to preferred embodiments. Accordingly, the present invention should not be limited to such preferred embodiments, i.e., embodiments illustrating several non-limiting combinations of features that may exist individually or in combination with other features, and the scope of the present invention is defined by the claims appended herein.

[0033] This invention relates to a seal ring used in a fluid supply system that includes at least one device for controlling fluid flow. In some embodiments, the fluid supply system may include a mass flow controller for supplying fluid at a known mass flow rate to a semiconductor process or a similar process. Semiconductor manufacturing is one of the industries that demands high performance in fluid flow control. As semiconductor manufacturing technology advances, customers have come to recognize the need for flow control devices with greater complexity and capability. Modern semiconductor processes require reduced costs and maximized component interchangeability in fluid supply systems. This invention provides a seal ring that can be used in a variety of applications within a fluid supply system.

[0034] Figure 1 shows a schematic diagram of an exemplary processing system 1000. The processing system 1000 can utilize a plurality of flow control devices 100 that are fluidically connected to the processing chamber 1300. These flow control devices 100 are used to supply one or more different process fluids to the processing chamber 1300. The fluids are supplied from a plurality of fluid sources. These flow control devices 100 together constitute a fluid supply system 1400. Optionally, two or more fluid supply systems 1400 may be used in the processing system 100. The flow control devices 100 are connected to the processing chamber 1300 by an outlet manifold 400. Articles such as semiconductors and integrated circuits can be processed in the processing chamber 1300.

[0035] Valves 1100 isolate each flow control device 100 from the processing chamber 1300, allowing each flow control device 100 to be selectively connected to or isolated from the processing chamber 1300, thereby facilitating the execution of various different processing steps. The processing chamber 1300 may include applicators for applying process fluids supplied by multiple flow control devices 100, thereby enabling selective or diffusive distribution of fluids supplied by multiple flow control devices 100. Optionally, the processing chamber 1300 may be a vacuum chamber, or a tank or bath for immersing articles in fluids supplied by multiple flow control devices 100. Fluid supply lines are formed by flow paths from each fluid source to the processing chamber 1300.

[0036] Furthermore, the processing system 1000 may further include a drain 1200 isolated from the processing chamber 1300 by a valve 1100, thereby facilitating the purging of one or more of the flow control devices 100 to enable the discharge of process fluid or to enable switching of process fluid in the same flow control device 100. Optionally, the drain 1200 may be a vacuum source or a liquid drain configured to remove liquid from the processing chamber 1300. Optionally, the flow control device 100 may be a mass flow controller, a flow splitter, or any other device that controls the flow of process fluid in the processing system. Furthermore, if necessary, the valve 1100 may be integrated with the flow control device 100.

[0037] Processes that can be performed in processing system 1000 may include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer inspection, electroplating, or any other process utilizing fluids.

[0038] Figures 2 and 3 show schematic diagrams of an exemplary fluid supply system 1400. In this embodiment, the fluid supply system 1400 comprises multiple flow control devices 100 having multiple inlets 101 and multiple outlets 102. In some embodiments, the multiple inlets 101 do not correspond one-to-one with the multiple outlets 102. Instead, the multiple inlets 101 may merge into a single outlet 102, or a single inlet 101 may branch into multiple outlets 102. This may be done to mix or combine different fluids before supplying them to the processing chamber 1300. Nevertheless, there is still at least one flow path extending from at least one inlet 101 to one outlet 102, and this flow path is formed by the various components of the fluid supply system 1400.

[0039] As can be seen from the diagram, each flow control device 100 is generally arranged in a single row, and multiple flow control devices 100 are arranged in parallel rows. However, this arrangement is not necessarily required, and any packaging configuration can be used. The fluid supply system 1400 has a substrate panel 1402. The substrate panel 1402 functions as a support structure for the fluid supply system 1400, but may also be used simply to facilitate assembly. Other structural support configurations are also envisioned. Multiple substrate blocks 104 are mounted on the substrate panel 1402 and have fluid ports for directing fluid to one or more fluid flow path components 200 having corresponding fluid ports, as will be described later. The fluid flow path components 200 may be considered active components, while the substrate blocks 104 may be considered passive components.

[0040] The fluid flow path component 200 may be one or more valves, flow controllers, pressure transducers, flow measurement sensors, pressure regulators, flow limiters, actuators, inlets 101 or outlets 102, or any other known flow control components. In another embodiment, the substrate block 104 may be positioned on top, and the fluid flow path component 200 may be positioned in contact with the substrate panel 1402. This may be done to improve packaging efficiency, to increase flexibility in the design of the flow control device 100, or for other reasons. The substrate block 104 does not necessarily have to be in contact with the substrate panel 1402, but for convenience of explanation it is referred to as a substrate block, and the names of each component are used under the understanding that they do not necessarily indicate their position or orientation.

[0041] Multiple anchors are used to connect the fluid flow channel component 200 to the substrate block 104. The anchors may be threaded inserts or screws in the substrate block 104, threaded inserts or screws, nuts in the substrate panel 1402, or other fastening structures that enable secure fastening of the fluid flow channel component 200. Component fasteners 250 are used to fasten the fluid flow channel component 200 to the substrate block 104. Optionally, the component fasteners 250 may extend through the substrate block 104 to attach the fluid flow channel component 200 and the substrate block 104 to the substrate panel 1402. In another configuration, additional fasteners are used to fasten the substrate block 104 to the substrate panel 1402. The component fasteners 250 may be used not only for fastening but also for alignment and may be replaced by any suitable type of fastener capable of fastening the fluid flow channel component 200 to the substrate block 104. The component fasteners 250 may be bolts, screws, pins, or other known fasteners. However, in another embodiment, the component fastener 250 may be separate from the alignment mechanism. For example, a dowel pin or other pin may be used to align the fluid flow channel component 200 to the substrate block 104, and then another component fastener may be used to secure the fluid flow channel component 200 to the substrate block 104.

[0042] As can be seen by comparing Figure 2 and Figure 3, one of the fluid flow channel components 200 has been removed from the fluid supply system 1400 in Figure 3. Removal of the fluid flow channel component 200 exposes parts of two substrate blocks 104. These parts of the two substrate blocks 104 form a component mounting position 106. The size of the component mounting position 106 may vary depending on the dimensions of the component 200 to which it is mounted. Therefore, different component mounting positions 106 may include different parts of the same substrate block 104. All components 200 have a component mounting position 106 within the fluid supply system 1400. More than two substrate blocks 104 may be used to form the component mounting position 106. Alternatively, only one substrate block 104 may be used to form the component mounting position 106. This depends on the type of component 200 to which it is mounted.

[0043] Referring to Figures 4A to 4D, a portion of the fluid supply system 1400 is shown. Specifically, the fluid flow channel component 200 is shown mounted on a pair of substrate blocks 104 at component position 106. As best shown in Figure 4B, a seal ring 300 is positioned between the fluid flow channel component 200 and the substrate blocks 104. The seal ring 300 forms a fluid-tight connection between the fluid flow channel component 200 and the substrate blocks 104. Each substrate block 104 is provided with a fluid passage 108 extending from a first substrate port 109 to a second substrate port 109. Each first substrate port 109 is formed on the upper surface 112 of the substrate block 104.

[0044] Similarly, the fluid flow channel component 200 includes a fluid passage 208 extending from a first component port 209 formed on the lower surface 214 to a second component port 209 formed on the lower surface 214. The substrate port 109 of the substrate block 104 is surrounded by a seal cavity 110, which receives a seal ring 300. The component port 209 of the fluid flow channel component 200 is surrounded by a seal cavity 210, which receives a seal ring 300.

[0045] The seal ring 300 is formed in a generally annular configuration, comprising an inner sleeve 302 and an outer ring 304. The inner sleeve 302 of the seal ring 300 has a sleeve fluid passage 308 that penetrates the center of the seal ring 300. The sleeve fluid passage 308 extends along the longitudinal axis AA. The inner sleeve 302 and the outer ring 304 are symmetrical with respect to the longitudinal axis AA. The sleeve fluid passage 308 allows fluid to flow through the seal ring 300, and the other components of the seal ring 300 provide an airtight seal between the coupled fluid flow channel component 200 and the substrate block 104. In some embodiments, the inner sleeve 302 and the outer ring 304 may not be symmetrical with respect to the longitudinal axis AA.

[0046] The internal sleeve 302 includes a passage surface 320 that forms the wall of the sleeve fluid passage 308. The passage surface 320 includes an intermediate surface 321, an upper inclined surface 322, and a lower inclined surface 323. The upper inclined surface 322 connects the component port 209 to the sleeve fluid passage 308. The lower inclined surface 323 connects the substrate port 109 to the sleeve fluid passage 308. The intermediate surface 321 connects the upper inclined surface 322 and the lower inclined surface 323. The upper inclined surface 322 and the lower inclined surface 323 may have a linear shape (i.e., a straight line with a constant inclination) or a curved shape, as shown in Figures 4B and 4C. The curved shape may be convex, concave, or any other shape. Similarly, the intermediate surface 321 may be a linear shape parallel to the longitudinal axis, a linear shape inclined with respect to the longitudinal axis, or a curved shape that is convex or concave.

[0047] The internal sleeve 302 further comprises a first mating surface 330 that engages with corresponding components in the seal cavities 110, 210 of the substrate block 104 and the fluid flow channel component 200, as described later. The first mating surface 330 includes an upper mating surface 331 and a lower mating surface 332. The upper mating surface 331 engages with the components of the seal cavity 210 of the fluid flow channel component 200, and the lower mating surface 332 engages with the components of the seal cavity 110 of the substrate block 104. The upper mating surface 331 and the lower mating surface 332 may have a linear shape, a convex shape, or a concave shape. In this embodiment, the upper mating surface 331 and the lower mating surface 332 have a linear shape.

[0048] The seal ring 300 is symmetrical with respect to a central plane CP, which is perpendicular to the longitudinal axis AA. The internal sleeve 302 of the seal ring 300 includes an upper conical portion 333 and a lower conical portion 334. The upper contact surface 331 is formed on the upper conical portion 333, and the lower contact surface 332 is formed on the lower conical portion.

[0049] The outer ring 304 has an inner surface 340 and an outer surface 350. The inner surface 340 is located near the inner sleeve 302 and faces the first contact surface 330. The outer surface 350 is located on the opposite side from the inner surface 340. The inner surface 340 may be divided into an upper inner surface 341 and a lower inner surface 342.

[0050] The inner sleeve 302 is joined to the outer ring 304 by a web 306, which separates the upper inner surface 341 and the lower inner surface 342, as well as the upper contact surface 331 and the lower contact surface 332. The web 306 comprises an upper web surface 361 and a lower web surface 362. The upper web surface 361, together with the upper inner surface 341 of the inner surface 340 of the outer ring 304 and the upper contact surface 331 of the first contact surface 330, forms an annular upper sleeve groove 365. Similarly, the lower web surface 362, together with the lower inner surface 342 of the inner surface 340 of the outer ring 304 and the lower contact surface 332 of the first contact surface 330, forms an annular lower sleeve groove 366. The outer ring 304 further comprises an upper end surface 370 and a lower end surface 372.

[0051] As described above, the seal cavity 110 of the substrate block 104 surrounds the substrate port 109. The seal cavity 110 includes a cone 124, a substrate ring 126, and a substrate seal channel 130. The cone 124 includes a second contact surface 120, which extends from the substrate ring 126 to the fluid passage 108. The second contact surface 120 forms part of the substrate port 109 and receives the lower contact surface 332 of the first contact surface 330 of the seal ring 300. The second contact surface 120 has a linear shape and is inclined with respect to the longitudinal axis AA. However, in other embodiments, the second contact surface 120 may be convex, concave, or any other shape. In another embodiment, the second contact surface 120 may be formed as a surface separate from the substrate port 109.

[0052] The substrate ring 126 defines the substrate port 109. The substrate port 109 terminates at and is surrounded by the substrate ring 126. The substrate ring 126 is recessed to the upper surface 112 of the substrate block 104. A substrate seal channel 130 is formed to surround the substrate ring 126. The substrate seal channel 130 is recessed to the substrate ring 126 and the upper surface 112 of the substrate block 104. Therefore, the substrate ring 126 protrudes above the substrate seal channel 130. The substrate ring 126 may have any desired shape. The substrate seal channel 130 comprises an inner channel surface 131, a bottom channel surface 132, and an outer channel surface 133. The inner channel surface 131 is adjacent to the substrate ring 126 and forms the outer surface of the substrate ring 126. The outer channel surface 133 is located opposite the inner channel surface 131 and is radially outward from the inner channel surface 131. The channel bottom surface 132 connects the channel inner surface 131 and the channel outer surface 133.

[0053] As described above, the seal cavity 210 of the fluid flow channel component 200 surrounds the component port 209. The seal cavity 210 includes a cone 224, a component ring 226, and a component seal channel 230. The cone 224 includes a second contact surface 220, which extends from the component ring 226 to the fluid passage 208. The second contact surface 220 forms part of the component port 209 and receives the upper contact surface 331 of the first contact surface 330 of the seal ring 300. The second contact surface 220 has a linear shape and is inclined with respect to the longitudinal axis AA. However, in other embodiments, the second contact surface 220 may be convex, concave, or any other shape. In another embodiment, the second contact surface 220 may be formed as a surface separate from the component port 209.

[0054] The component ring 226 defines the component port 209. The component port 209 terminates at and is surrounded by the component ring 226. The component ring 226 is recessed to the lower surface 214 of the fluid flow channel component 200. A component seal channel 230 is formed to surround the component ring 226. The component seal channel 230 is recessed to the component ring 226 and the lower surface 214 of the fluid flow channel component 200. Therefore, the component ring 226 protrudes below the component seal channel 230. The component ring 226 may have any desired shape. The component seal channel 230 comprises an inner channel surface 231, a bottom channel surface 232, and an outer channel surface 233. The inner channel surface 231 is adjacent to the component ring 226 and forms the outer surface of the component ring 226. The channel outer surface 233 is located on the opposite side from the channel inner surface 231 and is positioned radially outward from the channel inner surface 231. The channel bottom surface 232 connects the channel inner surface 231 and the channel outer surface 233.

[0055] In the assembled state shown in Figure 4C, the inner channel surfaces 131 and 231 engage with the inner surface 340 of the seal ring 300, and the outer channel surfaces 133 and 233 engage with the outer surface 350 of the seal ring 300. Specifically, the inner channel surface 131 engages with the lower inner surface 342 of the seal ring 300. The inner channel surface 231 engages with the upper inner surface 341 of the seal ring 300. Thus, the outer ring 304 is radially compressed by the substrate seal channel 130 and the component seal channel 230. The upper end face 370 and the lower end face 372 are spaced apart from the channel bottom surfaces 132 and 232. Similarly, the upper web surface 361 is spaced apart from the component ring 226, and the lower web surface 362 is spaced apart from the substrate ring 126. This advantageously ensures that the first contact surface 330 and the second contact surfaces 120, 220 can contact each other without excessive constraint. As a result, the interface between the first contact surface 330 and the second contact surfaces 120, 220 forms a first seal. The interface between the inner surfaces 131, 231 of the channel and the inner surface 340 of the seal ring 300 forms a second seal. The interface between the outer surfaces 133, 233 of the channel and the outer surface 350 forms a third seal. This provides protection against leakage to or from the external environment.

[0056] Referring to Figures 5A–5D, the seal ring 400 is shown positioned within a portion of the substrate block 104 and the fluid flow channel component 200. The substrate block 104 and the portion of the fluid flow channel component 200 are shown as simple blocks, intended to highlight the shape of the seal and the corresponding seal cavity. The portion of the substrate block 104 and the portion of the fluid flow channel component 200 may be replaced with any of the substrate block 104 and fluid flow channel component 200 shown above. The seal ring 400 is identical to the seal ring 300, except for the variations described herein. Unless otherwise specified, all reference numerals are the same as those described above.

[0057] As best shown in Figure 5B, the seal ring 400 is positioned between the fluid flow channel component 200 and the substrate block 104. The seal ring 400 forms a fluid-tight connection between the fluid flow channel component 200 and the substrate block 104. The substrate block 104 includes a fluid passage 108 extending from a substrate port 109. The substrate port 109 is formed on the upper surface 112 of the substrate block 104.

[0058] Similarly, the fluid flow channel component 200 includes a fluid passage 208 extending from a component port 209 formed on its lower surface 214. The substrate port 109 of the substrate block 104 is surrounded by a seal cavity 110 that receives the seal ring 400. The component port 209 of the fluid flow channel component 200 is similarly surrounded by a seal cavity 210 that receives the seal ring 400.

[0059] The seal ring 400 is formed in a generally annular configuration, comprising an inner sleeve 402 and an outer ring 404. The inner sleeve 402 of the seal ring 400 has a sleeve fluid passage 408 that penetrates the center of the seal ring 400. The sleeve fluid passage 408 extends along the longitudinal axis AA. The inner sleeve 402 and the outer ring 404 are symmetrical with respect to the longitudinal axis AA. The sleeve fluid passage 408 allows fluid to flow through the seal ring 400, and the other components of the seal ring 400 provide an airtight seal between the coupled fluid flow channel component 200 and the substrate block 104. In some embodiments, the inner sleeve 402 and the outer ring 404 may not be symmetrical with respect to the longitudinal axis AA.

[0060] The internal sleeve 402 includes a passage surface 420 that forms the wall of the sleeve fluid passage 408. The passage surface 420 is shown to have a substantially constant diameter along its entire length. Thus, the passage surface 420 of the sleeve fluid passage 408 connects the component port 209 to the substrate port 109. The passage surface 420 does not need to have a constant diameter, and its diameter may vary as described later.

[0061] The internal sleeve 402 further comprises a first contact surface 430 that engages with corresponding components in the seal cavities 110, 210 of the substrate block 104 and the fluid flow channel component 200, as described later. The first contact surface 430 includes an upper contact surface 431 and a lower contact surface 432. The upper contact surface 431 engages with the components of the seal cavity 210 of the fluid flow channel component 200, and the lower contact surface 432 engages with the components of the seal cavity 110 of the substrate block 104. The upper contact surface 431 and the lower contact surface 432 may have a linear shape, a convex shape, or a concave shape. In this embodiment, the upper contact surface 431 and the lower contact surface 432 have a linear shape.

[0062] The seal ring 400 is symmetrical with respect to a central plane CP, which is perpendicular to the longitudinal axis AA. The internal sleeve 402 of the seal ring 400 includes an upper conical portion 433 and a lower conical portion 434. The upper contact surface 431 is formed on the upper conical portion 433, and the lower contact surface 432 is formed on the lower conical portion.

[0063] The outer ring 404 has an inner surface 440 and an outer surface 450. The inner surface 440 is located near the inner sleeve 402 and faces the first contact surface 430. The outer surface 450 is located on the opposite side from the inner surface 440. The inner surface 440 may be divided into an upper inner surface 441 and a lower inner surface 442.

[0064] The inner sleeve 402 is joined to the outer ring 404 by a web 406, which separates the upper inner surface 441 and the lower inner surface 442, as well as the upper contact surface 431 and the lower contact surface 432. The web 406 comprises an upper web surface 461 and a lower web surface 462. The upper web surface 461, together with the upper inner surface 441 of the inner surface 440 of the outer ring 404 and the upper contact surface 431 of the first contact surface 430, forms an annular upper sleeve groove 465. Similarly, the lower web surface 462, together with the lower inner surface 442 of the inner surface 440 of the outer ring 404 and the lower contact surface 432 of the first contact surface 430, forms an annular lower sleeve groove 466. The outer ring 404 further comprises an upper end surface 470 and a lower end surface 472.

[0065] As described above, the seal cavity 110 of the substrate block 104 surrounds the substrate port 109. The seal cavity 110 includes a cone 124, a substrate ring 126, and a substrate seal channel 130. The cone 124 includes a second contact surface 120, which extends from the substrate ring 126 to the fluid passage 108. The second contact surface 120 forms part of the substrate port 109 and receives the lower contact surface 432 of the first contact surface 430 of the seal ring 400. The second contact surface 120 has a linear shape and is inclined with respect to the longitudinal axis AA. However, in other embodiments, the second contact surface 120 may be convex, concave, or any other shape. In another embodiment, the second contact surface 120 may be formed as a surface separate from the substrate port 109.

[0066] The substrate ring 126 defines the substrate port 109. The substrate port 109 terminates at and is surrounded by the substrate ring 126. The substrate ring 126 is recessed to the upper surface 112 of the substrate block 104. A substrate seal channel 130 is formed to surround the substrate ring 126. The substrate seal channel 130 is recessed to the substrate ring 126 and the upper surface 112 of the substrate block 104. Therefore, the substrate ring 126 protrudes above the substrate seal channel 130. The substrate ring 126 may have any desired shape. The substrate seal channel 130 comprises an inner channel surface 131, a bottom channel surface 132, and an outer channel surface 133. The inner channel surface 131 is adjacent to the substrate ring 126 and forms the outer surface of the substrate ring 126. The outer channel surface 133 is located opposite the inner channel surface 131 and is radially outward from the inner channel surface 131. The channel bottom surface 132 connects the channel inner surface 131 and the channel outer surface 133.

[0067] As described above, the seal cavity 210 of the fluid flow channel component 200 surrounds the component port 209. The seal cavity 210 includes a cone 224, a component ring 226, and a component seal channel 230. The cone 224 includes a second contact surface 220, which extends from the component ring 226 to the fluid passage 208. The second contact surface 220 forms part of the component port 209 and receives the upper contact surface 431 of the first contact surface 430 of the seal ring 400. The second contact surface 220 has a linear shape and is inclined with respect to the longitudinal axis AA. However, in other embodiments, the second contact surface 220 may be convex, concave, or any other shape. In another embodiment, the second contact surface 220 may be formed as a surface separate from the component port 209.

[0068] The component ring 226 defines the component port 209. The component port 209 terminates at and is surrounded by the component ring 226. The component ring 226 is recessed to the lower surface 214 of the fluid flow channel component 200. A component seal channel 230 is formed to surround the component ring 226. The component seal channel 230 is recessed to the component ring 226 and the lower surface 214 of the fluid flow channel component 200. Therefore, the component ring 226 protrudes below the component seal channel 230. The component ring 226 may have any desired shape. The component seal channel 230 comprises an inner channel surface 231, a bottom channel surface 232, and an outer channel surface 233. The inner channel surface 231 is adjacent to the component ring 226 and forms the outer surface of the component ring 226. The channel outer surface 233 is located on the opposite side from the channel inner surface 231 and is positioned radially outward from the channel inner surface 231. The channel bottom surface 232 connects the channel inner surface 231 and the channel outer surface 233.

[0069] In the assembled state shown in Figure 5B, the inner channel surfaces 131 and 231 engage with the inner surface 440 of the seal ring 400, and the outer channel surfaces 133 and 233 engage with the outer surface 450 of the seal ring 400. Specifically, the inner channel surface 131 engages with the lower inner surface 442 of the seal ring 400. The inner channel surface 231 engages with the upper inner surface 441 of the seal ring 400. Thus, the outer ring 404 is compressed radially by the substrate seal channel 130 and the component seal channel 230. The upper end face 470 and the lower end face 472 are spaced apart from the channel bottom surfaces 132 and 232. Similarly, the upper web surface 461 is spaced apart from the component ring 226, and the lower web surface 462 is spaced apart from the substrate ring 126. This advantageously ensures that the first contact surface 430 and the second contact surfaces 120, 220 can contact each other without excessive constraint. As a result, the interface between the first contact surface 430 and the second contact surfaces 120, 220 forms a first seal. The interface between the inner surfaces 131, 231 of the channel and the inner surface 440 of the seal ring 400 forms a second seal. The interface between the outer surfaces 133, 233 of the channel and the outer surface 450 forms a third seal. This provides protection against leakage to or from the external environment.

[0070] Preferably, the diameter of the passage surface 420 is larger than the diameter of the fluid passage 108 of the substrate block 104 and the fluid passage 208 of the fluid flow channel component 200. However, in other embodiments, the diameter of the passage surface 420 may be equal to the diameter of the fluid passages 108 and 208. The conical portions 124 and 224 of the substrate block and the fluid flow channel component 200 are connected to the respective fluid passages 108 and 208 at an oblique angle. The conical portions 124 and 224 extend beyond the internal sleeve 402. In other words, the upper and lower conical portions 433 and 434 extend a first distance from the central plane CP, while the conical portions 124 and 224 of the substrate block 104 and the fluid flow channel component 200 extend a second distance from the central plane CP. The second distance is greater than the first distance. As a result, the transition portions 125 and 225 of the conical sections 124 and 224 remain exposed to the fluid flowing through the fluid passages 108, 208, and 408.

[0071] Preferably, the internal sleeve 402 has a first height, which is greater than the second height of the outer ring 404. However, in other embodiments, the first and second heights may be equal, or the second height may be greater than the first height, as shown in the seal ring 300.

[0072] Referring to Figure 5E, another form of the seal ring 400 is shown as a cross-sectional view. The seal ring 400 shown in Figure 5E is identical to the seal rings shown in Figures 5A to 5D, except that the passage surface 420 tapers out from the central plane CP. The taper angle may be in the range of 0.1 to 10 degrees, preferably in the range of 1 to 2 degrees. This is intended to compensate for the deflection of the internal sleeve 402 during assembly. The passage surface 420 has an upper portion 421 and a lower portion 422, the diameter of which increases as the distance from the central plane CP increases.

[0073] Referring to Figures 6A–6D, the seal ring 500 is shown positioned within a portion of the substrate block 104 and the fluid flow channel component 200. The substrate block 104 and the portion of the fluid flow channel component 200 are shown as simple blocks, intended to highlight the shape of the seal and the corresponding seal cavity. The portion of the substrate block 104 and the portion of the fluid flow channel component 200 may be replaced with any of the substrate block 104 and fluid flow channel component 200 shown above. The seal ring 500 is similar to the seal ring 400, except for the variations described herein. Unless otherwise specified, all reference numerals are the same as those described above.

[0074] As best shown in Figure 6B, the seal ring 500 is positioned between the fluid flow channel component 200 and the substrate block 104. The seal ring 500 forms a fluid-tight connection between the fluid flow channel component 200 and the substrate block 104. The substrate block 104 includes a fluid passage 108 extending from a substrate port 109. The substrate port 109 is formed on the upper surface 112 of the substrate block 104.

[0075] Similarly, the fluid channel component 200 includes a fluid passage 208 extending from a component port 209 formed on its lower surface 214. The substrate port 109 of the substrate block 104 is surrounded by a seal cavity 110 that receives a seal ring 500. The component port 209 of the fluid channel component 200 is similarly surrounded by a seal cavity 210 that receives a seal ring 500.

[0076] The seal ring 500 is formed in a generally annular configuration, comprising an inner sleeve 502 and an outer ring 504. The inner sleeve 502 of the seal ring 500 has a sleeve fluid passage 508 that penetrates the center of the seal ring 500. The sleeve fluid passage 508 extends along the longitudinal axis AA. The inner sleeve 502 and the outer ring 504 are symmetrical with respect to the longitudinal axis AA. The sleeve fluid passage 508 allows fluid to flow through the seal ring 500, and the other components of the seal ring 500 provide an airtight seal between the coupled fluid flow channel component 200 and the substrate block 104. In some embodiments, the inner sleeve 502 and the outer ring 504 may not be symmetrical with respect to the longitudinal axis AA.

[0077] The internal sleeve 502 is provided with a passage surface 520 that forms the wall of the sleeve fluid passage 508. The passage surface 520 is shown to have a substantially constant diameter along its entire length. Thus, the passage surface 520 of the sleeve fluid passage 508 connects the component port 209 to the substrate port 109. The passage surface 520 does not need to have a constant diameter, and its diameter may vary as described later.

[0078] The internal sleeve 502 further comprises a first contact surface 530 that engages with corresponding components in the seal cavities 110, 210 of the substrate block 104 and the fluid flow channel component 200, as described later. The first contact surface 530 includes an upper contact surface 531 and a lower contact surface 532. The upper contact surface 531 engages with the components of the seal cavity 210 of the fluid flow channel component 200, and the lower contact surface 532 engages with the components of the seal cavity 110 of the substrate block 104. The upper contact surface 531 and the lower contact surface 532 may have a linear, convex, or concave shape. In this embodiment, the upper contact surface 531 and the lower contact surface 532 have a linear shape.

[0079] The upper contact surface 531 and the lower contact surface 532 further include end faces 535 and 536 that engage with the corresponding floor surfaces 127 and 227 of the conical portions 124 and 224 of the substrate block 104 and the fluid flow channel component 200. The upper contact surface 531 and the lower contact surface 532, as well as the floor surfaces 127 and 227, are substantially perpendicular to the longitudinal axis AA. Thus, the conical portions 124 and 224 of the substrate block and the fluid flow channel component 200 are connected at an angle perpendicular to the respective fluid passages 108 and 208. The conical portions 124 and 224 do not extend beyond the internal sleeve 502. In other words, the upper and lower conical portions 533 and 534 extend a first distance from the central plane CP, while the conical portions 124 and 224 of the substrate block 104 and the fluid flow channel component 200 extend a second distance from the central plane CP. The second distance is equal to the first distance.

[0080] The seal ring 500 is symmetrical with respect to a central plane CP, which is perpendicular to the longitudinal axis AA. The internal sleeve 502 of the seal ring 500 includes an upper conical portion 533 and a lower conical portion 534. The upper contact surface 531 is formed on the upper conical portion 533, and the lower contact surface 532 is formed on the lower conical portion.

[0081] The outer ring 504 has an inner surface 540 and an outer surface 550. The inner surface 540 is located near the inner sleeve 502 and faces the first contact surface 530. The outer surface 550 is located on the opposite side from the inner surface 540. The inner surface 540 may be divided into an upper inner surface 541 and a lower inner surface 542.

[0082] The inner sleeve 502 is joined to the outer ring 504 by a web 506, which separates the upper inner surface 541 and the lower inner surface 542, as well as the upper contact surface 531 and the lower contact surface 532. The web 506 comprises an upper web surface 561 and a lower web surface 562. The upper web surface 561, together with the upper inner surface 541 of the inner surface 540 of the outer ring 504 and the upper contact surface 531 of the first contact surface 530, forms an annular upper sleeve groove 565. Similarly, the lower web surface 562, together with the lower inner surface 542 of the inner surface 540 of the outer ring 504 and the lower contact surface 532 of the first contact surface 530, forms an annular lower sleeve groove 566. The outer ring 504 further comprises an upper end surface 570 and a lower end surface 572.

[0083] Preferably, the internal sleeve 502 has a first height, which is equal to the second height of the outer ring 504. However, in other embodiments, the first and second heights may be different, as shown in the seal rings 300 and 400 described above.

[0084] Referring to Figure 6E, another form of the seal ring 500 is shown as a cross-sectional view. The seal ring 500 shown in Figure 6E is identical to the seal rings shown in Figures 6A-6D, except that the passage surface 520 tapers out from the central plane CP. The taper angle may be in the range of 0.1 to 10 degrees, preferably in the range of 1 to 2 degrees. This is intended to compensate for the deflection of the internal sleeve 502 during assembly. The passage surface 520 has an upper portion 521 and a lower portion 522, the diameter of which increases as the distance from the central plane CP increases.

[0085] Figures 7A to 7C show a seal ring 600 of another embodiment, which is substantially identical to the seal ring 300, except as described later. The seal ring 600 has an internal sleeve 602 and an outer ring 604. The outer ring 604 has a plurality of castellations 671 formed thereon. The castellations 671 extend from the upper end face 670 and the lower end face 672 to the floor surfaces 673 and 674. The castellations 671 are separated from each other by grooves 675 that extend from the inner surface 640 to the outer surface 650 of the outer ring 604. Thus, the castellations 671 and grooves 675 are arranged alternately along the circumferential direction of the outer ring 604.

[0086] The floor surfaces 673 and 674 are at a height from the central plane CP that is less than the height from the central plane CP of the upper and lower conical portions 633 and 634 of the internal sleeve 602. The outer ring 604 has a height greater than the height of the internal sleeve 602. The floor surfaces 673 and 674 may have a height greater than the height of the web 606 when measured from the central plane CP. However, in other embodiments, the floor surfaces 673 and 674 may have a height equal to the height of the web 606.

[0087] In some embodiments, six castellations 671 may be formed on the upper end face 670 and six castellations 671 may be formed on the lower end face 672. In other embodiments, the number of castellations 671 on the upper end face 670 and the lower end face 672 may be more or less than six. The castellations 671 on the upper end face 670 and the lower end face 672 may be aligned with each other or offset from each other. The castellations 671 may have a circumferential width that is greater than, equal to, or less than the circumferential width of the groove 675. The seal ring 600 can be used directly as a replacement for the seal ring 300 because it is geometrically compatible, but the castellations 671 help to hold the seal ring 600 in the seal cavity without requiring excessive insertion force. This advantageously facilitates the installation of the seal ring during assembly and maintenance work.

[0088] While the present invention has been described with respect to specific examples for carrying it out, including currently preferred embodiments, those skilled in the art will understand that numerous variations and combinations exist of the systems and techniques described above. It should be understood that other embodiments may be used and that structural and functional modifications may be made without departing from the scope of the invention. Accordingly, the spirit and scope of the invention should be interpreted broadly as set forth in the appended claims.

[0089] The present invention can be more fully described by the following exemplary claims.

[0090] Exemplary claim 1: A fluid supply system comprising: A substrate block including the following: top surface; substrate ports on the top surface; substrate fluid passages extending from the substrate ports; substrate ring defining the substrate ports; substrate seal channels formed on the top surface and surrounding the substrate ring, wherein the outer surface of the substrate ring forms the inner surface of the substrate seal channel; and a conical portion extending from the substrate ring to the substrate fluid passage. The active components include: a bottom surface; a component port on the bottom surface; a component fluid passage extending from the component port; a component ring defining the component port; a component seal channel formed on the bottom surface and surrounding the component ring, wherein the outer surface of the component ring forms the inner surface of the component seal channel; and a conical portion extending from the component ring to the component fluid passage. A seal ring comprising: an internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage having a substantially constant diameter along its longitudinal axis; and an outer ring connected to the central portion of the internal sleeve and surrounding the internal sleeve, wherein (1) an annular upper sleeve groove is formed between the upper portion of the outer ring and the upper portion of the internal sleeve, and (2) an annular lower sleeve groove is formed between the lower portion of the outer ring and the lower portion of the internal sleeve; A fluid supply system in which the active component is mounted on a substrate block, (1) the substrate port and the component port are aligned, and (2) a seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluid-tightly seals the substrate fluid passage and the component fluid passage.

[0091] Exemplary claim 2: The fluid supply system according to exemplary claim 1, wherein the seal ring is symmetrical with respect to the longitudinal axis.

[0092] Exemplary Claim 3: A fluid supply system according to Exemplary Claim 1 or Exemplary Claim 2, wherein the substrate fluid passage has a diameter, and the diameter of the substrate fluid passage is smaller than the diameter of the sleeve fluid passage.

[0093] Exemplary Claim 4: A fluid supply system according to any one of Exemplary Claims 1 to 3, wherein the inner sleeve of the seal ring has a first height and the outer ring of the seal ring has a second height, the first height being greater than the second height.

[0094] Exemplary claim 5: A fluid supply system according to any one of exemplary claims 1 to 4, wherein the conical portion of the substrate port is connected to the substrate fluid passage at an oblique angle.

[0095] Exemplary claim 6: The fluid supply system according to exemplary claim 5, wherein the lower conical portion of the seal ring extends by a first distance from the central plane, and the conical portion of the substrate port extends by a second distance from the central plane, the second distance being greater than the first distance.

[0096] Exemplary claim 7: A fluid supply system according to any one of exemplary claims 1 to 6, wherein the transition portion of the cone of the substrate port remains exposed.

[0097] Exemplary claim 8: A fluid supply system according to exemplary claim 1 or exemplary claim 2, wherein the inner sleeve of the seal ring has a first height and the outer ring of the seal ring has a second height, the first height and the second height being equal.

[0098] Exemplary claim 9: A fluid supply system according to any one of exemplary claims 1, 2, or 8, wherein the cone portion of the substrate port is connected to the substrate fluid passage at an orthogonal angle.

[0099] Exemplary claim 10: A fluid supply system according to any one of exemplary claims 1, 2, 8, or 9, wherein the conical portion of the substrate port terminates with an end face perpendicular to the longitudinal axis.

[0100] Exemplary Claim 11: A fluid supply system according to Exemplary Claim 9 or Exemplary Claim 10, wherein the lower cone portion of the seal ring extends by a first distance from the central plane, and the cone portion of the substrate port extends by a second distance from the central plane, the second distance being equal to the first distance.

[0101] Exemplary claim 12: A fluid supply system according to any one of the exemplary claims 1 to 11, wherein the outer ring includes a castellation.

[0102] Exemplary claim 13: The fluid supply system according to exemplary claim 12, wherein castellations are formed on the upper and lower end faces of the outer ring.

[0103] Exemplary Claim 14: A seal ring comprising: an internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage having a substantially constant diameter along its longitudinal axis; and an outer ring connected to the central portion of the internal sleeve and surrounding the internal sleeve, wherein (1) an annular upper sleeve groove is formed between the upper portion of the outer ring and the upper portion of the internal sleeve, and (2) an annular lower sleeve groove is formed between the lower portion of the outer ring and the lower portion of the internal sleeve.

[0104] Exemplary claim 15: The seal ring according to exemplary claim 14, wherein the seal ring is symmetrical with respect to the longitudinal axis.

[0105] Exemplary claim 16: A seal ring according to exemplary claim 14 or exemplary claim 15, wherein the internal sleeve of the seal ring has a first height and the outer ring of the seal ring has a second height, the first height being greater than the second height.

[0106] Exemplary claim 17: A seal ring according to any one of exemplary claims 14 to 16, wherein the upper conical portion is acutely angled and connected to the sleeve fluid passage.

[0107] Exemplary claim 18: A seal ring according to exemplary claim 17, wherein the internal sleeve terminates with an edge that defines the end of the sleeve fluid passage.

[0108] Exemplary claim 19: A seal ring according to any one of exemplary claims 14 to 18, wherein the outer surfaces of the upper conical portion and the lower conical portion have a certain inclination.

[0109] Exemplary claim 20: A seal ring according to exemplary claim 14 or exemplary claim 15, wherein the internal sleeve of the seal ring has a first height and the outer ring of the seal ring has a second height, the first height and the second height being equal.

[0110] Exemplary claim 21: A seal ring according to exemplary claim 14, 15, or 20, wherein the upper and lower conical portions terminate with end faces perpendicular to the longitudinal axis.

[0111] Exemplary claim 22: A seal ring according to any one of the exemplary claims 14 to 21, wherein the outer ring includes castellations.

[0112] Exemplary claim 23: A seal ring according to exemplary claim 22, wherein castellations are formed on the upper and lower end faces of the outer ring.

[0113] Exemplary claim 24: A fluid supply system comprising: A substrate block including the following: top surface; substrate ports on the top surface; substrate fluid passages extending from the substrate ports; substrate ring defining the substrate ports; substrate seal channels formed on the top surface and surrounding the substrate ring, wherein the outer surface of the substrate ring forms the inner surface of the substrate seal channel; and a conical portion extending from the substrate ring to the substrate fluid passage. The active components include: a bottom surface; a component port on the bottom surface; a component fluid passage extending from the component port; a component ring defining the component port; a component seal channel formed on the bottom surface and surrounding the component ring, wherein the outer surface of the component ring forms the inner surface of the component seal channel; and a conical portion extending from the component ring to the component fluid passage. A seal ring comprising: an internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage; and an outer ring connected to the central portion of the internal sleeve and surrounding the internal sleeve, wherein (1) an annular upper sleeve groove is formed between the upper portion of the outer ring and the upper portion of the internal sleeve, and (2) an annular lower sleeve groove is formed between the lower portion of the outer ring and the lower portion of the internal sleeve; A fluid supply system characterized in that the active component is mounted on a substrate block, (1) the substrate port and the component port are aligned, and (2) a seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluid-tightly seals the substrate fluid passage and the component fluid passage; and the outer ring includes castellations.

[0114] Exemplary claim 25: The fluid supply system according to exemplary claim 24, wherein the castellation includes a plurality of grooves extending from the outer surface of the outer ring to the inner surface of the outer ring.

[0115] Exemplary claim 26: A fluid supply system according to exemplary claim 24 or exemplary claim 25, wherein the castellation includes a plurality of floor surfaces, the floor surfaces having a height from a central plane, and the height is less than the heights of the upper and lower cones measured from the central plane.

[0116] Exemplary claim 27: A fluid supply system according to any one of the exemplary claims 24 to 26, wherein the outer ring has a height greater than the height of the inner sleeve.

[0117] Exemplary claim 28: A fluid supply system according to any one of exemplary claims 24 to 27, wherein castellations are formed on the upper and lower end faces of the outer ring.

[0118] Exemplary claim 29: The fluid supply system according to exemplary claim 28, wherein the castellations formed on the upper edge of the outer ring are aligned with the castellations formed on the lower edge of the outer ring.

Claims

1. A fluid supply system comprising the following: The circuit board block includes the following: Top surface; Substrate port on the upper surface; A substrate fluid passage extending from the substrate port; A substrate ring defining the aforementioned substrate port; A substrate seal channel formed on the upper surface and surrounding the substrate ring, wherein the outer surface of the substrate ring forms the inner surface of the substrate seal channel; and A conical portion extending from the substrate ring to the substrate fluid passage; Active components include: Bottom surface; Component port on the lower surface; A component fluid passage extending from the aforementioned component port; A component ring defining the aforementioned component port; A component seal channel formed on the lower surface and surrounding the component ring, wherein the outer surface of the component ring forms the inner surface of the component seal channel; and A cone extending from the component ring to the component fluid passage; Seal rings including the following: An internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage, and the sleeve fluid passage has a substantially constant diameter along its longitudinal axis; and An outer ring connected to the central portion of the inner sleeve and surrounding the inner sleeve, wherein (1) an annular upper sleeve groove is formed between the upper portion of the outer ring and the upper portion of the inner sleeve, and (2) an annular lower sleeve groove is formed between the lower portion of the outer ring and the lower portion of the inner sleeve; A fluid supply system in which the active component is mounted on the substrate block, (1) the substrate port and the component port are aligned, and (2) the seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluid-tightly seals the substrate fluid passage and the component fluid passage.

2. The fluid supply system according to claim 1, wherein the seal ring is symmetrical with respect to the longitudinal axis.

3. The fluid supply system according to claim 1 or 2, wherein the substrate fluid passage has a diameter, and the diameter of the substrate fluid passage is smaller than the diameter of the sleeve fluid passage.

4. The fluid supply system according to any one of claims 1 to 3, wherein the internal sleeve of the seal ring has a first height, the outer ring of the seal ring has a second height, and the first height is greater than the second height.

5. The fluid supply system according to any one of claims 1 to 4, wherein the conical portion of the substrate port is connected to the substrate fluid passage at an oblique angle.

6. The fluid supply system according to claim 5, wherein the lower conical portion of the seal ring extends by a first distance from the central plane, and the conical portion of the substrate port extends by a second distance from the central plane, the second distance being greater than the first distance.

7. The fluid supply system according to any one of claims 1 to 6, wherein the transition portion of the cone of the substrate port remains exposed.

8. The fluid supply system according to claim 1 or claim 2, wherein the internal sleeve of the seal ring has a first height, the outer ring of the seal ring has a second height, and the first height and the second height are equal.

9. The fluid supply system according to any one of claims 1, 2, or 8, wherein the conical portion of the substrate port is connected to the substrate fluid passage at an orthogonal angle.

10. The fluid supply system according to any one of claims 1, 2, 8, or 9, wherein the conical portion of the substrate port is terminated by an end face perpendicular to the longitudinal axis.

11. The fluid supply system according to claim 9 or 10, wherein the lower conical portion of the seal ring extends by a first distance from the central plane, and the conical portion of the substrate port extends by a second distance from the central plane, the second distance being equal to the first distance.

12. The fluid supply system according to any one of claims 1 to 11, wherein the outer ring includes castellation.

13. The fluid supply system according to claim 12, wherein the castellations are formed on the upper and lower end faces of the outer ring.

14. It is a seal ring, An internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage, and the sleeve fluid passage has a substantially constant diameter along its longitudinal axis; and An outer ring connected to the central part of the inner sleeve and surrounding the inner sleeve, wherein (1) an annular upper sleeve groove is formed between the upper part of the outer ring and the upper part of the inner sleeve, and (2) an annular lower sleeve groove is formed between the lower part of the outer ring and the lower part of the inner sleeve. A sealing ring, including

15. The seal ring according to claim 14, wherein the seal ring is symmetrical with respect to the longitudinal axis.

16. The seal ring according to claim 14 or claim 15, wherein the internal sleeve of the seal ring has a first height, and the outer ring of the seal ring has a second height, and the first height is greater than the second height.

17. The seal ring according to any one of claims 14 to 16, wherein the upper conical portion is acutely angled and connected to the sleeve fluid passage.

18. The seal ring according to claim 17, wherein the internal sleeve terminates with an edge, and the edge defines the end of the sleeve fluid passage.

19. The seal ring according to any one of claims 14 to 18, wherein the outer surfaces of the upper conical portion and the lower conical portion have a certain inclination.

20. The seal ring according to claim 14 or claim 15, wherein the internal sleeve of the seal ring has a first height, and the outer ring of the seal ring has a second height, and the first height and the second height are equal.

21. The seal ring according to any one of claims 14, 15, or 20, wherein the upper and lower conical portions are terminated by end faces perpendicular to the longitudinal axis.

22. The seal ring according to any one of claims 14 to 21, wherein the outer ring includes castellations.

23. The seal ring according to claim 22, wherein the castellations are formed on the upper and lower end faces of the outer ring.

24. A fluid supply system comprising the following: The circuit board block includes the following: Top surface; Substrate port on the upper surface; A substrate fluid passage extending from the substrate port; A substrate ring defining the aforementioned substrate port; A substrate seal channel formed on the upper surface and surrounding the substrate ring, wherein the outer surface of the substrate ring forms the inner surface of the substrate seal channel; and A conical portion extending from the substrate ring to the substrate fluid passage; Active components include: Bottom surface; Component port on the lower surface; A component fluid passage extending from the aforementioned component port; A component ring defining the aforementioned component port; A component seal channel formed on the lower surface and surrounding the component ring, wherein the outer surface of the component ring forms the inner surface of the component seal channel; and A cone extending from the component ring to the component fluid passage; Seal rings including the following: An internal sleeve comprising an upper conical portion, a lower conical portion, and a central portion, wherein the internal sleeve defines a sleeve fluid passage; and An outer ring connected to the central portion of the inner sleeve and surrounding the inner sleeve, wherein (1) an annular upper sleeve groove is formed between the upper portion of the outer ring and the upper portion of the inner sleeve, and (2) an annular lower sleeve groove is formed between the lower portion of the outer ring and the lower portion of the inner sleeve; The active component is mounted on the substrate block, (1) the substrate port and the component port are aligned, and (2) the seal ring fits into the substrate seal channel and the component seal channel, respectively, and the seal ring fluid-tightly seals the substrate fluid passage and the component fluid passage; and A fluid supply system in which the aforementioned outer ring includes a castellation.

25. The fluid supply system according to claim 24, wherein the castellation includes a plurality of grooves extending from the outer surface of the outer ring to the inner surface of the outer ring.

26. The fluid supply system according to claim 24 or 25, wherein the castellation includes a plurality of floor surfaces, the floor surfaces having a height from a central plane, and the height is less than the heights of the upper and lower conical portions measured from the central plane.

27. The fluid supply system according to any one of claims 24 to 26, wherein the outer ring has a height greater than the height of the inner sleeve.

28. The fluid supply system according to any one of claims 24 to 27, wherein the castellations are formed on the upper and lower end faces of the outer ring.

29. The fluid supply system according to claim 28, wherein the castellations formed on the upper edge of the outer ring are aligned with the castellations formed on the lower edge of the outer ring.

Images