Manufacturing method of magnetic component, magnetic component and electronic component

Abstract

To obtain a magnetic component including a diffusion permeation layer formed on the surface while maintaining the surface in a clean state.SOLUTION: A method for manufacturing a magnetic component includes the step of diffusing and permeating one or more elements selected from a group consisting of Cr, V, Ti, Al, Si and B on the surface of a base material 1 of a magnetic component W. The step of diffusing and permeating the selected element comprises: separating and arranging the base material 1 and a metal halide formation body 35A forming the fluid of metal halide including the selected elements in a vessel 11 from each other; and heating the vessel 11 to form the fluid of the metal halide from the metal halide formation body 35A.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a method for manufacturing a magnetic component, a magnetic component, and an electronic component. [Background technology]

[0002] It has been considered to form a diffusion layer of metallic elements on the surface of magnetic components used in electronic components such as electromagnetic relays (hereinafter also referred to as relays) in order to impart corrosion resistance to the magnetic components.

[0003] However, the embedding method for manufacturing a diffusion layer of metal elements makes it difficult to keep the surface of the magnetic component clean, and foreign matter such as sintered metal particles or alumina present on the surface or in recesses of the magnetic component can cause the magnetic component to malfunction or perform poorly. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2014-216354 A Summary of the Invention [Problem to be solved by the invention]

[0005] The present disclosure has been made in consideration of these points, and aims to provide a manufacturing method for a magnetic component, a magnetic component, and an electronic component that are capable of forming a diffusion layer on the surface of a magnetic component while keeping the surface of the magnetic component clean. [Means for solving the problem]

[0006] The present disclosure relates to a method for manufacturing a magnetic component made of an iron-based material, comprising the steps of preparing a base material of the magnetic component made of an iron-based material, and diffusing and penetrating one or more elements selected from the group consisting of Cr, V, Ti, Al, Si and B into a surface of the base material of the magnetic component, wherein the step of diffusing and penetrating the one or more selected elements includes the steps of disposing the base material and a metal halide generator that generates a metal halide fluid containing the selected elements in a container, separately from each other, heating the container to generate the metal halide fluid from the metal halide generator, and delivering the metal halide fluid to a surface of the base material to diffuse and penetrate the one or more selected elements into the surface of the base material.

[0007] Disclosed is a method for making a magnetic component, wherein the metal halide generator comprises particles of the selected one or more elements and particles of a halide.

[0008] The present disclosure is a method for producing a magnetic component, wherein the halide particles contain F or Cl.

[0009] The present disclosure is a method for manufacturing a magnetic component, wherein in the container, the base material and the metal halide generator are separated from each other by a partition having an opening.

[0010] The present disclosure is a method for manufacturing a magnetic component, wherein the base material and the metal halide generator are separated from each other by a mesh within the container.

[0011] The present disclosure relates to a method for manufacturing a magnetic component, characterized in that, when diffusing and penetrating the selected one or more elements into the surface of the base material, an inert gas, H2 gas, Cl2 gas, or a mixed gas thereof is supplied into the container, and the inert gas, H2 gas, Cl2 gas, or a mixed gas thereof is discharged from the container.

[0012] The present disclosure relates to a magnetic component manufactured by the above-described method for manufacturing a magnetic component.

[0013] The present disclosure relates to an electronic component including the magnetic component described above. Effect of the Invention

[0014] According to the present disclosure, it is possible to obtain a magnetic component having a diffusion layer formed on the surface while keeping the surface of the magnetic component clean. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a schematic diagram showing a method for manufacturing a magnetic component according to the present disclosure. [Diagram 2] FIG. 2 shows an inner container disposed within a container. [Figure 3A] FIG. 3A is a perspective view showing a magnetic component produced by a method for producing a magnetic component according to the present disclosure. [Figure 3B] FIG. 3B is a cross-sectional view taken along line A-A' in FIG. 3A. [Figure 4] FIG. 4 is a cross-sectional view showing a magnetic component. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. First, a magnetic component W produced by the method for producing a magnetic component according to the present disclosure will be described with reference to Figs.

[0017] The magnetic component W produced by the magnetic component manufacturing method according to the present disclosure is produced by processing an iron-based material. Here, "iron-based material" refers to iron alloys in general that contain iron as a main component. Examples of the iron-based material include pure iron and steel, and examples of steel include cold-rolled steel plate, hot-rolled steel plate, and electromagnetic steel plate. The iron-based material may also contain silicon, and may be, for example, a silicon steel plate. The shape of the iron-based material is not particularly limited, and examples of the shape include a strip shape and a rod shape.

[0018] Such a magnetic part W is made of an iron-based material processed into a desired shape, and is used for electronic parts such as relays and switches. The method for processing the iron-based material into the magnetic part W is not particularly limited, but may be, for example, press processing. The shape and size of the magnetic part W may be appropriately determined depending on the intended use.

[0019] In this embodiment, the magnetic component W has two faces W1 and W2 with an L-shaped cross section, with an opening W3 formed in face W1, a convex portion W4 formed on the front surface of face W2, and a concave portion W5 formed on the rear surface of face W2 (see Figs. 3A and 3B). Here, Fig. 3A is a diagram showing a magnetic component manufactured by the manufacturing method for a magnetic component according to the present disclosure, and Fig. 3B is a cross-sectional view taken along line A-A' in Fig. 3A.

[0020] The carbon content of the iron-based material is preferably 0% by weight or more and 0.15% by weight or less, more preferably 0% by weight or more and less than 0.05% by weight, and particularly preferably 0% by weight or more and less than 0.01% by weight. According to the above configuration, since the carbon content of the iron-based material is low, the metal structure of the magnetic component W obtained by processing the iron-based material can be sufficiently developed by performing a heat treatment in the alloy layer forming step described later, and a magnetic component W having excellent magnetic properties can be provided.

[0021] According to this embodiment, a base material 1 of the magnetic part W made of the above-mentioned iron-based material is prepared, and one or more elements selected from the group consisting of Cr, V, Ti, Al, Si, and B are diffused and infiltrated onto the surface of the base material 1, thereby obtaining the magnetic part W.

[0022] In this case, a diffusion layer 2 is formed by diffusing and penetrating elements on the surface of the base material 1 of the magnetic component W (see FIG. 4). This diffusion layer 2 has a thickness of 5 to 20 μm (microns).

[0023] In this specification, the term "surface of the base material of the magnetic part W made of an iron-based material" means at least a part of the entire surface of the base material 1 of the magnetic part W. Preferably, a diffusion layer is formed on the entire surface of the base material 1 of the magnetic part W. The surface of the base material 1 may be one in which the above elements are diffused and penetrated into a part of the surface of the base material 1, but it is preferable that the above elements are diffused and penetrated into as wide an area as possible on the surface of the base material 1, and it is more preferable that the above elements are diffused and penetrated into the entire surface of the base material 1. With this configuration, it is possible to provide a magnetic part W that exhibits excellent wear resistance and corrosion resistance on all surfaces of the magnetic part and has excellent magnetic properties.

[0024] Next, a description will be given of elements that diffuse into the base material 1 of the magnetic component W to form the diffusion layer 2. Examples of elements that diffuse into the base material 1 of the magnetic component W include one or more elements selected from the group consisting of Cr, V, Ti, Al, Si, and B. By diffusing and penetrating such elements into the surface of the base material 1 of the magnetic component W, a diffusion layer can be formed on the surface of the base material 1 of the magnetic component W.

[0025] The one or more elements selected from the group consisting of Cr, V, Ti, Al, Si and B have, for example, a powder shape, i.e., a particle shape, as described later. The particles may be particles of one element selected from the group consisting of Cr, V, Ti, Al, Si and B, or particles containing two or more of the above elements. When using particles containing two or more elements, the mixing ratio of the two or more elements is arbitrary as long as excellent wear resistance, corrosion resistance and magnetic properties can be realized. In addition, the particles may be particles of one or more elements selected from the group consisting of Cr, V, Ti, Al, Si and B, or particles of a compound or alloy containing the above element. An example of an alloy containing the above element is an alloy of the above element and iron.

[0026] Also, as described above, particles containing one or more elements selected from the group consisting of Cr, V, Ti, Al, Si, and B are used as a penetrant mixed with other materials. For example, a penetrant can be prepared by mixing particles containing the above elements, alumina particles, and ammonium chloride particles in any ratio, and the penetrant obtained by mixing in this manner can be used.

[0027] Next, a magnetic component manufacturing apparatus for carrying out the magnetic component manufacturing method according to the present disclosure will be described with reference to FIGS. 1 and 2. FIG.

[0028] 1 and 2, the manufacturing apparatus for magnetic components includes a rectangular cylindrical container 11 extending horizontally, and an enclosure 12 positioned outside the rectangular cylindrical container 11. The enclosure 12 includes a built-in heater 22 that heats the rectangular cylindrical container 11 from the outside.

[0029] Moreover, both the rectangular cylindrical container 11 and the enclosure 12 are made of steel.

[0030] One end 11a of the rectangular cylindrical container 11 is sealed, and the other end 11b is open. A lid 21 is provided on the open end 11b of the rectangular cylindrical container 11 in a removable manner.

[0031] Furthermore, a hydrogen gas source 16 that supplies hydrogen gas is connected to one end 11a of the rectangular cylindrical container 11 via a supply gas line 18, and this supply gas line 18 is provided with a valve 18a, a flow meter 18b, and a valve 18c, in this order from the hydrogen gas source 16 side. In this case, a tip 18A of the supply gas line 18 protrudes from one end 11a of the rectangular cylindrical container 11 toward the inside of the rectangular cylindrical container 11.

[0032] An exhaust device 17 is connected via an exhaust gas line 19 to a lid 21 that seals the rectangular cylindrical container 11 .

[0033] Furthermore, by removing the lid 21, the inner container 30 can be placed inside the rectangular cylindrical container 11 from the other end 11b side where the rectangular cylindrical container 11 is open.

[0034] In this embodiment, the inner container 30 is a rectangular cylindrical body having an outer shape that is slightly smaller than the inner shape of the rectangular cylindrical container 11. On both ends of the inner container 30 made of a rectangular cylindrical body, a first removable plate 32 located near one end 11a of the rectangular cylindrical container 11 and a second removable plate 33 facing the other end 11b of the rectangular cylindrical container 11 are provided.

[0035] Of these, the first removable plate 32 is removable from the inner container 30 and seals the inner container 30 when attached to the inner container 30.

[0036] The second removable plate 33 is also removable from the inner container 30, and has a number of openings 33a. Therefore, when the second removable plate 33 is attached to the inner container 30, the inside of the inner container 30 can communicate with the outside through the openings 33a of the second removable plate 33.

[0037] In addition, a partition 31 having a number of openings 31a is provided in approximately the center of the inner container 30, and this partition 31 divides the inside of the inner container 30 into a first space 30A on the first removable plate 32 side and a second space 30B on the second removable plate 33 side.

[0038] As described below, particles 35 of the element to be diffused and particles 36 of a halide are contained in the first space 30A of the inner container 30, and the base material 1 of the magnetic component W is contained in the second space 30B.

[0039] Also, a metal halide gas, for example, chromium chloride gas, can be generated by the particles 35 of the diffusing element and the halide particles 36. Therefore, in this specification, the particles 35 of the diffusing element and the particles 36 of the halide constitute a metal halide generator 35A.

[0040] The inner container 30, which is a rectangular cylindrical body as described above, is made of steel, and the first removable plate 32, the second removable plate 33 and the partition wall 31 are also made of steel.

[0041] Next, a method for manufacturing a magnetic part will be described. First, an empty inner container 30 is prepared. Then, the first removable plate 32 is removed from the inner container 30, and the first space 30A of the inner container 30 is filled with particles 35 of an element to be diffused and infiltrated into the base material 1 of the magnetic part W, such as Cr particles (chromium particles), and particles 36 of a halide, such as ammonium chloride particles. In this way, a metal halide product 35A is obtained from the particles 35 of the element and the particles 36 of the halide, and a metal halide can be produced from the metal halide product 35A.

[0042] In this case, Cr particles and ammonium chloride particles are mixed in an arbitrary ratio and filled into the first space 30A of the inner container 30, and a metal halide generator 35A is obtained from the Cr particles and the ammonium chloride particles. Note that alumina particles may be filled into the first space 30A in addition to the Cr particles and the ammonium chloride particles. After that, the first removable plate 32 is attached to the inner container 30 to seal the first space 30A of the inner container 30.

[0043] In this embodiment, the first space 30A of the inner container 30 is filled with ammonium chloride particles at 1 to 5 wt % relative to the Cr particles.

[0044] Next, the base material 1 of the magnetic part W that has not yet been subjected to the diffusion and penetration treatment is prepared. Then, the second removable plate 33 is removed, and the base material 1 of the magnetic part W is stored in the second space 30B of the inner container 30. Thereafter, the second removable plate 33 is attached to the inner container 30.

[0045] In this manner, the first space 30A of the inner container 30 is filled with Cr particles and ammonium chloride particles, and the base material 1 of the magnetic component W is stored in the second space 30B. After that, the inner container 30 is placed in the rectangular cylindrical container 11.

[0046] In this case, the lid 21 is removed in advance from the rectangular cylindrical container 11, and the rectangular cylindrical container 11 is empty. Then, the inner container 30 is inserted into the empty rectangular cylindrical container 11 from the other end 11b side that is open.

[0047] Thereafter, the inner container 30 is pressed against one end 11a of the rectangular cylindrical container 11 within the rectangular cylindrical container 11. In this embodiment, an opening 32a is formed in advance in the first removable plate 32 of the inner container 30, and when the inner container 30 is pressed against one end 11a of the rectangular cylindrical container 11 within the rectangular cylindrical container 11, the tip 18A of the supply gas line 18 protruding from the one end 11a of the rectangular cylindrical container 11 to the inside of the rectangular cylindrical container 11 penetrates the opening 32a of the first removable plate 32 and enters the inner container 30.

[0048] Thereafter, the lid 21 is attached to the other open end 11b of the rectangular cylindrical container 11, thereby sealing the rectangular cylindrical container 11.

[0049] Next, the rectangular cylindrical container 11 is heated from the outside by the heater 22 of the enclosure 12, and Cr diffuses and penetrates into the surface of the base material 1 of the magnetic component W.

[0050] During this time, hydrogen gas (H 2 gas) is supplied from a hydrogen gas source 16 through a supply gas line 18 into the rectangular cylindrical container 11, and the hydrogen gas in the rectangular cylindrical container 11 is sent to an exhaust device 17 through an exhaust gas line 19.

[0051] The hydrogen gas or the like is used to create an oxygen-free atmosphere within the inner container 30 .

[0052] During the time that Cr is diffused and infiltrated into the surface of the base material 1 of the magnetic component W, the square cylindrical container 11 is heated by the heater 22 to about 800 to 1200° C. for the duration of the diffusion and infiltration treatment (about 5 to 30 hours).

[0053] Furthermore, hydrogen gas (H2 gas) or the like is supplied into the rectangular cylindrical container 11 via a supply gas line 18 at a flow rate of about 0.3 to 9.0 liters / minute.

[0054] Next, the action of Cr diffusing and penetrating into the surface of the base material 1 of the magnetic part W will be described in detail.

[0055] 1 and 2, an inner container 30 is housed in a rectangular cylindrical container 11, and particles 35 of an element that diffuses and penetrates into the surface of the base material 1 of a magnetic component W, such as Cr particles, and halide particles 36, such as ammonium chloride particles, are filled into a first space 30A of the inner container 30. At this time, a metal halide product 35A containing Cr particles and ammonium chloride particles is formed, and this metal halide product 35A is disposed in the first space 30A.

[0056] On the other hand, the base material 1 of the magnetic part W is arranged in the second space 30B of the inner container 30, and the metal halide generator 35A in the first space 30A of the inner container 30 and the base material 1 of the magnetic part W in the second space 30B are arranged to be separated from each other by a partition 31.

[0057] Then, when the rectangular cylindrical container 11 and the inner container 30 are heated by the heater 22, first, in the first space 30A, the Cr particles and the ammonium chloride particles in the metal halide producer 35A react with each other to generate a fluid chromium chloride gas (metal halide gas).

[0058] In this manner, in the first space 30A, Cr particles (element particles) and ammonium chloride particles (halide particles) react with each other to generate chromium chloride gas (metal halide gas), and the chromium chloride gas generated in the first space 30A passes through the opening 31a of the partition wall 31 and reaches the second space 30B.

[0059] Next, when the chromium chloride gas enters the second space 30B, Cr in the chromium chloride gas reaches the surface of the base material 1 of the magnetic component W.

[0060] Thereafter, Cr in the chromium chloride gas diffuses and penetrates through the surface of the base material 1 of the magnetic component W, forming a Cr diffused and penetrated layer 2 on the surface of the base material 1 .

[0061] During this time, as described above, hydrogen gas is supplied from the hydrogen gas source 16 through the supply gas line 18 into the inner container 30. It is preferable to supply hydrogen gas into the inner container 30 before the Cr particles and the ammonium chloride particles react with each other, so that the inner container 30 is kept in an oxygen-free atmosphere.

[0062] In addition, while the chromium particles react with the ammonium chloride particles and the chromium chloride gas reaches the inner container 30, hydrogen gas continues to be supplied into the inner container 30, so that the inner container 30 is kept in an oxygen-free atmosphere while the chromium particles react with the ammonium chloride particles.

[0063] In this manner, the magnetic member W having the Cr diffusion layer 2 formed on the surface of the base material 1 in the second space 30B of the inner container 30 can be obtained.

[0064] During this time, hydrogen gas is continuously supplied into the rectangular cylindrical container 11 and the inner container 30, and this hydrogen gas promotes the diffusion and penetration reaction of Cr into the base material 1 of the magnetic component W.

[0065] As described above, according to the present embodiment, when Cr is diffused and infiltrated into the surface of the base material 1 of the magnetic part W, the metal halide generator 35A containing Cr particles and ammonium chloride particles is stored in the first space 30A of the inner container 30, the base material 1 of the magnetic part W is stored in the second space 30B, and the metal halide generator 35A and the base material 1 of the magnetic part W can be arranged separated from each other by the partition wall 31. As a result, the Cr particles do not come into direct contact with the surface of the base material 1 of the magnetic part W during the Cr diffusion and infiltration, and therefore the Cr particles do not sinter and adhere to the surface of the base material 1. In this way, the Cr particles do not adhere to the surface of the base material 1 of the magnetic part W, causing foreign matter to adhere to the finished product of the magnetic part W, and the magnetic part W does not malfunction or perform poorly.

[0066] In other words, when diffusing and penetrating Cr onto the surface of the base material 1 of the magnetic component, it is possible to embed the base material of the magnetic component in particles of Cr and alumina and diffuse and penetrate Cr onto the surface of the base material of the magnetic component; however, if the base material of the magnetic component is embedded in particles of Cr and alumina, the Cr particles and alumina particles sinter onto the surface of the base material of the magnetic component during the diffusing and penetrating of Cr, and in particular the Cr particles and alumina particles that are burned into the product recess W5 cause the magnetic component to malfunction or perform poorly.

[0067] According to this embodiment, the metal halide generator 35A containing Cr particles and ammonium chloride particles and the base material 1 of the magnetic component W are arranged separated from each other by a partition 31, so that it is possible to reliably prevent the Cr particles from sintering and adhering to the surface of the base material 1 of the magnetic component W during the diffusion and penetration of Cr.

[0068] In the above embodiment, an example is shown in which a metal halide generator 35A consisting of Cr particles used as an element that diffuses and penetrates and ammonium chloride particles used as a halide is stored in the first space 30A of the inner container 30. However, the present invention is not limited to this, and instead of Cr particles, particles of an element other than Cr selected from the group consisting of Cr, V, Ti, Al, Si and B may be used as the particles of the element that diffuses and penetrates, or particles containing two or more elements selected from the above group may be used.

[0069] When using particles containing two or more elements, the mixing ratio of the two or more elements is arbitrary, taking into consideration wear resistance, corrosion resistance, and magnetic properties. The particles may be particles of a single element other than Cr selected from the group consisting of Cr, V, Ti, Al, Si, and B, or particles of a compound or alloy containing such an element, and the alloy containing an element may be an alloy of the element and iron.

[0070] Further, although an example has been given in which ammonium chloride particles are filled as the halide in the first space 30A of the inner container 30, the present invention is not limited to this, and potassium chloride, cobalt chloride, calcium fluoride, or aluminum fluoride may also be used as the halide.

[0071] Furthermore, in the above embodiment, an example has been shown in which a partition 31 having an opening 31a is provided inside the inner container 30 to divide the inside of the inner container 30 into a first space 30A and a second space 30B, but this is not limited to the above, and a mesh-like body may be placed inside the inner container 30 instead of the partition 31.

[0072] Furthermore, while an example has been shown in which hydrogen gas is supplied into the rectangular cylindrical container 11 while Cr is being diffused and infiltrated into the surface of the base material 1 of the magnetic component W, the present invention is not limited to this, and an inert gas such as chlorine gas (Cl2 gas), Ar gas, or a mixture of these gases that activate the generation of metal chloride gas may be supplied into the rectangular cylindrical container 11.

[0073] Furthermore, although an example has been shown in which the inner container 30 consisting of a square cylindrical body is placed inside the square cylindrical container 11, the present invention is not limited to this, and a cylindrical container may be used instead of the square cylindrical container 11, and a cylindrical inner container may be placed inside the cylindrical container, and the cylindrical container and the cylindrical inner container may be rotated around their respective axes. [Explanation of symbols]

[0074] 1. Base material for magnetic parts 2 Diffusion and penetration layer 10. Magnetic component manufacturing equipment 11 Square cylindrical container 12 Enclosure 13 Support part 14 Retaining Frame 15 Drive mechanism 16 Hydrogen gas source 17 Exhaust system 18 Supply Gas Line 18A Tip 19 Exhaust gas line 21 Lid 22 Heater 30 Inner container 30A 1st space 30B 2nd space 31 Bulkhead 31a aperture 32 First removable plate 33 Second removable plate 33a Opening W Magnetic Parts

Claims

1. A method for manufacturing a magnetic component made of an iron-based material, comprising the steps of: preparing a base material for the magnetic component made of the iron-based material; A step of diffusing and penetrating one or more elements selected from the group consisting of Cr, V, Ti, Al, Si, and B into a base material surface of the magnetic component, The step of diffusing and infiltrating the one or more selected elements includes the steps of: disposing the base material and a metal halide generator that generates a metal halide fluid containing the one or more selected elements in a container, the metal halide generator and the base material being separated from each other; heating the vessel to generate the metal halide fluid from the metal halide generator and delivering the metal halide fluid to the base material surface to diffuse the selected one or more elements into the base material surface; When the selected one or more elements are diffused and infiltrated into the surface of the base material, an inert gas, H2 gas, Cl2 gas, or a mixed gas thereof is supplied from one end of the container, and the inert gas, H2 gas, Cl2 gas, or the mixed gas thereof is discharged from the other end of the container; A method for manufacturing a magnetic component, wherein the metal halide generator and the base material are arranged sequentially from the upstream side to the downstream side along the flow direction of the inert gas, the H2 gas, the Cl2 gas, or the mixed gas thereof.

2. 2. The method of claim 1, wherein said metal halide generator comprises particles of said selected one or more elements and particles of a halide.

3. 3. The method for producing a magnetic component according to claim 2, wherein the halide particles contain F or Cl.

4. 2. The method for manufacturing a magnetic component according to claim 1, wherein in said container, said base material and said metal halide generating body are separated from each other by a partition having an opening.

5. 2. The method of claim 1, wherein the base material and the metal halide generating material are separated from each other in the container by a mesh.

6. An apparatus for manufacturing a magnetic part made of an iron-based material, comprising: A cylindrical container having one end and the other end; an enclosure surrounding the cylindrical container and incorporating a heater; a gas supply source connected to one end of the cylindrical container for supplying an inert gas, H2 gas, Cl2 gas, or a mixed gas thereof; an inner container inserted into the cylindrical container; the inner container is partitioned via a partition wall including an opening into a first space in which a metal halide generator that generates a metal halide fluid containing one or more elements selected from the group consisting of Cr, V, Ti, Al, Si, and B is accommodated, and a second space in which a base material of the magnetic component made of the iron-based material is accommodated; The apparatus for manufacturing a magnetic component, wherein the first space is disposed upstream in a gas supply direction, and the second space is disposed downstream in the gas supply direction.

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