Inspection fixtures and inspection equipment

Abstract

To provide an inspection jig which can shorten a manufacturing period, and an inspection device using the inspection jig.SOLUTION: An inspection jig 2 is removably connectable to an intermediate member 27 electrically connected to a second substrate 29. The inspection jig includes: a plate-like insulation member 22; a first substrate 23 having a first electrode 231 and a second electrode 232 electrically connected to the first electrode; a conductor 24 electrically connected to a contact terminal 11; and a plate-like storage member 26 attached to the first substrate and having a storage unit 26B penetrating in a thickness direction. The second electrode is exposed through the storage unit. The storage unit can store the intermediate member. The insulation member is provided with a through-hole 221 penetrating in a thickness direction. An end part of the conductor is arranged in the through-hole and the other end part of the conductor is connected to the first electrode.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an inspection tool used for inspecting an object to be inspected. [Background technology]

[0002] An example of a conventional probe card device is disclosed in Patent Document 1.

[0003] The probe card apparatus of the above-mentioned Patent Document 1 functions as an interface between a tester for controlling the test of the DUT and the electronic device. The probe card apparatus has a main subassembly and a probe head.

[0004] The main subassembly includes an interconnect structure, such as a printed circuit board, and a probe head interface. The interconnect structure includes electrical terminals on one side, electrical contacts on the other side, and electrical connections from the electrical terminals to the electrical contacts. The interconnect structure is connected to the electrical terminals by wires.

[0005] The probe head includes a probe insert. The probe insert includes connectors on one side of the probe head and probes extending from the other side of the probe head. Electrical connections connect the connectors to the probes. The number and pattern of connectors correspond to the number and pattern of electrical contacts on the probe head interface. The connectors are thus electrically connected to the electrical contacts. The number and pattern of probes correspond to the number and pattern of terminals on the DUT to be tested. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Special Publication No. 2016-524139 Summary of the Invention [Problem to be solved by the invention]

[0007] The probe head of Patent Document 1 electrically connects a probe corresponding to the terminal pattern of the DUT with a connector corresponding to the electrical contact pattern of the probe head interface. Therefore, it is considered difficult to start manufacturing until the terminal pattern of the DUT is finalized.

[0008] The probe head electrically connects the probes arranged at positions corresponding to the terminals of the DUT with the connectors arranged at positions corresponding to the electrical contacts of the probe head interface, and therefore it is considered that a certain manufacturing period is required to manufacture the probe head.

[0009] Therefore, it is expected that the manufacturing time for the probe card device in Patent Document 1 will be longer.

[0010] In view of the above circumstances, an object of the present invention is to provide an inspection tool that can shorten the manufacturing period, and an inspection device using the same. [Means for solving the problem]

[0011] An exemplary inspection jig of the present invention is detachable from an intermediate member electrically connected to a second substrate. The inspection jig includes a plate-shaped insulating member, a first substrate having a first electrode and a second electrode electrically connected to the first electrode, a conductor electrically connected to a contact terminal, and a plate-shaped housing member attached to the first substrate and having a housing portion penetrating the first substrate in a thickness direction, the second electrode is exposed through the housing portion, the housing portion can accommodate the intermediate substrate, the insulating member has a through hole penetrating the first substrate in a thickness direction, one end of the conductor is disposed in the through hole, and the other end of the conductor is connected to the first substrate. Effect of the Invention

[0012] The exemplary test fixture of the present invention can reduce production time. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic vertical cross-sectional view of a main part of an inspection device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a diagram showing a process of inserting a conducting wire into a through hole of an insulating member. [Diagram 3] FIG. 3 is a diagram showing a process of bending a protruding portion of a conductor wire inserted into a through hole. [Figure 4] FIG. 4 is a diagram showing a step of joining a conductive wire to a first electrode. [Diagram 5] FIG. 5 is a diagram showing a step of disposing a hardening resin in the recesses and through holes of the insulating member. [Figure 6] FIG. 6 is a diagram showing a process of polishing the cut surface of the conductor wire. [Figure 7] FIG. 7 is a diagram showing a process of etching a conductive wire. [Figure 8] FIG. 8 is a diagram showing a process of plating the end face of the conductor wire. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An exemplary embodiment of the present invention will be described below with reference to the drawings. Note that the insulating member 22 described later has a plate shape, and in the drawings, the thickness direction of the insulating member 22 is the X direction, one side of the X direction is indicated as X1, and the other side of the X direction is indicated as X2. Also, the direction perpendicular to the X direction is the Y direction, one side of the Y direction is indicated as Y1, and the other side of the Y direction is indicated as Y2. Also, the direction perpendicular to the X direction and the Y direction is the Z direction, one side of the Z direction is indicated as Z1, and the other side of the Z direction is indicated as Z2. Also, the direction around the central axis J (FIGS. 1 and 2) extending in the X direction of the insulating member 22 is referred to as the "circumferential direction". Also, the radial direction with respect to the central axis J is referred to as the "radial direction".

[0015] <1. Overall configuration of the inspection device> Here, the overall configuration of an inspection device according to an embodiment of the present invention will be described with reference to FIG. 1The following description will be given with reference to Fig. 1. As shown in Fig. 1, an inspection device 5 according to an embodiment of the present invention performs electrical inspection of an inspection object 10. In Fig. 1, one X1 side is the lower side, and the other X2 side is the upper side. Moreover, one Y1 side is the left side of the paper, and the other Y2 side is the right side of the paper. Moreover, one Z1 side is the front side of the paper, and the other Z2 side is the back side of the paper.

[0016] The inspection object 10 is, for example, a semiconductor wafer in which a plurality of circuits are formed on a semiconductor substrate such as silicon. The semiconductor wafer is diced into individual semiconductor chips each having each of the above-mentioned circuits. Note that the inspection object 10 can be, in addition to a semiconductor wafer, an electronic component such as a semiconductor chip, a CSP (Chip size package), or a semiconductor element.

[0017] Furthermore, the inspection object 10 may be a substrate. In this case, the inspection object 10 may be a substrate such as a printed wiring board, a glass epoxy board, a flexible board, a ceramic multilayer wiring board, a package board for a semiconductor package, an intermediate member board, a film carrier, or the like, or may be an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, or a touch panel display, or an electrode plate for a touch panel.

[0018] Also, a product using a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) may be used as the inspection target 10. In EMIB, a small silicon substrate called a silicon bridge is embedded in a package resin substrate, and fine, high-density wiring is formed on the surface of the silicon bridge, so that adjacent silicon dies are closely mounted on the package resin substrate.

[0019] The inspection device 5 includes an inspection tool 2 and an inspection processing section (scanner) 3. In the present embodiment, as an example, the number of inspection processing sections 3 is six. However, the number of inspection processing sections 3 may be a plural number other than six, or may be a single unit.

[0020] The inspection jig 2 has a probe head 1. The probe head 1 has a plurality of contact terminals 11 and a support member 12. That is, the inspection jig 2 includes the contact terminals 11.

[0021] The contact terminal 11 is formed in a rod shape extending in the vertical direction. In the present embodiment, as an example, the contact terminal 11 has a tubular body 111, a first conductor (plunger) 112, and a second conductor (plunger) 113. The tubular body 111 is formed in a cylindrical shape, and is formed using a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm, for example. In addition, it is preferable that a conductive layer such as gold plating is formed on the inner peripheral surface of the tubular body 111. Furthermore, the outer peripheral surface of the tubular body 111 may be insulated and coated as necessary.

[0022] The first conductor 112 and the second conductor 113 are formed of a conductive material such as a palladium alloy. The first conductor 112 is inserted into the cylindrical body 111 from the one X1 side, and the one X1 side end of the inserted portion is fixed to the cylindrical body 111 by press-fitting or the like. With the first conductor 112 fixed to the cylindrical body 111, a part of the first conductor 112 becomes a protruding portion that protrudes from the cylindrical body 111 to the one X1 side. One side end of the protruding portion becomes one side end 11A of the contact terminal 11. One side end 11A can come into contact with an inspection point 10A of the inspection object 10.

[0023] The second conductor 113 is inserted into the cylindrical body 111 from the other X2 side, and the other X2 side end of the inserted portion is fixed to the cylindrical body 111 by press-fitting or the like. With the second conductor 113 fixed to the cylindrical body 111, a part of the second conductor 113 becomes a protruding portion that protrudes from the cylindrical body 111 to the other X2 side. The other side end of the protruding portion becomes the other side end 11B of the contact terminal 11.

[0024] The cylindrical body 111 has a spring part in the middle in the vertical direction. This allows the cylindrical body 111 to expand and contract in the vertical direction. In addition, a conductive path is formed through the first conductor 112, the cylindrical body 111, and the second conductor 113.

[0025] The support member 12 supports a plurality of contact terminals 11. More specifically, for example, a through hole penetrating the support member 12 in the up-down direction is formed, and the contact terminal 11 is accommodated in the through hole. In this case, due to the dimensional relationship between the contact terminal 11 and the through hole, when the contact terminal 11 is inserted into the through hole, the contact terminal 11 is prevented from falling off to the one X1 side.

[0026] In addition to the probe head 1, the inspection jig 2 has a first accommodating member 21, an insulating member 22, a first substrate 23, a plurality of conductive wires 24, a fixed portion 25, a second accommodating member 26, an intermediate member 27, a third accommodating member 28, and a second substrate 29.

[0027] The first storage member 21 ,above The first housing member 21 has a plate shape having a rectangular shape as an external shape when viewed from below, and is made of a metal such as aluminum. The first housing member 21 has a first housing portion 21A that is recessed toward the other X2 side. The first housing portion 21A houses an insulating member 22.

[0028] The insulating member 22 is a plate-like member having a recess 22A recessed toward the X1 side, and is made of an insulating material. The insulating member 22 is made of, for example, ceramic, resin, or the like as an insulating material. As an example of the resin, Sumika Super (registered trademark) can be used.

[0029] That is, the inspection jig 2 includes a plate-shaped insulating member 22 having a recess 22A.

[0030] The insulating member 22 is provided with a through hole 221A penetrating the bottom 221 of the recess 22A. A plurality of through holes 221A are provided, and are formed to match the positions of the contact terminals 11, for example.

[0031] One end 24A of the conductor 24 is inserted into the through hole 221A. The conductor 24 is formed of, for example, an enameled wire. The enameled wire is formed by covering a copper wire with an insulating coating. That is, the conductor 24 has an insulating coating. This makes it possible to prevent the conductors 24 from shorting out even if the pitch between the through holes 221A is narrow and the conductors 24 are likely to come into contact with each other.

[0032] The fifth electrode E5 is formed including an end face of one end 24A of the conductor 24. The fifth electrode E5 is formed on one side surface 221S1 of the bottom 221. The support member 12 is fixed to one side surface 221S1 of the bottom 221 while the other end of the second conductor 113, i.e., the other end 11B of the contact terminal 11, is brought into contact with the fifth electrode E5. In this state, the probe head 1 is disposed on one X1 side of the insulating member 22. As a result, the spring portion of the cylindrical body 111 is compressed in the vertical direction, and the other end 11B is pressed against the fifth electrode E5 by the elastic force of the spring portion. As a result, the conductive state between the contact terminal 11 and the fifth electrode E5 is stabilized. That is, the inspection jig 2 includes a conductor 24 electrically connected to the contact terminal 11.

[0033] In this manner, one end 24A of one conductor 24 is inserted into one through hole 221A, and one contact terminal 11 is electrically connected to the one conductor 24. That is, the number of through holes 221A is the same as the number of conductors 24 and the number of contact terminals 11.

[0034] The first substrate 23 is disposed on the other side surface 21S of the first housing member 21. The first substrate 23 is disposed on the other X2 side of the insulating member 22. No. The substrate 23 has, for example, a rectangular shape when viewed from above. No. First substrate 23 has substrate through hole 23A penetrating in the vertical direction at the center. That is, first substrate 23 has substrate through hole 23A penetrating insulating member 22 in the thickness direction.

[0035] No.On the other side surface 23S of the first substrate 23, a first electrode region 231R in which a plurality of first electrodes 231 are arranged is arranged in a circumferential direction around the substrate through-hole 23A. Check The inspection jig 2 includes a first substrate 23 having first electrodes 231. The first electrode regions 231R are formed in a shape obtained by removing a sector shape from a triangle. A group of the first electrodes 231 arranged in each of the first electrode regions 231R is a plurality of inspection processing units provided. of 3 In this embodiment, since the number of the inspection processing units 3 is six, the number of the first electrode regions 231R is also six.

[0036] Also, Fig. 1 As shown in FIG. 1, the first housing member 21 has a through hole 21C penetrating in the vertical direction at the center. The board through hole 23A is connected to the other X2 side of the through hole 21C. The conductor 24 is drawn out from the other side surface 221S2 of the bottom 221 to the other X2 side, and is connected to the first electrode 231 through the through hole 21C and the board through hole 23A. That is, the other end 24B of the conductor 24 is connected to the first electrode 231. As a result, the contact terminal 11 is electrically connected to the first electrode 231 through the conductor 24. In other words, the conductor 24 is disposed in the board through hole 23A. The conductor 24 extends radially inward from the first electrode 231 to the board through hole 23A in a plan view seen from the one X1 side. As a result, the pitch of the contact terminals 11 electrically connected to the conductor 24 can be narrowed, and the narrow pitch of the inspection points 10A of the inspection object 10 can be accommodated.

[0037] Here, Fig. 1 to 2, first substrate 23 is disposed on the recess 22A side of insulating member 22, and has a portion that overlaps with insulating member 22 when viewed in the thickness direction of insulating member 22. In the case of such a configuration, in a plan view viewed from the X direction (the thickness direction), the distance between the position of through hole 221A and the position of first electrode 231 is shorter than when first substrate 23 does not overlap with insulating member 22. For this reason, the length of conductive wire 24 can be shortened, and the electrical resistance value of the conductive path can be reduced.

[0038] Here, the number of first electrodes 231 on the first substrate 23 is greater than the number of conducting wires 24. That is, there are first electrodes 231 to which the other ends 24B are not connected. This allows the first substrate 23 to be standardized even if the type of the inspection object 10 and therefore the type of the probe head 1 are changed, and the manufacturing period of the inspection jig 2 can be shortened.

[0039] The other end 24B of the conducting wire 24 is not limited to being connected to some of the first electrodes 231 on the first substrate 23 as described above, but may be connected to all of the first electrodes 231 on the first substrate 23. In other words, the other end 24B of the conducting wire 24 is connected to the first electrode 231.

[0040] Fixed portion 25 is accommodated in recess 22A with a portion thereof placed on the other side surface 221S2 of bottom portion 221. Fixed portion 25 is a molded portion formed from a curable resin as described below, and has a function of fixing a portion of conductive wire 24 to insulating member 22.

[0041] A manufacturing method for the configuration including the insulating member 22, the first substrate 23, the conductive wire 24, the fixed portion 25, and the fifth electrode E5 will be described later.

[0042] No. On the other side surface 23S of the first substrate 23, a second electrode region 232R is arranged on one Y1 side in the Y direction and the other Y2 side in the Y direction of the first electrode region 231R, where three second electrodes 232 are arranged in the Z direction. of 3 Electrically connected to each Check Since the number of the inspection processing units 3 is six, the number of the second electrode regions 232R is also six. 4 3. The first electrode 231 is electrically connected to the first electrode 231 by wiring (not shown) disposed inside.

[0043] That is, the first substrate 23 has a second electrode 232 electrically connected to the first electrode 231 and disposed on the other side surface 23S of the first substrate 23. This facilitates electrical connection between the first substrate 23 and the inspection processing unit 3 disposed on the other X2 side of the first substrate 23.

[0044] Second storage member 26 , on top The second housing member 26 has a plate shape having a rectangular outer shape when viewed from below, and is made of a metal such as aluminum. The second housing member 26 has a hole 26A penetrating in the thickness direction at the center. The first electrode region 231R is exposed upward through the hole 26A when viewed from above. This allows the conductive wire 24 to be disposed inside the hole 26A.

[0045] The second housing member 26 has three second housing portions 26B arranged in the Z direction on each of the Y1 side and the Y2 side in the Y direction. The second housing portions 26B are holes penetrating in the thickness direction (X direction). The second electrode region 232R is exposed upward through the second housing portions 26B when viewed from above.

[0046] The intermediate member 27 is ,one The portion protrudes from the third accommodating member 28 to the one X1 side, and has, for example, a substantially rectangular shape as an outer diameter when viewed in the up-down direction.

[0047] figure 1 to As shown, the intermediate member 27 has a connecting member 271. The connecting member 271 has, for example, a spring member 2711 that is expandable and contractable in the vertical direction, a first plunger 2712, and a second plunger 2713. The first plunger 2712 is fixed to one end 2711A of the spring member 2711. The second plunger 2713 is fixed to the other end 2711B of the spring member 2711. The spring member 2711, the first plunger 2712, and the second plunger 2713 are formed of a conductive material.

[0048] Two third housing members 28 are arranged side by side in the Y direction. Each third housing member 28 has a recess 28A recessed toward one X1 side, and is formed of a metal containing, for example, aluminum. Three recesses 28A are arranged side by side in the Z direction. Each second substrate 29 is accommodated in its corresponding recess 28A. That is, six second substrates 29 are provided. The third housing member 28 has a through hole 28B connected to one X1 side of the recess 28A.

[0049] A third electrode 291 is formed on one side surface 29S1 of the second substrate 29. The intermediate member 27 is fixed to the third housing member 28 while the second plunger 2713 is brought into contact with the third electrode 291 in the through hole 28B. This causes the spring member 2711 to be compressed in the vertical direction, and the elastic force of the spring member 2711 presses the second plunger 2713 against the third electrode 291. Therefore, the conductive state between the second plunger 2713 and the third electrode 291 is stabilized.

[0050] Then, each intermediate member 27 is inserted into the corresponding second housing portion 26B, and the third housing member 28 is fixed to the second housing member 26 while the first plunger 2712 is brought into contact with the second electrode 232. As a result, the spring member 2711 is compressed in the vertical direction, and the first plunger 2712 is pressed against the second electrode 232 by the elastic force of the spring member 2711. Therefore, the conductive state between the first plunger 2712 and the second electrode 232 is stabilized.

[0051] Also ,So A fourth electrode region 292R in which a plurality of fourth electrodes 292 are arranged is disposed on the other side surface 29S2 of each of the second substrates 29. In each of the substrates 29 on one side Y1 in the Y direction, the fourth electrode region 292R is disposed on one side Y1 in the Y direction. In each of the substrates 29 on the other side Y2 in the Y direction, the fourth electrode region 292R is disposed on the other side Y2 in the Y direction.

[0052] The group of fourth electrodes 292 arranged in each of the fourth electrode regions 292R is a plurality of inspection processing units. of 3 Electrically connected to each CheckSince the number of inspection processing units 3 is six, the number of fourth electrode regions 292R is also six. The fourth electrodes 292 contact terminals 3A of the inspection processing units 3 (see FIG. 1).

[0053] The third electrode 291 and the fourth electrode 292 are electrically connected by wiring inside the substrate portion of the second substrate 29. The pitch between the fourth electrodes 292 is determined by the pitch between the terminals 3A of the inspection processing unit 3, and is wider than the pitch between the third electrodes 291.

[0054] That is, the inspection jig 2 includes a connection member 271 extending in the thickness direction of the insulating member 22, and a second substrate 29. The third electrode 291 is disposed on one side surface 29S1 of the second substrate 29. The fourth electrode 292 is disposed on the other side surface 29S2 of the second substrate 29. The third electrode 291 and the fourth electrode 292 are electrically connected. The pitch between the fourth electrodes 292 is wider than the pitch between the third electrodes 291. One end portion 271A of the connection member 271 contacts the second electrode 232. The other end portion 271B of the connection member 271 contacts the third electrode 291.

[0055] This allows the pitch between the second electrodes 232 to be converted into the pitch between the fourth electrodes 292 for connection to the inspection processing unit 3. Also, the connection member 271 has a spring portion 2711 that is compressible in the thickness direction. This allows the conductive state between the second electrodes 232 and the third electrode 291 to be stabilized.

[0056] With the above-mentioned configuration, the contact terminal 11 is electrically connected to the inspection processing unit 3 via the fifth electrode E5, the conductive wire 24, the first electrode 231, the second electrode 232, the connecting member 271, the third electrode 291, and the fourth electrode 292.

[0057] 1, when testing the test object 10, one end 11A of the contact terminal 11 is brought into contact with the test point 10A of the test object 10. At this time, the spring portion of the cylindrical body 111 is compressed in the vertical direction, so that the elastic force of the spring portion presses the one end 11A against the test point 10A. This stabilizes the electrical continuity between the one end 11A and the test point 10A.

[0058] When inspecting the inspection object 10, the inspection point 10A is electrically connected to the inspection processing unit 3. The inspection processing unit 3 sequentially outputs inspection signals to the inspection points 10A via the contact terminals 11, and in response, the inspection signals are acquired from the inspection points 10A. Based on these inspection signals, the inspection processing unit 3 detects the presence or absence of continuity between the inspection points 10A, and inspects the inspection object 10 for the presence or absence of a break or short circuit, etc.

[0059] In addition, if the contact terminal 11 is electrically connected directly to the electrode of the second substrate 29 via the conductor 24, the second substrate 29 needs to be replaced every time the specifications of the test object 10 are changed. In contrast, in this embodiment, even if the specifications of the test object 10 are changed, it is only necessary to replace the part having the probe head 1, the first housing member 21, the insulating member 22, the first substrate 23, the conductor 24, the fixing member 25, and the second housing member 26, and it is not necessary to replace the part having the intermediate member 27, the third housing member 28, and the second substrate 29. Therefore, the six large-sized second substrates 29 can be made common, and it is only necessary to replace the small-sized first substrate 23, so that the running cost can be reduced. In particular, since the pitch between the third electrodes 291 is narrower than the pitch between the fourth electrodes 292, the pitch between the connection members 271 and the pitch between the second electrodes 232 can be narrowed, and the size of the first substrate 23 can be made smaller than the size of the six second substrates 28, so that the running cost can be reduced.

[0060] The contact terminal 11 may be a wire-shaped inspection contact having bendable elasticity. The contact terminal 11 is supported by the support member 12 in a position tilted from the vertical direction. Then, the contact terminal 11 is bent by bringing the inspection point 10A into contact with one side end portion 11A of the contact terminal 11. By supporting the contact terminal 11 at an angle, the bending direction can be determined. By using the above-mentioned wire-shaped inspection contact, it becomes possible to handle the inspection of a more highly integrated inspection object 10.

[0061] <2. Manufacturing method of electrical connection configuration between contact terminal and first substrate> Next, a manufacturing process for electrically connecting the contact terminals 11 in the inspection jig 2 to the first substrate 23 will be described with reference to FIG. 2 ~Figure 8 This will be described with reference to the following.

[0062] In addition, Fig. 2 ~Figure 8 This step is performed with the insulating member 22 and the first substrate 23 accommodated in the first accommodation member 21. That is, the inspection jig 2 includes the accommodation member 21 having the first accommodation portion 21A that is configured as a recess and accommodates the insulating member 22. This makes it easy to position the insulating member 22 for connecting the conductive wire 24 and the first electrode 231, as described below.

[0063] First, the type of the probe head 1 is changed, and the arrangement position of the contact terminals 11 changes for each type. When the type of the probe head 1 is decided, the through holes 221A are formed at positions corresponding to the arrangement of the contact terminals 11 in the bottom 221 of the insulating member 22. The through holes 221A may be formed in a matrix, and the through holes 221A may be used at positions that correspond to the positions of the contact terminals 11. That is, the number of the through holes 221A is greater than the number of the contact terminals 11. This makes it possible to prepare the insulating member 22 having the matrix-shaped through holes 221A in advance, and eliminates the need to manufacture the insulating member 22 after the type of the probe head 1 is decided. In addition, since the thickness of the bottom 221 is thin, it is easy to form the through holes 221A. Here, FIG. 2 As shown in FIG. 1, the through hole 221A has an opening 221A1 on one side surface 221S1 of the bottom 221, and an opening 221A2 on the other side surface 221S2 of the bottom 221. 2 As shown in FIG. 1, the conductive wire 24 is inserted into the through hole 221A from the opening 221A2 side.

[0064] Next, the protruding portion 24T of the conductive wire 24 protruding from the opening 221A1 is 3 This makes it possible to prevent the conductive wire 24 from coming out of the through hole 221A.

[0065] And, Fig. 4 2, a step is performed in which the joint portion 24S located midway along the portion of the conductive wire 24 drawn out from the opening 221A2 is joined to the first electrode 231 of the first substrate 23. Here, the joining is performed using a wire bonding technique. For example, ultrasonic vibration is applied to the joint portion 24S while pressing the joint portion 24S against the first electrode 231. This generates friction on the contact surface between the joint portion 24S and the first electrode 231, and the joint portion 24S and the first electrode 231 are joined by frictional heat. At this time, the joint portion 24S and the first electrode 231 are electrically connected.

[0066] In addition, Fig. 4 The first electrode 231 shown in FIG. 2 is a film-like pad protruding from the substrate portion 230 of the first substrate 23, but is not limited to this and may be a pad disposed inside the substrate portion 230, etc.

[0067] Thereafter, the side of the joint between the conducting wire 24 and the first electrode 231 that is not on the through hole 221A side is cut off from the joint.

[0068] Then, a fixing material is poured into the area surrounding the opening 221A2 in the recess 22A. The fixing material is a thermosetting resin or a photosetting resin. The fixing material is liquid before hardening. The fixing material poured into the recess 22A flows into the gap between the through hole 221A and the conductive wire 24, and then reaches one side surface 221S1 of the bottom 221. The fixing material in the recess 22A hardens by the supply of heat or light, and becomes a first fixing member 25A (see FIG. 5 By applying heat or light, the fixing member in the gap between the through hole 221A and the conductive wire 24 hardens and becomes a second fixing member 25B (see FIG. 5 By applying heat or light, the fixing member on one side surface 221S1 hardens and becomes a third fixing member 25C (see FIG. 5 (see reference).

[0069] After the first fixing member 25A, the second fixing member 25B, and the third fixing member 25C are formed, the bent protrusion 24T of the conductive wire 24 (see FIG. 5 The cut surfaces of the conductive wires 24 and the third fixing members 25C are then polished. 6 As shown in FIG. 1, the end surface 241 of the conductive wire 24 after polishing is flush with one side surface 221S1 of the bottom portion 221. 6 In the state shown in FIG. 1, fixing member 25 is formed from first fixing member 25A and second fixing member 25B.

[0070] In the above, the third fixing member 25C is removed by grinding, but the first fixing member 25A may be removed without removing the third fixing member 25C, or both the first fixing member 25A and the third fixing member 25C may be removed. 6 In the embodiment, both first fixing portion 25A and second fixing member 25B are provided, but either first fixing portion 25A or second fixing member 25B may be removed.

[0071] Next, Figure 7 2, an etching process is performed to position end surface 24TS of conductive wire 24 on the inner side of through hole 221A relative to opening 221A1. Then, such end surface 24TS is plated with nickel to form a first metal layer. The tip of the first metal layer is positioned so as to protrude beyond opening 221A1. The tip of the first metal layer is then polished to be flush with one side surface 221S1.

[0072] Next, the first metal layer is plated with gold to form a second metal layer. 8As shown in FIG. 1, one end 24A of the conductor 24 is disposed in the through hole 221A, and a first metal layer M1 and a second metal layer M2 are laminated in this order on one side X1 of an end face 24TS of the one end 24A. A fifth electrode E5 is formed from the end face 24TS, the first metal layer M1, and the second metal layer M2. The other end 11B of the contact terminal 11 is in contact with the second metal layer M2. That is, the contact terminal 11 is electrically connected to the end face 24TS via the second metal layer M2 and the first metal layer M1. That is, the contact terminal 11 is electrically connected to the conductor 24.

[0073] Alternatively, the fifth electrode E5 may be formed from the end surface 24TS and the first metal layer M1 without forming the second metal layer M2. Alternatively, the fifth electrode E5 may be formed from the end surface 24TS and the second metal layer M2 without forming the first metal layer M1. Alternatively, the fifth electrode E5 may be formed by the end surface 24TS without forming the first metal layer M1 and the second metal layer M2.

[0074] Alternatively, at least one of the first metal layer M1 and the second metal layer M2 may be formed on the end surface 241 (FIG. 6 Alternatively, the first metal layer M1 and the second metal layer M2 may not be formed on the end surface 241 by not performing the etching process. 5 In this state, the protruding portion 24T may be cut off, and the cut surface may be used as the fifth electrode E5 without being polished.

[0075] Thus, according to this embodiment, when the arrangement position of the contact terminal 11 is determined, the through hole 221A is formed in the insulating member 22 in accordance with the position of the contact terminal 11, and one end of the conductor 24 is arranged in the through hole 221A while the other end of the conductor 24 is connected to the first board 23. The first board 23 and the insulating member 22 can be prepared in advance. Furthermore, the processing of the insulating member 22 is sufficient to form the through hole 221A. Furthermore, since the thickness of the bottom part 221 of the insulating member 2 is thin by providing the recess 22A, the through hole 221A is easily formed. Therefore, the manufacturing period of the inspection jig 2 after the position of the inspection point 10A of the inspection object 10 and the arrangement position of the contact terminal 11 are determined can be shortened. Note that, as described above, if the insulating member 22 in which the matrix-shaped through holes 221A are formed can be prepared in advance, the manufacturing period can be further shortened.

[0076] In particular, the use of wire bonding technology for connecting the conductor 24 and the first electrode 231 makes it easy to automate the connection. The number of conductors 24 can reach several thousand, and in that case, connecting them manually by soldering would take a very long time, so automating the connection can significantly improve manufacturing efficiency.

[0077] In this manner, the inspection device 5 according to this embodiment includes the inspection jig 2 and the inspection processing section 3 electrically connected to the first electrode 231. This makes it possible to improve the manufacturing efficiency of the inspection jig used to electrically connect the inspection object 10 and the inspection processing section 3.

[0078] Furthermore, inspection jig 2 includes fixing member 25 that is disposed in at least one of recess 22A and through hole 221A and fixes a part of conductor 24 to insulating member 22. This makes it possible to prevent conductor 24 from coming off insulating member 22.

[0079] Furthermore, fixing member 25 contains a thermosetting resin or a photocurable resin. Since the thermosetting resin and the photocurable resin are liquid before curing, they can be easily poured into the gap between through hole 221A and conductive wire 24. Furthermore, when fixing member 25 is disposed in recess 22A, it is possible to prevent the liquid thermosetting resin or the photocurable resin from leaking out of insulating member 22.

[0080] Fixing member 25 is not limited to the above, and may contain a thermoplastic resin or an adhesive. Fixing member 25 is not essential, and conducting wire 24 may be fixed in through hole 221A by press-fitting.

[0081] Moreover, an end surface 24TS of one end 24A of the conductor 24 is located inside the through hole 221A. A first metal layer M1 is provided on the end surface 24TS. The first metal layer M1 is made of, for example, nickel, and has a higher hardness than the copper conductor of the conductor 24, which is an enameled wire. That is, the first metal layer M1 has a higher hardness than the conductor 24. Since the first metal layer M1 is formed by plating inside the through hole 221A, it is easy to increase the thickness of the first metal layer M1. When the thickness of the first metal layer M1, which has a higher hardness than the conductor 24, is increased, it is possible to suppress the first metal layer M1 from being worn away and the conductor 24 from being exposed.

[0082] Furthermore, the second metal layer M2 is connected to the first metal layer M1, whereby the surface of the first metal layer M1 is covered with the second metal layer M2, thereby making it possible to suppress corrosion of the first metal layer M1.

[0083] <3.Other> Although the embodiment of the present invention has been described above, various modifications of the embodiment are possible within the scope of the spirit of the present invention. [Industrial Applicability]

[0084] The present invention can be used for electrical testing of various test objects. [Explanation of symbols]

[0085] 1. Probe head 11...Contact terminal 111... Cylindrical body 112...First conductor 113...Second conductor 12 Support member 2. Inspection fixture 21... First housing member 22 Insulating member 221...Bottom 221A...Through hole 22A Recess 23... First board 231...1st electrode 232...2nd electrode 24...conductor 25... Fixing member 26...Second housing member 27... Intermediate member 271... Connection member 28...Third housing member 29...Second board 291...Third electrode 292...4th electrode 3. Inspection processing section 5. Inspection equipment 10. Inspection subject E5...5th electrode M1...first metal layer M2...Second metal layer J...center axis

Claims

1. An inspection jig that is detachable from an intermediate member electrically connected to the second substrate, A plate-shaped insulating member; a first substrate having a first electrode and a second electrode electrically connected to the first electrode; A conductor wire electrically connected to the contact terminal; a plate-shaped housing member attached to the first substrate and having a housing portion penetrating therethrough in a thickness direction; The second electrode is exposed through the housing portion, The intermediate member can be accommodated in the accommodation portion, The insulating member has a through hole penetrating therethrough in a thickness direction, One end of the conductive wire is disposed in the through hole, The other end of the conducting wire is connected to the first electrode.

2. Further comprising a plate-shaped plate member, The inspection jig according to claim 1 , wherein the first substrate is located between the housing member and the plate member.

3. The inspection tool according to claim 1 , wherein the outer shape of the container member is rectangular.

4. The inspection tool according to claim 1 , wherein the container member is configured to cover the first substrate.

5. The inspection jig according to claim 2 , wherein the plate member is configured to cover the first substrate.

6. The inspection tool according to claim 1 , further comprising a fixing member disposed in the through hole for fixing a portion of the conducting wire to the insulating member.

7. The inspection tool according to claim 6 , wherein the fixing member includes a thermosetting resin or a photosetting resin.

8. an end surface of the one end of the conducting wire is located inside the through hole; A first metal layer is provided on the end surface, The inspection jig according to claim 1 , wherein the first metal layer has a harder hardness than the conductive wire.

9. The test fixture of claim 8 , wherein a second metal layer is connected to the first metal layer.

10. The inspection tool according to claim 1 , further comprising a contact terminal electrically connected to the conductive wire.

11. Further comprising a connection member extending in the thickness direction, The inspection jig according to claim 1 , wherein the connection member has a spring portion that is compressible in the thickness direction.

12. A connection member extending in the thickness direction; The second substrate; Further equipped with a third electrode is disposed on one side surface of the second substrate; a fourth electrode is disposed on the other side surface of the second substrate; the third electrode and the fourth electrode are electrically connected to each other; The pitch between the fourth electrodes is wider than the pitch between the third electrodes, One end of the connection member contacts the second electrode, The inspection jig according to claim 1 , wherein the other end of the connection member contacts the third electrode.

13. The inspection jig according to any one of claims 1 to 12, an inspection processing unit electrically connected to the first electrode.

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