Heat treatment apparatus and heat treatment method

Abstract

To provide a technology capable of reducing temperature variations between surfaces.SOLUTION: A heat treatment device includes a cylindrical treatment container, a heating unit that heats the treatment container, and a cooling unit that cools the treatment container. The cooling unit includes: a plurality of discharge holes provided at intervals in a longitudinal direction of the treatment container and discharging cooling fluid toward the treatment container; a branching unit that branches the cooling fluid to a plurality of flow paths communicating with the plurality of discharge holes; and a blower that is provided corresponding to each of the plurality of flow paths and feeds the cooling fluid into the discharge holes of the corresponding flow paths.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a heat treatment apparatus and a heat treatment method.

Background Art

[0002] There is known a heat treatment apparatus provided with a plurality of discharge holes that are provided along the longitudinal direction of a processing container and blow out a cooling fluid toward the processing container (see, for example, Patent Document 1). In Patent Document 1, the flow rate of the cooling fluid is controlled by opening and closing the plurality of discharge holes with a shutter mechanism.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique capable of reducing temperature variations between surfaces.

Means for Solving the Problems

[0005] A heat treatment apparatus according to an aspect of the present disclosure includes a cylindrical processing container, a heating unit that heats the processing container, and a cooling unit that cools the processing container. The cooling unit is provided at intervals in the longitudinal direction of the processing container, and includes a plurality of discharge holes that discharge a cooling fluid toward the processing container, a branch unit that diverts the cooling fluid into a plurality of flow paths that communicate with the plurality of discharge holes, and blowers provided corresponding to each of the plurality of flow paths and sending the cooling fluid into the discharge holes of the corresponding flow path. and the branch portion includes a plurality of branch chambers arranged in multiple stages .

Effects of the Invention

[0006] According to the present disclosure, temperature variations between surfaces can be reduced.

Brief Description of the Drawings

[0007]

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Best Mode for Carrying Out the Invention

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding members or components are denoted by the same or corresponding reference numerals, and redundant descriptions are omitted.

[0009] 〔First Embodiment〕 (Heat Treatment Apparatus) Referring to FIGS. 1 to 3, an example of the heat treatment apparatus 1 according to the first embodiment will be described.

[0010] The heat treatment apparatus 1 according to the first embodiment includes a processing container 10, a heating unit 30, a cooling unit 50, a temperature detection unit 70, a control unit 90, and the like.

[0011] The processing container 10 is a cylindrical container that houses a boat (not shown). The boat holds a plurality of substrates at intervals in the height direction. The substrate is, for example, a semiconductor wafer. The processing container 10 may have a single-tube structure or a double-tube structure. The processing container 10 is formed of a heat-resistant material such as quartz, for example. The inside of the processing container 10 is depressurized by an exhaust unit (not shown). The exhaust unit includes a pressure regulating valve, a vacuum pump, and the like. Various gases are introduced into the processing container 10 by a gas supply unit (not shown). The gas supply unit includes an on-off valve, a flow controller, and the like. The various gases include, for example, processing gases such as film-forming gases and etching gases, and purge gases such as inert gases.

[0012] The heating unit 30 is provided around the processing container 10 and heats the substrates inside the processing container 10. The heating unit 30 includes a heat insulating member 31, a heating element 32, and the like.

[0013] The heat insulating member 31 has a cylindrical shape. The heat insulating member 31 forms a space A between the outer wall of the processing container 10. The heat insulating member 31 is formed mainly of silica and alumina. However, the shape and material of the heat insulating member 31 are not limited.

[0014] The heating element 32 has a linear shape and is provided in a spiral or serpentine shape on the inner wall of the heat insulating member 31. The heating element 32 generates heat according to the magnitude of the electric power (hereinafter also referred to as "heater power") supplied from a power source (not shown). The heating element 32 is preferably divided into a plurality of zones in the height direction of the processing container 10. Thereby, the temperature can be independently controlled for each zone.

[0015] Further, the heating unit 30 preferably has a metal outer skin such as stainless steel that covers the outer periphery of the heat insulating member 31. This can reinforce the heat insulating member 31 and maintain its shape. Also, the heating unit 30 preferably has a water-cooled jacket that covers the outer periphery of the outer skin. This can suppress the heat influence on the outside of the heat insulating member 31.

[0016] The cooling unit 50 cools the processing vessel 10 by supplying a cooling fluid to the space A. The cooling fluid is, for example, air. The cooling unit 50 includes a fluid flow path 51, an on-off valve 52, an air flow meter 53, a heat exchanger 54, a branch portion 55, blowers 56a to 56f, discharge holes 57a to 57f, etc.

[0017] One end of the fluid flow path 51 communicates with the space A above the uppermost discharge hole 57f, and the other end is branched into six flow paths 51a to 51f by the branch portion 55 and communicates with the discharge holes 57a to 57f. In the fluid flow path 51, the on-off valve 52, the air flow meter 53, the heat exchanger 54, the branch portion 55, and the blowers 56a to 56f are provided in this order from one end side.

[0018] The on-off valve 52 opens and closes the fluid flow path 51. When the on-off valve 52 is opened, the cooling fluid heat-recovered in the space A flows into the fluid flow path 51. When the on-off valve 52 is closed, the flow of the cooling fluid heat-recovered in the space A into the fluid flow path 51 is blocked.

[0019] The air flow meter 53 detects the air volume of the cooling fluid flowing through the fluid flow path 51. The air flow meter 53 transmits the detected value to the control unit 90.

[0020] The heat exchanger 54 cools the cooling fluid flowing through the fluid flow path 51.

[0021] The branch portion 55 branches the fluid flow path 51 into six flow paths 51a to 51f. The branch portion 55 includes a two-way chamber 55a and three-way chambers 55b, 55c.

[0022] The two-way branch chamber 55a branches the fluid flow path 51 into two flow paths. Inside the two-way branch chamber 55a, as shown in Fig. 2(a), it is preferable that a partition plate 55a1 is provided along the direction of the flow of the cooling fluid. Thereby, the reverse flow of the cooling fluid can be suppressed.

[0023] The three-way branch chamber 55b is provided at the subsequent stage of the two-way branch chamber 55a and branches one of the flow paths branched by the two-way branch chamber 55a into three flow paths 51a to 51c. The three-way branch chamber 55c is provided at the subsequent stage of the two-way branch chamber 55a and branches the other flow path branched by the two-way branch chamber 55a into three flow paths 51d to 51f. Inside the three-way branch chambers 55b and 55c, it is preferable that partition plates (not shown) are provided along the direction of the flow of the cooling fluid respectively. Thereby, the reverse flow of the cooling fluid can be suppressed.

[0024] In the example of Fig. 1, the case where the fluid flow path 51 is branched into six flow paths 51a to 51f by one two-way branch chamber 55a and two three-way branch chambers 55b and 55c provided at the subsequent stage of the two-way branch chamber 55a has been described, but it is not limited thereto. For example, as shown in Fig. 3(a), the fluid flow path 51 may be branched into six flow paths 51a to 51f by one three-way branch chamber 55d and three two-way branch chambers 55e to 55g provided at the subsequent stage of the three-way branch chamber 55d. Further, for example, as shown in Fig. 3(b), the fluid flow path 51 may be branched into six flow paths 51a to 51f by one six-way branch chamber 55h. In this way, the branching portion 55 may be in a form in which the fluid flow path 51 is branched into six flow paths 51a to 51f by a plurality of branching chambers arranged in multiple stages, or may be in a form in which the fluid flow path 51 is branched into six flow paths 51a to 51f by one branching chamber. Further, for example, as shown in Fig. 3(c), the fluid flow path 51 may be branched into six flow paths 51a to 51f by one branching box 55i.

[0025] Blowers 56a to 56f are provided corresponding to each of the plurality of flow paths 51a to 51f, and send cooling fluid into the discharge holes 57a to 57f of the corresponding flow paths 51a to 51f. Blowers 56a to 56f are independently controlled by the control unit 90. The rotation speed of blowers 56a to 56f changes according to the supplied voltage. For example, the higher the supplied voltage to blowers 56a to 56f, the higher the rotation speed, and thereby the air volume of the cooling fluid sent into the discharge holes 57a to 57f becomes larger.

[0026] The discharge holes 57a to 57f are provided at intervals in the longitudinal direction of the processing container 10, and discharge the cooling fluid in a substantially horizontal direction toward the processing container 10. The discharge holes 57a to 57f are formed at the other ends of the flow paths 51a to 51f respectively, penetrating through the heat insulating member 31. The discharge holes 57a to 57f are provided corresponding to each of the heating elements 32 divided into six zones.

[0027] In such a cooling unit 50, the cooling fluid heat-recovered in the space A flows into the fluid flow path 51 and is cooled by the heat exchanger 54 interposed in the fluid flow path 51. The cooled cooling fluid is branched into six flow paths 51a to 51f at the branch portion 55, and is sent into the respective discharge holes 57a to 57f by blowers 56a to 56f in each of the flow paths 51a to 51f, and is discharged from each of the discharge holes 57a to 57f into the space A. The cooling fluid discharged into the space A cools the processing container 10.

[0028] The temperature detection unit 70 detects the temperature inside the processing container 10. The temperature detection unit 70 is, for example, a thermocouple and includes six temperature measurement units 71a to 71f. The temperature measurement units 71a to 71f are provided corresponding to each of the heating elements 32 divided into six zones. Note that the temperature detection unit 70 may be provided in the space A outside the processing container 10 to detect the temperature of the space A.

[0029] The control unit 90 may be, for example, a computer. The control unit 90 controls the operations of each part of the heat treatment apparatus 1. The program of the computer that performs the operations of each part of the heat treatment apparatus 1 is stored in a storage medium. The storage medium may be, for example, a flexible disk, a compact disk, a hard disk, a flash memory, a DVD, or the like.

[0030] For example, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f according to the heat treatment conditions implemented in the heat treatment apparatus 1, and adjusts the temperature inside the processing container 10.

[0031] (Heat treatment method) Referring to FIG. 4, an example of the heat treatment method of the first embodiment will be described. The heat treatment method of the first embodiment is implemented, for example, by the control unit 90 controlling the operations of each part of the heat treatment apparatus 1. Hereinafter, in the heat treatment apparatus 1, the height regions corresponding to the discharge holes 57a, 57b, 57c, 57d, 57e, and 57f are referred to as the bottom region (BTM), the first center region (CTR-1), the second center region (CTR-2), the third center region (CTR-3), the fourth center region (CTR-4), and the top region (TOP), respectively.

[0032] As shown in FIG. 4, the heat treatment method includes, for example, performing a low-temperature treatment, a temperature-rising recovery treatment, and a controlled cooling treatment in this order.

[0033] The low-temperature treatment includes performing a treatment on the substrate accommodated in the processing container 10 while maintaining the inside of the processing container 10 at a low temperature T1. For example, in the low-temperature treatment, the control unit 90 performs tilt control in which the control temperature of one region, for example, the top region (TOP), is set lower than the control temperatures of the other regions (BTM, CTR-1 to 4). In the low-temperature treatment, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f, and adjusts the temperature inside the processing container 10 to the low temperature T1. The low temperature T1 may be, for example, 30°C to 100°C.

[0034] The temperature increase recovery process includes changing the inside of the processing container 10 from a low temperature T1 to a high temperature T2 and stabilizing the inside of the processing container 10 at the high temperature T2. For example, in the temperature increase recovery process, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f, and changes and stabilizes the temperature inside the processing container 10 from the low temperature T1 to the high temperature T2. The high temperature T2 may be, for example, 600°C to 1000°C.

[0035] The controlled cooling process includes changing the inside of the processing container 10 from the high temperature T2 to a predetermined temperature T3 lower than the high temperature T2 and stabilizing the inside of the processing container 10 at the predetermined temperature T3. For example, in the controlled cooling process, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f, and changes and stabilizes the temperature inside the processing container 10 from the high temperature T2 to the predetermined temperature T3. The predetermined temperature T3 may be, for example, 100°C to 600°C.

[0036] As described above, according to the heat treatment apparatus 1 of the first embodiment, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f. Thereby, since the amount of the cooling fluid discharged can be adjusted for each region, the temperature variation (temperature variation between surfaces) in the height direction of the processing container 10 can be reduced.

[0037] For example, in low-temperature processing, tilt control may be performed to set the control temperature of one area, for example, the top area, lower than the control temperature of other areas. In this case, the control unit 90 controls the heater power for the heating element 32 corresponding to the top area to be smaller than the heater power for other heating elements 32. However, in low-temperature processing, the heater power for the heating element 32 corresponding to the top area may be in a state of 0%, and the temperature of the top area of the space A may not be controlled to the control temperature. Therefore, when performing low-temperature processing in the heat treatment apparatus 1, the control unit 90 controls the voltage supplied to the blower 56f provided corresponding to the top area to be larger than the voltage supplied to the blowers 56a to 56e provided corresponding to other areas. Thereby, the air volume of the cooling fluid discharged to the upper part of the space A becomes larger than the air volume of the cooling fluid discharged to the central part and the lower part of the space A. Therefore, the upper part of the space A can be efficiently cooled with respect to the central part and the lower part of the space A, and it is possible to prevent the heater power for the heating element 32 corresponding to the top area from becoming 0%. As a result, the temperature controllability at low temperatures is improved.

[0038] For example, in controlled cooling processing, variations may occur in the inter-surface temperature during cooling. Therefore, when performing controlled cooling processing in the heat treatment apparatus 1, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f so that the detected temperatures of the respective areas become the same. Thereby, variations in the inter-surface temperature during cooling can be reduced.

[0039] For example, in warm-up recovery processing, due to differences in component individual differences, assembly errors, equipment usage environments, etc. among a plurality of heat treatment apparatuses 1, the overshoot characteristics of one area, for example, the top area, may differ among the plurality of heat treatment apparatuses 1. Therefore, when performing warm-up recovery processing in the heat treatment apparatus 1, the control unit 90 controls the heating unit 30 based on the detected temperature of the temperature detection unit 70 while independently controlling the voltage supplied to each of the blowers 56a to 56f so that the detected temperatures of the top area are the same among the heat treatment apparatuses 1. Thereby, the overshoot difference of the top area during warm-up can be reduced.

[0040] 〔Second Embodiment〕 Referring to FIG. 5, an example of the heat treatment apparatus 1A according to the second embodiment will be described.

[0041] The heat treatment apparatus 1A according to the second embodiment is different from the heat treatment apparatus 1 in that backflow prevention valves 58a to 58f are provided corresponding to each of the plurality of flow paths 51a to 51f. Note that other configurations may be the same as those of the heat treatment apparatus 1. Hereinafter, the description will focus on the differences from the heat treatment apparatus 1.

[0042] The backflow prevention valves 58a to 58f are provided corresponding to each of the plurality of flow paths 51a to 51f. The backflow prevention valves 58a to 58f prevent the backflow of the cooling fluid from the discharge holes 57a to 57f of the corresponding flow paths 51a to 51f to the blowers 56a to 56f. The backflow prevention valves 58a to 58f are, for example, opening degree adjustment valves, and the conductance of the flow paths 51a to 51f is adjusted by controlling the opening degree.

[0043] The control unit 90 independently controls the backflow prevention valves 58a to 58f according to the operations of the blowers 56a to 56f. For example, when one or more of the six blowers 56a to 56f are stopped and the rest are operated, the control unit 90 controls to open the backflow prevention valve corresponding to the operating blower and close the backflow prevention valve corresponding to the stopped blower.

[0044] According to the heat treatment apparatus 1A of the second embodiment described above, since it has the same configuration as the heat treatment apparatus 1 of the first embodiment, the same effects as those of the heat treatment apparatus 1 of the first embodiment can be achieved.

[0045] Also, according to the heat treatment apparatus 1A of the second embodiment, the control unit 90 independently controls the backflow prevention valves 58a to 58f according to the operations of the blowers 56a to 56f. For example, the control unit 90 controls to open the backflow prevention valve corresponding to the operating blower and close the backflow prevention valve corresponding to the stopped blower among the blowers 56a to 56f. Thereby, it is possible to prevent the cooling fluid discharged from the discharge hole corresponding to the operating blower from flowing back into the flow path corresponding to the stopped blower.

[0046] 〔Third Embodiment〕 With reference to FIG. 6, an example of the heat treatment apparatus 1B of the third embodiment will be described.

[0047] The heat treatment apparatus 1B of the third embodiment is different from the heat treatment apparatus 1 in that it monitors the reverse flow of the cooling fluid based on at least one of the detected values of the pressure sensors 59a to 59f and the temperature sensors 60a to 60f provided corresponding to each of the plurality of flow paths 51a to 51f. Note that other configurations may be the same as those of the heat treatment apparatus 1. Hereinafter, the description will focus on the differences from the heat treatment apparatus 1.

[0048] The pressure sensors 59a to 59f are provided corresponding to each of the plurality of flow paths 51a to 51f. The pressure sensors 59a to 59f detect pressure data (an example of characteristic values) including the magnitude relationship between the suction-side pressure and the discharge-side pressure of the blowers 56a to 56f provided in the corresponding flow paths 51a to 51f, and transmit the detected values to the control unit 90. The pressure data may be, for example, the differential pressure between the suction side and the discharge side of the blowers 56a to 56f (the differential pressure before and after the blowers 56a to 56f), or may be the suction-side and discharge-side pressures of the blowers 56a to 56f.

[0049] The temperature sensors 60a to 60f are provided corresponding to each of the plurality of flow paths 51a to 51f. The temperature sensors 60a to 60f detect the temperature (an example of characteristic values) of the cooling fluid flowing through the corresponding flow paths 51a to 51f, and transmit the detected values to the control unit 90.

[0050] The control unit 90 monitors the reverse flow of the cooling fluid based on the detected values of at least any one of the pressure sensors 59a to 59f and the temperature sensors 60a to 60f. For example, when the pressure on the discharge side of one or more blowers 56a to 56f is lower than the pressure on the suction side, the control unit 90 determines that a reverse flow of the cooling fluid has occurred. Also, for example, when the temperature after operating the blowers 56a to 56f is higher than the temperature before operating the blowers 56a to 56f for one or more flow paths 51a to 51f, the control unit 90 determines that a reverse flow of the cooling fluid has occurred. Further, when the control unit 90 determines that a reverse flow of the cooling fluid has occurred, it notifies the user that the heat treatment apparatus 1 is abnormal.

[0051] According to the heat treatment apparatus 1B of the third embodiment described above, since it has the same configuration as the heat treatment apparatus 1 of the first embodiment, it can achieve the same effects as the heat treatment apparatus 1 of the first embodiment.

[0052] Also, according to the heat treatment apparatus 1B of the third embodiment, the control unit 90 monitors the reverse flow of the cooling fluid based on the detected values of at least any one of the pressure sensors 59a to 59f and the temperature sensors 60a to 60f provided corresponding to each of the plurality of flow paths 51a to 51f. Thereby, the user can easily confirm the reverse flow of the cooling fluid.

[0053] 〔Fourth Embodiment〕 With reference to FIG. 7, an example of the heat treatment apparatus 1C of the fourth embodiment will be described.

[0054] The heat treatment apparatus 1C of the fourth embodiment is different from the heat treatment apparatus 1 in that it monitors the reverse flow of the cooling fluid based on the detected values of at least any one of the flow meters 61a to 61f and the temperature sensors 62a to 62f provided corresponding to each of the plurality of flow paths 51a to 51f. Note that other configurations may be the same as those of the heat treatment apparatus 1. Hereinafter, the description will focus on the differences from the heat treatment apparatus 1.

[0055] The flow meters 61a to 61f are the first flow meter 61a 1 ~61f 1 and the second flow meter 61a2 ~61f 2 includes.

[0056] The first flowmeter 61a 1 ~61f 1 is provided corresponding to each of the plurality of flow paths 51a to 51f. The first flowmeter 61a 1 ~61f 1 detects the flow rate (an example of a characteristic value) of the cooling fluid sent from the blowers 56a to 56f to the discharge holes 57a to 57f through the corresponding flow paths 51a to 51f, and transmits the detected value to the control unit 90. Hereinafter, the flow from the blowers 56a to 56f to the discharge holes 57a to 57f is also referred to as the forward flow.

[0057] The second flowmeter 61a 2 ~61f 2 is provided corresponding to each of the plurality of flow paths 51a to 51f. The second flowmeter 61a 2 ~61f 2 detects the flow rate (an example of a characteristic value) of the cooling fluid flowing from the discharge holes 57a to 57f toward the blowers 56a to 56f through the corresponding flow paths 51a to 51f, and transmits the detected value to the control unit 90. Hereinafter, the flow from the discharge holes 57a to 57f toward the blowers 56a to 56f is also referred to as the reverse flow.

[0058] The control unit 90 monitors the cooling fluid based on the detected values of at least any one of the flowmeters 61a to 61f and the temperature sensors 62a to 62f. For example, for one or more of the flow paths 51a to 51f, the control unit 90 determines that reverse flow of the cooling fluid has occurred when the detected value of the second flowmeter 61a 2 ~61f 2 is greater than the detected value of the first flowmeter 61a 1 ~61f 1 Also, for example, the control unit 90 determines that reverse flow of the cooling fluid has occurred when the temperature after operating the blowers 56a to 56f is higher than the temperature before operating the blowers 56a to 56f for one or more of the flow paths 51a to 51f. Further, when the control unit 90 determines that reverse flow of the cooling fluid has occurred, it notifies the user that the heat treatment apparatus 1 is abnormal.

[0059] According to the heat treatment apparatus 1C of the fourth embodiment described above, since it has the same configuration as the heat treatment apparatus 1 of the first embodiment, it can achieve the same effects as the heat treatment apparatus 1 of the first embodiment.

[0060] Further, according to the heat treatment apparatus 1C of the fourth embodiment, the control unit 90 monitors the reverse flow of the cooling fluid based on at least one of the detection values of the flow meters 61a to 61f and the temperature sensors 62a to 62f provided corresponding to each of the plurality of flow paths 51a to 51f. Thereby, the user can easily confirm the reverse flow of the cooling fluid.

[0061] In the above embodiment, the case where the flow meters 61a to 61f detect the forward flow as the first flow meters 61a 1 ~61f 1 and detect the reverse flow as the second flow meters 61a 2 ~61f 2 has been described, but it is not limited thereto. For example, a configuration in which one flow meter, for example, an ultrasonic flow meter, detects both the forward flow and the reverse flow may be used.

[0062] 〔Fifth Embodiment〕 Referring to FIG. 8, an example of the heat treatment apparatus 1D of the fifth embodiment will be described.

[0063] The heat treatment apparatus 1D of the fifth embodiment is different from the heat treatment apparatus 1 in that it adjusts the internal pressure (heater internal pressure) of the space A based on at least one of the detection values of the pressure sensors 63a to 63f and the temperature sensors 64a to 64f provided corresponding to each of the plurality of flow paths 51a to 51f. Note that other configurations may be the same as those of the heat treatment apparatus 1. Hereinafter, the description will focus on the differences from the heat treatment apparatus 1.

[0064] The heat treatment apparatus 1D of the fifth embodiment further includes pressure sensors 63a to 63f, temperature sensors 64a to 64f, suction side slits 65a to 65f, and discharge side slits 66a to 66f with respect to the heat treatment apparatus 1.

[0065] The pressure sensors 63a to 63f are provided corresponding to each of the plurality of flow paths 51a to 51f. The pressure sensors 63a to 63f detect pressure data (an example of characteristic values) including the magnitude relationship between the suction-side pressure and the discharge-side pressure of the blowers 56a to 56f provided in the corresponding flow paths 51a to 51f, and transmit the detected values to the control unit 90. The pressure data may be, for example, the differential pressure between the suction side and the discharge side of the blowers 56a to 56f (the differential pressure before and after the blowers 56a to 56f), or may be the pressures on the suction side and the discharge side of the blowers 56a to 56f.

[0066] The temperature sensors 64a to 64f are provided corresponding to each of the plurality of flow paths 51a to 51f. The temperature sensors 64a to 64f detect the temperature of the cooling fluid flowing through the corresponding flow paths 51a to 51f (an example of characteristic values), and transmit the detected values to the control unit 90.

[0067] The suction-side slits 65a to 65f are provided on the suction side of the blowers 56a to 56f provided in the corresponding flow paths 51a to 51f. The suction-side slits 65a to 65f are configured to be openable and closable. When the suction-side slits 65a to 65f are opened, air flows into the corresponding flow paths 51a to 51f from the outside, and the internal pressure of the heater can be adjusted in the positive pressure direction.

[0068] The discharge-side slits 66a to 66f are provided on the discharge side of the blowers 56a to 56f provided in the corresponding flow paths 51a to 51f. The discharge-side slits 66a to 66f are configured to be openable and closable. When the discharge-side slits 66a to 66f are opened, the cooling fluid flows out from the corresponding flow paths 51a to 51f to the outside, and the internal pressure of the heater can be adjusted in the negative pressure direction.

[0069] The control unit 90 adjusts the internal pressure of the heater by controlling the opening and closing of the suction side slits 65a to 65f and the discharge side slits 66a to 66f based on the detected values of at least one of the pressure sensors 63a to 63f and the temperature sensors 64a to 64f. For example, when the internal pressure of the heater is higher than the atmospheric pressure, the control unit 90 opens the discharge side slits 66a to 66f to adjust the internal pressure of the heater in the direction of negative pressure, and controls the internal pressure of the heater to the atmospheric pressure or a pressure slightly lower than the atmospheric pressure. Thereby, it is possible to suppress the cooling fluid in the high-temperature space A from leaking to the outside.

[0070] According to the heat treatment apparatus 1D of the fifth embodiment described above, since it has the same configuration as the heat treatment apparatus 1 of the first embodiment, it is possible to achieve the same effects as the heat treatment apparatus 1 of the first embodiment.

[0071] Further, according to the heat treatment apparatus 1D of the fifth embodiment, the control unit 90 adjusts the internal pressure (the internal pressure of the heater) of the space A based on the detected values of at least one of the pressure sensors 63a to 63f and the temperature sensors 64a to 64f provided corresponding to each of the plurality of flow paths 51a to 51f. Thereby, it is possible to suppress the cooling fluid in the high-temperature space A from leaking to the outside.

[0072] 〔Sixth Embodiment〕 With reference to FIGS. 9 to 11, an example of the heat treatment apparatus 1E of the sixth embodiment will be described.

[0073] The heat treatment apparatus 1E of the sixth embodiment is different from the heat treatment apparatus 1 in that the rotational speed of the blowers 56a to 56f is controlled based on the detected values of at least one of the flow meters 67a to 67f and the temperature sensors 68a to 68f provided corresponding to each of the plurality of flow paths 51a to 51f. Note that other configurations may be the same as those of the heat treatment apparatus 1. Hereinafter, the description will focus on the points different from the heat treatment apparatus 1.

[0074] The flow meters 67a to 67f are provided corresponding to each of the plurality of flow paths 51a to 51f. The flow meters 67a to 67f detect the flow rate (an example of a characteristic value) of the cooling fluid flowing through the corresponding flow paths 51a to 51f, and transmit the detected values to the control unit 90.

[0075] The temperature sensors 68a to 68f are provided corresponding to each of the plurality of flow paths 51a to 51f. The temperature sensors 68a to 68f detect the temperature (an example of a characteristic value) of the cooling fluid flowing through the corresponding flow paths 51a to 51f, and transmit the detected values to the control unit 90.

[0076] The control unit 90 controls the rotation speeds of the plurality of blowers 56a to 56f based on the detected values of at least any one of the flow meters 67a to 67f and the temperature sensors 68a to 68f.

[0077] For example, as shown in FIG. 10, the control unit 90 includes a controller 91 and a controller 92. The controller 91 outputs the heater power u1 to the processing unit (heating unit 30) so that the furnace internal temperature y1 becomes equal to the target temperature r, and outputs the blower air volume u2 to the controller 92. The furnace internal temperature y1 is, for example, the detected value of the temperature detection unit 70. The target temperature r is, for example, a temperature determined by a recipe or the like. The controller 92 outputs the blower power u3 to the blowers 56a to 56f so that the measured air volume y2 becomes equal to the blower air volume u2. The measured air volume y2 is, for example, the detected value of the flow meters 67a to 67f. The blowers 56a to 56f rotate at a rotation speed corresponding to the blower power u3, and send the cooling fluid into the processing unit (space A). Note that the controllers 91 and 92 may be provided separately from the control unit 90.

[0078] Further, for example, as shown in FIG. 11, the control unit 90 may include a controller 93, a controller 94, and an observer 95. The controller 93 outputs the heater power u1 to the processing unit (heating unit 30) so that the in-furnace temperature y1 becomes equal to the target temperature r, and outputs the heat extraction amount u2 to the controller 94. The in-furnace temperature y1 is, for example, the detection value of the temperature detection unit 70. The target temperature r is, for example, the temperature determined by a recipe or the like. The controller 94 outputs the blower power u3 to the blowers 56a to 56f so that the estimated heat extraction amount y4 becomes equal to the heat extraction amount u2. The observer 95 calculates the estimated heat extraction amount y4 by the following mathematical formula based on the in-furnace temperature y1, the measured air volume y2, and the measured air temperature y3. The measured air volume y2 is, for example, the detection value of the flow meters 67a to 67f. The measured air temperature y3 is, for example, the detection value of the temperature sensors 68a to 68f. The blowers 56a to 56f rotate at a rotation speed corresponding to the blower power u3 and send the cooling fluid into the processing unit (space A). Note that the controllers 93 and 94 and the observer 95 may be provided separately from the control unit 90.

[0079] y4 = ρ × y2 × C × (y1 - y3) (ρ: density of air, C: specific heat of air)

[0080] According to the heat treatment apparatus 1E of the sixth embodiment described above, since it has the same configuration as the heat treatment apparatus 1 of the first embodiment, the same effects as those of the heat treatment apparatus 1 of the first embodiment can be achieved.

[0081] Further, according to the heat treatment apparatus 1E of the sixth embodiment, the control unit 90 controls the rotation speed of the blowers 56a to 56f based on at least one of the detection values of the flow meters 67a to 67f and the temperature sensors 68a to 68f provided corresponding to each of the plurality of flow paths 51a to 51f. Thereby, the temperature variation between the surfaces can be reduced.

[0082] 〔Example〕 (Control Cooling Process) First, an example in which the temperature controllability when performing the control cooling process in the heat treatment apparatus 1 is evaluated will be described.

[0083] In Example 1, while independently controlling the voltages supplied to the blowers 56a to 56f, the heating unit 30 was controlled based on the detected temperature of the temperature detection unit 70, and the temperature inside the processing container 10 was decreased from 400°C to 200°C. Also, during the period when the temperature inside the processing container 10 was being decreased, the temporal changes in the temperature of each region were measured. The voltages supplied to the blowers 56a to 56f in Example 1 are as shown in Table 1 below.

[0084] [Table 1]

[0085] As shown in Table 1, in Example 1, at the start of the process, the voltages supplied to the blowers 56a to 56f were set to 4V. Subsequently, 5 minutes after the start of the process, the voltages supplied to the blowers 56a to 56d were changed from 4V to 2V, and the voltage supplied to the blower 56e was changed from 4V to 3V. Subsequently, 10 minutes after the start of the process, the voltages supplied to the blowers 56a to 56d were changed from 2V to 1.5V, the voltage supplied to the blower 56e was changed from 3V to 2V, and the voltage supplied to the blower 56f was changed from 4V to 4.5V. Subsequently, 20 minutes after the start of the process, the voltages supplied to the blowers 56a to 56c were changed from 1.5V to 1.2V, the voltage supplied to the blower 56d was changed from 1.5V to 1V, and the voltage supplied to the blower 56e was changed from 2V to 1.5V. Subsequently, 30 minutes after the start of the process, the voltages supplied to the blowers 56a and 56b were changed from 1.2V to 1V.

[0086] In Comparative Example 1, while controlling the voltages supplied to the blowers 56a to 56f to be constant, the heating unit 30 was controlled based on the detected temperature of the temperature detection unit 70, and the temperature inside the processing container 10 was decreased from 400°C to 200°C. Also, during the period when the temperature inside the processing container 10 was being decreased, the temporal changes in the temperature of each region were measured. The voltages supplied to the blowers 56a to 56f in Comparative Example 1 are as shown in Table 2 below.

[0087] [Table 2]

[0088] As shown in Table 2, in Comparative Example 1, at the start of the process, the voltage supplied to each of the blowers 56a to 56f was set to 4V, and then it was fixed at 4V without changing the voltage supplied to each of the blowers 56a to 56f.

[0089] FIGS. 12 and 13 are diagrams showing the measurement results of the temperature characteristics of each region in the control cooling process. FIG. 12 shows the results of Example 1, and FIG. 13 shows the results of Comparative Example 1. In FIGS. 12 and 13, the time [minutes] is shown on the horizontal axis, the temperature [° C.] of each region is shown on the first vertical axis (the left vertical axis), and the temperature variation between surfaces [° C.] is shown on the second vertical axis (the right vertical axis). Also, in FIGS. 12 and 13, the temperature of each region is shown by a solid line, and the temperature variation between surfaces is shown by a broken line. The temperature variation between surfaces is the value obtained by subtracting the minimum temperature from the maximum temperature among the temperatures of all regions.

[0090] As shown in FIG. 12, in Example 1, it can be seen that the temperature drop rates are substantially the same in all regions (BTM, CTR-1 to 4, TOP). Also, in Example 1, the temperature variation between surfaces when the temperature of all regions reached 200 degrees or less was 4.3° C.

[0091] On the other hand, as shown in FIG. 13, in Comparative Example 1, it can be seen that there are variations in the temperature drop rates among the regions, and the temperature drop rate in the top region is smaller than that in the bottom region. Also, in Comparative Example 1, the temperature variation between surfaces when the temperature of all regions reached 200° C. or less was 45.5° C.

[0092] From the results of the above Example 1 and Comparative Example 1, it was shown that in the control cooling process, by independently controlling the voltage supplied to each of the blowers 56a to 56f, the temperature variation between surfaces can be reduced as compared with the case of controlling the voltage supplied to each of the blowers 56a to 56f to be constant.

[0093] (Low-temperature treatment) Next, an example of evaluating the temperature controllability when performing low-temperature treatment in the heat treatment apparatus 1 will be described.

[0094] In this example, in all conditions (conditions 1 to 5), tilt control was performed in which the controlled temperature of the top region (TOP) was set lower than the controlled temperatures of the other regions (BTM, CTR-1 to 4). The controlled temperatures of each region in conditions 1 to 5 are as shown in Table 3 below.

[0095]

Table 3

[0096] As shown in Table 3, in all conditions (conditions 1 to 5), the controlled temperatures of the bottom region, the first center region, the second center region, the third center region, and the fourth center region were set to 55°C, and the controlled temperature of the top region was set to 52°C.

[0097] Also, in conditions 1 to 4, while independently controlling the voltages supplied to the blowers 56a to 56f, the heating unit 30 was controlled based on the detected temperature of the temperature detection unit 70 to adjust the temperature inside the processing container 10 to a low temperature. In condition 5, while controlling the voltages supplied to the blowers 56a to 56f to be constant, the heating unit 30 was controlled based on the detected temperature of the temperature detection unit 70 to adjust the temperature inside the processing container 10 to a low temperature. The voltages supplied to the blowers 56a to 56f in conditions 1 to 5 are as shown in Table 4 below.

[0098]

Table 4

[0099] As shown in Table 4, under Condition 1, the voltage supplied to blowers 56a to 56e was set to 1 V, and the voltage supplied to blower 56f was set to 4 V. Under Condition 2, the voltage supplied to blowers 56a to 56d was set to 1 V, the voltage supplied to blower 56e was set to 0.7 V, and the voltage supplied to blower 56f was set to 4.5 V. Under Condition 3, the voltage supplied to blowers 56a to 56e was set to 0.7 V, and the voltage supplied to blower 56f was set to 4.5 V. Under Condition 4, the voltage supplied to blowers 56a to 56e was set to 0 V, and the voltage supplied to blower 56f was set to 4.5 V. Under Condition 5, the voltage supplied to blowers 56a to 56f was set to 4 V.

[0100] FIG. 14 is a diagram showing the measurement results of the reaching temperatures of the respective regions in the low-temperature treatment, and shows the temperature [°C] for each region for each of Conditions 1 to 5. In FIG. 4, the circles, triangles, squares, diamonds, and inverted triangles indicate the results of Conditions 1, 2, 3, 4, and 5, respectively.

[0101] As shown in FIG. 14, under Conditions 1 and 2, it can be seen that the temperature in the regions (BTM, CTR-1 to 4) where the control temperature was set to 55°C is substantially the same as the control temperature, and the temperature in the region (TOP) where the control temperature was set to 52°C is 53.2°C.

[0102] Under Condition 3, it can be seen that the temperature in the regions (BTM, CTR-1 to 4) where the control temperature was set to 55°C is substantially the same as the control temperature, and the temperature in the region (TOP) where the control temperature was set to 52°C is 52.8°C.

[0103] Under Condition 4, it can be seen that the temperature in the regions (BTM, CTR-1 to 3) where the control temperature was set to 55°C is higher than 55°C, and the temperature in the region (CTR-4) where the control temperature was set to 55°C and the temperature in the region (TOP) where the control temperature was set to 52°C are substantially the same as the control temperature.

[0104] Under Condition 5, it can be seen that the temperature in the regions (BTM, CTR-1 to 4) where the control temperature is set to 55°C is approximately the same as the control temperature, and the temperature in the region (TOP) where the control temperature is set to 52°C is 53.8°C.

[0105] From the results of Conditions 1 to 3 and 5 above, by independently controlling the voltage supplied to each of the blowers 56a to 56f and increasing the voltage supplied to the blower 56f provided corresponding to the region (TOP) where the control temperature is relatively low, it can be said that the temperature controllability during tilt control at low temperatures is improved.

[0106] Also, from the results of Conditions 1 to 3, by creating a large difference in the voltage supplied to the blowers 56a to 56f between the region (TOP) where the control temperature is relatively low and the regions (BTM, CTR-1 to 4) where the control temperature is relatively high, it can be said that the temperature controllability during tilt control at low temperatures is further improved.

[0107] Also, from the results of Conditions 3 and 4, if the voltage supplied to the blowers 56a to 56e provided corresponding to the region (BTM, CTR-1 to 4) where the control temperature is relatively high is set to 0V, it can be said that the temperature controllability in that region deteriorates.

[0108] The embodiments disclosed this time should be considered as illustrative in all respects and not restrictive. The above embodiments may be omitted, substituted, or changed in various forms without departing from the scope and spirit of the appended claims.

Explanation of Reference Numerals

[0109] 1 Heat treatment apparatus 10 Processing container 30 Heating section 50 Cooling section 55 Branch section 56a to 56f Blowers 57a to 57f Discharge holes

Claims

1. A cylindrical processing container, a heating unit that heats the processing container, a cooling unit that cools the processing container, comprising: wherein the cooling unit is provided at intervals in the longitudinal direction of the processing container, and includes a plurality of discharge holes that discharge a cooling fluid toward the processing container, a branch unit that diverts the cooling fluid into a plurality of flow paths that communicate with the plurality of discharge holes, and blowers provided corresponding to each of the plurality of flow paths, and sending the cooling fluid into the discharge holes of the corresponding flow paths, having: wherein the branch unit includes a plurality of branch chambers arranged in multiple stages, a heat treatment apparatus.

2. having a backflow prevention valve provided corresponding to each of the plurality of flow paths, and preventing backflow of the cooling fluid from the discharge holes of the corresponding flow paths to the blowers, the heat treatment apparatus according to Claim 1.

3. having a control unit configured to independently control each of the plurality of blowers, the heat treatment apparatus according to Claim 1 or 2.

4. having sensors provided corresponding to each of the plurality of flow paths, and detecting characteristic values of the corresponding flow paths, wherein the control unit monitors backflow of the cooling fluid based on detection values of the sensors, the heat treatment apparatus according to Claim 3.

5. having sensors provided corresponding to each of the plurality of flow paths, and detecting characteristic values of the corresponding flow paths, wherein the control unit controls the rotation speeds of the plurality of blowers based on detection values of the sensors, the heat treatment apparatus according to Claim 3 or 4.

6. wherein the characteristic values include the temperature of the cooling fluid sent from the blowers into the discharge holes, the heat treatment apparatus according to Claim 4 or 5.

7. wherein the characteristic values include the differential pressure before and after the blowers, the heat treatment apparatus according to any one of Claims 4 to 6.

8. wherein the characteristic values include the flow rate of the cooling fluid sent from the blowers into the discharge holes, the heat treatment apparatus according to any one of Claims 4 to 7.

9. A cylindrical processing container, a heating unit that heats the processing container, a cooling unit that cools the processing container, a control unit, comprising: wherein the cooling unit is provided at intervals in the longitudinal direction of the processing container, and includes a plurality of discharge holes that discharge a cooling fluid toward the processing container, a branch unit that diverts the cooling fluid into a plurality of flow paths that communicate with the plurality of discharge holes, and blowers provided corresponding to each of the plurality of flow paths, and sending the cooling fluid into the discharge holes of the corresponding flow paths, A sensor provided corresponding to each of the plurality of the flow paths and configured to detect a characteristic value of the corresponding flow path, having, The control unit is configured to independently control each of the plurality of blowers, The control unit monitors backflow of the cooling fluid based on a detection value of the sensor, A heat treatment apparatus.

10. A heat treatment method in a heat treatment apparatus including a heating unit configured to heat a cylindrical processing container and a cooling unit configured to cool the processing container, The cooling unit, A plurality of discharge holes provided at intervals in the longitudinal direction of the processing container and configured to discharge a cooling fluid toward the processing container, A branch unit configured to branch the cooling fluid into a plurality of flow paths communicating with the plurality of discharge holes, A blower provided corresponding to each of the plurality of flow paths and configured to send the cooling fluid into the corresponding discharge hole of the flow path, having, The branch unit includes a plurality of branch chambers arranged in multiple stages, When performing heat treatment in the processing container, each of the plurality of blowers is independently controlled according to conditions of the heat treatment, A heat treatment method.

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