Substrate Processing System and Storage Module

Abstract

To provide a storage module which enables reduction of its footprint, and to provide a substrate processing system and a transport method of a consumable member.SOLUTION: A storage module includes a mounting table, a sensor, a rotating unit, a storage unit, and an elevating unit. A consumable member is placed on the mounting table. The sensor detects an orientation of the consumable member. The rotating unit rotates the consumable member in a predetermined direction based on the orientation of the consumable member detected by the sensor. The storage unit is disposed below the mounting table to store the consumable member. The elevating unit vertically moves the storage unit.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a storage module, a substrate processing system, and a method for transporting consumable members.

Background Art

[0002] In a process module that processes a substrate of a substrate processing system, consumable members such as an edge ring and a cover ring in the chamber are consumed according to the processing, so they need to be replaced regularly. Conventionally, the replacement of the consumable members has been performed by opening the chamber of the process module and having an operator perform the replacement work, but it is conceivable to transport the consumable members to a transfer robot. In this case, in order to perform alignment (positioning) of the consumable members, a storage unit for storing the consumable members and an alignment unit for performing alignment are required.

[0003] As a device having a storage unit and an alignment unit, a device for wafers has been proposed. For example, a wafer alignment device has been proposed that takes out a wafer from a wafer storage device, transfers it to an adjacent placement position, and rotates the placed wafer so that the orifla (oriental flat) of the wafer is aligned in a certain direction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present disclosure provides a storage module, a substrate processing system, and a method for transporting consumable members that can reduce the footprint.

Means for Solving the Problems

[0006] A storage module according to one aspect of the present disclosure includes a mounting table, a sensor, a rotating unit, a storage unit, and a lifting unit. The mounting table mounts consumable members. The sensor detects the orientation of the consumable members. The rotating unit rotates the consumable members to a predetermined orientation based on the orientation of the consumable members detected by the sensor. The storage unit is located below the mounting table and stores the consumable members. The lifting unit raises and lowers the storage unit.

Advantages of the Invention

[0007] According to the present disclosure, the footprint can be reduced.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Modes for Carrying Out the Invention

[0009] Hereinafter, embodiments of a storage module, a substrate processing system, and a method for transporting consumable members to be disclosed will be described in detail with reference to the drawings. Note that the disclosed technology is not limited by the following embodiments.

[0010] In order to transport the consumable members to the transfer robot, a storage module for storing and aligning the consumable members is added to the substrate processing system. However, in a storage module in which the storage unit and the alignment unit are installed adjacent to each other, installation space is required for each part, resulting in a large footprint. On the other hand, in the factory where the substrate processing system is installed, reduction of the footprint is required for improving space efficiency. Therefore, it is expected to reduce the footprint of the storage module as well.

[0011] (First Embodiment) [Configuration of Substrate Processing System 1] FIG. 1 is a cross-sectional plan view showing an example of a substrate processing system according to the first embodiment of the present disclosure. The substrate processing system 1 shown in FIG. 1 is a substrate processing system capable of performing various processes such as plasma processing on wafers (for example, semiconductor wafers) one by one.

[0012] The substrate processing system 1 includes a processing system main body 10 and a control device 100 that controls the processing system main body 10. As shown in FIG. 1 for example, the processing system main body 10 includes vacuum transfer chambers 11a and 11b, a plurality of process modules 13, a plurality of load lock modules 15, an EFEM (Equipment Front End Module) 18, an asher module 20, and a storage module 22. In the following description, the vacuum transfer chambers 11a and 11b will also be referred to as VTM (Vacuum Transfer Module) 11a and 11b, the process module 13 as PM (Process Module) 13, and the load lock module 15 as LLM (Load Lock Module) 15.

[0013] VTM11a and VTM11b each have a substantially rectangular shape in plan view. A plurality of PM13s are respectively connected to two opposing side surfaces of VTM11a and VTM11b. Among the other two opposing side surfaces of VTM11a, an LLM15 is connected to one side surface, and a path (not shown) for connecting to VTM11b is connected to the other side surface. Note that the side surface of VTM11a to which the LLM15 is connected is angled according to the two LLM15s. VTM11b is connected to VTM11a via a path (not shown). VTM11a and VTM11b have a vacuum chamber, and robot arms 12a and 12b are arranged inside.

[0014] The robot arms 12a and 12b are configured to be rotatable, extendable, retractable, and vertically movable. The robot arms 12a and 12b can transfer a wafer between the PM13 and the LLM15 by placing the wafer on the fork 120 disposed at the tip. Also, the robot arms 12a and 12b can transfer a consumable member between the PM13 and the storage module 22 by placing a consumable member such as an edge ring on the fork 120. The robot arms 12a and 12b are an example of a vacuum transfer robot. Note that the robot arms 12a and 12b only need to be able to transfer a wafer between the PM13 and the LLM15 and be able to transfer a consumable member between the PM13 and the storage module 22, and are not limited to the configuration shown in FIG. 1.

[0015] PM13 has a processing chamber and a cylindrical stage (mounting table) disposed therein. After a wafer is placed on the stage, PM13 evacuates the interior, introduces a processing gas, further applies high-frequency power to the interior to generate plasma, and subjects the wafer to plasma processing by the plasma. VTM11a, 11b and PM13 are partitioned by an openable and closable gate valve 14. The stage in PM13 is provided with an edge ring disposed around the wafer to improve the uniformity of plasma processing and a cover ring for protecting the stage end from plasma. Also, an upper electrode for applying high-frequency power is provided at the upper part of the processing chamber facing the stage.

[0016] LLM15 is disposed between VTM11a and EFEM18. LLM15 has an internal pressure variable chamber whose interior can be switched between vacuum and atmospheric pressure, and a cylindrical stage disposed therein. When carrying a wafer from EFEM18 to VTM11a, LLM15 maintains the interior at atmospheric pressure, receives the wafer from EFEM18, and then evacuates the interior to carry the wafer into VTM11a. Also, when carrying a wafer out from VTM11a to EFEM18, LLM15 maintains the interior at vacuum, receives the wafer from VTM11a, and then pressurizes the interior to atmospheric pressure to carry the wafer into EFEM18. LLM15 and VTM11a are partitioned by an openable and closable gate valve 16. Also, LLM15 and EFEM18 are partitioned by an openable and closable gate valve 17.

[0017] The EFEM 18 is arranged opposite to the VTM 11a. The EFEM 18 is rectangular parallelepiped-shaped, equipped with an FFU (Fan Filter Unit), and is an air conveyance chamber maintained in an atmospheric pressure atmosphere. Two LLM 15s are connected to one side along the longitudinal direction of the EFEM 18. Five load ports (LP: Load Port) 19 are connected to the other side along the longitudinal direction of the EFEM 18. A FOUP (Front-Opening Unified Pod) (not shown), which is a container for accommodating a plurality of wafers, is placed on the LP 19. Inside the EFEM 18, an air conveyance robot (robot arm) for conveying wafers is arranged. The EFEM 18 is an example of a loader module.

[0018] The asher module 20 is connected to the VTM 11b. The asher module 20 has a cylindrical stage inside. The asher module 20 strips the resist of the wafer placed on the stage. The VTM 11b and the asher module 20 are partitioned by an openable and closable gate valve 21.

[0019] The storage module 22 is connected to the VTM 11b. The storage module 22 has a storage section for storing consumable members such as an edge ring, a cover ring, and an upper electrode inside, and a stage (mounting table) and a rotating section for aligning (positioning) the consumable members. The storage module 22 can move the consumable members from the storage section to the stage by the fork 120 of the robot arm 12b. The aligned consumable members are conveyed to the PM 13 by the robot arm 12b. The VTM 11b and the storage module 22 are partitioned by an openable and closable gate valve 23.

[0020] The substrate processing system 1 includes a control device 100. The control device 100 is, for example, a computer, and includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), an auxiliary storage device, and the like. The CPU operates based on a program stored in the ROM or the auxiliary storage device, and controls the operations of the respective components of the substrate processing system 1.

[0021] [Details of the storage module 22] FIG. 2 is a front cross-sectional view showing an example of the storage module in the first embodiment. FIG. 2 is a cross-sectional view of the storage module 22 as viewed from the VTM11b side. As shown in FIG. 2, in the storage module 22, a chamber 30 is installed on a frame 24, and a machine room 40 is provided above the chamber 30. The chamber 30 can switch the inside between vacuum and atmospheric pressure. Further, for example, N2 gas is supplied to the chamber 30 as a purge gas, and the pressure can be adjusted. The machine room 40 is in an atmospheric pressure atmosphere.

[0022] In the chamber 30, a storage 39 having a stage 31 and a basket 34 provided below the stage 31 is installed. The storage 39 can be moved up and down by a ball screw 36. In the machine room 40, a line sensor 32 for detecting the orientation of a consumable member and a motor 38 for driving the ball screw 36 are installed. A window 41 made of quartz or the like is provided between the chamber 30 and the machine room 40 so that the line sensor 32 can receive the light of a light emitting part 33 described later.

[0023] Stage 31 mounts the consumable member. Further, stage 31 has a light emitting portion 33 facing the line sensor 32. Stage 31 is rotatable in the θ direction by a rotating portion built under the mounting surface, and rotates the mounted consumable member, for example, edge ring 50, in a predetermined direction. That is, stage 31 aligns (positions) the edge ring 50. In alignment, the orienting flat (OF) of the edge ring 50 is aligned in a predetermined direction. Also, in alignment, the center position of the edge ring 50 may be aligned. Note that stage 31 is an example of a mounting table and a rotating portion. Further, in the following description, the edge ring 50 is used as an example of the consumable member for explanation.

[0024] Line sensor 32 detects the amount of light irradiated from the light emitting portion 33 described later, and outputs the detected light amount to the control device 100. The control device 100 detects the orienting flat of the edge ring 50 by utilizing the fact that the detected light amount changes depending on the presence or absence of the orienting flat of the edge ring 50. The control device 100 detects the orientation of the edge ring 50 based on the detected orienting flat. Line sensor 32 is, for example, a line sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor).

[0025] The cage 34 is provided below the stage 31, and the cassette 35 is placed inside. The cassette 35 is removable from the cage 34 and houses the edge ring 50 inside. The front side and the back side of the cassette 35 are open. The cage 34 and the cassette 35 are examples of a storage portion.

[0026] In addition to the stage 31 and the basket 34, the storage 39 has a guide 37 supported by a ball screw 36 on its side surface. The ball screw 36 connects the upper surface and the lower surface of the chamber 30, penetrates the upper surface of the chamber 30, and is connected to a motor 38 in the machine room 40. The penetration part on the upper surface of the chamber 30 is sealed so that the ball screw 36 can rotate. The ball screw 36 can move the storage 39 in the vertical direction (Z-axis direction) by rotating by the motor 38. Note that the ball screw 36 and the motor 38 are an example of the lifting part.

[0027] FIG. 3 is a side cross-sectional view showing an example of the storage module in the first embodiment. FIG. 3 is a cross-sectional view of the storage module 22 as viewed with the left side in the figure being the VTM11b side. As shown in FIG. 3, the storage module 22 is connected to the VTM11b via a gate valve 23. In the chamber 30, the fork 120 of the robot arm 12b of the VTM11b can be inserted via the gate valve 23. The fork 120 can carry in and out the edge ring 50 placed in the cassette 35, and place and acquire the edge ring 50 on the stage 31. The door 42 is a door that opens and closes when removing or installing the cassette 35 in the chamber 30.

[0028] The light emitting part 43 and the number detection sensor 44 detect the number of edge rings 50 placed on the cassette 35 when the storage 39 moves from the bottom side of the chamber 30 to an upper part such as a position facing the gate valve 23 with respect to the cassette 35. The light emitting part 43 is, for example, an LED (Light Emitting Diode), a semiconductor laser, or the like. The number detection sensor 44 detects the amount of light of the light irradiated from the light emitting part 43, and outputs the detected amount of light to the control device 100. The control device 100 detects the number of edge rings 50 by measuring the number of times the light irradiated from the light emitting part 43 is blocked by the edge ring 50 based on the detected amount of light. The number detection sensor 44 is, for example, a photodiode, a phototransistor, or the like. Further, the number detection sensor 44 may use a line sensor such as a CCD or a CMOS, for example.

[0029] FIG. 4 is a side cross-sectional view showing an example of the case of taking out the cassette from the storage module. As shown in FIG. 4, when replacing the edge ring 50 placed on the cassette 35, with the gate valve 23 closed, the storage 39 is moved to the bottom side of the chamber 30. Next, the door 42 is opened and the cassette 35 is taken out from the opening 45. Subsequently, a new cassette 35 on which a replacement edge ring 50 is placed is placed on the basket 34 through the opening 45, and the door 42 is closed.

[0030] Next, the stage 31 will be described with reference to FIGS. 5 and 6. FIG. 5 is a diagram showing an example of the relationship between the edge ring and the fork on the stage. FIG. 6 is a diagram showing an example of the state where the edge ring is placed on the stage. The stage 31 includes a light emitting part 33, a pedestal 60, a rotating part 61, a support pad 62, and a lift pin 63.

[0031] The light emitting part 33 is installed so as to face the line sensor 32. The light emitting part 33 is, for example, an LED or a semiconductor laser or the like. For example, when there is an Oriental flat (OF) of the edge ring 50 at the position shown in FIG. 5, the amount of light irradiated from the light emitting part 33 changes, so the Oriental flat can be detected. The rotating part 61 is provided on the pedestal 60. A plurality of support pads 62 are provided at the tip portions of, for example, three arms provided on the rotating part 61, and support the edge ring 50 during rotation. The rotating part 61 rotates by a drive mechanism (not shown) provided in the pedestal 60. The support pad 62 rotates as the rotating part 61 rotates. Four lift pins 63 are provided, for example, and are raised and lowered by a drive mechanism (not shown) provided in the pedestal 60. That is, the rotating part 61 is located directly below the support pad 62 on which the edge ring 50 is placed, and rotates the support pad 62 which is a mounting table. The rotating part 61, the support pad 62, and the lift pin 63 are provided at positions where they do not interfere with the fork 120 when the fork 120 on which the edge ring 50 is placed is inserted onto the stage 31.

[0032] [Conveying method] Next, the transport method according to the first embodiment will be described. FIG. 7 is a flowchart showing an example of the transport process in the first embodiment. In FIG. 7, the process from the installation of the cassette 35 to the acquisition of the edge ring 50 where the robot arm 12b is aligned will be described.

[0033] First, as an initial state, in the storage module 22, the gate valve 23 and the door 42 are closed, and the inside of the chamber 30 is pressure-regulated by N2 gas. The control device 100 executes the preparation for replacing the cassette 35 (step S1). Specifically, the control device 100 moves the storage 39 to the lowermost position. The control device 100 stops the supply of N2 gas to the chamber 30, performs vacuum pumping, and then introduces the atmosphere. The control device 100 turns off the power of the drive system and releases the lock of the door 42.

[0034] The operator opens the door 42 and replaces the cassette 35. When the door 42 is closed and a predetermined operation is performed by the operator, the control device 100 accepts the completion of the cassette 35 replacement operation (step S2).

[0035] When the replacement of the cassette 35 is completed, the control device 100 locks the door 42 and moves the storage 39 to the upper first position (step S3). As the first position, for example, the control device 100 moves the cassette 35 in the storage 39 to a position facing the gate valve 23. When the storage 39 is moved, the control device 100 detects the presence or absence of the cassette 35 in the storage 39 and detects the number of edge rings 50 by the number detection sensor 44. Note that the detection of the presence or absence of the cassette 35 may be performed using the number detection sensor 44, or a detection microswitch or the like may be provided in the basket 34. Further, a sensor for detecting whether the edge ring 50 protrudes from the cassette 35 may be provided in the basket 34.

[0036] When the storage 39 moves to the upper first position, the control device 100 evacuates the inside of the chamber 30, introduces N2 gas, and performs pressure regulation (step S4).

[0037] The control device 100 opens the gate valve 23 and inserts the fork 120 of the robot arm 12b into the chamber 30. The robot arm 12b acquires the edge ring 50 with the fork 120 from the cassette 35 and once retracts to the VTM 11b (step S5). Note that the control device 100 may close the gate valve 23 after the edge ring 50 has retracted to the VTM 11b.

[0038] FIG. 8 is a diagram showing an example of a state in which the fork acquires the edge ring from the cassette. FIG. 8 shows a state in which the edge ring 50 is being acquired with the fork 120 in step S5. In the example of FIG. 8, the storage 39 is stopped at a first position where it can acquire the edge ring 50 from the lower cassette 35 among the cassettes 35 stacked in two layers in the basket 34. Also, the fork 120 and the edge ring 50 are in a state of passing through the gate valve 23 to retract to the VTM 11b. Note that the first position is variable in the vertical direction according to the position of the edge ring 50 in the cassette 35.

[0039] Returning to the description of FIG. 7, when the retraction of the fork 120 and the edge ring 50 to the VTM 11b is completed, the control device 100 moves the storage 39 to a second position below (step S6). The control device 100 moves, for example, to a position where the mounting surface of the stage 31 faces the gate valve 23 as the second position. When the control device 100 has closed the gate valve 23, it opens the gate valve 23 after moving to the second position.

[0040] When the storage 39 moves to the second position, the control device 100 inserts the fork 120 and the edge ring 50 that have retracted to the VTM 11b into the chamber 30. The robot arm 12b places the edge ring 50 on the fork 120 on the stage 31 (step S7).

[0041] FIG. 9 is a diagram showing an example of a state where the fork places the edge ring on the stage. FIG. 9 shows a state where, in step S7, the edge ring 50 on the fork 120 is placed on the stage 31. In the example of FIG. 9, the fork 120 is in a state of placing the edge ring 50 on the stage 31 and retracting to the VTM 11b.

[0042] Return to the description of FIG. 7. After retracting the fork 120 of the robot arm 12b to the VTM 11b, the control device 100 moves the storage 39 to the upper third position (step S8). The third position is an example of an alignment position and can be, for example, the position shown in FIG. 2. Note that the control device 100 may close the gate valve 23 after the fork 120 retracts to the VTM 11b.

[0043] At the third position, the control device 100 executes alignment of the edge ring 50 by rotating the stage 31 while measuring the amount of light irradiated from the light emitting unit 33 by the line sensor 32 (step S9). That is, the control device 100 rotates the edge ring 50 to a predetermined orientation based on the orientation of the edge ring 50 detected by the line sensor 32. When the alignment of the edge ring 50 is completed, the control device 100 moves the storage 39 to the lower second position (step S10). If the control device 100 has closed the gate valve 23, it opens the gate valve 23 after moving to the second position.

[0044] When the storage 39 moves to the second position, the control device 100 inserts the fork 120 that has been retracted to the VTM 11b into the chamber 30. The robot arm 12b acquires the edge ring 50 from the stage 31 using the fork 120 (step S10). The control device 100 closes the gate valve 23 and conveys the edge ring acquired by the robot arm 12b to a predetermined PM13. In this way, in the storage module 22 with reduced footprint, alignment and conveyance of consumable members such as the edge ring 50 can be performed.

[0045] (Second Embodiment) In the first embodiment, the rotation part is provided in the stage 31 to rotate the edge ring 50 for alignment. However, the pedestal on which the mounting table, the storage part, and the elevating part are fixed may be rotated. The embodiment in this case will be described as the second embodiment. The same components as those in the first embodiment are denoted by the same reference numerals, and the description of the overlapping components and operations will be omitted.

[0046] [Configuration of Storage Module 22a] FIG. 10 is a front cross-sectional view showing an example of the storage module in the second embodiment. The storage module 22a shown in FIG. 10 has a chamber 70 and a machine room 90 instead of the chamber 30 and the machine room 40 as compared with the storage module 22 of the first embodiment. Further, the storage module 22a has a stage 71, an image sensor 72, a ball screw 76, a motor 78, and a storage 79 instead of the stage 31, the line sensor 32, the ball screw 36, the motor 38, and the storage 39. Furthermore, the storage module 22a has a pedestal 73 on which the ball screw 76 and the motor 78 are installed on the bottom surface of the chamber 70. The storage 79 has a stage 71 and a basket 34.

[0047] The stage 71 is an example of the mounting table and is fixed to the basket 34. Unlike the stage 31 of the first embodiment, the stage 71 does not rotate by itself. The image sensor 72 is installed in the machine room 90, images the edge ring 50 placed on the stage 71 through a window 81 made of quartz or the like, and outputs the captured image to the control device 100. The control device 100 detects the orientational flat of the edge ring 50 based on the captured image. The image sensor 72 is, for example, a camera using a sensor such as a CCD or a CMOS.

[0048] The pedestal 73 has an upper pedestal 74 and a base portion 75. The upper pedestal 74 is rotatable in the θ direction on the base portion 75, and a motor 78 connected to a ball screw 76 is installed. The base portion 75 is fixed to the bottom surface of the chamber 70 and rotates the upper pedestal 74 by a built-in motor (not shown). That is, the pedestal 73 is an example of a rotating portion. The ball screw 76 extends from the upper pedestal 74 to the upper surface of the chamber 70, and the upper portion is not fixed so as to be movable within the chamber 70. Note that the upper portion of the ball screw 76 may be configured to be movable along a guide rail (not shown) provided on the upper surface of the chamber 70. The ball screw 76 can move the storage 79 in the vertical direction (Z-axis direction) via the guide 37 by rotating by the motor 78. Note that the ball screw 76 and the motor 78 are examples of a lifting portion.

[0049] In the storage module 22a, when aligning the edge ring 50 placed on the stage 71, the upper pedestal 74 rotates, so that the stage 71 also rotates to align the position of the edge ring 50. Thereby, similar to the first embodiment, in the storage module 22a with a reduced footprint, alignment and conveyance of consumable members such as the edge ring 50 can be performed.

[0050] As described above, according to each of the above embodiments, the storage modules 22 and 22a have a mounting table, a sensor, a rotating portion, a storage portion, and a lifting portion. The mounting tables (stages 31 and 71) mount the consumable member (edge ring 50). The sensors (line sensor 32 and image sensor 72) detect the orientation of the consumable member. The rotating portions (stages 31 and pedestal 73) rotate the consumable member to a predetermined orientation based on the orientation of the consumable member detected by the sensor. The storage portions (cage 34 and cassette 35) are located below the mounting table and store the consumable member. The lifting portions (ball screws 36 and 76, motors 38 and 78) lift and lower the storage portion. As a result, the mounting table and the rotating portion can be integrated with the storage portion, so that the footprint of the storage module can be reduced.

[0051] Also, according to the first embodiment, the rotating part is located directly below the mounting table and rotates the mounting table. As a result, alignment of consumable members such as the edge ring 50 can be performed.

[0052] Also, according to the first embodiment, the elevating part raises and lowers the mounting table, the rotating part, and the storage part. As a result, the edge ring stored in the storage part can be moved to the mounting table.

[0053] Also, according to the second embodiment, the rotating part rotates the pedestal to which the mounting table, the storage part, and the elevating part are fixed. As a result, alignment of consumable members such as the edge ring 50 can be performed.

[0054] Also, according to each of the above embodiments, the consumable member is one or more of an edge ring, a cover ring, and an upper electrode. As a result, storage, alignment, and conveyance can be performed for each consumable member to be replaced.

[0055] Also, according to the first embodiment, the sensor is a line sensor. As a result, the orientation of consumable members such as the edge ring 50 can be detected.

[0056] Also, according to the second embodiment, the sensor is an image sensor. As a result, the orientation of consumable members such as the edge ring 50 can be detected.

[0057] Also, according to each of the above embodiments, the elevating part is a ball screw. As a result, the heights of the mounting table and the storage part can be accurately controlled.

[0058] Also, according to the first embodiment, the control device 100 is a method for transporting a consumable member (edge ring 50) in the storage module 22. With the door 42 and the gate valve 23 of the storage module 22 closed, the control device 100 executes a step of moving the storage unit (cassette 35) in which the consumable member is stored to a position facing the gate valve 23. The control device 100 executes a step of evacuating the inside of the storage module 22 (chamber 30) and adjusting the pressure with a purge gas. The control device 100 executes a step of opening the gate valve 23 and causing the vacuum transfer robot (robot arm 12b) to acquire the consumable member from the storage unit. The control device 100 executes a step of moving the mounting table (stage 31) located above the storage unit to a position facing the gate valve 23. The control device 100 executes a step of mounting the consumable member acquired by the vacuum transfer robot on the mounting table. The control device 100 executes a step of moving the mounting table to the alignment position and rotating the consumable member to perform alignment. The control device 100 executes a step of moving the mounting table to a position facing the gate valve. The control device 100 executes a step of causing the vacuum transfer robot to acquire the consumable member from the mounting table. As a result, in the storage module 22 with a reduced footprint, it is possible to perform alignment and transportation of consumable members such as the edge ring 50.

[0059] Each of the embodiments disclosed this time should be considered as illustrative in all respects and not restrictive. Each of the above embodiments may be omitted, substituted, or changed in various forms without departing from the scope and gist of the appended claims.

[0060] Also, in the second embodiment described above, the stage 71 is provided in the storage 79, but it is not limited to this. For example, a lift pin may be provided at the upper part of the basket 34 of the storage 79, and the edge ring 50 may be placed on the upper part of the basket 34 and rotated together with the upper pedestal 74. Further, the upper surface of the basket 34 and the upper surface of the cassette 35 may be made of a transparent member, and the orientation of the edge ring 50 stored at the uppermost part of the cassette 35 may be rotated by the rotation of the upper pedestal 74.

[0061] Also, in each of the above-described embodiments, the stages 31 and 71 were fixed to the basket 34, but the present invention is not limited to this. For example, the stages 31 and 71 and the basket 34 may be separated and moved up and down respectively.

Explanation of Signs

[0062] 1 Substrate processing system 10 Processing system main body 11a, 11b Vacuum transfer chamber (VTM) 12a, 12b Robot arm 13 Process module (PM) 15 Load lock module (LLM) 18 EFEM 20 Asher module 22, 22a Storage module 23 Gate valve 30, 70 Chamber 31, 71 Stage 32 Line sensor 33 Light emitting part 34 Basket 35 Cassette 36, 76 Ball screw 37 Guide 38, 78 Motor 39, 79 Storage 40, 90 Machine room 41, 81 Window 42 Door 50 Edge ring 72 Image sensor 73 Pedestal 74 Upper pedestal 75 Base part 100 Control device 120 Fork

Claims

1. A vacuum transfer module; at least one substrate processing module connected to the vacuum transfer module; a storage module connected to the vacuum transfer module, The storage module includes: A chamber; A support disposed within the chamber; a sensor for detecting an orientation of a consumable item used in the at least one substrate processing module on the support; a drive unit that rotates the support member based on the orientation of the consumable member detected by the sensor; a storage section disposed within the chamber below the support and configured to store one or more consumable items; a lifting unit that lifts and lowers the storage unit within the chamber; A substrate processing system comprising:

2. The consumable member is an annular member, The support includes a rotating base and a plurality of ring support members extending outwardly from the rotating base; the plurality of ring support members are configured to support the annular member; The substrate processing system of claim 1 .

3. The lifting unit is configured to lift and lower the storage unit together with the support. The substrate processing system of claim 1 .

4. The device further includes a base to which the support, the storage section, and the lifting section are fixed, The drive unit rotates the base. The substrate processing system of claim 1 .

5. the consumable member is one or more of an edge ring, a cover ring, and an upper electrode; The substrate processing system according to any one of claims 1 to 4.

6. The annular member is an edge ring or a cover ring. The substrate processing system of claim 2 .

7. The sensor is a line sensor. The substrate processing system according to any one of claims 1 to 6.

8. The sensor is an image sensor. The substrate processing system according to any one of claims 1 to 6.

9. The lifting unit is a ball screw. The substrate processing system according to any one of claims 1 to 8.

10. A chamber, A support disposed within the chamber; a sensor for detecting an orientation of the consumable component on the support; a drive unit that rotates the support member based on the orientation of the consumable member detected by the sensor; a storage section disposed within the chamber below the support and configured to store one or more consumable items; a lifting unit that lifts and lowers the storage unit within the chamber; A storage module having

11. The consumable member is an annular member, The support includes a rotating base and a plurality of ring support members extending outwardly from the rotating base; the plurality of ring support members are configured to support the annular member; 11. The storage module of claim 10.

12. The lifting section is configured to lift and lower the storage section together with the support.

11. The storage module of claim 10.

13. The device further includes a base to which the support, the storage section, and the lifting section are fixed, The drive unit rotates the base.

11. The storage module of claim 10.

14. The consumable member is one or more of an edge ring, a cover ring, and an upper electrode. A storage module according to any one of claims 10 to 13.

15. The annular member is an edge ring or a cover ring.

12. The storage module of claim 11.

16. The sensor is a line sensor. A storage module according to any one of claims 10 to 15.

17. The sensor is an image sensor. A storage module according to any one of claims 10 to 15.

18. The lifting unit is a ball screw. A storage module according to any one of claims 10 to 17.

Images