Solid material container, solid material supply device, and solid material supply method

Abstract

To provide a solid material vessel capable of grasping the residue of a solid material in the vessel in the normal condition.SOLUTION: A solid material vessel 11 includes: a bottomed cylindrical vessel body 11A including a trunk 14 having a central axis C extending in the vertical direction; a lid 11B closing the upper surface of the vessel body 11A served as an opening; and a plurality of thermo couples 15. The thermo couple 15 is horizontally inserted toward the inside from the outside in the circumferential direction of the trunk 14; the tip 15a of the thermo couple 15 is positioned at the center of the trunk 14; and the plurality of thermo couples 15 are arranged at intervals in the vertical direction of the trunk 14 at two or more different heights, respectively.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a solid material container, a solid material supplying device, and a solid material supplying method. [Background technology]

[0002] In recent years, in order to solve problems caused by miniaturization and high integration of semiconductor devices, new film formation techniques using precursors that have not been used in the past are required. Conventionally, gaseous materials and liquid materials that are relatively easy to handle have been widely used as precursor materials. On the other hand, some of the inorganic metal compounds and organometallic compounds such as aluminum, hafnium, indium, molybdenum, tantalum, titanium, tungsten, yttrium, and zirconium used in cutting-edge devices are solid at standard temperature and standard pressure. Precursor materials that are solid at standard temperature and standard pressure (hereinafter referred to as "solid materials") cannot be directly transported to a chamber for a film formation process. These solid materials generally have high melting points and low vapor pressures, so the solid materials need to be sublimated prior to being introduced into the film formation chamber.

[0003] Incidentally, the solid material is contained in an airtight container (solid material container), and the solid material supplying device sublimates the solid material in the solid material container and supplies it to a chamber for a film formation process. Therefore, the solid material supplying device needs to know the amount of material used and the timing of container replacement. Therefore, it is necessary to know the remaining amount of solid material in the solid material container with some degree of accuracy.

[0004] As a method for determining the remaining amount of solid material in a solid material container, a weight measurement method and a method for directly measuring the temperature of the solid material are known. However, the weight measurement method does not allow the remaining height of the solid material in the solid material container to be determined.

[0005] As a method for directly measuring the temperature of a solid material, Patent Document 1 discloses a technique for directly measuring the temperature of a solid material in a solid material container. Specifically, Fig. 11 of Patent Document 1 discloses a configuration of a solid material container in which a thermocouple extending vertically up and down is inserted into the top plate of the solid material container, and multiple sensors are provided at required intervals up and down in the vertical direction on the thermocouple inside the solid material container. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2012-052669 A Summary of the Invention [Problem to be solved by the invention]

[0007] However, in the technology disclosed in Patent Document 1, the thermocouple itself generates heat, causing the solid material near the thermocouple to sublime first, and there is no material near the thermocouple. As a result, the temperature of the gas phase is measured instead of the solid material, which poses the problem of not being able to properly monitor the remaining amount.

[0008] The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a solid material container, a solid material supplying device, and a solid material supplying method that make it possible to grasp the remaining amount of solid material in the container under standard conditions. [Means for solving the problem]

[0009] In order to solve the above problems, the present invention has the following aspects. [1] A solid material container that is filled with a solid material at room temperature and pressure (25°C, 1 atm) and supplies a gas produced by volatilization or sublimation of the material according to the vapor pressure, A cylindrical container body with a bottom and a body portion whose central axis extends vertically; A lid that closes the upper surface of the container body, which is an opening; a plurality of thermocouples; the thermocouple is inserted horizontally from the outer side to the inner side in the circumferential direction of the body, and a tip of the thermocouple is located at the center of the body, A solid material container, wherein a plurality of the thermocouples are disposed at two or more different heights above and below the body in a vertical direction spaced apart relation to each other. [2] A solid material container as described in [1], wherein a plurality of the thermocouples are arranged on the same line extending vertically up and down the body portion. [3] Further comprising a heater for heating the container body, The solid material container according to [1] or [2], wherein the heater is capable of heating two or more regions divided vertically into upper and lower regions. [4] The solid material container according to [3], wherein the heater is located around the container body. [5] A solid material supplying device that supplies a gas produced by vaporization or sublimation of a solid material at room temperature and pressure (25°C, 1 atm) according to the vapor pressure, [1] to [4], and one or more solid material containers; and one or more connecting pipes in communication with the solid material container. [6] A method for supplying a solid material, comprising the steps of: using the solid material supplying device according to [5]; supplying a gas produced by volatilization or sublimation of a solid material at room temperature and pressure (25°C, 1 atm) in accordance with the vapor pressure of the solid material; a temperature of the material in the solid material container using a plurality of thermocouples arranged vertically above and below the solid material container to supply the gas, and a remaining amount of the material in the solid material container is detected. [7] The method for supplying a solid material according to [6], further comprising changing a heating area of ​​the solid material container in accordance with the detected remaining amount of the material in the solid material container. [8] The method for supplying a solid material described in [6] or [7], wherein the remaining amount of the material is determined to be low when the temperature difference between the temperature of the material closest to the bottom surface of the solid material container and the sublimation point of the material becomes 20°C or more. Effect of the Invention

[0010] The solid material container of the present invention makes it possible to grasp the remaining amount of solid material in the container under standard conditions. The solid material supplying device and the solid material supplying method of the present invention make it possible to grasp the remaining amount of solid material in a solid material container under standard conditions. [Brief description of the drawings]

[0011] [Figure 1] 1 is a system diagram showing a solid material supplying device according to an embodiment of the present invention; [Diagram 2] 1 is a cross-sectional view showing a schematic diagram of a solid material container according to an embodiment of the present invention. [Diagram 3] 1A, 1B, and 1C are diagrams showing a mantle heater provided in a solid material container of the present embodiment, in which (A) is a plan view, (B) is a front view, and (C) is a side view. [Figure 4] FIG. 2 is a cross-sectional view showing a schematic diagram of a solid material container used in an embodiment of the present invention. [Diagram 5] FIG. 1 shows the results of an example. [Figure 6] FIG. 13 is a diagram showing the results of a comparative example. [Figure 7] FIG. 13 is a diagram showing the results of a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the drawings used in the following description, the dimensions of the components may be shown at different scales to make each component easier to see, and the dimensional ratios of each component may not necessarily be the same as in reality. Furthermore, the materials, dimensions, etc. exemplified in the following description are merely examples, and the present invention is not necessarily limited to them, and may be appropriately modified and implemented within the scope of the present invention.

[0013] <Solid material supply device> First, a solid material supplying apparatus 50 shown in FIG. 1 will be described as one embodiment of the present invention. FIG. 1 is a system diagram that shows a schematic configuration of a solid material supplying apparatus 50 according to one embodiment of the present invention.

[0014] As shown in FIG. 1, a solid material supplying apparatus 50 of the present embodiment is an apparatus for supplying a gas (gas, hereinafter sometimes simply referred to as "solid material vapor") produced by volatilization or sublimation of a solid material (hereinafter sometimes simply referred to as "solid material vapor") S at room temperature and normal pressure (25°C, 1 atm) according to vapor pressure to a reactor.

[0015] The solid material supplying device 50 of this embodiment is generally configured to include collection vessels 1 and 2, a connecting pipe 100 which is connected to the collection vessels 1 and 2, respectively, and a first heater H100 which heats the connecting pipe 100.

[0016] The connecting pipe 100 is a pipe that connects each of the collection vessels 1, 2 with the reactor. The solid material supplying device 50 of the present embodiment will be described as having two collection containers 1 and 2 as an example, but is not limited thereto. The number of collection containers may be one or three or more. From the viewpoint of controllability and the influence of malfunctions, the number of collection containers is preferably three or less.

[0017] The collection container 1 has three solid material containers 11, 12, and 13 filled with solid material S, connecting pipes 11a, 12a, and 13a connected to each solid material container, and a collection pipe 10 connected to the solid material containers 11, 12, and 13 via each connecting pipe.

[0018] The collecting pipe 10 is provided with a heater H10 for heating the entire collecting pipe 10, and ports E and F for purging.

[0019] In the solid material supplying device 50 of this embodiment, an embodiment in which the collection container 1 has three solid material containers will be described as an example, but is not limited to this. The number of solid material containers may be one or three or more. From the viewpoint of controllability and the influence of malfunctions, the number of solid material containers is preferably nine or less.

[0020] The solid material S is not particularly limited as long as it is a material that is in a solid state at room temperature and normal pressure (25°C, 1 atm). The solid material S may be in a crystalline or powdered state, or may be supported on a support or the like. The solid material S may be in a solid state when filled, may be in a solid state during transportation, or may be in a liquid state when filled or heated.

[0021] The solid material S may include organic compounds, organometallic compounds, metal halides, metal oxyhalides, and compounds thereof, more specifically, inorganic metal compounds and organometallic compounds of germanium, gallium, aluminum, hafnium, indium, molybdenum, tantalum, titanium, tungsten, yttrium, zirconium, and the like. The solid material S may contain any one of these compounds or may contain two or more of them.

[0022] <Solid material container> Next, the configuration of a solid material container according to an embodiment of the present invention will be described using a solid material container 11 as an example. Fig. 2 is a schematic cross-sectional view for explaining the configuration of the solid material container 11 of this embodiment. As shown in FIG. 2, the solid material container 11 includes a cylindrical container body 11A with a bottom, a lid 11B, and a plurality of thermocouples 15, 15 . . . 15 for monitoring the internal temperature of the solid material container 11.

[0023] The solid material container 11 is not particularly limited as long as it is a container capable of being filled with the solid material S. Specifically, the solid material container 11 can be used repeatedly by supplying the solid material S filled inside in a gaseous state and then filling the inside with the solid material S again.

[0024] The container body 11A is not particularly limited, but is preferably a cylindrical container with a bottom from the viewpoint of filling the inside with the solid material S. Specifically, the container body 11A has a trunk portion 14 whose central axis C extends vertically up and down.

[0025] A plurality of thermocouples 15 are horizontally inserted from the outer side to the inner side in the circumferential direction of the body 14. Tips 15a of the thermocouples 15 serve as temperature measuring parts. Here, tip 15a of thermocouple 15 is located inside body 14, at the center of body 14. Here, in the present application, the center of body 14 means a region that includes central axis C of body 14 and includes a required range from central axis C. Since the temperature measurement part, which is tip 15a of thermocouple 15, is located at the center of body 14 (i.e., container body 11A), it is less susceptible to the effect of heat from the outer periphery of container body 11A, and the temperature of solid material S can be measured accurately.

[0026] The length of the thermocouple 15 inserted inside the trunk portion 14 of the container body 11A can be, for example, "r±10" mm, where the radius of the inner diameter of the container body 11A is "r" mm.

[0027] The thermocouples 15 inserted into the body portion 14 are arranged at two or more different heights at required intervals above and below the body portion 14 in the vertical direction. Here, it is preferable to insert two or more thermocouples 15 into the body 14, and it is more preferable to arrange three or more thermocouples in the vertical direction from the viewpoint of monitoring the remaining amount of solid material S in the container body 11A (i.e., the solid material container 11).

[0028] Furthermore, the intervals at which the multiple thermocouples are installed vertically above and below are not particularly limited. Furthermore, the intervals at which the multiple thermocouples are installed vertically above and below may be equal or may not be equal. Note that it is preferable to install the multiple thermocouples vertically above and below at equal intervals, since this allows for appropriate remaining amount monitoring (for example, 50% remaining, 30% remaining, etc.).

[0029] The height of the thermocouple 15 inserted inside the trunk 14 of the container body 11A is preferably set at a position about 10 mm away from the top and bottom surfaces, assuming that the axial height of the trunk 14 is "h" mm. This makes it difficult for the thermocouple 15 to be affected by heat from the outer periphery (top and bottom surfaces) of the container body 11A, and allows the temperature of the solid material S to be measured accurately.

[0030] The lid 11B closes the top surface, which is the opening of the container body 11A. The lid 11B is removable from the container body 11A. When the amount of solid material remaining in the solid material container 11 becomes low, the solid material can be replenished into the container body 11A through the opening on the top surface by removing the lid 11B from the container body 11A.

[0031] 1, a connecting pipe 11a is provided on the lid 11B of the solid material container 11. In addition, the connecting pipe 11a is provided with an on-off valve V11a that can be remotely controlled and can be adjusted to any opening degree from fully open (100% opening) to fully closed (0% opening). The connecting pipe 11a is provided with a heater H11a for heating the connecting pipe 11a and with ports A and B for purging.

[0032] The material of the solid material container 11 is not particularly limited, but is preferably a material with high thermal conductivity in order to improve the efficiency of heat transfer to the solid material S. Examples of such materials include stainless steel, aluminum, silicon carbide, aluminum nitride, aluminum oxide, and silicon nitride.

[0033] In addition to the heat transfer efficiency, the solid material container 11 may be required to have corrosion resistance and strength. When multiple properties are required for the solid material container 11, the solid material container 11 may be configured by laminating multiple materials.

[0034] There are no particular limitations on the material of the thermocouple 15 as long as it has corrosion resistance and strength. Examples of such materials include SUS316L, SUS316, and SUS304.

[0035] The solid material container 11 further includes a heater H11 for heating the solid material S filled inside the solid material container 11, and a weight measuring device W11 for monitoring the weight of the solid material container 11.

[0036] The heater H11 is not particularly limited as long as it can heat the solid material S in the solid material container 11, but it can be appropriately selected from types that heat the solid material container 11 from the outside (e.g., mantle heater, thermostatic bath, high-frequency heating device, etc.) and types that heat the solid material container 11 from the inside (e.g., rod heater, etc.). These may also be used in combination. Of these, types that heat the solid material container 11 from the outside are preferred, and mantle heaters that are positioned around the solid material container 11 and cover and heat the solid material container 11 are more preferred.

[0037] FIG. 3 shows the mantle heater H11 provided in the solid material container 11 of this embodiment, where (A) is a plan view, (B) is a front view, and (C) is a side view. As shown in FIGS. 3(B) and (C), the mantle heater H11 is disposed so as to cover the periphery of the solid material container 11, and has heaters H11A and H11B for heating the container body 11A, and a heater H11C for heating the lid 11B.

[0038] The heaters H11A and H11B are further divided into upper and lower regions in the vertical direction, so that the heaters H11A and H11B can independently heat two regions divided in the vertical direction of the container body 11A.

[0039] According to the solid material container 11 of this embodiment, the heating state of the heaters H11A and H11B (i.e., the region of the container body 11A to be heated) can be independently selected in conjunction with monitoring of the remaining amount of the solid material S by the thermocouple 15. For example, when the solid material container 11 is sufficiently filled with the solid material S, the heaters H11A and H11B heat two regions divided in the vertical direction of the container body 11A, respectively. Then, when the supply of the solid material S progresses and it is determined that the solid material S in the solid material container 11 is less than half full, the heater H11A stops and only the region divided in the vertical direction of the container body 11A can be heated by the heater H11B.

[0040] In this way, the heaters H11A and H11B, which are divided vertically into upper and lower areas, can independently heat the two vertically divided areas of the solid material container 11 (container body 11A), thereby preventing the upper part of the solid material container 11 from burning empty when the remaining amount of solid material S is small.

[0041] 3(A) and 3(C), when the mantle heater H11 covers the periphery of the container body 11A, it is preferable that the overlapping positions of both ends of the heaters H11A and H11B are aligned on the same line as a line 14a extending vertically up and down in the body 14 of the container body 11A. By arranging the insertion positions of the multiple thermocouples 15 in the body 14 on the same line as the above-mentioned line 14a, the multiple thermocouples 15 and the heaters H11A and H11B can be arranged without interfering with each other. The same applies to the solid material containers 12 and 13.

[0042] <Solid material supply method> Next, a method for supplying a solid material using the solid material supplying apparatus 50 of this embodiment will be described.

[0043] (Normal operation) First, the connecting pipe 100 of the solid material supplying device 50 is connected to a reactor which is a point of use. Next, in order to vaporize the solid material S, the heaters H11, H12, and H13 of the collection vessel 1 for supplying the solid material vapor are started to operate, and heating of the solid material vessels 11, 12, and 13 is started.

[0044] Next, after the temperature and pressure in the solid material containers 11, 12, and 13 of the selected collection container 1 reach the set values ​​and a predetermined stabilization time has elapsed, the on-off valves installed in each pipe can be opened by remote control, thereby supplying the solid material vapor to the use point.

[0045] Next, after the supply of the solid material S is completed, the solid material vapor remaining in the piping of all collection vessels 1 is discharged and purged. Finally, the on-off valves installed in each piping are closed by remote control to terminate the supply of the solid material.

[0046] In the solid material supplying method of the present embodiment, when controlling the above-mentioned normal operation, the remaining amount of solid material S in each of the solid material containers 11, 12, 13 is monitored.

[0047] (Monitoring remaining amount of solid material in container) In the solid material supply method of this embodiment, the temperature of the solid material S in each of the solid material containers 11, 12, and 13 is measured using a plurality of thermocouples 15 arranged vertically above and below, and the remaining amount of the solid material S in the container is detected. This makes it possible to prevent the solid material in the solid material container from overheating, and to replace the solid material supply container at an appropriate time.

[0048] In the following, the case of the solid material container 11 will be described as an example. Specifically, the temperature is measured for each of a plurality of thermocouples 15 provided at intervals above and below the body 14 of the solid material container 11 in the vertical direction. Then, for the temperature at each height in the solid material container 11, the temperature difference from the sublimation point of the solid material S is calculated, and it is determined that the solid material S remains at the height where the thermocouple 15 has a temperature difference of less than 20°C. In contrast, it is determined that no solid material S remains at the height where the thermocouple 15 has a temperature difference of 20°C or more. In this way, the remaining amount of solid material S in the solid material container 11 can be monitored. The solid materials 12 and 13 are also monitored in the same manner.

[0049] In the solid material supply method of this embodiment, when gas of the solid material S is supplied from the solid material container 11, the mantle heater H11 is started to operate. Here, the remaining amount of the solid material S in the solid material container 11 is monitored, and when the height of the solid material S in the container decreases and becomes below the area covered by the heater H11A, heating by the heater H11A can be stopped. In this way, by changing the heating area of ​​the solid material container 11 according to the detected remaining amount of the solid material S in the container, it is possible to prevent the solid material container 11 from burning empty and reduce energy consumption.

[0050] Furthermore, in the solid material supply method of this embodiment, when the temperature difference between the temperature of the solid material S measured by the thermocouple 15 arranged at the position closest to the bottom surface of the solid material container 11 and the sublimation point of the material becomes 20° C. or more, it is determined that the remaining amount of the solid material S in the container is low. This allows a solid material supply container in which the remaining amount of the solid material S in the container is low to be replaced at an appropriate time, thereby enabling a stable supply of the gas of the solid material S.

[0051] As described above, according to the solid material container 11 of this embodiment, the multiple thermocouples 15 inserted into the trunk 14 of the container body 11A are arranged at two or more different heights at required intervals above and below the vertical direction of the trunk 14. This allows the temperature to be measured at multiple positions above and below the vertical direction of the container body 11A, and the positions where the solid material S remains and the positions where the solid material S does not remain can be identified from the difference in temperature, making it possible to monitor the remaining amount of the solid material S in the solid material container 11.

[0052] Moreover, according to the solid material container 11 of this embodiment, the multiple thermocouples 15 are configured to be inserted horizontally from the body 14, which is the side surface of the container body 11A. As a result, even if the solid material S sublimes due to heating of the thermocouples 15 and a gap is formed around the thermocouples 15, the gap is filled by the weight of the solid material S, so that the temperature of the solid material S can be accurately measured as long as the solid material S is at the same height as the thermocouples 15. As a result, it becomes possible to monitor the remaining amount of solid material S in the solid material container 11.

[0053] The solid material supplying device 50 and the solid material supplying method of this embodiment are configured to include solid material containers 11, 12, and 13, and connecting pipes 11a, 12a, and 13a respectively communicating with the solid material containers 11, 12, and 13. This allows the remaining amount of solid material S in each of the solid material containers 11, 12, and 13 to be monitored, so that a solid material supplying container in which the remaining amount of solid material S has decreased can be replaced at an appropriate timing.

[0054] Furthermore, according to the solid material supplying device 50 and the solid material supplying method of the present embodiment, solid materials, such as inorganic metal compounds and organic metal compounds of germanium, gallium, aluminum, hafnium, indium, molybdenum, tantalum, titanium, tungsten, yttrium, zirconium, etc., can be stably supplied in a gaseous state to a reactor at standard temperature and standard pressure for a long period of time.

[0055] The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. EXAMPLES

[0056] The present invention will be described in more detail below using examples and comparative examples, but the present invention is not limited to these examples.

[0057] <Example> The amount of solid material remaining in the solid material container was monitored when a gas containing the solid material was supplied using the solid material supply device shown in FIG. The solid material container used had the structure shown in FIG.

[0058] (solid material container) - Container body diameter: 139.8mm Thermocouple insertion position: (from the peripheral wall) 69.9 mm Number of thermocouples: Seven thermocouples installed vertically at intervals of 50 mm (numbers 1 to 7 in Figure 4) Solid material: Molybdenum oxychloride (sublimation point: 130°C), filled to a height between the 3rd and 4th thermocouples from the top ·Heating temperature: 150℃ Gas supply time: Gas supply was started when the temperature inside the solid material container reached 130°C, and this time was designated as the gas supply start time 0 (sec).

[0059] Fig. 5 shows the results of the example. In Fig. 5, the X-axis indicates the time from the start of gas supply, and the Y-axis indicates the temperature of the thermocouples located at each height of the solid material container. The numerical values ​​of each series in Fig. 5 are the same as the symbols of the thermocouples in Fig. 4. As shown in Figure 5, the first to third thermocouples from the top in the container exceeded 150°C immediately after the gas supply started at 0 seconds, which was 20°C higher than the sublimation point of the solid material. Therefore, it was determined that there was no solid material in the container and that the gas phase was being measured.

[0060] In addition, for the fourth thermocouple from the top in the container, the temperature was less than 130°C from 0 seconds to 3000 seconds after the gas supply started, and did not exceed 20°C from the sublimation point of the solid material, so it was determined that the solid material in the container was being measured. After that, as the supply of material gas continued, the temperature of the thermocouple rose beyond 40,000 to 50,000 seconds from the start of gas supply, and exceeded 20°C from the sublimation point of the solid material. Therefore, it was determined that there was no solid material in the container at the height of the fourth thermocouple, and that the gas phase was being measured.

[0061] In addition, for the fifth and sixth thermocouples from the top in the container, the temperature was less than 130°C from 0 seconds after the gas supply started, and did not exceed 20°C from the sublimation point of the solid material, so it was determined that they were measuring the solid material in the container.

[0062] It has been confirmed that, according to the embodiment of the present invention, it is possible to monitor the remaining amount of solid material in the solid material container.

[0063] <Comparative Example> Using the solid material supplying device and solid material container of the embodiment, one thermocouple was inserted vertically from the top surface of the solid material container, and the tip of the thermocouple was positioned near the bottom of the solid material container.

[0064] Fig. 6 is a diagram showing the results of a comparative example, in which the X-axis indicates the time from the start of gas supply, and the Y-axis indicates the temperature of the thermocouple. As shown in FIG. 6, the temperature of the thermocouple was constant from 0 sec to 700 sec after the gas supply started, and it was determined that the temperature of the solid material was being measured. After 700 seconds had passed since the start of gas supply, the temperature of the thermocouple rose, and it was determined that there was no solid material around the thermocouple and that the gas phase was being measured.

[0065] 7 shows the results of a comparative example, specifically, when the temperature of the thermocouple increases 700 seconds after the start of gas supply, the heating of the solid material container is stopped, and the solid material appears when the lid of the solid material container is removed after the temperature has decreased to room temperature (25° C.). As shown in Figure 7, when a thermocouple is inserted vertically from the top surface of a solid material container, sublimation of the solid material occurs near the thermocouple, creating a gap around the thermocouple, making it impossible to monitor the remaining amount of solid material in the container. [Explanation of symbols]

[0066] 1,2...collection container 10 Collective piping 11,12,13...Solid material supply container 11a, 12a, 13a...Connecting piping 11A... Container body 11B...Lid 14...Torso 14a Straight line 15 Thermocouple 15a...Tip (temperature measurement part) 100···Crossover piping 50...Solid material feeding device C...Central axis H10 Heater H11, H12, H13... Mantle heater H11a, H12a, H13a...Heater H100 Heater S...Solid material V11a, V12a, V13a...Shut-off valve W11,W12,W13...Weight measuring device

Claims

1. A solid material container that is filled with a solid material at room temperature and normal pressure (25° C., 1 atm) and supplies a gas generated by volatilization or sublimation of the material according to the vapor pressure, A cylindrical container body with a bottom and a body portion whose central axis extends vertically; A lid that closes the upper surface of the container body, which is an opening; a plurality of thermocouples; the thermocouple is inserted horizontally from the outer side to the inner side in the circumferential direction of the body, and a tip of the thermocouple is located at the center of the body, A solid material container, wherein a plurality of the thermocouples are disposed at two or more different heights above and below the body in a vertical direction spaced apart relation to each other.

2. The solid material container according to claim 1 , wherein a plurality of said thermocouples are arranged on the same line extending vertically above and below said body portion.

3. Further comprising a heater for heating the container body, The solid material container according to claim 1 , wherein the heater is capable of heating two or more regions divided vertically into upper and lower regions.

4. The solid material container of claim 3 , wherein the heater is located around the container body.

5. A solid material supplying device that supplies a gas produced by volatilization or sublimation of a solid material according to vapor pressure at room temperature and normal pressure (25°C, 1 atm), One or more solid material containers according to any one of claims 1 to 4; and one or more connecting pipes in communication with the solid material container.

6. A method for supplying a solid material, comprising the steps of: using the solid material supplying apparatus according to claim 5; supplying a gas obtained by volatilizing or sublimating a solid material at room temperature and normal pressure (25° C., 1 atm) in accordance with a vapor pressure of the solid material; a temperature of the material in the solid material container, which supplies the volatilized or sublimated gas, is measured using a plurality of thermocouples arranged vertically above and below the solid material container, and a remaining amount of the material in the solid material container is detected.

7. The method for supplying a solid material according to claim 6, further comprising changing a heating area of ​​the solid material container in response to the detected remaining amount of the material in the solid material container.

8. 7. The method for supplying a solid material according to claim 6, wherein the remaining amount of the material is determined to be small when a temperature difference between the temperature of the material closest to a bottom surface of the solid material container and the sublimation point of the material becomes 20° C. or more.

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