Probe Card

Abstract

The present invention relates to a probe card for providing electrical connection between an object to be inspected and a circuit for generating an inspection signal, the probe card comprising: a plurality of electrically conductive contact probes; a probe head in which one ends of the plurality of contact probes are housed in a retractable manner with respect to the outside; a laminated member provided on a side of the probe head opposite to the side on which the contact probes extend to the outside, and laminated on the probe head; and a fastening member including a screw and a nut for fastening the probe head and the laminated member together. The screw comprises a head portion and a shaft portion passed through the probe head and the laminated member. The shaft portion is fixed to the probe head and is threadedly engaged with the nut at the end of the shaft portion opposite to the head portion to fasten the probe head and the laminated member together.

Description

[Technical field]

[0001] The present invention relates to a probe card. [Background technology]

[0002] In the semiconductor inspection process, a continuity test is sometimes performed at the wafer level before dicing to detect defective products. When performing a continuity test at the wafer level, a probe card that contains multiple conductive contact probes is used to transmit the test signal generated and output by the inspection device to the wafer (see, for example, Patent Documents 1 and 2).

[0003] The probe card includes contact probes, a probe head made of a thin, disk-shaped insulating material that houses and holds a plurality of contact probes in a predetermined pattern, a wiring board made of a disk-shaped insulating material and provided with a wiring layer for electrical connection with an inspection device, a plurality of connectors arranged radially from the center of the wiring board and connecting the wiring of the wiring board to the outside, and a reinforcing member made of a highly rigid material and attached to one side of the wiring board to reinforce the wiring board. The probe head and the reinforcing member are fastened together with screws. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2013-200266 A [Patent Document 2] Patent No. 5629545 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the above-mentioned probe card, if a screw becomes loose and protrudes from the probe head, there is a risk that the protruding screw will interfere with the wafer and cause damage to the wafer, or that the screw will fall off the probe head.

[0006] The present invention has been made in view of the above, and has an object to provide a probe card that can suppress protrusion of a screw from a probe head. [Means for solving the problem]

[0007] In order to solve the above-mentioned problems and achieve the object, the probe card of the present invention is a probe card that electrically connects a test subject and a circuit that generates a test signal, and includes a plurality of conductive contact probes, a probe head that houses one ends of the plurality of contact probes so that they can be freely advanced and retreated toward the outside, a laminated member that is provided on the side of the probe head opposite to the side where the contact probes extend outward and is laminated on the probe head, and a fastening member having a screw and a nut that fastens the probe head to the laminated member, wherein the screw has a head that is provided on the side of the probe head where the contact probes extend outward, and a shank that is inserted through the probe head and the laminated member and extends with a diameter smaller than that of the head, and the shank is fixed to the probe head and is screwed into the nut at the end side opposite to the head side to fasten the probe head to the laminated member.

[0008] In addition, in the above-mentioned probe card according to the present invention, the screw is fixed to the probe head by being screwed into the probe head.

[0009] In addition, the probe card of the present invention is characterized in that, in the above invention, the probe head has a main body portion and a holding portion having a through hole through which the shaft portion is inserted and having higher rigidity than the main body portion.

[0010] In addition, in the probe card according to the present invention, the holding portion is detachable from the probe head.

[0011] In addition, the probe card according to the present invention, in the above invention, is characterized in that it further comprises a second nut provided on the probe head on the opposite side to the head side of the screw and crimped to the probe head.

[0012] In addition, in the above-mentioned probe card according to the present invention, the probe head has a hole formed therein for accommodating the head portion.

[0013] In addition, the probe card of the present invention is characterized in that, in the above invention, the laminated member has a wiring board on the side opposite to the side where the contact probe of the probe head extends outward, and a wiring layer that establishes electrical connection with the test object is provided, and a reinforcing member provided on the side of the wiring board opposite the probe head side, reinforcing the strength of the wiring board. Effect of the Invention

[0014] According to the present invention, it is possible to suppress the protrusion of the screw from the probe head. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is an exploded perspective view showing the configuration of a probe card according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a partial cross-sectional view showing a configuration of a part of the probe card shown in FIG. [Diagram 3] FIG. 3 is an enlarged view of a region R shown in FIG. [Figure 4] FIG. 4 is a partial cross-sectional view of the probe card shown in FIG. 1, illustrating a configuration in which wiring boards having different thicknesses are provided. [Diagram 5] FIG. 5 is a partial cross-sectional view showing a configuration of a probe card according to a first modified example of the embodiment of the present invention. [Figure 6] FIG. 6 is a partial cross-sectional view showing a configuration of a probe card according to a second modification of the embodiment of the present invention. [Figure 7] FIG. 7 is a partial cross-sectional view showing a configuration of a probe card according to a third modification of the embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the following embodiments. Also, each drawing referred to in the following description merely shows the shape, size, and positional relationship in a schematic manner to the extent that the contents of the present invention can be understood, and therefore the present invention is not limited to only the shape, size, and positional relationship exemplified in each drawing.

[0017] Fig. 1 is an exploded perspective view showing the configuration of a probe card according to a first embodiment of the present invention. Fig. 2 is a partial cross-sectional view showing the configuration of a part of the probe card shown in Fig. 1. Fig. 3 is an enlarged view of a region R shown in Fig. 2. The probe card 1 shown in these figures is a device that holds, in a predetermined pattern, a plurality of conductive contact probes that electrically connect a wafer 100 to be inspected and an inspection device having a circuit structure that generates an inspection signal.

[0018] The probe card 1 comprises a plurality of contact probes 2 (hereinafter simply referred to as "probes 2"), a probe head 3 made of an insulating material that houses and holds the plurality of probes 2 in a predetermined pattern, a wiring board 4 made of an insulating material and provided with a wiring layer that provides electrical connection with an inspection device, a plurality of connectors (not shown) that connect the wiring of the wiring board 4 to the outside, a reinforcing member 6 made of a highly rigid material and attached to one side of the wiring board 4 to reinforce the strength of the wiring board 4, and screws 7 and nuts 8 that are provided between the probe head 3 and the reinforcing member 6 and fasten them together.

[0019] The probe 2 is long and is configured to be stretchable in the longitudinal direction. The probe 2 is formed using a conductive material. For example, the probe 2 may be configured with a plunger and a coil spring, a pogo pin, a wire probe that obtains a load by bending a wire into a bow shape, or a configuration in which a pipe member is attached to the tip of a conductive member such as a connection terminal (connector) that connects electrical contacts, or the like, and these probes may be appropriately combined.

[0020] The probe head 3 is disk-shaped and holds the probe 2 by inserting it therethrough. The probe head 3 holds one end of the probe 2 so that it can move forward and backward relative to the outside, with one end of the probe 2 that contacts the electrode of the wafer 100 protruding outward (see FIG. 2). The probe head 3 is formed, for example, by laminating a disk-shaped first member through which one end of the probe 2 is inserted, and a disk-shaped second member of the same diameter as the first member through which the other end of the probe 2 is inserted. The first and second members are fixed to each other at their respective edge ends by screws or adhesive.

[0021] Further, the probe head 3 is formed with an insertion hole 31 through which the screw 7 is inserted. The insertion hole 31 penetrates between the surface on the wiring board 4 side and the surface opposite to the wiring board 4 side. The insertion hole 31 has a first hole portion 31a formed in the surface opposite to the wiring board 4 side, and a second hole portion 31b formed in the surface on the wiring board 4 side and having a smaller diameter than the first hole portion 31a. The second hole portion 31b is screwed into the screw 7 and functions as a fixing portion that fixes the screw 7 to the probe head 3.

[0022] The probe head 3 is made of alumina (Al 2 O 3 ) and silicon nitride (Si 3 N 4 The probe head 3 may be formed using an insulating material such as ceramics, plastic resin, etc. The probe head 3 may be formed by coating the surface of a conductive material such as a metal with an insulating film.

[0023] The wiring board 4 is formed using an insulating material such as bakelite or epoxy resin, and has a wiring layer (wiring pattern) for electrically connecting the plurality of probes 2 to an inspection device formed three-dimensionally by vias or the like.

[0024] Furthermore, the wiring board 4 is formed with a hole 41 through which the screw 7 (shank 72) is inserted. The hole 41 penetrates between the surface on the probe head 3 side and the surface on the opposite side (the reinforcing member 6 side). The hole 41 has a diameter smaller than the diameter of the above-mentioned first hole 31a and larger than the diameter of the second hole 31b, and extends in the plate thickness direction.

[0025] The reinforcing member 6 is pressure-bonded to the wiring board 4. The reinforcing member 6 reinforces the strength of the wiring board 4 against warping or distortion caused by, for example, an external load or heat. The reinforcing member 6 is made of a highly rigid material such as anodized aluminum, stainless steel, Invar material, Kovar material (registered trademark), or duralumin.

[0026] The reinforcing member 6 is also formed with a notch 61 for accommodating a nut 8 and a hole 62 for inserting a part of a shaft 72 of the screw 7. The hole 62 penetrates between the surface on the wiring board 4 side and the surface on the opposite side. The diameter of the hole 62 is the same as the diameter of the hole 41, for example. In this embodiment, wiring board 4 and reinforcing member 6 form a laminated member.

[0027] The screw 7 has a disk-shaped head 71 and a rod-shaped shaft 72 whose diameter in a direction perpendicular to the longitudinal axis is smaller than that of the head 71. The shaft 72 has an uneven portion formed over the entire longitudinal axis direction for screwing with the nut 8. The screw 7 has a step formed at the boundary between the head 71 and the shaft 72 due to the difference in diameter. The head 71 is provided on the side of the probe head 3 where the probe 2 extends outward, and is housed in the first hole 31a.

[0028] Here, the fastening by the screw 7 and the nut 8 will be described with reference to Figs. 2 and 3. The screw 7 is fixed to the probe head 3 by screwing into the second hole 31b of the probe head 3, and fastens the probe head 3, the wiring board 4, and the reinforcing member 6 by screwing into the nut 8 arranged in the notch 61. At this time, the head 71 is pressed against the step formed by the first hole 31a and the second hole 31b. Also, the nut 8 is pressed against the step formed by the notch 61 and the hole 62. The step here has a surface that intersects with the longitudinal axis of the screw 7 (shank 72) when the screw 7 is attached to the probe head 3 or the like. At this time, it is preferable that this surface is perpendicular to the longitudinal axis of the screw 7.

[0029] In a state where the screw 7 is fixed to the probe head 3 (see FIG. 2), the head 71 is accommodated in the first hole portion 31a, and the screw 7 does not protrude from the surface of the probe head 3. The nut 8 is accommodated in the cutout portion 61, and the nut 8 does not protrude from the surface of the reinforcing member 6. The shaft portion 72 is not in contact with the inner circumferential surfaces of the hole portion 41 and the hole portion 62.

[0030] At this time, if the nut 8 rotates relative to the shaft portion 72 and loosens, the fastening force between the nut 8 and the head 71 may decrease, but since the shaft portion 72 is fixed to the second hole portion 31b by screwing, the screw 7 will not protrude from the surface of the probe head 3.

[0031] During testing using the probe card 1, one end of the probe 2 contacts an electrode of the wafer 100, while the other end of the probe 2 contacts an electrode of the wiring board 4. By contacting the wafer 100 and the wiring board 4 at both ends of the probe 2, respectively, a test signal is input from the wiring board 4 to the wafer 100 via the probe 2.

[0032] Furthermore, even if the wiring board 4 in the probe card 1 is replaced with another wiring board, for example, a wiring board having a thinner board thickness, the replaced wiring board, the probe head 3, and the reinforcing member 6 can be fastened without changing the specifications of the screws 7 and nuts 8.

[0033] 4 is a partial cross-sectional view of the probe card shown in FIG. 1, illustrating a configuration in which wiring boards of different thicknesses are arranged. The wiring board 4A shown in FIG. 4 is thinner than the wiring board 4. The wiring board 4A has a hole 42 through which the screw 7 (shank 72) is inserted. Like the hole 41, the hole 42 penetrates between the surface on the probe head 3 side and the surface on the opposite side (the reinforcing member 6 side). The hole 42 has a diameter smaller than the diameter of the first hole 31a described above and larger than the diameter of the second hole 31b, and extends in the plate thickness direction.

[0034] In a state where the screw 7 is fixed to the probe head 3 (see FIG. 4), the head 71 is accommodated in the first hole 31a, and the screw 7 does not protrude from the surface of the probe head 3. That is, when the wiring board 4 is replaced with the wiring board 4A, the insertion length of the shaft 72 into the nut 8 changes, but the head 71 does not protrude from the surface of the probe head 3. The nut 8 is accommodated in the cutout 61, and the nut 8 does not protrude from the surface of the reinforcing member 6. Furthermore, the shaft 72 is not in contact with the inner circumferential surfaces of the hole 42 and the second hole 62b.

[0035] According to the embodiment described above, in the screws 7 and nuts 8 that fasten the probe head 3, wiring board 4 (or 4A), and reinforcing member 6, the head 71 of the screw 7 is disposed on the probe head 3 side, and the nut 8 is disposed on the reinforcing member 6 side, and the shaft 72 and the probe head 3 (second hole portion 31b) are fixed by screwing. According to the embodiment, even if the nut 8 loosens, the fixed state between the probe head 3 and the screw 7 is maintained, so that protrusion of the screw 7 from the probe head 3 can be suppressed.

[0036] Furthermore, according to the embodiment, since the screw 7 is fixed to the probe head 3, even if the nut 8 is removed from the shaft portion 72 when replacing the wiring board, the screw 7 will not come off the probe head 3, and the members stacked on the probe head 3 can be easily replaced.

[0037] In the embodiment, the fixation between the screw 7 and the hole may be reinforced to the extent that the screw 7 can be replaced. For example, a relatively low-strength adhesive may be provided between the screw 7 and the hole to fix them together.

[0038] (Variation 1) 5 is a partial cross-sectional view showing the configuration of a probe card according to a first modified example of the embodiment of the present invention. The first modified example has the same configuration as the above-described embodiment, except that the configuration of the probe head 3 is changed. The same reference numerals are used to designate the same configuration as the above-described embodiment.

[0039] The probe head 3A according to the first modification includes a main body 32 that holds a plurality of probes 2, and a holding portion 33 that is provided at a portion through which the screw 7 is inserted. The configuration of the main body 32 is the same as that of the probe head 3 except for the region in which the holding portion 33 is formed.

[0040] The holding portion 33 has a higher rigidity than the main body portion 32. The holding portion 33 has an insertion hole 34 through which the screw 7 is inserted. The insertion hole 34 penetrates between the surface on the wiring board 4 side and the surface on the opposite side. The insertion hole 34 has a first hole portion 34a formed on the surface on the opposite side to the wiring board 4 side, and a second hole portion 34b formed on the surface on the wiring board 4 side and having a smaller diameter than the first hole portion 34a. The second hole portion 34b is screwed with the screw 7 and functions as a fixing portion that fixes the screw 7 to the probe head 3A. The holding portion 33 is made of, for example, a metal material. The thickness of the holding portion 33 is the same as the thickness of the main body portion 32.

[0041] The above-described first modification not only achieves the same effects as the above-described embodiment, but also makes it possible to more reliably fix the screw 7 to the probe head 3A by making the rigidity of the holding portion 33 greater than the rigidity of the main body portion 32.

[0042] (Variation 2) 6 is a partial cross-sectional view showing the configuration of a probe card according to a second modified example of the embodiment of the present invention. The second modified example has the same configuration as the embodiment described above, except that the configuration of the probe head 3 is changed. The same reference numerals are used to designate the same configuration as the embodiment described above.

[0043] The probe head 3B according to the second modification includes a main body 35 for holding a plurality of probes 2, and a holding portion 36 provided in a portion through which the screw 7 is inserted. The configuration of the main body 35 is the same as that of the probe head 3 except for the region in which the holding portion 36 is formed. The main body 35 is formed with a holding hole 37 for holding the holding portion 36. The holding hole 37 penetrates between the surface on the wiring board 4 side and the surface on the opposite side. The holding hole 37 has a first hole 37a formed on the side opposite the wiring board 4 side and having an opening larger than the head 71, a second hole 37b formed on the wiring board 4 side, and a third hole 37c formed between the first hole 37a and the second hole 37b and having a smaller diameter than the second hole 37b. In this second variant, a configuration in which the diameter of the second hole portion 37b is smaller than the diameter of the first hole portion 37a is described as an example, but the diameter of the second hole portion 37b may be equal to or larger than the diameter of the first hole portion 37a.

[0044] The retaining portion 36 has a higher rigidity than the main body portion 35. The retaining portion 36 has a cylindrical shape with a stepped outer periphery, and the shape of the outer periphery corresponds to the shape of the inner periphery of the retaining hole 37. The retaining portion 36 is provided so as to be detachable from the retaining hole 37. If there is no need to detach the retaining portion 36, the retaining portion 36 may be fixed to the main body portion 35 by press-fitting into the retaining hole 37 or by screwing or bonding.

[0045] Further, the holding portion 36 has an insertion hole 38 through which the screw 7 is inserted. The insertion hole 38 penetrates between the surface on the wiring board 4 side and the surface on the opposite side. The insertion hole 38 has a smaller diameter than the hole portion 41. At least a portion of the insertion hole 38 is screwed into the screw 7, and functions as a fixing portion that fixes the screw 7 to the probe head 3B. The holding portion 36 is made of, for example, a metal material. The thickness of the holding portion 36 is the same as the thickness of the holding portion of the main body portion 35 that the holding portion of the holding portion 36 is made of.

[0046] The above-described second modification not only provides the effects of the above-described embodiment, but also allows only the retaining portion 36 to be replaced in the probe head 3B. The shape of the inner circumferential surface of the retaining hole 37 is made larger in diameter on the wiring board 4 side than on the opposite side, and the retaining portion 36 is engaged with a step formed by the second hole portion 37b and the third hole portion 37c of the retaining hole 37, thereby making it possible to prevent the retaining portion 36 from coming off the probe head 3B when the probe card is assembled.

[0047] (Variation 3) 7 is a partial cross-sectional view showing the configuration of a probe card according to a third modified embodiment of the present invention. The same components as those in the above-mentioned embodiment are given the same reference numerals. The probe card according to the third modified embodiment includes a plurality of probes 2, a probe head 3, a wiring board 4B made of an insulating material and provided with a wiring layer for electrical connection with an inspection device, a plurality of connectors (not shown) for connecting the wiring of the wiring board 4B to the outside, a reinforcing member 6 formed of a highly rigid material and attached to one side of the wiring board 4 to reinforce the strength of the wiring board 4B, a screw 7 and a nut 8 (first nut) provided between the probe head 3 and the reinforcing member 6 and fastening them together, and a nut 9 (second nut) provided on the wiring board 4B side of the probe head 3, in other words, on the opposite side of the head 71 side of the screw 7 in the probe head 3, and screwed into the screw 7.

[0048] The wiring board 4B of the third modified example is formed using an insulating material such as bakelite or epoxy resin, similar to the wiring board 4, and a wiring layer for electrically connecting a plurality of contact probes 2 to an inspection device is formed three-dimensionally using vias or the like.

[0049] The wiring board 4B is also formed with a hole 43 into which the screw 7 (shank 72) is inserted and into which the nut 9 is located. The hole 43 penetrates between the surface on the probe head 3 side and the surface on the opposite side (the reinforcing member 6 side). The hole 43 has a diameter larger than the diameter of the outer periphery of the nut 9 and extends in the plate thickness direction.

[0050] The nut 9 is located inside the hole 43 and is screwed onto the shaft 72 to be pressure-fitted to the probe head 3 .

[0051] In the above-described modified example 3, in the configuration for fastening the probe head 3, the wiring board 4B, and the reinforcing member 6, the head 71 of the screw 7 is disposed on the probe head 3 side, and the nut 8 is disposed on the reinforcing member 6 side for fastening, and the shaft portion 72 and the probe head 3 (second hole portion 31b) are fixed by screwing, and the nut 9 is provided on the side of the probe head 3 opposite to the head 71 side and is pressed against the probe head 3. According to this modified example 3, even if the nut 8 is loosened, the fixed state between the probe head 3 and the screw 7 is maintained, so that the protrusion of the screw 7 from the probe head 3 can be suppressed. Furthermore, in the modified example 3, the nut 9 is pressed against the probe head 3, and the probe head 3 is sandwiched between the head 71 and the nut 9, so that the protrusion of the screw 7 from the probe head 3 can be more reliably suppressed compared to the above-described embodiment.

[0052] In the above-described embodiment and modified examples, the screw 7 is described as being fixed to the probe head 3 by screwing into the probe head 3, but this is not limited thereto, and the screw 7 may be fixed to the probe head 3 by press-fitting or adhesive bonding.

[0053] Moreover, the above-mentioned embodiment and modified example can be applied to a probe card that does not have the reinforcing member 6. In this case, the nut 8 is pressed onto the wiring board. A stepped hole shape such as the notch portion 61 and the hole portion 62 may be formed in the wiring board.

[0054] In the above-mentioned embodiment and modified examples, the head 71 has been described as being accommodated in the hole (first hole) of the probe head, but a notch formed by cutting out the side of the hole may be provided instead of the first hole, or the head 71 may be exposed to the outer surface of the probe head and pressed against the outer surface without providing the first hole. Even in this case, the head 71 is prevented from moving from the fastening position to the outside of the probe head due to loosening of the nut 8 by fixing the shaft 72 to the probe head.

[0055] In addition, in the above-mentioned embodiment and modified examples, the nut 8 has been described as being accommodated in the cutout portion of the reinforcing member 6, but instead of the cutout portion, a hole portion without a notch may be provided on the hole side, or a configuration may be used in which the nut 8 is exposed to the outer surface of the reinforcing member and is crimped to the outer surface without providing a cutout portion.

[0056] In this manner, the present invention may include various embodiments not described here, and various design modifications may be made without departing from the technical idea defined by the claims. [Industrial Applicability]

[0057] As described above, the probe card according to the present invention is suitable for suppressing the protrusion of the screw from the probe head. [Explanation of symbols]

[0058] 1 Probe card 2 Contact Probe 3, 3A, 3B Probe Head 4, 4A, 4B Wiring board 6 Reinforcement members 7 Screws 8, 9 Nuts 31, 34, 38 Insertion holes 35 Main body 36 Holding part 37 Retaining hole 41, 42, 43, 62 holes 61 Notch

Claims

1. A probe card for electrically connecting a test object and a circuit for generating a test signal, A plurality of conductive contact probes; a probe head that accommodates one ends of the plurality of contact probes so as to be able to freely advance and retreat relative to the outside; a laminate member provided on a side of the probe head opposite to a side from which the contact probes extend outward, the laminate member being laminated on the probe head; a fastening member having a screw and a nut for fastening the probe head and the laminated member; Equipped with The screw is a head portion provided on a side of the probe head where the contact probe extends outward; a shaft portion that is inserted through the probe head and the laminated member and extends with a diameter smaller than a diameter of the head portion; having The probe head includes: A main body portion, a holder having a through hole through which the shaft portion is inserted, the holder having higher rigidity than the main body, and being detachable from the probe head; having The shaft portion is a head portion of the probe head and a nut at an end portion of the probe head opposite the head portion of the probe head, the nut being screwed into the head portion of the probe head and the nut to fasten the probe head and the laminated member together; A probe card comprising:

2. A probe card for electrically connecting a test object and a circuit for generating a test signal, A plurality of conductive contact probes; a probe head that accommodates one ends of the plurality of contact probes so as to be able to freely advance and retreat relative to the outside; a laminate member provided on a side of the probe head opposite to a side from which the contact probes extend outward, the laminate member being laminated on the probe head; a fastening member having a screw and a first nut for fastening the probe head and the laminated member; a second nut that is threadedly engaged with the screw; Equipped with The screw is a head portion provided on a side of the probe head where the contact probe extends outward; a shaft portion that is inserted through the probe head and the laminated member and extends with a diameter smaller than a diameter of the head portion; having the second nut is provided on the probe head on the opposite side to the head side of the screw and is press-fitted to the probe head; The shaft portion is a first nut that is fixed to the probe head and that is screwed into the first nut at an end side opposite to the head side to fasten the probe head and the laminated member; A probe card comprising:

3. The screw is fixed to the probe head by screwing onto the probe head; 3. The probe card according to claim 1, wherein the probe card is a conductive material.

4. a second nut provided on the probe head on the opposite side to the head side of the screw and pressed against the probe head; The probe card of claim 1 further comprising:

5. 5. The probe card according to claim 1, wherein the probe head has a hole for accommodating the head portion.

6. The laminated member is a wiring board provided on a side of the probe head opposite to a side on which the contact probe extends to the outside, the wiring board having a wiring layer for electrically connecting the probe head to the test object; a reinforcing member provided on a side of the wiring board opposite to the probe head side, the reinforcing member reinforcing the strength of the wiring board; 6. The probe card according to claim 1, further comprising:

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