Manual holding device

Abstract

To provide a manual holding device which inhibits falling of workpiece during an operation and achieves high operability.SOLUTION: One embodiment of the invention relates to a manual holding device which suctions and holds workpiece and includes: a body which can be held by a hand of a worker; a holding part which is provided at one end side of the body and suctions and holds the workpiece in a bernoulli method; a valve which opens or closes between an inflow passage and an outflow passage in an air flow passage allowing the body and the holding part to communicate with each other; and an operation part for allowing the worker to manually switch opening / closing of the valve. The valve is provided so as to be movable in a direction which is substantially vertical to a direction in which the inflow passage and the outflow passage extend and is biased in a direction such that the passage is opened by a pressure of air flowing toward the valve. In a state that the worker does not apply pressing force to the operation part, the passage is opened by the valve to enable the workpiece to be held by the holding part. In a state that the worker applies the pressing force to the operation part, the passage is closed by the valve to enable the workpiece to be separated from the holding part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a manual holding device, and more particularly to a manual holding device that suction-holds a workpiece such as a semiconductor substrate or a glass substrate by the Bernoulli method. [Background technology]

[0002] In recent years, with the trend towards lighter, thinner, shorter and smaller products and larger data volumes, there has been a remarkable evolution in microfabrication technology applied to the surfaces of semiconductor substrates, glass substrates, etc. The processing technology has an accuracy of less than single-digit μm units, and as a means of realizing this accuracy, a desired pattern can be written on the substrate to be processed by exposure or laser irradiation while positioning or moving the substrate with high precision, making it possible to achieve high density and high definition.

[0003] In addition to the conventional single-sided processed products, the number of double-sided processed products is increasing. In addition, the manufacturing process that makes these processes possible must be carried out in an extremely clean environment, and it goes without saying that the surface that has been subjected to fine processing must not be touched.

[0004] For this reason, conventional pick-and-place workpiece holding devices for handling the workpieces, such as "mechanical chucks" that clamp and hold the workpiece, and "suction pads" that hold the workpiece by vacuum suction with a suction cup, have been used. Recently, non-contact holding methods that are an alternative to these contact holding methods have been attracting attention and demand is increasing.

[0005] Non-contact holding is required in applications such as gripping semiconductor wafers, solar cell, glass substrates, etc., mainly high value-added products, where damage, breakage, particles, metal contamination, and suction marks caused by physical contact when holding the workpiece cannot be tolerated.

[0006] As such a non-contact holding device, Patent Documents 1 to 6 disclose a non-contact holding device that holds a workpiece using the Bernoulli method. In the Bernoulli method, high-pressure gas is sprayed from a nozzle provided on the suction surface of the suction holding plate, and the workpiece is suctioned and held in a non-contact state on the suction surface of the suction holding plate by the effect of negative pressure generated between the suction surface and the surface of the workpiece. Patent Documents 7 to 11 disclose manual non-contact holding devices. In the manual type, a suction holding part for the workpiece is provided on one end of the main body that serves as a handle, and suction and release of the workpiece can be switched by a switch or lever. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 11-223521 [Patent Document 2] JP 2001-353683 A [Patent Document 3] JP 2006-114640 A [Patent Document 4] JP 2007-329375 A [Patent Document 5] JP 2008-087910 A [Patent Document 6] JP 2008-284671 A [Patent Document 7] Japanese Patent Application Publication No. 05-177570 [Patent Document 8] JP 2004-186363 A [Patent Document 9] JP 2006-289559 A [Patent Document 10] JP 2007-067054 A [Patent Document 11] JP 2014-033142 A Summary of the Invention [Problem to be solved by the invention]

[0008] In a Bernoulli-type non-contact holding device, compressed air is supplied from a supply port, and the workpiece is sucked in by the fluid effect created by the compressed air ejected from a nozzle installed on the suction surface side, so compressed air is constantly consumed while the workpiece is being held. Therefore, from the perspective of reducing the consumption of compressed air, the control of the compressed air on-off valve that performs non-contact suction control is based on the logic that stops the flow of compressed air when the hand is released. For this reason, if the switch or lever is not held down by hand while continuing to hold the workpiece and compressed air is not continued to flow, the workpiece will fall off.

[0009] Furthermore, when a switch or lever is operated to switch between holding and releasing a workpiece, ease of operation is required that allows the operator to clearly switch between "holding" and "release" in response to the operator's operation.

[0010] An object of the present invention is to provide a manual holding device that is easy to operate and prevents a workpiece from accidentally falling off during operation. [Means for solving the problem]

[0011] In order to solve the above problems, one aspect of the present invention is a manual holding device that adsorbs and holds a workpiece, comprising a main body that can be held by hand by an operator, a holding section provided at one end of the main body and that adsorbs and holds the workpiece using the Bernoulli method, a valve that opens and closes between an inlet and an outlet in an air flow path connecting the main body and the holding section, and an operating section for the operator to manually switch between opening and closing the valve, wherein the valve is provided to be movable in a direction approximately perpendicular to the extension direction of the inlet and outlet paths, and is biased in a direction to open the flow path by the air pressure directed toward the valve, so that when the operator is not applying pressure to the operating section, the valve opens the flow path allowing the workpiece to be held by the holding section, and when the operator applies pressure to the operating section, the valve closes the flow path allowing the workpiece to be removed from the holding section.

[0012] According to this configuration, the valve is provided so as to be movable in a direction substantially perpendicular to the direction in which the inflow and outflow paths extend, so that the valve can clearly switch between opening and closing the flow path. Also, since the operator holds the workpiece without applying any pressing force to the operating unit, no burden is placed on the operator while the workpiece is being held. Furthermore, since the valve is biased by air in a direction that opens the flow path, the valve is prevented from closing while the workpiece is being held, making it easier to maintain the holding state of the workpiece.

[0013] In the above-mentioned manual holding device, it is preferable that the valve is provided with a recess that receives the biasing means for biasing in the direction to open the flow path and receives air pressure, so that the bottom surface (pressure receiving surface) of the recess provided in the valve can receive both the biasing force from the biasing means and the air pressure.

[0014] In the above-mentioned manual holding device, the valve may be configured to close the outlet passage and not close the inlet passage when the flow path is closed by the valve, so that the valve can be biased by air flowing in from the inlet passage even when the flow path is closed by the valve.

[0015] In the above-mentioned manual holding device, the valve is preferably movably provided within the cylinder, and the positions of the inlet port communicating with the inlet passage provided in the cylinder and the outlet port communicating with the outlet passage in the direction of movement of the valve are different from each other. By utilizing the difference in the positions of the inlet port and the outlet port in the cylinder, the valve can be biased by air flowing in from the inlet passage even when the flow passage is closed by the valve.

[0016] In the above-mentioned manual holding device, it is preferable that a space communicating with the inlet passage is provided between the valve and the cylinder when the outlet port is closed by the valve, so that air can flow from the inlet passage into the space between the valve and the cylinder to bias the valve even when the flow path is closed by the valve.

[0017] In the above-mentioned manual holding device, the inlet and outlet passages preferably have an orifice shape, which allows the air flow rate in the inlet and outlet passages to be optimized.

[0018] In the above-mentioned manual holding device, it is preferable that the holding part is provided with a guide part that abuts against the edge of the workpiece when the workpiece is sucked and suppresses horizontal positional deviation of the workpiece. In this way, the guide part abuts only against the edge of the workpiece while sucking the workpiece without contacting the surface of the workpiece, thereby suppressing horizontal positional deviation of the workpiece.

[0019] One aspect of the present invention is a manual holding device that adsorbs and holds a workpiece, the manual holding device comprising: a main body that can be held by hand by an operator; a holding section provided at one end of the main body that adsorbs and holds the workpiece using the Bernoulli method; a valve that opens and closes between an inlet and an outlet in an air flow path that connects the main body and the holding section; and an operating section for the operator to manually switch between opening and closing the valve, wherein the operating section and the valve are slidably provided in the direction in which the main body extends, and when the operating section and the valve are in a first position, the inlet and outlet paths are connected via a bypass flow path provided in the valve, allowing the workpiece to be held by the holding section, and when the operating section and the valve are in a second position, communication between the inlet and outlet paths via the bypass flow path is blocked, allowing the workpiece to be removed from the holding section.

[0020] With this configuration, the operating unit and the valve can be slid in the direction in which the main body extends to clearly switch between holding the workpiece in the first position and releasing the hold of the workpiece in the second position. Furthermore, when the operating unit and the valve are in the first position, the operation of holding the workpiece can be maintained without imposing a burden on the operator. Furthermore, when the operating unit and the valve are in the second position, the flow path can be kept blocked without imposing a burden on the operator.

[0021] It is preferable that the above-mentioned manual holding device further includes a locking mechanism for fixing the operation portion and the valve in the second position. Such a locking mechanism can reliably lock the second position, which blocks the flow path.

[0022] The above-mentioned manual holding device may further include a resistance applying part that applies resistance to the sliding movement of the operating part and the valve when they reach the first position and the second position, respectively. This allows the operator to recognize that the operating part and the valve have reached the first position or the second position by the resistance applied by the resistance applying part, making it easier to maintain each position. Effect of the Invention

[0023] According to the present invention, it is possible to provide a manual holding device that is easy to operate and prevents the workpiece from accidentally falling off during operation. [Brief description of the drawings]

[0024] [Figure 1] FIG. 1 is a perspective view illustrating a manual holding device according to a first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view illustrating a manual holding device according to the first embodiment. [Diagram 3] 3(a) and 3(b) are enlarged cross-sectional views illustrating a valve of the manual holding device according to the first embodiment. [Figure 4] 1(a) and 1(b) are enlarged cross-sectional views illustrating a configuration example (part 1) of the valve. [Diagram 5] 13(a) and (b) are enlarged cross-sectional views illustrating a second example of the valve configuration. [Figure 6] 13(a) and (b) are enlarged cross-sectional views illustrating a third example of the valve configuration. [Figure 7] 13(a) and (b) are enlarged cross-sectional views illustrating a fourth example of the valve configuration. [Figure 8] FIG. 4 is an exploded perspective view illustrating the configuration of a holding portion. [Figure 9]13(a) to 13(e) are plan views illustrating adjustment of the rotation angle of the holding portion. [Figure 10] 13(a) and (b) are side views illustrating an example of adjusting the angle between the holding portion and the main body. [Figure 11] FIG. 11 is a perspective view illustrating a manual holding device according to a second embodiment. [Figure 12] 13(a) and 13(b) are enlarged cross-sectional views illustrating a valve of a manual holding device according to a second embodiment. [Figure 13] 13(a) and 13(b) are diagrams illustrating an example of a locking mechanism. [Figure 14] FIG. 2 is a schematic diagram showing a first example of use of the manual holding device according to the present embodiment. [Figure 15] FIG. 11 is a schematic diagram showing a second example of use of the manual holding device according to the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the same members are designated by the same reference numerals, and the description of members that have already been described will be omitted as appropriate.

[0026] (First embodiment) FIG. 1 is a perspective view illustrating a manual holding device according to the first embodiment. FIG. 2 is a cross-sectional view illustrating the manual holding device according to the first embodiment. The manual holding device 1A according to this embodiment is a device that holds the workpiece W by suction manually by an operator.

[0027] The manual holding device 1A comprises a main body 10 that can be held by an operator in his / her hand, a holding part 20 provided on one end side of the main body 10, a valve 30 that opens and closes an air flow path 100 connecting the main body 10 and the holding part 20, and an operating part 40 that allows the operator to manually switch between opening and closing the valve 30.

[0028] The workpiece W to be held by the manual holding device 1A is suitably a thin plate-like object such as a semiconductor substrate or a glass substrate. The manual holding device 1A uses a Bernoulli method in which compressed air is sent into a flow path 100 that communicates from the main body 10 to the holding part 20, and the high-pressure air is sprayed from a nozzle provided in the holding part 20, so that the workpiece W is adsorbed and held by the holding part 20 due to the effect of negative pressure generated between the adsorption surface of the holding part 20 and the surface of the workpiece W.

[0029] The main body 10 is provided, for example, in a cylindrical shape that can be held by an operator, with a flow path 100 penetrating through the inside. The operator holds the main body 10 in his / her hand to perform tasks such as holding and moving the workpiece W. The main body 10 is made of, for example, a resin (such as PEEK). A holding part 20 is provided at one end of the main body 10, and a hose H for supplying air (preferably clean air) is connected to the other end. A cock 50 may be provided between the hose H and the main body 10. The cock 50 switches between supplying and stopping air from the hose H.

[0030] The holding unit 20 is a part that suction-holds the workpiece W by the Bernoulli method. The holding unit 20 is provided with a flow path 100 that communicates with the main body 10, and suction-holds the workpiece W by injecting air supplied from a hose H. The holding unit 20 will be described in detail later.

[0031] The valve 30 is provided between the main body 10 and the holding part 20. In this embodiment, the valve 30 is incorporated inside the valve structure Ba connected between the main body 10 and the holding part 20. The valve 30 is provided in the valve box 300, and opens and closes the air flow path 100 between an inflow path 1001 and an outflow path 1002 in the air flow path 100 that communicates between the main body 10 and the holding part 20. The valve 30 is provided so as to be movable in a direction approximately perpendicular to the extending direction of the inflow path 1001 and the outflow path 1002 provided in the valve box 300. The valve 30 and the valve box 300 are formed with high precision, for example, by cutting aluminum.

[0032] The opening and closing of the flow path 100 by the valve 30 is manually switched by an operator using the operation unit 40. In this embodiment, the operation unit 40 is a lever type. When the lever type operation unit 40 is pressed with a finger, the valve 30 is pushed in, and when the finger is released, the operation unit 40 is returned to its original position by the biasing force applied to the valve 30.

[0033] 3(a) and (b) are enlarged cross-sectional views illustrating the valve of the manual holding device according to the first embodiment. Fig. 3(a) shows a state in which the flow path 100 is opened by the valve 30, and Fig. 3(b) shows a state in which the flow path 100 is closed by the valve 30. The valve box 300 is provided with an inlet passage 1001 communicating with the passage 100 on the main body 10 side, and an outlet passage 1002 communicating with the passage 100 on the holding part 20 side. A cylinder 35 is provided between the inlet passage 1001 and the outlet passage 1002 in the valve box 300, and the valve 30 is incorporated in this cylinder 35. The valve 30 is provided so as to be movable along the cylinder 35. This allows the valve 30 to move in a direction approximately perpendicular to the direction in which the inlet passage 1001 and the outlet passage 1002 extend.

[0034] The valve 30 has a valve body 301 and a protruding part 302 protruding upward from the valve body 301. With the valve 30 incorporated in the cylinder 35, a cap 3001 is placed over the cylinder 35 of the valve box 300. A hole 3001h having an inner diameter smaller than the inner diameter of the cylinder 35 is provided in the cap 3001, and the protruding part 302 of the valve 30 protrudes upward from this hole 3001h and abuts against the operating part 40.

[0035] A seal 3002 is provided between the cap 3001 and the valve box 300. When the valve 30 is in the uppermost position (see FIG. 3(a)), the step portion (shoulder portion) between the valve body 301 and the protruding portion 302 abuts against the seal 3002, suppressing air leakage from the gap between the cylinder 35 and the hole 3001h of the cap 3001.

[0036] A flange portion 303 is provided on the protruding portion 302 of the valve 30, and a seal 3031 is provided below the flange portion 303. When the valve 30 is in the lowest position (see FIG. 3(b)), the seal 3031 below the flange portion 303 comes into contact with the cap 3001, suppressing air leakage from the hole 3001h.

[0037] In the manual holding device 1A according to this embodiment, when the operator is not applying a pressing force to the operation unit 40 (see FIG. 3(a)), the valve 30 opens the flow path 100. When the flow path 100 is open, air is sent from the main body 10 to the holding unit 20, and the Bernoulli effect of the air ejected from the holding unit 20 enables the workpiece W to be adsorbed and held by the holding unit 20.

[0038] On the other hand, when the operator applies a pressing force to the operation unit 40 (see FIG. 3(b)), the flow path 100 is closed by the valve 30. Closing the flow path 100 blocks the air flowing from the main body 10 to the holding unit 20, and the workpiece W becomes removable from the holding unit 20.

[0039] In this way, with the manual holding device 1A according to this embodiment, the operator holds the workpiece W without applying any pressing force to the operating unit 40, so no burden is placed on the operator while he or she is holding the workpiece W. In other words, the operator can hold the workpiece W without applying force to the operating unit 40, and can transport the workpiece W to the destination as is. Since no force is applied to the operating unit 40 even during transport, the burden on the operator can be reduced, and the workpiece W can be prevented from being dropped by mistake. When it is desired to release the workpiece W, the operating unit 40 is simply pressed.

[0040] Moreover, in this embodiment, the valve 30 is biased by air pressure in a direction to open the flow path 100. That is, when the flow path 100 is open by the valve 30, the valve 30 is located at an upper position within the cylinder 35, and air flows below the valve 30 within the cylinder 35. The air pressure at this time biases the valve 30 upward, and the valve 30 acts in a direction to maintain the flow path 100 in an open state. This prevents the valve 30 from closing while the workpiece W is being held, making it easier to maintain the state in which the workpiece W is held.

[0041] It is preferable to provide air purifying means such as a filter with high filtering ability in the flow path 100 downstream of the valve box 300. By filtering fine dust particles generated slightly by the sliding of the valve body 301 inside the cylinder 35 with the air purifying means, clean air can be supplied to the holding part 20. This makes it possible to accommodate suction and holding of the workpiece W, which requires a higher degree of cleanliness.

[0042] Next, a configuration example of the valve (valve structure) will be described. 4(a) and (b) are enlarged cross-sectional views illustrating a configuration example (part 1) of the valve. The valve structure Ba has a valve box 300, a valve 30, and a cap 3001. The valve box 300 is provided with a cylinder 35, an inlet passage 1001, and an outlet passage 1002. The cylinder 35 is provided with an inlet port PT1 communicating with the inlet passage 1001 provided in the valve box 300, and an outlet port PT2 communicating with the outlet passage 1002.

[0043] 4(a) and (b), a recess 304 is provided from the lower end of the valve body 301 to the center inside. The recess 304 is a portion that receives a coil spring 38, which is an example of a biasing means, incorporated in the cylinder 35. The coil spring 38 presses the valve 30 upward (see arrow D1), biasing the valve 30 in a direction that opens the flow path 100.

[0044] Further, the recess 304 receives the biasing force from the coil spring 38, and also receives the pressure of the air flowing into the cylinder 35 from the inflow passage 1001 (see arrow D2).

[0045] 4(a), when the valve body 301 is located at the upper part in the cylinder 35, neither the inflow port PT1 nor the outflow port PT2 is blocked by the valve body 301, and the air that has flowed into the cylinder 35 from the inflow passage 1001 via the inflow port PT1 flows out to the outflow passage 1002 via the outflow port PT2 (see arrows D3 to D5). At this time, the pressure of the air that has flowed into the cylinder 35 is received by the recess 304 of the valve body 301, and urges the valve 30 upward (see arrow D2).

[0046] As shown in FIG. 4(b), the protruding portion 302 of the valve 30 is pressed (see arrow D6) by the operating portion 40 (see FIGS. 1 to 3) so that the valve body 301 is inserted into the cylinder. 35 When the valve body 301 is located at the lower part of the inside of the valve 301, the outlet port PT2 is blocked by the valve body 301. This closes the flow path 100 and prevents air from flowing into the outlet path 1002. of On the other hand, even when the outlet passage 1002 is closed by the valve 30, the valve 30 is urged upward by the air flowing in from the inlet passage 1001 (see arrow D2).

[0047] In the configuration example (part 1) of the valve 30, the positions (heights) of the inflow port PT1 and the outflow port PT2 in the cylinder 35 in the movement direction of the valve 30 are different from each other. In this example, the outflow port PT2 is located higher in the cylinder 35 than the inflow port PT1. By utilizing the difference in the positions of the inflow port PT1 and the outflow port PT2 in the cylinder 35, the valve 30 can be biased by the air flowing in from the inflow path 1001 even in a state in which the flow path 100 is closed by the valve 30.

[0048] In the configuration example (part 1) of the valve 30, a reduced diameter portion 301a having a smaller diameter than the central portion of the valve body 301 is provided on the lower end side of the valve body 301, so that a gap can be formed between the reduced diameter portion 301a of the valve body 301 and the cylinder 35.

[0049] 4(a), when the valve body 301 is located at the upper part inside the cylinder 35, the lower end of the valve body 301 is located above the inflow port PT1, and the reduced diameter part 301a of the valve body 301 faces the outflow port PT2. As a result, air that has flowed into the cylinder 35 from the inflow port PT1 passes from the space below the valve body 301 through the gap between the reduced diameter part 301a and the cylinder 35, and is sent from the outflow port PT2 to the outflow path 1002 (see arrows D3 to D5).

[0050] As shown in Figure 4(b), by pressing the protrusion 302 of the valve 30 with the operating unit 40 (see Figures 1 to 3) (see arrow D6), when the valve body 301 is positioned downward within the cylinder 35, the outflow port PT2 is closed at the portion above the reduced diameter portion 301a of the valve body 301, and the flow path 100 is blocked.

[0051] At this time, the inflow port PT1 faces the reduced diameter portion 301a of the valve body 301, the inflow port PT1 is not closed, and the air sent from the inflow path 1001 toward the cylinder 35 passes from the inflow port PT1 through a gap between the reduced diameter portion 301a and the cylinder 35 and enters the underside of the valve body 301. The air sent into the cylinder 35 from the inflow port PT1 enters the recess 304 of the valve body 301, and the pressure of this air is applied to the surface (pressure receiving surface 304a) which is the bottom (lower part) of the recess 304 when viewed in the vertical direction, thereby urging the valve 30 to press upward.

[0052] Therefore, even when the valve 30 is in a downward position and the flow path 100 is closed, the air flowing in from the inflow port PT1 exerts a biasing force in a direction pushing up the valve 30. For this reason, when the pressure from the operation unit 40 (see FIGS. 1 to 3) is released, the valve 30 and the operation unit 40 are pushed back by the biasing force of the coil spring 38 (see arrow D1) and the biasing force of the air (see arrow D2). By pushing the valve 30 upward, the flow path 100 is opened again.

[0053] In particular, when attempting to miniaturize the manual holding device 1A, the valve 30 also becomes smaller, and the coil spring 38 fitted into the recess 304 of the valve 30 also becomes smaller. When the valve 30 has an operating part 40 like a lever, the weight of the operating part 40 acts on the valve 30, making it difficult for the small coil spring 38 alone to counteract the weight of the operating part 40. In the configuration example (part 1) of the valve 30, the valve 30 can be pushed back by air pressure in addition to the biasing force of the coil spring 38, making it easier for even the small coil spring 38 to counteract the weight of the operating part 40.

[0054] Furthermore, when the valve body 301 is pressed upward by the biasing force of the air, the valve body 301 comes into close contact with the lower surface of the seal 3002, and the compressed air entering from the inflow path 1001 is less likely to leak from the hole 3001h. This allows the compressed air entering from the inflow path 1001 to flow efficiently into the outflow path 1002. This effect is similar to that in Figures 5 and 6 described below, so it will not be described in Figures 5 and 6.

[0055] 5(a) and (b) are enlarged cross-sectional views illustrating a second example of the valve configuration. In the structural example (part 2) of the valve 30 shown in FIGS. 5(a) and 5(b), the inflow port PT1 and the outflow port PT2 in the cylinder 35 are at the same position (height) in the movement direction of the valve 30.

[0056] 5(a), when the valve body 301 is located at the upper part in the cylinder 35, the lower end of the valve body 301 is located above the inflow port PT1 and the outflow port PT2. As a result, the air that has flowed into the cylinder 35 from the inflow passage 1001 via the inflow port PT1 flows out to the outflow passage 1002 via the outflow port PT2 (see arrows D3 to D5). At this time, the pressure of the air that has flowed into the cylinder 35 is received by the recess 304 of the valve body 301, and urges the valve 30 upward (see arrow D2).

[0057] As shown in FIG. 5(b), the protruding portion 302 of the valve 30 is pressed (see arrow D6) by the operating portion 40 (see FIGS. 1 to 3) so that the valve body 301 is inserted into the cylinder. 35When the valve body 301 is located at the lower part of the inside of the valve 301, the inlet port PT1 and the outlet port PT2 are blocked by the valve body 301. This closes the flow path 100, and the air flows into the outlet path 1002. of The outflow is prevented.

[0058] When the pressure applied by operation unit 40 (see FIGS. 1 to 3) is released, valve 30 and operation unit 40 are pushed back by the biasing force (see arrow D1) of coil spring 38. By pushing valve 30 upward, flow path 100 is opened again.

[0059] 6(a) and (b) are enlarged cross-sectional views illustrating a third example of the valve configuration. The structural example (third) of the valve 30 shown in Figures 6(a) and (b) differs from the structural example (first) of the valve 30 shown in Figures 4(a) and (b) in that the valve body 301 does not have a recess 304, the valve body 301 does not have a reduced diameter portion 301a, and the coil spring 38 is not provided.

[0060] 6(a), when the valve body 301 is located at the upper part in the cylinder 35, the lower end of the valve body 301 is located above the inflow port PT1 and the outflow port PT2. As a result, the air that flows into the cylinder 35 from the inflow passage 1001 via the inflow port PT1 flows out to the outflow passage 1002 via the outflow port PT2 (see arrows D3 to D5). At this time, the pressure of the air that flows into the cylinder 35 is received by the lower end surface 301b of the valve body 301, and the valve 30 is urged upward (see arrow D2). The lower end surface 301b is the pressure receiving surface 304a.

[0061] As shown in FIG. 6(b), the protruding portion 302 of the valve 30 is pressed (see arrow D6) by the operating portion 40 (see FIGS. 1 to 3) so that the valve body 301 is inserted into the cylinder. 35 When the valve body 301 is located at the lower part of the inside of the valve 301, the outlet port PT2 is blocked by the valve body 301. This closes the flow path 100 and prevents air from flowing into the outlet path 1002. ofOutflow is prevented. On the other hand, even when outflow path 1002 is closed by valve 30, inflow port PT1 is located below the lower end of valve body 301 and is therefore not blocked by valve body 301. As a result, air sent from inflow path 1001 toward cylinder 35 enters the space below valve body 301 in cylinder 35 from inflow port PT1. Then, the pressure of the air sent into cylinder 35 is received by lower end surface 301b of valve body 301, urging valve 30 upward (see arrow D2).

[0062] Therefore, even when the valve 30 is in a downward position and the flow path 100 is closed, the air flowing in from the inflow port PT1 exerts a biasing force in a direction pushing up the valve 30. For this reason, when the pressure from the operation unit 40 (see Figs. 1 to 3) is released, the valve 30 and the operation unit 40 are pushed back by the biasing force of the air (see arrow D2). By pushing the valve 30 upward, the flow path 100 is opened again.

[0063] In the configuration example (third) of the valve 30, the biasing force is applied to the valve 30 by air pressure, so the coil spring 38 is not necessary, which simplifies the structure and reduces the number of parts.

[0064] 7(a) and (b) are enlarged cross-sectional views illustrating a fourth example of the valve configuration. In a fourth structural example of the valve 30 shown in FIGS. 7(a) and 7(b), a groove 301c is provided on the outer periphery of the valve body 301.

[0065] 7(a), when the valve body 301 is located at the upper part in the cylinder 35, the position of the groove 301c on the outer periphery of the valve body 301 coincides with the positions of the inflow port PT1 and the outflow port PT2. The groove 301c is continuously provided from the position facing the inflow port PT1 to the position facing the outflow port PT2. As a result, air flowing in from the inflow passage 1001 passes through the groove 301c from the inflow port PT1 and flows out to the outflow passage 1002 via the outflow port PT2 (see arrows D3 to D5).

[0066] As shown in FIG. 6(b), when the protruding portion 302 of the valve 30 is pressed (see arrow D6) by the operating portion 40 (see FIGS. 1 to 3) and the valve body 301 is positioned downward in the cylinder 35, the position of the groove 301c does not match the positions of the inlet port PT1 and the outlet port PT2, and the inlet port PT1 and the outlet port PT2 are blocked by the valve body 301. This closes the flow path 100, and the air flows into the outlet path 1002. of The outflow is prevented.

[0067] When the pressure applied by the operating unit 40 (see FIGS. 1 to 3) is released, the valve 30 and the operating unit 40 are pushed back by the biasing force (see arrow D1) of the coil spring 38. By pushing the valve 30 upward, the position of the groove 301c again matches the positions of the inlet port PT1 and the outlet port PT2, and the flow path 100 is opened.

[0068] In any of the configuration examples of the valve 30, the valve 30 is arranged to be movable in a direction approximately perpendicular to the direction in which the inflow path 1001 and the outflow path 1002 extend, so that the valve 30 can clearly switch between opening and closing the flow path 100.

[0069] In addition, in any of the configuration examples of the valve 30, the inflow path 1001 and the outflow path 1002 preferably have an orifice shape. This makes it possible to optimize the flow rate of air in the inflow path 1001 and the outflow path 1002. In addition, since the inflow path 1001 and the outflow path 1002 have an orifice shape, it is not necessary to open and close the entire diameter of the flow path 100, and it becomes easier to clearly control the opening and closing of the flow path 100 with a short stroke by the valve 30.

[0070] Next, a configuration example of the holding portion will be described. FIG. 8 is an exploded perspective view illustrating the configuration of the holding portion. 8, the holding part 20 includes an arm part 21, a hub 22, a pressing plate 23, a guide support part 24, a base 25, and an adsorption surface member 26. The arm part 21 is attached so as to extend from a valve structure Ba having a valve 30, and has a flow path 100 therein.

[0071] Hub 22 is attached to the tip of arm portion 21, and pedestal 25 is fixed thereto by bolts or the like. Presser plate 23 and guide support portion 24 are sandwiched between hub 22 and pedestal 25. Central hole 24h of guide support portion 24 fits into cylindrical protrusion 25a of pedestal 25, supporting guide support portion 24 so as to be rotatable about its axis. An upper surface of pedestal 25 is provided with a circumferential groove 25b and a plurality of recesses 25c provided at a predetermined pitch along groove 25b.

[0072] The guide support part 24 has a hole 24a facing the groove 25b of the base 25, and a ball 241 is inserted into this hole 24a. The ball 241 inserted into the hole 24a is pressed from above by the pressing plate 23. The bottom of the ball 241 protrudes slightly downward from the hole 24a. The protruding part of the ball 241 enters the groove 25b of the base 25, and when the guide support part 24 is rotated around its axis, the ball 241 moves along the groove 25b. When the ball 241 matches the position of the recess 25c during the rotation of the guide support part 24 around its axis, the ball 241 fits into the recess 25c due to the pressing force of the pressing plate 23. At this position, the axial rotation position of the guide support part 24 is temporarily fixed.

[0073] When an external force strong enough to make the ball 241 overcome the recess 25c is applied to the guide support part 24, the guide support part 24 can rotate around its axis, and the ball 241 is temporarily fixed again at the point where it fits into the next recess 25c. This makes it possible to change the adjustment angle and adjustment pitch of the axial rotation of the guide support part 24 depending on the position, number and pitch of the multiple recesses 25c. Figures 9(a) to (e) are plan views illustrating adjustment of the axial rotation of the guide support part 24. In this way, the guide support part 24 can adjust the angle in the axial rotation direction at a predetermined pitch, and by providing the guide support part 24 so as to be axially rotatable, it becomes possible to appropriately set the angle of handling the workpiece W with respect to the direction of the hand holding the main body 10.

[0074] 8, air sent from the flow path 100 is sent from a hole 25h provided in the center of the base 25 to a gap (not shown) between the attraction surface member 26 and the base 25 and is then ejected. As a result, the workpiece W is attracted and held by the attraction surface member 26 in the Bernoulli manner.

[0075] The guide support part 24 is provided with a guide part 240 that abuts against the edge of the workpiece W when the workpiece W is held by suction, thereby suppressing horizontal positional deviation of the workpiece W. The guide part 240 has a tapered surface 240a, and the edge of the workpiece W abuts against the tapered surface 240a, thereby suppressing horizontal positional deviation of the workpiece W. As a result, while suction is performed without contacting the surface of the workpiece W, the guide part 240 abuts only against the edge of the workpiece W, thereby suppressing horizontal positional deviation of the workpiece W.

[0076] When the workpiece W is a rectangular thin plate, by providing guide portions 240 at three locations in total, namely, one location at the center of the first side of the workpiece W, one location at a corner formed by the second and third sides, and one location at a corner formed by the third and fourth sides, it is possible to suppress horizontal positional deviation of the workpiece W so as to keep it in a stable position.

[0077] 10(a) and (b) are side views illustrating an example of adjusting the angle between the holder and the main body. A hinge 210 is provided at the attachment portion of the arm portion 21 of the holding part 20 on the main body 10 side. This makes it possible to adjust the angle of the arm portion 21 with respect to the main body 10. A flexible tube or the like may be used for the flow channel 100 that is bent by the hinge 210.

[0078] Second embodiment FIG. 11 is a perspective view illustrating a manual holding device according to the second embodiment. 12(a) and (b) are enlarged cross-sectional views illustrating a valve of the manual holding device according to the second embodiment. The manual holding device 1B according to this embodiment is a device that sucks and holds the workpiece W manually by an operator.

[0079] The manual holding device 1B includes a main body 10 that can be held by hand by an operator, a holding part 20 that is provided at one end of the main body 10 and holds the workpiece W by suction using the Bernoulli method, a valve 60 that opens and closes between an inlet passage 1001 and an outlet passage 1002 in an air flow path 100 that communicates the main body 10 and the holding part 20, and an operating part 70 for manually switching between opening and closing of the valve 60 by the operator. In the manual holding device 1B, the configurations of the valve 60 and the operating part 70 (valve structure Bb) are different from those of the manual holding device 1A according to the first embodiment.

[0080] In the manual holding device 1B, the operating unit 70 and the valve 60 are provided so as to be slidable in the extending direction of the main body 10. For example, the operating unit 70 and the valve 60 are formed in a ring shape, and are slidable in the extending direction of the main body 10 (front-rear direction). In this embodiment, the position when the operating unit 70 and the valve 60 are slid most forward is referred to as a first position PS1, and the position when they are slid most rearward is referred to as a second position PS2.

[0081] As shown in Fig. 12(a) and (b), the valve structure Bb has a valve box 600 and a valve 60. The cylindrical valve box 600 connected to one end of the main body 10 is provided with a flow path 100a on the main body 10 side and a flow path 100b on the holding part 20 side. The flow paths 100a and 100b do not directly communicate with each other. In the valve box 600, an inlet path 1001 communicating with the flow path 100a on the main body 10 side is provided from the flow path 100a toward the outer periphery of the valve box 600, and an outlet path 1002 communicating with the flow path 100b on the holding part 20 side is provided from the flow path 100b toward the outer periphery of the valve box 600.

[0082] The valve 60 is provided with a bypass flow path 601. The valve 60 is placed on the outer periphery of the valve box 600, and the outer periphery of the valve 60 is placed on the operating unit 70. When the operating unit 70 is slid, the valve 60 also slides together. Note that the operating unit 70 may be separate from the valve 60, or may be provided integrally with the valve 60.

[0083] As shown in FIG. 12(a), when the operating unit 70 and the valve 60 are positioned in the first position PS1, the inlet passage 1001 and the outlet passage 1002 are connected via a bypass passage 601 provided in the valve 60, and the passage 100 is opened from the main body 10 to the holding unit 20 via the valve 60, making it possible for the workpiece W to be held by the holding unit 20.

[0084] As shown in Figure 12 (b), when the operating unit 70 and the valve 60 are positioned in the second position PS2, the communication between the inlet passage 1001 and the outlet passage 1002 via the bypass passage 601 provided in the valve 60 is blocked, the passage 100 is closed, and the workpiece W becomes removable from the holding unit 20.

[0085] In such a manual holding device 1B, the operation unit 70 and the valve 60 can be slid in the direction in which the main body 10 extends to clearly switch between holding the workpiece W at the first position PS1 and releasing the hold of the workpiece W at the second position PS2. That is, by sliding the operation unit 70 and the valve 60 to switch between the first position PS1 and the second position PS2, the held state and released state of the workpiece W can be respectively maintained, and therefore each operation can be performed without imposing a burden on the operator.

[0086] The manual holding device 1B is preferably further provided with a lock mechanism (not shown) for fixing the operation unit 70 and the valve 60 at the second position PS2. FIGS. 13(a) and 13(b) are diagrams showing examples of the lock mechanism. For example, a key 701 and a key groove 702 provided between the valve 60 and the valve box 600 can be used as the lock mechanism. The engagement of the key 701 and the key groove 702 allows the operation unit 70 and the valve 60 to slide between the first position PS1 and the second position PS2, and allows the operation unit 70 and the valve 60 to rotate only from the second position PS2. For example, the key groove 702 is provided in a substantially L-shape in the front-rear direction and the circumferential direction. This prevents the operation unit 70 and the valve 60 from sliding to the second position PS2 and rotating in the circumferential direction. This lock mechanism prevents the operation unit 70 and the valve 60 from sliding to the second position PS2. The second position PS2 is set to a position where the flow path 100 is blocked, and the operation unit 70 and the valve 60 are held in the position where the flow path 100 is blocked. PS2 can be securely locked.

[0087] The manual holding device 1B may further include a resistance applying part (not shown) that applies resistance to the sliding movement of the operating part 70 and the valve 60 when they reach the first position PS1 and the second position PS2. An example of the resistance applying part is a pole plunger provided between the valve box 600 and the valve 60. When the valve 60 reaches the first position PS1 or the second position PS2, the biased ball of the ball plunger fits into a recess, thereby applying resistance. This allows the operator to recognize that the operating part 70 and the valve 60 have reached the first position PS1 or the second position PS2 through the resistance, making it easier to maintain each position.

[0088] In the manual holding device 1B, air injection can be switched on and off by sliding the operating unit 70 and the valve 60, so the cock 50 that serves as the main air valve as shown in Fig. 1 is not necessarily required. This is because the air inflow stop state can be maintained by setting the operating unit 70 and the valve 60 to the second position PS2.

[0089] (Example of use) FIG. 14 is a schematic diagram showing a first example of use of the manual holding device according to this embodiment. FIG. 15 is a schematic diagram showing a second example of use of the manual holding device according to this embodiment. In the usage example shown in Figs. 14 and 15, an example is shown in which the manual holding device 1A according to the first embodiment is used, but the same applies to the manual holding device 1B according to the second embodiment.

[0090] An operator holds the main body 10 of the manual holding device 1A in his / her hand and operates the operation unit 40 with his / her fingers. For example, a plurality of workpieces W are stacked at a predetermined interval in a cassette C, and the operator takes out the workpieces W one by one from the cassette C and transfers them to a tray T. When taking out the workpieces W from the cassette C, the operator does not press the operation unit 40 with his / her fingers. If the operation unit 40 is not pressed, the flow path 100 can be kept open, and the workpieces W can be sucked and held by the holding unit 20 by the injection of air from the holding unit 20.

[0091] The worker holds the main body 10 in his / her hand and inserts the holder 20 onto the workpiece W in the cassette C. This causes the holder 20 to suction and hold the workpiece W. The worker then removes the suctioned and held workpiece W from the cassette C and transports it to a predetermined position on the tray T. When placing the workpiece W on the tray T, the worker presses the operating part 40 with his / her finger. This causes the valve 30 to close the flow path 100, and the workpiece W is released from the holder 20.

[0092] In such an operation, there is no need to press the operating unit 40 when suction-holding the workpiece W, and the workpiece W can be reliably transferred without placing any more strain on the worker than necessary. In addition, by pressing the operating unit 40 due to the action of the valve 30, the state of holding the workpiece W can be clearly switched to the state of releasing it, and the workpiece W can be released sharply and precisely by targeting the desired position on the tray T, etc.

[0093] As described above, according to the manual holding devices 1A, 1B of the embodiments, it is possible to provide manual holding devices 1A, 1B that are highly operable and prevent the workpiece W from accidentally falling off during work.

[0094] Although the present embodiment and its modified examples have been described above, the present invention is not limited to these examples. For example, the configuration examples of the valve 30 are not limited to those illustrated in Figs. 4 to 7. In addition, in the first embodiment, an example of a lever type as the operating unit 40 is shown, but a push button type or the protruding portion 302 of the valve 30 may also be used as the operating unit 40. In addition, those in which a person skilled in the art appropriately adds, deletes, or modifies components of the above-mentioned embodiments or their application examples, or those in which the features of the embodiments are appropriately combined, are also included in the scope of the present invention as long as they include the gist of the present invention.

[0095] This embodiment includes the configurations shown in the following supplementary notes. (Appendix 1) A valve structure for opening and closing an air flow path used in a manual holding device that sucks and holds a workpiece, comprising: a valve body including an inlet passage and an outlet passage communicating with the flow path, and a cylinder provided between the inlet passage and the outlet passage; a valve movably mounted within the cylinder of the valve body; Equipped with an inlet port communicating with the inlet passage provided in the cylinder and an outlet port communicating with the outlet passage are located at different positions in a moving direction of the valve, A valve structure, wherein when the outlet port is closed by the valve, a space communicating with the inlet passage is provided between the valve and the cylinder, and the valve is biased by the pressure of the air flowing into the space.

[0096] (Appendix 2) A valve structure for opening and closing an air flow path used in a manual holding device that sucks and holds a workpiece, comprising: a valve body having an inlet passage and an outlet passage that are not in communication with each other; A valve having a bypass flow path and slidably provided along the outside of the valve body; Equipped with When the valve is in the first position, the inlet passage and the outlet passage communicate with each other via the bypass passage provided in the valve, and the workpiece can be held. When the valve is in a second position, communication between the inlet passage and the outlet passage through the bypass passage is blocked, thereby enabling the workpiece to be removed. [Industrial Applicability]

[0097] The present invention is applicable not only to a Bernoulli type manual holding device, but also to a vacuum suction type holding device and a holding device utilizing the Coanda effect or the eject effect. [Explanation of symbols]

[0098] 1A,1B…Manual holding device 10. Main unit 20...Holding part 21…Arm section 22…Hub 23…Press plate 24...Guide support part 24a…hole 24h…hole 25…Pedestal 25a…Cylindrical protrusion 25b…Groove 25c…Concave 25h…hole 26…Adsorption surface member 30,60…Valve 35…Cylinder 38…Coil spring 40,70…Operation unit 50…Cook 100...Flow path 100a: Flow path on the main body side 100b... Flow path on the holding portion side 210…hinge 240…Guide section 240a...Tapered surface 241...Ball 300,600…Valve box 301...Valve body 301a...Reduced diameter part 301b…Lower end surface 301c…Groove 302...Protrusion 303…Flange section 304…Recess 304a…Pressure bearing surface 601...Bypass flow path 701...Key 702...Key groove 1001...Inflow path 1002...Outflow path 3001...Cap 3001h…hole 3002...Seal 3031...Seal Ba, Bb...Valve structure C…Cassette H…Hose PS1: 1st position PS2…2nd position PT1…inlet port PT2: Outlet port T…Tray W…Work

Claims

1. A manual holding device that suction-holds a workpiece, A main body that can be held by an operator; a holding portion provided at one end side of the main body and configured to suction and hold the workpiece by a Bernoulli method; a valve that opens and closes between an inlet passage and an outlet passage in an air flow passage that communicates the main body and the holding portion; an operating unit for manually switching the valve between open and closed by the operator; Equipped with the valve is provided so as to be movable in a direction substantially perpendicular to a direction in which the inlet passage and the outlet passage extend, and is biased in a direction in which the flow passage is opened by the pressure of the air directed toward the valve, When the operator is not applying a pressing force to the operation unit, the flow path is opened by the valve, and the workpiece can be held by the holding unit. A manual holding device in which, when the operator applies a pressing force to the operating portion, the valve closes the flow path, making it possible to remove the workpiece from the holding portion.

2. 2. The manual holding device according to claim 1, wherein said valve is provided with a recess for receiving said air pressure and for receiving a biasing means for biasing said valve in a direction to open said flow passage.

3. 3. The manual holding device according to claim 1 or 2, wherein the valve is configured to close the outlet passage and not close the inlet passage when the flow path is closed by the valve.

4. The valve is movably mounted within the cylinder; 4. The manual holding device according to claim 3, wherein an inlet port communicating with the inlet passage provided in the cylinder and an outlet port communicating with the outlet passage are located at different positions in the moving direction of the valve.

5. 5. The manual holding device according to claim 4, wherein a space communicating with the inlet passage is provided between the valve and the cylinder when the outlet port is closed by the valve.

6. The manual holding device according to claim 1 , wherein the inlet passage and the outlet passage have an orifice shape.

7. The manual holding device according to claim 1 , wherein the holding portion is provided with a guide portion that abuts against an edge of the workpiece when the workpiece is adsorbed to suppress horizontal positional deviation of the workpiece.

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