High-speed, high-power pulsed light source system for high-speed measurement and imaging

Abstract

A high power, high speed pulse driver and illumination system for high speed metrology imaging is provided. The system includes an illumination light source and a driver circuit configured to overdrive the illumination light source with a high current and / or a high current density. The high current is a current greater than a manufacturer's recommended current used to drive the illumination light source, and the high current density is a current density greater than such manufacturer's recommended current density. The illumination light source is operated using a lifetime preservation technique selected from a first technique of operating the illumination light source at a low duty cycle of 2% or less or a second technique of operating the illumination light source in a burst mode with a high duty cycle for shorter intervals. The driver and illumination system can be incorporated into a variable-focus lens system to define multiple exposure increments for acquiring one or more images focused at one or more focal planes.

Description

[Technical field]

[0001] The present invention relates generally to high speed metrology imaging, and more particularly to a pulsed illumination system for high speed imaging and / or sensing operations. [Background technology]

[0002] In various optically based measurement or sensing systems, the throughput and / or accuracy and / or resolution depend on how short an exposure time can be used. This is well understood with respect to imaging systems that use short illumination pulses ("strobe" illumination) to freeze motion and / or isolate an imaged scene at a given moment. For example, freezing motion reduces motion-induced edge blurring in the image, so that associated edge and distance measurements, as well as derived measurements, can be made more accurate, for example, in the X, Y directions of the image. In addition to freezing X, Y motion, it is also necessary to freeze Z-axis motion, which is motion along the optical axis of the imaging or sensing system, for example, at the moment when the focal plane of the optical system coincides with the plane of the surface or element to be imaged. It will be appreciated that, for example, due to the use of a variable focus lens (VFL) in the optical system, relative motion between focal planes can occur with respect to the motion of the object or with respect to the "motion" of the focal plane of the optical system. One particularly fast VFL lens, which requires a particularly fast illumination system to fully utilize its capabilities, is the tunable acoustic gradient or TAG lens. This periodically varies the optical power (or focal length of the optical system) at rates of 70 KHz or more.

[0003] For example, the system may use a TAG lens to image at different focal planes and systematically acquire well-focused images, or "image stacks," throughout the measurement volume that support accurate machine vision measurements or inspections at each individual imaging plane. Generally speaking, the brighter and shorter the illumination pulses available in such systems, the faster the acquisition and measurement speeds will be, the greater the versatility for measuring dark, moving, or vibrating workpieces, and the higher the measurement accuracy and resolution. Other potential beneficial applications for short pulse illumination systems include various focusable light projection systems, LIDAR systems, certain types of autofocus systems, certain types of plenoptic camera systems, and others. Summary of the Invention [Problem to be solved by the invention]

[0004] To achieve high speed illumination pulses, it is known to drive one or more LEDs with driver circuits capable of providing pulses of a few microseconds in length at the order of a few watts (e.g., on the order of 10 watts or so). However, even the fastest of such known driver circuits and illumination pulses (at least those that are compact and versatile enough for a wide variety of industrial applications at a practical and acceptable industrial price range) remain a limiting factor for the speed, versatility, and accuracy of various systems, especially in TAG lens-based systems. Driver circuits and illumination systems capable of providing brighter and / or shorter illumination pulses are desirable. [Means for solving the problem]

[0005] A high power fast pulse driver and illumination system is disclosed that is particularly useful for overdriving LEDs to provide incoherent illumination, although in some applications the driver and illumination system may be used in combination with other devices.

[0006] A high power, high speed pulse driver and illumination system for high speed metrology imaging is provided. The system includes an illumination light source and a driver circuit configured to overdrive the illumination light source with a high current and / or high current density. The high current is a current greater than a manufacturer's recommended current used to drive the illumination light source, and the high current density is a current density greater than a manufacturer's recommended current density used to drive the illumination light source. The illumination light source is configured to be operated using a lifetime maintenance technique selected from a first technique of operating the illumination light source with a low duty cycle of 2% or less or a second technique of operating the illumination light source in a burst mode with a high duty cycle for shorter intervals.

[0007] According to one aspect, the driver circuit comprises: a node N1 coupled to a power supply; a node N2 coupled to the node N1 via an inductor L12 and providing an anode for the illumination source; a node N3 coupled to node N2 through one or more capacitors C23 and providing an input for receiving control pulses for driving the illumination light source; a node N4 coupled to node N3 via element E43 and to node N2 via one or more diodes D42, providing a cathode for the illumination source; a node N5 coupled to a gate trigger circuit GTC for receiving a pulse control signal PULSE IN for driving an illumination light source, the node N5 being coupled to the node N4 and the node N3 via one or more transistors T543; Includes.

[0008] According to another embodiment, one or more of the transistors T543 include a gallium nitride FET.

[0009] According to another aspect, the driver circuit is configured to perform pulse regulation to limit one or more pulse widths of the pulse control signal PULSE IN to one or more safe levels in the event of an instance of overcurrent.

[0010] According to another aspect, the driver circuit is configured to switch from a high pulse rate mode of operation to a low pulse rate mode of operation in the event of an overcurrent.

[0011] According to another aspect, the driver and illumination system are incorporated into a variable focus lens (VFL) system and, during operation, define multiple exposure increments to obtain a single image focused at multiple focal planes of the VFL system, or multiple images focused at multiple focal planes of the VFL system, or a single image focused at a single focal plane of the VFL system.

[0012] According to another embodiment, the VFL system is a variable acoustic gradient index (TAG) lens system.

[0013] According to another embodiment, the change in focal plane during one of the exposure increments is on the order of 0.2 to 0.25 of the depth of focus (DOF) of the VFL system.

[0014] According to another embodiment, the pulse length corresponding to one of the exposure increments is in the range of 12 nanoseconds to 80 nanoseconds.

[0015] According to another embodiment, the pulse length corresponding to one of the exposure increments is 10 nanoseconds.

[0016] According to another embodiment, the illumination source includes one or more light emitting diodes (LEDs).

[0017] According to another embodiment, the LEDs are each at least 9 mm 2 The light emitting area is 1.0 mm and the current density is 5 A / mm 2 from 12A / mm 2 It is.

[0018] According to another embodiment, the illumination source is powered by a power supply on the order of 24 volts or less.

[0019] According to another embodiment, the power supply is on the order of 21 volts.

[0020] According to another aspect, the driver and lighting system are implemented in a printed circuit board (PCB) layout configuration having a specific configuration of individual components and their relative layout in three-dimensional layers.

[0021] According to another aspect, at least some of the node traces are configured as a plate or planar configuration that occupies 5% or 10% of the total footprint of the PCB layout configuration.

[0022] According to another aspect, at least some of the node wirings are configured to extend below the components to which they are connected when viewed perpendicular to the plane of the PCB layout configuration.

[0023] According to another aspect, different node wirings that carry currents that flow in partially or wholly opposite directions when viewed perpendicular to the plane of the PCB layout configuration are located on layers that are relatively close to each other, and different node wirings that carry currents that flow in similar directions when viewed perpendicular to the plane of the PCB layout configuration are located on layers that are relatively far from each other.

[0024] In some embodiments, the driver and lighting systems disclosed herein can be used with high speed metrology imaging systems and / or other systems, some of which may include TAG lens type VFLs. The driver and lighting systems disclosed herein can be used to control such systems, including TAG lens type VFLs, to improve the performance or versatility of these systems.

[0025] A method for operating a variable acoustic gradient index (TAG) lens imaging system is provided that generally includes three steps, including: (i) providing a smart illumination pulse control routine / circuit (SLPCRC) that provides a first exposure control mode corresponding to at least one of a point-from-focus (PFF) mode of the TAG lens imaging system or a second exposure control mode corresponding to an extended depth of focus (EDOF) mode of the TAG lens imaging system, the SLPCRC including an illumination light source and a driver circuit configured to overdrive the illumination light source with a high current and / or a high current density, where the high current is a current greater than a manufacturer's recommended current used to drive the illumination light source and the high current density is a current density greater than the manufacturer's recommended current density used to drive the illumination light source; (ii) placing a workpiece within the field of view of a TAG lens imaging system; (iii) activating the PFF mode or the EDOF mode; Periodically modulating a focus position of the TAG lens imaging system at a plurality of focus positions along a focus axis direction within a focus range that includes a surface height of the workpiece; and controlling the SLPCRC to define a plurality of exposure increments for obtaining a single image focused at a plurality of focus positions, or a plurality of images each focused at a plurality of focus positions, or a single image focused at a single focus position; and operating the TAG lens imaging system by: [Brief description of the drawings]

[0026] The foregoing aspects and many of the attendant advantages of the present invention will be more readily appreciated as the same becomes better understood by reference to the following detailed description when considered in conjunction with the accompanying drawings, in which:

[0027] [Figure 1] FIG. 1 illustrates various exemplary components of a general-purpose precision machine vision inspection system suitable for incorporating a TAG lens imaging system including a high-power high-speed pulse driver and illumination system according to an exemplary embodiment. [Diagram 2]FIG. 2 is a block diagram of a control system and vision components portion of a machine vision inspection system incorporating a TAG lens imaging system including features disclosed in the present invention, similar to that of FIG. [Diagram 3] FIG. 1 is a schematic diagram of one embodiment of a TAG lens imaging system including a TAG lens that can be adapted for a machine vision inspection system and can operate according to the principles disclosed herein. [Figure 4] FIG. 1 is a block diagram of the optical imaging system and control system portions of a TAG lens imaging system controlled by a smart lighting pulse control routine / circuit (SLPCRC) that embodies a high power high speed pulse driver and lighting system according to the principles disclosed herein. [Diagram 5] FIG. 1 is a flow diagram illustrating one embodiment of a method for operating a TAG lens imaging system including a SLPRC that provides a first exposure mode corresponding to a PFF mode and a second exposure control mode corresponding to an EDOF mode. [Figure 6] 1 shows an exemplary timing diagram for focus height during image exposure that can be used in one embodiment of a TAG lens imaging system operating in PFF mode in accordance with the principles disclosed herein. [Figure 7] An exemplary graphical user interface, represented as a screenshot of a display device associated with a TAG lens imaging system, is shown that allows user control (e.g., user input) of a PFF exposure control data set that defines a PFF image exposure sequence used to expose an image stack in PFF mode. [Figure 8] 1 shows an example timing diagram for focus height during image exposure that can be used in one embodiment of a TAG lens imaging system operating in EDOF mode in accordance with the principles disclosed herein. [Figure 9]An exemplary graphical user interface, represented as a screenshot of a display device associated with a TAG lens imaging system, is shown that allows user control (e.g., user input) of an EDOF exposure control data set that defines an EDOF image exposure sequence used to expose preparatory images in EDOF mode. [Figure 10A] FIG. 1 is a circuit diagram including one embodiment of a driver and lighting system suitable for forming a smart lighting pulse control routine / circuit (SLPCRC) in accordance with the principles disclosed herein. [Figure 10B] FIG. 1 is a circuit diagram including one embodiment of a driver and lighting system suitable for forming a smart lighting pulse control routine / circuit (SLPCRC) in accordance with the principles disclosed herein. [Figure 11] FIG. 10C is a partial schematic isometric view of one layout for implementing the circuit diagram of FIG. 10B on a printed circuit board, the example layout being shown with four layers L1-L4. [Figure 12] FIG. 12 is a detailed view of a portion of layer L4 of FIG. 11, showing certain elements in greater detail. [Figure 13] FIG. 2 is a flow diagram illustrating one embodiment of a method for operating a TAG lens imaging system including a driver and an illumination system in accordance with the principles disclosed herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] 1 is a block diagram of one exemplary machine vision inspection system 10 suitable for incorporating a VFL imaging system 10, such as a TAG lens imaging system 10, including a high power high speed pulse driver and illumination system according to the principles described herein. As used herein, to the extent that the machine vision inspection system incorporates or embodies a TAG lens imaging system, the machine vision inspection system and the TAG lens imaging system are represented by the same reference number 10 and may be used interchangeably. The machine vision inspection system 10 includes an image measuring machine 12 operably connected to exchange data and control signals with a control computer system 14. The control computer system 14 is further operably connected to exchange data and control signals with a monitor or display 16, a printer 18, a joystick 22, a keyboard 24, and a mouse 26. The monitor or display 16 may display a user interface suitable for controlling and / or programming the operation of the machine vision inspection system 10. It will be appreciated that in various embodiments, a touch screen tablet or the like may substitute for and / or provide redundant functionality for any or all of the functions of the computer system 14, display 16, joystick 22, keyboard 24, and mouse 26.

[0029] Those skilled in the art will appreciate that the control computer system 14 may generally comprise any computing system or device. Suitable computing systems or devices may include personal computers, server computers, minicomputers, mainframe computers, distributed computing environments including any of the above, and the like. Such computing systems or devices may include one or more processors that execute software to perform the functions described herein. Processors include programmable general-purpose or special-purpose microprocessors, programmable controllers, application specific integrated circuits (ASICs), programmable logic devices (PLDs), and the like, or combinations of such devices. The software may be stored in memory, such as random access memory (RAM), read-only memory (ROM), flash memory, or a combination of such components. The software may also be stored in one or more storage devices, such as optical-based disks, flash memory devices, or any other type of non-volatile storage medium for storing data. The software may include one or more program modules that include routines, programs, objects, components, data structures, and the like that perform particular tasks or implement particular abstract data types. In a distributed computing environment, the functionality of the program modules may be combined or distributed across multiple computing systems or devices in either a wired or wireless configuration and accessed via service calls.

[0030] The vision measurement machine 12 includes a movable workpiece stage 32 and an optical imaging system 34, which may include a zoom lens or interchangeable lenses that typically provide various magnifications for the images acquired by the optical imaging system 34. The machine vision inspection system 10 is also described in commonly assigned U.S. Patent Nos. 7,454,053, 7,324,682, 8,111,905, and 8,111,938, each of which is incorporated herein by reference in its entirety.

[0031] 2 is a block diagram of a control system portion 120 and a vision components portion 200 of a machine vision inspection system 10 including elements described herein, similar to the machine vision inspection system of FIG. 1. The control system portion 120 is used to control the vision components portion 200, as described in more detail below. The vision components portion 200 includes an optical assembly portion 205, light sources 220, 230, and 240 (e.g., strobe illumination sources formed of one or more light emitting diodes LEDs), and a workpiece stage 32 having a central transparent portion 212. The workpiece stage 32 can be controllably moved along X and Y axes that lie in a plane generally parallel to a surface of the stage on which a workpiece 20 can be placed. The optical assembly portion 205 includes a camera system 260 and an objective lens system 250. According to various embodiments, the objective lens system 250 includes a variable acoustic gradient index (TAG) lens having a variable focal length, as described more fully below. The optical assembly portion 205 may also include a turret lens assembly 280 having lenses 286 and 288. Instead of a turret lens assembly, fixed or manually interchangeable magnification-altering lenses, zoom lens arrangements, or the like may be included.

[0032] A workpiece 20, or a tray or fixture holding multiple workpieces 20, to be imaged using the machine vision inspection system 10 is positioned on a workpiece stage 32. The workpiece stage 32 is controlled to move relative to the optical assembly portion 205 such that an objective lens system 250 including a TAG lens can be moved between multiple positions on the workpiece 20 and / or between multiple workpieces 20. One or more of a transmitted illumination source 220, an epi-illumination source 230, and an oblique illumination source 240 (e.g., a strobe illumination source formed with one or more LEDs) (collectively referred to as light sources) can emit source light 222, 232, and / or 242, respectively, to illuminate one or more workpieces 20. The light source 230 can emit light 232 along a path that includes a mirror 290. The source light is reflected or transmitted as workpiece light 255, and the workpiece light used for imaging passes through the objective lens system 250 including a TAG lens and a turret lens assembly 280 to be collected by a camera system 260. Images of one or more work pieces 20 captured by camera system 260 are output on signal line 262 to control system portion 120. Light sources 220, 230, and 240 can be connected to control system portion 120 via signal lines or buses 221, 231, and 241, respectively. To change the magnification of the image, control system portion 120 can select one of the turret lenses via signal line or bus 281 by rotating turret lens assembly 280 along axis 284.

[0033] 2, in various exemplary embodiments, the control system section 120 includes a controller 125, an input / output interface 130, a memory 140, a workpiece program generator and executor 170, and a power supply section 190. Each of these components, as well as additional components described below, may be interconnected by one or more data / control buses and / or application programming interfaces, or by direct connections between the various elements.

[0034] The input / output interface 130 includes an imaging control interface 131, a motion control interface 132, a lighting control interface 133, and a lens control interface 134. The imaging control interface 131 can include a smart lighting pulse control routine / circuit (SLPCRC) 131e, which includes or embodies a high power fast pulse driver and lighting system 410 (see FIG. 4) according to the principles disclosed herein, and further provides a first exposure control mode corresponding to the PFF mode of the TAG lens imaging system and a second exposure control mode corresponding to the EDOF mode of the TAG lens imaging system. The lens control interface 134 can include a lens controller including a lens focus driving routine / circuit, a lens focus timing routine / circuit, a lens focus calibration routine / circuit, etc. In various embodiments, the lens controller generates a master timing signal 409 (see FIG. 4) that controls the operation of the driver and lighting system 410 of the SLPCRC 131e according to the principles disclosed herein. The operation and components associated with the SLPRC 131e, including the driver and lighting system 410, are further described below with reference to FIGS.

[0035] The motion control interface 132 may include a position control element 132a and a velocity / acceleration control element 132b, although these elements may be merged and / or indistinguishable.

[0036] Illumination control interface 133 includes illumination control elements 133a, 133n, and 133fl that control, for example, the selection, power, on / off switching, and strobe pulse timing of various corresponding light sources of machine vision inspection system 10. For example, illumination control elements 133a, 133n, or 133fl may be part of a driver and illumination system (410 in FIG. 4) that controls strobe illumination sources (e.g., LEDs) of TAG lens imaging system 10. In various embodiments, at least a portion of SLPRC 131e may be included within such a driver and illumination system 410 of the TAG lens imaging system, as will be described more fully below with reference to FIG. 4.

[0037] The memory 140 can include an image file memory portion 141, an edge detection memory portion 140ed, a workpiece program memory portion 142 that can include one or more part programs, and a video tool portion 143. The video tool portion 143 includes a video tool portion 143a and other video tool portions (e.g., 143n) that determine the GUI, image processing operations, etc. for each corresponding video tool, as well as a region of interest (ROI) generator 143roi. The region of interest generator 143roi supports automatic, semi-automatic, and / or manual operations to define various ROIs operable for the various video tools included within the video tool portion 143. The video tool portion also includes an auto focus video tool 143af that determines the GUI, image processing operations, etc. for, for example, a focus height measurement operation. In the context of this disclosure, as known to those skilled in the art, the term "video tool" generally refers to a relatively complex automated or programmed set of operations that can be performed by a machine vision user through a relatively simple user interface (e.g., a graphical user interface, editable parameter windows, menus, etc.) without having to generate a step-by-step sequence of operations included in the video tool, without having to resort to a general purpose text-based programming language, etc. For example, a video tool may include a set of complex pre-programmed image processing operations and calculations that can be adapted and customized for a particular instance by adjusting a small number of variables and parameters that define the operations and calculations. In addition to the underlying operations and calculations, the video tool also includes a user interface that allows the user to adjust those parameters for a particular instance of the video tool. For example, many machine vision video tools allow a user to configure a graphical region of interest (ROI) indicator with a simple "handle drag" action with a mouse to define the location parameters of an image subset that is to be analyzed by the image processing operations of a particular instance of the video tool.It should be noted that in some cases, the visible user interface features are referred to as video tools, and the underlying behavior is implicit.

[0038] The signal lines or buses 221, 231, and 241 of the transmitted illumination light source 220, the epi-illumination light source 230, and the oblique illumination light source 240, respectively, are all connected to the input / output interface 130. A signal line 262 from the camera system 260 is also connected to the input / output interface 130. In addition to carrying image data, the signal line 262 can also carry a signal from the control unit 125 to initiate image acquisition.

[0039] One or more display devices 136 (e.g., display 16 of FIG. 1 ) and one or more input devices 138 (e.g., joystick 22, keyboard 24, and mouse 26 of FIG. 1 ) may also be connected to input / output interface 130. Display device 136 and input device 138 may be used to display a user interface that may include various graphical user interface (GUI) functions that may be used to perform 3D measurement or inspection operations and / or generate and / or modify part programs, view images captured by camera system 260, and / or directly control vision components portion 200. Display device 136 may display user interface functions associated with SLPRC 131e, as will be more fully described below with reference to FIGS. 7 and 9 .

[0040] In various exemplary embodiments, when a user uses the machine vision inspection system 10 to generate a part program for a workpiece 20, the user generates part program instructions by operating the machine vision inspection system 10 in a learn mode to provide a desired image acquisition training sequence. For example, the training sequence may include placing a particular workpiece feature of a representative workpiece within a field of view (FOV), setting illumination levels, focusing or auto-focusing, acquiring an image, and providing an inspection training sequence to be applied to the image (e.g., using an instance of a video tool on the workpiece feature). The learn mode operates such that this sequence or sequences are captured or recorded and converted into corresponding part program instructions. When the part program is executed, these instructions cause the machine vision inspection system to replicate the trained image acquisition and perform inspection operations to automatically inspect the particular workpiece feature (i.e., corresponding feature at corresponding location) on one or more workpieces in the run mode that match the representative workpiece used when generating the part program. The systems and methods using the SLPRC (Smart Lighting Pulse Control Routine / Circuit) disclosed herein are useful during such learning modes and / or manual operation because they allow the user to view PFF 3D images or EDOF video images in real time while navigating the workpiece for visual inspection and / or workpiece program generation. The user does not have to constantly refocus the high magnification image according to the heights of various microscopic elements on the workpiece. This refocusing can be tedious and time consuming, especially at high magnifications.

[0041] The following description of Figures 3 and 4 describes various operational principles and applications of the TAG lens imaging system 10, including the TAG lens. Further description and understanding of such operational principles and applications, as well as various aspects, are described in more detail in U.S. Patent Nos. 9,930,243, 9,736,355, 9,726,876, 9,143,674, 8,194,307, and 7,627,162, as well as U.S. Patent Application Publication Nos. 2017 / 0078549 and 2018 / 0143419, each of which is incorporated herein by reference in its entirety.

[0042] 3 is a schematic diagram of an embodiment of a TAG lens imaging system 300 that can be adapted to the machine vision inspection system 10 and can operate according to the principles disclosed herein. The TAG lens imaging system 300 includes a light source 330 (e.g., a strobe illumination source) that can be configured to illuminate the workpiece 20 within the field of view of the TAG lens imaging system 300, an objective lens 350, a relay lens 351, a relay lens 352, a TAG lens 370 having a variable focal length, a tube lens 386, and a camera system 360. The TAG lens (or interchangeably referred to as the TAG refractive index lens) 370 is a high-speed variable focal length lens that uses acoustic waves in a fluid medium to modulate the focus position and can periodically sweep a focal length range at high frequencies. Such lenses can be understood by the teachings of the article "High-speed varifocal imaging with a tunable acoustic gradient index of refraction lens," Optics Letters, Vol. 33, No. 18, September 15, 2008. TAG gradient index lenses and associated controllable signal generators are available, for example, from TAG Optics, Inc. (Princeton, NJ). For example, the SR38 series lenses available from TAG Optics are capable of modulation up to 1.0 MHz.

[0043] In operation, the light source 330 can be configured to emit source light 332 toward the surface of the workpiece 20 along a path that includes a mirror 390. The objective lens 350 receives workpiece light 355, which includes the workpiece light focused at a focus position FP proximate the workpiece 20, and outputs the workpiece light 355 to a relay lens 351. The relay lens 351 receives the workpiece light 355 and outputs it to a relay lens 352. The relay lens 352 receives the workpiece light 355 and outputs it to a TAG lens 370. To provide a constant magnification at each Z height and / or focus position FP of the workpiece 20, the relay lens 351 and the relay lens 352 together provide a 4f relay optical system between the objective lens 350 and the TAG lens 370. The TAG lens 370 receives the workpiece light 355 and outputs it to a tube lens 386. The TAG lens 370 is electronically controllable to vary a focus position FP of the TAG lens imaging system 300 during one or more image exposures. The focus position FP can be moved within a range R defined by focus position FP1 and focus position FP2. In some embodiments, the range R can be as large as 10 mm (for a 1x objective lens 350). It will be appreciated that in some embodiments, the range R is user selectable, for example in a PFF mode or an EDOF mode supported by the SLPRC 131e.

[0044] In various embodiments, the TAG lens imaging system 300 includes a smart illumination pulse control routine / circuit (SLPCRC) 131e configured to control the TAG lens 370 to periodically modulate the focal position FP of the TAG lens imaging system 300 without macroscopically adjusting the spacing between elements in the TAG lens imaging system 300. That is, there is no need to adjust the distance between the objective lens 350 and the workpiece 20 to change the focal position FP. The focal position FP is periodically modulated at a modulation frequency of at least 30 kHz at multiple focal positions along the focal axis direction within a focus range R that includes the surface height of the workpiece 20 to be measured / imaged. In some embodiments, the TAG lens 370 can adjust or modulate the focal position FP very quickly (e.g., periodically at least 70 kHz, 400 kHz, or more). In some embodiments, the TAG lens 370 can be driven with a periodic signal such that the focal position FP is sinusoidally modulated over time at a high frequency.

[0045] According to various embodiments, the TAG lens imaging system 300 under the control of the SLPRC131e is operable in a first exposure control mode corresponding to a point from focus (PFF) mode and a second exposure control mode corresponding to an extended depth of focus (EDOF) mode.

[0046] In the PFF mode, the TAG lens imaging system 300 operates to expose a stack of images (image stack) using an exposure sequence defined by a PFF exposure control data set included in or input to the SLPRC 131e. Sample PFF image exposure sequences are shown in Figures 6 and 7 and are described more fully below. The PFF image exposure sequence defines a number of separate image exposure increments acquired at separate focus positions FP corresponding to respective phases of the periodically modulated focus positions. Each of the multiple separate image exposure increments is determined by a respective instance of illumination source strobe operation having control timing defined in the PFF image exposure sequence. The image stack is processed to determine or output a Z height coordinate map (e.g., a point cloud) that quantitatively indicates a set of three-dimensional surface coordinates corresponding to the surface shape of the workpiece 20.

[0047] In EDOF mode, the TAG lens imaging system 300 operates to expose a preliminary image using an exposure sequence defined by an EDOF exposure control data set included in or input to the SLPRC 131e. Sample EDOF image exposure sequences are shown in Figures 8 and 9, which are described more fully below. The EDOF image exposure sequence defines a plurality of separate image exposure increments acquired at separate focus positions FP corresponding to respective phases of the periodically modulated focus positions. Each of the plurality of separate image exposure increments is determined by a respective instance of illumination source strobe operation having control timing defined in the EDOF image exposure sequence. The preliminary image is processed to determine or output an EDOF image having a depth of field greater (e.g., 10-20 times greater or more in various embodiments) than a single focus position TAG lens imaging system. The EDOF image is focused substantially throughout this greater depth of field. In various embodiments, the EDOF image can be provided at a high rate suitable for display in near real time. For example, the EDOF image exposure sequence can be configured to acquire preliminary images in less than 500 ms, or less than 250 ms, or less than 100 ms, or less than 50 ms.

[0048] 4 is a block diagram of the TAG lens imaging system 10 (300) including an optical imaging system 34, a workpiece stage 32, and an SLPRC 131e operable as a control system for the TAG lens imaging system 10. In various embodiments, the TAG lens imaging system 10 can be adapted to a machine vision host system or used as a stand-alone system and can operate according to the principles disclosed herein and in the references incorporated herein.

[0049] The optical imaging system 34 includes an image detector 260 (e.g., a camera), one or more field lenses 150 (e.g., the objective lens 350 and relay lenses 351 and 352 of FIG. 3), and a TAG lens 370. The SLPCRC 131e can include system host circuits and routines 401, which can be provided, for example, in a host PC. The system host circuits and routines 401 include a user interface input / output module 402 (e.g., the various display or input devices 16, 18, 22, 24, 26 of FIG. 1) and a mode control module 403 configured to control operation of the TAG lens imaging system 10 in PFF and EDOF modes. In some embodiments, the mode control module 403 can be responsible for prescribing a PFF image exposure sequence based on a PFF exposure control data set, and prescribing an EDOF image exposure sequence based on an EDOF exposure control data set. In some embodiments, a user can define a PFF exposure control data set or an EDOF exposure control data set using the exemplary graphical user interfaces shown in Figures 7 and 9, based on which the SLPRC 131e using an appropriate algorithm can generate a corresponding PFF image exposure sequence or a corresponding EDOF image exposure sequence, respectively. The PFF image exposure sequence defines a plurality of individual image exposure increments acquired at individual focus positions FP corresponding to each phase of the periodically modulated focus positions, each of the plurality of individual image exposure increments being determined by each instance of illumination source strobe operation having a control timing defined in the PFF image exposure sequence. The EDOF image exposure sequence defines a plurality of individual image exposure increments acquired at individual focus positions FP corresponding to each phase of the periodically modulated focus positions, each of the plurality of individual image exposure increments being determined by each instance of illumination source strobe operation having a control timing defined in the EDOF image exposure sequence.

[0050] The SLPCRC 131e can be configured to initiate a predefined sequence of PFF or EDOF image sequences in either PFF or EDOF mode, for example by input of a start signal 404 via a user interface input / output module 402, to provide an entire stack of images for PFF or an entire ready image for EDOF mode, as described more fully below.

[0051] In some embodiments, the workpiece stage 32 may include an (optional) motion control system to move the workpiece 20 relative to the optical imaging system 34. In such embodiments, the system host circuits and routines 401 may include a workpiece program generator and executor (not shown) that operates the motion control system and other elements of the TAG lens imaging system 10 to automatically inspect the workpiece 20, as disclosed in the references incorporated herein.

[0052] The SLPRC 131e may also include image acquisition storage and processing circuits and routines 405, a lens control 408 (e.g., lens control interface 134 of FIG. 2), and a driver and illumination system 410. The lens control 408 may include lens focus drive routines / circuits, lens focus timing routines / circuits, lens focus calibration routines / circuits, etc., which may be used to control the operation of the TAG lens 370 in PFF or EDOF modes. As outlined above, the optical power of the TAG lens 370 is continuously varied at high frequency in response to a resonant drive signal (e.g., input on signal line 419 from the lens control 408). In various embodiments, the drive signal is a sinusoidal AC signal at the resonant frequency of operation of the TAG lens 370. The effective focus position EFP of the optical imaging system 34 is varied accordingly. At a corresponding time or "phase timing" during the sinusoidal variation of the optical power of the TAG lens 370, a focal length corresponding to the effective focus position EFP is available. In various embodiments, the lens control 408 generates a master timing signal 409 (e.g., 70 kHz) that controls the operation of the SLPRC 131e in accordance with the principles disclosed herein. In the embodiment shown in FIG. 4, the master timing signal 409 is input to a driver and lighting system 410.

[0053] The driver and illumination system 410 includes a timing and control module 411, a pulse driver 412, a pulse manager 413, and a high power strobe illumination source 414 (e.g., light sources 220, 230, and 240 in FIG. 2). The high power strobe illumination source 414 can strobe at a particular phase or "phase timing" of a modulation cycle to obtain a focused image exposure at a corresponding effective focus position EFP or focus distance. The pulse driver 412 can drive the high power strobe illumination source 414 according to a PFF image exposure sequence or an EDOF image exposure sequence defined by the system host circuitry and routines 401 described above based on a master timing signal 409 input from a lens control 408. In this regard, the PFF image exposure sequence can be stored in a PFF mode lookup table (LUT) storage unit 415, and the EDOF image exposure sequence can be stored in an EDOF mode lookup table (LUT) storage unit 416, both of which are under the control of the pulse manager 413. For example, a plurality of PFF image exposure sequences and a plurality of such EDOF image exposure sequences may be stored in a PFF mode LUT storage unit 415 and an EDOF mode LUT storage unit 416, from which one PFF image exposure sequence or one EDOF image exposure sequence may be selected for execution in response to a start signal 404 input from the system host circuits and routines 401. The pulse manager 413 may also include an image frame parameter storage unit 417 configured to store one or more PFF exposure control data sets on which the one or more PFF image exposure sequences may be based, and one or more EDOF exposure control data sets on which the one or more EDOF image exposure sequences may be based.

[0054] The pulse driver 412 cooperates with the pulse manager 413 to drive the high power strobe illumination source 414. The pulse driver 412 thus includes circuitry and routines for controlling various image exposures in synchronization with the periodic focus position modulation provided by the TAG lens 370 according to a PFF image exposure sequence or an EDOF image exposure sequence. In some embodiments, the pulse driver 412 and the pulse manager 413 may be merged and / or indistinguishable. The pulse driver 412 may control, for example, the selection, power, on / off switching, and strobe pulse timing of the high power strobe illumination source 414. Exemplary circuit configurations of the driver and illumination system 410, including the pulse driver 412 and the pulse manager 413, are described in more detail below with reference to FIGS. 10A-12.

[0055] As shown in FIG. 4, when the high power strobe illumination source 414 is activated, the strobe light 154 is reflected or transmitted from / through the workpiece 20 as workpiece light 155. The workpiece light 155 passes through one or more field lenses 150 and TAG lens 370 and is collected by an image detector 260 (e.g., a camera) for measurement or imaging. In various embodiments, the image detector 260 can be a known charge-coupled device (CCD) image sensor or other form of camera. The imaging optical path, for example along optical path OA, includes various optical components that transmit the workpiece imaging light 155 from the workpiece 20 to the image detector 260. For example, the one or more field lenses 150, the TAG lens 370, and the image detector 260 can all be positioned such that their optical axes are aligned on the same optical axis OA that intersects the surface of the workpiece 20. However, it will be appreciated that this embodiment is intended to be illustrative only and not limiting. More generally, the imaging optical path may include mirrors and / or other optical elements and may take any form operable to image the workpiece 20 with the image detector 260 in accordance with known principles.

[0056] The workpiece image exposure, including an image of the workpiece 20 ("image data"), captured by the image detector 260 is output on signal line 422 to the image acquisition storage and processing circuitry and routines 405. The output of the image data on signal line 422 may be in response to control signal transmission and communication output on signal line 423 from the image acquisition storage and processing circuitry and routines 405 to the image detector 260. The timing and control module 411 of the driver and illumination system 410 generates and outputs image timing signals 420 and group (image group) timing signals 430 to the image acquisition storage and processing circuitry and routines 405 based on a master timing signal 409 input from the lens control 408 and based on the PFF image exposure sequence or the EDOF image exposure sequence. In various embodiments, the image acquisition storage and processing circuitry and routines 405 may be implemented as a field programmable gate array (FPGA) integrated circuit (no external MCU required). In various embodiments, the image capture storage and processing circuits and routines 405 incorporate a frame grabber configured to capture (i.e., "grab") individual frames (images) from the video stream acquired by the image detector 260 and store the captured frames (images). Image timing signals 420 and group (image group) timing signals 430 from the driver and lighting system 410 can control the timing at which the frame grabber captures and / or stores the individual frames (images).

[0057] The image acquisition storage and processing circuitry and routines 405 may include a PFF mode processing module 441 and an EDOF mode processing module 442. The PFF mode processing module 441 includes circuits / routines for controlling image acquisition, storage, and processing of a stack (group) of images (frames) during PFF mode, for example using a frame grabber of the image acquisition storage and processing circuitry and routines 405, in accordance with image timing signals 420 and group timing signals 430 input from the driver and lighting system 410. The EDOF mode processing module 442 includes circuits / routines for controlling image acquisition, storage, and processing of a group of images (frames) during EDOF mode, for example using a frame grabber, in accordance with image timing signals 420 and group timing signals 430.

[0058] As described above, when the TAG lens imaging system 10 is operated in PFF mode, a stack of images is exposed according to a PFF image exposure sequence, and the image stack is processed to determine or output a Z height coordinate map (e.g., a point cloud) that quantitatively indicates a set of three-dimensional surface coordinates corresponding to the surface shape of the workpiece 20.

[0059] Known contrast-based focus analysis methods can be used to analyze the image stacks to determine whether they are in focus. Alternatively or additionally, such contrast-based focus analysis methods can be used to identify the best focus image from a set of images acquired with a corresponding set of known phase timings and output its "best focus" phase timing value. Z-height (effective focus position EFP) calibration data can be utilized that associates each Z-height or effective focus position EFP with each "best focus" phase timing, and the surface height coordinates of the imaged surface portion of the workpiece 20 can be determined based on the phase timing associated with the "best focus" image. In this manner, the TAG lens imaging system 10 in PFF mode can be used to measure or profile the three-dimensional surface coordinates of the surface shape of the workpiece 20 by scanning the workpiece 20. Various aspects of such measurement processes are described in more detail in the references incorporated herein.

[0060] In various embodiments, the user interface input / output module 402 of the system host circuits and routines 401 can be used to output a z-height coordinate map determined in PFF mode. Such image exposure and processing, including its display, can be controlled by the PFF mode processing module 441. In some embodiments, the image stack is input to a frame grabber included in the SLPRC 131e, and processing of the image stack is performed in a processor included in the frame grabber such that the z-height coordinate map is output from the frame grabber (e.g., for display on the user interface input / output module 402) and the image stack is not output from the frame grabber. In various embodiments, the PFF image exposure sequence is configured to acquire the image stack at a high speed, such as less than 1 second, or less than 500 milliseconds, or less than 250 milliseconds. In various embodiments, the control timing of each of the multiple individual image exposure increments used to acquire the image stack is defined as a predetermined sequence within the PFF image exposure sequence, and the SLPRC 131e is configured to provide the entire image stack based on a single start signal 404 that initiates the predetermined sequence.

[0061] In various embodiments, at least a portion of the SLPCRC 131e is included in the driver and illumination system 410 of the TAG lens imaging system 10, and at least a portion of the PFF exposure control data set defining the PFF image exposure sequence is included in or input to the driver and illumination system 410 (e.g., in image frame parameter store 417). In various other embodiments, at least a portion of the SLPCRC 131e can be included in a frame grabber of the TAG lens imaging system 10 (e.g., the frame grabber of image acquisition storage and processing circuitry and routines 405), and at least a portion of the PFF exposure control data set is included in or input to the frame grabber.

[0062] The image detector 260 can be "strobed" at a particular phase or "phase timing" of the modulation cycle of the TAG lens 370 to obtain a focused image exposure at a corresponding effective focus position EFP or focus distance. Control signaling and communication, such as a trigger signal to "strobe" the image detector 260 at a particular image timing, can be output on signal line 423 from the image acquisition storage and processing circuitry and routines 405 to the image detector 260. In some embodiments, the PFF mode processing module 441 and the EDOF mode processing module 442 each include timing controls to enable the camera image exposure timing to be synchronized with the desired phase timing and / or illumination timing of the TAG lens focus position modulation according to a PFF image exposure sequence or an EDOF image exposure sequence. For example, in the exposure of a PFF image stack, each individual image exposure increment can be determined by each instance of image acquisition by the frame grabber of the TAG lens imaging system 10 according to the PFF image exposure sequence. In various embodiments, an image detector (e.g., a camera) 260 can be triggered at each instance of image capture according to the PFF image exposure sequence. The trigger signal for the image detector 260 can be sent from a frame grabber and / or from the driver and illumination system 410 of the TAG lens imaging system 10.

[0063] In some embodiments, in exposing a PFF image stack, each individual image exposure increment is determined by a respective instance of image storage (recording) in a frame grabber of the TAG lens imaging system 10 according to the PFF image exposure sequence. For example, the image detector (e.g., camera) 260 may be successively triggered to successively output images to the frame grabber, but only respective instances of images corresponding to the multiple individual image exposure increments according to the PFF image exposure sequence are stored (recorded) in the frame grabber.

[0064] As described above, when the TAG lens imaging system 10 is operated in EDOF mode, a preliminary image is exposed using an EDOF image exposure sequence and the preliminary image is processed to determine or output an EDOF image having a greater depth of field than a single focus position of the TAG lens imaging system 10. The EDOF image is in focus substantially throughout the greater depth of field.

[0065] Using known integration and deconvolution methods, a preliminary image can be exposed during the image integration time while the focus position FS is modulated within the focus range R, and out-of-focus image components can be removed to provide an EDOF image that is substantially in focus over a large depth of field. Various aspects of such an EDOF imaging process are described in further detail in the references incorporated herein.

[0066] In various embodiments, a user interface input / output module 402 of the system host circuits and routines 401 can be used to output EDOF images of the workpiece 20 in near real-time. In some embodiments, multiple EDOF images can be provided and displayed in a live video display window coupled to the user interface input / output module 402.

[0067] Such image exposure and processing may be controlled by the EDOF mode processing module 442. In some embodiments, the prepared image is input to a frame grabber included in the SLPRC 131e, and processing of the prepared image is performed in a processor included in the frame grabber such that the EDOF image is output from the frame grabber (e.g., for display on the user interface input / output module 402) and the prepared image is not output from the frame grabber. In various embodiments, the EDOF image exposure sequence is configured to acquire the prepared image at a high speed, such as less than 500 milliseconds, or less than 250 milliseconds, or less than 100 milliseconds, or less than 50 milliseconds. In various embodiments, the control timing of each of the multiple individual image exposure increments used to acquire the prepared image is defined as a predetermined sequence within the EDOF image exposure sequence, and the SLPRC 131e is configured to provide the entire prepared image based on a single start signal 404 that initiates the predetermined sequence.

[0068] In various embodiments, at least a portion of the SLPRC 131e is included in the driver and illumination system 410 of the TAG lens imaging system 10, and at least a portion of the EDOF exposure control data set defining the EDOF image exposure sequence is included in or input to the driver and illumination system 410 (e.g., in image frame parameter store 417). In various embodiments, at least a portion of the SLPRC 131e can be included in a frame grabber of the TAG lens imaging system 10 (e.g., the frame grabber of image acquisition storage and processing circuitry and routines 405), and at least a portion of the EDOF exposure control data set is included in or input to the frame grabber.

[0069] It should be noted that each of the various components, circuits, routines, and modules of the SLPCRC 131e described above with reference to Figure 4 may be interconnected by one or more data / control buses and / or application programming interfaces or by direct connections between the various elements. Although the SLPCRC 131e is illustrated in Figure 4 as including or formed from system host circuits and routines 401, image acquisition storage and processing circuits and routines 405, lens control 408, and driver and illumination system 410, the SLPCRC 131e may also be included, either distributed or not, within one or more of these elements, or within one or more other elements of the TAG lens imaging system 10 not shown in Figure 4, to support operation of the TAG lens imaging system 10 in PFF and EDOF modes in accordance with the principles disclosed herein.

[0070] FIG. 5 is a flow diagram 500 illustrating one embodiment of a method for operating a TAG lens imaging system 10 including an SLPRC 131e that provides PFF and EDOF modes.

[0071] In step 501, a smart illumination pulse control routine / circuit (SLPCRC) 131e is provided that supports a first exposure control mode corresponding to the PFF mode of the TAG lens imaging system 10 and a second exposure control mode corresponding to the EDOF mode of the TAG lens imaging system 10.

[0072] In step 503 , the workpiece 20 is placed within the field of view of the TAG lens imaging system 10 .

[0073] In step 505, the focus position FP of the TAG lens imaging system 10 is periodically modulated without macroscopically adjusting the spacing between elements in the TAG lens imaging system 10. The focus position FP is periodically modulated at a plurality of focus positions FP along the focus axis direction within a focus range R that includes the surface height of the workpiece 20 at a modulation frequency of at least 30 kHz.

[0074] In step 507, the TAG lens imaging system 10 is operated by activating the PFF mode for a first operating time period.

[0075] In step 509, optionally, the TAG lens imaging system 10 is operated by activating the EDOF mode for a second operating time period.

[0076] FIG. 6 illustrates an exemplary timing diagram 600A for focus height during image exposure that may be used in one embodiment of the TAG lens imaging system 10 operating in PFF mode according to the principles disclosed herein. The timing diagram 600A illustrates a periodically modulated focus position MFP of the variable focus TAG lens imaging system 10, which is periodically modulated (illustrated along the time axis) at multiple focus positions FP along the focus axis direction (illustrated along the focal plane Z position axis) over a focus range FR. The timing diagram 600A further illustrates the exposure times of the camera (e.g., image detector 260) as "camera frame i=0", "camera frame i=128", and "camera frame i=255" (camera frames i=1-127 and i=129-254 between these illustrated camera frames are not illustrated to omit unnecessary detail). Overall, the timing diagram 600A represents the exposure of a stack of images (image stack) resulting from a PFF image exposure sequence defined by a PFF exposure control data set included in or input to the SLPRC 131e. The PFF image exposure sequence is a sequence of multiple individual image exposure increments (e.g., EI1 to EI2 in the example shown in FIG. 6) acquired at individual focus positions FP corresponding to each phase of the periodically modulated focus position MFP. 50 , E.I. 1a ~EI 50a , and E.I. 1b ~EI 50b For example, EI1 to EI 50 is acquired at the focal position Z1, and EI 1a ~EI 50a is acquired at the focal position Z2, and EI 1b ~EI 50bis acquired at focus position Z3. The reference abbreviation EI may include a subscript "i" to indicate a particular "i-th" exposure increment EI corresponding to a particular focus position. A plurality of individual image exposure increments EI1 to EI 50 , E.I. 1a ~EI 50a , and E.I. 1b ~EI 50b Each of these is determined by a respective instance of an illumination source strobe operation (shown in FIG. 6 as circles positioned on a sine wave representing the periodically modulated focus position MFP), which as described above may be an instance of an illumination source strobe operation, a camera shutter strobe operation, a frame grabber capture / store operation, etc., and has a defined control timing in the PFF image exposure sequence (T1 to T50, T1a to T50a, and T1b to T50b in FIG. 6).

[0077] FIG. 7 illustrates an exemplary graphical user interface (GUI) 700, depicted as a screenshot of a display device associated with the TAG lens imaging system (such as user interface input / output module 402). This allows for user control (e.g., user input) of a PFF exposure control data set that defines a PFF image exposure sequence used to expose an image stack in PFF mode. The GUI 700 includes a switch 702 that is selected to activate the TAG lens imaging system 10 in PFF mode. The GUI 700 includes an image frame parameters field 704, which in the illustrated example includes a PFF map Zi step ("Nzi") field 706, an exposure pulse per Zi step ("Npul" field) 707, and a frame per Zi ("NfperZi") field 708. In various embodiments, the PFF exposure control data set used to define the PFF image exposure sequence can be the parameter set entered in the image frame parameters field 704 in the example of FIG. 7.

[0078] In the GUI 700 of FIG. 7, the user / operator can define the total number of Zi steps defined for the image stack in the PFF map Zi steps ("Nzi") field 706, which is "256" in this example. In various examples, the Nzi number corresponds to the number of rows shown in the "Table Rows" field 718 of the frame pulse table 710, as described below. In various embodiments, a frame exposure is performed corresponding to at least one exposure pulse at a particular focal height ("Zi") of the TAG lens imaging system 10, and the number of exposure pulses per Zi step is shown in the exposure pulses per Zi step ("Npul" field) 707. If multiple exposure pulses per Zi are defined, the results from the multiple exposure pulses can be combined (e.g., averaged or mosaicked results from different XY positions) to form one image (frame) per Zi. In FIG. 7, Npul=50 is shown at 707. This corresponds to giving 50 image exposure increments using 50 instances of exposure pulses per Zi (e.g., in the example shown in FIG. 6, EI1 to EI 50 , Z2 with EI 1a ~EI 50a , Z3 with EI 1b ~EI 50b ). A user / operator can specify at least one frame per Zi in the frames per Zi ("NfperZi") field 708 of GUI 700. These frames can be combined (e.g., averaged) to form one image per Zi. In the illustrated example, the user / operator specifies NfperZi=1, which means that one frame per Zi will be acquired, as shown in FIG. 6.

[0079] In various embodiments, the PFF image exposure sequence defined by the PFF exposure control data set is represented in the form of a frame pulse table 710 in FIG. 7. This table 710 lists the "Z step, i=" 712, pulse width 714, and pause 716, all in nanoseconds (nS), for each of the total number of images forming the image stack (e.g., a total of "256" images consisting of camera frames i=0 to 255, as shown in the "Table Row" field 718). Thus, in the example of FIG. 7, the PFF image exposure sequence defines 256 frames (images), which form an image stack, shown (at 712) as Z steps, i=0 to 255. The image exposure at each Z step (each Z focus position) is associated with a particular light pulse width (at 714) and a pause before the light pulse (at 716).

[0080] Returning to FIG. 6, below the timing diagram 600A, a pulse diagram 600B is shown, which illustrates the timing of a master timing signal 602 (e.g., 70 kHz) output from the lens control 408 (see FIG. 4) and an image exposure pulse 604 for exposing an image stack (e.g., 256 images) in PFF mode. The pulse diagram 600B illustrates that an image exposure at a first focus position "Z step, i=0" (at 712) is triggered by the master timing signal 602, followed by a corresponding pause time period (at 716), followed by a light exposure having a defined pulse width (at 714), followed by an idle time period, after which the next image exposure at the same focus position ("Z step, i=0") is triggered by another master timing signal 602 "Npul=50" times (i.e., the number of times the image exposure at "Z step, i=0" is repeated). Next, "i" is incremented by 1, and in Z steps, i=1, the image exposure sequence according to the master timing signal 602 and the image exposure pulse 604 is repeated "Npul=50" times. In Z steps, i=2 to 255, the same image exposure sequence is repeated in the same manner.

[0081] In FIG. 6, a single start signal 404 (see FIG. 4) may initiate the PFF image exposure sequence graphed in timing diagram 600A at time 606, and frame exposure of "camera frame i=0" may be initiated at time 608 by image timing signal 420 and group timing signal 430 generated by SLPRC 131e (FIG. 4). After camera frames i=1-127 are exposed (not shown), frame exposure of "camera frame i=128" may be initiated at time 610 by image timing signal 420. After camera frames i=129-254 are exposed (not shown), frame exposure of "camera frame i=255" may be initiated at time 612 by image timing signal 420. After the entire image stack (e.g., a total of 256 images from Z=0-255) have been exposed, the PFF image exposure sequence ends at time 614 based on group timing signal 430. In general, image timing signals 420 control the start and / or end of an image exposure (or frame exposure), and group timing signals 430 control the start and / or end of an exposure of a stack (or group) of images used in PFF mode. In the embodiment shown in Figure 4, image timing signals 420 and group timing signals 430 corresponding to a PFF image exposure sequence are generated by a timing and control module 411 of driver and illumination system 410, although these timing signals 420 and 430 may be generated by any component associated with SLPRC 131e in accordance with the principles disclosed herein.

[0082] In some embodiments, the PFF image exposure sequence, as represented in, for example, the frame pulse table 710, can be explicitly, manually, or semi-manually defined, for example, by a user / operator filling in the frame pulse table 710. Additionally or alternatively, in various embodiments, the PFF image exposure sequence can be algorithmically generated based on a PFF exposure control data set included in or entered into the SLPRC 131e, for example, in the image frame parameters field 704 of the GUI 700 shown in Figure 7. In this regard, the GUI 700 of Figure 7 further includes radio buttons labeled "Clear Table" 720, "Read Table" 722, "Write Table" 724, "Commit Flash" 726, and "Import CSV" 728. In an exemplary embodiment, a "Clear Table" 720 button clears the currently displayed frame pulse table 710, a "Read Table" 722 button reads a predefined PFF image exposure sequence from one or more predefined PFF image exposure sequences stored in a memory device (e.g., PFF mode lookup table (LUT) storage portion 415 of FIG. 4), and a "Import CSV" 728 button imports a predefined PFF image exposure sequence from a machine vision inspection system associated with the TAG lens imaging system 10. A "Write Table" 724 button allows a user / operator to write a new PFF image exposure sequence to the frame pulse table 710, in volatile memory in various embodiments. A "Commit Flash" 726 button commits the newly written PFF image exposure sequence to non-volatile memory, such as flash memory (e.g., PFF mode lookup table (LUT) storage portion 415 of FIG. 4), which can later be retrieved by the TAG lens imaging system 10 operating in PFF mode.

[0083] Because the TAG lens imaging system 10 operating in PFF mode in accordance with the principles disclosed herein provides rapid 3D mapping of the surface shape of a workpiece, such imaging system can be used to rapidly and repeatedly collect 3D surface coordinates of a workpiece and display the 3D mapping as real-time video frames.

[0084] FIG. 8 illustrates an exemplary timing diagram 800A for focus height during image exposure that may be used in one embodiment of the TAG lens imaging system 10 operating in EDOF mode according to the principles disclosed herein. The timing diagram 800A illustrates the periodically modulated focus position MFP of the variable focus TAG lens imaging system 10, which is periodically modulated (illustrated along the time axis) at multiple focus positions FP along the focus axis direction (illustrated along the focal plane Z position axis) across the focus range FR. The timing diagram 800A further illustrates the exposure times of the camera (e.g., image detector 260) as "camera frame-frame 1" and "camera frame-frame 2." In total, the timing diagram 800A illustrates the exposure of one or more preliminary images resulting from an EDOF image exposure sequence defined by an EDOF exposure control data set included in or input to the SLPRC 131e. The EDOF image exposure sequence includes multiple separate image exposure increments (e.g., EI1-EI2 in the example illustrated in FIG. 8) acquired at separate focus positions FP corresponding to each phase of the periodically modulated focus position MFP. 255 and E.I. 1a ~EI 255a ) The reference abbreviation EI may include a subscript "i" to indicate a particular "i-th" exposure increment EI corresponding to a particular focus position. 255 and E.I. 1a ~EI 255aEach of these is determined by a respective instance of an illumination source strobe operation (shown in FIG. 8 as a circle positioned on a sine wave representing the periodically modulated focus position MFP), which as described above may be an instance of an illumination source strobe operation, a camera shutter strobe operation, a frame grabber capture / store operation, etc., and has a defined control timing in the EDOF image exposure sequence (T1 to T255 and T1a to T255a).

[0085] 9 illustrates an exemplary graphical user interface (GUI) 900, depicted as a screenshot of a display device associated with the TAG lens imaging system (such as user interface input / output module 402), that allows user control (e.g., user input) of an EDOF exposure control data set that defines an EDOF image exposure sequence used to expose preliminary images in EDOF mode. The GUI 900 includes a switch 902 that is selected to activate the TAG lens imaging system 10 in EDOF mode. The GUI 900 includes an image frame parameters field 904, which in the illustrated example includes a Z step per cycle ("Nzstep") field 906, a Z cycles per frame ("Ncyc") field 907, and a frames per EDOF image ("Nf") field 908. In various embodiments, the EDOF exposure control data set used to define the EDOF image exposure sequence can be the parameter set entered in the image frame parameters field 904 in the example of FIG. 9. In various embodiments, the EDOF image exposure sequence defined by the EDOF exposure control data set is expressed in the form of a Z-cycle pulse table 910. This table 910 is organized into individual image exposure increments per frame (EI1 to EI in FIG. 8) as shown in a "table row" field 918. 255 Or EI 1a ~EI 255a9 lists the "Z step, i=" 912, pulse width 914, and pause 916, all in units of nanoseconds (nS), for each of a total number of light pulses (e.g., "256") in the EDOF image exposure sequence. In the example of FIG. 9, the EDOF image exposure sequence defines 256 image exposure increments EI per frame, which are shown as Z steps, i=0 to 255. Associated with each image exposure increment EI is a particular light pulse width (914) and pause before the light pulse (916).

[0086] Returning to FIG. 8, below the (two frame) timing diagram 800A, a pulse diagram 800B per frame is shown. The pulse diagram 800B shows the timing of the master timing signal 802 (e.g., 70 kHz) output from the lens control 408 (see FIG. 4) and the image exposure pulses 804 per frame. The pulse diagram 800B shows that an image exposure increment EI at "Z step, i=" (at 912) is triggered by the master timing signal 802, followed by a corresponding pause time period (at 916), followed by a light exposure having a prescribed pulse width (at 914), followed by an idle time period, before the next image exposure increment EI ("Z step, i=", where "i" has been incremented by 1) is triggered by another master timing signal 802. Although pulse diagram 800B shows only pulse signaling for the first three image exposure increments EI1-EI3 in Z steps, i=0, 1, and 2, in the illustrated example, pulse diagram 800B shows pulse signaling for all of the image exposure increments defined for each frame, i.e., EI1-EI3 in Z steps, i=0-255. 256 It will be understood that the discussion will continue with respect to the above.

[0087] In the GUI 900 of FIG. 9, a user / operator can define the total number of Z steps per periodic modulation cycle in the Z steps per cycle ("Nzstep") field 906, which is "256" in this example. In various examples, the Nzstep number corresponds to the number of rows shown in the "Table Rows" field 918 of the Z cycle pulse table 910, as shown. In various embodiments, a frame exposure is performed corresponding to at least one cycle ("Z cycle") of the periodic modulation of the focal height of the TAG lens imaging system 10 over the desired focus range FR, and the number of Z cycles per frame is shown in the Z cycles per frame ("Ncyc" field) 907. If multiple Z cycles per frame are performed, the results from the multiple Z cycle exposures can be combined (e.g., averaged) to form one prepared image (or prepared frame). Although Ncyc=8 is shown in FIG. 9 at 907, the timing diagram 800A and pulse diagram 800B of FIG. 8 show an example of Ncyc=1 for clarity of illustration. A user / operator can specify at least one prepared image (prepared frame) in the frames per EDOF image ("Nf") field 908 of the GUI 900. The prepared images can be processed to form a single EDOF image having a larger depth of field and that is substantially in focus throughout the larger depth of field. In the illustrated example, the user / operator specifies Nf=2, which means that two prepared images (prepared frames) are processed (combined, averaged, etc.) to form a single EDOF image, as shown in the timing diagram 800A of FIG. 8.

[0088] In FIG. 8, at time 806, a single start signal 404 (see FIG. 4) can start the EDOF image exposure sequence graphed in timing diagram 800A, and at time 808, a frame exposure of “Frame 1” can be started by image timing signal 420 and group timing signal 430 generated by SLPRC 131e (FIG. 4). At time 810, a frame exposure of “Frame 2” can be started by image timing signal 420. In the illustrated example, since two preparatory images are processed to form one EDOF image (e.g., “Nf=2” at 908), after exposure of “Frame 2”, at time 812, the EDOF image exposure sequence ends based on group timing signal 430 (or based on the value of Nf). Generally, in various embodiments, image timing signal 420 controls the start and / or end of an image exposure (or frame exposure), and group timing signal 430 controls the start and / or end of an entire EDOF image exposure sequence (e.g., exposing a group of preparatory images) to obtain one EDOF image. In the embodiment shown in FIG. 4, the image timing signal 420 and group timing signal 430 corresponding to the EDOF image exposure sequence are generated by a timing and control module 411 of the driver and lighting system 410, however, these timing signals 420 and 430 may be generated by any component associated with the SLPRC 131e in accordance with the principles disclosed herein.

[0089] In some embodiments, the EDOF image exposure sequence, as represented, for example, in Z-cycle pulse table 910, can be explicitly, manually, or semi-manually defined, for example, by a user / operator filling in Z-cycle pulse table 910. Additionally or alternatively, in various embodiments, the EDOF image exposure sequence can be algorithmically generated based on an EDOF exposure control data set included in or entered into the SLPRC 131e, for example, in the image frame parameters field 904 of the GUI 900 shown in Figure 9. In this regard, the GUI 900 of Figure 9 further includes radio buttons labeled "Clear Table" 920, "Read Table" 922, "Write Table" 924, "Commit Flash" 926, and "Import CSV" 928. In an exemplary embodiment, a "Clear Table" 920 button clears the currently displayed Z-cycle pulse table 910, a "Read Table" 922 button reads a predefined EDOF image exposure sequence from one or more predefined EDOF image exposure sequences stored in a memory device (e.g., EDOF mode lookup table (LUT) storage 416 of FIG. 4), and a "Import CSV" 928 button imports a predefined EDOF image exposure sequence from a machine vision inspection system associated with the TAG lens imaging system 10. A "Write Table" 924 button allows a user / operator to write a new EDOF image exposure sequence to the Z-cycle pulse table 910, in volatile memory in various embodiments. A "Commit Flash" 926 button commits the newly written EDOF image exposure sequence to non-volatile memory, such as flash memory (e.g., EDOF mode lookup table (LUT) storage 416 of FIG. 4), which can later be retrieved in the TAG lens imaging system 10 operating in EDOF mode.

[0090] Because the TAG lens imaging system 10 operating in EDOF mode in accordance with the principles disclosed herein provides high speed extended depth of field imaging, such imaging system can be used to rapidly and repeatedly collect EDOF images for video imaging at, for example, 30 frames per second or more, and display multiple EDOF images as real-time video frames.

[0091] FIG. 10A is a circuit diagram of an embodiment of a power supply and voltage regulator used with the driver and lighting system 410, and FIG. 10B is a circuit diagram including an embodiment of the driver and lighting system 410 of the smart lighting pulse control routine / circuit (SLPCRC) 131e of FIG. 4 according to the principles disclosed herein. FIG. 11 is a partial schematic isometric view of one layout for implementing the circuit diagram of FIG. 10B on a printed circuit board according to the principles disclosed herein. In the illustrative embodiment of FIG. 11, the layout is shown in four layers L1-L4 of a compact multi-layer printed circuit board layout. Layers L1 and L3 on the right side of FIG. 11 correspond to layers L4 and L2 on the left side of FIG. 11 when flipped. FIG. 12 is a detailed view of a portion of layer L4 of FIG. 11, showing certain elements in more detail.

[0092] In Figures 10A-12, by convention, certain circuit nodes N1-N5 disclosed in Figure 10B are numbered the same in Figures 11 and 12. Components or component groups connected between these nodes are numbered or named accordingly. For example, element E43 is connected between nodes N4 and N3. In one particular example of FIG. 10A , the components may have values / types such as J1=02B-EH, V1=24V, C9=2.2UF, R2=18.7K, C11=2NF, C10=56PF, R3=226K, C1=0.1UF, L1=SDR1105-330KL, R1=60.4K, D1=B560C, R4=11.5K, FB1=600(1.3A), C6=47UF, V2=5V, C3=0.1UF, C16=1UF, V3=3.3V, C4=0.1UF, C5=10UF, V4=1.2V, C14=1UF, etc. In one particular embodiment of FIG. 10B, the components are as follows: V1=24V, C24=0.22UF, C25=0.22UF, C26=0.22UF, C27=0.22UF, C28=0.22UF, C29=0.22UF, C32=0.22UF, C33=0.22UF, C43=0.22UF, C35=0.22UF, The values / types may be C36=0.22UF, C37=0.22UF, C63=0.22UF, C64=0.22UF, C65=150UF, L12=6UH, R42=102K, V2=5V, R24=200K, C38=1UF, C48=0.1UF, R41=1.00K, R22=4.99K, C45=0.1UF, etc. In the sample embodiment of FIG. 10B, an inductor L12 is used. In the prior art, it is more common to use resistors instead of inductors at similar locations in the circuit. In contrast, the inductor L12 offers several advantages that cannot be achieved with resistors. For example, resistors are a major source of heat, which may be a disadvantage in various applications.

[0093] C23 is disclosed as a capacitor bank, which may provide some layout and / or performance advantages over, for example, a single capacitor, although in other embodiments fewer or more capacitors may be used for C23.

[0094] ZD42 is disclosed as two Zener diodes, which offers some advantages in layout and / or operating characteristics compared to a single diode or diodes of different types, although in other embodiments fewer or more diodes of different types may be used for ZD42.

[0095] T543 is disclosed as two gallium nitride FET transistors. This offers several layout and / or operating characteristic advantages over a single transistor or transistors of different types. In some embodiments, PCB layout according to the principles disclosed herein reduces circuit inductance to such an extent that voltage-sensitive gallium nitride FETs can be used, providing higher efficiency and speed. However, in other embodiments, fewer or more diodes of different types may be used for T543.

[0096] 10B, a gate trigger circuit GTC is disclosed for receiving a pulse control signal PULSE IN (e.g., for an FPGA) and providing an associated pulse signal having appropriate level and characteristics to T543 of node N5. The configuration of the gate trigger circuit GTC is merely exemplary and not limiting.

[0097] 10A-12, disclosed is an example of a high power fast pulse driver and illumination system 410. The driver and illumination system 410 is particularly useful for overdriving an LED high power strobe illumination source 414 to provide incoherent illumination, although in some applications the driver and illumination system 410 may be used in combination with other devices.

[0098] With respect to using the driver and illumination system 410 with the TAG lens imaging system 10, it can be shown that when acquiring measurement images, it is desirable for the change in focal plane during acquisition to be on the order of 0.2 or 0.25 of the depth of focus. In some useful optical configurations, this may require pulse lengths in the short range of 12 to 80 nanoseconds. The driver and illumination system 410 disclosed herein can provide pulse durations on this order. For example, it is possible to reduce the duration to 10 nanoseconds, with an adjustment resolution of 5 nanoseconds.

[0099] The driver and lighting system 410 disclosed herein can be operated in various operating modes (e.g., PFF and EDOF modes as described above, or various supply voltages and / or pulse lengths) for compatibility or optimization for a variety of different applications.

[0100] In one embodiment, the LEDs used to form the high power strobe illumination source 414 have a size of 9 square millimeters (mm 2 ) or more. The driver and lighting system may be capable of handling very high currents (e.g., 50-250 A, e.g., 220 A) and / or very high current densities (e.g., 5-12 A / mm 2 , for example 11A / mm 2 ) to overdrive it. The light source may be operated at a low duty cycle (e.g., 1-2% or less) to preserve operational lifetime. Additionally or alternatively, different techniques may be employed to preserve operational lifetime, such as operating the light source in a burst mode with a high duty cycle approaching 10% for shorter intervals.

[0101] FIG. 13 is a flow diagram illustrating one embodiment of a method for operating a TAG lens imaging system including a driver and illumination system in accordance with the principles disclosed herein.

[0102] Step 1301 includes providing a smart illumination pulse control routine / circuit (SLPCRC) that provides a first exposure control mode corresponding to at least one of a point-from-focus (PFF) mode of the TAG lens imaging system or a second exposure control mode corresponding to an extended depth of focus (EDOF) mode of the TAG lens imaging system. The SLPCRC includes an illumination light source and a driver circuit configured to overdrive the illumination light source with a high current and / or a high current density. The high current is a current greater than a manufacturer's recommended current used to drive the illumination light source, and the high current density is a current density greater than a manufacturer's recommended current density used to drive the illumination light source.

[0103] Step 1303 includes placing a workpiece within the field of view of a TAG lens imaging system.

[0104] Step 1305 includes operating the TAG lens imaging system by (i) activating a PFF mode or an EDOF mode, (ii) periodically modulating the focus position of the TAG lens imaging system at multiple focus positions along the focus axis direction within a focus range that includes the surface height of the workpiece, and (iii) controlling the SLPCRC to define multiple exposure increments to obtain a single image focused at the multiple focus positions, or multiple images each focused at the multiple focus positions, or a single image focused at a single focus position.

[0105] In contrast to commercially available short-pulse LED driver circuits that use expensive and risky voltage supplies on the order of 100 volts, the disclosed driver and lighting system 410 can use voltage supplies on the order of 24 volts or less. In some embodiments, the driver and lighting system 410 can use gallium nitride FETs as T543 (see FIGS. 10A-12) in combination with such supply voltages.

[0106] In various embodiments, the driver and lighting system 410 disclosed herein is configured without the need for current limiting resistors and the attendant detrimental effects on the driver and lighting system's operational goals. Instead, the current limit can be established by using a particular power supply voltage (e.g., a particular voltage of 21V in one embodiment) in the circuitry to ensure that a current greater than desired is not available. For example, 21V may be specifically configured and intended, although 24V may be a typical choice, to provide the maximum current desired in the exemplary application of the present disclosure. In some embodiments, the driver and lighting system 410 circuitry is configured to switch from a high pulse rate mode to a low pulse rate mode in the event of an overcurrent, such as with respect to a FET failure, to configure the power supply with internal current protection to prevent long-term damage. Additionally, the driver and lighting system 410 can be configured to provide pulsing control with a pulse generator to limit one or more pulse widths to one or more safe levels, rather than utilizing known techniques of using limiting resistors to limit current and / or power levels. In other words, in some embodiments, the power pulse duration is limited to limit the average power over a particular period, but the power or current within that pulse duration is not affected by the current limiting resistor. Pulse duration and pulse rate are integral factors that determine voltage, power loss, etc.

[0107] In various embodiments, the drivers and lighting systems 410 disclosed herein are constructed without the need for current "sensing" resistors (not to be confused with current limiting resistors) and the attendant detrimental effects on the operational goals of the drivers and lighting systems. For example, current sensing resistors, while not typically a significant heat source, add undesirable inductance to high current loops, which slows rise times, requires wider pulse widths, and creates inductive kickback that can damage FETs.

[0108] In various embodiments, the driver and lighting system 410 disclosed herein is implemented using an innovative PCB layout configuration that is designed to reduce circuit inductance to a minimum, even the smallest details that are generally not recognized or noticeable in the prior art. This allows faster rise times, shorter pulse widths, and reduced FET spike voltages compared to known driver and lighting systems, while allowing for extremely high pulse currents to the LEDs. It will be appreciated that current known systems, such as those disclosed in U.S. Pat. No. 9,603,210, which is incorporated herein in its entirety by reference, have exhausted known techniques to provide current performance. As outlined in the Background above, this performance is insufficient in many applications. To provide the performance achieved in accordance with the principles disclosed herein, the impedance characteristics and loop areas created by many or all of the PCB circuit traces used to implement the circuit must be considered, along with the currents flowing through those traces, their relative orientation, etc. Of course, this will depend at least in part on the configuration and component selection of the circuit components connected by the PCB traces. For this reason, in some embodiments, certain components of particular types and / or values ​​disclosed herein and their combinations are particularly important to achieve the performance outlined herein. In this regard, in some embodiments, the elimination or exclusion of various components or design techniques used in prior art systems may be particularly important. In some embodiments, the individual wiring of the particular configurations disclosed herein and / or their relative layout in all three dimensions (e.g., their routing in one or more circuit layers, etc.) are particularly important to achieve the performance outlined herein. Of course, the routing and component selection are independent.Thus, in some embodiments, the combination of various components and / or component values ​​and / or design principles and / or the layout of the wiring connecting them in the combinations and configurations disclosed herein and / or their relative relationships in three dimensions (e.g., in a multi-layer PCB arrangement) are particularly important to achieve the performance outlined herein. It will be appreciated that in some embodiments, the compactness of the layouts disclosed herein is also an aspect of the three-dimensional layout that affects performance.

[0109] It will be appreciated that the combinations and configurations disclosed herein are particularly important for achieving the performance outlined herein in an unprecedentedly economical and compact manner.

[0110] In some embodiments, the driver and lighting system 410 can be controlled by pulses from an FPGA capable of performing 200 MHz pulsing at 5 nanoseconds.

[0111] In FIG. 11, the traces providing the various nodes are shown to include a wide plate-like or planar area. In contrast to a ground plane configured to extend over a wide area for the purpose of shielding and / or shunting undesired stray signals, in the present disclosure, the various node traces in FIG. 11 are made wider than conventional practice to minimize certain loop areas between certain traces and / or reduce the resistance and / or inductance associated therewith and / or to distribute currents in a desired manner among such traces. In accordance with these principles, in some embodiments, at least some of the node traces are configured in one or more of the layers to reduce the spacing between adjacent node traces to a practical minimum. In accordance with these principles, in some embodiments, at least some of the node traces are configured in a plate or planar configuration that occupies 5% or 10% or more of the "total footprint" of the compact layout of the driver circuit (e.g., the projected area including all of the node traces shown in FIG. 11).

[0112] In some embodiments, in accordance with principles disclosed herein, at least some of the node wires are configured to extend below the components to which they are connected, in order to substantially reduce the loop area that occurs between such components and wires other than the node wires to which such components are connected.

[0113] In some embodiments, different node wires carrying currents that flow partially or entirely in opposite directions may be placed on layers that are relatively close to each other to minimize the three-dimensional loop area between them. In some embodiments, different node wires carrying currents that flow in similar directions may be placed on layers that are relatively far from each other (e.g., compared to the aforementioned "opposite" current node wires), because the relatively large three-dimensional loop area between such wires has less effect on circuit behavior when currents flow in the same direction through such node wires. As used herein, the term "loop area" may refer to a partially formed or incomplete loop. The point is related to the interaction between the wires for relevant electrical properties, and is not limited to a strict interpretation of the geometry that may be associated with various terms in a geometric or mathematical sense. As an example of this principle, in the particular layout disclosed in FIG. 11, the current (indicated by arrows on layers L2, L3, and L4) is directed away from the LEDs 24 on layer 4 (layer L1) and toward the LEDs 24 on layers 3 and 2. The thin pre-impregnated material separation layers 4 and 3 have currents flowing in opposite directions, minimizing the inductance of the loops formed on layers 4 and 3, while currents flow in the same direction on layers 2 and 3, negating the inductance between those two layers.

[0114] In various embodiments, the LED 24 (shown diagrammatically but not physically on layer L1 of FIG. 11) can be inserted directly into a slot in the PCB without a standard socket to reduce inductance.

[0115] In various embodiments, circuits and layouts in accordance with the principles disclosed herein have demonstrated performance characteristics similar to or better (e.g., brighter / faster) than in combination with incoherent pulsed illumination, including: It generates current pulses of over 100A to the LED (compared to 40-50A in conventional technology). It provides current pulses of 10 to 80 nanoseconds duration (compared to 40A in microseconds for conventional technology). Provide a repetition rate of at least 140 kHz. The duty cycle is limited to 1.12% (or higher or lower in some embodiments) to maintain LED life (prior art is 13%). It produces a peak power of 12 W / pulse (~1 μJ / pulse) within the field of view of the microscope (conventional technology is about 12 W, but uses 50 A x 20 microseconds, not below 1 microsecond).

[0116] It will be appreciated that the particular component values ​​illustrated in the various figures provide one example that may provide the performance outlined herein, however, other configurations may use other component values ​​for the various components and still provide the various advantages disclosed herein.

[0117] While various embodiments of the invention have been shown and described, numerous variations in the arrangement and sequence of operations of the features shown and described will be apparent to those skilled in the art based on this disclosure. It will thus be appreciated that various changes may be made without departing from the spirit and scope of the invention.

[0118] Further aspects and descriptions of the circuits, layouts, LEDs, and associated control and optical systems outlined above are described in more detail in the accompanying appendices, which, in combination with the features and principles outlined above, can provide one of ordinary skill in the art with a thorough understanding of various potential implementations or embodiments of the invention disclosed herein, and associated features, advantages, and performance.

[0119] This application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 894,277, filed August 30, 2019, which is incorporated herein by reference in its entirety.

Claims

1. A high power, high speed pulse driver and illumination system for high speed metrology imaging, comprising: An illumination source; a driver circuit configured to overdrive the illumination source with a current and / or a current density; Equipped with the illumination source is configured to be operated using a lifetime maintenance technique selected from a first technique of operating the illumination source at a low duty cycle of 2% or less or a second technique of operating the illumination source in a burst mode with a high duty cycle approaching 10%; The driver circuit includes: a node N1 coupled to a power supply; a node N2 coupled to node N1 via an inductor L12 and providing an anode for the illumination source; a node N3 coupled to node N2 through one or more capacitors C23 and providing an input for receiving control pulses for driving said illumination light source; a node N4 coupled to node N3 via element E43 and to node N2 via one or more diodes D42, providing a cathode for said illumination source; a node N5 coupled to a gate trigger circuit GTC for receiving a pulse control signal PULSE IN for driving the illumination light source, the node N5 being coupled to nodes N4 and N3 via one or more transistors T543; Including, Driver and lighting systems.

2. The driver and lighting system of claim 1 , wherein the one or more transistors T543 comprise a Gallium Nitride FET.

3. 2. The driver and lighting system of claim 1, wherein the driver circuit is configured to perform pulse regulation to limit one or more pulse widths of the pulse control signal PULSE IN to one or more safe levels in the case of an overcurrent.

4. 2. The driver and lighting system of claim 1, wherein the driver circuit is configured to switch from a high pulse rate mode of operation to a low pulse rate mode of operation in the event of an overcurrent.

5. 13. The driver and lighting system of claim 1, which is incorporated into a variable focus lens (VFL) system and, during operation, defines multiple exposure increments for obtaining a single image focused at multiple focal planes of the VFL system, or multiple images focused at multiple focal planes of the VFL system, or a single image focused at a single focal plane of the VFL system.

6. The driver and lighting system of claim 5 , wherein the VFL system is a Variable Acoustic Gradient Index (TAG) lens system.

7. 6. The driver and lighting system of claim 5, wherein the change in focal plane during one of the exposure increments is on the order of 0.2 to 0.25 of the depth of focus (DOF) of the VFL system.

8. 8. The driver and lighting system of claim 7, wherein a pulse length corresponding to one of the exposure increments is in the range of 12 nanoseconds to 80 nanoseconds.

9. 8. The driver and lighting system of claim 7, wherein a pulse length corresponding to one of the exposure increments is 10 nanoseconds.

10. The driver and lighting system of claim 1 , wherein the illumination source comprises one or more light emitting diodes (LEDs).

11. The LEDs are each at least 9 mm 2 and the current density is 5 A / mm 2 from 12A / mm 2 11. The driver and lighting system of claim 10, wherein:

12. 10. The driver and lighting system of claim 1, wherein the illumination source is powered by a power supply on the order of 24 volts or less.

13. 13. A driver and lighting system as claimed in claim 12, wherein the power supply is of the order of 21 volts.

14. 10. The driver and lighting system of claim 1 , embodied in a printed circuit board (PCB) layout configuration having a specific configuration of individual components and relative layout in three-dimensional layers.

15. 15. The driver and lighting system of claim 14, wherein at least some of the node wirings are configured as a plate or planar configuration occupying 5% or 10% of the total footprint of the PCB layout configuration.

16. 15. The driver and lighting system of claim 14, wherein at least some of the node wirings are configured to extend below the components to which they are connected when viewed orthogonal to the plane of the PCB layout configuration.

17. When viewed orthogonal to the plane of the PCB layout configuration, different node wirings carrying currents that flow in partially or wholly opposite directions are located on layers that are relatively close to each other; 15. The driver and lighting system of claim 14, wherein when viewed in the direction perpendicular to the plane of the PCB layout configuration, different node wirings carrying currents flowing in similar directions are located on layers that are relatively far from each other.

18. 1. A method for operating a tunable acoustic gradient index (TAG) lens imaging system, comprising: (a) providing a smart illumination pulse control routine / circuit (SLPCRC) that provides a first exposure control mode corresponding to at least one of a point-from-focus (PFF) mode of the TAG lens imaging system or a second exposure control mode corresponding to an extended depth of focus (EDOF) mode of the TAG lens imaging system; The SLPCRC is An illumination source; a driver circuit configured to overdrive the illumination source with a current and / or a current density; Including, the illumination source is configured to be operated using a lifetime maintenance technique selected from a first technique of operating the illumination source at a low duty cycle of 2% or less or a second technique of operating the illumination source in a burst mode with a high duty cycle approaching 10%; The driver circuit includes: a node N1 coupled to a power supply; a node N2 coupled to node N1 via an inductor L12 and providing an anode for the illumination source; a node N3 coupled to node N2 through one or more capacitors C23 and providing an input for receiving control pulses for driving said illumination light source; a node N4 coupled to node N3 via element E43 and to node N2 via one or more diodes D42, providing a cathode for said illumination source; a node N5 coupled to a gate trigger circuit GTC for receiving a pulse control signal PULSE IN for driving the illumination light source, the node N5 being coupled to nodes N4 and N3 via one or more transistors T543; Including, providing a SLPCRC; (b) placing a workpiece within a field of view of the TAG lens imaging system; (c) activating the PFF mode or the EDOF mode; periodically modulating a focus position of the TAG lens imaging system at a plurality of focus positions along a focus axis direction within a focus range that includes a surface height of the workpiece; and controlling the SLPCRC to define a plurality of exposure increments for obtaining a single image focused at the plurality of focus positions, or a plurality of images each focused at the plurality of focus positions, or a single image focused at a single focus position; operating the TAG lens imaging system by The method includes:

19. 20. The method of claim 18, wherein the change in focal plane during one of the exposure increments is on the order of 0.2 to 0.25 of the depth of focus (DOF) of the TAG lens imaging system.

20. 20. The method of claim 19, wherein a pulse length of a pulse control signal PULSE IN corresponding to one of the exposure increments is within a range of 12 nanoseconds to 80 nanoseconds.

Images