Processing equipment

Abstract

To easily configure a turntable.SOLUTION: A processing device 1 includes processing means 3 for processing workpiece 17, a turntable 5 having support tables 50 for supporting a chuck table 2, and an outer periphery for connection tool 52 and a central connection tool 54 for connecting the adjacent support tables 50, positioning means for rotating the turntable 5 and positioning the chuck table 2 at the processing position of the processing means 3, and an outer periphery base 70 and a central base 72 for supporting the turntable 5, in which an outer periphery guide rail 71 and a central guide rail 73 for guiding a rotation direction of the turntable 5 are formed in the outer periphery base 70 and the central base 72, and accordingly the turntable 5 can be rotatably supported on the base 7.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] As disclosed in Patent Documents 1 and 2, a grinding device equipped with a turntable on which multiple chuck tables for holding workpieces are arranged, and grinding means for grinding the workpieces using grinding wheels, positions the chuck table at a grinding position where the grinding wheel grinds the workpiece by rotating the turntable. For example, a grinding apparatus as disclosed in Patent Document 3 has four grinding means and rotates a turntable on which five chuck tables are arranged to position the chuck tables at the grinding positions of the respective grinding means. The turntable is formed from a single disk, and the turntable on which five chuck tables are arranged as described in the above document is a large disk, so a large rotational power source is required to rotate the turntable and stop it.

[0003] In addition, the turntable sprays air from at least three plate-shaped support pads arranged on the base, forming an air layer between the upper surfaces of the support pads and the lower surface of the turntable, allowing the support pads to support the turntable without contact, and the rotary drive source to rotate the turntable around its center axis, allowing it to be positioned at the grinding position of the grinding means. Then, when the chuck table is positioned at the grinding position, the air ejection from the support pad is stopped and the underside of the turntable is brought into contact with the upper surface of the support pad so that the turntable is seated on the support pad, thereby preventing the inclination of the chuck table, which is subjected to the load caused by the grinding process, from changing. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2007-229904 A [Patent Document 2] JP 2015-199158 A [Patent Document 3] JP 2012-081556 A Summary of the Invention [Problem to be solved by the invention]

[0005] As described above, when the turntable becomes larger, the rotation drive source becomes larger and it becomes difficult to achieve a high degree of flatness of the lower surface of the turntable relative to the upper surface of the support pad. Therefore, a processing device that positions a chuck table at a processing position where a workpiece is processed by a processing tool such as a grinding wheel by rotating a turntable has the problem of making the turntable lightweight and simplifying the configuration of the turntable and its supporting mechanism to easily adjust the accuracy of the flatness of the underside of the turntable. [Means for solving the problem]

[0006] The present invention Processing equipment a processing device including a processing means for processing a workpiece, a turntable on which a plurality of chuck tables for holding the workpieces are arranged, and a positioning means for rotating the turntable and positioning the chuck table at a processing position of the processing means, the processing device including a guide portion arranged on an upper surface of a base of the processing device and guiding the rotation of the turntable, the turntable including a plate-shaped support table for supporting the chuck table, and a connector for connecting the support tables to adjacent support tables; The guide portion includes: The positioning means is an annular guide rail, and includes a driven pulley arranged on the turntable, a motor as a rotary drive source, a driving pulley arranged on the rotary shaft of the motor, and a winding loop wound around the driving pulley and the driven pulley. Be and an endless belt connected to the coupling device, the driven pulley including a first pulley arranged on the coupling device and a second pulley arranged on the support table. Another processing device of the present invention is a processing device comprising: a processing means for processing a workpiece; a turntable on which a plurality of chuck tables for holding the workpieces are arranged; and a positioning means for rotating the turntable and positioning the chuck table at a processing position of the processing means, the processing device further comprising a guide portion arranged on an upper surface of a base of the processing device and guiding the rotation of the turntable, the turntable further comprising a plate-shaped support table for supporting the chuck table, and a connector for connecting the support tables to adjacent support tables;The guide portion is an annular guide rail, and the positioning means includes a driven gear arranged on the turntable, a driving gear that meshes with the driven gear, and a motor that rotates the driving gear, and the driven gear consists of a first gear arranged on the coupling device and a second gear arranged on the support table. Still another processing apparatus of the present invention is a processing apparatus including a processing means for processing a workpiece, a turntable on which a plurality of chuck tables for holding the workpieces are arranged, and a positioning means for rotating the turntable and positioning the chuck table at a processing position of the processing means, the processing apparatus including a guide portion for guiding the rotation of the turntable, the turntable including a plate-shaped support table for supporting the chuck table, and a connector for connecting the support tables to adjacent support tables, The turntable has a through hole in the center, and the guide portion has Processing equipment It comprises a shaft that is arranged on a base and can enter the through hole, a bearing that is arranged between the outer wall surface of the shaft and the inner wall surface of the through hole and rotatably supports the turntable, and a support part that supports the underside of the turntable. Effect of the Invention

[0007] In the processing apparatus of the present invention, turntables of various configurations can be assembled by combining support tables and connectors by changing the number of support tables and the shape of the connectors according to the number of chuck tables to be used. Therefore, even in a configuration in which the number of chuck tables is large, the support tables can be connected using connectors, the rotation of the turntable can be guided by the guide portion, and it can be positioned at the processing position of the processing means, making it possible to manufacture the turntable inexpensively. In addition, since it is possible to reduce the weight of the outer periphery connectors, the weight of the turntable can be reduced. Furthermore, since the base of the processing device is equipped with a guide portion, there is no need for a rotation support mechanism for the turntable using air, and the processing device can be easily configured. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing the entire processing device. [Diagram 2] FIG. 2 is an exploded perspective view illustrating a first example of a turntable. [Diagram 3] FIG. 1 is a perspective view illustrating a first example of a turntable. [Figure 4] FIG. [Diagram 5] FIG. 11 is a perspective view illustrating a second example of the turntable. [Figure 6] FIG. 11 is an exploded perspective view illustrating a third example of the turntable. [Figure 7] FIG. 11 is a perspective view illustrating a third example of the turntable. [Figure 8] FIG. [Figure 9] FIG. 13 is an exploded perspective view illustrating a fourth example of the turntable. [Figure 10] FIG. 13 is a perspective view illustrating a fourth example of the turntable. [Figure 11] FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] 1. Processing equipment configuration The processing device 1 shown in Fig. 1 processes a workpiece 17 using processing means 3. As shown in Fig. 1, for example, a protective tape 172 is attached to the lower surface of the workpiece 17. The protective tape 172 does not have to be attached. The configuration of the processing device 1 will be described below.

[0010] The processing device 1 includes a base 10 extending in the Y-axis direction and a column 11 standing on the +Y direction side of the base 10. A first cassette 121 is placed on the −Y direction side and +X direction side of the base 10, and a second cassette 122 is placed on the −X direction side of the first cassette 121. The first cassette 121 has a plurality of shelves (not shown) for storing the workpieces 17, and for example, a plurality of workpieces 17 before processing are stored in the first cassette 121. The second cassette 122 has a plurality of shelves (not shown) for storing the workpieces 17 like the first cassette 121, and for example, the second cassette 122 stores the workpieces 17 after processing.

[0011] A robot 129 is disposed on the +Y direction side of the first cassette 121. A temporary placement area 124 in which workpieces 17 before processing are temporarily placed is provided on the +X direction side of the movable range of the robot 129, and a cleaning area 128 in which workpieces 17 after processing are cleaned is provided on the -X direction side of the movable range of the robot 129. Using the robot 129, the workpiece 17 stored in the first cassette 121 can be extracted and transported to the temporary placement area . In addition, the robot 129 can also store the workpiece 17 held on the spinner table 127 in the second cassette 122 after processing.

[0012] An alignment means 123 is disposed in the temporary placement area 124. The workpiece 17 carried out from the first cassette 121 and placed in the temporary placement area 124 is aligned to a predetermined position by the alignment means 123.

[0013] A spinner cleaning means 126 is disposed in the cleaning area 128. The spinner cleaning means 126 includes a spinner table 127 on which the workpiece 17 is held, a cleaning water supply nozzle (not shown) that sprays cleaning water toward the workpiece 17 held on the spinner table 127, and the like. For example, with the processed workpiece 17 held on the upper surface of the spinner table 127, the workpiece 17 can be cleaned by supplying cleaning water from the cleaning water supply nozzle while rotating the spinner table 127.

[0014] A turntable 5 is disposed on the +Y direction side of the temporary placement area 124 and the cleaning area 128. The turntable 5 supports a plurality of chuck tables 2 rotatably, and can revolve the chuck tables 2 by rotating itself. The chuck table 2 includes a suction unit 20 and a frame 21 that supports the suction unit 20. The upper surface of the suction unit 20 is a holding surface 200 that holds the workpiece 17. A suction source (not shown) is connected to the holding surface 200, and a suction force generated by operating the suction source is transmitted to the holding surface 200. For example, by operating the suction source while the workpiece 17 is placed on the holding surface 200, the workpiece 17 can be suction-held on the holding surface 200.

[0015] A carry-in / out means 125 is provided at a position adjacent to the temporary placement area 124. The carry-in / out means 125 has a function of carrying the workpiece 17 aligned in the temporary placement area 124 by the alignment means 123 into one of the two chuck tables 2, and carrying the workpiece 17 out of the chuck table 2 after machining.

[0016] A processing feed means 4 that supports the processing means 3 so that it can be raised and lowered is disposed on a side surface on the -Y direction side of the column 11. The processing feed means 4 includes a ball screw 40 having a rotation shaft 45 in the Z-axis direction, a fastener 49 that connects the column 11 and the ball screw 40, a pair of guide rails 41 disposed parallel to the ball screw 40, a Z-axis motor 42 that rotates the ball screw 40 about the rotation shaft 45, a lift plate 43 whose internal nut is screwed into the ball screw 40 and whose side portion is in sliding contact with the guide rail 41, and a holder 44 that is connected to the lift plate 43 and supports the processing means 3.

[0017] When the ball screw 40 is driven by the Z-axis motor 42 and rotates around the rotation shaft 45, the lifting plate 43 moves up and down in the Z-axis direction while being guided by the guide rail 41, and the processing means 3 moves up and down in the Z-axis direction.

[0018] The processing means 3 is a grinding means including a spindle 30 having a rotation axis 35 in the Z-axis direction, a spindle motor 32 that rotates the spindle 30 around the rotation axis 35, a mount 33 connected to the lower end of the spindle 30, and a grinding wheel 34 that is detachably attached to the lower surface of the mount 33. The grinding wheel 34 includes a wheel base 341 and a plurality of grinding stones 340 having a substantially rectangular parallelepiped shape and arranged in a ring shape on the lower surface of the wheel base 341. A lower surface 342 of the grinding stone 340 is a grinding surface that comes into contact with the upper surface 170 of the workpiece 17.

[0019] By using the spindle motor 32 to rotate the spindle 30 around the rotating shaft 35, the mount 33 connected to the spindle 30 and the grinding wheel 34 attached to the underside of the mount 33 rotate together.

[0020] As shown in FIG. 2, the turntable 5 includes three support tables 50 each formed into, for example, a roughly fan-shaped plate, three outer peripheral connectors 52 connecting two adjacent support tables 50 together, and a central connector 54.

[0021] Each outer periphery connector 52 has a generally arc shape, and has a shape in which thick portions 522 protruding toward the center of the arc are formed on both ends of a thin portion 521. A pair of outer periphery through holes 524 penetrating in the up-down direction are formed in the thick portion 522.

[0022] The central connector 54 has, for example, an annular shape, and a through hole 548 is formed in the center thereof, penetrating therethrough in the thickness direction. Two central screw holes 542 are formed in pairs at three locations on the upper surface 540 of the central connector 54, spaced equally apart (120 degrees in the illustrated example) on the same circumference. The central screw holes 542 have female threads. A central sliding groove 546 is formed on the lower surface of the central connector 54 so as to be recessed upward from the lower surface in the shape of a circular ring.

[0023] A disk-shaped chuck table 2 is disposed on an upper surface 500 of each support table 50. Note that in Fig. 2, the frame 21 shown in Fig. 1 is omitted.

[0024] The support table 50 has an inner peripheral surface in which a portion of the apex side of the fan shape is cut into an arc shape, and a convex portion 501 is formed on the apex side, with the upper portion protruding more toward the apex side than the lower portion, and a pair of central through holes 502 are formed in the convex portion 501, which penetrates in the thickness direction. The central through hole 502 of the support table 50 is formed to have approximately the same diameter as the central screw hole 542 of the central connector 54, for example.

[0025] Both circumferential ends of the substantially sector-shaped outer periphery of the support table 50 are partially recessed to form concave portions 503. A pair of outer periphery screw holes 504 are formed in each of the concave portions 503. The outer periphery screw holes 504 of the support table 50 are formed to have substantially the same diameter as the outer periphery through-hole 524 of the outer periphery connector 52, for example, and have a female thread.

[0026] The lower surface of the support table 50 is formed with an outer circumferential sliding groove 506 that is recessed in an annular shape from the lower surface toward the upper side.

[0027] FIG. 3 shows the support table 50, the peripheral connectors 52 and the central connector 54 assembled together into a single unit. In Fig. 3, in a state where the thick-walled portion 522 of the peripheral connector 52 is placed on the concave portion 503 of the support table 50 in a horizontal positional relationship in which the peripheral screw hole 504 of the support table 50 and the peripheral through hole 524 of the peripheral connector 52 shown in Fig. 2 match, the peripheral bolt 57 passes through the peripheral through hole 524 and is screwed into the peripheral screw hole 504, thereby connecting the support table 50 and the peripheral connector 52. In addition, in a state where the convex portion 501 of the support table 50 is placed on the central connector 54 in a horizontal positional relationship in which the central screw hole 542 of the central connector 54 and the central through hole 502 of the support table 50 match, the central bolt 58 passes through the central through hole 502 and is screwed into the central screw hole 542, thereby connecting the support table 50 and the central connector 54. In this way, the support table 50, the outer periphery connector 52, and the central connector 54 are integrated to form the turntable 5. In this state, a cavity 523 is formed between the thin-walled portion 521 of the outer periphery connector 52 and the outer surface of the central connector 54. When assembling the turntable 5, the thick-walled portion 522 of the outer periphery connector 52 is placed on the concave portion 503, and in this state, the support table 50 and the outer periphery connector 52 are connected by the outer periphery bolts 57, making assembly easy.

[0028] The turntable 5 is not limited to a configuration having three support tables 50 and three outer periphery connectors 52. For example, when configuring a processing apparatus 1 having two chuck tables 2, the two support tables 50 may be connected by two outer periphery connectors 52.

[0029] In the processing device 1, it is possible to configure a variety of turntables 5 by changing the number of support tables 50 according to the number of chuck tables 2 to be used when processing the workpiece 17, and by using outer periphery connectors 52 having a shape according to the number of connected support tables 50. In other words, turntables with different numbers of chuck tables 2 can be configured by simply replacing the outer periphery connectors 52 without modifying the support tables 50.

[0030] The processing device 1 is provided with a pulley mechanism 60 as a positioning means for rotating the turntable 5 to position the chuck table 2 at a processing position, which is a horizontal position below the processing means 3. The pulley mechanism 60 includes a driven pulley 61 disposed on the turntable 5. The driven pulley 61 includes a first pulley 611 which is a groove formed circumferentially on the outer surface of the outer periphery connector 52, and a second pulley 610 which is a groove formed circumferentially on the outer surface of the support table 50.

[0031] The pulley mechanism 60 also includes a motor 62 as a rotational drive source, a rotating shaft 620 connected to the motor 62, a driving pulley 63 arranged on the upper end of the rotating shaft 620, and an endless belt 64 arranged to be wound around the driving pulley 63 and the driven pulley 61.

[0032] When the rotating shaft 620 is rotated using the motor 62, the driving pulley 63 rotates, and the rotational force of the driving pulley 63 is transmitted to the driven pulley 61 by the endless belt 64, causing the driven pulley 61 to rotate, thereby rotating the turntable 5 and the chuck table 2 arranged on the turntable 5.

[0033] The processing device 1 includes a base 7. The base 7 includes a hollow cylindrical outer circumferential base 70 and a central base 72 disposed so as to be surrounded by the outer circumferential base 70.

[0034] An annular outer periphery guide rail 71 is formed on the upper surface of the outer periphery base 70. In addition, an annular central guide rail 73 is formed on the upper surface of the central base 72. The outer periphery guide rail 71 and the central guide rail 73 form a guide section that guides the rotation of the turntable 5.

[0035] In the processing device 1, the support table 50 is placed on the outer periphery base 70 so that the outer periphery slide groove 506 formed on the lower surface of the support table 50 shown in FIG. 2 engages with the outer periphery guide rail 71, and the central connector 54 is placed on the central base 72 so that the central slide groove 546 formed on the lower surface of the central connector 54 engages with the central guide rail 73. This results in a state in which the turntable 5 is supported on the base 7. In this state, by rotating the turntable 5 using the pulley mechanism 60, the turntable 5 rotates while being guided by the outer periphery guide rail 71 and the central guide rail 73. Alternatively, grooves may be formed in the block so that the grooves engage with the outer circumferential guide rail and the central guide rail. That is, a block may be disposed on the underside of the central connector, and a block may also be disposed on the underside of the support table.

[0036] 1 will be described below when processing a workpiece 17 using the processing apparatus 1. In the following, it is assumed that a turntable 5 has two support tables 50 as shown in FIG. First, one of the plurality of workpieces 17 stored in the first cassette 121 is drawn out by using the robot 129 and placed in the temporary placement area 124 , and alignment is performed by using the alignment means 123 .

[0037] In addition, the turntable 5 is rotated using the pulley mechanism 60 to position one of the two chuck tables 2 arranged on the turntable 5 at a position for carrying in the workpiece 17 . With one of the two chuck tables 2 positioned at the carry-in position, the workpiece 17 placed in the temporary placement area 124 is carried in by the carry-in / out means 125 onto the holding surface 200 of the chuck table 2 positioned at the carry-in position. Next, with the workpiece 17 placed on the holding surface 200, a suction source (not shown) is operated, whereby the generated suction force is transmitted to the holding surface 200, and the workpiece 17 is suction-held on the holding surface 200.

[0038] Next, the turntable 5 is rotated, for example, counterclockwise by an appropriate angle (for example, 180 degrees) to move the chuck table 2 with the workpiece 17 held on the holding surface 200 below the processing means 3. As a result, the chuck table 2 with the workpiece 17 held on the holding surface 200 is positioned at the processing position.

[0039] In addition, the workpiece 17 held on the holding surface 200 of the chuck table 2 is rotated using a rotating means (not shown) connected to the chuck table 2, and the grinding wheel 340 is rotated using the spindle motor 32.

[0040] While the workpiece 17 held on the holding surface 200 and the grinding wheel 340 are rotating, the grinding wheel 340 is lowered in the -Z direction using the processing feed means 4. As a result, the lower surface 342 of the grinding wheel 340 comes into contact with the upper surface 170 of the workpiece 17. With the lower surface 342 of the grinding wheel 340 in contact with the upper surface 170 of the workpiece 17, the grinding wheel 340 is further lowered in the -Z direction using the processing feed means 4, thereby grinding the workpiece 17. During the grinding of the workpiece 17, a thickness measuring means (not shown) is used to measure the thickness of the workpiece 17. When the workpiece 17 is ground to a predetermined thickness, the grinding of the workpiece 17 is terminated.

[0041] After grinding of the workpiece 17 is completed, the grinding wheel 340 is raised in the +Z direction using the processing feed means 4 to separate the grinding wheel 340 from the upper surface 170 of the workpiece 17 .

[0042] Then, the turntable 5 is rotated, for example, 180 degrees counterclockwise to position the chuck table 2 holding the ground workpiece 17 in the unloading area (the same as the loading area).

[0043] With the chuck table 2 holding the ground workpiece 17 positioned in the unloading area, the workpiece 17 is unloaded from the holding surface 200 onto the spinner table 127 using the loading / unloading means 125 .

[0044] Then, while the workpiece 17 is held on the spinner table 127, the spinner table 127 is rotated while cleaning water is sprayed from a cleaning water supply nozzle (not shown) to clean the upper surface 170 of the workpiece 17 with running water.

[0045] After the upper surface 170 of the workpiece 17 is washed with running water, the workpiece 17 is stored in the second cassette 122 by using the robot 129 .

[0046] In conventional processing devices, the turntable is supported in a non-contact manner using air, but when supported by air, it is not easy to adjust the turntable so that it is flat relative to a horizontal surface. In contrast, in the processing apparatus 1, the base 7 shown in FIG. 3 is equipped with an outer peripheral guide rail 71 and a central guide rail 73, and the turntable 5 can be supported by each guide rail. This makes it possible to preferably adjust the flatness of the turntable 5 when assembling the support table 50, the outer peripheral connector 52, and the central connector 54 to form the turntable 5. Furthermore, since the rotation of the turntable 5 can be guided by a guide portion and the chuck table 2 holding the workpiece 17 can be positioned at the processing position of the processing means 3, the turntable 5 can be manufactured inexpensively.

[0047] In addition, since the outer periphery connector 52 shown in FIG. 2 has an arc shape and a hollow portion 523 is formed between the thin-walled portion 521 of the outer periphery connector 52 and the outer surface of the central connector 54, the turntable 5 can be made lighter.

[0048] The processing device 1 may include a gear mechanism 65 as shown in FIG. 5, instead of the pulley mechanism 60 shown in FIG. 3, as the positioning means. The gear mechanism 65 has a driven gear 66 arranged on the turntable 5, and the driven gear 66 consists of a first gear 661 arranged on the outer surface of the outer periphery connector 52 and a second gear 660 arranged on the outer surface of the support table 50. The gear mechanism 65 also includes a driving gear 68 that meshes with the driven gear 66 , a rotating shaft 670 connected to the driving gear 68 , and a motor 67 connected to the rotating shaft 670 to rotate the driving gear 68 . In the gear mechanism 65, when a driving gear 68 is rotated by a motor 67, a driven gear 66 meshing with the driving gear 68 rotates, and thereby the turntable 5 rotates.

[0049] The gear mechanism 65 has the advantage of being easier to assemble than the pulley mechanism 60. On the other hand, if the pulley mechanism 60 is used, it is not necessary to correct the stop position due to backlash that occurs when the gear mechanism 65 is used, so that the time from the start of rotation to the stop can be shortened.

[0050] The above-mentioned guide portion may be provided with an annular bearing 84 having a through hole 841 at the center thereof penetrating from front to back as shown in FIG. 6, instead of the outer peripheral guide rail 71 formed on the upper surface of the outer peripheral base 70 and the central guide rail 73 formed on the upper surface of the central base 72 as shown in FIG. 4. The bearing 84 is disposed so as to fit along the inner wall surface of a through hole 548 formed in the center of the central connector 54, as shown in Fig. 7. In this configuration, the processing device 1 includes a second base 8 as shown in Fig. 8, instead of the base 7 shown in Fig. 4. Here, the second base 8 serves as a support portion that supports the lower surface of the turntable 5. The second base 8 has a hollow cylindrical outer base 80 and a central base 82 surrounded by the outer base 80, and a cylindrical shaft 88, for example, is erected on the central base 82. The shaft 88 has an outer diameter that can be fitted into a through hole 841 of a bearing 84 shown in FIG.

[0051] 7, the bearing 84 is disposed between an outer wall surface 884 of the shaft 88 and an inner wall surface of the through hole 548 of the central connector 54. This allows the turntable 5 to be rotatably supported by the bearing 84 on the second base 8.

[0052] Moreover, the turntable 5 in this configuration may be provided with a cylindrical connector 86 as shown in Fig. 9, instead of the central connector 54 shown in Fig. 2. The cylindrical connector 86 has a hollow cylindrical shape, and two central screw holes 862 are paired and formed in three locations on the same circumference at equal intervals (120 degrees in the illustrated example) on an upper surface 860. Moreover, the central screw holes 862 have female threads.

[0053] Figure 10 shows how the support table 50 and the cylindrical connector 86 are connected by having the central bolt 58 pass through the central through hole 502 and screw into the central screw hole 862 while each of the central screw holes 862 shown in Figure 9 is aligned with the central through hole 502 of the support table 50.

[0054] 11, a circumferential groove is formed at the lower end of the outer surface of the cylindrical connector 86, and the lower part of the outer surface of the cylindrical connector 86 forms a driven pulley 864. A driving pulley 93, a rotating shaft 920 connected to the upper part of the driving pulley 93, and a motor 92 as a rotation drive source connected to the rotating shaft 920 are disposed outside the second base 8. Furthermore, an endless belt 94 that winds around the driving pulley 93 and the driven pulley 864 is disposed so as to straddle the inside and outside of the outer circumferential base 80 through a communication window 809 formed in the outer circumferential base 80 of the second base 8, and connects the driving pulley 93 and the driven pulley 864.

[0055] Furthermore, a through hole 868 is formed in the center of the cylindrical connector 86 as shown in Fig. 9. A bearing 84 is arranged on the inner wall surface of the through hole 868 as shown in Fig. 10, and a cylindrical shaft 88, for example, passes through a through hole 841 of the bearing 84 as shown in Fig. 11. That is, the bearing 84 is arranged between an outer wall surface 884 of the shaft 88 and the inner wall surface of the through hole 868. By connecting the support table 50, the outer periphery connector 52 and the cylindrical connector 86 while the shaft 88, the bearing 84 and the cylindrical connector 86 are integrated, the turntable 5 can be rotatably supported by the bearing 84 on the second base 8.

[0056] 2 is formed in a straight line rather than an arc, and the support table 50 may be rectangular. In this configuration, for example, only the outer surface of the outer periphery connector 52 comes into contact with the endless belt 64 and functions as a driven pulley, receiving the rotational force of the driving pulley 63.

[0057] Furthermore, it is not essential that a hollow portion 523 is formed between the outer periphery connector 52 and the central connector 54. For example, the outer periphery connector 52 may have a bottom plate or a top plate, and the space between adjacent outer periphery connectors 52 may be sealed. [Explanation of symbols]

[0058] 1: Processing equipment 10: Base 11: Column 17: Workpiece 170: Top surface 172: Protective tape 2: chuck table 20: suction part 200: holding surface 21: frame 3: Processing means 30: Spindle 32: Spindle motor 33: Mount 34: Grinding wheel 35: Rotating shaft 340: Grinding wheel 341: Wheel base 342: Underside 35: Rotation axis 4: Processing feed means 40: Ball screw 41: Guide rail 42: Z-axis motor 43: Lifting plate 44: Holder 45: Rotating shaft 49: Fastener 5: Turntable 50: Support table 52: Periphery connector 54: Central connector 57: Outer bolts 58: Center bolts 500: Top surface 501: Convex portion 502: Central through hole 503: Concave portion 504: Outer peripheral screw hole 506: Outer peripheral sliding groove 521: Thin wall portion 522: Thick wall portion 523: Hollow portion 524: Peripheral through hole 540: Top surface 542: Central screw hole 546: Central sliding groove 548: Through hole 60: Pulley mechanism 61: Driven pulley 62: Motor 63: Drive pulley 64: endless belt 65: gear mechanism 66: driven gear 67: motor 68: driving gear 610: First pulley 611: Second pulley 620: Rotating shaft 660: Second gear 661: 1st gear 670: Rotating shaft 7: Base 70: Periphery base 71: Periphery guide rail 72: Central base 73: Central guide rail 74: Loading / unloading means 8: Second base 80: Peripheral base 82: Central base 84: Bearing 841: Through hole 86: Cylindrical connector 88: Shaft 809: Connection window 860: Top surface 862: Central screw hole 864: Driven pulley 868: Through hole 884: Outer wall surface 92: Motor 93: Drive pulley 94: Endless belt 920: Rotating shaft 121: First cassette 122: Second cassette 123: Alignment means 124: temporary placement area 126: spinner cleaning means 127: spinner table 128: Cleaning area 129: Robot

Claims

1. A processing device comprising: a processing means for processing a workpiece; a turntable on which a plurality of chuck tables for holding the workpieces are arranged; and a positioning means for rotating the turntable and positioning the chuck tables at a processing position of the processing means, A guide portion is provided on an upper surface of a base of the processing device to guide the rotation of the turntable, the turntable includes a plate-shaped support table that supports the chuck table, and a connector that connects the support tables to each other adjacent to each other; The guide portion is an annular guide rail, the positioning means comprises a driven pulley disposed on the turntable, a motor as a rotary drive source, a driving pulley disposed on a rotary shaft of the motor, and an endless belt wound around the driving pulley and the driven pulley; The driven pulley comprises a first pulley disposed on the coupling device and a second pulley disposed on the support table. Processing equipment.

2. A processing device comprising: a processing means for processing a workpiece; a turntable on which a plurality of chuck tables for holding the workpieces are arranged; and a positioning means for rotating the turntable and positioning the chuck tables at a processing position of the processing means, A guide portion is provided on an upper surface of a base of the processing device to guide the rotation of the turntable, the turntable includes a plate-shaped support table that supports the chuck table, and a connector that connects the support tables to each other adjacent to each other; The guide portion is an annular guide rail, the positioning means includes a driven gear disposed on the turntable, a driving gear meshing with the driven gear, and a motor for rotating the driving gear; The driven gear includes a first gear disposed on the coupling device and a second gear disposed on the support table. Processing equipment.

3. A processing device comprising: a processing means for processing a workpiece; a turntable on which a plurality of chuck tables for holding the workpieces are arranged; and a positioning means for rotating the turntable and positioning the chuck tables at a processing position of the processing means, A guide portion for guiding the rotation of the turntable is provided, the turntable includes a plate-shaped support table that supports the chuck table, and a connector that connects the support tables to each other adjacent to each other; The turntable has a through hole in the center, The guide portion includes a shaft that is disposed on a base of the processing device and can enter the through hole, a bearing that is disposed between an outer wall surface of the shaft and an inner wall surface of the through hole and rotatably supports the turntable, and a support portion that supports the lower surface of the turntable. Processing equipment.

Images