Magnetic levitation system, base of magnetic levitation system, vacuum system, and method for non-contact holding and moving a carrier in a vacuum chamber

Abstract

A magnetic levitation system for contactlessly holding and moving a carrier in a vacuum chamber includes a base defining a transport track, a carrier movable above the base along the transport track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit disposed on the base and a second magnet unit disposed on the carrier. The magnetic levitation system further includes a magnetic lateral stabilization device for laterally stabilizing the carrier, the magnetic lateral stabilization device including a stabilizing magnet unit disposed on the base. At least one of the first magnet unit and the first stabilizing magnet unit is disposed in a housing space of the base, the housing space being separated from an interior region of the vacuum chamber by a separation wall.

Description

Technical Field

[0001]

[0001] Embodiments of the present disclosure relate to the technical field of magnetic levitation systems for substrate processing and transportation, particularly in vacuum systems, such as material deposition systems. Embodiments of the present disclosure relate particularly to magnetic levitation systems and methods for non-contact holding and moving of a carrier in a vacuum chamber. More specifically, embodiments of the present disclosure relate to a magnetic levitation system for transporting a carrier, a base of the magnetic levitation system, and a vacuum system including the magnetic levitation system. Further, embodiments of the present disclosure relate to a method for non-contact holding and moving of a carrier essentially horizontally in a vacuum chamber.

Background Art

[0002]

[0002] Techniques for depositing layers on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), thermal evaporation, and spin coating. Coated substrates can be used in several applications and several technical fields. For example, coated substrates can be used in the manufacture of electronic devices on wafers or the manufacture of display devices. Display devices can be used in the manufacture of television screens, computer monitors, mobile phones, and other portable devices for displaying information. Usually, a display is manufactured by coating a substrate with a stack of layers of different materials.

[0003]

[0003] To deposit a layer stack on a substrate, an arrangement of processing modules can be used. A processing system includes a deposition module and optional further processing modules, such as a cleaning module and / or an etching module, etc., and a plurality of subsequent processing modules, and a substrate is processed by two or more processing modules so that a plurality of substrates can be continuously or semi-continuously processed in the processing system. Processing of the substrate can be carried out under a pressure below atmospheric pressure in a vacuum system.

[0004]

[0004] The substrate can be transported through a vacuum system by a carrier, i.e., a transport device for transporting the substrate. The carrier for transporting the substrate is typically transported through the vacuum system using a transport system. The transport system can be configured to carry a carrier having a substrate disposed thereon along a transport path.

[0005]

[0005] It is necessary to overcome technical problems related to carrier transport and deposition of materials on the substrate in the vacuum system. In particular, accurate, reliable, and smooth transport of the carrier through the vacuum system is difficult. For example, it can be difficult to ensure the function of the transport system in the vacuum system. In particular, it is difficult to provide an autonomous, sensitive, and reliable carrier transport system for a vacuum environment at low cost. In particular, it is difficult to transport the carrier without generating particles.

[0006]

[0006] Accordingly, there is a continuing need for an improved system, apparatus, and method for transporting a carrier, and an improved vacuum system that overcomes at least some of the problems of the state of the art.

SUMMARY OF THE INVENTION

[0007]

[0007] In light of the above, a magnetic levitation system, a base of the magnetic levitation system, a vacuum system, and a method for non - contact holding and moving a carrier in a vacuum chamber are provided. Further, a vacuum system for substrate processing including a magnetic levitation system is provided. Further aspects, advantages, and features of the present disclosure will be apparent from the claims, the specification, and the accompanying drawings.

[0008]

[0008] According to a first aspect of the present disclosure, there is provided a magnetic levitation system for non - contact holding and moving a carrier in a vacuum chamber. The magnetic levitation system includes a base defining a transport track, a carrier movable above the base along the transport track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit disposed on the base and a second magnet unit disposed on the carrier. The magnetic levitation system further includes a magnetic lateral stabilization device for laterally stabilizing the carrier, the magnetic lateral stabilization device including a stabilization magnet unit disposed on the base. The first magnet unit and / or the stabilization magnet unit are disposed in a housing space of the base, and the housing space is separated from the inner region of the vacuum chamber by a separation wall.

[0009]

[0009] According to a second aspect of the present disclosure, there is provided a base of the magnetic levitation system described herein for non - contact holding and moving a carrier in a vacuum chamber. The base defines a transport track on which the carrier can be moved non - contact above the base. The base includes a housing space separated from the inner region of the vacuum chamber by a separation wall and configured to accommodate the first magnet unit of at least one magnetic bearing and / or the stabilization magnet unit of the magnetic lateral stabilization device.

[0010] According to a third aspect of the present disclosure, a vacuum system is provided. The vacuum system includes a transport vacuum chamber, a first vacuum processing chamber, and a second vacuum processing chamber. Further, the vacuum system includes a magnetic levitation system for non - contact holding of a carrier in the transport vacuum chamber and moving the carrier from the first vacuum processing chamber to the second vacuum processing chamber along a transport track. The magnetic levitation system includes a base defining the transport track, a carrier movable above the base along the transport track, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. The at least one magnetic bearing includes a first magnet unit disposed on the base and a second magnet unit disposed on the carrier. The magnetic levitation system further includes a magnetic lateral stabilization device for laterally stabilizing the carrier, the magnetic lateral stabilization device including a stabilization magnet unit disposed on the base. At least one of the first magnet unit and the stabilization magnet unit is disposed in a housing space of the base separated from the internal region of the vacuum chamber by a separation wall.

[0011] According to a fourth aspect of the present disclosure, a method for non - contact holding and moving a carrier in a vacuum chamber is provided. The method includes providing a base defining a transport track and a carrier movable above the base along the transport track, and generating a magnetic levitation force between the base and the carrier using at least one magnetic bearing including a first magnet unit disposed on the base and a second magnet unit disposed on the carrier. The method further includes laterally stabilizing the carrier using a magnetic lateral stabilization device including a stabilization magnet unit disposed on the base and a second magnet unit disposed on the carrier. The carrier is disposed in an internal region of the vacuum chamber to which a first pressure is applied, and at least one of the first magnet unit and the stabilization magnet unit is disposed in a housing space of the base to which a second pressure different from the first pressure is applied.

[0012]

[0012] To enable a detailed understanding of the features of the present invention described above, the present invention summarized above will be described more specifically with reference to embodiments. The accompanying drawings relate to embodiments of the present invention and will be described below.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Modes for Carrying Out the Invention

[0014]

[0013] Here, various embodiments of the present invention are referred to in detail, and one or more examples thereof are shown in the figures. In the following description of the drawings, the same reference numerals refer to the same components. Generally, only the differences regarding the individual embodiments will be described. Each example is provided as an illustration of the present invention and is not intended to limit the present invention. Furthermore, features illustrated or described as part of one embodiment can be used in other embodiments or in combination with other embodiments to create further embodiments. The description is intended to include the above-mentioned modifications and variations.

[0015]

[0014] Before explaining various embodiments of the present disclosure in more detail, some aspects regarding several terms and expressions used in this specification will be explained.

[0016]

[0015] In the present disclosure, the magnetic levitation system can be understood as a system suitable for, i.e., configured to, hold and move a carrier in a non-contact manner. Additionally or alternatively, the magnetic levitation system of the present disclosure can be understood as a system including at least a base, a carrier movable relative to the base, and at least one magnetic bearing for generating a magnetic levitation force between the base and the carrier. In some embodiments, the carrier can move relative to the base in a non-contact manner while being held in a floating state above the base by magnetic force.

[0017]

[0016] In the present disclosure, the carrier can be understood as a transport device configured to transport a substrate, in particular another flat substrate such as a wafer or a glass plate, in a vacuum system. In particular, the carrier can be configured to transport the substrate essentially horizontally through a vacuum chamber. The carrier can have an essentially flat plate shape and can move essentially horizontally above the base. The carrier can include a chucking device for holding the substrate on the carrier. For example, the carrier can have a mechanical chucking device or an electrical or magnetic chucking device for holding the substrate on the carrier. For example, the carrier can include a flat upper surface for placing the substrate on the carrier. In some embodiments, the carrier according to the present disclosure can have a weight of 1 kg or more and 20 kg or less, in particular 3 kg or more and 10 kg or less, for example about 4 or 5 kg.

[0018]

[0017] The term "substrate" in the present disclosure can be understood to include substrates such as wafers or glass sheets processed in a vacuum system. The substrate can be transported essentially horizontally through the vacuum system. In some embodiments, the substrate can be configured for display manufacturing, for example TFT display manufacturing. The substrate according to the embodiments described herein can have a weight of 100 g or more and 1000 g or less, in particular 300 g or more and 700 g or less.

[0019]

[0018] In other embodiments, the carrier can be held essentially vertically above the base. An essentially vertically oriented carrier can transport the substrate and / or mask essentially vertically, i.e., the angle between the main surface of the substrate (or mask) being transported and the gravity vector can be 10° or less. A magnetic levitation system configured for non-contact transport of a vertically oriented carrier is particularly space-saving.

[0020]

[0019] The substrate according to the present disclosure may refer to a wafer, in particular a wafer that is transported and processed horizontally in a vacuum system. In other words, the main surface of the substrate can be oriented essentially horizontally during transport and / or processing by a magnetic levitation system.

[0021]

[0020] According to a first aspect of the present disclosure, a magnetic levitation system for non - contact holding and moving a carrier is provided.

[0022]

[0021] FIG. 1 is a schematic cross - sectional view showing a magnetic levitation system 100 for non - contact holding and moving a carrier in a vacuum chamber according to an embodiment described herein. As exemplarily shown in FIG. 1, the magnetic levitation system 100 includes a base 101 that defines a transport track 102. The transport track 102 extends perpendicular to the plane of the paper in FIG. 1, that is, in the longitudinal direction of the base 101. The carrier 103 is movable non - contactingly above the base 101 along the transport track 102. The transport track 102 defined by the base 101 may extend through a vacuum chamber, for example, between a plurality of processing modules of a vacuum system. Thus, the carrier for transporting the substrate 1001 can move between a plurality of processing modules along the transport track 102, and the substrate 1001 can be processed by a plurality of processing modules.

[0023]

[0022] The base may define a predetermined transport track that extends in the transport direction and enables carrier transport in the transport direction along the transport track, such as between two processing chambers. The length of the base in the transport direction can be several meters or dozens of meters. In other embodiments, the length of the base in the transport direction can be from a few centimeters to a maximum of dozens of meters. The width of the base in the lateral direction, that is, perpendicular to the transport direction, may essentially correspond to the width of the carrier or be slightly larger than the width of the carrier (e.g., 1.5 times or less the carrier width). For example, the width of the base in the lateral direction can be 2 m or less, particularly 1 m or less. Thus, a predetermined transport track that defines the transport path of the carrier can be provided by the base. In some embodiments, the predetermined transport track extends between two vacuum chambers and is provided in a vacuum tunnel that enables carrier transport between the vacuum chambers through the vacuum tunnel.

[0024]

[0023] In some embodiments, the base can define a first transport track and a second transport track that extend adjacent to each other, and the first transport track and the second transport track can extend adjacent to each other at a distance of 1 m or more, at least in sections. In some embodiments, in order to reduce the execution effort, two or more predetermined transport tracks may be arranged on top of one housing space covered by one partition wall.

[0025]

[0024] The magnetic levitation system 100 includes at least one magnetic bearing 104 for generating a magnetic levitation force F between the base 101 and the carrier 103. The at least one magnetic bearing 104 includes a first magnet unit 105 arranged on the base 101 and a second magnet unit 108 arranged on the carrier 103. The magnetic bearing 104 is configured to generate a magnetic levitation force F between the base 101 and the carrier 103, so that the carrier can be held in a non-contact manner with respect to the base by magnetic force. In some embodiments, the magnetic levitation force is a repulsive magnetic force acting between the base and the carrier. During the process, the carrier can be floated above the base by the repulsive magnetic force acting between the first magnet unit 105 and the second magnet unit 108. In some embodiments, the magnetic levitation force is generated in a purely passive manner.

[0026]

[0025] In other embodiments, the magnetic levitation force can be generated in a partially passive manner, for example, by interacting permanent magnets, and can be generated in a partially active manner, for example, using actively controlled magnetic bearings.

[0027]

[0026] The magnetic levitation system 100 may further include a magnetic Qi lateral stabilization device 109 for stabilizing the carrier 103 in the lateral direction L, and the magnetic Qi lateral stabilization device 109 includes a stabilization magnet unit 106 arranged on the base 101. The lateral direction L can be a horizontal direction perpendicular to the longitudinal direction of the transport track 102. The longitudinal direction of the transport track corresponds to the transport path of the carrier along the base. Thus, the magneticQi The lateral stabilization device is configured to stabilize the carrier in a direction perpendicular to the transport path. In one embodiment, the magnetic Qi The lateral stabilization device 109 can be a passive device including, for example, a plurality of permanent magnets arranged so that the carrier is reliably held at a predetermined lateral position above the base. In another embodiment, the magnetic Qi The lateral stabilization device 109 can be actively controlled. In other words, the actual position of the carrier 103 in the lateral direction L can be measured, compared with the target position of the carrier in the lateral direction L, and the stabilization magnet unit 106 can be controlled so that the carrier is held at the target position above the base.

[0028] According to the embodiment described herein, at least one of the first magnet unit 105 and the stabilization magnet unit 106 of the magnetic bearing is disposed in the housing space 1011 of the base 101, and the partition wall 107 is disposed between the housing space 1011 and the internal region 10 of the vacuum chamber 1 in which the carrier is disposed. In the embodiment shown in FIG. 1, both the first magnet unit 105 and the stabilization magnet unit 106 are disposed in the housing space 1011 of the base.

[0029]

[0028] Placing at least one of the first magnet unit 105 and the stabilization magnet unit 106 in a housing space separate from the internal region of the vacuum chamber 1 can be beneficial for the following reasons. The internal region of the vacuum chamber and the housing space can be separately accessible, which can facilitate the inspection, repair, and maintenance of the magnetic levitation system. For example, the first magnet unit 105 and / or the stabilization magnet unit 106 can be accessible without overfilling the vacuum chamber. Furthermore, heat radiation from the first magnet unit 105 and / or from the stabilization magnet unit 106, which may include coils, to the internal region of the vacuum chamber can be reduced. Moreover, the risk of contamination of the internal region of the vacuum chamber can be reduced. In some embodiments, the carrier can be transported non - contactingly above a separation wall 107 that closes the housing space 1011. Thus, the carrier can move above the base 101 without mechanical contact, and as a result, the base provides a closed housing space for the magnetic components of the magnetic levitation system. Particle generation in the internal region of the vacuum chamber can be reduced or completely avoided. Moreover, magnet units and control circuits that are not vacuum - compatible can be used in the housing space. Furthermore, the actively controlled components of the magnetic levitation system can be arranged in a housing space separate from the internal region of the vacuum chamber. The housing space is usually more easily accessible by circuits and supply lines, while the carrier arranged in the internal region of the vacuum chamber can carry only passive magnetic components.

[0030]

[0029] According to some embodiments, the first magnet unit 105 and the stabilization magnet unit 106 can be arranged in the housing space 1011 of the base.

[0031]

[0030] According to embodiments that can be combined with the embodiments described herein, the magnetic bearing 104 can include a first magnet unit 105 arranged on the base 101 and a second magnet unit 108 arranged on the carrier 103.

[0032]

[0031] The first magnet unit 105 and the second magnet unit 108 may be made of a material having permanent magnetic properties. In particular, the first magnet unit 105 and the second magnet unit 108 can be permanent magnets. Each permanent magnet has two poles of opposite polarities, that is, the N pole faces the S pole. The first magnet unit 105 and the second magnet unit 108 can be arranged such that when the carrier is held by the magnetic bearing above the base, the pole of one polarity of the first magnet unit 105 faces the pole of the same polarity of the second magnet unit 108. Therefore, the repulsive magnetic force between the first magnet unit 105 and the second magnet unit 108 can hold the carrier non - contact above the base, particularly above the housing space 1011 of the base closed by the partition wall 107. In particular, the magnetic levitation force can be generated in a purely passive manner by a magnetic levitation system, particularly by permanent magnets.

[0033]

[0032] FIG. 2 is a schematic cross - sectional view showing a magnetic levitation system according to the embodiment described in this specification. As exemplarily shown in FIG. 2, the magnetic levitation system 100 includes a magnetic bearing 104 including a first magnet unit 105 and a second magnet unit 108. The first magnet unit 105 and the second magnet unit 108 can be permanent magnets with poles of the same polarity facing each other. As exemplarily shown in FIG. 2, the N pole of the first magnet unit 105 and the N pole of the second magnet unit 108 can be arranged to face each other when the carrier is held by the magnetic bearing 104. Alternatively, the S poles of the first magnet unit 105 and the second magnet unit 108 may face each other. Some magnetic bearings can be arranged spaced apart from each other in the lateral direction L to hold a horizontally oriented carrier above the base. Shi Some magnetic bearings can be arranged spaced apart from each other in the lateral direction L to hold a horizontally oriented carrier above the base.

[0034]

[0033] Therefore, Magnetism the levitation force F can be advantageously generated by the magnetic interaction between the first magnet unit 105 and the second magnet unit 108. In particular, MagnetismThe levitation force F can be a repulsive magnetic force provided by two poles of a first magnet unit 105 and a second magnet unit 108 that have the same polarity and face each other.

[0035]

[0034] Generated by permanent magnets, especially only by permanent magnets Magnetism By providing the levitation force F, the magnetic levitation system can be simplified. For example, permanent magnets require less inspection, repair, and maintenance and have higher durability than actively controlled electromagnets. Furthermore, permanent magnets do not generate heat during operation. In particular, the carrier can be provided as a purely passive moving body that is held non - contact only by the levitation force generated by permanent magnets. The carrier may not require a battery or a power source to be transported along a transport track. As shown in FIG. 2, it may be sufficient to provide the carrier, especially on the bottom surface of the carrier, with a second magnet unit 108 that can be a permanent magnet. In particular, the carrier can be provided with at least two second magnet units of each magnetic bearing that are spaced apart from each other in the lateral direction L. Similarly, at least two first magnet units of each magnetic bearing may be provided in the base housing space 1011, and the at least two first magnet units may be spaced apart from each other at the same distance in the lateral direction L. Thus, the carrier can be held above the base in the horizontal direction via two or more magnetic bearings that can be purely passive components.

[0036]

[0035] According to an embodiment that can be combined with other embodiments described herein, Magnetism The levitation force F can be generated by magnetic bearings including pairs of permanent magnets, and each pair of permanent magnets has poles of the same polarity that face each other when the carrier is held by the respective magnetic bearings.

[0037]

[0036] In the present disclosure, the internal region 10 of the vacuum chamber 1 and the accommodation space 1011 of the base 101 are separated by the partition wall 107. In particular, the partition wall 107 can be arranged to establish a pressure gradient between the internal region 10 of the vacuum chamber 1 and the housing space 1011 of the base 101. Accordingly, the first pressure P1 can be applied to the internal region 10 of the vacuum chamber 1. In particular, the first pressure P1 can refer to a vacuum pressure state. The second pressure P2 can be applied to the housing space 1011 of the base 101. In particular, the second pressure P2 can be greater than the first pressure P1. More specifically, the second pressure P2 can be atmospheric pressure.

[0038]

[0037] As exemplarily shown in FIG. 2, the partition wall 107 can provide a vacuum-tight seal between the internal region 10 of the vacuum chamber 1 and the housing space 1011 of the base 101.

[0039]

[0038] By providing the partition wall 107 described herein, a more reliable magnetic levitation system that can be more easily inspected and repaired can be provided. For example, the stabilization magnet unit 106, typically an actively controlled unit, can be advantageously arranged in the housing space under atmospheric conditions. Further, the magnetic levitation system according to the present disclosure can be beneficial in terms of design and manufacturing costs by reducing the number of components.

[0040]

[0039] In the present disclosure, the partition wall 107 can be provided as a flat cover that covers the base 101 and extends along the transport truck 102. Accordingly, a transport truck having an essentially flat upper surface along which a carrier can be transported can be provided. Conventional transport trucks of magnetic levitation systems typically include rails having a complex shape that support the magnet unit and engage with the carrier. On the other hand, according to the embodiments described herein, the transport truck 102 can have an essentially flat upper surface formed by the partition wall 107 and can be configured to hold and transport a carrier having an essentially flat bottom surface.

[0041]

[0040] By providing a flat cover, the magnetic levitation system according to the present disclosure can beneficially exhibit improved transport capacity. Further, the flexibility of transportation can be improved. For example, by simply providing a base that defines a transportation path with covers extending in each direction, particularly uphill, downhill, curved and / or straight, and even upside down, the carrier can be moved along an uphill, downhill, curved path, and / or along a straight path. In this regard, refer to FIG. 7. FIG. 7 is a diagram showing a base that defines a transport track having a lattice shape connecting a plurality of vacuum processing chambers.

[0042]

[0041] According to an embodiment that can be combined with other embodiments described herein, the partition wall 107 may have a thickness suitable for maintaining a pressure gradient between the internal region 10 of the vacuum chamber and the housing space 1011 of the base 101. In particular, the thickness of the partition wall 107 can be 0.5 mm or more and 5 mm or less, particularly 1 mm or more and 3 mm or less.

[0043]

[0042] According to an embodiment that can be combined with the embodiments described herein, the flat cover can be provided as a flat cover sheet. The partition wall may be made of a non-magnetic material. In particular, the partition wall 107 can be provided as a non-magnetic metal sheet, particularly a non-magnetic steel sheet. By providing a non-magnetic cover, the magnetic field between the magnet unit disposed in the housing space and the magnet unit disposed on the carrier is not adversely affected. In other words, the partition wall 107 can be disposed between the first magnet unit and the second magnet unit without adversely affecting the magnetic field. Therefore, Magnetism the levitation force F can be advantageously maintained.

[0044]

[0043] As exemplarily shown in FIG. 2, the Qi stabilization magnet unit 106 of the lateral stabilization device 109 can be actively controlled and disposed in the housing space 1011 of the base 101. The QiThe lateral stabilization device 109 may be disposed on the carrier 103 and include a magnetic counterpart 110 configured to interact magnetically with the stabilization magnet unit 106. The magnetic counterpart 110 may be, in some embodiments, a permanent magnet, a ferromagnetic unit, or an eddy current unit.

[0045]

[0044] According to an embodiment that can be combined with other embodiments described herein, the stabilization magnet unit 106 may include an actively controlled element such as, for example, the arrangement of coils or the arrangement of controllable electromagnets. For example, the coils may be actively controlled to reduce or minimize the lateral movement of the carrier 103 away from the transport track 102 in the lateral direction L.

[0046]

[0045] The stabilization magnet unit 106 described herein may be disposed in the housing space 1011 of the base 101. The stabilization magnet unit 106 may be an actively controlled unit including a position sensor, a conductor configuration, and a controller configured to actively stabilize the carrier at a predetermined lateral position above the transport track. By providing the stabilization magnet unit 106 in the housing space, the heat generated by the stabilization magnet unit 106 can be more reliably dissipated, and power supply and control can be facilitated.

[0047]

[0046] In some embodiments, the magnetic counterpart 110 may be made of a material having permanent magnetic properties. For example, the magnetic counterpart 110 may include at least one or a plurality of permanent magnets. In some embodiments, the magnetic counterpart may be provided as a ferromagnetic element. Alternatively, a closed coil arrangement or a conductive element that receives a changing magnetic field and reacts by generating a Lorentz force or a magnetic force may be used.

[0048]

[0047] FIG. 3 is a schematic cross-sectional view showing a magnetic levitation system according to an embodiment of the present disclosure. As exemplarily shown in FIG. 3, the magnetic levitation system 100 may further include a linear motor 112 for moving a carrier 103 along a transport track 102, the linear motor 112 including drive elements such as drive coils disposed in a housing space 1011 of a base 101.

[0049]

[0048] By providing the linear motor 112 in the housing space 1011, the magnetic levitation system of the present disclosure can be more reliable in terms of performance. Therefore, the life cycle of the magnetic levitation system of the present disclosure can be improved. Inspection, repair, and maintenance of the active components of the linear motor 112 can be facilitated, and components that are not vacuum compatible can be used.

[0050]

[0049] According to an embodiment that can be combined with the embodiments described herein, the magnetic QiThe lateral stabilization device 109 may include a Lorentz actuator. The Lorentz actuator may be disposed in the housing space 1011 of the base 101 and may include a current conductor such as a coil that can be disposed in a magnetic field generated by the magnetic counterpart 110 of the carrier when the carrier is held above the housing space 1011. By changing the current in the current conductor, respective Lorentz forces are applied to the carrier in the lateral direction L, and the carrier can be stabilized in the lateral direction by controlling the current in the current conductor. In some embodiments, the stabilization magnet unit 106 disposed on the base includes a controllable electromagnet, particularly a coil, arranged such that by changing the flow of current in the controllable electromagnet, a Lorentz force acting on the carrier in the lateral direction L can be generated. In some embodiments, the magnetic counterpart 110 includes one or two permanent magnets disposed at the bottom of the carrier such that a magnetic field suitable for interaction with the stabilization magnet unit 106 is generated for lateral stabilization of the carrier. The first permanent magnet of the magnetic counterpart 110 can generate a first magnetic field, and the second permanent magnet of the magnetic counterpart 110 can generate a second magnetic field facing in the opposite direction. When the coil of the stabilization magnet unit 106 is aligned with the first and second magnetic fields of the magnetic counterpart, reliable lateral stabilization of the carrier becomes possible, as schematically shown in FIG. 3. It should be noted that in other embodiments, different lateral stabilization devices based on principles of magnetic force, direct Lorentz, or induced eddy currents, for example, can be used instead of the Lorentz actuator.

[0051]

[0050] In some embodiments, the Lorentz actuator may include a controlled coil and a permanent magnetic counterpart or an electrically conductive counterpart exerted by its coil. In some embodiments, the Lorentz actuator may be an electromagnetic actuator provided with a ferromagnetic counterpart disposed on the carrier.

[0052]

[0051] The magnetic lateral stabilization device 109 including a Lorentz actuator is beneficial because the Lorentz actuator can generate a stabilizing force acting in the lateral direction even when the stabilizing magnet unit 106 is arranged in the housing space 1011 below the carrier and the magnetic counterpart 110 is arranged on the carrier above the housing space. In other words, magnetic components arranged on the side surface of the carrier in the lateral direction L are not necessary. Therefore, a flexible and space-saving magnetic levitation system with a flat cover surface of the base can be provided.

[0053]

[0052] As exemplarily shown in FIG. 3, the carrier 103 of the magnetic levitation system 100 can be configured as a passive moving body that does not carry any actively controlled magnetic components.

[0054]

[0053] In the present disclosure, the term "moving body" can be understood to refer to a carrier configured to transport a substrate that can move non-contact with respect to the base along a transport track.

[0055]

[0054] Furthermore, the term "passive moving body" can be understood to refer to a carrier lacking actively controllable magnetic components such as, for example, an actively controllable electromagnet. In particular, the carrier can include a second magnet unit 108 that can include one, two, or a plurality of permanent magnets, and a magnetic Qi counterpart 110 of the lateral stabilization device, which can be configured as one or a plurality of permanent magnets. Therefore, a battery or power source for holding and moving the carrier above the base is not necessary.

[0056]

[0055] By providing the passive moving body described herein, several advantages such as, for example, an improved life cycle and improved reliability can be achieved. Furthermore, the magnetic levitation system including the passive moving body described herein can be designed and manufactured more easily. Furthermore, the magnetic levitation system described herein can advantageously reduce the manufacturing cost.

[0057]

[0056] FIG. 7 is a schematic top view showing a base defining a transport truck having a grid shape according to an embodiment of the present disclosure. As exemplarily shown in FIG. 7, the base 101 may have a grid shape. In particular, the transport truck 102 defined by the base 101 may have a grid layout 700. The grid layout 700 according to the present disclosure can be understood as a transport truck for connecting a plurality of vacuum processing chambers, and includes at least one of a group consisting of a truck intersection, a curved truck section, two or more trucks extending in parallel adjacent to each other, two or more trucks extending perpendicular to each other, two or more trucks surrounding an angle of 10° or more and 80° or less with respect to each other, and one or more rotatable truck portions configured to change the transport direction of the carrier by rotating the carrier during levitation. In particular, the individual grid layout described herein can be understood as a transport truck configured to connect at least the first vacuum processing chamber 302 described herein to the second vacuum processing chamber 303. In particular, the base 101 can connect three, five, or more vacuum processing chambers to each other so that the carrier can be transported non - contact between three, five, or more vacuum processing chambers along a transport truck having a grid layout.

[0058]

[0057] As exemplarily shown in FIG. 7, the grid layout 700 may include a plurality of transport routes. In particular, the plurality of transport routes can be understood as one or more transport routes having different directions. More specifically, the plurality of transport routes may include at least one of a longitudinal transport route, a perpendicular transport route, and a diagonal transport route. For example, the longitudinal transport route can be understood as a transport route along the length of the grid layout. Further, the perpendicular transport route can be understood as a transport Path perpendicular to the longitudinal transport route in essence.

[0059] As illustratively shown in FIG. 7, the grid layout 700 may include one or more intersections 701. The one or more intersections 701 may be configured to change the direction of a carrier held in a non-contact manner above the transport truck 102, i.e., above the base 101.

[0060]

[0059] Each of the one or more intersections 701 may include one or more rotatable track portions 113. The one or more rotatable track portions 113 may be configured to change the direction of a carrier 103 held in a non-contact manner above the one or more rotatable track portions 113. The one or more rotatable track portions 113 may be rotatable about an essentially vertical axis and may include a rotatable disk configured to change the transport direction of the carrier.

[0061]

[0060] The transport track 102 may be arranged to move the carrier up an incline, down an incline, along a curved path, and / or along a straight path, or in a somewhat curved portion in an essentially three-dimensional space. The one or more rotatable track portions 113 may be configured to change the direction of the carrier from at least one of the longitudinal transport paths to a perpendicular transport path and vice versa (see arrow 703), from a perpendicular transport path to an oblique transport path and vice versa, and / or from a longitudinal transport path to an oblique transport path and vice versa (see arrow 704).

[0062]

[0061] In some embodiments that may be combined with other embodiments described herein, the base may include a movable track portion configured to change the movement direction of a carrier held in a non-contact manner above the movable track portion. The movable track portion may be a rotatable track portion 113 that can be rotated about a vertical axis of rotation so that the direction of the transport track defined by the movable track portion can be changed. FIG. 7 shows a base including a plurality of movable track portions configured as rotatable track portions 113.

[0063]

[0062] According to an embodiment that can be combined with the embodiments described in this specification, the movable track portion is separated from the internal region 10 of the vacuum chamber 1 and may include a movable housing space that houses at least one magnet unit of the magnetic levitation system 100, such as a stabilizing magnet unit, a levitation magnet, and / or a drive magnet. In particular, the movable housing space may be separated from the internal region 10 of the vacuum chamber 1 by a separation wall 107. The movable housing space may be rotatable such that the movable housing space is rotatable together with the rotatable track portion.

[0064]

[0063] In some embodiments, the base 101 may include two or more rotatable track portions 113 described in this specification.

[0065]

[0064] In some embodiments, at least a part of the base may be curved to define a curved track portion, as schematically shown by reference numeral 115 in FIG. 7. The carrier may be transported along the curved track portion 115 defined by the base. For example, when the carrier is transported along the curved track portion 115, the direction of the carrier may change by 20° or more, 60° or more, or 90° or more. The curved portion of the base may include a curved housing space that houses a plurality of magnet units of the magnetic levitation system.

[0066]

[0065] In some embodiments, the base may include a track switch portion 114 that enables a track switch of the carrier. The track switch portion 114 may enable a track switch of the carrier between a first track portion and a second track portion defined by the base. For example, the carrier exiting the vacuum processing module 304 in FIG. 7 may be transported non - contact along a straight base portion, or the track may be switched so that the carrier is transported along the curved track portion 115.

[0067]

[0066] The track switch portion 114 may be configured as a base portion that branches into two tracks extending in different directions, and the direction of the carrier is magnetic QiIt can be switched via a lateral stabilization device. Magnetism Qi The first setting of the lateral stabilization device can move the carrier in a first direction along the curved track portion 115, and magnetism Qi The second setting of the lateral stabilization device can move the carrier in a second direction along the straight transport path section of FIG. 7. More specifically, the magnetic lateral stabilization device is configured to provide a lateral offset of the carrier, such as offsetting slightly to the left or right to change the track. In particular, according to the embodiments described herein, the magnetic levitation system can include a track switch configured to switch between two or more track portions controllable by the lateral stabilization device. Qi It can include a track switch configured to switch between two or more track portions controllable by the lateral stabilization device.

[0068]

[0067] The magnetic levitation system described herein can include a base having at least one or more of a rotatable track portion 113, a curved track portion 115, a track switch portion 114, and a track portion running uphill and / or downhill, as schematically shown in FIG. 7. Since it is not necessary to equip the entire area with magnetic levitation units, flexible carrier transportation can be realized at low cost. Rather, a base that defines a predetermined grid layout having magnetic levitation units only along a predetermined track portion enables low-cost and flexible carrier transportation according to the embodiments described herein. The magnetic levitation units can be mainly or purely passive in some embodiments.

[0069]

[0068] In the present disclosure, the base can include a plurality of base portions connected to each other via, for example, the rotatable track portion 113 described herein. Each base portion can define the transport track described herein. Two or more base portions can be arranged such that a plurality of vacuum processing chambers are connected to each other. Each base portion can include all the features of the base described herein, including a housing space for accommodating at least one magnet unit of the magnetic levitation system.

[0070] According to yet another aspect of the present disclosure, a base of a magnetic levitation system for non - contact holding and moving a carrier in a vacuum chamber is provided. In particular, a base of a magnetic levitation system according to any of the embodiments described herein is provided.

[0071]

[0070] FIG. 4 is a cross - sectional view showing a base of a magnetic levitation system according to an embodiment described herein. As exemplarily shown in FIG. 4, a base 101 of a magnetic levitation system for non - contact holding and moving a carrier 103 in a vacuum chamber 1 defines a transport track 102 along which the carrier 103 can move non - contactingly above the base 101. Further, the base 101 is separated from an internal region 10 of the vacuum chamber 1 by a separation wall 107 and includes a housing space 1011 configured to accommodate at least one of a first magnet unit 105 of at least one magnetic bearing 104 and a Qi stabilization magnet unit 106 of a lateral stabilization device 109.

[0072]

[0071] The first magnet unit 105 may include permanent magnets. In particular, the first magnet unit 105 may include at least two permanent magnets spaced apart from each other in the lateral direction L of the base such that a plate - shaped carrier can be held horizontally above the base. Further, a plurality of first magnet units 105 may be provided at essentially constant intervals in the longitudinal direction of the base, i.e., along the transport track along which the carrier can be transported non - contactingly. For example, the base may extend over several meters or dozens of meters in the longitudinal direction, such that the carrier can be transported above the base between two distant processing chambers or processing regions of a vacuum system. For example, the base may include dozens or hundreds of first magnet units 105 arranged at regular intervals along the transport track 102.

[0073]

[0072] The stabilization magnet unit 106 may include a controllable coil of a Lorentz actuator arranged in the housing space 1011 such that the carrier can be stabilized in the lateral direction L with respect to the transport truck 102. A plurality of controllable coils can be provided in the housing space 1011 at regular intervals in the longitudinal direction of the base along the transport truck, so that the carrier can be stabilized laterally along the extension of the transport truck.

[0074]

[0073] Furthermore, the coil unit of the linear motor 112 for moving the carrier in the longitudinal direction of the base can be arranged in the housing space 1011 of the base.

[0075]

[0074] The base, the magnetic levitation system, the carrier, the housing space, the partition wall, the first magnet unit, at least one magnetic bearing, and the magnetic Qi The lateral stabilization device has already been described in detail elsewhere so that the above description can be referred to, and thus will not be repeated here.

[0076]

[0075] According to yet another aspect of the present disclosure, a carrier of a magnetic levitation system according to the embodiments described herein is provided. The carrier is configured to be held in a non-contact manner and move above the base of the magnetic levitation system as described herein. The carrier may include at least one second magnet unit 108 of a magnetic bearing, particularly a permanent magnet. In particular, the carrier of the present disclosure can be configured as a passive moving body including passive magnetic components. In other words, as described above, the carrier of the present disclosure can be a passive moving body.

[0077]

[0076] Therefore, the carrier may not require a battery or a power source for being held in a non-contact manner above the base. Rather, the carrier may include only permanent magnets and / or ferromagnetic components of magnetic bearings, magnetic lateral stabilization devices, and / or magnetic drive units.

[0078]

[0077] According to yet another aspect of the present disclosure, a vacuum system is provided.

[0079]

[0078] FIG. 5 is a schematic top view showing a vacuum system 300 according to an embodiment described in this specification. As exemplarily shown in FIG. 5, the vacuum system 300 includes a transport vacuum chamber 301, a first vacuum processing chamber 302, and a second vacuum processing chamber 303. Further, the vacuum system 300 includes a magnetic levitation system for non - contact holding and moving a carrier (not shown in FIG. 5) of the transport vacuum chamber 301 from the first vacuum processing chamber 302 to the second vacuum processing chamber 303 along the transport track 102. The magnetic levitation system 100 includes a base 101 defining the transport track 102, a carrier movable above the base 101 along the transport track 102, and at least one magnetic bearing 104 for generating a magnetic levitation force F between the base 101 and the carrier. The at least one magnetic bearing 104 further includes a first magnet unit 105 disposed on the base 101 and a second magnet unit disposed on the carrier 103. The magnetic levitation system 100 further includes a magnetic Qi lateral stabilization device 109 for laterally stabilizing the carrier 103. The magnetic Qi lateral stabilization device 109 includes a stabilization magnet unit 106 disposed on the base 101. At least one of the first magnet unit 105 and the stabilization magnet unit 106 is disposed in a housing space 1011 of the base 101 separated from the internal region 10 of the transport vacuum chamber 301 by a separation wall 107 (schematically shown in FIG. 5).

[0080]

[0079] The magnetic levitation system 100 of the vacuum system 300 may include further components described in the present disclosure. Therefore, reference can be made to the above - described explanation which will not be repeated here.

[0081]

[0080] In the present disclosure, the first vacuum processing chamber 302 and / or the second vacuum processing chamber 303 can be a processing chamber for substrate processing, such as wafer handling, wafer preparation, wafer coating, wafer etching, and wafer storage, for example, a substrate processing chamber. For example, at least one of the first vacuum processing chamber 302 and the second vacuum processing chamber 303 can be, in particular, a material deposition chamber for manufacturing a display such as an OLED display.

[0082]

[0081] According to an embodiment that can be combined with other embodiments described herein, the transport vacuum chamber 301 can correspond to the vacuum chamber 1 described herein and can include some or all of the features described herein.

[0083]

[0082] In the present disclosure, the vacuum processing chamber can be understood as a vacuum processing system for processing one or more substrates under a pressure below atmospheric pressure. The vacuum processing chamber is operable by hardware components, a computer programmed by appropriate software, any combination of two, or other means.

[0084]

[0083] According to yet another aspect of the present disclosure, a method for non - contact holding and moving a carrier in a vacuum chamber is provided.

[0085] [

[0084] ]FIG. 6 is a flowchart showing the method according to the embodiment described in this specification. As exemplarily shown in FIG. 6, method 400 includes providing 401 a base defining a transport track and a carrier movable above the base along the transport track, and generating 402 a magnetic levitation force F between the base and the carrier using at least one magnetic bearing including a first magnet unit disposed on the base and a second magnet unit disposed on the carrier. At the same time, a magnetic lateral stabilization device including a stabilization magnet unit disposed on the base is used to laterally stabilize the carrier. The carrier is disposed in an internal region of a vacuum chamber to which a first pressure is applied, and at least one of the first magnet unit and the stabilization magnet unit is disposed in a housing space of the base to which a second pressure higher than the first pressure is applied.

[0086] [

[0085] ]For further details of this method, reference is made to the above description and will not be repeated here.

[0087] [

[0086] ]According to an embodiment combinable with the embodiment described in this specification, the magnetic levitation force F can be generated in a purely passive manner. In particular, the term "passive manner" can be understood as a magnetic levitation force F that can be generated only by components having permanent magnetic properties. In other words, the magnetic levitation force F can be understood as the force provided by permanent magnets, in particular permanent magnets having poles of the same polarity facing each other. Additionally or alternatively, the magnetic levitation force F can be generated as a repulsive force between the base and the carrier of the magnetic levitation system as described above. Force and Furthermore, the magnetic levitation force F can be generated as the force applied between the passive moving body described in this document and the base according to the embodiment described in this document as described above.

[0088] [

[0087] ]The magnetic Qi lateral stabilization device for laterally stabilizing the carrier may include active control. For example, the magnetic QiThe lateral stabilization device may include a position sensor for sensing the lateral position of the carrier and a Lorentz actuator for correcting the lateral position according to the sensed position value.

[0089]

[0088] A position sensor can be provided to measure the carrier position and / or the carrier orientation, and the signal of the position sensor can be used to control the lateral position of the carrier via the lateral stabilization device. In some embodiments, the position sensor includes, for example, from above, a camera device configured to observe the position and / or orientation of one or more carriers and supply a sensor signal to a controller of at least one of the lateral stabilization device and the drive unit. Alternatively or additionally, the position sensor may include at least one of a magnetic position sensor, an eddy current sensor, a capacitance sensor, or an optical sensor. For example, the partition wall may be made of a transparent material such as glass, and at least a part of the optical sensor such as a light source and / or a light detector may be disposed under the transparent partition wall. In some embodiments, a combination of different sensors and / or cameras can be adapted to determine not only the lateral position of the carrier but also the angular deviation and / or position along the track in the transport direction, which can be used for the overall control of carrier transport.

[0090]

[0089] According to embodiments combinable with the embodiments described herein, the first pressure P1 applied to the internal region of the vacuum chamber can be a pressure less than atmospheric pressure, for example, a pressure of 10 mbar or less. The second pressure P2 applied to the base housing space can be a pressure different from the first pressure P1, particularly atmospheric pressure. It can be easier to inspect, repair, and maintain the actively controlled components disposed in the housing space.

[0091]

[0090] In the present disclosure, the stabilization can be performed by an actively controlled magnetic Qi by the lateral stabilization device, and in particular, the magnetic Qi lateral stabilization device may include a Lorentz actuator.

[0092] According to an embodiment that can be combined with the embodiments described herein, the vacuum system may comprise the magnetic levitation system described herein. In particular, the vacuum system may include at least one of the base and the carrier, i.e., the passive moving body, described herein.

[0093]

[0092] Although the foregoing is directed to embodiments of the present disclosure, it is possible to devise further embodiments of the present disclosure without departing from the basic scope thereof as determined by the following claims.

[0094]

[0093] In particular, this written description discloses a disclosure including the best mode using examples, whereby the described subject matter, including the creation and use of any device or system and the implementation of any incorporated method, becomes practicable for those skilled in the art. Although various specific embodiments have been disclosed above, the non-exclusive features of the above embodiments are combinable with each other. The scope of patentability is defined by the claims, and other examples are intended to be within the scope of the claims if the claims have structural elements that do not differ from the literal language of the claims, or if the claims include equivalent structural elements that do not substantially differ from the literal language of the claims.

Claims

1. A magnetic levitation system (100) for non - contact holding and moving a carrier (103) in a vacuum chamber (1), a base (101) defining a transport track (102), a carrier (103) movable above the base (101) along the transport track (102) and relative to the base, at least one magnetic bearing (104) for generating a magnetic levitation force (F) between the base (101) and the carrier (103), the at least one magnetic bearing (104) including a first magnet unit (105) arranged on the base (101) and a second magnet unit (108) arranged on the carrier (103), a magnetic lateral stabilization device (109) for laterally stabilizing the carrier (103), the magnetic lateral stabilization device (109) including a stabilization magnet unit (106) arranged on the base (101), comprising, the stabilization magnet unit (106) being arranged in a housing space (1011) of the base (101), the housing space (1011) being separated from an internal region (10) of the vacuum chamber (1) by a separation wall (107), the magnetic levitation system (100).

2. The magnetic levitation system (100) according to claim 1, wherein the first magnet unit (105) and the second magnet unit (108) are permanent magnets having poles of the same polarity facing each other.

3. The magnetic levitation system (100) according to claim 1 or 2, wherein the separation wall (107) provides a vacuum - tight seal between the internal region (10) of the vacuum chamber (1) and the housing space (1011) of the base (101).

4. The magnetic levitation system (100) according to any one of claims 1 to 3, wherein the separation wall (107) is provided as a flat cover covering the base (101) and extending along the transport track (102).

5. The magnetic levitation system (100) according to any one of claims 1 to 4, wherein the separation wall (107) is provided as a non - magnetic metal plate, particularly a non - magnetic steel plate.

6. The magnetic levitation system (100) according to any one of claims 1 to 5, wherein the separation wall (107) has a thickness of 0.5 mm or more and 5 mm or less.

7. The stabilization magnet unit (106) of the magnetic lateral stabilization device (109) is actively controlled, and the magnetic lateral stabilization device (109) further includes a magnetic counterpart (110) arranged on the carrier (103) and configured to interact magnetically with the stabilization magnet unit (106). The magnetic levitation system (100) according to any one of claims 1 to 6.

8. The magnetic levitation system (100) according to claim 7, wherein the magnetic counterpart (110) includes a permanent magnet and / or the stabilization magnet unit (106) includes a coil.

9. The magnetic levitation system (100) according to any one of claims 1 to 8, wherein the magnetic lateral stabilization device (109) includes a Lorentz actuator.

10. The magnetic levitation system (100) according to any one of claims 1 to 9, further comprising a linear motor (112) for moving the carrier (103) along the transport truck (102), and the linear motor (112) includes a drive coil arranged in the housing space (1011).

11. The magnetic levitation system (100) according to any one of claims 1 to 10, wherein the carrier (103) is configured as a passive moving body that does not carry an actively controlled magnetic component.

12. The magnetic levitation system (100) according to any one of claims 1 to 11, wherein the base (101) includes the movable track portion configured to change the moving direction of the carrier (103) held in a non-contact manner above the movable track portion.

13. The magnetic levitation system (100) according to claim 12, wherein the movable track portion is the rotatable track portion configured to change the moving direction of the carrier held in a non-contact manner above the rotatable track portion.

14. The magnetic levitation system (100) according to claim 12, wherein the movable track portion includes a movable housing space separated from the internal region (10) of the vacuum chamber (1) and accommodating at least one magnet unit of the magnetic levitation system (100).

15. A base (101) of a magnetic levitation system (100) for holding and moving a carrier (103) in a non-contact manner in a vacuum chamber (1), The base defines a transport track (102) on which a carrier (103) can be moved above the base and in a non-contact manner with respect to the base. The base includes a housing space (1011) separated from the internal region (10) of the vacuum chamber (1) by a separation wall (107), and the housing space houses a stabilization magnet unit (106) of a magnetic lateral stabilization device (109). Base (101). **Claim 16** A vacuum system (300), comprising: A transport vacuum chamber (301); A first vacuum processing chamber (302) and a second vacuum processing chamber (303); A magnetic levitation system (100) for non-contact holding of a carrier (103) in the transport vacuum chamber (301) and moving the carrier from the first vacuum processing chamber (302) to the second vacuum processing chamber (303) along a transport track (102), the magnetic levitation system (100) comprising: A base (101) defining the transport track (102); A carrier (103) movable above the base (101) and along the transport track (102) with respect to the base; At least one magnetic bearing (104) for generating a magnetic levitation force (F) between the base (101) and the carrier (103), the at least one magnetic bearing (104) including a first magnet unit (105) disposed on the base (101); A magnetic lateral stabilization device (109) for laterally stabilizing the carrier (103), the magnetic lateral stabilization device (109) including a stabilization magnet unit (106) disposed on the base (101); And a magnetic levitation system (100); And a method (400) for non-contact holding and moving a carrier (103) in a vacuum chamber (1), the method (400) comprising: Providing a base (101) defining a transport track (102) and a carrier (103) movable above the base (101) and along the transport track (102) with respect to the base (401); **Claim 17** A method (400) for non-contact holding and moving a carrier (103) in a vacuum chamber (1), the method (400) comprising: Providing a base (101) defining a transport track (102) and a carrier (103) movable above the base (101) and along the transport track (102) with respect to the base (401); Generating a magnetic levitation force (F) between the base (101) and the carrier (103) using at least one magnetic bearing (104) including a first magnet unit (105) disposed on the base (101) and a second magnet unit (108) disposed on the carrier (103) (402); Stabilizing the carrier (103) laterally using a magnetic lateral stabilization device (109) including a stabilizing magnet unit (106) disposed on the base (101) (403); comprising; The carrier (103) is disposed in an internal region (10) of the vacuum chamber (1) to which a first pressure (P1) is applied, and the stabilizing magnet unit (106) is disposed in a housing space (1011) of the base (101) to which a second pressure (P2) different from the first pressure (P1) is applied. Method (400).

18. The method (400) according to claim 17, wherein the magnetic levitation force (F) is generated in a purely passive manner.

19. The method (400) according to claim 17 or 18, wherein the magnetic lateral stabilization device (109) is actively controlled.

20. The method (400) according to any one of claims 17 to 19, wherein the magnetic lateral stabilization device (109) includes a Lorentz actuator.

21. The magnetic levitation system (100) according to claim 1, wherein the first magnet unit (105) and the stabilizing magnet unit (106) are disposed in the housing space (1011) of the base (101).

Images