Modular type exhaust gas reduction device with multiple reaction chambers

Abstract

To provide a gas reduction apparatus with a large number of reaction chambers which can increase the efficiency of an installation space, save unnecessary components, and save water usage.SOLUTION: Specifically, a gas reduction apparatus comprises: reaction modules 100 in which reaction chambers 120 are provided and which do not include a water treatment exhaust pipe 220; a water treatment module 200 in which a water treatment exhaust pipe 220 is provided; and connection pipes 140 for connecting the reaction chambers 120 in the reaction modules 100 to the water treatment exhaust pipe 220 of the water treatment module 200. A large number of such reaction modules 100 are arranged, and the reaction chamber 120 in each reaction module 100 is connected to the water treatment exhaust pipe 220 through the connection pipe 140.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a modular type exhaust gas reduction device having multiple reaction chambers, and more specifically, to a gas reduction device having multiple reaction chambers, which is a new concept scrubber device that improves on the configuration method consisting of an inlet, a reaction chamber, a wet tank, and a wet tower, which are limitations of existing POU (Point Of Use) scrubbers, and integrates common parts among these components. [Background technology]

[0002] Semiconductor devices are manufactured through various manufacturing processes such as oxidation, etching, deposition, and photoprocessing, and toxic chemicals and chemical gases may be used in these manufacturing processes. For example, toxic gases such as carbon tetrafluoride, sulfur hexafluoride, nitrogen trifluoride, ammonia, nitric oxide, arsine, phosphine, diboron, and boron trichloride may be used in the manufacturing process of semiconductor devices. Therefore, if waste gases generated in the semiconductor manufacturing process are released directly into the atmosphere, the toxic gases may have a fatal effect on the human body. In addition, climate change or global warming caused by the emission of various greenhouse gases is currently the most important international environmental issue. For this reason, various types of gas reduction equipment (scrubbers) are used in semiconductor manufacturing processes. Gas reduction equipment is equipment that breaks down or dilutes and purifies waste gases generated in the semiconductor manufacturing process before releasing them into the atmosphere.

[0003] There are many different types of hazardous waste gases emitted during semiconductor manufacturing processes, and in particular, gases used for cleaning and etching semiconductors remain in the atmosphere for a long time once they are released into the atmosphere, blocking infrared rays that would otherwise be released to the earth's surface, causing the air temperature at the surface to rise. For this reason, international regulations are being strengthened to completely destroy and release fluoride gases used in industries before they are released into the atmosphere. Research into removing fluoride gases is being conducted in many areas, and one of these is an effort to use plasma to ionize these molecules and release them as harmless molecules.

[0004] Semiconductor exhaust gas contains fluorine compounds called "PFCs (perfluoro compounds)", as well as oxygen (O2), hydrogen (H2), ammonia (NH3), methane (CH4), tungsten (WO3), titanium dioxide (TiO2), alumina (Al2O3), and other substances, either singly or in combination. The proportion of PFCs is particularly small compared to other gases such as nitrogen (N2) and argon (Ar). However, these PFCs have a very large global warming potential (GWP) several thousand to tens of thousands times that of carbon dioxide (CO2), and their atmospheric lifetime is several thousand to tens of thousands of years longer than that of CO2, so even if a small amount is released into the atmosphere, the impact is very large. Perfluorocarbons, such as CF4 and C2F6, are known to be difficult to decompose because the CF bond is stable. Therefore, various technologies are being developed to remove various harmful substances, including used PFCs, from semiconductor exhaust gas.

[0005] Conventional systems have limitations in terms of maintenance costs and thermal efficiency for reactions, and existing semiconductor POU special gas reduction equipment requires regular maintenance to maintain removal efficiency above a certain level, which requires frequent disassembly and reassembly of the system, which is difficult to do and poses the risk of safety accidents, etc. However, existing special gas reduction equipment has problems such as requiring many personnel to efficiently manage the equipment, difficulty in securing sufficient space, and the distance between equipment means that backup between equipment requires a lot of costs.

[0006] FIG. 1 is a schematic diagram showing the structure of a general special gas reduction equipment used in semiconductor manufacturing processes, etc. Referring to FIG. 1, the gas reduction equipment 10 is composed of a reaction chamber 11 for burning waste gas generated in semiconductor manufacturing processes, etc., and a water treatment exhaust pipe 12 for treating the waste gas burned in the reaction chamber 11. At this time, the reaction chamber 11 burns the waste gas and breaks down harmful components contained in the waste gas into harmless or less toxic gases. For example, components such as CF4 and NF3 contained in the waste gas are burned in the reaction chamber 11 and broken down into CO2 + HF.

[0007] Meanwhile, since the above-mentioned HF and F- are harmful to the human body when exposed to the outside air, they are collected through the reaction chamber 11 and the water treatment exhaust pipe 12. At this time, the waste gas discharged from the reaction chamber 11 is in a high temperature state due to the combustion in the reaction chamber 11, and in order to improve the powder collection efficiency, it is cooled in the process of flowing from the reaction chamber 11 to the water treatment exhaust pipe 12. The waste gas decomposed in the reaction chamber 11 and containing HF and F- is dissolved through the connecting pipe 13 which connects the reaction chamber 11 and the water treatment exhaust pipe 12 and cools them.

[0008] However, the conventional gas reduction equipment has a problem that a large amount of water is required for cooling because the reaction chamber 11, the water treatment exhaust pipe 12, etc. are each included as a single piece of equipment. In addition, since each reaction module must be equipped with a reaction chamber and a water treatment exhaust pipe, the installation space for the gas reduction equipment becomes large, resulting in poor space utilization. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Korean Patent No. 10-1265818 Summary of the Invention [Problem to be solved by the invention]

[0010] The present invention aims to provide a new concept gas reduction device that provides a gas reduction device having multiple reaction chambers, thereby increasing the efficiency of installation space, saving unnecessary parts, and also saving water usage. [Means for solving the problem]

[0011] The present invention is an exhaust gas reduction device that applies a modular system and has multiple reaction chambers. Specifically, the device includes a reaction module 100 that has a reaction chamber 120 therein and does not have a water tank and a water treatment exhaust pipe; a water treatment module 200 that has a water tank and a water treatment exhaust pipe 220 therein; and a connecting pipe 140 that connects the reaction chamber in the reaction module to the water treatment exhaust pipe of the water treatment module; and the reaction modules are arranged in multiple numbers, and the reaction chamber of each reaction module is connected to the water treatment exhaust pipe via the connecting pipe.

[0012] The connecting pipe is located at the bottom of the reaction chamber and communicates with the reaction chamber, and is provided with shutoff valves 150, 155; on both sides and at the top of the connecting pipe, and has a structure that can block the reaction chamber of an individual reaction module from communicating with the reaction chamber of an adjacent reaction module.

[0013] In addition, shutoff valves 250 are provided on both sides of the connecting pipe located at the lower part of the water treatment exhaust pipe, and have a structure capable of blocking the state in which the individual water treatment exhaust pipe is connected to the adjacent reaction chamber.

[0014] The reaction modules may be arranged in a plurality of units adjacent to the left and right sides of the water treatment module, or the reaction modules may be arranged in a plurality of units radially with the water treatment module at the center. Effect of the Invention

[0015] Existing scrubber equipment is composed of a single device including an inlet, a reaction chamber, a wet tank, and a wet tower. However, the present invention integrates multiple scrubber devices into a system by configuring an individual reaction housing consisting of only an inlet pipe and a reaction section, and a shared water tank and a shared water washing exhaust pipe that are separately provided for the water tank and the washing exhaust pipe. This solves the problem of a large amount of water being consumed for washing, saves energy, reduces equipment maintenance costs, and provides advantageous effects such as efficient use of equipment installation space. [Brief description of the drawings]

[0016] [Figure 1] 1 is an illustration of a prior art scrubber arrangement. [Diagram 2] 1 is an internal view of a gas reduction device having multiple reaction chambers according to the present invention. [Diagram 3]1 is a perspective view of a gas reduction device having multiple reaction chambers according to the present invention, showing the inside with a front door and a portion of a main body case removed. [Figure 4a] 1 shows a reaction module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention. [Figure 4b] 1 shows a reaction module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention. [Diagram 5] 1 shows a reaction module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention. [Figure 6] 1 is a view of a water treatment module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention, viewed from another angle. [Figure 7] 1 is a view of a water treatment module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention, viewed from another angle. [Figure 8] 1 illustrates an example of an arrangement of a gas reduction device having multiple reaction chambers according to the present invention, arranged in a circle. [Figure 9] 1 illustrates an example of an arrangement of a gas reduction device having multiple reaction chambers according to the present invention, arranged in a circle. [Figure 10] 1 shows an example of an arrangement of a gas reduction apparatus having multiple reaction chambers according to the present invention, in which the reaction chambers are arranged in a circle and one of the reaction modules is omitted. [Figure 11] 1 shows an example of an arrangement of a gas reduction apparatus having multiple reaction chambers according to the present invention, in which the reaction chambers are arranged in a circle and one of the reaction modules is omitted. [Figure 12] 12 shows an appearance of a water treatment module used in the gas reduction device shown in FIGS. 8 to 11. [Figure 13] 4 is another exemplary configuration of a gas abatement apparatus arrangement having multiple reaction chambers according to the present invention. [Figure 14]4 is another exemplary configuration of a gas abatement apparatus arrangement having multiple reaction chambers according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] The object, particular advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments in conjunction with the accompanying drawings. In addition, the terms used are terms determined in consideration of the functions in the present invention, and may vary depending on the intention or practice of the user or operator. Therefore, the determination of such terms should be made based on the overall content of this specification.

[0018] In addition, in describing the components of the present invention, components with the same name may be given different reference numbers depending on the drawings, and the same reference numbers may be given even in different drawings. However, even in such a case, it does not mean that the corresponding components have different functions depending on the embodiment or have the same function in different embodiments, and the function of each component should be determined based on the description of each component in the corresponding embodiment.

[0019] In addition, technical terms used in this specification should be interpreted in a way that is generally understood by a person having ordinary knowledge in the technical field to which the present invention belongs, unless otherwise specified in this specification, and should be interpreted in a very comprehensive way or in a very narrow way. In addition, the singular expression used in this specification includes the plural expression unless otherwise specified in the context.

[0020] In this application, terms such as "comprise" or "include" should not be construed as including all of the various components or steps described in the specification, but rather as including some of the components or steps not included, or may further include additional components or steps.

[0021] The present invention is a method that can replace the existing scrubber, is more efficient, saves water and energy, and is easy to manage and maintain. The gas reduction device (scrubber) having multiple reaction chambers according to the present invention, which will be described below, has a structure in which the reaction section (reaction chamber) can be applied to all existing general heater type, burn type, plasma type, scrubber using catalyst, etc., and since these types are general technologies in this field, detailed description will be omitted.

[0022] Figure 2 shows the interior of a gas reduction device having multiple (e.g., multiple) reaction chambers according to the present invention, Figure 3 is an oblique view of a gas reduction device having multiple reaction chambers according to the present invention, showing the interior with the front door and part of the main body case removed, Figures 4a, 4b and 5 show a reaction module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention, Figures 6 and 7 show a water treatment module, which is one component of a gas reduction device having multiple reaction chambers according to the present invention, viewed from another angle, Figures 8 and 9 show an example of an arrangement structure of a gas reduction device having multiple reaction chambers according to the present invention, arranged in a circle, Figures 10 and 11 show an example of an arrangement structure of a gas reduction device having multiple reaction chambers according to the present invention, arranged in a circle with one of the reaction modules omitted, and Figure 12 shows a water treatment module used in the gas reduction device shown in Figures 8 to 11.

[0023] 2 and 3, the scrubber device is an individual unit equipment including a reaction chamber, and the most important point of the present invention is that it does not have a cooling tower for water treatment, but rather uses a common cooling tower for water treatment and is constructed with a separate cabinet (housing). In other words, it is an exhaust gas reduction device with a module type structure that can have multiple reaction chambers in series.

[0024] Specifically, the present invention is composed of a number of reaction modules 100 and one water treatment module 200 arranged together with the reaction modules. The water tank and water treatment exhaust pipe are not arranged inside the reaction module 100, but are integrated and arranged only in the water treatment module 200. In other words, the reaction module 100 has a reaction chamber 120 inside, but does not have a water tank and a water treatment exhaust pipe. The water tank and water treatment exhaust pipe 220 are integrated and arranged inside the water treatment module 200.

[0025] Inside the reaction module 100, there is a reaction chamber 120 similar to an existing one, which is a chamber for reacting with waste gas. Inside the water treatment module 200, there is a water treatment exhaust pipe 220 for purifying the waste gas combusted in the reaction chamber 120. The reaction chamber 120 inside the reaction module 100 and the water treatment exhaust pipe 220 of the water treatment module 200 are connected to each other by a connecting pipe 140, so that waste gas or water moves. A number of reaction modules 100 are arranged adjacent to one water treatment module 200, and they can be arranged in various ways (described below). As many as four to ten reaction modules 100 can be arranged on the sides of the water treatment module 200 placed in the middle.

[0026] 4a to 5, a connecting pipe 140 is provided at the bottom of the reaction chamber 120, communicated with the reaction chamber 120, and connected to the water treatment exhaust pipe 220, and a shutoff valve 150 is provided on each side of the connecting pipe 140. A shutoff valve 155 is also provided on the upper side of the connecting pipe 140 to shut off the reaction chamber 120. That is, one unit reaction module has three shutoff valves on the left, right and upper sides. This is a configuration in which, in a situation such as a failure of one reaction chamber, the individual reaction chambers are individually shut off so as not to be communicated with each other. That is, the shutoff valve 150 is operated to shut off and isolate the reaction chamber 120 of a specific reaction module from the reaction chamber of an adjacent reaction module.

[0027] The structure of Fig. 4b shows that the structure of the connecting pipe 140 is modified from that of Fig. 4a, and that the connecting pipe shown in Fig. 4b can be used in processes that generate a lot of powder during the process. That is, the existing structure is cylindrical in order to allow the powder to collect for a while, and this is the part that is cleaned during regular maintenance.

[0028] 6 and 7, it is preferable that shutoff valves 250 are provided on both sides of a connecting pipe located at the bottom of the water treatment exhaust pipe 220 to have a structure capable of blocking communication between the water treatment exhaust pipe and the adjacent reaction chamber. Figures 6 and 7 show the water treatment module 200 as viewed from different angles.

[0029] The reaction module 100 is arranged adjacent to the water treatment module 200 on both the left and right sides, and the arrangement may have various shapes. As shown in FIG. 2, the reaction module 100 may be arranged laterally on the side, or as shown in FIG. 8 and FIG. 9, the reaction module 100 may be arranged radially with the water treatment module 200 in the center. FIG. 9 is a plan view of FIG. 8 from above. In FIG. 8, one or two reaction modules 100 may be omitted as necessary (see FIG. 10 and FIG. 11). This shows high space utilization because one of the components can be removed depending on the situation of the place where the gas reduction device of the present invention is installed (presence or absence of pillars or space utilization as necessary). FIG. 11 is a top view of the gas reduction device of FIG. 10.

[0030] FIG. 12 shows the water treatment module 200 located in the center of the configuration shown in FIGS. 8 to 11, and it can be seen that the shut-off valves 250 are arranged radially at the bottom center, and connecting pipes are connected to each of these, so that the reaction modules are connected radially.

[0031] 13 and 14 show another exemplary embodiment of the arrangement structure of the gas reduction device having multiple reaction chambers according to the present invention. As shown in the figures, the gas reduction device has a shape in which multiple reaction modules are arranged adjacent to both the left and right sides of the water treatment module, but as a whole In other words, the shape of the gas reduction device of the present invention can be various shapes other than the straight line shape and the circular shape shown above. TIFF0007634593000002.tif7170 is also possible, and a special shut-off device (gate valve) can be installed on each connecting part to shut out outside air and water, and a water sprayer can be installed on each additional part where necessary to clean the gas and lower the internal temperature.

[0032] In addition, the gas reduction device of the present invention has the advantage that since there are many scrubbers in close proximity, it is easy to check and manage the equipment status, and it can be installed in an independent space in a certain area, saving space. That is, by bundling multiple units in a space that would normally be used for operating one existing individual unit, they can be shared and used, saving space (savings on the equipment floor). In addition, adjacent units must be able to back up each other in case of an emergency, and the closer the distance between the units, the more convenient it is for setting up a backup function. Therefore, since 2 to 10 units are gathered together, the cost of connecting piping is saved, and additional equipment can be installed very easily when necessary. The present invention can be manufactured in various forms according to the conditions of the installation site, so a custom-made method can be applied according to the on-site spatial arrangement.

[0033] The cost savings of the gas reduction device of the present invention compared to existing equipment can be seen in the table below.

[0034] [Table 1] As can be seen from the above table, space utilization can be reduced by approximately 56%, operating costs can be reduced by approximately 15% by sharing water, and final costs can be further reduced by reducing wastewater. In addition, the price of the product can be reduced by more than 30% by sharing the water tank (wet tank) and water cleaning exhaust pipe (wet tower). In addition, the present invention makes it possible to install many pieces of equipment in a small space even in old factories that do not have space for scrubbers, making access easy and management convenient when setting up new factories.

[0035] Although the preferred embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements made by those skilled in the art using the basic concept of the present invention defined in the following claims also fall within the scope of the present invention. [Explanation of symbols]

[0036] 100: reaction module, 120: reaction chamber, 140: connecting pipe, 200: water treatment module, 220: water treatment exhaust pipe.

Claims

1. A plurality of reaction modules (100) each having a reaction chamber (120) therein for burning waste gas to decompose harmful components contained in the waste gas into harmless gas or decompose the harmful components into less toxic gas, and not including a water tank or a water treatment exhaust pipe; a water treatment module (200) having a water tank and a water treatment exhaust pipe (220) therein, for cooling waste gas combusted in the reaction chamber in the water treatment exhaust pipe; Including, Each of the reaction modules includes a first connecting pipe (140) located at a lower portion of the reaction chamber and extending in a left-right direction; In each of the reaction modules, the reaction chamber is connected to an upper portion of the first connecting pipe, Each of the plurality of reaction modules comprises: a shutoff valve (150) provided on each side of the first connecting pipe in a direction in which the first connecting pipe extends and operable to be in a communicating state or a shutoff state; a shutoff valve (155) provided at an upper portion of the first connecting pipe and operable to establish a communication state between the inside of the reaction chamber and the upper portion of the first connecting pipe or to establish a shutoff state between the inside of the reaction chamber and the upper portion of the first connecting pipe; Equipped with The water treatment module includes: a second connecting pipe that is located at a lower portion of the water treatment exhaust pipe and communicates with the water treatment exhaust pipe, the second connecting pipe extending in the left-right direction; a shutoff valve (250) provided on each side of the second connecting pipe in a direction in which the second connecting pipe extends and operable to be in a communicating state or a shutoff state; Equipped with As a plurality of the reaction modules, a first reaction module in which a first side of the first connecting pipe is connected to a first side of the second connecting pipe of the water treatment module; a second reaction module in which a first side of the first connecting pipe is connected to a second side of the second connecting pipe of the water treatment module; An exhaust gas reduction device comprising:

2. As a plurality of the reaction modules, In addition to the first reaction module and the second reaction module, a third reaction module in which a first side of the first connecting pipe is connected to a second side of the first connecting pipe of the first reaction module; a fourth reaction module in which a first side of the first connecting pipe is connected to a second side of the first connecting pipe of the second reaction module; The exhaust gas abatement apparatus of claim 1 .

3. A plurality of reaction modules (100) each having a reaction chamber (120) therein for burning waste gas to decompose harmful components contained in the waste gas into harmless gas or decompose the harmful components into less toxic gas, and not including a water tank or a water treatment exhaust pipe; a water treatment module (200) having a water tank and a water treatment exhaust pipe (220) therein, for cooling waste gas combusted in the reaction chamber in the water treatment exhaust pipe; Including, Each of the reaction modules includes a first connecting pipe (140) located at a lower portion of the reaction chamber and extending in a left-right direction; In each of the reaction modules, the reaction chamber is connected to an upper portion of the first connecting pipe, Each of the plurality of reaction modules comprises: a shutoff valve (150) provided on each side of the first connecting pipe in a direction in which the first connecting pipe extends and operable to be in a communicating state or a shutoff state; a shutoff valve (155) provided at an upper portion of the first connecting pipe and operable to establish a communication state between the inside of the reaction chamber and the upper portion of the first connecting pipe or to establish a shutoff state between the inside of the reaction chamber and the upper portion of the first connecting pipe; Equipped with the water treatment module includes a second connecting pipe located at a lower portion of the water treatment exhaust pipe and communicating with the water treatment exhaust pipe; As a plurality of the reaction modules, a first reaction module in which a first side of the first connecting pipe is connected to the second connecting pipe of the water treatment module; a second reaction module in which a first side of the first connecting pipe is connected to a second side of the first connecting pipe of the first reaction module; An exhaust gas reduction device comprising:

4. The exhaust gas reducing device according to any one of claims 1 to 3, wherein the reaction chamber uses any one of the following reactions: a heater type, a burn type, a plasma type, and a catalyst type.

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