Workpiece holding mechanism and workpiece holding method

Abstract

To provide a workpiece holding mechanism that prevents a workpiece from coming off during surface treatment and allows an operator to easily peel off the workpiece after the surface treatment.SOLUTION: A workpiece holding mechanism includes a support 11, an adhesive tape 12 provided on the surface of the support 11, an elastic sheet 13 provided on the adhesive tape 12 on the side opposite the support 11, and an adhesive sheet 14 that adheres to the elastic sheet 13 so as to cover the side opposite the support 11, and whose end portion adheres to the adhesive tape 12 so as to wrap around the elastic sheet 13, and which is capable of adhering a workpiece 100 to the surface opposite the support 11, and which contains glass cloth.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a mechanism and method for holding a workpiece in a film formation chamber for performing surface treatment such as vacuum deposition or sputtering. [Background technology]

[0002] For example, Patent Document 1 below discloses a method in which a resin sheet is provided on the surface of a holder body, an adhesive sheet is further provided on the surface of the resin sheet, and a workpiece (substrate) is adhered to the adhesive sheet. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6439054 Summary of the Invention [Problem to be solved by the invention]

[0004] In the method disclosed in the above-mentioned Patent Document 1, there is a risk that the workpiece may come off the adhesive sheet when the air pressure in the room is lowered during the surface treatment. In addition, if an adhesive sheet with a higher adhesive strength is used to prevent this, there is a problem that it becomes difficult for the worker to peel off the workpiece after the surface treatment is completed.

[0005] In consideration of the above-mentioned problems, the present invention aims to provide a workpiece holding mechanism and a workpiece holding method which prevent the workpiece from falling off during surface treatment and allows an operator to easily remove the workpiece after surface treatment. [Means for solving the problem]

[0006] In order to solve the above problem, the workpiece holding mechanism according to the first aspect of the present invention comprises: A support; An adhesive tape provided on a surface of the support; an elastic sheet provided on the adhesive tape on the opposite side to the support; The adhesive sheet is adhered to the elastic sheet so as to cover the side opposite the support tool, and the end portion is adhered to the adhesive tape so as to wrap around the elastic sheet, and a workpiece can be adhered to the surface opposite the support tool, and the adhesive sheet contains glass cloth; If the adhesive strength between the elastic sheet and the adhesive tape is the first adhesive strength, the adhesive strength between the adhesive sheet and the adhesive tape is the first adhesive strength, the adhesive strength between the adhesive sheet and the workpiece is the second adhesive strength, and the adhesive strength between the elastic sheet and the adhesive sheet is the third adhesive strength, then the first adhesive strength > the second adhesive strength > the third adhesive strength, and the first adhesive strength > the second adhesive strength > the third adhesive strength.

[0007] In order to solve the above problem, a workpiece holding mechanism according to a second aspect of the present invention comprises: A support; An adhesive tape provided on a surface of the support; an elastic sheet provided on the adhesive tape on the opposite side to the support; an adhesive sheet that contains the entire elastic sheet and adheres to the elastic sheet, the surface on the support side adheres to the adhesive tape, and the surface on the opposite side to the support on which a work can be adhered, the adhesive sheet containing a glass cloth; If the adhesive strength between the adhesive sheet and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive sheet and the workpiece is a second adhesive strength, and the adhesive strength between the elastic sheet and the adhesive sheet is a third adhesive strength, then the first adhesive strength > the second adhesive strength > the third adhesive strength.

[0008] In a third aspect of the present invention, If the peel force generated during surface treatment of the workpiece in a direction pulling the workpiece away from the adhesive sheet is defined as a first peel force, and the peel force for removing the workpiece from the adhesive sheet is defined as a second peel force, then the second adhesive force > the second peel force > the third adhesive force > the first peel force.

[0009] In a fourth aspect of the present invention, When the second peeling force is applied, a gap is created between the adhesive sheet and the elastic sheet, and the adhesive sheet assumes an arched shape with the center of the contact portion with the workpiece at the top.

[0010] In order to solve the above problems, a workpiece holding mechanism according to a fifth aspect of the present invention comprises: An adhesive tape is provided on the surface of the support; an elastic sheet is provided on the adhesive tape from the side opposite to the support; The adhesive sheet is adhered to the elastic sheet so as to cover the elastic sheet from the side opposite to the support tool, and the end portion is adhered to the adhesive tape so as to wrap around the elastic sheet; A workpiece is adhered to the surface of the adhesive sheet containing glass cloth opposite to the support tool, When a peeling force is applied to remove the workpiece from the adhesive sheet, the adhesive sheet forms an arc with the center of the contact portion with the workpiece at the top.

[0011] In order to solve the above problems, a work holding mechanism according to a sixth aspect of the present invention comprises: An adhesive tape is provided on the surface of the support; an elastic sheet is provided on the adhesive tape from the side opposite to the support; an adhesive sheet is attached to the elastic sheet while enclosing the entire elastic sheet, and the surface of the adhesive sheet facing the support is attached to the adhesive tape; A workpiece is adhered to the surface of the adhesive sheet containing glass cloth opposite to the support tool, When a peeling force is applied to remove the workpiece from the adhesive sheet, the adhesive sheet forms an arc with the center of the contact portion with the workpiece at the top. Effect of the Invention

[0012] According to the workpiece holding mechanism and the workpiece holding method of the present invention, the workpiece is less likely to come off during surface treatment, and the worker can easily remove the workpiece after surface treatment. [Brief description of the drawings]

[0013] [Figure 1] 1 is a schematic diagram of a film forming apparatus according to a first embodiment of the present invention. [Diagram 2] 1 is a schematic cross-sectional view of a workpiece holding mechanism and a workpiece according to a first embodiment of the present invention. [Diagram 3] 1 is a schematic cross-sectional view showing a workpiece holding mechanism and a workpiece according to a first embodiment of the present invention during film formation on the workpiece. [Figure 4] 2 is a schematic cross-sectional view showing the workpiece holding mechanism and the workpiece according to the first embodiment of the present invention when the workpiece is removed by an operator. FIG. [Diagram 5] FIG. 11 is a schematic cross-sectional view of a workpiece holding mechanism and a workpiece according to a second embodiment of the present invention. [Figure 6] FIG. 11 is a schematic cross-sectional view showing a workpiece holding mechanism and a workpiece according to a second embodiment of the present invention during the process of forming a film on the workpiece. [Figure 7] 11 is a schematic cross-sectional view showing a workpiece holding mechanism and a workpiece according to a second embodiment of the present invention when an operator removes the workpiece. FIG. [Figure 8] 11 is a schematic cross-sectional view showing another example of the work holding mechanism and the work according to the second embodiment of the present invention when the work is removed by an operator. FIG. [Figure 9] 13 is a graph showing the relationship between retention time and number of uses when an elastic sheet made of rubber or silicone is used. [Figure 10] 1 is a schematic enlarged view showing the configuration of a pressure-sensitive adhesive sheet in Example 1 of the present invention. [Figure 11] 11 is a graph showing the relationship between the retention time and the number of uses when the adhesive sheet of FIG. 10 is used. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] The workpiece holding mechanism and the workpiece holding method according to the present invention are for holding a workpiece (substrate) when performing surface treatment such as film formation on the workpiece. Hereinafter, the workpiece holding mechanism and the workpiece holding method according to the present invention will be described by way of examples with reference to the drawings.

[0015] In the examples below, "adhesive" refers to a state in which the material has both liquid and solid properties and sticks while wet, "adhesion" refers to a state in which the adhesive surface is liquid before sticking and becomes solid when stuck, and "close contact" refers to a state in which the material sticks tightly.

[0016] [Example 1] 1, the workpiece holding mechanism 1 according to this embodiment holds a workpiece 100 in a film formation chamber 4, which is a part of a film formation apparatus 3 for forming a film. A pressure reducing means 5 is provided in the film formation chamber 4, and when a film is formed on the workpiece 100, the inside of the chamber is reduced in pressure (evacuated).

[0017] Although not shown, the film formation chamber 4 contains various devices for performing vacuum deposition and sputtering in addition to the workpiece holding mechanism 1, and the workpiece 100 is, for example, a glass substrate.

[0018] As shown in FIG. 2, the workpiece holding mechanism 1 according to this embodiment includes a support (substrate holder) 11, an adhesive tape 12, an elastic sheet 13, and an adhesive sheet .

[0019] 2 is a member having a flat surface. The adhesive tape 12 is attached to the surface of the support 11 and is preferably a polyimide tape.

[0020] The elastic sheet 13 is capable of elastic deformation and is provided so as to be adhered to the adhesive tape 12 from the work 100 side. The adhesive sheet 14 adheres to the elastic sheet 13 so as to cover the elastic sheet 13 from the work 100 side (the side opposite the support tool 11 side), and the end portion 14b is adhered to the adhesive tape 12 so as to wrap around the elastic sheet 13.

[0021] By placing the workpiece 100 on the side opposite the support 11 as shown by the dashed arrow in Figure 2 on the workpiece holding mechanism 1 configured in this manner, the workpiece 100 can be adhered to the surface 14a of the adhesive sheet 14 facing the workpiece 100, thereby making it possible to hold the workpiece 100.

[0022] FIG. 3 is a schematic diagram showing a state of the workpiece holding mechanism 1 during the process of forming a film on the workpiece 100 held by the workpiece holding mechanism 1. As shown in FIG.

[0023] As shown by the black arrows in Figure 3, if the adhesive strength between the elastic sheet 13 and the adhesive tape 12 is the first adhesive strength A0, the adhesive strength between the adhesive sheet 14 and the adhesive tape 12 is the first adhesive strength A1, the adhesive strength between the adhesive sheet 14 and the workpiece 100 is the second adhesive strength B1, and the adhesive strength between the elastic sheet 13 and the adhesive sheet 14 is the third adhesive strength C1, the relationships are set such that first adhesive strength A0 > second adhesive strength B1 > third adhesive strength C1 and first adhesive strength A1 > second adhesive strength B1 > third adhesive strength C1.

[0024] The film formation is performed in a state where the pressure inside the film formation chamber 4 is reduced (vacuumed). At that time, as shown by the outlined arrow in Fig. 3, a force acts in a direction to separate the workpiece 100 from the workpiece holding mechanism 1. Hereinafter, this force is referred to as a first peeling force D. The third adhesive force C1 is set with respect to the first peeling force D such that the third adhesive force C1>the first peeling force D.

[0025] That is, the third adhesive force C1 between the adhesive sheet 14 and the workpiece 100 is greater than the first peeling force D generated by vacuum drawing while a film is being formed on the workpiece 100 (during surface treatment of the workpiece 100). Therefore, as shown in Fig. 3, the workpiece 100 is maintained in an adhesive state to the surface 14a of the adhesive sheet 14 on the workpiece 100 side in the workpiece holding mechanism 1. Furthermore, the shapes of the components of the workpiece holding mechanism 1 are not significantly deformed.

[0026] On the other hand, FIG. 4 is a schematic diagram showing a state of the workpiece holding mechanism 1 when an operator removes the workpiece 100 from the workpiece holding mechanism 1 after film formation on the workpiece 100 has been completed (after surface treatment).

[0027] 4, the peeling force applied by the operator when removing the workpiece 100 from the adhesive sheet 14 is referred to as the second peeling force E. The second adhesive force B1 and the third adhesive force C1 are set relative to the second peeling force E such that the relationship is second adhesive force B1>second peeling force E>third adhesive force C1 (>first peeling force D).

[0028] That is, the second adhesive force B1 between the adhesive sheet 14 and the workpiece 100 is greater than the second peel force E, which is the force used by the worker to remove the workpiece 100. Naturally, the workpiece 100 cannot be removed by this alone.

[0029] However, at the same time, because the third adhesive force C1 between the elastic sheet 13 and the adhesive sheet 14 is smaller than the second peeling force E, the adhesive sheet 14 separates from the surface 13a of the elastic sheet 13 facing the workpiece 100, generating a gap G1 between the adhesive sheet 14 and the elastic sheet 13. In this state, the adhesive sheet 14 is pulled toward the workpiece 100 around the center 14c of the contact portion as a result of the contact portion of the surface 14a facing the workpiece 100 being pulled by the second peeling force E.

[0030] In this state, the contact portion other than the vicinity of the center 14c is peeled off from the workpiece 100, and as a result, the contact portion assumes an arched shape with the center 14c at the top.

[0031] In addition, as shown in Figures 3 and 4, when the workpiece 100 is arranged so as to be in contact with the entire surface 14a of the adhesive sheet 14 facing the workpiece 100, the above-mentioned "contact (adhesive) portion (with the workpiece 100 on the surface 14a facing the workpiece 100)" can be directly replaced with "surface 14a facing the workpiece 100" for explanation.

[0032] In any case, in the above-mentioned state, the worker can remove the workpiece 100 with the force of the second peeling force E. That is, the worker can remove the workpiece 100 with the second peeling force E, which is a force that would not normally allow the workpiece 100 to be removed.

[0033] Therefore, with the workpiece holding mechanism 1 and the workpiece holding method, the held workpiece 100 is unlikely to come off during surface treatment such as film formation, and the worker can easily remove the workpiece 100 after surface treatment.

[0034] As already explained, while the film is being formed on the workpiece 100, the workpiece 100 is maintained in an adhesive state to the surface 14a of the adhesive sheet 14 on the workpiece 100 side in the workpiece holding mechanism 1 as shown in Fig. 3. However, there is a limit to the time that this state can be maintained. Hereinafter, this is referred to as the "holding time".

[0035] 9 is a graph showing the relationship between the retention time and the number of uses when using, as an example, an elastic sheet 13 made of rubber or silicon, and an adhesive sheet 14 in which a silicon-based adhesive is applied to both sides of a polyimide base material. Note that this number of uses refers to the number of times a film is formed on the workpiece 100, and between the first and second uses, and between the second and third uses, there is a process in which the worker peels off the workpiece 100 from the adhesive sheet 14.

[0036] As shown in FIG. 9, when the constituent material of the elastic sheet 13 is rubber or silicon, the retention time is significantly reduced the second and third times of use compared to the first time of use.

[0037] This is because, when the worker peels off the workpiece 100 as shown in Figure 4, the adhesive sheet 14 is stretched by the second peeling force E, and when the next workpiece 100 is adhered, the stretched portion causes wrinkles and air bubbles, and it was found that this cannot be prevented even by considering the constituent material of the elastic sheet 13.

[0038] Therefore, in this embodiment, the adhesive sheet 14 contains glass cloth. FIG. 10 is a schematic enlarged view showing the structure of the adhesive sheet 14. As shown in FIG. 10, the adhesive sheet 14 has adhesive 14a applied to both sides of glass cloth 14b. Note that the glass cloth 14b may be subjected to a surface treatment using a silane coupling agent or the like before applying adhesive 14a. Note that adhesive 14a is, for example, an acrylic or silicone-based adhesive, and a thermosetting elastomer may be used. However, the present invention is not limited to this.

[0039] Fig. 11 is a graph showing the relationship between the retention time and the number of uses when elastic sheet 13 made of silicon and adhesive sheet 14 having the configuration of Fig. 10 are used. Here, the retention test was performed with the upper limit of the retention time set to 60 minutes. As shown in Fig. 11, when adhesive sheet 14 containing glass cloth was used, the substrate could be retained for up to the upper limit of the retention time of 60 minutes in all three tests.

[0040] That is, in this embodiment, by providing an adhesive sheet 14 containing glass cloth that is flexible but has little stretch, deformation of the adhesive sheet 14 when the worker peels off the workpiece 100 is suppressed, and the holding time on the workpiece 100 can be maintained even when the adhesive sheet 14 is used repeatedly.

[0041] [Example 2] The workpiece holding mechanism 2 of this embodiment, like the workpiece holding mechanism 1 of Example 1, holds the workpiece 100 within the film formation chamber 4, and includes a support 11, an adhesive tape 12, an elastic sheet 23, and an adhesive sheet 24, as shown in FIG. 5. In the following, the parts that overlap with the first embodiment will be omitted as much as possible.

[0042] 5 is the same as the elastic sheet 13 in Example 1. The adhesive sheet 24 is entirely enclosed within the elastic sheet 23, with the entire inner surface 24a adhering to the entire elastic sheet 23, and the outer surface 24b on the support 11 side adhering to the adhesive tape 12.

[0043] For the workpiece holding mechanism 2 configured in this manner, by placing the workpiece 100 on the side opposite the support 11, as shown by the dashed arrow in Figure 5, the workpiece 100 can be adhered to the outer surface 24c of the adhesive sheet 24 on the workpiece 100 side (opposite the support 11), thereby making it possible to hold the workpiece 100.

[0044] FIG. 6 is a schematic diagram showing the state of the workpiece holding mechanism 2 while a film is being formed on the workpiece 100 held by the workpiece holding mechanism 2. As shown in FIG.

[0045] As shown by the black arrows in Figure 6, if the adhesive strength between the adhesive sheet 24 and the adhesive tape 12 is the first adhesive strength A2, the adhesive strength between the adhesive sheet 24 and the workpiece 100 is the second adhesive strength B2, and the adhesive strength between the elastic sheet 23 and the adhesive sheet 24 is the third adhesive strength C2, the relationship is set as first adhesive strength A2 > second adhesive strength B2 > third adhesive strength C2.

[0046] As described in Example 1, during film formation, as shown by the outline arrow in Fig. 6, the first peeling force D acts in a direction that pulls the workpiece 100 away from the workpiece holding mechanism 2. The third adhesive force C2 is set with respect to this first peeling force D such that the third adhesive force C2>the first peeling force D.

[0047] That is, the third adhesive force C2 between the adhesive sheet 14 and the workpiece 100 is greater than the first peeling force D generated by vacuum drawing while a film is being formed on the workpiece 100. Therefore, as shown in Fig. 6, the workpiece 100 is maintained in an adhesive state to the outer surface 24c of the adhesive sheet 24 on the workpiece 100 side in the workpiece holding mechanism 1. Furthermore, each component of the workpiece holding mechanism 1 is not significantly deformed.

[0048] On the other hand, FIG. 7 is a schematic diagram showing the state of the workpiece holding mechanism 2 when an operator removes the workpiece 100 from the workpiece holding mechanism 2 after film formation on the workpiece 100 is completed.

[0049] In Figure 7, the second peel force E when the worker removes the workpiece 100 from the adhesive sheet 14 is indicated by the white arrow, and the second adhesive force B2 and the third adhesive force C2 are set so that the second adhesive force B2 > second peel force E > third adhesive force C2 (> first peel force D).

[0050] That is, the second adhesive force B2 between the adhesive sheet 24 and the workpiece 100 is greater than the second peeling force E, which is the force used by the worker to remove the workpiece 100. Naturally, removal is not possible with this alone.

[0051] However, at the same time, because the third adhesive force C2 between the elastic sheet 23 and the adhesive sheet 24 is smaller than the second peeling force E, the adhesive sheet 24 separates from the surface 23a of the elastic sheet 23 facing the workpiece 100, generating a gap G2. In this state, the adhesive sheet 24 is pulled toward the workpiece 100 around the center 24d of the contact portion by the second peeling force E at the outer surface 24c facing the workpiece 100.

[0052] In this state, the contact portion other than the vicinity of the center 24d is peeled off from the workpiece 100, and as a result, the contact portion assumes an arched shape with the center 24d at the top.

[0053] In addition, as shown in Figures 6 and 7, when the workpiece 100 is arranged so as to be in contact with the entire outer surface 24c of the adhesive sheet 24 facing the workpiece 100, the above-mentioned "contact (adhesive) portion (with the workpiece 100 on the outer surface 24c facing the workpiece 100)" can be directly replaced with "the outer surface 24c facing the workpiece 100" for explanation.

[0054] In any case, in the above-mentioned state, the worker can remove the workpiece 100 with the second peeling force E. That is, the worker can remove the workpiece 100 with the second peeling force E, which is a force that would not normally allow the workpiece 100 to be removed.

[0055] FIG. 8 is a schematic diagram showing a state (different from that in FIG. 7) of the workpiece holding mechanism 2 when an operator removes the workpiece 100 from the workpiece holding mechanism 2 after film formation on the workpiece 100 is completed.

[0056] As explained in Figure 7, when the second adhesive force B2 > second peel force E > third adhesive force C2 (> first peel force D) is set, it is possible that instead of the surface 23a of the elastic sheet 23 facing the workpiece 100 separating from the adhesive sheet 24 as in Figure 7, the surface 23b facing the support 11 separating from the adhesive sheet 24 as in Figure 8, resulting in a gap G3.

[0057] Even in such a case, the adhesive sheet 24 is pulled toward the workpiece 100 (together with the elastic sheet 23 contained therein) around the center 24d of the contact portion with the workpiece 100 as a result of the contact portion on the outer surface 24c facing the workpiece 100 being pulled.

[0058] In this state, the contact portion other than the vicinity of the center 24d is peeled off from the workpiece 100, and as a result, the contact portion assumes an arched shape with the center 24d at the top.

[0059] In addition, as shown in Figure 8, when the workpiece 100 is arranged so as to be in contact with the entire outer surface 24c of the adhesive sheet 24 facing the workpiece 100, the above-mentioned "contact (adhesive) portion (with the workpiece 100 on the outer surface 24c facing the workpiece 100)" can be directly replaced with "the outer surface 24c facing the workpiece 100" for explanation.

[0060] In any case, in the above-mentioned state, the worker can remove the workpiece 100 with the force of the second peeling force E. That is, the worker can remove the workpiece 100 with the second peeling force E, which is a force that would not normally allow the workpiece 100 to be removed.

[0061] Therefore, with the workpiece holding mechanism 2 and the workpiece holding method, the held workpiece 100 is unlikely to come off during surface treatment such as film formation, and the worker can easily remove the workpiece 100 after surface treatment.

[0062] The adhesive sheet 24 contains glass cloth, similar to the adhesive sheet 14 of Example 1. Specifically, as shown in Fig. 10, adhesive 14a is applied to both sides of glass cloth 14b.

[0063] As a result, in this embodiment as well as in the first embodiment, deformation of the adhesive sheet 24 when the worker peels off the workpiece 100 can be suppressed, and the retention time on the workpiece 100 can be maintained even when the adhesive sheet 24 is used repeatedly. [Industrial Applicability]

[0064] The present invention is suitable as a mechanism and method for holding a workpiece when performing surface treatment such as film formation. [Explanation of symbols]

[0065] 1,2 Work holding mechanism 3 Film deposition equipment 4 Film forming chamber 5. Pressure reduction means 11 Supports 12 Adhesive Tape 13,23 Elastic sheet 14,24 Adhesive sheet 14a First adhesive 14b Glass cloth 100 Work

Claims

1. A support; An adhesive tape provided on a surface of the support; an elastic sheet provided on the adhesive tape on the opposite side to the support; The adhesive sheet is adhered to the elastic sheet so as to cover the side opposite the support tool, and the end portion is adhered to the adhesive tape so as to wrap around the elastic sheet, and a workpiece can be adhered to the surface opposite the support tool, and the adhesive sheet contains glass cloth; When the adhesive strength between the elastic sheet and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive sheet and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive sheet and the workpiece is a second adhesive strength, and the adhesive strength between the elastic sheet and the adhesive sheet is a third adhesive strength, The first adhesive strength>the second adhesive strength>the third adhesive strength, and the first adhesive strength>the second adhesive strength>the third adhesive strength. Work holding mechanism.

2. A support; An adhesive tape provided on a surface of the support; an elastic sheet provided on the adhesive tape on the opposite side to the support; an adhesive sheet that contains the entire elastic sheet and adheres to the elastic sheet, the surface on the support side adheres to the adhesive tape, and the surface on the opposite side to the support on which a work can be adhered, the adhesive sheet containing a glass cloth; When the adhesive strength between the adhesive sheet and the adhesive tape is a first adhesive strength, the adhesive strength between the adhesive sheet and the workpiece is a second adhesive strength, and the adhesive strength between the elastic sheet and the adhesive sheet is a third adhesive strength, the first adhesive strength>the second adhesive strength>the third adhesive strength. Work holding mechanism.

3. When a peeling force generated during surface treatment of the workpiece in a direction to separate the workpiece from the adhesive sheet is defined as a first peeling force, and a peeling force to remove the workpiece from the adhesive sheet is defined as a second peeling force, the second adhesive force>the second peeling force>the third adhesive force>the first peeling force. The workpiece holding mechanism according to claim 1 or 2.

4. When the second peeling force is applied, a gap is generated between the adhesive sheet and the elastic sheet, and the adhesive sheet forms an arc shape with the center of the contact portion with the workpiece at the top. The workpiece holding mechanism according to claim 3 .

5. An adhesive tape is provided on the surface of the support; an elastic sheet is provided on the adhesive tape from the side opposite to the support; An adhesive sheet containing a glass cloth is adhered to the elastic sheet so as to cover the elastic sheet from the side opposite to the support, and the end portion is adhered to the adhesive tape so as to wrap around the elastic sheet; A workpiece is adhered to the surface of the adhesive sheet opposite to the support tool, When a peeling force is applied to remove the workpiece from the adhesive sheet, the adhesive sheet forms an arc shape with the center of the contact portion with the workpiece at the top. Workpiece holding method.

6. An adhesive tape is provided on the surface of the support; an elastic sheet is provided on the adhesive tape from the side opposite to the support; an adhesive sheet containing a glass cloth is attached to the elastic sheet while enclosing the entire elastic sheet, and the surface of the adhesive sheet on the support side is attached to the adhesive tape; A workpiece is adhered to the surface of the adhesive sheet opposite to the support tool, When a peeling force is applied to remove the workpiece from the adhesive sheet, the adhesive sheet forms an arc shape with the center of the contact portion with the workpiece at the top. Workpiece holding method.

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