Exhaust gas filtration system

Abstract

To provide an exhaust gas filtration device that improves the efficiency of exhaust gas treatment. [Solution] The system includes an upstream rinsing unit 2 which communicates with a first rinsing space 210 for washing the exhaust gas to be treated and includes a vent pipe 23 for discharging the exhaust gas to be treated; a reaction unit 3 which has a heater 32 extending downward from the top of the reaction space communicating with the vent pipe 23, at least one air supply port 33 for introducing dry air from the top of the reaction space, and a guide pipe 34 installed in the reaction space for guiding the exhaust gas to be treated downward from the top of the reaction space; a downstream rinsing unit 4 which communicates downstream of the reaction unit 3 and washes the exhaust gas to be treated; and an exhaust unit 5 for removing the exhaust gas to be treated.

Description

Technical Field

[0001] The present invention relates to an exhaust gas filtration device, and particularly to an exhaust gas filtration device capable of improving the exhaust gas treatment efficiency.

Background Art

[0002] Referring to FIG. 1, an existing exhaust gas treatment device 1 includes an inlet cleaning unit 11 communicating with a front-stage manufacturing facility (not shown), a reaction unit 12 installed downstream of the inlet cleaning unit 11 and communicating with the inlet cleaning unit 11, an outlet cleaning unit 13 installed downstream of the reaction unit 12 and communicating with the reaction unit 12, an exhaust unit 14 communicating downstream of the outlet cleaning unit 13, and a tank 15 for collecting cleaning wastewater.

[0003] In the reaction unit 12, the heater 121 causes harmful components such as NO x , NF3 in the exhaust gas to react at a high temperature to generate low-hazard components that can be discharged to the outside by the exhaust unit 14.

[0004] Considering the exhaust gas components to be treated, usually, in order to fundamentally reduce the generation of nitrogen oxides in the reaction process and promote the reaction by nitrogen and oxygen in the air, it is considered to introduce compressed dry air (Clean Dry Air, CDA) into the reaction unit 12.

[0005] However, even if the heater 121 is installed inside the reaction unit 12, the introduction of relatively low-temperature (room temperature) compressed dry air substantially affects the temperature distribution of the environment inside the reaction unit 12. Therefore, in a situation where a temperature difference may occur in the reaction environment, if a specific reaction mechanism cannot proceed under an appropriate temperature environment, it will inevitably affect the expected reaction mechanism, and as a result, the treatment efficiency will not meet expectations.

Summary of the Invention

Problems to be Solved by the Invention

[0006] Therefore, the objective of this invention is to provide an exhaust gas treatment device that can overcome temperature differences in the reaction environment and improve processing performance. [Means for solving the problem]

[0007] This invention includes an upstream washing unit, a reaction unit, a downstream washing unit, and an exhaust unit. The upstream rinsing unit includes a first chamber that defines and communicates with a first rinsing space and has an inlet for introducing exhaust gas to be treated, a plurality of first rinsing nozzles installed in the first rinsing space, and a vent pipe that communicates with the first rinsing space and guides and discharges the exhaust gas to be treated downstream. The reaction unit is connected downstream of the upstream washing unit and includes a reaction chamber that defines a reaction space and has an air inlet connected to the bottom of the reaction space for the connection of the vent pipe; a heater installed in the reaction space and extending downward from the top of the reaction space; at least one air inlet for introducing dry air from the top of the reaction space; and a guide pipe installed in the reaction space for guiding the exhaust gas to be treated downward from the top of the reaction space. The downstream rinsing unit is in communication with the downstream of the reaction unit and includes a second chamber that defines a second rinsing space in communication with the guide tube, and a plurality of second rinsing nozzles installed in the second rinsing space. The present invention provides an exhaust gas filtration system in which the exhaust unit is installed downstream of the downstream washing unit and is for removing the exhaust gas to be treated. [Effects of the Invention]

[0008] The effect of this invention is that when dry air is introduced from the top of the reaction space, the temperature in the upper part of the reaction space generally decreases slightly, while the temperature in the lower part increases. As a result, the exhaust gas to be treated, which has been cleaned in the upstream washing unit, is first introduced from the bottom of the reaction space via the vent pipe, reacts in a higher temperature environment first, and then gradually moves upward to react in a lower temperature environment. This allows the exhaust gas to be treated to react in a high-temperature environment immediately after being introduced into the reaction space, when its components are still complex. Subsequently, by coordinating with the introduction of dry air, it is not necessary to maintain an excessively high temperature. Therefore, the environmental distribution within the reaction space can be reliably and appropriately utilized, and the energy consumed by the heater can be saved as much as possible while improving the overall treatment performance. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram illustrating a conventional exhaust gas treatment system.

[0010] [Figure 2] This is a diagram illustrating a first embodiment of the exhaust gas filtration device of the present invention.

[0011] [Figure 3] This figure illustrates a second embodiment of the exhaust gas filtration device of the present invention. [Modes for carrying out the invention]

[0012] To more clearly explain the purpose, technical means, and advantages of the embodiments of the present invention, the technical means in the embodiments of the present invention will be clearly explained below in conjunction with the accompanying drawings of the embodiments of the present invention. It will be clear that the embodiments described are some, and not all, embodiments of the present invention. Typically, the components of the embodiments of the present invention depicted and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the detailed description of the embodiments of the present invention provided below in the accompanying drawings does not constitute any limitation on the scope of protection of the present invention, but merely illustrates selected embodiments of the present invention.

[0013] Before describing this invention in more detail, it should be noted that, where appropriate, reference numerals or the end portion of reference numerals are repeated between figures to indicate corresponding or similar elements, and these may optionally have similar characteristics.

[0014] In the description of this invention, terms indicating directions and positional relationships such as "up," "down," "inside," "outside," "left," "right," "front," and "back" are based on the directions and positional relationships shown in the drawings, or the directions and positional relationships that are habitually used when using the product of this invention, for the purpose of simpler and clearer explanation. They do not teach or suggest that the corresponding devices or apparatus have a specific direction, structure, or operation in a specific direction, and are not limitations to this invention.

[0015] Furthermore, in the description of this invention, terms such as "first," "second," etc., are used solely for the purpose of distinction and do not imply or suggest relative importance.

[0016] The present invention will be described in more detail by the following embodiments, but these embodiments are illustrative and should not be construed as limiting the implementation of the present invention.

[0017] A first embodiment of the exhaust gas filtration device for treating exhaust gas according to the present invention is shown in Figure 2 and is suitable for treating the exhaust gas to be treated.

[0018] This first embodiment includes an upstream washing unit 2, a reaction unit 3 communicating downstream of the upstream washing unit 2, a downstream washing unit 4 communicating downstream of the reaction unit 3, an exhaust unit 5 installed downstream of the downstream washing unit 4, and a tank 9 installed below the upstream washing unit 2 and the downstream washing unit 4 for receiving washing wastewater.

[0019] The upstream flushing unit 2 includes a first chamber 21 that defines a first flushing space 210 and has an inlet 211 suitable for introducing the exhaust gas to be processed and communicating with the first flushing space 210, a plurality of first flushing nozzles 22 installed in the first flushing space 210, a ventilation pipe 23 that communicates with the first flushing space 210 and guides the exhaust gas to be processed downstream for discharge, and an intermediate flushing nozzle 24 installed on the ventilation pipe 23. Note that one or a plurality of intermediate flushing nozzles 24 may be installed, that is, at least one may be installed.

[0020] When the exhaust gas to be processed is introduced from the inlet 211 into the first flushing space 210, the first flushing nozzles 22 spray a cleaning liquid that may specifically be clean water, initially remove the particles in the exhaust gas to be processed, and perform cleaning on some components that are soluble in water. Further, when the exhaust gas to be processed is introduced into the ventilation pipe 23, cleaning can be continued by the intermediate flushing nozzle 24.

[0021] The reaction unit 3 includes a reaction chamber 31 that defines a reaction space 310 and has an air supply port 311 that communicates with the bottom of the reaction space 310 and to which the ventilation pipe 23 is connected, a heater 32 installed in the reaction space 310 and extending downward from the top of the reaction space 310, a plurality of air supply ports 33 installed outside the reaction chamber 31 at intervals from each other to surround the reaction chamber 31 and introducing dry air from the top of the reaction space 310, and a guide pipe 34 installed in the reaction space 310 and guiding the exhaust gas to be processed downward from the top of the reaction space 310.

[0022] Specifically, since the heater 32 is a high-frequency heating coil, a temperature difference occurs at different positions due to the relationship of the direction of the current flow.

[0023] Also, in this embodiment, the flow rate of the introduced dry air is 40 liters per minute to 100 liters per minute according to the batch processing amount of the exhaust gas to be processed.

[0024] Since dry air is introduced from the top of the reaction space 310, the temperature environment within the reaction space 310 generally exhibits a state where the upper part is cooler and the temperature increases towards the bottom. As a result, the exhaust gas to be treated, introduced into the reaction space 310 from the air inlet 311, first reacts in the higher temperature environment at the bottom, and then gradually moves upward, reacting together with the dry air.

[0025] Specifically, taking the case where the exhaust gas to be treated contains nitrous oxide (N2O), it is suitable to react at a temperature of 1050°C to decompose it into more harmless nitrogen and oxygen.

[0026] Furthermore, in this first embodiment, the temperature distribution within the reaction space 310 is appropriately utilized. Compared to the conventional approach of adjusting the reaction state solely by controlling the temperature of the heater 32 when the reaction state is insufficient, this first embodiment optimizes the reaction efficiency by adjusting the airflow path. As a result, the heating power of the heater 32 can be optimally adjusted, which should lead to a relative energy saving effect.

[0027] The downstream rinsing unit 4 includes a second chamber 41 that defines a second rinsing space 410 communicating with the guide pipe 34, and a plurality of second rinsing nozzles 43 installed in the second rinsing space 410.

[0028] These second rinsing nozzles 43 also spray a cleaning solution, specifically clean water, thereby cleaning the exhaust gas that has been treated in the reaction unit 3 before discharge, ensuring that particulate matter and water-soluble components contained in the exhaust gas are thoroughly cleaned and removed.

[0029] The cleaning solution sprayed in the first rinsing space 210 and the second rinsing space 410 all flow to the downstream tank 9 and are collected together. After a certain amount of cleaning solution is stored in tank 9, it is discharged as needed to prepare for the subsequent demand for receiving cleaning solution.

[0030] Specifically, the exhaust unit 5 is configured to discharge exhaust gas that is cleaned by the downstream washing unit 4 via an exhaust system which is a fan, and that complies with the emission standards.

[0031] NO x In response to the primary requirement of reducing NOx in the exhaust gas to be treated, this first embodiment reduces NOx in the exhaust gas to be treated without increasing the heating power of the heater 32, compared to the case where the exhaust gas to be treated is introduced from a low-temperature region in the reaction space 310. x The concentration can be further reduced by 3% to 8%.

[0032] Figure 3 shows a second embodiment of the exhaust gas treatment device of the present invention, the difference between this second embodiment and the first embodiment being that the second embodiment further includes an auxiliary unit 6 for introducing an oxidation-reduction agent.

[0033] The auxiliary unit 6 includes at least one injection port 61 communicating with at least one of the reaction space 310 and the guide tube 34, and in this embodiment, includes a plurality of injection ports 61, each communicating with the reaction space 310, the guide tube 34, the vent tube 23, and the second rinsing space 410. Depending on the requirements of the reactions taking place at each different location, the redox agent introduced through these injection ports 61 is selected from ozone, ammonia, carbon monoxide, hydrogen peroxide, or bleach water.

[0034] Specifically, taking the case where the exhaust gas to be treated contains nitrous oxide (N2O), nitrous oxide reacts at a temperature of 1050°C and is suitable for decomposing into more harmless nitrogen and oxygen. Therefore, in conjunction with the injection port 61 installed in the reaction space 310, carbon monoxide is introduced as a reducing agent to help reduce nitrous oxide to nitrogen and oxygen, thereby promoting the generation of the expected decomposition reaction.

[0035] On the other hand, if the exhaust gas to be treated contains nitrogen trifluoride (NF3), it is appropriate to react it at a temperature of 800°C in the injection port 61 along with the introduction of an oxidizer, and it is expected that this will cause a reaction that produces nitrogen and water.

[0036] This allows for a wider range of treatment options depending on the different characteristics of the exhaust gas to be treated, and further ensures that the exhaust gas to be treated can reliably and completely complete the oxidation-reduction reactions required for treatment in the second embodiment, thereby improving the versatility of the types of exhaust gas to be treated and the flexibility of the operation.

[0037] In addition, this second embodiment can achieve the same energy-saving and processing efficiency improvements as the first embodiment.

[0038] As described above, the exhaust gas treatment device of the present invention appropriately utilizes the temperature environment distribution in which the upper part of the reaction space 310 is relatively cold and the lower part is relatively hot. By performing the reaction requiring high temperature first at the bottom and then treating the exhaust gas to be treated at the top in conjunction with the introduction of dry air, the overall treatment performance can be improved while saving as much energy as possible from the heater 32. Therefore, the objective of the present invention can be reliably achieved.

[0039] While the present invention has been described in relation to what may be considered exemplary embodiments, it is understood that the present invention is not limited to the disclosed embodiments, but is intended to cover a variety of configurations that fall within the broadest spirit and scope of interpretation to encompass all such modifications and equivalent configurations. [Industrial applicability]

[0040] The exhaust gas filtration device of this invention can be used for treating exhaust gas. [Explanation of Symbols]

[0041] 2 Upstream flushing unit 21 First Chamber 210 First rinsing space 211 Inlet 22 First rinse nozzle 23. Vent 24 Intermediate rinsing nozzle 3 Reaction Units 31 Reaction Chamber 310 Reaction space 311 Air supply port 32 Heater 33 Air intake ports 34 Guide tubes 4 Downstream flushing unit 41 Second Chamber 410 Second rinsing space 43. Second rinse nozzle 5. Exhaust Unit 6. Auxiliary Units 61 Injection port 9 tanks

Claims

1. It includes an upstream washing unit, a reaction unit, a downstream washing unit, and an exhaust unit. The upstream rinsing unit includes a first chamber that defines and communicates with a first rinsing space and has an inlet for introducing exhaust gas to be treated, a plurality of first rinsing nozzles installed in the first rinsing space, and a vent pipe that communicates with the first rinsing space and guides and discharges the exhaust gas to be treated downstream. The reaction unit is connected downstream of the upstream washing unit and includes a reaction chamber that defines a reaction space and has an air inlet connected to the bottom of the reaction space for the connection of the vent pipe; a heater installed in the reaction space and extending downward from the top of the reaction space; at least one air inlet for introducing dry air from the top of the reaction space; and a guide pipe installed in the reaction space for guiding the exhaust gas to be treated downward from the top of the reaction space. The downstream rinsing unit is in communication with the downstream of the reaction unit and includes a second chamber that defines a second rinsing space in communication with the guide tube, and a plurality of second rinsing nozzles installed in the second rinsing space. An exhaust gas filtration device wherein the exhaust unit is installed downstream of the downstream washing unit and is for removing the exhaust gas to be treated.

2. The exhaust gas filtration apparatus according to claim 1, wherein the heater of the reaction unit is a high-frequency heating coil.

3. The exhaust gas filtration apparatus according to claim 1, wherein the reaction unit includes a plurality of air supply ports installed outside the reaction chamber, spaced apart from each other and surrounding the reaction chamber.

4. The exhaust gas filtration apparatus according to claim 3, wherein the flow rate of the dry air introduced from the air supply port of the reaction unit is 40 liters per minute to 100 liters per minute.

5. The exhaust gas filtration apparatus according to claim 1, wherein the upstream rinsing unit further includes at least one intermediate rinsing nozzle installed in the vent pipe.

6. It further includes an auxiliary unit for introducing an oxidation-reduction agent, The exhaust gas filtration apparatus according to claim 1, wherein the auxiliary unit includes at least one injection port communicating with at least one of the reaction space and the guide tube.

7. The exhaust gas filtration apparatus according to claim 6, wherein the auxiliary unit further includes a plurality of injection ports communicating with the vent pipe and the second rinsing space.

8. The exhaust gas filtration apparatus according to claim 6 or claim 7, wherein the oxidation-reduction agent introduced from the injection port is selected from ozone, ammonia, carbon monoxide, hydrogen peroxide, or a bleaching agent.

9. The exhaust gas filtration apparatus according to claim 1, further comprising a tank installed below the upstream and downstream washing units for receiving washing wastewater.

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