Assist device

Abstract

To provide an auxiliary device that can automatically carry a dressing board into a cutting device.SOLUTION: An auxiliary device 2 that is connected to a cutting device comprises: a dressing board housing part 144 that houses a dressing board 142 for dressing a cutting blade; and holding means 146 that holds the dressing board 142 housed in the dressing board housing part 144, and carries the dressing board 142 held by the holding means 146 into a sub table arranged adjacent to a chuck table.SELECTED DRAWING: Figure 21

Description

[Technical field]

[0001] The present invention relates to an auxiliary device that is connected to a cutting device. [Background technology]

[0002] A wafer having a plurality of devices such as ICs and LSIs formed on its surface along division lines is then divided into individual device chips by a cutting machine, and each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The cutting apparatus includes a chuck table with a holding surface for holding a wafer, cutting means equipped with a cutting blade for cutting the wafer held on the chuck table, X-axis feed means for processing and feeding the chuck table in the X-axis direction, Y-axis feed means for indexing and feeding the cutting means in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feed means for incising and feeding the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, and the holding surface is defined in the X-axis and Y-axis directions, thereby enabling the wafer to be divided into individual device chips with high precision.

[0004] When the workpiece is repeatedly cut, the cutting blade becomes dull and its cutting performance deteriorates, so it is necessary to dress (sharpen) the cutting blade from time to time to correct its cutting edge.Dressing is performed by placing a dressing board, which is made by forming abrasive grains into a plate shape using a bonding material, on the chuck table and then cutting the dressing board with the cutting blade (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2007-203429 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, when dressing the cutting edge of the cutting blade, the operator must prepare a dressing board, which is troublesome and unbearable.

[0007] In view of the above, the object of the present invention is to provide an auxiliary device that can automatically transport a dressing board into a cutting device. [Means for solving the problem]

[0008] According to the present invention, there is provided an auxiliary device for solving the above-mentioned problems, which comprises: a chuck table having a holding surface for holding a workpiece; a sub-table disposed adjacent to the chuck table; a cutting means having a cutting blade attached thereto for cutting a workpiece held on the chuck table, an X-axis feed means for feeding the chuck table in an X-axis direction for processing, a Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, and the holding surface is defined in the X-axis direction and the Y-axis direction. The auxiliary device can be connected to the cutting means after the cutting means is delivered to a user, the auxiliary device comprising: a dressing board accommodating section for accommodating a dressing board for dressing the cutting blade; and a holding means for holding the dressing board accommodated in the dressing board accommodating section. an X-axis moving means for moving the holding means in the X-axis direction to align the X-axis position of the dressing board held by the holding means with the X-axis position of the sub-table, a Y-axis positioning means for moving the holding means in the Y-axis direction to align the Y-axis position of the dressing board held by the holding means with the Y-axis position of the sub-table, and a Z-axis moving means for moving the holding means in the Z-axis direction to align the Z-axis position of the dressing board held by the holding means with the Z-axis position of the sub-table. Equipped with The An auxiliary device is provided for transporting the dressing board held by the holding means onto the dressing table.

[0009] Preferably, the holding means is disposed on a first moving body disposed inside a frame, the first moving body is slidably supported in a state suspended from a first guide rail disposed on the lower part of a second moving body and extending in the X-axis direction, the second moving body is slidably supported in a state suspended from a second guide rail disposed on the ceiling part of the frame and extending in the X-axis direction, and the holding means is configured to be freely advanced in the X-axis direction by the first moving body and the second moving body. The frame is preferably disposed on a lift table. Effect of the Invention

[0010] The auxiliary device of the present invention comprises: a chuck table having a holding surface for holding a workpiece; a sub-table disposed adjacent to the chuck table; a cutting means having a cutting blade attached thereto for cutting a workpiece held on the chuck table, an X-axis feed means for feeding the chuck table in an X-axis direction for processing, a Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction, and a Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, and the holding surface is defined in the X-axis direction and the Y-axis direction. The auxiliary device can be connected to the cutting means after the cutting means is delivered to a user, the auxiliary device comprising: a dressing board accommodating section for accommodating a dressing board for dressing the cutting blade; and a holding means for holding the dressing board accommodated in the dressing board accommodating section. an X-axis moving means for moving the holding means in the X-axis direction to align the X-axis position of the dressing board held by the holding means with the X-axis position of the sub-table, a Y-axis positioning means for moving the holding means in the Y-axis direction to align the Y-axis position of the dressing board held by the holding means with the Y-axis position of the sub-table, and a Z-axis moving means for moving the holding means in the Z-axis direction to align the Z-axis position of the dressing board held by the holding means with the Z-axis position of the sub-table. Equipped with The Since the dressing board held by the holding means is transported to the cutting table, the dressing board can be automatically transported to the cutting device. [Brief description of the drawings]

[0011] [Figure 1] 1 is a perspective view of an auxiliary device constructed in accordance with the present invention; [Diagram 2] FIG. 2 is an exploded perspective view of the cutting blade storage means shown in FIG. 1; [Diagram 3] FIG. 3 is a perspective view of the support shaft shown in FIG. 2 . [Figure 4] FIG. 3 is a cross-sectional view of the support shaft shown in FIG. 2 . [Diagram 5] FIG. 2 is a perspective view of the loading / unloading means shown in FIG. [Figure 6] 2 is an exploded perspective view of the frame, the lift-up table, and the base stand shown in FIG. 1. [Figure 7] FIG. 2 is an exploded perspective view of the frame shown in FIG. [Figure 8] FIG. 4 is an exploded perspective view of a frame in which a holding means is disposed. [Figure 9] 9 is a perspective view of the dressing board and end surface correction jig shown in FIG. 8 . [Figure 10]2 is a perspective view of a cutting device to which the auxiliary device shown in FIG. 1 is connected. [Figure 11] FIG. 11 is a perspective view of the chuck table shown in FIG. 10 . [Figure 12] FIG. 11 is a perspective view of the cutting means shown in FIG. [Figure 13] FIG. 13 is a perspective view of the cutting means in a state in which the blade cover shown in FIG. 12 is opened. [Figure 14] FIG. 11 is an exploded perspective view of the cutting means shown in FIG. [Figure 15] 11 is a perspective view showing a state in which the auxiliary device shown in FIG. 1 is connected to the cutting device shown in FIG. [Figure 16] 2 is a perspective view showing a state in which the cutting blade storage means and the carrying-in / out means of the auxiliary device shown in FIG. 1 face each other. FIG. [Figure 17] 17 is a perspective view showing a state in which the frame body has advanced from the state shown in FIG. 16 toward the cutting blade storage means. [Figure 18] 18 is a perspective view showing a state in which the frame body has retreated from the state shown in FIG. 17 and the lift-up table has risen. [Figure 19] 19 is a perspective view showing a state in which the first moving body has advanced toward the cutting device from the state shown in FIG. 18. [Figure 20] 20 is a perspective view showing a state in which the second moving body has advanced toward the cutting device from the state shown in FIG. 19. [Figure 21] An oblique view showing the state in which a dressing board is being transported by the transport means shown in Figure 8. [Figure 22] FIG. [Diagram 23] 9 is a perspective view showing a state in which an end face correcting jig is being carried in by the carry-in / out means shown in FIG. 8 . DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an auxiliary device constructed according to the present invention will be described with reference to the drawings.

[0013] Explaining with reference to Fig. 1, the auxiliary device generally indicated by the reference numeral 2 at least includes a cutting blade storage means 4 for storing a plurality of cutting blades, a carry-in / out means 6 for carrying cutting blades in and out of the cutting blade storage means 4, a Y-axis positioning means 8 for positioning the carry-in / out means 6 in an action position and a retreat position in the Y-axis direction with respect to the cutting blade storage means 4, a Z-axis moving means 10 for moving the carry-in / out means 6 in the Z-axis direction, and an X-axis moving means 12 for moving the carry-in / out means 6 in the X-axis direction to act on the cutting blade attached to the spindle of the cutting means of the cutting device. The X-axis direction is the direction indicated by the arrow X in Fig. 1, the Y-axis direction is the direction indicated by the arrow Y in Fig. 1 and perpendicular to the X-axis direction, and the Z-axis direction is the direction indicated by the arrow Z in Fig. 1 and perpendicular to the X-axis direction and the Y-axis direction. The plane defined by the X-axis direction and the Y-axis direction is substantially horizontal.

[0014] As shown in Figure 2, the cutting blade storage means 4 includes a drive gear 16 having a rotating shaft 14 extending in the Y-axis direction, a driven gear 20 having a rotating shaft 18 spaced from the drive gear 16 in the Z-axis direction and extending in the Y-axis direction, an endless track 22 wound around the drive gear 16 and the driven gear 20, and a support shaft 24 extending in the Y-axis direction, arranged at a predetermined interval on the endless track 22, inserted into the central opening of the cutting blade, and supporting the cutting blade.

[0015] 1 and 2, the cutting blade storage means 4 of the illustrated embodiment includes a base plate 26 (see FIG. 1), a support wall 28 extending upward from the upper surface of the base plate 26, and a motor 30 fixed to one surface of the support wall 28. As shown in FIG. 2, the motor 30 is connected to the rotating shaft 14 of the drive gear 16, and the motor 30 rotates the drive gear 16 about its axis in the Y-axis direction.

[0016] 2, the driven gear 20 is disposed above the drive gear 16, and the rotation shaft 18 of the driven gear 20 is supported by a support wall 28 so as to be rotatable about the Y-axis direction and movable up and down in the Z-axis direction. The support wall 28 is provided with a lifting means (not shown) for lifting the driven gear 20 up and down in the Z-axis direction. The lifting means may include a ball screw connected to the rotation shaft 18 of the driven gear 20 and extending in the Z-axis direction, and a motor for rotating the ball screw.

[0017] The endless track 22 is made up of a number of interconnected link pieces (reference numbers omitted), and is wound around the drive gear 16 and the driven gear 20. The endless track 22 rotates in response to the rotation of the drive gear 16 by the motor 30.

[0018] In the cutting blade storage means 4 of the illustrated embodiment, the distance between the drive gear 16 and the driven gear 20 in the Z-axis direction can be adjusted by changing the position of the driven gear 20 in the Z-axis direction with the lifting means. Also, in the cutting blade storage means 4, the length of the endless track 22 can be adjusted by appropriately increasing or decreasing the number of link pieces of the endless track 22.

[0019] As shown in Fig. 2, a plurality of support shafts 24 are disposed at predetermined intervals on the endless track 22. As can be understood by referring to Fig. 3 together with Fig. 2, the support shaft 24 has a cylindrical base 32 connected to the endless track 22 and a cylindrical shaft portion 34 extending in the Y-axis direction from an end face of the base 32. The diameter of the shaft portion 34 is smaller than the diameter of the base 32.

[0020] 3 also shows the cutting blade 36 supported by the support shaft 24. The cutting blade 36 has an annular base 38 and an annular cutting blade 40 fixed to the outer periphery of the base 38. The base 38 may be made of an appropriate metal material such as an aluminum alloy. A circular central opening 38a is provided in the center of the base 38. The cutting blade 40 is formed to a predetermined thickness (for example, about 10 to 30 μm) from abrasive grains such as diamond and a binder such as metal or resin, and protrudes radially outward from the outer periphery of the base 38.

[0021] In the support shaft 24, the shaft portion 34 is inserted into the central opening 38a of the cutting blade 36, and multiple (e.g., five) cutting blades 36 are supported by the shaft portion 34. In the illustrated embodiment, as can be understood by referring to Fig. 2, cutting blades 36 are supported by half of the multiple support shafts 24. Also, as shown in Fig. 3, multiple ball plungers 42 are attached at intervals in the circumferential direction to the tip side of the shaft portion 34 to prevent the cutting blade 36 supported by the shaft portion 34 from jumping out.

[0022] As shown in Fig. 4, a flow passage 32a is formed inside each base portion 32 of the support shaft 24, and a plurality of flow passages 22a communicating with one end of each flow passage 32a are formed in the endless track 22. The other end of each flow passage 32a opens at an end face of the base portion 32 radially outward from the shaft portion 34, as shown in Fig. 2. Also, as shown in Fig. 2, an air nozzle 44 protruding in the Y-axis direction below the drive gear 16 is provided on the support wall 28, and the air nozzle 44 is connected to a high-pressure air supply means (not shown). In the illustrated embodiment, the support shaft 24 located at the lowest end in the orbit of the support shaft 24 accompanying the rotation of the endless track 22 faces the tip of the air nozzle 44.

[0023] When the cutting blade 36 located at the tip side of the shaft 34 is carried out, high-pressure air is supplied from the air nozzle 44 to the flow passage 32a of the base 32 of the support shaft 24 located at the lowest end via the flow passage 22a of the endless track 22, so that the cutting blade 36 remaining on the shaft 34 can be pushed out to the tip side of the shaft 34. However, the action of the ball plunger 42 prevents the cutting blade 36 from falling from the shaft 34.

[0024] The loading / unloading means 6 will be described with reference to Fig. 5. The loading / unloading means 6 includes at least a Z rotation shaft 46 extending in the Z-axis direction, a blade holding section 48 that is radially connected to the Z rotation shaft 46 and sucks and holds the cutting blade 36, and a fixing nut holding section 50 that screws a fixing nut into and out of a male thread formed at the tip of the spindle of the cutting device.

[0025] 5, the loading / unloading means 6 of the illustrated embodiment further includes a casing 52, which has a regular hexagonal top plate 54 and six rectangular side walls 56 hanging down from the periphery of the top plate 54. The Z rotation shaft 46 protrudes from the upper surface of the top plate 54. A motor (not shown) connected to the Z rotation shaft 46 is housed inside the casing 52.

[0026] In the illustrated embodiment, of the six side walls 56 of the casing 52, the blade holding parts 48 are attached to four of the side walls 56, and the fixed nut holding parts 50 are attached to two of the side walls 56, with the two fixed nut holding parts 50 being provided on a pair of opposing side walls 56. In this manner, the carry-in / out means 6 is provided with two blade holding parts 48 for one fixed nut holding part 50.

[0027] The blade holding portion 48 is formed in a cylindrical shape, and an end face 58 of the blade holding portion 48 is provided with a circular central opening 60 capable of receiving the shaft portion 34 of the support shaft 24 and the tip of the spindle of the cutting device, and a plurality of suction holes 62 arranged at equal intervals in the circumferential direction around the central opening 60. Each suction hole 62 is connected to suction means (not shown).

[0028] In the blade holding portion 48, when the end face 58 of the blade holding portion 48 is positioned in contact with the base 38 of the cutting blade 36 stored in the cutting blade storage means 4, the suction means generates suction force in each suction hole 62, thereby suction-holding the cutting blade 36.

[0029] Continuing the explanation with reference to Figure 5, the fixed nut holding portion 50 includes a cylindrical housing 64 fixed to the side wall 56 of the casing 52, an annular rotating body 66 rotatably accommodated inside the housing 64, and a motor (not shown) that rotates the rotating body 66.

[0030] The rotor 66 has a central opening 68 capable of receiving the tip of a spindle of a cutting device. A plurality of suction holes 70 and a plurality of pins 72 are alternately provided at intervals in the circumferential direction on the end surface 66a of the rotor 66. Each suction hole 70 is connected to a suction means (not shown). The pin 72 is positioned at a position protruding from the end surface 66a of the rotor 66 (position shown in FIG. 5) by a spring (not shown) built into the rotor 66, and when the pin 72 is pushed toward the inside of the rotor 66, the spring contracts and the pin 72 is accommodated inside the rotor 66. The pin 72 is also arranged in a position corresponding to the position of the pin hole formed in the fixing nut.

[0031] In the fixed nut holding portion 50, a suction force is generated at each suction hole 70 by the suction means to hold the fixed nut by suction, and with a pin 72 inserted into a pin hole formed in the fixed nut, the rotating body 66 is rotated by the motor so that the fixed nut for fixing the cutting blade 36 to the spindle of the cutting device can be screwed and unscrewed from the male thread formed at the tip of the spindle.

[0032] Furthermore, when unscrewing (removing) the fixing nut from the spindle, even if the position of pin 72 of the fixing nut holding portion 50 is misaligned with the position of the pin hole in the fixing nut, if the end face 66a of the rotating body 66 is positioned against the end face of the fixing nut attached to the spindle, and pin 72 is accommodated inside the rotating body 66, and then the motor is rotated by the rotating body 66, when the position of pin 72 aligns with the position of the pin hole, the spring will push out pin 72, and pin 72 will be inserted into the pin hole.

[0033] The carry-in / out means 6 that can be configured as described above is disposed inside a frame 74 in the illustrated embodiment, as shown in Fig. 1. The frame 74 is supported by a lift table 76 so as to be movable in the Y-axis direction, and the lift table 76 is supported by a base stand 78 so as to be movable up and down in the Z-axis direction.

[0034] 1 and 6, the frame 74 includes a rectangular plate-shaped bottom 80, four support posts 82 extending upward from the four corners of the upper surface of the bottom 80, and a plate-shaped ceiling portion 84 (see FIG. 1) fixed to the upper ends of the support posts 82. A pair of guided members 86, each having a groove 86a extending in the Y-axis direction, are provided on the lower surface of the bottom 80 at a distance in the X-axis direction.

[0035] The lift table 76 includes a rectangular top plate 88 and four cylindrical legs 90 extending downward from the four corners of the bottom surface of the top plate 88. A pair of guide rails 92 extending in the Y-axis direction at an interval in the X-axis direction is provided on the upper surface of the top plate 88. The pair of guide rails 92 slidably engage with grooves 86a of a pair of guided members 86 of the frame body 74.

[0036] Furthermore, a Y-axis direction positioning means 8 is provided on the upper surface of the top plate 88 of the lift table 76. The Y-axis direction positioning means 8 has a ball screw 94 extending in the Y-axis direction between a pair of guide rails 92, and a motor 96 that rotates the ball screw 94. A nut portion (not shown) of the ball screw 94 is fixed to the lower surface of the bottom portion 80 of the frame 74.

[0037] In the Y-axis direction positioning means 8, the rotational motion of the motor 96 is converted into linear motion by the ball screw 94 and transmitted to the frame body 74, which moves in the Y-axis direction along a pair of guide rails 92. In this manner, the frame body 74 on which the carry-in / out means 6 is disposed is slidably supported by the guide rails 92 extending in the Y-axis direction disposed on the lift table 76, and is positioned by the Y-axis direction positioning means 8 at an operating position and a retracted position in the Y-axis direction with respect to the cutting blade storage means 4.

[0038] The operating position is a position where the blade holding part 48 of the loading / unloading means 6 approaches the cutting blade storage means 4 and where the cutting blade 36 supported by the cutting blade storage means 4 can be sucked and held by the blade holding part 48. The retracted position is a position where the blade holding part 48 of the loading / unloading means 6 is farther away from the cutting blade storage means 4 than the operating position.

[0039] 6, the base stand 78 includes a frame 98 and a rectangular base plate 100 fixed to the upper part of the frame 98. Four circular holes 102 into which the legs 90 of the lift table 76 are slidably inserted are formed at the four corners of the base plate 100. In addition, a female screw 104 is formed in the center of the base plate 100.

[0040] Continuing the explanation with reference to Fig. 6, Z-axis movement means 10 is connected to the lift table 76 and the base frame 78. The Z-axis movement means 10 includes a ball screw 106 extending in the Z-axis direction, a motor 108 that rotates the ball screw 106, and a connecting plate 110 fixed to the upper end of the motor 108. The ball screw 106 is screwed into the female thread 104 of the base plate 100. The connecting plate 110 is fixed to the lower surface of the top plate 88 of the lift table 76 by appropriate connecting means such as a bolt (not shown).

[0041] In the Z-axis moving means 10, the rotational motion of the motor 108 is converted into linear motion by a ball screw 106, and the lifting table 76 is raised and lowered relative to the base stand 78, thereby moving the frame 74 in which the loading / unloading means 6 is arranged in the Z-axis direction.

[0042] Explaining with reference to FIG. 7, the loading / unloading means 6 is disposed on a first movable body 112 disposed inside the frame body 74, the first movable body 112 is slidably supported in a state suspended from a first guide rail 116 disposed at the bottom of the second movable body 114 and extending in the X-axis direction, and the second movable body 114 is slidably supported in a state suspended from a second guide rail 118 disposed on the ceiling portion 84 of the frame body 74 and extending in the X-axis direction.

[0043] The first moving body 112 has a rectangular plate-shaped main body 120. A circular hole 122 is formed in the center of the main body 120. The Z rotation shaft 46 of the loading / unloading means 6 is inserted into the circular hole 122, and the Z rotation shaft 46 is fixed to the main body 120 so as not to rotate. When the motor of the loading / unloading means 6 connected to the Z rotation shaft 46 is driven, the casing 52 of the loading / unloading means 6 rotates relative to the first moving body 112, and the blade holding portion 48 and the fixed nut holding portion 50 are positioned in any orientation.

[0044] A pair of guided members 124 having grooves 124a extending in the X-axis direction are provided at intervals in the Y-axis direction on the upper surface of the main body 120 of the first movable body 112, and a block 126 having a through hole 126a extending in the X-axis direction is fixed thereto.

[0045] The second moving body 114 has a rectangular plate-shaped main body 128, and a pair of first guide rails 116 are provided at an interval in the Y-axis direction on the lower surface of the main body 128. The first guide rails 116 slidably engage with grooves 124a of a pair of guided members 124 of the first moving body 112, and the first moving body 112 is slidably supported in a state where it is suspended from the first guide rails 116 arranged on the second moving body 114.

[0046] A first X-axis moving means for moving the first moving body 112 in the X-axis direction relative to the second moving body 114 is provided below the main body 128 of the second moving body 114. The first X-axis moving means in the illustrated embodiment is composed of an air cylinder 130. A cylinder tube 130a of the air cylinder 130 is fixed to the lower surface of the main body 128 and extends in the X-axis direction between the pair of first guide rails 116. A tip of a piston rod 130b of the air cylinder 130 is engaged and connected to a through hole 126a of the block 126 of the first moving body 112.

[0047] Air cylinder 130 as a first X-axis moving means moves first moving body 112 in the X-axis direction relative to second moving body 114 along first guide rail 116 by advancing and retracting piston rod 130b.

[0048] A pair of guided members 132 having grooves 132a extending in the X-axis direction are provided at intervals in the Y-axis direction on the upper surface of the main body 128 of the second movable body 114, and a block 134 having a female screw 134a extending in the X-axis direction is fixed thereto.

[0049] The second guide rails 118 are provided as a pair at a distance in the Y-axis direction on the lower surface of the ceiling portion 84 of the frame body 74. The second guide rails 118 are slidably engaged with the grooves 132a of the pair of guided members 132 of the second moving body 114. A second guide rail 118 is provided on the ceiling portion 84 of the frame 74. The support is slidably supported in a suspended state.

[0050] A second X-axis moving means 136 for moving the second moving body 114 in the X-axis direction relative to the ceiling portion 84 is provided below the ceiling portion 84 of the frame body 74. The second X-axis moving means 136 in the illustrated embodiment has a ball screw 138 extending in the X-axis direction between the pair of second guide rails 118, and a motor 140 for rotating the ball screw 138. The ball screw 138 is screwed into the female screw 134a of the block 134 of the second moving body 114, and the motor 140 is fixed to the lower surface of the ceiling portion 84.

[0051] The second X-axis moving means 136 converts the rotational motion of the motor 140 into linear motion using a ball screw 138 and transmits it to the second moving body 114, moving the second moving body 114 in the X-axis direction along the second guide rail 118 relative to the ceiling portion 84.

[0052] The X-axis moving means 12 in the illustrated embodiment includes an air cylinder 130 as a first X-axis moving means, and a second X-axis moving means 136 having a ball screw 138 and a motor 140. In the illustrated embodiment, the air cylinder 130 as the first X-axis moving means moves the first moving body 112, thereby enabling the loading / unloading means 6 to be quickly advanced in the X-axis direction, and the second X-axis moving means 136 moves the second moving body 114, thereby enabling the X-axis position of the loading / unloading means 6 to be easily fine-tuned. In this way, the loading / unloading means 6 is configured to be freely advanced in the X-axis direction by the first moving body 112 and the second moving body 114.

[0053] The auxiliary device 2 is not limited to the above-mentioned configuration, and may further have a configuration as shown in Figures 8 and 9. In the configuration shown in Figures 8 and 9, a dressing board accommodating section 144 (see Figure 9) for accommodating a dressing board 142 for dressing the cutting blade 36 is provided on the bottom 80 of the frame body 74, and a holding means 146 (see Figure 8) for holding the dressing board 142 accommodated in the dressing board accommodating section 144 is provided on the first movable body 112.

[0054] The dressing board 142 may be a rectangular plate of green carbide or alundum-based abrasive grains formed using a binder such as a resin bond. Each side of the dressing board 142 is, for example, about 5 cm. As shown in FIG. 9, the dressing board storage section 144 in the illustrated embodiment is composed of three rectangular recesses provided on both sides in the Y-axis direction of the upper surface of a rectangular tray 148, and the tray 148 is disposed on the upper surface of the bottom 80 of the frame 74.

[0055] As shown in Fig. 8, the holding means 146 in the illustrated embodiment is provided in pair on both ends in the Y-axis direction of the first moving body 112. The holding means 146 includes a fixed piece 150 fixed to the Y-axis direction end of the main body 120 of the first moving body 112, a lifting piece 152 supported on the lower surface of the fixed piece 150 so as to be movable up and down in the Z-axis direction, a lifting means (not shown) for lifting and lowering the lifting piece 152, and a plurality of suction pads 154 arranged on the lower surface of the lifting piece 152. The lifting means may be constituted by an appropriate actuator such as an air cylinder. Each suction pad 154 is connected to a suction means.

[0056] In the holding means 146, the lifting piece 152 is lowered by the lifting means to bring each suction pad 154 into contact with the dressing board 142 accommodated in the dressing board accommodation section 144, and the suction means generates a suction force on each suction pad 154, so that the dressing board 142 is sucked and held by each suction pad 154.

[0057] Further, an end face correction jig accommodating section 158 (see FIG. 9) is provided on the bottom 80 of the frame 74. The end face correction jig 156 adjusts the outer circumferential end face of the mount flange that is formed on the tip of the spindle of the cutting means and supports the back of the cutting blade 36. The end face correction jig 156 has a rectangular base plate 160 and a grindstone 162 fixed to the upper surface of the base plate 160. The end face correction jig accommodating section 158 in the illustrated embodiment is composed of a pair of rectangular recesses provided on both ends in the Y-axis direction of the upper surface of the tray 148, as shown in FIG.

[0058] The end face correction jig 156 accommodated in the end face correction jig accommodation portion 158 is adapted to be sucked and held by the suction pad 154 of the holding means 146 disposed on the first moving body 112 .

[0059] Next, the cutting device 170 to which the above-mentioned auxiliary device 2 is connected will be described with reference to FIGS.

[0060] As shown in FIG. 10, the cutting device 170 includes a chuck table 172 having a holding surface for holding a workpiece, cutting means 174 having a cutting blade attached with a fixing nut for cutting the workpiece held on the chuck table 172, X-axis feeding means 176 for feeding the chuck table 172 for processing in the X-axis direction, Y-axis feeding means 178 for indexing and feeding the cutting means 174 in the Y-axis direction perpendicular to the X-axis direction, and Z-axis feeding means 180 for cutting and feeding the cutting means 174 in the Z-axis direction perpendicular to the X-axis and Y-axis directions.

[0061] Explaining with reference to Figures 10 and 11, the cutting device 170 includes an X-axis movable plate 184 provided on the upper surface of a base 182 (see Figure 10) so as to be movable in the X-axis direction, a support column 186 fixed to the upper surface of the X-axis movable plate 184, and a cover plate 188 fixed to the upper end of the support column 186. A circular opening 188a is formed in the cover plate 188. The chuck table 172 is rotatably mounted on the upper end of the support column 186 and extends upward through the circular opening 188a in the cover plate 188. The chuck table 172 is rotated about the Z-axis direction by a motor (not shown) built into the support column 186.

[0062] 11, a circular porous suction chuck 190 connected to a suction means (not shown) is disposed on the upper end portion of the chuck table 172. In the chuck table 172, a suction force is generated on the upper surface of the suction chuck 190 by the suction means, so that the workpiece placed on the upper surface of the suction chuck 190 is suction-held. Thus, in the chuck table 172, the upper surface of the suction chuck 190 serves as a holding surface for holding the workpiece, and the holding surface is positioned on an XY plane defined by the X-axis and Y-axis directions. In addition, a plurality of clamps 192 are disposed on the periphery of the chuck table 172 at intervals in the circumferential direction.

[0063] Continuing the explanation with reference to Fig. 11, a pair of rectangular sub-tables 194 are arranged on the upper surface of the cover plate 188 with a gap therebetween in the Y-axis direction. A plurality of suction holes 196 connected to suction means (not shown) are formed on the upper surface of each sub-table 194. In the sub-table 194, the suction means generates a suction force in each suction hole 196, thereby suction-holding the dressing board 142 or end face correction jig 156 that has been carried in and held by suction pad 154 of holding means 146 disposed on the first moving body 112.

[0064] 11, the X-axis feed means 176 has a ball screw 198 connected to the X-axis movable plate 184 and extending in the X-axis direction, and a motor 200 that rotates the ball screw 198. The X-axis feed means 176 converts the rotational motion of the motor 200 into linear motion by the ball screw 198 and transmits it to the X-axis movable plate 184, moving the X-axis movable plate 184 along the guide rail 182a of the base 182 and feeding the chuck table 172 for processing in the X-axis direction.

[0065] As shown in FIG. 10, the cutting device 170 includes a gate-shaped frame 202 arranged across the chuck table 172. The frame 202 has a pair of support columns 204 extending upward from the upper surface of the base 182 at a distance in the Y-axis direction, and a beam 206 that is bridged between the upper ends of the pair of support columns 204 and extends in the Y-axis direction. A pair of cutting means 174 is provided on one side surface of the beam 206 (the side surface on the rear side in FIG. 10) at a distance in the Y-axis direction. In the cutting device 170 of the illustrated embodiment, a pair of cutting means 174 is provided so that the cutting blades 36 face each other, and a workpiece held on the chuck table 172 can be simultaneously cut by the pair of cutting blades 36. The number of cutting means 174 may be one.

[0066] As shown in Figure 12, each cutting means 174 comprises a rectangular Y-axis movable member 208 supported on one side of a beam 206 so as to be freely movable in the Y-axis direction, a Z-axis movable member 210 with an L-shaped cross section supported on the Y-axis movable member 208 so as to be freely raised and lowered in the Z-axis direction, and a spindle housing 212 fixed to the lower end of the Z-axis movable member 210.

[0067] A pair of guide grooves 208a extending in the Y-axis direction and spaced apart in the Z-axis direction are formed on one side of Y-axis movable member 208 (the side facing the viewer in FIG. 12), and guide grooves 208a are slidably connected to a pair of guide rails (not shown) extending in the Y-axis direction and spaced apart in the vertical direction on one side of beam 206.

[0068] Y-axis feed means 178 has a ball screw 214 extending in the Y-axis direction on one side surface of beam 206, and a motor 216 that rotates ball screw 214. Ball screw 214 is connected to Y-axis movable member 208. Y-axis feed means 178 converts the rotational motion of motor 216 into linear motion by ball screw 214 and transmits it to Y-axis movable member 208, and indexes and feeds Y-axis movable member 208 in the Y-axis direction along a guide rail attached to one side surface of beam 206.

[0069] A pair of guide rails (not shown) extending in the Z-axis direction and spaced apart in the Y-axis direction are formed on the other side of Y-axis movable member 208 (the side on the rear side in Figure 12), and Z-axis movable member 210 has a pair of guided grooves (not shown) that are slidably connected to the pair of guide rails of Y-axis movable member 208.

[0070] Z-axis feed means 180 has a ball screw (not shown) that is connected to Z-axis movable member 210 and extends in the Z-axis direction, and a motor 218 that rotates this ball screw. Z-axis feed means 180 converts the rotational motion of motor 218 into linear motion using the ball screw and transmits it to Z-axis movable member 210, and feeds Z-axis movable member 210 in the Z-axis direction along the guide rail of Y-axis movable member 208.

[0071] 13, the spindle housing 212 supports a cylindrical spindle 220 rotatably about the Y-axis direction, and accommodates a motor (not shown) that rotates the spindle 220. A cutting blade 36 that cuts a workpiece is detachably fixed to the tip of the spindle 220 by a fixing nut 222.

[0072] A blade cover 224 that covers the cutting blade 36 is attached to the tip of the spindle housing 212. The blade cover 224 has a first cover member 224a fixed to the tip of the spindle housing 212, and a second cover member 224b movably attached to the tip of the first cover member 224a. The second cover member 224b is adapted to be moved in the X-axis direction by an appropriate actuator (not shown) such as an air cylinder, and is positioned at the open position shown in Fig. 13 when replacing the cutting blade 36, and is positioned at the closed position shown in Fig. 12 when cutting processing is performed.

[0073] 14, an annular mount flange 226 that protrudes radially outward is provided on the outer peripheral surface of the tip end side of the spindle 220. An annular recess 226a is formed on the radially inner portion of the tip end face of the mount flange 226, and an outer peripheral portion of the tip end face of the mount flange 226 serves as an annular receiving portion 226b that protrudes in the axial direction. In addition, a male thread 228 is formed on the outer peripheral surface of the spindle 220 further toward the tip end than the mount flange 226.

[0074] Then, the central opening 38a of the cutting blade 36 fits into the tip of the spindle 220, and the male thread 228 of the spindle 220 and the fixing nut 222 are screwed (fastened) together, whereby the cutting blade 36 is sandwiched between the receiving portion 226b of the mount flange 226 and the fixing nut 222 and detachably fixed to the tip of the spindle 220. In addition, a plurality of pin holes 222a, into which the pins 72 of the fixing nut holding portion 50 of the carry-in / out means 6 are inserted, are formed on the side surface of the nut 222 at equal intervals in the circumferential direction.

[0075] As shown in FIG. 10, a pair of imaging means 230 for imaging the workpiece held on the chuck table 172 is mounted on the other side surface (the side surface on the near side in FIG. 10) of the beam 206 of the frame 202 so as to be movable in the Y-axis direction, and a pair of moving means 232 for moving the imaging means 230 in the Y-axis direction is also mounted. The moving means 232 has a ball screw 234 extending in the Y-axis direction on the other side surface of the beam 206, and a motor 236 for rotating the ball screw 234. The ball screw 234 is connected to the imaging means 230. The moving means 232 converts the rotational motion of the motor 236 into linear motion and transmits it to the imaging means 230, and moves the imaging means 230 in the Y-axis direction along a guide rail 206a attached to the other side surface of the beam 206. It is to be noted that the number of imaging means 230 may be one.

[0076] When cutting a workpiece such as a wafer using the cutting device 170, first, the workpiece is attracted to the chuck table 172. Next, the X-axis feed means 176 moves the chuck table 172 to below the imaging means 230, and the moving means 232 adjusts the position of the imaging means 230 in the Y-axis direction. Next, the imaging means 230 captures an image of the workpiece from above to detect the cutting region of the workpiece.

[0077] Next, based on the cutting area of ​​the workpiece detected by the imaging means 230, the chuck table 172 is rotated to adjust the orientation of the cutting area of ​​the workpiece relative to the cutting blades 36 of the cutting means 174. Next, the chuck table 172 is moved in the X-axis direction by the X-axis feed means 176, and the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, so that the pair of cutting blades 36 is positioned above the cutting area of ​​the workpiece.

[0078] Next, the Z-axis feed means 180 lowers the spindle housing 212, and the cutting edge 40 of the cutting blade 36 rotated at high speed is caused to cut into the cutting area of ​​the workpiece, while cutting water is supplied to the portion where the cutting edge 40 of the cutting blade 36 has cut, thereby feeding the chuck table 172 in the X-axis direction for processing, thereby performing a predetermined cutting process on the cutting area of ​​the workpiece. The Y-axis feed means 178 indexes and feeds the spindle housing 212 in the Y-axis direction, while appropriately repeating the above cutting process, until the entire cutting area of ​​the workpiece is cut. After the cutting process is completed, the cut workpiece is transported to the next process.

[0079] When the cutting process is repeatedly performed, the cutting blade 36 wears, and when the wear of the cutting blade 36 reaches a predetermined amount, the cutting accuracy cannot be maintained, so the cutting blade 36 attached to the spindle 220 needs to be replaced with a new cutting blade 36. Even if the wear of the cutting blade 36 attached to the spindle 220 has not reached a predetermined amount, when cutting a workpiece made of a material different from that of the workpiece previously cut, it may be necessary to replace the cutting blade 36 with one suited to the material of the workpiece.

[0080] In the illustrated embodiment, as shown in FIG. 15, an auxiliary device 2 capable of automatically replacing the cutting blade 36 of the cutting device 170 is connected to the cutting device 170, and a method for replacing the cutting blade 36 using the auxiliary device 2 will be described below.

[0081] 15, the auxiliary device 2 is disposed at the rear side of the cutting device 170 in the X-axis direction, and can be attached to the cutting device 170 that has already been delivered to the user. When using the auxiliary device 2 to replace the cutting blade 36 attached to the cutting device 170, first, the endless track 22 of the cutting blade storage means 4 is rotated, and the support shaft 24 supporting the new cutting blade 36 to be brought into the cutting device 170 is positioned at a predetermined position (for example, the lowest end position in the track of the support shaft 24).

[0082] 16, the casing 52 is rotated by a motor connected to the Z rotation shaft 46 of the loading / unloading means 6, so that the side wall 56 of the casing 52 to which the blade holding part 48 is attached is aligned in the X-axis direction, and the blade holding part 48 faces the cutting blade storage means 4. In addition, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding part 48 so that the shaft part 34 of the support shaft 24 in the predetermined position can be inserted into the central opening 60 of the blade holding part 48 (see FIG. 5).

[0083] 17, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the loading / unloading means 6 is positioned at an operating position where the cutting blade 36 supported by the support shaft 24 can be held by the blade holding part 48. As a result, the shaft part 34 of the support shaft 24 in the predetermined position is inserted into the central opening 60 of the blade holding part 48, and the end face of the cutting blade 36 located on the tip side of the shaft part 34 is brought into contact with the end face 58 of the blade holding part 48. Next, suction force is generated in each suction hole 62 of the blade holding part 48, and the cutting blade 36 located on the tip side of the shaft part 34 is suction-held by the blade holding part 48.

[0084] Next, the Y-axis direction positioning means 8 is operated to move the carrying-in / out means 6 away from the cutting blade storage means 4 in the Y-axis direction and position it at the retreat position. Next, the casing 52 of the carrying-in / out means 6 is rotated 180° to face the blade holding part 48 on the opposite side of the blade holding part 48 that suction-holds the cutting blade 36 to the cutting blade storage means 4. Next, the Y-axis direction positioning means 8 is operated to position the carrying-in / out means 6 at an operating position where the cutting blade 36 of the support shaft 24 can be held by the blade holding part 48 on the opposite side. Next, suction force is generated in each suction hole 62 of the blade holding part 48 on the opposite side, and the cutting blade 36 located at the tip side of the shaft part 34 is suction-held by the blade holding part 48. As a result, a new cutting blade 36 is suction-held by a pair of opposing blade holding parts 48 out of the four blade holding parts 48.

[0085] 18, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the lifting table 76 is moved in the Z-axis direction by the Z-axis moving means 10. This separates the loading / unloading means 6 from the cutting blade storage means 4 and positions it in the retracted position, and adjusts the Y-axis and Z-axis positions of the loading / unloading means 6 relative to the cutting device 170. The Y-axis position of the loading / unloading means 6 after the position adjustment is between the pair of cutting means 174 of the cutting device 170, and the Z-axis position of the loading / unloading means 6 after the position adjustment is above the holding surface of the chuck table 172.

[0086] Next, as shown in FIG. 19, the first moving body 112 is moved in the X-axis direction by the air cylinder 130 as the first X-axis moving means, and the carrying-in / out means 6 is advanced toward between the pair of cutting means 174 of the cutting device 170. Next, as shown in FIG. 20, the second moving body 114 is moved in the X-axis direction by the second X-axis moving means 136, and the X-axis position of the carrying-in / out means 6 relative to the pair of cutting means 174 is adjusted. Specifically, the X-axis position of the center of the new pair of cutting blades 36 sucked and held by the pair of blade holding parts 48 of the carrying-in / out means 6 is aligned with the X-axis position of the center of the pair of cutting blades 36 attached to the pair of cutting means 174. In addition, the Z-axis moving means 10 of the auxiliary device 2 or the Z-axis feeding means 180 of the cutting device 170 is operated to align the Z-axis position of the center of the cutting blades 36 of the blade holding parts 48 with the Z-axis position of the center of the cutting blades 36 of the cutting means 174.

[0087] Next, the casing 52 of the loading / unloading means 6 is rotated 60° so that the pair of fixing nut holding parts 50 face the cutting blades 36 of the pair of cutting means 174. Note that the casing 52 may be rotated 60° before the first and second moving bodies 112, 114 are moved forward.

[0088] Next, the second cover member 224b of each blade cover 224 of the pair of cutting means 174 is positioned in the open position (see FIG. 13). Next, the cutting means 174 is moved in the Y-axis direction by the Y-axis feed means 178 of the cutting device 170, and the fixing nut 222 fixing the cutting blade 36 to the spindle 220 is brought into contact with the end face 66a of the rotating body 66 of the fixing nut holding part 50. Then, the pin 72 of the fixing nut holding part 50 is pushed by the fixing nut 222 and accommodated inside the rotating body 66, and the tip of the spindle 220 is accommodated in the central opening 68 of the rotating body 66.

[0089] Next, when the rotor 66 is rotated by the motor of the fixing nut holding part 50, when each pin 72 matches with the pin hole 222a of the fixing nut 222, each pin 72 fits into the pin hole 222a, and the rotational motion of the rotor 66 is transmitted to the fixing nut 222 via each pin 72, loosening the fixing nut 222. This allows the fixing nut 222 to be unscrewed (removed) from the male thread 228 of the spindle 220 of the cutting means 174. Also, suction force is generated in each suction hole 70 of the fixing nut holding part 50, and the removed fixing nut 222 is sucked and held by the fixing nut holding part 50.

[0090] Next, the cutting means 174 is moved away from the transport means 6 by the Y-axis feed means 178, and the casing 52 of the transport means 6 is rotated 60 degrees, so that the empty blade holding portion 48 that is not holding the cutting blade 36 by suction faces the cutting blade 36 of the cutting means 174.

[0091] Next, the cutting means 174 is brought closer to the carry-in / out means 6 by the Y-axis feed means 178, and the spindle 220 of the cutting means 174 is inserted into the central opening 60 of the blade holding part 48, while the end face of the cutting blade 36 of the cutting means 174 is brought into contact with the end face 58 of the empty blade holding part 48. Next, suction force is generated in each suction hole 62 of the blade holding part 48, and the cutting blade 36 of the cutting means 174 is suction-held by the blade holding part 48.

[0092] Next, the cutting means 174 is moved away from the transport means 6 by the Y-axis feed means 178, and the casing 52 of the transport means 6 is rotated 60 degrees so that the blade holding portion 48 which is holding the new cutting blade 36 by suction is brought face to face with the spindle 220 of the cutting means 174.

[0093] Next, the cutting means 174 is brought closer to the carry-in / out means 6 by the Y-axis feed means 178, and the spindle 220 is inserted into the central opening 38a of the new cutting blade 36, and the end face of the cutting blade 36 is brought into contact with the receiving portion 226b of the mounting flange 226 of the spindle 220. Next, the suction force of the blade holding portion 48 is released, and the new cutting blade 36 is transferred from the blade holding portion 48 to the spindle 220.

[0094] Next, the cutting means 174 is moved away from the loading / unloading means 6 by the Y-axis feed means 178, and the casing 52 of the loading / unloading means 6 is rotated 60 degrees, so that the fixing nut holding portion 50 which is holding the removed fixing nut 222 by suction is brought face to face with the spindle 220 of the cutting means 174.

[0095] Next, the cutting means 174 is moved closer to the carry-in / out means 6 by the Y-axis feed means 178, and the fixed nut 222 held by suction in the fixed nut holding portion 50 is fitted to the tip of the spindle 220. Next, the motor of the fixed nut holding portion 50 is operated in the opposite direction to when the fixed nut 222 was removed, to rotate the fixed nut 222, and the fixed nut 222 is screwed (fastened) to the male thread 228 of the spindle 220. This allows a new cutting blade 36 to be attached to the cutting means 174 to be sandwiched between the receiving portion 226b of the mount flange 226 of the spindle 220 and the fixed nut 222 and fixed to the spindle 220. Next, after releasing the suction force of the fixed nut holding portion 50, the second cover member 224b of the blade cover 224 of the cutting means 174 is positioned at the closed position. The removal and attachment of the fixed nut 222 and the cutting blade 36 as described above may be performed simultaneously or separately for the pair of cutting means 174.

[0096] Next, the first and second movable bodies 112, 114 are moved backward, and the casing 52 of the loading / unloading means 6 is rotated 60° so that one of the pair of removed cutting blades 36 faces the cutting blade storage means 4. In addition, the endless track 22 of the cutting blade storage means 4 is rotated so that the empty support shaft 24 not supporting a cutting blade 36 is positioned at a predetermined position (for example, the lowest end position in the track of the support shaft 24).

[0097] Next, the X-axis moving means 12 and the Z-axis moving means 10 are operated to adjust the X-axis and Z-axis positions of the blade holding portion 48 so that the shaft portion 34 of the support shaft 24 in the above-mentioned specified position can be inserted into the central opening 38a of one of the cutting blades 36 held by suction by the blade holding portion 48.

[0098] Next, the frame 74 is moved in the Y-axis direction by the Y-axis positioning means 8, and the shaft portion 34 of the support shaft 24 at the predetermined position is inserted into the central opening 38a of one of the cutting blades 36 held by the blade holding portion 48 under suction, and the end face of one of the cutting blades 36 is brought into contact with the end face of the base portion 32 of the support shaft 24. Next, the suction force of the blade holding portion 48 is released, and one of the removed pair of cutting blades 36 is transferred to the support shaft 24.

[0099] Also, the Y-axis direction positioning means 8 separates the loading / unloading means 6 from the cutting blade storage means 4, and rotates the casing 52 of the loading / unloading means 6 by 180°, so that the blade holding part 48 on the opposite side, which holds the other of the pair of removed cutting blades 36 by suction, faces the cutting blade storage means 4. Next, the Y-axis direction positioning means 8 moves the frame 74 in the Y-axis direction, and the shaft part 34 of the support shaft 24 at the above-mentioned predetermined position is inserted into the central opening 38a of the other cutting blade 36 held by the blade holding part 48 on the opposite side by suction, and the end face of the other cutting blade 36 is brought into contact with the end face of the cutting blade 36 supported by the support shaft 24. Next, the suction force of the blade holding part 48 is released, and the other of the pair of removed cutting blades 36 is transferred to the support shaft 24.

[0100] As described above, the auxiliary device 2 of the illustrated embodiment can be attached to a cutting device 170 that has already been delivered to a user, and the cutting blade 36 attached to the cutting means 174 of the cutting device 170 can be replaced.

[0101] Next, a method of carrying the dressing board 142 or the end face correction jig 156 into the cutting device 170 in the case where the auxiliary device 2 has the configuration shown in Figs. 8 and 9 will be described.

[0102] When the auxiliary device 2 is used to transport the dressing board 142 to the cutting device 170, first, the pair of lifting pieces 152 are lowered by the lifting means of the holding means 146, and each suction pad 154 is brought into contact with two of the dressing boards 142 housed in the dressing board housing section 144. Next, the suction means generates a suction force on each suction pad 154, and each suction pad 154 holds the dressing board 142 by suction. Next, the lifting pieces 152 holding the dressing board 142 by suction are raised.

[0103] Next, the Y-axis positioning means 8 and the Z-axis moving means 10 are used to adjust the Y-axis position and Z-axis position of the loading / unloading means 6 relative to the cutting device 170, and then, as shown in Figure 21, the X-axis moving means 12 (air cylinder 130 as the first X-axis moving means and second X-axis moving means 136) moves the loading / unloading means 6 forward toward the cutting device 170, and the dressing board 142 held by suction by the lifting piece 152 is positioned above the sub-table 194.

[0104] Next, the lifting piece 152 is lowered, and the underside of the dressing board 142 is brought into contact with the upper surface of the sub-table 194. Next, suction force is generated in each suction hole 196 of the sub-table 194, the dressing board 142 is sucked and held by the sub-table 194, and the suction force of the holding means 146 is released. In this manner, the auxiliary device 2 can be later attached to the cutting device 170 that has already been delivered to the user, and the dressing board 142 can be transported into the cutting device 170.

[0105] 22, the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178 to position the cutting blade 36 attached to the cutting means 174 above the dressing board 142, and then the spindle housing 212 is lowered by the Z-axis feed means 180, and the dressing board 142 is cut by the cutting edge 40 of the cutting blade 36 rotated at high speed in the direction indicated by the arrow R. This allows dressing (sharpening) to be performed to correct the cutting edge 40 of the cutting blade 36.

[0106] Furthermore, when the end face correction jig 156 is carried into the cutting device 170 using the auxiliary device 2, first, the pair of lifting pieces 152 are lowered by the lifting means of the holding means 146, and each suction pad 154 is brought into contact with the upper surface of the substrate 160 of the pair of end face correction jig 156 housed in the end face correction jig housing portion 158. Next, a suction force is generated in each suction pad 154 by the suction means, and the end face correction jig 156 is sucked and held by each suction pad 154. Next, the lifting pieces 152 holding the end face correction jig 156 by suction are raised.

[0107] Next, the Y-axis positioning means 8 and the Z-axis moving means 10 are used to adjust the Y-axis position and the Z-axis position of the loading / unloading means 6 relative to the cutting device 170, and then, as shown in Figure 23, the X-axis moving means 12 moves the loading / unloading means 6 forward toward the cutting device 170, and the end face correction jig 156 held by suction by the lifting piece 152 is positioned above the sub-table 194.

[0108] Next, the lifting piece 152 is lowered so that the underside of the substrate 160 of the end face correction jig 156 comes into contact with the upper surface of the sub-table 194. Next, suction force is generated in each suction hole 196 of the sub-table 194, the end face correction jig 156 is sucked and held by the sub-table 194, and the suction force of the holding means 146 is released. In this way, the auxiliary device 2 can be attached later to the cutting device 170 that has already been delivered to the user, and the end face correction jig 156 can be carried into the cutting device 170.

[0109] Then, after the fixed nut 222 and the cutting blade 36 are removed from the spindle 220 of the cutting means 174 by the blade holding section 48 and the fixed nut holding section 50 of the carry-in / out means 6, the Z-axis feed means 180 is operated to make the receiving portion 226b of the mount flange 226 of the spindle 220 face the grindstone 162 of the end face correction jig 156. Next, the spindle housing 212 is moved in the Y-axis direction by the Y-axis feed means 178, and the receiving portion 226b of the mount flange 226 of the rotated spindle 220 is brought into contact with the grindstone 162 of the end face correction jig 156. This allows the grindstone 162 to grind the receiving portion 226b (outer peripheral end face) of the mount flange 226 to make it flat.

[0110] In the illustrated embodiment, the loading / unloading means 6 of the auxiliary device 2 is provided with four blade holding parts 48 and two fixed nut holding parts 50 in correspondence with the cutting device 170 being provided with a pair of cutting means 174, but when the cutting device 170 is provided with a single cutting means 174, the loading / unloading means 6 may be provided with two blade holding parts 48 and one fixed nut holding part 50. Also, when the cutting device 170 is provided with a single cutting means 174, the holding means 146 for holding the dressing board 142 and the end face correction jig 156 may be one. [Explanation of symbols]

[0111] 2: Auxiliary equipment 4: Cutting blade storage means 6: Carrying in / out means 8: Y-axis direction positioning means 10:Z-axis movement means 12:X-axis movement means 14: Rotation axis 16: Drive gear 18: Rotation axis 20: Driven gear 22: Endless track 24: Support shaft 36: Cutting blade 38a: Central opening 46: Z rotation axis 48: Blade holder 50: Fixing nut holder 74: Frame 76: Lift table 80:Bottom (frame body) 84: Ceiling (frame) 92: Guide rail (lifting table) 112: First Mobile Unit 114: Second Mobile Unit 116: First guide rail 118: Second guide rail 142: Dressing board 144: Dressing board storage area 146: Holding means 156: End face correction jig 158: End face correction jig storage section

Claims

1. an auxiliary device that can be connected to a cutting device after the cutting device is delivered to a user, the auxiliary device comprising: a chuck table having a holding surface for holding a workpiece; a sub-table disposed adjacent to the chuck table; cutting means equipped with a cutting blade for cutting the workpiece held on the chuck table; X-axis feed means for feeding the chuck table in an X-axis direction for processing; Y-axis feed means for indexing and feeding the cutting means in a Y-axis direction perpendicular to the X-axis direction; and Z-axis feed means for cutting and feeding the cutting means in a Z-axis direction perpendicular to the X-axis and Y-axis directions, the holding surface being defined in the X-axis and Y-axis directions; An auxiliary device comprising: a dressing board accommodating section for accommodating a dressing board for dressing a cutting blade, a holding means for holding the dressing board accommodated in the dressing board accommodating section, an X-axis moving means for moving the holding means in the X-axis direction to align the X-axis direction position of the dressing board held by the holding means with the X-axis direction position of the sub-table, a Y-axis positioning means for moving the holding means in the Y-axis direction to align the Y-axis direction position of the dressing board held by the holding means with the Y-axis direction position of the sub-table, and a Z-axis moving means for moving the holding means in the Z-axis direction to align the Z-axis position of the dressing board held by the holding means with the Z-axis position of the sub-table, and which transports the dressing board held by the holding means to the sub-table.

2. 2. The auxiliary device according to claim 1, wherein the holding means is disposed on a first movable body disposed inside a frame body, the first movable body is slidably supported in a state suspended from a first guide rail disposed on the lower part of a second movable body and extending in the X-axis direction, the second movable body is slidably supported in a state suspended from a second guide rail disposed on a ceiling part of the frame body and extending in the X-axis direction, and the holding means is configured to be freely advanced in the X-axis direction by the first movable body and the second movable body.

3. 3. An auxiliary device according to claim 2, wherein said frame is disposed on a lift table.

Images