Movable workpiece carrier device for holding a workpiece to be processed - Patent 7336635

Abstract

a workpiece carrier device to be introduced into the vacuum chamber of a vacuum processing system, the workpiece carrier device having: one carousel X with a diameter dX; and a workpiece carrier device with a diameter d Ym <d X one or more carousels Y m and - one or more carousels Y m It can be installed on a diameter d Zn ≦d Y one or more workpiece supports Z with m n and - two actuators A1 and A2.

Description

[Technical field]

[0001] In the context of the present invention, the term "platform" is used to describe a workpiece carrier apparatus. The term "integrated platform" is used to describe a workpiece carrier apparatus in which said apparatus is implemented as a system of carousels.

[0002] The present invention relates to an integrated platform to be used for the treatment of workpieces in evacuable processing chambers, in particular in coating chambers for physical vapor deposition (PVD), such as those used for cathodic arc or magnetron sputtering processes. The inventive integrated platform makes it possible to carry out different pre-, coating and post-processing steps on batches of workpieces in one vacuum chamber, for example by moving the workpieces from one processing step to another. This offers high versatility in terms of batch sizes, pre-, post- and coating steps to be processed, and makes it possible to process workpieces of various shapes and sizes. The inventive platform is particularly suitable for newly developed types of coaters, such as those that make it possible to process and coat in the same system different amounts of workpieces distributed in small or large workpiece batches. [Background technology]

[0003] From the prior art, it is known to use pre- or post-treatment steps, such as heating and / or cleaning steps, before and / or after vacuum coating for various vacuum treatment processes. These steps are required, for example, to ensure good adhesion of the deposited coating to the substrate. Pre-treatment steps that ensure good adhesion are particularly important for wear-resistant hard coatings on tools such as drills, mills, forming tools, and mechanically loaded parts such as gears, injection moulding moulds, camshafts, as well as for other fast moving and heavily loaded parts that endure high mechanical and abrasive loads during operation. Thus, very good adhesion of the coating with the surface of the substrate is essential for robust and economical use. The main goal of these pre-treatment processes is to prepare the workpiece in order to achieve good adhesion of the subsequent coating to the base. Proven methods of pre-treatment that increase the adhesion of the coating to the substrate include heating by electron bombardment as known from DE 3330144, sputter etching with noble gas ions as described in DE 2833876, and etching of the workpiece by reactive chemistry.

[0004] To achieve a coating thickness distribution and a quality that is as uniform as possible, it is important to control the movement of the workpieces past the processing and etching sources. The parts to be pre-treated, coated and / or post-treated are often fixed on individual workpiece holders that are arranged symmetrically around the system axis or are rotatably mounted on a carousel-like workpiece support. Known industrial equipment usually uses workpiece holders or carousel-like workpiece supports that are rotatably connected to the vacuum chamber, typically the bottom of the vacuum chamber.

[0005] In the previously unpublished Swiss patent applications Nos. 2278 / 97 and 1736 / 98, dated 25 September 1997 and 25 August 1998 respectively, a planetary workpiece holder is described, in which a first system is provided which can be coupled to a driving introduction and is rotatable about an axis relative to the introduction. The first rotation system is hereinafter designated as solar. With respect to the solar system, a second rotation system is provided on the latter, which has an axis of rotation offset parallel to the axis of rotation of the solar system, hereinafter called planetary, the movement of which is generated via a removable engagement on a reference system formed by the introduction of the chamber. On the planetary system, a third rotation system is provided, hereinafter called lunar, which is rotatably supported with an axis of rotation parallel to the planetary and solar systems.

[0006] This type of workpiece support with a three-part rotational movement is used especially in the case of relatively small workpieces, in order to guide them past treatment sources mounted on the installation, such as coating sources, and to treat the workpieces homogeneously from all sides. In the above-mentioned workpiece support configuration, the lunar system starts its rotational movement intermittently. This leads to a partially irregular multiple movement of the workpiece and thus to negative consequences for the uniformity of the treatment of the workpiece. The intermittent rotation is particularly disadvantageous for coating systems made of some thin layers, reducing the coating quality.

[0007] In US6620254 / EP1153155B1, Zaech and Kurz disclose an improvement to the above-mentioned workpiece support, whereby a drive connection between the solar system and the lunar system is established without interruption and a continuous rotational movement of the lunar system is realized. The drive connection is preferably realized as a forced drive connection. The solar system is connected to a drive on the device side. At least one planetary system supported on the solar system is rotatable about a planetary axis and is provided with a drive connection to the device. At least one lunar system is supported on the planetary system and is rotatable about a lunar axis with a drive connection to the solar system. A receiver for at least one workpiece is provided on the lunar system. This drive connection is established between the solar system and the lunar system without interruption at least during operation of the device.

[0008] In EP 2048263 B1, Esser and Zaech disclose a workpiece carrier device with a simplified structure, which offers the possibility of easily varying the gear transmission ratio. The main advantage of the disclosed workpiece carrier is the easy actuation mechanism and at the same time the ability to vary the gear transmission ratio. The base frame is rotatable about a main axis and is powered by one electric motor. Actuation is not done by using a central actuator. Instead, a torque-proof gear wheel is fixed on the pivot mounting and another gear wheel is installed on the carousel outer edge. The two rack wheels mesh with each other. The motor powers the gear wheel on the carousel outer edge, so that the workpiece carrier is rotated. The workpiece holder is connected to the central axis via the rack wheel, so as to provide a forced rotation of the workpiece holder. This type of configuration provides a continuous rotation of the workpiece, which is particularly important for the deposition of thin multi-layer coatings. The gear transmission ratio is adjustable by changing the size, respectively the number of teeth on the gear wheels.

[0009] Another option is to use a vacuum processing system with a workpiece holder where the workpiece holder is a carousel. These types of systems often use a carousel that can be completely removed from the vacuum chamber to simplify loading and unloading of the workpiece holder. Removal of such a carousel can be done using, for example, a forklift.

[0010] In another approach, the carousel is mounted on a base frame with wheels. It can then be transferred to a vacuum processing system and inserted into the vacuum chamber by pushing the carousel into the chamber. Such a type of workpiece holder is called a carousel sled. Once the carousel sled is in its final position inside the chamber, the base frame is locked and the central actuator is connected to the carousel shaft. A drawback of this configuration is the complex coupling mechanism. This is necessary because the carousel sled must not operate during the insertion of the sled, but at the same time, the coupling mechanism must be connected to the central axis of the carousel to operate the carousel. The wheel mechanism must be built to withstand the extreme conditions encountered during operation, e.g., it must be able to move in vacuum conditions.

[0011] In EP 2 758 562 B1, Gwehenberger discloses a vacuum processing system with workpiece holders, which are implemented as a carousel, and which allows the workpieces to be processed to be avoided in front of the processing source by rotating the carousel about its axis. The workpieces can be placed on the carousel to allow one, two or multiple rotations. The carousel is powered by an actuator at its outer edge. The actuator is located or close to the side wall of the vacuum chamber opposite the opening through which the carousel can be inserted. The actuator is coupled to a rack wheel located at the outer edge of the carousel, which meshes with another rack wheel located on the outside of the carousel. Although multiple workpiece holders can be placed on the carousel, every workpiece holder has a rack wheel located on its outer side to allow the rotation of the workpiece holder. The carousel is preferably realized as a carousel wheel to simplify the loading and unloading process. Preferably, a track is installed inside the vacuum chamber to simplify the carousel sled insertion process.

[0012] The amount of workpieces to be treated and / or coated using PVD depends on the specific customer requirements. The coating chamber in which the workpiece holder is installed is designed to accommodate a certain number of workpieces of a certain size and shape. The batch size of the workpieces as well as the size and shape of the workpieces dictate the diameter and height of the coating chamber. More specifically, machines of one equipment family used today mainly use coating chambers exhibiting the same diameter and are scaled to a certain height to accommodate equipment with different loading capacities. The workpiece holder is then designed to match the requirements of the vacuum chamber, especially the height and diameter. Summary of the Invention [Problem to be solved by the invention]

[0013] The variety of workpiece sizes and shapes, as well as the quantity of workpieces to be processed and coated, is highly dependent on customer requirements. Small coating chambers are used to process and coat small workpiece batches.

[0014] To process and coat large workpiece batches, large coating chambers need to be provided. Inserting different payloads in one large machine is not currently economically viable. This is because the depreciation of the Cost of Goods Sold (COGS) can have a negative impact on the Total Cost of Ownership (TCO) when loading large machines with only small batches. The utilization rate depends on the number of workpieces. This is why the COGS has to be adapted to smaller payloads.

[0015] A variety of different chamber designs are required to accommodate equipment with different loading capacities, leading to huge time loss and efforts invested in the various chamber designs. In addition to the high cost of redesigning the chamber for every machine in the equipment fleet, the coating development needs to be adapted for every machine due to different heights, number of targets, and more reasons. The transfer of one particular coating from one machine to another machine with different dimensions is difficult and time consuming. Furthermore, the implementation of various equipment products is time consuming, since the various products cannot all be implemented at the same time. This also increases the costs. This leads to increased development costs.

[0016] Objective of the invention The present invention aims to provide a platform to be used for the treatment of workpieces in a vacuum system, which overcomes the problems currently occurring with prior art vacuum systems by allowing different workpiece batch sizes to be loaded into the vacuum chamber of said vacuum system. The present invention particularly aims to provide a solution to overcome the problems of the prior art for PVD coating machines. The main goal is to reduce the COGS for a lower depreciation rate of the TCO of said vacuum system, while providing high versatility to consider different treatment methods for different workpieces. [Means for solving the problem]

[0017] Solution of the Problem by the Invention-Description of the Invention These goals are achieved by the present invention, in which an integrated platform that can be used for various processes on different workpiece batch sizes and that operates in an economically viable manner is mounted in an evacuable processing chamber of a vacuum system. Said integrated platform consists of at least two carousels with different diameters, at least one carousel presenting a smaller diameter being rotatably mounted on one carousel presenting a larger diameter. Instead of providing only one carousel presenting a smaller diameter, several carousels of this kind may be mounted on one carousel presenting a larger diameter.

[0018] The design of the integrated platform of the present invention offers a wide range of applications, including high flexibility in terms of workpiece length and loading capacity, as well as the opportunity to subject workpieces to various pre-treatments, coatings and post-treatments, all in the same chamber. Among other advantages, this leads to the elimination of pre-treatment and cool-down times, which allows the platform to positively impact TCO compared to prior art systems, leading to reduced production costs. Furthermore, it offers, among many other advantages, greater flexibility in terms of the amount of substrates to be coated in the machine chamber compared to prior art solutions.

[0019] In a first aspect of the present invention, there is provided a workpiece carrier device for holding a treatable workpiece to be introduced into a vacuum chamber of a vacuum processing system, the workpiece carrier device having a diameter (d X ) and one carousel (X) having a diameter (d Ym <d X ) with one or more carousels (Y m ) and one or more carousels (Y m ) on the diameter (d Zn ≦d Ym The actuators (A1), (A2) and the carousels (X) and (Y m ) is introduced using a gear mechanism to allow at least two operation modes of the system, in mode 1, the actuator (A1) is powered and the actuator (A2) is not powered, and the carousel (X) is rotated around its central rotation axis (R X ) and in mode 2, actuator (A1) is not powered, actuator (A2) is powered, and the carousel (Y m ) their central rotation axis (R Ym) while the carousel (X) remains in place. It is understood that the workpiece carrier apparatus according to the present invention is not limited to use under vacuum conditions, but can also be used in coating systems under atmospheric or elevated pressure, etc.

[0020] In another embodiment of the first aspect, the carousel (X) of the workpiece carrier device according to the invention has a surface carousel (X) with an area A X =π (d X / 2) 2 The substantially circular design of the carousel (X) ensures in particular accurate positioning for the processing devices arranged outside the carousel (X). m ), and / or one or more workpiece supports (Z n ), in the context of a flexible manufacturing process, may on the one hand preferably be triangular, or quadrilateral, e.g. rectangular, square, trapezoidal, or even pentagonal, hexagonal, partially or completely elliptical, etc. n ) and Z n Regarding the area of ​​A, the preferred option is Z ≦A y X It is.

[0021] In another embodiment of the first aspect, a central carousel (X) and at least one carousel (Y m ) when the workpiece carrier device operates in mode 1, at least one carousel (Y m ) is connected via a third gear mechanism so as to initiate a rotational movement via the third gear mechanism. Such a design allows in particular for even more versatile processing of individual workpieces.

[0022] ​In another embodiment of the first aspect, a first actuator (A1) of the workpiece carrier device according to the invention is connected to a central carousel (X) via a first gear mechanism, and a second actuator (A2) is connected to at least one outer carousel (Y) via a second gear mechanism. m ) Such a design allows in particular for precisely controllable machining of individual workpieces.

[0023] In another embodiment of the first aspect, the first actuator (A1) and / or the second actuator (A2) of the workpiece carrier device according to the invention are designed as electromechanical actuators, and the rotational movement is preferably controlled by applying a control voltage to the actuators (A1) and / or (A2) along the axis (R X ) and / or (R Ym ) The use of mechanical or electromechanical actuators, as opposed to, for example, mechanically controlled systems, makes it possible to minimize the design effort required to enable targeted control over the positioning of the workpieces in the workpiece carrier device.

[0024] In a further embodiment of the first aspect, the workpiece carrier device according to the invention is usable in pressure conditions below 1 mbar, preferably below 0.1 mbar, in particular below 0.001 mbar, such a design allows for use in vacuum applications, in particular for PVD coating processes etc.

[0025] In order to ensure a precise and easily controllable coating of the substrates arranged in the workpiece carrier device, the present invention provides in a further embodiment of the first aspect a carousel (X) and / or one or more carousels (Y m ), and / or one or more workpiece supports (Z n ) is provided to have a substantially planar shape. Within the scope of the present invention, planar is understood in particular to mean a surface whose deviation from the average outer surface is less than 5%, preferably less than 2%, particularly preferably less than 1% of the total thickness of the corresponding carousel.

[0026] Within the scope of a space-saving and compact arrangement, the present invention in another embodiment of the first aspect provides one or more carousels (Y m ) is located entirely within the area of ​​the first carousel (X) and / or one or more workpiece supports (Z n ) completely fills one or more carousels (Y m ) area and the carousel (Y m ) is preferably a carousel (Y m It is further provided that the carousel (X) is installed on the outer edge of the carousel (X) such that the edges of (X) and (X) overlap. Arrangement in the area of ​​the corresponding carousel is preferably also understood to mean arrangement in an area that extends, for example, from the surface of the corresponding carousel at a distance relative to the direction of the corresponding axis of rotation (not perpendicular to the direction of the corresponding axis of rotation).

[0027] Within the scope of a space-saving and compact arrangement, in another embodiment of the first aspect, the invention further provides that the first actuator (A1) and / or the second actuator (A2) are arranged below the carousel (X), opposite the placement area for the workpieces. Within the scope of such an arrangement, the actuators can for example be arranged at the bottom of a vacuum chamber into which the inventive workpiece carrier device can be inserted.

[0028] In order to ensure a precise and easily controllable coating of the substrates arranged in the workpiece carrier device, in another embodiment of the first aspect, the present invention provides a method for coating the workpiece carrier device in a manner that is particularly advantageous in terms of the axis of rotation (R X ) and (R Ym ) are aligned parallel to one another.

[0029] In order to ensure a precise and easily controllable coating of the substrates placed in the workpiece carrier device, in another embodiment of the first aspect, the present invention provides, in particular, a method for coating the workpieces of the carousels (X), (Y m ) and (Z n) are aligned parallel to one another and preferably at the same time the axis of rotation (R X ) and (R Ym ) is vertically aligned.

[0030] In a further embodiment of the first aspect, which allows particularly flexible positioning of the workpieces, a carousel (X) and one or more carousels (Y m ) rotates around its axis (R X ,R Ym ) and can rotate around the rotation angle (φ1, φ m ) can be set to any value.

[0031] At the same time, with regard to a compact and space-saving arrangement that provides sufficient space for the placement of the workpieces to be processed, in another embodiment of the first aspect, one or more carousels (Y m ) is the diameter d Ym , preferably 10%d X ≦d Ym ≦50%d X , most preferably d Ym =50%d X and / or the workpiece support (Z n ) diameter is 10%d Ym ≦d Zn ≦50%d Ym It is.

[0032] In another embodiment of the first aspect, the carousel (X) is constructed as a carousel sled, and the carousel (X) is mounted on the base frame with wheels. Such a design allows in particular easy transport of the workpiece carrier device and easy introduction into a vacuum processing system, where it can be inserted by pushing the carousel into the vacuum chamber.

[0033] In another embodiment of the first aspect, which allows reliable spatial separation of the individual workpieces, one carousel (Y m ) next to or multiple carousels (Y m) are placed between the carousel (Y m ) or next to the carousel (Y m ), preferably at a right angle on top of the carousel X, and the wall is particularly m ) indicates a height and width sufficient to completely separate each section in which it is installed from adjacent sections.

[0034] In a second aspect of the invention, a surface treatment system for treating workpieces is disclosed, comprising the aforementioned workpiece carrier device for transporting the workpieces during treatment, a chamber, in particular in the form of a vacuum chamber, for the introduction of the workpiece carrier device and at least one treatment device for treating the workpieces arranged in the workpiece carrier device. The surface treatment system according to the invention therefore has the same advantages as those already detailed with respect to the workpiece carrier device according to the invention.

[0035] Within the context of a structurally simple and reliable fastening of the workpiece carrier device, in another embodiment of the second aspect, the workpiece carrier device of the surface treatment system is arranged on a wall or bottom of the chamber and is preferably connected to the chamber by actuators (A1) and (A2) which are removably fastened to the wall or bottom of the chamber. The removably fastening can be achieved, for example, via magnet holders, or screws, or plug connections, etc.

[0036] In order to ensure uniform and high-quality treatment of the workpieces, in another embodiment of the second aspect, the workpiece carrier device of the surface treatment system is arranged in the center of a chamber of the treatment system and one or more treatment devices for treating the workpieces are arranged around the workpiece carrier device, the treatment device or treatment devices being preferably fixed to a wall of the chamber and advantageously arranged symmetrically around the centrally arranged workpiece carrier device in the surface treatment system according to the invention. [Brief description of the drawings]

[0037] [Figure 1] Schematic diagram of m=8 carousels (Ym) distributed over the carousel (X). The workpiece supports are not shown in this diagram. [Diagram 2] A schematic diagram of m=1 carousel (Ym) installed in a distributed manner on the carousel (X). The carousel (Ym) is equipped with n=4 workpiece holders (Zn). [Diagram 3] 1 is a schematic diagram of a vertical cross section of an integrated platform in one embodiment; [Figure 4] A vertical cross-section of the integrated platform and a schematic of the mode of operation called "Carousel Mode" with actuator A1 on (spinning) and actuator A2 off (held). [Diagram 5] Vertical cross-section of the integrated platform and a schematic of the mode of operation called "spindle mode," with actuator A1 off (held) and actuator A2 on (spinning). [Figure 6] FIG. 13 is a schematic diagram of one embodiment of the present invention, in which (Ym) is placed before a pre-treatment module Tk. [Figure 7] Schematic diagram of an embodiment of the present invention in which the carousel (X) is rotated by an angle φ1=45° in a clockwise direction, which moves the carousel (Ym) to the processing module Tk+1. [Figure 8] Schematic diagram of an embodiment of the present invention in which the carousel (X) is rotated by an angle φ1=90° in a counterclockwise direction, which moves the carousel (Ym) to the processing module Tk-1. [Figure 9] A schematic diagram of an embodiment in which m=3 carousels (Ym) are distributed on the carousel (X) and separated by vertical walls. In this figure, n=4 workpiece supports (Zn) are installed on the carousels (Y1), (Y2), (Y3). The carousel (Ym) is moved in a counterclockwise direction by φ1=120° and placed in front of the processing source Tk. [Figure 10] Schematic of n=8 workpiece supports mounted directly on the carousel (X). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0038] The present invention discloses an integrated platform that provides high flexibility not only in terms of payload capacity but also in terms of processing methods, thereby reducing the TCO. The integrated platform has a diameter of d X = 100%, the carousel (X) is powered by an actuator (A1) and can rotate to either side, either clockwise or counterclockwise. The rotation angle (φ1) can be set to any value. On the carousel (X), Ym <d X One or more carousels (Y m ) is placed on the carousel (X). m The number of carousels (Y m ) rotates around its m rotation axes (R Ym ) can be rotated around the carousel (Y m ) rotation is controlled by the carousel (Y m ) into one self-contained actuator (A2). m ) each of which has a number n of workpiece support parts Z n The workpiece support may be a carousel (Y m ) and their rotation axis (R Zp ) (1≦p≦n) as the center of rotation. n ) is the diameter d Zn ≦d Ym The workpiece support is forced to rotate using a force connection.

[0039] The embodiments of the present invention are described by way of example and are intended to be merely illustrative and therefore non-limiting.

[0040] The figures referred to in this text are not to scale and are therefore non-limiting - for example the size or number of carousels may be chosen differently.

[0041] According to one aspect of the present invention shown in FIG. 1, on one carousel (X), m carousels (Y m ) are distributed. In the embodiment shown in FIG. 1, m is selected to be m=8, but may be selected to be a different number. The carousel (X) can be rotated by a rotation angle (φ1). The carousel (Y m ) are the m rotation angles (ψ m ) can be rotated.

[0042] According to a preferred embodiment of the present invention, the carousel (Y m ) is a carousel (Y m The carousel (X) is mounted on the outer edge of the carousel (X) such that the edges of (X) and (X) overlap. An example of this preferred embodiment is shown in Figures 6-9.

[0043] According to one embodiment of the present invention, shown in FIG. 2, on the carousel (X), Ym , preferably 10%d X ≦d Ym ≦50%d X , most preferably d Ym =50%d X Showing m=1 carousel (Y m ) is rotatably mounted. A vertical cross section of the configuration of the integrated platform in this embodiment is shown in Figure 3. The carousel (X) is powered by a centralized actuator (A1), which rotates around the axis of rotation (R X The carousel (X) is connected to the carousel (X) through a nearly vertical axis that acts as a rotational axis (φ1). The carousel (X) can rotate clockwise and counterclockwise, and the rotation angle (φ1) can be set to any value. The carousel (Y m ) are distributed on the carousel (X) and are powered by a second self-contained actuator (A2). m) is the angle (ψ m ) and its rotation axis (R Ym The actuator (A2) powers a system of gears that form a forced connection. The carousel (Y m ) is the axis of rotation (R Ym The actuator (A1) is rotatably mounted on the carousel (X) via a substantially vertical axis that acts as a second rotational motion. m ) can be rotated clockwise or counterclockwise, and the rotation angle (ψ m ) can be set to any value. The combination of the two self-contained actuators results in different operating modes. m ) has n=4 workpiece support parts (Z n ) is provided. n ) diameter is 10%d Ym ≦d Zn ≦50%d Ym In this embodiment, the diameter d Zp is the number of all n workpiece supports (Z n The same applies for n workpiece supports (Z n Rotation of the carousel (X) is achieved by parking the carousel (X), e.g. by stopping the actuator (A1). Each of the workpiece supports has a rotation axis (R Zn ) can be rotated clockwise or counterclockwise around the center, and the rotation angle is (ω p )

[0044] Carousel (Y m The number of workpiece supports (n) mounted on the carousel (Y m ) preferably has a number n of workpiece supports (Z n ) (1≦n≦10).

[0045] The platform of the present invention can operate in two different modes. The first mode is shown in FIG. 4 and is referred to in the text as the "carousel mode". In this mode of operation, the actuator (A1) is powered and therefore rotates either clockwise or counterclockwise. The actuator (A2) is fixed and not powered. Thus, the carousel plate of the carousel (X) is rotated about its axis of rotation (R X ) in either a clockwise or counterclockwise direction. This is because the gear spindle, and therefore the carousel (Y m ) carousel plate, or more precisely, the spindle (Z p ) of (R Zp ) resulting in a forced rotation around the

[0046] The second mode is shown in Figure 5 and is referred to in the text as "spindle mode". In this mode of operation, the actuator (A1) is not powered and therefore remains in the same position. This is because the carousel plate of the carousel (X) is also fixed and the axis of rotation (R X This means that the actuator (A2) does not indicate rotation about the axis of rotation (R) in either the clockwise or counterclockwise direction. The angle of rotation (φ1) is set to a fixed value and does not change during this mode of operation. The actuator (A2) is powered and rotates about the axis of rotation (R) in either the clockwise or counterclockwise direction. Ym ) centered on the carousel (Y m ) and the rotation angle (ψ m ) changes over time. Thus, the gear, the gear stator, the gear spindle, and the spindle on which the substrate is mounted (Z p ) is the axis of rotation R Zp The rotation angle (ω p ) to rotate.

[0047] However, the variant using only one carousel (Y1) is non-limiting, and carousel X may be provided with m carousels (Y m ) (m ≠ 1) can also be installed.m The amount of is preferably selected such that 1≦m≦3.

[0048] Carousel (Y m The number of workpiece supports (n) mounted on the carousel (Y m ) has a number n of workpiece support parts (Z n ) (1≦n≦10).

[0049] According to a preferred embodiment, the carousel (Y m ) all have the same diameter d Ym d Yi =d Yj (1≦i, j≦m). However, according to another aspect of the present invention, the carousel (Y m ) have different diameters, e.g. d Yi ≠d Yj (1≦i, j≦m).

[0050] m=1 carousel (Y m ) are installed on the carousel (X), and n=4 workpiece holders (Z n ) is (Y m Considering an embodiment mounted on a carousel (Y ), the described platform can be used, for example, to perform different processes (pre- and post-treatments) and to apply different coating layers to the substrate. According to one embodiment shown in FIG. 6, m ) may, for example, be used with module T k 7, the carousel (X) can be placed in front of another module T , for example to apply a first coating layer. k+1 to, rotation axis (R X ) is rotated clockwise around an angle φ1=45°. Then, as shown in FIG. k-1The substrate can be further moved in a counterclockwise direction, for example, by φ1=90°, in front of the carousel (Y m This is possible because the carousel (X) is installed independently and rotatably on the carousel (Y m A substrate on the carousel (Y ) can be placed in front of one module until one of the process steps is completed. m ) is then rotated at a constant angular velocity (ψ m After the process step, the carousel (Y m ) can be moved to another module, and therefore a process step, by rotating the carousel (X) through an angle (φ1).

[0051] According to one aspect of the invention, the self-contained actuators are distributed. They may be mounted on a wall of the vacuum chamber, such as on or near the wall opposite the opening through which the workpiece is inserted into the chamber. Each actuator is then coupled to a rack wheel mounted on the outer periphery of the carousel, which meshes with another rack wheel mounted on the integration platform.

[0052] According to one aspect of the invention, the carousel is constructed as a carousel, such that the carousel is mounted on a base frame on wheels, and can then be transported to a vacuum processing system and inserted into the vacuum chamber by pushing the carousel into the chamber.

[0053] According to another aspect of the invention, the platform of the invention is used to coat a planar substrate with a coating of varying thickness in one dimension. This can be achieved, for example, by using a carousel with only m=1 (Y m), thus the carousel (Y1) is stopped in front of the coating source, so that (φ1) remains fixed. The carousel (Y1) loses thrust in front of the coating source, e.g. an arc or a sputter target. For example, (ψ1) may vary with time in a controlled manner. Using this method, convex coatings can be applied. Furthermore, using this method dye distributions can be produced, e.g. for decorative applications.

[0054] According to one aspect of the invention, the integrated platform of the invention is inserted into a vacuum chamber exhibiting a large height in order to coat widely elongated rod-shaped workpieces which could not be processed in a vacuum chamber of a smaller height.

[0055] According to one embodiment of the present invention shown in FIG. 9, on carousel X, there are m=3 carousels Y m are installed in a distributed manner. Three walls are installed vertically between m carousels Yi (1≦i≦m) and at approximately right angles on the top of carousel X. These walls are i The integrated platform has a height and width sufficient to completely separate each section on which it is installed from the adjacent sections. i A number k of processing sources T are selected to enable different processes on the substrate placed thereon. k The number of processing sources can be chosen, for example, so that k=3. This allows for the insertion of three different batches of substrates, which can be processed in different ways and in different orders, because they are shielded from the processing applied to the adjacent sections and thus to the batches of substrates. According to one aspect of the invention, the substrates are subjected to the same processing source T k , but the etching procedure applied to the substrate batches on carousel Y1 differs from the etching procedure applied to the substrate batches on carousels Y2 and Y1 by varying the processing time.

[0056] According to one embodiment, shown in FIG. 10, a machine having a coating chamber presenting a coating height of h=400 mm is equipped with an integrated platform of the invention. Said integrated platform comprises a carousel (X) on which are mounted m further carousels (Y m ) (e.g. m=8) are installed. If the platform is operated in "carousel mode", n workpiece supports (Z p )(1≦p≦n) is the carousel (Y m ) such that n≦m, preferably n=m, in this example n=8. Zm ) and (R Zp ) are overlapped. This allows the workpiece support to be parallel to the carousel (Y i ) is installed on the axis on which the d Ym =d Zn is applied. Carousel (X) is d X = 1000mm diameter. Workpiece support part (Z n ) are located on the outer edge of the carousel (X). With this configuration, the loading capacity of the described machine in this embodiment is 100%. When operated in the above-mentioned "carousel mode", the vacuum chamber is equipped with four process sources. The same machine with a height of h=400 mm may be equipped with the integrated platform of the present invention, and the carousel (X) has a diameter d X = 1000 mm. In contrast to the 100% loaded capacity case, there is m=1 carousel (Y m ) is installed on the carousel (Y1). n is installed. This results in a 50% on-board capacity. The number of processing sources is appropriately changed to 2 processing sources used for 50% on-board capacity. Comparing the two situations, the placement remains the same and the carousel (X) does not change. The on-board capacity causes the carousel (Y m ) of the workpiece support (Z n ), and the number of targets, Tk The number k of carousels (Y m ) maintains the required distance between the target and the substrate and rotates around the axis of rotation (R Ym ) at a constant angular velocity. The gear transmission ratio is adapted to the coating to be applied. The carousel (X) rotates around the carousel (Y i ) (0≦i≦m) from one position (one process step) to the next position (second process step) and move another carousel (Y j )(0≦j≦m, j≠I) with a carousel (Y i ) can be rotated at an angle (φ1) to move it into the position previously occupied by

[0057] Drawing numbering

[0058] [Table 1]

Claims

1. 1. A workpiece carrier device for holding a treatable workpiece to be introduced into a vacuum chamber of a vacuum processing system, comprising: - diameter (d Ｘ ) one carousel (X), - diameter (d Ｙｍ <d Ｘ ) with one or more carousels (Y ｍ )and, said one or more carousels (Y ｍ ) on the diameter (d Ｚｎ ≦d Ｙｍ ) having one or more workpiece supports (Z ｎ )and, a first actuator (A1) and a second actuator (A2), The actuators (A1), (A2) and the carousels (X) and (Y ｍ ) is introduced using a gear mechanism to allow at least two operating modes of the vacuum processing system; - Mode 1, actuator (A1) is powered, actuator (A2) is not powered, and the carousel (X) rotates around its central axis of rotation (R Ｘ ), resulting in a rotation about - Mode 2, actuator (A1) is not powered, actuator (A2) is powered, and the carousel (Y ｍ ) their central rotation axes (R Ｙｍ ) while the carousel (X) remains in place, The one carousel (Y ｍ ) or adjacent to said plurality of carousels (Y ｍ A wall is disposed between the one carousel (Y ｍ ) or adjacent to said plurality of carousels (Y ｍ ) and vertically installed on the top of the carousel (X), said walls indicating height and width. A workpiece carrier device comprising:

2. The carousel (X) has a surface area of ​​A Ｘ = π (d Ｘ / 2) ２ 2. The workpiece carrier device of claim 1, characterized in that it is circular in shape, as defined by:

3. The carousel (X) and the at least one carousel (Y ｍ ) is connected via a third gear mechanism, and when the workpiece carrier device is operated in mode 1, the at least one carousel (Y ｍ 3. The workpiece carrier device according to claim 1, wherein the second gear mechanism initiates the rotational movement via the third gear mechanism.

4. The first actuator (A1) is connected to the carousel (X) via a first gear mechanism, and the second actuator (A2) is connected to the at least one carousel (Y) via a second gear mechanism. ｍ 4. The workpiece carrier device according to claim 1, further comprising a workpiece holder.

5. The first actuator (A1) and / or the second actuator (A2) are designed as electromechanical actuators, and the rotational movement is controlled by applying a control voltage to the actuators (A1) and / or (A2) along the axis (R Ｘ ) and / or (R Ｙｍ 5. The workpiece carrier device according to claim 1, wherein the workpiece carrier device is generated around a central point.

6. 6. Workpiece carrier device according to claim 1, characterized in that the device is usable in pressure conditions below 1 mbar.

7. The carousel (X) and / or the one or more carousels (Y ｍ ), and / or the one or more workpiece supports (Z ｎ 7. The workpiece carrier device according to claim 1, wherein the first and second plates are planar.

8. The one or more carousels (Y ｍ ) is located entirely within the area of ​​the carousel (X) and / or the one or more workpiece supports (Z ｎ ) is entirely the one or more carousels (Y ｍ ) and the carousel (Y ｍ ) is the carousel (Y ｍ 8. The workpiece carrier device according to claim 1 , characterized in that it is installed on the outer edge of the carousel (X) such that the edges of (X) and (X) overlap.

9. 9. The workpiece carrier device according to claim 1 , characterized in that the first actuator (A1) and / or the second actuator (A2) are arranged below the carousel (X), opposite a placement area for the workpieces.

10. The axis of rotation (R Ｘ ) and (R Ｙｍ 10. The workpiece carrier device according to claim 1, wherein the first and second workpiece carriers are aligned parallel to one another.

11. The carousels (X), (Y ｍ ) and (Z ｎ 11. The workpiece carrier device according to claim 1, wherein the first and second workpiece carriers are aligned parallel to one another.

12. The carousel (X) and the one or more carousels (Y ｍ ) rotates around its axis (R) in either a clockwise or counterclockwise direction. Ｘ , R Ｙｍ ) and can rotate around the rotation angle (φ １ , φ ｍ 12. Workpiece carrier device according to claim 1, characterized in that: the load (load) can be set to any value.

13. The one or more carousels (Y ｍ ) is the diameter d Ｙｍ and / or the workpiece support part (Z ｎ ) diameter is 10% d Ｙｍ ≦d Ｚｎ ≦50%d Ｙｍ 13. Workpiece carrier device according to claim 1, characterized in that:

14. 14. Workpiece carrier device according to any one of claims 1 to 13, characterized in that the carousel (X) is constructed as a carousel sled, the carousel (X) being mounted on a base frame with wheels.

15. 15. Workpiece carrier device according to any one of the preceding claims, characterized in that said wall is mounted approximately at a right angle on the top of the carousel (X).

16. - a workpiece carrier device for transporting workpieces during the treatment according to any one of claims 1 to 15, - a chamber for the introduction of a workpiece carrier device according to any one of claims 1 to 15, at least one treatment device for treating said workpiece which is positionable in said workpiece carrier device;

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