Ion implantation apparatus and ion implantation method

Abstract

To optimize control over respective device parts to provide high-precision ion implantation processing on a wafer at a desired angle.SOLUTION: An ion implantation device IM comprises: an angle measurer 11, 12, 60, 70, 80 which measures at an angle of an ion beam IB in a first and second directions being mutually orthogonal to a traveling direction of the ion beam IB; an angle corrector 7 which is arranged on a beam line, and corrects the angle of the ion beam IB in the first direction based on measurement results of the angle measurer 11, 12, 60, 70, 80; a wafer holding device 9 which holds a wafer W in a processing chamber 8; a tilt mechanism L which is coupled to the wafer holding device 9, and rotates the wafer W around a rotation axis parallel to the first direction; and a control device C2 which controls the tilt mechanism L based on angle information V on the ion beam in the second direction, crystal information M on the wafer, and implantation recipe information R.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an ion implantation apparatus and an ion implantation method used in the manufacture of semiconductor devices. [Background technology]

[0002] In the ion implantation process, the irradiation angle of the ion beam irradiated onto the wafer surface is set to a desired angle. For example, when ions are implanted deep into a region from the surface of a wafer by utilizing the channeling phenomenon, the irradiation angle of the ion beam is set so that the irradiation direction of the ion beam coincides with the crystal axis of the single crystal wafer. Conversely, when ions are implanted into a shallow region from the wafer surface, the irradiation angle of the ion beam is set so that the irradiation direction of the ion beam does not coincide with the crystal axis of the single crystal wafer.

[0003] If a manufacturing error or defect occurs in the slicing or polishing process of the wafer manufacturing process, the flatness of the wafer decreases. Generally, the crystal axis of a single crystal wafer is perpendicular to the wafer surface. However, as the flatness of the wafer decreases, a misalignment occurs between the crystal axis and the wafer surface. As a result, even if the wafer is irradiated with an ion beam perpendicular to the wafer surface, the ion beam irradiation direction may not coincide with the crystal axis.

[0004] A silicon carbide epitaxial wafer is a wafer in which an epitaxial layer is formed on a base wafer. The epitaxial layer is grown at an angle of about 4 degrees to the surface of the base wafer in order to suppress the occurrence of defects within the layer. Due to the inclination of the epitaxial layer, the direction of the crystal axis of the wafer (crystal orientation) is inclined at about 4 degrees from the surface of the base wafer. For this reason, even if there are no manufacturing errors or defects in the slicing and polishing processes, the crystal orientation of a silicon carbide epitaxial wafer will not be perpendicular to the wafer surface of the base wafer.

[0005] Various techniques have been proposed for adjusting the relationship between the crystal orientation of the wafer and the irradiation direction of the ion beam. Patent Document 1 discloses an ion implantation process utilizing the channeling phenomenon. The crystal axis measuring device is disposed in an end station or a load lock chamber. In adjusting the wafer attitude before the ion implantation process, the driving unit of the holding device that holds the wafer in the process chamber is controlled based on the measurement results of the crystal axis measuring device. Patent Document 2 discloses a technology for identifying the crystal orientation of a wafer by calculating the cutting error of the wafer. In adjusting the attitude of the wafer prior to ion implantation processing, one or more components such as a mechanical scan drive unit and a beamline assembly are selectively controlled based on the identified crystal orientation of the wafer and taking into account the effect of channeling. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent Publication No. 2021-120944 [Patent Document 2] Special table 2007-520885 Summary of the Invention [Problem to be solved by the invention]

[0007] An actual ion beam irradiated to a wafer does not necessarily follow an ideal trajectory and irradiate the wafer. There may be some error between the actual trajectory of the ion beam irradiated to the wafer and the ideal trajectory. For example, collisions between the ion beam and gas remaining in the beamline cause charge exchange, making it difficult to transport the ion beam along the ideal trajectory. In addition, the trajectory of the ion beam may deviate from the ideal trajectory due to factors such as the arrangement and manufacturing errors of the beam optical elements.

[0008] In Patent Document 1, the deviation between the actual trajectory and the ideal trajectory of the ion beam irradiated to the wafer is not taken into consideration. Also, in Patent Document 1, the positional relationship between the crystal orientation and the irradiation angle of the ion beam is adjusted by a wafer driving unit in a processing chamber. Even if Patent Document 1 were to include a means for measuring the deviation of the ion beam trajectory, if the only means for adjusting the positional relationship between the crystal orientation and the irradiation angle of the ion beam were the wafer drive unit, there would be a concern that the configuration and control of the wafer drive unit would become complicated. Patent Document 2 discloses acquiring ion beam direction data. It discloses controlling one or more of a mechanical scan drive unit and a beamline assembly to adjust the irradiation angle of the ion beam irradiated onto the wafer surface, but does not specifically disclose how to realize such complicated control.

[0009] The beamline assembly of Patent Document 2 is used for the purpose of transporting an ion beam. When adjusting the traveling direction of the ion beam in the beamline assembly based on ion beam direction data in consideration of wafer cutting errors, if the ion beam is moved in various directions to achieve a desired traveling direction, it becomes difficult to transport the ion beam, which is the original purpose.

[0010] The present invention provides an ion implantation apparatus and an ion implantation method that optimizes the control of each part of the apparatus and realizes highly accurate ion implantation processing at a desired angle with respect to a wafer. [Means for solving the problem]

[0011] The ion implantation device is an angle measuring device that measures an angle of the ion beam in a first direction and a second direction perpendicular to a traveling direction of the ion beam; an angle corrector that is disposed in a beamline and corrects an angle of the ion beam in the first direction based on a measurement result by the angle measuring device; a wafer holding device for holding a wafer in a processing chamber; a tilt mechanism coupled to the wafer holding device and configured to rotate the wafer around a rotation axis parallel to the first direction; and a control device that controls the tilt mechanism based on angle information of the ion beam in the second direction, crystal axis information of the wafer, and implantation recipe information.

[0012] In performing channeling ion implantation, The tilt mechanism is controlled by the control device to make the crystal orientation of the wafer parallel to the traveling direction of the ion beam irradiated onto the wafer.

[0013] In order to reduce costs by using the same materials, It is preferable that the ion beam is a spot beam scanned in the first direction, and the angle corrector is a collimator that deflects the scanned spot beam.

[0014] During ion implantation, in order to fix the wafer position and reduce wafer warpage, The wafer holding device preferably has an electrostatic chuck for holding the backside of the wafer.

[0015] In order to perform accurate crystal orientation measurements, a measurement stage that supports the back surface of the wafer; an energy ray source that irradiates an energy ray onto the surface of the wafer on the measurement stage; It is desirable that the measurement stage is provided with a suction member for supporting the back surface of the wafer.

[0016] More preferably, the attraction member is an electrostatic chuck.

[0017] The ion implantation method is measuring an angle of the ion beam in a first direction and a second direction perpendicular to a direction of travel of the ion beam; correcting an angle of the ion beam in the first direction based on a measurement result of the angle of the ion beam; and rotating the wafer around a rotation axis parallel to the first direction based on angle information of the ion beam in the second direction, crystal axis information of the wafer, and implantation recipe information. Effect of the Invention

[0018] The ion beam angle is measured in two orthogonal directions, and one of the angle components is corrected at the beamline. The remaining angle component is corrected by the wafer holding device, taking into account the crystal axis information and implantation recipe information. This allows for highly accurate ion implantation at the desired angle relative to the wafer. [Brief description of the drawings]

[0019] [Figure 1] Schematic plan view of an ion implantation apparatus [Diagram 2] Diagram of angle measurement in the X-axis direction [Diagram 3] Diagram of angle measurement in the X-axis direction [Figure 4] Diagram of angle measurement in the X-axis direction [Diagram 5] Angle correction in the X-axis direction [Figure 6] An explanatory diagram of the trajectory of an ion beam irradiating a wafer. [Figure 7] Illustration of angle measurement in the Y-axis direction [Figure 8] Illustration of angle measurement in the Y-axis direction [Figure 9] Illustration of angle measurement in the Y-axis direction [Figure 10]Schematic cross-sectional view of a mechanism for adjusting the position of a wafer [Figure 11] Schematic plan view of crystal axis measuring device [Figure 12] An explanatory diagram of the placement of the crystal axis measuring device [Figure 13] Flowchart showing a series of processes leading to an ion implantation process [Figure 14] Schematic cross-sectional view showing a modified example of an angle measuring instrument [Figure 15] FIG. 13 is a schematic cross-sectional view showing another modified example of the angle measuring instrument; [Figure 16] FIG. 13 is a schematic cross-sectional view showing another modified example of the angle measuring instrument; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] 1 is a schematic plan view showing an example of the configuration of an ion implantation apparatus IM. Plasma that is the source of an ion beam IB is generated in a plasma chamber 1. An extraction electrode 2 extracts the ion beam IB from the plasma generated in the plasma chamber 1 to a beamline. The beamline is a transport path of the ion beam IB from the extraction electrode 2 to a processing chamber 8, which will be described later.

[0021] The ion beam IB extracted from the extraction electrode 2 contains multiple ions. The mass analysis electromagnet 3 selects ions according to their mass in order to extract desired ions from the ion beam IB. The acceleration tube 4 accelerates and decelerates the ion beam IB selected by the mass analysis electromagnet 3, and converts it into an ion beam IB with a desired energy.

[0022] An energy analyzing electromagnet 5 is disposed downstream of the accelerating structure 4. The energy analyzing electromagnet 5 removes ions of unnecessary energy components generated by charge exchange between the mass analyzing electromagnet 3 and the accelerating structure 4 and within the accelerating structure 4.

[0023] When the ion beam IB is cut by a plane perpendicular to the traveling direction of the ion beam, the cut surface of the ion beam IB extracted from the extraction electrode 2 is elliptical. Such an ion beam is called a spot beam. After passing through the energy analyzing electromagnet 5, the ion beam IB is periodically scanned in one direction by a scanner 6. By this scanning, the ion beam IB is transformed into an ion beam that appears to be wide in the scanning direction.

[0024] The scanned ion beam IB enters the collimator 7, where it is magnetically deflected and converted into a parallel ion beam IB with the same traveling direction as the ion beam IB passing through each point in the scanning direction of the ion beam IB. The width of the ion beam IB in the scanning direction after passing through the collimator 7 is wider than the width of the wafer W in the same direction. The wafer W is moved in the Y-axis direction in the figure, whereby ion implantation processing is performed on the entire surface of the wafer W.

[0025] A wafer W held by a wafer holding device 9 is placed in the processing chamber 8. A driving mechanism 13 is connected to the wafer holding device 9. The driving mechanism 13 adjusts the attitude of the wafer holding device 9 with respect to the ion beam IB, and adjusts the irradiation angle of the ion beam IB onto the wafer W.

[0026] Each of the illustrated XYZ axes is drawn based on the trajectory of an ideal ion beam IB entering the processing chamber 8. The Z axis is parallel to the traveling direction of the ion beam IB. The X-axis and Y-axis are mutually perpendicular to the Z axis. The directions of the XYZ axes change according to the position of the ion beam transported through the beamline. In the ion implantation apparatus IM, the scanning direction of the ion beam IB in the scanner 6 is parallel to the X-axis.

[0027] The ion implantation device IM is equipped with angle measuring devices that measure the angles of the ion beam IB in two directions parallel to the X-axis and Y-axis. The angle measuring devices are a pre-stage multi-point Faraday 11 arranged between the collimator 7 and the processing chamber 8 and a post-stage multi-point Faraday 12 arranged in the processing chamber 8. The irradiation angle of the ion beam IB is the angular difference between an ideal ion beam and an actual ion beam.

[0028] The control devices C1 and C2 each have a storage function for storing data, a calculation function for calculating data, and a control function for controlling each part based on the calculation results and input data. The control device C1 controls the front-stage multipoint Faraday 11 and the rear-stage multipoint Faraday 12 to read data and output angle information V to the control device C2. The control device C1 also adjusts the magnetic field strength of the parallelizer 7 based on the angle information V.

[0029] The control device C2 controls the driving mechanism 13 based on the angle information V, the implantation recipe information R, and the crystal axis information M. The ion implantation apparatus IM shown in FIG. 1 includes separate controllers C1 and C2, but these controllers may be integrated into a single controller.

[0030] The implantation recipe information R includes information on the set angle of the wafer when the ion implantation process is performed. The crystal axis information M is information on the inclination angle of the crystal axis with respect to the direction perpendicular to the surface of the wafer W. The crystal axis information M is transmitted to the control device C2 by various methods. For example, the crystal axis information M is actually measured by a crystal axis measuring device provided in the ion implantation device IM, and the measured data is transmitted to the control device C2. Also, in the semiconductor manufacturing process, the crystal axis information M measured in a process upstream of the ion implantation process may be transmitted to the control device C2. Furthermore, the crystal axis information M may be included in a barcode attached to the wafer cassette, and the crystal axis information M may be obtained by reading the barcode with the ion implantation device IM, and the obtained information may be transmitted to the control device C2.

[0031] Acquisition of information from the barcode can be done manually or automatically. In the manual case, the operator of the ion implanter IM reads the barcode with a scanner. In the automatic case, when the cassette is attached to the ion implanter, a sensor at the attachment position reads the barcode. The automatic reading may be performed in the following manner: Crystal axis information M for each wafer cassette or wafer is stored in advance in the ion implantation device IM. The storage location is the storage device of the control device C1 or C2. Based on the cassette or wafer information read from the barcode, the control device C1 or C2 reads out crystal axis information M from the storage device and controls each part.

[0032] 2 to 4, the angle measurement of the ion beam IB in the X-axis direction will be described. The pre-stage multi-point Faraday 11 is connected to a drive shaft 22. The drive shaft 22 moves up and down in the Y-axis direction by a drive source (not shown). The pre-stage multi-point Faraday 11 has different configurations in the upper and lower regions in the Y-axis direction. An aperture 21 is formed in the upper region. A plurality of Faraday cups FC are arranged in the X-axis direction in the lower region.

[0033] 2 shows a measurement in the front-stage multi-point Faraday 11. As the drive shaft 22 moves the front-stage multi-point Faraday 11, the ion beam IB is irradiated onto the Faraday cup FC of the front-stage multi-point Faraday 11. 3 shows measurement in the post-stage multi-point Faraday 12. The drive shaft 22 moves the front-stage multi-point Faraday 11 downward from the state in FIG. 2. The movement of the drive shaft 22 causes the ion beam IB to pass through the aperture 21 of the front-stage multi-point Faraday 11. The ion beam IB that has passed through the aperture 21 is irradiated onto the Faraday cup FC of the post-stage multi-point Faraday 12.

[0034] As an example of calculating the irradiation angle of the ion beam IB, the following method is used. The moving distance Lx of the ion beam IB in the X-axis direction is calculated from the measurement results of the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12. The irradiation angle θx of the ion beam IB in the X-axis direction is calculated using this calculation result and the separation distance Lz between the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12 in the Z-axis direction. 4 shows the relationship between the moving distance Lx of the ion beam IB in the X-axis direction, the separation distance Lz between the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12 in the Z-axis direction, and the irradiation angle θx of the ion beam IB. In the figure, the dashed line shows the actual trajectory of the ion beam IB, and the solid line shows the ideal trajectory of the ion beam IB. This calculation method is just one example, and a different calculation method may be used.

[0035] The irradiation angle of the ion beam IB in the X-axis direction is corrected by an angle corrector arranged in the beam line. In this ion implanter IM, the collimator 7 also serves as the angle corrector. The collimator 7 is composed of an electromagnet. The strength of the magnetic field B generated in the electromagnet can be adjusted by increasing or decreasing the amount of current flowing through the coil. When the ion beam IB passes through the magnetic field, the ion beam IB is deflected by the Lorentz force, as shown in Figure 5. Here, the ion beam IB has a positive charge.

[0036] In Fig. 5, the solid line indicates the ideal trajectory of the ion beam IB. When the strength of the magnetic field B of the collimator 7 is weakened, the ion beam IB is weakly deflected toward the lower side of the figure, as shown by the dashed line. When the strength of the magnetic field B of the collimator 7 is strengthened, the ion beam IB is strongly deflected toward the upper side of the figure, as shown by the dashed line. Based on the measurement results from the front-stage multipoint Faraday 11 and rear-stage multipoint Faraday 12, which are angle measuring devices, the magnetic field of the collimator 7 is adjusted to bring the trajectory of the ion beam IB closer to the ideal trajectory.

[0037] Figure 6 shows the trajectory of the ion beam IB irradiated onto the wafer W. The solid line shows the ideal trajectory of the ion beam IB. The dashed line shows the actual ion beam trajectory (trajectory of the ion beam IBr). The dashed line shows the ion beam trajectory when the trajectory of the ion beam IBr is plotted on the X-axis assuming that the θy component is zero. The directions of the XYZ axes shown in the figure are drawn relative to an ideal trajectory (reference trajectory) of the ion beam IB. The ion beam IBr has angular components (θx, θy) with respect to the reference trajectory. These angular components can be resolved into the X-axis and Y-axis directions. When correcting the trajectory of the actual ion beam IB irradiated to the wafer W to an ideal trajectory, in addition to the angle correction in the X-axis direction, the angle correction in the Y-axis direction is also required.

[0038] In order to correct the actual irradiation angle of the ion beam IBr in the Y-axis direction, it is necessary to measure the angle of the ion beam IBr in the same direction. Angle measurement in the Y-axis direction will be explained with reference to Figures 7 to 9.

[0039] 7 and 8 show the front-stage multi-point Faraday 11 and rear-stage multi-point Faraday 12 similar to those in Fig. 2 and Fig. 3. The difference is that in Fig. 7 and Fig. 8, a shutter 23 movable in the Y-axis direction is provided in front of the rear-stage multi-point Faraday 12. A shutter drive shaft 24 that is moved in the vertical direction by a drive source (not shown) is connected to the shutter 23.

[0040] An example of angle measurement in the Y-axis direction will be described with reference to FIGS. In FIG. 7, the front-stage multi-point Faraday 11 is moved downward in the figure, and the beam current is measured by all the Faraday cups FC provided in the front-stage multi-point Faraday 11. 8, the front-stage multi-point Faraday 11 is moved downward in the figure, and the ion beam IB is irradiated onto the Faraday cup FC of the rear-stage multi-point Faraday 12. Thereafter, the shutter 23 is moved downward in the figure, and the beam current is measured by all the Faraday cups FC provided in the rear-stage multi-point Faraday 12.

[0041] From the measurement results at each multi-point Faraday, the amount of change in beam current at each measurement position is graphed, and the center position is calculated from the graph of the amount of change in beam current. The irradiation angle θy of the ion beam in the Y-axis direction is calculated from the distance Ly between the center positions obtained from the measurement results at the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12, and the separation distance Lz between the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12 in the Z-axis direction. 9 shows the relationship between the distance Ly between the center of gravity positions obtained from the measurement results of the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12, the separation distance Lz between the front-stage multi-point Faraday 11 and the rear-stage multi-point Faraday 12 in the Z-axis direction, and the irradiation angle θy of the ion beam IB. In the figure, the dashed line indicates the actual trajectory of the ion beam IB, and the solid line indicates the ideal trajectory of the ion beam IB.

[0042] The irradiation angle of the ion beam in the Y-axis direction calculated in FIG. 7 and FIG. 8 is corrected by a tilt mechanism L illustrated in FIG. 10, the solid line indicates the ideal trajectory of the ion beam IB, and the dashed line indicates the actual trajectory of the ion beam IBr. The directions of the XYZ axes shown in the figure are drawn relative to the ideal trajectory of the ion beam IB. The wafer holding device 9 is composed of a base 32 and an electrostatic chuck 31 that holds the lower surface (back surface) of the wafer W. Supporting the wafer W by the electrostatic chuck 31 is advantageous in keeping the supported surface of the wafer W flat. Although not shown in FIG. 10, a mechanical clamping mechanism for mechanically holding the wafer W may be used in combination with the electrostatic chuck 31.

[0043] A rotating shaft 33 is attached to the center of the base 32, which coincides with the center O of the wafer W. This rotating shaft 33 is connected to a driving source 34. When the rotating shaft 33 is rotated by the driving source 34, the base 32 connected to the rotating shaft 33 rotates. When the base 32 rotates, the circular wafer W rotates in its circumferential direction (the direction of arrow P). This adjusts the position of the wafer W in the circumferential direction. The rotating shaft 33 and the driving source 34, which form a rotation mechanism for adjusting the position of the wafer W in the circumferential direction, are called a twist mechanism K. The rotation direction of the wafer W by the twist mechanism K may be the opposite direction to the illustrated arrow P. The rotation direction of the drive source 34 may be appropriately switched to rotate the wafer W in both directions.

[0044] The driving source 34 is fixed to a semicircular member 39. The semicircular member 39 has a plurality of permanent magnets 35 on its outer periphery. In addition, a pedestal 38 having a curved portion that curves along the shape of the semicircular member 39 is disposed in a position facing the semicircular member 39. A plurality of electromagnets 36 are arranged in the curved portion of the pedestal 38.

[0045] By adjusting the direction and magnitude of the current flowing through the electromagnet 36 of the pedestal 38, the semicircular member 39 slides in either direction of the arrow Q. This sliding of the semicircular member 39 rotates the wafer W around the X-axis, and the irradiation angle of the ion beam IBr with respect to the wafer W is adjusted.

[0046] The rotating mechanism for the wafer W, which is composed of the semicircular member 39, the permanent magnet 35, the electromagnet 36, and the base 38, is called the tilt mechanism L. By rotating the wafer W around the X-axis with this tilt mechanism L, the irradiation angle of the ion beam IB in the Y-axis direction is corrected. The pedestal 38 is connected to a wafer drive shaft 37, and the ion implantation process for the wafer W is performed by moving the wafer drive shaft 37 up and down by a drive source (not shown).

[0047] A conventionally known X-ray diffraction device is used as the crystal axis measuring device. The detector may be any device that detects reflected light or transmitted light from the wafer. In addition, a configuration in which the detection position is changed sequentially using an actuator or a configuration having detection areas arranged two-dimensionally may be used.

[0048] 11 is a schematic plan view of a crystal axis measuring device C that uses the back reflection Laue method. An energy ray source 41 irradiates X-rays onto a wafer W placed on a measurement stage 43. The detector 42 is an imaging plate having an aperture through which the X-rays pass. The detector 42 receives the reflected light from the wafer W and detects an X-ray diffraction image. When the detector 42 detects the X-rays, the intensity of the detected signal may be adjusted by irradiating the light receiving surface of the detector 42 with a laser light (not shown).

[0049] The imaging device 44 has an imaging lens and captures a diffraction image on the detector 42. The crystal axis measuring device C has a calculation device, and the calculation device analyzes the captured image data to identify the crystal orientation. Each part enclosed by the dashed line may be configured as one unit. Also, an actuator may be provided to change the position of either the wafer W or the unit, making it possible to adjust the relative positions of the two. When a diffraction image can be obtained using an imaging plate, the imaging device 44 may be omitted. In addition, when X-rays are irradiated from the energy ray source 41 to a wafer W having an epitaxial layer tilted by several degrees formed on a base wafer, the energy ray source 41 and the detector 42 may be tilted to the same extent according to the tilt of the epitaxial layer. Specifically, if the inclination angle of the epitaxial layer is 4 degrees, the energy ray source 41 and the detector 42 are tilted by 4 degrees and arranged so that the X-rays emitted from the energy ray source 41 are irradiated perpendicularly to the epitaxial layer. With this configuration, a diffraction image can be taken near the center of the detector 42.

[0050] When the semiconductor manufacturing process is performed on the wafer W, some warping occurs in the wafer W. If crystal orientation measurement is performed on a warped portion of the wafer W, it becomes impossible to accurately measure the crystal orientation. It is said that the center of the wafer W is relatively less susceptible to the effects of warping. For this reason, in order to accurately measure the crystal orientation, it is desirable to irradiate the energy beam near the center of the wafer W and perform the crystal orientation measurement.

[0051] Regardless of whether the measurement is performed near the center of the wafer, in order to measure the crystal orientation more accurately, it is desirable to provide an adsorption member 45 on the measurement stage 43 on which the wafer is placed in the crystal axis measuring device C. The flatness of the wafer W is improved by suctioning the wafer W with this suction member 45. By performing crystal orientation measurement on the wafer W with improved flatness, the accuracy of the measurement is improved. Specific examples of the adsorption member 45 include an electrostatic chuck and a vacuum adsorption member. When an electrostatic chuck is used, it is desirable that the adsorption force thereof is approximately the same as the adsorption force of the electrostatic chuck 31 of the wafer holding device 9 during ion implantation.

[0052] Other examples of crystal axis measuring devices include devices that identify the crystal orientation by irradiating the wafer W with natural light or laser light from an energy ray source such as a mercury lamp, halogen lamp, or helium-neon laser, and monitoring the transmitted and reflected light from the wafer W. The crystal orientation may also be identified by Rutherford backscattering spectroscopy using an ion beam. Furthermore, after ion implantation into the wafer while changing the ion beam irradiation angle, the crystal orientation may be identified from a graph showing the relationship between the ion beam irradiation angle and the wafer characteristics (sheet resistance, residual defects, etc.).

[0053] To identify the crystal orientation, a test wafer is prepared. However, if a test wafer is prepared specially, an additional cost is incurred. To reduce costs, wafers from the same lot as the wafers to be ion-implanted may be used. Wafer characteristics are similar within the same lot. When using wafers from the same lot, it is desirable to specify the crystal orientation for the first wafer to be ion-implanted. By reusing the crystal orientation information determined when processing the first wafer when processing subsequent wafers, it is possible to omit crystal orientation measurements for the subsequent wafers, thereby improving the productivity of the ion implantation system. The crystal orientation information is stored in the control device C1 or the control device C2 as crystal axis information M. When performing ion implantation processing on other wafers, the crystal axis information M stored in the control device C1 or the control device C2 is read out and used.

[0054] 12 illustrates the configuration of the equipment around the processing chamber 8. When the crystal axis measuring device C is mounted on the ion implantation device IM, and maintenance of the crystal axis measuring device C is not a consideration, the crystal axis measuring device C may be disposed in the processing chamber 8. In that case, the wafer holding device 9 can be used as the measurement stage 43.

[0055] In addition to the processing chamber 8, the crystal axis measuring device C may be placed in the load lock chamber 51 or the location of the aligner 54. When the crystal axis measuring device C is placed in these locations, the support table for the wafer W that is originally present in these locations can be used as the measurement table 43, as in the processing chamber 8. Also, a crystal axis measuring chamber 52 may be provided as a special chamber for performing crystal orientation measurement. In Fig. 12, the position of the crystal axis measuring chamber 52 is adjacent to the processing chamber 8, but is not limited to this position. The crystal axis measuring chamber 52 may be provided next to, above, or below the location where the aligner 54 is disposed.

[0056] Furthermore, the crystal axis measuring device C may be disposed in the location of the cassette 53 in which the wafer W is stored. Specifically, one of the four cassettes 53 shown in the figure is removed. The crystal axis measuring device C is disposed in the location where the cassette 53 is removed.

[0057] The flow chart of FIG. 13 shows a series of processes leading up to the ion implantation process. The irradiation angle of the ion beam is measured by an angle measuring device in two directions (X-axis direction and Y-axis direction) perpendicular to the traveling direction of the ion beam (S1). An angle corrector arranged in the beamline corrects one of the irradiation angles of the ion beam measured by the angle measuring device (S2). The direction of the crystal axis of the wafer W is measured by a crystal axis measuring device (S3). Crystal orientation measurement by the ion implantation device IM is not essential, and crystal axis information measured by a device other than the ion implantation device IM may be transmitted to the ion implantation device IM, or crystal axis information may be obtained from a barcode attached to the cassette. Furthermore, the process of S3 may be performed before the process of S1 or between the processes shown in S1 and S2, depending on the device configuration.

[0058] Based on the ion beam angle information, crystal axis information, and implantation recipe information that have not been corrected in the processing of S2, the target attitude of the wafer W is calculated, and based on the calculation result, the attitude of the wafer W is adjusted using the tilt mechanism L (S4). After adjusting the attitude of the wafer W, ion implantation processing is performed on the wafer W (S5).

[0059] The deviation between the actual ion beam traveling direction and the ideal ion beam traveling direction is resolved into two orthogonal angle components. One angle component is corrected on the beamline, and the other angle component is corrected by the wafer holding device 9, taking into account the crystal axis information and implantation recipe information.

[0060] Since the angle correction on the beamline side is a correction in only one direction, the configuration and control of the optical elements can be simplified, and the effect of the angle correction on the beamline on the transport of the ion beam is small and limited. The remaining angle correction is performed by the wafer holding device 9, taking into consideration the crystal axis information and implantation recipe information. Since the remaining angle correction only requires correction in a specific direction, the structure and control of the wafer holding device 9 can be significantly simplified compared to the case where all corrections are performed by the wafer holding device 9. By carrying out ion implantation under such a configuration, the transport of the ion beam is not hindered, the load on the wafer drive unit is reduced, and ion implantation processing can be achieved with high precision at a desired angle relative to the wafer. This is particularly useful in carrying out channeling ion implantation utilizing the channel phenomenon, in which the crystal orientation of the wafer W is made to coincide with the traveling direction of the ion beam IB irradiated onto the wafer W. In addition, aligning the crystal orientation of the wafer W with the traveling direction of the ion beam IB irradiated to the wafer W means making the crystal orientation of the wafer W parallel to the traveling direction of the ion beam IB irradiated to the wafer W.

[0061] 13 omits the adjustment by the twist mechanism K, which is not directly related to the angle correction in this embodiment, in adjusting the attitude of the wafer W in process S4. In an actual ion implantation process, if it is necessary to set a twist angle, the adjustment of the attitude of the wafer W using the twist mechanism K may be performed when adjusting the attitude of the wafer W using the tilt mechanism L in process S4.

[0062] In the above embodiment, the ion implantation apparatus IM is assumed to be a single-wafer ion implantation apparatus using a spot beam, but the present invention can also be applied to a batch ion implantation apparatus equipped with a disk that holds multiple wafers. Also, the ion beam may be a non-scanning ribbon beam instead of a spot beam. The ion implantation device IM may be configured with the X-axis and Y-axis interchanged. In this case, the ion beam is scanned in the Y-axis direction and the wafer holding device 9 is driven in the X-axis direction to perform ion implantation processing on the wafer W. The rotation axis of the wafer W by the tilt mechanism L is parallel to the Y-axis.

[0063] In the above embodiment, a configuration using the front-stage multi-point Faraday 11 and rear-stage multi-point Faraday 12 as angle measuring instruments has been described, but other configurations may be used as long as they can measure the angle of the ion beam in two orthogonal directions (X-axis direction and Y-axis direction). In addition, the two orthogonal directions may be measured using separate angle measuring instruments, and there is no limit to the number of angle measuring instruments used for angle measurement.

[0064] 14 to 16 show modified examples of the angle measuring device. 14 is a schematic cross-sectional view of an angle measuring device 60. The angle measuring device 60 is composed of a box 63 in which a multi-point Faraday 61 consisting of multiple Faraday cups and a flat plate with a slit 62 formed in front of the multi-point Faraday 61 are integrated. The slit 62 is long in the Y-axis direction. The box 63 is connected to a drive shaft 64. By moving the drive shaft 64 in the direction of the arrow by a drive source (not shown), the box 63 connected to the drive shaft 64 is moved in and out of the irradiation area of ​​the ion beam IB.

[0065] A multi-point Faraday 61 detects the beam current of the ion beam IBr irradiated into a box 63 through a slit 62. The position of the Faraday cup at which the detected beam current is maximum is identified, and the irradiation angle θx of the ion beam IBr in the X-axis direction is calculated from the distance a1 between the identified Faraday cup and the slit 62 and the distance a2 between the multi-point Faraday 61 and the slit 62.

[0066] 14, the directions of the X-axis and Y-axis may be interchanged to calculate the irradiation angle of the ion beam IBr in the Y-axis direction. In this case, the moving direction of the angle measuring device 60 and the arrangement of the Faradays in the multi-point Faraday 61 are in the Y-axis direction. The longitudinal direction of the slit 62 is in the X-axis direction. It should be noted that, including other variations of the angle measuring device described below, a pinhole may be used instead of the slit.

[0067] FIG. 15 is a schematic cross-sectional view of the angle measuring device 70. The angle measuring device 70 is composed of a flat plate 73 having a slit 72 and a Faraday cup 71. The flat plate 73 is connected to a drive shaft 75. Similarly, the Faraday cup 71 is connected to a drive shaft 74. The two drive shafts 74 and 75 move the flat plate 73 and the Faraday cup 71 as shown by the arrows in the figure. The flat plate 73 is placed at a predetermined position in the irradiation area of ​​the ion beam IBr. Then, the Faraday cup 71 is moved in a direction parallel to the flat plate 73 (X-axis direction). At this time, the beam current of the actual ion beam IBr passing through the slit 72 is detected, and the position where the detected beam current is maximum is specified. The distance b1 from the specified position to the center position of the slit 72 in the X-axis direction is calculated. The irradiation angle θx of the ion beam IBr passing through the slit 72 is calculated from the distance b1 calculated here and the distance b2 between the slit 72 and the Faraday cup 71.

[0068] As in the embodiment of FIG. 14, if the relationship between the X-axis and the Y-axis is reversed in the embodiment of FIG. 15, the irradiation angle of the ion beam IBr in the Y-axis direction can be calculated.

[0069] 16 is a schematic cross-sectional view of an angle measuring instrument 80. The angle measuring instrument 80 is composed of a driving mechanism 82 and a Faraday cup 81 arranged at one end of the driving mechanism 82. The driving mechanism 82 rotates around a rotation axis parallel to the X-axis. While rotating the driving mechanism 82, the rotation angle of the driving mechanism 82 at which the beam current of the actual ion beam IBr at the Faraday cup 81 becomes maximum is identified. The Faraday cup 81 and the wafer holding device 9 are attached at a predetermined angle to the driving mechanism 82. By identifying the rotation angle of the driving mechanism 82 when the beam current is at a maximum, the irradiation angle of the ion beam irradiated onto the wafer can be obtained.

[0070] In the ion implantation process, after a wafer (not shown) is held by the wafer holding device 9, the driving mechanism 82 is rotated to exchange the positions of the wafer holding device 9 and the Faraday cup 81 from those shown in the figure. The rotation angle of the driving mechanism 82 is preferably 360 degrees, but is not limited to this. If each process such as measurement with the Faraday cup 81, ion implantation process into the wafer W, and interchange of the positions of the Faraday cup 81 and the wafer holding device 9 are possible, the rotation angle of the driving mechanism 82 may be an angle less than 360 degrees.

[0071] In the above embodiment, a configuration has been described in which the collimator 7 is used as the angle corrector, but an optical element for angle correction may be disposed in the beamline. In addition, in the ion implanter IM of Fig. 1, the acceleration tube 4 has a focus lens that corrects the diameter of the ion beam passing through the acceleration tube 4. The focus lens is an optical element known as a quadrupole lens, and this lens may be used as the angle corrector. Furthermore, an energy filter consisting of a pair of electrodes may be used as an angle corrector. All of the optical elements listed here are optical elements capable of adjusting the angle of the ion beam IB in the X-axis or Y-axis direction. Other optical elements may be used as long as they have a similar function.

[0072] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention. [Explanation of symbols]

[0073] IM Ion Implantation Equipment W wafer 11, 12, 60, 70, 80 Angle measuring instrument 7 Angle Corrector 8 Processing Room 9 Wafer holding device K Twist Mechanism L Tilt mechanism V angle information R Injection Recipe Information M crystal axis information C1, C2 control device

Claims

1. an angle measuring device that measures an angle of the ion beam in a first direction and a second direction perpendicular to a traveling direction of the ion beam; an angle corrector that is disposed in a beamline and corrects an angle of the ion beam in the first direction based on a measurement result by the angle measuring device; a wafer holding device for holding a wafer in a processing chamber; a tilt mechanism coupled to the wafer holding device and configured to rotate the wafer around a rotation axis parallel to the first direction; a control device that controls the tilt mechanism based on angle information of the ion beam in the second direction, crystal axis information of the wafer, and implantation recipe information.

2. 2. The ion implantation apparatus according to claim 1, wherein the control device controls the tilt mechanism to make the crystal orientation of the wafer parallel to the traveling direction of the ion beam irradiated onto the wafer.

3. 2. The ion implantation apparatus of claim 1, wherein the ion beam is a spot beam scanned in the first direction, and the angle corrector is a collimator that deflects the scanned spot beam.

4. 4. The ion implantation apparatus according to claim 1, wherein the wafer holding device has an electrostatic chuck for holding a back surface of the wafer.

5. a measurement stage that supports the back surface of the wafer; an energy ray source that irradiates an energy ray onto the surface of the wafer on the measurement stage; 4. The ion implantation apparatus according to claim 1, wherein the measurement stage is provided with a chucking member for supporting a rear surface of the wafer.

6. 6. The ion implantation apparatus according to claim 5, wherein the attraction member is an electrostatic chuck.

7. measuring an angle of the ion beam in a first direction and a second direction perpendicular to a direction of travel of the ion beam; correcting an angle of the ion beam in the first direction based on a measurement result of the angle of the ion beam; Rotating the wafer around the first direction as a rotation axis based on angle information of the ion beam in the second direction, crystal axis information of the wafer, and implantation recipe information; and performing an ion implantation process on the wafer.

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