Flow Sensor Chip

Abstract

To provide a flow sensor chip for mitigating the effect of a dimensional variation of a cavity formed in a substrate upon the accuracy of flow rate detection.SOLUTION: The flow sensor chip comprises: a substrate on which a cavity having an opening is formed; a membrane arranged so as to cover the opening; a heater provided to the membrane; a first thermopile and a second thermopile provided to the membrane and arranged across the heater; and a heat conducting member that serves as a conduction path of heat between the substrate and the membrane. The first hot junction point and first cold junction point of a thermocouple that the first thermopile has and the second hot junction point and second cold junction point of a thermocouple that the second thermopile has are arranged at a position on the substrate surface that overlaps the opening as seen from the normal direction. The heat conducting member has a first heat conducting member that serves as a conduction path of heat between the first cold junction point and the substrate and a second heat conducting member that serves as a conduction path of heat between the second cold junction point and the substrate.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a flow sensor chip. [Background technology]

[0002] Conventionally, flow sensors have been devised to detect the flow rate and flow velocity of gas. There are various types of flow sensors, and one type known is the hot wire type flow sensor. The hot wire type flow sensor has a heater in the center of the sensor chip, and an upstream thermocouple and a downstream thermocouple are arranged on either side of the heater. The temperature distribution of the atmosphere heated by the heater is biased according to the flow rate of the gas flowing over the surface of the sensor chip, and the flow rate of the gas is detected from the electromotive force difference between the upstream thermocouple and the downstream thermocouple (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-122747 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the case of the detection device shown in Fig. 1 of Patent Document 1, the hot junction of the upstream thermocouple, the hot junction of the downstream thermocouple, and the heater are located above the opening of the cavity provided in the substrate, so heat transfer via the substrate is unlikely to occur. On the other hand, the cold junction of the upstream thermocouple and the cold junction of the downstream thermocouple are located above the region where the film covering each thermocouple is in contact with the substrate. In this case, the temperatures of the two cold junctions are likely to be maintained constant via the substrate.

[0005] However, it is difficult to completely eliminate the dimensional error in the process of the shape and position of the cavity provided in the substrate. Therefore, if the dimensional error is not within the allowable range, the positions of the hot junction and the cold junction with respect to the cavity will not be symmetrical between the upstream thermocouple and the downstream thermocouple. In addition, if a temperature distribution occurs in the substrate itself, the cold junctions present inside the film in the region overlapping with the substrate when viewed from the normal direction will be affected by the heat from the substrate differently, and the cold junctions will be multiplied by the temperature difference.

[0006] As a result, even if there is no gas flow, the temperature distribution of the atmosphere heated by the heater is not symmetrical due to the influence of the substrate, and a difference in electromotive force occurs between the upstream and downstream thermocouples, which may reduce the accuracy of gas flow rate detection. Also, variation in the cavity dimensions may cause variation in the flow rate detection results.

[0007] The present invention has been made in consideration of the above-mentioned problems, and its purpose is to provide a flow sensor chip of a new configuration that mitigates the effect that variations in the dimensions of a cavity formed in a substrate have on the flow rate detection accuracy. [Means for solving the problem]

[0008] In order to solve the above problems, one aspect of the present invention is a flow sensor chip including a substrate in which a cavity having an opening is formed, a membrane arranged on the surface of the substrate so as to cover the opening, a heater provided on the membrane, a first thermopile and a second thermopile arranged on the membrane and sandwiching the heater, and a heat conductive member serving as a heat conduction path between the substrate and the membrane. In this flow sensor chip, the first hot junction and the first cold junction of the thermocouple of the first thermopile, and the second thermopile are connected to each other. The second hot junction and the second cold junction of the thermocouple of the filter are arranged at positions overlapping with the opening when viewed from the normal direction of the substrate surface. The thermally conductive member has a first thermally conductive member that serves as a thermal conduction path between the first cold junction and the substrate, and a second thermally conductive member that serves as a thermal conduction path between the second cold junction and the substrate.

[0009] According to this embodiment, the first cold junction and the second cold junction are arranged at a position overlapping with the opening when viewed from the normal direction of the substrate surface. That is, the first cold junction and the second cold junction are not included in the region where the substrate and the membrane are in contact with each other, but in the region where the membrane faces the cavity, not the substrate. Therefore, even if the dimensions (shape) of the cavity vary and the area or position of the region where the substrate and the membrane overlap deviates from the desired value, the difference in the influence (for example, the difference in cooling effect) of each cold junction that is located away from the substrate is mitigated. On the other hand, the cooling of each cold junction through the substrate is carried out by the first heat conductive member that serves as the heat conduction path between the first cold junction and the substrate, and the second heat conductive member that serves as the heat conduction path between the second cold junction and the substrate, so that the temperatures of the first cold junction and the second cold junction can be made almost the same as in the conventional case. Furthermore, even if a temperature distribution occurs within the substrate, the first cold junction and the second cold junction are not easily affected by the temperature distribution because heat is not directly transferred from the substrate to the first cold junction and the second cold junction.

[0010] Here, the substrate is preferably made of a material that is small in shape change due to temperature, such as single crystal silicon or ceramics. The substrate may be made of a material that is easy to process with high precision by a semiconductor process. For example, when the cavity is formed by etching in a semiconductor process, the use of single crystal silicon makes it easy to control the shape of the cavity. The cavity is preferably formed inside the substrate and has an opening on at least one surface of the substrate. The cavity may have openings on both surfaces of the substrate so as to penetrate the substrate. The membrane may be made of any material that can contain the heater or thermopile, but is preferably made of an insulating thin film that can be formed by a semiconductor process, taking into account the current flowing through the heater or thermopile. The heater or thermopile provided inside the membrane may not be completely enclosed in its entirety, and may be partially exposed to the outside or joined to other components.

[0011] The first heat conducting member may be provided on the surface of the membrane opposite to the substrate side, and may extend from the region where the membrane and the substrate overlap as viewed from the normal direction of the substrate surface to the first hot point side beyond the first cold junction. The second heat conducting member may be provided on the surface of the membrane opposite to the substrate side, and may extend from the region where the membrane and the substrate overlap as viewed from the normal direction of the substrate surface to the second hot junction side beyond the second cold junction. This allows the first cold junction to dissipate heat to the substrate via the first heat conducting member. Similarly, the second cold junction can dissipate heat to the substrate via the second heat conducting member. Each heat conducting member can be realized by forming a heater or a thermopile on the membrane and then providing a heat conducting member by a film forming process or the like, and if it is on the surface of the membrane opposite to the substrate side, the manufacturing method becomes simple.

[0012] The first heat conducting member may be provided inside the membrane and extend from the region where the membrane and the substrate overlap as viewed from the normal direction of the substrate surface to the side of the first cold junction. The second heat conducting member may be provided inside the membrane and extend from the region where the membrane and the substrate overlap as viewed from the normal direction of the substrate surface to the side of the second cold junction. This eliminates the need to provide each heat conducting member on the membrane, and the thickness of the sensor chip can be reduced. In addition, the presence of each heat conducting member inside the membrane is expected to enhance the heat conduction effect.

[0013] The first heat conducting member may be made of a metal material that is integrated with the first cold junction. This allows the first heat conducting member and the first cold junction to be formed simultaneously. The second heat conducting member may be made of a metal material integrated with the second cold junction. This allows the second heat conducting member and the second cold junction to be formed simultaneously. By simultaneously forming each heat conducting member and each cold junction, the manufacturing method can be simplified. Furthermore, by integrating each heat conducting member and each cold junction, the effect of heat conduction can be improved.

[0014] The first heat conducting member and the membrane may have a first through hole formed therein that communicates the outside with the cavity. In addition, the second heat conducting member and the membrane may have a second through hole formed therein that communicates the outside with the cavity. This allows the fluid to be detected to not only bias the temperature distribution caused by the heat of the heater while passing over the membrane, but also bias the temperature distribution in the cavity while passing through the cavity formed inside the substrate. This improves the detection sensitivity of the flow rate and flow velocity of the fluid. In addition, the first through hole is formed on the upstream side of the flow path through which the fluid flows, and the second through hole is formed on the downstream side, so that the fluid can pass through the cavity smoothly.

[0015] Also, the first through-holes may be formed in a mesh pattern in a plurality of pieces. Also, the second through-holes may be formed in a mesh pattern in a plurality of pieces. This makes it possible to reduce bias in the flow of the fluid passing through the cavity. Furthermore, since the diameter of each through-hole is small, foreign matter contained in the gas is less likely to pass through the through-hole, and resistance to foreign matter is improved.

[0016] The first through hole may be a rectangular long hole with one side formed along the direction in which the first cold junctions are arranged. The second through hole may be a rectangular long hole with one side formed along the direction in which the second cold junctions are arranged. This makes it possible to increase the amount of fluid passing through the cavity. This improves the detection sensitivity of the flow rate and flow velocity of the fluid.

[0017] The thermal conductive member may be electrically connected to the GND potential. This allows the thermal conductive member to function as an electromagnetic shield, suppressing the effects of electrical disturbances on currents and signals around the thermal conductive member, and improving noise resistance. In addition, electrically charged foreign matter is attracted to and trapped by the thermal conductive member at the GND potential, making it difficult for the foreign matter to enter the cavity through the through hole.

[0018] The heat conducting member may be a metal material containing at least one element selected from the group consisting of aluminum, titanium, copper, tungsten, molybdenum, and tantalum. Here, the metal material may be an alloy of a plurality of elements. This allows efficient conduction of heat between the cold junction and the substrate. In addition, these metals are materials that are widely used in semiconductor processes, and can be easily formed into a film on a silicon substrate.

[0019] The substrate may further include a metal terminal provided on the substrate. The thermal conductive member and the metal terminal may be made of the same material and have the same film thickness. This allows the thermal conductive member and the metal terminal to be formed in the same process. The film thicknesses of the thermal conductive member and the metal terminal do not need to be exactly the same, and there may be an error in the manufacturing process or an error that does not affect performance.

[0020] The heat conductive member and the metal terminal may be made of a metal material containing at least one element selected from the group consisting of gold, platinum, silver, and aluminum. This improves the reliability when connecting the heat conductive member and the metal terminal by wire bonding. In addition, by using the same metal material for the heat conductive member and the metal terminal, the manufacturing method can be simplified.

[0021] The first thermal conduction member may be a rectangular or U-shaped metal layer with one side formed along the direction in which the first cold junctions of the thermocouples in the first thermopile are arranged, and the second thermal conduction member may be a rectangular or U-shaped metal layer with one side formed along the direction in which the second cold junctions of the thermocouples in the second thermopile are arranged. Effect of the Invention

[0022] According to the present invention, it is possible to reduce the influence of dimensional errors of a cavity formed in a substrate on the accuracy of flow rate detection. [Brief description of the drawings]

[0023] [Figure 1] FIG. 2 is a top view of the flow sensor chip according to the first embodiment. [Diagram 2]2 is a cross-sectional view taken along the line AA of the flow sensor chip shown in FIG. [Diagram 3] FIG. 2 is a schematic diagram showing an example of a configuration of a thermopile. [Figure 4] 4(a) and 4(b) are cross-sectional views for explaining the mechanism of the flow sensor chip according to the first embodiment. [Diagram 5] FIG. 11 is a top view of the flow sensor chip according to the second embodiment. [Figure 6] 6 is a BB cross-sectional view of the flow sensor chip shown in FIG. 5. [Figure 7] FIG. 11 is a top view of the flow sensor chip according to the third embodiment. [Figure 8] FIG. 11 is a cross-sectional view of the flow sensor chip according to Example 4. [Figure 9] FIG. 9 is an enlarged view of the vicinity of the thermopile shown in FIG. [Figure 10] FIG. 11 is a cross-sectional view of the flow sensor chip according to the fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] [Example of application] In this application example, a case where a thermal MEMS (Micro Electro Mechanical Systems) sensor chip using a thermopile is applied to a flow sensor will be described. The flow sensor according to this application example has two paired thermopiles, each of which is composed of multiple thermocouples. Each thermocouple has a hot junction located on the heater side, and a cold junction located on the opposite side of the heater and paired with the hot junction.

[0025] When the hot junction of a thermocouple detects the heat of the heater, an electromotive force is generated due to the temperature difference with the cold junction, due to the Seebeck effect. When an electromotive force is generated, it becomes possible to detect the temperature difference between the thermopiles, and it becomes possible to observe the value of the flow rate of the fluid. Here, as the value of the flow rate of the fluid increases, the value of the temperature difference between the thermopiles also increases, and the two values ​​are individually correlated. Therefore, it is possible to obtain the flow rate of the fluid by measuring the temperature difference between the thermopiles.

[0026] The thermopile is disposed symmetrically on either side of the heater, with the side from which the fluid flows along the flow path during flow rate detection being the upstream side and the opposite side being the downstream side. The thermopile and heater are disposed on or within a thin insulating film, with part of the insulating film formed so as to cover a cavity, which is a recess that opens onto a predetermined surface side of the substrate.

[0027] However, in the above-mentioned thermopile sensor, there is a possibility that a temperature difference occurs between the cold junctions of the thermopile due to a temperature distribution on the substrate caused by the external environment, or an offset voltage occurs when the cavity dimensions vary. As a result, there may be inconveniences such as a decrease in the measurement accuracy of the thermopile sensor or a decrease in productivity due to improving the dimensional accuracy of the cavity.

[0028] Therefore, in this disclosure, a flow sensor chip is devised that can mitigate the effect of dimensional errors on the flow rate detection accuracy caused when forming a cavity in a substrate by devising the position of the cold junction relative to the cavity. Specifically, as shown in Fig. 1 and Fig. 2, the first hot junction 9a and the first cold junction 10a of the thermocouple 8a of the first thermopile 6a, and the second hot junction 9b and the second cold junction 10b of the thermocouple 8b of the second thermopile 6b are arranged at positions overlapping with the opening 2a when viewed from the normal direction Z of the surface 3a of the substrate 3 in the flow sensor chip. With this configuration, the cold junctions 10a and 10b are not adjacent to the substrate 3 but are separated from the substrate 3, so that the thermal influence that the cold junctions 10a and 10b receive from the substrate 3 is mitigated.

[0029] On the other hand, the effect of cooling the cold junctions 10a and 10b will decrease if left as is, so the flow sensor chip 1 is provided with heat conductive members 7a and 7b that serve as a heat conduction path between the substrate 3 and the membrane 4. The heat conductive members 7a and 7b have a higher thermal conductivity than silicon oxide or silicon nitride, which is the main material of the membrane 4, and are covers made of a metal layer with good thermal conductivity, for example, metals such as aluminum, titanium, copper, tungsten, molybdenum, and tantalum can be used. In addition to these metals, any material with a thermal conductivity of a predetermined value or more (for example, 15 [W / m·K] or more) can be used as the heat conductive members 7a and 7b. Furthermore, since the heat conductive members 7a and 7b serve as a heat conduction path between the cold junctions 10a and 10b and the substrate 3, the cold junctions 10a and 10b are easily cooled to the same temperature via the substrate 3 even if there is a dimensional error in the cavity, and the flow rate detection accuracy of the flow sensor chip 1 is improved.

[0030] [Example 1] Hereinafter, a thermopile-type flow sensor chip according to Example 1 of the present disclosure will be described in detail with reference to the drawings. In the following embodiment, an example in which the present disclosure is applied to a thermal MEMS (Micro Electro Mechanical Systems) flow sensor will be described, but the present disclosure may also be applied to other thermopile-type sensors such as infrared sensors. In addition to the flow sensor chip, a standard flow sensor includes a housing that forms a flow path and a circuit that drives the flow sensor chip and processes output signals, but the configuration of the housing and circuit may be appropriately selected depending on the configuration, use, and purpose of the flow sensor chip of the present disclosure. In addition, the flow sensor chip according to the present disclosure is not limited to the following configuration.

[0031] <Flow sensor chip> Fig. 1 is a top view of the flow sensor chip according to Example 1. Fig. 2 is a cross-sectional view taken along line AA of the flow sensor chip shown in Fig. 1. The flow sensor chip 1 can be applied to a thermal flow sensor incorporated in, for example, a gas meter, a combustion device, an internal combustion engine such as an automobile, a fuel cell, other industrial equipment such as medical equipment, and embedded equipment for measuring the amount of fluid passing through a flow path.

[0032] The flow sensor chip 1 comprises a substrate 3 having a cavity 2 with an opening 2a formed therein, a membrane 4 arranged on the surface of the substrate 3 so as to cover the opening 2a, a heater 5 provided inside the membrane 4, a first thermopile 6a provided inside the membrane 4 and arranged upstream of the heater 5, and a second thermopile 6b provided downstream of the heater 5, and thermally conductive members 7a, 7b which serve as a heat conduction path between the substrate 3 and the membrane 4.

[0033] 2, in the flow sensor chip 1, the first hot junction 9a and the first cold junction 10a of the thermocouple 8a of the first thermopile 6a, and the second hot junction 9b and the second cold junction 10b of the thermocouple 8b of the second thermopile 6b are arranged at positions overlapping with the opening 2a when viewed from the normal direction Z of the surface 3a (the surface supporting the membrane 4) of the substrate 3. The heat conductive members 7a and 7b include a first heat conductive member 7a which serves as a heat conductive path between the first cold junction 10a and the substrate 3, and a second heat conductive member 7b which serves as a heat conductive path between the second cold junction 10b and the substrate 3.

[0034] As shown in Figs. 1 and 2, the thermopiles 6a and 6b are provided symmetrically on either side of the heater 5. The substrate 3 is made of plate-shaped single crystal silicon processed so that the surface 3a has a predetermined plane orientation. The heater 5 is a resistor made of, for example, polysilicon. The shape of each of the thermopiles 6a and 6b is approximately rectangular when the chip surface is viewed from above. The first thermopile 6a is disposed upstream of the heater 5, and the second thermopile 6b is disposed on the downstream side of the heater 5. Here, the upstream side and downstream side of the heater 5 are defined based on, for example, the direction F in which a gas (fluid) to be measured by the flow sensor chip 1 normally flows through a flow path on the surface of the flow sensor chip 1.

[0035] The heater 5 and the thermopiles 6a, 6b are formed inside a membrane 4 made of an insulating material, and the membrane 4 is provided on a substrate 3. Note that the heater 5 and the thermopiles 6a, 6b provided inside the membrane 4 do not have to be entirely enclosed in the membrane 4, and may be partially exposed to the outside or joined to other components.

[0036] The flow sensor chip 1 detects a value indicating the flow rate of the fluid to be measured based on the temperature detection signals output from the two thermopiles 6a and 6b. Specifically, the flow sensor chip 1 calculates the difference between the temperature detection signal output from the first thermopile 6a and the temperature detection signal output from the second thermopile 6b, and outputs a value indicating the flow rate of the fluid based on the difference to a downstream electronic circuit unit (not shown). Although two thermopiles 6a and 6b are shown in FIG. 1, the number of thermopiles is not limited as long as it is two or more.

[0037] FIG. 3 is a schematic diagram showing an example of the configuration of a thermopile. Although it is shown in a simplified manner in FIG. 1, the first thermopile 6a is configured by arranging a plurality of thermocouples 8a on the membrane 4 at a predetermined interval. The plurality of thermocouples 8a function as temperature sensors connected in series. The first thermopile 6a is formed so that a plurality of first hot junctions 9a are arranged in the Y direction of FIG. 1. The first thermopile 6a is also formed so that a plurality of first cold junctions 10a are arranged in the Y direction of FIG. 1. The first thermopile 6a employs N-type polysilicon (polysilicon injected with P (phosphorus)) and Al (aluminum) as the constituent materials of the first pole 11 and the second pole 12 of the thermocouple 8a, respectively, but is not necessarily limited to this combination. The second thermopile 6b has the same configuration as the first thermopile 6a, and a description thereof will be omitted.

[0038] As described above, each thermocouple 8a has a configuration in which a metal thin film of Al is formed on a polysilicon wiring, and at both ends of the thermocouple 8a, the first electrode 11 which is a polysilicon wiring is connected to the second electrode 12 which is a metal thin film. Of these, the part connected on the same side as the heater 5 is the first hot junction 9a, and the part connected on the opposite side to the heater 5 is the first cold junction 10a. Thermocouple 8b has the same configuration as thermocouple 8a.

[0039] In this way, the first hot junction 9a and the second hot junction in the two thermopiles 6a and 6b face each other across the heater 5. The first cold junction 10a is provided at one end of the thermocouple 8a opposite the end where the first hot junction 9a is provided. Similarly, the second cold junction 10b is provided at one end of the thermocouple 8b opposite the end where the second hot junction 9b is provided.

[0040] 4(a) and 4(b) are cross-sectional views for explaining the mechanism of the flow sensor chip 1 according to the first embodiment. In FIG. 4(a) and FIG. 4(b), the temperature distribution when the heater 5 generates heat is shown by a dotted ellipse. The temperature distribution closer to the heater 5 is higher. FIG. 4(a) shows an example of the temperature distribution when the heater 5 is energized in a state where no fluid is flowing. On the other hand, FIG. 4(b) shows an example of the temperature distribution when the heater 5 is energized in a state where the fluid is flowing in the direction of the arrow F. The first thermopile 6a, the heater 5, and the second thermopile 6b are arranged in sequence in the flow sensor chip 1 along the direction of the arrow F. The longitudinal direction (Y direction shown in FIG. 1) of each of the heater 5 and the thermopiles 6a and 6b is perpendicular (intersects) to the flow direction of the fluid.

[0041] When no fluid is flowing, the heat of the heater 5 is diffused symmetrically around the heater 5 as shown in Fig. 4(a). Therefore, in Fig. 4(a), the temperature of the first hot junction 9a located on the left side (upstream side) of the heater 5 is the same as the temperature of the second hot junction 9b located on the right side (downstream side) of the heater 5. In other words, there is no difference between the temperature detection signals of the thermopiles 6a and 6b, and no output voltage is generated.

[0042] On the other hand, when a fluid is flowing, the heat of the heater 5 is affected by the flow of the fluid, and therefore does not diffuse symmetrically around the heater 5, but diffuses asymmetrically along the flow of the fluid. Therefore, in FIG. 4(b), a difference occurs between the temperature of the first hot junction 9a arranged on the left side of the heater 5 and the temperature of the second hot junction 9b arranged on the right side of the heater 5. Then, a difference occurs in the temperature detection signals of the thermopiles 6a and 6b in proportion to this temperature difference, and an output voltage is generated. In addition, since the temperature difference increases according to the flow speed, the magnitude of the flow speed can be detected based on the electromotive force of the thermopiles 6a and 6b. In addition, depending on the direction of the fluid flow, the positive and negative of the temperature difference between the two hot junctions 9a and 9b shown in FIG. 4(b) is reversed, and the positive and negative of the output voltage is also reversed, so that the direction of the fluid flow can be detected. The flow sensor chip 1 uses such a bias in the distribution of heat of the heater 5 to output a value indicating the flow rate.

[0043] In the flow sensor chip 1 according to the present embodiment, a cavity 2, which is a recess, is formed in the substrate 3 on which the membrane 4 is mounted. The first hot junction 9a of the first thermopile 6a and the second hot junction 9b of the second thermopile 6b are disposed at positions overlapping with the opening 2a when viewed from the normal direction of the substrate surface. Since the heat generated by the heater 5 is released to the cavity 2, the diffusion of the heat into the substrate 3 is suppressed. In other words, the heating of the substrate 3 by the heater 5 is mitigated.

[0044] In addition, in the flow sensor chip 1, the first cold junction 10a of the first thermopile 6a and the second cold junction 10b of the second thermopile 6b are also arranged at positions overlapping the opening 2a when viewed from the normal direction of the substrate surface. That is, the first cold junction 10a and the second cold junction 10b are included in the region R2 where the membrane 4 faces the cavity 2 instead of the substrate 3, not in the region R1 where the substrate 3 and the membrane 4 are in contact with each other. Therefore, even if the size (shape) of the cavity 2 varies and the area or position of the region R1 where the substrate 3 and the membrane 4 overlap when viewed from the normal direction deviates from the desired value, the difference in the influence of the cold junctions 10a and 10b located away from the substrate 3 on the substrate 3 is mitigated. The influence of the substrate 3 is, for example, an effect of cooling the heat of the heater 5 at each of the cold junctions 10a, 10b, and an effect of the heat of the substrate 3 changed by the ambient temperature being conducted to each of the cold junctions 10a, 10b.

[0045] On the other hand, the cooling of each cold junction 10a, 10b through the substrate 3 is performed by the heat conductive member 7a which serves as a heat conduction path between the first cold junction 10a and the substrate 3, and the second heat conductive member 7b which serves as a heat conduction path between the second cold junction 10b and the substrate 3, so that the temperatures of the first cold junction 10a and the second cold junction 10b can be made almost the same as in the conventional case. Even if a temperature distribution occurs in the substrate, the first cold junction 10a and the second cold junction 10b are not easily affected by the temperature distribution because heat is not directly transferred from the substrate 3 to them. As a result, the flow sensor chip 1 according to this embodiment can mitigate the effect of a dimensional error of the cavity 2 formed in the substrate 3 on the flow rate detection accuracy (for example, the variation in the offset voltage).

[0046] In other words, even if there is a certain degree of dimensional variation (tolerance) in manufacturing the cavity 2, the decrease in flow rate detection accuracy is suppressed, and the yield of non-defective products in the process of forming the cavity 2 in the substrate 3 can be improved. In particular, when forming the cavity 2 in the substrate 3 made of single crystal silicon by etching, it is difficult to process the cavity 2 with small dimensional variation. Therefore, in the case of the flow sensor chip 1 according to the present embodiment, it is difficult to process the cavity 2 with small dimensional variation. A configuration that reduces the effect on the amount detection accuracy is preferable.

[0047] The first heat conducting member 7a is provided on the surface 4b opposite to the side 4a of the membrane 4 in contact with the substrate 3, and extends from the region R1 where the membrane 4 and the substrate 3 are in contact with each other to above the first cold junction 10a when viewed from the normal direction of the substrate surface. The second heat conducting member 7b is provided on the surface 4b opposite to the side 4a of the membrane 4 in contact with the substrate 3, and extends from the region R1 where the membrane 4 and the substrate 3 are in contact with each other to above the second cold junction 10b when viewed from the normal direction of the substrate surface. This allows the first cold junction 10a to release heat to the substrate 3 via the first heat conducting member 7a. Similarly, the second cold junction 10b can release heat to the substrate 3 via the second heat conducting member 7b.

[0048] In this embodiment, the substrate 3 is made of single crystal silicon, but any material can be used for the substrate as long as it allows the cavity 2 to be formed in a desired shape by etching or other processes. The cavity 2 according to the first embodiment is formed inside the substrate 3 and has an opening 2a on one surface 3a of the substrate 3, but openings may be formed on both surfaces of the substrate so as to penetrate the substrate 3. The side surface 2b of the cavity 2 is inclined so that the side surface widens toward the opening 2a.

[0049] In the flow sensor chip 1 according to the present embodiment, the first heat conductive member 7a and the membrane 4 are formed with a first through hole 14a that communicates the cavity 2 with the outside (flow path 13) where the flow path is formed. In addition, the second heat conductive member 7b and the membrane 4 are formed with a second through hole 14b that communicates the outside (flow path 13) with the cavity 2. As a result, the fluid to be detected not only biases the temperature distribution caused by the heat of the heater 5 while passing over the membrane 4, but also biases the temperature distribution in the cavity 2 formed inside the substrate 3 while passing through the cavity 2. This improves the detection sensitivity of the flow rate and flow velocity of the fluid. In addition, the first through hole 14a is formed on the upstream side of the flow path 13 through which the fluid flows, and the second through hole 14b is formed on the downstream side, so that the fluid can smoothly pass through the inside of the cavity 2.

[0050] As shown in Fig. 1, a plurality of first through holes 14a are formed in a mesh shape. Similarly, a plurality of second through holes 14b are formed in a mesh shape. This can reduce bias in the flow of the fluid passing through the cavity. Furthermore, because the diameter of each through hole is small, foreign matter contained in the gas is less likely to pass through the through hole, and resistance to foreign matter is improved.

[0051] The heat conducting members 7a and 7b are made of a metal material containing at least one element selected from the group consisting of Al, Ti (titanium), Cu (copper), W (tungsten), Mo (molybdenum), and Ta (tantalum). Here, the metal material may be an alloy made of a plurality of elements. This allows efficient heat conduction between the cold junctions 10a and 10b and the substrate 3. Metal materials generally have high infrared reflectance (low emissivity), so the heat conducting members 7a and 7b can reduce the effect of radiative heat transfer from the outside to the substrate 3. In addition, a metal material with a higher thermal conductivity than the substrate 3 and the membrane 4 is used to cover a wide range on the substrate 3, thereby homogenizing the temperature distribution of the substrate 3.

[0052] [Example 2] Fig. 5 is a top view of the flow sensor chip according to the second embodiment. Fig. 6 is a BB cross-sectional view of the flow sensor chip shown in Fig. 5. The flow sensor chip 15 according to the second embodiment has the same configuration as the flow sensor chip 1 according to the first embodiment, except that the thermal conductive members 7a and 7b are electrically connected to the GND potential. Therefore, in the following, the same configurations as those in the flow sensor chip 1 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0053] In the flow sensor chip 15 according to the second embodiment, the heat conductive members 7a and 7b, which are also conductive materials such as metals, function as electromagnetic shields, suppressing the influence of electrical disturbances on currents and signals around the heat conductive members, improving noise resistance. In addition, the charged foreign matter 16 is attracted to and trapped by the heat conductive members 7a and 7b at the GND potential, making it difficult for the foreign matter to enter the cavity 2 through the through holes 14a and 14b. In addition, the heat conductive members 7a and 7b that capture the foreign matter 16 have the through holes 14a and 14b, which are the inlets through which the fluid enters the cavity 2, so that the foreign matter 16 can be captured efficiently.

[0054] [Example 3] 7 is a top view of the flow sensor chip according to Example 3. The flow sensor chip 17 according to Example 3 has the same configuration as the flow sensor chip 1 according to Example 1, except for the shape of the heat conductive member and the shape of the through-hole. Therefore, in the following, the same configurations as those in the flow sensor chip 1 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0055] The flow sensor chip 17 according to the third embodiment is provided with heat conductive members 18a, 18b made of U-shaped metal layers, one side of which is formed in the direction in which the cold junctions 10a, 10b are arranged, instead of the rectangular heat conductive members 7a, 7b. The first through hole 19a and the second through hole 19b are rectangular long holes, one side of which is formed along the direction in which the cold junctions 10a, 10b are arranged. Therefore, the fluid can easily flow into the cavity 2 through the first through hole 19a and can easily flow out to the outside through the second through hole 19b, thereby increasing the amount of fluid passing through the cavity 2. As a result, the flow sensor chip 17 has improved detection sensitivity for the flow rate and flow velocity of the fluid.

[0056] [Example 4] Fig. 8 is a cross-sectional view of the flow sensor chip according to Example 4. Fig. 9 is an enlarged view of the vicinity of the thermopile shown in Fig. 8. The flow sensor chip 20 according to Example 4 is mainly different from the flow sensor chip 1 according to Example 1 in that the heat conductive member is provided inside the membrane 4 while being connected to the cold junction. Therefore, in the following, the same components as those in the flow sensor chip 1 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0057] In the flow sensor chip 20 according to the fourth embodiment, heat conductive members 21a and 21b that perform the same function as the above-mentioned heat conductive member are provided on the outside of the cold junctions 10a and 10b (opposite the center side where the heater 5 is located). The heat conductive members 21a and 21b are rectangular, and the number of the heat conductive members is the same as the number of the cold junctions. The heat conductive members 21a and 21b have one end 21a1 connected to the cold junctions 10a and 10b and the other end 21a2 opposite thereto, which extend to the region R1 where the substrate 3 and the membrane 4 overlap. In other words, the heat conductive members 21a and 21b are provided inside the membrane 4, and extend from the region R1 where the membrane 4 and the substrate 3 overlap when viewed from the normal direction of the surface 3a of the substrate 3 to the side of the cold junctions 10a and 10b, and are integrated with the cold junctions 10a and 10b. This eliminates the need to provide the heat conductive members 21a and 21b on the membrane 4, and reduces the thickness of the flow sensor chip 20. The heat conductive members and the cold junctions can be formed simultaneously, simplifying the manufacturing process. Furthermore, the heat conductive members and the cold junctions are integrated together, enhancing the effect of heat conduction.

[0058] [Example 5] 10 is a cross-sectional view of the flow sensor chip according to Example 5. The flow sensor chip 22 according to Example 5 mainly differs from the flow sensor chip 1 according to Example 1 in that it includes metal terminals 23a and 23b provided on the substrate 3. Therefore, in the following, the same components as those in the flow sensor chip 1 are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0059] In the flow sensor chip 22 according to the fifth embodiment, the heat conductive members 7a, 7b and the metal terminals 23a, 23b are made of the same material and have the same film thickness. This allows the heat conductive members 7a, 7b and the metal terminals 23a, 23b to be formed in the same process, simplifying the manufacturing method. The film thicknesses of the heat conductive members and the metal terminals do not need to be strictly the same, and there may be errors in the manufacturing process or errors that do not affect performance.

[0060] The heat conductive members 7a, 7b and the metal terminals 23a, 23b are made of a metal material containing at least one element selected from the group consisting of gold, platinum, silver, and aluminum, which improves the reliability when connecting the heat conductive member 7a and the metal terminal 23a, and the heat conductive member 7b and the metal terminal 23b by wire bonding.

[0061] The above describes in detail the embodiments of the present disclosure with reference to the drawings. However, the dimensions, materials, shapes, and relative positions of the components described in the embodiments should be appropriately changed depending on the configuration of the device to which the disclosure is applied and various conditions. In other words, the scope of the present disclosure is not limited to the above-mentioned embodiments, and appropriate combinations or substitutions of the configurations of the embodiments are also included in the present disclosure.

[0062] In addition, in order to make it possible to compare the constituent elements of the present disclosure with the configurations of the examples, the constituent elements of the present disclosure will be described below with the reference numerals in the drawings. <Appendix 1> A substrate (3) in which a cavity (2) having an opening (2a) is formed; a membrane (4) disposed on a surface (3a) of the substrate (3) so as to cover the opening; A heater (5) provided on the membrane; a first thermopile (6a) and a second thermopile (6b) provided on the membrane and arranged to sandwich the heater; and a heat conductive member (7a, 7b) which serves as a heat conduction path between the substrate (3) and the membrane (4), a first hot junction (9a) and a first cold junction (10a) of a thermocouple (8a) of the first thermopile (6a), and a second hot junction (9b) and a second cold junction (10b) of a thermocouple (8b) of the second thermopile (6b) are disposed at positions overlapping with the opening when viewed from a normal direction of the substrate surface; The flow sensor chip (1) is characterized in that the heat conduction member has a first heat conduction member (7a) that serves as a heat conduction path between the first cold junction (10a) and the substrate (3), and a second heat conduction member (7b) that serves as a heat conduction path between the second cold junction (10b) and the substrate (3). [Explanation of symbols]

[0063] 1 Flow sensor chip 2 Cavity 2a aperture 3. Substrate 3a surface 4. Membrane 5 Heater 6a First thermopile 6b Second Thermopile 7a First heat conductive member 7b Second heat conductive member 8a thermocouple 8b Thermocouple 9a First hot junction 9b Second junction 10a First cold junction 10b Second cold junction 14a First through hole 14b Second through hole

Claims

1. a substrate having a cavity with an opening formed therein; a membrane disposed on a surface of the substrate so as to cover the opening; A heater provided on the membrane; a first thermopile and a second thermopile provided on the membrane and disposed on either side of the heater; a heat conductive member that serves as a heat conduction path between the substrate and the membrane; a first hot junction and a first cold junction of a thermocouple of the first thermopile, and a second hot junction and a second cold junction of a thermocouple of the second thermopile are disposed at positions overlapping with the opening when viewed from a normal direction of the substrate surface; The flow sensor chip is characterized in that the thermal conduction member has a first thermal conduction member that serves as a thermal conduction path between the first cold junction and the substrate, and a second thermal conduction member that serves as a thermal conduction path between the second cold junction and the substrate.

2. the first thermally conductive member is provided on a surface of the membrane opposite to the substrate, and extends from a region where the membrane and the substrate overlap with each other as viewed in a normal direction of the substrate surface, from the first cold junction to the first hot junction; the second heat conducting member is provided on a surface of the membrane opposite to the substrate side, and extends from a region where the membrane and the substrate overlap with each other as viewed from a normal direction of the substrate surface, from the second cold junction to the second hot junction side; 2. The flow sensor chip according to claim 1 .

3. the first thermal conductive member is provided inside the membrane and extends from a region where the membrane and the substrate overlap with each other as viewed from a normal direction of the substrate surface to a side of the first cold junction; the second heat conducting member is provided inside the membrane and extends from a region where the membrane and the substrate overlap with each other as viewed from a normal direction of the substrate surface to a side of the second cold junction; 2. The flow sensor chip according to claim 1 .

4. the first thermally conductive member is made of a metallic material integral with the first cold junction; the second thermally conductive member is made of a metal material integrated with the second cold junction; 4. The flow sensor chip according to claim 3.

5. the first heat conducting member and the membrane are formed with a first through hole communicating between the outside and the cavity, The second heat conducting member and the membrane have a second through hole formed therein, the second through hole communicating the cavity with the outside.

5. The flow sensor chip according to claim 2, wherein the flow sensor chip is a flow sensor chip having a flow passage.

6. The first through holes are formed in a mesh shape, The second through holes are formed in a mesh shape.

6. The flow sensor chip according to claim 5.

7. the first through hole is a rectangular elongated hole having one side formed along a direction in which the first cold junctions are arranged, The second through hole is a rectangular elongated hole having one side formed along a direction in which the second cold junctions are arranged.

6. The flow sensor chip according to claim 5.

8. 8. The flow sensor chip according to claim 1, wherein the heat conductive member is electrically connected to a GND potential.

9. 8. The flow sensor chip according to claim 1, wherein the heat conducting member is a metal material containing at least one element selected from the group consisting of aluminum, titanium, copper, tungsten, molybdenum, and tantalum.

10. Further comprising a metal terminal provided on the substrate; 9. The flow sensor chip according to claim 1, wherein the heat conductive member and the metal terminal are made of the same material and have the same film thickness.

11. 11. The flow sensor chip according to claim 10, wherein the heat conductive member and the metal terminal are made of a metal material containing at least one element selected from the group consisting of gold, platinum, silver, and aluminum.

12. the first thermal conduction member is a rectangular or U-shaped metal layer having one side formed along a direction in which first cold junctions of thermocouples of the first thermopile are arranged, the second thermal conduction member is a rectangular or U-shaped metal layer having one side formed along a direction in which second cold junctions of thermocouples of the second thermopile are arranged; 12. The flow sensor chip according to claim 2, wherein the flow sensor chip is a flow sensor chip having a flow passage.

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