Processing device and manufacturing method of processed products

Abstract

To automatically exchange a holding plate for holding a processing object.SOLUTION: Processing equipment 100, which holds a sealed substrate W on processing tables 2A, 2B to process the sealed substrate W by a processing mechanism 4 while moving the processing tables 2A, 2B, includes: a plate housing unit 24 which houses a holding plate M1 in order to hold the sealed substrate W; a holding base unit M2 on which the holding plate M1 is detachably attached to hold the sealed substrate W using the holding plate M1; and a plate transfer mechanism 25 which transfers the holding plate M1 between the plate housing unit 24 and the holding base unit M2. The plate transfer mechanism 25 transfers the holding plate M1 having been detached from the holding base unit M2 to the plate housing unit 24, and transfers the holding plate M1 in the plate housing unit 24 to the holding base unit M2.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device and a method for manufacturing a processed product. [Background technology]

[0002] BACKGROUND ART Conventionally, as shown in Patent Document 1, in a cutting device that cuts an object to be cut and manufactures a plurality of individual products, a cutting device configured so that a suction jig can be attached to and detached from a cutting table has been considered. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-040060

[0004] However, in the above-mentioned cutting device, the suction jig is simply detachable from the cutting table, and an operator is required to actually replace the suction jig. This not only increases the labor costs of the operator, but also leads to variations in the installation state. Furthermore, the replacement work takes time, which reduces the productivity of the cutting device. Summary of the Invention [Problem to be solved by the invention]

[0005] SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its main object is to automatically replace a holding plate for holding an object to be processed. [Means for solving the problem]

[0006] In other words, the processing apparatus of the present invention is a processing apparatus that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, and is equipped with a plate accommodating section that accommodates a holding plate for holding the workpiece, a holding base section to which the holding plate is detachably attached and that holds the workpiece using the holding plate, and a plate transporting mechanism that transports the holding plate between the plate accommodating section and the holding base section, and is characterized in that the plate transporting mechanism transports the holding plate removed from the holding base section to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base section. [Effects of the Invention]

[0007] According to the present invention configured as described above, the holding plate for holding the workpiece can be automatically replaced. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a diagram showing a schematic configuration of a cutting device (tray storage) according to an embodiment of the present invention. [Figure 2] 5A to 5C are schematic diagrams illustrating the operation of the cutting device of the embodiment. [Figure 3] 3A and 3B are schematic diagrams showing the configuration of a holding plate and a holding base portion of the embodiment. [Figure 4] FIG. 2 is a perspective view showing a plate transport mechanism (plate loading / unloading mechanism) and a plate storage unit of the embodiment. [Figure 5] FIG. 2 is a cross-sectional view schematically showing the configuration of a fixing mechanism of the embodiment. [Figure 6] FIG. 4 is a perspective view showing a holding base portion of the second holding mechanism of the embodiment. [Figure 7] 10A and 10B are diagrams illustrating a replacement operation of the holding plate in the embodiment. [Figure 8] 10A and 10B are diagrams illustrating a replacement operation of the holding plate in the embodiment. [Figure 9]FIG. 10 is a diagram schematically illustrating the configuration of a cutting device according to a modified embodiment. [Figure 10] 10 is a diagram schematically illustrating the configuration of a cutting device (ring storage) according to a modified embodiment. FIG. [Figure 11] 1A is a plan view, FIG. 1B is a cross-sectional view, and FIG. 1C is a partially enlarged cross-sectional view, each showing a schematic configuration of an attachment member. [Figure 12] 10 is a diagram schematically illustrating the configuration of a cutting device (tube housing) according to a modified embodiment. FIG. [Figure 13] 1A and 1B are a perspective view and a cross-sectional view, respectively, schematically illustrating the configuration of a cylindrical container. [Figure 14] 10 is a diagram showing a schematic configuration of a cutting device (bulk storage) according to a modified embodiment. FIG. [Figure 15] 10A and 10B are diagrams illustrating a replacement operation of the holding plate in the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] The present invention will now be described in more detail with reference to examples, although the present invention is not limited to the following description.

[0010] As described above, the processing apparatus of the present invention is a processing apparatus that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, and is equipped with a plate accommodating section that accommodates a holding plate for holding the workpiece, a holding base section to which the holding plate is detachably attached and that holds the workpiece using the holding plate, and a plate transporting mechanism that transports the holding plate between the plate accommodating section and the holding base section, and is characterized in that the plate transporting mechanism transports the holding plate removed from the holding base section to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base section. This processing device has a plate transport mechanism that transports a holding plate removed from a holding base to a plate storage section and transports a holding plate in the plate storage section to the holding base section, allowing the holding plate to be automatically replaced with respect to the holding base. As a result, labor costs for replacing the holding plate can be reduced. Furthermore, because the holding plate is automatically replaced, variation in the mounting state of the holding plate with respect to the holding base can be reduced. Furthermore, because the holding plate is automatically replaced, the time required for replacing the holding plate can be shortened, improving the productivity of the processing device.

[0011] It is desirable that the plate transport mechanism lifts and transports the holding plate. With this configuration, when the holding plate is transported, interference between the holding plate and other members can be avoided, and the holding plate can be easily transported.

[0012] It is desirable that the plate transporting mechanism transports at least one of a holding plate of the processing table, a holding plate of a drying table for drying the processed object after processing, a holding plate of an inspection table for inspecting the processed object after processing, a holding plate of a transfer table on which the processed object is placed before being stored, or a holding plate of a transport holding mechanism that holds the processed object for transporting. With this configuration, the holding plates of the processing table, the inspection table, the transfer table, and the transport holding mechanism can be automatically replaced.

[0013] The processing apparatus of the present invention further includes a workpiece transport mechanism that transports the workpiece. In this configuration, in order to simplify the device configuration and reduce device costs while enabling automatic replacement of the holding plate, it is desirable that the plate transport mechanism be configured using the workpiece transport mechanism, i.e., the plate transport mechanism has the function of transporting the workpiece after processing.

[0014] As a specific embodiment for simplifying the device configuration, it is desirable that the processing device of the present invention further includes a first holding mechanism that holds the workpiece to be processed in order to transport it to the processing table, a second holding mechanism that holds the workpiece after processing in order to transport it from the processing table after processing, and a transport moving mechanism that moves the first holding mechanism and the second holding mechanism. In this configuration, in order to enable automatic replacement of the holding plate while simplifying the device configuration and reducing device costs, it is desirable that the plate transport mechanism be configured using the second holding mechanism and the transport moving mechanism.

[0015] The processing apparatus of the present invention may further include a transfer table on which the processed object is placed before being accommodated, and a transfer mechanism for moving the transfer table. In this configuration, in order to enable automatic replacement of the holding plate while simplifying the device configuration and reducing device costs, it is desirable that the plate transport mechanism be configured using the transfer table and the transfer moving mechanism.

[0016] When a plate transport mechanism is constructed using a transfer table and a transfer moving mechanism, it is desirable that the plate transport mechanism further has a plate input / output mechanism that transports the holding plate between the plate storage section and the transfer table.

[0017] The processing apparatus of the present invention can be configured to store the processed objects in a tray (also referred to as "tray storage"). This processing apparatus further includes a tray transport mechanism that transports trays onto which the processed objects that have been singulated by the processing mechanism are sorted, and stores the singulated processed objects in the trays. In the present invention, in a processing apparatus that stores trays in this way, the holding plates for holding the workpieces can be automatically replaced.

[0018] The processing device of the present invention can be configured to store the singulated object by adhering it to an attachment member having an adhesive surface (also referred to as "ring storage"). This processing device further includes a mounting table on which an attachment member having an adhesive surface to which the singulated object is attached by the processing mechanism is placed, and the singulated object is attached to the attachment member and stored. In the present invention, in a processing apparatus that accommodates a ring in this manner, the holding plate for holding the workpiece can be automatically replaced.

[0019] Furthermore, the processing apparatus of the present invention can be configured to accommodate the singulated workpieces in a cylindrical container (also called "tube accommodation"). Note that cylindrical containers are sometimes called tubes, magazine sticks, stick magazines, sticks, etc. This processing apparatus further includes a container installation section in which a cylindrical container is installed that accommodates the workpieces singulated by the processing mechanism from one end opening, and accommodates the singulated workpieces in the cylindrical container. In the present invention, in a processing apparatus that accommodates a tube in this manner, the holding plate for holding the workpiece can be automatically replaced.

[0020] In addition, the processing apparatus of the present invention can be configured to be able to store the singulated workpieces in a loose state (also called "bulk storage"). This processing apparatus further includes a storage box into which the workpieces singulated by the processing mechanism are dropped and stored, and the singulated workpieces are stored in a storage box. thing are housed in the housing box. In this manner, in a processing device that stores bulk materials, the holding plates for holding the workpieces can be automatically replaced.

[0021] In order to automatically inspect whether the holding plate is fixed accurately, it is desirable that the processing apparatus of the present invention further include an inspection mechanism that inspects the attachment state of the holding plate relative to the holding base portion.

[0022] In a specific embodiment of the inspection mechanism, the inspection mechanism preferably includes an inspection flow path that opens into the mounting surface on which the holding plate is mounted, and a detection sensor that is provided in the inspection flow path and detects fluid leakage from the opening, wherein the detection sensor detects fluid leakage from the opening by measuring the pressure or flow rate of the fluid.

[0023] In order to simplify the fixing structure of the holding plate to the holding base portion, it is desirable that the holding base portion has a fixing cylinder portion that is inserted into a fixing insertion hole formed in the holding plate, and the fixing cylinder portion has a cylinder main body that is inserted into the fixing insertion hole, a movable member that is movable between a protruding position and a recessed position from the outer circumferential surface of the cylinder main body, and an elastic body that applies force to the movable member to move to a protruding position relative to the cylinder main body, and that when the fixing cylinder portion is inserted into the fixing insertion hole, the movable member is in a protruding position, thereby fixing the holding plate to the holding base portion.

[0024] In addition, in order to simplify the structure for attaching and detaching the holding plate to the plate conveying mechanism, it is desirable that the plate conveying mechanism has a conveying cylinder portion that is inserted into a conveying holding hole formed in the holding plate, and that the conveying cylinder portion has a cylinder main body that is inserted into the conveying holding hole, a movable member that is movable between a protruding position and a recessed position from the outer circumferential surface of the cylinder main body, and an elastic body that applies force to the movable member to move to a protruding position relative to the cylinder main body, and that when the conveying cylinder portion is inserted into the conveying insertion hole, the movable member is in a protruding position, thereby holding the holding plate in the plate conveying mechanism.

[0025] Another aspect of the present invention is a method for manufacturing a processed product using the above processing device.

[0026] <Embodiments of the present invention> Hereinafter, each embodiment of the processing apparatus according to the present invention will be described with reference to the drawings. Note that in all of the drawings shown below, for ease of understanding, some parts are omitted or exaggerated as appropriate and schematic drawings are used. Identical components are given the same reference numerals and their description will be omitted as appropriate.

[0027] <Overall configuration of the processing equipment> The processing apparatus 100 of this embodiment is a cutting apparatus that cuts an encapsulated substrate W, which is an object to be processed, into individual products P, which are a plurality of processed products.

[0028] Here, the encapsulated substrate W is a substrate to which electronic elements such as semiconductor chips, resistor elements, and capacitor elements are connected, and which is molded with resin so as to encapsulate at least the electronic elements. Examples of substrates that constitute the encapsulated substrate W include lead frames and printed wiring boards, as well as semiconductor substrates (including semiconductor wafers such as silicon wafers), metal substrates, ceramic substrates, glass substrates, and resin substrates. Furthermore, the substrates that constitute the encapsulated substrate W may or may not be wired.

[0029] In addition, one surface of the sealed substrate W and the product P in this embodiment is a mounting surface on which mounting will be performed later. In the description of this embodiment, the surface on which mounting will be performed later is referred to as the "mounting surface," and the opposite surface is referred to as the "mark surface."

[0030] 1, the cutting apparatus 100 includes two cutting tables (processing tables) 2A and 2B that hold the sealed substrate W, a first holding mechanism 3 that holds the sealed substrate W in order to transport the sealed substrate W to the cutting tables 2A and 2B, a cutting mechanism (processing mechanism) 4 that cuts the sealed substrate W held on the cutting tables 2A and 2B, a transfer table 5 to which a plurality of products P are transferred, a second holding mechanism 6 that holds the plurality of products P in order to transport the plurality of products P from the cutting tables 2A and 2B to the transfer table 5, and a transport moving mechanism 7 that moves the first holding mechanism 3 and the second holding mechanism 6. The first holding mechanism 3 and the transport moving mechanism 7 form a transport mechanism (loader) that transports the sealed substrate W, and the second holding mechanism 6 and the transport moving mechanism 7 form a transport mechanism (unloader) that transports the plurality of products P.

[0031] In the following description, directions perpendicular to each other in a plane (horizontal plane) along the upper surfaces of the cutting tables 2A and 2B are referred to as the X and Y directions, respectively, and the vertical direction perpendicular to the X and Y directions is referred to as the Z direction. Specifically, the left-right direction in FIG. 1 is referred to as the X direction, and the up-down direction is referred to as the Y direction.

[0032] The two cutting tables 2A, 2B adsorb and hold the sealed substrate W, and are provided so as to be movable at least in the Y direction. The cutting table 2A can be moved in the Y direction by a cutting movement mechanism 8A, and can be rotated in the θ direction by a rotation mechanism 9A. The cutting table 2B can be moved in the Y direction by a cutting movement mechanism 8B, and can be rotated in the θ direction by a rotation mechanism 9B.

[0033] 1, the first holding mechanism 3 holds the sealed substrate W in order to transport the sealed substrate W from the substrate supply mechanism 10 to the cutting tables 2A and 2B. The first holding mechanism 3 has a plurality of suction portions (not shown) for suction-holding the sealed substrate W. The first holding mechanism 3 is moved to a desired position by a transport moving mechanism 7 (described later) or the like, thereby transporting the sealed substrate W from the substrate supply mechanism 10 to the cutting tables 2A and 2B.

[0034] As shown in FIG. 1, the substrate supply mechanism 10 has a substrate accommodating section 10a in which a plurality of sealed substrates W are accommodated from the outside, and a substrate supply section 10b that moves the sealed substrates W accommodated in the substrate accommodating section 10a to a holding position RP where the sealed substrates W are adsorbed and held by the first holding mechanism 3.

[0035] As shown in FIG. 1, the cutting mechanism 4 has two rotary tools 40 each consisting of blades 41A and 41B and two spindles 42A and 42B. The two spindles 42A and 42B are provided with their rotation axes aligned along the X direction, and the blades 41A and 41B attached thereto are disposed to face each other (see FIG. 1). The two spindles 42A and 42B are configured to be movable independently in the X and Z directions by a spindle movement mechanism 11. The cutting mechanism 4 is further provided with image capture cameras 12 and 27 for alignment, which are used to align the sealed substrate W before cutting and to align the sealed substrate W after it has been cut in either the vertical or horizontal direction and rotated by a rotation mechanism 9B.

[0036] The cutting at the cutting table 2A involves moving the cutting table 2A and the two spindles 42A and 42B relative to each other, thereby cutting and dividing the sealed substrate W into individual pieces. The cutting at the cutting table 2B involves moving the cutting table 2B and the two spindles 42A and 42B relative to each other, thereby cutting and dividing the sealed substrate W into individual pieces. The blade 41A of the spindle 42A and the blade 41B of the spindle 42B rotate in a plane including the Y direction and the Z direction to cut the sealed substrate W held on each table 2A, 2B. The cutting process at the cutting table 2A and the cutting process at the cutting table 2B process can be performed alternately.

[0037] The spindle movement mechanism 11 is also provided with a first cleaning mechanism 13 that cleans the upper surfaces (mounting surfaces) of the multiple products P held on the cutting tables 2A and 2B. This first cleaning mechanism 13 is provided on a support 11a that extends in the X direction and supports the spindle sections 42A and 42B in the spindle movement mechanism 11. The first cleaning mechanism 13 sprays cleaning liquid and / or compressed air onto the upper surfaces of the multiple products P held on the cutting tables 2A and 2B to clean the upper surfaces (mounting surfaces) of the products P. The first cleaning mechanism 13 may also use a brush.

[0038] As shown in FIG. 1, the transfer table 5 in this embodiment is a table onto which multiple products P inspected by an inspection unit 14 (described later) are transferred. This transfer table 5 is a so-called index table on which multiple products P are temporarily placed before being sorted and stored in various trays 21. The transfer table 5 is movable back and forth along the Y direction. The transfer table 5 is moved by a transfer movement mechanism 15 between a transfer position X1 where multiple products P are placed by the second holding mechanism 6 and a take-out position X2 where multiple products P are transported by the sorting mechanism 20. The transfer movement mechanism 15 includes guide rails 15a that guide the transfer table along the Y direction and a drive unit (not shown) that moves the transfer table on the guide rails 15a.

[0039] The multiple products P placed on the transfer table 5 are sorted into various trays 21 by the sorting mechanism 20 according to the inspection results (good products, defective products, etc.) by the inspection unit 14. The various trays 21 are transported by the tray moving mechanism 22 from the tray storage unit 23 to the desired removal position X2, and the products P to be sorted by the sorting mechanism 20 are placed on the trays 21. After being sorted, the various trays 21 are stored in the tray storage unit 23 by the tray moving mechanism 22. In this embodiment, the tray storage unit 23 is configured to store three types of trays: trays 21 before storing the products P, trays 21 storing good products P, and trays 21 storing defective products P that require rework. The tray moving mechanism 22 has a tray placing section 22a on which the tray 21 is placed, a guide rail 22b that guides the tray placing section 22a along the Y direction, a moving mechanism (not shown) that moves the various trays 21 in the X direction, a moving mechanism (not shown) provided for each of the various trays 21 that moves the various trays 21 in the Z direction, and a drive section (not shown) that drives these to move the tray placing section 22a.

[0040] As shown in FIG. 1, the inspection unit 14 is provided between the cutting tables 2A, 2B and the transfer table 5, and inspects a plurality of products P held by the second holding mechanism 6. The inspection unit 14 of this embodiment has a first inspection unit 141 that inspects the mark surface of the product P, and a second inspection unit 142 that inspects the mounting surface of the product P. The first inspection unit 141 is an imaging camera having an optical system for inspecting the mark surface, and the second inspection unit 142 is an imaging camera having an optical system for inspecting the mounting surface. The first inspection unit 141 and the second inspection unit 142 may be a common unit.

[0041] Furthermore, a reversing mechanism 16 that reverses the multiple products P is provided so that both sides of the multiple products P can be inspected by the inspection unit 14 (see FIG. 1). This reversing mechanism 16 has a holding table 161 that holds the multiple products P, and a reversing unit 162 such as a motor that reverses the holding table 161 so that the front and back of the products are reversed. Furthermore, the reversing mechanism 16 can be moved to the transfer table 5 by a reversing movement mechanism 17 that moves the reversing mechanism 16 in the X direction. The reversing movement mechanism 17 has guide rails 17a that guide the reversing mechanism 16 along the X direction, and a drive unit (not shown) that moves the reversing mechanism 16 on the guide rails 17a.

[0042] When the second holding mechanism 6 holds the multiple products P from the cutting tables 2A, 2B, the mark surfaces of the products P face downward. In this state, the multiple products P are transported from the cutting tables 2A, 2B to the reversing mechanism 16, and the mark surfaces of the products P are inspected by the first inspection unit 141. Thereafter, the multiple products P held by the second holding mechanism 6 are reversed by the reversing mechanism 16, and then the reversing mechanism 16 is moved to the position of the transfer table 5 by the reversing movement mechanism 17. During this movement, the mounting surfaces of the products P facing downward are inspected by the second inspection unit 142. The products P are then delivered to the transfer table 5.

[0043] 1, the second holding mechanism 6 holds the multiple products P in order to transport the multiple products P from the cutting tables 2A, 2B to the reversing mechanism 16. The second holding mechanism 6 has multiple suction sections (not shown) for suction-holding the multiple products P. The second holding mechanism 6 is moved to a desired position by a transfer mechanism 7 (described later) or the like, thereby transporting the multiple products P from the cutting tables 2A, 2B to the holding table 161.

[0044] As shown in FIG. 1, the transport moving mechanism 7 moves the first holding mechanism 3 at least between the substrate supply mechanism 10 and the cutting tables 2A, 2B, and moves the second holding mechanism 6 at least between the cutting tables 2A, 2B and the holding table 161.

[0045] 1, the transport movement mechanism 7 extends in a straight line along the arrangement direction (X direction) of the two cutting tables 2A, 2B and the transfer table 5, and has a common transfer shaft 71 for moving the first holding mechanism 3 and the second holding mechanism 6. This transfer shaft 71 is provided within a range that allows the first holding mechanism 3 to move above the substrate supply unit 10b of the substrate supply mechanism 10, and allows the second holding mechanism 6 to move above the holding table 161 (see FIG. 1). Note that the transfer shaft 71 may be provided separately for the first holding mechanism 3 and the second holding mechanism 6.

[0046] Furthermore, the transfer movement mechanism 7 is configured to be able to move the first holding mechanism 3 and the second holding mechanism 6 in the X direction and the Z direction relative to the transfer shaft 71. The movement mechanism in each direction may be, for example, one that uses a rack and pinion mechanism, one that uses a ball screw mechanism, one that uses an air cylinder, or one that uses a linear motor.

[0047] 1, the cutting device 100 of the present invention further includes a second cleaning mechanism 18 that cleans the undersides (marked surfaces) of the multiple products P held by the second holding mechanism 6. This second cleaning mechanism 18 is provided between the cutting table 2B and the inspection unit 14, and cleans the undersides (marked surfaces) of the multiple products P held by the second holding mechanism 6 by spraying cleaning liquid and / or compressed air onto the undersides of the multiple products P. In other words, the second cleaning mechanism 18 cleans the undersides (marked surfaces) of the products P while the second holding mechanism 6 is moving along the transfer shaft 71. The second cleaning mechanism 18 may also use a brush.

[0048] <Example of operation of cutting device 100> Next, an example of the operation of the cutting apparatus 100 will be described. Fig. 2 shows the movement path of the first holding mechanism 3 and the movement path of the second holding mechanism 6 during the operation of the cutting apparatus 100. In this embodiment, all operations and controls of the cutting apparatus 100, such as transporting the sealed substrate W, cutting the sealed substrate W, inspecting the product P, and replacing the holding plate M1 (described later), are performed by the control unit CTL (see Fig. 1).

[0049] The substrate supply unit 10b of the substrate supply mechanism 10 moves the sealed substrate W accommodated in the substrate accommodation unit 10a toward the holding position RP where the sealed substrate W is held by the first holding mechanism 3.

[0050] Next, the transfer movement mechanism 7 moves the first holding mechanism 3 to the holding position RP, and the first holding mechanism 3 suction-holds the sealed substrate W. Thereafter, the transfer movement mechanism 7 moves the first holding mechanism 3 holding the sealed substrate W to the cutting tables 2A and 2B, and the first holding mechanism 3 releases the suction-holding and places the sealed substrate W on the cutting tables 2A and 2B. Then, the cutting tables 2A and 2B suction-hold the sealed substrate W.

[0051] In this state, the cutting movement mechanisms 8A and 8B move the cutting tables 2A and 2B to a predetermined cutting position (the rear side of the transfer shaft 71). In placeThe cutting tables 2A, 2B and the two spindle portions 42A, 42B are moved relatively in the X direction and the Y direction by the cutting movement mechanisms 8A, 8B and the spindle movement mechanism 11, and the cutting tables 2A, 2B are rotated by the rotation mechanisms 9A, 9B, whereby the sealed substrate W is cut into individual pieces in a lattice pattern.

[0052] After cutting, the upper surfaces (mounting surfaces) of the multiple products P held on the cutting tables 2A and 2B are cleaned by the first cleaning mechanism 13. After this cleaning, the cutting movement mechanisms 8A and 8B move the cutting tables 2A and 2B to predetermined transport positions (front side of the transfer shaft 71).

[0053] Next, the transport movement mechanism 7 moves the second holding mechanism 6 to the post-cutting cutting tables 2A, 2B, and the second holding mechanism 6 suction-holds the multiple products P. Thereafter, the transport movement mechanism 7 moves the second holding mechanism 6 holding the multiple products P to the second cleaning mechanism 18. As a result, the second cleaning mechanism 18 cleans the undersides (marked surfaces) of the multiple products P held by the second holding mechanism 6.

[0054] After cleaning, the multiple products P held by the second holding mechanism 6 have their undersides (marked surfaces) inspected by the inspection unit 141, and are then transferred to the reversing mechanism 16, which suction-holds the marked surfaces and then reverses them. After being reversed, the reversing mechanism 16 moves by the reversing movement mechanism 17, and the mounting surfaces of the products P are inspected by the inspection unit 142. After double-sided inspection in this manner, the products P are transferred from the reversing mechanism 16 to the transfer table 5. The transfer table 5 on which the products P are placed is moved to a take-out position by the transfer movement mechanism 15. The multiple products P placed on the transfer table 5 are then sorted by the sorting mechanism 20 into various trays 21 according to the inspection results (good product, defective product, etc.) by the inspection unit 14.

[0055] <Automatic replacement function for holding plate M1> Furthermore, the cutting device 100 of this embodiment has a function of automatically replacing the holding plate M1 for holding the sealed substrate W or the product P.

[0056] 3, in this embodiment, the cutting tables 2A and 2B for cutting the sealed substrate W, the inspection table (holding table 161) for inspecting the product P, the transfer table 5 on which the product P is placed before sorting (before storage), and the transport holding mechanism (second holding mechanism 6) for holding the product P for transporting each have an exchangeable holding plate M1 and a holding base M2 to which the holding plate M1 is detachably attached and which uses the holding plate M1 to hold the sealed substrate W or the product P. Note that while the holding plate M1 and holding base M2 of the cutting tables 2A and 2B are shown representatively in FIG. 3, the holding table 161, the transfer table 5, and the second holding mechanism 6 also have the same configuration, having the holding plate M1 and the holding base M2.

[0057] Specifically, as shown in Figures 1 and 4, the cutting device 100 includes a plate accommodating section 24 that accommodates a holding plate M1, and a plate transport mechanism 25 that transports the holding plate M1 between the plate accommodating section 24 and a holding base section M2.

[0058] The holding plate M1 has suction portions (suction holes) (not shown) for suctioning the sealed substrate W or the product P, and is attached to the holding base M2 to suction the sealed substrate W or the product P through a suction flow path M21 provided in the holding base M2 (see FIG. 3). The holding plates M1 used for the cutting tables 2A and 2B, the holding table 161, the transfer table 5, and the second holding mechanism 6 have different shapes or suction portion configurations. The holding plates M1 used for the cutting tables 2A and 2B, the holding table 161, the transfer table 5, and the second holding mechanism 6 may have the same shape or suction portion configuration. The various holding plates M1 have different shapes or suction portion configurations for each sealed substrate W or product P, and are selected according to the sealed substrate W or product P.

[0059] 3, the cutting device 100 is provided with a fixing mechanism 26 for configuring the holding plate M1 to be detachable from the holding base part M2. Specifically, the fixing mechanism 26 has a fixing insertion hole 261 formed in the holding plate M1, and a fixing cylinder part 262 provided in the holding base part M2 and inserted into the fixing insertion hole 261 formed in the holding plate M1.

[0060] The fixing cylinder portion 262 is what is called a chuck cylinder, and as shown in FIG. 5, has a cylinder body 262a inserted into the fixing insertion hole 261, a spherical movable element 262b provided so as to be movable between a protruding position and a retracted position from the outer peripheral surface of the cylinder body 262a, and an elastic body 262c that applies force to move the movable element 262b to a protruding position relative to the cylinder body 262a, and is configured so that the movable element 262b can be switched between a protruding position (FIG. 5(a)) and a retracted position (FIG. 5(b)) by supplying compressed air.

[0061] Furthermore, the fixing cylinder 262 has a piston 262d. This piston 262d is interposed between the mover 262b and the elastic body 262c inside the cylinder body 262a, and is moved inside the cylinder body 262a by compressed air, thereby switching the mover 262b between the extended position and the retracted position. When the supply of compressed air starts, the piston 262d moves inside the cylinder body 262a against the force received from the elastic body 262c, moving the mover 262b to the retracted position (FIG. 5(b)). When the supply of compressed air is stopped, the piston 262d moves inside the cylinder body 262a by the force received from the elastic body 262c, moving the mover 262b to the extended position (FIG. 5(a)).

[0062] 5, the fixing insertion hole 261 formed in the holding plate M1 has a protrusion 261a that catches the mover 262b when the mover 262b is in the protruding position with the fixing cylinder 262 inserted, preventing the fixing cylinder 262 from coming off. The protrusion 261a catches the mover 262b when it is in the protruding position, but does not catch the mover 262b when it is in the retracted position. Therefore, when the fixing cylinder 262 is inserted into the fixing insertion hole 261 and the mover 262b is in the protruding position, the holding plate M1 is fixed to the holding base M2 (see FIG. 5(a)). On the other hand, when the fixing cylinder 262 is inserted into the fixing insertion hole 261 and the mover 262b is in the retracted position, the holding plate M1 is released from the holding base M2 (see FIG. 5(b)).

[0063] The plate accommodating section 24 accommodates the holding plates M1 before and after replacement (before and after use), and in this embodiment, is provided on the rear side of the transfer shaft 71, further rearward than the transfer table 5 at the removal position X2. The plate accommodating section 24 is provided so as to be movable up and down by an elevation movement mechanism 240 (see FIG. 1 ) to facilitate the insertion and removal of the holding plates M1 by a plate insertion / removal mechanism 25d (described later). As shown in FIG. 4 , the plate accommodating section 24 has sliding shelves 241 on which the holding plates M1 are placed. In this embodiment, the upper multiple sliding shelves 241 are configured to accommodate new holding plates M1 before replacement, and the lower multiple sliding shelves 241 are configured to accommodate old holding plates M1 after replacement. In this plate storage section 24, for example, the slide shelf section 241 to which the plate is attached is slid forward by the plate transport mechanism 25, whereby an old used holding plate M1 is placed on the slide shelf section 241 or a new unusable holding plate M1 is removed. Note that a hook section 241a is provided on the front edge of the slide shelf section 241, and the slide shelf section 241 is pulled out using the hook section 241a.

[0064] <Plate transport mechanism 25> The plate transport mechanism 25 transports the holding plate M1 removed from the holding base part M2 to the plate accommodating part 24, and transports the holding plate M1 in the plate accommodating part 24 to the holding base part M2.

[0065] Specifically, as shown in Figures 1 and 4, the plate transport mechanism 25 has a first transport mechanism 25a configured using a second holding mechanism 6 and a transport moving mechanism 7, a second transport mechanism 25b configured using an inversion mechanism 16 and an inversion moving mechanism 17, a third transport mechanism 25c configured using a transfer table 5 and a transfer moving mechanism 15, and a plate input / output mechanism 25d that transports the holding plate M1 between the plate storage section 24 and the transfer table 5.

[0066] The first conveying mechanism 25a is composed of a second holding mechanism 6 and a conveying moving mechanism 7, and conveys the holding plate M1 between the holding base part M2 of the cutting table 2A, 2B or the holding table 161 and the holding table 161 of the inversion mechanism 16.

[0067] As shown in FIG. 6, the second holding mechanism 6, which becomes the first transfer mechanism 25a, has a transfer cylinder 282 that is inserted into a transfer holding hole 281 (see FIG. 3) formed in the holding plate M1. In this embodiment, the transfer cylinder 282 is configured using the fixing cylinder 262 of the holding base M2 of the second holding mechanism 6. The transfer holding hole 281 has a configuration similar to the fixing insertion hole 261 of the fixing mechanism 26 described above. Note that the transfer holding hole 281 and the fixing insertion hole 261 are configured upside down. Note that the second holding mechanism 6 may use a holding claw that hooks onto the edge of the holding plate M1 to hold it, instead of the transfer cylinder 282. The second holding mechanism 6 is configured so that a portion that holds the holding plate M1 can be raised and lowered, and the holding plate M1 can be transported with the portion that holds the holding plate M1 raised to the raised position. Here, "raised position" means the height to which the holding plate M1 is raised from the position of the holding plate M1 attached to the holding base part M2 to be replaced or the lowest position of the holding plate M1 that can be reached during transportation.

[0068] The second transport mechanism 25b is configured using an inversion mechanism 16 and an inversion movement mechanism 17, and transports the holding plate M1 between the second holding mechanism 6 and the transfer table 5. When the second transport mechanism 25b transports the holding plate M1, the transfer table 5 is at the transfer position X1 where the product P is handed over.

[0069] The third transport mechanism 25c is configured using a transfer table 5 and a transfer movement mechanism 15, and moves the holding plate M1 to a position where it can be loaded and unloaded by a plate loading and unloading mechanism 25d (described later). Specifically, the transfer movement mechanism 15 constituting the third transport mechanism 25c moves the holding base M2 of the transfer table 5 between a transfer position X1 and a loading and unloading position X3. The loading and unloading position X3 may be the same as or different from the aforementioned unloading position X2.

[0070] The plate loading / unloading mechanism 25d transports the holding plate M1 between the holding base portion M2 of the transfer table 5, which is in the loading / unloading position X3, and the plate storage portion 24. The plate loading / unloading mechanism 25d has a plate holding mechanism 251 that holds the holding plate M1, and an loading / unloading movement mechanism 252 that moves the plate holding mechanism 251. The plate holding mechanism 251 may be configured to have a transport cylinder portion that is inserted into a transport holding hole 281 (see FIG. 3) formed in the holding plate M1, or may be configured to have holding claws that hook onto the edge of the holding plate M1 to hold it, or may be configured to have a suction portion that suction-holds the holding plate M1.

[0071] 4, the entrance / exit movement mechanism 252 includes a Y-direction movement unit 252a that moves the plate holding mechanism 251 in the Y direction, and a Z-direction movement unit 252b that moves the plate holding mechanism 251 in the Z direction. The entrance / exit movement mechanism 252 may also include an X-direction movement unit that moves the plate holding mechanism 251 in the X direction. Each of the movement units 252a and 252b may be, for example, ,La It may be one that uses a lock and pinion mechanism, one that uses a ball screw mechanism, one that uses an air cylinder, or one that uses a linear motor.

[0072] <Inspection mechanism 29 for holding plate M1> As shown in FIGS. 3 and 6, the cutting device 100 of this embodiment further includes an inspection mechanism 29 that inspects the attachment state of the holding plate M1 to the holding base portion M2.

[0073] The inspection mechanism 29 has an inspection flow path 29a that opens to the mounting surface M22 on which the holding plate M1 is mounted, and a detection sensor (not shown) that is provided in the inspection flow path 29a and detects fluid leakage from the opening. The inspection flow path 29a has an opening formed in the mounting surface M22 of the holding base part M2, and compressed air is supplied to the inspection flow path 29a. The detection sensor detects leakage of compressed air from the opening by detecting the pressure or flow rate of the compressed air flowing through the inspection flow path 29a. The inspection mechanism 29 determines whether the holding plate M1 is tightly fixed to the mounting surface M22 of the holding base part M2. If the inspection mechanism 29 determines that the holding plate M1 is not tightly fixed to the mounting surface M22 of the holding base part M2, the fixing mechanism 26 can be used to release the holding plate M1, and the holding plate M1 can be reattached.

[0074] <Replacing the retaining plate M1> Next, the operation of replacing the holding plate M1 by the plate transport mechanism 25 of this embodiment will be described with reference to FIGS.

[0075] In the following replacement operation, when the holding plate M1 is removed from the plate storage section 24, the holding plate M1 is identified by reading an identifier such as an RFID provided on the holding plate M1 using an identifier reader (not shown) provided in the plate transport mechanism 25 (plate input / output mechanism 25d).

[0076] (1) Replacing the holding plate M1 of the transfer table 5 (see FIG. 7(a))

[0077] The transfer table 5, which is at the transfer position X1, is moved to the loading / unloading position X3 by the transfer movement mechanism 15. Then, the holding plate M1 of the transfer table 5 is removed. When removing the holding plate M1 of the transfer table 5, compressed air is supplied to the fixing cylinder part 262 to move the mover 262b to the retracted position, thereby releasing the fixing of the fixing mechanism 26.

[0078] The plate transport mechanism 25d receives the holding plate M1 from the transfer table 5 at the transport position X3, and places the holding plate M1 on the slide shelf 241 of the plate storage section 24 to store it therein.

[0079] Next, the plate loading / unloading mechanism 25d takes out a new holding plate M1 from the plate storage section 24, transports it to the holding base section M2 of the transfer table 5, and lowers and places the holding plate M1. In this state, when compressed air is supplied to the fixing cylinder section 262 to set the mover 262b to a retracted position, the holding plate M1 is lowered and the fixing cylinder section 262 enters the fixing insertion hole 261 of the holding plate M1. Thereafter, when the supply of compressed air is stopped, the mover 262b is set to a protruding position, and the holding plate M1 is fixed to the holding base section M2 of the transfer table 5.

[0080] (2) Replacing the holding plate M1 of the holding table 161 (see FIG. 7(b)) When replacing the holding plate M1 of the holding table 161, the holding plate M1 of the transfer table 5 is removed in advance.

[0081] The holding table 161 is moved by the reversing movement mechanism 17 to the transfer table 5 located at the transfer position X1. Then, the holding plate M1 is removed from the holding table 161 and handed over to the transfer table 5. When removing the holding plate M1 from the holding table 161, compressed air is supplied to the fixing cylinder portion 262 to bring the mover 262b to the retracted position, thereby releasing the fixing of the fixing mechanism 26.

[0082] Next, the transfer table 5 to which the holding plate M1 of the holding table 161 has been handed over is moved from the transfer position X1 to the loading / unloading position X3 by the transfer movement mechanism 15. Then, the plate loading / unloading mechanism 25d receives the holding plate M1 of the holding table 161 from the transfer table 5 at the loading / unloading position X3, and places the holding plate M1 on the sliding shelf 241 of the plate storage unit 24 to store it.

[0083] Next, the plate loading / unloading mechanism 25d takes out a new holding plate M1 from the plate storage section 24, transports it to the transfer table 5, and lowers and places the holding plate M1 on it. The transfer table 5 on which the holding plate M1 is placed is moved by the transfer movement mechanism 15 from the loading / unloading position X3 to the transfer position X1.

[0084] Then, the holding base portion M2 of the holding table 161 is moved to the transfer table 5, which is at the transfer position X1, by the reversing movement mechanism 17. Then, the holding base portion M2 of the holding table 161 receives the holding plate M1 from the transfer table 5. Here, when compressed air is supplied to the fixing cylinder portion 262 to set the mover 262b to a retracted position, the fixing cylinder portion 262 enters the fixing insertion hole 261 of the holding plate M1, and thereafter, when the supply of compressed air is stopped, the mover 262b is set to a protruding position, and the holding plate M1 is fixed to the holding base portion M2 of the holding table 161.

[0085] (3) Replacing the holding plate M1 of the second holding mechanism 6 (see FIG. 8(a)) When replacing the holding plate M1 of the second holding mechanism 6, the holding plate M1 of the transfer table 5 and the holding plate M1 of the holding table 161 are removed in advance.

[0086] The second holding mechanism 6 is moved to the holding table 161 by the transfer moving mechanism 7, and the holding plate M1 is lowered and removed, and placed on the holding table 161. When removing the holding plate M1 of the second holding mechanism 6, compressed air is supplied to the fixing cylinder portion 262 to set the mover 262b to the retracted position, thereby releasing the fixing of the fixing mechanism 26.

[0087] The holding table 161 on which the holding plate M1 of the second holding mechanism 6 is placed is moved by the reversing movement mechanism 17 to the transfer table 5 at the transfer position X1, and the holding plate is handed over to the transfer table 5.

[0088] Next, the transfer table 5 to which the holding plate M1 of the second holding mechanism 6 has been handed over is moved from the transfer position X1 to the loading / unloading position X3 by the transfer movement mechanism 15. Then, the plate loading / unloading mechanism 25d receives the holding plate M1 of the second holding mechanism 6 from the transfer table 5 at the loading / unloading position X3, and places and stores the holding plate M1 on the sliding shelf 241 of the plate storage section 24.

[0089] Next, the plate loading / unloading mechanism 25d takes out a new holding plate M1 from the plate storage section 24, transports it to the transfer table 5, and lowers and places the holding plate M1 on it. The transfer table 5 on which the holding plate M1 is placed is moved by the transfer movement mechanism 15 from the loading / unloading position X3 to the transfer position X1.

[0090] Then, the holding base portion M2 of the holding table 161 is moved to the transfer table 5 at the transfer position X1 by the inversion movement mechanism 17. Then, the holding table 161 receives a new holding plate M1 from the transfer table 5 and moves to a position where it will be handed over to the second holding mechanism 6.

[0091] Thereafter, the second holding mechanism 6 is moved to the holding table 161 by the transfer movement mechanism 7, the holding base part M2 is lowered, and a new holding plate M1 placed on the holding table 161 is attached. Here, the transfer movement mechanism 7 inserts the fixing cylinder part 262 provided on the holding base part M2 of the second holding mechanism 6 into the fixing insertion hole 261 formed in the holding plate M1. In this state, when compressed air is supplied to the fixing cylinder part 262 to set the mover 262b to a retracted position, the fixing cylinder part 262 enters the fixing insertion hole 261 of the holding plate M1, and thereafter, when the supply of compressed air is stopped, the mover 262b is set to a protruding position, and the holding plate M1 is fixed to the holding base part M2 of the second holding mechanism 6.

[0092] The replacement operation of the holding plate M1 of the second holding mechanism 6 can also be performed by directly moving the second holding mechanism 6 to the transfer table 5 by the transfer mechanism 7 for transport, without using the holding table 161.

[0093] (4) Replacing the holding plates M1 of the cutting tables 2A and 2B (see Figure 8(b)) When replacing the holding plates M1 of the cutting tables 2A and 2B, the holding plates M1 of the transfer table 5, the holding table 161, and the second holding mechanism 6 are removed in advance.

[0094] The holding plates M1 of the cutting tables 2A and 2B are removed, and the first transport mechanism 25a (transport moving mechanism 7 and second holding mechanism 6) lifts the holding plate M1 to a lifted position and transports it to the holding table 161, where it is lowered and placed on the holding table 161. When removing the holding plates M1 of the cutting tables 2A and 2B, compressed air is supplied to the fixing cylinder part 262 to bring the mover 262b to a retracted position and release the fixing of the fixing mechanism 26.

[0095] The holding table 161 on which the holding plate M1 for the cutting tables 2A and 2B is placed is moved by the reversing movement mechanism 17 to the transfer table 5 at the transfer position X1, and the holding plate M1 is handed over to the transfer table 5.

[0096] Next, the transfer table 5 onto which the holding plate M1 for the cutting tables 2A, 2B has been handed over is moved from the transfer position X1 to the loading / unloading position X3 by the transfer movement mechanism 15. Then, the plate loading / unloading mechanism 25d receives the holding plate M1 for the cutting tables 2A, 2B from the transfer table 5 at the loading / unloading position X3, and places the holding plate M1 on the sliding shelf portion 241 of the plate storage portion 24 to store it.

[0097] Next, the plate loading / unloading mechanism 25d takes out a new holding plate M1 from the plate storage section 24, transports it to the transfer table 5, and lowers and places the holding plate M1 on it. The transfer table 5 on which the holding plate M1 is placed is moved by the transfer movement mechanism 15 from the loading / unloading position X3 to the transfer position X1.

[0098] Then, the holding base portion M2 of the holding table 161 is moved to the transfer table 5 at the transfer position X1 by the inversion movement mechanism 17. Then, the holding table 161 receives a new holding plate M1 from the transfer table 5 and moves to a position where it will be handed over to the second holding mechanism 6.

[0099] Thereafter, the second transport mechanism 25b (transport movement mechanism 7 and second holding mechanism 6) transports the holding plate M1 in the raised position to the holding base portion M2 of the cutting tables 2A, 2B, and lowers and places the holding plate M1 on it. In this state, when compressed air is supplied to the fixing cylinder portion 262 to set the mover 262b to a retracted position, the fixing cylinder portion 262 enters the fixing insertion hole 261 of the holding plate M1, and thereafter, when the supply of compressed air is stopped, the mover 262b is set to a protruding position, and the holding plate M1 is fixed to the holding base portion M2 of the cutting tables 2A, 2B.

[0100] The replacement operation of the holding plates M1 of the cutting tables 2A and 2B can also be performed by directly moving the second holding mechanism 6 to the transfer table 5 by the transport movement mechanism 7 without using the holding table 161.

[0101] Furthermore, the replacement of the transfer table 5, the holding table 161, the cutting tables 2A and 2B, and the holding plates M1 of the second holding mechanism 6 may be performed as a series of operations. For example, it is conceivable to remove the transfer table 5, the holding table 161, the second holding mechanism 6, and the holding plates M1 of the cutting tables 2A and 2B in this order, and then install the holding plates M1 of the cutting tables 2A and 2B, the second holding mechanism 6, the holding table 161, and the transfer table 5 in this order.

[0102] <Effects of this embodiment> The cutting device 100 of this embodiment has a plate transport mechanism 25 that transports the holding plate M1 removed from the holding base M2 to the plate storage unit 24 and transports the holding plate M1 in the plate storage unit 24 to the holding base M2, so that the holding plate M1 can be automatically replaced with respect to the holding base M2. As a result, labor costs for replacing the holding plate M1 can be reduced. Furthermore, because the holding plate M1 is automatically replaced, the time required for replacing the holding plate M1 can be shortened, improving the productivity of the cutting device 100. Furthermore, variation in the attachment state of the holding plate M1 with respect to the holding base M2 can be reduced.

[0103] <Modified embodiment of the present invention> For example, in the first embodiment, the holding plates M1 of the cutting tables 2A, 2B, the inspection table (holding table 161), the transfer table 5, and the transport holding mechanism (second holding mechanism 6) are automatically replaced, but at least one of the cutting tables 2A, 2B, the inspection table (holding table 161), the transfer table 5, and the transport holding mechanism (second holding mechanism 6) may be automatically replaced.

[0104] The plate transport mechanism 25 of the above embodiment may be configured without using the second holding mechanism 6 and the transport moving mechanism 7, without using the transfer table 5 and the transfer moving mechanism 15, or without using the inversion mechanism 16 and the inversion moving mechanism 17.

[0105] For example, in a configuration that does not use the transfer table 5 and the transfer moving mechanism 15, or that does not use the inversion mechanism 16 and the inversion moving mechanism 17, by placing the plate storage section 24 in a position accessible to the second holding mechanism 6 (for example, between the inversion mechanism 16 and the transfer table 5), the plate transport mechanism 25 can be configured using the second holding mechanism 6 and the transport moving mechanism 7, without using the transfer table 5 and the transfer moving mechanism 15, or the inversion mechanism 16 and the inversion moving mechanism 17.

[0106] 9, the tray storage unit 23 may be located on the near side of the transfer shaft 71, and the transfer shaft 71 may be extended to a position where the second holding mechanism 6 can move to the tray storage unit 23. In this configuration, the plate transport mechanism 25 can be configured using the second holding mechanism 6 and the transport movement mechanism 7. In this configuration, by providing a guide rail 22b of the tray movement mechanism 22 below the plate storage unit 24, the plate storage unit 24 and the tray movement mechanism 22 do not interfere with each other.

[0107] Furthermore, the plate storage section 24 in the first embodiment stores the holding plates M1 of the cutting tables 2A, 2B, the inspection table (holding table 161), the transfer table 5, and the transport holding mechanism (second holding mechanism 6), but it is also possible to configure multiple dedicated plate storage sections 24 according to the type of holding plate M1.

[0108] The plate storage unit 24 and the plate access mechanism 25d of the above embodiment may be unitized, and by unitizing the plate storage unit 24 and the plate access mechanism 25d in this way, they can be externally attached to an existing cutting device.

[0109] Although the above embodiment is a cutting device that accommodates trays, the present invention is not limited to tray accommodation and may be configured to accommodate the following.

[0110] For example, as shown in Fig. 10, the cutting device 100 may store a plurality of products P by adhering them to an attachment member 101 having an adhesive surface 101x (also called "ring storage"). The automatic replacement function of the holding plate M1 in this ring-storing cutting device 100 is the same as in the above-described embodiment.

[0111] Specifically, as shown in Fig. 11, the attachment member includes a frame-shaped member 101a having, for example, a circular or rectangular shape, and a resin sheet 101b having an adhesive surface 101x arranged inside the frame-shaped member 101a. The frame-shaped member 101a is made of a metal such as stainless steel. The resin sheet 101b includes, for example, a resin sheet-shaped base material 101b1 and an adhesive layer (adhesive layer) 101b2 made of an adhesive applied to the upper surface of the sheet-shaped base material 101b1. The upper surface of the adhesive layer (adhesive layer) 101b2 becomes the adhesive surface 101x.

[0112] In this case, the transfer table 5 is a table on which the multiple products P are temporarily placed before they are attached to the attachment member 101. The transfer table 5 is moved by the transfer movement mechanism 15 between a transfer position X1 where the multiple products P are placed by the second holding mechanism 6 and a take-out position X2 where the multiple products P are transported by the attachment transport mechanism 102.

[0113] The multiple products P placed on the transfer table 5 are attached to an affixing member 101 by an attachment transport mechanism 102 according to the inspection results (good product, defective product, etc.) by the inspection unit 14. The affixing member 101 is placed on a mounting table 103. As shown in FIG. 10 , the mounting table 103 is provided so as to be movable along the Y direction. The mounting table 103 is moved by a mounting movement mechanism 104 between an affixing member transport position X4 where the affixing member 101 is transported by an affixing member transport mechanism 105, and an attachment position X5 where the multiple products P are transported by the attachment transport mechanism 102. The mounting movement mechanism 104 has guide rails 104a that guide the mounting table 103 along the Y direction, and a drive unit (not shown) that moves the mounting table 103 on the guide rails 104a. The affixing member transport mechanism 105 transports the affixing member 101 between the mounting table 103 at the affixing member transport position X4 and the affixing member storage section 106 that stores the affixing member 101. The affixing member transport mechanism 105 adsorbs and holds the frame-shaped member 101a of the affixing member 101.

[0114] 12, the cutting device 100 is configured to accommodate a plurality of products P in a cylindrical container 107 (also called "tube accommodation"). The cylindrical container 107 may also be called a tube, a magazine stick, a stick magazine, a stick, etc. The automatic replacement function of the holding plate M1 in the cutting device 100 that accommodates this tube is the same as in the above embodiment.

[0115] Specifically, as shown in FIG. 13 , the cylindrical container 107 accommodates multiple products P aligned in a row. Specifically, the cylindrical container 107 has a linear shape and has a space therein for accommodating the products P. The cross-sectional shape of the cylindrical container 107 perpendicular to the longitudinal direction corresponds to the cross-sectional shape of the products P. The products P are inserted from one end opening 107x of the cylindrical container 107 by a transport / accommodation mechanism 108. While the cylindrical container 107 shown in FIG. 13 has a configuration in which a portion of the side wall extending along the longitudinal direction is open, the side wall may be closed. Furthermore, the cylindrical container 107 may accommodate multiple products P aligned in a row, or may accommodate multiple products P aligned in multiple rows. Furthermore, the cylindrical container 107 may be made of resin or metal. Although FIG. 13 shows the products P with leads, they may also be non-leaded types such as QFN.

[0116] In this case, the transfer table 5 is a table on which the multiple products P are temporarily placed before they are stored in the cylindrical container 107. The transfer table 5 is moved by the transfer movement mechanism 15 between a transfer position X1 where the multiple products P are placed by the second holding mechanism 6 and a take-out position X2 where the multiple products P are transported by the transport and storage mechanism 108.

[0117] The plurality of products P placed on the transfer table 5 are accommodated in a cylindrical container 107 by a transport and accommodation mechanism 108 according to the inspection results (good products, defective products, etc.) by the inspection unit 14. The cylindrical container 107 is placed on a container installation unit 109. 12The container installation section 109 is an empty cylindrical container. 107 and a part that accommodates the product P and an opening at one end. 107 An empty cylindrical container inserted at x 107 and a cylindrical container that is fully loaded with the product P or that contains a desired number of products P. 107 The transport and storage mechanism 108 transports the multiple products P from the transfer table 5 located at the take-out position X2 to the intermediate table 108a, and then transports the products P from the intermediate table 108a to the cylindrical container 107 and stores them therein.

[0118] As shown in FIG. 14, the cutting device 100 may also be configured to store a plurality of products P loosely in a storage box (also called "bulk storage").

[0119] Unlike the above-described embodiment, this cutting device 100 includes a drying table 110 and a storage box 111 instead of the transfer table 5, sorting mechanism 20, and inspection unit 14. The transfer shaft 71 is provided within a range that allows the second holding mechanism 6 to move above the storage box 111. The second holding mechanism 6 then uses the conveying movement mechanism 7 to transport multiple products P from the cutting tables 2A and 2B to the drying table 110, and then from the drying table 110 to the storage box 111. The drying table 110 is used to further dry the multiple products P that have been cleaned by the second cleaning mechanism 18. The multiple products P are transported and placed on the drying table 110 by the second holding mechanism 6 and the conveying movement mechanism 7. The drying table 110 adsorbs and holds the multiple products P. The drying table 110 is equipped with a drying mechanism (not shown) that dries the multiple products P placed on the drying table 110. The drying mechanism sprays compressed air, which is a gas, from above the drying table 110 to dry the multiple products P that are sucked and held on the drying table 110.

[0120] The storage box 111 stores a plurality of products P in a loose state and includes a scraping member 112 made of, for example, resin that scrapes the plurality of products P off the second holding mechanism 6. By moving the second holding mechanism 6 in the X direction relative to the scraping member 112, the products P are scraped off and dropped into the storage box 111. Alternatively, the scraping member 112 may be omitted, and the plurality of products P may be dropped by injecting gas from the second holding mechanism 6 after the second holding mechanism 6 releases the suction and hold. Alternatively, the scraping member 112 may be fixed to the storage box 111 or may be fixed to another member. Alternatively, the scraping member 112 may be movable, and the scraping member 112 may move relative to the second holding mechanism 6 to scrape off the plurality of products P.

[0121] Unlike the previous embodiments, the plate transport mechanism 25 in the bulk storage cutting device 100 is configured using a second holding mechanism 6 and a transport moving mechanism 7. Here, the second holding mechanism 6 constituting the plate transport mechanism 25 has a transport cylinder portion 282 (see FIG. 6) that is inserted into a transport holding hole 281 (see FIG. 3) formed in the holding plate M1, just like the first embodiment.

[0122] This plate transporting mechanism 25 (second holding mechanism 6 and transport moving mechanism 7) performs the replacement operation of the holding plate M1 of the second holding mechanism 6, the holding plate M1 of the drying table 110, and the holding plate M1 of the cutting tables 2A and 2B, as shown in Figure 15.

[0123] Here, when performing the replacement operation of the holding plate M1 of the cutting tables 2A, 2B and the replacement operation of the holding plate M1 of the drying table 110, the holding plate M1 of the second holding mechanism 6 constituting the plate transport mechanism 25 is removed in advance. Also, it does not matter which of the replacement operation of the holding plate M1 of the cutting tables 2A, 2B and the replacement operation of the holding plate M1 of the drying table 110 is performed first. Also, it is possible to remove the holding plate M1 from the holding base parts M2 of the cutting tables 2A, 2B and the drying table 110, and then attach new holding plates M1 to the holding base parts M2 of the cutting tables 2A, 2B and the drying table 110.

[0124] Furthermore, the replacement of the holding plates M1 of the second holding mechanism 6, the cutting tables 2A and 2B, and the drying table 110 may be performed as a series of operations, or the replacement of the holding plates M1 of at least one of the second holding mechanism 6, the cutting tables 2A and 2B, or the drying table 110 may be performed individually. In this case, when replacing the holding plates M1 of the cutting tables 2A and 2B or the drying table 110, the holding plates M1 of the second holding mechanism 6 constituting the plate transport mechanism 25 are removed in advance.

[0125] In each of the above embodiments, a cutting device of a twin cut table type and a twin spindle configuration has been described, but this is not limited to this, and the cutting device may also be a cutting device of a single cut table type and a single spindle configuration, or a cutting device of a single cut table type and a twin spindle configuration.

[0126] Furthermore, the cutting device (processing device) 100 may have a modular configuration that allows separation and connection (detachment) between the second cleaning mechanism 18 and the inspection unit 14 or the drying table 110. In this case, for example, a module that performs a type of inspection different from the inspection performed by the inspection unit 14 can be added between the module on the second cleaning mechanism 18 side and the module on the inspection unit 14 side or the module on the drying table 110 side. Note that, in addition to the configuration exemplified here, the cutting device (processing device) 100 may have a modular configuration that allows separation and connection (detachment) at any point, and the added module may be a module with various functions other than inspection.

[0127] Furthermore, the processing device of the present invention may be one that performs processing other than cutting, and may be one that performs other mechanical processing such as cutting or grinding.

[0128] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention. [Explanation of symbols]

[0129] 100...Cutting equipment (processing equipment) W···Sealed substrate (object to be processed) P...Product (processed product) 2A, 2B... Cutting table (processing table) 4...Cutting mechanism (processing mechanism) 5. Transfer table (plate transport mechanism) 6. Second holding mechanism (transport holding mechanism, plate transport mechanism) 7. Transfer mechanism (plate transfer mechanism) 15. Transfer mechanism (plate transport mechanism) 161... Holding table (inspection table) M2....Holding base part M1... Retaining plate 21 Tray 22 Tray moving mechanism 24 Plate storage section 25 Plate transport mechanism 25d Plate entry / exit mechanism 261 Fixing insertion hole 262 Fixing cylinder part 262a···Cylinder body 262b...Mover 262c Elastic body 281....Transport holding hole 282···Transport cylinder part 29. Inspection mechanism 29a Inspection flow path 101....Attachment member 101x...adhesive surface 103: Mounting table 107 Cylindrical container 107x...One end opening 109...Container installation section 111···Storage box

Claims

1. A processing apparatus that holds a processing object on a processing table and processes the processing object by a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a first holding mechanism for holding the workpiece so as to transport the workpiece to the processing table; a second holding mechanism for holding the object after processing in order to transport the object after processing from the processing table; a transfer mechanism for transferring the first holding mechanism and the second holding mechanism, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; The plate transport mechanism is configured using the second holding mechanism and the transport moving mechanism.

2. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a transfer table on which the processed object is placed before being accommodated; a transfer mechanism for moving the transfer table, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; The plate transport mechanism is configured using the transfer table and the transfer movement mechanism.

3. The processing apparatus according to claim 2 , wherein the plate transport mechanism further comprises a plate in / out mechanism that transports the holding plate between the plate accommodation section and the transfer table.

4. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a tray conveying mechanism that conveys trays onto which the objects to be processed that have been individualized by the processing mechanism are sorted, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; A processing device that stores the individualized objects to be processed in the tray.

5. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a placement table on which an attachment member having an adhesive surface to which the object to be processed that has been singulated by the processing mechanism is attached is placed, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; The processing device attaches the individualized object to the attachment member and stores the individualized object.

6. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a container installation unit in which a cylindrical container that accommodates the object to be processed that has been individualized by the processing mechanism is installed from an opening at one end thereof, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; A processing device that accommodates the individualized object to be processed in the cylindrical container.

7. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; a storage box into which the object to be processed that has been individualized by the processing mechanism falls and is stored, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; A processing device that stores the individualized object to be processed in the storage box.

8. A processing device that holds a workpiece on a processing table and processes the workpiece using a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate accommodation unit and the holding base unit; an inspection mechanism for inspecting an attachment state of the holding plate to the holding base portion, The plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base.

9. The inspection mechanism comprises: an inspection flow path that opens to a mounting surface on which the holding plate is mounted; The processing device according to claim 8 , further comprising a detection sensor provided in the inspection flow path for detecting leakage of fluid from the opening.

10. A processing apparatus that holds a workpiece on a processing table and processes the workpiece by a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate storage section and the holding base section, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; the holding base portion has a fixing cylinder portion that is inserted into a fixing insertion hole formed in the holding plate, the fixing cylinder portion includes a cylinder body inserted into the fixing insertion hole, a movable element provided movably between a protruding position and a recessed position from an outer peripheral surface of the cylinder body, and an elastic body that applies a force to move the movable element to a protruding position relative to the cylinder body, The processing device, in which the holding plate is fixed to the holding base portion by inserting the fixing cylinder portion into the fixing insertion hole and causing the mover to protrude.

11. A processing apparatus that holds a workpiece on a processing table and processes the workpiece by a processing mechanism while moving the processing table, a plate accommodating section that accommodates a holding plate for holding the workpiece; a holding base portion to which the holding plate is detachably attached and which holds the workpiece by using the holding plate; a plate transport mechanism that transports the holding plate between the plate storage section and the holding base section, the plate transport mechanism transports the holding plate removed from the holding base to the plate accommodating section, and transports the holding plate in the plate accommodating section to the holding base; the plate transport mechanism has a transport cylinder portion that is inserted into a transport holding hole formed in the holding plate, the conveying cylinder portion includes a cylinder body inserted into the conveying holding hole, a movable element provided movably between a protruding position and a recessed position from an outer peripheral surface of the cylinder body, and an elastic body that applies a force to move the movable element to a protruding position relative to the cylinder body, The processing device, in which the conveying cylinder portion is inserted into the conveying insertion hole and the mover is in a protruding state, whereby the holding plate is held by the plate conveying mechanism.

12. The processing apparatus according to claim 1 , wherein the plate transport mechanism transports the holding plate by lifting it.

13. The plate transport mechanism includes: a holding plate for the processing table; a holding plate for a drying table for drying the object after the processing; a holding plate for an inspection table for inspecting the object after the processing; A holding plate of a transfer table on which the processed object is placed before being accommodated; or The processing apparatus according to claim 1 , further comprising: a transport holding mechanism configured to transport the processed object, the transporting mechanism holding the processed object and the transporting means for transporting the processed object.

14. The processing apparatus according to claim 1 , wherein the plate transport mechanism is capable of transporting the object after the processing.

15. A method for manufacturing a processed product, comprising the steps of: manufacturing a processed product by using the processing apparatus according to any one of claims 1 to 14;

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