Sheet attachment device

Abstract

To provide a sheet sticking device capable of easily reducing the risk of generation of cutting defects.SOLUTION: A sheet sticking device 1 includes: a sticking unit 20 that sticks a sheet onto a workpiece held on a chuck table 10; and a cutting unit 30 that cuts the stuck sheet. The cutting unit 30 includes: a cutting blade 31 that cuts the sheet; a moving unit 32 that moves the cutting blade 31 up and down toward the chuck table 10 or along an outer circumference of the workpiece; and a cleaning unit 33 that removes deposits on the cutting blade 31. The cleaning unit 33 is arranged on a track of the cutting blade 31 moved by the moving unit 32, and contacts and cleans the moving cutting blade 31.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device. [Background technology]

[0002] Various device chips are manufactured from various plate-shaped workpieces, such as semiconductor wafers on which semiconductor devices are formed, resin package substrates, glass substrates, ceramic substrates, etc., and are used in electronic devices. Each substrate is thinned by grinding, or processed and divided with a cutting blade or laser beam, and at that time, a resin sheet such as an adhesive tape is attached to the workpiece by a sheet attachment device in order to protect the surface (device surface) of the wafer and to prevent the chips from falling apart (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4387879 Summary of the Invention [Problem to be solved by the invention]

[0004] In a sheet application device, after a sheet that is wider than the workpiece is applied to the workpiece, the unnecessary outer peripheral portion of the sheet is cut and removed with a cutting blade such as a cutter blade. When soft plastic sheet debris adheres to the cutting blade, the sharpness of the blade decreases, and cutting defects such as inability to cut the sheet or unevenness of the cut edge occur.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a sheet sticking device that can easily reduce the risk of poor cutting. [Means for solving the problem]

[0006] In order to solve the above problems and achieve the object, the sheet sticking device of the present invention is a sheet sticking device comprising a sticking unit for sticking a sheet to a workpiece held by a chuck table, and a cutting unit for cutting the stuck sheet, the cutting unit comprising a cutting blade for cutting the sheet, a moving unit for raising and lowering the cutting blade toward the chuck table or moving the cutting blade along the outer periphery of the workpiece, and a moving unit for removing deposits from the cutting blade. Then, the chuck table is placed a cleaning unit for cleaning the cutting blade, the cleaning unit being disposed on a track of the cutting blade moved by the moving unit; The orbit The cleaning device is characterized by contacting and cleaning the moving cutting blade.

[0007] The cleaning unit may be disposed on a track of the cutting blade that is moved by the moving unit when the cutting blade cuts the sheet along the outer periphery of the workpiece, and may come into contact with and clean the cutting blade that moves on the track. Also, a groove may be formed on the track on the upper surface of the chuck table, and the cleaning unit may be disposed inside the groove. The cleaning portion may bring a scraper or a brush into contact with the cutting blade. Effect of the Invention

[0008] The present invention can easily reduce the risk of poor cutting. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a cross-sectional view showing an example of the configuration of a sheet sticking device according to a first embodiment. [Diagram 2] FIG. 2 is a plan view showing a workpiece to which a sheet is to be stuck by the sheet sticking apparatus of FIG. [Diagram 3] FIG. 3 is a cross-sectional view illustrating the bonding unit of FIG. [Figure 4] FIG. 4 is a cross-sectional view illustrating the cutting unit of FIG. [Diagram 5] FIG. 5 is a top view showing the cleaning unit of FIG. [Figure 6] FIG. 6 is a cross-sectional view illustrating the cleaning unit in FIG. [Figure 7] FIG. 7 is a cross-sectional view showing a cleaning unit of a sheet sticking device according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0011] [Embodiment 1] A sheet sticking device 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing an example of the configuration of the sheet sticking device 1 according to the first embodiment. FIG. 2 is a plan view showing a workpiece 100 to which a sheet is stuck by the sheet sticking device 1 of FIG. 1. FIG. 3 is a cross-sectional view explaining the sticking unit 20 of FIG. 1. FIG. 4 is a cross-sectional view explaining the cutting unit 30 of FIG. 1. FIG. 5 is a top view showing the cleaning section 33 of FIG. 1. FIG. 6 is a cross-sectional view explaining the cleaning section 33 of FIG. 1. As shown in FIG. 1, the sheet sticking device 1 includes a chuck table 10, a sticking unit 20, a cutting unit 30, and a control unit 40.

[0012] The workpiece 100, which is an object to which the sheet is adhered by the sheet adhering device 1 according to the first embodiment, is, for example, a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. As shown in Fig. 2, the workpiece 100 has devices 103 formed in areas partitioned by a plurality of planned division lines 102 formed in a lattice pattern on a surface 101. The workpiece 100 is not limited to this in the present invention, and may be a rectangular resin package substrate having a plurality of devices sealed with resin, a glass substrate, a ceramic substrate, a glass plate, or the like.

[0013] The sheet 200 that the sheet sticking device 1 according to the first embodiment sticks to the workpiece 100 is, for example, a so-called adhesive tape having a laminated structure of a resin base layer and a glue layer formed of a resin adhesive. In this embodiment, the sheet 200 is stuck to the workpiece 100 with the glue layer side having adhesiveness facing the surface 101 side, thereby protecting the surface 101 side of the workpiece 100. The sheet 200 is not limited to this in the present invention, and may be stuck to the back surface 104 side opposite the surface 101 instead of the surface 101 side of the workpiece 100. A protective sheet consisting of only a base layer without a glue layer may be heated and pressed to the workpiece 100. In addition, the sheet 200 is not limited to a so-called adhesive tape in the present invention, and may be a so-called thermoplastic resin sheet that is formed into a sheet shape by heating and softening or melting a thermoplastic resin and spreading it out.

[0014] The chuck table 10 includes a disk-shaped frame body with a recess formed therein and a disk-shaped suction part fitted into the recess. The suction part of the chuck table 10 is formed of a porous porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the chuck table 10 is a holding surface 11 on which the workpiece 100 is placed and which suction-holds the placed workpiece 100. In the first embodiment, the holding surface 11 holds the workpiece 100 by suction from the back surface 104 side, on which the workpiece 100 is placed with the front surface 101 facing upward. In the present invention, the chuck table 10 is not limited to a so-called porous chuck table having a suction part formed of a porous ceramic or the like, and may be configured to have a suction hole in an area corresponding to the workpiece 100. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to a horizontal plane. The chuck table 10 has an annular groove 12 formed on the upper surface of the frame, the groove 12 having a diameter similar to the outer circumferential diameter of the workpiece 100. The groove 12 is formed on the track of the cutting blade 31 moved by a moving unit 32 of the cutting unit 30 described later, and functions as an escape groove for the cutting blade 31, and a cleaning unit 33 of the cutting unit 30 is disposed inside the groove 12.

[0015] In the first embodiment, the bonding unit 20 is provided above the chuck table 10 and includes a roller 21 that rotates around an axis parallel to the horizontal direction and moves with the rotation. As shown in FIG. 3, in a state where the cutting unit 30 is sufficiently retracted upward from the chuck table 10, the bonding unit 20 rotates and moves the roller 21 from one end of the surface 101 side of the workpiece 100 held by the chuck table 10 through the sheet 200 toward the other end, thereby placing the sheet 200 in order from one end of the surface 101 side of the workpiece 100, and pressing the sheet 200 placed by the roller 21 toward the workpiece 100 with a predetermined pressing force, thereby bonding the sheet 200 to the surface 101 of the workpiece 100 held by the chuck table 10. When the sheet 200 to be attached to the workpiece 100 is a thermoplastic resin sheet, in addition to rotating and moving the roller 21, the attachment unit 20 heats and softens the sheet 200 from the roller 21 side or the chuck table 10 side, and attaches the softened sheet 200 to the surface 101 of the workpiece 100.

[0016] In the present invention, the adhering unit 20 is not limited to a form including the roller 21, and the sheet 200 may be pressed against the surface 101 of the workpiece 100 by a pressing plate having a pressing surface with the same shape and area as the chuck table 10 to adhere the sheet 200 to the surface 101 of the workpiece 100. The adhering unit 20 may also adhere the sheet 200 to the surface 101 of the workpiece 100 by blowing air onto the sheet 200. The sheet 200 may also be adhered to the workpiece 100 by using a so-called vacuum mounter, utilizing the air pressure difference.

[0017] 4, the cutting unit 30 includes a cutting blade 31, a moving unit 32, and a cleaning unit 33. The moving unit 32 includes a disk 34, a cutting blade support unit 35, a lifting unit 36, and a rotation drive unit 37. The disk 34 is provided above the chuck table 10. The cutting blade support unit 35 is provided in a predetermined region in the circumferential direction below the outer periphery of the disk 34, and supports the cutting edge side of the cutting blade 31 toward the chuck table 10 below.

[0018] The lifting unit 36 ​​is connected to the disk 34, and by lifting and lowering the disk 34, the cutting blade support unit 35 is lifted and lowered in the vertical direction (the Z-axis direction in FIG. 4 ), thereby lowering the cutting blade 31 in a direction approaching the chuck table 10 or lifting it in a direction away from the chuck table 10. The lifting unit 36 ​​outputs information on the height of the disk 34 to the control unit 40.

[0019] The rotation drive unit 37 is connected to the disk 34, and drives the disk 34 to rotate about an axis parallel to the vertical direction, thereby causing the cutting blade support unit 35 to rotate along the circumferential direction of the disk 34, and causing the cutting blade 31 to rotate along the circumferential direction of the disk 34. The rotation drive unit 37 outputs information on the rotation angle of the disk 34 to the control unit 40.

[0020] 4, the cutting unit 30 lowers the disk 34 and the cutting blade support part 35 by the lifting part 36 in a direction approaching the chuck table 10, so that the cutting edge side of the cutting blade 31 cuts into the sheet 200 attached to the surface 101 side of the workpiece 100 held by the chuck table 10, and further, in the first embodiment, the cutting blade 31 is rotated along the outer periphery of the workpiece 100 by rotating the disk 34 by the rotation drive part 37 about the axis while being slightly inserted into the groove 12, so that the protruding part 201 of the sheet 200 protruding in the radial direction from the outer periphery of the workpiece 100 is cut off. In the first embodiment, the cutting unit 30 cuts the sheet 200 with the cutting edge of the cutting blade 31 at a height slightly inserted into the groove 12, but the present invention is not limited to this, and the cutting edge of the cutting blade 31 may be cut at a height slightly raised from the groove 12. In addition, in embodiment 1, the cutting unit 30 cuts the sheet 200 with the cutting blade 31 from the side of the sheet 200 attached to the workpiece 100, but the present invention is not limited to this, and the sheet 200 may be cut from the side of the workpiece 100.

[0021] The cutting unit 30 is provided with a cutting blade heating section (not shown) that heats the cutting edge of the cutting blade 31. By heating the cutting edge of the cutting blade 31 with the cutting blade heating section, the sheet 200 is heated and softened via the cutting edge of the cutting blade 31, making it easier to cut, suppressing the generation of burrs on the sheet 200, and enabling the cutting blade 31 to cut the sheet 200 more accurately to match the shape of the outer peripheral edge of the workpiece 100.

[0022] The cleaning unit 33 includes a plurality of cleaning members 38 as shown in Fig. 5 and Fig. 6. In the first embodiment, the plurality of cleaning members 38 are arranged in a predetermined circumferential region in the groove 12 of the chuck table 10 as shown in Fig. 5, but the present invention is not limited to this. The cleaning members 38 may be arranged in a plurality of regions or evenly around the entire circumference. Each of the plurality of cleaning members 38 is arranged such that a portion (cleaning portion) for cleaning the cutting edge of the cutting blade 31 faces the orbit of the cutting edge of the cutting blade 31 in the groove 12 of the chuck table 10 and overlaps the orbit. Some of the cleaning members 38 are arranged on the inner periphery side of the orbit of the cutting edge of the cutting blade 31 such that the cleaning portion for cleaning the cutting edge extends toward the outer periphery side, and the remaining cleaning members 38 are arranged on the outer periphery side of the orbit of the cutting edge of the cutting blade 31 such that the cleaning portion extends toward the inner periphery side.

[0023] The cleaning member 38, by contacting the inner and outer circumferential sides of the cutting edge of the cutting blade 31 with the cleaning portion, is pressed against the side and tip of the cutting edge of the cutting blade 31 while deforming along the side of the cutting edge of the cutting blade 31, thereby removing the deposits attached to the side and tip of the cutting edge of the cutting blade 31 and cleaning the side and tip of the cutting edge of the cutting blade 31. For this reason, the cleaning member 38 can appropriately adjust the force with which it is pressed against the cutting edge of the cutting blade 31 by adjusting the amount (e.g., length) of overlap of the cleaning portion with the trajectory of the cutting edge of the cutting blade 31 and the deformation property (e.g., elasticity) of the material forming the cleaning portion. The deposits attached to the cutting edge of the cutting blade 31 are, for example, resin chips of the sheet 200 that are attached to the cutting edge of the cutting blade 31 as a result of cutting the sheet 200 with the cutting blade 31.

[0024] In the first embodiment, as shown in Figs. 5 and 6, the cleaning member 38 is a scraper or spatula made of an elastic material such as a rubber-like resin, and cleans the cutting edge of the cutting blade 31 by contacting the tip portion, which is the cleaning portion. In the first embodiment, a plurality of pairs (eight pairs in the example shown in Fig. 5) of scrapers or spatulas are provided as the cleaning members 38, and the cleaning portions are arranged facing each other toward the trajectory of the cutting edge of the cutting blade 31. The cleaning member 38 is not limited to this in the present invention, and may be a rotating roller made of an elastic material such as a rubber-like resin, and cleans the cutting edge of the cutting blade 31 by contacting the outer circumferential portion, which is the cleaning portion. The cleaning member 38 may also be a brush that cleans the cutting edge of the cutting blade 31 by contacting the bristle portion, which is the cleaning portion. The cleaning member 38 may be configured to be deformable along the cutting edge of the cutting blade 31 by being pressed against the cutting edge of the cutting blade 31 by being fixed to an elastic material such as a rubber-like resin.

[0025] The control unit 40 controls the operation of various components of the sheet sticking device 1, and causes the sheet sticking device 1 to perform a sticking process of sticking the sheet 200 to the surface 101 of the workpiece 100, a cutting process of cutting off the protruding portion 201 of the sheet 200, and a cleaning process of cleaning the cutting edge of the cutting blade 31. In the first embodiment, the control unit 40 includes a computer system. The computer system included in the control unit 40 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 40 performs arithmetic processing according to a computer program stored in the storage device of the control unit 40, and outputs a control signal for controlling the sheet sticking device 1 to each component of the sheet sticking device 1 via the input / output interface device of the control unit 40.

[0026] Next, this specification will explain the operation of the cleaning process of the sheet sticking device 1 according to the embodiment 1 with reference to the drawings. The sheet sticking device 1 performs the cleaning process, for example, after cutting the sheet 200 with the cutting blade 31, or before cutting the next sheet 200 with the cutting blade 31.

[0027] In the cleaning process, the control unit 40 of the sheet sticking device 1 first controls the rotation drive unit 37 to rotate the disk 34, thereby rotating and moving the cutting blade 31 along the circumferential direction of the disk 34, and aligns the circumferential position of the cutting edge of the cutting blade 31 with a predetermined area where the cleaning member 38 is arranged and the cleaning portion of the cleaning member 38 is directed, as shown in FIG. 5. In the cleaning process, the control unit 40 then controls the lift unit 36 ​​to repeatedly lift and lower the disk 34, as shown in FIG. 6, to repeatedly lift and lower the cutting blade 31, so that the cutting edge of the cutting blade 31 passes through the area where the cleaning portion of the cleaning member 38 is directed in the upward and downward directions a predetermined number of times or more. As a result, the cleaning member 38 removes the deposits attached to the cutting edge of the cutting blade 31 every time the cutting edge of the cutting blade 31 passes through this area, thereby cleaning the cutting edge of the cutting blade 31.

[0028] The sheet application device 1 of embodiment 1 having the above-mentioned configuration has a cleaning unit 33 that removes deposits from the cutting blade 31 arranged on the moving track of the cutting blade 31, thereby making it possible to remove deposits from the cutting blade 31 without increasing the number of actuators and preventing the cutting blade 31 from losing its sharpness, thereby achieving the advantageous effect of easily reducing the risk of poor cutting.

[0029] In addition, the sheet application device 1 of embodiment 1 has the cleaning unit 33 configured with a cleaning member 38 such as a scraper or brush made of an elastic material that can be deformed when pressed against the cutting edge of the cutting blade 31, or the cleaning unit 33 is fixed to an elastic material, thereby achieving the advantageous effect of allowing the cleaning unit 33 to come into contact with the cutting blade 31 with an appropriate force to perform suitable cleaning without using an actuator.

[0030] [Embodiment 2] A sheet sticking device 1 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 7 is a cross-sectional view showing a cleaning unit 33-2 of the sheet sticking device 1 according to the second embodiment. In Fig. 7, the same parts as those in the first embodiment are denoted by the same reference numerals and the description thereof will be omitted.

[0031] The sheet sticking device 1 according to the second embodiment is the same as that of the first embodiment, except that the cleaning unit 33 in the first embodiment is replaced with a cleaning unit 33-2. As shown in Fig. 7, the cleaning unit 33-2 includes a pair of cleaning members 38-2, a groove member 51, a spring 52, a link mechanism 53, and a cushioning member 54. The pair of cleaning members 38-2 are scrapers formed of an elastic member similar to the cleaning members 38 of the first embodiment, but differ from the cleaning members 38 of the first embodiment in that they are formed in a curved shape.

[0032] The groove member 51 is provided in the groove 12 of the chuck table 10, and has a base 55 and a pair of side walls 56 standing upward from the base 55, as shown in Fig. 7. The pair of side walls 56 are arranged at a distance from each other in the width direction of the groove 12, i.e., in the radial direction of the chuck table 10, and the distance between them is wider than the thickness of the cutting edge of the cutting blade 31 and narrower than the groove 12. The pair of side walls 56 form a groove 57 between them.

[0033] One end of the spring 52 is connected to the bottom surface of the groove 57, i.e., the upper surface of the base 55, and the other end is connected to a joint portion 59 of the link mechanism 53. The link mechanism 53 has link portions 58 which are a pair of rod-shaped members, and a joint portion 59 which is a rotating shaft member which connects one end of the pair of link portions 58 to each other so that they can rotate. Each of the link portions 58 has one end connected to the joint portion 59, and the other end is supported at a certain height from below by the upper surface of the side wall portion 56 or the like. The joint portion 59 is positioned on the trajectory of the cutting edge of the cutting blade 31, and is urged upward by the spring 52 so that it is higher than the other end side of the link portion 58 when no force is applied.

[0034] The link parts 58 each have a cleaning member 38-2 provided at the other end facing upward. The pair of cleaning members 38-2 provided on each of the pair of link parts 58 have tip parts (cleaning parts) that clean the cutting edge of the cutting blade 31 curved toward each other. The pair of cleaning members 38-2 are biased in a direction in which the cleaning parts move away from each other as the joint part 59 is biased upward by the spring 52. In this way, the link mechanism 53 biases the cleaning parts of the pair of cleaning members 38-2 in a direction in which they move away from each other, and enables the cleaning parts of the pair of cleaning members 38-2 to move toward each other against the bias as the cutting edge of the cutting blade 31 is lowered by the lifting part 36 and the cutting edge of the cutting blade 31 moves the joint part 59 downward against the bias.

[0035] The cushioning member 54 is provided above the joint portion 59 of the link mechanism 53, and cushions the impact received from the edge of the cutting blade 31 that is lowered by the lifting portion 36. The cushioning member 54 is preferably made of a material that is not cut by the edge of the cutting blade 31 and can be flexibly deformed by the edge of the cutting blade 31 when the edge of the cutting blade 31 comes into contact with the cushioning member 54 from above, for example, an elastic material similar to that of the cleaning members 38, 38-2.

[0036] The sheet sticking device 1 according to the second embodiment may be provided with one cleaning unit 33-2, or may be provided with a plurality of cleaning units 33-2 arranged in the direction in which the groove 57 extends (the circumferential direction of the chuck table).

[0037] Next, this specification will explain the operation of the cleaning process of the sheet sticking device 1 according to the second embodiment with reference to the drawings. In the cleaning process, the control unit 40 of the sheet sticking device 1 according to the second embodiment first aligns the circumferential position of the cutting edge of the cutting blade 31 with a predetermined area in which the cleaning member 38-2 is arranged, as in the first embodiment. In the cleaning process of the second embodiment, the control unit 40 then controls the lifting unit 36 ​​to lower the disk 34 to lower the cutting edge of the cutting blade 31, as shown in FIG. 7, and causes the cutting edge of the cutting blade 31 to move the joint portion 59 downward against the biasing force via the relaxation member 54. As a result, the pair of cleaning members 38-2 move in directions approaching each other against the bias, bringing the cleaning portions into contact with the inner and outer circumferential sides of the cutting edge of the cutting blade 31, respectively, and moving the cleaning portions toward the tip of the cutting blade 31 while pressing them against the sides of the cutting edge of the cutting blade 31 with an appropriate force, thereby removing any adhesions on the cutting edge of the cutting blade 31 and cleaning the cutting edge of the cutting blade 31.

[0038] In the cleaning process of the second embodiment, the control unit 40 controls the lifting part 36 to lift the disk 34, thereby lifting the cutting edge of the cutting blade 31, and releases the downward force applied by the cutting edge of the cutting blade 31 to the joint part 59 via the buffer member 54. As a result, the pair of cleaning members 38-2 move the cleaning parts, which have been pressed with a moderate force against the inner and outer circumferential side surfaces of the cutting edge of the cutting blade 31, toward the base end side of the cutting edge of the cutting blade 31 while the pressing force is released, thereby removing the deposits attached to the cutting edge of the cutting blade 31, cleaning the cutting edge of the cutting blade 31, and then releasing the cutting edge of the cutting blade 31 from the inner and outer circumferential side surfaces of the cutting edge of the cutting blade 31.

[0039] The sheet sticking device 1 according to the second embodiment having the above-mentioned configuration is obtained by changing the cleaning unit 33 in the first embodiment to the cleaning unit 33-2, and therefore has the same effect as that of the first embodiment. Furthermore, the sheet sticking device 1 according to the second embodiment removes the deposits on the cutting edge of the cutting blade 31 by pressing the cleaning portion of the cleaning member 38-2 against the inner and outer circumferential sides of the cutting edge of the cutting blade 31 with an appropriate force while moving the cleaning portion toward the tip of the cutting blade 31, thereby achieving the effect of more reliably removing the deposits and reducing damage to the cleaning portion of the cleaning member 38-2 by the cutting edge of the cutting blade 31.

[0040] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0041] 1 Sheet attachment device 10 Chuck table 20 Adhesive unit 30 Cutting Unit 31 Cutting blade 32 Mobile Units 33,33-2 Cleaning Department 100 Workpiece 200 sheets

Claims

1. A sheet sticking device including a sticking unit that sticks a sheet to a workpiece held by a chuck table, and a cutting unit that cuts the stuck sheet, The cutting unit comprises: A cutting blade for cutting the sheet; a moving unit for moving the cutting blade up and down toward the chuck table or along the outer periphery of the workpiece; a cleaning unit that removes deposits from the cutting blade and is disposed on the chuck table; The cleaning unit is disposed on a track of the cutting blade moved by the moving unit, and contacts and cleans the cutting blade moving on the track.

2. A sheet application device as described in claim 1, wherein the cleaning unit is positioned on the track of the cutting blade that is moved by the moving unit when the cutting blade cuts the sheet along the outer edge of the workpiece, and contacts and cleans the cutting blade as it moves along the track.

3. A groove is formed in the track on the upper surface of the chuck table, 3. The sheet sticking device according to claim 2, wherein the cleaning portion is disposed inside the groove.

4. 4. The sheet sticking device according to claim 1, 2 or 3, wherein the cleaning section brings a scraper or a brush into contact with the cutting blade.

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