Substrate processing apparatus, analysis method, display device, and program

Abstract

To easily recognize detailed operation states of operation parts in association with processing results of substrates.SOLUTION: An information storage section stores operation information which is information relating to operation of an operation part group including a load port group 110, a processing unit group 210 and a conveyance mechanism. The operation information includes processing result information indicating processing results of substrates 9 in a substrate processing device 1, and operation state information indicating temporal breakdowns of operation states of the substrate processing device 1 and temporal breakdowns of operation states of operation parts included in the operation part group. A display control section displays the processing result information on a display in a state where pieces of the processing result information are aligned regarding alignment items selected from a predetermined alignment item group including arbitrary operation periods of the substrate processing device 1. The display control section displays, on the display, pieces of the operation state information sorted respectively into a plurality of large division operation states and a plurality of small division operation states. Thus, an operator can easily recognize the detailed operation states of the operation parts in association with the processing result of the substrate 9.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus and a technique for displaying and analyzing the operating state of the substrate processing apparatus.

Background Art

[0002] Conventionally, in a substrate processing apparatus for processing a semiconductor substrate (hereinafter simply referred to as a "substrate"), for example, a FOUP or the like in which the substrate is accommodated is opened by a load port, and the substrate is taken out from the FOUP or the like by an index robot. The substrate is transferred from the index robot to a center robot, and the center robot carries the substrate into one of a plurality of processing units and performs various processes.

[0003] In such a substrate processing apparatus, when an abnormality occurs in the processing unit, the processing amount and yield of the substrate decrease. Patent Document 1 discloses a technique for analyzing time-series data of measurement results of physical quantities (for example, temperature) indicating the state of the processing unit to identify the processing unit in which an abnormality has occurred and the cause of the abnormality.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in the above-described substrate processing apparatus, even when no abnormality occurs in operating units such as a load port, an indexer robot, a center robot, and a processing unit, for example, when a substrate is not supplied to a certain operating unit and the waiting time is long, the throughput of the substrate as the entire apparatus may decrease. In such a case, merely detecting an abnormality in the processing unit as in Patent Document 1 cannot identify the cause of the throughput decrease. For this reason, there is a demand to know the relationship between the processing result of the substrate in the substrate processing apparatus and the operating state of the operating unit.

[0006] The present invention has been made in view of the above problems, and an object thereof is to easily recognize the detailed operating state of an operating unit in association with the processing result of a substrate.

Means for Solving the Problems

[0007] The invention according to claim 1 is a substrate processing apparatus, comprising: a load port group which is a set of load ports for holding carriers in which a plurality of substrates are stored; a processing unit group which is a set of processing units where substrate processing is performed; a transfer mechanism for transferring substrates between the load port group and the processing unit group; an information storage unit for storing operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism; an information display unit; and a display control unit for causing the information display unit to display the operation information in a predetermined display mode. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation states which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states. The display control unit causes the information display unit to display the processing result information in a state sorted by sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus. The display control unit classifies the operation state information by the plurality of major classification operation states and the plurality of minor classification operation states in a state sorted by sorting items selected from the sorting item group, and causes the information display unit to display the classified operation state information The display control unit causes the information display unit to display the operation status information regarding the load port group in a side-by-side manner for each load port. The invention according to claim 2 is a substrate processing apparatus, including: a load port group which is a set of load ports that hold carriers in which a plurality of substrates are stored; a processing unit group which is a set of processing units where substrate processing is performed; a transfer mechanism that transfers substrates between the load port group and the processing unit group; an information storage unit that stores operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism; an information display unit; and a display control unit that causes the information display unit to display the operation information in a predetermined display mode. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus, and operation status information indicating the time breakdown of the operation status of the substrate processing apparatus and the time breakdown of the operation status of the operation units included in the operation unit group. The operation status of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation statuses which are major classifications, and a plurality of minor classification operation statuses obtained by further classifying the plurality of major classification operation statuses. The display control unit causes the information display unit to display the processing result information in a state where it is organized for organization items selected from a predetermined organization item group including an arbitrary operation period of the substrate processing apparatus. The display control unit classifies the operation status information for the organization items selected from the organization item group into the plurality of major classification operation statuses and the plurality of minor classification operation statuses, respectively, and causes the information display unit to display the classified information. Reference processing result information which is the processing result information in a predetermined reference aggregation period is prepared in advance, and the display control unit displays the processing result information in a selected designated aggregation period and the reference processing result information in a comparable manner. The invention according to claim 3 is a substrate processing apparatus, comprising: a load port group which is a set of load ports that hold carriers in which a plurality of substrates are stored; a processing unit group which is a set of processing units where substrate processing is performed; a transfer mechanism that transfers substrates between the load port group and the processing unit group; an information storage unit that stores operation information which is information regarding the operation of the operation unit group including the load port group, the processing unit group, and the transfer mechanism; an information display unit; and a display control unit that causes the information display unit to display the operation information in a predetermined display mode. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation states which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states. The display control unit causes the information display unit to display the processing result information in a state where it is organized according to an organization item group selected from a predetermined organization item group including an arbitrary operation period of the substrate processing apparatus. The display control unit classifies the operation state information according to the organization items selected from the organization item group, and causes the information display unit to display the classified operation state information for each of the plurality of major classification operation states and the plurality of minor classification operation states. Reference operation state information which is the operation state information in a predetermined reference aggregation period is prepared in advance. The display control unit displays the operation state information in a selected designated aggregation period, and highlights a major classification operation state or a minor classification operation state that has deteriorated by a predetermined degree or more compared to the reference operation state information among the operation state information in the designated aggregation period.

[0008] Claim 4 The invention described in any one of 1 to 3The substrate processing apparatus described in [reference], when the display control unit classifies the operation state information into the plurality of major operation states in a state sorted by the sorting items and causes the information display unit to display the information, the display control unit causes the information to be displayed in a first graph color-coded for each major operation state. When the display control unit classifies the operation state information into the plurality of minor operation states in a state sorted by the sorting items and causes the information display unit to display the information, the display control unit causes the information to be displayed in a second graph color-coded for each minor operation state. In the second graph, the plurality of minor operation states corresponding to one major operation state are color-coded with the same color system as the color of the one major operation state in the first graph.

[0009] Claim 5 The invention described in [reference] is the substrate processing apparatus described in claim 1 any one of 1 to 4 wherein the operation state information includes time stamps that are the start point and the end point of the operation state associated with the operation state of the operation unit, and the display control unit causes the information display unit to display a time-series display showing the operation state in time series.

[0010] Claim 6 The invention described in [reference] is the substrate processing apparatus according to any one of claims 1 to 5 wherein the display control unit causes the information display unit to display the operation state information regarding the operation unit group in a state where the operation units included in the operation unit group are listed side by side for each type of operation unit.

[0012] Claim 7 The invention described in [reference] is the substrate processing apparatus according to any one of claims 1 to 6 wherein the display control unit causes the information display unit to display the operation state information regarding the processing unit group in a state where the operation state information is listed side by side for each processing unit.

[0013] Claim 8 The invention described in [reference] is the substrate processing apparatus according to any one of claims 1 to 7The substrate processing apparatus according to any one of the following, wherein the sorting item group includes, as sorting items, one or more items among the operation period, operation time zone, operation day of the week, and processing recipe, and the display control unit can display the processing result information on the information display unit in a state sorted for the one or more items.

[0014] Claim 9 The invention described in claim 8 is a substrate processing apparatus according to any one of claims 1 to

[0017] Claim 10 The invention described in claim 9 is a substrate processing apparatus according to any one of claims 1 to

[0018] Claim 11 The invention described in claim 10 is an analysis method for analyzing the operation state of a substrate processing apparatus, comprising: a) in a substrate processing apparatus according to any one of claims 1 to beforeA step of classifying the plurality of major operation states in an organized state of the recorded operation period and causing the information display unit to display the classified states; c) a step of classifying one major operation state regarded as a cause of deterioration of the processing result among the plurality of major operation states into the plurality of minor operation states and causing the information display unit to display the classified states; d) paying attention to one minor operation state regarded as a cause of deterioration of the processing result among the plurality of minor operation states, selecting a related operation unit group which is a set of operation units related to the one minor operation state among the operation unit groups, and causing the information display unit to display a time-series display showing the operation state of the substrate processing apparatus in time series and a time-series display showing the operation state of each of the related operation unit groups in time series.

[0019] Claim 12 The invention according to claim is a display device for displaying the operation state of a substrate processing apparatus including a load port group which is a set of load ports holding carriers storing a plurality of substrates, a processing unit group which is a set of processing units for processing substrates, and a transfer mechanism for transferring substrates between the load port group and the processing unit group, including an information display unit and a display control unit for causing the information display unit to display operation information which is information related to the operation of the operation unit group including the load port group, the processing unit group, and the transfer mechanism in a predetermined display mode, the operation information including processing result information indicating the processing result of the substrate in the substrate processing apparatus and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group, the operation states of the substrate processing apparatus and the operation units being hierarchically classified into a plurality of major operation states which are major classifications and a plurality of minor operation states obtained by further classifying the plurality of major operation states, the display control unit causing the information display unit to display the processing result information in an organized state for an organizing item selected from a predetermined organizing item group including an arbitrary operation period of the substrate processing apparatus, and the display control unit causing the information display unit to display the operation state information in an organized state for the organizing item selected from the organizing item group, classified into the plurality of major operation states and the plurality of minor operation states respectively. The display control unit causes the information display unit to display the operation state information regarding the load port group in a state where it is listed for each load port. The invention according to claim 13 is a display device for displaying the operating state of a substrate processing apparatus including a load port group which is a set of load ports holding carriers in which a plurality of substrates are stored, a processing unit group which is a set of processing units where substrate processing is performed, and a transfer mechanism for transferring substrates between the load port group and the processing unit group. The display device includes an information display unit and a display control unit for causing the information display unit to display, in a predetermined display mode, operation information which is information regarding the operation of the operation unit group including the load port group, the processing unit group, and the transfer mechanism. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of the operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major operation states which are major classifications, and a plurality of minor operation states obtained by further classifying the plurality of major operation states. The display control unit causes the information display unit to display the processing result information in a state where it is organized for organizing items selected from a predetermined group of organizing items including an arbitrary operation period of the substrate processing apparatus. The display control unit classifies the operation state information for the organizing items selected from the group of organizing items and causes the information display unit to display the classified operation state information for each of the plurality of major operation states and the plurality of minor operation states. Reference processing result information which is the processing result information in a predetermined reference aggregation period is prepared in advance. The display control unit displays the processing result information in the selected designated aggregation period and the reference processing result information in a comparable manner. The invention according to claim 14 is a display device for displaying the operating state of a substrate processing apparatus including: a load port group which is a set of load ports holding carriers storing a plurality of substrates; a processing unit group which is a set of processing units where substrate processing is performed; and a transfer mechanism for transferring substrates between the load port group and the processing unit group. The display device includes an information display unit and a display control unit for causing the information display unit to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus, and operation state information indicating the time breakdown of the operating state of the substrate processing apparatus and the time breakdown of the operating states of the operation units included in the operation unit group. The operating states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operating states which are major classifications, and a plurality of minor classification operating states obtained by further classifying the plurality of major classification operating states. The display control unit causes the information display unit to display the processing result information in a state sorted by sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus. The display control unit causes the information display unit to display the operation state information in a state sorted by sorting items selected from the sorting item group, classified into the plurality of major classification operating states and the plurality of minor classification operating states respectively. Reference operation state information which is the operation state information in a predetermined reference aggregation period is prepared in advance. The display control unit displays the operation state information in a selected designated aggregation period, and highlights a major classification operating state or a minor classification operating state which has deteriorated by a predetermined degree or more compared with the reference operation state information among the operation state information in the designated aggregation period.

[0020] Claim 15 The invention according to claim is a program for causing an information display unit to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including the load port group, which is a set of load ports holding carriers in which a plurality of substrates are stored, the processing unit group, which is a set of processing units where substrate processing is performed, and a transfer mechanism for transferring substrates between the load port group and the processing unit group. The operation information includes processing result information indicating the processing result of the substrate in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states. When the program is executed by a computer, the processing result information is displayed on the information display unit in a state sorted for sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus, and the operation state information is sorted for sorting items selected from the sorting item group and is classified into the plurality of major classification operation states and the plurality of minor classification operation states, respectively, and then displayed on the information display unit , the operation state information regarding the load port group is displayed on the information display unit in a state listed for each load port. The invention according to claim 16 is a program for causing an information display unit to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including a load port group that holds carriers each containing a plurality of substrates, a process unit group that is a group of process units where substrate processing is performed, and a transfer mechanism that transfers substrates between the load port group and the process unit group. The operation information includes process result information indicating the processing result of substrates in the substrate processing apparatus and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of the operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major operation states which are major classifications and a plurality of minor operation states obtained by further classifying the plurality of major operation states. Reference process result information which is the process result information in a predetermined reference aggregation period is prepared in advance. When the program is executed by a computer, the process result information is displayed on the information display unit in a state where it is organized for organizing items selected from a predetermined organization item group including any operation period of the substrate processing apparatus, and the operation state information is classified into the plurality of major operation states and the plurality of minor operation states in a state where it is organized for the organizing items selected from the organization item group and is displayed on the information display unit, and the process result information and the reference process result information in a selected designated aggregation period are displayed so as to be comparable. The invention according to claim 17 is a program for causing an information display unit to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including a load port group which is a set of load ports holding carriers in which a plurality of substrates are stored, a processing unit group which is a set of processing units where substrate processing is performed, and a transfer mechanism for transferring substrates between the load port group and the processing unit group. The operation information includes processing result information indicating the processing result of substrates in the substrate processing apparatus and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group. The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation states which are major classifications and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states. Reference operation state information which is the operation state information in a predetermined reference aggregation period is prepared in advance. When the program is executed by a computer, the processing result information is displayed on the information display unit in a state sorted for sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus, and the operation state information is sorted for sorting items selected from the sorting item group, classified into the plurality of major classification operation states and the plurality of minor classification operation states respectively, and displayed on the information display unit. The operation state information in a selected designated aggregation period is displayed, and major classification operation states or minor classification operation states which have deteriorated by a predetermined degree or more compared with the reference operation state information among the operation state information in the designated aggregation period are highlighted.

Effect of the Invention

[0021] In the present invention, the detailed operation state of the operation unit can be easily recognized in association with the processing result of the substrate.

Brief Description of the Drawings

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Figure 19

Figure 20

Figure 21

Figure 22

Figure 23

Figure 24

Figure 25

Figure 26

Figure 27

Figure 28

Figure 29

Figure 30

Figure 31

Figure 32

Figure 33

BEST MODE FOR CARRYING OUT THE INVENTION

[0023] FIG. 1 is a plan view of a substrate processing apparatus 1 according to an embodiment of the present invention. FIG. 2 is a view of the substrate processing apparatus 1 taken along line II-II in FIG. 1. In each of the figures referred to below, an XYZ orthogonal coordinate system is appropriately attached, with the Z-axis direction being the vertical direction (i.e., the up-and-down direction) and the XY plane being the horizontal plane. Also, in FIG. 2, a part of the (+X) side of the substrate processing apparatus 1 is not shown.

[0024] The substrate processing apparatus 1 is an apparatus that continuously processes a plurality of substantially disk-shaped semiconductor substrates 9 (hereinafter simply referred to as "substrates 9"). In the substrate processing apparatus 1, for example, liquid processing for supplying a processing liquid to the substrate 9 is performed.

[0025] The substrate processing apparatus 1 includes a plurality of load ports 11, an index block 10, a processing block 20, a placement unit 40, and a computer 8. The index block 10 and the processing block 20 are also called index cells and processing cells, respectively. Further, the index block 10 is also called an Equipment Front End Module (EFEM) unit or the like. In the example shown in FIG. 1, three load ports 11, an index block 10, and a processing block 20 are arranged adjacent to each other in this order from the (-X) side to the (+X) side. In the following description, the plurality of load ports 11 are also collectively referred to as the "load port group 110".

[0026] The load port group 110, which is a set of the load ports 11, is arranged in the Y direction along the side wall on the (-X) side of the index block 10. Each of the plurality of load ports 11 is a holding table that holds a carrier 95. The carrier 95 can accommodate a plurality of disk-shaped substrates 9. The carrier 95 is, for example, a FOUP (Front Opening Unified Pod) that houses the substrate 9 in a sealed space. The carrier 95 is not limited to a FOUP and may be, for example, a SMIF (Standard Mechanical Inter Face) pod. Further, the number of load ports 11 included in the load port group 110 may be one or two or more.

[0027] The load port 11 is also an opening / closing mechanism for opening and closing the carrier 95. An opening and a shutter for the carrier are provided at positions corresponding to the carrier 95 on each load port 11 on the side wall on the (-X) side of the index block 10. When the substrate 9 is carried in and out of the carrier 95, the carrier 95 and the shutter for the carrier are automatically opened and closed.

[0028] For each load port 11, a carrier 95 containing a plurality of unprocessed substrates 9 is carried in from the outside of the substrate processing apparatus 1 by an AGV (Automated Guided Vehicle) or the like and placed thereon. Further, the processed substrate 9 for which the processing in the processing block 20 has been completed is again stored in the carrier 95 held at the load port 11. The carrier 95 containing the processed substrate 9 is carried out of the substrate processing apparatus 1 by an AGV or the like. That is, the load port 11 functions as a substrate integration unit that integrates the unprocessed substrate 9 and the processed substrate 9.

[0029] The index block 10 receives the unprocessed substrate 9 from the carrier 95 and transfers it to the processing block 20. Further, the index block 10 receives the processed substrate 9 carried out from the processing block 20 and carries it into the carrier 95. An index robot 12 for loading and unloading the substrate 9 to and from the carrier 95 is disposed in the internal space 100 of the index block 10.

[0030] The index robot 12 includes two transfer arms 121a and 121b, an arm stage 122, and a movable table 123. The two transfer arms 121a and 121b are mounted on the arm stage 122. The movable table 123 is screwed to a ball screw 124 extending in parallel with the arrangement direction of the plurality of load ports 11 (that is, along the Y direction), and is slidably provided with respect to two guide rails 125. When the ball screw 124 is rotated by a rotation motor (not shown), the entire index robot 12 including the movable table 123 moves horizontally along the Y direction.

[0031] The arm stage 122 is mounted on the movable table 123. The movable table 123 incorporates a motor (not shown) for rotating the arm stage 122 around a rotation axis facing in the vertical direction (that is, the Z direction), and a motor (not shown) for moving the arm stage 122 along the vertical direction. The transfer arms 121a and 121b are vertically spaced apart and disposed on the arm stage 122.

[0032] At the tips of the transfer arms 121a and 121b, substantially U-shaped hands 126 are provided in a plan view. The hand 126 includes, for example, a base portion that extends in the width direction and two claw portions that extend substantially parallel in the longitudinal direction perpendicular to the width direction from both ends in the width direction of the base portion. The transfer arms 121a and 121b respectively support the lower surface of a single substrate 9 by the hand 126. The hand 126 is provided with a clamp mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 126 is fixed with high positional accuracy. The clamp mechanism may be, for example, a plurality of convex portions that contact the side edge of the substrate 9 and mechanically limit the position of the substrate 9, or a plurality of suction ports that suck the lower surface of the substrate 9.

[0033] The transfer arms 121a and 121b move independently of each other along the horizontal direction (i.e., the radial direction centered on the rotation axis of the arm stage 122) by bending and extending a multi-joint mechanism by a drive mechanism (not shown) built in the arm stage 122. In other words, the hand 126 is provided on the index robot 12 so as to be able to move forward and backward, up and down, and rotate. The number of transfer arms in the index robot 12 may be one or three or more.

[0034] The index robot 12 is a transfer robot that transfers the substrate 9 between the carrier 95 placed on the load port 11 and the placement unit 40 by individually accessing the transfer arms 121a and 121b that hold the substrate 9 by the hand 126. The above-described movement mechanism in the index robot 12 is not limited to the above example, and other mechanisms may be used. For example, as a mechanism for moving the transfer arms 121a and 121b in the vertical direction, a belt feed mechanism using a pulley and a timing belt may be employed.

[0035] In processing block 20, a conveyance path 23 used for conveying substrate 9 and a plurality of processing units 21 arranged around the conveyance path 23 are provided. In the example shown in FIG. 1, the conveyance path 23 extends in the X direction at the center in the Y direction of the processing block 20. In the internal space 230 of the conveyance path 23, a center robot 22 for loading and unloading substrate 9 to and from each processing unit 21 is arranged.

[0036] The center robot 22 includes two transfer arms 221a, 221b, an arm stage 222, and a base 223. The two transfer arms 221a, 221b are mounted on the arm stage 222. The base 223 is fixed to the frame of the processing block 20. Therefore, the base 223 of the center robot 22 does not move in the horizontal and vertical directions. Note that the base 223 of the center robot 22 may be movable in the horizontal direction, for example.

[0037] The arm stage 222 is mounted on the base 223. The base 223 incorporates a motor (not shown) for rotating the arm stage 222 around a rotation axis facing the vertical direction, and a motor (not shown) for moving the arm stage 222 along the vertical direction. On the arm stage 222, the transfer arms 221a, 221b are arranged vertically spaced apart.

[0038] At the tips of the transfer arms 221a, 221b, substantially U-shaped hands 226 are provided in plan view. The hand 226 includes, for example, a base portion that spreads in the width direction, and two claw portions that extend substantially parallel in the longitudinal direction perpendicular to the width direction from both ends in the width direction of the base portion. Each of the transfer arms 221a, 221b supports the lower surface of one substrate 9 by the hand 226. The hand 226 is provided with a clamp mechanism (not shown), and the relative position of the substrate 9 with respect to the hand 226 is fixed with high positional accuracy. The clamp mechanism may be, for example, a plurality of convex portions or the like that contact the side edge of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that suck the lower surface of the substrate 9.

[0039] The transfer arms 221a and 221b move independently of each other along the horizontal direction (i.e., the radial direction centered on the rotation axis of the arm stage 222) by bending the multi-joint mechanism by a drive mechanism (not shown) built into the arm stage 222. In other words, the hand 226 is provided on the center robot 22 so as to be able to move forward and backward, up and down, and rotate. Note that the number of transfer arms in the center robot 22 may be one or three or more.

[0040] The center robot 22 is a transfer robot that transfers the substrate 9 between the mounting unit 40 and the processing units 21 by individually accessing the transfer arms 221a and 221b that hold the substrate 9 with the hand 226 to the mounting unit 40 and the plurality of processing units 21. The above-described moving mechanism in the center robot 22 is not limited to the above example, and other mechanisms may be used. For example, as a mechanism for moving the transfer arms 221a and 221b in the vertical direction, a belt feed mechanism using a pulley and a timing belt may be employed.

[0041] Each processing unit 21 is a processing unit that performs a predetermined process on the substrate 9. In the examples shown in FIGS. 1 and 2, twelve processing units 21 are provided in the processing block 20. Specifically, three processing units 21 stacked in the Z direction are arranged in four sets around the center robot 22 in a plan view. In the following description, the plurality of processing units 21 are also collectively referred to as a "processing unit group 210". The number of processing units 21 included in the processing unit group 210 may be variously changed within a range of one or more.

[0042] The mounting unit 40 is provided at the connection portion between the index block 10 and the processing block 20. As described above, the index robot 12 and the center robot 22 can access the mounting unit 40. The mounting unit 40 is connected to a processing unit group 210, which is a set of processing units 21, via a transfer path 23 where the center robot 22 is arranged.

[0043] The indexer robot 12 places the unprocessed substrate 9 unloaded from the carrier 95 on the placement unit 40. The center robot 22 unloads the unprocessed substrate 9 from the placement unit 40 and loads it into the processing unit 21. Further, the center robot 22 places the processed substrate 9 unloaded from the processing unit 21 on the placement unit 40. The indexer robot 12 unloads the processed substrate 9 from the placement unit 40 and loads it into the carrier 95. In other words, the indexer robot 12 and the center robot 22 are a transport mechanism for transporting the substrate 9 between the load port group 110 and the processing unit group 210. Further, the placement unit 40 temporarily holds the unprocessed substrate 9 passed from the indexer robot 12 to the center robot 22 and the processed substrate 9 passed from the center robot 22 to the indexer robot 12.

[0044] FIG. 3 is a diagram showing an example of the processing unit 21. The processing unit 21 includes a housing 31, a substrate holding unit 32, a substrate rotation mechanism 33, a cup unit 34, and a processing nozzle 35. The substrate holding unit 32, the substrate rotation mechanism 33, the cup unit 34, and the processing nozzle 35 are housed inside the housing 31. An opening 311 for loading the substrate 9 inside by the center robot 22 (see FIGS. 1 and 2) is provided in the side wall of the housing 31. The opening 311 can be opened and closed, and is opened when the substrate 9 is loaded and unloaded, and is closed when the substrate 9 is being processed. In the processing unit 21, for example, liquid processing for supplying a processing liquid to the substrate 9 is performed.

[0045] In the example shown in FIG. 3, the substrate holding unit 32 is a mechanical chuck that holds the substrate 9 in a horizontal state. The substrate holding unit 32 includes a base 321, a shaft 322, and a plurality of chuck pins 323. The base 321 is a substantially disk-shaped member centered on a rotation axis J1 facing in the vertical direction. Hereinafter, the vertical direction in FIG. 3 will be described as being the same as the above-described Z direction, but it does not necessarily have to be the same. The shaft 322 is a substantially cylindrical or substantially columnar member centered on the rotation axis J1. The shaft 322 extends downward from the lower surface of the base 321 and is connected to the substrate rotation mechanism 33.

[0046] A plurality (e.g., six) of chuck pins 323 are erected on the upper surface of the base 321. The plurality of chuck pins 323 are circumferentially arranged at the outer peripheral portion of the upper surface of the base 321. The plurality of chuck pins 323 directly contact the outer peripheral portion of the substrate 9 and mechanically hold the outer peripheral portion of the substrate 9. In a state where the substrate 9 is held by the plurality of chuck pins 323, the upper surface of the base 321 faces the lower surface of the substrate 9 in the vertical direction while being spaced downward from the lower surface of the substrate 9.

[0047] The substrate rotation mechanism 33 rotates the substrate 9 held by the substrate holding portion 32 by rotating the substrate holding portion 32 about the rotation axis J1. The substrate rotation mechanism 33 is, for example, an electric motor connected to the shaft 322 of the substrate holding portion 32. The substrate rotation mechanism 33 may be a rotation mechanism other than an electric motor. The substrate rotation mechanism 33 is housed inside a cover 331 disposed below the substrate holding portion 32.

[0048] The processing nozzle 35 discharges a processing liquid from above the substrate 9 toward the upper surface of the substrate 9. In FIG. 3, the illustration of the configuration for supporting the processing nozzle 35 above the substrate 9 is omitted. The cup portion 34 is a substantially cylindrical member that surrounds the periphery of the substrate holding portion 32 over the entire circumference. The cup portion 34 is a liquid receiver that receives the processing liquid and the like scattered from the rotating substrate 9 to the surroundings. The cup portion 34 is movable in the vertical direction by a cup lifting mechanism (not shown). When the substrate 9 is being processed, the cup portion 34 is disposed at a position facing the side edge of the substrate 9 in the radial direction (hereinafter, also simply referred to as the "radial direction") centered on the rotation axis J1 as shown in FIG. 3. Further, when the substrate 9 is transferred between the hand 226 of the center robot 22 and the substrate holding portion 32, the cup portion 34 moves downward from the position shown in FIG. 3.

[0049] FIG. 4 is a diagram showing the configuration of the computer 8. The computer 8 is a normal computer including a processor 81, a memory 82, an input / output unit 83, and a bus 84. The bus 84 is a signal circuit connecting the processor 81, the memory 82, and the input / output unit 83. The memory 82 stores various information. The memory 82 reads and stores, for example, a program 89 pre-stored in a storage medium 80. The storage medium 80 is, for example, a USB memory or a CD-ROM. The processor 81 executes various processes (for example, numerical calculations) while using the memory 82 and the like according to the program 89 and the like stored in the memory 82. The input / output unit 83 includes a keyboard 85 and a mouse 86 that receive inputs from an operator, a display 87 that displays outputs from the processor 81 and the like, and a transmission unit 88 that transmits outputs from the processor 81 and the like.

[0050] FIG. 5 is a block diagram showing functions realized by executing the program 89 by the computer 8. As functions realized by the computer 8, the substrate processing apparatus 1 includes an information storage unit 61 and a display control unit 62. The information storage unit 61 is mainly realized by the memory 82 and stores various information such as operation information described later. The display control unit 62 is mainly realized by the processor 81. Based on inputs from the keyboard 85 and the mouse 86 and the like, the display control unit 62 extracts information corresponding to the input from the operation information stored in the information storage unit 61 and causes the display 87, which is an information display unit, to display it in a predetermined display mode (that is, format).

[0051] The operation information stored in the information storage unit 61 is information regarding the operation of the operation unit group, which is a set of operation units such as the above-described load port group 110, the transfer mechanism (i.e., the indexer robot 12 and the center robot 22), and the processing unit group 210. The operation unit group may include a configuration other than the load port group 110, the transfer mechanism, and the processing unit group 210 (for example, a chemical cabinet that supplies a processing liquid to the processing unit group 210) as an operation unit. As shown in FIG. 6, the operation information 70 includes processing result information 71 and operation state information 72. The processing result information 71 is information indicating the processing result of the substrate 9 in the substrate processing apparatus 1. The operation state information 72 is information indicating the time breakdown of the operation state of the substrate processing apparatus 1 and the time breakdown of the operation states of the operation units included in the operation unit group. The information storage unit 61 acquires an electrical signal such as a command signal from the operation control unit that controls the operation of the operation unit group, and generates and stores the processing result information 71 and the operation state information 72 based on the command signal and the like. The operation control unit is realized by the above-described computer 8.

[0052] The processing result information 71 includes, for example, the number of processed substrates 9, the number of normally processed substrates, and the number of abnormally processed substrates processed by the substrate processing apparatus 1 during a predetermined period. The predetermined period is, for example, one day, one week, one month, or the like. The processing result information 71 may include various other information other than the above. For example, the number of processed substrates 9 by recipe in the substrate processing apparatus 1, the number of processed substrates 9 per available processing time, the number of processed substrates 9 per one processing unit 21, the number of substrates 9 checked by an alarm, the usage amount of the processing liquid in the substrate processing apparatus 1, etc. may be included in the processing result information 71. The processing result information 71 can be acquired by various known means related to substrate processing. For example, the number of processed substrates 9 can be acquired by counting the number of substrates 9 carried into the substrate processing apparatus 1 and carried out after processing.

[0053] The operation states of the substrate processing apparatus 1 and the operation unit group, the time breakdowns of which are indicated by the operation state information 72, are hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states.

[0054] Table 1 shows an example of the hierarchical classification of the operating states. In the example shown in Table 1, the major classification of the operating states includes three operating states: "Stopped", "Standby", and "Processing". In the present embodiment, the operating states of each of the substrate processing apparatus 1, each load port 11, the indexer robot 12, the center robot 22, and each processing unit 21 are hierarchically classified as shown in Table 1.

[0055] [Table 1]

[0056] The "Stopped" state is classified into five sub-classified operating states: "Power Off", "Not Ready", "Alarm Stop", "Maintenance Required", and "Recovery in Progress". "Power Off" indicates a state where the power of the substrate processing apparatus 1 or the operating unit is turned off. "Not Ready" indicates a state where the preparation for processing the substrate 9 is not complete in the substrate processing apparatus 1 or the operating unit. "Alarm Stop" indicates a state where the processing of the substrate 9 has been stopped due to an alarm. "Maintenance Required" indicates a state where the operation has stopped due to an abnormality process or the like and recovery work by an operator is required. "Recovery in Progress" indicates a state where the operator is performing recovery work.

[0057] The "standby" state is classified into three sub-operation states: "Ready", "Operator Stop", and "Prepare". "Ready" indicates a state where the substrate 9 can be processed, but the substrate 9 is waiting because there is no instruction to process it. "Operator Stop" indicates a state where the processing of the substrate 9 is interrupted by a stop instruction from the operator. "Prepare" is a preparatory process for processing the substrate 9, and after the completion of the preparatory process, the processing of the substrate is automatically started. The "processing" state includes one sub-operation state, "Execute". "Execute" indicates a state where the substrate 9 is being processed normally. Note that the "processing" state may also be classified into a plurality of sub-operation states, similar to the "stop" state and the "standby" state.

[0058] The operation state information 72 can be obtained by various known means related to substrate processing, such as aggregating signals from a control unit that controls each operation unit. Note that the hierarchical classification of the above operation states may be changed in various ways. For example, the major operation state and the sub-operation state may be classified according to classification criteria different from those in Table 1. Also, in the substrate processing apparatus 1 and the plurality of operation units, the classification of the major operation state and the sub-operation state does not need to be common and may be different from each other. The operation state information 72 may include information other than the major operation state and the sub-operation state. For example, the plurality of sub-operation states may be further classified into a plurality of finer sub-sub-operation states. Alternatively, the operation state information 72 may include sub-data such as the number of occurrences of alarms in the substrate processing apparatus 1 and the residence time of the substrate 9 in the processing block 20.

[0059] The display control unit 62 causes the display 87 to display the processing result information 71 in a state where it is organized for one or more organization items selected from a predetermined set of organization items. The set of organization items includes, as an organization item, an arbitrary operation period of the substrate processing apparatus 1. The operation period is, for example, the day on which the substrate 9 is processed in the substrate processing apparatus 1 (hereinafter, also referred to as the "processing day"). Further, the operation period may be, for example, the week, month, and / or year in which the substrate 9 is processed in the substrate processing apparatus 1. The set of organization items may include various organization items other than the operation period (for example, the type of recipe, etc.). The display control unit 62 causes the display 87 to display, for example, the number of processed substrates 9 processed by the substrate processing apparatus 1 in a state where it is organized for each processing day, which is one organization item.

[0060] FIG. 7 is a diagram showing an example of the display on the display 87. The graph 511 in FIG. 7 is a bar graph showing the number of processed substrates 9 (that is, the details of the production volume) for each processing day of the substrate processing apparatus 1 in a predetermined period (from April 1st to 15th). At the upper part of the display 87, the predetermined period (hereinafter, also referred to as the "designated aggregation period") is displayed. The designated aggregation period can be changed by input by the operator or the like. The horizontal axis of the graph 511 indicates the processing day, which is one organization item, and the vertical axis indicates the number of processed substrates. Further, in the window 512 at the upper left of the graph 511, the total number of processed substrates 9 (that is, the total production volume) in the designated aggregation period is displayed. As shown in FIG. 7, the above-mentioned organization item is a parameter that serves as a reference (for example, the axis of the graph) when displaying the processing result information 71, and the processing result information 71 to be analyzed is displayed on the display 87 separately for each organization item (that is, in a state where it is organized for the organization item). That is, the organization item is also an analysis item for analyzing the processing result information 71. Further, as will be described later, the organization item is a parameter that serves as a reference (for example, the axis of the graph) when displaying the operation state information 72, and is also an analysis item for analyzing the operation state information 72.

[0061] The graph 513 in FIG. 7 is a pie chart showing the operation status information 72 of the substrate processing apparatus 1. In the graph 513, the operation status of the substrate processing apparatus 1 during the specified aggregation period (April 1st to 15th) is shown in a state classified into major operation statuses (that is, processing, standby, and stop). In other words, the graph 513 shows the breakdown of the operation status of the substrate processing apparatus 1 during the specified aggregation period.

[0062] The display control unit 62 can also display the processing result information 71 and the operation status information 72 on the display 87 for other substrate processing apparatuses 1 having the same configuration as the above-described substrate processing apparatus 1. The processing result information 71 and the operation status information 72 of the other substrate processing apparatus 1 may be stored in the information storage unit 61 in the computer 8 of the substrate processing apparatus 1 shown in FIG. 1, or may be stored in the computer of the other substrate processing apparatus 1 accessible by the computer 8.

[0063] Also, the display control unit 62 is realized by a shared computer connected to a plurality of substrate processing apparatuses 1, and the processing result information 71 and the operation status information 72 of each substrate processing apparatus 1 stored in the information storage unit 61 of each substrate processing apparatus 1 may be displayed on the display of the shared computer. In this case, a substrate processing system is configured by the shared computer and a plurality of substrate processing apparatuses 1 and the like. Note that the above-described information storage unit 61 is also realized by the shared computer, and the processing result information 71 and the operation status information 72 of each substrate processing apparatus 1 may be stored in the information storage unit 61 of the shared computer.

[0064] In the left switching window 514 in FIG. 7, the names of a plurality of substrate processing apparatuses 1, namely, "Apparatus A", "Apparatus B", "Apparatus C", and "Apparatus D", are displayed. For example, by clicking on any one of these names, the processing result information 71 and the operating state information 72 of the corresponding substrate processing apparatus 1 are displayed on the display 87. In FIG. 7, the processing result information 71 and the operating state information 72 of the substrate processing apparatus 1 corresponding to Apparatus A, which is indicated by white characters, are displayed. Note that when the processing result information 71 and the operating state information 72 of a plurality of substrate processing apparatuses 1 are displayed on the display 87 in this way, the name of the substrate processing apparatus 1 is also included in the above-described sorting item group.

[0065] Also, in the left switching window 514 in FIG. 7, by clicking on "All Apparatuses" which combines Apparatuses A to D, the processing result information 71 and the operating state information 72 of the four substrate processing apparatuses 1 (that is, Apparatuses A to D) combined are displayed on the display 87. Specifically, in the graph 511, the total number of processed substrates 9 in the four substrate processing apparatuses 1 is shown for each processing day for the specified aggregation period (from April 1st to 15th). Also, in the graph 513, the breakdown of the operating states of the four substrate processing apparatuses 1 combined is shown.

[0066] The display control unit 62 can also display the processing result information 71 and the operating state information 72 on the display 87 for each of the three load ports 11, the indexer robot 12, the center robot 22, and the twelve processing units 21 (see FIGS. 1 and 2), which are the operating parts of the substrate processing apparatus 1. In the switching window 514 in FIG. 7, the names of the operating parts of Apparatus A, which is the currently selected substrate processing apparatus 1 (LP1 to LP3, IR, CR, and MPC1 to MPC12), are displayed. For example, by clicking on any one of these names, the processing result information 71 and the operating state information 72 of the corresponding operating part are displayed on the display 87. Note that the processing result information 71 and the operating state information 72 of each operating part can be similarly displayed for Apparatuses B to D.

[0067] FIG. 8 is a modification of the graph 511 in FIG. 7 into a stacked vertical bar graph 511a (hereinafter also simply referred to as "graph 511a") showing the breakdown of the operating state of the substrate processing apparatus 1 for each processing day during the specified aggregation period (that is, the details of the operating rate). The change of such a graph, etc. is realized, for example, by an operator operating the mouse 86 or the like to switch the pull-down menu of the graph display on the display 87. The same applies to the changes of graphs and the like described later. In this way, the display control unit 62 can also classify the operation state information 72 into a plurality of major operation states in a state where it is sorted by the processing day (that is, one sorting item selected from the above-described sorting item group) and display it on the display 87. In other words, on the display 87, the operation state information 72 to be analyzed is displayed separately for each processing day in a state where it is classified into a plurality of major operation states. In the graph 511a, for example, the three major operation states of "processing", "standby", and "stop" are color-coded and displayed in different colors for each major operation state. In FIG. 8, the graph 513 is the same as that in FIG. 7 and is color-coded in the same way as the graph 511a. Note that the graph 511a may be displayed as a graph other than the stacked vertical bar graph exemplified in Figure 8 (for example, a stacked horizontal bar graph, a pie chart, etc.). The same applies to the graphs 511b to 511d and 526 to 528 described later.

[0068] FIG. 9 shows the graph 511a in FIG. 8 changed to a stacked vertical bar graph 511b (hereinafter also simply referred to as "graph 511b") showing a more detailed breakdown of the operating state of the substrate processing apparatus 1 for each processing day during the specified aggregation period. If the graph 511a and the graph 511b are respectively referred to as the "first graph" and the "second graph", the second graph is a breakdown of the first graph. In this way, the display control unit 62 can also classify the operation state information 72 into a plurality of sub-operation states (see Table 1) in a state where the operation state information 72 is organized for each processing day (that is, one organization item selected from the above-described organization item group) and display it on the display 87. In other words, on the display 87, the operation state information 72 to be analyzed is displayed separately for each processing day in a state where it is classified into a plurality of sub-operation states.

[0069] In FIG. 9, the graph 513 in FIG. 8 is also changed to a graph 513b showing the operating state of the substrate processing apparatus 1 during the specified aggregation period in a state where it is classified into sub-operation states. Also in FIG. 9, for ease of understanding of the graph, three sub-operation states included in the major operation state "standby" in the graphs 511b and 513b are surrounded by a thick line. For the actual graph 511b, a legend showing a plurality of sub-operation states is displayed within the window 515. Similarly, for the graph 513b, a legend showing a plurality of sub-operation states is displayed.

[0070] FIG. 10 is a diagram showing an enlarged view of the leftmost graph element 516b of the graph 511b in FIG. 9. When the graphs 511a and 511b are displayed in color, in the graph element 516b, preferably, the three sub-operation states "instruction waiting", "stop instruction", and "preparation process" corresponding to the major operation state "standby" are colored in the same color system as the color of "standby" in the graph 511a (see FIG. 8). Also, preferably, the five sub-operation states "power off", "before preparation", "alarm process stop", "recovery work required", and "recovery work in progress" corresponding to the major operation state "stop" are colored in the same color system as the color of "stop" in the graph 511a. More preferably, the sub-operation state "processing" corresponding to the major operation state "processing" is colored in the same color system as the color of "processing" in the graph 511a. Thereby, the operator can easily recognize the breakdown of the operation state of the substrate processing apparatus 1. Note that the "same color system" in the present embodiment is a concept including adjacent similar colors in the color wheel and colors obtained by changing the color tone (tone) of one color.

[0071] When "standby" is displayed in green in the graph 511a, in the graph 511b, "instruction waiting", "stop instruction", and "preparation process" are displayed in, for example, dark green, medium green, and light green, respectively. Also, when "stop" is displayed in red in the graph 511a, in the graph 511b, "power off", "before preparation", "alarm process stop", "recovery work required", and "recovery work in progress" are displayed in, for example, reds with different densities from each other. The graph 513b is also colored and displayed in the same manner as the graph 511b.

[0072] In the substrate processing apparatus 1, the graph 511 (see FIG. 7) showing the number of processed substrates 9 per processing day described above and the graphs 511a and / or 511b (see FIGS. 8 and 9) showing the operation state per processing day may be simultaneously displayed on the display 87. Alternatively, the graph 511a showing the operation state per processing day classified into major operation states and the graph 511b showing the operation state per processing day classified into sub-operation states may be simultaneously displayed on the display 87.

[0073] In FIG. 11, for one processing day (e.g., 4 / 1) among a plurality of processing days whose operating states are shown in the graph 511b in FIG. 9, a stacked vertical bar graph 511c (hereinafter, also simply referred to as "graph 511c") showing the detailed breakdown of the operating state for each load port 11 is displayed on the display 87. In other words, the display control unit 62 organizes the operating state information 72 regarding the load port group 110 classified into the sub-category operating states with the names of the load ports 11 (that is, LP1 to LP3) as the above-mentioned organizing items, and causes the display 87 to display it as the graph 511c in a state where it is listed for each load port 11. Thereby, the operating states of the plurality of load ports 11 included in the load port group 110 can be easily compared. Note that in the graph 511c, the operating state information 72 of the load port group 110 classified into the major-category operating states may be displayed.

[0074] In FIG. 12, for one processing day (e.g., 4 / 1) among a plurality of processing days whose operating states are shown in the graph 511b in FIG. 9, a stacked vertical bar graph 511d (hereinafter, also simply referred to as "graph 511d") showing the detailed breakdown of the operating state for each processing unit 21 is displayed on the display 87. In other words, the display control unit 62 organizes the operating state information 72 regarding the processing unit group 210 classified into the sub-category operating states with the names of the processing units 21 (that is, MPC1 to MPC12) as the above-mentioned organizing items, and causes the display 87 to display it as the graph 511d in a state where it is listed for each processing unit 21. Thereby, the operating states of the plurality of processing units 21 included in the processing unit group 210 can be easily compared. Note that in the graph 511d, the operating state information 72 of the processing unit group 210 classified into the major-category operating states may be displayed.

[0075] The above operation status information 72 includes, in addition to the time breakdown of the operation status of each operation unit, time stamps that are the start point and end point of the operation status associated with the operation status of each operation unit. For example, when the operation status of the load port 11 changes from "waiting for instruction" in the sub-operation status to "processing", the end point of "waiting for instruction" (i.e., the end time) and the start point of "processing" (i.e., the start time) are included in the operation status information 72 as time stamps. Also, when the operation status of the load port 11 changes from "processing" in the sub-operation status to "preparation processing", the end point of "processing" (i.e., the end time) and the start point of "preparation processing" (i.e., the start time) are included in the operation status information 72 as time stamps.

[0076] Specifically, when a command signal or the like corresponding to "processing" is transmitted from the above operation control unit to the load port 11 in the "waiting for instruction" state, the time when the command signal or the like is transmitted is acquired by the information storage unit 61 as the end point of "waiting for instruction" and the start point of "processing", and is included in the operation status information 72 as a time stamp. Also, when a command signal or the like corresponding to "preparation processing" is transmitted from the above operation control unit to the load port 11 in the "processing" state, the time when the command signal or the like is transmitted is acquired by the information storage unit 61 as the end point of "processing" and the start point of "preparation processing", and is included in the operation status information 72 as a time stamp.

[0077] The control unit 62 can cause the display 87 to display a time-series display (so-called timeline) that shows the operating state of the operating unit in time series based on the above-described timestamp. FIG. 13 is a diagram showing a time-series display 517 of the operating state of one load port 11. Each rectangle in the time-series display 517 corresponds to a sub-operating state of the operating state of the load port 11. In FIG. 13, the application of parallel hatching to each sub-operating state is omitted. In the window 518, the timestamps of the sub-operating states of the load port 11 are displayed. Based on the time-series display 517 and the timestamp, the operator can easily recognize the change over time of the operating state of the operating unit. In the substrate processing apparatus 1, a time-series display 517 of the operating state of an operating unit other than the load port 11 (for example, the processing unit 21) may be displayed on the display 87. Also, time-series displays 517 of the operating states of a plurality of operating units may be simultaneously displayed on the display 87 in a state where they are listed side by side for each operating unit.

[0078] Next, an analysis of the operating state of the substrate processing apparatus 1 using the above-described processing result information 71 and operating state information 72 displayed on the display 87 will be described. FIG. 14 is a diagram showing an example of the flow of operating state analysis.

[0079] First, as shown in FIG. 15, the operator causes the display 87 to display the processing result information 71 and the operating state information 72 of the above-described four substrate processing apparatuses 1 (that is, apparatuses A to D) combined. In the bar graph 521, the total number of processed substrates 9 in the four substrate processing apparatuses 1 is shown for each processing day for the above-described specified aggregation period (April 1st to 15th). In other words, the processing result information 71 is displayed as the graph 521 in a state sorted by the processing day of the substrate 9 (step S11). Also, in the graph 523, the breakdown of the operating state of the four substrate processing apparatuses 1 combined is shown. In the window 522, the total number of processed substrates 9 (that is, the total production volume) in the specified aggregation period is displayed.

[0080] When the operator confirms that the total number of substrates 9 processed during the specified aggregation period is less than normal and that there are processing days (e.g., 4 / 1 and 4 / 2) with fewer processed substrates than other processing days, as shown in FIG. 16, the display control unit 62 causes the bar graph 525 showing the number of processed substrates for each substrate processing apparatus 1 during the specified aggregation period to be displayed on the display 87 (step S12). Specifically, in accordance with an operation by the operator, the display control unit 62 causes the graph 525 based on the processing result information 71 to be displayed on the display 87. Thereby, the operator can confirm which substrate processing apparatus 1 is the cause of the decrease in the number of processed substrates.

[0081] When the operator confirms that the number of substrates processed by the substrate processing apparatus 1 named "Apparatus A" during the specified aggregation period is less than that of other substrate processing apparatuses 1, as shown in FIG. 17, the stacked vertical bar graph 526 (hereinafter also simply referred to as "graph 526") that classifies and shows the breakdown of the operating status for each processing day of Apparatus A during the specified aggregation period into a plurality of major classification operating statuses is displayed on the display 87 (step S13). In other words, the operating status information 72 related to Apparatus A is classified and displayed in a plurality of major classification operating statuses in a state where it is organized for the processing days of the substrate 9. Specifically, when the operator operates the switching window 524, the display control unit 62 causes the graph 526 to be displayed on the display 87 based on the operating status information 72. Thereby, the operator can easily recognize one or more major classification operating statuses regarded as the cause of the decrease in the number of processed substrates (i.e., the cause of the deterioration of the processing result) in the substrate processing apparatus 1. Hereinafter, the information displayed by the operator on the display 87 is that of Apparatus A unless otherwise specified.

[0082] Note that between step S12 and step S13, a bar graph showing the number of processed substrates for each processing day of Apparatus A may be displayed on the display 87. Thereby, the operator can clearly recognize that Apparatus A is the cause of the decrease in the number of processed substrates on the processing days with a small number of processed substrates (e.g., 4 / 1 and 4 / 2).

[0083] In step S13, if the operator deems that the "standby" state among the multiple major operation states is the cause of the decrease in the number of processed sheets, the operator classifies the "standby" state into multiple minor operation states and displays them on the display 87. In the present embodiment, as shown in FIG. 18, regarding the breakdown of the operation states for each processing day of apparatus A during the specified aggregation period, a stacked vertical bar graph 527 (hereinafter, also simply referred to as "graph 527") in which the multiple major operation states are each classified into minor operation states is displayed on the display 87 (step S14). Thereby, the operator can easily recognize one or more minor operation states regarded as the cause of the decrease in the number of processed sheets (i.e., the cause of the deterioration of the processing result) among the multiple minor operation states included in the "standby" state.

[0084] If the operator deems that the "awaiting instruction" state among the multiple minor operation states included in the "standby" state is the cause of the decrease in the number of processed sheets, in the operation unit group of the substrate processing apparatus 1, the operator selects a related operation unit group that is a set of operation units related to the "awaiting instruction" state. In this case, although the substrate 9 is in a state where it can be processed, since the processing of the substrate 9 is not being performed (i.e., it is in the "awaiting instruction" state), it is assumed that the time during which the substrate 9 scheduled for processing has not been loaded into the substrate processing apparatus 1 (i.e., the waiting time for the carrier 95 to be loaded) is long. Therefore, the operator selects the multiple load ports 11 as the related operation unit group. Then, as shown in FIG. 19, for a processing day (e.g., 4 / 1) with fewer processed sheets than other processing days, a stacked vertical bar graph 528 (hereinafter, also simply referred to as "graph 528") that classifies and shows the breakdown of the operation states of the multiple load ports 11 into multiple minor operation states is displayed on the display 87 (step S15). In graph 528, since the "awaiting instruction" state is long for each of the multiple load ports 11, the operator can estimate that the carrier 95 is waiting to be loaded at each load port 11.

[0085] To check the detailed operating state of the substrate processing apparatus 1, as shown in FIG. 20, the operator causes the display 87 to display a time-series display 531 showing the operating state of the substrate processing apparatus 1 (i.e., apparatus A) in time series (step S16). In FIG. 20, a time period during which the "waiting for instruction" state of the substrate processing apparatus 1 in the time-series display 531 is long is enlarged and displayed.

[0086] Next, as shown in FIG. 21, the operator causes the display 87 to display a time-series display 532 showing the operating state of the above-described related operating unit group (i.e., the load port group 110) in time series (step S17). In FIG. 21, the time-series display 532 showing the operating state of each load port 11 in time series is displayed on the display 87 together with the time-series display 531 of the substrate processing apparatus 1 in a state where they are listed side by side for each load port 11. Thereby, the operator can easily compare the time series of the substrate processing apparatus 1 with the time series of the above-described related operating unit group.

[0087] The operator compares the time-series display 531 with the time-series display 532 and confirms that the timings of the "waiting for instruction" state of the substrate processing apparatus 1 and the "waiting for instruction" state of the load port group 110 substantially match. Thereby, it can be specified that the cause of the decrease in the number of processed substrates at 4 / 1 of the substrate processing apparatus 1 (apparatus A) (i.e., the cause of the deterioration of the processing result) is an increase in the "waiting for instruction" state due to insufficient carry-in amount of the carrier 95 (step S18).

[0088] As described above, the substrate processing apparatus 1 includes a load port group 110, a processing unit group 210, a transfer mechanism (in the above example, the index robot 12 and the center robot 22), an information storage unit 61, an information display unit (i.e., the display 87), and a display control unit 62. The load port group 110 is a set of load ports 11 that hold carriers 95 in which a plurality of substrates 9 are stored. The processing unit group 210 is a set of processing units 21 in which the substrates 9 are processed. The transfer mechanism transfers the substrates 9 between the load port group 110 and the processing unit group 210. The information storage unit 61 stores operation information 70, which is information regarding the operation of the operation unit group including the load port group 110, the processing unit group 210, and the transfer mechanism. The display control unit 62 causes the display 87 to display the operation information 70 in a predetermined display mode.

[0089] The operation information 70 includes processing result information 71 indicating the processing results of the substrates 9 in the substrate processing apparatus 1, and operation state information 72 indicating the time breakdown of the operation state of the substrate processing apparatus 1 and the time breakdown of the operation states of the operation units included in the operation unit group. The operation states of the substrate processing apparatus 1 and the operation units are hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states. The display control unit 62 causes the display 87 to display the processing result information 71 in a state sorted according to sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus 1. The display control unit 62 causes the display 87 to display the operation state information 72 in a state sorted according to the sorting items selected from the above sorting item group, classified into the plurality of major classification operation states and the plurality of minor classification operation states, respectively. Thereby, an operator viewing the display 87 can easily recognize the detailed operation state of the operation unit in association with the processing results of the substrates 9.

[0090] As described above, when the display control unit 62 classifies the operation state information 72 into a plurality of major operation states in a state sorted by the above sorting items and causes the display 87 to display the information, it is preferable to display the information in a first graph (for example, the stacked bar graph 511a in FIG. 8) color-coded for each major operation state. Further, when the display control unit 62 classifies the operation state information 72 into a plurality of minor operation states in a state sorted by the above sorting items and causes the display 87 to display the information, it is preferable to display the information in a second graph (for example, the stacked bar graph 511b in FIG. 9) color-coded for each minor operation state. In the second graph, it is preferable that a plurality of minor operation states corresponding to one major operation state are color-coded with a color of the same color system as the color of the one major operation state in the first graph. Thereby, the operator can easily recognize the rough breakdown and the detailed breakdown of the operation state of the operation unit in association with each other.

[0091] As described above, it is preferable that the operation state information 72 includes time stamps that are the start point and the end point of the operation state associated with the operation state of the operation unit. Further, it is preferable that the display control unit 62 causes the display 87 to display a time-series display (for example, the time-series display 517 in FIG. 13) that shows the operation state in time series. Thereby, the operator can easily recognize the change over time of the operation state of the operation unit.

[0092] As described above, it is preferable that the display control unit 62 causes the display 87 to display the operation state information 72 regarding the load port group 110 in a state where the information is listed side by side for each load port 11 (for example, as in the graph 511c in FIG. 11). Thereby, the operator can easily compare the operation states of the plurality of load ports 11 included in the load port group 110.

[0093] As described above, it is preferable that the display control unit 62 causes the display 87 to display the operation state information 72 regarding the processing unit group 210 in a side-by-side manner for each processing unit 21 (for example, as in the graph 511d of FIG. 12). Thereby, the operator can easily compare the operation states of the plurality of processing units 21 included in the processing unit group 210.

[0094] As described above, it is preferable that the display control unit 62 also causes the display 87 to display the processing result information 71 and the operation state information 72 of another substrate processing apparatus 1 having the same configuration as the substrate processing apparatus 1. Thereby, the processing results and operation states of the plurality of substrate processing apparatuses 1 can be easily compared. Also, the processing results of the plurality of substrate processing apparatuses 1 can be easily tabulated.

[0095] As described above, the analysis method for analyzing the operation state of the substrate processing apparatus 1 includes, in the above-described substrate processing apparatus 1, a step (step S11) of causing an information display unit (that is, the display 87) to display the processing result information 71 in an organized state for an arbitrary operation period of the substrate processing apparatus 1, and the operation state information 72 to the a step (step S13) of classifying the operation state information 72 into a plurality of major operation states in an organized state for the operation period and causing the display 87 to display the classified states, a step (step S14) of classifying one major operation state regarded as the cause of deterioration of the processing result among the plurality of major operation states into a plurality of minor operation states and causing the display 87 to display the classified states, and paying attention to one minor operation state regarded as the cause of deterioration of the processing result among the plurality of minor operation states, and selecting a related operation unit group (in the above example, the load port group 110), which is a set of operation units related to one minor operation state among the operation unit groups, and causing the display 87 to display a time-series display (in the above example, the time-series display 531) showing the operation state of the substrate processing apparatus 1 in a time series and a time-series display (in the above example, the time-series display 532) showing the operation state of each of the related operation unit groups in a time series (steps S16 to S17). Thereby, the operator can easily identify the cause of deterioration of the processing result in the substrate processing apparatus 1.

[0096] In the above example, the program 89 related to the display of the operation information 70 is stored in advance in the computer 8 of the substrate processing apparatus 1, but it is not limited thereto. For example, the program 89 may be introduced later (i.e., retrofitted) into the already used substrate processing apparatus 1. In this case, when the program 89 for displaying the operation information 70 in a predetermined display mode is executed by the computer 8, the processing result information 71 is displayed on the display 87 in a state where it is organized for the organized items selected from a predetermined group of organized items including an arbitrary operation period of the substrate processing apparatus 1. Further, the operation state information 72 is displayed on the display 87 in a state where it is organized for the organized items selected from the group of organized items and classified into a plurality of major operation states and a plurality of minor operation states, respectively. Thereby, similarly to the above, the operator who views the display 87 can easily recognize the detailed operation state of the operation unit in association with the processing result of the substrate 9.

[0097] Also, in the above example, the configuration related to the display of the operation information 70 is included in the substrate processing apparatus 1, but the configuration may be provided as a display device separate from the substrate processing apparatus 1. In this case, the display device includes an information display unit (i.e., the display 87) and a display control unit 62. The display control unit 62 causes the display 87 to display the operation information 70 in a predetermined display mode. The display control unit 62 causes the display 87 to display the processing result information 71 in a state where it is organized for the organized items selected from a predetermined group of organized items including an arbitrary operation period of the substrate processing apparatus 1. Further, the display control unit 62 causes the display 87 to display the operation state information 72 in a state where it is organized for the organized items selected from the group of organized items and classified into a plurality of major operation states and a plurality of minor operation states, respectively. Thereby, similarly to the above, the operator who views the display 87 can easily recognize the detailed operation state of the operation unit in association with the processing result of the substrate 9. Note that the display device may display the operation information 70 of one substrate processing apparatus 1 or may display the operation information 70 of a plurality of substrate processing apparatuses 1.

[0098] FIG. 22 is a diagram showing an example different from FIGS. 7 and the like regarding the display on the display 87. In the example shown in FIG. 22, the processing result information 71 (see FIG. 6) of the substrate processing apparatus 1 in a predetermined designated aggregation period (April 1st to 15th) is displayed on the display 87. Specifically, the number of processed substrates 9 processed by the substrate processing apparatus 1 in the designated aggregation period is displayed on the display 87 by the display control unit 62 (see FIG. 5) in a state organized from various viewpoints.

[0099] In the window 531 in FIG. 22, the processing result information 71 in the designated aggregation period and the processing result information in a predetermined reference aggregation period (hereinafter, also referred to as "reference processing result information") are displayed in a comparable manner, for example, in a table format. In the example shown in FIG. 22, for the substrate processing apparatus 1, the number of processed substrates 9 in the designated aggregation period, the number of processed substrates 9 in the reference aggregation period, and the difference in the number of processed substrates 9 between the designated aggregation period and the reference aggregation period are displayed as numerical values (in FIG. 22, the numerical values are indicated by "****") in the window 531. The reference processing result information is prepared in advance and stored in the information storage unit 61 (see FIG. 5). The reference aggregation period is displayed at the upper part of the window 531. In the example shown in FIG. 22, it is from March 1st to 15th. The designated aggregation period and the reference aggregation period may be changed as appropriate. Also, the length of the reference aggregation period may be the same as or different from the length of the designated aggregation period. In the window 531, information other than the number of processed substrates 9 (for example, the number of processed substrates 9 per unit time, etc.) may be displayed instead of or together with the number of processed substrates.

[0100] The display control unit 62 displays the processing result information 71 in a state where it is organized for each of a plurality of organization items included in the above-described organization item group in the windows 532 to 536. FIGS. 23 to 27 are diagrams respectively showing the windows 532 to 536 enlarged. As shown in FIG. 23, in the window 532, similar to the graph 511 in FIG. 7, a bar graph in which the number of processed substrates 9 of the substrate processing apparatus 1 in the designated aggregation period is organized with the processing date as the organization item is displayed. The horizontal axis of the graph in the window 532 indicates the processing date, and the vertical axis indicates the number of processed substrates 9.

[0101] As shown in FIG. 24, in window 533, a bar graph is displayed in which the number of substrates 9 processed by the substrate processing apparatus 1 during the designated aggregation period is organized with the operating time band as the organizing item. The vertical axis of the graph in window 533 indicates the operating time band, and the horizontal axis indicates the number of substrates 9 processed. In this graph, one day (24 hours) is equally divided into 24 time bands, and the total number of substrates 9 processed in each time band during the designated aggregation period is shown. Note that the number of divisions of one day (that is, into how many operating time bands to divide) may be changed variously. Also, when dividing one day into a plurality of operating time bands, it is not necessarily required to divide equally. For example, important time bands may be divided finely, and less important time bands may be divided roughly.

[0102] As shown in FIG. 25, in window 534, a bar graph is displayed in which the number of substrates 9 processed by the substrate processing apparatus 1 during the designated aggregation period is organized with the operating day of the week as the organizing item. The vertical axis of the graph in window 534 indicates the operating day of the week, and the horizontal axis indicates the number of substrates 9 processed. In this graph, the total number of substrates 9 processed on each day of the week during the designated aggregation period is shown. Note that in this graph, a plurality of days of the week (for example, two days of the week with short usage times of the substrate processing apparatus 1) may be grouped together and shown as one graph element.

[0103] As shown in FIG. 26, in window 535, a bar graph is displayed showing the number of substrates 9 processed by the substrate processing apparatus 1 during the designated aggregation period in a state where it is listed side by side for each processing unit 21 of the processing unit group 210. In other words, this graph is a graph in which the number of substrates 9 processed by the substrate processing apparatus 1 during the designated aggregation period is organized with the name (that is, identifier) of the processing unit 21 as the organizing item. The vertical axis of the graph in window 535 indicates the name of the processing unit 21, and the horizontal axis indicates the number of substrates 9 processed. In this graph, the total number of substrates 9 processed in each processing unit 21 during the designated aggregation period is shown.

[0104] As shown in FIG. 27, in window 536, a bar graph is displayed in which the number of processed substrates 9 of substrate processing apparatus 1 during the specified aggregation period is sorted with the type of processing recipe as the sorting item. Window 536 The vertical axis of the graph in shows the type of processing recipe, and the horizontal axis shows the number of processed substrates 9. This graph shows the total number of processed substrates 9 for each processing recipe during the specified aggregation period.

[0105] FIG. 28 is a diagram showing another example of the display on display 87. In the example shown in FIG. 28, the operation state information 72 (see FIG. 6) of substrate processing apparatus 1 during the above-mentioned specified aggregation period (April 1st to 15th) is displayed on display 87. Specifically, the time breakdown of the operation state of substrate processing apparatus 1 during the specified aggregation period, and the time breakdown of the operation state of the movable part of substrate processing apparatus 1 are displayed on display 87 by display control unit 62 (see FIG. 5) in a state sorted from various viewpoints.

[0106] In window 541 in FIG. 28, the operation state information 72 during the specified aggregation period and the operation state information during the above-mentioned reference aggregation period (hereinafter, also referred to as "reference operation state information") are displayed in a comparable manner, for example, in a table format. In the example shown in FIG. 28, for the substrate processing apparatus 1, the time breakdown of the sub-division operation state during the specified aggregation period, the time breakdown of the sub-division operation state during the reference aggregation period, and the difference in the time breakdown between the specified aggregation period and the reference aggregation period are displayed as numerical values (in FIG. 28, the numerical values are indicated by "****") in window 541. The numerical value is, for example, the ratio (%) of the total time of each sub-division operation state to the specified aggregation period or the reference aggregation period. The reference operation state information is prepared in advance and stored in the information storage unit 61 (see FIG. 5). The reference aggregation period is displayed at the upper part of window 531, and in the example shown in FIG. 28, it is from March 1st to 15th. The specified aggregation period and the reference aggregation period may be changed as appropriate. Also, the length of the reference aggregation period may be the same as or different from the length of the specified aggregation period. Note that in window 547 arranged adjacent to the right of window 541, the time breakdown of the sub-division operation state during the specified aggregation period is displayed as a pie chart.

[0107] The display control unit 62 displays the operation state information 72 in windows 542 to 546 in a state where it is sorted for each of a plurality of sorting items included in the above-mentioned sorting item group. FIGS. 29 to 33 are diagrams showing windows 542 to 546 enlarged respectively. As shown in FIG. 29, in window 542, similar to graph 527 in FIG. 18, a stacked vertical bar graph in which the time breakdown of the sub-division operation state of the substrate processing apparatus 1 during the specified aggregation period is sorted with the processing date as the sorting item is displayed. The horizontal axis of the graph in window 542 indicates the processing date, and the vertical axis indicates the time breakdown of the sub-division operation state (that is, the ratio of the total time of each sub-division operation state to the usage time of the substrate processing apparatus 1 in one day).

[0108] As shown in FIG. 30, in window 543, a stacked horizontal bar graph is displayed in which the time breakdown of the sub-division operation state of the substrate processing apparatus 1 during the specified aggregation period is organized with the operation time zone as the organizing item. The vertical axis of the graph in window 543 indicates the operation time zone, and the horizontal axis indicates the time breakdown of the sub-division operation state. In this graph, one day (24 hours) is equally divided into 24 time zones, and the time breakdown of the sub-division operation state for each time zone during the specified aggregation period is shown. Note that the number of divisions of one day (i.e., into how many operation time zones) may be changed variously. Also, when dividing one day into a plurality of operation time zones, it is not necessarily required to divide them equally. For example, important time zones may be divided finely, and less important time zones may be divided coarsely.

[0109] As shown in FIG. 31, in window 544, a stacked horizontal bar graph is displayed in which the time breakdown of the sub-division operation state of the substrate processing apparatus 1 during the specified aggregation period is organized with the operation day of the week as the organizing item. The vertical axis of the graph in window 544 indicates the operation day of the week, and the horizontal axis indicates the time breakdown of the sub-division operation state. In this graph, the time breakdown of the sub-division operation state for each day of the week during the specified aggregation period is shown. Note that in this graph, a plurality of days of the week (for example, two days of the week with short usage times of the substrate processing apparatus 1) may be grouped together and shown as one graph element.

[0110] As shown in FIG. 32, in window 545, for each of the above-described load port group 110, transfer mechanism (i.e., indexer robot 12 and center robot 22), and processing unit group 210, a stacked bar graph showing the time breakdown of the sub-operation states during the specified aggregation period is displayed. In other words, the graph is a graph that displays the operation state information 72 regarding the above operation unit group during the specified aggregation period in a state where it is listed for each type of movable part included in the operation unit group. Further in other words, the graph is a graph that organizes the time breakdown of the sub-operation states of the substrate processing apparatus 1 during the specified aggregation period with the type of movable part as an organizing item. The vertical axis of the graph in window 545 indicates the type of movable part, and the horizontal axis indicates the time breakdown of the sub-operation states. Note that LP on the vertical axis indicates the load port group 110, Robot indicates the indexer robot 12 and the center robot 22, and MPC indicates the processing unit group 210.

[0111] As shown in FIG. 33, in window 546, a stacked bar graph showing the operation state information 72 regarding the load port group 110 during the specified aggregation period in a state where it is listed for each load port 11 is displayed. In other words, the graph is a graph that organizes the time breakdown of the sub-operation states of the load port group 110 during the specified aggregation period with the name (i.e., identifier) of the load port 11 as an organizing item. The vertical axis of the graph in window 546 indicates the name of the load port 11, and the horizontal axis indicates the time breakdown of the sub-operation states. The graph shows the time breakdown of the sub-operation states in each load port 11 during the specified aggregation period.

[0112] Note that in window 546, for example, a graph showing the operation state information 72 regarding the processing unit group 210 during the specified aggregation period in a state where it is listed for each processing unit 21 may be displayed. Alternatively, in window 546, for example, a graph showing the operation state information 72 regarding the indexer robot 12 and the center robot 22 during the specified aggregation period in a state where it is listed for each robot may be displayed.

[0113] In the graphs displayed in the above windows 542 to 546, when there is a sub-operation state that has deteriorated by a predetermined degree or more compared to the reference operation state among the operation state information 72 during the specified aggregation period, it is preferable that the display control unit 62 highlights the part indicating the sub-operation state in the graph (that is, displays it more prominently than the surroundings). Specifically, for example, in the graph showing the time breakdown of the sub-operation state for each load port 11 shown in FIG. 33, when the time breakdown of "instruction waiting" for LP1 is a predetermined multiple (for example, 2 times) or more greater than the time breakdown of "instruction waiting" for LP1 in the reference operation state information, the "instruction waiting" part of LP1 in FIG. 33 is displayed brighter or blinks compared to the surroundings. Thereby, it is possible to easily recognize the load port 11 where some abnormality may have occurred, and the sub-operation state in which an abnormality is highly likely to have occurred in the load port 11.

[0114] Also, in the graphs displayed in windows 542 to 546, the time breakdown of the major operation state of the substrate processing apparatus 1 during the specified aggregation period may be displayed. Also in this case, in substantially the same manner as above, when there is a major operation state that has deteriorated by a predetermined degree or more compared to the reference operation state among the operation state information 72 during the specified aggregation period, it is preferable that the display control unit 62 highlights the part indicating the major operation state in the graph (that is, displays it more prominently than the surroundings).

[0115] The table shown in FIG. 22 and the graphs shown in FIGS. 23 to 27 display the processing result information 71 in one substrate processing apparatus 1, but the processing result information 71 in a group of substrate processing apparatuses 1 including a plurality of substrate processing apparatuses 1 may be similarly displayed. The table shown in FIG. 28 and the graphs shown in FIGS. 29 to 33 display the operation state information 72 in one substrate processing apparatus 1, but the operation state information 72 in a group of substrate processing apparatuses 1 including a plurality of substrate processing apparatuses 1 may be similarly displayed. In either case, the above-described sorting item group includes the name (that is, identifier) of the substrate processing apparatus 1.

[0116] As described above, in the substrate processing apparatus 1, the above-described sorting item group includes one or more items among the operation period, operation time zone, operation day of the week, and processing recipe as sorting items, and it is preferable that the display control unit 62 can display the processing result information 71 on the information display unit (i.e., the display 87) in a state sorted by the one or more items. Thereby, an operator who views the display 87 can easily analyze the processing result of the substrate 9 in the substrate processing apparatus 1 from various angles.

[0117] As described above, in the substrate processing apparatus 1, reference processing result information, which is processing result information in a predetermined reference aggregation period, is prepared in advance, and it is preferable that the display control unit 62 displays the processing result information 71 in the selected designated aggregation period and the reference processing result information in a comparable manner. Thereby, when an abnormality occurs in the processing of the substrate 9 in the designated aggregation period, the presence of the abnormality can be easily recognized.

[0118] As described above, in the substrate processing apparatus 1, it is preferable that the display control unit 62 causes the display 87 to display the operation state information 72 regarding the operation unit group in a state where the operation units included in the operation unit group are listed side by side for each type of operation unit. Thereby, the operation state of the substrate processing apparatus 1 in the designated aggregation period can be easily confirmed for each type of movable unit. Further, when an abnormality occurs in the operation state of the substrate processing apparatus 1, it is possible to facilitate the analysis of which type of movable unit has the cause of the abnormality.

[0119] As described above, in the substrate processing apparatus 1, the above-described sorting item group includes one or more items among the operation period, operation time zone, and operation day of the week as sorting items, and it is preferable that the display control unit 62 can display the operation state information 72 on the display 87 in a state sorted by the one or more items. Thereby, an operator who views the display 87 can easily analyze the operation state of the substrate processing apparatus 1 from various angles.

[0120] As described above, in the substrate processing apparatus 1, reference processing result information, which is processing result information for a predetermined reference aggregation period, is prepared in advance. The display control unit 62 displays the operation state information 72 for the selected designated aggregation period, and preferably highlights a large-category operation state or a small-category operation state that has deteriorated by a predetermined degree or more compared to the reference operation state information among the operation state information 72 for the designated aggregation period. Thereby, when an abnormality occurs in the operation state of the substrate processing apparatus 1, it is possible to easily recognize a movable part where an abnormality may occur and a large-category operation state or a small-category operation state that is considered to be the cause of the abnormality in the movable part.

[0121] In the above-described substrate processing apparatus 1, display device, program 89, and analysis method for analyzing the operation state of the substrate processing apparatus 1, various modifications are possible.

[0122] For example, in the analysis method, something other than an increase in the "waiting for instruction" state due to insufficient loading amount of the above-described carrier 95 may be specified as the cause of deterioration of the processing result of the substrate processing apparatus 1. Also, the number of operating parts included in the above-described related operating part group may be variously changed within the range of 1 or more.

[0123] In the substrate processing apparatus 1, the operation information 70 (that is, the processing result information 71 and the operation state information 72) displayed on the display 87 may be used for purposes other than specifying the cause of deterioration of the processing result. Also, the display control unit 62 may cause various graphs, data, etc. other than the above to be displayed on the display 87 in accordance with an instruction from the operator.

[0124] In the substrate processing apparatus 1, in the graph (for example, the stacked bar graph 511a in FIG. 8) that classifies and displays the operation state information 72 into major operation states, and the graph (for example, the stacked bar graph 511b in FIG. 9) that classifies and displays the operation state information 72 into minor operation states, the corresponding major operation state and minor operation state do not necessarily have to be displayed in the same system color. However, in order for the correspondence relationship between the major operation state and the minor operation state to be easily recognizable by the operator, it is preferable to make the visually recognizable features (for example, the features of hatching, etc.) on the graph common between the corresponding major operation state and minor operation state.

[0125] The operation information stored in the information storage unit 61 does not necessarily have to include the operation state information 72 of all the operation units included in the operation unit group, and it is sufficient if it includes the operation state information 72 of at least a part of the operation units included in the operation unit group.

[0126] In the substrate processing apparatus 1, the time series of the operation states of the operation units does not necessarily have to be displayed on the display 87.

[0127] In the processing block 20 of the substrate processing apparatus 1, processing units with various structures other than the processing unit 21 may be provided. Also, in the said processing unit, various processes other than the liquid processing for the substrate 9 may be performed.

[0128] In addition to semiconductor substrates, the above-described substrate processing apparatus 1 may be used for processing glass substrates used in flat panel displays (Flat Panel Display) such as liquid crystal display devices or organic EL (Electro Luminescence) display devices, or glass substrates used in other display devices. Further, the above-described substrate processing apparatus 1 may be used for processing substrates for optical disks, magnetic disks, magneto-optical disks, photomasks, ceramic substrates, solar cell substrates, and the like.

[0129] The configurations in the above-described embodiments and each modification example may be appropriately combined as long as they do not conflict with each other.

Explanation of Reference Numerals

[0130] 1 Substrate processing apparatus 9 Substrate 11 Load port 12 Indexer robot 21 Processing unit 22 Center robot 61 Information storage unit 62 Display control unit 70 Operation information 71 Processing result information 72 Operation status information 87 Display 110 Load port group 210 Processing unit group Steps S11 to S18

Claims

1. A substrate processing apparatus, comprising: A load port group, which is a set of load ports that hold carriers in which a plurality of substrates are stored; A processing unit group, which is a set of processing units where substrate processing is performed; A transfer mechanism that transfers substrates between the load port group and the processing unit group; An information storage unit that stores operation information, which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism; An information display unit; A display control unit that causes the information display unit to display the operation information in a predetermined display format; The substrate processing apparatus is provided with: The operation information includes: Processing result information indicating the processing result of substrates in the substrate processing apparatus; Operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group; The operation state of the substrate processing apparatus and the operation units is hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states; The display control unit causes the information display unit to display the processing result information in a state where it is sorted according to sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus; The display control unit causes the information display unit to display the operation state information in a state where it is sorted according to sorting items selected from the sorting item group, and classified into the plurality of major classification operation states and the plurality of minor classification operation states, respectively; The display control unit causes the information display unit to display the operation state information regarding the load port group in a state where it is listed side by side for each load port. The substrate processing apparatus is characterized by this.

2. A substrate processing apparatus, comprising: A load port group, which is a set of load ports that hold carriers in which a plurality of substrates are stored; A processing unit group, which is a set of processing units where substrate processing is performed; A transfer mechanism that transfers substrates between the load port group and the processing unit group; An information storage unit that stores operation information, which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism; An information display unit; A display control unit that causes the information display unit to display the operation information in a predetermined display format; The substrate processing apparatus is provided with: The operation information includes: Processing result information indicating the processing result of substrates in the substrate processing apparatus; ​ Operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of the operating units included in the operating unit group, and including the operation states of the substrate processing apparatus and the operating units are hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states, the display control unit causes the information display unit to display the processing result information in a state where it is organized for the organizing items selected from a predetermined group of organizing items including an arbitrary operation period of the substrate processing apparatus, the display control unit classifies the operation state information into the plurality of major classification operation states and the plurality of minor classification operation states in a state where it is organized for the organizing items selected from the group of organizing items, and causes the information display unit to display them, reference processing result information, which is the processing result information in a predetermined reference aggregation period, is prepared in advance, the display control unit is characterized in that it displays the processing result information in the selected designated aggregation period and the reference processing result information in a comparable manner. A substrate processing apparatus. **Claim 3**: A substrate processing apparatus, a load port group, which is a set of load ports that hold carriers in which a plurality of substrates are stored, a processing unit group, which is a set of processing units where substrate processing is performed, a transfer mechanism that transfers substrates between the load port group and the processing unit group, an information storage unit that stores operation information, which is information related to the operation of the operating unit group including the load port group, the processing unit group, and the transfer mechanism, an information display unit, a display control unit that causes the information display unit to display the operation information in a predetermined display mode, comprising the operation information is processing result information indicating the processing result of the substrate in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of the operating units included in the operating unit group, including the operation states of the substrate processing apparatus and the operating units are hierarchically classified into a plurality of major classification operation states, which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states, the display control unit causes the information display unit to display the processing result information in a state where it is organized for the organizing items selected from a predetermined group of organizing items including an arbitrary operation period of the substrate processing apparatus, The display control unit classifies the operation state information for each of the plurality of major operation states and the plurality of minor operation states in a state where the operation state information is organized for the organization items selected from the organization item group, and causes the information display unit to display the classified information. Reference operation state information, which is the operation state information in a predetermined reference aggregation period, is prepared in advance. The display control unit displays the operation state information in the selected designated aggregation period, and highlights a major operation state or a minor operation state that has deteriorated by a predetermined degree or more compared to the reference operation state information among the operation state information in the designated aggregation period. A substrate processing apparatus characterized by this.

4. The substrate processing apparatus according to any one of Claims 1 to 3, When the display control unit classifies the operation state information for each of the plurality of major operation states in a state where the operation state information is organized for the organization items and causes the information display unit to display the classified information, the display control unit displays the information in a first graph color-coded for each major operation state. When the display control unit classifies the operation state information for each of the plurality of minor operation states in a state where the operation state information is organized for the organization items and causes the information display unit to display the classified information, the display control unit displays the information in a second graph color-coded for each minor operation state. In the second graph, a plurality of minor operation states corresponding to one major operation state are color-coded with the same color system as the color of the one major operation state in the first graph. A substrate processing apparatus characterized by this.

5. The substrate processing apparatus according to any one of Claims 1 to 4, The operation state information includes time stamps that are the start point and the end point of the operation state associated with the operation state of the operation unit. The display control unit causes the information display unit to display a time-series display showing the operation state in time series. A substrate processing apparatus characterized by this.

6. The substrate processing apparatus according to any one of Claims 1 to 5, The display control unit causes the information display unit to display the operation state information regarding the operation unit group in a state where the information is listed side by side for each type of operation unit included in the operation unit group. A substrate processing apparatus characterized by this.

7. The substrate processing apparatus according to any one of Claims 1 to 6, The display control unit causes the information display unit to display the operation state information regarding the processing unit group in a state where the information is listed side by side for each processing unit. A substrate processing apparatus characterized by this.

8. A substrate processing apparatus according to any one of claims 1 to 7, wherein the sorting item group includes, as sorting items, one or more items among the operation period, operation time zone, operation day of the week, and processing recipe, and the display control unit is capable of displaying the processing result information on the information display unit in a state sorted for the one or more items. A substrate processing apparatus characterized by this.

9. A substrate processing apparatus according to any one of claims 1 to 8, wherein the sorting item group includes, as sorting items, one or more items among the operation period, operation time zone, and operation day of the week, and the display control unit is capable of displaying the operation state information on the information display unit in a state sorted for the one or more items. A substrate processing apparatus characterized by this.

10. A substrate processing apparatus according to any one of claims 1 to 9, wherein the display control unit also causes the information display unit to display the processing result information and the operation state information of another substrate processing apparatus having the same configuration as the substrate processing apparatus. A substrate processing apparatus characterized by this.

11. An analysis method for analyzing the operation state of a substrate processing apparatus, a) In the substrate processing apparatus according to any one of claims 1 to 10, a step of causing the information display unit to display the processing result information in a state sorted for an arbitrary operation period of the substrate processing apparatus; b) A step of classifying the operation state information into the plurality of major operation states in a state sorted for the operation period and causing the information display unit to display it; c) A step of classifying one major operation state regarded as a cause of deterioration of the processing result among the plurality of major operation states into the plurality of minor operation states and causing the information display unit to display it; d) Focusing on one minor operation state regarded as a cause of deterioration of the processing result among the plurality of minor operation states, selecting a related operation unit group that is a set of operation units related to the one minor operation state among the operation unit groups, and causing the information display unit to display a time-series display showing the operation state of the substrate processing apparatus in time series and a time-series display showing the operation state of each of the related operation unit groups in time series; An analysis method characterized by comprising this.

12. A display device for displaying the operating state of a substrate processing apparatus, comprising: a load port group which is a set of load ports holding carriers storing a plurality of substrates; a processing unit group which is a set of processing units where substrate processing is performed; and a transfer mechanism for transferring substrates between the load port group and the processing unit group. An information display section; A display control section for causing the information display section to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism. The display device is provided with: The operation information includes: Processing result information indicating the processing result of substrates in the substrate processing apparatus; Operation state information indicating the time breakdown of the operating state of the substrate processing apparatus and the time breakdown of the operating state of the operation units included in the operation unit group; and The operating states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operating states which are major classifications, and a plurality of minor classification operating states obtained by further classifying the plurality of major classification operating states. The display control section causes the information display section to display the processing result information in a state where it is sorted according to sorting items selected from a predetermined sorting item group including an arbitrary operation period of the substrate processing apparatus. The display control section causes the information display section to display the operation state information in a state where it is sorted according to sorting items selected from the sorting item group, and classified into the plurality of major classification operating states and the plurality of minor classification operating states, respectively. The display control section is characterized in that the operation state information regarding the load port group is displayed on the information display section in a state where it is listed side by side for each load port.

13. A display device for displaying the operating state of a substrate processing apparatus, comprising: a load port group which is a set of load ports holding carriers storing a plurality of substrates; a processing unit group which is a set of processing units where substrate processing is performed; and a transfer mechanism for transferring substrates between the load port group and the processing unit group. An information display section; A display control section for causing the information display section to display, in a predetermined display mode, operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism. The display device is provided with: The operation information includes: Processing result information indicating the processing result of substrates in the substrate processing apparatus; Operation status information indicating the time breakdown of the operation status of the substrate processing apparatus and the time breakdown of the operation status of the operating units included in the operating unit group, including the operation statuses of the substrate processing apparatus and the operating units are hierarchically classified into a plurality of major classification operation statuses, which are major classifications, and a plurality of minor classification operation statuses obtained by further classifying the plurality of major classification operation statuses, the display control unit causes the information display unit to display the processing result information in a state where it is organized for organizing items selected from a predetermined set of organizing items including an arbitrary operation period of the substrate processing apparatus, the display control unit classifies the operation status information into the plurality of major classification operation statuses and the plurality of minor classification operation statuses in a state where it is organized for organizing items selected from the set of organizing items, and causes the information display unit to display them, reference processing result information, which is the processing result information in a predetermined reference aggregation period, is prepared in advance, the display control unit is a display device characterized by displaying the processing result information in a selected designated aggregation period and the reference processing result information in a comparable manner.

14. A display device for displaying the operation status of a substrate processing apparatus including a load port group that is a set of load ports holding carriers storing a plurality of substrates, a processing unit group that is a set of processing units where substrate processing is performed, and a transfer mechanism that transfers substrates between the load port group and the processing unit group, an information display unit, a display control unit that causes the information display unit to display, in a predetermined display mode, operation information that is information regarding the operation of the load port group, the processing unit group, and the operation unit group including the transfer mechanism, comprising the operation information is processing result information indicating the processing result of the substrate in the substrate processing apparatus, operation status information indicating the time breakdown of the operation status of the substrate processing apparatus and the time breakdown of the operation status of the operating units included in the operating unit group, including the operation statuses of the substrate processing apparatus and the operating units are hierarchically classified into a plurality of major classification operation statuses, which are major classifications, and a plurality of minor classification operation statuses obtained by further classifying the plurality of major classification operation statuses, the display control unit causes the information display unit to display the processing result information in a state where it is organized for organizing items selected from a predetermined set of organizing items including an arbitrary operation period of the substrate processing apparatus, The display control unit classifies the operation state information for each of the classification items selected from the classification item group into the plurality of major operation states and the plurality of minor operation states in a state where the operation state information is organized for the classification items, and causes the information display unit to display the classified information. Reference operation state information, which is the operation state information in a predetermined reference aggregation period, is prepared in advance. The display control unit displays the operation state information in the selected designated aggregation period, and highlights a major operation state or a minor operation state that has deteriorated by a predetermined level or more compared to the reference operation state information among the operation state information in the designated aggregation period. A display device characterized by this.

15. A program for causing an information display unit to display, in a predetermined display mode, operation information regarding the operation of an operation unit group including a load port group, which is a set of load ports holding carriers storing a plurality of substrates, a processing unit group, which is a set of processing units where substrate processing is performed, and a transfer mechanism that transfers substrates between the load port group and the processing unit group. The operation information includes processing result information indicating the processing result of the substrate in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group. including The operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major operation states, which are major classifications, and a plurality of minor operation states obtained by further classifying the plurality of major operation states. When the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized for the organization items selected from a predetermined organization item group including an arbitrary operation period of the substrate processing apparatus, the operation state information is classified into the plurality of major operation states and the plurality of minor operation states in a state where it is organized for the organization items selected from the organization item group, and is displayed on the information display unit, A program characterized in that the operation state information regarding the load port group is displayed on the information display unit in a state where it is listed for each load port. A program for causing an information display unit to display, in a predetermined display format, operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism, the load port group being a set of load ports holding carriers in which a plurality of substrates are stored, the processing unit group being a set of processing units where substrate processing is performed, and the transfer mechanism being for transferring substrates between the load port group and the processing unit group, wherein the operation information includes processing result information indicating the processing results of substrates in the substrate processing apparatus, and operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation states of the operation units included in the operation unit group, and the operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major classification operation states which are major classifications, and a plurality of minor classification operation states obtained by further classifying the plurality of major classification operation states, reference processing result information which is the processing result information in a predetermined reference aggregation period is prepared in advance, when the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized for organization items selected from a predetermined organization item group including an arbitrary operation period of the substrate processing apparatus, the operation state information is displayed on the information display unit classified into the plurality of major classification operation states and the plurality of minor classification operation states, respectively, in a state where it is organized for organization items selected from the organization item group, and the processing result information in a selected designated aggregation period and the reference processing result information are displayed so as to be comparable. A program for causing an information display unit to display, in a predetermined display format, operation information which is information regarding the operation of an operation unit group including the load port group, the processing unit group, and the transfer mechanism, the load port group being a set of load ports holding carriers in which a plurality of substrates are stored, the processing unit group being a set of processing units where substrate processing is performed, and the transfer mechanism being for transferring substrates between the load port group and the processing unit group, wherein the operation information includes processing result information indicating the processing results of substrates in the substrate processing apparatus, Operation state information indicating the time breakdown of the operation state of the substrate processing apparatus and the time breakdown of the operation state of the operation units included in the operation unit group, including the operation states of the substrate processing apparatus and the operation units are hierarchically classified into a plurality of major operation states, which are major classifications, and a plurality of minor operation states obtained by further classifying the plurality of major operation states, reference operation state information, which is the operation state information for a predetermined reference aggregation period, is prepared in advance, when the program is executed by a computer, the processing result information is displayed on the information display unit in a state where it is organized for the organized items selected from a predetermined group of organized items including an arbitrary operation period of the substrate processing apparatus, the operation state information is displayed on the information display unit in a state where it is organized for the organized items selected from the group of organized items and classified into the plurality of major operation states and the plurality of minor operation states respectively, A program characterized in that the operation state information for a selected specified aggregation period is displayed, and among the operation state information for the specified aggregation period, a major operation state or a minor operation state that has deteriorated by a predetermined degree or more compared to the reference operation state information is highlighted.

Images