Wet process equipment and magnetic clamp opening / closing actuator

Abstract

A wet process apparatus and an actuator for opening and closing a magnetic clamp therefor are provided. [Solution] The wet process equipment has two opening / closing actuators A1, on which a first magnetic clamp 9 and a second magnetic clamp 9 are installed. The opening / closing actuators A1 include two brackets 300 and two pushing structures 100 installed on each bracket 300. The pushing structures 100 have a plurality of interlocking pushing members, including a first pushing member 2a and a second pushing member 2b corresponding to a magnetic clamping end 911 and an opposite end 912 of the first magnetic clamp 9, respectively, and a third pushing member corresponding to the opposite end of the second magnetic clamp 9. When the plurality of pushing members move and interlock, the first pushing member 2a pushes the magnetic clamping end 911 to clamp it and opens the opposite end 912 from a closed position P1 to a fully open position P2, and the second pushing member 2b locks the opposite end 912 between the closed position P1 and the fully open position P2, and the third pushing member pushes the opposite end 912.

Description

Technical Field

[0001] The present invention relates to a device for opening and closing a magnetic clamp in a wet process, and more particularly to a wet process device and an opening and closing actuator for a magnetic clamp thereof.

Background Art

[0002] A wet process device that performs a wet process on a substrate in an upright manner usually clamps the substrate to be processed upright by means of a magnetic clamp, conveys the suspended substrate toward a predetermined conveyance path, and performs a wet process on the substrate on the conveyance path.

Summary of the Invention

Problems to be Solved by the Invention

[0003] However, in a magnetic clamp, magnets are mainly installed at the clamping ends, and the principle that the magnets are attracted to each other magnetically is utilized. By the mutual attraction of the two magnets due to different magnetisms, the clamping ends that are originally in a fully open state are instantaneously clamped and closed. Therefore, the clamping movement energy from fully open to clamped becomes large, and for a fragile substrate such as a glass substrate, the substrate may be cut or broken, which has been a problem for a long time. When the position where the magnetic clamp clamps is the fragile edge portion of the substrate, cutting and breaking are more likely to occur.

[0004] Therefore, the present inventor considered that the above-mentioned drawbacks can be improved, and as a result of repeated intensive studies, the present invention was proposed to effectively improve the above-mentioned problems through a reasonable design.

[0005] The present invention has been made in view of the above circumstances, and an example of the problem is to solve the above problems. That is, the present invention aims to provide a wet process apparatus and an opening / closing actuator for its magnetic clamp. Specifically, the clamping of the first magnetic clamp of the pair of magnetic clamps is mainly performed in two stages, and by attenuating the clamping kinetic energy of the magnetic clamp, the effect of preventing the situation where the substrate is cut or broken is achieved.

Means for Solving the Problem

[0006] In order to achieve the above object, the opening / closing actuator of the magnetic clamp according to an aspect of the present invention is driven by a pair of driving units so as to control the opening and closing of a pair of magnetic clamps, and each of the magnetic clamps has a magnetic clamping end and the other end. The opening / closing actuator includes a pair of brackets on which each of the driving units is installed, and a pair of pushing structures. Each of the pushing structures includes a base and a plurality of pushers protruding from the base. The base of each of the pushing structures is slidably installed on each of the brackets and is driven by each of the driving units to move toward each other. The plurality of pushers of each of the pushing structures consists of a first pusher, a second pusher, and a third pusher. The first pusher and the second pusher respectively correspond to the magnetic clamping end and the other end of one of the magnetic clamps. The third pusher includes a pair of pushing structures corresponding to the other end of the other magnetic clamp. Each of the driving units drives each of the bases so as to interlock the plurality of pushers to move with respect to each of the brackets. The first pusher of each of the pushing structures pushes to clamp the magnetic clamping end of one of the magnetic clamps and opens the other end from the closed position to the fully open position. The second pusher of each of the pushing structures locks the other end of one of the magnetic clamps between the closed position and the fully open position. The third pusher of each of the pushing structures pushes the other end of the other magnetic clamp.

[0007] In order to solve the above-described problems and achieve the object, a wet process apparatus according to another aspect of the present invention includes a frame, an upper crossbar, and a lower crossbar. The upper crossbar and the lower crossbar are spanned within the frame, and at least one pair of magnetic clamps are installed in all of them. Each magnetic clamp includes a carrier having a magnetic clamping end and the other end, and two opening / closing actuators arranged to correspond to the upper crossbar and the lower crossbar, respectively. Each opening / closing actuator includes a pair of brackets each provided with a driving part, and a pair of pushing structures. Each pushing structure includes a base and a plurality of pushers protruding from the base. The base of each pushing structure is slidably installed on each bracket and is driven by each driving part to move toward each other. The plurality of pushers of each pushing structure include a first pusher, a second pusher, and a third pusher. The first pusher and the second pusher correspond to the magnetic clamping end and the other end of one magnetic clamp, respectively. The third pusher includes a pair of pushing structures corresponding to the other end of the other magnetic clamp. Each driving part drives each base so as to interlock a plurality of the pushers to move with respect to each bracket. The first pusher of each pushing structure pushes to clamp the magnetic clamping end of one magnetic clamp and opens the other end from the closed position to the fully open position. The second pusher of each pushing structure locks the other end of one magnetic clamp between the closed position and the fully open position. The third pusher of each pushing structure pushes the other end of the other magnetic clamp.

Effects of the Invention

[0008] According to the present invention, the following effects are obtained. By making one magnetic clamp perform clamping in two stages, in the first stage, first, control is performed so that the magnetic clamp is in a semi-open and semi-clamped state, and in the second stage, control is performed so that the magnetic clamp starts clamping the substrate from the semi-open and semi-clamped state. By doing so, the clamping kinetic energy of the magnetic clamp can be attenuated, and the effect of preventing the situation where the substrate is cut or broken can be achieved.

[0009] From the descriptions in the specification and drawings to be described later, at least the following matters will become clear.

Brief Description of the Drawings

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Embodiments for Carrying out the Invention

[0011] Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the claims. Also, not all combinations of features described in the embodiments are essential for the solution means of the invention.

[0012] The present invention provides a wet process apparatus and an opening and closing actuator for its magnetic clamp. The wet process apparatus according to the present invention mainly has a carrier 800 for sandwiching a substrate S suspended on a transport unit T, and in the process of the transport unit T transporting the carrier 800, a wet process is performed on the substrate S sandwiched by the carrier 800 (see FIG. 7). The substrate S clamped by the present invention can be any substrate, and in particular, it is applicable to a glass substrate used for semiconductor packages.

[0013] The wet process apparatus according to the present invention includes two opening and closing actuators A1 and A2, and the above-described carrier 800 (see FIGS. 1 to 9).

[0014] The carrier 800 includes a frame 8, an upper crossbar L1, and a lower crossbar L2. The upper crossbar L1 and the lower crossbar L2 are spaced apart from each other and are spanned in the frame 8 so as to face each other. A suspension portion 81 is provided on the frame 8, and the carrier 800 is suspended from the transport portion T by the suspension portion 81 and is transported by the transport portion T. At least one pair of magnetic clamps 9 are provided on both the upper crossbar L1 and the lower crossbar L2. The number of magnetic clamps 9 provided on the upper crossbar L1 or the lower crossbar L2 may be one pair or a plurality of pairs. For the sake of simplicity of explanation, a plurality of pairs are illustrated in the figure, and hereinafter, an example in the case of one pair will be described first. For the convenience of explanation, the two magnetic clamps 9 forming a pair are hereinafter referred to as a first magnetic clamp 9 (in an unclamped state) and a second magnetic clamp 9 (in a clamped state), respectively. The magnetic clamp 9 has magnetic clamping ends 911 and other ends 912 facing each other, and a magnetic adsorption member (such as a magnet, member reference numeral omitted) is disposed on the magnetic clamping end 911. Therefore, when the magnetic clamping ends 911 approach each other to an appropriate distance, the magnetic adsorption members are magnetically adsorbed to each other, and the clamping is completed.

[0015] The two opening and closing actuators A1 and A2 may be, for example, an upper opening and closing actuator A1 and a lower opening and closing actuator A2 (however, the present invention is not limited thereto). These two are arranged so as to correspond to the upper crossbar L1 and the lower crossbar L2, respectively, and their structures are upside down with respect to each other. Each opening and closing actuator A1 (or A2) includes a pair of brackets 300 facing each other with a space therebetween, and a pair of pushing structures 100 respectively installed on the pair of brackets 300. Specifically, the two opening and closing actuators A1 and A2 are respectively installed in the wet process apparatus.

[0016] The two paired brackets 300 are respectively located on opposite sides of the carrier 800, and the drive units M are respectively installed thereon. The two paired pushing structures 100 are slidably installed on the pair of the brackets 300 respectively. Each drive unit M is installed on each bracket 300 and can drive each pushing structure 100 to approach or separate from each other.

[0017] Specifically, each pushing structure 100 includes a base 1 and a plurality of pushers protruding from the base 1. The base 1 of each pushing structure 100 is slidably installed on each bracket 300 and is driven to slide by each drive unit M. The plurality of pushers of each pushing structure 100 include a first pusher 2a, a second pusher 2b, and a third pusher 2c. The first pusher 2a corresponds to the magnetic clamping end 911 of the aforementioned first magnetic clamp 9, the second pusher 2b corresponds to the other end 912 of the first magnetic clamp 9, and the third pusher 2c corresponds to the other end 912 of the aforementioned second magnetic clamp 9. The two bases 1 have opposite surfaces (member reference numerals omitted) facing each other, and the plurality of pushers (the first pusher 2a, the second pusher 2b, and the third pusher 2c) are all installed so as to protrude from the opposite surfaces of the base 1.

[0018] As a result, as shown in FIGS. 7 to 14, when the two driving parts M of the opening / closing actuators A1 and A2 drive the two pushing structures 100 to move toward each other, the bases 1 of the two pushing structures 100 are interlocked so that the plurality of the pushers (the first pusher 2a, the second pusher 2b, and the third pusher 2c) move closer to each other. After moving, the first pusher 2a of the two pushing structures 100 of the opening / closing actuator A1 (A2) pushes the magnetic clamping end 911 of the first magnetic clamp 9 to clamp it, and at the same time, the other end 912 is opened from the closed position P1 to the fully open position P2 (see FIGS. 8 and 15). The second pusher 2b of the two pushing structures 100 of the opening / closing actuator A1 (A2) locks the other end 912 of the first magnetic clamp 9 between the closed position P1 and the fully open position P2. In this way, the magnetic clamping end 911 and the other end 912 of the first magnetic clamp 9 are all held in a semi-open and semi-clamped state as shown in FIG. 12, and in this embodiment, the first magnetic clamp 9 on the upper crossbar L1 and the first magnetic clamp 9 on the lower crossbar L2 are both held in a semi-open and semi-clamped state after being pushed. The fully open state of the fully open position P2 means that the magnetic clamping end 911 or the other end 912 is completely open.

[0019] Next, as shown in FIGS. 15 to 17, when the two driving parts M of the opening / closing actuators A1 and A2 drive the two pushing structures 100 to move away from the first magnetic clamp 9 on the upper crossbar L1 and the first magnetic clamp 9 on the lower crossbar L2, the second pusher 2b that is originally locked on the moving path from the closed position P1 to the fully open position P2 of the other end 912 moves away and is no longer locked. Therefore, the magnetic clamping end 911 is closed by the magnetic attraction between the aforementioned magnetic adsorption members, clamps the substrate S, and at the same time, the other end 912 is opened to the fully open position P2.

[0020] It should be noted here that since all of the plurality of the pushers (the first pusher 2a, the second pusher 2b, and the third pusher 2c) are installed on the base 1, the operation of the second magnetic clamp 9 is performed simultaneously with the operation of the first magnetic clamp 9 described above.

[0021] Therefore, as shown in FIGS. 18 to 20, when two drive parts M of each of the opening / closing actuators A1 and A2 (only the upper opening / closing actuator A1 is shown in FIGS. 18 to 20) drive the two pushing structures 100 so as to move toward each other, the bases 1 of the two pushing structures 100 are interlocked with the third pusher 2c so as to move closer to each other, and after the movement, the third pusher 2c of the two pushing structures 100 of the opening / closing actuator A1 pushes the other end 912 of the second magnetic clamp 9 until the second magnetic clamp 9 changes from the clamped state (see FIG. 18) to the unclamped state (see FIG. 19). Next, when the two drive parts M drive the two pushing structures 100 so as to move away from the second magnetic clamp 9 on the upper crossbar L1, the second magnetic clamp 9 is maintained in the unclamped state (see FIG. 20).

[0022] In this way, in the present invention, the pushing structure 100 can simultaneously control the first and second magnetic clamps 9 so as to alternately clamp and release the substrate S. Moreover, since the first magnetic clamp 9 employs two-stage clamping, that is, in the first stage, first, the magnetic clamping end 911 of the first magnetic clamp 9 becomes in a semi-clamped state (that is, the first magnetic clamp 9 is in a semi-open and semi-clamped state), and the first magnetic clamp 9 can clamp the substrate S by magnetic adsorption only in the second stage with the magnetic clamping end 911. In other words, the moving distance of the magnetic clamping end 911 from the semi-clamped state in the first stage to the fully-clamped state in the second stage is shorter than the moving distance of the magnetic clamps of the unused opening and closing actuators A1 and A2 of the present invention from the fully-open state to the fully-clamped state (the moving distance is reduced by half, for example). Therefore, since the clamping kinetic energy of the magnetic clamping end 911 can also be correspondingly attenuated, the effect of preventing the cutting or breaking of the substrate S (for example, a glass substrate) is achieved. Further, the second magnetic clamp 9 is only pushed so as to change from the clamped state to the unclamped state, and since no magnetic adsorption member is provided at the other end 912 to be pushed, the other end 912 directly changes from the fully-open state to the fully-clamped state. In order not to cut or break the substrate S (for example, a glass substrate), it is necessary to make its clamping kinetic energy weaker than that of the magnetic clamping end 911. In other words, the other end 912 of the second magnetic clamp 9 does not require two-stage clamping, that is, only the third pusher 2c is required, and a fourth pusher (not shown) is not required. The opening and closing actuators A1 and A2 according to the present invention can simultaneously cause any pair of magnetic clamps 9 to perform the operations of alternately clamping and releasing the substrate S.

[0023] Thereby, as shown in FIGS. 6 and 10, the carrier 800 is only interlocked such that the conveying unit T laterally moves the opening and closing actuators A1 and A2 by a short specific distance, and the opening and closing actuator A1 (A2) corresponds to another pair of magnetic clamps 9, and can perform the operations of alternately clamping and releasing the substrate S.

[0024] In this way, by means of the alternating clamping and releasing method, the liquid sprayed in the wet process is sprayed onto the entire substrate S, and there is no area where spraying does not occur.

[0025] The point to be explained here is that, as shown in FIGS. 3 to 5, each pusher (one of 2a, 2b, and 2c) includes a push rod 21 and a roller 22 (a soft rubber tire, but the present invention is not limited thereto). One end of the rod of the push rod 21 is connected to the aforementioned opposing surface of the base 1, the other end of the push rod 21 extends from the opposing surface of the base 1, and a roller 22 is installed at the extended end. Each pusher (2a, 2b, 2c) can be pushed by the roller 22 to open and close any one of the aforementioned magnetic clamps 9. More specifically, the push rod 21 includes a rod portion 211 and a fork 213. One end of the rod portion 211 is connected to the opposing surface of the base 1, the fork 213 is connected to the other end of the rod portion 211, the roller 22 is rotatably connected to the fork 213, and protrudes from the fork 213.

[0026] Also, in order for the pushing structure 100 to slide smoothly with respect to the bracket 300, two guide grooves 35 that face each other with a space therebetween are opened in each bracket 300, and two rod bodies 11 are connected to the base 1 of each pushing structure 100. Each rod body 11 slides into each guide groove 35 in a slidable manner, and is guided by each guide groove 35 so that each rod body 11 slides in a predetermined direction.

[0027] In addition, an eccentric wheel 41 and a shaft 43 are further arranged on each bracket 300. The aforementioned driving part M drives the eccentric wheel 41 to rotate. The shaft 43 is connected to the base 1. A connecting rod 42 is connected to the eccentric wheel 41 in an eccentric manner, and the connecting rod 42 is connected to the shaft 43. In this way, the driving part M drives the eccentric wheel 41 to rotate, and the connecting rod 42 interlocks the base 1 to move with respect to the bracket 300 by the shaft 43.

[0028] What needs to be explained here is that, as shown in FIG. 8, any one of the aforementioned magnetic clamps 9 includes two clamping plates 91 that are rotatably connected to each other, and each clamping plate 91 is a plate that is linear and flat. Therefore, the opposing outer sides of the two clamping plates 91 are both linear and planar, and semi-cylinders (member reference numerals omitted) are respectively convexly provided on the opposing inner sides (both sides adjacent to each other) of the two clamping plates 91, and the two semi-cylinders are connected so as to be rotatably superimposed on each other. In this way, in order to hold any one of the magnetic clamps 9 in the semi-open and semi-clamped state in the aforementioned first stage, the protruding degrees of the first pusher 2a and the second pusher 2b of each pushing structure 100 (located on both opposing sides of any one of the magnetic clamps 9) from the base 1 may be made the same, or one pusher may protrude slightly, the other pusher may retract slightly, and the degrees of slight protrusion and slight retraction may be made equal (of course, depending on the actual situation of the magnetic clamp, the degrees of slight protrusion and slight retraction of the two pushers may be made different). The present invention is not limited to this, as long as the magnetic clamp 9 is held in the semi-open and semi-clamped state in the first stage.

[0029] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims. Embodiments obtained by appropriately combining the technical means devised in different embodiments are also included in the technical scope of the present invention.

Explanation of Reference Numerals

[0030] 100 Pushing structure 1 Base 11 Rod body 2a First pusher 2b Second pusher 2c Third pusher 21 Push rod 211 Rod portion 213 Fork 22 Roller 300 Bracket 35 Guide groove 41 Eccentric wheel 42 Connecting rod 43 Shaft 800 Carrier 8 Frame 81 Suspension part 9 Magnetic clamp 91 Clamping plate 911 Magnetic clamping end 912 Other end A1 Opening and closing actuator A2 Opening and closing actuator L1 Upper crossbar L2 Lower crossbar M Driving part P1 Closed position P2 Fully open position S Substrate T Conveying part

Claims

1. An opening and closing actuator driven by a pair of driving parts so as to control the opening and closing of a pair of magnetic clamps, each of the magnetic clamps having a magnetic clamping end and the other end, a pair of brackets on which each of the driving parts is respectively installed, a pair of pushing structures, each pushing structure including a base and a plurality of pushers protruding from the base, the base of each pushing structure being slidably installed on each of the brackets and being driven by each of the driving parts to move toward each other, the plurality of pushers of each pushing structure consisting of a first pusher, a second pusher, and a third pusher, the first pusher and the second pusher respectively corresponding to the magnetic clamping end and the other end of one of the magnetic clamps, and the third pusher corresponding to the other end of the other magnetic clamp, and a pair of pushing structures, each of the driving parts drives each of the bases so as to interlock the plurality of pushers to move with respect to each of the brackets, the first pusher of each pushing structure pushes to clamp the magnetic clamping end of one of the magnetic clamps and opens the other end from the closed position to the fully open position, the second pusher of each pushing structure locks the other end of one of the magnetic clamps between the closed position and the fully open position, and the third pusher of each pushing structure pushes the other end of the other magnetic clamp. The opening and closing actuator is characterized by this.

2. Each of the pushers includes a push rod and a roller, the rod end of the push rod is connected to the base, the other rod end of the push rod extends from the base and the roller is installed thereon, and each of the pushers is pushed by the roller. The opening and closing actuator according to Claim 1 is characterized by this.

3. The push rod includes a rod portion and a fork, one end of the rod portion is connected to the base, the fork is connected to the other end of the rod portion, the roller is rotatably connected to the fork and protrudes from the fork. The opening and closing actuator according to Claim 2 is characterized by this.

4. Each of the brackets is provided with two guide grooves, and two rods are connected to the base of each of the pushing structures. Each rod is slidably inserted into each of the guide grooves. The opening and closing actuator according to claim 1, characterized in that.

5. Including a frame, an upper crossbar, and a lower crossbar, the upper crossbar and the lower crossbar are spanned within the frame, and at least one pair of magnetic clamps are installed. Each of the magnetic clamps has a magnetic clamping end and a carrier having the other end, Two opening and closing actuators arranged corresponding to the upper crossbar and the lower crossbar respectively, Each of the opening and closing actuators, A pair of brackets each provided with a driving part, A pair of pushing structures, each pushing structure includes a base and a plurality of pushers protruding from the base. The base of each pushing structure is slidably installed on each bracket and is driven by each driving part to move towards each other. The plurality of pushers of each pushing structure consists of a first pusher, a second pusher, and a third pusher. The first pusher and the second pusher respectively correspond to the magnetic clamping end and the other end of one of the magnetic clamps. The third pusher is provided with a pair of pushing structures corresponding to the other end of the other magnetic clamp, Each driving part drives the base to interlock a plurality of the pushers to move relative to each bracket. The first pusher of each pushing structure pushes to clamp the magnetic clamping end of one of the magnetic clamps and opens the other end from the closed position to the fully open position. The second pusher of each pushing structure locks the other end of one of the magnetic clamps between the closed position and the fully open position. The third pusher of each pushing structure pushes the other end of the other magnetic clamp. The wet process device is characterized by this.

6. An eccentric wheel and a shaft are further arranged on each bracket of each opening and closing actuator. The driving part drives the eccentric wheel to rotate. A connecting rod is eccentrically connected to the eccentric wheel. The connecting rod is connected to the shaft, and the shaft is connected to the base. The wet process device according to claim 5, characterized in that.

7. Each of the pushing tools includes a push rod and a roller. One end of the push rod is connected to the base, and the other end of the push rod extends from the base and the roller is installed thereon. Each of the pushing tools is characterized in that it pushes to open and close the magnetic clamp by the roller. The wet process apparatus according to claim 5.

8. The push rod includes a rod portion and a fork. One end of the rod portion is connected to the base, the fork is connected to the other end of the rod portion, and the roller is rotatably connected to the fork and protrudes from the fork. The wet process apparatus according to claim 7.

9. Two guide grooves are formed in each of the brackets, and two rods are connected to the base of each of the pushing structures. Each of the rods is slidably inserted into each of the guide grooves. The wet process apparatus according to claim 5.

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