Laser-induced breakdown spectroscopy

Abstract

To further improve the safety of a laser-induced breakdown spectroscopic instrument compared to conventional systems.SOLUTION: An analysis and observation instrument A includes a laser oscillator 71 that oscillates an ultraviolet laser beam, a light guide optical system 7a that guides the ultraviolet laser beam as collimated light, a reflective objective lens 74 that converges the ultraviolet laser beam at a predetermined focal distance Df and diffuses the beam in a conical shape as it moves away from the predetermined focal distance Df or more, an analysis enclosure 70 in which the reflective objective lens 74 is incorporated at one end, first and second detectors 77A, 77B that generate intensity distribution spectra, and a spectrum analysis unit 213 that performs component analysis on the basis of the intensity distribution spectrum. The reflective objective lens 74 is configured as a part of the analysis enclosure 70 by being incorporated into one end of the analysis enclosure 70. The ultraviolet laser beam is diffused by progressively decreasing the energy density of the ultraviolet laser beam as it moves away from the predetermined focal distance Df or more.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The technology disclosed herein relates to a laser-induced breakdown spectroscopy apparatus. [Background technology]

[0002] For example, Non-Patent Document 1 discloses a LIBS analysis device (hereinafter, simply referred to as a "LIBS device") that uses Laser Induced Breakdown Spectroscopy (LIBS). Specifically, the LIBS device disclosed in Non-Patent Document 1 is configured to irradiate a laser beam having a wavelength of 532 nm onto a sample surface, collect light emitted from plasma generated by the laser beam, and analyze the sample based on the light.

[0003] That is, the LIBS device disclosed in Non-Patent Document 1 irradiates the sample surface with laser light in the green region of the visible light range. [Prior art documents] [Non-patent literature]

[0004] [Non-Patent Document 1] Hiroyuki Kondo and 3 others, "Rapid Evaluation of Defect Causes in Steel Using Laser-Induced Plasma Spectroscopy," Nippon Steel Technical Report, 2010, No. 390, pp. 76-81 Summary of the Invention [Problem to be solved by the invention]

[0005] Incidentally, the visible light laser light disclosed in the above-mentioned Non-Patent Document 1 has a lower absorption rate in various materials compared to shorter wavelength laser light. In addition, the visible light laser light has a larger spot diameter compared to shorter wavelength laser light, and therefore has a relatively lower energy density. Therefore, when using the visible light laser light, it is necessary to increase the laser power to compensate for the low absorption rate and energy density. If the laser power is increased too much, it may cause thermal damage around the irradiation point of the sample.

[0006] Therefore, it is conceivable to use ultraviolet laser light instead of the visible laser light, but ultraviolet light cannot be seen by the user's eyes. Therefore, when ultraviolet light is used, a rejection reaction such as a blink reflex due to light stimulation does not occur. Therefore, there is a possibility that the laser light will reach the user's eyeball for a longer period of time.

[0007] In addition, general objective lenses are designed to be detachable via a revolver or other device. When such an objective lens is used in a LIBS device, the parallel light from the laser light source is emitted directly into the outside world when the objective lens is removed. In this case, there is a possibility that the high-energy-density laser light will be viewed for a long time due to the lack of a rejection reaction as mentioned above.

[0008] The technology disclosed herein has been made in view of the above points, and has an object to further improve the safety of laser-induced breakdown spectroscopy apparatus compared to conventional techniques. [Means for solving the problem]

[0009] A first aspect of the present disclosure relates to a laser-induced breakdown spectroscopy device that uses laser-induced breakdown spectroscopy to perform component analysis of an analysis target placed on a placement stage provided in an open space. This laser-induced breakdown spectroscopy apparatus includes an excitation light source that emits excitation light, and a resonator that generates laser light based on the excitation light emitted by the excitation light source, a laser oscillator that generates ultraviolet laser light as the laser light, a light-guiding optical system that guides the ultraviolet laser light generated by the laser oscillator as parallel light, an objective lens that converges the ultraviolet laser light guided as parallel light by the light-guiding optical system at a predetermined focal length and diffuses the ultraviolet laser light in a conical shape as it moves away from the predetermined focal length or more, a housing that accommodates the laser oscillator and the light-guiding optical system and has the objective lens built into one end, a detector that generates an intensity distribution spectrum that is an intensity distribution for each wavelength of plasma light generated in the object to be analyzed by irradiating the object to be analyzed with the ultraviolet laser light, and a component analysis unit that performs component analysis of the object to be analyzed based on the intensity distribution spectrum generated by the detector.

[0010] According to a first aspect of the present disclosure, the objective lens is incorporated into one end of the housing to form a part of the housing, and is configured to diffuse the ultraviolet laser light by gradually decreasing the energy density of the ultraviolet laser light as the objective lens moves away from the housing beyond the predetermined focal distance.

[0011] Here, the term "plasma light" refers to light emitted from a substance in a plasma state.

[0012] In addition, the phrase "the objective lens is incorporated into one end of the housing" includes both a configuration in which the objective lens and the housing are formed separately and then connected by fastening or the like, and a configuration in which the objective lens and the housing are formed as a single unit.

[0013] For example, when a detachable objective lens that can be replaced by the user is used, when the objective lens falls off, collimated light with a higher energy density leaks out into the open space.

[0014] In contrast, according to the first aspect, the objective lens is incorporated into one end of the housing, so that the light guide optical system and the objective lens are integrated. This allows only diffused light to be emitted into the open space. By emitting only diffused light with gradually decreasing energy density, even if a user were to visually view the ultraviolet laser light, the impact can be kept as low as possible. This allows for even greater safety than before.

[0015] Furthermore, according to a second aspect of the present disclosure, the objective lens may be configured as a reflective objective lens having a primary mirror having an opening provided in the radial center, and a primary reflection surface arranged around the opening and reflecting plasma generated in the object to be analyzed in response to the emission of the ultraviolet laser light, and a secondary mirror having a secondary reflection surface that receives and further reflects the plasma reflected by the primary reflection surface, and the primary mirror and secondary mirror collect the plasma and direct it to the opening.

[0016] Here, the term "opening" refers to a member having an opening, not the opening itself.

[0017] According to the second aspect, by using a reflective objective lens as the objective lens, it is possible to improve the analytical accuracy in the component analysis by the LIBS method.

[0018] In addition, according to a third aspect of the present disclosure, the laser-induced breakdown spectroscopy device may be provided with a camera housed in the housing and configured to capture an image of the object to be analyzed by detecting the amount of light received returning from the object to be analyzed through the reflective objective lens.

[0019] According to the third aspect, by using a reflective objective lens, it becomes possible to obtain good images before and after analysis even with a camera housed in a housing.

[0020] According to a fourth aspect of the present disclosure, the laser-induced breakdown spectroscopy apparatus may include a command generating unit that generates a command to cause the excitation light source to generate excitation light, a monitor receiving unit that receives the ultraviolet laser light from the laser oscillator and generates a light receiving signal indicating that the ultraviolet laser light has been received, and a laser control unit that determines whether or not the excitation light source is able to generate excitation light based on the light receiving signal generated by the monitor receiving unit and controls the generation of the excitation light in accordance with the determination result, and the excitation light source may emit the excitation light when the command generating unit generates the command and the laser control unit determines that emission of the excitation light is possible.

[0021] According to the fourth aspect, the excitation light source emits the excitation light on condition that the laser control unit has determined that the excitation light can be generated. This configuration is advantageous in further improving the safety of the laser-induced breakdown spectroscopy device compared to the conventional case.

[0022] Furthermore, according to a fifth aspect of the present disclosure, the laser control unit may count a number of laser emissions, which is the number of times the light receiving signal is generated within a predetermined period, based on the light receiving signal generated by the monitor light receiving unit, and the laser control unit may compare the number of laser emissions with a predetermined number of times set in advance, and determine that the excitation light can be generated when the number of laser emissions is lower than the predetermined number of times.

[0023] According to the fifth aspect, the laser control unit determines whether or not the excitation light is generated based on the number of laser emission times obtained by accumulating the number of times the ultraviolet laser light is emitted. This determination is advantageous in improving safety when the LIBS method is performed for a long period of time.

[0024] Furthermore, according to a sixth aspect of the present disclosure, the laser control unit may compare the number of laser emissions with the predetermined number of times for a plurality of periods within the predetermined period, and the predetermined number of times may be set to a constant for a first period within the predetermined period that is closest to the current time, and may be set to increase as the time goes back in time for a second period within the predetermined period that is after the first period.

[0025] According to the sixth aspect, the predetermined number of times is changed going back from the current time to the past, so that the laser control unit can perform the determination more appropriately. This is advantageous in further improving the safety of the laser induced breakdown spectroscopy device compared to the conventional case.

[0026] Furthermore, according to a seventh aspect of the present disclosure, the predetermined period is divided into a plurality of partial periods, the laser control unit counts the number of times of laser emission for each partial period, and the laser control unit compares the number of times of laser emission with the predetermined number for each partial period, and determines that the excitation light can be generated when the number of times of laser emission is lower than the predetermined number in all of the partial periods.

[0027] According to the seventh aspect, instead of associating the time measured in real time with the number of laser emission times, the number of discretely divided partial periods is associated with the number of laser emission times, which makes it possible to reduce the memory used for storing the time.

[0028] In addition, according to an eighth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a stage configured to allow the housing to be attached and to position the housing relative to the mounting table, and an attachment sensor electrically connected to the laser control unit and outputting a signal indicating that the housing is attached to the stage, and the laser control unit may determine whether the housing is attached to the stage based on the signal output from the attachment sensor, and when it is determined that the housing is attached to the stage and the number of times the laser is emitted is below the predetermined number, determine that the excitation light can be generated.

[0029] According to the eighth aspect, the laser control unit determines that generation of the excitation light is possible when the housing is attached to the stage, that is, when the housing is in a state suitable for analyzing the object to be analyzed. This configuration is advantageous in further improving the safety of the laser-induced breakdown spectroscopy device compared to the conventional case.

[0030] According to a ninth aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a protective cover attached to the housing and covering the objective lens, a stage configured to allow the housing to be attached and positioning the housing relative to the mounting table, a first position detection sensor electrically connected to the laser control unit and detecting a position of the housing relative to the stage, and a second position detection sensor electrically connected to the laser control unit in a state independent of the first position detection sensor and outputting a detection signal indicating the position of the housing relative to the stage, and the laser control unit may determine, based on the detection signals output from both the first and second position detection sensors, whether the position of the housing is at a position corresponding to a state in which the objective lens is covered by the protective cover, and if it is determined that the housing is at that position, not count the number of laser emissions.

[0031] According to the ninth aspect, when the objective lens is covered with the protective cover, that is, when there is no concern about leakage of the ultraviolet laser light, the laser control unit does not count the number of laser emissions, which makes it possible to more appropriately determine whether or not the excitation light is generated.

[0032] In addition, according to a tenth aspect of the present disclosure, the laser-induced breakdown spectroscopy device includes a protective cover that can be attached to the objective lens or the housing and covers the objective lens, a first cover attachment sensor that is electrically connected to the laser control unit and outputs a detection signal indicating that the protective cover is attached, and a second cover attachment sensor that is electrically connected to the laser control unit independent of the first cover attachment sensor and outputs a detection signal indicating that the protective cover is attached, and the laser control unit may not count the number of laser emissions when detection signals are input from both the first and second cover attachment sensors.

[0033] According to the tenth aspect, when the objective lens is covered with the protective cover, i.e., when there is no concern about leakage of the ultraviolet laser light, the laser control unit does not count the number of laser emissions, which makes it possible to more appropriately determine whether or not the excitation light is generated.

[0034] In addition, according to an eleventh aspect of the present disclosure, the laser-induced breakdown spectroscopy device may include a tilt mechanism that tilts the light-guiding optical system and the objective lens together with respect to a predetermined reference axis perpendicular to an upper surface of the mounting table, and a tilt sensor that detects the tilt of the light-guiding optical system and the objective lens with respect to the reference axis, and the laser control unit may determine that generation of the excitation light by the excitation light source is not permitted when the tilt detected by the tilt sensor exceeds a predetermined first threshold value.

[0035] If the objective lens is tilted excessively, there is a concern that the ultraviolet laser light may leak into the open space. In response to this, according to the eleventh aspect, if the tilt of the objective lens exceeds the first threshold, the laser control unit determines that generation of the excitation light by the excitation light source is not permitted, and limits the emission of the ultraviolet laser light. This configuration is advantageous in further improving the safety of the laser-induced breakdown spectroscopy device compared to conventional devices.

[0036] In addition, according to a twelfth aspect of the present disclosure, the laser control unit may determine a correspondence between the command generated by the command generating unit and the light receiving signal generated by the monitor light receiving unit, and if multiple light receiving signals are generated in response to one command, determine that generation of the excitation light by the excitation light source is not permitted.

[0037] If the number of commands and the number of received light signals do not match, there is a concern that various devices may operate abnormally or malfunction, such as unintentionally emitting ultraviolet laser light or not emitting ultraviolet laser light as instructed. In response to this, according to the twelfth aspect, if there is a concern that an operation abnormality or malfunction may occur, the laser control unit determines that generation of excitation light by the excitation light source is not permitted and restricts emission of ultraviolet laser light. This configuration is advantageous in further improving the safety of the laser-induced breakdown spectroscopy device compared to conventional devices.

[0038] Furthermore, according to a thirteenth aspect of the present disclosure, the laser-induced breakdown spectroscopy apparatus may comprise a base and a stand connected to the base and extending in a first direction perpendicular to the base, wherein the mounting table is supported by the base or the stand, and the housing is connected to the stand. Effect of the Invention

[0039] As described above, according to the present disclosure, the safety of a laser-induced breakdown spectroscopy apparatus can be further improved compared to conventional techniques. [Brief description of the drawings]

[0040] [Figure 1] FIG. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device. [Diagram 2] FIG. 2 is a perspective view illustrating an optical system assembly. [Diagram 3] FIG. 3 is a side view illustrating an optical system assembly. [Figure 4] FIG. 4 is a front view illustrating an optical system assembly. [Diagram 5] FIG. 5 is an exploded perspective view illustrating an optical system assembly. [Figure 6] FIG. 6 is a side view showing a schematic configuration of the optical system assembly. [Figure 7] FIG. 7 is a schematic diagram illustrating the configuration of the analytical optical system. [Figure 8] FIG. 8 is a rear view for explaining the monitor light receiving section. [Figure 9] FIG. 9 is a vertical cross-sectional view illustrating the configuration of a reflective objective lens. [Figure 10] FIG. 10 is a bottom view illustrating the configuration of the reflective objective lens. [Figure 11] FIG. 11 is a diagram illustrating the mounting structure of the first and second detectors. [Figure 12] FIG. 12 is a schematic diagram illustrating the configuration of the slide mechanism. [Figure 13A] FIG. 13A is a diagram for explaining the horizontal movement of the head portion. [Figure 13B] FIG. 13B is a diagram for explaining the horizontal movement of the head portion. [Figure 14A] FIG. 14A is a diagram for explaining the operation of the tilt mechanism. [Figure 14B] FIG. 14B is a diagram for explaining the operation of the tilt mechanism. [Figure 15A] FIG. 15A is a block diagram illustrating an example of a control system of the analytical observation device. [Figure 15B] FIG. 15B is a block diagram illustrating an example of a control system in the head unit. [Figure 15C]FIG. 15C is a diagram illustrating functional blocks in the first control unit and the second control unit. [Figure 16] FIG. 16 is a block diagram illustrating a hardware configuration of the laser control unit. [Figure 17] FIG. 17 is a graph for explaining the determination of the number of laser emission times. [Figure 18] FIG. 18 is a diagram for explaining a partial period. [Figure 19] FIG. 19 is a diagram for explaining the relationship between the emission command and the laser pulse. [Figure 20] FIG. 20 is a flowchart illustrating a first process related to determining whether or not excitation light can be generated. [Figure 21A] FIG. 21A is a flowchart illustrating a second process related to the determination of whether or not excitation light can be generated. [Figure 21B] FIG. 21B is a flowchart illustrating a second process related to the determination of whether or not excitation light can be generated. [Figure 22] FIG. 22 is a flowchart illustrating a process for determining whether an error occurs during startup. [Diagram 23] FIG. 23 is a flowchart illustrating a determination regarding the number of commands and the number of pulses. [Figure 24] FIG. 24 is a perspective view for explaining the shielding cover. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0041] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. Note that the following description is merely an example.

[0042] <Overall configuration of analytical observation device A> Fig. 1 is a schematic diagram illustrating the overall configuration of an analytical observation device A as a laser-induced breakdown spectroscopy device according to an embodiment of the present disclosure. The analytical observation device A illustrated in Fig. 1 can perform magnified observation of a sample SP as an observation target and an analysis target placed on a mounting table 5, and can also perform component analysis of the sample SP. In particular, the mounting table 5 according to this embodiment is configured to be provided in an open space, and can perform component analysis of the sample SP in an open-to-air state.

[0043] In detail, the analytical observation device A according to this embodiment can magnify and image a sample SP consisting of a specimen such as a minute object, an electronic component, a workpiece, etc., to search for a portion of the sample SP where component analysis is to be performed, and to inspect and measure its appearance, etc. When focusing on its observation function, the analytical observation device A can be called a magnifying observation device, simply a microscope, or a digital microscope.

[0044] The analytical observation device A can also perform techniques called Laser Induced Breakdown Spectroscopy (LIBS), Laser Induced Plasma Spectroscopy (LIPS), etc., when analyzing the components of the sample SP. When focusing on its analytical function, the analytical observation device A can also be called a component analysis device, simply an analysis device, or a spectroscopic device.

[0045] As shown in FIG. 1, an analytical observation device A according to this embodiment includes, as main components, an optical system assembly (optical system main body) 1, a controller main body 2, and an operation unit 3.

[0046] Of these, the optical system assembly 1 is capable of imaging and analyzing the sample SP, and outputting electrical signals corresponding to the imaging results and analysis results to the outside.

[0047] The controller body 2 has a first control unit 21 for controlling various components constituting the optical system assembly 1, such as the first camera 81. The controller body 2 can cause the optical system assembly 1 to observe and analyze the sample SP via the first control unit 21. The controller body 2 also has a display unit 22 capable of displaying various information. This display unit 22 can display images captured by the optical system assembly 1, data showing the analysis results of the sample SP, and the like.

[0048] The operation unit 3 has a mouse 31 that accepts operation inputs from the user, a console 32, and a keyboard 33 (the keyboard 33 is only shown in FIG. 15A). By operating buttons, adjustment knobs, etc., the console 32 can instruct the controller main body 2 to import image data, adjust brightness, focus the first camera 81, etc.

[0049] The operation unit 3 does not need to have all three of the mouse 31, the console 32, and the keyboard 33, and may have any one or two of them. Also, in addition to or instead of the mouse 31, the console 32, and the keyboard 33, a touch panel type input device, a voice type input device, or the like may be used. In the case of a touch panel type input device, it can be configured so that any position on the screen displayed on the display unit 22 can be detected.

[0050] <Details of Optical Assembly 1> 2 to 4 are respectively a perspective view, a side view, and a front view illustrating the optical system assembly 1. In addition, Fig. 5 is an exploded perspective view of the optical system assembly 1, and Fig. 6 is a side view showing a schematic configuration of the optical system assembly 1.

[0051] As shown in Figs. 1 to 6, the optical system assembly 1 includes a stage 4 on which a sample SP is placed and which supports various devices, and a head unit 6 attached to the stage 4. Here, the head unit 6 is configured by mounting an observation housing 90 housing an observation optical system 9 on an analysis housing 70 housing an analysis optical system 7. Here, the analysis optical system 7 is an optical system for performing component analysis of the sample SP. The observation optical system 9 is an optical system for performing magnified observation of the sample SP. The head unit 6 is configured as a group of devices that combine the functions of analyzing the sample SP and magnified observation.

[0052] In the following description, the front-rear direction and the left-right direction of the optical system assembly 1 are defined as shown in Figs. 1 to 4. That is, the side facing the user is the front side of the optical system assembly 1, and the opposite side is the rear side of the optical system assembly 1. When the user faces the optical system assembly 1, the right side as seen by the user is the right side of the optical system assembly 1, and the left side as seen by the user is the left side of the optical system assembly 1. The definitions of the front-rear direction and the left-right direction are intended to aid in understanding the description, and do not limit the actual state of use. Either direction may be used as the front.

[0053] In the following description, the left-right direction of the optical system assembly 1 is defined as the "X direction", the front-rear direction of the optical system assembly 1 as the "Y direction", the up-down direction of the optical system assembly 1 as the "Z direction", and the direction rotating around an axis parallel to the Z axis as the "φ direction". The X and Y directions are perpendicular to each other on the same horizontal plane, and the direction along the horizontal plane is defined as the "horizontal direction". The Z axis is the direction of the normal perpendicular to the horizontal plane. These definitions can also be changed as appropriate. The Z direction (up-down direction) is a direction extending along the vertical direction, and is an example of the "first direction" in this embodiment.

[0054] As will be described in detail later, the head portion 6 can move along and swing around a central axis Ac shown in Figures 2 to 6. As shown in Figure 6 and other figures, the central axis Ac is configured to extend in the horizontal direction described above, particularly in the front-rear direction.

[0055] (Stage 4) The stage 4 has a base 41 placed on a workbench or the like, a stand 42 connected to the base 41, and a mounting table 5 supported by the base 41 or the stand 42. The stage 4 is a member for defining the relative positional relationship between the mounting table 5 and the head unit 6, and is configured so that at least the observation optical system 9 and the analysis optical system 7 of the head unit 6 can be attached thereto.

[0056] The base 41 constitutes approximately the lower half of the stage 4, and is formed in a pedestal shape with a longer front-rear dimension than its left-right dimension as shown in Fig. 2. The base 41 has a bottom surface that is placed on a workbench or the like. A mounting table 5 is attached to the front portion of the base 41.

[0057] 6 and other figures, a first support portion 41a and a second support portion 41b are provided in a rear portion of the base 41 (particularly, a portion located rearward of the mounting table 5) in a state where they are lined up in order from the front side. The first and second support portions 41a, 41b are both provided so as to protrude upward from the base 41. The first and second support portions 41a, 41b are formed with a circular bearing hole (not shown) that is arranged concentrically with the central axis Ac.

[0058] The stand 42 constitutes the upper half of the stage 4, and is formed in a columnar shape extending vertically perpendicular to the base 41 (particularly the bottom surface of the base 41) as shown in Figures 2 to 3, 6, etc. The head unit 6 is attached to the front surface of the upper part of the stand 42 via a separate mounting fixture 43.

[0059] 6 and other figures, the first mounting portion 42a and the second mounting portion 42b are provided on the lower portion of the stand 42 in a state of being arranged in order from the front side. The first and second mounting portions 42a, 42b are configured to correspond to the above-mentioned first and second support portions 41a, 41b. Specifically, the first and second support portions 41a, 41b and the first and second mounting portions 42a, 42b are laid out so that the first support portion 41a is sandwiched between the first mounting portion 42a and the second mounting portion 42b, and the second mounting portion 42b is sandwiched between the first support portion 41a and the second support portion 41b.

[0060] Further, the first and second mounting parts 42a and 42b are formed with circular bearing holes (not shown) that are concentric and have the same diameter as the bearing holes formed in the first and second support parts 41a and 41b. A shaft member 44 is inserted into these bearing holes via a bearing (not shown) such as a cross roller bearing. The shaft member 44 is arranged so that its axis is concentric with the above-mentioned central axis Ac. By inserting the shaft member 44, the base 41 and the stand 42 are connected to be able to swing relatively. The shaft member 44, together with the first and second support parts 41a and 41b and the first and second mounting parts 42a and 42b, constitute a tilting mechanism 45 in this embodiment.

[0061] By connecting the base 41 and the stand 42 via the tilting mechanism 45, the stand 42 is supported by the base 41 in a state in which it can swing around the central axis Ac. By swinging the stand 42 around the central axis Ac, it is tilted in the left-right direction with respect to a predetermined reference axis As (see FIGS. 14A and 14B). This reference axis As can be an axis extending perpendicular to the upper surface (mounting surface 51a) of the mounting table 5 in the non-tilted state shown in FIG. 4 and the like. The central axis Ac functions as the central axis (center of rotation) of the swing caused by the tilting mechanism 45.

[0062] Specifically, the tilt mechanism 45 according to this embodiment is capable of tilting the stand 42 by approximately 90° to the right with respect to the reference axis As, and by approximately 60° to the left with respect to the reference axis As. As described above, the head unit 6 is attached to the stand 42, and therefore the head unit 6 can also be tilted left and right with respect to the reference axis As. Tilting the head unit 6 is equivalent to tilting the analysis optical system 7 and the observation optical system 9, and thus to tilting the analysis optical axis Aa and the observation optical axis Ao, which will be described later.

[0063] The mounting fixture 43 has a rail portion 43a that guides the head portion 6 along the longitudinal direction of the stand 42, and a lock lever 43b that locks the relative position of the head portion 6 with respect to the rail portion 43a. Here, the longitudinal direction of the stand 42 coincides with the vertical direction (first direction) in the non-tilted state, and coincides with the direction extending along the analysis optical axis Aa, the observation optical axis Ao, and the reference axis As. In the tilted state, the longitudinal direction of the stand 42 does not coincide with the vertical direction and the direction extending along the reference axis As, but still coincides with the direction extending along the analysis optical axis Aa and the observation optical axis Ao. The longitudinal direction of the stand 42 is also referred to as the "approximately vertical direction" in the following description.

[0064] The rear portion of the head unit 6 (specifically, the head mounting member 61) is inserted into the rail portion 43a. The rear portion of the rail portion 43a can be moved substantially vertically. Then, with the head unit 6 set at a desired position, the head unit 6 can be fixed at the desired position by operating the lock lever 43b. The position of the head unit 6 can also be adjusted by operating the first operating dial 46 shown in Figs. 2 and 3.

[0065] Furthermore, the stage 4 or the head unit 6 has a built-in head driver 47 for moving the head unit 6 in a substantially vertical direction. The head driver 47 includes an actuator (e.g., a stepping motor) (not shown) controlled by the controller main body 2, and a motion conversion mechanism for converting the rotation of the output shaft of the stepping motor into linear motion in a substantially vertical direction, and moves the head unit 6 based on a drive pulse input from the controller main body 2. The head driver 47 moves the head unit 6, thereby moving the head unit 6, and therefore the analysis optical axis Aa and the observation optical axis Ao, in a substantially vertical direction.

[0066] The mounting table 5 is disposed forward of the center of the base 41 in the front-rear direction and is attached to the upper surface of the base 41. The mounting table 5 is configured as an electric mounting table provided in an open space, and the sample SP placed on the mounting surface 51a can be moved in the horizontal direction, raised and lowered in the vertical direction, and rotated in the φ direction. By providing the mounting table 5 in an open space, the space near the mounting surface 51a becomes an unshielded space that is not covered by a member such as a cover. This makes it possible to access the sample SP placed on the mounting surface 51a from the outside, and the position adjustment of the sample SP can be performed manually or using a tool. Furthermore, by making the space near the mounting surface 51a an unshielded space, the space on the mounting surface 51a can be effectively utilized, and a relatively large sample SP can be placed on it.

[0067] Specifically, as shown in Figures 2 to 4, the mounting table 5 in this embodiment has a mounting table main body 51 having a mounting surface 51a for placing the sample SP, a mounting table support part 52 arranged between the base 41 and the mounting table main body 51 and displaces the mounting table main body 51, and a mounting table drive part 53 shown in Figure 15B described later.

[0068] The mounting table body 51 is configured as a so-called XY stage. The upper surface of the mounting table body 51 configures a mounting surface 51a on which the sample SP is placed. This mounting surface 51a is formed to extend along a substantially horizontal direction. The sample SP is placed on the mounting surface 51a in an open-to-air state, i.e., without being contained in a vacuum chamber or the like.

[0069] The mounting table support part 52 is a member that connects the base 41 and the mounting table main body 51, and is formed in a generally cylindrical shape extending in the vertical direction. The mounting table support part 52 can accommodate the mounting table driving part 53.

[0070] The mounting table driving unit 53 includes a plurality of actuators (e.g., stepping motors) (not shown) controlled by the controller main body 2, and a motion conversion mechanism that converts the rotation of the output shaft of the stepping motor into linear motion, and moves the mounting table main body 51 based on drive pulses input from the controller main body 2. By the mounting table driving unit 53 moving the mounting table main body 51, the mounting table main body 51, and therefore the sample SP placed on the mounting surface 51a, can be moved horizontally and vertically.

[0071] Similarly, the mounting table driving unit 53 can rotate the mounting table main body 51 around a predetermined rotation axis in the φ direction based on a drive pulse input from the controller main body 2. The mounting table driving unit 53 can rotate the mounting table main body 51 to rotate the sample SP placed on the mounting surface 51a in the φ direction. Note that the configuration including the mounting table driving unit 53 is not essential. The mounting table main body 51 may be configured to be rotated manually.

[0072] In particular, the mounting surface 51a according to this embodiment is configured to be rotatable around the reference axis As shown in Fig. 6 etc. as the rotation axis. That is, in this embodiment, the reference axis As serving as the reference for tilt and the rotation axis of the mounting surface 51a are coaxial.

[0073] Moreover, the mounting table main body 51 can be manually moved and rotated by operating the second operation dial 54, etc., as shown in Fig. 2. Details of the second operation dial 54 will be omitted.

[0074] Returning to the explanation of the base 41 and the stand 42, the above-mentioned base 41 has a first tilt sensor Sw3 built in. This first tilt sensor Sw3 can detect the tilt of a reference axis As perpendicular to the placement surface 51a with respect to the direction of gravity. Meanwhile, a second tilt sensor Sw4 is attached to the stand 42. This second tilt sensor Sw4 can detect the tilt of the analysis optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analysis optical axis Aa with respect to the direction of gravity). Both detection signals of the first tilt sensor Sw3 and the second tilt sensor Sw4 are input to the second control unit 100. The first tilt sensor Sw3 and the second tilt sensor Sw4 are each an example of the "tilt sensor" in this embodiment.

[0075] (Head section 6) The head unit 6 has an analytical optical system 7 housed in an analysis housing 70, an observation optical system 9 housed in an observation housing 90, a head mounting member 61, a housing connector 64, and a slide mechanism (horizontal drive mechanism) 65. The head mounting member 61 is a member for connecting the analysis housing 70 to the stand 42. The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. The slide mechanism 65 is a mechanism for slidingly moving the analysis housing 70 relative to the stand 42.

[0076] The head unit 6 also includes a second control unit 100 that executes various processes (see FIG. 15A). The second control unit 100 is electrically connected to the first control unit 21 wirelessly or via wires.

[0077] More specifically, the head mounting member 61 according to this embodiment is disposed on the rear side of the head unit 6, and is configured as a plate-like member for mounting the head unit 6 to the stand 42. As described above, the head mounting member 61 is fixed to the mounting fixture 43 of the stand 42.

[0078] The head mounting member 61 has a plate body 61a extending approximately parallel to the rear surface of the head unit 6, and a cover member 61b protruding forward from the lower end of the plate body 61a. In a first mode described below in which the reflective objective lens 74 faces the sample SP, the plate body 61a is spaced apart from the rear surface of the head unit 6 in the front-rear direction. In a second mode described below in which the objective lens 92 faces the sample SP, the plate body 61a is in close contact with or close to the rear surface of the head unit 6.

[0079] 14, a guide rail 65a constituting a slide mechanism 65 is attached to the left end of the head mounting member 61. The guide rail 65a connects the head mounting member 61 to other elements in the head unit 6 (specifically, the analysis optical system 7, the observation optical system 9, and the housing connector 64) so ​​as to be relatively displaceable in the horizontal direction.

[0080] Below, the configurations of the analysis optical system 7 and the analysis housing 70, the observation optical system 9 and the observation housing 90, the housing connector 64, and the slide mechanism 65 will be described in order.

[0081] -Analysis optical system 7- Fig. 7 is a schematic diagram illustrating the configuration of the analytical optical system 7. Fig. 8 is a rear view for explaining the monitor light receiving unit 88. Fig. 9 is a vertical cross-sectional view illustrating the configuration of the reflective objective lens 74. Fig. 10 is a bottom view illustrating the configuration of the reflective objective lens 74, and Fig. 11 is a diagram for explaining the mounting structure of the first and second detectors 77A, 77B.

[0082] The analytical optical system 7 is a collection of parts for analyzing a sample SP as an analysis target, and each part is accommodated in an analytical housing 70. The parts constituting the analytical optical system 7 include a laser oscillator 71, a collection head constituted by a reflective objective lens 74, and a detector constituted by a first detector 77A and a second detector 77B. At least these parts are accommodated in the analytical housing 70. The elements for analyzing the sample SP also include a first control unit 21 as a processing unit. The analytical housing 70 is an example of a "housing" in this embodiment.

[0083] The analytical optical system 7 can perform analysis using, for example, the LIBS method. A communication cable C1 for transmitting and receiving electrical signals between the analytical optical system 7 and the controller main body 2 is connected to the analytical optical system 7. This communication cable C1 is not essential, and the analytical optical system 7 and the controller main body 2 may be connected by wireless communication.

[0084] The term "optical system" is used in a broad sense. In other words, the analytical optical system 7 is defined as a system including a light source, an image sensor, etc. in addition to optical elements such as lenses. The same is true for the observation optical system 9.

[0085] As shown in Fig. 7, the analytical optical system 7 according to this embodiment includes a laser oscillator 71, an output adjustment means 72, a deflection element 73, a reflective objective lens 74 as a collection head, a spectroscopic element 75, a first parabolic mirror 76A, a first detector 77A, a first beam splitter 78A, a second parabolic mirror 76B, a second detector 77B, a second beam splitter 78B, a coaxial illumination 79, an imaging lens 80, a first camera 81, a side illumination 84, a third beam splitter 86, a group of reflecting mirrors 87, and a monitor light receiving unit 88. Some of the components of the analytical optical system 7 are also shown in Figs. 6 and 8. The side illumination 84 is shown only in Figs. 9 and 10 (not shown in Fig. 7).

[0086] The laser oscillator 71 has an excitation light source 71a that generates and emits excitation light, and is configured to generate and oscillate ultraviolet laser light as laser light. The excitation light source 71a is configured, for example, of a laser diode (LD).

[0087] The laser oscillator 71 further includes a focusing lens (not shown) that focuses the laser output from the excitation light source 71a and emits it as laser excitation light, a laser medium 71c that generates a fundamental wave based on the laser excitation light, a Q switch (not shown) for pulse-oscillating the fundamental wave, a resonator 71b consisting of a rear mirror and an output mirror for resonating the fundamental wave and that generates laser light based on the excitation light generated by the excitation light source 71a, and a wavelength conversion element 71d that converts the wavelength of the laser light output from the output mirror.

[0088] Here, it is preferable to use, for example, a rod-shaped Nd:YAG as the laser medium 71c in order to obtain high energy per pulse. In this embodiment, the wavelength (so-called fundamental wavelength) of the photons emitted from the laser medium 71c by stimulated emission is set to 1064 nm in the infrared region.

[0089] As the Q-switch, a passive Q-switch whose transmittance increases when the intensity of the fundamental wave exceeds a certain threshold can be used. The passive Q-switch is composed of a saturable absorber such as Cr:YAG. By using a passive Q-switch, it becomes possible to automatically oscillate a pulse when a certain amount of energy or more is accumulated in the laser medium. Also, a so-called active Q-switch whose attenuation rate can be controlled from outside can be used.

[0090] The wavelength conversion element 71d is made of LBO (LiB 3 O 3 The configuration uses two nonlinear optical crystals such as . The use of two crystals makes it possible to generate a third harmonic wave from a fundamental wave. In this embodiment, the wavelength of the third harmonic wave is set to 355 nm in the ultraviolet range.

[0091] That is, the laser oscillator 71 according to this embodiment can output a laser beam consisting of ultraviolet light. This allows analysis by the LIBS method to be performed on an optically transparent sample SP such as glass. In addition, the proportion of laser beams in the ultraviolet range that reach the human retina is very small. By configuring the laser beam so that it does not form an image on the retina, the safety of the device can be improved.

[0092] Among the components of the laser oscillator 71, the excitation light source 71a and the resonator 71b can be independently adjusted in temperature by a first temperature control unit 71e shown in Fig. 15B. The first temperature control unit 71e can be configured using, for example, a Peltier element, and can be controlled by the first control unit 21 or the second control unit 100.

[0093] Of the two crystals constituting the wavelength conversion element 71d, the crystal for generating the second harmonic from the fundamental wave (crystal for SHG) and the crystal for generating the third harmonic from the second harmonic (crystal for THG) can be independently adjusted in temperature by the second temperature control unit 71f shown in Fig. 15B. The second temperature control unit 71f can be configured using, for example, a Peltier element, and can be controlled by the first control unit 21 or the second control unit 100.

[0094] The ultraviolet laser light output from the wavelength conversion element 71d is incident on the third beam splitter 86. A part of the ultraviolet laser light incident on the third beam splitter 86 is reflected by the third beam splitter 86, and then reflected by the reflection mirror group 87 to enter the optical base 700 (see L4 in FIG. 8). The other part of the ultraviolet laser light incident on the third beam splitter 86 passes through the third beam splitter 86 to reach the output adjustment means 72 (see L3 in FIG. 8).

[0095] The monitor light receiving unit 88 can receive the ultraviolet laser light from the laser oscillator 71 and generate a light receiving signal (light receiving signal indicating that the ultraviolet laser light has been received) according to the amount of light received. The light receiving signal generated by the monitor light receiving unit 88 is input to a laser control unit 105 in the second control unit 100, which will be described later.

[0096] In detail, the monitor light receiving section 88 has a light receiving element 88a that receives the ultraviolet laser light that has passed through the third beam splitter 86, and a pulse stretch circuit 88b electrically connected to the light receiving element 88a.

[0097] The light receiving element 88a is configured by, for example, a photodiode (PD) and generates a pulse signal as a light receiving signal according to the amount of ultraviolet laser light received. The pulse signal generated by the light receiving element 88a is input to the pulse stretch circuit 88b.

[0098] The pulse stretch circuit 88b processes the pulse signal input from the light receiving element 88a and expands the pulse width of the pulse signal. The pulse signal processed by the pulse stretch circuit 88b is input to a counter 105a of a laser control unit 105.

[0099] The output adjustment means 72 is disposed on the optical path connecting the third beam splitter 86 and the deflection element 73, and can adjust the output of the ultraviolet laser light. Specifically, the output adjustment means 72 according to this embodiment has a 1 / 2 wavelength plate 72a and a polarizing beam splitter 72b. The 1 / 2 wavelength plate 72a is configured to rotate relative to the polarizing beam splitter 72b, and by controlling the rotation angle, the amount of light passing through the polarizing beam splitter 72b can be adjusted.

[0100] As shown in FIG. 7, the optical base 700 is disposed inside the analysis housing 70, and defines a storage space for the optical elements constituting the analysis optical system 7. Specifically, the optical base 700 according to this embodiment contains a deflection element 73, a spectroscopic element 75, a first parabolic mirror 76A, a first beam splitter 78A, a second parabolic mirror 76B, a second beam splitter 78B, an optical element 79b constituting the coaxial illumination 79, and an imaging lens 80. The optical base 700 is disposed adjacent to the laser oscillator 71 in the internal space of the analysis housing 70. The optical base 700 corresponds to a "second housing" provided inside the analysis housing 70.

[0101] Among the components of the analysis optical system 7, the optical elements housed in the optical base 700 are referred to as the light-guiding optical system 7a in the following description. The light-guiding optical system 7a can guide the ultraviolet laser light generated by the laser oscillator 71 as parallel light and guide it to the reflective objective lens 74. Note that the light-guiding optical system 7a does not need to guide the ultraviolet laser light as parallel light over the entire optical path formed by the light-guiding optical system 7a, but only needs to guide the ultraviolet laser light as parallel light over at least a part of the optical path (particularly, in the vicinity of the connection with the reflective objective lens 74).

[0102] Among the optical elements constituting the light-guiding optical system 7a, the deflection element 73 receives the ultraviolet laser light emitted from the laser oscillator 71 and entering the optical base 700, and deflects the ultraviolet laser light in the optical axis direction of the reflective objective lens 74 (the direction along the analysis optical axis Aa).

[0103] In detail, the deflection element 73 is laid out so as to reflect the ultraviolet laser light output from the laser oscillator 71 and passed through the output adjustment means 72, and guide it to the sample SP via the reflective objective lens 74, while also passing light generated in the sample SP in response to this ultraviolet laser light (light emitted in association with plasma generation occurring on the surface of the sample SP, hereinafter referred to as "plasma light"), and guide this to the first detector 77A and the second detector 77B. The deflection element 73 is also laid out so as to pass visible light collected for imaging, and guide this visible light to the first camera 81.

[0104] The ultraviolet laser light reflected by the deflection element 73 propagates as parallel light along the analysis optical axis Aa and reaches the reflective objective lens 74 .

[0105] The reflective objective lens 74 converges the ultraviolet laser light guided as parallel light by the light guide optical system at a predetermined focal distance Df, and diffuses the ultraviolet laser light into a cone shape as it moves away from the predetermined focal distance Df or more.

[0106] In particular, the reflective objective lens 74 according to this embodiment is configured to focus the ultraviolet laser light and irradiate the sample SP, and to collect plasma light generated in the sample SP in response to the ultraviolet laser light irradiated onto the sample SP. In this case, the plasma light generated in the sample SP corresponds to electromagnetic waves emitted in association with the plasma generated on the surface of the sample SP.

[0107] The reflective objective lens 74 is configured to coaxially arrange an optical system related to the emission of illumination light from the coaxial illumination 79 and the emission of ultraviolet laser light from the laser oscillator 71, and an optical system related to the reception of reflected light by the first camera 81 and the reception of plasma light by the first and second detectors 77A, 77B. In other words, the reflective objective lens 74 is shared by the two types of optical systems.

[0108] The reflective objective lens 74 has an analytical optical axis Aa extending substantially along the vertical direction described above. The analytical optical axis Aa is arranged to be parallel to the observation optical axis Ao of the objective lens 92 of the observation optical system 9. In the following description, the "radial direction" refers to a direction perpendicular to a unit vector extending along the analytical optical axis Aa and extending radially from the analytical optical axis Aa. Similarly, the "circumferential direction" refers to a direction perpendicular to the unit vector extending along the analytical optical axis Aa and the radial direction and circumnavigating the analytical optical axis Aa. Moreover, the "optical axis direction" of the analytical optical system 7 refers to a direction extending along the analytical optical axis Aa.

[0109] More specifically, the reflective objective lens 74 according to this embodiment is a Schwarzschild type objective lens consisting of two mirrors. As shown in Fig. 7 and Fig. 9, this reflective objective lens 74 has a connection member 74a attached to the analysis housing 70, a mirror housing 74b connected to the analysis housing 70 via the connection member 74a, a primary mirror 11 that is annular and has a relatively large diameter, and a secondary mirror 12 that is disc-shaped and has a relatively small diameter.

[0110] The connecting member 74a is formed in a pedestal shape with a through hole coaxial with the analysis optical axis Aa. The connecting member 74a is fastened to the lower end of the optical base 700 in a circumferentially fixed state (unrotatable state). This fastening fixes the angular position of the reflective objective lens 74. The connecting member 74a is also arranged such that the through hole of the connecting member 74a and a through hole provided at the lower end of the optical base 700 communicate with each other.

[0111] 9 and 10, a plurality of (four in the illustrated example) flange-shaped members 74c protruding in the radial direction are provided at the upper end of the connection member 74a (a portion near the open end of the through hole). Each flange-shaped member 74c is provided with a fastening hole for fastening a fastening member such as a screw, and the connection member 74a and thus the reflective objective lens 74 can be assembled to the optical base 700 by fastening the fastening member from below while each flange-shaped member 74c is in contact with the lower surface of the optical base 700. This assembly allows the reflective objective lens 74 to be incorporated into the analysis housing 70.

[0112] 10, each of the brim-shaped members 74c is covered by a wall portion 70d that defines the bottom surface of the analysis housing 70 and is in an unexposed state. The reflective objective lens 74 is configured to prevent the user from attaching or detaching it, unlike a removable objective lens used in a microscope, for example. By configuring it in this way, the relative positional relationship between the reflective objective lens 74 and the light-guiding optical system 7a can be kept constant.

[0113] In this embodiment, an example in which the reflective objective lens 74 is incorporated in the analysis housing 70 has been described, but the present disclosure is not limited thereto. The reflective objective lens 74 may be incorporated in a second housing provided inside the analysis housing 70. In this case as well, it is possible to prevent the user from attaching and detaching the objective lens 74, and therefore it is possible to keep the relative positional relationship between the reflective objective lens 74 and the light-guiding optical system 7a constant.

[0114] Furthermore, by incorporating the reflective objective lens 74 in the analysis housing 70 or the second housing, the light guide optical system 7a to the reflective objective lens 74 as the objective lens are integrated into one body. This allows only diffused light to be emitted into the open space described above. This allows only diffused light with gradually decreasing energy density to be emitted, further improving safety.

[0115] The mirror housing 74b is formed in a cylindrical shape with a tapered diameter that decreases toward the bottom. The mirror housing 74b is fixed to the lower surface of the connection member 74a in a circumferentially fixed state. The inner peripheral surface of the mirror housing 74b supports the primary mirror 11 and the secondary mirror 12, respectively.

[0116] Both primary mirror 11 and secondary mirror 12 are formed to be rotationally symmetric about analysis optical axis Aa. Reflective objective lens 74 is configured to collect plasma light by primary mirror 11 and secondary mirror 12 and to guide the collected plasma light to opening 11a of primary mirror 11.

[0117] The primary mirror 11 is composed of a cylindrical member having a central axis coaxial with the analysis optical axis Aa and a through hole provided in the center in the radial direction. As shown in Fig. 9, the through hole of the primary mirror 11 is provided at an opening 11a for passing the ultraviolet laser light and the plasma light. The lower end surface of the primary mirror 11 is mirror-finished to form a primary reflecting surface 11b.

[0118] In detail, the primary mirror 11 has an opening 11a provided in the radial center, and a primary reflecting surface 11b arranged around the opening 11a and reflecting plasma light generated in the sample SP in response to the emission of the ultraviolet laser light.

[0119] The secondary mirror 12 is composed of a lens having an optical axis coaxial with the analysis optical axis Aa, and a structure supporting the lens. As shown in Fig. 9, the lens constituting the secondary mirror 12 is provided with a secondary reflecting surface 12b formed by mirror-finishing the upper end face thereof, and a transmission area 12a configured to transmit the primary electromagnetic wave without mirror-finishing. The structure supporting the lens in the secondary mirror 12 defines a hollow space for passing the secondary electromagnetic wave. The secondary mirror 12 is supported by a mirror housing 74b.

[0120] In detail, the secondary mirror 12 is provided with a secondary reflecting surface 12b that receives and further reflects the plasma light reflected by the primary reflecting surface 11b of the primary mirror 11, and a transmissive region 12a that is disposed in the center of the secondary reflecting surface 12b of the secondary mirror 12 and through which the ultraviolet laser light passes.

[0121] A concave meniscus lens with its convex surface facing upward and its concave surface facing downward can be used as the lens constituting the secondary mirror 12. The secondary reflecting surface 12b is provided on the periphery of the lens constituting the secondary mirror 12, and is formed in an annular shape with its mirror surface facing approximately upward.

[0122] The transmission region 12a is provided at the center in the radial direction of the lens (for example, a concave meniscus lens). The ultraviolet laser light that transmits through the transmission region 12a propagates while expanding its beam diameter.

[0123] A tertiary lens 13 is disposed between the transmission area 12a and the placement surface 51a in the approximately vertical direction. The tertiary lens 13 further transmits the ultraviolet laser light that has been transmitted through the transmission area 12a and collects it.

[0124] The tertiary lens 13 has a lens body 13a and an optical thin film 13b. The tertiary lens 13 is disposed so as to be coaxial with the primary mirror 11 and the secondary mirror 12.

[0125] The lens body 13a may be formed of a biconvex lens having a diameter smaller than the outer diameter of the entire concave meniscus lens constituting the secondary mirror 12 and larger than the outer diameter of the transmission region 12a alone in the concave meniscus lens. The ultraviolet laser light transmitted through the lens body 13a propagates while being focused in the radial direction.

[0126] The focal position of the optical system formed by the transmitting area 12a and the lens body 13a coincides with the focal position of the optical system formed by the primary mirror 11 and the secondary mirror 12 (see the black dot f in FIG. 9).

[0127] The optical thin film 13b is provided on the lower surface of the lens body 13a and is interposed between the transmission region 12a and the mounting surface 51a. The optical thin film 13b blocks reflected light such as visible light reflected by the sample SP. The optical thin film 13b may be provided on the concave surface located opposite to the transmission region 12a in the concave meniscus lens constituting the secondary mirror 12. The optical thin film 13b may be disposed between the transmission region 12a and the mounting surface 51a in the optical axis direction. Instead of providing the optical thin film 13b on the tertiary lens 13, or in addition to this optical thin film 13b, a light shielding member that blocks visible light may be provided in the optical path connecting the deflection element 73 and the first camera 81.

[0128] In the reflective objective lens 74 configured as described above, the primary mirror 11 passes the ultraviolet laser light through its opening 11a. The ultraviolet laser light that passes through the opening 11a passes through the transmission region 12a of the secondary mirror 12 and the lens body 13a of the tertiary lens 13 in this order, and is irradiated onto the sample SP (see optical path L1 in FIG. 9).

[0129] At this time, the secondary mirror 12 expands the beam diameter of the ultraviolet laser light passing through its transmission region 12a, and the tertiary lens 13 focuses the ultraviolet laser light expanded (enlarged) by the transmission region 12a at a predetermined focal position f. The ultraviolet laser light focused by the tertiary lens 13 converges at a focal length Df corresponding to the focal position f. This ultraviolet laser light diffuses in a cone shape as it moves away from the predetermined focal length Df or more. If the reflective objective lens 74 is not fastened to the optical base 700, the ultraviolet laser light propagates as parallel light shown in the optical path L1 of FIG. 9 without converging.

[0130] The tertiary lens 13 is not essential. Instead of providing the tertiary lens 13, the secondary mirror 12 may be formed of a convex lens.

[0131] When the sample SP is irradiated with the ultraviolet laser light, plasma light corresponding to the ultraviolet laser light is generated and collected by the reflective objective lens 74. The plasma light collected by the reflective objective lens 74 is guided to the primary mirror 11.

[0132] Primary mirror 11 reflects the plasma light generated in sample SP by its primary reflecting surface 11b. The plasma light reflected by primary reflecting surface 11b is guided to secondary reflecting surface 12b of secondary mirror 12.

[0133] Secondary mirror 12 receives the plasma light reflected by primary reflecting surface 11b with secondary reflecting surface 12b and emits it substantially upward. The plasma light reflected by secondary reflecting surface 12b propagates along a cylindrical (hollow cylindrical) optical path. At that time, the optical path formed by the plasma light is configured to surround the optical path of the ultraviolet laser light propagating in a cylindrical shape, as shown in FIG. 9. In other words, the ultraviolet laser light propagates through the hollow part of the cylinder formed by the optical path of the plasma light so as to be coaxial with the plasma light.

[0134] The plasma light propagating along the cylindrical optical path is output from opening 11a of primary mirror 11 in a state where it is coaxial with the ultraviolet laser light. The plasma light output from opening 11a is guided to deflection element 73 described above (see optical path L2 in FIG. 7). The plasma light guided to deflection element 73 passes through deflection element 73 and reaches spectroscopic element 75.

[0135] The spectroscopic element 75 is disposed between the deflection element 73 and the first beam splitter 78A in the optical axis direction of the reflective objective lens 74, and guides a part of the plasma light generated in the sample SP to the first detector 77A, while directing the other part to the second detector 77B, etc. Most of the latter plasma light is directed to the second detector 77B, but the remainder reaches the first camera 81.

[0136] Specifically, the plasma light returning from the sample SP contains various wavelength components other than the wavelength corresponding to the ultraviolet laser light. Therefore, the spectroscopic element 75 according to this embodiment reflects electromagnetic waves in a short wavelength band from the plasma light returning from the sample SP and guides them to the first detector 77A. The spectroscopic element 75 also transmits electromagnetic waves in other bands and guides them to the second detector 77B.

[0137] More specifically, the spectroscopic element 75 is mainly made of a material having a higher transmittance for a second infrared component that belongs to a wavelength range equal to or greater than a predetermined wavelength, compared to a first ultraviolet component that belongs to a wavelength range less than the predetermined wavelength. Such materials include glass materials, synthetic resins, etc.

[0138] For example, when a glass material is used, since glass itself has a low reflectance for ultraviolet wavelengths, an optical thin film that reflects electromagnetic waves belonging to the first component can be deposited on the glass surface to reflect electromagnetic waves belonging to the ultraviolet wavelength region and guide them to the first detector 77A.

[0139] The spectroscopic element 75 according to this embodiment receives the plasma light collected by the reflective objective lens 74. This spectroscopic element 75 is a so-called dichroic mirror, which reflects the plasma light corresponding to the first component on the ultraviolet side of the incident plasma light, while transmitting the plasma light corresponding to the second component on the infrared side. As described above, the main material of the spectroscopic element 75 has a relatively small transmittance for the first component and a relatively large transmittance for the second component. Therefore, the spectroscopic element 75 can minimize the loss of the entire plasma light caused by absorption by materials such as glass, compared to the case where the first component on the ultraviolet side is transmitted.

[0140] First parabolic mirror 76A is a so-called parabolic mirror, and is disposed between spectroscopic element 75 and first detector 77A. First parabolic mirror 76A collects the plasma light reflected by spectroscopic element 75, and causes the collected plasma light to be incident on first detector 77A.

[0141] In detail, first parabolic mirror 76A reflects plasma light in the ultraviolet region including the visible light band that has been collected by reflective objective lens 74, passed through deflection element 73, and then reflected by spectroscopic element 75. This first parabolic mirror 76A is configured to collect the plasma light reflected by first parabolic mirror 76A onto first detector 77A.

[0142] Here, the first detector 77A generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of plasma light generated in the sample SP when ultraviolet laser light is irradiated onto the sample SP placed on the placement table 5 from the analysis housing 70 as a housing. In particular, the first detector 77A is configured so that secondary electromagnetic waves on the ultraviolet side reflected by the spectroscopic element 75 are incident thereon, and has an entrance slit 77a for receiving the secondary electromagnetic waves.

[0143] The focal position of the first parabolic mirror 76A may be arranged to coincide with the entrance slit 77a, or may not coincide with the entrance slit 77a. The latter arrangement corresponds to a layout shifted from just focus. This layout is effective in cases where the energy of the reflected laser light is strong and may damage the entrance slit 77a.

[0144] 7 and 11. This first plate 701 is connected to the upper surface of the optical base 700. The first detector 77A is connected to the optical base 700 via the first plate 701. This connection makes it possible to stabilize the positioning of the entrance slit 77a relative to the light-guiding optical system 7a, such as the first parabolic mirror 76A.

[0145] Further, a first adjustment mechanism 771 is provided near the first detector 77A to adjust the relative position of the first detector 77A with respect to the first plate 701. By using this first adjustment mechanism 771, the relative position of the entrance slit 77a with respect to the light guiding optical system 7a can be adjusted.

[0146] It is not essential to connect the first plate 701 to the optical base 700. For example, the first plate 701 may be connected to an inner wall of the analysis housing 70. In such a configuration, the first adjustment mechanism 771 adjusts the relative position of the first detector 77A with respect to the analysis housing 70.

[0147] The first detector 77A receives the plasma light generated in the sample SP and collected by the reflective objective lens 74, and generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of the plasma light. The first detector 77A is configured to receive the plasma light that is dispersed upstream of the second detector 77B in the optical path of the plasma light starting from the reflective objective lens 74. The first component on the ultraviolet side of the plasma light generated in the sample SP is guided to the first detector 77A by being reflected multiple times without passing through a lens or the like. That is, the first component on the ultraviolet side is guided to the first detector 77A via the reflective objective lens 74 and the reflective optical system such as the first parabolic mirror 76A without passing through a refractive optical system. Since no chromatic aberration occurs, the analysis accuracy can be improved.

[0148] In particular, when configured to collect plasma light generated in response to irradiation with ultraviolet laser light, as in this embodiment, first detector 77A separates the plasma light by reflecting the plasma light at different angles for each wavelength, and causes each of the separated plasma light to enter an imaging element having multiple pixels. This makes it possible to differentiate the wavelength of the plasma light received by each pixel, and to obtain the received light intensity for each wavelength.

[0149] As the first detector 77A, for example, one based on a Czerny-Turner type detector can be used. The intensity distribution spectrum generated by the first detector 77A is input to the first control unit 21 of the controller main body 2.

[0150] First beam splitter 78A reflects a portion of the plasma light that has passed through spectroscopic element 75 (secondary electromagnetic waves in the infrared region including the visible light band) and guides it to second detector 77B, while transmitting the other portion (part of the visible light band) and directing it to second beam splitter 78B. Of the plasma light belonging to the visible light band, a relatively large amount of plasma light is directed to second detector 77B, and a relatively small amount of plasma light is directed to first camera 81.

[0151] Second parabolic mirror 76B is a so-called parabolic mirror, and is disposed between first beam splitter 78A and second detector 77B. Second parabolic mirror 76B collects the plasma light reflected by first beam splitter 78A, and causes the collected plasma light to be incident on second detector 77B.

[0152] Specifically, second parabolic mirror 76B reflects the plasma light in the infrared region including the visible light band that has passed through deflection element 73 and spectroscopic element 75 and then been reflected by first beam splitter 78A. This second parabolic mirror 76B is configured to collect the plasma light reflected by second parabolic mirror 76B onto second detector 77B.

[0153] Here, like the first detector 77A, the second detector 77B generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of plasma light generated in the sample SP when ultraviolet laser light is irradiated onto the sample SP placed on the mounting table 5 from the analysis housing 70 as a housing. In particular, the second detector 77B is configured so that the infrared plasma light transmitted through the spectroscopic element 75 is incident thereon, and has an entrance slit 77a for receiving the plasma light.

[0154] The focal position of the second parabolic mirror 76B may be arranged to coincide with the entrance slit 77a of the second detector 77B, or may be arranged not to coincide with the entrance slit 77a. The latter arrangement corresponds to a layout shifted from the just focus. This layout is effective in cases where the energy of the reflected light of the ultraviolet laser light is strong and may damage the entrance slit 77a.

[0155] 7 and 11. This second plate 702 is connected to the upper surface of the optical base 700. The second detector 77B is connected to the optical base 700 via the second plate 702. This connection makes it possible to stabilize the positioning of the entrance slit 77a relative to the light-guiding optical system 7a, such as the second parabolic mirror 76B.

[0156] Further, a second adjustment mechanism 772 is provided near the second detector 77B to adjust the relative position of the second detector 77B with respect to the second plate 702. By using this second adjustment mechanism 772, the relative position of the entrance slit 77a with respect to the light guiding optical system 7a can be adjusted.

[0157] It is not essential that the second plate 702 is connected to the optical base 700. For example, the second plate 702 may be connected to an inner wall of the analysis housing 70. In such a configuration, the second adjustment mechanism 772 adjusts the relative position of the second detector 77B with respect to the analysis housing 70.

[0158] The second detector 77B receives the plasma light generated in the sample SP and collected by the reflective objective lens 74, and generates an intensity distribution spectrum, which is an intensity distribution for each wavelength of the plasma light. The second detector 77B is configured to receive the plasma light that is dispersed downstream of the first detector 77A in the optical path of the plasma light starting from the reflective objective lens 74. The second component of the plasma light generated in the sample SP on the infrared side is guided to the second detector 77B through multiple reflections, except for passing through the spectroscopic element 75. That is, the second component on the infrared side is guided to the second detector 77B via the reflective optical system, such as the reflective objective lens 74 and the first parabolic mirror 76A. Since the occurrence of chromatic aberration is minimized, the analysis accuracy can be improved.

[0159] In particular, when configured to collect plasma light generated in response to irradiation with ultraviolet laser light, as in this embodiment, second detector 77B separates the plasma light by reflecting the plasma light at different angles for each wavelength, and causes each of the separated plasma light to enter an imaging element having multiple pixels. This makes it possible to differentiate the wavelength of the plasma light received by each pixel, and to obtain the received light intensity for each wavelength.

[0160] The second detector 77B may be, for example, a detector based on a Czerny-Turner type detector. The intensity distribution spectrum generated by the second detector 77B is input to the first control unit 21 of the controller body 2, similar to the intensity distribution spectrum generated by the first detector 77A.

[0161] The first control unit 21 receives the ultraviolet intensity distribution spectrum generated by the first detector 77A and the infrared intensity distribution spectrum generated by the second detector 77B. Based on these intensity distribution spectra, the first control unit 21 performs a component analysis of the sample SP using a basic principle described below. The first control unit 21 can perform a component analysis using a wider frequency range by using a combination of the ultraviolet intensity distribution spectrum and the infrared intensity distribution spectrum.

[0162] The second beam splitter 78B reflects the illumination light (visible light) emitted from the LED light source 79a and passed through the optical element 79b, and irradiates the sample SP with the reflected light via the first beam splitter 78A, the spectroscopic element 75, the deflection element 73, and the reflective objective lens 74. The reflected light (visible light) reflected by the sample SP returns to the analysis optical system 7 via the reflective objective lens 74.

[0163] Of the reflected light returning to the analysis optical system 7, the second beam splitter 78B further transmits the reflected light that has passed through the first beam splitter 78A, and causes it to enter the first camera 81 via the imaging lens 80.

[0164] The coaxial illumination 79 has an LED light source 79a that emits illumination light and an optical element 79b through which the illumination light emitted from the LED light source 79a passes. The coaxial illumination 79 functions as a so-called "coaxial epi-illumination." The illumination light emitted from the LED light source 79a propagates coaxially with the ultraviolet laser light output from the laser oscillator 71 and irradiated onto the sample SP, and the plasma light returning from the sample SP.

[0165] More specifically, the coaxial illumination 79 irradiates the illumination light through an optical path that is coaxial with the ultraviolet laser light emitted from the laser oscillator 71. Specifically, a portion of the optical path of the illumination light that connects the deflection element 73 and the reflective objective lens 74 is coaxial with the optical path of the ultraviolet laser light. Also, a portion of the optical path of the illumination light that connects the first beam splitter 78A and the reflective objective lens 74 is coaxial with the optical path of the plasma light.

[0166] 7, the coaxial illumination 79 is built into the analysis housing 70, but the present disclosure is not limited to such a configuration. For example, a light source may be laid out outside the analysis housing 70, and the light source and the analysis optical system 7 may be coupled to the optical system via an optical fiber cable.

[0167] The side illumination 84 is disposed so as to surround the reflective objective lens 74 serving as a collection head. The side illumination 84 irradiates illumination light from the side of the sample SP (in other words, from a direction inclined with respect to the analysis optical axis Aa).

[0168] Specifically, the side illumination 84 is disposed so as to surround the outer periphery of the reflective objective lens 74. More specifically, the side illumination 84 is configured as an annular illumination that annularly surrounds the reflective objective lens 74. The central axis of the annulus corresponding to the side illumination 84 (the central axis when the side illumination 84 is regarded as a ring) is disposed so as to be coaxial with the analysis optical axis Aa.

[0169] The first camera 81 is housed in the analysis housing 70, and captures an image of the sample SP by detecting the amount of reflected light (visible light) received from the sample SP through the reflective objective lens 74. The optical axis of the first camera 81 is coaxial with the ultraviolet laser light and the plasma light.

[0170] In detail, the first camera 81 receives reflected light collected by the reflective objective lens 74 serving as a collection head. Here, the first camera 81 collects the reflected light via a common optical path with the plasma light collected by the reflective objective lens 74. Here, the common optical path corresponds to the optical path connecting the reflective objective lens 74 and the spectroscopic element 75 among the optical paths of the reflected light. This optical path is dispersed by the spectroscopic element 75.

[0171] That is, spectroscopic element 75 according to this embodiment receives plasma light and reflected light via a common optical path, and can disperse the common optical path so as to guide plasma light to a detector (first detector 77A) via a first optical path, while guiding reflected light to an imaging section (first camera 81) via a second optical path. Here, the first optical path corresponds to an optical path connecting spectroscopic element 75, first parabolic mirror 76A, and entrance slit 77a. The second optical path corresponds to an optical path connecting spectroscopic element 75 and first camera 81.

[0172] In this way, the portion of the optical path of the reflected light that connects first beam splitter 78A and reflective objective lens 74 is coaxial with the optical path of the plasma light. Also, the portion of the optical path of the reflected light that connects deflection element 73 and reflective objective lens 74 is coaxial with the optical path of the ultraviolet laser light. Also, the portion of the optical path of the reflected light that connects second beam splitter 78B and reflective objective lens 74 is coaxial with the optical path of the illumination light.

[0173] The first camera 81 according to this embodiment photoelectrically converts light incident through the imaging lens 80 by a plurality of pixels arranged on its light receiving surface, and converts it into an electrical signal corresponding to an optical image of a subject (sample SP).

[0174] The first camera 81 may have a plurality of light receiving elements arranged along a light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal based on the amount of light received by each light receiving element can be generated. Specifically, the first camera 81 according to this embodiment is configured with an image sensor made of a CMOS (Complementary Metal Oxide Semiconductor), but is not limited to this configuration. As the first camera 81, for example, an image sensor made of a CCD (Charged-Coupled Device) can also be used.

[0175] Then, first camera 81 inputs an electrical signal generated by detecting the amount of light received by each light receiving element to first control unit 21 of controller main body 2. First control unit 21 generates image data corresponding to an optical image of the subject based on the input electrical signal.

[0176] The light returning from the sample SP is split and incident on the first detector 77A, the second detector 77B, and the first camera 81. Therefore, the amount of light received by the first camera 81 is smaller than that of a second camera 93 (described later) in the observation optical system 9. As a result, the image data based on the electrical signal input from the first camera 81 tends to be darker than the image data based on the electrical signal input from the second camera 93. Therefore, the first camera 81 adjusts its exposure time to ensure the same brightness as the image data generated by the second camera 93.

[0177] The optical components described so far are housed in the aforementioned analysis housing 70. This analysis housing 70 houses at least the laser oscillator 71 and the light-guiding optical system 7a inside. In addition, an optical base 700 is housed in the analysis housing 70 as a second housing, and the reflective objective lens 74 is fastened to the lower end of the optical base 700 as described above. This fastening results in the reflective objective lens 74 being incorporated into one end (lower end) of the analysis housing 70. This incorporation results in the reflective objective lens 74 constituting a part (lower end) of the analysis housing 70. By being incorporated into the analysis housing 70 and becoming a part of it, the reflective objective lens 74 can maintain a constant relative position with respect to the light-guiding optical system 7a.

[0178] In this way, the analysis housing 70 according to the present embodiment is configured so that the reflective objective lens 74 is indirectly incorporated therein via the optical base 700, but the present disclosure is not limited to such a configuration. The reflective objective lens 74 may be directly incorporated in the analysis housing 70 without the optical base 700.

[0179] A shielding member 83 shown in Fig. 7 may be disposed within the analysis housing 70. For example, as shown in Fig. 7, this shielding member 83 is disposed between the reflective objective lens 74 and the deflection element 73, and can be inserted into the optical path of the laser light based on an electrical signal input from the controller main body 2 (see the dotted line portion in Fig. 7). The shielding member 83 is configured to be at least impermeable to the laser light.

[0180] By inserting the shielding member 83 into the optical path, it is possible to limit the emission of the laser light from the analyzing case 70. The shielding member 83 may be disposed between the laser oscillator 71 and the output adjusting means 72.

[0181] 14, the analysis housing 70 defines a space for accommodating the analytical optical system 7, as well as a space for accommodating the slide mechanism 65. In that sense, the analysis housing 70 can be regarded as one element of the slide mechanism 65.

[0182] Specifically, the analysis housing 70 according to this embodiment is formed in a box shape with a shorter dimension in the front-rear direction than in the left-right direction. The left portion of the front surface 70b of the analysis housing 70 protrudes forward to ensure a movement allowance for the guide rail 65a in the front-rear direction. Hereinafter, this protruding portion is referred to as a "protruding portion" and is denoted by the reference numeral 70c. This protruding portion 70c is disposed in the lower half of the front surface 70b in the up-down direction (in other words, only the lower half of the left portion of the front surface 70b protrudes).

[0183] Further, the analysis housing 70 has a built-in head attachment sensor (attachment sensor) Sw5 that detects attachment of the analysis housing 70 to the stand 42. The head attachment sensor Sw5 is electrically connected to the second control unit 100, and can output a signal indicating that the analysis housing 70 is attached to the stand 42 to the second control unit 100.

[0184] -About the relationship between optical paths- The analysis optical system 7 causes ultraviolet laser light to be incident on the sample SP via the output adjustment means 72, the deflection element 73, the opening 11a of the primary mirror 11, and the transmission region 12a of the secondary mirror 12. Here, as shown in Fig. 13, the deflection element 73, the opening 11a, and the transmission region 12a are arranged in order along the analysis optical axis Aa. Therefore, the transmission region 12a according to this embodiment transmits the ultraviolet laser light that is emitted from the laser oscillator 71 and passes through the opening 11a, so that the ultraviolet laser light can be emitted along the analysis optical axis Aa.

[0185] The ultraviolet laser light emitted along the analytical optical axis Aa is irradiated onto the sample SP and scattered. In the sample SP, plasma light is generated by the irradiation of the ultraviolet laser light. The generated plasma light is collected by the reflective objective lens 74 and returns to the analytical optical system 7. In general, the plasma light collected in this manner will contain various wavelengths.

[0186] Therefore, the analytical optical system 7 causes the ultraviolet plasma light to be incident on the first detector 77A via the primary reflecting surface 11b of the primary mirror 11, the secondary reflecting surface 12b of the secondary mirror 12, the opening 11a of the primary mirror 11, the deflection element 73, the spectroscopic element 75, and the first parabolic mirror 76A.

[0187] The analysis optical system 7 also causes the infrared plasma light to be incident on the second detector 77B via the primary reflecting surface 11b of the primary mirror 11, the secondary reflecting surface 12b of the secondary mirror 12, the opening 11a of the primary mirror 11, the deflection element 73, the spectroscopic element 75, the first beam splitter 78A, and the second parabolic mirror 76B.

[0188] In this way, analytical optical system 7 causes the plasma light to be incident on detectors 77A, 77B without the intervention of optical fiber. In other words, analytical optical system 7 according to this embodiment guides the plasma light to detectors 77A, 77B without passing through optical fiber. Analytical optical system 7 has a so-called fiberless configuration with respect to the optical path of the plasma light.

[0189] Moreover, the analytical optical system 7 according to this embodiment guides the ultraviolet plasma light to the first detector 77A by using only the reflection of the electromagnetic waves, without transmitting the electromagnetic waves through a glass material. The analytical optical system 7 is configured as a fiberless, all-reflection system (an optical system using only the reflection of the electromagnetic waves) with respect to the optical path of the ultraviolet secondary electromagnetic waves.

[0190] When guiding the infrared plasma light to the second detector 77B, the analytical optical system 7 transmits only the spectroscopic element 75. The optical path of the infrared plasma light in the analytical optical system 7 is fiberless, and is configured to suppress attenuation associated with transmission as much as possible.

[0191] In this way, the plasma light propagates after undergoing multiple reflections. The optical path of the plasma light is longer than that of, for example, ultraviolet laser light, which propagates in a straight line, due to the number of turns caused by the multiple reflections.

[0192] Furthermore, as described above, when a concave meniscus lens is used as the secondary mirror 12 and a convex lens is used as the tertiary lens 13, or when a convex lens is used as the secondary mirror 12 without using the tertiary lens 13, the ultraviolet laser light incident on the reflective objective lens 74 is collected by any of the convex lenses and focused at a predetermined focal length Df. In either configuration, the reflective objective lens 74 can diffuse the ultraviolet laser light in a cone shape by gradually decreasing the energy density of the ultraviolet laser light as the lens moves away from the secondary mirror 12 by the focal length Df or more.

[0193] -Basic principles of analysis using analytical optical system 7- The first control unit 21, particularly the spectrum analysis unit 213 described later, performs a component analysis of the sample SP based on the intensity distribution spectrum input from the first detector 77A and the second detector 77B as detectors. As a specific analysis method, the LIBS method can be used as described above. The LIBS method is a method for analyzing components contained in the sample SP at an elemental level (so-called elemental analysis method).

[0194] Generally, when high energy is applied to a substance, electrons are separated from the atomic nucleus, and the substance enters a plasma state. The electrons separated from the atomic nucleus temporarily enter a high-energy and unstable state, but when they lose energy from that state, they are captured by the atomic nucleus again and transition to a low-energy and stable state (in other words, they return from a plasma state to a non-plasma state).

[0195] Here, the energy lost from the electrons is emitted from the electrons as electromagnetic waves, but the magnitude of the energy of the electromagnetic waves is determined by the energy level based on the shell structure specific to each element. In other words, the energy of the electromagnetic waves emitted when the electrons return from plasma to a non-plasma state has a unique value for each element (more precisely, the orbit of the electron bound to the atomic nucleus). The magnitude of the energy of the electromagnetic waves is determined by the wavelength of the electromagnetic waves. Therefore, by analyzing the wavelength distribution of the electromagnetic waves emitted from the electrons, that is, the wavelength distribution of the light (plasma light) emitted from a substance when it becomes a plasma, it becomes possible to analyze the components contained in the substance at the element level. This method is generally called atomic emission spectroscopy (AES).

[0196] The LIBS method is an analytical method that belongs to the AES method. Specifically, in the LIBS method, energy is imparted to a substance (sample SP) by irradiating the substance with laser light. Here, the area irradiated with the laser light is locally turned into plasma, and by analyzing the intensity distribution spectrum of the light (plasma light) emitted in conjunction with the plasmaization, it becomes possible to analyze the components of the substance.

[0197] That is, as described above, the wavelength of each plasma light has a unique value for each element, so when the intensity distribution spectrum forms a peak at a specific wavelength, the element corresponding to that peak is a component of the sample SP. When the intensity distribution spectrum contains multiple peaks, the component ratio of each element can be calculated by comparing the intensity (amount of received light) of each peak.

[0198] The LIBS method does not require vacuuming, and can perform component analysis in an open-air state. In addition, although it is a destructive test of the sample SP, it does not require processing such as dissolving the entire sample SP, and the position information of the sample SP remains (it is merely a locally destructive test).

[0199] Generally, the plasma light generated by irradiating the sample SP with a laser beam contains electromagnetic waves over a wide wavelength range. Here, among the electromagnetic waves contained in the plasma light, those in the ultraviolet range are easily absorbed by glass materials, and ingenuity is required to improve the analysis accuracy. Therefore, as described above, the first component on the ultraviolet side is configured to be guided to the first detector 77A through an optical system configured only for reflection, so that the first component on the ultraviolet side can be prevented from being absorbed by optical members in the optical path. This allows the first component on the ultraviolet side to be used in the component analysis, thereby enabling more accurate component analysis.

[0200] -Observation Optical System 9- The observation optical system 9 is a collection of parts for observing a sample SP as an observation target, and each part is accommodated in an observation housing 90. The parts constituting the observation optical system 9 include an objective lens 92 and a second camera 93. At least these parts are accommodated in the observation housing 90. The elements for observing the sample SP also include a first control unit 21 as a processing unit.

[0201] The observation optical system 9 includes an observation unit 9a having an objective lens 92. As shown in FIG. 3 and other figures, the observation unit 9a corresponds to a cylindrical lens barrel arranged on the lower end side of the observation housing 90. The observation unit 9a is held by the analysis housing 70. The observation unit 9a can be removed from the observation housing 90 as a single unit.

[0202] A communication cable C2 for transmitting and receiving electrical signals between the observation housing 90 and the controller main body 2, and an optical fiber cable C3 for guiding illumination light from the outside are connected to the observation housing 90. Note that the communication cable C2 is not essential, and the observation housing 90 and the controller main body 2 may be connected by wireless communication.

[0203] Specifically, the observation optical system 9 includes a mirror group 91, an objective lens 92, a second camera 93, a second coaxial illuminator 94, and a second lateral illuminator 95, as shown in FIG.

[0204] The objective lens 92 has an observation optical axis Ao extending substantially along the vertical direction, and collects illumination light to irradiate the sample SP placed on the mounting stage main body 51, and also collects light (reflected light) from the sample SP. The observation optical axis Ao is arranged so as to be parallel to the analysis optical axis Aa of the reflective objective lens 74 of the analysis optical system 7. The reflected light collected by the objective lens 92 is received by the second camera 93.

[0205] The mirror group 91 transmits the reflected light collected by the objective lens 92 and guides it to the second camera 93. The mirror group 91 according to this embodiment can be configured using a total reflection mirror, a beam splitter, and the like, as exemplified in Fig. 6. The mirror group 91 also reflects illumination light emitted from a second coaxial illumination 94 and guides it to the objective lens 92.

[0206] The second camera 93 collects the reflected light focused by the objective lens 92 and captures an image of the sample SP by detecting the amount of received reflected light that has been collected. Specifically, the second camera 93 according to this embodiment photoelectrically converts the light incident from the sample SP through the objective lens 92 using a plurality of pixels arranged on its light receiving surface, and converts it into an electrical signal corresponding to an optical image of the subject (sample SP).

[0207] The second camera 93 may have a plurality of light receiving elements arranged along the light receiving surface. In this case, each light receiving element corresponds to a pixel, and an electrical signal based on the amount of light received by each light receiving element can be generated. The second camera 93 according to this embodiment is configured with an image sensor made of CMOS like the first camera 81, but an image sensor made of CCD can also be used.

[0208] Then, the second camera 93 inputs an electrical signal generated by detecting the amount of light received by each light receiving element to the first control unit 21 of the controller main body 2. The first control unit 21 generates image data corresponding to an optical image of the subject based on the input electrical signal.

[0209] The second coaxial illuminator 94 emits illumination light guided from the optical fiber cable C3. The second coaxial illuminator 94 irradiates illumination light through a common optical path with the reflected light collected through the objective lens 92. In other words, the second coaxial illuminator 94 functions as a "coaxial epi-illuminator" that is coaxial with the observation optical axis Ao of the objective lens 92. Note that instead of guiding illumination light from the outside through the optical fiber cable C3, a light source may be built into the observation unit 9a. In that case, the optical fiber cable C3 is not necessary.

[0210] 6, the second side illumination 95 is configured with a ring illumination disposed so as to surround the objective lens 92. The second side illumination 95 irradiates illumination light from diagonally above the sample SP, similar to the side illumination 84 in the analysis optical system 7. Although detailed illustration is omitted, when the second side illumination 95 is regarded as a ring, the central axis coincides with the observation optical axis Ao.

[0211] -Housing connector 64- The housing connector 64 is a member for connecting the observation housing 90 to the analysis housing 70. By connecting the two housings 70, 90 with the housing connector 64, the analysis optical system 7 and the observation optical system 9 move integrally.

[0212] The housing connector 64 can be attached to the inside or outside of the analysis housing 70, i.e., to the interior or exterior of the analysis housing 70, or to the stand 42. In particular, in this embodiment, the housing connector 64 is adapted to be attached to the exterior surface of the analysis housing 70.

[0213] Specifically, the housing connector 64 according to this embodiment is configured to be attachable to the aforementioned protrusion 70c of the analysis housing 70, and is configured to hold the observation housing 90 to the right of the protrusion 70c.

[0214] 3, in a state in which the observation housing 90 is connected to the analysis housing 70 by the housing connector 64, the front surface of the protrusion 70c protrudes forward further than the housing connector 64 and the front portion of the observation housing 90. Thus, in this embodiment, in a state in which the observation housing 90 is held by the housing connector 64, the observation housing 90 and at least a part of the analysis housing 70 (the protrusion 70c in this embodiment) are laid out so as to overlap with each other when viewed from the side (when viewed from a direction perpendicular to the movement direction of the observation optical system 9 and the analysis optical system 7 by the slide mechanism 65).

[0215] The housing connector 64 according to this embodiment can fix the observation housing 90 to the analysis housing 70, thereby fixing the relative position of the analysis optical axis Aa with respect to the observation optical axis Ao.

[0216] 14, the housing connector 64 holds the observation housing 90, so that the observation optical axis Ao and the analysis optical axis Aa are arranged to be aligned along the second direction (the front-rear direction in this embodiment) in which the observation optical system 9 and the analysis optical system 7 move relatively to the mounting table 5 by the slide mechanism 65. Particularly in this embodiment, the observation optical axis Ao is arranged to be positioned forward of the analysis optical axis Aa.

[0217] Furthermore, as shown in FIG. 14, when the housing connector 64 holds the observation housing 90, the observation optical axis Ao and the analysis optical axis Aa are positioned so that their positions coincide in a third direction (the left-right direction in this embodiment), which is perpendicular to the first direction and the second direction.

[0218] -Slide mechanism 65- Fig. 12 is a schematic diagram for explaining the configuration of the slide mechanism 65. Fig. 13A and Fig. 14B are diagrams for explaining the horizontal movement of the head portion 6.

[0219] The slide mechanism 65 is configured to move the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting base body 51 in the horizontal direction so that imaging of the sample SP by the observation optical system 9 and irradiation of ultraviolet laser light when generating an intensity distribution spectrum by the analysis optical system 7 (in other words, irradiation of ultraviolet laser light by the laser oscillator 71 of the analysis optical system 7) can be performed on the same location on the sample SP as the object to be observed.

[0220] The direction of movement of the relative position by the slide mechanism 65 can be the direction in which the observation optical axis Ao and the analysis optical axis Aa are aligned. As shown in Fig. 14, the slide mechanism 65 according to this embodiment moves the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table main body 51 in the front-rear direction.

[0221] The slide mechanism 65 according to this embodiment displaces the analysis housing 70 relatively with respect to the stand 42 and the head mounting member 61. Since the analysis housing 70 and the observation housing 90 are connected by the housing connector 64, displacing the analysis housing 70 also displaces the observation housing 90 integrally.

[0222] Specifically, the slide mechanism 65 according to this embodiment includes the guide rail 65a and an actuator 65b. Of these, the guide rail 65a is configured to protrude forward from the front surface of the head mounting member 61.

[0223] Specifically, the base end of the guide rail 65a is fixed to the head mounting member 61. Meanwhile, the tip side portion of the guide rail 65a is inserted into an accommodation space partitioned within the analysis housing 70, and is attached in a state in which it can be inserted into and removed from the analysis housing 70. The insertion and removal direction of the analysis housing 70 with respect to the guide rail 65a is equal to the direction (second direction) in which the head mounting member 61 and the analysis housing 70 are moved away from or toward each other.

[0224] The actuator 65b can be, for example, a linear motor or a stepping motor that operates based on an electric signal from the first control unit 21. By driving this actuator 65b, the analysis housing 70, and therefore the observation optical system 9 and the analysis optical system 7, can be displaced relatively to the stand 42 and the head mounting member 61. When a stepping motor is used as the actuator 65b, a motion conversion mechanism that converts the rotational motion of the output shaft of the stepping motor into linear motion in the forward and backward directions is further provided.

[0225] The slide mechanism 65 further has a movement amount sensor Sw2 for detecting the movement amount of the observation optical system 9 and the analysis optical system 7. The movement amount sensor Sw2 can be configured by, for example, a linear scale (linear encoder) or a photointerrupter.

[0226] The movement amount sensor Sw2 detects the relative distance between the analysis housing 70 and the head mounting member 61, and inputs an electrical signal corresponding to the relative distance to the controller main body 2. The controller main body 2 determines the amount of displacement of the observation optical system 9 and the analysis optical system 7 by calculating the amount of change in the relative distance input from the movement amount sensor Sw2.

[0227] 13A and 13B, operation of the slide mechanism 65 causes the head unit 6 to slide horizontally, and the relative positions of the observation optical system 9 and the analysis optical system 7 with respect to the mounting table 5 are moved (horizontally moved). This horizontal movement causes the head unit 6 to switch between a first mode in which the reflective objective lens 74 faces the sample SP, and a second mode in which the objective lens 92 faces the sample SP. The slide mechanism 65 can slide the analysis housing 70 and the observation housing 90 between the first mode and the second mode.

[0228] 13A and 13B, in the first mode, the head unit 6 is in a relatively advanced state, and in the second mode, the head unit 6 is in a relatively retreated state. The first mode is an operation mode for performing component analysis of the sample SP by the analysis optical system 7, and the second mode is an operation mode for performing magnified observation of the sample SP by the observation optical system 9.

[0229] In particular, the analytical observation device A according to this embodiment is configured so that the location where the reflective objective lens 74 is pointed in the first mode and the location where the objective lens 92 is pointed in the second mode are the same. Specifically, the analytical observation device A is configured so that the location where the analytical optical axis Aa and the sample SP intersect in the first mode and the location where the observation optical axis Ao and the sample SP intersect in the second mode are the same (see FIG. 14B).

[0230] In order to realize such a configuration, the amount of movement D2 of the head unit 6 when the slide mechanism 65 is actuated is set to be equal to the distance D1 between the observation optical axis Ao and the analysis optical axis Aa (see FIG. 12). In addition, the alignment direction of the observation optical axis Ao and the analysis optical axis Aa is set to be parallel to the movement direction of the head unit 6, as shown in FIG.

[0231] In addition, in this embodiment, by adjusting the dimension of the housing connector 64 in the approximately vertical direction, the distance between the sample SP and the reflective objective lens 74 in the first mode and the distance between the sample SP and the objective lens 92 in the second mode are set to be the same.

[0232] By configuring as described above, before and after switching between the first mode and the second mode, it becomes possible to perform image generation of the sample SP by the observation optical system 9 and generation of an intensity distribution spectrum by the analysis optical system 7 (specifically, irradiation of ultraviolet laser light by the analysis optical system 7 when an intensity distribution spectrum is generated by the analysis optical system 7) on the same location in the sample SP from the same direction.

[0233] (Details of tilt mechanism 45) 14A and 14B are diagrams for explaining the operation of the tilt mechanism 45. Hereinafter, the tilt mechanism 45, such as its relationship with the housing connector 64, will be further explained with reference to Fig. 14A and 14B.

[0234] The tilt mechanism 45 is a mechanism constituted by the above-mentioned shaft member 44 and the like, and is capable of tilting at least the observation optical system 9 out of the analysis optical system 7 and the observation optical system 9 with respect to a reference axis As perpendicular to the mounting surface 51a.

[0235] As described above, in this embodiment, the relative position of the observation optical axis Ao with respect to the analysis optical axis Aa is maintained by integrally connecting the analysis housing 70 and the observation housing 90 with the housing connector 64. Therefore, when the observation optical system 9 having the observation optical axis Ao is tilted, the analysis optical system 7 having the analysis optical axis Aa is tilted integrally with the observation optical system 9, as shown in Figures 14A and 14B.

[0236] In this way, the tilt mechanism 45 according to this embodiment is configured to tilt the analytical optical system 7 and the observation optical system 9 together while maintaining the relative position of the observation optical axis Ao with respect to the analytical optical axis Aa.

[0237] Furthermore, the operation of the slide mechanism 65 and the operation of the tilt mechanism 45 are independent of each other, and a combination of the two operations is permitted. Therefore, the slide mechanism 65 can move the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining at least the observation optical system 9 in a tilted position by the tilt mechanism 45. That is, in the analytical observation device A according to this embodiment, the head unit 6 can be slid back and forth while the observation optical system 9 remains tilted, as shown by the double-headed arrow A1 in Fig. 14B.

[0238] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, and therefore the slide mechanism 65 moves the relative positions of the observation optical system 9 and the analytical optical system 7 while maintaining both the observation optical system 9 and the analytical optical system 7 in a tilted state by the tilt mechanism 45.

[0239] Moreover, the analytical observation device A is configured to perform eucentric observation. That is, in the analytical observation device A, a three-dimensional coordinate system unique to the device is defined, which is formed by three axes parallel to the X direction, the Y direction, and the Z direction. The storage device 21b of the first control unit 21 further stores the coordinates of an intersection position, which will be described later, in the three-dimensional coordinate system of the analytical observation device A. The coordinate information of the intersection position may be stored in the storage device 21b in advance when the analytical observation device A is shipped from the factory. Moreover, the coordinate information of the intersection position stored in the storage device 21b may be updateable by the user of the analytical observation device A.

[0240] 14A and 14B, if the angle of the analytical optical axis Aa with respect to the reference axis As is called the "tilt θ," the analytical observation device A is configured to allow the emission of laser light when the tilt θ is below a predetermined first threshold θmax, for example. In order to keep the tilt θ below the first threshold θmax, a hardware constraint can be imposed on the tilt mechanism 45. For example, the operating range of the tilt mechanism 45 may be physically limited by providing the tilt mechanism 45 with a brake mechanism (not shown).

[0241] The observation optical axis Ao, which is the optical axis of the objective lens 92, intersects with the central axis Ac. When the objective lens 92 oscillates around the central axis Ac, the angle (tilt θ) of the observation optical axis Ao with respect to the reference axis As changes while the intersection position of the observation optical axis Ao and the central axis Ac is maintained constant. In this way, when the user oscillates the objective lens 92 around the central axis Ac by the tilting mechanism 45, for example, if the observation target portion of the sample SP is at the above-mentioned intersection position, even if the objective lens 92 is in a tilted state, a eucentric relationship is maintained in which the center of the field of view of the second camera 93 does not move from the same observation target portion. Therefore, it is possible to prevent the observation target portion of the sample SP from moving out of the field of view of the second camera 93 (the field of view of the objective lens 92).

[0242] In particular, in this embodiment, the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, so that the analytical optical axis Aa, which is the optical axis of the reflective objective lens 74, intersects with the central axis Ac, similar to the observation optical axis Ao. When the reflective objective lens 74 oscillates around the central axis Ac, the angle (tilt θ) of the analytical optical axis Aa with respect to the reference axis As changes while the intersection position of the analytical optical axis Aa and the central axis Ac is maintained constant.

[0243] As described above, the tilting mechanism 45 can tilt the stand 42 by about 90° to the right with respect to the reference axis As, or by about 60° to the left with respect to the reference axis As. However, if the analytical optical system 7 and the observation optical system 9 are configured to tilt integrally, if the stand 42 is tilted excessively, the laser light emitted from the analytical optical system 7 may be irradiated toward the user.

[0244] Therefore, assuming that the inclination of the observation optical axis Ao and the analysis optical axis Aa with respect to the reference axis As is θ, it is desirable that the inclination θ be within a range that satisfies a predetermined safety standard, at least under a situation where the laser light can be emitted. Specifically, the inclination θ according to this embodiment is adjustable within a range below the predetermined first threshold value θmax, as described above.

[0245] (Configuration related to protection from laser) Moreover, the above-mentioned cover member 61b can be attached to the analysis housing 70 via the head attachment member 61. This cover member 61b can cover the reflective objective lens 74. The cover member 61b is an example of a "protective cover" in this embodiment.

[0246] Specifically, in this embodiment, as shown in FIG. 13B, in the second mode in which the head portion 6 is moved relatively backward, the cover member 61b is positioned so as to cover (shield) the reflective objective lens 74 that constitutes the analytical optical system 7, and in the first mode in which the head portion 6 is moved relatively forward, the cover member 61b is positioned so as to be spaced away from the reflective objective lens 74 (non-shield)

[0247] In the former shielded state, even if a laser beam is unintentionally emitted, the laser beam can be shielded by the cover member 61b, thereby improving the safety of the device.

[0248] The head unit 6 according to this embodiment includes a first position detection sensor (first position sensor) Sw6 that outputs a detection signal indicating that the reflective objective lens 74 is covered by the cover member 61b (see FIG. 15A). In other words, the first position detection sensor Sw6 can detect that the head unit 6 is in the second mode in which it is relatively retracted. The first position detection sensor Sw6 is electrically connected to a second control unit 100 serving as a control unit. The detection signal of the first position detection sensor Sw6 is input to the second control unit 100 serving as a control unit.

[0249] The head unit 6 according to this embodiment also includes a second position detection sensor (second position sensor) Sw7 that is electrically connected to the second control unit 100 in a state independent of the first position detection sensor Sw6 (see FIG. 15A). The second position detection sensor Sw7 outputs a detection signal indicating that the reflective objective lens 74 is covered by the cover member 61b (in other words, that the head unit 6 is in the second mode in which it is relatively retracted), similar to the first position detection sensor Sw6. The detection signal of the second position detection sensor Sw7 is input to the second control unit 100 as a control unit. The first position detection sensor Sw6 and the second position detection sensor Sw7 are preferably disposed at positions spaced apart from each other in the head unit 6.

[0250] The protective cover according to the present disclosure is not limited to the cover member 61b. As shown in FIG.

[0251] As shown in FIG. 24, the optical system assembly 1 according to this embodiment further includes a shielding cover 10 that can be attached to at least one of the components of the optical system assembly 1, such as the reflective objective lens 74, the analysis housing 70, the head unit 6, and the stand 42. This shielding cover 10 surrounds at least the reflective objective lens 74 from the sides, and can cover the reflective objective lens 74 in the same manner as the cover member 61b. This shielding cover 10 can shield ultraviolet laser light in the same manner as the cover member 61b. This can suppress leakage of laser light. The shielding cover 10 is another example of the "protective cover" in this embodiment.

[0252] The optical system assembly 1 according to this embodiment includes a cover attachment sensor Sw8 that outputs a detection signal indicating that the reflective objective lens 74 is covered by the shielding cover 10, in other words, that the shielding cover 10 is attached to the optical system assembly 1. The detection signal of the cover attachment sensor Sw8 is input to a second control unit 100 as a control unit. The cover attachment sensor Sw8 may be configured as a pair of sensors. In this case, the first cover attachment sensor Sw8, which is one of the two cover attachment sensors Sw8, and the second cover attachment sensor Sw8, which is the other, are both electrically connected to the laser control unit 105. Furthermore, in this case, the second cover attachment sensor Sw8 can be electrically connected to the laser control unit 105 in a state independent of the first cover attachment sensor Sw8.

[0253] <Details of the control system> Fig. 15A is a block diagram illustrating the control system of the analytical observation device A. Fig. 15B is a block diagram illustrating the control system in the head unit 6, and Fig. 15C is a diagram illustrating functional blocks in the first control unit 21 and the second control unit 100. Fig. 16 is a block diagram illustrating the hardware configuration of the laser control unit 105.

[0254] As described above, the controller main body 2 according to this embodiment includes a first control unit 21 that performs various processes, and a display unit 22 that displays information related to the processes performed by the first control unit 21. Of these, the first control unit 21 includes a processing unit 21a including a CPU, a system LSI, a DSP, etc., a storage device 21b including a volatile memory, a non-volatile memory, etc., and an input / output bus 21c.

[0255] On the other hand, the head unit 6 includes a second control unit 100 that performs various processes. Similar to the first control unit 21, the second control unit 100 includes a processing unit 100a including a CPU, a system LSI, a DSP, etc., a storage unit 100b including a volatile memory, a non-volatile memory, etc., and an input / output bus 100c.

[0256] The second control unit 100 is electrically connected to the first control unit 21, and can execute various operations, calculations, etc. according to control signals input from the first control unit 21, and can input detection signals of various sensors to the first control unit 21. Note that a control unit that integrates the second control unit 100 and the first control unit 21 may be used. Such a control unit may be provided in the controller body 2, or may be built into the head unit 6, the stage 4, etc.

[0257] The first control unit 21 and the second control unit 100 are configured to be able to both generate image data of the sample SP based on the amount of light received from the sample SP, and analyze the substances contained in the sample SP based on the intensity distribution spectrum, by sending and receiving signals to each other.

[0258] 15A, the first control unit 21 is electrically connected to the display unit 22, the mouse 31, the console 32, and the keyboard 33. At least some of these elements, for example, the display unit 22, may be connected to the head unit 6.

[0259] On the other hand, as illustrated in FIG. 15B, the second control unit 100 is electrically connected to the head driving unit 47, the mounting table driving unit 53, the laser oscillator 71, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the side lighting 84, the second camera 93, the second coaxial lighting (second coaxial lighting) 94, the second side lighting (second side lighting) 95, the actuator 65b, the lens sensor Sw1, the movement amount sensor Sw2, the first tilt sensor Sw3, the second tilt sensor Sw4, the head mounting sensor Sw5, the first position detection sensor Sw6, the second position detection sensor Sw7 and the cover mounting sensor Sw8.

[0260] Output signals from the first camera 81, the second camera 93, the lens sensor Sw1, the movement amount sensor Sw2, the first tilt sensor Sw3, the second tilt sensor Sw4, the head attachment sensor Sw5, the first position detection sensor Sw6, the second position detection sensor Sw7, and the cover attachment sensor Sw8 are input to the first control unit 21 via the second control unit 100. The first control unit 21 executes calculations and the like based on the input output signals, and executes processing based on the calculation results. As a result, image data obtained by capturing an image of the sample SP is generated, and a control signal for operating the head driving unit 47 and the like is generated.

[0261] The control signal generated by the first control unit 21 is input to the head driving unit 47 and the like via the second control unit 100. In accordance with the control signal thus input, the head driving unit 47, the mounting table driving unit 53, the excitation light source 71a constituting the laser oscillator 71, the first temperature control unit 71e and the second temperature control unit 71f, the output adjustment means 72, the LED light source 79a, the first camera 81, the shielding member 83, the LED light source 84b, the second camera 93, the second coaxial illumination 94, the second lateral illumination 95, and the actuator 65b are electrically controlled.

[0262] For example, the first control unit 21 can identify at least the type of the objective lens 92 among the types of the observation optical system 9 corresponding to the observation unit 9a fixed to the analysis optical system 7 by the housing connector 64, and execute processing related to imaging of the sample SP based on the identification result. Here, the type of the objective lens 92 can be identified based on the detection signal of the lens sensor Sw1. The first control unit 21 can execute, for example, adjustment of the exposure time of the second camera 93 and adjustment of the brightness of the illumination light as processing related to imaging of the sample SP.

[0263] Further, the command generating unit 101 in the second control unit 100 generates a command to make the excitation light source 71a generate excitation light based on an operation input to the controller main body 2 or the like. Every time such a command is generated, a pulse signal (LD current) as shown in the upper part of FIG. 19 is input to the excitation light source 71a. One pulse signal corresponds to one command. The command may be generated by the processing device 21a in the first control unit 21.

[0264] Specifically, the first control unit 21 according to the present embodiment includes a mode switching unit 211, a spectrum acquisition unit 212, a spectrum analysis unit 213, and an image processing unit 214, as shown in Fig. 15C. These elements may be realized by a logic circuit or by executing software. These elements may also be realized by the second control unit 100.

[0265] On the other hand, as shown in Fig. 15C, the second control unit 100 according to this embodiment has a command generating unit 101, an attachment determining unit 102, an inclination determining unit 103, a maintenance control unit 104, and a laser control unit 105. These elements may be realized by a logic circuit or by executing software. These elements may also be realized by the first control unit 21.

[0266] -Mode switching unit 211- The mode switching unit 211 switches from the first mode to the second mode and from the second mode to the first mode by moving the analysis optical system 7 and the observation optical system 9 forward and backward along the horizontal direction (the second direction in this embodiment).

[0267] Specifically, the mode switching unit 211 according to this embodiment reads in advance the distance between the observation optical axis Ao and the analysis optical axis Aa, which is stored in advance in the storage device 21b. Next, the mode switching unit 211 operates the actuator 65b of the slide mechanism 65 to move the analysis optical system 7 and the observation optical system 9 forward and backward.

[0268] Here, the mode switching unit 211 compares the amount of displacement of the observation optical system 9 and the analytical optical system 7 detected by the movement amount sensor Sw2 with the distance previously read, and judges whether the amount of displacement of the former reaches the distance of the latter. Then, at the timing when the amount of displacement reaches a predetermined distance, the advancement and retreat of the analytical optical system 7 and the observation optical system 9 is stopped. Note that the predetermined distance may be determined in advance, or may be configured so that the predetermined distance coincides with the maximum movable range of the actuator 65b.

[0269] It should be noted that the head unit 6 can also be tilted after switching from the second mode to the first mode by the mode switching unit 211. In the second mode, in addition to observing the sample SP by the observation optical system 9, maintenance control of the ultraviolet laser light can also be performed by the maintenance control unit 104. The second mode includes a normal mode in which the sample SP is observed, and a maintenance mode in which maintenance control is performed. Details of the maintenance mode will be described later.

[0270] -Spectrum acquisition unit 212- The spectrum acquiring section 212 acquires an intensity distribution spectrum by emitting a laser beam from the analytical optical system 7 in the first mode. Specifically, the spectrum acquiring section 212 according to this embodiment emits an ultraviolet laser beam from the laser oscillator 71, and irradiates the sample SP with the ultraviolet laser beam via the reflective objective lens 74. When the sample SP is irradiated with the laser beam, the surface of the sample SP is locally turned into plasma, and when the sample returns from the plasma state to a gas or the like, light (plasma light) having an energy corresponding to the width between the energy levels is emitted from the electrons. The emitted plasma light returns to the analytical optical system 7 through the reflective objective lens 74 and reaches the first detector 77A and the second detector 77B.

[0271] Based on the plasma light returned to the first and second detectors 77A and 77B, the spectrum acquisition unit 212 separates the amount of received light for each wavelength to generate an intensity distribution spectrum. The intensity distribution spectrum generated by the spectrum acquisition unit 212 is input to the spectrum analysis unit 213.

[0272] The spectrum acquiring section 212 synchronizes the light receiving timing of the first and second detectors 77A and 77B with the emission timing of the laser light. By setting in this way, the spectrum acquiring section 212 can acquire the intensity distribution spectrum in accordance with the emission timing of the laser light.

[0273] -Spectral Analysis Unit 213- The spectrum analysis unit 213 performs a component analysis of the sample SP based on the intensity distribution spectrum generated by the spectrum acquisition unit 212. As already described, when the LIBS method is used, the surface of the sample SP is locally turned into plasma, and the peak wavelength of the light emitted when the plasma state returns to gas or the like has a unique value for each element (more precisely, the electron orbit of the electron bound to the atomic nucleus). Therefore, by identifying the peak position of the intensity distribution spectrum, it is possible to determine that the element corresponding to the peak position is a component contained in the sample SP, and by comparing the magnitudes (peak heights) of the peaks, it is possible to determine the component ratio of each element and estimate the composition of the sample SP based on the determined component ratio. The spectrum analysis unit 213 is an example of the "component analysis unit" in this embodiment.

[0274] The analysis results by the spectrum analysis unit 213 can be displayed on the display unit 22 and stored in the storage device 21b in a predetermined format.

[0275] -Image processing unit 214- The image processing unit 214 can control the display mode on the display unit 22 based on image data (second image data) generated by the second camera 93 in the observation optical system 9, image data (first image data) generated by the first camera 81 in the analysis optical system 7, and the analysis results by the spectral analysis unit 213, etc.

[0276] In particular, image processing unit 214 according to this embodiment matches the area captured by second camera 93 (e.g., the center position of the area) with the area captured by first camera 81 (e.g., the center position of the area) before and after switching between the first mode and the second mode. Image processing unit 214 can adjust the display state of first and second cameras 81, 93, and further the first and second image data generated by each camera 81, 93, so as to match the areas.

[0277] Additionally, the image processor 214 can also display an index indicating the irradiation position of the ultraviolet laser light by superimposing it on the second image data.

[0278] -Installation Judgment Section 102- The attachment determination unit 102 determines whether or not the analysis housing 70 is attached to the stand 42 based on a detection signal from the head attachment sensor Sw5. The determination result is input to the laser control unit 105. This determination result functions as a first condition that is referred to when permitting emission of the ultraviolet laser light.

[0279] -Tilt determination unit 103- The tilt determination unit 103 calculates the difference between the tilt of the reference axis As with respect to the direction of gravity and the tilt of the analytical optical system 7 with respect to the direction of gravity (more specifically, the tilt of the analytical optical axis Aa with respect to the direction of gravity) based on the detection signals from the first tilt sensor Sw3 and the second tilt sensor Sw4. This difference corresponds to the tilt θ of the analytical optical system 7 with respect to the reference axis As.

[0280] The tilt determination unit 103 determines whether the tilt θ exceeds the first threshold value θmax based on the calculated tilt θ. The determination result is input to the laser control unit 105. The determination result functions as a second condition that is referred to when permitting emission of the ultraviolet laser light.

[0281] -Laser control unit 105- 1. Basic Concept of Laser Control Unit 105 First, the basic concept of the various processes performed by the laser control unit 105 will be described.

[0282] The laser control unit 105 determines whether or not the excitation light source 71a is to generate excitation light, based on the light reception signal generated by the monitor light receiving unit 88, and controls the generation of excitation light according to the result of the determination.

[0283] Specifically, the laser control unit 105 counts the number of laser emissions, which is the number of times a light receiving signal is generated within a predetermined period, based on the light receiving signal generated by the monitor light receiving unit 88. Here, the predetermined period corresponds to a certain period going back in time from the current time. The length (time width) of the predetermined period is set in advance.

[0284] The laser control unit 105 compares the counted number of laser emissions with a preset number of times, and permits the generation of the excitation light when the number of laser emissions is below the preset number. On the other hand, the laser control unit 105 does not permit the generation of the excitation light when the number of laser emissions is equal to or greater than the preset number. By not permitting the generation of the excitation light when the number of laser emissions is excessively high, it is possible to further improve safety compared to conventional methods.

[0285] The light guiding optical system 7a emits excitation light when a command is generated by the command generating unit 101 and when it is determined by the laser control unit 105 that emission of excitation light is possible (when generation of excitation light is permitted), and guides the ultraviolet laser light generated by the laser oscillator 71 as parallel light. The ultraviolet laser light thus guided is collected by the reflective objective lens 74 and converges at a predetermined focal length Df.

[0286] FIG. 17 is a graph for explaining the determination of the number of laser emission times. FIG. 18 is a diagram for explaining a partial period, and FIG. 19 is a diagram for explaining the relationship between an emission command and a laser pulse. Graph G0 in FIG. 17 is a graph illustrating the relationship between the above-mentioned predetermined number of times (hereinafter also referred to as a "limit value") and the time going back to accumulate the number of laser emission times. Graph G1 is a graph illustrating the accumulated number of laser emission times obtained by accumulating the number of laser emission times going back a predetermined time from time t0, which is a reference time. That is, the accumulated number of laser emission times at a certain time t1 in the past is the number of laser emission times accumulated from time t0 to time t1, and the accumulated number of laser emission times at a certain time t2 in the past is the number of laser emission times accumulated from time t0 to time t2. Graph G1 is a graph that monotonically increases as time goes back. Graph G2 is a graph illustrating the result of accumulating the number of laser emissions from a reference time (accumulated number of laser emissions) in the case where it is assumed that ultraviolet laser light was not emitted during Δt from the time when graph G1 was generated to the time when graph G2 was generated (Δt>0).

[0287] The vertical axis of Fig. 17 indicates the magnitude of the laser emission count or the magnitude of the limit value compared with the laser emission count, and the horizontal axis of Fig. 17 indicates how far back in time it goes from the present. For example, if the laser emission count does not increase for Δt from the time when graph G1 was generated, the laser emission count will shift by Δt toward the past, as shown by a comparison between graph G1 and graph G2. In addition, since the laser emission count is a cumulative value, it will increase the further back in time it goes.

[0288] Here, the laser control unit 105 compares the number of laser emission times with the limit value for a plurality of periods within the predetermined period T. At this time, the laser control unit 105 is configured to vary the size of the limit value to be compared depending on which period within the predetermined period T the period for which the comparison is performed corresponds to (how far back in time the period is from the current time).

[0289] Specifically, as shown in graph G0 of FIG. 17, the limit value is set constant during a first period T1 that is the closest period to the current time within a predetermined period T, and is set to increase as one goes back in time during a second period T2 that follows the first period T1 (a period going back further from the first period T1).

[0290] In the example of Fig. 17, at the timing near the boundary between the first period T1 and the second period T2 (see boxed part C1), the graph G1 showing the number of laser emissions and the graph G0 showing the limit value match. In this case, even if the relationship of "number of laser emissions < limit value" holds true at other timings, it is determined that the generation of excitation light is not permitted. On the other hand, the magnitude of the graph G2 showing the state after the time Δt has elapsed from the state shown in the graph G1 is less than the magnitude of the graph G0 throughout the entire period shown in the figure. In this case, the generation of excitation light is permitted.

[0291] In addition, when the limit value is changed going back in time, it is necessary to set the timing at which the limit value is compared with the number of laser emission times. In this embodiment, the laser control unit 105 divides the predetermined period T into a plurality of partial periods and counts the number of laser emission times for each partial period. This division can be, for example, equal division. When the partial periods are equally divided, the length (time width) of each partial period is constant. In other words, the laser control unit 105 does not directly associate the actual time at which the number of laser emission times is counted up with the count value of the number of laser emission times, but is configured to associate the count value of the number of laser emission times with the discretized time while discretely changing the time at which the number of laser emission times is counted up every 10 seconds, every 30 seconds, every 60 seconds, every 100 seconds, etc. In this case, the number of laser emission times does not increase continuously as in the graphs G1 and G2 of FIG. 17, but increases discretely in a histogram shape.

[0292] Then, the laser control unit 105 compares the number of laser emission times with the limit value for each partial period, and determines that generation of excitation light is possible when the number of laser emission times in all partial periods is below the limit value. In this case, the limit value referred to in the partial period closest to the current time among the multiple partial periods is set to a value equal to or less than the limit value referred to in the partial period going back in time from the latest partial period. In other words, the magnitude of the limit value is set to a constant value for each partial period. However, when comparing partial periods with each other, the limit value in the partial period close to the current time (partial period with a small time difference from the current time) is set to a value equal to or less than the limit value in the partial period far from the current time (partial period with a large time difference from the current time).

[0293] As shown in FIG. 18, a predetermined period T is divided into N partial periods T n When the laser emission count is divided into partial periods, the number of laser emission times (accumulated number of emission times) counted for each partial period is counted as the first to Nth accumulated number of emission times associated with each of the N partial periods. Here, assuming that the smaller n corresponds to the most recent partial period, the accumulated number of emission times in the nth partial period is P n (n=0,1,2,...,N), and the limit value in the case going back to the nth partial period is Li n When the following formula is satisfied for all of 0≦n≦N, the generation of pump light is permitted. 0 is the cumulative number of emissions from the current time to the first partial period, which is less than the partial period.

[0294] P 0 +P 1 +P 2 +…+P n <Li n …(1)

[0295] In the above formula, the limit value Li n The magnitude of is the nth subperiod T n For example, the nth subperiod T nIf the period corresponds to 9 to 10 minutes ago, the limit value Li n is set as a limit value corresponding to the cumulative number of shots in the past 10 minutes.

[0296] For example, the determination of whether or not to permit generation of the above-mentioned excitation light may be performed only for a predetermined period, such as from the present to the past six hours. n Each of the partial periods T may be one minute from 0 to 59 seconds. Here, the predetermined period T for the most recent six hours is divided into 360 partial periods T n In this example, the current time is 12:00:25 and the cumulative number of emissions in the first to tenth partial periods is P n The limit value Li corresponding to n is 10 times, and the cumulative number of shots in each partial period from the 11th onwards is P n The limit value Li corresponding to n is n times.

[0297] In this example, T 0 For 26 seconds from 12:00:00 to 12:00:25, T 1 For 60 seconds from 11:59:00 to 11:59:59, T 2 The time is 60 seconds from 11:58:00 to 11:58:59, and T 360 The period is 60 seconds from 06:00:00 to 06:00:59. 0 The tenth partial period T 10 In each partial period up to the 10th partial period, it is determined whether the cumulative total number of emissions from the current time to each partial period is less than 10. That is, in the first to 10th partial periods, 0 +P 1 , P 0 +P 1 +P 2 , , P 0 +P 1 +···+P 10If each of the partial periods is less than 10 times, it is determined that the generation of excitation light is possible. Furthermore, the laser control unit 105 determines whether the cumulative total number of emissions from the current time to each partial period is less than n times in the eleventh and subsequent partial periods. That is, P 0 +P 1 +···+P 11 , P 0 +P 1 +···+P 12 , , P 0 +P 1 +···+P 360 is less than n, it is determined that generation of the pump light is possible. If these determinations are made and formula (1) is satisfied for all n, generation of the pump light is permitted.

[0298] In this embodiment, by associating the discretely divided partial periods with the number of laser emission times, it is possible to reduce the memory allocated to recording the number of laser emission times. Therefore, each partial period does not change in real time according to the current time, and for example, one partial period T n Therefore, as in the above example, if the current time is 12:00:25, the partial period T0 is 26 seconds from 12:00:00 to 12:00:25.

[0299] The method of recording the number of laser emission times described here is an example, and the present disclosure is not limited thereto. In addition, when it is possible to allocate a large memory to record the number of laser emission times, the time when the laser is emitted may be stored sequentially without dividing the predetermined period into partial periods, and the number of laser emission times in the predetermined period may be accumulated at the timing when the laser emission command is generated, and it may be determined whether or not the excitation light is generated or whether or not the laser light is emitted.

[0300] In addition, in the maintenance mode described later, the ultraviolet laser light is terminated by the cover member 61b, so there is no risk of the ultraviolet laser light being emitted to the outside. Therefore, the laser control unit 105 does not count the number of laser emissions when transitioning to the maintenance mode (more specifically, when detection signals are input from both the first position detection sensor Sw6 and the second position detection sensor Sw7). In this case, the generation of the excitation light is permitted regardless of the number of laser emissions, and each process constituting the maintenance mode can be executed. Specifically, the laser control unit 105 determines whether the position of the analysis housing 70 as a housing is at a position corresponding to the state in which the reflective objective lens 74 is covered by the cover member 61b based on the detection signals output from both the first and second position detection sensors Sw6 and Sw7. When it is determined that the position of the analysis housing 70 is at that position (the position corresponding to the state in which the reflective objective lens 74 is covered by the cover member 61b), the laser control unit 105 does not count the number of laser emissions.

[0301] The laser control unit 105 does not count the number of laser emissions even when the reflective objective lens 74 is covered by the shielding cover 10 instead of or in addition to the cover member 61b. Specifically, the laser control unit 105 does not count the number of laser emissions when detection signals are input from both the first and second cover attachment sensors Sw8 described above.

[0302] Furthermore, the laser control unit 105 is configured to determine whether generation of excitation light is permitted or not permitted by determining the above-mentioned first and second conditions separately from the condition related to the number of times of laser emission.

[0303] That is, the laser control unit 105 can determine whether or not the excitation light can be generated based on the determination result by the attachment determination unit 102. Specifically, the laser control unit 105 determines that the excitation light can be generated when the analysis housing 70 is attached to the stage 4 and the number of laser emission times is below a limit value (a predetermined number of times).

[0304] The laser control unit 105 can also determine whether or not to generate excitation light based on the determination result by the tilt determination unit 103. Specifically, when the tilt θ exceeds a first threshold θmax, the laser control unit 105 determines that generation of excitation light by the excitation light source 71a is not permitted.

[0305] Generally, as shown in the left side of Fig. 19, when the pumping light source 71a is normal (when the pumping light is normally generated), one laser pulse is emitted in response to one emission command represented by the LD current. On the other hand, as shown in the right side of Fig. 19, when the pumping light source 71a is abnormal (when the generation of the pumping light is abnormal), two or more laser pulses are emitted in response to one emission command.

[0306] Therefore, the laser control unit 105 judges the correspondence between the command (pulse signal corresponding to the LD current) generated by the command generating unit 101 and the light receiving signal generated by the monitor light receiving unit 88, and when multiple light receiving signals are generated for one command, judges that the generation of excitation light by the excitation light source 71a is not permitted after the time when the judgment is made. This makes it possible to further improve the safety performance of the laser oscillator 71 compared to the conventional case.

[0307] 2. Specific Example of Laser Control Unit 105 Hereinafter, the hardware configuration of the laser control unit 105 will be described with reference to FIG.

[0308] 16, the command generating unit 101 includes a command generator 101a that generates a pulse signal to be input to the laser oscillator 71, and an AND circuit 101b that performs signal processing on the pulse signal. The command generator 101a can be configured using, for example, an FPGA (Field-Programmable Gate Array).

[0309] On the other hand, the laser control unit 105 has a counter 105a, a first control unit 105b, a second control unit 105c, a first storage unit 105d, a second storage unit 105e, a first timer 105f, a second timer 105g, and a battery 105h. Of these, the counter 105a can be configured using, for example, an FPGA. The first and second control units 105b and 105c can be configured using, for example, an MCU (Micro Control Unit). The first and second storage units 105d and 105e can be configured using, for example, a non-volatile memory such as a FeRAM (Ferroelectric Random Access Memory). The first and second timers 105f and 105g can be configured using, for example, an integrated circuit such as an RTC (Real-Time Clock).

[0310] Note that the battery 105h can be provided separately for each of the first timer 105f and the second timer 105g (a dedicated battery can be provided for each timer). For example, a battery failure or the like may cause a similar failure to occur in multiple timers at approximately the same time, and the timers may be judged as normal simply by comparing the times. Providing a dedicated battery for each timer is effective in preventing such erroneous judgments.

[0311] Here, for example, when a part of the ultraviolet laser light generated by the laser oscillator 71 passes through the third beam splitter 86 and is received by the monitor light receiving unit 88, the light receiving element 88a generates a light receiving signal as a pulse signal and inputs it to the pulse stretch circuit 88b. The pulse stretch circuit 88b expands the pulse width of the input pulse signal and inputs it to the counter 105a of the laser control unit 105.

[0312] The counter 105a counts up the number of times the pulse signal is input each time the pulse signal is input. This count number corresponds to the number of times the monitor light receiving unit 88 receives the ultraviolet laser light, and corresponds to the value of the number of times the laser is emitted. The number of times the laser is emitted counted up by the counter 105a is read by the first control unit 105b and the second control unit 105c.

[0313] Meanwhile, the first timer 105f counts the current time. The count by the first timer 105f continues even when the power of the analytical observation device A is turned off. When the power is turned off, the first timer 105f operates by being supplied with power from the battery 105h. The current time counted by the first timer 105f is read by both the first control unit 105b and the second control unit 105c.

[0314] Similarly, the second timer 105g counts the current time in the same manner as the first timer 105f. The counting by the second timer 105g continues even when the power of the analytical observation device A is turned off. When the power is turned off, the second timer 105g operates by being supplied with power from the battery 105h. The current time counted by the second timer 105g is read by both the first control unit 105b and the second control unit 105c. do.

[0315] In other words, in the configuration shown in the figure, the count of the current time is duplicated by the first timer 105f and the second timer 105g, and is configured so that even if the crystal clock stops, a current time count error, data corruption, etc. occurs, the count of the current time is not affected.

[0316] The first control unit 105b can periodically determine whether or not there is a discrepancy between the two timers by comparing the current time counted by the first timer 105f and the second timer 105g at regular intervals.

[0317] The second control unit 105c, like the first control unit 105b, can periodically determine whether or not there is a discrepancy between the two timers by comparing the current time counted by the first timer 105f and the second timer 105g at regular intervals.

[0318] The first control unit 105b associates the number of laser emission times read from the counter 105a with the current time read from the first and second timers 105f, 105g, and stores them in the first storage unit 105d. As described above, the current time is discretely changed every predetermined time width (every 30 seconds, 60 seconds, or the like), so that a partial period, rather than the actual time, is associated with the number of laser emission times and stored.

[0319] The first control unit 105b compares the number of laser emission times with the limit value stored in the first memory unit 105d, and inputs a signal indicating permission to emit (permission signal) to the AND circuit 101b only when the number of laser emission times in all partial periods is below the limit value.

[0320] The second control unit 105c associates the number of laser emission times read from the counter 105a with the current time read from the first and second timers 105f, 105g, and stores them in the second storage unit 105e. As described above, the current time is discretely changed every predetermined time width (every 30 seconds, 60 seconds, or the like), so that a partial period, rather than the actual time, is associated with the number of laser emission times and stored.

[0321] The second control unit 105c compares the number of laser emission times with the limit value stored in the second storage unit 105e, and inputs a signal indicating permission to emit (permission signal) to the AND circuit 101b only when the number of laser emission times is below the limit value in all partial periods.

[0322] When permission signals are input from both the first control unit 105b and the second control unit 105c, the AND circuit 101b passes the command generated by the command generator 101a and inputs it to the laser oscillator 71. In this case, the generation of excitation light by the excitation light source 71a is permitted. Here, the command that passes through the AND circuit 101b is input to the first control unit 105b and the second control unit 105c. The first control unit 105b and the second control unit 105c each compare the correspondence between the input command and the light receiving signal generated by the light receiving element 88a in response to the command, and if there is a mismatch between the number of commands and the number of light receiving signals, they stop inputting the permission signal and do not permit the generation of excitation light.

[0323] On the other hand, when an enabling signal is not input from at least one of the first control unit 105b and the second control unit 105c, the AND circuit 101b blocks the command generated by the command generator 101a. In this case, the generation of excitation light by the excitation light source 71a is not permitted (emission of ultraviolet laser light is restricted).

[0324] In this way, by duplicating the elements that perform various processes into the first control unit 105b and the second control unit 105c, even if one unit malfunctions due to some kind of noise, the other unit will operate normally, making it possible to more reliably restrict the emission of ultraviolet laser light.

[0325] In addition, by duplicating the elements for storing various information into the first storage unit 105d and the second storage unit 105e, the system is configured so that even if data corruption or the like occurs, it will not interfere with reading out various information.

[0326] -Maintenance control unit 104- The maintenance control unit 104 adjusts the laser power in a maintenance mode that is executed in the second state in which the head unit 6 is retracted. Specifically, the maintenance control unit 104 generates ultraviolet laser light while changing the temperatures of the various parts of the laser oscillator 71 via the first temperature control unit 71e and the second temperature control unit 71f described above.

[0327] For example, the maintenance control unit 104 controls the second temperature control unit 71f to change the temperature of the SHG crystal, one of the two crystals constituting the wavelength conversion element 71d, by a constant temperature from a preset initial temperature, and obtains the laser power at each temperature change while searching for the temperature at which the laser power is maximum (step 1). At this time, the laser power is obtained based on the corresponding light receiving signal generated in the monitor light receiving unit 88.

[0328] Similarly, the maintenance control unit 217 controls the second temperature control unit 71f to change the temperature of the THG crystal constituting the wavelength conversion element 71d by a constant temperature from a preset initial temperature, and obtains the laser power at each temperature change and searches for the temperature at which the laser power is maximum (step 2). The laser power is obtained using the monitor light receiving unit 88 as in step 1.

[0329] The maintenance control unit 104 repeatedly executes the above steps 1 and 2. At that time, by repeating each step while changing the range of change in temperature of each crystal, more precise adjustment is performed.

[0330] The maintenance control unit 104 repeatedly executes the same process for the first temperature control unit 71e to optimize the temperatures of the excitation light source 71a and the resonator 71b.

[0331] Here, in the maintenance mode, the reflective objective lens 74 is physically covered by the cover member 61b, so that it is possible to prevent the ultraviolet laser light from being emitted to the outside. In other words, in order to suppress unintended leakage of the ultraviolet laser light, the maintenance control unit 104 according to this embodiment is configured to permit a transition to the maintenance mode on the condition that the reflective objective lens 74 is covered by the cover member 61b.

[0332] In detail, the maintenance control unit 104 transitions to the maintenance mode on the condition that detection signals (signals indicating that the reflective objective lens 74 is covered by the cover member 61b) are input from both the first position detection sensor Sw6 and the second position detection sensor Sw7. If no detection signal is input from either the first position detection sensor Sw6 or the second position detection sensor Sw7, transition to the maintenance mode is not permitted. By doubling the detection by the sensors, safety can be further improved compared to conventional methods.

[0333] In such a maintenance mode, the laser control unit 105 does not count the number of laser emission (non-counting). Therefore, in the maintenance mode, generation of excitation light by the excitation light source 71a is permitted, and emission of ultraviolet laser light is not restricted.

[0334] <Examples of various processes> Fig. 20 is a flowchart illustrating a first process for determining whether or not excitation light can be generated. Fig. 21A and Fig. 21B are flowcharts illustrating a second process for determining whether or not excitation light can be generated. Fig. 22 is a flowchart illustrating a process for determining a startup error. Fig. 23 is a flowchart illustrating a process for determining the number of commands and the number of pulses.

[0335] In the following, the process for determining whether or not excitation light can be generated will be divided into a first process and a second process, but this division is merely for convenience. For example, by inserting each step constituting the second process between steps constituting the first process, the first process and the second process can be regarded as one integrated process.

[0336] (First process) First, in step S1 of FIG. 20, the second control unit 100 reads detection signals from various sensors such as the first tilt sensor Sw3, the second tilt sensor Sw4, and the head attachment sensor Sw5.

[0337] In the next step S2, the attachment determination unit 102 determines whether or not the head unit 6 is attached to the stand 42. If the determination by the attachment determination unit 102 is YES, the process proceeds to step S3, whereas if the determination is NO, the process proceeds to step S5. When proceeding to step S5, the laser control unit 105 determines that generation of excitation light is not permitted. In this case, emission of ultraviolet laser light is determined to be NG, and the emission is restricted.

[0338] In step S3, the tilt determination unit 103 determines whether the tilt θ of the reference axis As with respect to the direction of gravity exceeds a first threshold θmax. If the determination by the tilt determination unit 103 is YES, the process proceeds to step S4, whereas if the determination is NO, the process proceeds to step S5. If the process proceeds to step S4, the laser control unit 105 determines that generation of excitation light is possible (permits generation of excitation light). In this case, the emission of the ultraviolet laser light is determined to be OK, and the emission is permitted.

[0339] (Second Processing) On the other hand, in the second process, first, a start-up error is determined in step S11 of Fig. 21A. This step S11 is a process executed when the analytical observation device A is started up, and the flow shown in Fig. 22 is executed.

[0340] Specifically, first, in step S101 of Fig. 22, the second control unit 100 accesses the first storage unit 105d and the second storage unit 105e. Specifically, in this step S101, the first control unit 105b accesses the first storage unit 105d, and the second control unit 105c accesses the second storage unit 105e.

[0341] In the next step S102, the second control unit 100 checks the checksums of the first and second storage units 105d and 105e and determines whether or not there is a checksum error. If the determination is NO, the control process proceeds to step S109. In this case, it is determined that there is a startup error in either the first or second storage unit 105d or 105e, and the flow shown in FIG. 22 ends. On the other hand, if the determination is YES in step S102, it is determined that both the first and second storage units 105d and 105e are normal, and the control process proceeds to step S103.

[0342] In step S103, the second control unit 100 accesses the first timer 105f. Specifically, in step S104, both the first and second control units 105b and 105c access the first timer 105f. Although not shown in the figure, in step S103, the second control unit 100 determines whether or not there is a communication error between each of the first and second control units 105b and 105c and the first timer 105f, and if there is no communication error, the control process proceeds to step S104, whereas if there is a communication error, the control process proceeds to step S109. In the latter case, it is determined that there is an abnormality in the first timer 105f, and the flow shown in FIG. 22 is terminated.

[0343] In step S104, the second control unit 100 checks the status register of the first timer 105f to detect whether or not there is an abnormality in the first timer 105f. If no abnormality is detected in the first timer 105f, the second control unit 100 advances the control process to step S105, whereas if an abnormality is detected, the second control unit 100 advances the control process to step S109. In the latter case, it is determined that there is an abnormality in the first timer 105f, and the flow shown in FIG. 22 ends.

[0344] In step S105, the second control unit 100 accesses the second timer 105g. Specifically, in this step S105, both the first and second control units 105b and 105c access the second timer 105g. Although not shown in the figure, in step S105, the second control unit 100 determines whether or not there is a communication error between each of the first and second control units 105b and 105c and the second timer 105g, and if there is no communication error, the control process proceeds to step S106, whereas if there is a communication error, the control process proceeds to step S109. In the latter case, it is determined that there is an abnormality in the second timer 105g, and the flow shown in FIG. 22 is terminated.

[0345] In step S106, the second control unit 100 checks the status register of the second timer 105g to detect whether or not there is an abnormality in the second timer 105g. If no abnormality is detected in the second timer 105g, the second control unit 100 advances the control process to step S107, whereas if an abnormality is detected, the second control unit 100 advances the control process to step S109. In the latter case, it is determined that there is an abnormality in the second timer 105g, and the flow shown in FIG. 22 ends.

[0346] In step S107, the second control unit calculates the difference between the current time counted by the first timer 105f and the current time counted by the second timer 105g, and judges whether the difference is within a predetermined allowable range. If the judgment is YES, the second control unit 100 advances the control process to step S108. In this case, it is judged that there is no startup error in each hardware constituting the laser control unit 105, and the flow shown in FIG. 22 is terminated. If the judgment in step S107 is NO, the second control unit 100 advances the control process to step S109. In this case, it is judged that there is an abnormality in at least one of the first timer 105f and the second timer 105g, and the flow shown in FIG. 22 is terminated.

[0347] When the flow shown in Fig. 22 is ended, the control process proceeds from step S11 to step S12 in Fig. 21A. In step S12, the second control unit 100 judges whether or not a startup error was detected in step S11, and if a startup error was not detected, the control process proceeds to step S13, whereas if a startup error was detected, the control process proceeds to step S22. When proceeding to step S22, the laser control unit 105 judges that generation of excitation light is not permitted. In this case, emission of ultraviolet laser light is judged to be NG, and the emission is restricted.

[0348] In step S13, the second control unit 100 reads the current time from the first timer 105f and the second timer 105g, and also reads the number of pulses (the current number of laser emission times) from the counter 105a.

[0349] In step S14, the second control unit 100 calculates the increase in the number of pulses by calculating the difference between the number of pulses read out when the second process was previously executed and the number of pulses read out this time.

[0350] In step S15, the second control unit 100 judges whether or not an extraction command has been issued from the command generator 101a. This judgment is configured to be made independently by the first control unit 105b and the second control unit 105c. If this judgment is YES, the second control unit 100 updates the number of times an extraction command has been issued (number of commands) in step S16, and advances the control process to step S17. On the other hand, if the judgment in step S15 is NO, the control process skips step S16 and advances to step S17.

[0351] Step S17 is a process for comparing the number of commands with the number of pulses, and is configured to execute a flow shown in Fig. 23. This process is configured to be independently performed by the first control unit 105b and the second control unit 105c.

[0352] Specifically, first, in step S201 of Fig. 23, the second control unit 100 judges whether the number of commands has increased. If the judgment is YES, the second control unit 100 advances the control process to step S202. On the other hand, if the judgment is NO, the second control unit 100 advances the control process to step S206.

[0353] In step S206, the second control unit 100 judges whether the number of pulses has increased within a predetermined time. The predetermined time is, for example, a timeout time during which the ultraviolet laser can be sufficiently received after the command is generated. If the judgment is YES, it means that the monitor light receiving unit 88 has received the ultraviolet laser light even though the command generator 101a has not issued an emission command. In this case, it is judged that some abnormality has occurred in the hardware, and the second control unit 100 advances the control process to step S205. In step S205, the laser control unit 105 judges that "number of commands ≠ number of pulses" and ends the flow shown in FIG. 23. On the other hand, if the judgment in step S206 is NO, it is judged that the number of commands and the number of pulses are consistent, and the second control unit 100 advances the control process to step S204. In step S204, the laser control unit 105 judges that "number of commands = number of pulses" and ends the flow shown in FIG. 23.

[0354] In step S202, the second control unit 100 judges whether the number of pulses has increased within a predetermined time. If the judgment is NO, it means that the monitor light receiving unit 88 is not receiving the ultraviolet laser light even though the emission command is issued from the command generator 101a. In this case, it is determined that some abnormality has occurred in the hardware, and the second control unit 100 advances the control process to step S205. On the other hand, if the judgment in step S202 is YES, the second control unit 100 advances the control process to step S203.

[0355] In step S203, the second control unit 100 judges whether the number of pulses has increased by one. If this judgment is NO, it means that the monitor light receiving unit 88 has received two or more ultraviolet laser beams in response to one emission command. In this case, since it is judged that there is no consistency between the number of commands and the number of pulses, the second control unit 100 advances the control process to S205. On the other hand, if the judgment in step S203 is YES, the second control unit 100 advances the control process to step S204. As described above, in this step S204, the laser control unit 105 judges that "the number of commands = the number of pulses" and ends the flow shown in FIG. 23.

[0356] When the process of step S204 or step S205 is completed, the flow shown in FIG. 23 ends, and the control process proceeds from step S17 to step S18 in FIG. 21A. In step S18, the second control unit 100 judges whether the command count and the pulse count match. If the process proceeds to step S204 in the flow shown in FIG. 23, the judgment in step S18 is YES, and the control process proceeds to step S19. On the other hand, if the process proceeds to step S205 in the flow shown in FIG. 23, the judgment in step S18 is NO, and the control process proceeds to step S22.

[0357] In step S19, the laser control unit 105 in the second control unit 100 compares the number of laser emission times (number of pulses) with a limit value in each of the N partial periods (blocks). Then, in the following step S20, the laser control unit 105 determines whether or not the relationship (1) is satisfied in all partial periods.

[0358] If the determination in step S20 is YES, the second control unit 100 advances the control process to step S21, and the laser control unit 105 determines that generation of the excitation light is possible (permits generation of the excitation light). In this case, it is determined that emission of the ultraviolet laser light is OK, and the emission is permitted.

[0359] On the other hand, if the determination in step S20 is NO, the laser control unit 105 determines that generation of the excitation light is not permitted. In this case, it is determined that emission of the ultraviolet laser light is NG, and the emission is restricted.

[0360] <Further improvements in safety> For example, when a detachable objective lens that can be replaced by the user is used, when the objective lens falls off, collimated light with a higher energy density leaks out into the open space.

[0361] On the other hand, as illustrated in Fig. 7 and Fig. 9, by incorporating the reflective objective lens 74 at one end of the analysis housing 70, the light guide optical system 7a to the reflective objective lens 74 are integrally configured. As a result, only diffused light is emitted into the open space. By emitting only diffused light whose energy density gradually decreases, even if a user were to visually view the ultraviolet laser light, the effect can be kept as low as possible. This makes it possible to further improve safety compared to the past.

[0362] Generally, when focusing ultraviolet laser light using an objective lens, the focal length varies depending on the objective lens, so the ultraviolet laser light may not converge on the surface of the sample SP, and the desired energy density may not be achieved.

[0363] On the other hand, by incorporating the reflective objective lens 74 at one end of the analysis housing 70 as in the above embodiment, the focal position can be kept constant. This makes it possible to focus the ultraviolet laser light on the surface of the sample SP and easily achieve a desired energy density.

[0364] In addition, when a replaceable, detachable objective lens is used as described above, if the objective lens needs to be replaced, the optimum observation position and the mounting position of the light-guiding optical system 7a may differ depending on the mounting position. Adjusting these positions according to the magnification of the objective lens is time-consuming, and it is not easy to adjust the position accurately.

[0365] In contrast, as in the above embodiment, the reflective objective lens 74 constitutes a part of the analysis housing 70, so that the relative position of the reflective objective lens 74 with respect to the light-guiding optical system 7a can be kept constant. This can save the trouble of various position adjustments and also suppress deterioration of analysis accuracy caused by positional deviation.

[0366] Furthermore, when a replaceable, detachable objective lens is used, depending on the timing of replacement, foreign matter such as dust may easily enter the analytical housing 70, the optical base 700, etc. When such foreign matter is irradiated with laser light, fluorescence may be generated. The fluorescence thus generated becomes noise in component analysis by the LIBS method, and may lead to a decrease in analytical accuracy.

[0367] In contrast, by using a built-in reflective objective lens 74 that is not intended to be replaced by the user, as in the above embodiment, it is possible to minimize the opportunity for foreign matter to enter the specimen, thereby preventing a decrease in analytical accuracy.

[0368] 9, the analytical accuracy in the component analysis by the LIBS method can be improved by using a reflective objective lens 74 as an objective lens for component analysis. Furthermore, by using the reflective objective lens 74, it becomes possible to obtain good images before and after the analysis even with a camera (first camera 81) housed in the analysis housing 70 as shown in FIG.

[0369] Moreover, the light-guiding optical system 7a guides the ultraviolet laser light on condition that it is determined by the laser control unit 105 that the excitation light can be generated. Such a configuration is advantageous in further improving the safety of the analytical observation device A compared to the conventional case.

[0370] 17 and the like, the laser control unit 105 determines whether or not excitation light is generated based on the number of laser emission times obtained by accumulating the number of times the ultraviolet laser light is emitted. This determination is advantageous in improving safety when the LIBS method is performed over a long period of time.

[0371] In addition, as shown in graph G0 of Fig. 17, by changing the limit value as the predetermined number of times going back from the current time to the past, the judgment by the laser control unit 105 can be performed more appropriately. This is advantageous in further improving the safety of the analytical observation device A compared to the conventional case.

[0372] Furthermore, as described with reference to FIG. 18, by associating the number of laser emission counts with discretely divided partial periods instead of associating the time measured in real time with the number of laser emission counts, it is possible to reduce the memory allocated to recording the time.

[0373] 20, the laser control unit 105 determines that generation of excitation light is possible when the analysis housing 70, and therefore the head unit 6, are attached to the stage 4, that is, when the state is suitable for analyzing the sample SP. Such a configuration is advantageous in further improving the safety of the analysis and observation device A compared to the conventional case.

[0374] 13B and 24, when the reflective objective lens 74 is covered by the cover member 61b or the shielding cover 10 as a protective cover, that is, when there is no concern about leakage of the ultraviolet laser light, the laser control unit 105 does not count the number of laser emissions. This makes it possible to more appropriately determine whether or not the excitation light is generated.

[0375] Moreover, if the reflective objective lens 74 is tilted excessively, there is a concern that the ultraviolet laser light may leak into the open space. In response to this, as illustrated in step S3 of Fig. 20, if the tilt of the reflective objective lens 74 exceeds the first threshold value θmax, the laser control unit 105 according to this embodiment determines that the generation of excitation light by the excitation light source 71a is not permitted, and restricts the emission of the ultraviolet laser light. This configuration is advantageous in further improving the safety of the analytical observation device A compared to the conventional case.

[0376] As described with reference to Fig. 19, when the number of commands and the number of light receiving signals do not match, there is concern that various devices may be malfunctioned or broken, such as the ultraviolet laser light being emitted unintentionally or not being emitted as instructed. In response to this, the laser control unit 105 according to this embodiment determines that generation of excitation light by the excitation light source 71a is not permitted and restricts emission of the ultraviolet laser light, as illustrated in Fig. 23, when there is concern about malfunction or a breakdown. Such a configuration is advantageous in further improving the safety of the analytical observation device A compared to the conventional case.

[0377] Other Embodiments In the above embodiment, the laser oscillator 71 is disposed adjacent to the optical base 700 in the internal space of the analysis housing 70, but the present disclosure is not limited to such a configuration. For example, the laser oscillator 71 may be accommodated in the optical base 700.

[0378] In addition, in the above embodiment, the reflective objective lens 74 is configured to be fastened to the lower end of the optical base 700, but the present disclosure is not limited to such a configuration. The reflective objective lens 74 may be connected to the optical base 700 or the analysis housing 70 by a method other than fastening, or the reflective objective lens 74 and the optical base 700 or the analysis housing 70 may be integrally formed.

[0379] In addition, in the above embodiment, the observation housing 90 is configured to be supported by the outer surface of the analysis housing 70, but the present disclosure is not limited to such a configuration. The observation housing 90 or the observation unit 9a may be configured to be supported by the inner surface of the analysis housing 70. In this case, the observation housing 90 or the observation unit 9a will be housed in the analysis housing 70, similar to the analysis optical system 7.

[0380] In the above embodiment, the observation optical axis Ao and the analysis optical axis Aa are configured to be parallel to each other, but the present disclosure is not limited to such a configuration. The analysis optical system 7 and the observation optical system 9 can also be arranged so that the observation optical axis Ao and the analysis optical axis Aa are in a twisted position.

[0381] Moreover, the objective lens to be incorporated in a housing such as the analysis housing 70 is not limited to the reflective objective lens 74 as in the above embodiment. A non-reflective objective lens such as the objective lens 92 included in the observation optical system 9 may be incorporated in the housing. [Explanation of symbols]

[0382] A Analytical observation device (laser-induced breakdown spectroscopy device) 1 Optical Assembly 2 Controller body 21 First Control Section 213 Spectral Analysis Unit (Component Analysis Unit) 4 Stage 41 Base 42 Stand 45 Tilt mechanism 5. Placement table 61b Cover member (protective cover) 10 Shielding cover (protective cover) 7 Analytical optical system 7a Light guiding optical system 70 Analysis Case (Case) 700 Optical Base 71 Laser Oscillator 71a Excitation light source 71b resonator 74 Reflective Objective Lens (Objective Lens) 11 Primary mirror 11a opening 11b Primary reflective surface 12 Secondary mirror 12a Transparent area 12b Secondary reflective surface 77A 1st detector (detector) 77B Second detector (detector) 81 1st Camera (Camera) 88 Monitor receiver 9 Observation optical system 90 Observation box 92 Objective Lens 100 Second control section 101 Command generation section 105 Laser control unit Sw3 1st inclination sensor (inclination sensor) Sw4 2nd inclination sensor (inclination sensor) Sw5 Head-mounted sensor (mounted sensor) Sw6 1st position detection sensor Sw7 Second position detection sensor Sw8 Cover installation sensor (1st cover installation sensor, 2nd cover installation sensor) Df focal length SP sample (analyte) T1 1st Period T2 2nd Period

Claims

1. A laser-induced breakdown spectroscopy apparatus for performing a component analysis of an analyte placed on a placement stage provided in an open space by using a laser-induced breakdown spectroscopy method, comprising: a laser oscillator including an excitation light source that emits excitation light and a resonator that generates laser light based on the excitation light emitted by the excitation light source, the laser oscillator generating an ultraviolet laser light as the laser light; a command generating unit that generates a command for causing the excitation light source to generate excitation light; a monitor light receiving unit that receives the ultraviolet laser light from the laser oscillator and generates a light receiving signal indicating that the ultraviolet laser light has been received; a laser control unit that determines whether or not the excitation light source is capable of generating excitation light based on the light receiving signal generated by the monitor light receiving unit, and controls generation of the excitation light in accordance with the determination result; a light guiding optical system that guides the ultraviolet laser light generated by the laser oscillator as parallel light; an objective lens that converges the ultraviolet laser light guided as parallel light by the light guide optical system at a predetermined focal length and diffuses the ultraviolet laser light in a cone shape as the ultraviolet laser light moves away from the objective lens by the predetermined focal length or more; a housing that houses the laser oscillator and the light guiding optical system and has the objective lens built into one end; a detector for generating an intensity distribution spectrum, which is an intensity distribution for each wavelength of plasma light generated in the object to be analyzed by irradiating the object with the ultraviolet laser light; a component analysis unit that performs a component analysis of the analyte based on the intensity distribution spectrum generated by the detector, the objective lens is incorporated into one end of the housing to be configured as a part of the housing, and is configured to diffuse the ultraviolet laser light by gradually decreasing an energy density of the ultraviolet laser light as the objective lens moves away from the housing by more than the predetermined focal distance; The excitation light source emits the excitation light when the command is generated by the command generating unit and when it is determined by the laser control unit that emission of the excitation light is possible. A laser-induced breakdown spectroscopy apparatus comprising:

2. 2. The laser induced breakdown spectroscopy apparatus according to claim 1, The objective lens includes a primary mirror having an opening provided at the center in the radial direction, a primary reflection surface arranged around the opening and reflecting plasma generated in the analysis target in response to the emission of the ultraviolet laser light, and a secondary mirror having a secondary reflection surface that receives the plasma reflected by the primary reflection surface and further reflects it, and is configured as a reflective objective lens that collects the plasma by the primary mirror and the secondary mirror and guides it to the opening. A laser-induced breakdown spectroscopy apparatus comprising:

3. 3. The laser induced breakdown spectroscopy apparatus according to claim 2, a camera that is housed in the housing and captures an image of the object to be analyzed by detecting the amount of light received that returns from the object to be analyzed through the reflective objective lens; A laser-induced breakdown spectroscopy apparatus comprising:

4. 2. The laser induced breakdown spectroscopy apparatus according to claim 1, the laser control unit counts the number of laser emissions, which is the number of times the light receiving signal is generated within a predetermined period, based on the light receiving signal generated by the monitor light receiving unit; The laser control unit compares the number of times of laser emission with a predetermined number of times set in advance, and determines that the excitation light can be generated when the number of times of laser emission is less than the predetermined number of times. A laser-induced breakdown spectroscopy apparatus comprising:

5. 5. The laser induced breakdown spectroscopy apparatus according to claim 4, the laser control unit executes a comparison between the number of times of laser emission and the predetermined number of times for a plurality of periods within the predetermined period, The predetermined number of times is The time is set to be constant during a first period immediately preceding the current time within the predetermined period, In a second period subsequent to the first period within the predetermined period, the value is set to increase as the time goes back. A laser-induced breakdown spectroscopy apparatus comprising:

6. 6. The laser induced breakdown spectroscopy apparatus according to claim 5, The predetermined period is divided into a plurality of subperiods; the laser control unit counts the number of times the laser is emitted for each partial period, The laser control unit compares the number of times of laser emission with the predetermined number of times for each partial period, and determines that the excitation light can be generated when the number of times of laser emission is less than the predetermined number of times in all of the partial periods. A laser-induced breakdown spectroscopy apparatus comprising:

7. 7. The laser induced breakdown spectroscopy apparatus according to claim 4, a stage configured to allow the housing to be attached thereto and to position the housing relative to the mounting table; an attachment sensor electrically connected to the laser control unit and outputting a signal indicating that the housing is attached to the stage; The laser control unit determines whether or not the housing is attached to the stage based on a signal output from the attachment sensor, and determines that the excitation light can be generated when it is determined that the housing is attached to the stage and the number of times the laser is emitted is less than the predetermined number of times. A laser-induced breakdown spectroscopy apparatus comprising:

8. The laser induced breakdown spectroscopy apparatus according to any one of claims 4 to 7, a protective cover attached to the housing and covering the objective lens; a stage configured to allow the housing to be attached thereto and to position the housing relative to the mounting table; a first position detection sensor electrically connected to the laser control unit and detecting a position of the housing relative to the stage; a second position detection sensor that is electrically connected to the laser control unit in a state independent of the first position detection sensor and outputs a detection signal that indicates a position of the housing relative to the stage, The laser control unit determines whether or not the position of the housing is at a position corresponding to a state in which the objective lens is covered by the protective cover, based on the detection signals output from both the first and second position detection sensors, and when it is determined that the housing is at the position, does not count the number of times the laser is emitted. A laser-induced breakdown spectroscopy apparatus comprising:

9. The laser induced breakdown spectroscopy apparatus according to any one of claims 4 to 7, a protective cover that can be attached to the objective lens or the housing and covers the objective lens; a first cover attachment sensor electrically connected to the laser control unit and configured to output a detection signal indicating that the protective cover is attached; a second cover attachment sensor that is electrically connected to the laser control unit in a state independent of the first cover attachment sensor and outputs a detection signal indicating that the protective cover is attached; The laser control unit does not count the number of times the laser is emitted when detection signals are input from both the first and second cover attachment sensors. A laser-induced breakdown spectroscopy apparatus comprising:

10. 10. The laser induced breakdown spectroscopy apparatus according to claim 1 , a tilt mechanism that tilts the light guiding optical system and the objective lens together with respect to a predetermined reference axis that is perpendicular to an upper surface of the mounting table; a tilt sensor that detects a tilt of the light guiding optical system and the objective lens relative to the reference axis, The laser control unit determines that generation of the excitation light by the excitation light source is not permitted when the tilt detected by the tilt sensor exceeds a predetermined first threshold value. A laser-induced breakdown spectroscopy apparatus comprising:

11. 11. The laser induced breakdown spectroscopy apparatus according to claim 1 , The laser control unit determines a correspondence relationship between the command generated by the command generation unit and the light receiving signal generated by the monitor light receiving unit, and when a plurality of light receiving signals are generated in response to one command, determines that generation of the excitation light by the excitation light source is not permitted. A laser-induced breakdown spectroscopy apparatus comprising:

12. 12. The laser induced breakdown spectroscopy apparatus according to claim 1, With the base, a stand connected to the base and extending in a first direction perpendicular to the base; The mounting table is supported by the base or the stand, The housing is connected to the stand. A laser-induced breakdown spectroscopy apparatus comprising:

Images