Capacitive sensor and measuring device

Abstract

Provided are a capacitance sensor and a measurement device which make it possible to reduce the impact of stray capacitance on capacitance detection. A capacitance sensor (1) equipped with: a sensor unit (3) which has a first electrode (31) and a second electrode (32) which constitute a capacitor (30); and a capacitance detection circuit (4) which is connected to the sensor unit (3). The capacitance detection circuit (4) is equipped with: a charge / discharge circuit (42) which charges and discharges a capacitor (30) and is connected to the first electrode (31) and the second electrode (32); a control circuit (43) for controlling the charge / discharge circuit (42) in a manner such that the capacitor (30) repeatedly charges and discharges; and an auxiliary capacitance circuit (44) which has one or more capacitors from among a first auxiliary capacitor (44a) which is connected to the first electrode (31) so as to be parallel to the capacitor (30), and a second auxiliary capacitor (44b) which is connected to the second electrode (32) so as to be parallel to the capacitor (30).

Description

[Technical field]

[0001] The present disclosure relates to a capacitance sensor and a measuring instrument. [Background technology]

[0002] Patent Document 1 discloses an oral moisture measuring device that is equipped with a capacitance-type sensor (capacitive sensor). The oral moisture measuring device described in Patent Document 1 includes a swinging member that swings around a predetermined swing center relative to a main body, a moisture content detection unit that is provided on the tip side of the swinging member and directly or indirectly abuts against a measurement site in the oral cavity to detect the moisture content, and a biasing member that biases the swinging member in one of the swing directions. The moisture content detection unit includes a capacitance-type sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2015 / 125222 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, the oral moisture meter is used while being held by a person's hand, and therefore the measurement accuracy of the oral moisture meter may be reduced due to the influence of stray capacitance generated between the human body and the oral moisture meter.

[0005] The present disclosure provides a capacitance sensor and a measuring instrument that can reduce the effect of stray capacitance on capacitance detection. [Means for solving the problem]

[0006] A capacitance sensor according to an aspect of the present disclosure includes a sensor unit having a first electrode and a second electrode that form a capacitor, and a capacitance detection circuit connected to the sensor unit. The capacitance detection circuit includes a charge / discharge circuit connected to the first electrode and the second electrode for charging and discharging the capacitor, a drive circuit for driving the charge / discharge circuit so that the capacitor repeatedly charges and discharges, and an auxiliary capacitance circuit having at least one of a first auxiliary capacitor connected to the first electrode so as to be in parallel with the capacitor, and a second auxiliary capacitor connected to the second electrode so as to be in parallel with the capacitor.

[0007] A measuring device according to one aspect of the present disclosure includes the above-described capacitance sensor and a handheld housing that houses the capacitance sensor. Effect of the Invention

[0008] Aspects of the present disclosure can reduce the effect of stray capacitance on capacitance sensing. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic diagram of a configuration example of a measuring device according to a first embodiment; [Diagram 2] Circuit diagram of the capacitance sensor of the measuring device in Figure 1 [Diagram 3] 3 is a schematic cross-sectional view of a configuration example of a sensor unit of the capacitance sensor of FIG. 2; [Figure 4] Schematic plan view of the sensor unit in FIG. [Diagram 5] Schematic bottom view of the sensor part in Figure 3 [Figure 6] FIG. 3 is a timing diagram of an example of the operation of the capacitance detection circuit of the capacitance sensor of FIG. [Figure 7] FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 8] FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 9] FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 10] FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 11]FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 12] FIG. 3 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 2; [Figure 13] FIG. 1 is a timing diagram illustrating an example of an operation of a capacitance detection circuit according to a comparative example. [Figure 14] An illustration of the capacitance that occurs when using the measuring device in Figure 1 [Figure 15] FIG. 11 is a timing diagram illustrating an example of an operation of the capacitance detection circuit according to the modification of the first embodiment. [Figure 16] FIG. 11 is a circuit diagram of a configuration example of a capacitance sensor of a measuring device according to a second embodiment; [Figure 17] FIG. 17 is a timing diagram of an example of the operation of the capacitance sensing circuit of the capacitance sensor of FIG. 16; [Figure 18] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 19] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 20] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 21] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 22] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 23] FIG. 17 is an explanatory diagram of an example of the operation of the capacitance detection circuit of FIG. 16. [Figure 24] FIG. 11 is a timing diagram illustrating an example of an operation of the capacitance detection circuit according to the modification of the second embodiment. [Diagram 25] FIG. 13 is a schematic diagram of a configuration example of a measuring device according to a third embodiment; [Figure 26] FIG. 26 is a schematic perspective view of a configuration example of a head portion of the measuring device of FIG. 25. [Figure 27] FIG. 13 is a schematic perspective view of a configuration example of a head part of a measuring device according to a fourth embodiment; [Figure 28] FIG. 28 is an explanatory diagram of a configuration example of a sensor unit of a capacitance sensor of the measuring device of FIG. 27; [Figure 29] 28 is a schematic cross-sectional view of a configuration example of a sensor unit of a capacitance sensor of the measuring device of FIG. 27. [Diagram 30] 30 is a schematic plan view of the sensor unit in FIG. 29; [Diagram 31] Schematic bottom view of the sensor part in FIG. [Diagram 32] FIG. 13 is a schematic cross-sectional view of a configuration example of a sensor unit of a capacitance sensor of a measuring device according to a fifth embodiment; [Diagram 33] 33 is a schematic plan view of the sensor unit in FIG. 32; [Diagram 34] 33 is a schematic bottom view of the sensor part of FIG. 32. [Diagram 35] FIG. 13 is a schematic cross-sectional view of a configuration example of a sensor unit of a capacitance sensor of a measuring device according to a sixth embodiment; [Diagram 36] FIG. 23 is a schematic cross-sectional view of a configuration example of a sensor unit of a capacitance sensor of a measuring device according to a seventh embodiment; [Figure 37] FIG. 23 is a schematic cross-sectional view of a configuration example of a sensor unit of a capacitance sensor of a measuring device according to an eighth embodiment; [Figure 38] FIG. 13 is a schematic perspective view of a configuration example of a head part of a measuring device according to a ninth embodiment; [Figure 39] FIG. 23 is a schematic perspective view of a configuration example of a head part of a measuring device according to a tenth embodiment; [Diagram 40] FIG. 19 is a schematic diagram of a configuration example of a measuring device according to an eleventh embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] [1. Embodiment] Hereinafter, the embodiments will be described in detail with reference to the drawings as appropriate. However, more detailed explanation than necessary may be omitted. For example, detailed explanation of already well-known matters or duplicate explanation of substantially the same configuration may be omitted. This is to avoid the following explanation becoming unnecessarily redundant and to facilitate understanding by those skilled in the art. Note that the inventor(s) provide the attached drawings and the following explanation so that those skilled in the art can fully understand the present disclosure, and do not intend for them to limit the subject matter described in the claims.

[0011] Unless otherwise specified, the positional relationships such as up, down, left, and right are based on the positional relationships shown in the drawings. Each figure described in the following embodiments is a schematic diagram, and the ratio of the size and thickness of each component in each figure does not necessarily reflect the actual dimensional ratio. Furthermore, the dimensional ratio of each element is not limited to the ratio shown in the drawings.

[0012] In the following embodiments, "A and B are connected to C and D, respectively" and similar expressions mean "A is connected to C, and B is connected to D", and do not mean "A and B are connected to C, and A and B are connected to D". Furthermore, "multiple As are connected to multiple Cs, respectively" and similar expressions mean "As and Cs are connected in one-to-one correspondence".

[0013] In the circuit configuration of the present disclosure, "connected" includes not only direct connection by a connection terminal and / or a wiring conductor, but also electrical connection via other circuit components. Also, "connected between A and B" means connected to both A and B between A and B.

[0014] [1.1 First embodiment] [1.1.1 Configuration] FIG. 1 is a schematic diagram of an example configuration of a measuring device 10 according to a first embodiment. The measuring device 10 is a moisture measuring device for measuring the moisture content of a measurement object. The measurement object is, for example, a living organism. In particular, the measurement object is the oral cavity of the living organism. In this embodiment, the measuring device 10 is used to measure the moisture content of a specific site in the human oral cavity. In healthcare applications, the measuring device 10 is also called an oral moisture meter.

[0015] 1 is a capacitance-type moisture meter. The measurement device 10 includes a capacitance sensor 1 and a handheld housing 2.

[0016] The handheld housing 2 accommodates the capacitance sensor 1. The handheld housing 2 is sized and heavy enough to be held in one hand. The handheld housing 2 has a waterproof structure and protects the capacitance sensor 1 in the handheld housing 2 from moisture. The handheld housing 2 in FIG. 1 is rod-shaped. The handheld housing 2 includes a head portion 21, a grip portion 22, and a probe portion 23. The handheld housing 2 in FIG. 1 is shaped like a so-called toothbrush. The head portion 21 is a portion of the handheld housing 2 that comes into contact with a measurement target. The head portion 21 is disposed at a first end (the left end in FIG. 1) of the handheld housing 2. In this embodiment, the head portion 21 is inserted into a person's mouth during use. The grip portion 22 is a portion of the handheld housing 2 that is held by hand. The grip portion 22 is disposed at a second end (the right end in FIG. 1) of the handheld housing 2. The grip portion 22 includes a conductive portion 221. The conductive portion 221 is exposed on the surface of the grip portion 22. The conductive portion 221 should be located at a position where a person's hand touches when the person grips the grip portion 22. The conductive portion 221 is connected to a reference potential Vg (see FIG. 2) described below. The probe portion 23 connects the head portion 21 and the grip portion 22. The length of the probe portion 23 may be set so that a person can easily grip the grip portion 22 and bring the head portion 21 into contact with the object to be measured.

[0017] The capacitance sensor 1 determines the moisture content of the measurement target based on the capacitance. FIG. 2 is a circuit diagram of a configuration example of the capacitance sensor 1. The capacitance sensor 1 of FIG. 2 includes a sensor unit 3, a capacitance detection circuit 4, and a processing circuit 5. In this embodiment, the sensor unit 3 and the capacitance detection circuit 4 are located in the head unit 21 of the handheld housing 2. The capacitance detection circuit 4 may be located in the probe unit 23 of the handheld housing 2. In this embodiment, the processing circuit 5 is located in the grip unit 22 of the handheld housing 2. As shown in FIG. 2, the capacitance sensor 1 obtains power required for the operation of the capacitance sensor 1 from a DC power source 6. The DC power source 6 may be a primary battery or a secondary battery. The DC power source 6 may be replaceable.

[0018] The sensor unit 3 in Fig. 2 includes a first electrode 31 and a second electrode 32. The sensor unit 3 is configured such that the first and second electrodes 31, 32 come into contact with a measurement object, thereby forming a capacitor 30 together with a part of the measurement object. The configuration of the sensor unit 3 will be described in further detail below with reference to Figs. 3 to 5. Fig. 3 is a schematic cross-sectional view of an example of the configuration of the sensor unit 3. Fig. 4 is a schematic plan view of the sensor unit 3. Fig. 5 is a schematic bottom view of the sensor unit 3.

[0019] The sensor unit 3 in Fig. 3 includes a sensor substrate 33 and a protective layer 34 in addition to a first electrode 31 and a second electrode 32. As shown in Figs. 3 to 5, the sensor substrate 33 has a rectangular plate shape. The sensor substrate 33 has a first surface 33a and a second surface 33b in the thickness direction of the sensor substrate 33. The first electrode 31, the second electrode 32, and the protective layer 34 are arranged on the sensor substrate 33.

[0020] The first electrode 31 has an electrode portion 311, a terminal portion 312, and a connection portion 313. The electrode portion 311 is used for contacting a measurement object. As shown in FIG. 3, the electrode portion 311 is disposed on a first surface 33a of the sensor substrate 33. As shown in FIG. 4, the electrode portion 311 has a comb-tooth structure. The electrode portion 311 has a plurality of teeth 3111 arranged at a predetermined interval and a connection portion 3112 connecting one ends of the plurality of teeth 3111 to each other. As shown in FIG. 3, the electrode portion 311 includes a plurality of metal layers. The plurality of metal layers of the electrode portion 311 include a Ni layer 311a, a Pd layer 311b covering the Ni layer 311a, and an Au layer 311c covering the Pd layer 311b. The plurality of metal layers of the electrode portion 311 may be formed by plating. The terminal portion 312 is used for connection to the capacitance detection circuit 4. As shown in FIG. 3, the terminal portion 312 is disposed on the second surface 33b of the sensor substrate 33. As shown in FIG. 4, the terminal portion 312 is in the form of a rectangular plate. As shown in FIG. 3, the terminal portion 312 includes a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 312 include a Ni layer 312a, a Pd layer 312b covering the Ni layer 312a, and an Au layer 312c covering the Pd layer 312b. The plurality of metal layers of the terminal portion 312 may be formed by a plating process. The connection portion 313 connects the electrode portion 311 and the terminal portion 312. As shown in FIG. 3, the connection portion 313 is a via that penetrates the sensor substrate 33. The connection portion 313 is made of, for example, Ag.

[0021] The second electrode 32 has an electrode portion 321, a terminal portion 322, and a connection portion 323. The electrode portion 321 is used for contacting a measurement object. As shown in FIG. 3, the electrode portion 321 is disposed on the first surface 33a of the sensor substrate 33. As shown in FIG. 4, the electrode portion 321 has a comb-tooth structure. The electrode portion 321 has a plurality of teeth 3211 arranged at a predetermined interval and a connection portion 3212 connecting one ends of the plurality of teeth 3211 to each other. As shown in FIG. 3, the electrode portion 321 includes a plurality of metal layers. The plurality of metal layers of the electrode portion 321 include a Ni layer 321a, a Pd layer 321b covering the Ni layer 321a, and an Au layer 321c covering the Pd layer 321b. The plurality of metal layers of the electrode portion 321 may be formed by plating. The terminal portion 322 is used for connection to the capacitance detection circuit 4. As shown in FIG. 3, the terminal portion 322 is disposed on the second surface 33b of the sensor substrate 33. As shown in FIG. 4, the terminal portion 322 is in the form of a rectangular plate. As shown in FIG. 3, the terminal portion 322 includes a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 322 include a Ni layer 322a, a Pd layer 322b covering the Ni layer 322a, and an Au layer 322c covering the Pd layer 322b. The plurality of metal layers of the terminal portion 322 may be formed by a plating process. The connection portion 323 connects the electrode portion 321 and the terminal portion 322. As shown in FIG. 3, the connection portion 323 is a via that penetrates the sensor substrate 33. The connection portion 323 is made of, for example, Ag.

[0022] 3, the protective layer 34 is disposed on the first surface 33a of the sensor substrate 33. The protective layer 34 covers the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32. The protective layer 34 protects the first electrode 31 and the second electrode 32. The protective layer 34 has, for example, insulating properties. The protective layer 34 is formed of, for example, an insulating material such as polyimide.

[0023] 2 detects the capacitance of the capacitor 30 of the sensor unit 3 based on the charging and discharging time of the capacitor 30. The capacitance detection circuit 4 includes a power supply terminal 41a connected to a power supply Iin, a reference potential terminal 41b connected to a reference potential Vg, a charging and discharging circuit 42, a control circuit 43, and an auxiliary capacitance circuit 44. The charging and discharging circuit 42, the control circuit 43, and the auxiliary capacitance circuit 44 are disposed on a circuit board 4a separate from the sensor board 33 (see FIG. 14). The power supply Iin is disposed on the circuit board 4a.

[0024] The power supply Iin supplies power to the capacitance detection circuit 4 for charging the capacitor 30. The power supply Iin in FIG. 2 is a constant current source that outputs a constant output current to the capacitance detection circuit 4. source Iin operates using power from a DC power supply 6. The power supply Iin may have a conventionally known configuration, and therefore detailed description thereof will be omitted.

[0025] The charge / discharge circuit 42 in Fig. 2 is connected to the first and second electrodes 31, 32 constituting the capacitor 30, and is configured to charge and discharge the capacitor 30 of the sensor unit 3. The charge / discharge circuit 42 in Fig. 2 is connected between a power supply terminal 41a and a reference potential terminal 41b. The charge / discharge circuit 42 includes first to fourth switches S1 to S4.

[0026] The first switch S1 is connected between the first electrode 31 and the power supply terminal 41a. The second switch S2 is connected between the second electrode 32 and the power supply terminal 41a. The third switch S3 is connected between the first electrode 31 and the reference potential terminal 41b. The fourth switch S4 is connected between the second electrode 32 and the reference potential terminal 41b. In other words, in the charge / discharge circuit 42, the first switch S1 and the third switch S3 form a series circuit, the series circuit of the first switch S1 and the third switch S3 is connected between the power supply terminal 41a and the reference potential terminal 41b, and the connection point of the first switch S1 and the third switch S3 is connected to the first electrode 31. In other words, in the charge / discharge circuit 42, the second switch S2 and the fourth switch S4 form a series circuit, the series circuit of the second switch S2 and the fourth switch S4 is connected between the power supply terminal 41a and the reference potential terminal 41b, and the connection point between the second switch S2 and the fourth switch S4 is connected to the second electrode 32.

[0027] In this embodiment, each of the first to fourth switches S1 to S4 is a field effect transistor. Each of the first to fourth switches S1 to S4 is, for example, a MOSFET. Here, the first and second switches S1 and S2 are enhancement type P-channel MOSFETs, and the third and fourth switches S3 and S4 are enhancement type N-channel MOSFETs.

[0028] The charge / discharge circuit 42 is configured to be able to complementarily switch between a first state and a second state. The first state is a state in which a constant current is supplied to the first electrode 31 of the sensor unit 3. In FIG. 2, the first state is a state in which an output current from the power supply Iin is supplied to the first electrode 31. In the first state, the first and fourth switches S1 and S4 are turned on, and the second and third switches S2 and S3 are turned off. Therefore, the first and second electrodes 31 and 32 are connected to the power supply terminal 41a and the reference potential terminal 41b, respectively. In the first state, the capacitor 30 is charged so that the potential of the first electrode 31 is higher than the potential of the second electrode 32. The second state is a state in which a constant current is supplied to the second electrode 32 of the sensor unit 3. In FIG. 2, the second state is a state in which an output current from the power supply Iin is supplied to the second electrode 32. In the second state, the first and fourth switches S1 and S4 are turned off, and the second and third switches S2 and S3 are turned on. Therefore, the first and second electrodes 31, 32 are connected to the reference potential terminal 41b and the power supply terminal 41a, respectively. In the second state, the capacitor 30 is charged so that the potential of the second electrode 32 is higher than the potential of the first electrode 31. The charge / discharge circuit 42 supplies power to the first and second electrodes 31, 32 so that the positive and negative potentials of the first electrode 31 and the second electrode 32 alternate, and therefore can also be said to be an oscillator circuit.

[0029] When switching between the first state and the second state, the charge / discharge circuit 42 sets the first switch S1 to the fourth switch S4 to the third state in which they are all off to prevent an overcurrent caused by a short circuit in two switches connected in series (the first and third switches S1, S3 or the second and fourth switches S2, S4), thereby providing a dead time. When switching between the first state and the second state, the charge / discharge circuit 42 controls the first to fourth switches S1 to S4 so that the first state → the third state → the second state, or the second state → the third state → the first state.

[0030] The auxiliary capacitance circuit 44 in FIG. 2 includes first and second auxiliary capacitors 44a and 44b. The first and second auxiliary capacitors 44a and 44b are provided to reduce the effect of stray capacitance on the detection of the capacitance of the capacitor 30. The first auxiliary capacitor 44a has a first end connected to the first electrode 31 and a second end connected to the reference potential terminal 41b so as to be in parallel with the capacitor 30. In this embodiment, the first auxiliary capacitor 44a is connected in parallel to the third switch S3. As a result, the first auxiliary capacitor 44a is connected between the first electrode 31 and the reference potential terminal 41b. The second auxiliary capacitor 44b has a first end connected to the second electrode 32 and a second end connected to the reference potential terminal 41b so as to be in parallel with the capacitor 30. In this embodiment, the second auxiliary capacitor 44b is connected in parallel to the fourth switch S4. As a result, the second auxiliary capacitor 44b is connected between the second electrode 32 and the reference potential terminal 41b.

[0031] The capacitances of the first and second auxiliary capacitors 44a, 44b may be set based on the measurable range of the capacitance of the capacitor 30, for example. The measurable range of the capacitance of the capacitor 30 is appropriately set based on the measurement target. As an example, the capacitances of the first and second auxiliary capacitors 44a, 44b may be set to 5 times any value within the measurable range of the capacitance of the capacitor 30. Here, the any value may be an upper limit value. In the case of measuring the amount of moisture in the oral cavity, as an example, the upper limit value may be 9.4 pF, and the capacitances of the first and second auxiliary capacitors 44a, 44b may be 47 pF. In this embodiment, the capacitances of the first and second auxiliary capacitors 44a, 44b are equal to each other.

[0032] The auxiliary capacitance circuit 44 is disposed between the sensor substrate 33 of the sensor unit 3 and the circuit substrate 5a, and at a position closer to the circuit substrate 5a than the sensor substrate 33. In this embodiment, the auxiliary capacitance circuit 44 is disposed on the circuit substrate 5a. Since the sensor unit 3 is a contact portion of the capacitance sensor 1 that contacts the measurement target, the influence of stray capacitance can be suppressed as the sensor unit 3 is farther from the contact portion. Therefore, the influence of stray capacitance from the first electrode 31 and the second electrode 32 of the sensor unit 3 can be reduced.

[0033] 2 is configured to control the charge / discharge circuit 42 so that the capacitor 30 of the sensor unit 3 is repeatedly charged and discharged. In this embodiment, the control circuit 43 controls the charge / discharge circuit 42 so that the charge / discharge circuit 42 is alternately switched between a first state and a second state.

[0034] The following provides a more detailed explanation of the control circuit 43. The control circuit 43 in FIG.

[0035] The determination circuit 431 is configured to determine the timing of switching between charging and discharging the capacitor 30 of the sensor unit 3. The timing of switching between charging and discharging the capacitor 30 is the timing of switching between the first state and the second state of the charge / discharge circuit 42. The determination circuit 431 determines the timing of switching between charging and discharging the capacitor 30 of the sensor unit 3 based on the potential of the first electrode 31 and the potential of the second electrode 32. The determination circuit 431 executes a determination as to whether the potential of the first electrode 31 has reached a first threshold value when the charge / discharge circuit 42 is in the first state. The determination circuit 431 executes a determination as to whether the potential of the second electrode 32 has reached a second threshold value when the charge / discharge circuit 42 is in the second state. In this embodiment, the first threshold value and the second threshold value are equal to each other. The result of the determination by the determination circuit 431 is output to the drive circuit 432. The judgment circuit 431 may be configured, for example, to include a first comparator that compares the potential of the first electrode 31 with a first threshold, a second comparator that compares the potential of the second electrode 32 with a second threshold, and an OR circuit to which the output signals from the first and second comparators are input.

[0036] The drive circuit 432 is configured to drive the first to fourth switches S1 to S4 of the charge / discharge circuit 42 according to the determination result of the determination circuit 431. In this embodiment, the drive circuit 432 outputs a first drive signal D1 common to the first and third switches S1 and S3, and outputs a second drive signal D2 common to the second and fourth switches S2 and S4. As described above, the first and second switches S1 and S2 are enhancement type P-channel MOSFETs, and the third and fourth switches S3 and S4 are enhancement type N-channel MOSFETs. When driving the first to fourth switches S1 to S4, the voltage value of the first drive signal D1 and the voltage value of the second drive signal D2 are set to a high level or a low level. The high level and the low level are determined by the characteristics of the enhancement type P-channel MOSFETs of the first and second switches S1 and S2 and the enhancement type N-channel MOSFETs of the third and fourth switches S3 and S4. The high and low levels are set so that when the first drive signal D1 is at a high level, the first switch S1 is on and the third switch S3 is off, and when the first drive signal D1 is at a low level, the first switch S1 is off and the third switch S3 is on. The high and low levels are set so that when the second drive signal D2 is at a high level, the second switch S2 is on and the fourth switch S4 is off, and when the second drive signal D2 is at a low level, the second switch S2 is off and the fourth switch S4 is on. The first drive signal D1 and the second drive signal D2 are not set to be at a high level or a low level at the same time.

[0037] When the drive circuit 432 sets the charge / discharge circuit 42 to the first state, the drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level. This turns the first and fourth switches S1 and S4 on and the second and third switches S2 and S3 off. When the drive circuit 432 sets the charge / discharge circuit 42 to the second state, the drive circuit 432 sets the voltage value of the first drive signal D1 to a low level and the voltage value of the second drive signal D2 to a high level. This turns the first and fourth switches S1 and S4 off and the second and third switches S2 and S3 on.

[0038] When the determination circuit 431 determines that the potential of the first electrode 31 has reached the first threshold value in a state in which the voltage value of the first drive signal D1 is set to a high level and the voltage value of the second drive signal D2 is set to a low level, the drive circuit 432 sets the voltage value of the first drive signal D1 to a low level and the voltage value of the second drive signal D2 to a high level. This switches the charge / discharge circuit 42 from the first state to the second state. When the determination circuit 431 determines that the potential of the second electrode 32 has reached the second threshold value in a state in which the voltage value of the first drive signal D1 is set to a low level and the voltage value of the second drive signal D2 is set to a high level, the drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level. This switches the charge / discharge circuit 42 from the second state to the first state. When switching the voltage values ​​of the first and second drive signals D1 and D2 between high and low levels, the drive circuit 432 provides a dead time by setting them to the third state as described above. For example, in the process of switching the voltage value of the first drive signal D1 between high and low levels and switching the voltage value of the second drive signal D2 between high and low levels, the drive circuit 432 sets the voltage values ​​of the first drive signal D1 and the second drive signal D2 to an intermediate voltage at which all of the first to fourth switches S1 to S4 are turned off, as shown in FIG. 8. This reduces the possibility that the power supply Iin and the reference potential Vg are short-circuited in the charge / discharge circuit 42.

[0039] Next, an example of the operation of the capacitance detection circuit 4 will be described with reference to FIGS.

[0040] Fig. 6 is a timing diagram of an example of the operation of the capacitance detection circuit 4. In Fig. 6, V1 indicates the potential of the first electrode 31, and V2 indicates the potential of the second electrode 32. In Fig. 6, H corresponds to a state in which the voltage value of the second drive signal D2 is at a high level, and L indicates a state in which the voltage value of the second drive signal D2 is at a low level. Figs. 7 to 13 are explanatory diagrams of an example of the operation of the capacitance detection circuit 4. In Figs. 7 to 13, the control circuit 43 is omitted only for the sake of simplicity.

[0041] 6, no charge is stored in the capacitor 30. The drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level, thereby setting the charge / discharge circuit 42 to the first state.

[0042] 7 is an explanatory diagram of the operation of the capacitance detection circuit 4 when the charge / discharge circuit 42 is in the first state. As shown in FIG. 7, in the first state, the first and fourth switches S1 and S4 are on, and the second and third switches S2 and S3 are off. A constant output current I1 is supplied to the first electrode 31 from the power source Iin. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, in the first state, the first auxiliary capacitor 44a is connected in parallel to the capacitor 30, and charge is also stored in the first auxiliary capacitor 44a.

[0043] The determination circuit 431 executes a determination as to whether the potential V1 of the first electrode 31 reaches the first threshold value when the charge / discharge circuit 42 is in the first state. In FIG. 6, the first threshold value is Vth. At time t11, the determination circuit 431 determines that the potential V1 of the first electrode 31 reaches the first threshold value (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. In this embodiment, when switching the charge / discharge circuit 42 from the first state to the second state, the drive circuit 432 sets the charge / discharge circuit 42 to the third state, thereby providing a dead time. More specifically, in the process of setting the voltage value of the first drive signal D1 from the high level to the low level and the voltage value of the second drive signal D2 from the low level to the high level, the drive circuit 432 sets the voltage value of the first drive signal D1 and the voltage value of the second drive signal D2 to intermediate voltages at which all of the first to fourth switches S1 to S4 are turned off, as shown in FIG. 8. 8 is an explanatory diagram of the operation of the capacitance detection circuit 4 when the charge / discharge circuit 42 is in the third state. After that, the drive circuit 432 sets the voltage value of the first drive signal D1 to a low level and the voltage value of the second drive signal D2 to a high level, thereby setting the charge / discharge circuit 42 to the second state.

[0044] FIG. 9 is an explanatory diagram of the operation of the capacitance detection circuit 4 immediately after the charge / discharge circuit 42 is switched to the second state. As shown in FIG. 9, in the second state, the first and fourth switches S1 and S4 are off, and the second and third switches S2 and S3 are on. In the capacitor 30, the first electrode 31 is connected to the reference potential terminal 41b, and the second electrode 32 is connected to the power supply terminal 41a. Immediately after the charge / discharge circuit 42 is switched to the second state, the potential V2 of the second electrode 32 becomes negative. Since the charge / discharge circuit 42 has the second auxiliary capacitor 44b connected in parallel to the second electrode 32, in the second state, the second auxiliary capacitor 44b is connected in parallel to the capacitor 30. As a result, the charge of the capacitor 30 moves to the second auxiliary capacitor 44b. In FIG. 6, the potential V2 of the second electrode 32 drops to Vd. Vd is a negative value. Since Vd is determined by the charge stored in the capacitor 30 in the first state and the combined capacitance of the capacitor 30 and the second auxiliary capacitor 44b, the following equation (1) holds:

[0045]

number

[0046] In equation (1), Ce is the capacitance of the capacitor 30, and Cg is the capacitance of the first auxiliary capacitor 44a and the second auxiliary capacitor 44b.

[0047] In this embodiment, the capacitance (Cg) of the second auxiliary capacitor 44b and the first threshold (Vth) are set so that |Vd|≦|Vf| is satisfied. Vf is a negative value, and the magnitude of Vf is equal to the threshold voltage of the body diode of the field effect transistor used as the third switch S3. When |Vd|>|Vf|, the forward voltage of the body diode exceeds |Vf|, so that the potential V2 of the second electrode 32 drops to Vf. The magnitude of Vf corresponds to the threshold voltage of the body diode of the field effect transistor of the third switch S3, and is the lower limit of the potential V2 of the second electrode 32 when the charging / discharging circuit 42 is switched from the first state to the second state in the case where the second auxiliary capacitor 44b is not present.

[0048] In the second state, a constant output current I1 is supplied from the power source Iin to the second electrode 32. This charges the capacitor 30 so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31. Charge is also accumulated in the second auxiliary capacitor 44b. Figure 10 is an explanatory diagram of the operation of the capacitance detection circuit 4 after time has passed since the charge / discharge circuit 42 was switched to the second state. In Figure 10, the potential V2 of the second electrode 32 is positive.

[0049] The determination circuit 431 executes a determination as to whether the potential V2 of the second electrode 32 reaches the second threshold when the charge / discharge circuit 42 is in the second state. In FIG. 6, the second threshold is equal to the first threshold and is Vth. At time t12, the determination circuit 431 determines that the potential V2 of the second electrode 32 reaches the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. In this embodiment, when switching the charge / discharge circuit 42 from the second state to the first state, the drive circuit 432 sets the charge / discharge circuit 42 to the third state to provide a dead time. FIG. 11 is an explanatory diagram of the operation of the capacitance detection circuit 4 when the charge / discharge circuit 42 is in the third state. After this, the drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level to set the charge / discharge circuit 42 to the first state.

[0050] FIG. 12 is an explanatory diagram of the operation of the capacitance detection circuit 4 immediately after the charge / discharge circuit 42 is switched to the first state. As shown in FIG. 12, in the first state, the first and fourth switches S1 and S4 are on, and the second and third switches S2 and S3 are off. In the capacitor 30, the first electrode 31 is connected to the power supply terminal 41a, and the second electrode 32 is connected to the reference potential terminal 41b. Immediately after the charge / discharge circuit 42 is switched to the first state, the potential V1 of the first electrode 31 becomes negative. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, in the first state, the first auxiliary capacitor 44a is connected in parallel to the capacitor 30. As a result, the charge of the capacitor 30 moves to the first auxiliary capacitor 44a. In FIG. 6, the potential V1 of the first electrode 31 drops to Vd, similarly to the second electrode 32.

[0051] In this embodiment, the capacitance (Cg) of the first auxiliary capacitor 44a and the second threshold (Vth) are set so that |Vd|≦|Vf| is satisfied. Vf is a negative value, and the magnitude of Vf is equal to the threshold voltage of the body diode of the field effect transistor used as the fourth switch S4. When |Vd|>|Vf|, the forward voltage of the body diode exceeds |Vf|, so that the potential V1 of the first electrode 31 drops to Vf. The magnitude of Vf corresponds to the threshold voltage of the body diode of the field effect transistor of the fourth switch S4, and is the lower limit of the potential V1 of the first electrode 31 when the charging / discharging circuit 42 is switched from the second state to the first state in the case where the first auxiliary capacitor 44a is not present.

[0052] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. This charges the capacitor 30 so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Charge is also accumulated in the first auxiliary capacitor 44a. After a period of time has elapsed since the charge / discharge circuit 42 was switched to the first state, the potential V1 of the first electrode 31 becomes positive, as shown in FIG.

[0053] 6, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. As a result, the capacitor 30 is charged so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31.

[0054] 6, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0055] 6, similarly to the case of time t13, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth), and the drive circuit 432 sets the charge / discharge circuit 42 to the second state. As a result, the capacitor 30 is charged so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31.

[0056] In this manner, when the charge / discharge circuit 42 is in the first state and the potential V1 of the first electrode 31 reaches the first threshold (Vth), the control circuit 43 switches the charge / discharge circuit 42 from the first state to the second state. When the charge / discharge circuit 42 is in the second state and the potential V2 of the second electrode 32 reaches the second threshold (Vth), the control circuit 43 switches the charge / discharge circuit 42 from the second state to the first state. Therefore, in the capacitance detection circuit 4, a state in which the capacitor 30 is charged so that the potential of the first electrode 31 is higher than the potential of the second electrode 32, and a state in which the capacitor 30 is charged so that the potential of the second electrode 32 is higher than the potential of the first electrode 31 are repeated.

[0057] In FIG. 6, T indicates the period of charging and discharging the capacitor 30. The period T is the sum of the first period T1 and the second period T2. The first period T1 is the length of the period during which the charging and discharging circuit 42 is in the first state. The length of the period during which the charging and discharging circuit 42 is in the first state is the time it takes for the potential of the first electrode 31 to change from Vd to Vth when a constant output current I1 is supplied from the power source Iin to the composite capacitor of the capacitor 30 and the first auxiliary capacitor 44a. The second period T2 is the length of the period during which the charging and discharging circuit 42 is in the second state. The length of the period during which the charging and discharging circuit 42 is in the second state is the time it takes for the potential of the second electrode 32 to change from Vd to Vth when a constant output current I1 is supplied from the power source Iin to the composite capacitor of the capacitor 30 and the second auxiliary capacitor 44b. Therefore, the period T is given by the following formula (2). In the following formula (2), i is the value (current value) of the output current I1.

[0058] When the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b are equal, the period T1 and the period T2 are equal, and the potential Vd in the period T1 and the potential Vd in the period T2 are equal, as shown in Fig. 6. Therefore, by measuring the periods T1 and T2 and the respective potentials Vd, it is possible to calculate the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b.

[0059]

number

[0060] By substituting Vd from equation (1) above into equation (2), we obtain the following equation (3).

[0061]

number

[0062] As is clear from the above formula (3), the capacitance Ce of the capacitor 30 can be calculated from the period T.

[0063] In this embodiment, the capacitance Ce is calculated from an equation including the period T, but the present invention is not limited to this, and the capacitance may be measured by an existing method such as impedance measurement.

[0064] 13 is a timing chart showing an example of the operation of the capacitance detection circuit of the comparative example. The capacitance detection circuit of the comparative example differs from the capacitance detection circuit 4 in that it does not have the first and second auxiliary capacitors 44a and 44b.

[0065] In FIG. 13, at time t20, the charge / discharge circuit 42 is set to the first state, and the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. At time t21, the potential V1 reaches the first threshold Vth, and the charge / discharge circuit 42 is switched to the second state. At time t22, the potential V2 reaches the second threshold Vth, and the charge / discharge circuit 42 is switched to the first state. At time t23, the potential V1 reaches the first threshold Vth, and the charge / discharge circuit 42 is switched to the second state. At time t24, the potential V2 reaches the second threshold Vth, and the charge / discharge circuit 42 is switched to the first state. At time t25, the potential V1 reaches the first threshold Vth, and the charge / discharge circuit 42 is switched to the second state.

[0066] 13, immediately after the charge / discharge circuit 42 is switched to the first state (see times t22 and t24), the potential V1 of the first electrode 31 becomes Vf. Immediately after the charge / discharge circuit 42 is switched to the second state (see times t21 and t23), the potential V2 of the second electrode 32 becomes Vf. This is because |Vth| is greater than |Vf|.

[0067] In the comparative example, the first period T1 is the time it takes for the potential of the first electrode 31 to change from Vf to Vth when a constant output current I1 is supplied from the power source Iin to the capacitor 30. The second period T2 is the time it takes for the potential of the second electrode 32 to change from Vf to Vth when a constant output current I1 is supplied from the power source Iin to the capacitor 30. Therefore, in the comparative example, the period T is given by the following equation (4).

[0068]

number

[0069] Comparing equations (3) and (4), it can be seen that the capacitance detection circuit 4 of the present embodiment is twice as affected by the change in capacitance Ce with respect to the period T as the capacitance detection circuit of the comparative example. The capacitance detection circuit 4 can reduce the effect of stray capacitance on capacitance detection.

[0070] The processing circuit 5 in Fig. 2 includes an arithmetic circuit 51 and an input / output circuit 52. The arithmetic circuit 51 and the input / output circuit 52 are arranged on a circuit board 5a separate from the sensor board 33 and the circuit board 4a (see Fig. 14). A reference potential Vg is provided on the circuit board 5a. A DC power supply 6 is arranged on the circuit board 5a.

[0071] The input / output circuit 52 functions as an input device for operating the capacitance sensor 1 and as an output device for outputting information from the capacitance sensor 1. The input / output circuit 52 includes, for example, one or more human-machine interfaces. Examples of the human-machine interfaces include input devices such as mechanical switches and touch pads, output devices such as displays and speakers, and input / output devices such as touch panels.

[0072] The arithmetic circuit 51 controls the operation of the capacitance sensor 1. The arithmetic circuit 51 is connected to the input / output circuit 52. The arithmetic circuit 51 can be realized, for example, by a computer system including one or more processors (microprocessors) and one or more memories. The one or more processors (one or more memories, etc.) execute a program to realize the function of the arithmetic circuit 51.

[0073] The arithmetic circuit 51 is connected to the input / output circuit 52. When an operation to start measuring the moisture content is performed by the input device of the input / output circuit 52, the arithmetic circuit 51 causes the capacitance detection circuit 4 to start an operation for detecting the capacitance. The arithmetic circuit 51 is configured to calculate the capacitance of the capacitor 30 based on the time taken for the capacitance detection circuit 4 to charge and discharge the capacitor 30. In this embodiment, the time taken for the capacitance detection circuit 4 to charge and discharge the capacitor 30 is a period T. The arithmetic circuit 51 in FIG. 2 acquires a second drive signal D2 from the drive circuit 432 of the capacitance detection circuit 4, and determines the period T based on the second drive signal D2. As shown in FIG. 6, the period T corresponds to the period of the second drive signal D2. The arithmetic circuit 51 can calculate the capacitance Ce of the capacitor 30 from the period T based on the above formula (3). The arithmetic circuit 51 is configured to calculate the moisture content of the measurement target based on the capacitance Ce of the capacitor 30. The arithmetic circuit 51 displays the moisture content of the measurement target by the output device of the input / output circuit 52.

[0074] [1.1.2 How to use] Next, an example of a method of using the measuring device 10 of FIG. 1 will be described. For example, the measuring device 10 is used by a measurer to measure the amount of moisture in the oral cavity of a measurement subject. The measurer is, for example, a medical professional such as a doctor or a nurse. The measurement subject is, for example, a patient. As an example, the measurer holds the grip portion 22 of the handheld housing 2 of the measuring device 10 by hand, places the head portion 21 of the handheld housing 2 of the measuring device 10 in the oral cavity of the measurement subject, and brings it into contact with a measurement site such as the tongue mucosa, the cheek mucosa, the palate mucosa, or the labial mucosa. Since the measuring device 10 itself is not grounded, when the measuring device 10 is used as described above, the head portion 21 of the measuring device 10 is grounded via the measurement subject, and further, the grip portion 22 of the measuring device 10 is grounded via the measuring person. Therefore, various stray capacitances may occur when the measuring device 10 is used.

[0075] Fig. 14 is an explanatory diagram of stray capacitance that occurs when using the measuring device 10 of Fig. 1. In Fig. 14, M1 generally indicates the body of the measurement subject. M11 generally indicates the body surface water layer of the person being measured. M2 generally indicates the body of the person being measured.

[0076] As shown in Fig. 14, the head unit 21 of the handheld housing 2 of the measuring device 10 is brought into contact with a specific site in the oral cavity of the subject M1. In Fig. 14, the first and second electrodes 31, 32 of the sensor unit 3 come into contact with the body surface moisture layer M11 of the subject M1 through the protective layer 34. This may cause a stray capacitance C1 between the first electrode 31 and the subject M1. A stray capacitance C2 may occur between the second electrode 32 and the subject M1. The capacitance of the capacitor 30 formed by the first and second electrodes 31, 32 changes due to the influence of the stray capacitances C1, C2.

[0077] When the measuring device 10 is used, stray capacitance unrelated to the capacitance to be measured occurs. In FIG. 14, stray capacitance ch1 may occur between the measurement target M1 and ground. In the capacitance detection circuit 4, stray capacitance Cp1 may occur between the terminal connected to the first electrode 31 and the reference potential Vg. In the capacitance detection circuit 4, stray capacitance Cp2 may occur between the terminal connected to the second electrode 32 and the reference potential Vg. The grip portion 22 of the handheld housing 2 of the measuring device 10 is held by the person M2. In FIG. 14, stray capacitance Ch21 may occur between the person M2 and ground. A stray capacitance Ch22 may occur between the person M2 and the reference potential Vg of the processing circuit 5.

[0078] In order to measure the amount of moisture in this way, the measuring device 10 that comes into contact with the human body and measures the capacitance has a contact between the human body and the measuring device 10 other than the sensor unit 3 that is the measurement point. BetweenIn this case, the floating capacitances Ch1, Ch21, and Ch22 generated between the human body and the reference potential Vg are connected via the ground potential, and there is a possibility that accurate capacitance cannot be observed. When the capacitance to be measured is large, the effect of such floating capacitance is relatively small, so that the effect on the accuracy of the measurement is small. On the other hand, when the capacitance is small, such as the capacitance between the first and second electrodes 31 and 32, the effect of the floating capacitance can be a cause of a large error. Conventionally, as a measure against such floating capacitance, it is necessary to minimize the area of ​​the board having the circuit that converts the capacitance into frequency and to separate the reference potential from other functional circuits, and there are measures such as a guard ring that make it possible to ignore the capacitance that is not the object of measurement from the circuit. However, separating the reference potential requires an expensive and complicated circuit configuration, and the increase in the board area makes it difficult to insert it into the oral cavity, and the product price also increases. As for the guard ring, it is necessary to electrically connect the human body to the product, which increases the difficulty in terms of the device configuration and safety.

[0079] In contrast to this, in this embodiment, if the stray capacitances unrelated to the capacitance to be measured are collectively defined as Cs, then the above equation (3) can be transformed into the following equation (5).

[0080]

number

[0081] In the measuring device 10, the capacitance detection circuit 4 includes the first and second auxiliary capacitors 44a, 44b, and the capacitance Cg of the first and second auxiliary capacitors 44a, 44b can increase the sensitivity relative to the capacitance to be detected. In other words, the measurement device is less susceptible to the influence of stray capacitance (e.g., Ch1, Ch21, Ch22 in FIG. 14) that causes disturbance. The influence of stray capacitance Cs can be reduced. In other words, in this embodiment, the influence of stray capacitance Cs can be reduced simply by arranging the first and second auxiliary capacitors 44a, 44b.

[0082] [1.1.3 Modifications] 15 is a timing chart showing an example of the operation of the capacitance detection circuit according to one variation of Embodiment 1. This variation differs from the above configuration in that the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b are different, not the same.

[0083] 15, no charge is stored in the capacitor 30. The drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level, thereby setting the charge / discharge circuit 42 to the first state.

[0084] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, in the first state the first auxiliary capacitor 44a is connected in parallel to the capacitor 30, and charge is also accumulated in the first auxiliary capacitor 44a.

[0085] At time t31, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. Immediately after the charge / discharge circuit 42 is switched to the second state, the potential V2 of the second electrode 32 becomes negative. Since the charge / discharge circuit 42 has the second auxiliary capacitor 44b connected in parallel to the second electrode 32, the second auxiliary capacitor 44b is connected in parallel to the capacitor 30 in the second state. As a result, the charge of the capacitor 30 moves to the second auxiliary capacitor 44b. In FIG. 15, the potential V2 of the second electrode 32 drops to Vd2. Vd2 is a negative value. Since Vd2 is determined by the charge stored in the capacitor 30 in the first state and the combined capacitance of the capacitor 30 and the second auxiliary capacitor 44b, the following equation (6) is established.

[0086]

number

[0087] In equation (6), Ce is the capacitance of the capacitor 30, and Cg2 is the capacitance of the second auxiliary capacitor 44b. The magnitude of Vd2 is set so as not to exceed the threshold voltage of the body diode of the third switch S3. In other words, the capacitance (Cg2) of the second auxiliary capacitor 44b and the first threshold (Vth) are set so that |Vd2|≦|Vf| is satisfied.

[0088] In the second state, a constant output current I1 is supplied from the power source Iin to the second electrode 32. This charges the capacitor 30 so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31. Charge is also accumulated in the second auxiliary capacitor 44b.

[0089] At time t32, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. Immediately after the charge / discharge circuit 42 is switched to the first state, the potential V1 of the first electrode 31 becomes negative. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, the first auxiliary capacitor 44a is connected in parallel to the capacitor 30 in the first state. As a result, the charge of the capacitor 30 moves to the first auxiliary capacitor 44a. In FIG. 15, the potential V2 of the second electrode 32 drops to Vd1. Vd1 is a negative value. Since Vd1 is determined by the charge stored in the capacitor 30 in the second state and the combined capacitance of the capacitor 30 and the first auxiliary capacitor 44a, the following equation (7) is established.

[0090]

number

[0091] In equation (7), Cg1 is the capacitance of the first auxiliary capacitor 44a. The magnitude of Vd1 is set so as not to exceed the magnitude of the threshold voltage of the body diode of the fourth switch S4. In other words, the capacitance (Cg1) of the first auxiliary capacitor 44a and the second threshold (Vth) are set so that ||Vd1|≦|Vf| is satisfied.

[0092] In this embodiment, the first threshold and the second threshold have the same value, Vth. In formula (6), Vth is the value of the first threshold, and in formula (7), Vth is the value of the second threshold. When the first threshold and the second threshold are different, formula (6) becomes formula (6a) below, and formula (7) becomes formula (7a) below.

[0093]

number

[0094] In this embodiment, the threshold voltage of the body diode of the third switch S3 and the threshold voltage of the body diode of the fourth switch S4 are equal. In the above conditional expression |Vd2|≦|Vf|, Vf is the lower limit of the potential V2 of the second electrode 32 when the charging / discharging circuit 42 is switched from the first state to the second state in the absence of the second auxiliary capacitor 44b, and corresponds to the threshold voltage of the body diode of the third switch S3. In the above conditional expression |Vd1|≦|Vf|, Vf is the lower limit of the potential V1 of the first electrode 31 when the charging / discharging circuit 42 is switched from the second state to the first state in the absence of the first auxiliary capacitor 44a, and corresponds to the threshold voltage of the body diode of the fourth switch S4. If the threshold voltage of the body diode of the third switch S3 is designated Vf1 and the threshold voltage of the body diode of the fourth switch S4 is designated Vf2, the condition |Vd1|≦|Vf| is expressed by the following equation (8), and the condition |Vd2|≦|Vf| is expressed by the following equation (9).

[0095]

number

[0096] In the present embodiment, the capacitance of the first auxiliary capacitor 44a, the capacitance of the second auxiliary capacitor 44b, the first threshold value, and the second threshold value are set so as to satisfy the above expressions (8) and (9).

[0097] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. This charges the capacitor 30 so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Charge is also accumulated in the first auxiliary capacitor 44a.

[0098] 15, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. As a result, the capacitor 30 is charged so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31.

[0099] 6, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0100] In FIG. 15, T indicates the charging and discharging period of the capacitor 30. The period T is the sum of the first period T1 and the second period T2. The first period T1 is the time it takes for the potential of the first electrode 31 to change from Vd1 to the first threshold (Vth) when a constant output current I1 is supplied from the power supply Iin to the composite capacitor of the capacitor 30 and the first auxiliary capacitor 44a. The second period T2 is the time it takes for the potential of the second electrode 32 to change from Vd2 to the second threshold (Vth) when a constant output current I1 is supplied from the power supply Iin to the composite capacitor of the capacitor 30 and the second auxiliary capacitor 44b. Therefore, the period T is given by the following formula (10). In the following formula (10), i is the value (current value) of the output current I1.

[0101]

number

[0102] By substituting Vd2 in the above equation (6) and Vd1 in the above equation (7) into equation (10), the following equation (11) is obtained.

[0103]

number

[0104] As is clear from the above equation (11), the capacitance Ce of the capacitor 30 can be calculated from the period T.

[0105] When the first threshold is Vth1 and the second threshold is Vth2, the above formula (11) becomes the following formula (12).

[0106]

number

[0107] As is clear from the above equation (12), the capacitance Ce of the capacitor 30 can be calculated from the period T. In order to simplify the capacitance sensor 1, it is preferable that the first threshold value and the second threshold value are equal, and that the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b are equal.

[0108] Furthermore, the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b can be calculated from the periods T1 and T2 that make up the period T. When T1 ≠ T2, the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b are different. Furthermore, the value of the potential Vd1 in the period T1 and the value of the potential Vd2 in the period T2 are also different. In this way, the capacitance of the first auxiliary capacitor 44a and the capacitance of the second auxiliary capacitor 44b can be calculated based on not only the periods T1 and T2 but also the potentials Vd1 and Vd2.

[0109] [1.1.4 Effects, etc.] As described above, the capacitance sensor 1 includes a sensor unit 3 having a first electrode 31 and a second electrode 32 constituting the capacitor 30, and a capacitance detection circuit 4 connected to the sensor unit 3. The capacitance detection circuit 4 includes a charge / discharge circuit 42 connected to the first electrode 31 and the second electrode 32 for charging and discharging the capacitor 30, a control circuit 43 for controlling the charge / discharge circuit 42 so that the capacitor 30 repeatedly charges and discharges, and an auxiliary capacitance circuit 44 having a first auxiliary capacitor 44a connected to the first electrode 31 so as to be in parallel with the capacitor 30, and a second auxiliary capacitor 44b connected to the second electrode 32 so as to be in parallel with the capacitor 30. This configuration can reduce the effect of stray capacitance on the detection of capacitance.

[0110] In the capacitance sensor 1, the capacitance of the first auxiliary capacitor 44a is equal to the capacitance of the second auxiliary capacitor 44b. This configuration can reduce the effect of stray capacitance on capacitance detection.

[0111] The capacitance of the first auxiliary capacitor 44a is different from the capacitance of the second auxiliary capacitor 44b in the capacitance sensor 1. This configuration can reduce the effect of stray capacitance on capacitance detection.

[0112] In the capacitance sensor 1, the charge / discharge circuit 42 is configured to be capable of complementarily switching between a first state in which a constant output current is supplied to the first electrode 31 and a second state in which a constant output current is supplied to the second electrode 32. The control circuit 43 is configured to switch the charge / discharge circuit 42 from the first state to the second state when the potential of the first electrode 31 reaches a first threshold value while the charge / discharge circuit 42 is in the first state. The control circuit 43 is configured to switch the charge / discharge circuit 42 from the second state to the first state when the potential of the second electrode 32 reaches a second threshold value while the charge / discharge circuit 42 is in the second state. This configuration can simplify the configuration of the capacitance detection circuit.

[0113] The first threshold value and the second threshold value are equal in the capacitance sensor 1. This configuration can simplify the configuration of the capacitance detection circuit.

[0114] In the capacitance sensor 1, the charge / discharge circuit 42 is connected between a power supply terminal 41a connected to a power supply Iin and a reference potential terminal 41b connected to a reference potential Vg, and includes a first switch S1, a second switch S2, a third switch S3, and a fourth switch S4. The first switch S1 and the third switch S3 form a series circuit. The series circuit of the first switch S1 and the third switch S3 is between the power supply terminal 41a and the reference potential terminal 41b such that the first switch S1 is connected to the power supply terminal 41a and the third switch S3 is connected to the reference potential terminal 41b. The connection point between the first switch S1 and the third switch S3 is connected to the first electrode 31. The second switch S2 and the fourth switch S4 form a series circuit. The series circuit of the second switch S2 and the fourth switch S4 is between the power supply terminal 41a and the reference potential terminal 41b such that the second switch S2 is connected to the power supply terminal 41a and the fourth switch S4 is connected in parallel to the series circuit of the first switch S1 and the third switch S3. The connection point between the second switch S2 and the fourth switch S4 is connected to the second electrode 32. In the first state, the first Switch S1 and the fourth switch S4 is on, Switch S2 In the second state, the first switch S1 and the third switch S2 are turned off. Switch S1 and the fourth switch S4 is off, Switch S2 and the third switch S3 is turned on. This configuration can simplify the configuration of the capacitance detection circuit.

[0115] In the capacitance sensor 1, a first end of the first auxiliary capacitor 44a is connected to the first electrode 31 and a second end of the first auxiliary capacitor 44a is connected to the reference potential terminal 41b so that the first auxiliary capacitor 44a is in parallel with the third switch S3. A first end of the second auxiliary capacitor 44b is connected to the second electrode 32 and a second end of the second auxiliary capacitor 44b is connected to the reference potential terminal 41b so that the second auxiliary capacitor 44b is in parallel with the fourth switch S4. This configuration can reduce the effect of stray capacitance on the detection of capacitance.

[0116] In the capacitance sensor 1, the following formula is satisfied.

[0117]

number

[0118] Ce is the capacitance of the capacitor 30. Cg1 is the capacitance of the first auxiliary capacitor 44a. Cg2 is the capacitance of the second auxiliary capacitor 44b. Vth1 is the first threshold. Vth2 is the second threshold. Vf1 is the lower limit of the potential of the first electrode 31 when the charge / discharge circuit 42 is switched from the second state to the first state in the absence of the first auxiliary capacitor 44a. Vf2 is the lower limit of the potential of the second electrode 32 when the charge / discharge circuit 42 is switched from the first state to the second state in the absence of the second auxiliary capacitor 44b. This configuration can reduce the effect of stray capacitance on capacitance detection.

[0119] In addition, when the capacitance of the first auxiliary capacitor 44a is equal to the capacitance of the second auxiliary capacitor 44b, Cg1=Cg2=Cg can be satisfied. When the first threshold value is equal to the second threshold value, Vth1=Vth2=Vth can be satisfied. When the lower limit value of the potential of the first electrode 31 when the charge / discharge circuit 42 is switched from the second state to the first state without the first auxiliary capacitor 44a is equal to the lower limit value of the potential of the second electrode 32 when the charge / discharge circuit 42 is switched from the first state to the second state without the second auxiliary capacitor 44b, Vf1=Vf2=Vf can be satisfied. In this case, the following formula should be satisfied in the capacitance detection circuit 4.

[0120]

number

[0121] In the capacitance sensor 1, Vf1=Vf2 is satisfied. This configuration can simplify the configuration of the capacitance detection circuit.

[0122] In the capacitance sensor 1, Vf1<0 and Vf2<0 are satisfied. This configuration can increase the amount of change in capacitance, and improve the accuracy of capacitance detection.

[0123] In the capacitance sensor 1, 3 Each of the switch S3 and the fourth switch S4 is a field effect transistor. 3 It is determined by the threshold voltage of the body diode of the fourth switch S3. Vf2 is determined by the threshold voltage of the body diode of the fourth switch S4. This configuration makes it possible to reduce the size of the capacitance detection circuit and to increase the speed of switching between the first state and the second state.

[0124] The capacitance sensor 1 further includes a processing circuit 5 that calculates the capacitance of the capacitor 30 based on the time it takes for the capacitance detection circuit 4 to charge and discharge the capacitor 30. This configuration can reduce the effect of stray capacitance on capacitance detection.

[0125] In the capacitance sensor 1, the sensor unit 3 has a sensor substrate 33 on which a first electrode 31 and a second electrode 32 are arranged. The charge / discharge circuit 42 is arranged on a circuit substrate 4a separate from the sensor substrate 33. The auxiliary capacitance circuit 44 is arranged between the sensor substrate 33 and the circuit substrate 4a, and at a position closer to the circuit substrate 4a than the sensor substrate 33. This configuration can reduce the influence of stray capacitance from the first electrode 31 and the second electrode 32 of the sensor unit 3.

[0126] The measuring device 10 described above comprises the capacitance sensor 1 and the handheld housing 2 that houses the capacitance sensor 1. This configuration can reduce the effect of stray capacitance on capacitance detection.

[0127] In the measuring device 10, the handheld housing 2 includes a head portion 21 that is disposed at a first end of the handheld housing 2 and is brought into contact with a measurement target, a grip portion 22 that is disposed at a second end of the handheld housing 2 and is held by hand, and a probe portion 23 that connects the head portion 21 and the grip portion 22. The sensor portion 3 is located in the head portion 21. The capacitance detection circuit 4 is located in the head portion 21 or the probe portion 23. The processing circuit 5 is located in the grip portion 22. This configuration can reduce the effects of stray capacitance occurring in the grip portion.

[0128] In measuring device 10, grip portion 22 has conductive portion 221 exposed on the surface of grip portion 22. Conductive portion 221 is connected to reference potential Vg of processing circuit 5. This configuration can reduce variation in the influence of stray capacitance on the side of the person holding the measuring device.

[0129] In the measuring device 10, the sensor unit 3 is configured such that the first and second electrodes 31, 32 come into contact with the object to be measured, causing the first and second electrodes 31, 32 to form a capacitor 30 together with a part of the object to be measured. The processing circuit 5 is configured to determine the moisture content of the object to be measured based on the capacitance of the capacitor 30. This configuration makes it possible to measure the moisture content of the object to be measured.

[0130] The measurement target is a living organism in the measuring device 10. This configuration makes it possible to measure the moisture content of the living organism.

[0131] The measurement target is the oral cavity of a living organism in the measuring device 10. This configuration makes it possible to measure the amount of moisture in the oral cavity of a living organism.

[0132] [1.2 Second embodiment] [1.2.1 Configuration] Fig. 16 is a circuit diagram of a configuration example of a capacitance sensor 1A of a measuring device according to the second embodiment. The capacitance sensor 1A differs from the capacitance sensor 1 in that it includes a capacitance detection circuit 4A that is different from the capacitance detection circuit 4 of the capacitance sensor 1. The capacitance detection circuit 4A in Fig. 16 differs from the capacitance detection circuit 4 in that it includes an auxiliary capacitance circuit 44A that is different from the auxiliary capacitance circuit 44 of the capacitance detection circuit 4. The auxiliary capacitance circuit 44A differs from the auxiliary capacitance circuit 44 in that it includes a first auxiliary capacitor 44a but does not include a second auxiliary capacitor 44b.

[0133] Next, an example of the operation of the capacitance detection circuit 4A will be described with reference to FIGS.

[0134] Fig. 17 is a timing diagram of an example of the operation of the capacitance detection circuit 4A. In Fig. 17, V1 indicates the potential of the first electrode 31, and V2 indicates the potential of the second electrode 32. In Fig. 17, H corresponds to a state in which the voltage value of the second drive signal D2 is at a high level, and L indicates a state in which the voltage value of the second drive signal D2 is at a low level. Figs. 18 to 23 are explanatory diagrams of an example of the operation of the capacitance detection circuit 4A. In Figs. 18 to 23, the control circuit 43 is omitted only for the sake of simplicity.

[0135] 17, no charge is stored in the capacitor 30. The drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level, thereby setting the charge / discharge circuit 42 to the first state.

[0136] Fig. 18 is an explanatory diagram of the operation of the capacitance detection circuit 4A when the charge / discharge circuit 42 is in the first state. As shown in Fig. 18, in the first state, the first and fourth switches S1 and S4 are on, and the second and third switches S2 and S3 are off. A constant output current I1 is supplied to the first electrode 31 from the power source Iin. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, in the first state, the first auxiliary capacitor 44a is connected in parallel to the capacitor 30, and charge is also stored in the first auxiliary capacitor 44a.

[0137] The determination circuit 431 executes a determination as to whether the potential V1 of the first electrode 31 reaches the first threshold value when the charge / discharge circuit 42 is in the first state. In FIG. 17, the first threshold value is Vth. At time t41, the determination circuit 431 determines that the potential V1 of the first electrode 31 reaches the first threshold value (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. In this embodiment, the drive circuit 432 sets the charge / discharge circuit 42 to the third state before setting it to the second state. FIG. 19 is an explanatory diagram of the operation of the capacitance detection circuit 4A when the charge / discharge circuit 42 is in the third state. After this, the drive circuit 432 sets the voltage value of the first drive signal D1 to a low level and the voltage value of the second drive signal D2 to a high level, thereby setting the charge / discharge circuit 42 to the second state.

[0138] FIG. 20 is an explanatory diagram of the operation of the capacitance detection circuit 4A immediately after the charge / discharge circuit 42 is switched to the second state. As shown in FIG. 20, in the second state, the first and fourth switches S1 and S4 are off, and the second and third switches S2 and S3 are on. In the capacitor 30, the first electrode 31 is connected to the reference potential terminal 41b, and the second electrode 32 is connected to the power supply terminal 41a. Immediately after the charge / discharge circuit 42 is switched to the second state, the potential V2 of the second electrode 32 becomes negative. The charge / discharge circuit 42 does not have the second auxiliary capacitor 44b connected in parallel to the second electrode 32. Therefore, unlike the first embodiment, in FIG. 17, the potential V2 of the second electrode 32 drops to Vf1. Vf1 is a negative value, and the magnitude of Vf1 is equal to the threshold voltage of the body diode of the field effect transistor used as the third switch S3.

[0139] In the second state, a constant output current I1 is supplied from the power source Iin to the second electrode 32. This charges the capacitor 30 so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31. Fig. 21 is an explanatory diagram of the operation of the capacitance detection circuit 4A after time has passed since the charge / discharge circuit 42 was switched to the second state. In Fig. 21, the potential V2 of the second electrode 32 is positive.

[0140] The determination circuit 431 executes a determination as to whether the potential V2 of the second electrode 32 reaches the second threshold value when the charge / discharge circuit 42 is in the second state. In FIG. 17, the second threshold value is equal to the first threshold value, which is Vth. At time t42, the determination circuit 431 determines that the potential V2 of the second electrode 32 reaches the second threshold value (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. In this embodiment, the drive circuit 432 sets the charge / discharge circuit 42 to the third state before setting the charge / discharge circuit 42 to the first state. FIG. 22 is an explanatory diagram of the operation of the capacitance detection circuit 4A when the charge / discharge circuit 42 is in the third state. After this, the drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level, thereby setting the charge / discharge circuit 42 to the first state.

[0141] FIG. 23 is an explanatory diagram of the operation of the capacitance detection circuit 4A immediately after the charge / discharge circuit 42 is switched to the first state. As shown in FIG. 23, in the first state, the first and fourth switches S1 and S4 are on, and the second and third switches S2 and S3 are off. In the capacitor 30, the first electrode 31 is connected to the power supply terminal 41a, and the second electrode 32 is connected to the reference potential terminal 41b. Immediately after the charge / discharge circuit 42 is switched to the first state, the potential V1 of the first electrode 31 becomes negative. Since the charge / discharge circuit 42 has the first auxiliary capacitor 44a connected in parallel to the first electrode 31, in the first state, the first auxiliary capacitor 44a is connected in parallel to the capacitor 30. As a result, the charge of the capacitor 30 moves to the first auxiliary capacitor 44a. In FIG. 17, the potential V1 of the first electrode 31 drops to Vd1. Vd1 is a negative value. Since Vd1 is determined by the charge stored in the capacitor 30 in the second state and the combined capacitance of the capacitor 30 and the first auxiliary capacitor 44a, the above equation (7) holds.

[0142] In this embodiment, the capacitance (Cg1) of the first auxiliary capacitor 44a and the second threshold (Vth) are set so that |Vd1|≦|Vf2| is satisfied. Vf2 is a negative value, and the magnitude of Vf2 is equal to the threshold voltage of the body diode of the field effect transistor used as the fourth switch S4. When |Vd1|>|Vf2|, the forward voltage of the body diode of the fourth switch S4 exceeds |Vf2|, so that the potential V1 of the first electrode 31 drops to Vf2.

[0143] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. This charges the capacitor 30 so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32. Charge is also accumulated in the first auxiliary capacitor 44a. After a period of time has elapsed since the charge / discharge circuit 42 was switched to the first state, the potential V1 of the first electrode 31 becomes positive, as shown in FIG.

[0144] 17, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. As a result, the capacitor 30 is charged so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31.

[0145] 17, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0146] In FIG. 17, T indicates such a period of charging and discharging the capacitor 30. The period T is the sum of the first period T1 and the second period T2. The first period T1 is the time required for the potential of the first electrode 31 to change from Vd1 to the first threshold (Vth) when a constant output current I1 is supplied from the power supply Iin to the composite capacitor of the capacitor 30 and the first auxiliary capacitor 44a. The second period T2 is the time required for the potential of the second electrode 32 to change from Vf1 to the second threshold (Vth) when a constant output current I1 is supplied from the power supply Iin to the capacitor 30. Therefore, the period T is given by the following formula (12). In the following formula (12), i is the value (current value) of the output current I1.

[0147]

number

[0148] By substituting Vd1 from the above equation (7) into equation (13), the following equation (13) is obtained.

[0149]

number

[0150] As is clear from the above equation (14), the capacitance Ce of the capacitor 30 can be calculated from the period T.

[0151] [1.2.2 Modifications] 24 is a timing chart showing an example of the operation of the capacitance detection circuit according to one variation of embodiment 2. This variation differs from the capacitance detection circuit 4A in that the capacitance detection circuit includes the second auxiliary capacitor 44b but does not include the first auxiliary capacitor 44a.

[0152] 24, no charge is stored in the capacitor 30. The drive circuit 432 sets the voltage value of the first drive signal D1 to a high level and the voltage value of the second drive signal D2 to a low level, thereby setting the charge / discharge circuit 42 to the first state.

[0153] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. This charges the capacitor 30 so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0154] At time t51, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. Immediately after the charge / discharge circuit 42 is switched to the second state, the potential V2 of the second electrode 32 becomes negative. Since the charge / discharge circuit 42 has the second auxiliary capacitor 44b connected in parallel to the second electrode 32, the second auxiliary capacitor 44b is connected in parallel to the capacitor 30 in the second state. As a result, the charge of the capacitor 30 moves to the second auxiliary capacitor 44b. In FIG. 24, the potential V2 of the second electrode 32 drops to Vd2. Vd2 is a negative value. Since Vd2 is determined by the charge stored in the capacitor 30 in the first state and the combined capacitance of the capacitor 30 and the second auxiliary capacitor 44b, the above formula (6) is established.

[0155] In this modification, the capacitance (Cg2) of the second auxiliary capacitor 44b and the first threshold (Vth) are set so that |Vd2|≦|Vf1| is satisfied. Vf1 is a negative value, and the magnitude of Vf1 is equal to the threshold voltage of the body diode of the field effect transistor used as the third switch S3. When |Vd2|>|Vf1|, the forward voltage of the body diode of the third switch S3 exceeds |Vf1|, so that the potential V2 of the second electrode 32 drops to Vf1.

[0156] In the second state, a constant output current I1 is supplied from the power source Iin to the second electrode 32. This charges the capacitor 30 so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31. Charge is also accumulated in the second auxiliary capacitor 44b.

[0157] At time t52, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). This causes the drive circuit 432 to set the charge / discharge circuit 42 to the first state. Immediately after the charge / discharge circuit 42 is switched to the first state, the potential V1 of the first electrode 31 becomes negative. In FIG. 24, the potential V1 of the first electrode 31 drops to Vf2. Vf2 is a negative value. The magnitude of Vf2 is equal to the threshold voltage of the body diode of the field effect transistor used as the fourth switch S4.

[0158] In the first state, a constant output current I1 is supplied from the power source Iin to the first electrode 31. This charges the capacitor 30 so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0159] 24, the determination circuit 431 determines that the potential V1 of the first electrode 31 has reached the first threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the second state. As a result, the capacitor 30 is charged so that the potential V2 of the second electrode 32 is higher than the potential V1 of the first electrode 31.

[0160] 24, the determination circuit 431 determines that the potential V2 of the second electrode 32 has reached the second threshold (Vth). As a result, the drive circuit 432 sets the charge / discharge circuit 42 to the first state. As a result, the capacitor 30 is charged so that the potential V1 of the first electrode 31 is higher than the potential V2 of the second electrode 32.

[0161] In FIG. 24, T indicates the charging and discharging period of the capacitor 30. The period T is the sum of the first period T1 and the second period T2. The first period T1 is the time required for the potential of the first electrode 31 to change from Vf2 to Vth when a constant output current I1 is supplied from the power supply Iin to the capacitor 30. The second period T2 is the time required for the potential of the second electrode 32 to change from Vd2 to Vth when a constant output current I1 is supplied from the power supply Iin to a composite capacitor of the capacitor 30 and the second auxiliary capacitor 44b. Therefore, the period T is given by the following equation (14). In the following equation (14), i is the value (current value) of the output current I1.

[0162]

number

[0163] By substituting Vd2 from the above equation (6) into equation (15), the following equation (16) is obtained.

[0164]

number

[0165] As is clear from the above equation (16), the capacitance Ce of the capacitor 30 can be calculated from the period T.

[0166] [1.2.3 Effects, etc.] As described above, the capacitance sensor 1A includes a sensor unit 3 having a first electrode 31 and a second electrode 32 constituting a capacitor 30, and a capacitance detection circuit 4A connected to the sensor unit 3. The capacitance detection circuit 4A includes a charge / discharge circuit 42 connected to the first electrode 31 and the second electrode 32 for charging and discharging the capacitor 30, a control circuit 43 for controlling the charge / discharge circuit 42 so that the capacitor 30 repeatedly charges and discharges, and an auxiliary capacitance circuit 44A having one of a first auxiliary capacitor 44a connected to the first electrode 31 so as to be in parallel with the capacitor 30 and a second auxiliary capacitor 44b connected to the second electrode 32 so as to be in parallel with the capacitor 30. This configuration can reduce the effect of stray capacitance on the detection of capacitance.

[0167] [1.3 Third embodiment] [1.3.1 Configuration] 25 is a schematic diagram of a configuration example of a measuring device 10B according to embodiment 3. The measuring device 10B is a bite force measuring device for measuring the bite force of a person's upper and lower jaw teeth.

[0168] The measuring device 10B in Fig. 25 is a capacitance-type bite force measuring device. The measuring device 10B includes a capacitance sensor 1B and a handheld housing 2B.

[0169] The handheld housing 2B accommodates the capacitance sensor 1B. The handheld housing 2B is of a size and weight that can be held in one hand. The handheld housing 2B has a waterproof structure and protects the capacitance sensor 1B in the handheld housing 2B from moisture. The handheld housing 2B in FIG. 25 is rod-shaped. The handheld housing 2B in FIG. 25 is shaped like a so-called toothbrush. The handheld housing 2B includes a head portion 21B, a grip portion 22, and a probe portion 23 that connects the head portion 21B and the grip portion 22. The handheld housing 2B in FIG. 25 differs from the handheld housing 2 in FIG. 1 in the structure of the head portion 21B.

[0170] Head portion 21B is a portion of handheld housing 2B that comes into contact with a measurement target. Head portion 21B is disposed at a first end (the left end in FIG. 25) of handheld housing 2B. In this embodiment, head portion 21B is inserted into a person's mouth and held between the upper and lower jaw teeth during use. Head portion 21B is made of a soft material so that the bite force of the upper and lower jaw teeth can be transmitted to capacitance sensor 1B.

[0171] 26 is a schematic perspective view of a configuration example of the head part 21B. The head part 21B has a pair of resin layers 211B, 212B. A sensor part 3B, which will be described later, is disposed between the pair of resin layers 211B, 212B. The resin layers 211B, 212B are, for example, rectangular plate-shaped. The resin layers 211B, 212B are formed of a flexible resin. Examples of the flexible resin include an acrylic resin, a urethane resin, a silicone resin, a styrene resin, and a polyamide resin.

[0172] The capacitance sensor 1B determines the bite force based on capacitance. The capacitance sensor 1B includes a sensor unit 3B, a capacitance detection circuit 4, and a processing circuit 5B. In this embodiment, the sensor unit 3B and the capacitance detection circuit 4 are located in the head unit 21B of the handheld housing 2B. In this embodiment, the processing circuit 5B is located in the grip unit 22B of the handheld housing 2B.

[0173] As shown in FIG. 26, the sensor unit 3B includes first and second electrodes 31B, 32B and a deformation unit 35B. The deformation unit 35B is deformed by applying pressure. The pressure can be applied, for example, by a person biting with the upper and lower jaw teeth. The deformation unit 35B is, for example, rectangular plate-shaped. The deformation unit 35B is formed of a flexible resin. Examples of the flexible resin include acrylic resin, urethane resin, silicone resin, styrene resin, and polyamide resin. These resins have a large change in physical properties with respect to load, making it possible to reduce the load on the user. The first and second electrodes 31B, 32B are, for example, rectangular plate-shaped. The first and second electrodes 31B, 32B can be formed by sputtering, vapor deposition, or printing. Examples of materials for the first and second electrodes 31B, 32B include precious metals such as Au, Ag, and Pd, and base metals such as Cu, Al, and Ni. In the sensor unit 3B, the deformation portion 35B is between the first and second electrodes 31B, 32B. As a result, the sensor unit 3B is configured such that the first and second electrodes 31B, 32B form a capacitor 30B together with the deformation portion 35B. More specifically, the first and second electrodes 31B, 32B function as electrodes of the capacitor 30B. The deformation portion 35B functions as a dielectric for the first and second electrodes 31B, 32B. In other words, the capacitance between the first and second electrodes 31B, 32B, that is, the capacitance of the capacitor 30B changes as the flexible deformation portion 35B is displaced.

[0174] The processing circuit 5B differs from the processing circuit 5 of FIG. 2 in the operation of the arithmetic circuit 51. When an operation to start measuring the bite force is performed by the input device of the input / output circuit 52, the arithmetic circuit 51 causes the capacitance detection circuit 4 to start the operation for detecting the capacitance. The arithmetic circuit 51 is configured to calculate the capacitance of the capacitor 30 based on the time of charging and discharging the capacitor 30 by the capacitance detection circuit 4. The arithmetic circuit 51 can obtain the capacitance Ce of the capacitor 30B from the period T, as in the first and second embodiments. The arithmetic circuit 51 is configured to obtain the bite force of the upper and lower jaw teeth based on the capacitance Ce of the capacitor 30B. The arithmetic circuit 51 displays information indicating the bite force by the output device of the input / output circuit 52.

[0175] [1.3.2 Effects, etc.] In the measuring device 10B described above, the sensor unit 3B includes a deformation portion 35B that is deformed when pressure is applied. The sensor unit 3B is configured such that the first and second electrodes 31B, 32B form a capacitor 30B together with the deformation portion 35B. B is configured to determine pressure based on the capacitance of the capacitor 30B. This configuration allows for the measurement of pressure. In particular, pressure may be applied to the deformation portion 35B by a person biting with the upper and lower teeth. In this case, it allows for the measurement of the bite force of the person's upper and lower teeth.

[0176] [1.4 Fourth embodiment] [1.4.1 Configuration] 27 is a schematic perspective view of an example configuration of a head unit 21C of a measurement device 10C according to embodiment 4. Measurement device 10C is a capacitance-type moisture measurement device, similar to measurement device 10. Measurement device 10C includes a capacitance sensor 1C and a handheld housing 2C.

[0177] The handheld housing 2C houses the capacitance sensor 1C. The handheld housing 2C includes a head unit 21C. Although not shown in Fig. 27, the handheld housing 2C includes a grip unit 22 and a probe unit 23, similar to the handheld housing 2 in Fig. 1.

[0178] The capacitance sensor 1C determines the amount of moisture in a measurement target based on capacitance. The capacitance sensor 1C includes a sensor unit 3C. The capacitance sensor 1C includes a capacitance detection circuit 4 and a processing circuit 5, similar to the capacitance sensor 1 in FIG.

[0179] In this embodiment, at least the sensor unit 3C is located in the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C is exposed to the outside from the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C and the frame-shaped area 200 surrounding the surface 300 of the sensor unit 3C in the head unit 21C constitute a contact area 100 that is to be contacted with the measurement object. The contact area 100 is an area that is expected to be contacted with the measurement object when measuring with the measuring device 10C. In this embodiment, the surface 300 of the sensor unit 3C is located on a predetermined plane including the frame-shaped area 200 of the head unit 21C. In other words, it can be said that the surface 300 of the sensor unit 3C and the frame-shaped area 200 of the head unit 21C are on the same plane.

[0180] Fig. 28 is an explanatory diagram of a configuration example of a sensor unit 3C of a capacitance sensor 1C. Fig. 29 is a schematic cross-sectional view of the configuration example of a sensor unit 3C of a capacitance sensor 1C. Fig. 30 is a schematic plan view of the sensor unit 3C. Fig. 31 is a schematic bottom view of the sensor unit 3C. In particular, Fig. 29 is a cross-sectional view taken along line AA in Fig. 30.

[0181] 28 and 29 includes a first electrode 31, a second electrode 32, a sensor substrate 33, and a protective layer 34C. The sensor unit 3C is configured such that the first and second electrodes 31, 32 form a capacitor 30 (see FIG. 2) together with a part of the object to be measured by contacting the first and second electrodes 31, 32 with the object to be measured.

[0182] As shown in Figures 30 and 31, the sensor substrate 33 has a rectangular plate shape. As shown in Figures 28 and 29, the sensor substrate 33 has a first surface 33a and a second surface 33b in the thickness direction of the sensor substrate 33. As shown in Figures 28 and 29, a first electrode 31, a second electrode 32, and a protective layer 34C are arranged on the sensor substrate 33. In Figure 30, the protective layer 34C is omitted.

[0183] As shown in FIGS. 30 and 31, the first electrode 31 has an electrode portion 311, a terminal portion 312, and a connection portion 313.

[0184] The electrode unit 311 is used to contact the measurement target. As shown in FIG. 30, the electrode unit 311 is disposed on the first surface 33a of the sensor substrate 33. The electrode unit 311 in FIG. 30 has a comb-tooth structure. The electrode unit 311 has a plurality of teeth 3111 arranged at a predetermined interval, a linking portion 3112 that links one ends of the plurality of teeth 3111 to each other, and a connecting portion 3113 that is connected to the terminal portion 312. The connecting portion 3113 extends from an end of the linking portion 3112 so as to be aligned with the plurality of teeth 3111. As shown in FIG. 28, the electrode unit 311 includes, for example, a plurality of metal layers. The plurality of metal layers of the electrode unit 311 in FIG. 28 include, for example, a Ni layer 311a, a Pd layer 311b that covers the Ni layer 311a, and an Au layer 311c that covers the Pd layer 311b. The plurality of metal layers of the electrode unit 311 can be formed by plating.

[0185] The terminal portion 312 is used for connection to the capacitance detection circuit 4. As shown in FIG. 31, the terminal portion 312 is disposed on the second surface 33b of the sensor substrate 33. The terminal portion 312 in FIG. 31 has a rectangular pad portion 3121 and a connection portion 3122 connected to the electrode portion 311. The connection portion 3122 is in a strip shape extending from the pad portion 3121. As shown in FIG. 28, the terminal portion 312 includes, for example, a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 312 in FIG. 28 include, for example, a Ni layer 312a, a Pd layer 312b covering the Ni layer 312a, and an Au layer 312c covering the Pd layer 312b. The plurality of metal layers of the terminal portion 312 may be formed by plating.

[0186] The connection portion 313 connects the electrode portion 311 and the terminal portion 312. More specifically, the connection portion 313 connects an end portion of the connection portion 3113 of the electrode portion 311 and an end portion of the connection portion 3122 of the terminal portion 312. As shown in Fig. 29, the connection portion 313 is a via that penetrates the sensor substrate 33. The connection portion 313 is made of, for example, Ag.

[0187] As shown in FIGS. 30 and 31, the second electrode 32 has an electrode portion 321, a terminal portion 322, and a connection portion 323.

[0188] The electrode unit 321 is used to contact the measurement target. As shown in FIG. 30, the electrode unit 321 is disposed on the first surface 33a of the sensor substrate 33. The electrode unit 321 in FIG. 30 has a comb-tooth structure. The electrode unit 321 has a plurality of teeth 3211 arranged at a predetermined interval, a linking portion 3212 that links one ends of the plurality of teeth 3211, and a connecting portion 3213 that is connected to the terminal portion 322. The connecting portion 3213 extends from an end of the linking portion 3212 so as to be aligned with the plurality of teeth 3211. As shown in FIG. 28, the electrode unit 321 includes, for example, a plurality of metal layers. The plurality of metal layers of the electrode unit 321 in FIG. 28 include, for example, a Ni layer 321a, a Pd layer 321b that covers the Ni layer 321a, and an Au layer 321c that covers the Pd layer 321b. The plurality of metal layers of the electrode unit 321 may be formed by plating.

[0189] The terminal portion 322 is used for connection to the capacitance detection circuit 4. As shown in FIG. 31, the terminal portion 322 is disposed on the second surface 33b of the sensor substrate 33. The terminal portion 322 in FIG. 31 has a rectangular pad portion 3221 and a connection portion 3222 connected to the electrode portion 321. The connection portion 3222 is in a strip shape extending from the pad portion 3221. As shown in FIG. 28, the terminal portion 322 includes, for example, a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 322 in FIG. 28 include, for example, a Ni layer 322a, a Pd layer 322b covering the Ni layer 322a, and an Au layer 322c covering the Pd layer 322b. The plurality of metal layers of the terminal portion 322 may be formed by plating.

[0190] The connection portion 323 connects the electrode portion 321 and the terminal portion 322. More specifically, the connection portion 323 connects an end of the connection portion 3213 of the electrode portion 321 and an end of the connection portion 3222 of the terminal portion 322. The connection portion 323 is a via that penetrates the sensor substrate 33. The connection portion 323 is made of, for example, Ag.

[0191] The protective layer 34C is used to protect the first electrode 31 and the second electrode 32. In particular, the protective layer 34C is used to protect the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32. As shown in Figs. 28 and 29, the protective layer 34C is disposed on the first surface 33a of the sensor substrate 33. The protective layer 34C covers the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32. The protective layer 34C has, for example, insulating properties. The protective layer 34C is formed of, for example, an insulating material such as polyimide.

[0192] The surface 340 of the protective layer 34C in FIG. 28 has an uneven shape. In FIG. 28, the surface 340 of the protective layer 34C includes a convex region 341 and a concave region 342. The convex region 341 includes a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32, and the concave region 342 does not include a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32. That is, the surface 340 of the protective layer 34C in FIG. 28 reflects the uneven shape caused by forming the electrode portions 311, 321 on the first surface 33a of the sensor substrate 33. In this way, when the protective layer 34C reflects the unevenness of the base, the thickness of the protective layer 34C is generally approximately constant. That is, the thickness TH1 of the protective layer 34C in the convex region 341 and the thickness TH2 of the protective layer 34C in the concave region 342 are equivalent, substantially equal. The thickness TH1 of the protective layer 34C in the convex region 341 is the distance between the convex region 341 and the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32. The thickness TH2 of the protective layer 34C in the concave region 342 is the distance between the concave region 342 and the first surface 33a. The protective layer 34C in FIG. 28 may be formed by, for example, a spin coating method. Note that in the protective layer 34C, the thickness TH1 and the thickness TH2 do not necessarily have to be substantially equal, and for example, as shown in FIG. 29, the thickness of the protective layer 34C in the convex region 341 and the concave region 342 may be different. Note that in FIG. 29, the protective layer 34C is thicker in the concave region 342 than in the convex region 341.

[0193] In the present embodiment, surface 340 of protective layer 34C defines surface 300 of sensor unit 3C that is exposed from head unit 21C. As described above, surface 340 of protective layer 34C has an uneven shape, and therefore surface 300 of sensor unit 3C has an uneven shape.

[0194] Since the surface 300 of the sensor part 3C has an uneven shape, the specific surface area of ​​the sensor part 3C is larger than when the surface 300 of the sensor part 3C is flat. When the specific surface area of ​​the sensor part 3C is larger, the capacitance of the capacitor 30 that the sensor part 3C forms together with a part of the measurement target can be increased. This makes it possible to improve the accuracy of capacitance detection. In particular, in the sensor part 3C of Figs. 28 and 29, the distance between the measurement target and the electrode part 311 or the electrode part 321 is likely to be short in the recessed area 342, which can also partially increase the capacitance.

[0195] Since the surface 300 of the sensor part 3C has an uneven shape, the coefficient of friction (mainly the static coefficient of friction) of the surface 300 of the sensor part 3C with respect to the measurement object becomes larger than when the surface 300 of the sensor part 3C is flat. This reduces the possibility that the positional relationship between the sensor part 3C and the measurement object changes during measurement. In other words, the grip force of the sensor part 3C is improved, and the sensor part 3C is fixed to the measurement object more firmly. This makes it easier to press the surface 300 of the sensor part 3C against the measurement object, and the pressure applied to the surface 300 of the sensor part 3C by the measurement object tends to increase. The pressure applied to the surface 300 of the sensor part 3C by the measurement object increases. As a result, the adhesion of the sensor part 3C to the measurement object improves, so that the measurement becomes stable and the accuracy of the detection of the capacitance can be improved.

[0196] [1.4.2 Effects, etc.] In the measuring device 10C described above, the sensor unit 3C has a surface 300 exposed from the head unit 21C. The surface 300 of the sensor unit 3C has an uneven shape. This configuration can increase the specific surface area of ​​the sensor unit 3C and the coefficient of friction (mainly the static coefficient of friction) of the surface 300 of the sensor unit 3C with respect to the measurement target, compared to when the surface 300 of the sensor unit 3C is flat, making it possible to improve the accuracy of capacitance detection.

[0197] The measuring device 10C described above has a contact area 100 that comes into contact with the measurement target. The contact area 100 includes a surface 300 of the sensor unit 3C and a frame-shaped area 200 that surrounds the surface 300 of the sensor unit 3C in the head unit 21C. The contact area 100 has an uneven shape. This configuration makes it possible to increase the coefficient of friction (mainly the static coefficient of friction) of the contact area 100 compared to when the contact area 100 is flat, thereby improving the accuracy of capacitance detection.

[0198] In measuring device 10C, surface 300 of sensor unit 3C has an uneven shape. This configuration can increase the specific surface area of ​​sensor unit 3C and the coefficient of friction (mainly the static coefficient of friction) of surface 300 of sensor unit 3C with respect to the measurement target, compared to when surface 300 of sensor unit 3C is flat, making it possible to improve the accuracy of capacitance detection.

[0199] [1.5 Fifth embodiment] [1.5.1 Configuration] Fig. 32 is a schematic cross-sectional view of a configuration example of a sensor unit 3D of a capacitance sensor. Fig. 33 is a schematic plan view of the sensor unit 3D. Fig. 34 is a schematic bottom view of the sensor unit 3D. In particular, Fig. 32 is a cross-sectional view of the line BB in Fig. 33.

[0200] Similar to sensor unit C, sensor unit 3D is located in head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3D is exposed to the outside from head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3D and frame-shaped region 200 surrounding surface 300 of sensor unit 3D in head unit 21C form contact region 100 that is brought into contact with the measurement target.

[0201] 32 includes a first electrode 31, a second electrode 32, a sensor substrate 33, and a protective layer 34D. The sensor unit 3D is configured such that the first and second electrodes 31, 32 form a capacitor 30 (see FIG. 2) together with a part of the object to be measured by contacting the first and second electrodes 31, 32 with the object to be measured.

[0202] As shown in Fig. 33 and Fig. 34, the sensor substrate 33 has a rectangular plate shape. As shown in Fig. 32, the sensor substrate 33 has a first surface 33a and a second surface 33b in the thickness direction of the sensor substrate 33. As shown in Fig. 32, a first electrode 31, a second electrode 32, and a protective layer 34D are arranged on the sensor substrate 33. In Fig. 33, the protective layer 34D is omitted from the illustration.

[0203] As shown in FIGS. 33 and 34, the first electrode 31 has an electrode portion 311, a terminal portion 312, and a connection portion 313.

[0204] The electrode unit 311 is used to contact the object to be measured. As shown in FIG. 33, the electrode unit 311 is disposed on a first surface 33a of the sensor substrate 33. The electrode unit 311 in FIG. 33 has a comb-tooth structure. The electrode unit 311 has a plurality of teeth 3111 arranged at a predetermined interval and a connecting portion 3112 connecting one ends of the plurality of teeth 3111 to each other. The electrode unit 311 includes, for example, a plurality of metal layers. The plurality of metal layers of the electrode unit 311 include, for example, a Ni layer, a Pd layer covering the Ni layer, and an Au layer covering the Pd layer. The plurality of metal layers of the electrode unit 311 may be formed by a plating process.

[0205] The terminal portion 312 is used for connection to the capacitance detection circuit 4. As shown in FIG. 34, the terminal portion 312 is disposed on the second surface 33b of the sensor substrate 33. The terminal portion 312 in FIG. 34 has a rectangular pad portion 3121 and a connection portion 3122 connected to the electrode portion 311. The connection portion 3122 is in a strip shape extending from the pad portion 3121. The terminal portion 312 includes, for example, a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 312 include, for example, a Ni layer, a Pd layer covering the Ni layer, and an Au layer covering the Pd layer. The plurality of metal layers of the terminal portion 312 may be formed by plating.

[0206] The connection portion 313 connects the electrode portion 311 and the terminal portion 312. More specifically, the connection portion 313 connects one end of the multiple teeth 3111 of the electrode portion 311 and an end of the connection portion 3122 of the terminal portion 312. The connection portion 313 is a via that penetrates the sensor substrate 33. The connection portion 313 is made of, for example, Ag.

[0207] As shown in FIGS. 33 and 34, the second electrode 32 has an electrode portion 321, a terminal portion 322, and a connection portion 323.

[0208] The electrode unit 321 is used to contact the object to be measured. As shown in FIG. 33, the electrode unit 321 is disposed on the first surface 33a of the sensor substrate 33. The electrode unit 321 in FIG. 33 has a comb-tooth structure. The electrode unit 321 has a plurality of teeth 3211 arranged at a predetermined interval and a connecting portion 3212 connecting one ends of the plurality of teeth 3211 to each other. The electrode unit 321 includes, for example, a plurality of metal layers. The plurality of metal layers of the electrode unit 321 include, for example, a Ni layer, a Pd layer covering the Ni layer, and an Au layer covering the Pd layer. The plurality of metal layers of the electrode unit 321 may be formed by a plating process.

[0209] The terminal portion 322 is used for connection to the capacitance detection circuit 4. As shown in FIG. 34, the terminal portion 322 is disposed on the second surface 33b of the sensor substrate 33. The terminal portion 322 in FIG. 34 has a rectangular pad portion 3221 and a connection portion 3222 connected to the electrode portion 321. The connection portion 3222 is in a strip shape extending from the pad portion 3221. The terminal portion 322 includes, for example, a plurality of metal layers (metal films). The plurality of metal layers of the terminal portion 322 include, for example, a Ni layer, a Pd layer covering the Ni layer, and an Au layer covering the Pd layer. The plurality of metal layers of the terminal portion 322 may be formed by plating.

[0210] The connection portion 323 connects the electrode portion 321 and the terminal portion 322. More specifically, the connection portion 323 connects one end of the multiple teeth 3211 of the electrode portion 321 and an end of the connection portion 3222 of the terminal portion 322. As shown in Fig. 32, the connection portion 323 is a via that penetrates the sensor substrate 33. The connection portion 323 is made of, for example, Ag.

[0211] The protective layer 34D is used to protect the first electrode 31 and the second electrode 32. In particular, the protective layer 34D is used to protect the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32. As shown in FIG. 32, the protective layer 34D is disposed on the first surface 33a of the sensor substrate 33. The protective layer 34D covers the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32. The protective layer 34D has, for example, insulating properties. The protective layer 34D is formed of, for example, an insulating material such as polyimide.

[0212] A surface 340 of the protective layer 34D in Fig. 32 has an uneven shape. In Fig. 32, the surface 340 of the protective layer 34D includes a convex region 341 and a concave region 342. The distance from the first surface 33a of the sensor substrate 33 to the concave region 342 is shorter than the distance from the first surface 33a of the sensor substrate 33 to the convex region 341. The convex region 341 does not include a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32, and the concave region 342 includes a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32.

[0213] In the present embodiment, surface 340 of protective layer 34D defines surface 300 of sensor unit 3D that is exposed from head unit 21C. As described above, surface 340 of protective layer 34D has an uneven shape, and as a result, surface 300 of sensor unit 3D has an uneven shape.

[0214] Since the surface 300 of the sensor unit 3D has an uneven shape, the specific surface area of ​​the sensor unit 3D is larger than when the surface 300 of the sensor unit 3D is flat. When the specific surface area of ​​the sensor unit 3D is larger, the capacitance of the capacitor 30 that the sensor unit 3D forms together with a part of the object to be measured can be increased. This makes it possible to improve the accuracy of capacitance detection. In particular, in the sensor unit 3D of FIG. 32, the distance between the object to be measured and the electrode unit 311 or the electrode unit 321 is likely to be short in the recessed area 342, which can also cause the capacitance to be partially increased.

[0215] Since the surface 300 of the sensor unit 3D has an uneven shape, the coefficient of friction (mainly the static coefficient of friction) of the surface 300 of the sensor unit 3D with respect to the measurement object becomes larger than when the surface 300 of the sensor unit 3D is flat. This reduces the possibility that the positional relationship between the sensor unit 3D and the measurement object fluctuates during measurement. In other words, the gripping force of the sensor unit 3D is improved, and the sensor unit 3D becomes more fixed to the measurement object. This makes it easier to press the surface 300 of the sensor unit 3D against the measurement object, and the pressure applied to the surface 300 of the sensor unit 3D by the measurement object tends to increase. The pressure applied to the surface 300 of the sensor unit 3D by the measurement object increases. As a result, the adhesion of the sensor unit 3D to the measurement object improves, making it possible to stabilize the measurement and improve the accuracy of capacitance detection.

[0216] [1.5.2 Effects, etc.] In the measuring device 10D described above, the sensor unit 3D has a surface 300 exposed from the head unit 21C. The surface 300 of the sensor unit 3D has an uneven shape. This configuration can increase the specific surface area of ​​the sensor unit 3D and the coefficient of friction (mainly the static friction coefficient) of the surface 300 of the sensor unit 3D with respect to the measurement target, compared to when the surface 300 of the sensor unit 3D is flat, making it possible to improve the accuracy of capacitance detection.

[0217] The measuring device 10D described above has a contact area 100 that comes into contact with the measurement target. The contact area 100 includes a surface 300 of the sensor unit 3D and a frame-shaped area 200 that surrounds the surface 300 of the sensor unit 3D in the head unit 21C. The contact area 100 has an uneven shape. With this configuration, the coefficient of friction (mainly the static coefficient of friction) of the contact area 100 can be made larger than when the contact area 100 is flat, making it possible to improve the accuracy of capacitance detection.

[0218] In measuring device 10D, surface 300 of sensor unit 3D has an uneven shape. This configuration can increase the specific surface area of ​​sensor unit 3D and the friction coefficient (mainly the static friction coefficient) of surface 300 of sensor unit 3D with respect to the measurement target, compared to when surface 300 of sensor unit 3D is flat, making it possible to improve the accuracy of capacitance detection.

[0219] [1.6 Sixth embodiment] [1.6.1 Configuration] FIG. 35 is a schematic cross-sectional view of a configuration example of a sensor unit 3E of a capacitance sensor of a measuring device according to a sixth embodiment.

[0220] Like sensor unit C, sensor unit 3E is located in head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3E is exposed to the outside from head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3E and frame-shaped region 200 surrounding surface 300 of sensor unit 3E in head unit 21C form contact region 100 that is brought into contact with the measurement object.

[0221] 35 includes a first electrode 31, a second electrode 32, a sensor substrate 33, and a protective layer 34E. The first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3E are similar to the first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3C.

[0222] 28 and 29, the surface 340 of the protective layer 34E in Fig. 35 has an uneven shape. In Fig. 35, the surface 340 of the protective layer 34E includes a convex region 341 and a concave region 342. The distance from the first surface 33a of the sensor substrate 33 to the concave region 342 is shorter than the distance from the first surface 33a of the sensor substrate 33 to the convex region 341. The convex region 341 includes a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32, and the concave region 342 does not include a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32.

[0223] In surface 340 of protective layer 34E in Fig. 35, the uneven surface is a rough surface having irregular projections and recesses. More specifically, convex regions 341 and concave regions 342 of surface 340 of protective layer 34E are rough surfaces having irregular projections and recesses. Well-known techniques such as etching can be used to roughen the uneven surface of surface 340 of protective layer 34E.

[0224] In this embodiment, the surface 340 of the protective layer 34E, i.e., the surface of the uneven shape of the surface 300 of the sensor unit 3E, has irregular unevenness, so that the specific surface area of ​​the sensor unit 3E is further increased, and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor unit 3E against the measurement target is further increased. This makes it possible to further improve the accuracy of capacitance detection.

[0225] [1.6.2 Effects, etc.] As described above, the sensor unit 3E has the surface 300 exposed from the head unit 21C. The surface 300 of the sensor unit 3E has an uneven shape. This configuration is smaller in the specific surface area of ​​the sensor unit 3E and in the sensitivity of the sensor unit 3E to the measurement target than when the surface 300 of the sensor unit 3E is flat. EThis makes it possible to increase the coefficient of friction (mainly the static coefficient of friction) of the surface 300, thereby enabling the accuracy of capacitance detection to be improved.

[0226] In the sensor unit 3E, the uneven surface of the surface 300 of the sensor unit 3E is a rough surface having irregular unevenness. This configuration can further increase the specific surface area of ​​the sensor unit 3E and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor unit 3E against the measurement target, thereby enabling further improvement in the accuracy of capacitance detection.

[0227] [1.7 Seventh embodiment] [1.7.1 Configuration] FIG. 36 is a schematic cross-sectional view of a configuration example of a sensor unit 3F of a capacitance sensor of a measuring device according to the seventh embodiment.

[0228] Similar to sensor unit C, sensor unit 3F is located in head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3F is exposed to the outside from head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3F and frame-shaped region 200 surrounding surface 300 of sensor unit 3F in head unit 21C form contact region 100 that is brought into contact with the measurement object.

[0229] 36 includes a first electrode 31, a second electrode 32, a sensor substrate 33, and a protective layer 34F. The first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3F are similar to the first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3D.

[0230] A surface 340 of the protective layer 34F in Fig. 36 has an uneven shape similar to the surface 340 of the protective layer 34D in Fig. 32. In Fig. 36, the surface 340 of the protective layer 34F includes a convex region 341 and a concave region 342. The distance from the first surface 33a of the sensor substrate 33 to the concave region 342 is shorter than the distance from the first surface 33a of the sensor substrate 33 to the convex region 341. The convex region 341 does not include a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32, and the concave region 342 includes a region covering the electrode portion 311 of the first electrode 31 or the electrode portion 321 of the second electrode 32.

[0231] In surface 340 of protective layer 34F in Fig. 36, the uneven surface is a rough surface having irregular projections and recesses. More specifically, convex regions 341 and concave regions 342 of surface 340 of protective layer 34F are rough surfaces having irregular projections and recesses. Well-known techniques such as etching can be used to roughen the uneven surface of surface 340 of protective layer 34F.

[0232] In this embodiment, the surface 340 of the protective layer 34F, i.e., the surface of the uneven shape of the surface 300 of the sensor part 3F, has irregular unevenness, so that the specific surface area of ​​the sensor part 3F is further increased, and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor part 3F with respect to the measurement object is further increased. This makes it possible to further improve the accuracy of capacitance detection.

[0233] [1.7.2 Effects, etc.] As described above, the sensor unit 3F has the surface 300 exposed from the head unit 21C. The surface 300 of the sensor unit 3F has an uneven shape. This configuration is advantageous in that it reduces the specific surface area of ​​the sensor unit 3F and the sensitivity of the sensor unit 3F to the measurement target, compared to when the surface 300 of the sensor unit 3F is flat. F This makes it possible to increase the coefficient of friction (mainly the static coefficient of friction) of the surface 300, thereby enabling the accuracy of capacitance detection to be improved.

[0234] In the sensor unit 3F, the uneven surface of the surface 300 of the sensor unit 3F is a rough surface having irregular unevenness. This configuration can further increase the specific surface area of ​​the sensor unit 3F and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor unit 3F against the measurement target, thereby enabling further improvement in the accuracy of capacitance detection.

[0235] [1.8 Eighth embodiment] [1.8.1 Configuration] FIG. 37 is a schematic cross-sectional view of a configuration example of a sensor unit 3G of a capacitance sensor of a measuring device according to an eighth embodiment.

[0236] Similar to sensor unit C, sensor unit 3G is located in head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3G is exposed to the outside from head unit 21C of handheld housing 2C. Surface 300 of sensor unit 3G and frame-shaped region 200 surrounding surface 300 of sensor unit 3G in head unit 21C form contact region 100 that is brought into contact with the measurement object.

[0237] 37 includes a first electrode 31, a second electrode 32, a sensor substrate 33, and a protective layer 34G. The first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3G are similar to the first electrode 31, the second electrode 32, and the sensor substrate 33 of the sensor unit 3C. However, in the sensor unit 3G of FIG. 37, the electrode portion 311 of the first electrode 31 and the electrode portion 321 of the second electrode 32 are located on the first surface 33a of the sensor substrate 33, but the surface of the electrode portion 311 of the first electrode 31 and the surface of the electrode portion 321 of the second electrode 32 are located on the same plane as the first surface 33a of the sensor substrate 33.

[0238] Surface 340 of protective layer 34G in Fig. 37 does not have an uneven shape like surface 340 of protective layer 34C in Fig. 28 and Fig. 29, but includes a rough surface having irregular unevenness. Well-known techniques such as etching techniques can be used to roughen surface 340 of protective layer 34G. Surface 340 of protective layer 34C in Fig. 28 and Fig. 29 is a rough surface having irregular unevenness over its entirety, but it is not necessary that the entire surface 340 is a rough surface having irregular unevenness.

[0239] In this embodiment, the surface 340 of the protective layer 34G, i.e., the surface 300 of the sensor unit 3G, is a rough surface having irregular projections and recesses, so that the specific surface area of ​​the sensor unit 3G is increased and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor unit 3G against the measurement target is increased. This makes it possible to improve the accuracy of capacitance detection.

[0240] [1.8.2 Effects, etc.] As described above, the sensor unit 3G has the surface 300 exposed from the head portion 21C. The surface 300 of the sensor unit 3G includes a rough surface. This configuration is smaller than when the surface 300 of the sensor unit 3G is flat, and the specific surface area of ​​the sensor unit 3G and the contact area of ​​the sensor unit 3G with the object to be measured are smaller. G This makes it possible to increase the coefficient of friction (mainly the static coefficient of friction) of the surface 300, thereby enabling the accuracy of capacitance detection to be improved.

[0241] In the sensor unit 3G, the uneven surface of the surface 300 of the sensor unit 3G is a rough surface. This configuration can increase the specific surface area of ​​the sensor unit 3G and the friction coefficient (mainly the static friction coefficient) of the surface 300 of the sensor unit 3G against the measurement target, thereby improving the accuracy of capacitance detection.

[0242] [1.9 Ninth embodiment] [1.9.1 Configuration] 38 is a schematic perspective view of an example configuration of head unit 21C of measurement device 10H according to embodiment 9. Measurement device 10H is a capacitance-type moisture measurement device, similar to measurement device 10C. Measurement device 10H includes capacitance sensor 1C and handheld housing 2C.

[0243] The handheld housing 2C houses the capacitance sensor 1C. The handheld housing 2C includes a head unit 21C. Although not shown in Fig. 38, the handheld housing 2C includes a grip unit 22 and a probe unit 23, similar to the handheld housing 2 in Fig. 1.

[0244] The capacitance sensor 1C determines the amount of moisture in a measurement target based on capacitance. The capacitance sensor 1C includes a sensor unit 3C. The capacitance sensor 1C includes a capacitance detection circuit 4 and a processing circuit 5, similar to the capacitance sensor 1 in FIG.

[0245] In this embodiment, at least the sensor unit 3C is located in the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C is exposed to the outside from the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C and a frame-shaped region 200 surrounding the surface 300 of the sensor unit 3C in the head unit 21C form a contact region 100 that is brought into contact with the measurement object.

[0246] The surface 300 of the sensor unit 3C in FIG. 38 protrudes from the frame region 200 of the head unit 21C. This makes it easier for the surface 300 of the sensor unit 3C to sufficiently contact the measurement object when the contact region 100 of the measuring device 10H is brought into contact with the measurement object, suppressing the measurement variation of the measuring device 10H and improving the accuracy of the capacitance detection. In particular, the sensor unit 3C can contact the measurement object more easily when the surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C than when the surface 300 of the sensor unit 3C is recessed from the frame region 200 of the head unit 21C. Because the surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C, even if the sensor unit 3C is charged in a state where static electricity is likely to be generated, such as a low humidity environment in winter, the static electricity charged in the sensor unit 3C can be effectively discharged. Therefore, the variation in the measurement results due to the charge of the sensor portion 3C is suppressed, and the accuracy of the detection of the capacitance can be improved. 2 If this is the case, static electricity can be discharged more effectively.

[0247] In this embodiment, the entire surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C. Therefore, the entire surface of the sensor unit 3C contacts the measurement target while obtaining a gripping force. As a result, the signal (change in capacitance) detected by the sensor unit 3C becomes large. This makes it possible to improve the accuracy of capacitance detection. Since the entire surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C, static electricity charged to the sensor unit 3C is more effectively discharged. As a result, the variation in the measurement results due to the charging of the sensor unit 3C is suppressed, and this makes it possible to improve the accuracy of capacitance detection.

[0248] In measuring device 10H of FIG. 38, sensor height H1 is 5 μm or more and 1 mm or less. When sensor height H1 is 5 μm or more, the measurement variation of measuring device 10H can be suppressed compared to when sensor height H1 is less than 5 μm. When sensor height H1 is 1 mm or less, the possibility of excessive pressure being applied to the measurement target when sensor unit 3C comes into contact with the measurement target can be reduced compared to when sensor height H1 is greater than 1 mm. If excessive pressure is applied to the measurement target when sensor unit 3C comes into contact with the measurement target, the measurement target may feel pain if the measurement target is a human.

[0249] The sensor height H1 in FIG. 38 is defined as the distance between the surface 300 of the sensor unit 3C and a predetermined plane including the frame region 200 of the head unit 21C. In the sensor unit 3C, as shown in FIG. 28 and FIG. 29, the surface 300 of the sensor unit 3C has an uneven shape. Here, the thickness of the protective layer 34C is very thin. Therefore, the distance between the first surface 33a of the sensor substrate 33 of the sensor unit 3C and the predetermined plane can be used as the distance between the surface 300 of the sensor unit 3C and the predetermined plane, that is, the sensor height H1. This makes it possible to set the sensor height H1 regardless of the shape of the surface 300 of the sensor unit 3C.

[0250] [1.9.2 Effects, etc.] In the measuring device 10H described above, the sensor unit 3C has a surface 300 exposed from the head unit 21C. The head unit 21C has a frame-shaped region 200 surrounding the surface 300 of the sensor unit 3C. At least a part of the surface 300 of the sensor unit 3C protrudes from the frame-shaped region 200 of the head unit 21C. This configuration improves the adhesion of the sensor unit 3C to the measurement target compared to a case where at least a part of the surface 300 of the sensor unit 3C does not protrude or sink from the frame-shaped region 200 of the head unit 21C, so that the measurement is stable and the accuracy of the detection of the electrostatic capacitance can be improved. This configuration effectively discharges static electricity charged to the sensor unit 3C, suppressing the variation in the measurement results due to the charging of the sensor unit 3C, thereby enabling the accuracy of the detection of the electrostatic capacitance to be improved.

[0251] In the measuring device 10H, the entire surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C. This configuration further improves the adhesion of the sensor unit 3C to the measurement target, stabilizing the measurement and enabling a further improvement in the accuracy of the capacitance detection. This configuration more effectively discharges static electricity that is charged to the sensor unit 3C, suppressing the variation in the measurement results due to the charging of the sensor unit 3C, thereby enabling an improvement in the accuracy of the capacitance detection.

[0252] In measuring device 10H, the distance (sensor height H1) between surface 300 of sensor unit 3C and a predetermined plane including frame region 200 of head unit 21C is 5 μm or more and 1 mm or less. This configuration makes it possible to improve the accuracy of capacitance detection while reducing the possibility of excessive pressure being applied to the measurement object when sensor unit 3C comes into contact with the measurement object.

[0253] [1.10 Tenth embodiment] [1.10.1 Configuration] 39 is a schematic perspective view of an example configuration of head unit 21C of measurement device 10I according to embodiment 10. Meter 10I is a capacitance-type moisture measurement device, similar to measurement device 10C. Meter 10I includes capacitance sensor 1C and handheld housing 2C.

[0254] The handheld housing 2C houses the capacitance sensor 1C. The handheld housing 2C includes a head unit 21C. Although not shown in Fig. 39, the handheld housing 2C includes a grip unit 22 and a probe unit 23, similar to the handheld housing 2 in Fig. 1.

[0255] The capacitance sensor 1C determines the amount of moisture in a measurement target based on capacitance. The capacitance sensor 1C includes a sensor unit 3C. The capacitance sensor 1C includes a capacitance detection circuit 4 and a processing circuit 5, similar to the capacitance sensor 1 in FIG.

[0256] In this embodiment, at least the sensor unit 3C is located in the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C is exposed to the outside from the head unit 21C of the handheld housing 2C. The surface 300 of the sensor unit 3C and a frame-shaped region 200 surrounding the surface 300 of the sensor unit 3C in the head unit 21C form a contact region 100 that is brought into contact with the measurement object.

[0257] The surface 300 of the sensor unit 3C in FIG. 39 is recessed into the frame region 200 of the head unit 21C. As a result, when the contact region 100 of the measuring device 10I is brought into contact with the measurement object, a part of the measurement object is deformed and enters the space surrounded by the frame region 200 of the head unit 21C. As a result, the surface 300 of the sensor unit 3C can easily contact the measurement object sufficiently, the measurement variation of the measuring device 10I is suppressed, and the accuracy of the detection of the capacitance can be improved. In particular, the gripping force is improved and the sensor unit 3C is more easily fixed to the measurement object when the surface 300 of the sensor unit 3C is recessed into the frame region 200 of the head unit 21C than when the surface 300 of the sensor unit 3C protrudes from the frame region 200 of the head unit 21C.

[0258] In this embodiment, the entire surface 300 of the sensor unit 3C is recessed from the frame-shaped region 200 of the head unit 21C. Therefore, the sensor unit 3C can easily contact the entire surface of the object to be measured while obtaining a gripping force. As a result, the signal (change in capacitance) detected by the sensor unit 3C becomes larger. This makes it possible to improve the accuracy of capacitance detection.

[0259] In measuring device 10I of FIG. 39, sensor height I1 is 5 μm or more and 1 mm or less. When sensor height I1 is 5 μm or more, the variation in measurement of measuring device 10I can be suppressed compared to when sensor height I1 is less than 5 μm. When sensor height I1 is 1 mm or less, the possibility of excessive pressure being applied to the measurement target when sensor unit 3C comes into contact with the measurement target can be reduced compared to when sensor height I1 is greater than 1 mm. If excessive pressure is applied to the measurement target when sensor unit 3C comes into contact with the measurement target, the measurement target may feel pain if it is a human.

[0260] [1. 10 .2 Effects, etc. In the measuring device 10I described above, the sensor unit 3C has a surface 300 exposed from the head unit 21C. The head unit 21C has a frame-shaped region 200 that surrounds the surface 300 of the sensor unit 3C. At least a portion of the surface 300 of the sensor unit 3C is recessed into the frame-shaped region 200 of the head unit 21C. This configuration improves the adhesion of the sensor unit 3C to the measurement target compared to a case in which at least a portion of the surface 300 of the sensor unit 3C does not protrude or recess into the frame-shaped region 200 of the head unit 21C, making it possible to stabilize the measurement and improve the accuracy of capacitance detection.

[0261] In measuring device 10I, the entire surface 300 of sensor unit 3C is recessed from frame-shaped region 200 of head unit 21C. This configuration further improves the adhesion of sensor unit 3C to the measurement target, making it possible to stabilize measurement and further improve the accuracy of capacitance detection.

[0262] In measuring device 10I, the distance (sensor height I1) between surface 300 of sensor unit 3C and a predetermined plane including frame region 200 of head unit 21C is 5 μm or more and 1 mm or less. This configuration makes it possible to improve the accuracy of capacitance detection while reducing the possibility of excessive pressure being applied to the measurement object when sensor unit 3C comes into contact with the measurement object.

[0263] [1.11 Eleventh embodiment] [1.11.1 Configuration] Fig. 40 is a schematic diagram of an example configuration of a measuring device 10J according to embodiment 11. Measuring device 10J in Fig. 40 is a capacitance-type moisture measuring device. Measuring device 10J includes a capacitance sensor 1J and a handheld housing 2.

[0264] The capacitance sensor 1J determines the amount of moisture in a measurement target based on capacitance. The capacitance sensor 1J includes a sensor unit 3, a capacitance detection circuit 4, a processing circuit 5J, and a load detection circuit 7. In this embodiment, the sensor unit 3, the capacitance detection circuit 4, and the load detection circuit 7 are located in the head unit 21 of the handheld housing 2. In this embodiment, the processing circuit 5J is located in the grip unit 22 of the handheld housing 2.

[0265] The load detection circuit 7 detects a load that the sensor unit 3 receives from a measurement object. The load detection circuit 7 may detect the load itself that the sensor unit 3 receives from a measurement object or a physical quantity that is correlated with the load. The load detection circuit 7 may include, for example, a pressure sensor.

[0266] The processing circuit 5J includes an arithmetic circuit 51J and an input / output circuit 52.

[0267] The arithmetic circuit 51J is connected to the input / output circuit 52. When an operation to start measuring the moisture content is performed by the input device of the input / output circuit 52, the arithmetic circuit 51J causes the capacitance detection circuit 4 to start an operation for detecting the capacitance. The arithmetic circuit 51J is configured to calculate the capacitance of the capacitor 30 based on the time taken for the capacitance detection circuit 4 to charge and discharge the capacitor 30. The arithmetic circuit 51J is configured to obtain the moisture content of the measurement target based on the capacitance of the capacitor 30. The arithmetic circuit 51J displays the moisture content of the measurement target by the output device of the input / output circuit 52.

[0268] Here, when the contact between the sensor unit 3 and the measurement object is insufficient, the reliability of the calculated capacitance of the capacitor 30 may be low. If the reliability of the capacitance of the capacitor 30 is low, the reliability of the result of the calculation based on the capacitance of the capacitor 30 (the moisture content of the measurement object) will naturally be low. From this viewpoint, in this embodiment, the calculation circuit 51J is configured to determine whether or not to output the result of the calculation based on the capacitance of the capacitor (the moisture content of the measurement object) depending on the load that the sensor unit 3 receives from the measurement object. More specifically, when the calculation circuit 51J acquires the load that the sensor unit 3 receives from the measurement object from the load detection circuit 7, the calculation circuit 51J compares the load that the sensor unit 3 receives from the measurement object with a predetermined value. The calculation circuit 51J outputs the result of the calculation based on the capacitance of the capacitor (the moisture content of the measurement object) while the load that the sensor unit 3 receives from the measurement object is equal to or greater than the predetermined value. The processing circuit 5J does not output the result of the calculation based on the capacitance of the capacitor (the moisture content of the measurement object) while the load that the sensor unit 3 receives from the measurement object is less than the predetermined value. The predetermined value is, for example, 2.3 gf / mm 2 It is.

[0269] In this way, the processing circuit 5J outputs the result of the calculation based on the capacitance of the capacitor (the moisture content of the measurement target) while the load that the sensor unit 3 receives from the measurement target is equal to or greater than a predetermined value, and does not output the result of the calculation based on the capacitance of the capacitor (the moisture content of the measurement target) while the load that the sensor unit 3 receives from the measurement target is less than the predetermined value. This makes it possible to output the result of the calculation only when the capacitance of the capacitor 30 is reliable, thereby improving the accuracy of capacitance detection.

[0270] In this embodiment, the probe section 23 is configured such that the position of the head section 21 relative to the grip section 22 changes depending on the load that the sensor section 3 receives from the measurement object. The probe section 23 is configured such that the head section 21 is inclined forward in the longitudinal direction of the grip section 22 when the load that the sensor section 3 receives from the measurement object is zero (no load). The probe section 23 is configured such that the head section 21 is parallel to the longitudinal direction of the grip section 22 when the load that the sensor section 3 receives from the measurement object is a predetermined value. As an example, the probe section 23 may be formed of a material having spring properties.

[0271] [1.11.2 Effects, etc.] In the measuring instrument 10J described above, the processing circuit 5J outputs the result of the calculation based on the capacitance of the capacitor 30 while the load that the sensor unit 3 receives from the object to be measured is equal to or greater than a predetermined value, and does not output the result of the calculation based on the capacitance of the capacitor 30 while the load that the sensor unit 3 receives from the object to be measured is less than the predetermined value. This configuration makes it possible to output the result of the calculation only when the capacitance of the capacitor 30 is reliable, thereby improving the accuracy of capacitance detection.

[0272] [2. Modifications] The embodiments of the present disclosure are not limited to the above-mentioned embodiments. The above-mentioned embodiments can be modified in various ways depending on the design, etc., as long as the object of the present disclosure can be achieved. Below, modified examples of the above-mentioned embodiments are listed. The modified examples described below can be applied in appropriate combination.

[0273] In one modification, the first to fourth switches S1 to S4 of the capacitance detection circuit 4 do not necessarily have to be field effect transistors. The first to fourth switches S1 to S4 may be semiconductor switches or mechanical switches. In the case where the third switch S3 and the fourth switch S4 are not field effect transistors and do not have a body diode, Vf2 in the formula (8) is the lower limit of the potential V2 of the second electrode 32 when the charging / discharging circuit 42 is switched from the first state to the second state in the case where the second auxiliary capacitor 44b is not present, and the magnitude of Vf2 is equal to the magnitude of the second threshold. Vf9 in the formula (9) is the lower limit of the potential V1 of the first electrode 31 when the charging / discharging circuit 42 is switched from the second state to the first state in the case where the first auxiliary capacitor 44a is not present, and the magnitude of Vf1 is equal to the magnitude of the first threshold.

[0274] In one modified example, the structure of the sensor unit 3, 3B is not particularly limited. The sensor unit 3, 3B may have a conventionally known structure. In the case of a moisture meter, the sensor unit 3 may be configured so that the first and second electrodes 31, 32 contact the measurement object to form a capacitor 30 together with a part of the measurement object. In the case of an occlusal force meter, the sensor unit 3B includes a deformation portion 35B that deforms when pressure is applied, and the first and second electrodes 31B, 32B may be configured to form a capacitor 30B together with the deformation portion 35B.

[0275] In the embodiment, the capacitance is calculated based on the period T, but this is not limited to this and may be measured by impedance measurement or the like. The capacitance is not limited to the total capacitance and may be measured and calculated based on only the auxiliary capacitor.

[0276] Also, in order to keep the conditions constant when the measuring device is started, the charge in the capacitor may be discharged before starting the measurement. Alternatively, the capacitor may be fully charged before measurement. If the charge stored in the capacitor at start-up varies, this may adversely affect the measurement results. By keeping the charge constant at start-up, it is possible to reduce the adverse effects and improve the accuracy of the measurement.

[0277] In the fourth and sixth embodiments, the convex regions 341 and the concave regions 342 on the surface 340 of the protective layer 34C may be arranged without regard to the electrode portions 311, 321 on the first surface 33a of the sensor substrate 33. In the fifth and seventh embodiments, the convex regions 341 and the concave regions 342 on the surface 340 of the protective layer 34D may be arranged without regard to the electrode portions 311, 321 on the first surface 33a of the sensor substrate 33.

[0278] In one modification, the frame-shaped region 200 of the head portion 21C may have a rough surface having an uneven shape or irregular unevenness. In this case, the surface 300 of the sensor portion 3C may be flat. That is, it is sufficient that the contact region 100 has an uneven shape or a rough surface having irregular unevenness, or both, and it is not essential that the surface 300 of the sensor portion 3C has an uneven shape or a rough surface having irregular unevenness, or both. Note that when the measuring device 10C is used, the head portion 21C may be covered with a protective resin film. It is desirable that the rough surface having an uneven shape or irregular unevenness has a size and shape that can function even on top of such a resin film.

[0279] In the ninth and tenth embodiments, any of the sensor units 3, 3D-3G may be used instead of the sensor unit 3C. In the ninth embodiment, the surface 300 of the sensor unit 3C may be curved (convex). As a result, not all but a part of the surface 300 of the sensor unit 3C may protrude from the frame region 200 of the head unit 21C. In the tenth embodiment, the surface 300 of the sensor unit 3C may be curved (concave). As a result, not all but a part of the surface 300 of the sensor unit 3C may be recessed from the frame region 200 of the head unit 21C. The shape of the surface 300 of the sensor unit 3C may be appropriately set depending on the extent to which all or a part of the surface 300 of the sensor unit 3C is protruded or recessed from the frame region 200 of the head unit 21C.

[0280] In the eleventh embodiment, instead of sensor unit 3, any one of sensor units 3B-3G may be used.

[0281] [3. Aspects] As is clear from the above-mentioned embodiment and modified examples, the present disclosure includes the following aspects. In the following, symbols are given in parentheses only to clarify the correspondence with the embodiment. Note that, in consideration of the readability of the text, the description of symbols in parentheses from the second time onwards may be omitted.

[0282] The first aspect is a capacitance sensor (1; 1A; 1B to 1G; 1J) including a sensor unit (3; 3B) having a first electrode (31) and a second electrode (32) constituting a capacitor (30), and a capacitance detection circuit (4; 4A) connected to the sensor unit (3; 3B to 3G). The capacitance detection circuit (4; 4A) includes a charge / discharge circuit (42) connected to the first electrode (31) and the second electrode (32) for charging and discharging the capacitor (30), a control circuit (43) for controlling the charge / discharge circuit (42) so that the capacitor (30) repeatedly charges and discharges, and an auxiliary capacitance circuit (44; 44A) including at least one of a first auxiliary capacitor (44a) connected to the first electrode (31) so as to be in parallel with the capacitor (30) and a second auxiliary capacitor (44b) connected to the second electrode (32) so as to be in parallel with the capacitor (30). This aspect can reduce the effect of stray capacitance on capacitance sensing.

[0283] The second aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the first aspect. In the second aspect, the auxiliary capacitance circuit (44) has the first auxiliary capacitor (44a) and the second auxiliary capacitor (44b). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0284] The third aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the second aspect. In the third aspect, the capacitance of the first auxiliary capacitor (44a) is equal to the capacitance of the second auxiliary capacitor (44b). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0285] The fourth aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the second aspect. In the fourth aspect, the capacitance of the first auxiliary capacitor (44a) is different from the capacitance of the second auxiliary capacitor (44b). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0286] A fifth aspect is a capacitance sensor (1; 1A; 1B-1G; 1J) based on any one of the first to fourth aspects. In the fifth aspect, the charge / discharge circuit (42) is configured to be capable of complementarily switching between a first state in which a constant output current is supplied to the first electrode (31) and a second state in which a constant output current is supplied to the second electrode (32). The control circuit (43) is configured to switch the charge / discharge circuit (42) from the first state to the second state when the potential of the first electrode (31) reaches a first threshold value while the charge / discharge circuit (42) is in the first state. The control circuit (43) is configured to switch the charge / discharge circuit (42) from the second state to the first state when the potential of the second electrode (32) reaches a second threshold value while the charge / discharge circuit (42) is in the second state. This aspect can simplify the configuration of the capacitance detection circuit.

[0287] A sixth aspect is a capacitance sensor (1; 1A; 1B to 1G; 1J) based on the fifth aspect. In the sixth aspect, the first threshold value and the second threshold value are equal. This aspect can simplify the configuration of the capacitance detection circuit.

[0288] A seventh aspect is a capacitance sensor (1; 1A; 1B to 1G; 1J) based on the fifth or sixth aspect. In the seventh aspect, the charge / discharge circuit (42) is connected between a power supply terminal (41a) connected to a power supply (Iin) and a reference potential terminal (41b) connected to a reference potential (Vg), and includes a first switch (S1), a second switch (S2), a third switch (S3), and a fourth switch (S4). The first switch (S1) and the third switch (S3) form a series circuit. The series circuit of the first switch (S1) and the third switch (S3) is between the power supply terminal (41a) and the reference potential terminal (41b) such that the first switch (S1) is connected to the power supply terminal (41a) and the third switch (S3) is connected to the reference potential terminal (41b). A connection point between the first switch (S1) and the third switch (S3) is connected to the first electrode (31). The second switch (S2) and the fourth switch (S4) form a series circuit. The series circuit of the second switch (S2) and the fourth switch (S4) is between the power supply terminal (41a) and the reference potential terminal (41b) such that the second switch (S2) is connected to the power supply terminal (41a) and the fourth switch (S4) is connected to the reference potential terminal (41b) and is connected in parallel to the series circuit of the first switch (S1) and the third switch (S3). A connection point between the second switch (S2) and the fourth switch (S4) is connected to the second electrode (32). In the first state, the first and fourth switches (S4) are on, and the second and third switches (S3) are off. In the second state, the first and fourth switches (S4) are off, and the second and third switches (S3) are on. This aspect can simplify the configuration of the capacitance detection circuit.

[0289] The eighth aspect is a capacitance sensor (1; 1A; 1B to 1G; 1J) based on the seventh aspect. In the eighth aspect, a first end of the first auxiliary capacitor (44a) is connected to the first electrode (31) and a second end of the first auxiliary capacitor (44a) is connected to the reference potential terminal (41b) so that the first auxiliary capacitor (44a) is in parallel with the third switch (S3). A first end of the second auxiliary capacitor (44b) is connected to the second electrode (32) and a second end of the second auxiliary capacitor (44b) is connected to the reference potential terminal (41b) so that the second auxiliary capacitor (44b) is in parallel with the fourth switch (S4). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0290] A ninth aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the eighth aspect. In the ninth aspect, the capacitance detection circuit (4) satisfies the following formula.

[0291]

number

[0292] Ce is the capacitance of the capacitor (30). Cg1 is the capacitance of the first auxiliary capacitor (44a). Cg2 is the capacitance of the second auxiliary capacitor (44b). Vth1 is the first threshold. Vth2 is the second threshold. Vf1 is the lower limit of the potential of the first electrode (31) when the charge / discharge circuit (42) is switched from the second state to the first state in the absence of the first auxiliary capacitor (44a). Vf2 is the lower limit of the potential of the second electrode (32) when the charge / discharge circuit (42) is switched from the first state to the second state in the absence of the second auxiliary capacitor (44b). This aspect can reduce the effect of stray capacitance on capacitance detection.

[0293] A tenth aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the ninth aspect. In the tenth aspect, Vf1=Vf2 is satisfied. This aspect can simplify the configuration of the capacitance detection circuit.

[0294] An eleventh aspect is a capacitance sensor (1; 1B to 1G; 1J) based on the ninth or tenth aspect. In the eleventh aspect, Vf1<0 and Vf2<0 are satisfied. In this aspect, the amount of change in capacitance can be increased, and the accuracy of capacitance detection can be improved.

[0295] A twelfth aspect is a capacitance sensor (1; 1B to 1G; 1J) based on any one of the ninth to eleventh aspects. In the twelfth aspect, 3 Each of the switch (S3) and the fourth switch (S4) is a field effect transistor. 3 Vf1 is determined by the threshold voltage of the body diode of the fourth switch (S3). Vf2 is determined by the threshold voltage of the body diode of the fourth switch (S4). This embodiment makes it possible to reduce the size of the capacitance detection circuit and to increase the speed of switching between the first state and the second state.

[0296] A thirteenth aspect is a capacitance sensor (1; 1A; 1B-1G; 1J) based on any one of the first to twelfth aspects. In the thirteenth aspect, the sensor unit (3; 3B-3G) has a sensor substrate (33) on which the first electrode (31) and the second electrode (32) are arranged. The charge / discharge circuit (42) is arranged on a circuit substrate (4a) separate from the sensor substrate (33). The auxiliary capacitance circuit (44; 44A) is arranged between the sensor substrate (33) and the circuit substrate (4a) and at a position closer to the circuit substrate (4a) than the sensor substrate (33). This aspect can reduce the influence of stray capacitance from the first electrode and the second electrode of the sensor unit.

[0297] A fourteenth aspect is a capacitance sensor (1; 1A; 1B-1G; 1J) based on any one of the first to thirteenth aspects. In the fourteenth aspect, the capacitance sensor (1; 1A; 1B-1G; 1J) further includes a processing circuit (5; 5B; 5J) that calculates the capacitance of the capacitor (30) based on the time it takes for the capacitance detection circuit (4; 4A) to charge and discharge the capacitor (30). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0298] A fifteenth aspect is a measuring device (10; 10B; to 10J) that includes a capacitance sensor (1; 1A: 1B to 1G; 1J) based on any one of the first to thirteenth aspects, and a handheld housing (2; 2B; 2C) that houses the capacitance sensor (1; 1A; 1B to 1G; 1J). This aspect can reduce the effect of stray capacitance on capacitance detection.

[0299] A sixteenth aspect is a measuring instrument (10; 10B to 10J) based on the fifteenth aspect. In the sixteenth aspect, the capacitance sensor (1; 1A; 1B to 1G; 1J) further includes a processing circuit (5; 5B; 5J) that calculates the capacitance of the capacitor (30) based on the time it takes for the capacitance detection circuit (4; 4A) to charge and discharge the capacitor (30). This aspect can reduce the effect of stray capacitance on the detection of capacitance.

[0300] A seventeenth aspect is a measuring instrument (10; 10B to 10J) based on the sixteenth aspect. In the seventeenth aspect, the handheld housing (2; 2B; 2C) includes a head portion (21; 21B; 21C) disposed at a first end of the handheld housing (2; 2B; 2C) and contacting a measurement object, a grip portion (22; 22B) disposed at a second end of the handheld housing (2; 2B; 2C) and held by a hand, and a probe portion (23) connecting the head portion (21; 21B; 21C) and the grip portion (22; 22B). The sensor portion (3; 3B to 3G) is located in the head portion (21; 21B; 21C). The capacitance detection circuit (4) is located in the head portion (21; 21B; 21C) or the probe portion (23). The processing circuit (5; 5B; 5J) is located in the grip part (22; 22B). This embodiment can reduce the influence of stray capacitance occurring in the grip part.

[0301] An eighteenth aspect is a measuring device (10; 10B to 10J) based on the seventeenth aspect. In the eighteenth aspect, the grip portion (22; 22B) has a conductive portion (221; 221B) exposed on the surface of the grip portion (22; 22B). The conductive portion (221; 221B) is connected to a reference potential (Vg) of the processing circuit (5; 5B; 5J). This aspect can reduce variation in the influence of stray capacitance on the side of the person holding the measuring device.

[0302] A nineteenth aspect is a measuring device (10C) based on any one of the sixteenth to eighteenth aspects. In the nineteenth aspect, the sensor section (3C; 3D; 3E; 3F) has a surface (300) exposed from the head section (21C). The surface (300) of the sensor section (3C; 3D; 3E; 3F) has an uneven shape. In this aspect, the specific surface area of ​​the sensor section and the friction coefficient (mainly the static friction coefficient) of the surface of the sensor section against the measurement target can be increased compared to when the surface of the sensor section is flat, making it possible to improve the accuracy of capacitance detection.

[0303] The twentieth aspect is a measuring device (10H; 10I) based on the seventeenth aspect. In the twentieth aspect, the sensor unit (3C) has a surface (300) exposed from the head unit (21C). The head unit (21C) has a frame-shaped region (200) surrounding the surface (300) of the sensor unit (3C). At least a part of the surface (300) of the sensor unit (3C) protrudes or is recessed from the frame-shaped region (200) of the head unit (21C). In this aspect, the sensor unit has better adhesion to the measurement target than when at least a part of the surface of the sensor unit does not protrude or is recessed from the frame-shaped region of the head unit, so that the measurement is stable and the accuracy of the detection of the capacitance can be improved. In this configuration, the static electricity charged to the sensor unit 3C is effectively discharged, so that the variation in the measurement result due to the charging of the sensor unit 3C is suppressed, and the accuracy of the detection of the capacitance can be improved.

[0304] The 21st aspect is a measuring device (10H) based on the 20th aspect. In the 21st aspect, the entire surface (300) of the sensor portion (3C) protrudes from the frame region (200) of the head portion (21C). This aspect further improves the adhesion of the sensor portion to the measurement target, stabilizing the measurement and enabling further improvement in the accuracy of capacitance detection. This configuration more effectively discharges static electricity charged to the sensor portion 3C, suppressing variation in the measurement results due to charging of the sensor portion 3C, thereby enabling improvement in the accuracy of capacitance detection.

[0305] The 22nd aspect is a measuring device (10H; 10I) based on the 20th aspect. In the 22nd aspect, the distance between the surface (300) of the sensor part (3C) and the predetermined plane is 5 μm or more and 1 mm or less. This aspect makes it possible to improve the accuracy of capacitance detection while reducing the possibility of excessive pressure being applied to the measurement object when the sensor part comes into contact with the measurement object.

[0306] A 23rd aspect is a measuring instrument (10J) based on the 17th aspect. In the 23rd aspect, the processing circuit (5J) outputs the result of the calculation based on the capacitance of the capacitor (30) while the load that the sensor unit (3) receives from the object to be measured is equal to or greater than a predetermined value, and does not output the result of the calculation based on the capacitance of the capacitor (30) while the load that the sensor unit (3) receives from the object to be measured is less than the predetermined value. This aspect makes it possible to improve the accuracy of capacitance detection because the result of the calculation can be output only when the capacitance of the capacitor is reliable.

[0307] A 24th aspect is a measuring device (10; 10C to 10J) based on any one of the 16th to 23rd aspects. In the 24th aspect, the sensor unit (3; 3C to 3G) is configured such that the first and second electrodes (31, 32) form the capacitor (30) together with a part of the object to be measured by contacting the first and second electrodes (31, 32) with the object to be measured. The processing circuit (5; 5J) is configured to determine the moisture content of the object to be measured based on the capacitance of the capacitor (30). This aspect makes it possible to measure the moisture content of the object to be measured.

[0308] A twenty-fifth aspect is a measuring device (10; 10C to 10J) based on the twenty-fourth aspect. In the twenty-fifth aspect, the measurement object is a living organism. This aspect makes it possible to measure the water content of the living organism.

[0309] A 26th aspect is a measuring device (10; 10C to 10J) based on the 24th or 25th aspect. In the 26th aspect, the measurement object is an oral cavity of a living organism. This aspect enables measurement of the moisture content of the oral cavity of a living organism.

[0310] A twenty-seventh aspect is a measuring device (10B) according to the twenty-sixth aspect. 7In this embodiment, the sensor unit (3B) includes a deformation portion (35B) that is deformed by the application of pressure. The sensor unit (3B) is configured such that the first and second electrodes (31B, 32B) form the capacitor (30B) together with the deformation portion (35B). The processing circuit (5) is configured to determine the pressure based on the capacitance of the capacitor (30B). This embodiment allows the pressure to be measured. In particular, pressure may be applied to the deformation portion (35B) by a person biting with their upper and lower jaw teeth. In this case, it allows the measurement of the bite force of the person's upper and lower jaw teeth.

[0311] The above second to fourteenth aspects and sixteenth to twenty-seventh aspects are not essential. [Industrial Applicability]

[0312] The present disclosure is applicable to a capacitance detection circuit, a capacitance sensor, and a measuring instrument. Specifically, the present disclosure is applicable to a capacitance detection circuit for detecting capacitance based on charging and discharging of a capacitor, a capacitance sensor including the capacitance detection circuit, and a measuring instrument including the capacitance sensor. [Explanation of symbols]

[0313] 10,10B~10J Measuring instrument 1,1A,1B~1G,1J Capacitive Sensor 2,2B,2C Handheld Case 21, 21B, 21C Head section 22,22B Grip section 221,221B Conductive part 23 Probe section 3,3B~3G Sensor section 30,30B Capacitor 31B 1st electrode 32B 2nd electrode 33 Sensor board 35B Deformation section 4,4A Capacitive sensing circuit 41a Power terminal 41b Reference potential terminal 42 Charge / discharge circuit S1 First switch S2 Second switch S3 3rd switch S4 4th switch 43 Control circuit 44,44A auxiliary capacity circuit 44a 1st auxiliary capacitor 44b Second auxiliary capacitor 4a Circuit board 5,5B,5J Processing circuit Iin power supply Vg Reference potential

Claims

1. a sensor portion having a first electrode and a second electrode forming a capacitor; a capacitance detection circuit connected to the sensor unit; Equipped with The capacitance sensing circuit includes: a charge / discharge circuit connected to the first electrode and the second electrode for charging and discharging the capacitor; a control circuit for controlling the charge / discharge circuit so that the capacitor is repeatedly charged and discharged; an auxiliary capacitance circuit including at least one of a first auxiliary capacitor connected to the first electrode so as to be in parallel with the capacitor, and a second auxiliary capacitor connected to the second electrode so as to be in parallel with the capacitor; Equipped with Capacitive sensor.

2. the auxiliary capacitance circuit includes the first auxiliary capacitor and the second auxiliary capacitor; The capacitance sensor according to claim 1 .

3. The capacitance of the first auxiliary capacitor is equal to the capacitance of the second auxiliary capacitor. The capacitance sensor according to claim 2 .

4. the capacitance of the first auxiliary capacitor is different from the capacitance of the second auxiliary capacitor; The capacitance sensor according to claim 2 .

5. the charge / discharge circuit is configured to be switchable in a complementary manner between a first state in which a constant output current is supplied to the first electrode and a second state in which a constant output current is supplied to the second electrode; The control circuit includes: when the potential of the first electrode reaches a first threshold value while the charging / discharging circuit is in the first state, the charging / discharging circuit is switched from the first state to the second state; when the potential of the second electrode reaches a second threshold value while the charging / discharging circuit is in the second state, the charging / discharging circuit is switched from the second state to the first state; It is configured as follows: The capacitance sensor according to claim 1 .

6. The first threshold value and the second threshold value are equal. The capacitance sensor according to claim 5 .

7. the charge / discharge circuit is connected between a power supply terminal connected to a power supply and a reference potential terminal connected to a reference potential, and includes a first switch, a second switch, a third switch, and a fourth switch; the first switch and the third switch form a series circuit; a series circuit of the first switch and the third switch is disposed between the power supply terminal and the reference potential terminal such that the first switch is connected to the power supply terminal and the third switch is connected to the reference potential terminal; a connection point between the first switch and the third switch is connected to the first electrode, the second switch and the fourth switch form a series circuit; a series circuit of the second switch and the fourth switch is connected between the power supply terminal and the reference potential terminal such that the second switch is connected to the power supply terminal and the fourth switch is connected to the reference potential terminal and is connected in parallel to the series circuit of the first switch and the third switch; a connection point between the second switch and the fourth switch is connected to the second electrode, In the first state, the first and fourth switches are on, and the second and third switches are off. In the second state, the first and fourth switches are turned off, and the second and third switches are turned on. The capacitance sensor according to claim 5 .

8. a first end of the first auxiliary capacitor is connected to the first electrode and a second end of the first auxiliary capacitor is connected to the reference potential terminal so that the first auxiliary capacitor is in parallel with the third switch; a first end of the second auxiliary capacitor is connected to the second electrode and a second end of the second auxiliary capacitor is connected to the reference potential terminal so that the second auxiliary capacitor is in parallel with the fourth switch; The capacitance sensor according to claim 7.

9. The capacitance sensing circuit includes: [0010] And, [0025] Fulfilling Ce is the capacitance of the capacitor, Cg1 is the capacitance of the first auxiliary capacitor, Cg2 is the capacitance of the second auxiliary capacitor, Vth1 is the first threshold value, Vth2 is the second threshold value, Vf1 is a lower limit value of the potential of the first electrode when the charge / discharge circuit is switched from the second state to the first state in the absence of the first auxiliary capacitor, Vf2 is a lower limit value of the potential of the second electrode when the charge / discharge circuit is switched from the first state to the second state in the absence of the second auxiliary capacitor. The capacitance sensor according to claim 8.

10. Vf1=Vf2 is satisfied. The capacitance sensor according to claim 9.

11. Vf1<0 and Vf2<0 are satisfied. The capacitance sensor according to claim 9.

12. each of the third switch and the fourth switch is a field effect transistor; Vf1 is determined by the threshold voltage of the body diode of the third switch, Vf2 is determined by the threshold voltage of the body diode of the fourth switch. The capacitance sensor according to claim 9.

13. the sensor unit includes a sensor substrate on which the first electrode and the second electrode are arranged, the charge / discharge circuit is disposed on a circuit board separate from the sensor board; the auxiliary capacitance circuit is disposed between the sensor substrate and the circuit substrate and closer to the circuit substrate than the sensor substrate; The capacitance sensor according to any one of claims 1 to 12.

14. a processing circuit for calculating the capacitance of the capacitor based on a time taken for the capacitance detection circuit to charge and discharge the capacitor; The capacitance sensor according to any one of claims 1 to 12.

15. A capacitance sensor according to any one of claims 1 to 12, a handheld housing housing the capacitance sensor; Equipped with Measuring instrument.

16. a processing circuit for calculating the capacitance of the capacitor based on a time taken for the capacitance detection circuit to charge and discharge the capacitor; 16. The measuring device of claim 15.

17. The handheld housing includes: a head portion disposed at a first end of the handheld housing and adapted to come into contact with a measurement target; a grip portion disposed at a second end of the handheld housing and adapted to be held by a hand; a probe portion that connects the head portion and the grip portion; Including, the sensor unit is located in the head unit, the capacitance detection circuit is located in the head portion or the probe portion, The processing circuit is located in the grip portion.

17. The measuring device of claim 16.

18. the grip portion has a conductive portion exposed on a surface of the grip portion, The conductive portion is connected to a reference potential of the processing circuit.

18. The measuring device of claim 17.

19. the sensor portion has a surface exposed from the head portion, The surface of the sensor portion has an uneven shape.

18. The measuring device of claim 17.

20. the sensor portion has a surface exposed from the head portion, the head portion has a frame-shaped region surrounding a surface of the sensor portion, At least a part of a surface of the sensor portion protrudes or recesses with respect to a frame-shaped region of the head portion.

18. The measuring device of claim 17.

21. The entire surface of the sensor portion protrudes from the frame region of the head portion.

21. The measuring device of claim 20.

22. The distance between the surface of the sensor portion and a predetermined plane including the frame region is 5 μm or more and 1 mm or less.

21. The measuring device of claim 20.

23. the processing circuit outputs a result of a calculation based on the capacitance of the capacitor while a load applied to the sensor unit from the measurement object is equal to or greater than a predetermined value.

18. The measuring device of claim 17.

24. the sensor unit is configured such that the first and second electrodes form the capacitor together with a part of the object to be measured by contacting the first and second electrodes with the object to be measured, The processing circuit is configured to determine the moisture content of the measurement object based on the capacitance of the capacitor.

17. The measuring device of claim 16.

25. The measurement subject is a living organism.

25. The measuring device of claim 24.

26. The measurement object is the oral cavity of a living organism.

25. The measuring device of claim 24.

27. The sensor unit includes a deformation portion that is deformed by application of pressure, the sensor portion is configured such that the first and second electrodes form the capacitor together with the deformation portion; The processing circuit measures the pressure based on the capacitance of the capacitor.

27. The measuring device of claim 26.

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