Sensor element mounting structure

The sensor element mounting structure employs a film-like spacer to control adhesive thickness and distance, addressing challenges in attaching sensor elements to thin parts by ensuring precise adhesive application and facilitating mass production.

JP7610125B2Active Publication Date: 2025-01-08DENSO WAVE INC
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Patent Information

Application Number
JP2021147920
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-09-10
Publication Date
2025-01-08
Estimated Expiration
2041-09-10

AI Technical Summary

Technical Problem

Existing sensor element mounting structures face challenges in attaching a sensor element incorporated in a flexible substrate to a thin part of a member, particularly in controlling the thickness of the adhesive and ensuring dimensional accuracy of protrusions, which affects adhesive strength and distance.

Method used

A sensor element mounting structure that uses a film-like spacer with a constant thickness sandwiched between a thin wall portion and a flexible substrate, featuring a through portion to control adhesive thickness by injecting adhesive through this spacer, allowing for precise adjustment and stabilization of adhesive thickness and distance.

Benefits of technology

Enables easy control of adhesive thickness and distance between the thin wall part and sensor element, stabilizing adhesive strength and facilitating mass production with consistent adhesive thickness, even when attaching multiple sensor elements.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a sensor element mounting structure for mounting a sensor element incorporated on a flexible substrate on a thin potion of a member, which allows for easily managing the thickness of adhesive.SOLUTION: A sensor element mounting structure (10) is provided, comprising a thin portion (20b) of a member (20), a flexible substrate (31), a sensor element (40) incorporated on the flexible substrate, a spacer (50) formed in the form of a film with a constant thickness to be sandwiched between the thin portion and the flexible substrate, the spacer having a through-hole (51) penetrating in a thickness direction formed at a position overlapping the sensor element, and an adhesive (60) filling the through-hole to bond the thin portion and the flexible substrate.SELECTED DRAWING: Figure 1
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Description

[Technical field]

[0001] The present invention relates to a sensor element mounting structure in which a sensor element is mounted on a member. [Background technology]

[0002] Conventionally, there is a structure in which a protrusion is formed on the bottom surface of a recess formed in a case, the recess is filled with adhesive, and then a glass pedestal coupled to a sensor element is placed on the protrusion and pressed from above, and the adhesive is hardened to fix the glass pedestal (see Patent Document 1). According to Patent Document 1, the bottom surface of the glass pedestal is supported in a horizontal position with part of the glass pedestal overlapping the protrusion, and adhesive is filled without any gaps between the bottom surface of the glass pedestal and the bottom surface of the recess in the area excluding the protrusion. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 6-186104 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when attaching a sensor element incorporated in a flexible substrate to a thin portion of a component, it is difficult to form a protrusion on the flexible substrate or the thin portion, and it is also difficult to ensure the dimensional accuracy of the protrusion. For this reason, the structure described in Patent Document 1 cannot be adopted, and it is difficult to control the thickness of the adhesive for attaching the sensor element by the protrusion. In particular, controlling the thickness of the adhesive in mass-produced products is important in order to properly control the adhesive strength and the distance between the thin portion and the sensor element.

[0005] The present invention has been made to solve the above-mentioned problems, and its main object is to easily manage the thickness of adhesive in a sensor element mounting structure in which a sensor element incorporated in a flexible substrate is attached to a thin portion of a component. [Means for solving the problem]

[0006] The first means for solving the above problem is a sensor element mounting structure, A thin-walled portion of the member; A flexible substrate; A sensor element incorporated in the flexible substrate; a spacer formed in a film shape of a certain thickness and sandwiched between the thin portion and the flexible substrate, the spacer having a through portion penetrating in a thickness direction formed at a position overlapping the sensor element; an adhesive that is filled in the through-hole and bonds the thin-walled portion and the flexible substrate; Equipped with.

[0007] According to the above configuration, the sensor element is incorporated in the flexible substrate. The spacer is formed in a film shape of a constant thickness and is sandwiched between the thin portion and the flexible substrate. Therefore, when the flexible substrate is pressed against the thin portion via the spacer, the distance between the thin portion and the flexible substrate can be adjusted to the constant thickness of the spacer.

[0008] Here, the spacer has a through-hole penetrating in the thickness direction at a position overlapping the sensor element. The adhesive is filled in the through-hole and bonds the thin-walled portion and the flexible substrate. Therefore, by injecting the adhesive into the through-hole and pressing the flexible substrate against the thin-walled portion via the spacer, the thickness of the adhesive can be adjusted to a constant thickness of the spacer. That is, the thickness of the adhesive can be controlled by the thickness of the spacer. Therefore, even when the sensor element incorporated in the flexible substrate is attached to the thin-walled portion of the member, the thickness of the adhesive can be easily controlled. Furthermore, it is easy to make the thickness of the film-like spacer constant, and the thickness of the adhesive can be stabilized even in mass-produced products, making it easy to properly control the adhesive strength and the distance between the thin-walled portion and the sensor element.

[0009] The second means is a sensor element mounting structure, A thin-walled portion of the member; A flexible substrate; A sensor element incorporated in the flexible substrate; a spacer formed in a film shape of a constant thickness and sandwiched between the thin-walled portion and the sensor element, the spacer having a through-portion penetrating in the thickness direction formed at a position overlapping a part of the sensor element; an adhesive that is filled in the through-hole and bonds the thin-walled portion and the sensor element; Equipped with.

[0010] According to the above configuration, the sensor element is incorporated in the flexible substrate. The spacer is formed in a film shape of a constant thickness and is sandwiched between the thin portion and the sensor element. Therefore, when the sensor element is pressed against the thin portion via the spacer, the distance between the thin portion and the sensor element can be adjusted to the constant thickness of the spacer.

[0011] Here, the spacer has a through-hole penetrating in the thickness direction formed at a position overlapping a part of the sensor element. The adhesive is filled in the through-hole and bonds the thin-walled portion and the sensor element. Therefore, by injecting the adhesive into the through-hole and pressing the sensor element against the thin-walled portion via the spacer, the thickness of the adhesive can be adjusted to a constant thickness of the spacer. That is, the thickness of the adhesive can be controlled by the thickness of the spacer. Therefore, even when a sensor element incorporated in a flexible substrate is attached to a thin-walled portion of a member, the thickness of the adhesive can be easily controlled. Furthermore, it is easy to make the thickness of the film-like spacer constant, and the thickness of the adhesive can be stabilized even in mass-produced products, making it easier to properly control the adhesive strength and the distance between the thin-walled portion and the sensor element.

[0012] In a third aspect, the spacer has a through-hole penetrating in the thickness direction also formed at a position not overlapping the sensor element. With this configuration, when a portion of the flexible substrate other than the sensor element is also bonded to the thin portion, the thickness of the adhesive can be easily controlled even in that portion.

[0013] In a fourth aspect, based on the third aspect, the thin portion is formed in an annular shape, and the flexible substrate and the spacer are formed in an annular shape along the thin portion. With this configuration, when the flexible substrate is bonded to match the shape of the thin portion, the thickness of the adhesive at each bonding portion can be easily controlled.

[0014] In the fifth means, the shape and size of the through-hole formed in the spacer at a position overlapping the sensor element are the same as the shape and size of the through-hole formed in a position not overlapping the sensor element. With this configuration, through-holes of the same shape and size are formed in the sensor element portion and the portion other than the sensor element in the flexible substrate. Therefore, when the portion other than the sensor element in the flexible substrate is also bonded to the thin portion, it is easy to form the through-hole and the shape and size of the through-hole can be easily controlled. Furthermore, the amount of adhesive injected into the through-hole can be made constant, improving mass productivity.

[0015] In a sixth aspect, the sensor element is formed as an electronic circuit pattern on the flexible substrate. According to this configuration, the sensor element can be formed as an electronic circuit pattern on the flexible substrate together with a wiring pattern or the like. Therefore, the process of gluing or soldering the sensor element to the flexible substrate can be omitted, and the sensor element can be easily incorporated into the flexible substrate. Furthermore, the sensor element can be handled including the flexible substrate, making it easy to handle the sensor element.

[0016] In a seventh aspect, a plurality of the sensor elements are provided, and the spacer has through-holes penetrating in the thickness direction formed at positions corresponding to each of the sensor elements. With this configuration, when a plurality of sensor elements are attached to the thin-walled portion, the thickness of the adhesive at each through-hole can be easily controlled.

[0017] In an eighth aspect, the through-hole is connected to the outer periphery of the spacer. With this configuration, excess adhesive can be released from the through-hole that is connected to the outer periphery of the spacer. Therefore, the amount of adhesive filled in the through-hole can be stabilized, and it is easy to keep the thickness of the adhesive constant. [Brief description of the drawings]

[0018] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] Cross-sectional view taken along line 3-3 in Figure 2. [Figure 4] FIG. 13 is a bottom view of a modified flexible substrate assembly. [Diagram 5] FIG. 13 is a bottom view of another modified example of the flexible substrate assembly. [Figure 6] FIG. 13 is a bottom view of another modified example of the flexible substrate assembly. [Figure 7] FIG. 13 is a bottom view of another modified example of the flexible substrate assembly. [Figure 8] FIG. 13 is a bottom view of another modified example of the flexible substrate assembly. [Figure 9] FIG. 11 is a cross-sectional view of a modified example of the sensor element mounting structure. [Figure 10] FIG. 11 is a cross-sectional view of another modified example of the sensor element mounting structure. [Figure 11] FIG. 11 is a cross-sectional view of another modified example of the sensor element mounting structure. [Figure 12] FIG. 13 is a bottom view of another modified example of the flexible substrate assembly. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Hereinafter, a first embodiment of a sensor element mounting structure in which a sensor element is mounted on a strain wave gear device provided at a joint of a robot will be described with reference to the drawings.

[0020] As shown in FIG. 1, the sensor element mounting structure 10 includes a member 20, a flexible substrate assembly 30, an adhesive 60, and the like.

[0021] The member 20 is a flexible gear, a connecting member, a housing, or the like, included in a strain wave gear device (reduction gear), and has a thick portion 20a and a thin portion 20b.

[0022] As shown in both FIGS. 2 and 3, the flexible substrate assembly 30 includes a flexible substrate 31, a sensor element 40, a spacer 50, and the like.

[0023] The flexible substrate 31 is a well-known FPC (Flexible Printed Circuits). For example, the flexible substrate 31 is formed by forming an adhesive layer on a base film, which is a thin-film insulator, bonding a conductor pattern (conductor foil) on the adhesive layer, and covering the portions other than the terminal portions and the soldering portions with an insulating coverlay such as polyimide. The thickness of the flexible substrate 31 is, for example, 0.1 to 0.5 mm.

[0024] The sensor element 40 is a sensor element such as a torque sensor (strain gauge), a vibration sensor, a temperature sensor, a pressure sensor, or an optical sensor. The sensor element 40 includes, for example, an element portion and a lead (conductor) extending from the element portion, and the lead is soldered (surface mounted) to a soldering portion of the flexible substrate 31. In other words, the sensor element 40 is incorporated in the flexible substrate 31. Here, the shape of the sensor element 40 is depicted as a disk, but the shape of the sensor element 40 is arbitrary.

[0025] The spacer 50 is formed in a film shape of a certain thickness by insulating resin such as polyimide or fluororesin. The thickness of the spacer 50 is set to, for example, 0.05 to 0.2 mm depending on the type of the sensor element 40 and the thickness of the adhesive 60 to be adjusted. The spacer 50 is attached to the surface of the flexible substrate 31 opposite to the surface to which the sensor element 40 is attached. In a state in which the flexible substrate assembly 30 (sensor element 40) is attached to the thin portion 20b of the member 20, the spacer 50 is sandwiched between the thin portion 20b and the flexible substrate 31. Note that when the material of the coverlay of the flexible substrate 31 and the material of the spacer 50 are the same, the spacer 50 can be molded integrally with the coverlay.

[0026] The spacer 50 has a through hole 51 formed therethrough in the thickness direction. The through hole 51 (through portion) is formed larger than the sensor element 40 and includes the sensor element 40 when viewed from below. That is, the through hole 51 is formed at a position overlapping the sensor element 40. Here, the cross-sectional shape of the through hole 51 is shown as a square, but the shape of the through hole 51 is arbitrary.

[0027] The adhesive 60 is, for example, a thermosetting adhesive. The adhesive 60 is filled in the through holes 51 of the spacer 50. The adhesive 60 is cured by heating to bond the thin portion 20b of the member 20 and the flexible substrate 31. The adhesive 60 may be a room temperature curing adhesive, a two-part mixture adhesive, or the like.

[0028] Next, a procedure for attaching the sensor element 40 to the thin portion 20b of the member 20 (a manufacturing method for the sensor element attachment structure) will be described. The following procedure may be performed by a worker or a production machine such as a robot.

[0029] First, a flexible substrate 31 on which a predetermined conductor pattern is formed is prepared.

[0030] Subsequently, the leads of the sensor element 40 are soldered to the soldering portions of the flexible substrate 31. That is, the sensor element 40 is mounted (attached) to the upper surface (first surface) of the flexible substrate 31.

[0031] Next, the spacer 50 is attached (contacted or adhered) to the bottom surface (the second surface opposite to the first surface) of the flexible substrate 31. At this time, the position of the spacer 50 is determined with respect to the flexible substrate 31 so that the center of the through hole 51 of the spacer 50 coincides with the center of the sensor element 40 when viewed from below. With the above steps, the flexible substrate assembly 30 is completed.

[0032] Next, adhesive 60 is injected into through-hole 51. At this time, through-hole 51 is filled with adhesive 60 so that no void is formed.

[0033] Next, the spacer 50 is pressed against the thin portion 20b of the member 20 at a position where the flexible substrate assembly 30 (sensor element 40) is to be attached. That is, the flexible substrate 31 is pressed against the thin portion 20b via the spacer 50. This adjusts the thickness of the adhesive 60 to a constant thickness of the spacer 50. At this time, excess adhesive 60 may be pushed out from the through hole 51.

[0034] Next, the member 20 and the flexible board assembly 30 are heated to harden the adhesive 60. Through the above steps, the sensor element mounting structure 10 is completed (manufactured).

[0035] The present embodiment described above in detail has the following advantages.

[0036] The sensor element 40 is incorporated in the flexible substrate 31. The spacer 50 is formed in a film shape of a constant thickness and is sandwiched between the thin portion 20b and the flexible substrate 31. Therefore, when the flexible substrate 31 is pressed against the thin portion 20b via the spacer 50, the distance between the thin portion 20b and the flexible substrate 31 can be adjusted to the constant thickness of the spacer 50.

[0037] The spacer 50 has a through hole 51 penetrating in the thickness direction formed at a position overlapping the sensor element 40. The adhesive 60 is filled in the through hole 51 and bonds the thin portion 20b and the flexible substrate 31. Therefore, by injecting the adhesive 60 into the through hole 51 and pressing the flexible substrate 31 against the thin portion 20b via the spacer 50, the thickness of the adhesive 60 can be adjusted to a constant thickness of the spacer 50. That is, the thickness of the adhesive 60 can be controlled by the thickness of the spacer 50. Therefore, even when the sensor element 40 incorporated in the flexible substrate 31 is attached to the thin portion 20b of the member 20, the thickness of the adhesive 60 can be easily controlled. Furthermore, it is easy to make the thickness of the film-like spacer 50 constant, and the thickness of the adhesive 60 can be stabilized even in mass-produced products, making it easy to properly control the adhesive strength and the distance between the thin portion 20b and the sensor element 40.

[0038] The above embodiment can be modified as follows: The same parts as those in the above embodiment are denoted by the same reference numerals and the description thereof will be omitted.

[0039] 4, a groove 52 that connects the outer periphery of the spacer 50 to the through hole 51 may be formed in the spacer 50. With this configuration, when a larger amount of adhesive 60 is injected into the through hole 51 and the spacer 50 is pressed against the thin-walled portion 20b, the excess adhesive 60 can be released through the groove 52. This makes it easier to fill the through hole 51 with adhesive 60 and makes it possible to make the thickness of the adhesive 60 more stable.

[0040] As shown in FIG. 5, the spacer 50 may be formed with an adhesive reservoir 54, which is a through hole that does not communicate with the outer periphery, and the through hole 51 and the adhesive reservoir 54 may be communicated with each other by a groove 53. Even with this configuration, when a larger amount of adhesive 60 is injected into the through hole 51 and the spacer 50 is pressed against the thin-walled portion 20b, the excess adhesive 60 can be released from the groove 53 to the adhesive reservoir 54. This makes it easier to fill the through hole 51 with the adhesive 60, and makes it possible to make the thickness of the adhesive 60 more stable. Note that the groove 53 may be omitted and the through hole 51 and the adhesive reservoir 54 may be directly communicated with each other.

[0041] As shown in FIG. 6, the flexible board assembly 30 (sensor element mounting structure 10) includes a plurality of sensor elements 40, and the spacer 50 may have through holes 51 penetrating in the thickness direction at positions corresponding to the respective sensor elements 40. With this configuration, when mounting the plurality of sensor elements 40 to the thin-walled portion 20b, the thickness of the adhesive 60 at each of the through holes 51 can be easily controlled. Furthermore, the position of the adhesive 60 relative to each sensor element 40 can be accurately determined. Moreover, the plurality of sensor elements 40 can be collectively wired by the flexible board 31.

[0042] As shown in FIG. 7, the spacer 50 may have a through hole 55 penetrating in the thickness direction formed at a position not overlapping the sensor element 40. With this configuration, when the flexible substrate 31 is bonded to the thin portion 20b in addition to the sensor element 40, the thickness of the adhesive 60 can be easily controlled in that portion. Furthermore, the flexible substrate 31 can be prevented from floating from the thin portion 20b, and the floating flexible substrate 31 can be prevented from vibrating and adversely affecting the detection by the sensor element 40. Furthermore, the shape and size of the through hole 51 formed at the spacer 50 in the position overlapping the sensor element 40 are the same as those of the through hole 55 formed at the position not overlapping the sensor element 40. With this configuration, the flexible substrate 31 has through holes 51 and 55 of the same shape and size formed in the sensor element 40 portion and the portion other than the sensor element 40. Therefore, when the flexible substrate 31 is bonded to the thin portion 20b in addition to the sensor element 40, the through holes 51 and 55 are easily formed, and the shape and size of the through holes 51 and 55 can be easily controlled. Furthermore, the amount of adhesive 60 injected into through hole 55 can be made constant, improving mass productivity. The shape of through hole 51 and the shape of through hole 55 can also be made different. The size of through hole 51 and the size of through hole 55 can also be made different.

[0043] As shown in Fig. 8, in the spacer 50, a notch 57 can be formed instead of the through hole 51. The notch 57 (through portion) penetrates the spacer 50 in the thickness direction. The notch 57 is formed in the spacer 50 at a position overlapping the sensor element 40, and communicates with the outer periphery of the spacer 50. With this configuration, it is possible to achieve the same effects as the configuration in Fig. 4.

[0044] As shown in FIG. 9, the flexible substrate assembly 130 may include a flexible substrate 131 on which a sensor element 140 is formed as an electronic circuit pattern. The sensor element 140 is formed, for example, by a resistor pattern and a conductor pattern, and is covered by a coverlay of the flexible substrate 131. That is, the sensor element 140 is incorporated in the flexible substrate 131. With this configuration, the sensor element 140 can be formed as an electronic circuit pattern on the flexible substrate 131 together with a wiring pattern (conductor pattern) and the like. Therefore, the process of adhering or soldering the sensor element 140 to the flexible substrate 131 can be omitted, and the sensor element 140 can be easily incorporated in the flexible substrate 131. Furthermore, the sensor element 140 can be handled including the flexible substrate 131, and the sensor element 140 can be easily handled.

[0045] 10, in a flexible substrate assembly 230, the sensor element 40 may be housed in a through hole 51 of a spacer 50. In this case as well, the spacer 50 is sandwiched between the thin portion 20b and the flexible substrate 31, and the through hole 51 is formed at a position overlapping the sensor element 40. In addition, an adhesive 60 is filled in the through hole 51, and bonds the thin portion 20b to the flexible substrate 31 and the sensor element 40.

[0046] As shown in FIG. 11, in the flexible substrate assembly 330, the spacer 50 may be sandwiched between the thin portion 20b and the sensor element 340. In the spacer 50, the through hole 51 is formed at a position overlapping a part of the sensor element 340. The adhesive 60 bonds the thin portion 20b and the sensor element 340. According to this configuration, in a state in which the sensor element 340 is pressed against the thin portion 20b via the spacer 50, the distance between the thin portion 20b and the sensor element 340 can be adjusted to a constant thickness of the spacer 50. Therefore, by injecting the adhesive 60 into the through hole 51 and pressing the sensor element 340 against the thin portion 20b via the spacer 50, the thickness of the adhesive 60 can be adjusted to a constant thickness of the spacer 50. That is, the thickness of the adhesive 60 can be controlled by the thickness of the spacer 50. Therefore, even when the sensor element 340 incorporated in the flexible substrate 31 is attached to the thin portion 20b of the member 20, the thickness of the adhesive 60 can be easily controlled. Furthermore, it is easy to make the thickness of the film-like spacer 50 constant, and the thickness of the adhesive 60 can be stabilized even in mass-produced products, making it easier to properly manage the adhesive strength and the distance between the thin-walled portion 20b and the sensor element 340.

[0047] The thin portion 20b may be formed in an annular shape, and the flexible substrate 431 and the spacer 450 may be formed in an annular shape along the thin portion 20b as shown in FIG. 12. The flexible substrate assembly 430 (sensor element mounting structure 10) includes a plurality of sensor elements 40, and the spacer 450 has a through hole 451 penetrating in the thickness direction formed at a position corresponding to each sensor element 40. The spacer 450 also has a through hole 455 penetrating in the thickness direction formed at a position not overlapping with the sensor element 40. With this configuration, when the flexible substrate 431 is bonded in accordance with the shape of the thin portion 20b, the thickness of the adhesive 60 can be easily controlled at each bonding portion. In addition, a groove 452 that connects the outer periphery of the spacer 450 to the through hole 451 is formed in the spacer 450. A groove 456 that connects the outer periphery of the spacer 450 to the through hole 455 is formed in the spacer 450.

[0048] In the member 20, the thin portion 20b is not limited to a flat plate-like portion, but may be a curved plate-like portion. [Explanation of symbols]

[0049] 10...sensor element mounting structure, 20...member, 20b...thin portion, 31...flexible substrate, 40...sensor element, 50...spacer, 51...through hole (through portion), 55...through hole (through portion), 57...notch (through portion), 60...adhesive, 131...flexible substrate, 140...sensor element, 340...sensor element, 431...flexible substrate, 450...spacer, 451...through hole (through portion), 455...through hole (through portion).

Claims

1. A thin-walled portion of the member; A flexible substrate; A sensor element incorporated in the flexible substrate; a spacer formed in a film shape of a certain thickness and sandwiched between the thin portion and the flexible substrate, the spacer having a through portion penetrating in a thickness direction formed at a position overlapping the sensor element; an adhesive that is filled in the through-hole and bonds the thin-walled portion and the flexible substrate; A sensor element mounting structure comprising:

2. A thin-walled portion of the member; A flexible substrate; A sensor element incorporated in the flexible substrate; a spacer formed in a film shape of a constant thickness and sandwiched between the thin-walled portion and the sensor element, the spacer having a through-portion penetrating in the thickness direction formed at a position overlapping a part of the sensor element; an adhesive that is filled in the through-hole and bonds the thin-walled portion and the sensor element; A sensor element mounting structure comprising:

3. 3. The sensor element mounting structure according to claim 1, wherein the spacer has a through-portion penetrating therethrough in a thickness direction thereof, the through-portion also being formed at a position not overlapping the sensor element.

4. The thin-walled portion is formed in an annular shape, 4. The sensor element mounting structure according to claim 3, wherein the flexible substrate and the spacer are formed in an annular shape along the thin portion.

5. 5. The sensor element mounting structure according to claim 3, wherein the shape and size of the through-portion formed in the spacer at a position overlapping the sensor element are identical to the shape and size of the through-portion formed in a position not overlapping the sensor element.

6. 6. The sensor element mounting structure according to claim 1, wherein the sensor element is formed as an electronic circuit pattern on the flexible substrate.

7. A plurality of the sensor elements are provided, 7. The sensor element mounting structure according to claim 1, wherein the spacer has through-portions extending therethrough in a thickness direction thereof at positions corresponding to the respective sensor elements.

8. 8. The sensor element mounting structure according to claim 1, wherein the through portion communicates with an outer periphery of the spacer.

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