Pad Stock Polishing Device

Abstract

To provide a pad original fabric polishing device capable of highly accurately polishing a pad original fabric.SOLUTION: The pad original fabric polishing device comprises: a rubber roll 122 formed into a cylindrical shape to rotate about a first axis O1; a polishing roll 125 rotated about a second axis O2 to polish a pad original fabric S cooperatively with the rubber roll 122; first tension application means 150 disposed on the rear side of the polishing roll 125 in a pad original fabric conveying direction to apply, to the pad original fabric S, tenson directed from a polishing region in which the pad original fabric S is polished by the polishing roll 125 toward the conveying-direction rear side; and second tension application means 160 for applying tension directed from the polishing region toward the conveying-direction front side to the pad original fabric S.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a pad stock polishing apparatus capable of polishing a pad stock with high precision and efficiency.

Background Art

[0002] As is well known, in a substrate polishing apparatus for polishing a substrate such as a wafer, the substrate is widely polished by pressing and relatively moving the substrate against a polishing pad adhered to a surface plate (see, for example, Patent Document 1).

[0003] The polishing pad used in such substrate polishing is manufactured by cutting a pad stock, and it is necessary to ensure high flatness. Therefore, it is necessary to polish the pad stock with high precision.

[0004] Therefore, various polishing apparatuses for polishing a pad stock with high precision have been disclosed (see, for example, Patent Document 2).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, in order to polish a substrate such as a wafer with higher precision, it is desired to manufacture a pad stock with higher precision.

[0007] In view of the above circumstances, an object of the present invention is to provide a pad stock polishing apparatus capable of polishing a pad stock with high precision.

Means for Solving the Problems

[0008] To solve the above problems, the present invention proposes the following means. (1) One aspect of the pad stock polishing apparatus of the present invention includes a feed roll formed in a cylindrical shape and rotatably supported around a first axis, a polishing roll formed in a cylindrical shape and rotatably supported around a second axis parallel to the first axis, and cooperating with the feed roll to polish the pad stock, a feed roll drive unit that rotationally drives the feed roll, a polishing roll drive unit that rotationally drives the polishing roll, a first tension applying means disposed on the rear side of the polishing roll in the pad stock conveying direction in which the pad stock is conveyed, and applying a tensile force to the pad stock from the polishing area where the pad stock is polished by the polishing roll toward the rear side in the pad stock conveying direction, and a second tension applying means disposed on the front side of the polishing roll in the pad stock conveying direction, and applying a tensile force to the pad stock from the polishing area toward the front side in the conveying direction.

[0009] According to the pad stock polishing apparatus of the present invention, since it includes a feed roll rotatably supported around a first axis, a polishing roll supported by a second axis and cooperating with the feed roll to polish the pad stock, a feed roll drive unit that rotationally drives the feed roll, and a polishing roll drive unit that rotationally drives the polishing roll, the pad stock sent to the feed roll is polished by the cooperation of the polishing roll rotatably supported around the second axis and the feed roll in the polishing area while the pad stock is moving on the feed roll. Specifically, a predetermined gap (interval, gap) is formed between the feed roll and the polishing roll, and the pad stock is polished by passing the pad stock through this gap (interval). In addition, since the pad stock polishing apparatus includes the first tension applying means, a tensile force is applied from the polishing area where the polishing roll is polishing the pad stock toward the rear side in the pad stock conveying direction, so that the pad stock is pulled toward the rear side of the polishing area, and it is possible to suppress the occurrence of a difference in elongation and contraction in the pad stock in the polishing area, and suppress the occurrence of variations in the thickness of the pad stock. In addition, since the pad stock polishing apparatus is provided with the second tensile force applying means, a tensile force directed forward in the pad stock conveying direction is applied to the pad stock, and a uniform tensile force is applied to the pad stock to be polished. Therefore, the pad stock can be polished to a uniform thickness. As a result, the pad stock can be polished with high precision (uniform thickness). Here, the polishing area is used to conceptually indicate the area where the polishing roll polishes the pad stock.

[0010] (2) In the pad stock polishing apparatus according to (1) above, the first tensile force applying means may include a first tensile force detecting means for detecting a tensile force generated in the pad stock toward the rear side in the pad stock conveying direction from the polishing area, and a first tensile force adjusting means for adjusting the tensile force generated in the pad stock toward the rear side in the pad stock conveying direction to a predetermined range based on the tensile force detected by the first tensile force detecting means.

[0011] According to the pad stock polishing apparatus of the present invention, the first tensile force applying means includes the first tensile force detecting means and the first tensile force adjusting means. The first tensile force detecting means detects the tensile force generated in the pad stock toward the rear side in the conveying direction, and based on the tensile force detected by the first tensile force detecting means, the first tensile force adjusting means adjusts the tensile force generated in the pad stock from the polishing area toward the rear side in the conveying direction to be within a predetermined range. Therefore, it is possible to suppress the occurrence of variations in the thickness of the pad stock conveyed to the feed roll and stabilize the thickness of the pad stock. As a result, it is possible to manufacture a high-quality polishing pad by polishing the pad stock with a stable thickness.

[0012] (3) The pad stock polishing apparatus according to the above (1) or (2) may include a second tensile force adjusting means for adjusting the tensile force generated in the pad stock in the forward direction in the pad stock conveyance direction to a predetermined range based on the tensile force detected by the second tensile force detecting means, and a second tensile force detecting means for detecting the tensile force generated in the pad stock in the forward direction in the pad stock conveyance direction from the polishing region.

[0013] According to the pad stock polishing apparatus of the present invention, the second tensile force applying means includes a second tensile force detecting means and a second tensile force adjusting means. The second tensile force detecting means detects the tensile force generated in the pad stock in the forward direction in the conveyance direction from the polishing region, and the second tensile force adjusting means adjusts the tensile force generated in the pad stock in the forward direction in the pad stock conveyance direction based on this tensile force so that it falls within a predetermined range. Therefore, it is possible to suppress variations in the thickness of the pad stock conveyed to the feed roll and stabilize the thickness of the pad stock. As a result, it is possible to polish the pad stock with a stable thickness and manufacture a high-quality polishing pad.

Effects of the Invention

[0014] According to the pad stock polishing apparatus according to the present invention, the pad stock can be polished with high precision.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5A

Figure 5B

Figure 6

Figure 7A

Figure 7B

Figure 8

Figure 9

Embodiments for Carrying Out the Invention

[0016] <First Embodiment> Hereinafter, with reference to FIGS. 1 to 8, the first embodiment of the present invention will be described. FIG. 1 is a side view for explaining the schematic configuration of the roll layout of the pad stock polishing apparatus according to the first embodiment of the present invention.

[0017] In the figure, reference numeral 100 denotes a pad base fabric polishing apparatus, reference numeral 110 denotes a pad base fabric feeding machine (pad base fabric feeding section), reference numeral 120 denotes the pad base fabric polishing apparatus main body, reference numeral 122 denotes a rubber roll (feed roll), reference numeral 125 denotes a polishing roll, reference numeral 150 denotes a first tensile force applying means, reference numeral 160 denotes a second tensile force applying means, and reference symbol S denotes the pad base fabric.

[0018] As shown in FIG. 1, for example, the pad base fabric polishing apparatus 100 includes a pad base fabric feeding machine (pad base fabric feeding section) 110, a pad base fabric polishing apparatus main body 120, a first tensile force applying means 150, a second tensile force applying means 160, and a control unit (not shown).

[0019] Also, the pad base fabric S is conveyed, for example, in the order of the pad base fabric feeding machine (pad base fabric feeding section) 110, the first tensile force applying means 150, the pad base fabric polishing apparatus main body 120, and the second tensile force applying means 160.

[0020] As shown in FIGS. 1 and 2, for example, the pad base fabric polishing apparatus main body 120 includes a rubber roll (feed roll) 122, a polishing roll 125, a rubber roll drive motor 122M for rotationally driving the rubber roll (feed roll) 122, a polishing roll drive motor (polishing roll drive section) 125M for rotationally driving the polishing roll 125, a temperature control fluid supply section (not shown), a brush unit 130, and a roll interval adjustment mechanism (not shown).

[0021] In this embodiment, the first tensile force applying means 150 is disposed in the pad base fabric feeding machine 110. Specifically, it is disposed between the pad base fabric feeding machine (pad base fabric feeding section) 110 and the pad base fabric polishing apparatus main body 120. And the first tensile force applying means 150 is configured to apply a tensile force to the pad base fabric S before polishing, which is directed rearward in the base fabric conveyance direction from the polishing region.

[0022] In this embodiment, the second tensile force applying means 160 is disposed on the front side of the pad web grinding apparatus main body 120 in the pad web conveying direction. The second tensile force applying means 160 is configured to apply a tensile force to the pad web S after polishing in the forward direction of the pad web conveying direction. Details of the first tensile force applying means 150 and the second tensile force applying means 160 will be described later.

[0023] As shown in FIG. 1, the pad web pay - out machine (pad web pay - out section) 110 includes, for example, a raw web roll 111 around which the pad web S is wound, a raw web roll support base (not shown) that supports the raw web roll 111, a peeling roll 114 that peels the pad web S from the raw web roll 111, a dancing roll 116, and a conveying roll 117.

[0024] The pad web pay - out machine 110 is configured to send the pad web S peeled from the raw web roll 111 by the peeling roll 114 to the pad web grinding apparatus main body 120 via the dancing roll 116 and the conveying roll 117.

[0025] The raw web roll 111 has the pad web S wound around the raw web roll shaft 111J and is formed in a cylindrical shape. The pad web S is drawn out from the upper part of the outer peripheral surface of the raw web roll 111.

[0026] As shown in FIG. 1, for example, the peeling roll 114 includes a driving roll 114A and a pinch roll 114B that is disposed opposite to the driving roll 114A and applies a gripping force by its own weight. The driving roll 114A and the pinch roll 114B sandwich the pad web S, and when the driving roll 114A rotates, the pad web S is drawn out from the raw web roll 111. The conveying roll 117 is constituted by, for example, a driving roll that is rotationally driven by a motor (not shown). The conveying roll 117 is rotationally driven to feed out the pad stock S toward the pad stock grinding apparatus main body 120.

[0027] As shown in FIG. 1, the dancing roll 116 is disposed between the peeling roll 114 and the conveying roll 117 and is movable in the vertical direction as indicated by the arrow F. When the length of the pad stock S changes between the peeling roll 114 and the conveying roll 117 due to the vertical movement of the dancing roll 116, the generation of deflection in the pad stock S is suppressed.

[0028] The rubber roll (feed roll) 122 is formed in a cylindrical shape and is supported by the grinding apparatus main body frame 121 so as to be rotatable around the first axis O1. The grinding roll 125 is formed in a cylindrical shape and is supported by the grinding apparatus main body frame 121 so as to be rotatable around the second axis O2.

[0029] The grinding apparatus main body frame 121 includes, for example, a pair of frame bodies 121L and 121R on the left and right that are formed in a substantially rectangular shape in a side view and are erected upward from the floor surface. Bearing blocks 122J that support the left and right ends of the rubber roll (feed roll) 122 and bearing blocks 125J that support the left and right ends of the grinding roll 125 are provided on the left and right frame bodies 121L and 121R.

[0030] The first axis O1 and the second axis O2 are arranged in parallel, and the rubber roll (feed roll) 122 and the grinding roll 125 can adjust the axial distance between the first axis O1 and the second axis O2 by a roll interval adjusting mechanism (not shown).

[0031] Next, with reference to FIG. 2, the rubber roll (feed roll) 122 will be described. FIG. 2 is a partial cross-sectional view taken along the pad stock conveying direction for explaining an example of the schematic configuration of the rubber roll 122 according to the first embodiment.

[0032] As shown in FIG. 2, the rubber roll (feed roll) 122 includes, for example, a metal roll body 122A formed in a cylindrical shape centered on the first axis O1, a rubber lining 122B formed on the outer peripheral surface of the roll body 122A, and rotating shafts 122P formed at both the left and right ends of the roll body 122A.

[0033] Also, as shown in FIG. 2, the rubber roll (feed roll) 122 has left and right rotating shafts 122P rotatably supported by a bearing block 122J, and is connected to a rubber roll drive motor (feed roll drive unit) 122M via a transmission member (for example, a timing belt) 122V. And the rubber roll 122 is configured to be rotationally driven by the rubber roll drive motor 122M.

[0034] The rubber roll (feed roll) 122 is also configured to convey the pad web S sent from the pad web pay - out machine (pad web pay - out unit) 110 forward in the pad web conveyance direction. Specifically, the outer peripheral surface of the rubber lining 122B comes into close contact with the pad web S to grip and convey the pad web S, hold the pad web S during polishing, and feed out the polished pad web S.

[0035] Next, referring to FIG. 3, the polishing roll 125 will be described. FIG. 3 is a partial cross - sectional view taken along the pad web conveyance direction for explaining an example of the schematic configuration of the polishing roll according to the first embodiment. As shown in FIG. 3, the polishing roll 125 includes, for example, a roll body 126 formed in a cylindrical shape centered on the second axis O2, a rotating shaft 127 passing through the inside of the roll body 126 and extending toward the left side (first end side) L and the right side (second end side) R of the roll body 126, an end member 128L disposed at the end of the left side L of the roll body 126, an end member 128R disposed at the end of the right side (second end side) R of the roll body 126, and a screw - shaped member 129. In addition, for example, sandpaper (not shown) can be attached (e.g., adhered) to the surface of the body portion 126.

[0036] The rotating shaft 127 passes through the end members 128L and 128R and extends to the left and right of the roll body portion 126. Also, the rotating shaft 127 has a rotating shaft main body 127A formed with a larger diameter than both end portions within the roll body portion 126. The screw-shaped member 129 is formed in a spiral shape and is disposed along the outer peripheral surface of the rotating shaft main body 127A.

[0037] Inside the polishing roll 125, as shown in FIG. 3, a spiral temperature control fluid passage 125P is formed along the screw-shaped member 129. Specifically, the temperature control fluid passage 125P is formed in a spiral shape that swirls around the second axis O2 between the roll body portion 126 and the rotating shaft main body 127A within the polishing roll 125.

[0038] Also, the polishing roll 125 is rotatably supported by a bearing block 125J with the rotating shaft 127, and is connected to a polishing roll drive motor (polishing roll drive unit) 125M via a transmission member (e.g., V-belt) 125V. And the polishing roll 125 is rotationally driven by a polishing roll drive motor (polishing roll drive unit) 125M.

[0039] Also, as shown in FIG. 3, a temperature control fluid inlet hole 127D and a temperature control fluid outlet hole 127E are respectively formed between the end members 128L and 128R in the direction of the second axis O2 of the rotating shaft 127.

[0040] Then, the temperature control fluid flowing in from the temperature control fluid inlet hole 127D flows through the temperature control fluid passage 125P and flows out from the temperature control fluid outlet hole 127E. While the temperature control fluid flows through the temperature control fluid passage 125P, it exchanges heat with the roll body portion 126 to adjust the temperature of the outer peripheral surface of the roll body portion 126. And the temperature control fluid flowing out from the temperature control fluid outlet hole 127E is discharged outside the system. Note that as the temperature control fluid supply means, the temperature control fluid is not limited to the form of discharging it outside the system. For example, various well-known temperature control fluid supply units (not shown), such as a form of refluxing the temperature control fluid, can be used.

[0041] In this way, by flowing the temperature control fluid (for example, cooling water) through the temperature control fluid passage 125P from the temperature control fluid supply section (not shown), the heat generated by the polishing roll 125 when polishing the pad web S can be reduced and adjusted to a predetermined range.

[0042] The rubber roll (feed roll) 122 and the polishing roll 125 can be adjusted in the axial distance by a roll interval adjustment mechanism (not shown), for example, as described above.

[0043] As shown in FIG. 1, the brush unit 130 includes, for example, a brush 131 for the rubber roll, a brush 135 for the pad web, a drive motor 130M, and timing belts (transmission members) 130V and 135V that transmit the rotation of the drive motor 130M to the brush 131 for the rubber roll and the brush 135 for the pad web.

[0044] The brush 131 for the rubber roll extends along an axis arranged parallel to the first axis O1, for example, and a sheet-like member is wound around the outer peripheral surface, and it is a shaft member with a large number of hairs implanted in this sheet-like member. And the brush 131 for the rubber roll is configured such that a large number of hairs extend radially by rotating. Note that as the hairs used for the brush 131 for the rubber roll, it is preferable to use hairs that are weak and soft in order to suppress dust removal and damage to the rubber roll 122. Specifically, for example, it is more preferable to use soft goat hairs.

[0045] The brush 135 for the pad stock is, for example, a shaft member having a large number of bristles implanted in a sheet-like member wound around an outer peripheral surface, extending along an axis arranged parallel to the first axis O1 and the axis of the brush 131 for the rubber roll. The brush 135 for the pad stock is configured such that a large number of bristles radially extend by rotation. As the bristles used for the brush 135 for the pad stock, for example, horsehair is suitable for dust removal and static elimination.

[0046] The drive motor 130M is connected to the brush 131 for the rubber roll and the brush 135 for the pad stock by transmission means 130V, 135V such as V-belts, for example. And it is configured to rotationally drive the brush 131 for the rubber roll and the brush 135 for the pad stock.

[0047] Next, with reference to FIGS. 1, 4, 5A to 6B, the first tensile force applying means 150 will be described. In the figure, reference numeral 151 indicates the first tensile force detecting means, and reference numeral 155 indicates the first tensile force adjusting means. In this embodiment, the first tensile force applying means 150 includes, as shown in FIGS. 1 and 4, for example, a first tensile force detecting means 151 that detects the tensile force of the pad stock S, and a first tensile force adjusting means 155 that adjusts the tensile force of the pad stock S.

[0048] As shown in FIGS. 4 and 5A, the first tensile force detecting means 151 includes, for example, a first guide roll 152A, a second guide roll 152B, a third guide roll 152C, a bearing unit 153 that rotatably supports these first to third guide rolls 152A, 152B, 152C, and a load cell 154 disposed below the bearing unit 153 that supports the second guide roll 152B.

[0049] The first guide roll 152A, the second guide roll 152B, and the third guide roll 152C are arranged in this order along the conveyance direction of the pad stock S. Further, as shown in FIG. 5B, the first to third guide rolls 152A, 152B, and 152C are formed wider than the pad raw fabric S. In FIG. 5B, the gaps between the first to third guide rolls 152A, 152B, and 152C and the pad raw fabric S are emphasized and illustrated.

[0050] For example, the first guide roll 152A contacts the pad raw fabric S with the lateral outer peripheral surface located on the side opposite to the second guide roll 152B, the second guide roll 152B contacts the pad raw fabric S with the upper outer peripheral surface, and the third guide roll 152C contacts the pad raw fabric S with the lower outer peripheral surface.

[0051] As a result, the second guide roll 152B is pressed downward from above by the pad raw fabric S. And the load added by the pad raw fabric S pressing the second guide roll 152B is added to the load cell 154 via the bearing unit 153. And the load measurement signal generated by the load added to the load cell 154 is sent to a control unit (not shown). And in the control unit (not shown), the tensile force acting along the conveyance direction of the pad raw fabric S is calculated.

[0052] When the direction (vector) of the load applied by the pad raw fabric S to the second guide roll 152B is inclined with respect to the normal of the load receiving surface of the load cell 154, the control unit (not shown) is configured to correct the tensile force of the pad raw fabric S.

[0053] As shown in FIGS. 6, 7A, and 7B, the first tensile force adjusting means 155 includes, for example, a conveyance roll (drive roll) 117, a pinch roll 156 that is arranged opposite to the conveyance roll 117 and imparts a gripping force by its own weight, and a pinch roll pedestal 157 on which the pinch roll 156 can be temporarily placed.

[0054] When setting the pad stock S to the pad stock polishing apparatus 100 through the pinch roll 156, for example, between the pinch roll 156 and the conveying roll 117, as shown in FIG. 7A, the pinch roll 156 is temporarily placed in the arc-shaped recess of the pinch roll pedestal 157, the pinch roll 156 is separated from the conveying roll 117, and a gap is formed between the pinch roll 156 and the conveying roll 117.

[0055] Also, when the pad stock S has passed through between the conveying roll 117 and the pinch roll 156, as shown in FIG. 7B, the pinch roll 156 is moved from the pinch roll pedestal 157 toward the conveying roll 117 so that the pad stock S is sandwiched between the pinch roll 156 and the conveying roll 117. Then, the pinch roll 156, by its own weight, cooperates with the conveying roll 117 to apply a gripping force to the pad stock S.

[0056] As a result, when the feeding speed of the pad stock S changes, the tensile force acting on the pad stock S in the rearward conveying direction is adjusted within a predetermined range. In addition, the change in the length of the pad stock S that occurs on the rear side in the conveying direction than the conveying roll (drive roll) 117 caused by the change in the feeding speed of the pad stock S by the first tensile force adjusting means 155 is absorbed by the dancing roll 116 moving in the vertical direction, and the occurrence of deflection in the pad stock S is suppressed.

[0057] Next, with reference to FIGS. 1, 8, and 9, the second tensile force applying means 160 will be described. In the figures, reference numeral 161 indicates the second tensile force detecting means, and reference numeral 165 indicates the second tensile force adjusting means. In this embodiment, the second tensile force applying means 160 includes, as shown in FIGS. 1 and 8, for example, a second tensile force detecting means 161 for detecting the tensile force of the pad stock S and a second tensile force adjusting means 165 for adjusting the tensile force of the pad stock S.

[0058] As shown in FIG. 9, the second tensile force detection means 161 includes, for example, a first guide roll 162A, a second guide roll 162B, a third guide roll 162C, a bearing unit 163 that rotatably supports these first to third guide rolls 162A, 162B, 162C, and a load cell 164 disposed below the bearing unit 163 that supports the second guide roll 162B.

[0059] Further, the first guide roll 162A, the second guide roll 162B, and the third guide roll 162C are arranged in this order along the conveyance direction of the pad web S. Further, the first to third guide rolls 162A, 162B, 162C are formed wider than the pad web S.

[0060] For example, the first guide roll 162A is in contact with the pad web S on the lower side of the outer peripheral surface, the second guide roll 162B is in contact with the pad web S on the upper side of the outer peripheral surface, and the third guide roll 162C is in contact with the pad web S on the lower side of the outer peripheral surface.

[0061] As a result, the second guide roll 162B is pressed downward from above by the pad web S. Further, the load applied to the second guide roll 162B by the pad web S is applied to the load cell 164 via the bearing unit 163. Then, the load measurement signal generated by the load applied to the load cell 164 is sent to a control unit (not shown). And in the control unit (not shown), the tensile force acting along the conveyance direction of the pad web S is calculated.

[0062] When the direction (vector) of the load applied by the pad web S to the second guide roll 162B is inclined with respect to the normal line of the load receiving surface of the load cell 164, the tensile force of the pad web S is corrected in the same manner as in the case of the first tensile force detection means 151.

[0063] As shown in FIGS. 1 and 8, the second tensile force adjusting means 165 includes, for example, a conveying roll (driving roll) 166, a pinch roll 167 that is disposed opposite to the conveying roll 166 and applies a gripping force by its own weight, and a pinch roll lever (not shown) that sets the position of the pinch roll 167 with respect to the conveying roll 166.

[0064] And, similar to the case of the first tensile force adjusting means 155, for example, when the posture of the pinch roll lever (not shown) changes and the pinch roll 166 comes into contact with the conveying roll 117, the pinch roll 167 and the conveying roll 166 are configured to cooperate to sandwich the pad stock S.

[0065] As a result, the feeding speed of the pad stock S changes, and the tensile force acting on the pad stock S in the rearward conveyance direction is adjusted within a predetermined range.

[0066] The control unit (not shown) is electrically connected to, for example, a pad stock feeding machine (pad stock feeding unit) 110, a pad stock polishing apparatus main body 120, a brush unit 130, a first tensile force applying means 150, and a second tensile force applying means 160. And the control unit (not shown) controls these in synchronization.

[0067] First, the control unit (not shown) causes the pad stock feeding machine (pad stock feeding unit) 110 to feed the pad stock S from the stock roll 111 and convey it to the pad stock polishing apparatus main body 120. At this time, the control unit (not shown) adjusts the feeding amount of the pad stock S according to the height of the dancing roll 116. Specifically, when the dancing roll 116 is higher than the set position, the rotation speed of the peeling roll 114 is increased, and when the dancing roll 116 is lower than the set position, the rotation speed of the peeling roll 114 is decreased.

[0068] Then, while the pad stock S fed out from the raw stock unwinder (raw stock unwinding section) 110 is being conveyed by the rubber roll (feed roll) 122, the pad stock S is polished by the polishing roll 125.

[0069] Specifically, the control unit (not shown) rotates the polishing roll 125 arranged at a predetermined interval with respect to the rubber roll 122, thereby uniformly polishing the surface of the pad stock S being conveyed by the rubber roll 122. At this time, the portion where the polishing roll 125 contacts the surface of the pad stock S is defined as the polishing region where the pad stock S is polished.

[0070] Further, the control unit (not shown) rotationally drives the brush unit 130 to remove dust from the rubber roll 122 and the polished pad stock S. The polished pad stock S is sent to a pad stock winder (not shown) via, for example, a dust collecting device (not shown). Moreover, the control unit (not shown) adjusts so that the pad stock S does not bend by the dust collecting device, and causes the pad stock S sent by the pad stock winder to be wound around a winding roll (not shown).

[0071] Also, the control unit (not shown) applies a tensile force within a set predetermined range to the pad stock S sent to the pad stock polishing apparatus main body 120 by the first tensile force applying means 150 in the direction toward the rear side in the conveyance direction.

[0072] Specifically, the control unit (not shown) calculates the tensile force acting along the conveyance direction of the pad stock S based on the load measurement signal (load measured by the load cell 154) sent from the first tensile force detection means 151.

[0073] In addition, when the direction (vector) of the load applied by the pad stock S to the second guide roll 152B is inclined with respect to the normal line of the load receiving surface of the load cell 154, the inclination (intersection angle) between the direction of the load and the normal line of the load receiving surface is clarified, and the influence due to this inclination is corrected when calculating the tensile force generated in the pad stock S.

[0074] Then, a control unit (not shown) adjusts the rotational speed of a conveyance roll (drive roll) 117 so that the tensile force generated in the pad base fabric S is within a predetermined range on the rear side in the conveyance direction of the pad base fabric, based on the tensile force of the pad base fabric S measured by the first tensile force detection means 151. Specifically, for example, when the tensile force is low, the rotational speed of the conveyance roll (drive roll) 117 is decreased, and when the tensile force is high, the rotational speed of the conveyance roll (drive roll) 117 is increased. In addition, in the adjustment of the rotational speed of the conveyance roll (drive roll) 117, for example, it is calculated by PID control.

[0075] Further, the control unit (not shown) applies a tensile force within a set predetermined range to the pad base fabric S polished by the pad base fabric polishing apparatus main body 120 by the second tensile force applying means 160 toward the front side in the conveyance direction.

[0076] Specifically, the control unit (not shown) calculates the tensile force acting along the conveyance direction of the pad base fabric S based on the load measurement signal (load measured by the load cell 164) sent from the second tensile force detection means 161. At this time, similar to the case of the first tensile force detection means 151, the tensile force generated in the pad base fabric S is corrected.

[0077] Then, the control unit (not shown) increases or decreases and adjusts the rotational speed of the conveyance roll (drive roll) 166 so that the tensile force generated in the pad base fabric S is within a predetermined range on the front side in the conveyance direction of the pad base fabric, based on the tensile force of the pad base fabric S measured by the second tensile force detection means 161. Specifically, for example, when the tensile force is low, the rotational speed of the conveyance roll (drive roll) 166 is increased, and when the tensile force is high, the rotational speed of the conveyance roll (drive roll) 166 is decreased. In addition, in the adjustment of the rotational speed of the conveyance roll (drive roll) 166, for example, it is calculated by PID control.

[0078] According to the pad stock polishing apparatus 100 according to the first embodiment, the first tensile force detecting means 151 detects the tensile force generated in the pad stock, and based on the tensile force detected by the first tensile force detecting means 151, the first tensile force adjusting means 155 adjusts the tensile force acting on the pad stock S from the polishing region toward the rear side in the conveying direction of the pad stock S to be within a predetermined range. Therefore, the occurrence of a difference in elongation and contraction in the pad stock S in the polishing region is suppressed, and the variation in the thickness of the pad stock S is suppressed. Further, the second tensile force detecting means 161 detects the tensile force generated in the pad stock on the front side in the pad stock conveying direction, and a tensile force acting on the pad stock S toward the front side in the pad stock conveying direction is applied to the pad stock S, so that an equal tensile force is applied to the pad stock S before and after polishing. Therefore, the pad stock S can be polished uniformly. Specifically, since the second tensile force applying means 160 adjusts the tensile force acting on the pad stock S toward the front side in the pad stock conveying direction to be within a predetermined range, the occurrence of variation in the thickness of the polished pad stock S is suppressed, and the thickness of the pad stock S can be stabilized. As a result, the pad stock S can be polished with a stable thickness to produce a high-quality polishing pad. Also, for example, when the pad stock is replaced or the like, it can be adjusted to a stable thickness efficiently in a short time.

[0079] Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the invention. That is, the configuration of the pad stock polishing apparatus can be arbitrarily set within the scope of the object of the present invention.

[0080] For example, in the above embodiment, the case where the first tensile force applying means 150 includes the first tensile force detecting means 151 and the first tensile force adjusting means 155, and the second tensile force applying means 160 includes the second tensile force detecting means 161 and the second tensile force adjusting means 1655 has been described. However, the configurations of the first tensile force applying means 150 and the second tensile force applying means 160 can be arbitrarily set. For example, without including the first tensile force detecting means 151 and the second tensile force detecting means 161, it may be configured to apply tensile forces on the rear side and the front side in the conveying direction of the pad base fabric. Also, the positions where the first tensile force applying means 150 and the second tensile force applying means 160 are arranged may be arbitrarily set.

[0081] In the above embodiment, the case where the first tensile force detecting means 151 in the first tensile force applying means 150 includes the first to third guide rolls 152A, 152B, 152C that send the pad base fabric S, the bearing unit 153, and the load cell 154, and measures the tensile force by detecting the load applied to the load cell 154 has been described. However, the tensile force may be measured by other measuring methods. The same applies to the second tensile force detecting means 161 in the second tensile force applying means 160.

[0082] In the above embodiment, the case where the first tensile force adjusting means 155 in the first tensile force applying means 150 adjusts the tensile force acting on the buff base fabric S by changing the conveying speed of the pad base fabric S by sandwiching the pad base fabric S with the pinch roll 156 and the conveying roll (driving roll) 117 cooperating with each other has been described. However, the tensile force generated in the buff base fabric S may be adjusted by other means. The same applies to the second tensile force adjusting means 165 in the second tensile force applying means 160.

[0083] In the above embodiment, it may also be configured such that a temperature control fluid is circulated through a temperature control fluid passage (not shown) formed in the polishing roll 125, or the temperature of the polishing roll 125 can be adjusted using a heater or the like (not shown).

[0084] In addition, in the above-described embodiment, the case where the feed roll is the rubber roll 122 having a rubber lining formed on the outer peripheral surface has been described, but the feed roll may have other configurations.

[0085] In addition, in the above-described embodiment, the case where the polishing roll 125 is configured by attaching a sandpaper (sheet-shaped abrasive) to the outer peripheral surface has been described. However, for example, a configuration may be adopted in which diamond abrasive grains or other abrasive grains are directly formed on the outer peripheral surface of the roll by means such as electrodeposition.

Industrial Applicability

[0086] According to the pad stock polishing apparatus according to the present invention, since the pad stock can be polished with high precision, it is industrially applicable.

Explanation of Signs

[0087] O1 First axis line (feed roll) O2 Second axis line (polishing roll) S Pad stock 100 Pad stock polishing apparatus 110 Stock feeder (stock feeding section) 111 Stock roll 120 Pad stock polishing apparatus main body 122M Rubber roll drive motor (feed roll drive section) 125 Polishing roll 125M Polishing roll drive motor (polishing roll drive section) 130 Brush unit 150 First tensile force applying means 151 First tensile force detecting means 155 First tensile force adjusting means 160 Second tensile force applying means 161 Second tensile force detecting means 165 Second tensile force adjusting means

Claims

【Claim 1】 A feed roll formed in a cylindrical shape and rotatably supported around a first axis; A polishing roll formed in a cylindrical shape, rotatably supported around a second axis parallel to the first axis, and cooperating with the feed roll to polish a pad web which is a raw material of a polishing pad; A feed roll driving unit that rotationally drives the feed roll; A polishing roll driving unit that rotationally drives the polishing roll; First tension applying means disposed on the rear side of the polishing roll in the pad web conveying direction in which the pad web is conveyed, and applying a tensile force to the pad web from the polishing area where the pad web is polished by the polishing roll toward the rear side in the pad web conveying direction; Second tension applying means disposed on the front side of the polishing roll in the pad web conveying direction, and applying a tensile force to the pad web from the polishing area toward the front side in the conveying direction; Comprising; The first tension applying means includes: First tension detecting means for detecting a tensile force generated in the pad web from the polishing area toward the rear side in the pad web conveying direction; First tension adjusting means for adjusting a tensile force generated in the pad web toward the rear side in the pad web conveying direction based on the tensile force detected by the first tension detecting means; The second tension applying means includes: Second tension detecting means for detecting a tensile force generated in the pad web from the polishing area toward the front side in the pad web conveying direction; Second tension adjusting means for adjusting a tensile force generated in the pad web toward the front side in the pad web conveying direction based on the tensile force detected by the second tension detecting means, characterized in that it is a pad web polishing apparatus.

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