Laser Analysis Equipment

Abstract

This laser analysis device is provided with a laser analysis unit 1 in which a specimen W is irradiated with laser light, a cover 3 which covers the periphery of the laser analysis unit 1 such that the laser light is not emitted to the exterior thereof, and which has a slit S in at least a portion thereof, a fastener 4 provided in such a way as to be capable of opening and closing the slit S, and an interlock mechanism 5 equipped with a key 51 provided on the fastener 4, and a detector 52 which detects a state in which the fastener 4 is fully closed, wherein, in a state in which the detector 52 has detected that the fastener 4 is fully closed, laser light of at least a prescribed intensity is introduced into the laser analysis unit 1.

Description

[Technical field]

[0001] The present invention relates to a laser analysis device in which a sample is irradiated with laser light. [Background technology]

[0002] For example, in various analyses such as Raman spectroscopy, a laser beam is irradiated onto a sample, and the sample is analyzed by detecting the scattered light, transmitted light, and reflected light.

[0003] However, if a laser beam having a high energy density is incident on the eyes of an operator of a laser analysis device, it may cause a decrease in eyesight or blindness. For this reason, for example, the Japanese Industrial Standards provide several safety classes for products that emit laser beams. To meet the standards of safety class 1 (intrinsically safe), a protective housing must be provided, for example, to prevent human exposure to laser beams including stray lasers. In addition, if a door is provided for the protective housing to allow access to the equipment inside the protective housing, an interlock mechanism must be provided so that laser beams of a predetermined intensity or higher are emitted only when it is detected that the door is closed. (See Non-Patent Document 1).

[0004] Specifically, as shown in Patent Document 1, a conventional laser analysis device includes a box-shaped protective housing made of resin or sheet metal that houses the entire optical path of the laser light inside. This protective housing includes a main body, a door that is provided on the main body so as to be able to open and close, and a door detector that is provided at the opening of the main body so as to come into contact with the door only when the door is closed, and that constitutes an interlock mechanism.

[0005] However, when the door of the protective housing having the above-mentioned configuration is opened and closed, an impact is generated, which may cause a deviation in the internal optical system, which may result in an analysis error or the like. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2009-188128 A [Non-patent literature]

[0007] [Non-Patent Document 1] Japanese Industrial Standard, JIS C6802 Summary of the Invention [Problem to be solved by the invention]

[0008] The present invention has been made in consideration of the above-mentioned problems, and provides a laser analysis device having a protection mechanism for preventing exposure to radiation to the human body that can be opened and closed so as to prevent large impacts from being applied to the laser optical system. [Means for solving the problem]

[0009] That is, the laser analysis device of the present invention comprises a laser analysis unit in which laser light is irradiated onto a sample, a cover that covers the periphery of the laser analysis unit to prevent the laser light from being released to the outside and has a slit in at least a portion of it, a fastener that is arranged to be able to open and close the slit, and an interlock mechanism that includes a detector that detects when the fastener is fully closed, and is configured so that laser light of a predetermined intensity or more is introduced into the laser analysis unit when the detector detects that the fastener is fully closed.

[0010] In this way, the slit of the cover covering the laser analysis unit can be fully closed by moving the slider of the fastener, so that shock is unlikely to occur when the cover is fully closed. Therefore, even if the cover is configured to be openable and closable, it is possible to prevent misalignment in the laser analysis unit or the laser optical system connected thereto, which would cause errors in the analysis results of the sample.

[0011] Moreover, by simply moving the slider of the fastener to the fully closed position, all of the elements (teeth) of the fastener engage, and the slit can be easily closed without any gaps. Furthermore, since the fully closed state of the fastener is detected, the interlock is released only when there is no opening in the cover and there is no possibility of laser light being emitted from the laser analysis unit to the outside. In addition, by simply performing the action of closing the fastener, it is possible to easily confirm, for example visually, that the elements are continuously closed from one end to the other end.

[0012] For example, in order to prevent an impact from occurring even if the cover itself comes into direct contact with the laser analysis unit when the slit is opened or closed, the cover may be made of a flexible material. In addition, since the cover is flexible, when the fastener is opened, the opening area of ​​the slit can be increased or the cover itself can be pulled up, allowing an operator to easily access the laser analysis unit.

[0013] For example, when detecting that the fastener is fully closed by contact of the slider of the fastener or a key provided on the slider with the detector, in order to prevent even minute vibrations caused by contact with the detector from affecting the laser analysis unit, the laser analysis unit may be placed on a base plate and the detector may be placed on the base plate separately from the laser analysis unit. Since the detector is not provided on the laser analysis unit, the laser analysis unit is less likely to receive force when the fastener is fully closed to release the interlock. In addition, since the laser analysis unit is placed on a base plate, even if the optical system is composed of multiple divided parts, it is less likely to be misaligned, and misalignment of the optical system can be reduced.

[0014] For example, to make it easier to roll up the cover to form a large opening for accessing the laser analysis unit, the cover may have slits extending in the vertical direction in multiple locations, with a fastener provided for each slit.

[0015] A specific configuration example of the laser analysis unit suitable for the present invention is one in which the laser analysis unit has at least one opening that communicates with the outside from a point where the sample is irradiated with laser light.

[0016] In laser analysis, etc., after placing a sample in a predetermined location, it is sometimes necessary to surround the sample with a shield to prevent the surrounding air flow and light from affecting the analysis. However, if the shield is a housing with a door made of a metal plate or the like as in the past, vibrations that occur when the door is closed can cause deviations in the measurement system such as the optical system, or the sample itself can be affected by the vibrations, resulting in errors in the analysis. To solve this problem, a laser analysis device can be used that is characterized by having a laser analysis unit that irradiates the sample with laser light, and a flexible cover that covers the surroundings near the laser analysis unit to prevent the laser light from being emitted to the outside and has a slit at least in a part of it.

[0017] With this type of device, simply closing a flexible cover near the laser analysis unit can prevent light or airflow from entering the laser analysis unit from the outside, and prevent laser light from leaking out. Furthermore, since only a flexible cover is closed, vibrations that could cause problems in analysis are unlikely to occur in the first place. For these reasons, there is no need to install a large-scale mechanism to counter vibrations, and a laser analysis device that is easy to use and has a compact device configuration can be realized.

[0018] In one preferred embodiment of the laser analysis device according to the present invention, the laser analysis unit further includes a probe provided so as to be in contact with or in the vicinity of the sample. Effect of the Invention

[0019] In this way, according to the laser analyzer of the present invention, since the fastener is provided for the slit of the cover, the gap of the cover can be completely closed without causing a large impact to the laser optical system by moving the slider to the fully closed position. Therefore, while satisfying various safety standards, it is possible to reduce analysis errors caused by deviations in the laser optical system due to impacts more than ever before. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a schematic diagram showing a laser analysis device according to an embodiment of the present invention. [Diagram 2] FIG. 4 is a schematic cross-sectional view showing the structure of a laser analysis unit in the embodiment. [Diagram 3] FIG. 2 is a schematic diagram showing the laser analysis device in the embodiment with the cover removed. [Figure 4] FIG. 4 is a schematic diagram showing the laser analyzer in the embodiment with a part of the cover rolled up; [Diagram 5] FIG. 13 is a schematic diagram showing the laser analyzer in the embodiment with another part of the cover rolled up; [Figure 6] FIG. 4 is a schematic diagram showing a laser analysis device according to another embodiment of the present invention. [Figure 7] FIG. 13 is a schematic diagram showing details of a laser analysis unit in another embodiment. [Explanation of symbols]

[0021] 100 Laser analysis device 1. Laser analysis section 12...Tip 2. Optical system housing 3. Cover 31 .....Belt-shaped shielding section 32...Front shield part 33...Side shielding part 34...Fixed end 35 Screw 4. Fastener 41 ···Slider 5. Interlock mechanism 51 Keys 52 Detector DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] An embodiment of the present invention will be described with reference to FIGS.

[0023] The laser analysis device 100 of this embodiment is a nanoimaging spectrometer capable of simultaneously performing high-speed mapping of AFM (atomic force microscope) measurement and Raman spectroscopic measurement.

[0024] This laser analysis device 100 is housed in a glove box (not shown), and is configured so that an operator can operate each part from outside the glove box.

[0025] Specifically, as shown in FIG. 1, this laser analysis device 100 is equipped with a laser analysis section 1 in which laser light is irradiated onto a sample W and the scattered light, reflected light, etc. are detected, an optical system housing section 2 in which a laser optical system is housed in a sealed state inside, which guides the laser light to the laser analysis section 1 or guides the light detected by the laser analysis section 1 to the outside, and a cover 3 which covers the periphery of the laser analysis section 1 to block laser light that may be released to the outside from an opening 11 of the laser analysis section 1.

[0026] Each part will be described in detail.

[0027] As shown in Figures 1 and 2, the laser analysis unit 1 has a roughly cylindrical shape, and inside the laser analysis unit 1, a sample W is irradiated with laser light, and secondary light such as scattered light and reflected light generated therein is detected. The laser analysis unit 1 has an opening 11 for arranging the sample W at the laser irradiation position, etc. This opening 11 may allow stray laser light to reach the outside from the inside. In this embodiment, the rear side of the laser analysis unit 1 in Figure 1 is covered with the housing of the optical system housing unit 2, and this part is configured so that stray laser light is not emitted to the outside.

[0028] 1 and 3, in this embodiment, the cover 3 covers the periphery of the portion of the laser analysis unit 1 that is not covered by the optical system housing unit 2. Specifically, the cover 3 is configured by hanging a black shielding cloth having a plurality of rectangular portions in the vertical direction. Since this black shielding portion is made of cloth, it has flexibility and can be deformed into any shape.

[0029] In this embodiment, the cover 3 comprises a band-shaped shielding portion 31 covering a portion of the rear side, a front shielding portion 32 covering the front side of the laser analysis device 100, a side shielding portion 33 covering the side side of the laser analysis device 100, and a fixed end portion 34 which has a common base portion and is fixed to a flange E protruding horizontally from the housing of the optical system storage portion 2.

[0030] The belt-shaped shielding portion 31 and the front shielding portion 32 are arranged so as to be approximately perpendicular to each other, forming a corner. The front shielding portion 32 and the side shielding portion 33 are also arranged so as to be approximately perpendicular to each other, forming a corner. A slit S extending in the vertical direction is formed in each corner, and a fastener 4 extending in the vertical direction is provided in each slit S. The fixed end portion 34 is fixed to the flange E by a screw 35, and is fixed so that it cannot be removed from the flange E without using a tool. By fixing the cover 3 in this manner, it is possible to meet, for example, one of the requirements for safety class 1 of laser devices in the JIS.

[0031] By moving the slider 41 of the fastener 4 downward, the elements of the fastener 4 engage with each other, and the slits S can be closed without any gaps. In this embodiment, by moving the slider 41 of each fastener 4 to the bottom end, all of the slits S can be completely closed without any gaps, as shown in Fig. 1, and a sealed state can be achieved in which stray laser light and the like from the laser analysis unit 1 is not emitted to the outside.

[0032] Moreover, the connected state of the strip-shaped shielding part 31, the front shielding part 32, and the side shielding part 33 can be released by moving the slider 41 of the fastener 4 upward and opening the fastener 4. As shown in FIG. 4, by opening the fastener 4 provided in the slit S between the front shielding part 32 and the side shielding part 33, only the side shielding part 33 can be rolled up, and only the side side of the laser analysis part 1 can be opened. As shown in FIG. 5, by opening each fastener 4 provided in each slit S, only the front shielding part 32 can be rolled up, and only the front side of the laser analysis part 1 can be opened. Although not shown, all the shielding parts can be rolled up to expose the entire laser analysis part 1 to the outside. In this way, the laser analysis part 1 can be operated or the sample W can be replaced by partially or entirely opening the cover 3.

[0033] Further, the laser analysis device 100 of this embodiment is configured with an interlock mechanism 5 using the sliders 41 of each fastener 4 as shown in FIG. 1. This interlock mechanism 5 allows laser light of a predetermined intensity or more to be introduced into the laser analysis unit 1 only when each fastener 4 is completely closed and the periphery of the laser analysis unit 1 is sealed with a black shielding cloth. In other words, if even one fastener 4 is not completely closed, the interlock mechanism 5 does not allow laser light of a predetermined intensity or more to be introduced into the laser analysis unit 1. If even one fastener 4 is not completely closed, the interlock mechanism 5 turns off the laser light source itself, places a shielding plate on the optical axis of the laser in the optical system housing unit 2 to prevent the laser light from being introduced into the laser analysis unit 1, or places an ND filter (neutral density filter) on the optical axis of the laser in the optical system housing unit 2 to allow laser light of a lower intensity than a predetermined intensity to be introduced into the laser analysis unit 1.

[0034] Specifically, the interlock mechanism 5 comprises a key 51 provided on the slider 41 of the fastener 4, a detector 52 for detecting when the fastener 4 is fully closed and provided in a position where the key can contact when the fastener 4 is fully closed, and a determiner (not shown) for switching the interlock state for the introduction of the laser into the laser analysis unit 1 based on the output of the detector 52.

[0035] The key is attached to the pull tab of the slider 41, for example, and is inserted into a key hole provided in the detector 52.

[0036] The detector 52 is configured so that the key 51 fits into the deepest part of the keyhole only when the slider 41 of the fastener 4 has moved to the bottom end and the fastener 4 is completely closed. Furthermore, in this embodiment, the detector 52 is provided as a separate body from the base plate 6 on which the laser analysis unit 1 and the optical system housing unit 2 are placed, as shown in Figures 1 and 3. Therefore, it is possible to prevent the force and vibration generated when the operator completely closes the fastener 4 and inserts the key into the keyhole from acting on the laser analysis unit 1 and the optical system housing unit 2.

[0037] Thus, according to the laser analysis device 100 of this embodiment, by opening and closing the fastener 4 provided on the cover 3, it is possible to switch between a state in which the laser analysis unit 1 is completely covered with black shielding cloth and a state in which at least a part of the laser analysis unit 1 is open. In addition, since the slit S of the cover 3 is closed by fully closing the fastener 4, it is possible to prevent a situation in which the cloth becomes twisted and a gap is formed, which occurs when the cover is closed with a button, for example, and a laser becomes stray light and escapes to the outside. In other words, even if the laser analysis unit 1 is not completely housed in a hard housing made of resin or sheet metal as in the conventional case, the laser shielding state required for safety class 1 can be realized by the cover 3 made of flexible cloth.

[0038] Furthermore, since the fastener 4 is completely closed and the key is inserted into the detector 52 to release the interlock, it is difficult to generate an impact as large as that generated when the door is brought into contact with the detector to detect the opening and closing of the door as in the conventional case. Even if the cover 3 hits the laser analysis unit 1, it is difficult for a large force to act on the laser analysis unit 1 because it is made of cloth. Therefore, a large impact or force is not transmitted to the laser analysis unit 1 arranged inside the cover 3 or the optical system housing unit 2 connected thereto, and it is possible to prevent the optical system from being displaced due to an impact. As a result, it is possible to prevent an analysis error caused by the release of the interlock as in the conventional case.

[0039] Furthermore, by opening the fastener 4 provided in the slit S of the cover 3, at least a part of the cover 3 can be opened, allowing the operator to access the laser analysis. At this time, since a part of the cover 3 can be rolled up as shown in Figs. 4 and 5, a large opening 11 can be formed in the cover 3 for the operator to access the laser analysis unit 1. Therefore, the operator can easily access the laser analysis unit 1 even through a glove box.

[0040] Other embodiments will now be described.

[0041] 6, the laser analysis device 100 according to the present invention may omit the interlock mechanism and have a flexible cover 3 provided in the vicinity of the laser analysis unit 1. Here, "in the vicinity" refers to a state in which the laser analysis unit 1 and the cover 3 are separated by a predetermined distance such that it is difficult to perform analysis if a user remains between them.

[0042] As shown in FIG. 7, the laser analysis section 1 is provided with an optical device that constitutes a part of an optical system RL for performing Raman spectroscopic analysis, and also has a probe 12 that is provided in the vicinity of or in contact with a sample W.

[0043] The optical system RL is composed of a laser light source R1, a half mirror R2, an objective lens R3, a condenser lens R4, and a photodetector R5, with only the objective lens R3 being provided in the laser analysis unit 1, and the laser light emitted from the laser light source R1 and reflected by the half mirror R2 is condensed by the objective lens R3 and irradiated onto a sample W placed on a stage. A cover 3 is closed to prevent this laser light from being scattered by the sample W and leaking out from an opening 11 of the laser analysis unit 1. The optical devices other than the objective lens R3 are housed in the optical system housing unit 2.

[0044] The probe 12 provided on the stage is used to detect, for example, the atomic force between the probe 12 and the sample W, and to map the surface shape and the like of the sample W based on the detected value. A part of another optical system for optically detecting the displacement of the probe 12 may be further provided in the laser analysis unit 1.

[0045] With the laser analysis device 100 configured in this manner, after the fastener 4 provided in the slit S of the cover 3 is opened and the sample W is placed in a position where the probe 12 is in close proximity to or in contact with the sample W through the opening 11 of the laser analysis unit 1, the probe 12 can be prevented from being affected by external light or airflow by simply closing the cover 3. Furthermore, almost no vibration occurs when the cover 3 is closed, and analysis errors caused by the shaking of the laser analysis unit 1 can be suppressed. Note that since laser safety standards differ from country to country, even if there is no interlock mechanism, the laser analysis device 100 can be sold and used as long as only low-intensity laser light is used in the laser analysis unit 1.

[0046] The laser analysis device according to the present invention is not limited to AFM-Raman. For example, the laser analysis device may be one that performs only Raman spectroscopy analysis, or may perform laser-induced fluorescence analysis or absorption analysis using light transmitted through a sample by a laser. The present invention can be applied to any laser analysis device that has a laser analysis unit that irradiates a sample with laser light. In addition, the laser analysis device may be one that has a separate measurement system other than a probe, for example. For example, it may be one that has a microscope or other measurement system.

[0047] The cover can be made of a flexible material, and besides cloth, flexible resins and the like can also be used. The material constituting the cover does not necessarily have to be flexible. That is, in the above-mentioned embodiment, each shielding portion may be formed of a hard resin plate or metal plate, and fasteners may be provided to open and close the slits between each shielding portion. The fasteners (linear fasteners) are not limited to those shown in the above-mentioned embodiment, and may be of a type in which, for example, a convex strip is continuously fitted into a concave groove by moving a slider.

[0048] The attachment position of the detector constituting the interlock mechanism is not limited to the surface plate, and may be other locations. For example, the detector may be attached to a part of the laser analysis unit, or to the housing of the optical system housing unit. In short, it is only necessary that the key on the slider of the fastener can come into contact with the detector only when the fastener is fully closed and the cover is completely closed.

[0049] The method of detecting the key by the detector is not limited to inserting the key as in the above embodiment. The detector may be configured to simply detect the fully closed state of the fastener when the key comes into contact with the fastener. In addition, the key may be attached to the slider of the fastener, or the slider itself may be the key.

[0050] The method of detecting the fully closed state of the fastener is not limited to the method in which the key directly contacts the detector. That is, the detector may be configured to indirectly detect the key or to contact the key without contact. For example, an intermediate body may be present between the key and the detector, and the detector may detect the fully closed state of the fastener when the key contacts the intermediate body.

[0051] Also, a light source may be provided on the slider of the fastener, and the fully closed state may be detected by detecting light emitted from the light source with a detector. For example, the intensity of the light emitted from the light source may be set so that the detector detects the fully closed state only when the fastener is in the fully closed state. Alternatively, the threshold value for determining that the fastener is in the fully closed state in the detector may be set so that only the fully closed state is detected. Note that various types of light may be used for the light emitted from the light source, such as laser light or infrared light.

[0052] In addition, rather than providing a light source on the slider of the fastener, a light source and detector may be provided, for example, on a base plate, and the slider of the fastener in the fully closed state may be positioned on the optical axis of the light source so that the fully closed state can be detected based on the presence or absence of light entering the detector.

[0053] The slits provided in the cover are not limited to those provided at the corners. For example, a slit may be formed in the center of each shielding portion of the cover, and a fastener may be provided so that a hole can be formed in the shielding portion when the fastener is opened. Furthermore, the fixed end of the cover is not limited to being fixed to a flange provided on the laser analysis portion or the optical system housing portion. For example, a support member to which the cover is fixed from the base may be separately provided, and the laser analysis portion may be configured to be surrounded by the cover from all directions.

[0054] The laser analysis device may be characterized by comprising a laser analysis section in which a sample is irradiated with laser light, a flexible cover that covers the periphery of the laser analysis section so as not to release the laser light to the outside and has a slit at least in a part thereof, an opening / closing mechanism that is provided so as to be able to open and close the slit, and an interlock mechanism that includes a detector that detects a state in which the opening / closing mechanism is fully closed, and is configured so that laser light of a predetermined intensity or more is introduced into the laser analysis section when the detector detects that the opening / closing mechanism is fully closed. Specific examples of the opening / closing mechanism are not limited to a fastener, and include, for example, a hook-and-loop fastener, a magnet, a button, etc.

[0055] In addition, various modifications of the embodiments and combinations of parts of each embodiment may be made without going against the spirit of the present invention. [Industrial Applicability]

[0056] According to the present invention, it is possible to provide a laser analyzer having a protection mechanism for preventing exposure of the human body to radiation that is configured to be openable and closable so as to prevent a large impact from being applied to the laser optical system.

Claims

1. a laser analysis unit for irradiating a sample with laser light; a flexible cover that covers the periphery of the laser analysis unit so as to prevent laser light from being emitted to the outside and has a slit at least in a part of it; A fastener provided to open and close the slit; an interlock mechanism having a detector for detecting a state in which the fastener is fully closed; A laser analysis device characterized in that, when the detector detects that the fastener is fully closed, laser light of a predetermined intensity or higher is introduced into the laser analysis section.

2. 2. The laser analysis apparatus according to claim 1, wherein the laser analysis section is placed on a surface plate, and the detector is placed on the surface plate as a separate unit from the laser analysis section.

3. The cover has a plurality of slits extending in the up-down direction, 3. The laser analyzing device according to claim 1, wherein said fasteners are provided for the respective slits.

4. a laser analysis unit for irradiating a sample with laser light; a flexible cover that covers the periphery near the laser analysis unit so as to prevent laser light from being emitted to the outside and has a slit at least in a part of the cover; and a fastener provided to enable the slit to be opened and closed.

5. 5. The laser analysis apparatus according to claim 4, wherein the laser analysis unit further comprises a probe provided so as to be in contact with or in the vicinity of the sample.

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