Control plate of high-conductance valve

Abstract

A high-purity control valve for use in high-conductance proportional control applications includes a movable control plate (2000-1) with throughflow passages to enhance fluid sweep of the internal valve volume. Nested orifice ridges are used to achieve high conductance with small actuator movements. Enhanced leak tightness can be provided by incorporating a material in the control plate that is softer than the material comprising the orifice ridges. The control plate includes a control plate body having a counterbore (2042) in communication with a conduit, radial fluid passages (2054-1) and axial fluid passages (2046-1). The flat side of the control plate has a continuous, uninterrupted flat portion that blocks fluid flow within the valve. The radial fluid passages provide communication from the counterbore to the periphery of the control plate, and the axial fluid passages provide communication with the fluid conduit through an intermediate valve chamber portion.

Description

Technical Field

[0001] [Cross - Reference to Related Applications] This application is a continuation - in - part of U.S. Patent Application No. 16 / 178,247, entitled "CONTROL PLATE FOR A HIGH CONDUCTANCE VALVE", filed on November 1, 2018; U.S. Patent Application No. 15 / 997,172, entitled "CONTROL PLATE FOR A HIGH CONDUCTANCE VALVE", filed on June 4, 2018; and U.S. Provisional Patent Application No. 62 / 515,063, entitled "CONTROL PLATE WITH FLOW - THROUGH PASSAGE FOR A VALVE", filed on June 5, 2017. These U.S. patent applications are hereby incorporated by reference in their entirety for all purposes as part of this specification. This application is related to U.S. Patent Application No. 15 / 204,245, entitled "CONTROL PLATE IN A VALVE", filed on July 7, 2016; U.S. Patent Application No. 15 / 182,978, entitled "LOW HYSTERESIS DIAPHRAGM FOR A VALVE", filed on June 15, 2016; U.S. Patent Application No. 14 / 932,086, entitled "VALVE STROKE AMPLIFIER MECHANISM ASSEMBLY", filed on November 4, 2015; and U.S. Patent Application No. 14 / 737,564, entitled "HIGH CONDUCTANCE VALVE FOR FLUIDS AND VAPORS", filed on June 12, 2015. These U.S. patent applications are hereby incorporated by reference in their entirety for all purposes as part of this specification.

[0002] The present invention relates to a movable part of a fluid control valve that can be actively positioned at any position between an extremely open state and an extremely closed state in order to regulate the flow of fluid passing through the valve. The movable part includes provisions for a portion of the flowing fluid to pass through a control plate, thereby reducing the possibility of fluid stagnation and improving cleanliness. The present invention is intended for high-purity proportional control or modulating control of fluid delivery within industrial processes for manufacturing semiconductor devices, pharmaceuticals, or fine chemicals, and is particularly useful for many similar fluid delivery systems that require, along with proportional control, a leak-tight shut-off in the fully closed state.

Summary of the Invention

[0003] In view of the above, a high-purity fluid control valve is presented herein that includes a movable control plate having at least one through-flow path to enhance fluid scavenging of the internal valve volume. The valve is of the jet and sheet type where a relatively narrow planar land is formed at the opening of the fluid passageway and a flat sheet can move into contact with the land to block the fluid flow. In the present disclosure, the jet element is typically described as an orifice ridge and the sheet element is typically described as a control plate. This valve uses nested orifice ridges to achieve high conductance with small actuator movement by providing a large control gap length with a small closed area. The control plate has a continuous unbroken flat portion sized to bridge adjacent orifice ridge portions and block fluid flow in the fully closed state. The orifice ridges are in the same plane and provide a smooth surface around which the control plate seats. The through-flow control plate is particularly useful for high-speed actuation proportional control applications such as gas delivery in semiconductor manufacturing.

[0004] According to one embodiment, the control plate is a control plate body formed as a substantially circular disk having a flat side surface and an opposite side surface facing the flat side surface. The control plate is configured to move within the valve by an actuator. The flat side surface has a continuous and unbroken flat portion to block the fluid flow within the valve. The control plate body is provided with a counterbore communicating with a fluid conduit within the control plate body, a plurality of radial fluid flow paths terminating at the counterbore within the control plate body, and a plurality of axial fluid flow paths within the control plate body. The radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, and the axial fluid flow paths provide communication with an intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduit.

[0005] According to another embodiment, the valve assembly includes a valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least a pair of adjacent orifice ridge portions. The at least a pair of adjacent orifice ridge portions extend from the valve body into the valve chamber and define an intermediate valve chamber portion therebetween. The valve assembly further includes a control plate body formed as a substantially circular disk having a flat side surface and an opposite side surface facing the flat side surface. The control plate is configured to move within the valve by an actuator. The flat side surface has a continuous and unbroken flat portion to block the fluid flow within the valve. The control plate body is provided with a counterbore communicating with a fluid conduit within the control plate body, a plurality of radial fluid flow paths terminating at the counterbore within the control plate body, and a plurality of axial fluid flow paths within the control plate body. The radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, and the axial fluid flow paths provide communication with an intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduit.

[0006] According to another embodiment, a method of flowing fluid through a high-conductance valve using a control plate includes pumping fluid through a valve body, the valve body having a valve chamber, at least one first fluid conduit opening in communication with the valve chamber, at least one second fluid conduit opening in communication with the valve chamber, and at least a pair of adjacent orifice ridge portions extending from the valve body into the valve chamber and defining an intermediate valve chamber portion therebetween; moving a control plate body within the valve body using a valve actuator, the control plate body being formed as a circular disk having a flat side and an opposite side facing the flat side, the flat side having a continuous, unbroken flat portion for blocking the flow of fluid within the valve; flowing fluid through a plurality of radial fluid flow paths formed within the control plate body and terminating at a counterbore of the control plate body; and flowing fluid through a plurality of axial fluid flow paths formed within the control plate body, the radial fluid flow paths providing communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow paths providing communication with the intermediate valve chamber portion, and the intermediate valve chamber portion being in communication with a fluid conduit.

[0007] In some embodiments, the axial fluid flow paths extend through the control plate body to create a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve.

[0008] In some embodiments, the axial fluid flow paths extend through the control plate body from the radial fluid flow paths to create a communication path from the radial fluid flow paths to the intermediate valve chamber.

[0009] In some embodiments, the intermediate valve chamber is a second intermediate valve chamber of the high-conductance valve.

[0010] In some embodiments, the control plate further comprises a polymer insert disk, the polymer insert disk comprising a plurality of pillars respectively extending through the control plate body and a plurality of plugs respectively extending radially from the pillars.

[0011] In some embodiments, an axial flow path extends through at least one pillar, creating a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve and at least one plug.

[0012] In some embodiments, at least one axial fluid flow path extends through the polymer insert disk from a radial fluid flow path, creating a communication path between the radial fluid flow path and the intermediate valve chamber.

[0013] In some embodiments, the sheet insert includes a disk filling a circular groove formed within the control plate body, the sheet insert including a first continuous and unbroken flat portion disposed radially inward of a plurality of fluid passages and a second continuous and unbroken flat portion disposed radially outward of the plurality of fluid passages.

[0014] In some embodiments, the control plate is attached to a stub suspended below the diaphragm, and the distance between the control plate and the diaphragm is minimized to reduce the swept volume portion.

Brief Description of the Drawings

[0015]

Figure 1A

Figure 1B

Figure 1C

Figure 1D

Figure 2A

Figure 2B

Figure 2C

Figure 2D

Figure 3A

Figure 3B

Figure 3C

Figure 3D

Figure 4A

Figure 4B

Figure 4C

Figure 4D

Figure 5A

Figure 5B

Figure 5C

Figure 5D

Figure 6A

Figure 6B

Figure 6C

Figure 6D

Figure 7A

Figure 7B

Figure 7C

Figure 7D

Figure 7E

Figure 7F

Figure 8A

Figure 8B

Figure 8C

Figure 8D

Figure 9A

Figure 9B

Figure 9C

Figure 9D

Figure 10A

Figure 10B

Figure 10C

Figure 10D

Figure 11A

Figure 11B

Figure 11C

Figure 11D

Figure 12A

Figure 12B

Figure 12C

Figure 12D

Figure 13A

Figure 13B

Figure 13C

Figure 13D

Figure 13E

Figure 14A

Figure 14B

Figure 14C

Figure 14D

Figure 15A

Figure 15B

Figure 15C

Figure 15D

Figure 15E

Figure 16A

Figure 16B

Figure 16C

Figure 16D

Figure 17A

Figure 17B

Figure 17C

Figure 17D

Figure 18A-1

Figure 18A-2

Figure 18B-1

Figure 18B-2

Figure 18C-1

Figure 18C-2

Figure 18D-1

Figure 18D-2

Figure 19A-1

Figure 19A-2

Figure 19B-1

Figure 19B-2

Figure 19C-1

Figure 19C-2

Figure 19D-1

Figure 19D-2

Figure 20A-1

Figure 20A-2

Figure 20B-1

Figure 20B-2

Figure 20C-1

Figure 20C-2

Figure 20D-1

Figure 20D-2

Figure 21A-1

Figure 21A-2

Figure 21B-1

Figure 21B-2

Figure 21C-1

Figure 21C-2

Figure 21D-1

Figure 21D-2

Mode for Carrying Out the Invention

[0016] In the present application, the present invention is not limited to the details of the structure and arrangement of the components described in the following description or shown in the drawings. The present invention is capable of other embodiments and can be implemented or executed in various ways. Also, the expressions and terms used in this specification are for the purpose of explanation and should not be regarded as limiting. The use of "including", "comprising", "having", "containing", "involving", and their variations in this specification means including the items listed above and their equivalents, as well as additional items. The use of terms indicating directions such as "inside", "outside", "above", "below", etc. is intended to assist in understanding the relative relationships between design elements and should not be construed as meaning absolute directions in space and should not be regarded as limiting.

[0017] Representative examples of a high - conductance valve body 190 having concentric orifice ridges 120, 121 at the center are shown in FIGS. 1A - 1D. A more complete, exemplary valve assembly 100 can have a top - work including a valve housing 160 removably joined to the valve body 190 by deforming a metal gasket 165 into a leak - free assembly further shown in FIGS. 4A - 4D. The top - work can include an actuator (not shown) selected for a particular application. For example, a pneumatic actuator may be used for a simple on - off high - conductance valve, while a piezoelectric actuator may be used for a proportional - control high - conductance valve adapted for a mass - flow - controller electronic system. The open cavities 154, 158, 159 formed in the upper surface of the valve body 190 can be considered the lower part of the valve chamber 150, while the upper part 157 of the valve chamber is formed in the lower surface of the valve housing 160 above it. A large orifice ridge 120 formed as a circular upward projection from the valve body 190 separates the outer valve - chamber portion 158 from an intermediate valve - chamber portion 154 surrounded by the large orifice ridge 120. A generally concentric small orifice ridge 121 is also formed as a circular upward projection from the valve body 190 surrounded by the large orifice ridge 120, further separating the inner valve - chamber portion 159 from the intermediate valve - chamber portion 154. Throughout the present disclosure, an interconnected volume located between a pair of adjacent orifice - ridge portions (e.g., between the large orifice ridge 120 and the small orifice ridge 121) may be referred to as an intermediate valve - chamber portion, an adjacent interconnected volume located outside a pair (or pairs) of adjacent orifice - ridge portions may be referred to as an outer valve - chamber portion (e.g., 158), and an adjacent interconnected volume located inside a pair (or pairs) of adjacent orifice - ridge portions may be referred to as an inner valve - chamber portion (e.g., 159), but this is for the sole purpose of distinction and does not indicate the direction of fluid flow. A gasket - seal region 164 can be formed in the upper surface of the valve body 190 to accommodate a metal gasket 165 adjacent to the periphery of the outer valve - chamber portion 158.

[0018] The exemplary valve 100 can further include a first fluid conduit 110 (typically an inlet) and a second fluid conduit 114 (typically an outlet), both of which communicate fluid to the valve chamber 150, the valve chamber seal diaphragm 170, and a control element movable by deflection of the valve chamber seal diaphragm 170. The movable control element can consist of a control plate 200 (described further below) that is affixed to a control shaft 182 that is affixed to the diaphragm 170. In the design of the exemplary valve 100, the first fluid conduit opening 112 provides communication between the inner valve chamber portion 159 and the first fluid conduit 110. Similarly, the second fluid conduit opening 116 provides communication between the intermediate valve chamber portion 154 and the second fluid conduit 114. In this illustration of FIGS. 4A - 4D, since the valve 100 is fully closed in the blocked - no - flow state, the control plate 200 is shown as being in contact with both the large orifice ridge 120 and the small orifice ridge 121. The designer will recognize that the first fluid conduit 110 and the second fluid conduit 114 can provide fluid passages to surface - mount component joint portions rather than the illustrated tube stubs. K1S and W seals are examples of surface - mount component joint portions known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the valve above can be constructed from materials selected for the desired chemical inertness with respect to the fluid being handled, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel - F™, Vespel™, Kynar™, and can include separate or combined combinations of metals and polymers. For example, a type 316L stainless steel valve body 190 can be used with a Hastelloy™ nickel alloy control plate 200 and an Elgiloy™ cobalt alloy seal diaphragm 170.

[0019] The example of the flow control plate 200 shown in FIGS. 2A-2D includes a control plate body 240 formed as a generally circular disk having one or more features on opposite sides of the disk. These features can include a central through hole 242, a counterbore 244, and one or more upper holes 246. The counterbore 244 is typically centered and is formed on a flat disk side surface that is normally intended to face the orifice ridges 120, 121. The one or more upper holes 246 penetrate the control plate body 240 from opposite disk side surfaces, thereby leaving one or more webs 248 between the central through hole 242 and the control plate body 240. Alternatively, the upper holes 246 can be arranged to intersect the counterbore 244 while similarly leaving one or more webs 248 between the central through hole 242 and the remainder of the control plate body 240. The web 248 bridges the counterbore 244. In either case, the upper holes 246 constitute a fluid passage through which fluid can pass without having to pass through the outer diameter periphery from one side surface of the control plate body 240 to the opposite side surface. As shown in FIGS. 4A-4D, the control plate 200 can be attached to a stub of the control shaft 182, thereby suspending it within the valve chamber 150. Any suitable attachment method can be used, such as press fitting (see, e.g., FIGS. 9A-9D), swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passage through the upper holes 246 is not blocked. It should be recognized that instead of using the through hole 242 as shown in FIGS. 2A-2D to attach the control plate to the stub of the control shaft 182, blind hole mounting can be used instead, as shown in FIGS. 9A-9D.

[0020] A method of controlling fluid flow can be further understood by considering that an inner valve chamber portion 159 surrounded by a small orifice ridge 121 is connected by a first fluid conduit opening 112 that communicates with a first fluid conduit 110, whereby at least a portion of a control plate 200 can move toward or away from the small orifice ridge 121 to create a first control gap (not shown) through which a first fluid portion can flow controllably. The controllable first fluid portion can move directly from the inner valve chamber portion 159 through the first control gap to an intermediate valve chamber portion 154, from where the first fluid portion can exit through an offset second fluid conduit opening 116 that communicates with a second fluid conduit 114. In the valve 100 of this example, an actuator (not shown) applies a force to a control shaft 182 to deflect a diaphragm 170, thereby modulating the conductance through the valve 100 by changing the first control gap.

[0021] Simultaneously with the flow of the first fluid portion described above, moving at least a portion of the control plate 200 towards or away from the large orifice ridge 120 similarly creates a second control gap (not shown) through which the second fluid portion can flow controllably. The controllable second fluid portion can migrate from the inner valve chamber portion 159 through the upper hole 246 of the control plate 200 and can be swept into the outer valve chamber portion 158 through the upper valve chamber portion 157, from where the second fluid portion can exit into the intermediate valve chamber portion 154 through the second control gap. Upon reaching the intermediate valve chamber portion 154, the controllable second fluid portion can also exit through an offset second fluid conduit opening 116 that communicates with the second fluid conduit 114. Thus, in the valve 100 of this example, an actuator (not shown) that deflects the diaphragm 170 by applying a force to the control shaft 182 further modulates the conductance through the valve 100 by varying the second control gap. It should be appreciated that while the valve 100 is closed, fluid can pass through the holes in the control plate 200 but cannot proceed further. When the valve 100 is closed, fluid cannot pass from the first fluid conduit 110 to the second fluid conduit 114.

[0022] The designer can recognize that the large orifice ridge 120 and the small orifice ridge 121 do not need to be exactly concentric, but only need to be nested, and further, the pair of nested orifice ridges 120, 121 can be arranged asymmetrically with respect to the shape and dimensions of the inner valve chamber 150. The flow control plate 200, of course, has a continuous and unbroken surface area that spans between contact with the large orifice ridge 120 and contact with the small orifice ridge 121 on the flat lower side of the disk-shaped body 240 and is sufficient to cover the entire intermediate valve chamber portion 154. A single non-circular orifice ridge (not shown) can also have adjacent portions that enclose an intermediate valve chamber portion that the flow control plate can completely cover. The designer will also recognize that the direction of fluid flow described, which proceeds from the first fluid conduit 110 to the second fluid conduit 114, is used for convenience and clarity but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 114 to the first fluid conduit 110, and the complete valve chamber 150 will still be advantageously swept by the controllable fluid flow. The valve designs shown in FIGS. 4A-4D substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate enables the use of nested orifice ridges 120, 121 that together create an overall control gap length that is approximately twice that around a single large orifice while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force. In a diaphragm seal valve of the type shown in FIGS. 4A-4D, it should be recognized that the amount of axial displacement (e.g., up and down in the cross-sectional view of FIG. 4B) of the control plate 200 is very limited (e.g., about 50 μm for a piezoelectrically actuated valve and about 200 μm for a solenoid-actuated valve). Thus, the use of nested orifice ridges enables a higher conductance that is approximately twice that achievable with a single orifice ridge alone.

[0023] Another example of the cross-flow control plate 300 is shown in FIGS. 3A-3D and includes a control plate body 341 formed as a generally circular disk having one or more features on opposite side surfaces of the disk. These features can include a central through-hole 343, a spherical pocket (or recess) 345, and one or more inclined upper holes 347. The spherical pocket 345 is typically centered and is formed on a flat disk side surface that is normally intended to face the orifice ridges 120, 121. The one or more inclined upper holes 347 penetrate the control plate body 341 from the spherical pocket 345 to the opposite disk side surface, thereby leaving one or more webs 349 between the central through-hole 343 and the remainder of the control plate body 341. The web 349 bridges the spherical pocket 345. The spherical pocket 345 is useful when drilling the inclined upper holes 347. This is because the entrances of these inclined holes are locally perpendicular to the pocket surface, thereby minimizing drill wobble or bending. The inclined upper holes 347 constitute fluid passages through which fluid can pass without having to pass through the outer diameter periphery from one side surface of the control plate body 341 to the opposite side surface. As shown in FIGS. 5A-5D, the control plate 300 can be attached to the stub of the control shaft 182 and thereby suspended within the valve chamber 150. Any suitable attachment method can be used, such as press fitting (see, e.g., FIGS. 9A-9D), swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passage through the inclined upper holes 347 is not blocked. It should be recognized that instead of using the through-hole 343 as shown in FIGS. 3A-3D to attach the control plate to the stub of the control shaft 182, a blind-hole attachment can be used instead as shown in FIGS. 9A-9D.

[0024] Using the exemplary through - flow control plate 300, the method of controlling the fluid flow of the valve assembly shown in FIGS. 5A - 5D can be further understood as being essentially the same as that described for the valve assembly shown in FIGS. 4A - 4D using the exemplary through - flow control plate 200 described above. The controllable first fluid portion can directly migrate from the inner valve chamber portion 159 through a first control gap (not shown) to the intermediate valve chamber portion 154, from where the first fluid portion can exit through an offset second fluid conduit opening 116 that communicates with the second fluid conduit 114. Specifically with respect to the through - flow control plate 300, the controllable second fluid portion can migrate from the inner valve chamber portion 159 through the inclined upper hole 347 of the control plate 300 and sweep into the outer valve chamber portion 158 through the upper valve chamber portion 157, from where the second fluid portion can exit into the intermediate valve chamber portion 154 through a second control gap. The through - flow control plate 300 also needs to have a continuous, unbroken surface area that spans between contact with the large orifice ridge 120 and contact with the small orifice ridge 121 on the flat lower side of the disk - shaped body 341 and is sufficient to cover the entire intermediate valve chamber portion 154. The designer will also recognize that in the exemplary valve assembly shown in FIGS. 5A - 5D, the directions of fluid flow described are used for convenience and clarity but are not limiting. The fluid can flow in the opposite direction, and the complete valve chamber 150 will still be advantageously swept out by the controllable fluid flow. The valve assembly design shown in FIGS. 5A - 5D can also substantially eliminate any concerns regarding internal dead space versus swept volume and can improve the dynamic response of the exemplary valve design. The through - flow control plate enables the use of nested orifice ridges 120, 121 that together create an overall control gap length that is approximately twice that around a single large orifice while significantly reducing the area that must be closed to achieve shut - off. This combination provides high conductance with low closing force.

[0025] Another exemplary high-conductance valve body 490 having nested orifice ridges 420, 421 is shown in FIGS. 6A-6D. A more complete, exemplary valve assembly 400 can have a top work including a valve housing 460 removably joined to the valve body 490 by deforming a metal gasket 465 into a leak-free assembly further shown in FIGS. 8A-8D. The top work can include an actuator (not shown) selected for a particular application. For example, a pneumatic actuator may be used for a simple on-off high-conductance valve, while a piezoelectric actuator may be used for a proportional control high-conductance valve adapted to a mass flow controller electronic system. The open cavities 454, 458, 459 formed in the upper surface of the valve body 490 can be considered the lower portion of the valve chamber, while the upper portion 457 of the valve chamber is formed in the lower surface of the valve housing 460 thereabove. A large orifice ridge 420 formed as a generally circular upward protrusion offset within the valve body 490 separates the outer valve chamber portion 458 from an intermediate valve chamber portion 454 surrounded by the large orifice ridge 420. A nested small orifice ridge 421, also formed as a circular upward protrusion from the valve body 490, separates the inner valve chamber portion 459 from the intermediate valve chamber portion 454 surrounding it. A gasket seal area 464 can be formed in the upper surface of the valve body 490 to accommodate a metal gasket 465 adjacent to the periphery of the outer valve chamber portion 458.

[0026] The exemplary valve 400 can further include a first fluid conduit 417 (typically an inlet) and a second fluid conduit 414 (typically an outlet), both of which communicate fluid to the valve chamber, the valve chamber seal diaphragm 470, and a control element movable by deflection of the valve chamber seal diaphragm 470. The control element can consist of a control plate 600 (described further below) that includes a valve stroke amplifier mechanism fixed to a control shaft 482 fixed to the diaphragm 470. In the design of the exemplary valve 400, the first fluid conduit opening 419 provides communication between the outer valve chamber portion 458 and the first fluid conduit 417. Similarly, the second fluid conduit opening 416 provides communication between the intermediate valve chamber portion 454 and the second fluid conduit 414. In this illustration of FIGS. 8A - 8D, since the valve assembly 400 is fully closed in the blocked no - flow state, the control plate 600 is shown as being in contact with both the large orifice ridge 420 and the small orifice ridge 421. The designer will recognize that the first fluid conduit 417 and the second fluid conduit 414 can provide fluid passageways to surface - mount component bonding portions rather than the illustrated tube stubs. K1S and W seals are examples of surface - mount component bonding portions known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the above - mentioned valve can be constructed from materials selected for the desired chemical inertness with respect to the fluids being handled, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel - F™, Vespel™, Kynar™, and can include separate or combined combinations of metals and polymers. For example, a type 316L stainless steel valve body 490 can be used with a Hastelloy™ nickel alloy control plate 600 and an Elgiloy™ cobalt alloy seal diaphragm 470.

[0027] Another example of the through-flow control plate 600 shown in FIGS. 7A-7F and included in FIGS. 8A-8D includes a control plate body 640 and a valve stroke amplification mechanism amplifier disk 641, as described in U.S. Patent Application No. 14 / 932,086, filed Nov. 4, 2015, by the inventor Kim Ngoc Vu. As shown in FIGS. 7A-7F, the control plate body 640 is formed as a generally circular disk having features including a central through-hole 642, an annular groove 644, and an upper relief 646. The annular groove 644 and the upper relief 646 are formed within a disk side surface that faces a flat side surface intended to face one or more orifice ridges. The upper relief 646 is disposed to intersect a portion of the annular groove 644 and the central through-hole 642, thereby providing an open fluid passageway through which fluid can pass from one side surface of the control plate body 640 to the opposing side surface without having to pass through the outer diameter perimeter. The amplifier disk 641 is described in detail in the cited U.S. Patent Application No. 14 / 932,086. Amplifier disk features of interest for the present application include a lift hole 643, a passive portion, an active portion 649, a void passage 639 adjacent the active portion, an attachment point 645, and a torsion bar 648. The control plate body 640 and the amplifier disk 641 are attached to each other by welding at two attachment points 645, whereby the torsion bar 648 and the active portion 649 form a web that bridges a portion of the upper relief 646 and the annular groove 644. A portion of the void passage 639 is directly adjacent to the upper relief 646, thereby providing a fluid path through which fluid can pass from one side surface of the control plate 600 to the opposing side surface without having to pass through the outer diameter perimeter of the assembly. As shown in FIGS. 8A-8D, the control plate 600 can be attached to a stub of the control shaft 482 using the lift hole 643 of the stroke amplifier disk, whereby it can be suspended within the valve chamber. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, so long as the fluid passageways through the upper relief 646 and the void passage 639 of the amplifier disk are not blocked.

[0028] The force from a top work actuator (not shown) applied at the lifting hole 643 of the amplifier disk within the movable part 649 is transmitted to the attachment point 645 by the torsion bar 648. When such an applied force is a lifting case, the passive part 647 holds downward a first part that is off-center from the center of the through-flow control plate body 640, while a second part on the diametrically opposite side is lifted upward by the diametric force applied at the attachment point 645. The resulting movement will open a wedge-shaped gap between the flat bottom surface of the control plate and both the large orifice ridge 420 and the small orifice ridge 421 in the exemplary valve 400 shown in FIGS. 8A-8D. When the valve 400 is in the closed state (as shown in FIGS. 8A-8D), the various amplifier disk elements are nominally on the same plane, and the through-flow control plate body 640 contacts the large orifice ridge 420 and the small orifice ridge 421.

[0029] The method of controlling the fluid flow can be further understood by considering that the outer valve chamber portion 458 is supplied by a first fluid conduit opening 419 communicating with the first fluid conduit 417, so that at least a portion of the control plate 600 can move towards or away from the large orifice ridge 420 to create a wedge-shaped first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can directly migrate from the outer valve chamber portion 458 through the first control gap to the intermediate valve chamber portion 454, from where the first fluid portion can exit through a second fluid conduit opening 416 communicating with the second fluid conduit 414. In the valve 400 of this example, an actuator (not shown) applies a force to the control shaft 482 to deflect the diaphragm 470, thereby modulating the conductance through the valve 400 by changing the first control gap. While the valve 400 is closed, the fluid can reach the inner valve chamber portion 459 through the holes in the control plate 600 after flowing from the first fluid conduit 417 through the first fluid conduit opening 419 around the outer periphery of the control plate 600 and reaching the outer valve chamber portion 458 and the upper portion 457 of the valve chamber, but it should be recognized that it cannot proceed further. Therefore, when the valve 400 is closed, the fluid cannot pass from the first fluid conduit 417 to the second fluid conduit 414.

[0030] Simultaneously with the flow of the first fluid portion described above, moving at least a portion of the control plate 600 toward or away from the small orifice ridge 421 similarly creates a wedge-shaped second control gap (not shown) through which the second fluid portion can flow controllably. The controllable second fluid portion can sweep from the outer valve chamber portion 458 through the upper valve chamber portion 457, then through the control plate 600, through the amplifier disk clearance passage 639 and the upper relief 646 of the control plate body 640, and into the inner valve chamber portion 459. Thereafter, the controllable second fluid portion can migrate from the inner valve chamber portion 459 through the second control gap into the intermediate valve chamber portion 454, from where the second fluid portion can exit through the second conduit opening 416 that communicates with the second fluid conduit 414. Thus, in the valve 400 of this example, an actuator (not shown) that deflects the diaphragm 470 by applying a force to the control shaft 482 further modulates the conductance through the valve 400 by varying the second control gap. The designer will also recognize that the directions of fluid flow described in the exemplary valve assemblies shown in FIGS. 8A - 8D are used for convenience and clarity, but are not limiting. The fluid can flow in the opposite direction, and the complete valve chamber 450 will still be advantageously swept by the controllable fluid flow. The valve assembly designs shown in FIGS. 8A - 8D also substantially eliminate any concerns regarding internal dead space versus swept volume, and can also improve the dynamic response of the exemplary valve design. The through-flow control plate allows the use of nested orifice ridges 420, 421 that together create an overall control gap length that is approximately twice that around a single large orifice, while significantly reducing the area that must be closed to achieve shut-off. This combination provides high conductance with low closing force.

[0031] Another exemplary high-conductance valve body 890 having two nested groups of concentric orifice ridges 820, 821, 822, 823 at the center is shown in FIGS. 10A-10D. A more complete, exemplary valve assembly 1000 can have a top work including a valve housing 860 removably joined to the valve body 890 by deforming a metal gasket 865 into a leak-free assembly further shown in FIGS. 11A-11D. The top work can include an actuator (not shown) selected for a particular application. For example, a manual actuator may be used for a simple on-off high-conductance valve, while a piezoelectric or solenoid actuator may be used for a proportional control high-conductance valve adapted to a mass flow controller electronic system. The open cavities 852, 854, 856, 858, 859 formed in the upper surface of the valve body 890 can be considered the lower portion of the valve chamber, while the upper portion 857 of the valve chamber is formed in the lower surface of the valve housing 860 thereabove. The largest orifice ridge 820 formed as a circular upward protrusion from the valve body 890 separates the outer valve chamber portion 858 from a first intermediate valve chamber portion 856 surrounded by the largest orifice ridge 820. A generally concentric first smaller orifice ridge 821, also formed as a circular upward protrusion from the valve body 890 and surrounded by the largest orifice ridge 820, further separates the enclosed second intermediate valve chamber portion 854 from the first intermediate valve chamber portion 856. A generally concentric second smaller orifice ridge 822, also formed as a circular upward protrusion from the valve body 890 and surrounded by the first smaller orifice ridge 821, further separates the enclosed third intermediate valve chamber portion 852 from the second intermediate valve chamber portion 854. A generally concentric smallest orifice ridge 823, also formed as a circular upward protrusion from the valve body 890 and surrounded by the second smaller orifice ridge 822, further separates the inner valve chamber portion 859 from the third intermediate valve chamber portion 852. A gasket seal region 864 can be formed in the upper surface of the valve body 890 to accommodate a metal gasket 865 adjacent to the periphery of the outer valve chamber portion 858.

[0032] The exemplary valve 1000 can further include a first fluid conduit 810 (usually an inlet) and a second fluid conduit 814 (usually an outlet), both of which communicate fluid to a valve chamber, a valve chamber seal diaphragm 870, and a control element movable by deflection of the valve chamber seal diaphragm 870. The movable control element can further be constituted by a control plate 900 (described further below) fixed to a control shaft 882 fixed to the diaphragm 870. In the design of the exemplary valve 1000, the first fluid conduit opening 812 provides communication between the inner valve chamber portion 859 and the first fluid conduit 810. Similarly, one or more second fluid conduit openings 816 provide communication between the first intermediate valve chamber portion 856 and the second fluid conduit 814. Similarly, one or more third inner fluid conduit openings 818 are provided that provide communication between the third intermediate valve chamber portion 852 and the second fluid conduit 814. In this illustration of FIGS. 11A-11D, since the valve 1000 is completely closed in the shut-off no-flow state, the control plate 900 is shown to be in contact with all four orifice ridges, namely, the largest orifice ridge 820, the first smaller orifice ridge 821, the second smaller orifice ridge 822, and the smallest orifice ridge 823. The designer will recognize that the first fluid conduit 810 and the second fluid conduit 814 can provide fluid passages to surface mount component bonding portions rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component bonding portions known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the above valve can be constructed from materials selected for the desired chemical inertness with respect to the fluid being handled, for example, stainless steel, Monel™ metal, titanium alloy, Hastelloy™ alloy, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and can include separate or combined combinations of metals and polymers. For example, a type 316L stainless steel valve body 890 can be used with a Hastelloy™ nickel alloy control plate 900 and an Elgiloy™ cobalt alloy seal diaphragm 870.Alternatively, the valve body, the seal diaphragm, and the control plate body can all be made from the same stainless steel alloy.

[0033] The example of the through-flow control plate 900 shown in FIGS. 9A-9D includes a control plate body 940 formed as a generally circular disk having one or more features on opposite sides of the disk. Those features can include a central mounting hole 942 (blind or through), one or more first intermediate through-holes 944, and one or more second intermediate through-holes 946. As shown in FIGS. 11A-11D, the control plate 900 can be attached to a stub of the control shaft 882, thereby being suspended within the valve chamber. Any suitable attachment method can be used, such as press-fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages formed by the first intermediate through-holes 944 and the second intermediate through-holes 946 are not blocked. It should be recognized that instead of using a blind hole as shown in FIGS. 9A-9D to attach the control plate 900 to the stub of the control shaft 882, through-hole attachment can be used instead, as shown in FIGS. 2A-2D, FIGS. 3A-3D, and FIGS. 7A-7F.

[0034] One or more first intermediate through-holes 944 penetrate the control plate body 940 and are typically arranged at regular intervals around a first circle of a constant diameter surrounding the central mounting hole 942. The diameter of the first circle and the diameter of the first intermediate through-holes 944 are selected such that the through-holes cover only the inner valve chamber portion 859 and do not overlap with the adjacent smallest orifice ridge 823. As shown in FIGS. 9A-9D and FIGS. 11A-11D, angle drilling the first intermediate through-holes 944 allows the use of larger diameter holes while avoiding overlap with the smallest orifice ridge 823. Although not shown, it should be recognized that spherical pockets or recesses can be used to assist in drilling the first intermediate through-holes 944 in the manner discussed above with respect to FIGS. 3A-3D. The first intermediate through-holes 944 constitute fluid passages through which fluid can pass without having to pass through the outer diameter periphery from one side surface of the control plate body 940 to the opposite side surface. More specifically, the first intermediate through-holes 944 fluidly connect the inner valve chamber portion 859 to the upper valve chamber portion 857. The web 945 of material between one or more adjacent first intermediate through-holes 944 provides a mechanical connection on the flat lower side surface of the disk-shaped control plate body 940 from the central mounting hole 942 to a continuous, unbroken first surface area 941, which has a radial extent sufficient to span between contact with the second, smaller orifice ridge 822 and contact with the smallest orifice ridge 823 while covering the entire third intermediate valve chamber portion 852.

[0035] One or more second intermediate through-holes 946 penetrate the control plate body 940 and are typically arranged at regular intervals around a second circle of a constant diameter that further surrounds the first surface area 941 and the first intermediate through-hole 944. The diameter of the second circle and the diameter of the second intermediate through-holes 946 are selected such that the through-holes cover only the second intermediate valve chamber portion 854 and do not overlap with the adjacent first smaller orifice ridge 821 or the second smaller orifice ridge 822. The second intermediate through-holes 946 constitute a fluid passage through which fluid can pass without having to pass through the outer diameter periphery from one side surface of the control plate body 940 to the opposite side surface. More specifically, the second intermediate through-holes 946 fluidly connect the second intermediate valve chamber portion 854 to the upper valve chamber portion 857. The web 947 of material between one or more adjacent intermediate through-holes 946 provides a mechanical connection on the flat lower side of the disk-shaped body 940 from the first surface area 941 to a continuous, unbroken second surface area 943 that covers the entire first intermediate valve chamber portion 856 and has a radial extent sufficient to span between contact with the largest orifice ridge 820 and contact with the first smaller orifice ridge 821.

[0036] A method of controlling fluid flow can be further understood by considering that an inner valve chamber portion 859 surrounded by a minimum orifice ridge 823 is supplied by a first fluid conduit opening 812 that communicates with a first fluid conduit 810, whereby at least a portion of a control plate 900 can move toward or away from the minimum orifice ridge 823 to create a first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can move directly to a third intermediate valve chamber portion 852, from which the first fluid portion can exit through one or more third fluid conduit openings 818 that communicate with a second fluid conduit 814. The second fluid portion can move upward from the inner valve chamber portion 859 through one or more first intermediate through-holes 944 into an upper portion 857 of the valve chamber, and then downward through one or more second intermediate through-holes 946 into a second intermediate valve chamber portion 854. Moving at least a portion of the control plate 900 toward or away from a second, smaller orifice ridge 822 will create a second control gap (not shown) through which the second fluid portion can also flow controllably directly from the second intermediate valve chamber portion 854 into the third intermediate valve chamber portion 852 and then exit through one or more third fluid conduit openings 818 that communicate with the second fluid conduit 814. In the valve 1000 of this example, an actuator (not shown) applies a force to a control shaft 882 to deflect a diaphragm 870, thereby modulating the conductance through the valve 1000 by changing the first and second control gaps.

[0037] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 900 toward or away from the largest orifice ridge 820 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion can migrate upward from the inner valve chamber portion 859 through one or more first intermediate through-holes 944 of the control plate 900 and sweep into the outer valve chamber portion 858 through the upper valve chamber portion 857, from where the third fluid portion can exit into the first intermediate valve chamber portion 856 through the third control gap. Upon reaching the first intermediate valve chamber portion 856, the controllable third fluid portion can exit through one or more second fluid conduit openings 816 that communicate with the second fluid conduit 814. The fourth fluid portion can migrate upward from the inner valve chamber portion 859 through one or more first intermediate through-holes 944 and into the upper portion 857 of the valve chamber, from where it can migrate downward through one or more second intermediate through-holes 946 and into the second intermediate valve chamber portion 854. Moving at least a portion of the control plate 900 toward or away from the first smaller orifice ridge 821 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 856, from where the fourth fluid portion can exit through one or more second inner fluid conduit openings 816 that communicate with the second fluid conduit 814. Thus, in the valve 1000 of this example, an actuator (not shown) that deflects the diaphragm 870 by applying a force to the control shaft 882 further modulates the conductance through the valve 1000 by changing the third and fourth control gaps. It should be appreciated that while the valve 1000 is closed, fluid can pass through the holes in the control plate 900 and into the upper portion 857 of the valve chamber, the outer valve chamber portion 858, and the second intermediate valve chamber portion 854, but cannot proceed further. Thus, when the valve 1000 is closed, fluid cannot pass from the first fluid conduit 810 to the second fluid conduit 814.

[0038] The designer can recognize that the largest orifice ridge 820 and the first smaller orifice ridge 821 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 820, 821 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 900, of course, mainly has a continuous and unbroken second surface area 943 that spans between contact with the largest orifice ridge 820 and contact with the first smaller orifice ridge 821 on the flat lower side surface of the disk-shaped body 940 and is sufficient to cover the entire first intermediate valve chamber portion 856. Similarly, the second smaller orifice ridge 822 and the smallest orifice ridge 823 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 822, 823 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 900, of course, mainly has a continuous and unbroken first surface area 941 that spans between contact with the second smaller orifice ridge 822 and contact with the smallest orifice ridge 823 on the flat lower side surface of the disk-shaped body 940 and is sufficient to cover the entire third intermediate valve chamber portion 852. The designer will also recognize that the described direction of fluid flow from the first fluid conduit 810 to the second fluid conduit 814 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 814 to the first fluid conduit 810, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 11A - 11D can substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate allows the use of nested orifice ridges 820, 821, 822, 823 that together create an overall control gap length approximately three times that around a single large orifice while significantly reducing the area that must be closed to achieve shutoff. This combination provides high conductance with low closing force.

[0039] A representative example of another high-conductance valve body 1290 having two nested groups of concentric orifice ridges 1220, 1221, 1222, 1223 at the center is shown in FIGS. 12A-12D. A more complete, exemplary valve assembly 1400 can have a top work including a valve housing 1460 removably joined to the valve body 1290 by deforming a metal gasket 1465 into a leak-free assembly further shown in FIGS. 14A-14D. The top work can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator may be used for a simple on-off high-conductance valve, while a piezoelectric actuator may be used for a proportional control high-conductance valve adapted to a mass flow controller electronic system. The open cavities 1252, 1254, 1256, 1258, 1259 formed in the upper surface of the valve body 1290 can be considered the lower portion of the valve chamber, while the upper portion 1457 of the valve chamber is formed in the lower surface of the valve housing 1460 thereabove. Consideration of FIGS. 12A-12D will inform the designer that the open cavities 1252, 1254, 1256, 1258 appear as generally circular grooves and that the open cavities can all be the same depth, or can vary in depth relative to each other and to the extent of any particular circular groove range. The largest orifice ridge 1220, formed as a circular upward protrusion from the valve body 1290, separates the outer valve chamber portion 1258 from a first intermediate valve chamber portion 1256 surrounded by the largest orifice ridge 1220. A generally concentric first smaller orifice ridge 1221, also formed as a circular upward protrusion from the valve body 1290 and surrounded by the largest orifice ridge 1220, further separates the enclosed second intermediate valve chamber portion 1254 from the first intermediate valve chamber portion 1256. A generally concentric second smaller orifice ridge 1222, also formed as a circular upward protrusion from the valve body 1290 and surrounded by the first smaller orifice ridge 1221, further separates the enclosed third intermediate valve chamber portion 1252 from the second intermediate valve chamber portion 1254.The generally concentric smallest orifice ridge 1223 is also formed as a circular upward protrusion from the valve body 1290, surrounded by a second, smaller orifice ridge 1222, further separating the inner valve chamber portion 1259 from the third intermediate valve chamber portion 1252. The upper surfaces of each of the orifice ridges 1220, 1221, 1222, 1223 are in the same plane as the other adjacent orifice ridges, while the depths of the individual intermediate valve chamber cavities 1252, 1254, 1256 can have varying depths, and further, it should be recognized that they can be contoured to encourage flow towards the openings within the valve body 1290. A gasket seal region 1264 can be formed within the upper surface of the valve body 1290 to accommodate a metallic gasket 1465 adjacent to the periphery of the outer valve chamber portion 1258.

[0040] The exemplary valve 1400 can further include a first fluid conduit 1210 (typically an inlet) and a second fluid conduit 1214 (typically an outlet), both of which communicate fluid to a valve chamber, a valve chamber seal diaphragm 1470, and a control element movable by deflection of the valve chamber seal diaphragm 1470. The movable control element can further be constituted from a control plate 1300 (described further below) that is fixed to a control shaft 1482 to which the valve chamber seal diaphragm 1470 is fixed. In the illustrations of FIGS. 14B and 14D, a central insert 1350 of the control plate 1300 can be attached to a stub 1483 of the control shaft 1482, whereby it can be suspended within the upper valve chamber portion 1457. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages through the various control plate holes are not blocked. It should be recognized that instead of using the through holes 1352 as shown in FIGS. 14B and 14D to attach the control plate to the stub 1483 of the control shaft 1482, a blind hole attachment similar to that shown in FIGS. 9A - 9D can be used instead. In the design of the exemplary valve 1400, the first fluid conduit opening 1212 provides communication between the inner valve chamber portion 1259 and the first fluid conduit 1210. Similarly, the second fluid conduit opening 1216, formed as a curved slot, provides communication between the first intermediate valve chamber portion 1256 and the second fluid conduit 1214. Similarly, a third inner fluid conduit opening 1218, formed as a curved slot, is provided that provides communication between the third intermediate valve chamber portion 1252 and the second fluid conduit 1214. In this illustration of FIGS. 14A - 14D, since the valve 1400 is completely closed in the blocked no - flow state, the control plate 1300 is shown to be in contact with all four orifice ridges, namely, the largest orifice ridge 1220, the first smaller orifice ridge 1221, the second smaller orifice ridge 1222, and the smallest orifice ridge 1223. The designer will recognize that the first fluid conduit 1210 and the second fluid conduit 1214 can provide fluid passages to surface - mount component joining portions instead of the illustrated tube stubs.K1S and W seals are examples of surface mount component joints known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the valve can be constructed from materials selected for the desired chemical inertness with respect to the fluid being handled and can include, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations, separate or together, of metals and polymers. For example, a type 316L stainless steel valve body 1290 can be used with a Hastelloy™ nickel alloy control plate 1300 and an Elgiloy™ cobalt alloy seal diaphragm 1470. Alternatively, the valve body, seal diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0041] The examples of the through-flow control plate 1300 shown in FIGS. 13A to 13E can all be composed of two pieces press-fitted together, namely, a control plate body 1340 formed as a basically circular disk having one or more features on the opposing side surfaces of the disk and a center insert 1350. The features of the control plate body 1340 can include a center insert mounting hole 1348 effectively defined as a counterbore 1344 terminating in a control plate through-hole 1342 of smaller diameter and one or more intermediate through-holes 1346. The axially symmetric center insert 1350 includes a central through-hole 1352 and an outer rim 1358. The region between the central through-hole 1352 and the outer rim 1358 is penetrated by one or more insert holes 1354 generally parallel to the central through-hole 1352. Leaving a web 1355 of the material of the center insert between the insert holes 1354 is sufficient to ensure that the outer diameter is robust enough to allow the center insert 1350 to be locked into the insert mounting hole 1348 by simple press-fitting (see the exploded view of FIG. 13C and the cross-sectional view of FIG. 13B). Other assembly methods such as welding or brazing (in the case of metal parts) can be contemplated, and the insert holes 1354 may be curved slots rather than round, but the illustrated design is likely to be the least expensive to machine. The center insert 1350 can be made by injection molding or die casting if necessary, but such methods cannot meet the density and cleanliness requirements of the high-purity fluid delivery devices typically used in semiconductor capital equipment. The insert holes 1354, together with the control plate through-holes 1342, constitute a fluid passage through which the fluid can pass from one side surface of the control plate body 1340 to the opposing side surface without having to pass through the outer diameter periphery. The concave insert bottom relief (or concave bottom relief) 1353 can direct the flow from the insert through-holes 1354 toward the control plate through-holes 1342. More specifically, the insert holes 1354 fluidly connect the inner valve chamber portion 1259 to the upper valve chamber portion 1457 (to be further described below with respect to FIG. 14B).

[0042] An alternative design (not shown) for the center insert 1350 may include an insert shaft and an insert flange that projects radially outward. The insert flange will be penetrated by one or more insert holes generally parallel to the insert shaft. Again, leaving a web of material between the flange holes will ensure that the outer diameter of the insert flange is robust enough to allow an alternative center insert to be locked into the insert mounting hole 1348 by simple press fitting. Since an undesirable lack of robustness was observed when connecting such an insert shaft to the valve top work diaphragm, this alternative design is not further considered in this disclosure with respect to any of the control plate types described herein and continuing below.

[0043] The diameter of the control plate through-hole 1342 is selected to create a continuous, unbroken first surface area 1341 on the flat lower side surface of the disk-shaped control plate body 1340, such that the first surface area 1341 has a radial extent sufficient to span between contact with the second, smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 while covering the entire third intermediate valve chamber portion 1252. One or more intermediate through-holes 1346 pass through the control plate body 1340 and are typically arranged at regular intervals around a circle of constant diameter that further surrounds the first surface area 1341. In some embodiments, the intermediate through-holes 1346 extend substantially straight through the control plate body 1340. The diameter of the circle of constant diameter and the diameter of the intermediate through-holes 1346 are selected such that the intermediate through-holes 1346 cover only the second intermediate valve chamber portion 1254 and do not overlap with either the adjacent first, smaller orifice ridge 1221 or the second, smaller orifice ridge 1222. The intermediate through-holes 1346 constitute fluid passages through which fluid can pass without having to pass through the outer diameter perimeter from one side surface of the control plate body 1340 to the opposite side surface. More specifically, the intermediate through-holes 1346 fluidly connect the second intermediate valve chamber portion 1254 to the upper valve chamber portion 1457. The web 1347 of material between one or more adjacent intermediate through-holes 1346 provides a mechanical connection on the flat lower side surface of the disk-shaped body 1340 from the first surface area 1341 to a continuous, unbroken second surface area 1343, which has a radial extent sufficient to span between contact with the largest orifice ridge 1220 and contact with the first, smaller orifice ridge 1221 while covering the entire first intermediate valve chamber portion 1256.

[0044] An exemplary method by which valve 1400 controls fluid flow can be further understood by considering that the inner valve chamber portion 1259 surrounded by the minimum orifice ridge 1223 is supplied by a first fluid conduit opening 1212 that communicates with the first fluid conduit 1210, whereby at least a portion of the control plate 1300 can move towards or away from the minimum orifice ridge 1223 to create a first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can move directly to the third intermediate valve chamber portion 1252, from where the first fluid portion can exit through a third inner fluid conduit opening 1218 that communicates with the second fluid conduit 1214. The second fluid portion can move upward from the inner valve chamber portion 1259 through the control plate through-hole 1342 and the insert hole 1354 into the upper portion 1457 of the valve chamber, and from there downward through the intermediate through-hole 1346 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1300 towards or away from the second smaller orifice ridge 1222 will create a second control gap (not shown) through which the second fluid portion can also flow controllably directly from the second intermediate valve chamber portion 1254 into the third intermediate valve chamber portion 1252 and then exit through one or more third inner fluid conduit openings 1218 that communicate with the second fluid conduit 1214. In the valve 1400 of this example, an actuator (not shown) applies a force to the control shaft 1482 to deflect the diaphragm 1470, thereby moving the fixed control plate 1300 to vary the conductance through the valve 1400 by changing the first and second control gaps.

[0045] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 1300 toward or away from the largest orifice ridge 1220 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1354 in the control plate 1300 and sweep into the outer valve chamber portion 1258 through the upper valve chamber portion 1457, from where the third fluid portion can exit into the first intermediate valve chamber portion 1256 through the third control gap. Upon reaching the first intermediate valve chamber portion 1256, the controllable third fluid portion can exit through the second fluid conduit opening 1216 that communicates with the second fluid conduit 1214. The fourth fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1354 and into the upper valve chamber portion 1457 of the valve chamber, from where it can migrate downward through one or more intermediate through-holes 1346 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1300 toward or away from the first smaller orifice ridge 1221 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1256, from where the fourth fluid portion can exit through the second inner fluid conduit opening 1216 that communicates with the second fluid conduit 1214. Thus, in the valve 1400 of this example, an actuator (not shown) that deflects the diaphragm 1470 by applying a force to the control shaft 1482 further modulates the conductance through the valve 1400 by varying the third and fourth control gaps. It should be appreciated that while the valve 1400 is closed, fluid can pass through the holes in the control plate 1300 and into the upper portion 1457 of the valve chamber, the outer valve chamber portion 1258, and the second intermediate valve chamber portion 1254, but cannot proceed further. Thus, when the valve 1400 is closed, fluid cannot pass from the first fluid conduit 1210 to the second fluid conduit 1214.

[0046] The designer can recognize that the largest orifice ridge 1220 and the first smaller orifice ridge 1221 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1300, of course, mainly has a continuous and unbroken second surface area 1343 that spans between the contact with the largest orifice ridge 1220 and the contact with the first smaller orifice ridge 1221 on the flat lower side of the disk-shaped body 1340 and is sufficient to cover the entire first intermediate valve chamber portion 1256. Similarly, the second smaller orifice ridge 1222 and the smallest orifice ridge 1223 do not need to be exactly concentric, but need to be nested, and further, the nested pair of orifice ridges 1222, 1223 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1300, of course, mainly has a continuous and unbroken first surface area 1341 that spans between the contact with the second smaller orifice ridge 1222 and the contact with the smallest orifice ridge 1223 on the flat lower side of the disk-shaped body 1340 and is sufficient to cover the entire third intermediate valve chamber portion 1252. The designer will also recognize that the described direction of fluid flow proceeding from the first fluid conduit 1210 to the second fluid conduit 1214 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1214 to the first fluid conduit 1210, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 14A - 14D can substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate allows the use of nested orifice ridges 1220, 1221, 1222, 1223 that generate an overall control gap length approximately three times around a single large orifice while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force.

[0047] Another exemplary high-conductance valve 1600 is shown in FIGS. 16A-16D. Similar to the valve 1400 described above, this valve uses a high-conductance valve body 1290 having two nested groups of central concentric orifice ridges, a valve housing 1460 removably joined to the valve body 1290 by deforming a metal gasket 1465, a valve chamber seal diaphragm 1470, and a valve top work including a control element movable by deflection of the valve chamber seal diaphragm 1470. The movable control element can be further composed of another control plate 1500 (described further below) fixed to a control shaft 1482 fixed to the diaphragm 1470. In the illustrations of FIGS. 16B, 16D, the central insert 1550 of the control plate 1500 is attached to a stub 1483 of the control shaft 1482, whereby it can be suspended within the upper valve chamber portion 1457. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages through the various control plate holes are not blocked. It should be recognized that instead of using through holes 1552 as shown in FIGS. 16B, 16D to attach the control plate to the stub 1483 of the control shaft 1482, a blind hole attachment similar to that shown in FIGS. 9A-9D can be used instead. In the design of the exemplary valve 1600, the first fluid conduit opening 1212 provides communication between the inner valve chamber portion 1259 and the first fluid conduit 1210. Similarly, a second fluid conduit opening 1216 formed as a curved slot provides communication between the first intermediate valve chamber portion 1256 and the second fluid conduit 1214. Similarly, a third inner fluid conduit opening 1218 formed as a curved slot is provided that provides communication between the third intermediate valve chamber portion 1252 and the second fluid conduit 1214. In this illustration of FIGS. 16A-16D, since the valve 1600 is fully closed in the blocked no-flow state, the control plate 1500 is shown to be in contact with all four orifice ridges, namely, the largest orifice ridge 1220, the first smaller orifice ridge 1221, the second smaller orifice ridge 1222, and the smallest orifice ridge 1223.The designer will recognize that the first fluid conduit 1210 and the second fluid conduit 1214 can provide fluid passages to surface mount component joints rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component joints known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the valve can be constructed from materials selected for the desired chemical inertness with respect to the fluids being handled, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and can include separate or combined combinations of metals and polymers. For example, a type 316L stainless steel valve body 1290 can be used with a Hastelloy™ nickel alloy control plate 1500 and an Elgiloy™ cobalt alloy seal diaphragm 1470. Alternatively, the valve body, seal diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0048] The example of the flow control plate 1500 shown in FIGS. 15A to 15E can be composed of three elements assembled by a process combination, namely, a control plate body 1540 formed basically as a circular disk, a polymer insert (sheet insert) 1530 (both having one or more features on the opposing side surfaces of the disk), and a center insert 1550. The features of the control plate body 1540 can include a center insert mounting hole 1548 effectively defined as a counterbore 1544 terminating in a smaller diameter control plate through hole 1542, and one or more intermediate through cavities 1549. The axially symmetric center insert 1550 includes a center through hole 1552 and an outer rim 1558. The region between the center through hole 1552 and the outer rim 1558 is penetrated by one or more insert holes 1554 generally parallel to the center through hole 1552. Leaving a web 1555 of material between the insert holes 1554 is sufficient to ensure that the outer diameter of the outer rim 1558 is robust enough to allow the center insert 1550 to be locked into the insert mounting hole 1548 by simple press fitting (see the exploded view of FIG. 15C and the cross-sectional view of FIG. 15B). Other assembly methods such as welding or brazing (in the case of metal parts) can be contemplated, and the insert holes 1554 may be curved slots rather than round, but the illustrated design is likely to be the least expensive to machine. The center insert 1550 can be made by injection molding or die casting if desired, but such methods cannot meet the density and cleanliness requirements of high-purity fluid delivery devices typically used in semiconductor capital equipment. The insert holes 1554, together with the control plate through holes 1542, constitute a fluid passage through which fluid can pass from one side surface of the control plate body 1540 to the opposing side surface without having to pass through the outer diameter periphery. The concave insert bottom relief (or concave bottom relief) 1553 can direct the flow from the insert through holes 1554 towards the control plate through holes 1542. More specifically, the insert holes 1554 fluidly connect the inner valve chamber portion 1259 to the upper valve chamber portion 1457 (to be further described below with respect to FIG. 16B).As described above, an alternative design (not shown) for the central insert 1550 may include an insert shaft and an insert flange that projects radially outward. The insert flange will be penetrated by one or more insert holes that are generally parallel to the insert shaft. A lack of undesirable robustness has been observed when connecting such an insert shaft to the valve top work diaphragm and is therefore not further discussed herein.

[0049] The representative polymer inserts 1530 shown in FIGS. 15B, 15C, and 15E can have specific features formed as a result of being compression molded to fit into openings within the control plate body 1540. For example, the insert can include a plurality of pillars that are each received within one of a plurality of openings within the control plate body by the molding process. A typical compression molding process begins with polychlorotrifluoroethylene (PCTFE) powder filling the openings 1545, 1549 of the control plate body 1540, and then the powder is polymerized under the action of heat and pressure directly applied within the control plate body 1540 by known methods. The exemplary polymer insert 1530 has a plurality of polymer pillars 1531 formed within and fitting into a plurality of intermediate through cavities 1549, while also being interconnected by an adjoining relatively thin polymer disk 1532 that fills a wide and shallow circular groove 1545 formed within the control plate body 1540 (facing towards the orifice ridge, as further described below with respect to FIG. 16B). The intermediate through holes 1546 pass through the polymer pillars 1531 and constitute fluid passages through which fluid can pass from one side of the control plate body 1540 to the opposite side without having to pass through the outer diameter perimeter. The inner diameter of the thin polymer disk 1532 that fills the wide and shallow circular groove 1545 (slightly larger than the diameter of the control plate through hole 1542) is selected to create a continuous and unbroken first surface area 1541 on the flat lower side of the disk-shaped control plate body 1540, such that the first surface area 1541 has a radial extent sufficient to span between contact with the second, smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 while covering the entire third intermediate valve chamber portion 1252. One or more intermediate through holes 1546 pass through one or more polymer pillars 1531 that fill one or more intermediate through cavities 1549 formed within the control plate body 1540 and are typically arranged at regular intervals around the circumference of a circle of a constant diameter that further surrounds the first surface area 1541. In some embodiments, the intermediate through holes 1546 extend substantially straight through one or more polymer pillars 1531 and the thin polymer disk 1532.The diameter of the circle of a certain diameter and the diameter of the intermediate through-hole 1546 are selected such that these through-holes cover only the second intermediate valve chamber portion 1254 and do not overlap with the adjacent first smaller orifice ridge 1221 nor the second smaller orifice ridge 1222. More specifically, the intermediate through-hole 1546 fluidly connects the intermediate valve chamber portion 1254 to the upper valve chamber portion 1457. The web 1547 of material between one or more adjacent intermediate through-cavities 1549 provides additional mechanical support for the polymer disk 1532 that spans from the first surface region 1541 to the continuous and unbroken second surface region 1543 on the flat lower side of the disk-shaped body 1540, and the second surface region 1543 has a radial extent sufficient to span between contact with the largest orifice ridge 1220 and contact with the first smaller orifice ridge 1221 while covering the entire first intermediate valve chamber portion 1256.

[0050] An exemplary method by which valve 1600 controls fluid flow can be further understood by considering that the inner valve chamber portion 1259 surrounded by the minimum orifice ridge 1223 is supplied by a first fluid conduit opening 1212 that communicates with the first fluid conduit 1210, whereby at least a portion of the control plate 1500 can move toward or away from the minimum orifice ridge 1223 to create a first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can move directly to the third intermediate valve chamber portion 1252, from which the first fluid portion can exit through a third inner fluid conduit opening 1218 that communicates with the second fluid conduit 1214. The second fluid portion moves upward from the inner valve chamber portion 1259 through the control plate through-hole 1542 and the insert hole 1554 into the upper portion 1457 of the valve chamber, from which it can move downward through the intermediate through-hole 1546 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1500 toward or away from the second, smaller orifice ridge 1222 creates a second control gap (not shown) through which the second fluid portion can also flow controllably and directly from the second intermediate valve chamber portion 1254 into the third intermediate valve chamber portion 1252 and then exit through the third inner fluid conduit opening 1218 that communicates with the second fluid conduit 1214. In the valve 1600 of this example, an actuator (not shown) can modulate the conductance through the valve 1600 by applying a force to the control shaft 1482 to deflect the diaphragm 1470, thereby moving the fixed control plate 1500 and changing the first and second control gaps.

[0051] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 1500 toward or away from the largest orifice ridge 1220 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1554 in the control plate 1500 and sweep into the outer valve chamber portion 1258 through the upper valve chamber portion 1457, from where the third fluid portion can exit into the first intermediate valve chamber portion 1256 through the third control gap. Upon reaching the first intermediate valve chamber portion 1256, the controllable third fluid portion can exit through one or more second fluid conduit openings 1216 that communicate with the second fluid conduit 1214. The fourth fluid portion can migrate upward from the inner valve chamber portion 1259 through one or more insert holes 1554 into the upper valve chamber portion 1457, from where it can migrate downward through one or more intermediate through holes 1546 into the second intermediate valve chamber portion 1254. Moving at least a portion of the control plate 1500 toward or away from the first smaller orifice ridge 1221 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1256, from where the fourth fluid portion can exit through a second inner fluid conduit opening 1216 that communicates with the second fluid conduit 1214. Thus, in the valve 1600 of this example, an actuator (not shown) that deflects the diaphragm 1470 by applying a force to the control shaft 1482 further modulates the conductance through the valve 1600 by varying the third and fourth control gaps. It should be appreciated that while the valve 1600 is closed, fluid can pass through the holes in the control plate 1500 into the upper portion 1457 of the valve chamber, the outer valve chamber portion 1258, and the second intermediate valve chamber portion 1254, but cannot proceed further. Thus, when the valve 1600 is closed, fluid cannot pass from the first fluid conduit 1210 to the second fluid conduit 1214.

[0052] The designer can recognize that the largest orifice ridge 1220 and the first smaller orifice ridge 1221 do not need to be exactly concentric, but only need to be nested, and furthermore, the nested pair of orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1500, of course, mainly has a continuous and unbroken second surface area 1543 that spans between contact with the largest orifice ridge 1220 and contact with the first smaller orifice ridge 1221 on the flat lower side surface of the disk-shaped body 1540 and is sufficient to cover the entire first intermediate valve chamber portion 1256. Similarly, the second smaller orifice ridge 1222 and the smallest orifice ridge 1223 do not need to be exactly concentric, but only need to be nested, and furthermore, the nested pair of orifice ridges 1222, 1223 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1500, of course, mainly has a continuous and unbroken first surface area 1541 that spans between contact with the second smaller orifice ridge 1222 and contact with the smallest orifice ridge 1223 on the flat lower side surface of the disk-shaped body 1540 and is sufficient to cover the entire third intermediate valve chamber portion 1252. The designer will also recognize that the described direction of fluid flow from the first fluid conduit 1210 to the second fluid conduit 1214 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1214 to the first fluid conduit 1210, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 16A - 16D substantially eliminates any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate enables the use of nested orifice ridges 1220, 1221, 1222, 1223 that generate an overall control gap length approximately three times around a single large orifice while significantly reducing the area that must be closed to achieve shut-off.This combination provides high conductance with low closing forces, and the inclusion of the relatively soft polymer insert 1530 will further improve the shut-off tightness of the valve 1600.

[0053] Another exemplary high-conductance valve body 1790 having two nested groups of central concentric orifice ridges 1720, 1721, 1722, 1723 is shown in FIGS. 17A - 17D. A more complete, exemplary valve assembly 1900-1 can have a topwork including a valve housing 1960 removably joined to the valve body 1790 by deforming a metal gasket 1965 into a leak-free assembly further shown in FIGS. 19A-1 - 19D-1. Another more complete, exemplary valve assembly 1900-2 can have a topwork including a valve housing 1960 removably joined to the valve body 1790 by deforming a metal gasket 1965 into a leak-free assembly further shown in FIGS. 19A-2 - 19D-2. The topwork can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator may be used for a simple on-off high-conductance valve, while a piezoelectric actuator may be used for a proportional control high-conductance valve adapted for a mass flow controller electronic system. Open cavities 1752, 1754, 1756, 1758, 1759 formed in the upper surface of the valve body 1790 can be considered the lower part of the valve chamber, while the upper part 1957 of the valve chamber is formed in the lower surface of the valve housing 1960 thereabove. The considerations of FIGS. 17A - 17D inform the designer that the open cavities 1752, 1754, 1756, 1278 appear as generally circular grooves and that the open cavities can all be the same depth, or can vary in depth relative to each other and to the extent of any particular circular groove. The largest orifice ridge 1720, formed as a circular upward protrusion from the valve body 1790, separates the outer valve chamber portion 1758 from a first intermediate valve chamber portion 1756 surrounded by the largest orifice ridge 1720. A generally concentric first smaller orifice ridge 1721, also formed as a circular upward protrusion from the valve body 1790 and surrounded by the largest orifice ridge 1720, further separates the enclosed second intermediate valve chamber portion 1754 from the first intermediate valve chamber portion 1756.A generally concentric second smaller orifice ridge 1722 is also formed as a circular upward protrusion from the valve body 1790, surrounded by the first smaller orifice ridge 1721, and further separates the enclosed third intermediate valve chamber portion 1752 from the second intermediate valve chamber portion 1754. A generally concentric smallest orifice ridge 1723 is also formed as a circular upward protrusion from the valve body 1790, surrounded by the second smaller orifice ridge 1722, and further separates the inner valve chamber portion 1759 from the third intermediate valve chamber portion 1752. The upper surfaces of each of the orifice ridges 1720, 1721, 1722, 1723 are in the same plane as the other adjacent orifice ridges, while the depths of the individual intermediate valve chamber cavities 1752, 1754, 1756 can have varying depths, and furthermore, it should be recognized that they can be contoured to encourage flow towards the openings within the valve body 1790. A gasket seal area 1764 can be formed within the upper surface of the valve body 1790 to accommodate a metal gasket 1765 adjacent to the periphery of the outer valve chamber portion 1758.

[0054] The exemplary valves 1900-1, 1900-2 can further include a first fluid conduit 1710 (usually an inlet) and a second fluid conduit 1714 (usually an outlet), and both of these conduits communicate fluid to the upper and lower portions of the valve chamber, the valve chamber seal diaphragm 1970, and a control element movable by the deflection of the valve chamber seal diaphragm 1970. The movable control element can further be constituted from control plates 1800-1, 1800-2 (further described below) fixed to the valve chamber seal diaphragm 1970. In the illustrations of FIGS. 19B-1, 19B-2 and FIGS. 19D-1, 19D-2, the control plates 1800-1, 1800-2 are attached to stubs 1983 protruding from the diaphragm 1970, whereby they can be suspended within the upper valve chamber portion 1957. The distance between the control plate 2000-2 and the valve chamber seal diaphragm 2170 is minimized to reduce or eliminate the scavenging volume portion. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passage through the various control plate holes is not blocked. Instead of using through holes 1952 as shown in FIGS. 19B-1, 19B-1, and FIGS. 19D-1, 19D-2 to attach the control plate to the stub 1983, it should be recognized that a blind hole attachment similar to that shown in FIGS. 9A-9D can be used instead. In the design of the exemplary valves 1900-1, 1900-2, the first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, the second fluid conduit opening 1716 formed as a curved slot provides communication between the first intermediate valve chamber portion 1756 and the second fluid conduit 1714. Similarly, a third inner fluid conduit opening 1718 is provided, formed as a curved slot, which provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714.In this example of FIGS. 19A-1 through 19D-1 and FIGS. 19A-2 through 19D-2, since valves 1900-1, 1900-2 are completely closed in the blocked no-flow state, control plates 1800-1, 1800-2 are shown to contact all four orifice ridges, namely, the largest orifice ridge 1720, the first smaller orifice ridge 1721, the second smaller orifice ridge 1722, and the smallest orifice ridge 1723. The designer will recognize that the first fluid conduit 1710 and the second fluid conduit 1714 can provide fluid passages to surface mount component joints rather than the illustrated tube stubs. K1S and W seals are examples of surface mount component joints known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the valves can be constructed from materials selected for the desired chemical inertness with respect to the fluids being handled and can include, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations, separate or together, of metals and polymers. For example, a type 316L stainless steel valve body 1790 can be used with Hastelloy™ nickel alloy control plates 1800-1, 1800-2 and Elgiloy™ cobalt alloy seal diaphragms 1970. Alternatively, the valve body, seal diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0055] The example of the flow control plate 1800-1 shown in FIGS. 18A-1 to 18D-1 includes a control plate body 1840 formed as a generally circular disk having a first side surface 1871 and an opposite second side surface 1872 axially separated by a circumferential portion 1850 of the control plate body 1840. One or more holes or features are formed in the circumferential portion 1850 of the disk and the opposing side surfaces. These holes include a central mounting hole 1848 (blind or through) in the second side surface 1872, one or more axial through holes 1846-1, 1847-1 providing communication from the first side surface 1871 to the second side surface 1872, a counterbore 1842 in the first side surface, and one or more radial holes 1854-1, 1856-1, 1858-1 providing communication from the counterbore 1842 to the circumferential portion 1850. As shown in FIGS. 18A-1 to 18D-1, the control plate 1800-1 can be attached to a stub 1983 protruding from the diaphragm 1970, thereby being suspended within the upper valve chamber portion 1957. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages formed by the axial through holes 1846-1, 1847-1 are not blocked. It should be recognized that instead of using a blind hole to attach the control plate 1800-1 to the stub 1983 as shown in FIGS. 9A to 9D, through-hole attachment can be used instead as shown in FIGS. 2A to 2D, FIGS. 3A to 3D, and FIGS. 7A to 7F.

[0056] One or more axial through-holes 1846-1, 1847-1 penetrate the control plate body 1840 and are typically arranged at regular intervals around a first circle of constant diameter surrounding the central mounting hole 1848. The diameter of the first circle and the diameters of the axial through-holes 1846-1, 1847-1 are selected such that those axial through-holes cover only the second intermediate valve chamber portion 1754 and do not overlap with the adjacent first smaller orifice ridge 1721 nor the second smaller orifice ridge 1722. The axial through-holes 1846-1, 1847-1 constitute a fluid passage through which fluid can pass from the first side surface 1871 of the control plate body 1840 to the opposite second side surface 1872. More specifically, the axial through-holes 1846-1, 1847-1 fluidly connect the second intermediate valve chamber portion 1754 to the upper valve chamber portion 1957. The solid material of the control plate body 1840 provides a mechanical connection on the first side surface 1871 of the disk-shaped control plate body 1840 from the central mounting hole 1848 to a continuous, unbroken first surface area 1841, and the first surface area 1841 has a radial extent sufficient to span between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third intermediate valve chamber portion 1752. The solid portions 1861, 1862 between one or more adjacent axial through-holes 1846-1, 1847-1 of the control plate body 1840 provide a mechanical connection on the first side surface 1871 of the disk-shaped control plate body 1840 from the central mounting hole 1848 to a continuous, unbroken second surface area 1843, and the second surface area 1843 has a radial extent sufficient to span between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0057] The central counterbore 1842 is formed on the first side surface 1871 of the control plate body 1840 so as to project into the body toward the opposite second side surface 1872. One or more radial holes 1854-1, 1856-1, 1858-1 extend from the counterbore 1842 through the control plate body 1840 to create fluid passages that connect to the circumferential portion 1850. The radial holes 1854-1, 1856-1, 1858-1 are typically formed at equal angles, thereby providing a constant spacing around the circumferential portion 1850, alternating with the solid regions 1855, 1857, 1859 between the holes. The depth of the central counterbore 1842 can be changed, but it should be recognized that it must be greater than the depth through which the radial holes 1854-1, 1856-1, 1858-1 penetrate. The diameter of the counterbore is such that when the valve 1900-1 is in the closed state shown, the continuous and unbroken first surface area 1841 seals the third intermediate valve chamber portion 1752, and thus must be smaller than the inner diameter of the smallest orifice ridge 1723. The counterbore 1842 may or may not intersect the central mounting hole 1848 (blind mounting hole), and may have the same or different diameters.

[0058] An exemplary method by which valve 1900-1 controls fluid flow can be further understood by considering that an inner valve chamber portion 1759 surrounded by a minimum orifice ridge 1723 is supplied by a first fluid conduit opening 1712 that communicates with a first fluid conduit 1710, whereby at least a portion of a control plate 1800-1 can move toward or away from the minimum orifice ridge 1723 to create a first control gap (not shown) through which a first portion of the fluid can flow controllably. The controllable first portion of the fluid can move directly to a third intermediate valve chamber portion 1752, from which the first portion of the fluid can exit through a third inner fluid conduit opening 1718 that communicates with a second fluid conduit 1714. A second portion of the fluid can move upward from the inner valve chamber portion 1759 through a control plate counterbore 1842 and radial holes 1854-1, 1856-1, 1858-1, through a circumferential portion 1850, and into an upper portion 1957 of the valve chamber, from which it can move downward through axial through-holes 1846-1, 1847-1 and into a second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 1800-1 toward or away from a second, smaller orifice ridge 1722 creates a second control gap (not shown) through which the second portion of the fluid can also flow controllably and directly from the second intermediate valve chamber portion 1754 into the third intermediate valve chamber portion 1752 and then exit through a third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. In the valve 1900-1 of this example, an actuator (not shown) applies a force to a control shaft 1982 to deflect a diaphragm 1970, thereby moving a fixed control plate 1800-1 to vary a first control gap and a second control gap, thereby modulating the conductance through the valve 1900-1.

[0059] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 1800-1 towards or away from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion can migrate upward through the circumferential portion 1850 from the inner valve chamber portion 1759 through the control plate through-hole 1842 and the radial holes 1854-1, 1856-1, 1858-1, and can sweep into the outer valve chamber portion 1758 through the upper valve chamber portion 1957, from where the third fluid portion can exit into the first intermediate valve chamber portion 1756 through the third control gap. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through the second fluid conduit opening 1716 that communicates with the second fluid conduit 1714. The fourth fluid portion can migrate upward from the inner valve chamber portion 1759 through the control plate counterbore 1742 and the radial holes 1854-1, 1856-1, 1858-1 through the circumferential portion 1850 into the upper valve chamber portion 1957, from where it can migrate downward through one or more axial through-holes 1846-1, 1847-1 into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 1800-1 towards or away from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1756, from where the fourth fluid portion can exit through the second inner fluid conduit opening 1716 that communicates with the second fluid conduit 1714. Thus, in the valve 1900-1 of this example, an actuator (not shown) that deflects the diaphragm 1970 by applying a force to the control shaft 1982 further modulates the conductance through the valve 1900-1 by changing the third and fourth control gaps. It should be recognized that while the valve 1900-1 is closed, fluid can pass through the radial and axial holes in the control plate 1800-1 into the upper portion 1957 of the valve chamber, the outer valve chamber portion 1758, and the second intermediate valve chamber portion 1754, but cannot proceed further.Accordingly, when the valve 1900-1 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0060] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1800-1, of course, mainly has a continuous and unbroken second surface area 1843 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 on the first lower side surface 1871 of the disk-shaped body 1840 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 do not need to be exactly concentric, but need to be nested, and further, the nested pair of orifice ridges 1722, 1723 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1800-1, of course, mainly has a continuous and unbroken first surface area 1841 that spans between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 on the first lower flat side surface 1871 of the disk-shaped body 1840 and is sufficient to cover the entire third intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow from the first fluid conduit 1710 to the second fluid conduit 1714 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve assembly design shown in FIGS. 19A-1 to 19D-1 can substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate allows the use of nested orifice ridges 1720, 1721, 1722, 1723 that, while significantly reducing the area that must be closed to achieve shutoff, together create an overall control gap length that is approximately three times that around a single large orifice.This combination provides high conductance with low closing force.

[0061] Another exemplary valve assembly 2100-1 can have a top work including a valve housing 2160 removably joined to a valve body 1790 by deforming a metal gasket 2165 into a leak-free assembly further shown in FIGS. 21A-1 through 21D-1. The top work can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator may be used for a simple on-off high conductance valve, while a piezoelectric actuator may be used for a proportional control high conductance valve adapted to a mass flow controller electronic system. Open cavities 1752, 1754, 1756, 1758, 1759 formed within the upper surface of the valve body 1790 can be considered the lower portion of the valve chamber, while the upper portion 2157 of the valve chamber is formed in the lower surface of the valve housing 2160 thereabove.

[0062] The exemplary valve 2100-1 can further include a first fluid conduit 1710 (usually an inlet) and a second fluid conduit 1714 (usually an outlet), both of which communicate fluid to the upper and lower portions of the valve chamber, the valve chamber seal diaphragm 2170, and a control element movable by the deflection of the valve chamber seal diaphragm 2170. The movable control element can be further configured from a control plate 2000-1 (further described below) that is fixed to the valve chamber seal diaphragm 2170. In the illustrations of FIGS. 21B-1 and 21D-1, the control plate 2000-1 is attached to a stub 2183 protruding from the diaphragm 2170, whereby it can be suspended within the upper valve chamber portion 2157. The distance between the control plate 2000-1 and the valve chamber seal diaphragm 2170 is minimized to reduce or eliminate the swept volume portion. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages through the various control plate holes are not blocked. It should be recognized that instead of using through holes 2052 to attach the control plate to the stub 2183 as shown in FIGS. 21B-1 and 21D-1, a blind hole attachment similar to that shown in FIGS. 9A-9D can be used instead. In the design of the exemplary valve 2100-1, the first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, the second fluid conduit opening 1716 formed as a curved slot provides communication between the first intermediate valve chamber portion 1756 and the second fluid conduit 1714. Similarly, a third inner fluid conduit opening 1718 formed as a curved slot is provided that provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714. In this illustration of FIGS. 21A-1 to 21D-1, since the valve 2100 is completely closed in the blocked no-flow state, the control plate 2000-1 is shown to be in contact with all four orifice ridges, namely, the largest orifice ridge 1720, the first smaller orifice ridge 1721, the second smaller orifice ridge 1722, and the smallest orifice ridge 1723.The designer will recognize that the first fluid conduit 1710 and the second fluid conduit 1714 can provide fluid passages to surface mount component joints rather than the illustrated tube stubs. The K1S and W seals are examples of surface mount component joints known in semiconductor capital equipment design and are therefore not shown in the drawings of the present disclosure. The components including the valve can be constructed from materials selected for the desired chemical inertness with respect to the fluids being handled and can include, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, and combinations, separate or together, of metals and polymers. For example, a type 316L stainless steel valve body 1790 can be used with a Hastelloy™ nickel alloy control plate 1800-1 and an Elgiloy™ cobalt alloy seal diaphragm 1970. Alternatively, the valve body, seal diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0063] Another example of the flow-through control plate 2000-1 shown in FIGS. 20A-1 through 20D-1 is formed as a generally circular disk having a first side 2071-1 and an opposite second side 2072 axially separated by a circumferential portion 2050 of a control plate body 2040, and a polymer insert. One or more holes or features are formed in the circumferential portion 2050 and opposing sides of the control plate body 2040. These holes can include a central mounting hole 2052 (blind or through) in the second side 2072, one or more axial pillar holes 2060-1, 2061 extending from the first side 2071-1 to the second side 2072, one or more radial lock holes 2057-1, 2059-1 extending from the circumferential portion 2050 into the corresponding pillar holes, a central counterbore 2042 in the first side, and one or more radial holes 2054-1, 2056-1, 2058-1 providing communication from the counterbore 2042 to the circumferential portion 2050.

[0064] The representative polymer inserts shown in FIGS. 20A-1 to 20D-1 can have specific features formed as a result of being compression molded to fit into the openings in the control plate body 2040. For example, the insert can include a plurality of pillars 2030-1, 2031-1 that are respectively received in corresponding pillar holes 2060-1, 2061 within the control plate body 2040 by the molding process. A typical compression molding process begins with polychlorotrifluoroethylene (PCTFE) powder filling the openings 2057-1, 2059-1, 2060-1, 2061 of the control plate body, and then the powder is polymerized under the action of heat and pressure directly applied into the control plate body 2040 by known methods. The representative polymer insert is formed within the corresponding pillar holes 2060-1, 2061 and has a plurality of polymer pillars 2030-1, 2031-1 that fit into plugs 2032-1, 2034-1 within the corresponding lock holes 2057-1, 2059-1 while being interconnected by an adjoining relatively thin polymer insert disk 2070 that covers the first side surface 2071-1 of the control plate body 2040. The polymer plugs 2032-1, 2034-1 firmly lock the polymer insert within the control plate body 2040. The polymer insert disk 2070 is flat and has a first side surface 2073-1 that faces towards the orifice ridge in the valve body, as will be further described with respect to the representative valve 2100 shown in FIGS. 21A-1 to 21D-1 below. One or more axial through holes 2046-1, 2047-1 pass through the corresponding polymer pillars 2030-1, 2031-1 and constitute fluid passages through which fluid can pass without the need to pass through the circumferential portion 2050 from the first side surface 2073-1 of the polymer insert disk 2070 to the opposing second side surface 2072 of the control plate body 2040. The thin polymer insert disk 2070 has a central hole 2044 of approximately the same diameter that is aligned with the central counterbore 2042.

[0065] As shown in FIGS. 21B-1 and 21D-1, the diameter of the central hole 2044 is selected to create a continuous, unbroken first surface area 2041-1 on the flat first side surface 2073-1 below the polymer insert disk 2070, such that the first surface area 2041-1 has a radial extent sufficient to span between contact with the second, smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third intermediate valve chamber portion 1752. One or more axial through-holes 2046-1, 2047-1 are typically arranged at regular intervals around a circle of constant diameter that further surrounds the first surface area 2041-1. In some embodiments, the axial through-holes 2046-1, 2047-1 extend substantially straight through one or more polymer pillars 2030-1, 2031-1 and the thin polymer insert disk 2070. The diameter of the circle of constant diameter and the diameter of the axial through-holes 2046-1, 2047-1 are selected such that those axial through-holes cover only the second intermediate valve chamber portion 1754 and do not overlap with either the adjacent first, smaller orifice ridge 1721 or the second, smaller orifice ridge 1722. More specifically, the axial through-holes 2046-1, 2047-1 fluidly connect the intermediate valve chamber portion 1754 to the upper valve chamber portion 2157. The solid material of the control plate body 2040 enables further mechanical support for the polymer insert disk 2070 spanning from the first surface area 2041-1 to a continuous, unbroken second surface area 2043-1 on the flat first side surface 2073-1 below the polymer insert disk 2070, the second surface area 2043-1 having a radial extent sufficient to span between contact with the largest orifice ridge 1720 and contact with the first, smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0066] An exemplary method by which valve 2100-1 controls fluid flow can be further understood by considering that the inner valve chamber portion 1759 surrounded by the minimum orifice ridge 1723 is supplied by a first fluid conduit opening 1712 that communicates with the first fluid conduit 1710, whereby at least a portion of the control plate 2000-1 moves towards or away from the minimum orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can move directly to the third intermediate valve chamber portion 1752, from where the first fluid portion can exit through a third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. The second fluid portion enters upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-1, 2056-1, 2058-1, passes through the circumferential portion 2050, and moves into the upper portion 2157 of the valve chamber, from where it can move downward through the axial through holes 2046-1, 2047-1 and into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 2000-1 towards or away from the second smaller orifice ridge 1722 creates a second control gap (not shown) through which the second fluid portion can also flow controllably and directly from the second intermediate valve chamber portion 1754 into the third intermediate valve chamber portion 1752, and then exit through one or more third inner fluid conduit openings 1718 that communicate with the second fluid conduit 1714. In the valve 2100-1 of this example, an actuator (not shown) applies a force to the control shaft 2182 to deflect the diaphragm 2170, thereby moving the fixed control plate 2000-1 to vary the first and second control gaps and modulate the conductance through the valve 2100.

[0067] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 2000-1 toward or away from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion travels upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-1, 2056-1, 2058-1, passes through the circumferential portion 2050, and can sweep into the outer valve chamber portion 1758 through the upper valve chamber portion 2157, from where the third fluid portion can exit into the first intermediate valve chamber portion 1756 through the third control gap. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through the second fluid conduit opening 1716 that communicates with the second fluid conduit 1714. The fourth fluid portion travels upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-1, 2056-1, 2058-1, passes through the circumferential portion 2050, and migrates into the upper valve chamber portion 2157, from where it can migrate downward through one or more axial through-holes 2046-1, 2047-1 into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 2000-1 toward or away from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1756, from where the fourth fluid portion can exit through one or more second inner fluid conduit openings 1716 that communicate with the second fluid conduit 1714. Thus, in the valve 2100-1 of this example, an actuator (not shown) that deflects the diaphragm 2170 by applying a force to the control shaft 2182 further modulates the conductance through the valve 2100 by varying the third and fourth control gaps.While the valve 2100 is closed, it should be recognized that fluid can pass through the axial and radial holes in the control plate 2000-1 into the upper part 2157 of the valve chamber, the outer valve chamber part 1758, and the second intermediate valve chamber part 1754, but cannot proceed further. Therefore, when the valve 2100 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0068] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 do not need to be exactly concentric, but only need to be nested, and furthermore, the pair of nested orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 2000-1, of course, mainly has a continuous and unbroken second surface area 2043-1 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 on the first side surface 2073-1 below the polymer insert disk 2070 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 do not need to be exactly concentric, but only need to be nested, and furthermore, the pair of nested orifice ridges 1722, 1723 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 2000-1, of course, mainly has a continuous and unbroken first surface area 2041-1 that spans between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 on the first side surface 2073-1 below the polymer insert disk 2070 and is sufficient to cover the entire third intermediate valve chamber portion 1752. The designer will also recognize that the described direction of fluid flow, which proceeds from the first fluid conduit 1710 to the second fluid conduit 1714, is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve designs shown in FIGS. 21A-1 through 21D-1 can also substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design.The flow control plate enables the use of nested orifice ridges 1720, 1721, 1722, 1723 that together generate an overall control gap length of approximately three times around a single large orifice while significantly reducing the area that must be closed to achieve shut-off. This combination provides high conductance with low closing force, and the inclusion of a relatively soft polymer insert will further improve the sealing of valve 2100-1.

[0069] Yet another example of the flow control plate 1800-2 shown in FIGS. 18A-2 through 18D-2 includes a control plate body 1840 formed as a generally circular disk having a first side 1871 and an opposite second side 1872 axially separated by a circumferential portion 1850 of the control plate body 1840. One or more holes or features are formed in the circumferential portion 1850 and opposing sides of the disk. These holes can include a central mounting hole 1848 (blind or through) in the second side 1872, a counterbore 1842 in the first side, one or more radial holes 1854-2, 1856-2, 1858-2 that provide communication from the counterbore 1842 to the circumferential portion 1850, and one or more axial holes 1846-2, 1847-2 that provide communication from the first side 1871 to the respective radial holes. As shown in FIGS. 19A-2 through 19D-2, the control plate 1800-2 can be attached to a stub 1983 protruding from a diaphragm 1970, thereby suspending it within the upper valve chamber portion 1957. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, so long as the fluid passages formed by the axial holes 1846-2, 1847-2 are not blocked. It should be recognized that instead of using a blind hole to attach the control plate 1800-2 to the stub 1983 as shown in FIGS. 9A through 9D, through-hole attachment can be used instead as shown in FIGS. 2A through 2D, FIGS. 3A through 3D, and FIGS. 7A through 7F.

[0070] One or more axial holes 1846-2, 1847-2 are formed in the control plate body 1840 and are typically arranged at regular intervals around a first circle of a constant diameter surrounding the central mounting hole 1848. The diameter of the first circle and the diameters of the axial holes 1846-2, 1847-2 are selected such that those axial holes cover only the second intermediate valve chamber portion 1754 and do not overlap with either the first smaller orifice ridge 1721 or the second smaller orifice ridge 1722. The axial holes 1846-2, 1847-2 constitute fluid passages through which fluid can pass from the first side surface 1871 of the control plate body 1840 to the radial holes 1854-2, 1856-2, 1858-2. More specifically, the axial holes 1846-2, 1847-2 fluidly connect the second intermediate valve chamber portion 1754 to the upper valve chamber portion 1957 via their respective radial holes. The solid material of the control plate body 1840 provides a mechanical connection on the first side surface 1871 of the disk-shaped control plate body 1840 from the central mounting hole 1848 to a continuous, unbroken first surface area 1841, which has a radial extent sufficient to span between contact with the second smaller orifice ridge 1722 and contact with the minimum orifice ridge 1723 while covering the entire third intermediate valve chamber portion 1752. The solid portions 1861, 1862 of the control plate body 1840 between one or more adjacent axial holes 1846-2, 1847-2 provide a mechanical connection on the first side surface 1871 of the disk-shaped control plate body 1840 from the central mounting hole 1848 to a continuous, unbroken second surface area 1843, which has a radial extent sufficient to span between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0071] The central counterbore 1842 is formed on the first side surface 1871 of the control plate body 1840 so as to project into the body toward the opposite second side surface 1872. One or more radial holes 1854-2, 1856-2, 1858-2 extend from the counterbore 1842 through the control plate body 1840 to create fluid passages that connect to the circumferential portion 1850. The radial holes 1854-2, 1856-2, 1858-2 are typically formed at equal angles, thereby providing a uniform spacing around the circumferential portion 1850, alternating with the solid regions 1855, 1857, 1859 between the holes. The depth of the central counterbore 1842 can be varied, but it should be recognized that it must be greater than the depth through which the radial holes 1854-2, 1856-2, 1858-2 penetrate. The diameter of the counterbore should be less than the inner diameter of the smallest orifice ridge 1723 so as to ensure that when the valve 1900-2 is in the closed state shown, the continuous and unbroken first surface area 1841 seals the third intermediate valve chamber portion 1752. The counterbore 1842 may or may not intersect the central mounting hole 1848 (blind mounting hole) and may have the same or different diameters.

[0072] An exemplary method by which valve 1900-2 controls fluid flow can be further understood by considering that an inner valve chamber portion 1759 surrounded by a minimum orifice ridge 1723 is supplied by a first fluid conduit opening 1712 that communicates with a first fluid conduit 1710, whereby at least a portion of control plate 1800-2 can move toward or away from minimum orifice ridge 1723 to create a first control gap (not shown) through which a first fluid portion can flow controllably. The controllable first fluid portion can move directly to a third intermediate valve chamber portion 1752, from which the first fluid portion can exit through a third inner fluid conduit opening 1718 that communicates with a second fluid conduit 1714. A second fluid portion can move upward from inner valve chamber portion 1759 through control plate counterbore 1842 and radial holes 1854-2, 1856-2, 1858-2, through circumferential portion 1850, and into the upper portion 1957 of the valve chamber, from which it can move downward through axial holes 1846-2, 1847-2 and into a second intermediate valve chamber portion 1754. Moving at least a portion of control plate 1800-2 toward or away from a second, smaller orifice ridge 1722 will create a second control gap (not shown) through which the second fluid portion can also flow controllably and directly from second intermediate valve chamber portion 1754 into third intermediate valve chamber portion 1752 and then exit through one or more third inner fluid conduit openings 1718 that communicate with second fluid conduit 1714. In valve 1900-2 of this example, an actuator (not shown) applies a force to control shaft 1982 to deflect diaphragm 1970, moving fixed control plate 1800-2 and thereby modulating the conductance through valve 1900 by varying the first and second control gaps.

[0073] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 1800-2 towards or away from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion travels upward from the inner valve chamber portion 1759 through the control plate counterbore 1842 and the radial holes 1854-2, 1856-2, 1858-2 through the circumferential portion 1850 and can sweep into the outer valve chamber portion 1758 through the upper valve chamber portion 1957, from where the third fluid portion can exit into the first intermediate valve chamber portion 1756 through the third control gap. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through the second fluid conduit opening 1716 that communicates with the second fluid conduit 1714. The fourth fluid portion can travel upward from the inner valve chamber portion 1759 through the control plate counterbore 1742 and the radial holes 1854-2, 1856-2, 1858-2 through the circumferential portion 1850 and into the upper valve chamber portion 1957 of the valve chamber and then downward through one or more axial through-holes 1846-2, 1847-2 into the second intermediate valve chamber portion 1754. Moving at least a portion of the control plate 1800-2 towards or away from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1756, from where the fourth fluid portion can exit through the second inner fluid conduit opening 1716 that communicates with the second fluid conduit 1714. Thus, in the valve 1900-2 of this example, an actuator (not shown) that deflects the diaphragm 1970 by applying a force to the control shaft 1982 further modulates the conductance through the valve 1900 by changing the third and fourth control gaps. It should be recognized that while the valve 1900 is closed, fluid can pass through the axial and radial holes in the control plate 1800-2 into the upper portion 1957 of the valve chamber, the outer valve chamber portion 1758, and the second intermediate valve chamber portion 1754, but cannot proceed further.Accordingly, when the valve 1900 is closed, fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0074] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1800-2, of course, mainly has a continuous and unbroken second surface area 1843 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 on the first side 1871 below the disk-shaped body 1840 and is sufficient to cover the entire first intermediate valve chamber portion 1756. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 do not need to be exactly concentric, but need to be nested, and further, the nested pair of orifice ridges 1722, 1723 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 1800-2, of course, mainly has a continuous and unbroken first surface area 1841 that spans between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 on the first side 1871 below the disk-shaped body 1840 and is sufficient to cover the entire third intermediate valve chamber portion 1752. The designer can also recognize that the described direction of fluid flow from the first fluid conduit 1710 to the second fluid conduit 1714 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve design shown in FIGS. 19A-2 to 19D-2 can substantially eliminate any concerns regarding internal dead space versus swept volume and can also improve the dynamic response of the exemplary valve design. The flow control plate allows the use of nested orifice ridges 1720, 1721, 1722, 1723 that generate an overall control gap length approximately three times around a single large orifice while significantly reducing the area that must be closed to achieve shutoff.This combination provides high conductance with low closing force.

[0075] Another exemplary valve assembly 2100-2 can have a top work including a valve housing 2160 removably joined to a valve body 1790 by deforming a metallic gasket 2165 into a leak-free assembly further shown in FIGS. 21A-2 through 21D-2. The top work can include an actuator (not shown) selected for a particular application. For example, a manual or solenoid actuator may be used for a simple on-off high-conductance valve, while a piezoelectric actuator may be used for a proportional control high-conductance valve adapted to a mass flow controller electronic system. Open cavities 1752, 1754, 1756, 1758, 1759 formed within the upper surface of the valve body 1790 can be considered the lower portion of the valve chamber, while the upper portion 2157 of the valve chamber is formed in the lower surface of the overlying valve housing 2160.

[0076] The exemplary valve 2100-2 can further include a first fluid conduit 1710 (usually an inlet) and a second fluid conduit 1714 (usually an outlet), both of which communicate fluid to the upper and lower portions of the valve chamber, the valve chamber seal diaphragm 2170, and a movable control element that is movable by deflection of the valve chamber seal diaphragm 2170. The movable control element can further be configured from a control plate 2000-2 (described further below) that is fixed to the valve chamber seal diaphragm 2170. In the illustrations of FIGS. 21B-2 and 21D-2, the control plate 2000-2 is attached to a stub 2183 that protrudes from the diaphragm 2170, whereby it can be suspended within the upper valve chamber portion 2157. The distance between the control plate 2000-2 and the valve chamber seal diaphragm 2170 is minimized to reduce or eliminate the swept volume portion. Any suitable attachment method can be used, such as press fitting, swaging of the head of the stub, screw fasteners, welding, or similar design choices as desired by the implementer, as long as the fluid passages through the various control plate holes are not blocked. It should be recognized that instead of using the through holes 2052 as shown in FIGS. 21B-2 and 21D-2 to attach the control plate to the stub 2183, a blind hole attachment similar to that shown in FIGS. 9A-9D can be used instead. In the design of the exemplary valve 2100-2, the first fluid conduit opening 1712 provides communication between the inner valve chamber portion 1759 and the first fluid conduit 1710. Similarly, the second fluid conduit opening 1716, formed as a curved slot, provides communication between the first intermediate valve chamber portion 1756 and the second fluid conduit 1714. Similarly, a third inner fluid conduit opening 1718, formed as a curved slot, is provided that provides communication between the third intermediate valve chamber portion 1752 and the second fluid conduit 1714. In this illustration of FIGS. 21A-2 to 21D-2, since the valve 2100 is fully closed in the blocked no-flow state, the control plate 2000-2 is shown to be in contact with all four orifice ridges, namely, the largest orifice ridge 1720, the first smaller orifice ridge 1721, the second smaller orifice ridge 1722, and the smallest orifice ridge 1723.The designer will recognize that the first fluid conduit 1710 and the second fluid conduit 1714 can provide fluid passages to surface mount component joints rather than the illustrated tube stubs. The K1S and W seals are examples of surface mount component joints known in semiconductor capital equipment design and are thus not shown in the drawings of the present disclosure. The components including the valve can be constructed from materials selected for the desired chemical inertness with respect to the fluids being handled, for example, stainless steel, Monel™ metal, titanium alloys, Hastelloy™ alloys, Elgiloy™, brass, or polymers such as Teflon™, Kel-F™, Vespel™, Kynar™, etc., and can include separate or combined combinations of metals and polymers. For example, a type 316L stainless steel valve body 1790 can be used with a Hastelloy™ nickel alloy control plate 1800-2 and an Elgiloy™ cobalt alloy seal diaphragm 1970. Alternatively, the valve body, seal diaphragm, and control plate body can all be made from the same stainless steel alloy.

[0077] Another example of the flow-through control plate 2000-2 shown in FIGS. 20A-2 through 20D-2 is formed as a substantially circular disk having a first side 2071-2 and an opposite second side 2072 axially separated by a circumferential portion 2050 of a control plate body 2040, and a polymer insert. One or more holes or features are formed in the circumferential portion 2050 and opposing sides of the control plate body 2040. These holes can include a central mounting hole 2052 (blind or through) in the second side 2072, one or more axial pillar holes 2060-2, 2061 extending from the first side 2071-2 to the second side 2072, one or more radial lock holes 2057-2, 2059-2 extending from the circumferential portion 2050 into the corresponding pillar holes, a central counterbore 2042 in the first side, and one or more radial holes 2054-2, 2056-2, 2058-2 providing communication from the counterbore 2042 to the circumferential portion 2050.

[0078] The representative polymer inserts shown in FIGS. 20A-2 to 20D-2 can have specific features formed as a result of being compression molded to fit into the openings in the control plate body 2040. For example, the insert can include a plurality of pillars 2030-2, 2031-2 that are respectively received in corresponding pillar holes 2060-2, 2061 in the control plate body 2040 by the molding process. A typical compression molding process begins with polychlorotrifluoroethylene (PCTFE) powder filling the openings 2057-2, 2059-2, 2060-2, 2061 of the control plate body, and then the powder is polymerized under the action of heat and pressure directly applied into the control plate body 2040 by known methods. The representative polymer insert is formed in the corresponding pillar holes 2060-2, 2061 and has a plurality of polymer pillars 2030-2, 2031-2 that fit into plugs 2032-2, 2034-2 in the corresponding lock holes 2057-2, 2059-2 while being interconnected by an adjoining relatively thin polymer insert disk 2070 that covers the first side 2071-2 of the control plate body 2040. The polymer plugs 2032-2, 2034-2 firmly lock the polymer insert within the control plate body 2040. The polymer insert disk 2070 is flat and has a first side 2073-2 that faces towards the orifice ridge in the valve body, as will be further described with respect to the representative valve 2100 shown in FIGS. 21A-2 to 21D-2 below. One or more axial holes 2046-2 pass through the first side 2073-2 of the polymer insert disk 2070 and into one or more radial holes 2054-2, 2056-2, 2058-2 to form a fluid passage through which fluid can pass without having to pass through the circumferential portion 2050 from the first side 2073-2 of the polymer insert disk 2070 to the opposing second side 2072 of the control plate body 2040. The thin polymer insert disk 2070 has a central hole 2044 of approximately the same diameter that is aligned with the central counterbore 2042.

[0079] As shown in FIGS. 21B-2 and 21D-2, the diameter of the central hole 2044 is selected to create a continuous, unbroken first surface area 2041-2 on the flat first side 2073-2 below the polymer insert disk 2070, such that the first surface area 2041-2 has a radial extent sufficient to span between contact with the second, smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 while covering the entire third intermediate valve chamber portion 1752. One or more axial holes 2046-2 are typically disposed at regular intervals around a circle of constant diameter that further surrounds the first surface area 2041-2. In some embodiments, the axial holes 2046-2 extend substantially straight through the first side 2073-2 of the polymer insert disk 2070 and into one or more radial holes 2054-2, 2056-2, 2058-2. The diameter of the circle of constant diameter and the diameter of the axial holes 2046-2 are selected such that the axial holes cover only the second intermediate valve chamber portion 1754 and do not overlap with either the adjacent first, smaller orifice ridge 1721 or the second, smaller orifice ridge 1722. More specifically, one or more axial holes 2046-2, 2047 fluidly connect the intermediate valve chamber portion 1754 to the upper valve chamber portion 2157. The solid material of the control plate body 2040 enables further mechanical support for the polymer insert disk 2070 spanning from the first surface area 2041-2 to a continuous, unbroken second surface area 2043-2 on the flat first side 2073-2 below the polymer insert disk 2070, the second surface area 2043-2 having a radial extent sufficient to span between contact with the largest orifice ridge 1720 and contact with the first, smaller orifice ridge 1721 while covering the entire first intermediate valve chamber portion 1756.

[0080] An exemplary method by which valve 2100-2 controls fluid flow is further understood by considering that the inner valve chamber portion 1759 surrounded by the minimum orifice ridge 1723 is supplied by a first fluid conduit opening 1712 that communicates with the first fluid conduit 1710, whereby at least a portion of the control plate 2000-2 can move toward or away from the minimum orifice ridge 1723 to create a first control gap (not shown) through which the first fluid portion can flow controllably. The controllable first fluid portion can move directly to the third intermediate valve chamber portion 1752, from where the first fluid portion can exit through a third inner fluid conduit opening 1718 that communicates with the second fluid conduit 1714. The second fluid portion enters upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-2, 2056-2, 2058-2, passes through the circumferential portion 2050, and migrates into the upper portion 2157 of the valve chamber, from where it can migrate downward through at least one axial hole 2046-2 and into the second intermediate valve chamber portion 1754 from the radial holes 2054-2, 2056-2, 2058-2. Moving at least a portion of the control plate 2000-2 toward or away from the second smaller orifice ridge 1722 creates a second control gap (not shown) through which the second fluid portion can also flow controllably directly from the second intermediate valve chamber portion 1754 into the third intermediate valve chamber portion 1752 and then exit through one or more third inner fluid conduit openings 1718 that communicate with the second fluid conduit 1714. In the valve 2100-2 of this example, an actuator (not shown) applies a force to the control shaft 2182 to deflect the diaphragm 2170, thereby moving the fixed control plate 2000-2 to vary the first and second control gaps and modulate the conductance through the valve 2100.

[0081] Simultaneously with the flow of the first and second fluid portions described above, moving at least a portion of the control plate 2000-2 towards or away from the largest orifice ridge 1720 similarly creates a third control gap (not shown) through which a third fluid portion can flow controllably. The controllable third fluid portion enters upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-2, 2056-2, 2058-2, migrates through the circumferential portion 2050, and can sweep into the outer valve chamber portion 1758 through the upper valve chamber portion 2157, from where the third fluid portion can exit into the first intermediate valve chamber portion 1756 through the third control gap. Upon reaching the first intermediate valve chamber portion 1756, the controllable third fluid portion can exit through the second fluid conduit opening 1716 that communicates with the second fluid conduit 1714. The fourth fluid portion enters upward from the inner valve chamber portion 1759 through the central hole 2044, into the control plate counterbore 2042, and into the radial holes 2054-2, 2056-2, 2058-2, passes through the circumferential portion 2050, migrates into the upper valve chamber portion 2157, and from there can migrate downward through one or more axial holes 2046-2 and into the second intermediate valve chamber portion 1754 from the radial holes 2054-2, 2056-2, 2058-2. Moving at least a portion of the control plate 2000-2 towards or away from the first smaller orifice ridge 1721 creates a fourth control gap (not shown) through which the fourth fluid portion can also flow controllably directly into the first intermediate valve chamber portion 1756, from where the fourth fluid portion can exit through one or more second inner fluid conduit openings 1716 that communicate with the second fluid conduit 1714. Thus, in the valve 2100-2 of this example, an actuator (not shown) that deflects the diaphragm 2170 by applying a force to the control shaft 2182 further modulates the conductance through the valve 2100 by varying the third and fourth control gaps.While the valve 2100 is closed, it should be recognized that the fluid can pass through the axial and radial holes in the control plate 2000-2 into the upper part 2157 of the valve chamber, the outer valve chamber part 1758, and the second intermediate valve chamber part 1754, but cannot proceed further. Therefore, when the valve 2100 is closed, the fluid cannot pass from the first fluid conduit 1710 to the second fluid conduit 1714.

[0082] The designer can recognize that the largest orifice ridge 1720 and the first smaller orifice ridge 1721 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 1220, 1221 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 2000-2, of course, mainly has a continuous and unbroken second surface area 2043-2 that spans between contact with the largest orifice ridge 1720 and contact with the first smaller orifice ridge 1721 and is sufficient to cover the entire first intermediate valve chamber portion 1756 on the first side surface 2073-2 below the polymer insert disk 2070. Similarly, the second smaller orifice ridge 1722 and the smallest orifice ridge 1723 do not need to be exactly concentric, but only need to be nested, and further, the nested pair of orifice ridges 1722, 1723 can be arranged asymmetrically with respect to the shape and dimensions of the lower valve chamber. The flow control plate 2000-2, of course, mainly has a continuous and unbroken first surface area 2041-2 that spans between contact with the second smaller orifice ridge 1722 and contact with the smallest orifice ridge 1723 and is sufficient to cover the entire third intermediate valve chamber portion 1752 on the first side surface 2073-2 below the polymer insert disk 2070. The designer will also recognize that the described direction of fluid flow from the first fluid conduit 1710 to the second fluid conduit 1714 is used for convenience and clarity, but is not limiting. The fluid can flow in the opposite direction from the second fluid conduit 1714 to the first fluid conduit 1710, and the complete valve chamber will still be advantageously swept by the controllable fluid flow. The valve designs shown in FIGS. 21A-2 to 21D-2 can substantially eliminate any concerns regarding internal dead space versus swept volume, and can also improve the dynamic response of the exemplary valve design.The through-flow control plates enable the use of nested orifice ridges 1720, 1721, 1722, 1723 that significantly reduce the area that must be closed to achieve shut-off while together generating an overall control gap length that is approximately three times around a single large orifice. This combination provides high conductance with low closing force. This combination provides high conductance with low closing force, and the inclusion of a relatively soft polymer insert will further improve the sealing of the valve 2100.

[0083] Thus, while some aspects of at least one embodiment of the present invention have been described, it should be understood that various modifications, changes, and improvements will readily occur to those skilled in the art. Such modifications, changes, and improvements are intended to be part of this disclosure and are intended to be within the scope of the present invention. Accordingly, the foregoing description and drawings are merely illustrative. Some aspects of the present invention are described below. [Aspect 1] In a control plate of a high-conductance valve, a control plate body formed as a substantially circular disk having a flat side surface and an opposite side surface facing the flat side surface, the control plate being configured to move within the valve by an actuator, the flat side surface having a continuous, unbroken flat portion for blocking the flow of fluid within the valve; a counterbore within the control plate body that communicates with a fluid conduit; a plurality of radial fluid flow paths within the control plate body that terminate at the counterbore; and a plurality of axial fluid flow paths within the control plate body. The radial fluid flow path provides communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow path provides communication with the intermediate valve chamber portion, and the intermediate valve chamber portion is a control plate communicating with the fluid conduit. [Aspect 2] The axial fluid flow path extends through the control plate body and forms a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve, as described in Aspect 1. [Aspect 3] The axial fluid flow path extends from the radial fluid flow path through the control plate body and forms a communication path from the radial fluid flow path to the intermediate valve chamber, as described in Aspect 1. [Aspect 4] The intermediate valve chamber is the second intermediate valve chamber of the high-conductance valve, as described in Aspect 1. [Aspect 5] Further comprising a polymer insert disk, The polymer insert disk Comprises a plurality of pillars each extending through the control plate body, And a plurality of plugs each extending radially from the pillars, as described in Aspect 1. [Aspect 6] The axial flow path extends through at least one pillar and forms a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve and at least one plug, as described in Aspect 5. [Aspect 7] At least one axial fluid flow path extends from the radial fluid flow path through the polymer insert disk and forms a communication path from the radial fluid flow path to the intermediate valve chamber, as described in Aspect 5. [Aspect 8] The control plate is attached to a stub suspended under the diaphragm, and the distance between the control plate and the diaphragm is minimized to reduce the swept volume, as described in Aspect 1. [Aspect 9] In a valve assembly, A valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least a pair of adjacent orifice ridge portions, the at least a pair of adjacent orifice ridge portions extending from the valve body into the valve chamber, and an intermediate valve chamber portion being formed between the at least a pair of adjacent orifice ridge portions, and a valve body, A control plate body formed as a substantially circular disk having a flat side and an opposite side facing the flat side, the control plate being configured to move within a valve by an actuator, the flat side having a continuous, unbroken flat portion for blocking the flow of fluid within the valve, a control plate body a counterbore within the control plate body that communicates with a fluid conduit, a plurality of radial fluid flow paths within the control plate body that terminate at the counterbore, and a plurality of axial fluid flow paths within the control plate body, wherein the radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow paths provide communication with an intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduit, a valve assembly. [Aspect 10] The valve assembly according to aspect 9, wherein the axial fluid flow paths extend through the control plate body to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the high-conductance valve. [Aspect 11] The valve assembly according to aspect 9, wherein the axial fluid flow paths extend from the radial fluid flow paths through the control plate body to create a communication path between the radial fluid flow paths and the intermediate valve chamber. [Aspect 12] The valve assembly according to aspect 9, wherein the intermediate valve chamber portion is the second intermediate valve chamber of the high-conductance valve. [Aspect 13] Further comprising a polymer insert disk, the polymer insert disk comprising a plurality of pillars each extending through the control plate body, and a plurality of plugs each extending radially from the pillars, the valve assembly according to aspect 9. [Aspect 14] The valve assembly according to aspect 13, wherein the axial flow path extends through at least one pillar to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the high-conductance valve and at least one plug. [Aspect 15] The valve assembly according to aspect 13, wherein at least one axial fluid flow path extends from the radial fluid flow path through the polymer insert disk to create a communication path between the radial fluid flow path and the intermediate valve chamber. [Aspect 16] The valve assembly according to aspect 9, wherein the control plate is attached to a stub suspended under a diaphragm, and the distance between the control plate and the diaphragm is minimized to reduce the swept volume portion. [Aspect 17] A method of flowing a fluid through a high-conductance valve using a control plate, pumping the fluid through a valve body, the valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least a pair of adjacent orifice ridge portions, the at least a pair of adjacent orifice ridge portions extending from the valve body into the valve chamber and defining an intermediate valve chamber portion therebetween; using a valve actuator to move a control plate body within the valve body, the control plate body being formed as a circular disk having a flat side and an opposite side facing the flat side, the flat side having a continuous, unbroken flat portion for blocking the flow of fluid within the valve; flowing the fluid through a plurality of radial fluid flow paths, the radial flow paths being formed within the control plate body and terminating at a counterbore of the control plate body; flowing the fluid through a plurality of axial fluid flow paths, the axial fluid flow paths being formed within the control plate body; wherein the radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow paths provide communication with the intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduits. [Aspect 18] The method according to aspect 17, wherein the axial fluid flow paths extend through the control plate body to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the high-conductance valve. [Aspect 19] The method according to aspect 17, wherein the axial fluid flow paths extend from the radial fluid flow paths through the control plate body to create a communication path from the radial fluid flow paths to the intermediate valve chamber. [Aspect 20] The method according to aspect 17, wherein the intermediate valve chamber portion is the second intermediate valve chamber of the high-conductance valve.

Explanation of Symbols

[0084] 100 Valve assembly 110 First fluid conduit 112 First fluid conduit opening 114 Second fluid conduit 116 Second fluid conduit opening 120 Orifice ridge 121 Orifice ridge 150 Valve chamber 154 Intermediate valve chamber portion 157 Upper valve chamber portion 158 Outer valve chamber portion 159 Inner valve chamber portion 160 Valve housing 164 Gasket seal area 165 Metal gasket 170 Diaphragm 182 Control shaft 190 Valve body 200 Control plate 240 Control plate body 242 Through hole 244 Counterbore 246 Upper hole 248 Web 300 Control plate 341 Control plate body 343 Through hole 345 Spherical pocket 347 Tapered upper hole 349 Web 400 Valve assembly 414 Second fluid conduit 416 Second fluid conduit opening 417 First fluid conduit 419 First fluid conduit opening 420 Orifice ridge 421 Orifice ridge 450 Valve chamber 454 Intermediate valve chamber part 457 Upper valve chamber part 458 Outer valve chamber part 459 Inner valve chamber part 460 Valve housing 464 Gasket seal area 465 Metal gasket 470 Diaphragm 482 Control shaft 490 Valve body 600 Control plate 639 Clearance passage 640 Control plate body 641 Amplifier disk 642 Central through-hole 643 Hole 644 Ring-shaped groove 646 Upper relief 647 Passive part 648 Torsion bar 649 Active part 810 First fluid conduit 814 Second fluid conduit 816 Second fluid conduit opening 818 Third fluid conduit opening 820 Orifice ridge 821 Orifice ridge 822 Orifice ridge 823 Orifice ridge 852 Third intermediate valve chamber part 854 Second intermediate valve chamber part 856 First intermediate valve chamber part 857 Upper valve chamber part 858 Outer valve chamber part 859 Inner valve chamber part 860 Valve housing 864 Gasket seal area 865 Metal gasket 870 Diaphragm 882 Control shaft 890 Valve body 900 Control plate 940 Control plate body 941 First surface area 943 Second surface area 944 First intermediate through-hole 945 Web 946 Second intermediate through-hole 946 Intermediate through-hole 947 Web 1000 Valve assembly 1212 First fluid conduit opening 1216 Second fluid conduit opening 1218 Third fluid conduit opening 1220 Orifice ridge 1221 Orifice ridge 1222 Orifice ridge 1223 Orifice ridge 1252 Third intermediate valve chamber portion 1254 Second intermediate valve chamber portion 1254 Intermediate valve chamber portion 1256 First intermediate valve chamber portion 1258 Outer valve chamber portion 1259 Inner valve chamber portion 1264 Gasket seal area 1278 Open cavity 1290 Valve body 1300 Control plate 1340 Control plate body 1341 First surface area 1342 Control plate through-hole 1343 Second surface area 1344 Counterbore 1346 Intermediate through-hole 1347 Web 1348 Hole 1350 Central insert 1352 Through-hole 1353 Concave insert bottom relief 1354 Insert through-hole 1355 Web 1358 Outer rim 1400 Valve assembly 1457 Upper valve chamber portion 1460 Valve housing 1465 Metal gasket 1470 Diaphragm 1482 Control shaft 1483 Stub 1500 Control plate 1530 Polymer insert 1531 Polymer pillar 1532 Polymer disk 1540 Control plate body 1541 First surface area 1542 Control plate through-hole 1543 Second surface area 1544 Counterbore 1546 Intermediate through-hole 1547 Web 1548 Hole 1549 Opening 1550 Central insert 1552 Through-hole 1553 Concave insert bottom relief 1554 Insert hole 1555 Web 1558 Outer rim 1600 Valve 1710 First fluid conduit 1712 First fluid conduit opening 1716 Second fluid conduit opening 1718 Third inner fluid conduit opening 1720 Orifice ridge 1721 Orifice ridge 1722 Orifice ridge 1723 Orifice ridge 1742 Control plate counterbore 1752 Third intermediate valve chamber part 1754 Second intermediate valve chamber part 1754 Intermediate valve chamber part 1756 First intermediate valve chamber part 1758 Outer valve chamber part 1759 Inner valve chamber part 1764 gasket seal area 1765 metal gasket

Claims

Claim 1 In a control plate of a high-conductance valve, a control plate body formed as a substantially circular disk having a flat side surface and an opposite side surface facing the flat side surface, the control plate being configured to move within the valve by an actuator, the flat side surface having a continuous, unbroken flat portion for blocking the flow of fluid within the valve; a counterbore within the control plate body that communicates with a fluid conduit; a plurality of radial fluid flow paths within the control plate body that terminate at the counterbore; a plurality of axial fluid flow paths within the control plate body; a polymer insert disk; comprising; the polymer insert disk comprising a plurality of pillars each extending through the control plate body and a plurality of plugs each extending radially from a pillar; the radial fluid flow paths providing communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow paths providing communication to an intermediate valve chamber portion that communicates with the fluid conduit, the control plate. Claim 2 The control plate according to claim 1, wherein the axial fluid flow paths extend through the control plate body to create a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve. Claim 3 The control plate according to claim 1, wherein the axial fluid flow paths extend through the control plate body from the radial fluid flow paths to create a communication path from the radial fluid flow paths to the intermediate valve chamber. Claim 4 The control plate according to claim 1, wherein the intermediate valve chamber is a second intermediate valve chamber of the high-conductance valve. Claim 5 The control plate according to claim 1, wherein the axial flow path extends through at least one pillar to create a communication path between the intermediate valve chamber and the upper valve chamber portion of the high-conductance valve and at least one plug. Claim 6 The control plate according to claim 1, wherein at least one axial fluid flow path extends through the polymer insert disk from the radial fluid flow paths to create a communication path from the radial fluid flow paths to the intermediate valve chamber. Claim 7 In a valve assembly, A valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least a pair of adjacent orifice ridge portions, wherein the at least a pair of adjacent orifice ridge portions extend from the valve body into the valve chamber, and an intermediate valve chamber portion is formed between the at least a pair of adjacent orifice ridge portions. A control plate body formed as a substantially circular disk having a flat side and an opposite side facing the flat side, the control plate being configured to move within the valve by an actuator, the flat side having a continuous and unbroken flat portion for blocking the flow of fluid within the valve. A counterbore within the control plate body communicating with a fluid conduit. A plurality of radial fluid flow paths within the control plate body terminating at the counterbore. A plurality of axial fluid flow paths within the control plate body. A polymer insert disk. Comprising. The polymer insert disk includes a plurality of pillars respectively extending through the control plate body and a plurality of plugs respectively extending radially from the pillars. The radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, and the axial fluid flow paths provide communication with the intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduit. A valve assembly.

8. The valve assembly according to claim 7, wherein the axial fluid flow path extends through the control plate body to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the valve assembly.

9. The valve assembly according to claim 7, wherein the axial fluid flow path extends through the control plate body from the radial fluid flow path to create a communication path between the radial fluid flow path and the intermediate valve chamber.

10. The valve assembly according to claim 7, wherein the intermediate valve chamber portion is the second intermediate valve chamber of the valve assembly.

11. The valve assembly according to claim 7, wherein the axial flow path extends through at least one pillar to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the valve assembly and at least one plug.

12. The valve assembly according to claim 7, wherein at least one axial fluid flow path extends from the radial fluid flow path through the polymer insert disk to create a communication path between the radial fluid flow path and the intermediate valve chamber.

13. In a method of flowing fluid through the high-conductance valve according to claim 1, pumping fluid through the valve body, the valve body having a valve chamber, at least one first fluid conduit opening communicating with the valve chamber, at least one second fluid conduit opening communicating with the valve chamber, and at least a pair of adjacent orifice ridge portions, the at least a pair of adjacent orifice ridge portions extending from the valve body into the valve chamber and defining an intermediate valve chamber portion therebetween; using a valve actuator to move a control plate body within the valve body, the control plate body being formed as a circular disk having a flat side and an opposite side facing the flat side, the flat side having a continuous, unbroken flat portion for blocking the flow of fluid within the valve; flowing the fluid through a plurality of radial fluid flow paths, the radial fluid flow paths being formed within the control plate body and terminating in a counterbore of the control plate body; flowing the fluid through a plurality of axial fluid flow paths, the axial fluid flow paths being formed within the control plate body; wherein the radial fluid flow paths provide communication from the counterbore to the circumferential portion of the counterbore, the axial fluid flow paths provide communication with the intermediate valve chamber portion, and the intermediate valve chamber portion communicates with the fluid conduit.

14. The method according to claim 13, wherein the axial fluid flow path extends through the control plate body to create a communication path between the intermediate valve chamber portion and the upper valve chamber portion of the high-conductance valve.

15. The method according to claim 13, wherein the axial fluid flow path extends from the radial fluid flow path through the control plate body to create a communication path between the radial fluid flow path and the intermediate valve chamber.

16. The method according to claim 13, wherein the intermediate valve chamber portion is a second intermediate valve chamber of the high-conductance valve.

Images