Liquid injection device

Abstract

To provide a liquid injection device that can surely avoid dripping and leaking even after stop of the transfer and injection of a working fluid or during a nozzle movement process.SOLUTION: A liquid injection device includes a nozzle, a moving element, and a control valve. The nozzle has a channel, a bypass passage, and a suck back passage. The channel penetrates through the nozzle for transferring or injecting a working fluid. The channel has a liquid outlet. The bypass passage has a first opening, a switch-on position, and a switch-off position. The suck back passage has a second opening between the first opening and the liquid outlet. The first opening and the second opening communicate with the channel. The moving element is disposed in the bypass passage. The control valve is disposed on the nozzle and controls the moving element to switch between the switch-on position and the switch-off position to open or close the channel. A suck back pump sucks the working fluid remaining between the first opening and the liquid outlet when the moving element is located at the switch-off position. As a result, the nozzle can avoid dripping and leaking even after stop of the transfer and injection of the working fluid or during the nozzle movement process.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a liquid injection device, and particularly to a liquid injection device used in the semiconductor field, which is capable of sucking back working fluid remaining inside a nozzle. [Background technology]

[0002] In the semiconductor industry, chemical liquid is usually pumped by a liquid delivery pump in a liquid injection device to a nozzle at the end of a pipeline outlet, and then sprayed or coated on the surface of a substrate to perform processes such as etching or cleaning. The effectiveness of the etching and the uniformity of the cleaning are both important factors that affect the success of the process, so it is extremely important how to control the chemical liquid so that it does not continue to drip or leak when the liquid delivery pump is cut off to stop the transfer of the liquid, thereby preventing it from affecting the process quality, and how to avoid dripping or leaking during the nozzle movement process.

[0003] Generally, the method to prevent dripping and leakage of fluids is to install a suck back valve in the fluid injection device. However, the suck back valve is installed at the tip of the outlet of the fluid delivery pump, and the distance between the tip of the outlet of the pipeline is very far, so the suck back force is limited, and excessive liquid remains in the pipeline, causing dripping and leakage at the nozzle at the outlet of the pipeline, which is particularly serious when using liquids with different fluid properties such as viscosity, specific gravity, temperature, volatility, and surface tension. How to reliably cut off the flow of fluids with different fluid properties and prevent the remaining liquid from dripping when the nozzle moves are problems that need to be solved quickly.

[0004] In light of this, the inventor of the present invention devoted himself to research into the shortcomings of the above-mentioned prior art, combined with the application of scientific theories, and made every effort to solve the above-mentioned problems, which became the improvement goal of the inventor of the present invention. Summary of the Invention [Problem to be solved by the invention]

[0005] The main object of the present invention is to effectively and reliably prevent dripping and leakage after the nozzle stops transferring and injecting working fluid, and to avoid dripping and leakage during the nozzle movement process. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides a liquid injection device for transferring and injecting at least one working fluid, the liquid injection device including a nozzle, at least one movable member, at least one control valve and a suck-back pump, the nozzle has at least one flow passage, at least one bypass passage, and at least one suck-back passage; The flow channel passes through the nozzle and is used for transporting and injecting the working fluid, and a liquid outlet is formed at the end of the flow channel; the bypass passage has a first port, a conducting position and a flow-cutting position; The suck back passage has a second port; The first port and the second port each communicate with a flow passage; the second port is located between the first port and the liquid outlet; The movable member is disposed within the bypass passage, and the control valve is disposed on one side of the nozzle; the control valve is used to control switching of the movable member between a conducting position and a blocking position to open and close the flow path; The suck-back pump is connected to the suck-back passage, and when the movable member is in the flow-stop position, the suck-back pump can suck back the working fluid remaining between the first port and the liquid discharge port.

[0007] In an embodiment of the present invention, the control valve controls the movement of a movable member between a flow-through position and a flow-cut position by high pressure gas.

[0008] In an embodiment of the present invention, the control valve has a chamber and an electrical connection port, the movable member includes a partition plate and a rod connected to the partition plate, the partition plate is disposed in the chamber and divides the chamber into a first cavity and a second cavity, the electrical connection port communicates with the first cavity, the rod is drilled from the first cavity to the control valve and a portion of the rod is accommodated in the bypass passage, and when the high-pressure gas enters the first cavity through the electrical connection port, the high-pressure gas pushes the partition plate to move the movable member to the electrical connection position.

[0009] In an embodiment of the present invention, the control valve includes an elastic member, which is disposed in the second cavity, and the elastic member elastically abuts between the partition plate and the inner wall of the chamber. When the partition plate is not subjected to the pushing force of the high-pressure gas, the elastic member pushes the partition plate to move the movable member to the flow-cutting position.

[0010] In an embodiment of the present invention, the control valve further has a flow-cutting port, which is connected to the second cavity, and when the high-pressure gas enters the second cavity through the flow-cutting port, the high-pressure gas pushes the partition plate to move the movable member to the flow-cutting position.

[0011] In an embodiment of the present invention, the device further includes at least one elastic seal, which is provided at one end of the rod away from the partition plate, and when the movable member is in the flow-blocking position, the elastic seal abuts against the inner wall of the flow path to close the flow path.

[0012] In an embodiment of the present invention, the flow paths, bypass passages, suck-back passages, movable members and control valves are all multiple in number, forming multiple injection pipe groups, each of which is independently arranged to transport and inject different working fluids.

[0013] In an embodiment of the invention, the nozzle has a water inlet passageway which passes through the nozzle and is parallel to the flow path.

[0014] In an embodiment of the present invention, the device further includes at least one coupling, the coupling being disposed in the suck-back passage and connected to the suck-back pump by a tube.

[0015] In an embodiment of the present invention, the bypass passage is perpendicular to the flow path.

[0016] In the embodiment of the present invention, the suckback pump pressure value is 0.5 kg / cm 2 ~4kg / cm 2 It is between. [Brief description of the drawings]

[0017] [Figure 1] FIG. 1 is a cross-sectional view of a first embodiment of the present invention. [Diagram 2] FIG. 1 is a first diagram of the first embodiment of the present invention in use; [Diagram 3] FIG. 2 is a second diagram of the first embodiment of the present invention in use; [Figure 4] FIG. 4 is a cross-sectional view of a second embodiment of the present invention. [Diagram 5] FIG. 11 is a cross-sectional view of a third embodiment of the present invention. [Figure 6] FIG. 1 is a first diagram of the third embodiment of the present invention in use; [Figure 7] FIG. 2 is a second diagram of the usage state of the third embodiment of the present invention. [Figure 8] 1 is a table and graph of suck back seconds data of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] The details and technical contents of the present invention are described below with the aid of diagrams, but the attached diagrams are only used for illustration and are not used to limit the present invention. EXAMPLES

[0019] The present invention provides a liquid injection device used for transferring and injecting at least one working fluid. Please refer to FIG. 1 to FIG. 3. As shown in these figures, the liquid injection device of the present invention mainly includes a nozzle 10, at least one movable member 20, at least one control valve 30 and a suck-back pump B. It should be noted that the working fluid applicable in the present invention is water, chemical liquid, cleaning liquid, etc., and the present invention does not have many limitations thereon. However, since different chemical liquids have different fluid properties (viscosity, specific gravity, temperature, volatility, surface tension, etc.), it is obviously necessary to use the liquid injection device of the present invention, which avoids the occurrence of dripping and leakage situations at the nozzle, but the liquid injection device of the present invention has no effect even if water or cleaning liquid is used as the working fluid.

[0020] The nozzle 10 has a generally cylindrical shape, and the nozzle 10 in this embodiment is a cylinder, and the end is generally conical, but the present invention is not limited thereto. The nozzle 10 has at least one flow passage 11, at least one bypass passage 12, and at least one suck-back passage 13. The flow passage 11 penetrates the nozzle 10 in a vertical direction, and the cross-sectional shape of the flow passage 11 may be a straight line, a curve, or an irregular continuous arc, and the present invention does not make many limitations thereon. The flow passage 11 is connected to the liquid feed pump A by a tube C, and can transfer and inject the working fluid. A liquid outlet 111 is formed at the end of the flow passage 11, that is, the liquid outlet 111 is located at the end of the nozzle 10. The bypass passage 12 has a first port 121, a conducting position 122, and a flow-cutting position 123. In Figs. 1 to 3, the bypass passage 12 is, from left to right, the conducting position 122, the flow-cutting position 123, and the first port 121. The bypass passage 12 communicates with the flow passage 11 via a first port 121. In this embodiment, the bypass passage 12 communicates perpendicularly to the flow passage 11, but the present invention is not limited to this. The suck-back passage 13 is connected to a suck-back pump B by a tube C. The suck-back passage 13 has a second port 131, and communicates with the flow passage 11 via the second port 131. The second port 131 is located between the first port 121 and the liquid discharge port 111.

[0021] The movable member 20 is installed in the bypass passage 12. The control valve 30 is installed on one side of the nozzle 10. The control valve 30 can control the reciprocating movement of the movable member 20 between the conducting position 122 and the flow-cutting position 123 by feeding high-pressure gas (not shown) through a tube (not shown), thereby opening and closing the flow path 11. Specifically, when the movable member 20 is in the flow-cutting position 123, the flow path 11 is in a closed state and cannot pass the working fluid, and when the movable member 20 is in the flow-cutting position 122, the flow path 11 is in an open state and can transfer and inject the working fluid. Furthermore, when the movable member 20 is in the flow-cutting position 123, the suck-back pump B can suck back the working fluid remaining between the first port 121 and the liquid discharge port 111, thereby effectively and reliably preventing the working fluid from dripping or leaking from the flow path 11 and making it possible to avoid dripping or leaking of the working fluid when the liquid injection device of the present invention is moved.

[0022] More specifically, the control valve 30 has a chamber 31 and a communication port 32, and the movable member 20 includes a partition plate 21 and a rod 22. The partition plate 21 is installed in the chamber 31 and divides the chamber 31 into a first cavity 311 and a second cavity 312. The communication port 32 communicates with the first cavity 311. One end of the rod 22 is connected to the partition plate 21 and is drilled from the first cavity 311 to the control valve 30, and a part of the rod 22 is accommodated in the bypass passage 12. When the high pressure gas enters the first cavity 311 from the communication port 32, the high pressure gas pushes the partition plate 21 to move the movable member 20 to the communication position 122.

[0023] The control valve 30 further includes an elastic member 33. The elastic member 33 is disposed in the second cavity 312. In this embodiment, the elastic member 33 is a compression spring, but the present invention is not limited thereto. Both ends of the elastic member 33 are elastically abutted between the partition plate 21 and the inner wall of the chamber 31. Preferably, the control valve 30 further includes an exhaust hole 34, which is connected to the second cavity 312. Thus, when the high-pressure gas pushes the partition plate 21 to move the movable member 20 to the conducting position 122, the partition plate 21 compresses the elastic member 33, and the air in the second cavity 312 is exhausted to the outside environment through the exhaust hole 34. Furthermore, when it is desired to close the flow path 11 in order to cut off the flow, the control valve 30 extracts the high-pressure gas from the first cavity 311 via the conductive port 32, thereby releasing the partition plate 21 from the pressure of the high-pressure gas, and the elastic member 33 is able to push the partition plate 21 by the elastic force generated after its own compression, thereby moving the movable member 20 to the flow-cutting position 123. EXAMPLES

[0024] Please refer to Figure 4. As shown in Figure 4, this is the second embodiment of the present invention, and the main difference is that instead of adopting the elastic member 33, the control valve 30 further has a flow-cutting port 35. The flow-cutting port 35 is located on the side of the through port 32 and communicates with the second cavity 312. Thus, when it is desired to cut off the flow and close the flow path 11, the control valve 30 extracts the high-pressure gas from the first cavity 311 through the through port 32, and at the same time, sends the high-pressure gas from the flow-cutting port 35 into the second cavity 312, so that the high-pressure gas can push the partition plate 21, thereby moving the movable member 20 to the flow-cutting position 123. Conversely, when it is desired to open the flow path 11 in order to restore continuity, the control valve 30 extracts the high-pressure gas from the second cavity 312 via the flow-cutting port 35, and at the same time sends the high-pressure gas from the conduction port 32 into the first cavity 311, allowing the high-pressure gas to push the partition plate 21, thereby moving the movable member 20 to the conduction position 122.

[0025] To explain further, the liquid injection device of the present invention further includes an elastic seal 40 and a joint 50. The elastic seal 40 is installed at one end of the rod 22 away from the partition plate 21. In this embodiment, the elastic seal 40 is a rubber block, but the present invention is not limited thereto. Thus, when the movable member 20 is at the flow-cutting position 123, the elastic seal 40 abuts against the inner wall of the flow path 11 to close the flow path 11, and the elastic seal 40 deforms due to its own elasticity, thereby effectively ensuring the sealing property and closing the flow path 11. The joint 50 is installed on the nozzle 10 and communicates with the suck-back passage 13, and is connected to the suck-back pump B by the tube C, so that the remaining working fluid can be completely sucked back after the flow path 11 is closed. Among them, the higher the suck-back pressure of the suck-back pump B, the shorter the time required for the suck-back pump B to completely suck back the remaining working fluid. Please refer to FIG. 8 for details. As shown in FIG. 8, this is a table and a graph of the number of seconds required by the suck-back pump B under different suck-back pressures. When the suck-back pump B is set to start 0.2 seconds after the passage 11 is closed to perform suck-back, the pump pressure is 0.5 kg / cm 2 The required time is 0.7 seconds, and the pump pressure is 2kg / cm 2 The required time is 0.5 seconds, and the pump pressure is 3.5 kg / cm 2 Therefore, from the data table and graph, it is clear that the higher the suck back pressure of Suck Back Pump B, the shorter the number of seconds required for complete suck back. EXAMPLES

[0026] Please refer to Figures 5 to 7. As shown in these figures, this is the third embodiment of the present invention, and its main difference is that the number of the flow passage 11, the bypass passage 12, the suck-back passage 13, the movable member 20 and the control valve 30 are all multiple, and each of them constitutes a plurality of liquid injection pipe groups 1. Each liquid injection pipe group 1 is arranged independently, and can transfer and inject different working fluids (preferably different chemical liquids in this embodiment), thereby meeting the needs of different semiconductor manufacturing processes. In addition, the nozzle 10 in this embodiment further has a water injection passage 14. The water injection passage 14 penetrates the nozzle 10 and is parallel to the flow passage 11, and the water injection passage 14 is only used to transfer and inject fresh water for cleaning. Therefore, the liquid injection device of this embodiment is not only capable of transporting and injecting different chemical liquids through each liquid injection pipeline group 1, but also enables the transport and injection of fresh water through the water injection passage 14, allowing for diversified usage arrangements, and at the same time, the occurrence of situations such as dripping and leakage of chemical liquids in the liquid injection device can be prevented.

[0027] It is worth noting that since the specific gravity, viscosity and surface tension of fresh water are relatively low, when the liquid feed pump A stops supplying fresh water, the fresh water remaining in the valve nozzle structure can be sucked back along the water injection passage 14 due to the pressure difference caused by the water hammer, and no dripping or leakage occurs. Therefore, the water injection passage 14 can avoid dripping or leakage without the need to separately install the bypass passage 12 and the suck-back passage 13.

[0028] In summary, the present invention has industrial applicability, novelty and inventive step, and fully meets the requirements for patent application, so the application is filed under the Patent Law. Of course, the present invention may have various other embodiments, and those skilled in the art may make various corresponding changes and modifications based on the present invention without departing from the spirit and substance of the present invention, and all such corresponding changes and modifications shall fall within the scope of protection of the claims of the present invention. [Explanation of symbols]

[0029] 1 Liquid injection pipe group 10 Nozzles 11 Flow Path 111 Liquid outlet 12 Bypass Passage 121 First Port 122 Continuity position 123 Disruption position 13 Suck Back Passage 131 Second Port 14 Water injection passage 20 Movable parts 21 Partition 22 Rod 30 Control valve 31 Chamber 311 First Cavity 312 Second Cavity 32 Conduction Port 33 Elastic Members 34 Exhaust Vent 35 Current-Breaking Port 40 Elastic sealing material 50 Joints A Liquid delivery pump B Suckback pump C Tube

Claims

1. A liquid injection device for transferring and injecting at least one working fluid, the liquid injection device comprising: a nozzle having at least one flow path, at least one bypass passage, and at least one suck-back passage, the flow paths penetrating the nozzle and used for transferring and injecting the working fluid, a liquid outlet port being formed at an end of the flow path, the bypass passage having a first port, a conducting position and a flow-cutting position, the suck-back passage having a second port, the first port and the second port respectively communicating with the flow paths, the second port being located between the first port and the liquid outlet port; At least one movable member disposed within the bypass passage; a control valve disposed on one side of the nozzle and used to control the switching of the movable member between the conducting position and the flow-cutting position to open and close the flow passage; a suck-back pump connected to the suck-back passage, In the liquid injection device, when the movable member is in the flow-cutting position, the suck-back pump sucks back the working fluid remaining between the first port and the liquid outlet.

2. The liquid injection device according to claim 1 , wherein the control valve controls the movable member to reciprocate between the flow-through position and the flow-cutoff position by a high-pressure gas.

3. 3. The liquid injection device according to claim 2, wherein the control valve has a chamber and a connecting port, the movable member includes a partition plate and a rod connected to the partition plate, the partition plate is provided in the chamber and divides the chamber into a first cavity and a second cavity, the connecting port is connected to the first cavity, the rod is drilled from the first cavity to the control valve and a portion of the rod is accommodated in the bypass passage, and when the high-pressure gas enters the first cavity via the connecting port, the high-pressure gas pushes the partition plate to move the movable member to the connecting position.

4. The liquid injection device of claim 3, wherein the control valve includes an elastic member, the elastic member is disposed in the second cavity, the elastic member elastically abuts between the partition plate and the inner wall of the chamber, and when the partition plate is not being pushed by the high-pressure gas, the elastic member pushes the partition plate to move the movable member to the flow-cutting position.

5. The liquid injection device of claim 3, wherein the control valve further has a flow-cutting port, the flow-cutting port is connected to the second cavity, and when the high-pressure gas enters the second cavity through the flow-cutting port, the high-pressure gas pushes the partition plate to move the movable member to the flow-cutting position.

6. The liquid injection device of claim 3, further comprising at least one elastic sealing material, the elastic sealing material being provided at one end of the rod away from the partition plate, and when the movable member is in the flow-blocking position, the elastic sealing material abuts against an inner wall of the flow path to close the flow path.

7. 2. The liquid injection device according to claim 1, wherein the flow paths, bypass passages, suck-back passages, movable members and control valves are all multiple in number to form multiple liquid injection pipe groups, and each of the liquid injection pipe groups is arranged independently to transfer and inject different working fluids.

8. 2. The liquid injection device according to claim 1, wherein the nozzle has a water injection passage, the water injection passage passing through the nozzle and parallel to the flow path.

9. The liquid injection device according to claim 1 , further comprising at least one joint, the joint being provided in the suck-back passage and connected to a suck-back pump by a tube.

10. The liquid injection device according to claim 1 , wherein the bypass passage is perpendicular to the flow path.

11. Among them, the suckback pump pressure value is 0.5 kg / cm ２ ~4kg / cm ２ The liquid injection device according to claim 1 , wherein the liquid injection rate is between 0.5 and 1.

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